技术领域technical field
本实用新型属于电子烟技术领域，具体涉及一种声表面波电子烟雾化芯片。The utility model belongs to the technical field of electronic cigarettes, in particular to a surface acoustic wave electronic vaping chip.
背景技术Background technique
近年来，随着全球控烟力度的不断加强以及消费者健康意识的逐步提高，电子烟作为一类非燃烧、低危害的卷烟替代品，变得越来越受追捧，国内外市场也呈现出越来越火爆的迹象。In recent years, with the continuous strengthening of global tobacco control efforts and the gradual improvement of consumers' health awareness, e-cigarettes, as a non-combustible, low-harm cigarette substitute, have become more and more popular, and domestic and foreign markets have also shown increasing popularity. Signs of growing popularity.
雾化芯是电子烟的核心部件，作用是将烟油雾化成气溶胶并供用户抽吸，以达到生理和心理满足感，其性能的优劣直接影响到用户的抽吸体验和安全健康状况。现有电子烟的雾化芯，绝大多数以电热式金属发热丝或电热式陶瓷发热片为主，少部分采用超声波振动片。电热式金属发热丝由镍铬合金、不锈钢合金、镍200合金或钛合金绕制而成。发热丝通电即可加热，热响应速度快、热转换效率高，然而该类型雾化芯却普遍存在如下问题：电子烟连续抽吸时，发热丝持续升温可高达500℃以上，具有潜在安全风险，同时烟油在高温情况下，会热解释放醛类等有害成分；发热丝与烟油直接接触，当雾化不充分时，烟油容易在发热丝上烧结粘附，发出焦糊味影响抽吸口感，或产生积碳引起发热丝阻值发生变化，进而使感官品质出现波动；发热丝被烟油长期浸泡后，重金属容易溶出，并转移至气溶胶。电热式陶瓷发热片通过在氧化铝、氧化锆或氮化硅陶瓷生坯上印刷金属电阻浆料发热电路，并经高温烘烧而得，其与金属发热丝相比，发热面积大、耐高温性能好，但由于陶瓷在发热电路热传导作用下间接发热，发热速度慢，且部分热能会损失，导致雾化功耗高，通常为5W以上。超声波振动片利用超声波高频振荡原理使烟油雾化，主要包括单层金属双层陶瓷片夹心式和单层金属单片陶瓷片两种，激励频率一般为2KHz～3MHz，其相比于电热式发热丝或陶瓷发热片，发热量小、无安全隐患，但受限于超声波以声源为中心呈球面向四周扩散、定向性差、能量不易集中的特点，使得振动片雾化速率慢、雾化效率低、不能连续稳定地产生粒径分布均匀的气溶胶且不适用于雾化高粘度烟油。因此，现有电子烟雾化芯技术还有待改进与发展。The atomizing core is the core component of the electronic cigarette. Its function is to atomize the e-liquid into an aerosol for the user to inhale in order to achieve physiological and psychological satisfaction. The quality of its performance directly affects the user’s vaping experience and safety and health status . Most of the existing atomizing cores of electronic cigarettes are mainly electric heating metal heating wires or electric heating ceramic heating sheets, and a small part of them use ultrasonic vibrating sheets. The electric heating metal heating wire is made of nickel-chromium alloy, stainless steel alloy, nickel 200 alloy or titanium alloy. The heating wire can be heated when it is powered on, with fast thermal response and high heat conversion efficiency. However, this type of atomizing core generally has the following problems: when the electronic cigarette is continuously smoked, the heating wire continues to heat up to over 500°C, which poses a potential safety risk At the same time, the e-liquid will pyrolyze and release harmful components such as aldehydes under high temperature conditions; the heating wire is in direct contact with the e-liquid. Smoking taste, or carbon deposits cause changes in the resistance of the heating wire, which in turn causes fluctuations in the sensory quality; after the heating wire is soaked in e-liquid for a long time, heavy metals are easily dissolved and transferred to the aerosol. The electrothermal ceramic heating sheet is obtained by printing a metal resistance paste heating circuit on the alumina, zirconia or silicon nitride ceramic green body, and firing at a high temperature. Compared with the metal heating wire, it has a larger heating area and high temperature resistance. The performance is good, but due to the indirect heating of ceramics under the heat conduction of the heating circuit, the heating speed is slow, and part of the heat energy will be lost, resulting in high atomization power consumption, usually above 5W. The ultrasonic vibrating sheet uses the principle of ultrasonic high-frequency oscillation to atomize the e-liquid, mainly including single-layer metal double-layer ceramic sheet sandwich type and single-layer metal single-sheet ceramic sheet. The excitation frequency is generally 2KHz~3MHz, which is compared to electric Type heating wire or ceramic heating sheet, with low heat generation and no potential safety hazard, but limited by the characteristics of ultrasonic waves centering on the sound source and spreading around the spherical surface, poor orientation, and difficult energy concentration, the atomization rate of the vibrating sheet is slow and foggy The efficiency of atomization is low, the aerosol with uniform particle size distribution cannot be produced continuously and stably, and it is not suitable for atomizing high-viscosity e-liquid. Therefore, the existing electronic cigarette core technology still needs to be improved and developed.
