技术领域technical field
本实用新型涉及用于大型罐体内壁镀膜的真空阴极电弧镀膜机，特别涉及一种所述镀膜机真空镀室内电弧源组件的驱动系统。所述大型罐体指一端开口另一端具有外凸的弧形封顶盖，直径1.5米—3.3米x高2.5米—3.8米的罐体。The utility model relates to a vacuum cathode arc coating machine used for coating the inner wall of a large tank, in particular to a drive system for an arc source assembly in the vacuum coating chamber of the coating machine. The large tank body refers to a tank body with an open end at one end and a convex arc-shaped top cover at the other end, with a diameter of 1.5-3.3 meters and a height of 2.5-3.8 meters.
背景技术Background technique
常用真空阴极电弧镀膜机用于镀硬质耐磨的工模具保护膜、或镀硬质耐划花耐腐蚀的日用品装饰膜，最典型的镀层是氮化钛，它呈金黄色，有较高硬度，有较好的耐磨耐蚀性能，常被用于工模具保护膜和各种用品的装饰膜。大型的镀膜机要数镀不锈钢饰板(如长3.2米x宽1.2米)的镀膜机，立式镀室直径2-5米x高2-4米，又如镀不锈钢长管(如直径40毫米x6米)的镀膜机，卧式镀室直径2米x长7米，这类型镀膜机都是30--50只电弧靶位，安置在镀室外壁上，向炉内工件发射靶材镀料等离子体，在工件外表面沉积成膜，或在工件外表面镀料(如Ti)与反应气体(如 N)合成化合物膜(TiN)。这些机型技术比较成熟了，但要求在大型罐体的内壁上，用真空阴极电弧镀TiN膜的镀膜设备，国内外尚未有报导。Vacuum cathodic arc coating machines are commonly used to coat hard and wear-resistant tool and mold protective films, or hard, scratch-resistant and corrosion-resistant decorative films for daily necessities. The most typical coating is titanium nitride, which is golden yellow and has a high Hardness, good wear resistance and corrosion resistance, often used in mold protective film and decorative film for various supplies. Large-scale coating machines are coating machines for plating stainless steel decorative panels (such as 3.2 meters long x 1.2 meters wide), vertical coating chambers with a diameter of 2-5 meters x 2-4 meters high, and stainless steel long tubes (such as 40 meters in diameter) mm x 6m), the horizontal coating chamber is 2m in diameter x 7m in length. This type of coating machine has 30--50 arc targets, which are placed on the outer wall of the coating chamber and emit target coating to the workpiece in the furnace. The material plasma is deposited on the outer surface of the workpiece to form a film, or the outer surface of the workpiece is plated with a material (such as Ti) and a reactive gas (such as N) to synthesize a compound film (TiN). These models are relatively mature in technology, but require vacuum cathodic arc plating TiN film coating equipment on the inner wall of a large tank body, which has not yet been reported at home and abroad.
实用新型内容Utility model content
综合而言，新型镀膜机应具有如下特点：(1)镀膜时，被镀的大型罐体的内腔需要抽真空；(2)由于需要在罐体内壁上镀膜，镀膜时，电弧源要安装在大型罐体内的支承物上，连接电弧源的水、电、气都要引入罐体内腔；(3)电弧源的设置方式还要能完成大型罐体弧形封顶盖的仰角镀膜；(4)罐体内径有多种尺寸，电弧源镀膜时要适应这些尺寸变化；(5)罐体高度有多种尺寸，电弧源镀膜时也要适应这种高度的变化。这些要求，现有镀膜机都无法实现。In general, the new coating machine should have the following characteristics: (1) When coating, the inner cavity of the large tank to be coated needs to be evacuated; (2) Since it is necessary to coat the inner wall of the tank, the arc source must be installed On the support in the large tank, the water, electricity and gas connected to the arc source must be introduced into the inner cavity of the tank; (3) The arc source should be set in a way that can complete the elevation angle coating of the arc-shaped top cover of the large tank; (4) ) The inner diameter of the tank has various sizes, and the arc source coating must adapt to these size changes; (5) The tank height has various sizes, and the arc source coating must also adapt to this height change. These requirements cannot be realized by existing coating machines.
本实用新型的发明目的是提供一种大型罐体内壁镀膜用真空阴极电弧镀膜机电弧源组件的驱动系统，利用该驱动系统，可方便的实现动力从非真空区到真空区的传递，从而驱动安装其上的位于真空区中的电弧源组件，在水平面内作旋转运动和在竖直方向上作升降运动，且所述旋转运动和升降运动由两套独立的驱动机构分别控制，从而实现调速方便。The purpose of the invention of this utility model is to provide a driving system for the arc source assembly of a vacuum cathode arc coating machine for coating the inner wall of a large tank. With this driving system, the transmission of power from the non-vacuum area to the vacuum area can be easily realized, thereby driving The arc source assembly installed on it, which is located in the vacuum area, performs rotating motion in the horizontal plane and vertical lifting motion, and the rotating motion and lifting motion are controlled by two independent driving mechanisms respectively, so as to realize adjustment. Fast and convenient.
本实用新型的发明目的具体通过如下技术方案实现：一种大型罐体内壁镀膜用真空阴极电弧镀膜机电弧源组件的驱动系统，其特征在于，包括炉体底板、旋转架、升降台、转盘、转动轴、驱动机构和传动机构；The purpose of the invention of the utility model is realized through the following technical solutions: a drive system for the arc source assembly of a vacuum cathode arc coating machine for coating the inner wall of a large tank, which is characterized in that it includes a furnace body bottom plate, a rotating frame, a lifting platform, a turntable, Rotary shafts, drive mechanisms and transmission mechanisms;
所述炉体底板用于构成所述镀膜机真空镀室的底盘，其水平设置，上侧为炉体内侧，下侧为炉体外侧，所述旋转架为一竖立支架，所述升降台安装在所述旋转架上，可沿所述旋转架上升和下降，所述旋转架通过所述转盘固定在所述转动轴上，所述转动轴则旋转密封地安装在所述炉体底板中央并由炉体内侧穿出到炉体外侧，所述驱动机构和传动机构包括位于炉外的第一驱动机构和第一传动机构，所述第一驱动机构通过所述第一传动机构与所述转动轴的穿出端相连，由第一驱动机构通过驱动所述转动轴转动从而带动所述旋转架旋转，从而使所述旋转架上的所述升降台完成第一个维度的旋转运动，所述旋转架与所述转盘之间形成有一个与炉内真空环境隔绝，而与炉外连通的非真空腔室，称为旋转架大气传动舱，所述驱动机构还包括第二驱动机构，所述传动机构还包括第二传动机构、升降台传动轴以及第三传动机构，所述第二驱动机构安装在所述旋转架大气传动舱中，所述升降台传动轴旋转密封地安装在所述旋转架大气传动舱的侧壁上，且两端水平穿出，所述第二驱动机构通过所述第二传动机构与所述升降台传动轴相连，驱动所述升降台传动轴旋转，所述升降台传动轴跨越非真空区到真空区，将所述第二驱动机构的动力传递到真空区，所述升降台传动轴的两端分别通过所述第三传动机构与所述升降台的两侧相连，所述升降台传动轴通过所述第三传动机构带动所述升降台沿所述旋转架运动，从而使所述升降台完成第二个维度的升降运动，将电弧源组件安装在所述升降台上，本实用新型的驱动系统即可驱动真空区中的电弧源组件，在水平面内作旋转运动和在竖直方向上作升降运动。The bottom plate of the furnace body is used to form the chassis of the vacuum coating chamber of the coating machine, which is arranged horizontally, the upper side is the inner side of the furnace body, the lower side is the outer side of the furnace body, the rotating frame is a vertical support, and the lifting platform is installed On the rotating frame, it can be raised and lowered along the rotating frame, the rotating frame is fixed on the rotating shaft through the turntable, and the rotating shaft is installed in the center of the bottom plate of the furnace body in a rotatable and sealed manner. From the inner side of the furnace body to the outer side of the furnace body, the drive mechanism and transmission mechanism include a first drive mechanism and a first transmission mechanism located outside the furnace, and the first drive mechanism communicates with the rotating The passing ends of the shafts are connected, and the first driving mechanism drives the rotating shaft to rotate so as to drive the rotating frame to rotate, so that the lifting table on the rotating frame completes the first-dimension rotating motion. A non-vacuum chamber that is isolated from the vacuum environment in the furnace and communicated with the outside of the furnace is formed between the rotating frame and the turntable, which is called the atmospheric transmission chamber of the rotating frame. The driving mechanism also includes a second driving mechanism. The transmission mechanism also includes a second transmission mechanism, a lifting platform transmission shaft and a third transmission mechanism, the second driving mechanism is installed in the atmospheric transmission cabin of the rotary frame, and the lifting platform transmission shaft is installed in the rotating and sealing manner On the side wall of the atmospheric transmission cabin, and both ends pass through horizontally, the second driving mechanism is connected with the transmission shaft of the lifting platform through the second transmission mechanism, and drives the transmission shaft of the lifting platform to rotate. The transmission shaft of the table crosses the non-vacuum area to the vacuum area, and transmits the power of the second driving mechanism to the vacuum area. The two ends of the transmission shaft of the lifting table pass through the third transmission mechanism and the two sides of the lifting table respectively. connected, the transmission shaft of the lifting platform drives the lifting platform to move along the rotating frame through the third transmission mechanism, so that the lifting platform completes the lifting movement of the second dimension, and the arc source assembly is installed on the On the lifting platform, the driving system of the utility model can drive the arc source assembly in the vacuum area to perform rotating motion in the horizontal plane and lift motion in the vertical direction.
作为对本实用新型的改进：所述驱动系统还包括限位器，所述限位器安装在所述旋转架的顶部，其用于与活动安装在所述升降台上的电弧源组件配合，以使所述电弧源组件实现抬头运动：当所述升降台作上升运动，靠近所述旋转架顶部时，所述限位器与所述升降台上电弧源组件的尾端接触，下压所述电弧源组件的尾端，随所述升降台的继续上升，所述限位器使所述电弧源组件的前端像高低板一样绕一支点旋转仰起，以便与所述大型罐体的弧形封顶盖相对，主要用于实现大型罐体弧形封顶盖的仰角镀膜。As an improvement to the present utility model: the drive system further includes a limiter, the limiter is installed on the top of the rotating frame, and it is used to cooperate with the arc source assembly that is movably installed on the lifting platform, so as to Make the arc source assembly lift its head: when the lifting platform moves up and approaches the top of the rotating frame, the stopper contacts the tail end of the arc source assembly on the lifting platform, pressing down the The tail end of the arc source assembly, as the lifting platform continues to rise, the stopper makes the front end of the arc source assembly rotate around a fulcrum like a high and low plate, so as to match the arc shape of the large tank body. The top cover is opposite, and it is mainly used to realize the elevation angle coating of the curved top cover of large tank body.
