技术领域technical field
本实用新型属于微机电系统(MEMS)技术领域，具体涉及一种用弹簧结构作为固定电极触点的纵向驱动阈值传感器。The utility model belongs to the technical field of micro-electromechanical systems (MEMS), in particular to a longitudinal driving threshold sensor using a spring structure as a fixed electrode contact.
背景技术Background technique
微型振动阈值传感器作为一种新型的无源器件，因其具有体积小，重量轻等优点而被广泛应用于各种微电子系统中，尤其随着物联网系统的发展，各种传感器装置与互联网结合成一个传感网络系统，而这些传感器常常因为某种特殊的需要而被放置在偏远的环境中或者被植入更换电池困难的系统内部，造成供电困难。振动阈值传感器相比于加速度计和陀螺仪，不需要在常态下维持一个稳定的电流，其寄生功耗为零，因此成为物联网系统中振动监测的最佳选择。As a new type of passive device, the miniature vibration threshold sensor is widely used in various microelectronic systems because of its small size and light weight. Especially with the development of the Internet of Things system, various sensor devices are combined with the Internet Form a sensor network system, and these sensors are often placed in a remote environment or implanted in a system where it is difficult to replace the battery due to some special needs, resulting in difficulty in power supply. Compared with accelerometers and gyroscopes, vibration threshold sensors do not need to maintain a stable current under normal conditions, and their parasitic power consumption is zero, so they become the best choice for vibration monitoring in IoT systems.
目前，惯性振动阈值传感器的可动电极通常由“弹簧(悬臂梁)-质量块”敏感元件组成，在质量块的边上制作固定结构作为固定电极触点，两电极之间有一定的距离，当外界加速度超过传感器的设定阈值时，可动电极在其敏感方向运动并与固定电极触点接触，从而实现阈值传感器的导通功能，在阈值传感器导通时，可动电极与固定电极之间的接触时间是影响传感器性能的重要参数，接触时间脉冲宽度大，则器件接触稳定性高，输出信号处理简单；反之，则增加了输出信号的处理难度，因此，延长可动电极与固定电极之间的接触时间是提高阈值传感器性能的重要手段。At present, the movable electrode of the inertial vibration threshold sensor is usually composed of a "spring (cantilever)-mass" sensitive element, and a fixed structure is made on the side of the mass as a fixed electrode contact. There is a certain distance between the two electrodes. When the external acceleration exceeds the set threshold of the sensor, the movable electrode moves in its sensitive direction and contacts the fixed electrode, thereby realizing the conduction function of the threshold sensor. When the threshold sensor is turned on, the movable electrode and the fixed electrode contact The contact time between them is an important parameter affecting the performance of the sensor. If the pulse width of the contact time is large, the contact stability of the device will be high and the output signal processing will be simple; otherwise, the processing of the output signal will be more difficult. The contact time between is an important means to improve the performance of the threshold sensor.
