技术领域technical field
本实用新型属于光学检测技术领域，具体涉及一种非接触式光学探头。The utility model belongs to the technical field of optical detection, in particular to a non-contact optical probe.
背景技术Background technique
三维面形测量最常用的方法是三坐标测量。三坐标测量技术具有通用性强、自动化程度高、测量精度高等众多优点，在机械、电子等领域得到广泛应用。目前，根据三坐标测量机测头的形式，可将三坐标测量机分为接触式三坐标测量机和非接触式三坐标测量机。非接触式三坐标测量机目前主要有激光点测量和线激光扫描测量两种形式。对于接触式三坐标测量机和非接触式激光点测量三坐标测量机而言，测量过程需要频繁的加速、减速，造成了测量速度较慢，此外由于测头直接与被测件表面接触容易划伤被测件。非接触式的线激光扫描测量在测量时加减速过程较少，可以大幅度的提高测量速度，但是由于线激光测量头的自身误差大于3μm，测时需要调整被测点法线方向对准激光测头，运动机构复杂，使得其测量精度大幅度下降，因此测定的精度并不高。The most commonly used method for three-dimensional surface measurement is three-coordinate measurement. Three-coordinate measurement technology has many advantages such as strong versatility, high degree of automation, and high measurement accuracy, and has been widely used in the fields of machinery and electronics. At present, according to the form of the three-coordinate measuring machine probe, the three-coordinate measuring machine can be divided into a contact three-coordinate measuring machine and a non-contact three-coordinate measuring machine. At present, non-contact three-coordinate measuring machines mainly have two forms: laser point measurement and line laser scanning measurement. For contact CMMs and non-contact laser point measurement CMMs, the measurement process requires frequent acceleration and deceleration, resulting in slow measurement speed. damage the tested part. The non-contact line laser scanning measurement has less acceleration and deceleration process during measurement, which can greatly increase the measurement speed. However, since the error of the line laser measurement head is greater than 3 μm, it is necessary to adjust the normal direction of the measured point to align with the laser during measurement. The measuring head has a complex kinematic mechanism, which greatly reduces its measurement accuracy, so the measurement accuracy is not high.
实用新型内容Utility model content
本实用新型的解决的技术问题是：解决现使用现有非接触探头测量时需将被测点法线方向对准探头从而导致定位精度降低的问题。The technical problem solved by the utility model is: to solve the problem that the normal direction of the measured point needs to be aligned with the probe when the existing non-contact probe is used for measurement, which leads to the reduction of positioning accuracy.
一种用于非接触式面形测量的光学探头，该光学探头由干涉光路组成，所述干涉光路包括光源、准直透镜、分束器、成像透镜、聚焦透镜、平面反射镜、球壳透镜、CCD图像传感器；以光源所在一侧为物方，所述光源发出的光被准直透镜准直后入射到分束器上，经分束器反射的光作为参考光束，参考光被垂直放置的平面反射镜反射后原路返回，再次通过分束器被成像透镜聚焦于CCD图像传感器上；An optical probe for non-contact surface shape measurement, the optical probe is composed of an interference optical path, and the interference optical path includes a light source, a collimating lens, a beam splitter, an imaging lens, a focusing lens, a plane mirror, and a spherical shell lens , CCD image sensor; take the side where the light source is located as the object side, the light emitted by the light source is collimated by the collimator lens and then incident on the beam splitter, the light reflected by the beam splitter is used as the reference beam, and the reference light is placed vertically After being reflected by the plane mirror, it returns to the original path, and is focused on the CCD image sensor by the imaging lens through the beam splitter again;
透射过分束器的光作为测量光束，测量光束与参考光束等光程，测量光束经过聚焦透镜后聚焦于聚焦透镜的像方焦点处；所述的球壳透镜内表面设置有半透半反膜，且球壳透镜放置在聚焦透镜与聚焦透镜的像方焦点之间，球壳透镜的球心与聚焦透镜的像方焦点重合。The light transmitted through the beam splitter is used as the measuring beam, the measuring beam and the reference beam have the same optical path, and the measuring beam is focused on the image focus of the focusing lens after passing through the focusing lens; the inner surface of the spherical shell lens is provided with a semi-transparent and semi-reflective film , and the spherical shell lens is placed between the focusing lens and the image-space focus of the focusing lens, and the center of the spherical shell lens coincides with the image-space focus of the focusing lens.