声表面波是一种沿弹性介质表面上传播的机械波，能量主要集中在介质表面，且随深度呈指数衰减。声表面波于1885年由英国物理学家Rayleigh在研究中率先发现。早期的声表面波技术主要聚焦在通信领域中的滤波与信号处理应用。近几年，随着声表面波技术的迅速发展，其应用领域不断延伸，包括液滴驱动、微混合、微流体雾化、微粒收集、传感检测和生物细胞接种。在众多的应用中，声表面波微流体雾化凭借驱动功率小、激励频率高、能量定向集中等优点，为肺部给药、喷雾保湿、农药喷洒、工业喷涂等领域开辟了新的思路，也为电子烟雾化芯技术突破提供了新的契机。Surface acoustic wave is a kind of mechanical wave that propagates along the surface of elastic medium. The energy is mainly concentrated on the surface of the medium and decays exponentially with depth. Surface acoustic waves were first discovered in 1885 by the British physicist Rayleigh in his research. Early SAW technology focused on filtering and signal processing applications in the communications field. In recent years, with the rapid development of surface acoustic wave technology, its application fields have been continuously extended, including droplet driving, micromixing, microfluidic atomization, particle collection, sensing detection and biological cell seeding. In many applications, surface acoustic wave microfluidic atomization has opened up new ideas for the fields of pulmonary drug delivery, spray moisturizing, pesticide spraying, industrial spraying, etc. It also provides a new opportunity for breakthroughs in electronic cigarette core technology.
实用新型内容Utility model content
本实用新型的目的在于改善或解决现有电子烟雾化芯存在的技术缺陷，基于声表面波衍射雾化效应及其技术优势，提供一种安全健康隐患小、抽吸口感佳、感官品质一致性好、低耗高效、气溶胶产生连续稳定且其粒径小而均匀、可雾化高粘度烟油的电子烟雾化芯片，具体技术方案如下：The purpose of the utility model is to improve or solve the technical defects existing in the existing electronic smoke core, and based on the surface acoustic wave diffraction atomization effect and its technical advantages, to provide a device with small safety and health risks, good taste and consistent sensory quality Good, low-consumption and high-efficiency, continuous and stable aerosol generation, small and uniform particle size, and an electronic cigarette chip that can atomize high-viscosity e-liquid. The specific technical plan is as follows:
本实用新型公开一种声表面波电子烟雾化芯片，其特征在于，其包括：The utility model discloses a surface acoustic wave electronic atomization chip, which is characterized in that it comprises:
压电基底1片；1 piezoelectric substrate;
叉指换能器2，为双手手指交叉状的多对条，布置在所述压电基底1片的表面；所述条与条之间有间隔；The interdigital transducer 2 is a plurality of pairs of strips in the shape of crossed fingers of both hands, arranged on the surface of the piezoelectric substrate 1; there are intervals between the strips;
信号接口3，布置在所述压电基底1片的外侧。The signal interface 3 is arranged outside the piezoelectric substrate 1 .
所述叉指换能器设置于所述压电基底片表面，用于产生声表面波以实现烟油雾化；所述信号接口设置于所述压电基底外侧，用于加载高频交流电信号；所述叉指换能器通过所述信号接口与外部高频信号源电连接。The interdigital transducer is arranged on the surface of the piezoelectric substrate for generating surface acoustic waves to realize the atomization of smoke oil; the signal interface is arranged outside the piezoelectric substrate for loading high-frequency alternating current signal; the IDT is electrically connected to an external high-frequency signal source through the signal interface.