惯性传感器作为一种承受惯性冲击敏感器件，如果电极之间的碰撞接触为刚性接触，不但接触时间短，甚至有可能造成器件的破坏，降低使用寿命。因此，改变电极之间的接触方式是提高器件性能的有效途径，通过对现有文献检索发现，Luke J. Currano等在《Sensors and Actuators》、《传感器与执行器A》，2010年159期41-50页)发表了题为“Latching in a MEMS shock sensor: Modeling and experiments”(“闭锁式微机械振动传感器：建模与实验”)的论文，提出了一种对水平面上两个方向敏感的闭锁式传感器，这种闭锁式的传感器虽然回避了电极之间刚性碰撞导致接触时间短的问题，可以在足够大的过载加速度作用下实现信号的连续输出，但是由于电极之间在碰撞接触后形成锁扣结构，不得不在器件中增加了解锁装置，这就导致器件结构变得复杂以至于容易受损，并且这样的结构无疑大大降低了器件的重复工作能力。徐秋等在《Sensors》发表了题为“Design andOptimization of a Stationary Electrode in a Vertically-Driven MEMS InertialSwitch for Extending Contact Duration”（2017年17期527页）论文，报道了一种利用多空悬臂梁作为垂直固定电极触点延长接触时间的惯性开关，但是该器件中的固定电极弹性伸缩有限，制造工艺制约条件多，任何一条悬臂梁缺陷都可能导致固定电极失效。综合目前发明成果分析，只有可伸缩弹簧才能实现较大的弹性形变，使可动电极与固定电极在碰撞接触过程中实现最有效的弹性接触，目前尚未有一种能够有效解决电极之间弹性接触的有效设计方案。The inertial sensor is a sensitive device that withstands inertial impact. If the collision contact between the electrodes is a rigid contact, not only the contact time is short, but it may even cause damage to the device and reduce the service life. Therefore, changing the contact mode between electrodes is an effective way to improve device performance. Through searching the existing literature, it was found that Luke J. Currano et al. -50 pages) published a paper entitled "Latching in a MEMS shock sensor: Modeling and experiments" ("Latching micromechanical vibration sensor: modeling and experiments"), and proposed a latching that is sensitive to two directions on the horizontal plane Although this kind of locking sensor avoids the problem of short contact time caused by the rigid collision between the electrodes, it can realize the continuous output of the signal under the action of a large enough overload acceleration, but due to the formation of a lock between the electrodes after the collision contact If the buckle structure is used, an unlocking device has to be added to the device, which makes the device structure so complicated that it is easily damaged, and such a structure undoubtedly greatly reduces the repeatability of the device. Xu Qiu et al. published a paper titled "Design and Optimization of a Stationary Electrode in a Vertically-Driven MEMS Inertial Switch for Extending Contact Duration" in "Sensors" (2017 Issue 17, page 527), reporting a method using multi-vacant cantilever beams as The vertical fixed electrode contact prolongs the inertia switch of the contact time, but the elastic expansion and contraction of the fixed electrode in this device is limited, and there are many manufacturing process constraints. Any cantilever beam defect may cause the fixed electrode to fail. Based on the analysis of the current invention results, only the stretchable spring can achieve large elastic deformation, so that the movable electrode and the fixed electrode can achieve the most effective elastic contact during the collision contact process. At present, there is no one that can effectively solve the elastic contact between the electrodes. effective design.
发明内容Contents of the invention
本实用新型针对现有技术的不足，提供一种用弹簧结构作为固定电极触点的纵向驱动阈值传感器。该传感器使用两组弹簧电极作为阈值传感器的可动电极和固定电极触点，通过对两组电极弹簧的刚度优化，使得电极之间的碰撞接触成为柔性弹簧之间的振动传递过程。The utility model aims at the deficiencies of the prior art, and provides a longitudinal driving threshold sensor using a spring structure as a fixed electrode contact. The sensor uses two sets of spring electrodes as the movable electrodes and fixed electrode contacts of the threshold sensor. By optimizing the stiffness of the two sets of electrode springs, the collision contact between electrodes becomes a vibration transmission process between flexible springs.
为了实现上述目的，本实用新型采用以下技术手段：一种用弹簧结构作为固定电极触点的纵向驱动阈值传感器，包括衬底、阻尼减弱结构、可动电极支撑柱、可动电极悬挂弹簧、可动质量块、固定电极支撑柱、固定电极悬臂梁和固定电极弹性触点。In order to achieve the above object, the utility model adopts the following technical means: a longitudinal drive threshold sensor using a spring structure as a fixed electrode contact, including a substrate, a damping weakening structure, a movable electrode support column, a movable electrode suspension spring, a A moving mass block, a fixed electrode support column, a fixed electrode cantilever beam and a fixed electrode elastic contact.