所述转动轴为一筒状空心轴，所述旋转架大气传动舱通过空心的所述转动轴与炉外连通。转动轴、转盘与旋转架固定在一起，三者之间没有相对运动，转动轴的中空结构，以便利用其内腔来实现电弧源组件、驱动机构相关管线的引出，是一种优选的管线引出方式。The rotating shaft is a cylindrical hollow shaft, and the atmospheric transmission cabin of the rotary frame communicates with the outside of the furnace through the hollow rotating shaft. The rotating shaft, the turntable and the rotating frame are fixed together, and there is no relative movement between the three. The hollow structure of the rotating shaft is used to realize the extraction of arc source components and related pipelines of the driving mechanism by using its inner cavity, which is a preferred pipeline extraction. Way.
所述转动轴上端封闭，侧壁连通至少一个引管；所述旋转架大气传动舱与所述炉体底板之间具有一定间隙，该间隙通过所述旋转架侧壁上的镂空区域与炉内的真空区连通，所述旋转架大气传动舱通过波纹管与所述转动轴的引管连通，从而通过所述转动轴与炉外连通，备用的所述引管则通过法兰板封闭。在旋转架大气传动舱与炉体底板之间形成一段与炉内的真空区连通的间隙，升降台上电弧源组件的相关管线可直接穿过所述镂空区域，穿入所述引管后，从所述转动轴的内腔引出。The upper end of the rotating shaft is closed, and the side wall is connected to at least one guide pipe; there is a certain gap between the atmospheric transmission cabin of the rotating frame and the bottom plate of the furnace body, and the gap passes through the hollow area on the side wall of the rotating frame and the inside of the furnace. The vacuum area of the rotating frame is connected, and the atmospheric transmission chamber of the rotating frame is connected with the introduction pipe of the rotating shaft through the bellows, so as to communicate with the outside of the furnace through the rotating shaft, and the spare introduction pipe is closed by the flange plate. A gap connected with the vacuum area in the furnace is formed between the atmospheric transmission cabin of the rotating frame and the bottom plate of the furnace body. The relevant pipelines of the arc source components on the lifting platform can directly pass through the hollowed out area, and after penetrating into the introduction pipe, Lead out from the lumen of the rotating shaft.
所述第一驱动机构驱动所述转动轴作360度的正反转运动，即旋转360度后即反转复位，主要用于避免引出炉体的管线缠绕。上述运动方式通过光电传感器组件控制，所述光电传感器组件包括传感器和反射板，所述传感器固定在所述转动轴外围，静止不动，且位于炉外，所述反射板则固定在所述转动轴上，所述转动轴转动时，所述反射板随其转动，每转动一圈对所述传感器发出的信号反射一次，以便提示所述镀膜机下一步该进行的动作。The first driving mechanism drives the rotating shaft to perform 360-degree forward and reverse motions, that is, reverse and reset after 360-degree rotation, which is mainly used to avoid entanglement of pipelines leading out of the furnace body. The above-mentioned movement mode is controlled by a photoelectric sensor assembly, which includes a sensor and a reflector. On the shaft, when the rotating shaft rotates, the reflecting plate rotates with it, and reflects the signal sent by the sensor every time it rotates, so as to prompt the coating machine to perform the next action.
为实现平面滚动平稳转动，所述转盘与其下方的所述炉体底板之间具有如下连接结构：所述转盘的内圈均布有若干个平面推力球轴承，所述转盘的外圈均布有若干个深沟球轴承，所述转盘通过所述平面推力球轴承和所述深沟球轴承由所述炉体底板支承，所述转盘的上平面外圆边沿上，还均布有若干个用于转盘的上平面限位的靠位压轮，所述靠位压轮也安装在所述炉体底板上。In order to realize flat rolling and smooth rotation, the following connection structure is provided between the turntable and the bottom plate of the furnace below it: the inner ring of the turntable is evenly distributed with several plane thrust ball bearings, and the outer ring of the turntable is evenly distributed with Several deep groove ball bearings, the turntable is supported by the bottom plate of the furnace body through the plane thrust ball bearing and the deep groove ball bearing. The positioning pressure wheel is limited on the upper plane of the turntable, and the positioning pressure wheel is also installed on the bottom plate of the furnace body.
所述第三传动机构为链轮传动机构，所述升降台的两侧分别通过一套双排链条的链轮传动机构拉动而实现升降运动，为了使升降台升降时保持平稳不摆动，所述升降台上安装有两套导向滑轮组件，两套所述导向滑轮组件中的滑轮，分别抵靠着，所述旋转架上的一竖立工字型钢的两个互相垂直的侧壁。The third transmission mechanism is a sprocket transmission mechanism, and the two sides of the lifting platform are respectively pulled by a sprocket transmission mechanism of a set of double chains to realize the lifting movement. In order to keep the lifting platform stable and not swinging when lifting, the Two sets of guide pulley assemblies are installed on the lifting platform, and the pulleys in the two sets of guide pulley assemblies respectively lean against two mutually perpendicular side walls of an upright I-shaped steel on the rotating frame.
相比于现有技术，本实用新型具有如下有益效果：Compared with the prior art, the utility model has the following beneficial effects:
1)本实用新型可方便的实现动力从非真空区到真空区的传递，从而驱动安装其上的位于真空区中的电弧源组件，在水平面内作旋转运动和在竖直方向上作升降运动，且所述旋转运动和升降运动由两套独立的驱动机构分别控制，从而实现调速方便；上述本实用新型可方便的实现动力从非真空区到真空区的传递的陈述，基于如下基础：本实用新型第一驱动机构和第二驱动机构动力，从非真空区到真空区的传递，均通过转轴实现，而转轴的动密封已是很成熟的技术，易于操作；1) The utility model can conveniently realize the transmission of power from the non-vacuum area to the vacuum area, so as to drive the arc source assembly installed on it and located in the vacuum area, to perform rotational movement in the horizontal plane and lift movement in the vertical direction , and the rotary motion and the lifting motion are controlled by two independent drive mechanisms, so as to realize the convenience of speed regulation; the statement that the above-mentioned utility model can conveniently realize the transmission of power from the non-vacuum area to the vacuum area is based on the following basis: The transmission of the power of the first driving mechanism and the second driving mechanism of the utility model from the non-vacuum area to the vacuum area is realized through the rotating shaft, and the dynamic sealing of the rotating shaft is a very mature technology and is easy to operate;
2)本实用新型通过在旋转架顶部，设置与升降台上活动安装的电弧源组件匹配的限位器，使电弧源组件在随升降台上升靠近旋转架顶部时，限位器下压电弧源组件尾端，使其前端像高低板一样绕一支点旋转仰起，适时抬头与大型罐体的弧形封顶盖相对，可实现大型罐体弧形封顶盖的仰角镀膜。2) The utility model arranges a limiter on the top of the rotating frame to match the arc source assembly movable on the lifting table, so that when the arc source assembly rises with the lifting table and approaches the top of the rotating frame, the limiter presses down on the arc source The tail end of the component makes the front end rotate around a point like a high and low plate, and raise its head in time to face the arc-shaped top cover of the large tank body, which can realize the elevation-angle coating of the arc-shaped top cover of the large tank body.
附图说明Description of drawings
图1为本实用新型所涉及的大型罐体内壁镀膜用真空阴极电弧镀膜机的结构示意图；Fig. 1 is the structural representation of the vacuum cathodic arc coating machine for large-scale tank inner wall coating that the utility model relates to;
图2为图1中Ⅰ处放大图，展示机架连接绝缘结构；Figure 2 is an enlarged view of part I in Figure 1, showing the rack connection insulation structure;
图3为图1中Ⅱ处放大图，展示外电机传动部分的结构；Fig. 3 is an enlarged view of II in Fig. 1, showing the structure of the transmission part of the external motor;
图4为图3中Ⅱ-Ⅰ处放大图，展示外传动装置的结构；Figure 4 is an enlarged view of II-I in Figure 3, showing the structure of the external transmission device;
图5a为图3中Ⅱ-Ⅱ处转盘托轮组件的侧视图；Figure 5a is a side view of the turntable support wheel assembly at II-II in Figure 3;
图5b为图3中Ⅱ-Ⅱ处转盘托轮组件的俯视图；Fig. 5b is a top view of the turntable support wheel assembly at II-II in Fig. 3;
图6为图3中Ⅱ-Ⅲ处放大图，展示转盘靠位压轮的结构；Fig. 6 is an enlarged view of Ⅱ-Ⅲ in Fig. 3, showing the structure of the turntable resting pressure roller;
图7a为旋转架的正视图；Figure 7a is a front view of the swivel frame;
图7b为旋转架的侧视图；Figure 7b is a side view of the swivel frame;
图8为图7a中Ⅲ处的放大图，展示支撑靶轴承位；Fig. 8 is an enlarged view of III in Fig. 7a, showing the supporting target bearing position;
图9为图7b中Ⅳ处的放大图，展示升降台的升降传动装置；Fig. 9 is an enlarged view of place IV in Fig. 7b, showing the lifting transmission device of the lifting platform;
图10为图9中Ⅳ-Ⅰ处升降台调节轮的仰视图；Fig. 10 is the bottom view of the lifting platform adjusting wheel at IV-I place in Fig. 9;
图11为图9中Ⅳ-Ⅱ处升降台的导向滑轮的结构示意图；Fig. 11 is the schematic structural view of the guide pulley of the lifting platform at IV-II place in Fig. 9;
图12为图7a中Ⅴ处的放大图，展示限位器的结构；Figure 12 is an enlarged view at V in Figure 7a, showing the structure of the stopper;
图13为图7a中Ⅵ处的放大图，展示升降台传动副链轮的结构；Fig. 13 is an enlarged view of VI in Fig. 7a, showing the structure of the auxiliary sprocket for the transmission of the lifting platform;
图14a为图7b中Ⅶ处电弧源组件的结构示意图；Fig. 14a is a schematic structural view of the arc source assembly at VII in Fig. 7b;
图14b为图14a中电弧源组件的俯视图；Figure 14b is a top view of the arc source assembly in Figure 14a;
图15为图14a中Ⅶ-Ⅰ处的放大图，展示弧靶组转动机构；Figure 15 is an enlarged view of VII-I in Figure 14a, showing the arc target group rotation mechanism;
图16a为图7a中Ⅷ处的放大图，展示升降台传动装置的结构；Fig. 16a is an enlarged view of place VIII in Fig. 7a, showing the structure of the lifting platform transmission;
图16b为图16a的侧视图；Figure 16b is a side view of Figure 16a;
图17为图16a中Ⅷ-Ⅰ处的放大图、展示升降台传动轴部分的结构；Fig. 17 is an enlarged view of the VIII-I place in Fig. 16a, showing the structure of the drive shaft part of the lifting platform;
图18为图16a中Ⅷ-Ⅱ处的放大图，展示升降台限位装置的结构；Fig. 18 is an enlarged view of VIII-II in Fig. 16a, showing the structure of the lifting platform limiter;
图19为图16b中Ⅷ-Ⅲ处升降台驱动链条压紧轮的结构示意图。Fig. 19 is a schematic structural view of the drive chain pinch wheel of the lifting platform at VIII-III in Fig. 16b.
