技术领域technical field
本实用新型涉及空气净化设备技术领域，具体为一种可移动式空气净化装置。The utility model relates to the technical field of air purification equipment, in particular to a movable air purification device.
背景技术Background technique
空气净化是指针对室内的各种环境问题提供杀菌消毒、降尘除霾、祛除有害装修残留以及异味等整体解决方案，提高改善生活、办公条件，增进身心健康。室内环境污染物和污染来源主要包括放射性气体、霉菌、颗粒物、装修残留、二手烟等。Air purification refers to providing overall solutions for various indoor environmental problems such as sterilization and disinfection, dust and haze removal, harmful decoration residues and peculiar smells, so as to improve living and office conditions and improve physical and mental health. Indoor environmental pollutants and pollution sources mainly include radioactive gas, mold, particulate matter, decoration residue, second-hand smoke, etc.
传统的空气净化设备需人力手工将设备推动至净化位置，无法自动移动，且无法根据空气质量的高低决定净化时间的长短，不够智能高效，为此我们提出一种可移动式空气净化装置来解决以上存在的问题。Traditional air purification equipment needs to be manually pushed to the purification position, and cannot be moved automatically, and the length of purification time cannot be determined according to the level of air quality, which is not smart enough and efficient. For this reason, we propose a mobile air purification device to solve the problem. the above problems.
实用新型内容Utility model content
本实用新型的目的在于提供一种可移动式空气净化装置，以解决上述背景技术中提出的需人力手工将设备推动至净化位置，无法自动移动，且无法根据空气质量的高低决定净化时间的长短，不够智能高效的问题。The purpose of this utility model is to provide a movable air purification device to solve the above-mentioned background technology that requires manpower to manually push the equipment to the purification position, which cannot be moved automatically, and the length of the purification time cannot be determined according to the air quality. , Not smart and efficient enough.
为实现上述目的，本实用新型提供如下技术方案：一种可移动式空气净化装置，包括空气净化装置主体，所述空气净化装置主体的两侧设置有吸风口，所述吸风口的内部设置有无线载波探头，所述空气净化装置主体的底部安装有行走轮，且空气净化装置主体的内部安装有智能处理芯片，所述智能处理芯片的一侧设置有陀螺仪室内导航装置，所述陀螺仪室内导航装置的右侧设置有红外接收器，所述空气净化装置主体的内部安装有上电气集尘装置，所述上电气集尘装置的下方设置有下电气集尘装置，且上电气集尘装置上安装有再生除味剂，所述下电气集尘装置的背面设置有涡轮风扇，所述空气净化装置主体的侧面设置有空气质量感应器进风口，所述空气质量感应器进风口的下方设置有空气质量感应器出风口，且空气质量感应器进风口的内部安装有空气质量感应器和异味传感器，所述空气净化装置主体的背面设置有排风口，所述无线载波探头的输出端与陀螺仪室内导航装置的输入端电性连接，所述陀螺仪室内导航装置、空气质量感应器和异味传感器的输出端均与智能处理芯片的输入端电性连接。In order to achieve the above purpose, the utility model provides the following technical solutions: a movable air purification device, including the main body of the air purification device, the two sides of the main body of the air purification device are provided with suction ports, and the inside of the suction port is provided with Wireless carrier probe, the bottom of the main body of the air purification device is equipped with walking wheels, and the inside of the main body of the air purification device is equipped with an intelligent processing chip, one side of the intelligent processing chip is provided with a gyroscope indoor navigation device, and the gyroscope The right side of the indoor navigation device is provided with an infrared receiver, the interior of the main body of the air purification device is equipped with an upper electrical dust collection device, and the lower electrical dust collection device is provided below the upper electrical dust collection device, and the upper electrical dust collection device A regenerated deodorant is installed on the device, a turbo fan is arranged on the back of the lower electrical dust collection device, an air inlet of an air quality sensor is arranged on the side of the main body of the air purification device, and the air inlet below the air quality sensor An air quality sensor air outlet is provided, and an air quality sensor and an odor sensor are installed inside the air quality sensor air inlet. The back of the air purification device main body is provided with an air exhaust port. It is electrically connected to the input end of the gyroscope indoor navigation device, and the output ends of the gyroscope indoor navigation device, the air quality sensor and the odor sensor are all electrically connected to the input end of the intelligent processing chip.