衬底上固定设有阻尼减弱结构、可动电极支撑柱和固定电极支撑柱。固定电极悬臂梁悬空连接在固定电极支撑柱上，固定电极弹性触点一端与固定电极悬臂梁连接，另一端通过镂空正方形连接悬空在固定电极悬臂梁中间。可动电极悬挂弹簧一端与可动质量块相连、另一端与可动电极支撑柱相连并将可动质量块悬空于阻尼减弱结构和固定电极悬臂梁之间。A damping weakening structure, a movable electrode supporting column and a fixed electrode supporting column are fixedly arranged on the substrate. The fixed electrode cantilever beam is suspended and connected to the fixed electrode support column, one end of the elastic contact of the fixed electrode is connected to the fixed electrode cantilever beam, and the other end is suspended in the middle of the fixed electrode cantilever beam through a hollow square connection. One end of the movable electrode suspension spring is connected with the movable mass block, the other end is connected with the movable electrode support column, and the movable mass block is suspended between the damping weakening structure and the fixed electrode cantilever beam.
本实用新型有益的效果：针对以往阈值传感器可动电极与固定电极之间的刚性碰撞，容易对器件造成破坏，并且接触时间短的问题，提出了一种用弹簧结构作为垂直固定电极触点实现弹性接触从而延长接触时间的纵向驱动单向振动阈值传感器，该传感器引入了传动传导的原理，当两个弹簧电极相互碰撞时，惯性冲击由可动电极传导至固定电极，并在电极接触的瞬间实现两电极的协同移动，既延长了接触时间，也避免了电极之间的刚性碰撞对电极造成破坏。Beneficial effects of the utility model: In view of the rigid collision between the movable electrode and the fixed electrode of the threshold sensor in the past, which is easy to cause damage to the device and the contact time is short, a spring structure is proposed as a vertical fixed electrode contact. Longitudinal drive unidirectional vibration threshold sensor with elastic contact to prolong the contact time. This sensor introduces the principle of transmission. When two spring electrodes collide with each other, the inertial impact is transmitted from the movable electrode to the fixed electrode, and at the moment of electrode contact Realizing the coordinated movement of the two electrodes not only prolongs the contact time, but also avoids damage to the electrodes caused by the rigid collision between the electrodes.
附图说明Description of drawings
图1是整体结构示意图。Figure 1 is a schematic diagram of the overall structure.
图2是阻尼减弱结构和支撑柱结构示意图。Fig. 2 is a schematic diagram of the damping weakening structure and the support column structure.
图3是可动质量块结构示意图。Fig. 3 is a schematic diagram of the structure of the movable mass.
图4是固定电极悬臂梁结构示意图。Fig. 4 is a schematic diagram of the structure of the fixed electrode cantilever beam.
附图序号说明：1—衬底；2—阻尼减弱结构；3—可动电极支撑柱；4—可动电极悬挂弹簧；5—可动质量块；6—固定电极支撑柱；7—固定电极悬臂梁；8—固定电极弹性触点。Description of the serial numbers of the drawings: 1—substrate; 2—damping weakening structure; 3—movable electrode support column; 4—movable electrode suspension spring; 5—movable mass block; 6—fixed electrode support column; 7—fixed electrode Cantilever beam; 8—fixed electrode elastic contact.
具体实施方式Detailed ways
以下结合附图，作为实施例，对技术方案进一步说明。一种用弹簧结构作为固定电极触点的纵向驱动阈值传感器，包括衬底1、阻尼减弱结构2、可动电极支撑柱3、可动电极悬挂弹簧4、可动质量块5、固定电极支撑柱6、固定电极悬臂梁7和固定电极弹性触点8。The technical solution will be further described below in conjunction with the accompanying drawings as an embodiment. A longitudinal drive threshold sensor using a spring structure as a fixed electrode contact, including a substrate 1, a damping weakening structure 2, a movable electrode support column 3, a movable electrode suspension spring 4, a movable mass 5, and a fixed electrode support column 6. Fixed electrode cantilever beam 7 and fixed electrode elastic contact 8 .
衬底1为绝缘体，衬底1上固定设有阻尼减弱结构2、可动电极支撑柱3和固定电极支撑柱6。The substrate 1 is an insulator, and the damping weakening structure 2 , the movable electrode support column 3 and the fixed electrode support column 6 are fixedly arranged on the substrate 1 .