具体实施方式Detailed ways
图1为镀膜机正立面视图，表明镀膜机主体结构。机架1支承住镀膜机的主体，炉体平台2属于真空炉的底盘，被镀工件为化学罐2-4，它是一种带外凸的弧形封顶盖的圆筒状大型罐体，它倒扣在炉体平台2上，炉体平台2对应化学罐2-4开口边沿的位置设有真空密封槽和O形密封圈，化学罐2-4成为炉体的炉壁，离子镀的镀层就镀在化学罐2-4内壁上。为了适应不同直径的化学罐2-4镀膜，炉体平台2 上设有不同直径的密封槽和O形密封圈；为了适应不同高度的化学罐2-4镀膜，可在炉体平台2相应位置上垫上不同高度的带密封圈的附加法兰2-5，以补偿不同化学罐2-4的高度差。Figure 1 is a front view of the coating machine, showing the main structure of the coating machine. The frame 1 supports the main body of the coating machine, the furnace body platform 2 belongs to the chassis of the vacuum furnace, and the workpiece to be plated is a chemical tank 2-4, which is a large cylindrical tank body with a convex arc-shaped top cover. It is buckled upside down on the furnace body platform 2, and the position of the furnace body platform 2 corresponding to the opening edge of the chemical tank 2-4 is provided with a vacuum sealing groove and an O-shaped sealing ring. The chemical tank 2-4 becomes the furnace wall of the furnace body, and the ion plating The coating is just plated on the chemical tank 2-4 inner wall. In order to adapt to the coating of chemical tanks 2-4 with different diameters, the furnace platform 2 is provided with sealing grooves and O-rings of different diameters; Additional flanges 2-5 with sealing rings of different heights are placed on the pad to compensate for the height difference of different chemical tanks 2-4.
图2为图1中Ⅰ处的局部放大图，表明机架1连接的绝缘处理方式。炉体平台 2连接支承架焊连在机架连接焊接板3上，而机架连接板1-1与机架1连接，而机架连接焊接板3与机架连接板1-1之间由机架绝缘板4隔离，用六角螺栓7把前述三者连接起来。六角螺栓7套装有机架绝缘子5和机架绝缘帽6，以保证连接绝缘。Figure 2 is a partial enlarged view of point I in Figure 1, showing the insulation treatment method for the connection of rack 1. The furnace body platform 2 is connected to the support frame and welded on the frame connection welding plate 3, and the frame connection plate 1-1 is connected with the frame 1, and the frame connection welding plate 3 and the frame connection plate 1-1 are connected by The frame insulating plate 4 is isolated, and the aforementioned three are connected with a hexagonal bolt 7 . The hex bolt 7 is equipped with a frame insulator 5 and a frame insulating cap 6 to ensure connection insulation.
图3为图1中Ⅱ处的局部放大图，表明外电机传动部分。它包括两部分，其一为驱动电机与减速机部分(对应第一驱动机构)，其二为外传动机构(对应第一传动机构)。驱动电机与减速机部份包括电机、电机固定与调节装置、传动皮带和传动轮、减速机与减速机固定机构、减速机输出传动齿轮等。驱动电机与减速机部分包括：带底脚无凸缘电机11、V型带12、传动皮带轮13、减速机20。电机11转动通过V型带12带动传动皮带轮13转动，从而驱动减速机20运转。减速机20的上部伸出减速机轴套14，其上套有传动小齿轮15，它们组成减速机20的输出端。电机11通过六角螺栓10固定在电机固定板9和电机调节板8上，而电机调节板8固连在机架加强无缝管1-3上。减速机20通过六角螺栓21绝缘固连在减速机固定板 24上，六角螺栓21套有减速机绝缘子22，减速机底座与减速机固定板24之间隔有减速机绝缘垫23，减速机固定板24固定在机架加强方通1-2上，减速机20上方的传动小齿轮15与转动轴27下端的传动大齿轮40咬合，如图4所示，从而带动转动轴)27转动，转动轴27的上端固连转盘26，旋转架70固定支承在转盘26上(参图见7a)，转动轴27上顶端延伸部的左侧引管置有连接靶罩非真空区的波纹管16，连接电弧靶的电缆、控制导线、压缩空气导管、冷却水管均穿进波纹管16内腔送入靶罩非真空区，转动轴27上方延伸部的上顶盖为接线法兰17，转动轴27上方延伸部的右侧引管由内六角圆头螺钉19固定接线换接盲板18(此图示是设备处安装状态)。正常运转情况下，转动轴27上方延伸部的右侧引管应连接波纹管(未划出)，该波纹管连接到图16所示的旋转架大气传动舱内，让该舱内连通大气，且该舱内伺服电机等设备动力导线和信号控制线均从该波纹管内腔导入(均未划出)。转动轴 27的外壁通过动密封和静密封绝缘支承在炉体底板2-2上，2-1为炉体真空围板， 2-3为炉体底板加强筋，炉体底板2-2通过炉体真空围板2-1与其上方的炉体平台2 的内廓密封连接，构成完整的真空炉底盘。Fig. 3 is a partially enlarged view of II in Fig. 1, showing the transmission part of the external motor. It includes two parts, one is the drive motor and reducer (corresponding to the first driving mechanism), and the other is the outer transmission mechanism (corresponding to the first transmission mechanism). The drive motor and reducer part includes motor, motor fixing and adjusting device, transmission belt and drive wheel, reducer and reducer fixing mechanism, reducer output transmission gear, etc. The driving motor and the reducer part include: a flangeless motor with feet 11 , a V-belt 12 , a transmission pulley 13 and a reducer 20 . The rotation of the motor 11 drives the transmission pulley 13 to rotate through the V-shaped belt 12, thereby driving the speed reducer 20 to run. The top of speed reducer 20 stretches out speed reducer axle sleeve 14, and transmission pinion 15 is sheathed on it, and they form the output end of speed reducer 20. The motor 11 is fixed on the motor fixing plate 9 and the motor adjusting plate 8 through the hexagonal bolt 10, and the motor adjusting plate 8 is fixedly connected on the frame reinforced seamless pipe 1-3. The reducer 20 is insulated and fixedly connected to the reducer fixing plate 24 through the hexagonal bolt 21, the hexagonal bolt 21 is covered with a reducer insulator 22, the reducer base and the reducer fixing plate 24 are separated by a reducer insulating pad 23, and the reducer fixing plate 24 is fixed on the rack reinforcement square 1-2, and the drive pinion 15 on the top of the reducer 20 is engaged with the drive gear 40 at the lower end of the rotating shaft 27, as shown in Figure 4, thereby driving the rotating shaft) 27 to rotate, and the rotating shaft The upper end of 27 is fixedly connected with the turntable 26, and the swivel frame 70 is fixedly supported on the turntable 26 (referring to figure 7a), and the left side guide tube of the top extension part on the turning shaft 27 is equipped with a bellows 16 connected to the non-vacuum area of the target cover, and connected to The cables, control wires, compressed air conduits and cooling water pipes of the arc target are all penetrated into the inner cavity of the bellows 16 and sent to the non-vacuum area of the target cover. The right guide pipe of the extension part is fixed with a hexagon socket head cap screw 19 to replace the blind plate 18 (this figure shows the installation state of the equipment). Under normal operating conditions, the right guide pipe of the extension above the rotating shaft 27 should be connected to a bellows (not drawn), and the bellows is connected to the atmospheric transmission cabin of the rotating frame shown in Figure 16, allowing the cabin to communicate with the atmosphere. And the power wires and signal control wires of equipment such as servo motors in the cabin are all introduced from the inner chamber of the bellows (not drawn). The outer wall of the rotating shaft 27 is supported on the furnace body bottom plate 2-2 through dynamic seal and static seal insulation, 2-1 is the vacuum coaming of the furnace body, 2-3 is the reinforcing rib of the furnace body bottom plate, and the furnace body bottom plate 2-2 passes through the furnace body. The body vacuum coaming 2-1 is sealed and connected with the inner profile of the furnace body platform 2 above to form a complete vacuum furnace chassis.