优选的，所述空气净化装置主体的表面设置有触控操控装置。Preferably, the surface of the main body of the air purification device is provided with a touch control device.
优选的，所述空气净化装置主体的内部设置有驱动马达，所述驱动马达与行走轮通过轴承传动连接。Preferably, a driving motor is arranged inside the main body of the air cleaning device, and the driving motor is connected to the traveling wheels through bearings.
优选的，所述空气净化装置主体的底部共设置有四个下视感应探头，所述下视感应探头的输出端与智能处理芯片的输入端电性连接。Preferably, four downward-looking sensing probes are arranged at the bottom of the main body of the air purification device, and the output ends of the downward-looking sensing probes are electrically connected to the input ends of the intelligent processing chip.
优选的，所述涡轮风扇与下电气集尘装置之间设置有驱动电机，所述驱动电机与涡轮风扇传动连接。Preferably, a drive motor is provided between the turbo fan and the lower electrical dust collecting device, and the drive motor is in transmission connection with the turbo fan.
与现有技术相比，本实用新型的有益效果是：本实用新型结构科学合理，操作简单方便，并根据空气质量检测结果确定净化时长的设备，本实用新型内置无线载波探头和陀螺仪室内导航装置，能够自动探测设备与周边环境距离，防止碰撞，行走过程中，下视感应探头能够防止设备跌落，内置电气集尘装置，无需频繁更换，可水洗清洁，节约过滤网更换成本，降低生活成本，且吸附拦截能力更强，增添再生除味剂，净化同时去除空气异味，保持室内空气清新。Compared with the prior art, the beneficial effects of the utility model are: the utility model has a scientific and reasonable structure, simple and convenient operation, and can determine the purification duration according to the air quality detection results. The utility model has a built-in wireless carrier probe and a gyroscope for indoor navigation The device can automatically detect the distance between the device and the surrounding environment to prevent collisions. During walking, the downward-looking sensor probe can prevent the device from falling. The built-in electrical dust collection device does not need to be replaced frequently. It can be washed and cleaned, saving filter replacement costs and reducing living costs. , and the adsorption and interception ability is stronger, and the regenerative deodorant is added to purify and remove air odors at the same time, keeping the indoor air fresh.
附图说明Description of drawings
图1为本实用新型的外观示意图；Fig. 1 is the appearance schematic diagram of the utility model;
图2为本实用新型的内部结构示意图；Fig. 2 is a schematic diagram of the internal structure of the utility model;
图3为本实用新型的侧视图；Fig. 3 is a side view of the utility model;
图4为本实用新型的后视图。Fig. 4 is the rear view of the utility model.
图中：1-吸风口；2-空气净化装置主体；3-行走轮；4-无线载波探头；5-智能处理芯片；6-陀螺仪室内导航装置；7-红外接收器；8-再生除味剂；9-上电气集尘装置；10-下电气集尘装置；11-下视感应探头；12-驱动马达；13-空气质量感应器进风口；14-空气质量感应器；15-异味传感器；16-空气质量感应器出风口；17-排风口；18-涡轮风扇。In the figure: 1-suction port; 2-main body of air purification device; 3-walking wheel; 4-wireless carrier probe; 5-intelligent processing chip; 6-gyroscope indoor navigation device; 7-infrared receiver; Odor agent; 9-upper electrical dust collection device; 10-lower electrical dust collection device; 11-down view induction probe; 12-drive motor; 13-air inlet of air quality sensor; 14-air quality sensor; 15-odor Sensor; 16-air quality sensor outlet; 17-exhaust outlet; 18-turbine fan.
具体实施方式detailed description
下面将结合本实用新型实施例中的附图，对本实用新型实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本实用新型一部分实施例，而不是全部的实施例。基于本实用新型中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本实用新型保护的范围。The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. example. Based on the embodiments of the present utility model, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of the present utility model.