阻尼减弱结构2为长方形结构，长100—300微米，宽10—100微米，厚5—50微米，呈四边形对称分布，阻尼减弱结构2作用是减弱压膜阻尼效应。The damping weakening structure 2 is a rectangular structure with a length of 100-300 microns, a width of 10-100 microns, and a thickness of 5-50 microns, distributed symmetrically in a quadrilateral. The function of the damping weakening structure 2 is to weaken the damping effect of the pressure film.
可动质量块5为正方形结构，边长600—1500微米，厚20—300微米。可动质量块5的中心设有贯穿可动质量块5的导流孔，导流孔孔径100—300微米，可动质量块5的四边为凹槽状。The movable mass block 5 is a square structure with a side length of 600-1500 microns and a thickness of 20-300 microns. The center of the movable mass 5 is provided with a diversion hole running through the movable mass 5, the diameter of the diversion hole is 100-300 microns, and the four sides of the movable mass 5 are groove-shaped.
固定电极悬臂梁7为正方形框架结构，边长1000—1900微米，悬臂梁宽100—300微米，固定电极悬臂梁7的四个角点向外延伸悬空连接在固定电极支撑柱6上。The fixed electrode cantilever beam 7 is a square frame structure with a side length of 1000-1900 microns and a cantilever beam width of 100-300 microns.
可动电极悬挂弹簧4由四组蛇形弹簧组成，弹簧线宽5—50微米，厚5—50微米。可动电极悬挂弹簧4一端与可动质量块5相连、另一端与可动电极支撑柱3相连并将可动质量块5悬空于阻尼减弱结构2和固定电极悬臂梁7之间，可动电极悬挂弹簧4与可动质量块5对称分布。可动质量块5悬空在阻尼减弱结构2上方5—100微米，可动质量块5悬空在固定电极悬臂梁7下方5—100微米。The movable electrode suspension spring 4 is made up of four groups of serpentine springs, the spring line width is 5-50 microns, and the thickness is 5-50 microns. One end of the movable electrode suspension spring 4 is connected to the movable mass 5, the other end is connected to the movable electrode support column 3, and the movable mass 5 is suspended between the damping weakening structure 2 and the fixed electrode cantilever beam 7, and the movable electrode The suspension spring 4 and the movable mass 5 are distributed symmetrically. The movable mass block 5 is suspended 5-100 microns above the damping weakening structure 2, and the movable mass block 5 is suspended 5-100 microns below the fixed electrode cantilever beam 7.
固定电极弹性触点8为四根U形弹簧，固定电极弹性触点8一端与固定电极悬臂梁7连接、另一端通过内圆外方的镂空正方形连接悬空在固定电极悬臂梁7上，弹簧线宽10—100微米、厚5—50微米、长200—600微米。镂空正方形位于固定电极悬臂梁7中间，固定电极弹性触点8的中心点距可动质量块5边线的垂直距离为5—50微米。The fixed electrode elastic contacts 8 are four U-shaped springs, one end of the fixed electrode elastic contacts 8 is connected to the fixed electrode cantilever beam 7, and the other end is suspended on the fixed electrode cantilever beam 7 through the hollow square connection of the inner circle and the outer side. 10-100 microns wide, 5-50 microns thick, and 200-600 microns long. The hollow square is located in the middle of the cantilever beam 7 of the fixed electrode, and the vertical distance between the center point of the elastic contact 8 of the fixed electrode and the side line of the movable mass 5 is 5-50 microns.