图4为图3中Ⅱ-Ⅰ处的局部放大图，为外传动装置。它表明转动轴27与四周部件的关系。转动轴27是一筒状空心轴，其外壁通过动、静密封固定在炉体底板 2-2上，即转动轴27上段处于真空炉内，而转动轴27中空内腔连通大气。具体结构如下：由六角螺栓25把转盘26紧固在转动轴27的上顶端上，转盘26的下底面置于平面推力球轴承30上，而推力球轴承30置于平面轴承座33上，而平面轴承座 33置于平面轴承绝缘法兰34上，而33和34由六角螺栓31穿过平面轴承座绝缘子 32，被固定在炉体底板2-2上。平面推力球轴承30支承着转盘26，实现平面滚动平稳转动。转动轴27中段套装传动轴承座36，其上端与转动轴27之间套装有深沟球轴承45，传动轴承座36有内凸肩托承着整个深沟球轴承45，而转动轴27有外凸肩压着45的内轴承圈，另用六角螺栓28把传动压圈29固定在传动轴承座36上，使深沟球轴承45完全定位。传动轴承座36的中段与转动轴27之间套装骨架油封 47，实现真空动密封，骨架油封47下方依次套装传动隔圈46、深沟球轴承45、传动压圈29，用六角螺栓28把传动压圈29固定在传动轴承座36上，另再配上传动垫圈39限位深沟球轴承45，把上述各部件定位。用六角螺栓38穿过传动绝缘子37 把传动轴承座36、通过传动绝缘法兰35紧固在炉体底板2-2上。转动轴27下端面用六角螺栓25固连传动大齿轮40。传感器43通过传动传感器固定板44固定在传动轴承座36上，是静止不动的。反射板42紧贴传动反射板固定板41再固连在传动大齿轮40上，反射板42随着传动大齿轮40转动，每转动一圈对传感器43发出的信号反射一次，提示镀膜机下一步该进行的动作。Fig. 4 is a partially enlarged view of II-I in Fig. 3, which is an external transmission device. It shows the relationship between the axis of rotation 27 and the surrounding components. Rotating shaft 27 is a tubular hollow shaft, and its outer wall is fixed on the body of heater base plate 2-2 by dynamic and static seals, that is, the upper section of rotating shaft 27 is in the vacuum furnace, and the hollow inner chamber of rotating shaft 27 communicates with the atmosphere. The specific structure is as follows: the turntable 26 is fastened on the upper top end of the rotating shaft 27 by the hexagonal bolt 25, the lower bottom surface of the turntable 26 is placed on the plane thrust ball bearing 30, and the thrust ball bearing 30 is placed on the plane bearing seat 33, and The plane bearing seat 33 is placed on the plane bearing insulating flange 34, and 33 and 34 pass the plane bearing seat insulator 32 by the hexagonal bolt 31, and are fixed on the body of heater base plate 2-2. The plane thrust ball bearing 30 supports the turntable 26 to realize the plane rolling and stable rotation. The transmission bearing seat 36 in the middle section of the rotating shaft 27 is fitted with a deep groove ball bearing 45 between its upper end and the rotating shaft 27. The transmission bearing seat 36 has an inner shoulder supporting the whole deep groove ball bearing 45, and the rotating shaft 27 has an outer The shoulder is pressed against the inner bearing ring of 45, and the transmission pressure ring 29 is fixed on the transmission bearing seat 36 with the hexagonal bolt 28 in addition, so that the deep groove ball bearing 45 is fully positioned. A skeleton oil seal 47 is set between the middle section of the transmission bearing seat 36 and the rotating shaft 27 to realize vacuum dynamic sealing. The bottom of the skeleton oil seal 47 is sequentially fitted with a transmission spacer 46, a deep groove ball bearing 45, and a transmission pressure ring 29. Pressure ring 29 is fixed on the transmission bearing seat 36, and is equipped with transmission washer 39 space-limiting deep groove ball bearings 45 in addition, and above-mentioned each parts are positioned. Pass transmission insulator 37 with hexagonal bolt 38 and transmission bearing seat 36, be fastened on the furnace body base plate 2-2 by transmission insulation flange 35. The lower end surface of the rotating shaft 27 is connected with the transmission bull gear 40 with the hexagonal bolt 25 . The sensor 43 is fixed on the transmission bearing seat 36 by the transmission sensor fixing plate 44, and is stationary. The reflection plate 42 is closely attached to the transmission reflection plate fixing plate 41 and then fixedly connected to the transmission gear 40. The reflection plate 42 rotates with the transmission gear 40, and the signal sent by the sensor 43 is reflected once every time it rotates, prompting the next step of the coating machine The action to be performed.
图5a、5b为图3中Ⅱ-Ⅱ处转盘托轮组件的侧视和俯视放大图。它是用均布8 只球轴承的轮圈支承着转盘26下平面靠外圆处，保证转盘26平稳转动。转盘托轮组件包括托轮座、托轮轴、深沟轴承、托轮绝缘件与防尘件以及紧固件组成。其具体结构如下：托轮座48是在一块矩形平底板的两长边中部、对称地竖焊两块支承板构成，竖立支承板上部开孔，托轮轴54从一端开孔穿入，托轮轴54上套装两只深沟球轴承56，其左右分别用三只托轮隔圈55隔开，托轮轴54再穿入另一端支承板开孔，轴端头用轴用弹性挡圈57限位，托轮座底板用六角螺栓49穿过托轮防尘帽 50、托轮绝缘子51，再通过托轮防尘罩52、托轮座绝缘板53与炉体底板2-2固定。Figures 5a and 5b are enlarged side and top views of the turntable support wheel assembly at II-II in Figure 3 . It supports the lower plane of the rotating disk 26 by the outer circle with the wheel rim of evenly distributed 8 ball bearings to ensure that the rotating disk 26 rotates steadily. The turntable supporting wheel assembly consists of supporting wheel seat, supporting wheel shaft, deep groove bearing, supporting wheel insulation and dustproof parts and fasteners. Its specific structure is as follows: supporting wheel seat 48 is formed by welding two supporting plates symmetrically vertically in the middle of the two long sides of a rectangular flat bottom plate. Two deep groove ball bearings 56 are set on 54, and its left and right sides are separated by three support wheel spacers 55 respectively, and the support wheel shaft 54 penetrates into the opening of the support plate at the other end, and the shaft end is limited by the shaft circlip 57 , the supporting wheel base plate passes supporting wheel dustproof cap 50, supporting wheel insulator 51 with hexagonal bolt 49, fixes by supporting wheel dust cover 52, supporting wheel base insulating plate 53 and body of heater base plate 2-2 again.
图6为图3中Ⅱ-Ⅲ处的局部放大图，为转盘靠位压轮。它位于转盘26的上平面的外圆边沿上，包括多个均布的靠位压轮，用于转盘26的上平面限位，不让其向上跳动而平稳转动，转盘靠位压轮组件包括靠位轮固定座、靠位轮轴、靠位轮隔圈、深沟球轴承等，两只深沟球轴承67套穿在靠位轮轴69上，两只深沟球轴承67之间用靠位轮隔圈一68隔开，靠近靠位轮固定座63的深沟球轴承67用靠位轮隔圈二 66隔开限位，用六角螺栓65通过靠位轮垫圈64把靠位轮轴69横向固定在靠位轮固定座63的竖立支承板上。两只深沟球轴承67压在转盘26上平面起限位稳定作用。靠位轮固定座63为L型焊接件，其座底板压在靠位轮防尘罩59和靠位轮绝缘板58 上，用六角螺栓62穿过靠位轮防尘帽61和靠位轮绝缘子60，把靠位轮固定座63 紧固在炉体底板2-2上。Fig. 6 is a partial enlarged view of II-III in Fig. 3, which is the positioning pressure roller of the turntable. It is located on the outer circular edge of the upper plane of the turntable 26, and includes a plurality of evenly distributed positioning pressure rollers, which are used to limit the upper plane of the turntable 26, so as to prevent it from jumping upwards and rotate smoothly. The turntable positioning pressure roller assembly includes Leaning wheel fixed seat, leaning wheel shaft, leaning wheel spacer, deep groove ball bearing etc., two deep groove ball bearings 67 are sleeved on the leaning wheel axle 69, between two deep groove ball bearings 67 use leaning position Wheel spacer ring one 68 separates, and the deep groove ball bearing 67 near leaning wheel fixed seat 63 separates the position with leaning wheel spacer ring two 66, passes leaning wheel washer 64 with leaning wheel shaft 69 laterally with hexagonal bolt 65 Be fixed on the upright support plate of leaning wheel fixed seat 63. Two deep groove ball bearings 67 are pressed on the upper plane of the rotating disk 26 to play a position-limiting and stabilizing effect. The position wheel fixed seat 63 is an L-shaped weldment, and its base plate is pressed on the position wheel dust cover 59 and the position wheel insulation plate 58, and passes the position wheel dust cap 61 and the position wheel with the hexagonal bolt 62 The insulator 60 fastens the positioning wheel holder 63 on the furnace body bottom plate 2-2.
图7a、7b为旋转架正立面和侧立面的视图。旋转架70由六角螺栓75紧固在转盘26的中央，随同转盘26转动而旋转，旋转架70是数米高的竖立支架，升降台 73活动安装在旋转架70上，可沿竖立支架上升和下降，并随同旋转架70旋转。旋转架70上配置有：支撑靶轴承位Ⅲ，升降传动装置Ⅳ，限位器Ⅴ，升降台传动副轮Ⅵ，电弧源组件Ⅶ和升降台传动装置Ⅷ等。其中最关键的功能组件就是电弧源组件，靠电弧靶发射等离子体实现离子镀膜，而其他组件都是为配合电弧源组件对被镀化学罐2-4内壁镀膜位置变化，实现电弧靶升降、旋转、仰角和电弧靶相对内壁距离伸缩调节等进行镀膜而设置的。升降台73是通过双排链条72的拉动实现升降的， 74是链头，它固定在升降台73上。旋转架70上附有铜制拖链71，连接电弧源组件的波纹管等附在其上，当升降台73运动时，这些波纹管随铜制拖链71运动就有了导向。Figures 7a and 7b are views of the front and side elevations of the rotating frame. Rotating frame 70 is fastened on the center of rotating disk 26 by hexagonal bolt 75, rotates with rotating disk 26, rotating frame 70 is the vertical support of several meters high, and lifting platform 73 is installed on rotating frame 70 movably, can rise and move along the vertical support. Descend and rotate with the rotating frame 70. The rotating frame 70 is equipped with: supporting target bearing position III, lifting transmission device IV, limiter V, lifting platform driving secondary wheel VI, arc source assembly VII and lifting platform transmission device VIII, etc. The most critical functional component is the arc source component, which realizes ion coating by emitting plasma from the arc target, and other components are used to cooperate with the arc source component to change the coating position of the inner wall of the chemical tank 2-4 to be plated, and realize the lifting and rotation of the arc target , Elevation angle and distance adjustment of the arc target relative to the inner wall are set for coating. Lifting platform 73 realizes lifting by the pulling of double row chain 72, and 74 is chain head, and it is fixed on lifting platform 73. Copper drag chain 71 is attached on the swivel frame 70, and the bellows etc. connected to the arc source assembly are attached thereto. When the lifting platform 73 moves, these bellows have just been guided along with the copper drag chain 71 movement.