请参阅图1、图2、图3和图4，本实用新型提供的一种实施例：一种可移动式空气净化装置，包括空气净化装置主体2，空气净化装置主体2的两侧设置有吸风口1，吸风口1的内部设置有无线载波探头4，空气净化装置主体2的底部安装有行走轮3，且空气净化装置主体2的内部安装有智能处理芯片5，智能处理芯片5的一侧设置有陀螺仪室内导航装置6，陀螺仪室内导航装置6的右侧设置有红外接收器7，空气净化装置主体2的内部安装有上电气集尘装置9，上电气集尘装置9的下方设置有下电气集尘装置10，且上电气集尘装置9上安装有再生除味剂8，下电气集尘装置10的背面设置有涡轮风扇18，空气净化装置主体2的侧面设置有空气质量感应器进风口13，空气质量感应器进风口13的下方设置有空气质量感应器出风口16，且空气质量感应器进风口13的内部安装有空气质量感应器14和异味传感器15，空气净化装置主体2的背面设置有排风口17，无线载波探头4的输出端与陀螺仪室内导航装置6的输入端电性连接，陀螺仪室内导航装置6、空气质量感应器14和异味传感器15的输出端均与智能处理芯片5的输入端电性连接，空气净化装置主体2的表面设置有触控操控装置，空气净化装置主体2的内部设置有驱动马达12，驱动马达12与行走轮3通过轴承传动连接，空气净化装置主体2的底部共设置有四个下视感应探头11，下视感应探头11的输出端与智能处理芯片5的输入端电性连接，涡轮风扇18与下电气集尘装置10之间设置有驱动电机，驱动电机与涡轮风扇18传动连接。Please refer to Fig. 1, Fig. 2, Fig. 3 and Fig. 4, an embodiment provided by the utility model: a movable air purification device, comprising an air purification device main body 2, the two sides of the air purification device main body 2 are provided with Air suction port 1, the inside of air suction port 1 is provided with wireless carrier probe 4, the bottom of air purification device main body 2 is equipped with walking wheel 3, and the inside of air purification device main body 2 is equipped with intelligent processing chip 5, one of intelligent processing chip 5 The side is provided with a gyroscope indoor navigation device 6, and the right side of the gyroscope indoor navigation device 6 is provided with an infrared receiver 7, and an upper electric dust collection device 9 is installed inside the air purification device main body 2, and an upper electric dust collection device 9 is installed below the upper electric dust collection device 9. A lower electrical dust collection device 10 is provided, and a regenerating deodorant 8 is installed on the upper electrical dust collection device 9, a turbo fan 18 is arranged on the back side of the lower electrical dust collection device 10, and an air mass filter is installed on the side of the air cleaning device main body 2. The sensor air inlet 13, the air quality sensor air outlet 16 is arranged below the air quality sensor air inlet 13, and the inside of the air quality sensor air inlet 13 is equipped with an air quality sensor 14 and an odor sensor 15, the air purification device The back of the main body 2 is provided with an air outlet 17, the output end of the wireless carrier probe 4 is electrically connected to the input end of the gyroscope indoor navigation device 6, the output of the gyroscope indoor navigation device 6, the air quality sensor 14 and the odor sensor 15 Both ends are electrically connected to the input end of the intelligent processing chip 5. The surface of the air purification device main body 2 is provided with a touch control device, and the interior of the air purification device main body 2 is provided with a driving motor 12, and the driving motor 12 and the traveling wheel 3 pass through the bearing Transmission connection, the bottom of the main body 2 of the air purification device is provided with four downward-looking sensing probes 11, the output end of the downward-looking sensing probe 11 is electrically connected to the input end of the intelligent processing chip 5, and the turbo fan 18 is connected to the lower electrical dust collection device. 10 is provided with a driving motor, and the driving motor is connected with the turbofan 18 in transmission.