当外界超过设定阈值的加速度沿绝缘衬底1表面法线方向作用于本实用新型利用弹簧结构作为纵向驱动固定电极触点时，可动质量块5将接触到悬空在可动质量块5上方的固定电极弹性触点8，从而在垂直方向上实现对外电路的导通。When the external acceleration exceeding the set threshold acts on the utility model along the normal direction of the surface of the insulating substrate 1, when the spring structure is used as the longitudinally driven fixed electrode contact of the utility model, the movable mass 5 will touch and hang above the movable mass 5 The fixed electrode elastic contact 8 realizes the conduction of the external circuit in the vertical direction.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721860044.7UCN207675296U (en) | 2017-12-27 | 2017-12-27 | A kind of zigzag tread patterns threshold sensor for using spring structure as fixed electrode contacts |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721860044.7UCN207675296U (en) | 2017-12-27 | 2017-12-27 | A kind of zigzag tread patterns threshold sensor for using spring structure as fixed electrode contacts |
| Publication Number | Publication Date |
|---|---|
| CN207675296Utrue CN207675296U (en) | 2018-07-31 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721860044.7UActiveCN207675296U (en) | 2017-12-27 | 2017-12-27 | A kind of zigzag tread patterns threshold sensor for using spring structure as fixed electrode contacts |
| Country | Link |
|---|---|
| CN (1) | CN207675296U (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108007556A (en)* | 2017-12-27 | 2018-05-08 | 曲靖师范学院 | A kind of zigzag tread patterns threshold sensor by the use of spring structure as fixed electrode contacts |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108007556A (en)* | 2017-12-27 | 2018-05-08 | 曲靖师范学院 | A kind of zigzag tread patterns threshold sensor by the use of spring structure as fixed electrode contacts |
| CN108007556B (en)* | 2017-12-27 | 2025-02-28 | 曲靖师范学院 | A longitudinally driven threshold sensor using a spring structure as a fixed electrode contact |
| Publication | Publication Date | Title |
|---|---|---|
| CN111721971B (en) | High-sensitivity MEMS resonant acceleration sensor | |
| CN101789329B (en) | Three-dimensional multi-directional sensitive micromachined inertial electrical switch | |
| CN103575931A (en) | Multi-direction vibration threshold value sensor for achieving contact time delay through nano-micro flexible arrays | |
| CN109212261B (en) | A three-axis threshold accelerometer that can effectively avoid false triggering in non-sensitive directions | |
| KR20170092691A (en) | Inertia measurement module and three-axis accelerometer | |
| US8701490B2 (en) | Z-axis capacitive accelerometer | |
| CN112525181B (en) | Inertial sensor with integrated damping structure | |
| CN112551474B (en) | MEMS movable structure with in-plane stop | |
| CN105225887B (en) | A kind of sensitive micro-mechanical inertia switch of tight constraint type level | |
| JP2017535784A (en) | 3-axis MEMS gyro | |
| CN103532434A (en) | Broadband multi-dimensional energy collector based on collision mechanism | |
| CN106908626A (en) | A kind of capacitance microaccelerator sensitive structure | |
| CN103594283B (en) | A kind of micromechanics lateral vibration acceleration switch | |
| CN106024507A (en) | Electrostatic locking vertical sensitive micromechanical inertial switch | |
| CN207675296U (en) | A kind of zigzag tread patterns threshold sensor for using spring structure as fixed electrode contacts | |
| CN103292798A (en) | Tuning fork type micromechanical gyroscope capable of resisting high-strength impact | |
| CN105226992B (en) | Energy Harvester and Sensor for Power Generation Driven by Vibration Amplitude Threshold | |
| CN101699604A (en) | Normally closed micro-mechanical inertia electrical switch | |
| CN107782915B (en) | Silicon hollow beam, silicon micro-accelerometer based on silicon hollow beam and preparation method of silicon micro-accelerometer | |
| CN110572077A (en) | An energy buffering type collision piezoelectric energy harvesting device | |
| CN108007556B (en) | A longitudinally driven threshold sensor using a spring structure as a fixed electrode contact | |
| CN101013637A (en) | Conjoined snakelike spring minimized inertial electrical switch | |
| CN108645508B (en) | Vibration pickup with self-adaptive mechanical amplitude detection structure | |
| CN102938350A (en) | Micro-impulse breaker capable of prolonging contact time and producing method thereof | |
| CN102064039A (en) | Micro-electromechanical system switch, motion sensor and motion sensing method |
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |