Utility model content
To solve the above-mentioned problems of the prior art, the utility model provide one kind can be improved three-dimensional imaging speed andStability reduces the optical 3-dimensional imaging system and optical 3-dimensional imaging method of additional aberrations.
In order to reach above-mentioned purpose of utility model, the utility model uses the following technical solution:
One side according to the present utility model provides a kind of optical 3-dimensional imaging system, comprising: laser light source and setsBe placed in the first spatial filter on the emitting light path of the laser light source, the first Digital Micromirror Device, second space filter,Scanning angle range amplifier, object lens, cylinder mirror, the second Digital Micromirror Device, optical splitter, third spatial filter, axial scanDevice and image acquiring device, the light beam of the laser light source outgoing is successively by first spatial filter, first numberCircular scanning diffraction light is formed after word micro mirror element, the circular scanning diffraction light is by the second space filter, describedBeing formed after scanning angle range amplifier, the object lens, the cylinder mirror, second Digital Micromirror Device has sample messageSample light, the sample light form two light beams after optical splitter light splitting, and described two light beams are empty by the thirdBetween be imaged on described image acquisition device after filter, the axial scan device.
Further, first spatial filter including the first lens, the second lens and is set to first lensWith the first diaphragm between second lens, second lens between the first diaphragm and the first Digital Micromirror Device,First diaphragm is located at the back focal plane of first lens, the back focal plane of first lens and second lensFront focal plane be overlapped, first lens be plano-convex lens or biconvex lens, second lens be plano-convex lens or biconvexLens.
Further, first Digital Micromirror Device includes the holographic graphic sequence to form circular scanning diffraction light.
Further, the second space filter includes the third lens, the 4th lens and is set to the third lensWith the second diaphragm between the 4th lens, the third lens between the second diaphragm and the first Digital Micromirror Device,Second diaphragm is located at the back focal plane of the third lens, the back focal plane of the 4th lens and the third lensFront focal plane be overlapped, the focal length of the third lens is identical with the focal length of the 4th lens, the third lens be plano-convexLens or biconvex lens, the 4th lens are plano-convex lens or biconvex lens.
Further, the scanning angle range amplifier includes the 5th lens and condenser, the 5th lens settingBetween the 4th lens and the condenser, the 5th lens are set at the back focal plane of the 4th lens, instituteThe back focal plane for stating the 5th lens is overlapped with the front focal plane of the condenser, and the 5th lens are plano-convex lens or lenticularMirror.
Further, the third spatial filter includes the 6th lens, the 7th lens and is set to the 6th lensWith the third diaphragm between the 7th lens, the 6th lens are between optical splitter and the 7th lens, the third lightDoor screen is located at the back focal plane of the 6th lens, the back focal plane of the 6th lens and the front focal plane of the 7th lensIt is overlapped, the 6th lens are plano-convex lens or biconvex lens, and the 7th lens are plano-convex lens or biconvex lens.
Further, the axial scan device includes the 8th lens, the 9th lens and is set to the 8th lens and instituteThe tenth lens between the 9th lens are stated, the 8th lens are between the 9th lens and third spatial filter, and describedTen lens are located at the back focal plane of the 8th lens, the back focal plane of the 8th lens and the preceding coke of the 9th lensPlane is overlapped, and the 8th lens are plano-convex lens or biconvex lens, and the 9th lens are plano-convex lens or biconvex lens.
Further, the tenth lens are zoom lens.
The utility model has the beneficial effects that
1, the utility model replaces existing scanning galvanometer to carry out circular scanning illumination by Digital Micromirror Device, can be improvedImage taking speed and stability reduce additional aberrations, greatly improve temporal and spatial stability.
2, further, axial scan module is added in the utility model, promotes longitudinal refractive index precision consistency, maximumDegree reduces the error of three-dimensional reconstruction index of refraction diagram.
Specific embodiment
Hereinafter, with reference to the accompanying drawings to detailed description the embodiments of the present invention.However, it is possible in many different formsImplement the utility model, and the utility model should not be construed as limited to the specific embodiment illustrated here.On the contrary,There is provided these embodiments is in order to explain the principles of the present invention and its practical application, to make the other technologies people of this fieldMember is it will be appreciated that the various embodiments of the utility model and the various modifications for being suitable for specific intended application.In the accompanying drawings, in order toFor the sake of clear, the shape and size of element can be exaggerated, and identical label will be used to indicate always it is the same or similarElement.