图14a、14b是图7b中Ⅶ处电弧源组件相关视图的放大图，它包括弧靶组件和弧靶支承组件。弧靶组件包括若干电弧靶，还包括一弧靶安装座，弧靶安装座为一密闭箱体，由弧靶罩和弧靶法兰构成。弧靶组件位于图14a右边，弧靶罩115的右前端面有弧靶法兰119，它是一块电弧靶安装板，用六角螺栓118密封紧固在弧靶罩115右前端面上，其上分左右两列高度方向错位的靶位，各列安装三只电弧靶 119-1。弧靶罩115下方有密封焊连的波纹管(未画出)，弧靶罩115内腔通过波纹管连通大气，电弧靶119-1的供电、供水、供气的导线和柔性管道均沿波纹管内腔导入。弧靶支承组件由弧靶罩支架、弧靶支架配重板、弧靶支撑架、弧靶支撑架抱箍、靶组转动组件等组成。弧靶罩115后背面左右紧连两支弧靶罩伸缩支承杆115-1，它穿过弧靶支撑架抱箍117被与上述抱箍固连的弧靶支撑架116支撑着，弧靶罩伸缩支承杆115-1的另一端套入弧靶架112的弧靶架套管112-1内，当调整好伸缩距离后，则用六角螺栓114贯穿上述115-1和112-1，不让其转动和移位，再用六角螺栓113拧紧定位，弧靶架112的尾端装有靶配重板111，它可调节位置以平衡另一端靶弧组件的重量，使电弧源组件保持水平。后面有图进一步显示弧靶架112如何连接到升降台73上。Figures 14a and 14b are enlarged views of the relative view of the arc source assembly at VII in Figure 7b, which includes the arc target assembly and the arc target support assembly. The arc target assembly includes several arc targets, and also includes an arc target mounting seat, which is an airtight box composed of an arc target cover and an arc target flange. The arc target assembly is located on the right side of Fig. 14a. There is an arc target flange 119 on the right front end of the arc target cover 115, which is an arc target mounting plate sealed and fastened on the right front end of the arc target cover 115 with hexagonal bolts 118. The upper part is divided into left and right sides. There are two rows of target positions dislocated in the height direction, and three arc targets 119-1 are installed in each row. Below the arc target cover 115, there is a bellows (not shown) connected by sealing welding, and the inner chamber of the arc target cover 115 is connected to the atmosphere through the bellows, and the electric wires and flexible pipes of the arc target 119-1 for power supply, water supply, and gas supply are all along the corrugated lines. Introduced into the lumen of the tube. The arc target support assembly is composed of the arc target cover bracket, the arc target support weight plate, the arc target support frame, the arc target support frame hoop, the target group rotating assembly and so on. The back side of arc target cover 115 is closely connected with two arc target cover telescopic support rods 115-1. The other end of the telescopic support rod 115-1 is inserted into the arc target frame casing 112-1 of the arc target frame 112. After the telescopic distance is adjusted, the hexagonal bolt 114 is used to run through the above-mentioned 115-1 and 112-1 to prevent the It rotates and shifts, then tightens and locates with hexagon bolt 113, and the tail end of arc target frame 112 is equipped with target counterweight plate 111, and its position can be adjusted to balance the weight of the target arc assembly at the other end, so that the arc source assembly remains horizontal. There are figures in the back to further show how the arc target frame 112 is connected to the lifting platform 73 .
图15为图14a中Ⅶ-Ⅰ处的局部放大图，显示电弧源组件的转动连接机构。弧靶罩115背面两侧的弧靶罩伸缩杆115-1套入弧靶架112的弧靶架套管112-1内，弧靶架套管112-1的下方焊接有连接块112-2，用六角螺栓121把弧靶架抱箍一120 紧固在上述连接块112-2上，再用内六角圆柱头螺栓122把弧靶架抱箍二123紧固在弧靶架抱箍一120上，上述两抱箍之间夹套着靶组转动轴79。Fig. 15 is a partially enlarged view of VII-I in Fig. 14a, showing the rotating connection mechanism of the arc source assembly. The arc target cover telescopic rods 115-1 on both sides of the arc target cover 115 are inserted into the arc target frame casing 112-1 of the arc target frame 112, and the arc target frame casing 112-1 is welded with a connecting block 112-2 below , use the hexagon bolt 121 to fasten the hoop one 120 of the arc target frame on the above-mentioned connection block 112-2, and then fasten the hoop two 123 of the arc target frame to the hoop one 120 of the arc target frame with the hexagon socket head bolt 122 Above, the target group rotating shaft 79 is clamped between the above-mentioned two hoops.
图8是图7a中Ⅲ处的放大图，显示弧靶架上的靶组转动轴及其轴承结构。弧靶架112固连在左右两组弧靶架抱箍一120和弧靶架抱箍二123上，通过上、下两只弧靶架抱箍120和123固定在靶组转动轴79上。转动轴79左右两端由对称的轴承与轴承座支承着，实现转动。其轴承和轴承座的结构；升降台73在左右相应位置竖立两块支承板73-1，用六角螺栓76把靶转动轴承座77固定在该竖立支承板73-1 相应的孔位上，靶组转动轴79两端分别套穿入左右两端靶转动轴承座77内的两只深沟球轴承77-1上，两只深沟球轴承77-1之间置有靶转动轴承隔圈80，轴端的深沟球轴承77-1用孔用弹性挡圈78限位。Fig. 8 is an enlarged view of III in Fig. 7a, showing the rotating shaft of the target group on the arc target frame and its bearing structure. Arc target frame 112 is fixedly connected on two groups of arc target frame hoops one 120 and arc target frame hoop two 123, is fixed on the target group rotating shaft 79 by upper and lower two arc target frame hoops 120 and 123. The left and right ends of the rotating shaft 79 are supported by symmetrical bearings and bearing seats to realize rotation. The structure of its bearing and bearing seat; lifting platform 73 erects two support plates 73-1 at the left and right corresponding positions, and target rotating bearing seat 77 is fixed on the corresponding hole position of this erect support plate 73-1 with hex bolt 76, and the target The two ends of the group rotating shaft 79 are sleeved respectively on the two deep groove ball bearings 77-1 in the left and right ends of the target rotating bearing seat 77, and a target rotating bearing spacer ring 80 is placed between the two deep groove ball bearings 77-1. , the deep groove ball bearing 77-1 at the shaft end is spaced with a circlip 78 for the hole.
图9为图7b中Ⅳ处的局部放大图，显示升降台的升降传动装置。升降台73被 16A双排链条72的链头74锁住固连在一起，由传动链轮142咬合16A双排链条72，拉动升降台73升降。Fig. 9 is a partially enlarged view of place IV in Fig. 7b, showing the lifting transmission device of the lifting platform. Lifting platform 73 is locked and fixedly connected together by the chain head 74 of 16A double-row chain 72, and 16A double-row chain 72 is occluded by transmission sprocket wheel 142, pulls lifting platform 73 elevating.
图10为图9中Ⅳ-Ⅰ处的升降台调节轮组件的仰视图，升降台调节轮组件包括升降台调节轮、两只深沟球轴承、升降台调节轮轴、轴固定板等，升降台调节链轮 91的上、下端面各套装一只深沟球轴承90，深沟球轴承90套装在升降台调节轮轴 89的前段细径部分上，轴端有轴用弹性挡圈92限位，处于下端面的深沟球轴承90 抵在升降台调节轮轴89下段粗径的环肩上，升降台调节轮轴89下端头插入轴固定板89-1的孔中，并焊接固连。用六角螺栓93将轴固定板89-1横向固定在升降台 73的立板上，让升降台调节链轮91与16A双排链条72咬合适当压紧72，使链条张紧力适中，令升降台73升降更平稳。Figure 10 is a bottom view of the lifting platform adjusting wheel assembly at IV-I in Figure 9. The lifting platform adjusting wheel assembly includes the lifting platform adjusting wheel, two deep groove ball bearings, the lifting platform adjusting wheel shaft, the shaft fixing plate, etc., and the lifting platform A deep groove ball bearing 90 is respectively set on the upper and lower end surfaces of the adjustment sprocket 91, and the deep groove ball bearing 90 is set on the small diameter part of the front section of the lifting platform adjustment wheel shaft 89, and the shaft end is limited by a circlip 92 for the shaft. The deep groove ball bearing 90 that is in the lower end surface is against the ring shoulder of the thick diameter of the lower part of the lifting platform adjustment wheel shaft 89, and the lower end of the lifting platform adjustment wheel shaft 89 is inserted in the hole of the shaft fixing plate 89-1, and is welded and connected. Use hexagonal bolts 93 to fix the shaft fixing plate 89-1 horizontally on the vertical plate of the lifting platform 73, let the adjusting sprocket 91 of the lifting platform and the 16A double-row chain 72 bite properly and press 72, so that the tension of the chain is moderate, so that the lifting Platform 73 lifting is more stable.
图11为图9中Ⅳ-Ⅱ处的局部放大图，为升降台73的导向滑轮。该组件主要包括升降台滑轮、深沟球轴承、升降台滑轮轴、升降台滑轮座和升降台滑轮套筒等。升降台滑轮轴85架在升降台滑轮座81的两立板通孔上，升降台滑轮轴83中央套装深沟球轴承84，该深沟球轴承84外圈紧套装升降台滑轮83，并用孔用弹性挡圈88 限位。深沟球轴承84的内圈与升降台滑轮座81之间用升降台滑轮套87定位，升降台滑轮轴85端部由轴用弹性挡圈86限位，升降台滑轮座81焊接有平底板，用内六角圆柱头螺钉82把其固定在升降台的平底板上。采用两套导向滑轮组件，让滑轮分别抵靠着旋转架70上的竖立工字型钢的两个呈互相垂直方向的侧壁上，即两组导向滑轮组件成互为直角方向安装，一组让滑轮抵着工字钢的中心壁面上，另一组让滑轮抵着与中心壁面垂直的侧壁上，这样能使升降台73运动时保持平稳不摆动。FIG. 11 is a partially enlarged view of IV-II in FIG. 9 , which is the guide pulley of the lifting platform 73 . The component mainly includes lifting platform pulley, deep groove ball bearing, lifting platform pulley shaft, lifting platform pulley seat and lifting platform pulley sleeve, etc. Lifting platform pulley shaft 85 is framed on the two vertical plate through holes of lifting platform pulley seat 81, and lifting platform pulley shaft 83 central set deep groove ball bearing 84, and this deep groove ball bearing 84 outer ring is tightly set lifting platform pulley 83, and uses hole Use the circlip 88 to limit the position. The inner ring of the deep groove ball bearing 84 and the lifting platform pulley seat 81 are positioned with the lifting platform pulley sleeve 87, and the end of the lifting platform pulley shaft 85 is limited by the shaft circlip 86, and the lifting platform pulley seat 81 is welded with a flat bottom plate , fix it on the flat bottom plate of the lifting platform with the hexagon socket head cap screw 82. Two sets of guide pulley assemblies are adopted, and the pulleys are respectively leaned against two side walls of the vertical I-shaped steel on the rotating frame 70 in a mutually perpendicular direction, that is, two sets of guide pulley assemblies are installed at right angles to each other, and one set allows The pulley is against the central wall of the I-beam, and another group allows the pulley to be against the side wall perpendicular to the central wall, so that the lifting platform 73 can be moved steadily and does not swing.