基于上述技术方案，本实用新型还提供一种非接触式三维面形测量方法，包括如下步骤：Based on the above technical solution, the utility model also provides a non-contact three-dimensional surface shape measurement method, including the following steps:
1).搭建上述干涉式光学探头的步骤；1). The steps of building the above-mentioned interferometric optical probe;
2).搭建运动机构的步骤：所述运动机构用于调整被测件与光学探头之间相对位置，使聚焦透镜的像方焦点聚焦于被测件表面任意测量点，且该运动机构上设置有位置计量装置，用于记录位置变化量；该运动机构可由两个平移机构和一个旋转机构组成；该运动机构也可以由三个平移机构组成；2). The step of building the motion mechanism: the motion mechanism is used to adjust the relative position between the measured piece and the optical probe, so that the image square focus of the focusing lens is focused on any measurement point on the surface of the tested piece, and the motion mechanism is set There is a position measuring device for recording the position change; the movement mechanism can be composed of two translation mechanisms and a rotation mechanism; the movement mechanism can also be composed of three translation mechanisms;
3).扫描测量步骤：测量时，通过调整运动机构使聚焦透镜的像方焦点聚焦在被测件上某一点，测量光束被球壳透镜内表面反射回到光学系统中，测量光束经分束器反射进入CCD图像传感器上与参考光束形成干涉条纹，由位置计量装置记录此时运动机构的位置信息；调整运动机构依次记录聚焦透镜的像方焦点聚焦在被测件上其他点的位置信息，通过数据处理可以获得被测件的面形形貌。3). Scanning measurement steps: during measurement, the image square focus of the focusing lens is focused on a certain point on the measured object by adjusting the movement mechanism, the measuring beam is reflected by the inner surface of the spherical shell lens and returned to the optical system, and the measuring beam is split into beams The reflector is reflected into the CCD image sensor to form interference fringes with the reference beam, and the position measurement device records the position information of the motion mechanism at this time; the adjustment motion mechanism sequentially records the position information of the image square focus of the focusing lens focusing on other points on the measured object, The surface shape of the tested part can be obtained through data processing.
测量工件时，在运动机构的驱动下，光学探头上聚焦透镜的像方焦点轨迹沿着理想光学元件曲线运动，通过竖直方向(Z轴)的平动轴上下扫描，若焦点位置偏离被测点，通过干涉条纹判断聚焦位置与被测点的相对位置，将Z轴向上或向下移动，直至干涉条纹为理想的零级条纹，由位置计量装置记录此测量点的位置信息，依次在被测面上进行面形扫描，然后对点源数据进行处理以及面形拟合，通过拟合后的面形与工件面形的比较，分析确定其面形误差。When measuring the workpiece, driven by the motion mechanism, the focus track of the image side of the focusing lens on the optical probe moves along the curve of the ideal optical element, and scans up and down through the translation axis in the vertical direction (Z axis). If the focus position deviates from the measured point, judge the relative position between the focus position and the measured point through the interference fringe, move the Z axis up or down until the interference fringe is an ideal zero-order fringe, and record the position information of the measurement point by the position measurement device, in turn in the Scan the surface shape on the measured surface, then process the point source data and fit the surface shape, and analyze and determine the surface shape error by comparing the fitted surface shape with the workpiece surface shape.
上述技术方案的使用，简化了运动机构，从而可以减小机械定位误差；发射到被测面上的测量光束不论以任何角度反射出去，均可以被球壳透镜反射回原光路；可测量球面偏离较大的元件；测量精度高、速度快。The use of the above technical solution simplifies the movement mechanism, thereby reducing the mechanical positioning error; the measuring beam emitted to the measured surface can be reflected back to the original optical path by the spherical shell lens regardless of any angle; the spherical deviation can be measured Larger components; high measurement accuracy and speed.
附图说明Description of drawings
图1为用于非接触式面形测量的光学探头示意图；Figure 1 is a schematic diagram of an optical probe used for non-contact surface shape measurement;
图2为光学探头测量高陡度被测件上一点示意图；Figure 2 is a schematic diagram of measuring a point on a high-steepness DUT with an optical probe;
图3为光学探头测量高陡度被测件上另外一点示意图；Figure 3 is a schematic diagram of another point on the high-steep test piece measured by the optical probe;
其中：1-光源，2-准直透镜，3-分束器，4-参考光束，5-平面反射镜，6-成像透镜，7-CCD图像传感器，8-测量光束，9-聚焦透镜，10-球壳透镜，11-聚焦透镜的像方焦点，12-被测件，13-小孔光阑。Among them: 1-light source, 2-collimating lens, 3-beam splitter, 4-reference beam, 5-plane mirror, 6-imaging lens, 7-CCD image sensor, 8-measurement beam, 9-focusing lens, 10-spherical shell lens, 11-image square focus of focusing lens, 12-test object, 13-aperture diaphragm.
具体实施方式Detailed ways
为了更清楚地说明技术方案，下面结合附图及实施例作进一步描述In order to illustrate the technical solution more clearly, the following will be further described in conjunction with the accompanying drawings and embodiments
实施例一：Embodiment one:
如附图1所示，一种用于非接触式面形测量的光学探头，该光学探头由干涉光路组成，所述干涉光路包括光源1、准直透镜2、分束器3、成像透镜8、聚焦透镜9、平面反射镜5、球壳透镜10、CCD图像传感器7；以光源所在一侧为物方，所述光源1发出的光被准直透镜准直后入射到分束器上，经分束器反射的光作为参考光束4，参考光被垂直放置的平面反射镜5反射后原路返回，再次通过分束器3被成像透镜8聚焦于CCD图像传感器7上；As shown in Figure 1, an optical probe for non-contact surface shape measurement, the optical probe is composed of an interference optical path, the interference optical path includes a light source 1, a collimator lens 2, a beam splitter 3, and an imaging lens 8 , focusing lens 9, plane reflector 5, spherical shell lens 10, CCD image sensor 7; Taking the side where the light source is located as the object side, the light emitted by the light source 1 is incident on the beam splitter after being collimated by the collimator lens, The light reflected by the beam splitter is used as the reference light beam 4, and the reference light is reflected by the vertically placed plane mirror 5 and returns to the original path, and is focused on the CCD image sensor 7 by the imaging lens 8 through the beam splitter 3 again;
透射过分束器的光作为测量光束8，测量光束与参考光束等光程，测量光束经过聚焦透镜9后聚焦于聚焦透镜的像方焦点11处；所述的球壳透镜10内表面设置有半透半反膜，且球壳透镜放置在聚焦透镜与聚焦透镜的像方焦点之间，球壳透镜的球心与聚焦透镜的像方焦点重合。The light transmitted through the beam splitter is used as the measuring beam 8, the measuring beam and the reference beam have the same optical path, and the measuring beam is focused on the image square focus 11 of the focusing lens after passing through the focusing lens 9; The semi-reflective film is used, and the spherical shell lens is placed between the focusing lens and the focal point of the image side of the focusing lens, and the spherical center of the spherical shell lens coincides with the focal point of the image side of the focusing lens.