Term " first ", " second " etc. herein can be used to describe various elements although will be appreciated that, theseElement should not be limited by these terms.These terms are only used to distinguish an element with another element.
In following lens arrangement figure, for the ease of explaining, the thickness of lens, size and shape are slightly expandedGreatly.
Specifically, spherical surface or aspherical shape shown in the lens arrangement figure only show in an illustrative mannerOut.That is, spherical surface or the aspherical shape for being not limited to show.
Additionally, it should be noted that term " front focal plane " refers to focal plane of the lens towards the direction of incident beam,And term " back focal plane " refers to focal plane of the lens towards the direction of outgoing beam.
Fig. 1 is the structural schematic diagram of the optical 3-dimensional imaging system of embodiment one according to the present utility model；
Referring to Fig.1, optical 3-dimensional imaging system provided in this embodiment includes: laser light source 100, successively far from laser lightSource 100 and the first spatial filter 200 being set on the emitting light path of light source 100, the first Digital Micromirror Device D1, the second skyBetween filter 300, scanning angle range amplifier 400, object lens 500, cylinder mirror 600, the second Digital Micromirror Device D2, optical splitter700, third spatial filter 800, axial scan device 900 and image acquiring device A.The light beam that light source 100 is emitted successively passes throughCircular scanning diffraction light is formed after first spatial filter 200, the first Digital Micromirror Device D1, circular scanning diffraction light is by theShape after two spatial filters 300, scanning angle range amplifier 400, object lens 500, cylinder mirror 600, the second Digital Micromirror Device D2At the sample light with sample message, sample light forms two light beams after the light splitting of optical splitter 700, and two light beams pass through thirdIt is imaged on image acquiring device A after spatial filter 800, axial scan device 900.It is understood that the utility model is simultaneouslyIt is not limited to this, the optical 3-dimensional imaging system of embodiment according to the present utility model can also include other necessary components,The processor that is handled of data that such as image acquiring device A is obtained, the utility model to this with no restriction.
Sample to be tested S is placed between scanning angle range amplifier 400 and object lens 500.The light that laser light source 100 issuesBeam forms circular scanning after the first spatial filter 200, the first Digital Micromirror Device D1, second space filter 300 and spreads outPenetrate light.
Circular scanning diffraction light, which is scanned after angular range amplifier realizes light angle amplification, irradiates sample to be tested SThe sample light for carrying sample message is formed, sample light is incident to object lens 500, and sample light amplifies back reflection to cylinder through object lens 500Mirror 600, the sample light device 700 that is split again being emitted from cylinder mirror 600 are divided into two light beams i.e. signal light and reference light.
Optical splitter 700 in the present embodiment is grating, and sample light can be separated two diffracted beams i.e. signal light by gratingAnd reference light.Laser light source 100 in the present embodiment can be He-Ne Lasers, semiconductor laser and the optical-fiber laser of high stabilityDeng can improve the coherence for two light beams that optical splitter separates using laser light source to avoid halation, reduce spatial noiseInfluence.Image acquiring device A in the present embodiment is camera.
Specifically, the first spatial filter 200 includes the first lens 210, the second lens 220 and is set to the first lens210 and second the first diaphragm 230 between lens 220.Second lens 220 are located at the first diaphragm 230 and the first digital micromirror deviceBetween part D1, the first diaphragm 230 is located at the back focal plane of the first lens 210, and the back focal plane of the first lens 210 and second is thoroughlyThe front focal plane of mirror 220 is overlapped.In the present embodiment, the first lens 210, the second lens 220 can select plano-convex lens as neededOr biconvex lens.The collimated light of high s/n ratio can be obtained in incident beam after the filtering of the first diaphragm 230, that is, passes through the first lightThe beam quality factor M of late 230 filtered outgoing beams2Less than 1.1.The pore size of first diaphragm 230 is decided by laserThe focal length of the focal length and the second lens 220 of the spot size of light source 100 and the first lens 210.First lens 210 and second are saturatingThe focal length of mirror 220 is designed according to specifically situation.
The first Digital Micromirror Device D1, the first Digital Micromirror Device D1 is irradiated to by the outgoing beam of the second lens 220Generate circular scanning diffraction light.Digital Micromirror Device can be formed by millions of with the micro mirror of independent control switch state, willBinary picture is shown in the control realized on digital micro-mirror to each micro mirror.The hologram that numerical value calculates is a series of twoBinary value, the pixel of holographic image and the pixel of Digital Micromirror Device are corresponding, and holographic graphic sequence is loaded into digital micro-mirrorOn device, corresponding micro mirror in Digital Micromirror Device can control.Each pair hologram can form the illumination light of some angleBeam, several holograms can form the illuminating bundle of multiple angles.In the embodiments of the present invention, the first digital micromirror deviceThe holographic graphic sequence of part D1 load is to form the illumination diffracted beam pair of multiple angles to form circular scanning diffracted beamSample to be tested is scanned.Preferably, the hologram of the embodiments of the present invention is using LEE type hologram.
Specifically, second space filter 300 includes the third lens 310, the 4th lens 320 and is set to the third lens310 and the 4th the second diaphragm 330 between lens 320.The third lens 310 are located at the second diaphragm 330 and the first digital micromirror deviceBetween part D1, the second diaphragm 330 is located at the back focal plane of the third lens 310, and the back focal plane and third of the 4th lens 320 are saturatingThe front focal plane of mirror 310 is overlapped.In this embodiment, the focal length of the third lens 310 is identical as the focal length of the 4th lens 320, thirdLens 310 and the focal length of the 4th lens 320 are designed according to specifically situation.In the present embodiment, the third lens 310,Four lens 320 can according to need selection planoconvex lens or biconvex mirror.As a kind of embodiment of the utility model, the second lightDoor screen 330 is for selecting+1 grade of diffraction light.As a kind of embodiment of the utility model, the second diaphragm 330 includes central small holeWith the looping pit concentric with central small hole, pore size is decided by the spot size of light source and the focal length of the third lens 310.
In order to realize the amplification of the angle between circular scanning light beam and optical axis, the optical 3-dimensional imaging system of the present embodimentIt further include scanning angle range amplifier 400.Scanning angle range amplifier 400 is set to second space filter 300 and objectBetween mirror 500.In the present embodiment, scanning angle range amplifier 400 includes the 5th lens 410 and condenser 420.5th lens410 are set between the 4th lens 320 and condenser 420.5th lens 410 are set at the back focal plane of the 4th lens 320.The back focal plane of 5th lens 410 is overlapped with the front focal plane of condenser 420.The focal lengths of 5th lens 410 and condenser 420Focal length depends on the angle enlargement multiplying power of required circular scanning diffraction light, hole of the angle no more than object lens 500 after amplificationDiameter half-angle.
Specifically, the second Digital Micromirror Device D2 is provided between cylinder mirror 600 and optical splitter 700.Second digital micro-mirrorDevice D2 is used to keep the direction for the sample light being emitted from cylinder mirror 600 constant.Specifically, the second Digital Micromirror Device D2 and firstDigital Micromirror Device D1 keeps synchronizing.That is the second Digital Micromirror Device D2 is loaded with synchronous with the first Digital Micromirror Device D1 holdingRelevant holographic graphic sequence, and at the same time work.
Specifically, third spatial filter 800 includes the 6th lens 810, the 7th lens 820 and is set to the 6th lens810 and the 7th third diaphragm 830 between lens 820.6th lens 810 are between optical splitter 700 and the 7th lens 820.Third diaphragm 830 is located at the back focal plane of the 6th lens 810.Before the back focal plane and the 7th lens 820 of 6th lens 810Focal plane is overlapped.In the present embodiment, the focal length of the focal length of the 6th lens 810, the 7th lens 820 is according to the progress of specifically situationDesign.In the present embodiment, the 6th lens 810, the 7th lens 820 can according to need selection planoconvex lens or biconvex mirror.MakeFor a kind of embodiment of the utility model, third diaphragm 830 is used to include two holes, a macropore and an aperture.By+ 1 grade of diffraction light in the outgoing beam of optical splitter is used as reference light after pin-hole filter-ing, and 0 grade of diffraction light passes through macropore completelyIt is used as signal light afterwards.Macropore is to guarantee that signal light intactly passes through and only passes through signal light.Aperture is played to ginsengExamine the effect that light is filtered.The aperture of aperture depends on the size of the hot spot of+1 grade of diffraction light after optical splitter, macroporeAperture depend on 0 grade of diffraction light after optical splitter hot spot size.
Specifically, axial scan device 900 include the 8th lens 910, the 9th lens 920 and be set to the 8th lens 910 withThe tenth lens 930 between 9th lens 920.8th lens 910 are located at the 9th lens 920 and third spatial filterBetween 800.Tenth lens 930 are located at the back focal plane of the 8th lens 910.The back focal plane of 8th lens 910 and the 9th is thoroughlyThe front focal plane of mirror 920 is overlapped.By two light beams of third spatial filter 800, i.e. 0 grade of diffraction light and+1 grade of diffraction light warpIt interferes and is imaged on image acquiring device A after crossing axial scan device, the different angle obtained in sample to be tested S axial direction is shoneInterference optical field figure under Mingguang City.Further use the interference of optical diffraction algorithm for reconstructing (such as: Rytov approximation algorithm) to acquisitionLight field figure carries out the three-dimensional refractive index distribution that processing obtains sample to be tested, realizes that refractive index height is rebuild.
The optical 3-dimensional imaging system of the present embodiment forms circular scanning diffraction light using the first Digital Micromirror Device D1, rightIn there is important breakthrough in the detection of detection body living.Detection body living, such as cell, the optical 3-dimensional imaging of the present embodimentSystem does not need to carry out fluorescent marker to detection body, can be under the premise of destructive test body is not active to the fortune of detection body livingDynamic change procedure is observed in real time.
In order to be adjusted to optical path, the optical 3-dimensional imaging system of the present embodiment further includes the first reflecting mirror M1 and secondReflecting mirror M2.First reflecting mirror is set between object lens 500 and cylinder mirror 600.Second reflecting mirror M2 is set to the second digital micro-mirrorBetween device D2 and optical splitter 700.First reflecting mirror M1 will be reflexed on a mirror 600 by the light beam of object lens 500.Second reflectionMirror M2 will be reflexed on optical splitter 700 by the light beam of the second Digital Micromirror Device D2.
High-NA objective in optical diffraction tomographic system determines that imaging system depth of focus very little, Rytov approximation are calculatedMethod for invalid apart from the farther away level of sample focusing surface, i.e., can not disposably to thicker sample optical diffraction chromatography atPicture.In order to solve the three-dimensional imaging of thicker sample, as a kind of embodiment of the utility model, in axial scan device 900Tenth lens 930 are set as zoom lens.As a kind of embodiment of the utility model, liquid is filled with inside zoom lensBody can control the focal length of zoom lens by changing electric current.
Fig. 2 is the side view of the sample of embodiment according to the present utility model.
In the optical 3-dimensional imaging system of the embodiments of the present invention, when zoom lens are applied with different electric currentsWhen, the different cross section layer of image acquiring device A and sample to be tested S are conjugated.It is obtained under different focal lengths respectively, sample to be tested SAxial direction on different angle illumination light under interference optical field figure.For example, it is assumed that 3 different focal lengths are arranged in zoom lens,Corresponding first focal length, the second focal length and third focal length.Referring to shown in Fig. 2, Fig. 2 shows a kind of exemplary cases of sample S, samplesIt include the corresponding first focal plane E1 of the first focal length, the corresponding second focal plane E2 of the second focal length and third focal length in product S axial directionCorresponding third focal plane E3.The corresponding synthesis field depth of first focal plane E1 is F1, the corresponding synthesis of the second focal plane E2Field depth is F2, and E3 corresponding synthesis field depth in third focal plane is F3.When applying the first electric current on zoom lens,The first focal plane E1 will be conjugated in image acquiring device A on object plane, at this time using aforementioned system scanning illumination sample to be tested S, be obtainedThe first interference optical field figure in the corresponding first synthesis field depth F1 of the first focal plane E1 under different angle illumination light is obtained, intoOne step uses the optical diffraction algorithm for reconstructing based on Rytov approximation, obtains the corresponding first synthesis depth of field model of the first focal plane E1Enclose the first three-dimensional refractive index distribution in F1.Similarly, change and apply electric current, can be obtained the second focal plane under the second electric currentThe second three-dimensional refractive index distribution in the corresponding second synthesis field depth F2 of E2 and the third coke under acquisition third electric current are flatThird three-dimensional refractive index distribution in the corresponding third synthesis field depth F3 of face E3.Specifically, the first synthesis field depth, theTwo synthesis field depths synthesize the detection range that field depth is covered with third and sample to be tested S are completely covered.Finally useCorrelation suture algorithm, by the distribution of the first three-dimensional refractive index, the distribution of the second three-dimensional refractive index and the distribution synthesis of third three-dimensional refractive indexThe consistent three-dimensional refractive index figure of sample to be tested S axial resolution is obtained, realizes that refractive index high-precision is rebuild.
Axial scan is carried out to sample to be tested by the axial scan device of adjustable focus, is divided in the axial direction of available thickness sampleThree-dimensional refractive index figure in the consistent multiple synthesis field depths of resolution, realizes that refractive index high-precision is rebuild.
It is carried out below according to optical 3-dimensional imaging system of the specific embodiment to the embodiments of the present invention specificIt illustrates.
Using the He-Ne Lasers of 633nm wavelength as laser light source 100, by the first light of the first spatial filter 200230 filtering of door screen obtains uniform directional light.First lens 210 and 220 focal length of the second lens are 75mm, the first light of 200umDoor screen 230 is used to filter out the noise of Gaussian beam, and the first diaphragm 230 is placed on the back focal plane and second of the first lens 210 thoroughlyThe front focal plane of mirror 220.On incident laser radiation to the first Digital Micromirror Device D1 of the holographic graphic sequence for being loaded with LEE typeMulti-level diffraction light is generated, the LEE type holography graphic sequence calculated by the series of values loaded on the first Digital Micromirror Device D1It controls corresponding micro mirror on the first Digital Micromirror Device D1 and obtains circular scanning diffraction light.
First Digital Micromirror Device D1 is placed on the front focal plane of the third lens 310.In the rear Jiao Ping of the third lens 310The front focal plane overlapping position of face and the 4th lens 320 is placed with second diaphragm 330.The annular of second diaphragm 330 and centreAperture is for selecting+1 grade of diffraction light.The radius of annular is determined by LEE hologram, such as inner circle radius may be configured as 1.2mm,Ring width and hole diameter are 0.6mm.The third lens 310 and 320 focal length of the 4th lens are 150mm.
Circular scanning diffraction light is realized with condenser 420 by the 5th lens 410 and is illuminated after the 4th lens 320 collimationThe amplification of angle.5th lens, 410 focal length is 150mm, and condenser 420 uses amplification factor for the achromatism of 60X, NA=0.7Object lens.5th lens 410 are placed at the back focal plane of the 4th lens 320, the back focal plane and condenser of the 5th lens 410420 front focal plane is overlapped.Scanning illumination is imaged after being mapped to sample S by object lens 500 and cylinder mirror 600, and object lens 500 are using amplificationMultiple is the achromatic objective of 60X, NA=0.7.It is further irradiated to optical splitter 700 by the image planes scattering light of cylinder mirror 600, pointLight device 700 uses grating, and grating parameter is 70 slots/millimeter.
It is placed with the second Digital Micromirror Device D2 between cylinder mirror 600 and grating, the second Digital Micromirror Device D2 and number are micro-Mirror device D1 is synchronous, for keeping image planes scattering light direction constant.Diffraction light after optical grating diffraction is irradiated to the filter of third spaceOn wave device 800, grating is placed on the front focal plane of the 6th lens 810,810 back focal plane of the 6th lens and the 7th lens 820Front focal plane be overlapped.6th focal length of lens is 40mm, and the 7th focal length of lens is 300mm.In the 6th lens back focal plane andThe front focal plane overlapping position of seven lens is placed with third diaphragm 830, third diaphragm include center small sircle hole and small sircle hole it is attachedClose big hole.Small sircle hole only allows+1 grade of light and 0 grade of light to pass through respectively with big hole.+ 1 grade of diffraction light is made after pin-hole filter-ingFor reference light, 0 grade of diffraction light is used as signal light after passing through macropore completely.The diameter of small sircle hole be 25 μm, big hole be set to away fromAt small sircle hole 2mm, the diameter of big hole is 1mm.
An axial scan device 900 is placed between the 7th lens and image acquiring device A.Axial scan device 900 wrapsInclude the 8th lens 910, the 9th lens 920 and the tenth lens 930.The back focal planes of 8th lens 910 and the 9th lens 920Front focal plane overlapping position is placed with the tenth lens 930.The focal length of 8th lens 910 is 200mm, the focal length of the 9th lensFor 150mm.By changing the focal length of the tenth lens of current control, make the different cross section layer of image acquiring device A Yu sample to be tested SConjugation.
The utility model replaces existing scanning galvanometer to carry out circular scanning illumination by Digital Micromirror Device, can be improved intoAs speed and stability, additional aberrations are reduced, temporal and spatial stability is greatly improved.Axial scan module is added in the utility model, mentionsLifting shaft utmostly reduces the error of three-dimensional reconstruction index of refraction diagram to refractivity precision consistency.
Although the utility model has shown and described referring to specific embodiment, those skilled in the art will be managedSolution: in the case where not departing from the spirit and scope of the utility model being defined by the claims and their equivalents, can herein intoThe various change of row in form and details.