图12为图7a中Ⅴ处限位器的局部放大图，用于使电弧源组件仰头运动。该装置是安装在旋转架70顶部的一个框架，框架下端装有深沟球轴承和转承套，当升降台73上升到此位置时，活动安装在升降台73上的弧靶架112的尾端与上述框架下端轴承组件活动接触，升降台73被拉动继续上升时，弧靶架112的尾部被上述框架限制不能再上升，但升降台73还继谜上升，则弧靶架112上的靶组转动轴79也继续上升，因弧靶架112的尾部受阻，只能靠靶组转动轴79相对两端轴承转动来适应，这样相当于把弧靶罩115部分离开原来水平位置抬起来向上仰角，可实现朝罐体顶盖部镀膜。限位器包括转动调节固定座99，它是框架式结构，其上端焊接固连转动调节固定座连接板99-1，它是一条横樑，用六角螺栓100把它和旋转架顶板79-1 固定在一起。转动调节固定座99的左右两臂杆下端头均装有转动调节轴承组件，它由穿套在转动调节固定座99臂杆端部的转动调节轴97及套装在该轴两端的深沟球轴承95组成，深沟球轴承95的外圈的外周紧套转动调节轴承套94，深沟球轴承95 外圈外侧有孔用弹性挡圈98限位，轴端有轴用弹性挡圈101限位，深沟球轴承95 的内侧内圈与转动调节固定座99之间有转动调节轴套96限位。Fig. 12 is a partially enlarged view of the stopper at V in Fig. 7a, which is used to make the arc source assembly move upwards. This device is a frame installed on the top of the rotating frame 70. Deep groove ball bearings and transfer sleeves are installed at the lower end of the frame. When the lifting platform 73 is pulled and continues to rise, the tail of the arc target frame 112 is restricted by the above frame and can no longer rise, but the lifting platform 73 continues to rise, and the target on the arc target frame 112 The group rotating shaft 79 also continues to rise, because the tail of the arc target frame 112 is blocked, it can only be adapted by the rotation of the bearings at both ends of the target group rotating shaft 79, which is equivalent to lifting the arc target cover 115 part away from the original horizontal position and upwards. , can achieve coating towards the top cover of the tank. Stopper comprises rotation and adjusts fixed seat 99, and it is a frame structure, and its upper end is welded and fixedly connects and rotates and adjusts fixed seat connection plate 99-1, and it is a crossbeam, and it is connected with swivel frame top plate 79-1 with hexagonal bolt 100 fixed together. The lower ends of the left and right arms of the rotation adjustment holder 99 are equipped with a rotation adjustment bearing assembly, which consists of a rotation adjustment shaft 97 that is sleeved on the ends of the rotation adjustment holder 99 arms and deep groove ball bearings that are sleeved at the two ends of the shaft. 95 is formed, the outer peripheral tight sleeve of the outer ring of the deep groove ball bearing 95 is used to adjust the bearing sleeve 94, and the outer ring of the deep groove ball bearing 95 has a hole on the outer side to limit the position with the circlip 98, and the shaft end has the circlip 101 to limit the position , between the inner inner ring of the deep groove ball bearing 95 and the rotation adjustment fixed seat 99, there is a rotation adjustment sleeve 96 to limit the position.
图13为图7a中Ⅵ处的局部放大图，为升降台传动副链轮，它与传动链轮142 配套，组成16A双排链条72的链轮传动机构。升降台传动副链轮组件主要包括：升降台转动副链轮轴、升降台传动副链轮轴座、升降台传动副链轮、深沟球轴承及其限位构件等。用内六角圆柱头螺钉110把左右两升降台传动副链轮座103倒挂紧固在旋转架顶板70-1上，升降台传动副轮轴107两端穿套在左右两升降台传动副链轮座103的轴孔内的深沟球轴承105上，升降台传动副轮轴107中部套装有升降台传动副链轮102，它们之间用键固连，左右升降台传动副链轮座103内均套装有两只深沟球轴承105，它们之间用升降台传动副轮隔圈104相隔，升降台传动副轮轴107 的一端用轴用弹性挡圈108对深沟球轴承105的内圈限位，深沟球轴承105的外圈用孔用弹性挡圈109限位。深沟球轴承105与升降台传动副链轮102之间有升降台传动副链轮轴套106定位。Fig. 13 is a partially enlarged view of VI in Fig. 7a, which is the auxiliary sprocket for the transmission of the lifting platform, which is matched with the transmission sprocket 142 to form the sprocket transmission mechanism of the 16A double-row chain 72. The auxiliary sprocket assembly of the lifting platform transmission mainly includes: the rotating auxiliary sprocket shaft of the lifting platform, the shaft seat of the auxiliary sprocket of the lifting platform, the auxiliary sprocket of the lifting platform transmission, deep groove ball bearings and its limit components, etc. Use hexagonal socket head screws 110 to fasten the two left and right lifting platform transmission secondary sprocket seats 103 upside down on the top plate 70-1 of the rotating frame, and the two ends of the lifting platform transmission secondary wheel shaft 107 are sleeved on the left and right two lifting platform transmission secondary sprocket seats On the deep groove ball bearing 105 in the shaft hole of 103, the middle part of the lifting platform transmission auxiliary wheel shaft 107 is equipped with the lifting platform transmission auxiliary sprocket 102, which is fixedly connected with a key, and the left and right lifting platform transmission auxiliary sprocket seats 103 are all set. There are two deep groove ball bearings 105, which are spaced apart by the lifting platform transmission secondary wheel spacer ring 104, and one end of the lifting platform transmission secondary wheel shaft 107 is limited by the inner ring of the deep groove ball bearing 105 with a circlip 108 for the shaft. The hole of the outer ring of the deep groove ball bearing 105 is limited by the circlip 109 . Between the deep groove ball bearing 105 and the lifting table driving secondary sprocket 102, there is a lifting platform driving secondary sprocket axle sleeve 106 for positioning.
图16a、16b为图7a中Ⅷ处的局部放大图和侧视剖视图，显示升降台传动装置。该传动装置安置在旋转架大气传动舱内，由波纹管(未画出)连接处在其下方的转动轴27顶部的引管，通过转动轴27中空的内腔连通大气。动力线和信号线等均从该波纹管内腔导入(未画出)。该转动轴27顶部侧壁连通多个引管，有的用波纹管连接到炉内相应部分，有的备用，备用引管需用法兰板封闭起来。该传动装置主要包括伺服电机及其固定构件、减速机、电机与减速机上的传动轮及它们之间与传动带，升降台传动轴组件、减速机输出链轮及传动链条、装在升降台传动轴上的副链轮、压紧轮组件、升降台限位开关组件等。图16显示伺服电机与减速机都处于旋转架的大气传动舱内，128为伺服电机，129为伺服电机座，其底座压在伺服电机座绝缘板 134上。通过穿有伺服电机座绝缘子133的六角螺栓132，把伺服电机128固定在大气传动舱底壁70-2上，六角螺栓132拧在伺服电机调节固定块135上，并横向抵在伺服电机座129上，可调节伺服电机前后位置。伺服电机128转动时，伺服电机同步带轮130带动同步带131运动，它拖动减速机同步带轮124转动，即驱动减速机 126运转，减速机126也固定在旋转架大气传舱底壁70-2上。减速机126的输出轴固连减速机链轮125，它拖动减速机16A双排链条127，带动固连在升降台传动轴 139上的减速机副链轮152转动，双排链条127除绕过上述的减速机链轮125和减速机副链轮152外，还绕过一只减速机链条压紧链轮156，上述三只链轮呈三角形布局，压紧链轮用来调节减速机126输出双排链条127的张紧力。Figures 16a and 16b are partial enlarged views and side sectional views of VIII in Figure 7a, showing the transmission device of the lifting platform. This transmission device is placed in the rotating frame atmospheric transmission cabin, is connected with the guide tube of the rotating shaft 27 tops below it by bellows (not shown), communicates atmosphere by the hollow inner chamber of rotating shaft 27. Power lines and signal lines etc. are all introduced from the inner chamber of the bellows (not shown). This rotating shaft 27 top side walls are connected with a plurality of guide pipes, some are connected to corresponding parts in the furnace with bellows, and some are spare, and the spare guide pipes need to be closed with flange plates. The transmission device mainly includes the servo motor and its fixed components, the reducer, the transmission wheel on the motor and the reducer and the transmission belt between them, the transmission shaft assembly of the lifting platform, the output sprocket of the reducer and the transmission chain, and the transmission shaft installed on the lifting platform. The auxiliary sprocket, the compression wheel assembly, the limit switch assembly of the lifting platform, etc. Fig. 16 shows that servomotor and speed reducer are all in the air transmission cabin of rotary frame, and 128 is servomotor, and 129 is servomotor seat, and its base is pressed on the servomotor seat insulating plate 134. The servo motor 128 is fixed on the bottom wall 70-2 of the atmospheric transmission cabin by passing through the hexagonal bolt 132 of the servo motor seat insulator 133, and the hexagonal bolt 132 is screwed on the servo motor adjustment fixing block 135, and laterally against the servo motor seat 129 On, the front and rear positions of the servo motor can be adjusted. When the servo motor 128 rotates, the servo motor synchronous pulley 130 drives the synchronous belt 131 to move, and it drags the speed reducer synchronous pulley 124 to rotate, which drives the speed reducer 126 to run. -2 on. The output shaft of speed reducer 126 is fixedly connected speed reducer sprocket 125, and it drags speed reducer 16A double row chain 127, drives the speed reducer auxiliary sprocket 152 that is fixedly connected on the lifting platform drive shaft 139 to rotate, double row chain 127 removes winding In addition to the above-mentioned reducer sprocket 125 and reducer secondary sprocket 152, a reducer chain compression sprocket 156 is bypassed. The above-mentioned three sprockets are in a triangular layout, and the compression sprocket is used to adjust the reducer 126. The tension force of the double row chain 127 is output.