具体使用方式：该可移动式空气净化装置按正常程序安装好过后，首先将空气净化装置主体2连接电源并启动设备，无线载波探头4能够测量距离变化并定位室内坐标，陀螺仪室内导航装置6能够实现全屋定位，陀螺仪室内导航装置6与智能处理芯片5结合能够规划最佳的空气净化路径，下视感应探头11能够防设备跌落，涡轮风扇18将室内气流通过吸风口1吸入，上电气集尘装置9和下电气集尘装置10能够拦截至PM0.1的微型颗粒，净化效果更好，且无需频繁更换，再生除味剂8能够去除空气中的各种异味，空气质量感应器14和异味传感器15能够自动检测由空气质量感应器进风口13进入的气流的空气质量和异味，并将检测结果发送至智能处理芯片5，智能处理芯片5自动设定此处的净化时长。Specific use method: After the mobile air purification device is installed according to the normal procedure, first connect the main body 2 of the air purification device to the power supply and start the device. The wireless carrier probe 4 can measure the distance change and locate the indoor coordinates. The gyroscope indoor navigation device 6 It can realize the positioning of the whole house. The combination of the gyroscope indoor navigation device 6 and the intelligent processing chip 5 can plan the best air purification path. The downward-looking sensing probe 11 can prevent the equipment from falling. The electric dust collection device 9 and the lower electric dust collection device 10 can intercept micro particles down to PM0.1, the purification effect is better, and there is no need for frequent replacement, the regenerated deodorant 8 can remove various peculiar smells in the air, and the air quality sensor 14 and the odor sensor 15 can automatically detect the air quality and the odor of the airflow entering by the air quality sensor air inlet 13, and the detection result is sent to the intelligent processing chip 5, and the intelligent processing chip 5 automatically sets the purification duration here.
对于本领域技术人员而言，显然本实用新型不限于上述示范性实施例的细节，而且在不背离本实用新型的精神或基本特征的情况下，能够以其他的具体形式实现本实用新型。因此，无论从哪一点来看，均应将实施例看作是示范性的，而且是非限制性的，本实用新型的范围由所附权利要求而不是上述说明限定，因此旨在将落在权利要求的等同要件的含义和范围内的所有变化囊括在本实用新型内。不应将权利要求中的任何附图标记视为限制所涉及的权利要求。It is obvious to those skilled in the art that the present invention is not limited to the details of the above-mentioned exemplary embodiments, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, no matter from all points of view, the embodiments should be regarded as exemplary and non-restrictive, and the scope of the present invention is defined by the appended claims rather than the above description, so it is intended to fall within the scope of the claims All changes within the meaning and range of equivalents of the required elements are included in the present invention. Any reference sign in a claim should not be construed as limiting the claim concerned.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621191290.3UCN206145834U (en) | 2016-11-01 | 2016-11-01 | Movable air purification device |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621191290.3UCN206145834U (en) | 2016-11-01 | 2016-11-01 | Movable air purification device |
| Publication Number | Publication Date |
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| CN206145834Utrue CN206145834U (en) | 2017-05-03 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621191290.3UExpired - Fee RelatedCN206145834U (en) | 2016-11-01 | 2016-11-01 | Movable air purification device |
| Country | Link |
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| CN (1) | CN206145834U (en) |
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| US12218269B2 (en) | 2020-02-13 | 2025-02-04 | Asm Ip Holding B.V. | Substrate processing apparatus including light receiving device and calibration method of light receiving device |
| US12217946B2 (en) | 2020-10-15 | 2025-02-04 | Asm Ip Holding B.V. | Method of manufacturing semiconductor device, and substrate treatment apparatus using ether-CAT |
| US12217954B2 (en) | 2020-08-25 | 2025-02-04 | Asm Ip Holding B.V. | Method of cleaning a surface |
| US12221357B2 (en) | 2020-04-24 | 2025-02-11 | Asm Ip Holding B.V. | Methods and apparatus for stabilizing vanadium compounds |