优选地，所述叉指换能器2相互交叉的条的对数为25～30对。Preferably, the number of interdigitated strips of the interdigital transducer 2 is 25-30 pairs.
优选地，所述叉指换能器2的条与条之间相互平行交叉重叠的长度为0.5～3mm。Preferably, the strips of the interdigital transducer 2 are 0.5-3 mm in length between parallel and overlapping strips.
优选地，所述叉指换能器2为金属构成的条，所述金属构成的条为金条、银条、铜条或铝条中的一种。Preferably, the IDT 2 is a bar made of metal, and the bar made of metal is one of gold bars, silver bars, copper bars or aluminum bars.
优选地，所述压电基底1片为压电单晶片、压电陶瓷片、压电聚合物片或压电复合物片中的一种。Preferably, the piezoelectric substrate 1 is one of piezoelectric single crystal, piezoelectric ceramic, piezoelectric polymer or piezoelectric composite.
优选地，所述压电基底1片为Y切X 128.68°方向的铌酸锂压电单晶片，其厚度为250nm～600nm。Preferably, the piezoelectric substrate is a lithium niobate piezoelectric single crystal with a Y-cut X 128.68° direction, and its thickness is 250 nm to 600 nm.
优选地，所述叉指换能器2中所述条的宽度为a，相邻两根条之间的间隔为b，a和b满足如下公式：f＝vs/2(a+b)，其中vs为声表面波在压电基底表面上的传播速度，f为激励频率；f满足其中γ为烟油表面张力，ρ为烟油密度，d为所要求的烟油液滴雾化形成气溶胶的粒径。Preferably, the width of the strips in the IDT 2 is a, the interval between two adjacent strips is b, and a and b satisfy the following formula: f=vs /2(a+b) , where vs is the propagation velocity of the surface acoustic wave on the surface of the piezoelectric substrate, f is the excitation frequency; f satisfies Among them, γ is the surface tension of the e-liquid, ρ is the density of the e-liquid, and d is the particle size of the aerosol formed by the atomization of the e-liquid droplet.
优选地，所述压电基底1片上有烟油液滴4，所述烟油液滴4与所述叉指换能器2不接触，所述烟油液滴4的位置满足所述叉指换能器2产生的声表面波的能量衍射进入烟油液滴4的角度为θR＝arcsin(vl/vs)，其中vl为声音在烟油中的传播速度，vs为声表面波在压电基底表面上的传播速度。Preferably, there is an e-liquid droplet 4 on the piezoelectric substrate 1, the e-liquid droplet 4 is not in contact with the interdigital transducer 2, and the position of the e-liquid droplet 4 satisfies the requirement of the interdigital transducer. The angle at which the energy of the surface acoustic wave generated by the transducer 2 diffracts into the e-liquid droplet 4 is θR =arcsin(vl /vs ), where vl is the propagation speed of sound in the e-liquid, and vs is the sound The propagation velocity of surface waves on the surface of a piezoelectric substrate.
本实用新型的有益效果是：The beneficial effects of the utility model are:
(1)与电热式金属发热丝相比，本实用新型的声表面波电子烟雾化芯片通过声能而非热能实现烟油雾化，发热量小，芯片热量累积不足以使烟油发生热解产生醛类等有害成分，安全系数高、健康隐患小。另外，叉指换能器激发的声表面波沿压电基底表面传播衍射进入烟油并使其雾化，烟油不与金属条直接接触，属于非接触雾化，减少了烟油在金属条上烧结粘附的可能，确保具有较佳的抽吸口感和稳定的感官品质，且不存在重金属浸出的风险。(1) Compared with the electrothermal metal heating wire, the surface acoustic wave electronic vaping chip of the present invention realizes the atomization of e-liquid through sound energy instead of thermal energy, and the calorific value is small, and the heat accumulation of the chip is not enough to pyrolyze the e-liquid It produces harmful components such as aldehydes, with high safety factor and small health risks. In addition, the surface acoustic wave excited by the interdigital transducer propagates along the surface of the piezoelectric substrate and diffracts into the e-liquid and makes it atomized. The possibility of sintering and adhesion ensures better smoking taste and stable sensory quality, and there is no risk of heavy metal leaching.
(2)与电热式陶瓷发热片相比，本实用新型的声表面波电子烟雾化芯片通过信号接口施以高频交流电信号后，叉指换能器即可产生高能量密度的声表面波，能量转换效率高，且驱动功率通常为0.5～3W，雾化功耗低。(2) Compared with the electrothermal ceramic heating sheet, after the surface acoustic wave electronic atomization chip of the present invention is applied with a high-frequency alternating current signal through the signal interface, the interdigital transducer can generate surface acoustic waves with high energy density , the energy conversion efficiency is high, and the driving power is usually 0.5-3W, and the atomization power consumption is low.
(3)与超声波振动片相比，声表面波的能量具有定向集中特性，使得本实用新型的声表面波电子烟雾化芯片雾化效率高、能连续稳定地产生粒径分布均匀的气溶胶，且对于高粘度烟油雾化效果好；并且声表面波具有超高频(10MHz～500MHz)激励特性，使得雾化芯片产生的气溶胶粒径更小，口感更加香醇细腻。(3) Compared with the ultrasonic vibrating plate, the energy of the surface acoustic wave has a directional concentration characteristic, which makes the atomization efficiency of the surface acoustic wave electronic atomization chip of the present utility model high, and can continuously and stably produce aerosols with uniform particle size distribution, And it has a good atomization effect for high-viscosity e-liquid; and the surface acoustic wave has ultra-high frequency (10MHz-500MHz) excitation characteristics, which makes the aerosol particle size generated by the atomization chip smaller, and the taste is more mellow and delicate.
(4)本实用新型的声表面波电子烟雾化芯片体积小、重量轻、性能可靠，采用微机械加工工艺制备，易于批量生产、成品率高、一致性好。(4) The surface acoustic wave electronic atomization chip of the present invention is small in size, light in weight, and reliable in performance. It is prepared by micro-machining technology, easy to mass-produce, high in yield, and good in consistency.
附图说明Description of drawings
图1为本实用新型声表面波电子烟雾化芯片的结构示意图；Fig. 1 is a schematic structural diagram of a surface acoustic wave electronic vaporization chip of the present invention;
附图标记说明：1.压电基底，2.叉指换能器，3.信号接口，4.烟油液滴。Explanation of reference numerals: 1. Piezoelectric substrate, 2. Interdigital transducer, 3. Signal interface, 4. E-liquid droplet.
具体实施方式Detailed ways
为了使本实用新型的目的、技术方案及优点更加清楚明白，以下将结合附图及实施例，对本实用新型作进一步详细说明。In order to make the purpose, technical solutions and advantages of the utility model clearer, the utility model will be further described in detail below in conjunction with the accompanying drawings and embodiments.
本实用新型实施例的声表面波电子烟雾化芯片的结构示意图如图1所示，其包括：压电基底1，为片状；叉指换能器2，为双手手指交叉状的多对条，布置在所述压电基底1的表面；所述条与条之间有间隔；信号接口3，布置在所述压电基底1的外侧。所述叉指换能器设置于所述压电基底表面，用于产生声表面波以实现烟油雾化；所述信号接口设置于所述压电基底外侧，用于加载高频交流电信号；所述叉指换能器通过所述信号接口与外部高频信号源电连接。The structural schematic diagram of the surface acoustic wave electronic atomization chip of the embodiment of the utility model is shown in Figure 1, which includes: a piezoelectric substrate 1, which is in the shape of a sheet; , arranged on the surface of the piezoelectric substrate 1 ; there are spaces between the strips; the signal interface 3 is arranged on the outside of the piezoelectric substrate 1 . The interdigital transducer is arranged on the surface of the piezoelectric substrate for generating surface acoustic waves to realize the atomization of e-liquid; the signal interface is arranged outside the piezoelectric substrate for loading high-frequency alternating current signals ; The IDT is electrically connected to an external high-frequency signal source through the signal interface.
本实施例的叉指换能器2相互交叉的条的对数为30对，叉指换能器2的条与条之间相互交叉重叠的长度为3mm，所述叉指换能器2为金属构成的条，所述金属构成的条为铜条。The interdigital transducer 2 of the present embodiment has 30 pairs of interdigitated strips, and the interdigitated transducer 2 intersects and overlaps each other with a length of 3 mm, and the interdigital transducer 2 is A strip of metal, the strip of metal being a copper strip.
本实施例的压电基底选为1为Y切X 128.68°方向的铌酸锂压电单晶片，其厚度为400nm。The piezoelectric substrate in this embodiment is selected as a lithium niobate piezoelectric single crystal with a Y-cut X 128.68° direction, and its thickness is 400 nm.
优选地，所述叉指换能器2中所述条的宽度为a，相邻两根条之间的间隔为b，a和b满足如下公式：f＝vs/2(a+b)，其中vs为声表面波在压电基底表面上的传播速度，f为激励频率；f满足其中γ为烟油表面张力，ρ为烟油密度，d为所要求的烟油液滴雾化形成气溶胶的粒径。Preferably, the width of the strips in the IDT 2 is a, the interval between two adjacent strips is b, and a and b satisfy the following formula: f=vs /2(a+b) , where vs is the propagation velocity of the surface acoustic wave on the surface of the piezoelectric substrate, f is the excitation frequency; f satisfies Among them, γ is the surface tension of the e-liquid, ρ is the density of the e-liquid, and d is the particle size of the aerosol formed by the atomization of the e-liquid droplet.
所述压电基底1上有烟油液滴4，所述烟油液滴4与所述叉指换能器2不接触，所述烟油液滴4的位置满足所述叉指换能器2产生的声表面波的能量衍射进入烟油液滴4的角度为θR＝arcsin(vl/vs)，其中vl为声音在烟油中的传播速度，vs为声表面波在压电基底表面上的传播速度。There is an e-liquid droplet 4 on the piezoelectric substrate 1, the e-liquid droplet 4 is not in contact with the IDT 2, and the position of the e-liquid droplet 4 satisfies the requirement of the IDT 2 The angle at which the surface acoustic wave energy diffracted into the e-liquid droplet 4 is θR =arcsin(vl /vs ), where vl is the propagation speed of sound in the e-liquid, and vs is the surface acoustic wave at Velocity of propagation on a piezoelectric substrate surface.
对本实用新型的声表面波电子烟雾化芯片的工作过程描述如下：通过玻璃纤维、有机棉、金属材质导液网或微泵先将烟油液滴4分散于叉指换能器2一侧的压电基底1上，烟油液滴4与叉指换能器2不接触。然后，启动外部高频信号源，通过信号接口3加载高频交流电信号并传递给叉指换能器2。所述叉指换能器2利用压电基底1自身的逆压电效应，将电信号转变为声信号，形成沿压电基底1表面传播的声表面波。当声表面波与置于压电基底1上的烟油液滴4相接触时，声表面波携带的能量会以漏声表面波的形式以特定角度θR衍射进入烟油液滴4，并使其表面产生强烈扰动，θR＝arcsin(vl/vs)，其中vl为声表面波在烟油中的传播速度，vs为声表面波在压电基底表面上的传播速度。当烟油液滴4自身的表面张力不足以保持其几何形态的稳定时，即可生成气溶胶以供用户享用。所述声表面波电子烟雾化芯片产生的气溶胶粒径d满足其中γ为烟油表面张力，ρ为烟油密度，f为激励频率，f＝vs/2(a+b)，a为叉指换能器2中所述条的宽度，b为叉指换能器2相邻两根条之间的间隔，vs为声表面波在压电基底表面上的传播速度。The working process of the surface acoustic wave electronic vaping chip of the present utility model is described as follows: the smoke oil droplets 4 are first dispersed on the side of the interdigital transducer 2 through glass fiber, organic cotton, metal material liquid guide net or micropump. On the piezoelectric substrate 1 , the e-liquid droplet 4 is not in contact with the IDT 2 . Then, an external high-frequency signal source is started, and a high-frequency alternating current signal is loaded through the signal interface 3 and transmitted to the IDT 2 . The interdigital transducer 2 uses the inverse piezoelectric effect of the piezoelectric substrate 1 itself to convert electrical signals into acoustic signals to form surface acoustic waves propagating along the surface of the piezoelectric substrate 1 . When the surface acoustic wave is in contact with the e-liquid droplet 4 placed on the piezoelectric substrate 1, the energy carried by the surface acoustic wave will diffract into the e-liquid droplet 4 at a specific angle θR in the form of leakage surface acoustic wave, and The surface is strongly disturbed, θR =arcsin(vl /vs ), where vl is the propagation velocity of the surface acoustic wave in the e-liquid, and vs is the propagation velocity of the surface acoustic wave on the surface of the piezoelectric substrate. When the surface tension of the e-liquid droplet 4 itself is not enough to keep its geometric shape stable, an aerosol can be generated for the user to enjoy. The aerosol particle size d produced by the surface acoustic wave electronic cigarette chip satisfies Where γ is the surface tension of the e-liquid, ρ is the density of the e-liquid, f is the excitation frequency, f=vs /2(a+b), a is the width of the strip in the interdigital transducer 2, and b is the interdigital transducer The distance between two adjacent strips of the transducer 2, vs is the propagation velocity of the surface acoustic wave on the surface of the piezoelectric substrate.