图17是图16a中Ⅷ-Ⅰ处的局部放大图，它显示升降台传动轴组件的结构。它主要包括：升降台传动轴、减速机副链轮、带立式座轴承、升降台传动轴轴承组件和升降台传动链轮等。升降台传动轴139中部套装有减速机副链轮152，用平键把减速机副链轮152固定在升降台传动轴139上，并用两只内六角平端紧定螺钉151 固定。在升降台传动轴139上离减速机副链轮152左右一段距离，分别套装两只带立式座轴承148，用六角螺栓149把带立式座轴承148紧固在升降台传动轴承座一 150上，而升降台传动轴承座一150固连在大气传动舱顶壁70-2上。升降台传动轴 139上左右两端部通过密封轴承组件，穿越大气传动舱两侧壁70-2，伸入真空炉内。在侧舱壁的真空炉内侧焊有轴承座固定块70-3，采用六角螺栓137把升降台传动轴承座二136真空密封(未画出密封圈)固定在轴承座固定块70-3上。在升降台传动承座二136内，从座底顺次安装深沟球轴承145、骨架油封147、升降台传动轴承隔垫146、深沟球轴承145，在轴承座二136的端面上，用内六角圆柱螺钉143压紧升降台传动轴承压盖144，使轴承定位并实现升降台传动轴139动密封，升降台传动轴139两轴端部用键固连升降台传动链轮142，在轴端面用六角螺栓140把升降台传动轴压盖141固定在轴端面上，且紧贴着传动链轮142的外侧面，传动链轮142 的内侧面与升降台传动轴承座二136的外侧深球轴承内圈之间、于传动轴139上套有升降台传动轴承顶套138实现限位。Fig. 17 is a partial enlarged view of VIII-I in Fig. 16a, which shows the structure of the drive shaft assembly of the lifting table. It mainly includes: lifting platform drive shaft, reducer secondary sprocket, belt vertical seat bearing, lifting platform drive shaft bearing assembly and lifting platform drive sprocket, etc. Lifting platform transmission shaft 139 middle parts are covered with reducer secondary sprocket 152, reducer secondary sprocket 152 is fixed on the lifting platform transmission shaft 139 with flat key, and fix with two hexagon socket flat end set screws 151. On the lifting table transmission shaft 139, there is a distance from the secondary sprocket 152 of the reducer, and two vertical seat bearings 148 are respectively set, and the vertical seat bearings 148 are fastened to the lifting table transmission bearing seat 150 with hexagonal bolts 149. , and the lifting platform transmission bearing seat 150 is fixedly connected on the top wall 70-2 of the atmospheric transmission cabin. The left and right ends of the lifting platform transmission shaft 139 pass through the air transmission cabin sidewalls 70-2 through the sealed bearing assembly, and stretch into the vacuum furnace. The vacuum furnace inboard of side bulkhead is welded with bearing block fixed block 70-3, adopts hexagonal bolt 137 to be fixed on the bearing block fixed block 70-3 that lifting table drive bearing block two 136 vacuum seals (not drawing sealing ring). Install deep groove ball bearing 145, skeleton oil seal 147, lifting platform transmission bearing spacer 146, and deep groove ball bearing 145 in order from the bottom of the seat in the transmission bearing seat 2 136 of the lifting platform. On the end face of the bearing seat 136, use The inner hexagonal cylindrical screw 143 presses the lifting platform transmission bearing gland 144 to position the bearing and realize the dynamic sealing of the lifting platform transmission shaft 139. The end face uses hexagonal bolt 140 to fix the lifting platform transmission shaft gland 141 on the shaft end surface, and is close to the outer surface of the transmission sprocket 142, the inner surface of the transmission sprocket 142 and the outer deep ball of the lifting platform transmission bearing seat 2 136 Between the inner rings of the bearings, on the power transmission shaft 139, a top cover 138 of the lifting table transmission bearing is set to realize the spacing.
图18是图16a中Ⅷ-Ⅱ处的局部放大图，它是升降台73的下降限位开关装置。它主要包括：限位撞针和限位顶针、限位撞针固定座、限位顶针的动密封装置、顶针复位装置和行程开关等。其具体结构：限位撞针固定座162的上端面固焊在升降台73的下端面上，限位撞针固定座162的下端面固焊M16螺母163，限位撞针164 的上部分是一段螺杆、螺杆拧进M16螺母进入限位撞针固定座162内，拧进深度可调节，限位撞针164的下部分是一段固焊在上段螺杆下端的一只套筒，该套筒下端面固焊有撞触圆块，限位撞针164的朝下方向对应着但并不相连的限位顶针165。限位焊接法兰167固焊在大气传动舱顶壁70-2外侧，内六角圆头螺钉174把限位密封法兰座166固连并真空密封在限位焊接法兰167的上端面，内六角圆头螺钉169 把限位弹簧套筒171固连在限位焊接法兰167的下端面上，限位顶针165中部有环状凸肩，环状凸肩上部向上穿过限位密封法兰座166内的骨架油封168和定位铜套 175，下部向下套穿过限位弹簧套筒171内的限位弹簧170，然后向下伸出限位弹簧套筒171外，限位顶针165中部环状凸肩压坐在限位弹簧170上顶端，可进入限位弹簧套筒171内，限位顶针165下端伸出，对应着行程开关172的触碰轮。定位铜套175实现限位顶针165运动定位，以骨架油封168实现限位顶针165的动密封，以限位弹簧170实现解除限位顶针165下行触撞行程开关172动作后的复位，行程开关固定座173固连在升降台大气传动舱顶壁70-2内侧，行程开关172固定在行程开关固定座173上。当升降台73上升时连同限位撞针组件一起上升，当其下降到达限位位置时，限位撞针164碰触限位顶针165，限位顶针165下行碰触行程开关172 的碰触轮，则行程开关172断开伺服电机128相应控制电路，切断电机128下行供电，电机128停转，升降台73停止下降。当电机128重启上行供电时，电机128驱动升降台73上升，同时带动撞针组件离开顶针组件，限位顶针165所压缩的限位弹簧170被释放，推动限位顶针165环状凸肩上行让限位顶针165回复原先状态。Fig. 18 is a partial enlarged view of VIII-II in Fig. 16a, which is the descending limit switch device of the lifting platform 73. It mainly includes: limit striker and limit thimble, limit striker fixing seat, limit thimble dynamic sealing device, thimble reset device and travel switch, etc. Its specific structure: the upper end surface of the limit striker fixing seat 162 is solidly welded on the lower end surface of the lifting platform 73, the lower end surface of the limit striker fixation seat 162 is solidly welded with the M16 nut 163, and the upper part of the limit striker 164 is a section of screw rod, The screw rod is screwed into the M16 nut and enters into the limit striker fixing seat 162. The screwing depth is adjustable. The lower part of the limit striker 164 is a sleeve that is solidly welded on the lower end of the upper screw rod. The lower end of the sleeve is welded with a striker. Touch the round block, the downward direction of the limit striker 164 corresponds to the limit thimble 165 which is not connected. The limit welding flange 167 is solidly welded on the outer side of the top wall 70-2 of the atmospheric transmission cabin, and the limit sealing flange seat 166 is fixedly connected and vacuum-sealed on the upper end surface of the limit welding flange 167 by the hexagon socket head cap screw 174. The hexagonal head screw 169 connects the limit spring sleeve 171 to the lower end surface of the limit welding flange 167, the limit thimble 165 has an annular shoulder in the middle, and the upper part of the annular shoulder passes through the limit sealing flange upwards Skeleton oil seal 168 and positioning copper sleeve 175 in the seat 166, the lower part of which passes through the limit spring 170 in the limit spring sleeve 171 downwards, and then extends downwards outside the limit spring sleeve 171, and the middle part of the limit thimble 165 The annular protruding shoulder is pressed on the top of the limit spring 170 and can enter into the limit spring sleeve 171. The lower end of the limit thimble 165 stretches out, corresponding to the touch wheel of the travel switch 172. The positioning copper sleeve 175 realizes the movement and positioning of the limit thimble 165, the skeleton oil seal 168 realizes the dynamic sealing of the limit thimble 165, and the limit spring 170 realizes the reset after the release of the limit thimble 165 and the travel switch 172 moves downward, and the travel switch is fixed Seat 173 is fixedly connected on the inboard of lifting platform atmosphere transmission cabin top wall 70-2, and travel switch 172 is fixed on the travel switch fixed seat 173. When the lifting platform 73 rises, it rises together with the limit striker assembly, and when it descends to the limit position, the limit striker 164 touches the limit thimble 165, and the limit thimble 165 descends and touches the touch wheel of the travel switch 172, then The travel switch 172 disconnects the corresponding control circuit of the servo motor 128, cuts off the downlink power supply of the motor 128, the motor 128 stops, and the lifting platform 73 stops descending. When the motor 128 restarts the uplink power supply, the motor 128 drives the elevating table 73 to rise, and at the same time drives the striker assembly to leave the thimble assembly, the limit spring 170 compressed by the limit thimble 165 is released, and the limit thimble 165 is pushed to the limit. The bit thimble 165 returns to the original state.
图19是图16b中Ⅷ-Ⅲ处升降台驱动链条压紧轮的具体结构图，它显示减速机的16A双排链条的压紧轮的结构。升降台传动轴139的驱动机构，是通过减速机126 输出轴上的减速机链轮125，通过16A双排链条127拖动升降台传动轴139上的减速机副链轮152，来驱动升降台传动轴139转动的，为了传动可靠，在16A双排链条127回转途中，增置一套压紧轮装置，它主要包括：压紧轮座、压紧轮轴与轴承、以及压紧链轮。升降台压紧轮座154是在座底上焊连两块竖立支承板的结构，采用六角螺栓155把升降台压紧轮座154的底板固连在升降台压紧轮固定块153上，该固定块153固焊在升降台大气传动舱顶壁70-2上，升降台压紧轮轴159支承在升降台压紧轮座154的两竖立支承板上，并左右套装在嵌在该支承板内的深沟球轴承 157上，在升降台压紧轮轴159的一轴端用轴用弹性挡圈161限位。升降台压紧轮轴159的中部套装有升降台压紧链轮156，用平键固连并用内六角平端紧定螺钉160 固定。升降台压紧链轮156左右两侧与深沟球轴承157的内圈之间，有升降台压紧轮轴套158限位。升降台压紧链轮156紧靠双排链条127，把链条127张紧。Fig. 19 is the specific structural diagram of the pinching wheel of the lifting platform drive chain at VIII-III place in Fig. 16b, which shows the structure of the pinching wheel of the 16A double-row chain of the reducer. The driving mechanism of the lifting platform drive shaft 139 is to drive the lifting platform through the reducer sprocket 125 on the output shaft of the reducer 126 and drag the reducer secondary sprocket 152 on the lifting platform drive shaft 139 through the 16A double row chain 127 Power transmission shaft 139 rotates, and reliable for transmission, in 16A double row chain 127 revolving ways, add a set of pinch wheel device, it mainly comprises: pinch wheel seat, pinch wheel axle and bearing, and pinch sprocket. Lifting platform pressing wheel seat 154 is the structure that welds two vertical supporting plates on the bottom of the seat, and adopts hexagonal bolt 155 to connect the bottom plate of lifting platform pressing wheel seat 154 on the lifting platform pressing wheel fixing block 153. Block 153 is solidly welded on the top wall 70-2 of the atmospheric transmission cabin of the lifting platform, and the lifting platform compression wheel shaft 159 is supported on the two vertical support plates of the lifting platform compression wheel seat 154, and is sleeved on the left and right sides of the support plate embedded in the support plate. On the deep groove ball bearing 157, a shaft end of the lifting table compresses the wheel shaft 159 with a shaft with a circlip 161 for spacing. The middle part of the lifting platform compression wheel shaft 159 is covered with the lifting platform compression sprocket 156, which is fixedly connected with a flat key and fixed with a hexagon socket flat end set screw 160. Lifting table compresses between the left and right sides of sprocket wheel 156 and the inner ring of deep groove ball bearing 157, and there is 158 spacings of lifting table pressing wheel axle sleeve. Lifting platform compresses sprocket wheel 156 and is close to double-row chain 127, and chain 127 is tensioned.
上述镀膜机的运行过程The operation process of the above coating machine
1)镀膜前设备运动系统运转检查：1) Operation inspection of equipment motion system before coating:
在抽真空前检查所有运动系统，必须正常运行：(1)启动炉外电机传动系统，由电机驱动减速箱，由减速箱的输出轴齿轮咬合从炉内伸出的转盘传动轴上的大齿轮，带动转盘传动轴转动，从而带动炉内转盘转动。竖立在转盘上的旋转架随同转盘一起绕炉中轴转动，先顺时针正转，转至光电限位器处感应到反转信号，即逆时针反转，再反转到光电限位器处又改为正转，周而复此。检查转盘周边附近上、下方向限位导轮是否起着维持转盘平稳转动作用，检查内有电线、气管、冷却水管的波纹管有无异常；(2)起动升降台传动装置：启动伺服电机驱动减速箱运转，减速箱输出轴通过链轮--链条机构拖动升降台传动轴转动，再通过该传动轴穿入真空炉内两轴端的双排链轮--链条机构，带动升降台连同活连结其上的弧靶装置一起，在互相垂直方向两组导轮导向下，沿着旋转架的竖直导轨上作平稳升降运动，当上升至靶旋转调节位高度处，弧靶装置的弧靶架尾部碰触到旋转架上端部的靶旋转调节位限位轮(轴承)时，限制了弧靶架尾部不能再上升，实际上升降台会继续上升，则驱使升降台的转轴转动，把弧靶架另一端、即弧靶罩端朝上顶方向仰起来；然后，让升降台下降，升降台的转轴反转，弧靶架连同弧靶罩端从仰角位渐恢复成水平位置，再后徐徐下降至最低限位开关处停止下降。靶弧组件的运动一边随旋转架旋转、一边随升降台升降，运动应流暢。(3)按照待镀膜罐体内壁直径，通过伸缩弧靶罩的支撑杆，调整电弧靶面到罐壁的距离，达到合适的靶基距。(4)检查引弧针与电弧靶面的引弧接触动作是合适可靠。以上准备工作确认正常，进入装炉作业。Check all motion systems before vacuuming, and they must be in normal operation: (1) Start the motor drive system outside the furnace, the motor drives the reduction box, and the output shaft gear of the reduction box engages the large gear on the turntable transmission shaft protruding from the furnace , to drive the turntable drive shaft to rotate, thereby driving the turntable in the furnace to rotate. The rotating frame erected on the turntable rotates around the central axis of the furnace together with the turntable. First, it rotates forward clockwise, and then turns to the photoelectric limiter to sense the reverse signal, that is, reverses counterclockwise, and then reverses to the photoelectric limiter. Change to forward rotation again, and repeat this cycle. Check whether the upper and lower limit guide wheels around the turntable are used to maintain the smooth rotation of the turntable, and check whether there are any abnormalities in the bellows with wires, air pipes and cooling water pipes inside; (2) Start the transmission device of the lifting table: start the servo motor drive When the gearbox is running, the output shaft of the gearbox drives the transmission shaft of the lifting platform to rotate through the sprocket-chain mechanism, and then passes through the transmission shaft through the double-row sprocket-chain mechanism at the two shaft ends in the vacuum furnace to drive the lifting platform together with the movable Linked with the arc target device on it, under the guidance of two sets of guide wheels in the perpendicular direction, it moves up and down smoothly along the vertical guide rail of the rotating frame. When it rises to the height of the target rotation adjustment position, the arc target of the arc target device When the tail of the frame touches the target rotation adjustment position limit wheel (bearing) at the upper end of the rotating frame, the tail of the arc target frame is restricted from rising. The other end of the target frame, that is, the end of the arc target cover is lifted up; then, let the lifting platform descend, the rotating shaft of the lifting platform is reversed, and the arc target frame and the arc target cover end gradually return to the horizontal position from the elevation position, and then Slowly descend to the lowest limit switch and stop descending. The movement of the target arc assembly rotates with the rotating frame and rises and falls with the lifting platform at the same time, and the movement should be smooth. (3) According to the diameter of the inner wall of the tank to be coated, adjust the distance from the arc target surface to the tank wall through the support rod of the telescopic arc target cover to achieve a suitable target base distance. (4) Check that the arc contact action between the arc needle and the arc target surface is suitable and reliable. The above preparatory work is confirmed to be normal, and enters the furnace loading operation.
2)待镀化学罐装炉：首先把待镀大型化学罐吊装在真空炉底盘上，它为带弧形封顶的圆筒体，把其开口边沿倒扣在炉体平台上，炉体平台对应化学罐开口边沿的位置设有真空密封槽和O形密封圈，化学罐成为炉体的炉壁，离子镀的镀层就镀在化学罐内壁上。为了适应不同直径的化学罐镀膜，炉体气平台上设有不同直径的密封槽和密封圈；为了适应不同高度的化学罐镀膜，可在炉体平台相应位置上垫上不同高度的带密封圈的附加法兰，以补偿不同化学罐的高度差。2) Chemical canning furnace to be plated: First, hoist the large chemical tank to be plated on the chassis of the vacuum furnace. It is a cylindrical body with an arc-shaped cap. The opening edge of the chemical tank is provided with a vacuum sealing groove and an O-ring. The chemical tank becomes the furnace wall of the furnace body, and the ion-plated coating is plated on the inner wall of the chemical tank. In order to adapt to the coating of chemical tanks with different diameters, sealing grooves and sealing rings of different diameters are provided on the gas platform of the furnace body; Additional flanges to compensate for height differences of different chemical tanks.
3)镀膜作业；化学键体成为真空镀室的炉壁，化学罐的内壁接受镀膜，启动真空系统(末划出)，抽炉内真空，抽至本底真空度5x10-3Pa，然后充入氬气，炉压达 x10-2Pa，启动转盘正/反转，同时启动升降台装置弧靶组件一边360度来回旋转一边可调速升降，第一步对罐体内壁进行电弧离子轰击清洗，施加负偏压500—700V，启动6只Ti电弧靶中的2-3只，靶电流60—80A，转速每旋转一周2--3分种，上下移动速度2--3分钟移动2只靶位高度。弧靶组件上升到罐顶仰角位后，撤换另 2-3只靶起弧，以同样速度旋转和下降，直至最下限位停止。第二步打钛底层，负偏压200—250V，氬气炉压x10-2Pa，六只Ti电弧靶全起弧，靶电流60—80A，按前述旋转速度和移动速度运行，升降一个来回后停止。第三步镀TiN膜：供入氮气，炉压1—0.6Pa，偏压50—80V，6只Ti电弧靶全开，靶电流60—80A，按前述旋转速度和移动速度运行，视镀层厚度要求决定电弧靶组件升降来回次数。第四步出炉：完成TiN膜程序后，停止旋转架转动和升降台升降，向炉内充入大气，然后吊出镀好TiN膜的化学罐，检查膜层质量，完成镀膜作业。3) Coating operation; the chemical bond body becomes the furnace wall of the vacuum coating chamber, the inner wall of the chemical tank receives the coating film, the vacuum system (not drawn out) is started, the vacuum in the furnace is pumped to the background vacuum degree of 5x10-3 Pa, and then filled into Argon gas, furnace pressure up to x10-2 Pa, start the forward/reverse rotation of the turntable, and at the same time start the arc target assembly of the lifting platform device to rotate 360 degrees back and forth while adjustable speed lifting, the first step is to clean the inner wall of the tank by arc ion bombardment, Apply a negative bias voltage of 500-700V, start 2-3 of the 6 Ti arc targets, target current 60-80A, rotate 2-3 minutes per revolution, and move 2 targets up and down at a speed of 2-3 minutes bit height. After the arc target assembly rises to the elevation position of the tank top, replace the other 2-3 targets to start the arc, rotate and descend at the same speed until the lowest limit stops. The second step is to lay the titanium bottom layer, negative bias voltage 200-250V, argon furnace pressure x10-2 Pa, all six Ti arc targets start arcing, target current 60-80A, run according to the aforementioned rotation speed and moving speed, and lift one back and forth stop after. The third step is to plate TiN film: supply nitrogen gas, furnace pressure 1-0.6Pa, bias voltage 50-80V, 6 Ti arc targets fully open, target current 60-80A, run according to the aforementioned rotation speed and moving speed, depending on the thickness of the coating It is required to determine the number of times the arc target assembly goes up and down. The fourth step is out of the furnace: after the TiN film process is completed, stop the rotation of the rotating frame and the lifting of the lifting platform, fill the furnace with air, and then lift out the chemical tank coated with the TiN film to check the quality of the film layer and complete the coating operation.
本实用新型还有其他实施方式，根据上述内容，按照本领域的普通技术知识和惯用手段，在不脱离本实用新型上述基本技术思想前提下，本实用新型还可以做出其它多种形式的等效修改、替换或变更，均落在本实用新型的保护范围之中。The utility model also has other embodiments. According to the above content, according to the common technical knowledge and conventional means in this field, without departing from the above-mentioned basic technical ideas of the utility model, the utility model can also make other various forms, etc. Effective modification, replacement or change all fall within the protection scope of the present utility model.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721432404.3UCN207845763U (en) | 2017-10-31 | 2017-10-31 | The driving system of the arc source assembly of the vacuum cathodic arc coating machine for the inner wall coating of large tanks |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721432404.3UCN207845763U (en) | 2017-10-31 | 2017-10-31 | The driving system of the arc source assembly of the vacuum cathodic arc coating machine for the inner wall coating of large tanks |
| Publication Number | Publication Date |
|---|---|
| CN207845763Utrue CN207845763U (en) | 2018-09-11 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721432404.3UActiveCN207845763U (en) | 2017-10-31 | 2017-10-31 | The driving system of the arc source assembly of the vacuum cathodic arc coating machine for the inner wall coating of large tanks |
| Country | Link |
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| CN (1) | CN207845763U (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107858654A (en)* | 2017-10-31 | 2018-03-30 | 东莞市汇成真空科技有限公司 | The drive system of large tank inwall plated film vacuum cathode arc coating machine electric arc source component |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107858654A (en)* | 2017-10-31 | 2018-03-30 | 东莞市汇成真空科技有限公司 | The drive system of large tank inwall plated film vacuum cathode arc coating machine electric arc source component |
| CN107858654B (en)* | 2017-10-31 | 2023-06-02 | 东莞市汇成真空科技有限公司 | Driving system of vacuum cathode arc coating machine arc source component for coating inner wall of large tank body |
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address | Address after:No.2, Longyuan Road, Yanwu, Dalingshan Town, Dongguan City, Guangdong Province 523000 Patentee after:Guangdong Huicheng Vacuum Technology Co.,Ltd. Address before:523820 Guangdong Province, Dongguan City Dalingshan Town Village fourth industrial zone. Patentee before:DONGGUAN HUICHENG VACUUM TECHNOLOGY Co.,Ltd. |