在上述方案基础上的非接触式三维面形测量方法，包括如下步骤：The non-contact three-dimensional surface shape measurement method based on the above scheme includes the following steps:
1).搭建上述干涉式光学探头的步骤；1). The steps of building the above-mentioned interferometric optical probe;
2).搭建运动机构的步骤：所述运动机构用于调整被测件与干涉光路之间相对位置，使聚焦透镜的像方焦点聚焦于被测件表面任意测量点，且该运动机构上设置有位置计量装置，用于记录位置变化量；该运动机构可由两个平移机构和一个旋转机构组成；该运动机构也可以由三个平移机构组成；2). The step of building the motion mechanism: the motion mechanism is used to adjust the relative position between the measured object and the interference optical path, so that the image square focus of the focusing lens is focused on any measurement point on the surface of the measured object, and the motion mechanism is set There is a position measuring device for recording the position change; the movement mechanism can be composed of two translation mechanisms and a rotation mechanism; the movement mechanism can also be composed of three translation mechanisms;
3).扫描测量步骤：测量时，通过调整运动机构使聚焦透镜的像方焦点聚焦在被测件上某一点，测量光束被球壳透镜内表面反射回到光学系统中，测量光束经分束器反射进入CCD图像传感器上与参考光束形成干涉条纹，由位置计量装置记录此时运动机构的位置信息；调整运动机构依次记录聚焦透镜的像方焦点聚焦在被测件上其他点的位置信息，通过数据处理可以得获得被测件的面形形貌。3). Scanning measurement steps: during measurement, the image square focus of the focusing lens is focused on a certain point on the measured object by adjusting the movement mechanism, the measuring beam is reflected by the inner surface of the spherical shell lens and returned to the optical system, and the measuring beam is split into beams The reflector is reflected into the CCD image sensor to form interference fringes with the reference beam, and the position measurement device records the position information of the motion mechanism at this time; the adjustment motion mechanism sequentially records the position information of the image square focus of the focusing lens focusing on other points on the measured object, Through data processing, the surface shape of the tested object can be obtained.
上述运动机构的控制方式可以有以下几种：The control modes of the above-mentioned motion mechanism can have the following types:
1.上述步骤2中的被测件不动，所述的运动机构用于控制步骤1)的光学探头移动，完成被侧件的扫面测量。1. The tested part in the above step 2 does not move, and the motion mechanism is used to control the movement of the optical probe in step 1) to complete the scanning measurement of the side part.
2.光学探头不动，所述的运动机构用于控制被测件移动，完成被侧件的扫面测量。2. The optical probe does not move, and the motion mechanism is used to control the movement of the tested part to complete the scanning measurement of the side part.
3.所述的运动机构中的一个平移机构用于控制步骤1)搭建的光学探头沿着光轴方向移动，其余两个运动机构控制被测件运动，完成被侧件的扫面测量。3. One translation mechanism in the motion mechanism is used to control the optical probe built in step 1) to move along the optical axis, and the other two motion mechanisms control the movement of the tested part to complete the scanning measurement of the side part.
实施例二：Embodiment two:
实施例一技术方案基础上，一种用于非接触式面形测量的光学探头，所述的光学探头安装在运动机构上，用于调整被测件与光学探头之间相对位置，且该运动机构上设置有位置计量装置，用于记录位置变化量。On the basis of the technical solution of Embodiment 1, an optical probe for non-contact surface shape measurement, the optical probe is installed on a movement mechanism for adjusting the relative position between the measured object and the optical probe, and the movement The mechanism is equipped with a position measuring device for recording the amount of position change.
如图2和图3所示，在测量高陡度被测件时，无需将被测件的探测点法线方向对准光学探头即可完成数据采集。并且用干涉条纹的零条纹作为数据采集位置判断标准，可以进一步提高定位精度。As shown in Figure 2 and Figure 3, when measuring a high-steep DUT, it is not necessary to align the normal direction of the detection point of the DUT with the optical probe to complete data acquisition. And using the zero fringe of the interference fringe as the criterion for judging the position of the data collection can further improve the positioning accuracy.