本实施例设定a＝b＝50μm，f＝20MHz；vs＝3992m/s；vl＝1680m/s；烟油的ρ＝1.12g/m3；烟油的γ＝46.3mN/m，则可以得到气溶胶的粒径d＝20nm。In this embodiment, a=b=50μm, f=20MHz; vs =3992m/s; vl =1680m/s; ρ of e-liquid = 1.12g/m3 ; gamma of e-liquid = 46.3mN/m, Then the particle size d=20nm of the aerosol can be obtained.
以上所述仅为本实用新型的优先实施例，并非用于限制本实用新型。对于本领域的技术人员来说，在不付出创造性劳动的前提下，凡根据本实用新型揭露的技术方案或技术特征所作的任何修改、等同替换和改进等，皆应属于本实用新型的保护范围。The above descriptions are only preferred embodiments of the present utility model, and are not intended to limit the present utility model. For those skilled in the art, on the premise of not paying creative work, any modifications, equivalent replacements and improvements made according to the technical solutions or technical features disclosed in the utility model shall belong to the protection scope of the utility model .
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820279862.6UCN207885676U (en) | 2018-02-28 | 2018-02-28 | A kind of surface acoustic wave electronic cigarette atomizing chip |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820279862.6UCN207885676U (en) | 2018-02-28 | 2018-02-28 | A kind of surface acoustic wave electronic cigarette atomizing chip |
| Publication Number | Publication Date |
|---|---|
| CN207885676Utrue CN207885676U (en) | 2018-09-21 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820279862.6UActiveCN207885676U (en) | 2018-02-28 | 2018-02-28 | A kind of surface acoustic wave electronic cigarette atomizing chip |
| Country | Link |
|---|---|
| CN (1) | CN207885676U (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108294364A (en)* | 2018-02-28 | 2018-07-20 | 云南中烟工业有限责任公司 | A kind of surface acoustic wave electronic cigarette atomizing chip |
| CN111567897A (en)* | 2020-06-02 | 2020-08-25 | 云南中烟工业有限责任公司 | Central acoustic surface wave heating element |
| CN112120293A (en)* | 2020-10-23 | 2020-12-25 | 贵州中烟工业有限责任公司 | Atomizer and contain its electron cigarette |
| CN112869244A (en)* | 2021-03-24 | 2021-06-01 | 深圳市博迪科技开发有限公司 | Large-smoke surface acoustic wave electronic atomization system |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108294364A (en)* | 2018-02-28 | 2018-07-20 | 云南中烟工业有限责任公司 | A kind of surface acoustic wave electronic cigarette atomizing chip |
| CN111567897A (en)* | 2020-06-02 | 2020-08-25 | 云南中烟工业有限责任公司 | Central acoustic surface wave heating element |
| CN112120293A (en)* | 2020-10-23 | 2020-12-25 | 贵州中烟工业有限责任公司 | Atomizer and contain its electron cigarette |
| CN112869244A (en)* | 2021-03-24 | 2021-06-01 | 深圳市博迪科技开发有限公司 | Large-smoke surface acoustic wave electronic atomization system |
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