实施例三：Embodiment three:
实施例一技术方案基础上，一种用于非接触式面形测量的光学探头，所述的运动机构由三个平移机构组成。所述的三个平移机构相互垂直，构成三维平移运动机构，其中一个平移机构竖直方向设置，用于调整光学探头和被测件竖直方向的距离，另外两个平移机构用于切换被测件与光学探头水平方向相对位置。三维平移机构结构简单，线性定位更准确。Embodiment 1 On the basis of the technical solution, an optical probe for non-contact surface shape measurement, the motion mechanism is composed of three translation mechanisms. The three translation mechanisms are perpendicular to each other to form a three-dimensional translation movement mechanism. One of the translation mechanisms is set in the vertical direction to adjust the vertical distance between the optical probe and the measured object, and the other two translation mechanisms are used to switch the measured object. The relative position of the component and the optical probe in the horizontal direction. The structure of the three-dimensional translation mechanism is simple, and the linear positioning is more accurate.
实施例四：Embodiment four:
实施例一技术方案基础上，一种用于非接触式面形测量的光学探头，所述的运动机构上设置的位置计量装置为光栅尺或者锆钛酸铅压电陶瓷(PZT)位移位置计量装置。Embodiment 1 On the basis of the technical solution, an optical probe for non-contact surface shape measurement, the position measurement device provided on the motion mechanism is a grating ruler or a lead zirconate titanate piezoelectric ceramic (PZT) displacement position measurement device.
实施例五：Embodiment five:
上述实施例技术方案基础上，如图1所示，一种用于非接触式面形测量的光学探头，所述的球壳透镜与聚焦透镜之间还设置有小孔光阑13。该小孔光阑可以有效的过滤杂散光，提高干涉条纹质量。On the basis of the technical solutions of the above embodiments, as shown in FIG. 1 , an optical probe for non-contact surface shape measurement, an aperture diaphragm 13 is also provided between the spherical shell lens and the focusing lens. The aperture diaphragm can effectively filter stray light and improve the quality of interference fringes.
实施例六：Embodiment six:
上述实施例技术方案基础上，一种用于非接触式面形测量的光学探头，测量光束经分束器反射进入CCD图像传感器上与参考光束形成干涉条纹后，将干涉条纹条数调整至零，由位置计量装置记录此时运动机构的位置信息。零条纹作为位置信息采集标准，可进一步减小运动机构定位误差。等光程可以进一步提高定位精度，减小调整误差。On the basis of the technical solutions of the above embodiments, an optical probe for non-contact surface shape measurement, after the measuring beam is reflected by the beam splitter and enters the CCD image sensor to form interference fringes with the reference beam, the number of interference fringes is adjusted to zero , the position information of the motion mechanism at this time is recorded by the position measuring device. Zero stripes are used as the standard for position information collection, which can further reduce the positioning error of the motion mechanism. The equal optical path length can further improve the positioning accuracy and reduce the adjustment error.
实施例七：Embodiment seven:
上述实施例技术方案基础上，一种用于非接触式面形测量的光学探头，所述的平面反射镜5与分束器3之间还设置有减光板。减光板可以有效的调整参考光束与测量光束能量比，进一步提高干涉条纹对比度。On the basis of the technical solutions of the above embodiments, an optical probe for non-contact surface shape measurement, a light-reducing plate is also arranged between the plane mirror 5 and the beam splitter 3 . The light reduction plate can effectively adjust the energy ratio of the reference beam and the measurement beam, and further improve the contrast of the interference fringes.
本技术方案未详细说明部分属于本领域技术人员公知技术。Parts not described in detail in this technical solution belong to the well-known technology of those skilled in the art.
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| CN115979171A (en)* | 2023-01-13 | 2023-04-18 | 中国科学院长春光学精密机械与物理研究所 | Convex mirror surface shape detection device and method |
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| CN115979171A (en)* | 2023-01-13 | 2023-04-18 | 中国科学院长春光学精密机械与物理研究所 | Convex mirror surface shape detection device and method |
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | Granted publication date:20180904 | |
| CF01 | Termination of patent right due to non-payment of annual fee |