| US12230531B2 (en) | 2018-04-09 | 2025-02-18 | Asm Ip Holding B.V. | Substrate supporting apparatus, substrate processing apparatus including the same, and substrate processing method |
| US12243757B2 (en) | 2020-05-21 | 2025-03-04 | Asm Ip Holding B.V. | Flange and apparatus for processing substrates |
| US12240760B2 (en) | 2016-03-18 | 2025-03-04 | Asm Ip Holding B.V. | Aligned carbon nanotubes |
| US12241158B2 (en) | 2020-07-20 | 2025-03-04 | Asm Ip Holding B.V. | Method for forming structures including transition metal layers |
| US12243742B2 (en) | 2020-04-21 | 2025-03-04 | Asm Ip Holding B.V. | Method for processing a substrate |
| US12243747B2 (en) | 2020-04-24 | 2025-03-04 | Asm Ip Holding B.V. | Methods of forming structures including vanadium boride and vanadium phosphide layers |
| US12247286B2 (en) | 2019-08-09 | 2025-03-11 | Asm Ip Holding B.V. | Heater assembly including cooling apparatus and method of using same |
| US12255053B2 (en) | 2020-12-10 | 2025-03-18 | Asm Ip Holding B.V. | Methods and systems for depositing a layer |
| US12252785B2 (en) | 2019-06-10 | 2025-03-18 | Asm Ip Holding B.V. | Method for cleaning quartz epitaxial chambers |
| US12266524B2 (en) | 2020-06-16 | 2025-04-01 | Asm Ip Holding B.V. | Method for depositing boron containing silicon germanium layers |
| US12272527B2 (en) | 2018-05-09 | 2025-04-08 | Asm Ip Holding B.V. | Apparatus for use with hydrogen radicals and method of using same |
| US12278129B2 (en) | 2020-03-04 | 2025-04-15 | Asm Ip Holding B.V. | Alignment fixture for a reactor system |
| US12288710B2 (en) | 2020-12-18 | 2025-04-29 | Asm Ip Holding B.V. | Wafer processing apparatus with a rotatable table |
| US12322591B2 (en) | 2020-07-27 | 2025-06-03 | Asm Ip Holding B.V. | Thin film deposition process |
| US12363960B2 (en) | 2017-07-19 | 2025-07-15 | Asm Ip Holding B.V. | Method for depositing a Group IV semiconductor and related semiconductor device structures |
| US12378665B2 (en) | 2018-10-26 | 2025-08-05 | Asm Ip Holding B.V. | High temperature coatings for a preclean and etch apparatus and related methods |
| US12406846B2 (en) | 2020-05-26 | 2025-09-02 | Asm Ip Holding B.V. | Method for depositing boron and gallium containing silicon germanium layers |
| US12410515B2 (en) | 2020-01-29 | 2025-09-09 | Asm Ip Holding B.V. | Contaminant trap system for a reactor system |
| US12428726B2 (en) | 2019-10-08 | 2025-09-30 | Asm Ip Holding B.V. | Gas injection system and reactor system including same |
| US12431334B2 (en) | 2020-02-13 | 2025-09-30 | Asm Ip Holding B.V. | Gas distribution assembly |
| US12442082B2 (en) | 2021-05-04 | 2025-10-14 | Asm Ip Holding B.V. | Reactor system comprising a tuning circuit |
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| US11725277B2 (en) | 2011-07-20 | 2023-08-15 | Asm Ip Holding B.V. | Pressure transmitter for a semiconductor processing environment |
| US11967488B2 (en) | 2013-02-01 | 2024-04-23 | Asm Ip Holding B.V. | Method for treatment of deposition reactor |
| US11795545B2 (en) | 2014-10-07 | 2023-10-24 | Asm Ip Holding B.V. | Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same |
| US11742189B2 (en) | 2015-03-12 | 2023-08-29 | Asm Ip Holding B.V. | Multi-zone reactor, system including the reactor, and method of using the same |
| US11956977B2 (en) | 2015-12-29 | 2024-04-09 | Asm Ip Holding B.V. | Atomic layer deposition of III-V compounds to form V-NAND devices |
| US11676812B2 (en) | 2016-02-19 | 2023-06-13 | Asm Ip Holding B.V. | Method for forming silicon nitride film selectively on top/bottom portions |
| US12240760B2 (en) | 2016-03-18 | 2025-03-04 | Asm Ip Holding B.V. | Aligned carbon nanotubes |
| US11453943B2 (en) | 2016-05-25 | 2022-09-27 | Asm Ip Holding B.V. | Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursor |
| US11649546B2 (en) | 2016-07-08 | 2023-05-16 | Asm Ip Holding B.V. | Organic reactants for atomic layer deposition |
| US11749562B2 (en) | 2016-07-08 | 2023-09-05 | Asm Ip Holding B.V. | Selective deposition method to form air gaps |
| US11694892B2 (en) | 2016-07-28 | 2023-07-04 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
| US11610775B2 (en) | 2016-07-28 | 2023-03-21 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
| US11532757B2 (en) | 2016-10-27 | 2022-12-20 | Asm Ip Holding B.V. | Deposition of charge trapping layers |
| US11810788B2 (en) | 2016-11-01 | 2023-11-07 | Asm Ip Holding B.V. | Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
| US11396702B2 (en) | 2016-11-15 | 2022-07-26 | Asm Ip Holding B.V. | Gas supply unit and substrate processing apparatus including the gas supply unit |
| US11851755B2 (en) | 2016-12-15 | 2023-12-26 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus and a method of forming a patterned structure |
| US11970766B2 (en) | 2016-12-15 | 2024-04-30 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus |
| US11581186B2 (en) | 2016-12-15 | 2023-02-14 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus |
| US11447861B2 (en) | 2016-12-15 | 2022-09-20 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus and a method of forming a patterned structure |
| US12000042B2 (en) | 2016-12-15 | 2024-06-04 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus and a method of forming a patterned structure |
| US12043899B2 (en) | 2017-01-10 | 2024-07-23 | Asm Ip Holding B.V. | Reactor system and method to reduce residue buildup during a film deposition process |
| US11390950B2 (en) | 2017-01-10 | 2022-07-19 | Asm Ip Holding B.V. | Reactor system and method to reduce residue buildup during a film deposition process |
| US11410851B2 (en) | 2017-02-15 | 2022-08-09 | Asm Ip Holding B.V. | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures |
| US12106965B2 (en) | 2017-02-15 | 2024-10-01 | Asm Ip Holding B.V. | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures |
| US11848200B2 (en) | 2017-05-08 | 2023-12-19 | Asm Ip Holding B.V. | Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures |
| US12040200B2 (en) | 2017-06-20 | 2024-07-16 | Asm Ip Holding B.V. | Semiconductor processing apparatus and methods for calibrating a semiconductor processing apparatus |
| US11306395B2 (en) | 2017-06-28 | 2022-04-19 | Asm Ip Holding B.V. | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus |
| US11976361B2 (en) | 2017-06-28 | 2024-05-07 | Asm Ip Holding B.V. | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus |
| US11695054B2 (en) | 2017-07-18 | 2023-07-04 | Asm Ip Holding B.V. | Methods for forming a semiconductor device structure and related semiconductor device structures |
| US12363960B2 (en) | 2017-07-19 | 2025-07-15 | Asm Ip Holding B.V. | Method for depositing a Group IV semiconductor and related semiconductor device structures |
| US11802338B2 (en) | 2017-07-26 | 2023-10-31 | Asm Ip Holding B.V. | Chemical treatment, deposition and/or infiltration apparatus and method for using the same |
| CN107632600A (en)* | 2017-08-04 | 2018-01-26 | 珠海格力电器股份有限公司 | Method and device for controlling movement of air purifier, mobile terminal and purifier |
| US11587821B2 (en) | 2017-08-08 | 2023-02-21 | Asm Ip Holding B.V. | Substrate lift mechanism and reactor including same |
| US11417545B2 (en) | 2017-08-08 | 2022-08-16 | Asm Ip Holding B.V. | Radiation shield |
| US11769682B2 (en) | 2017-08-09 | 2023-09-26 | Asm Ip Holding B.V. | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
| CN107631366A (en)* | 2017-08-13 | 2018-01-26 | 尚海芝 | The control method and air purifying robot of a kind of air purifying robot |
| CN107702230A (en)* | 2017-08-13 | 2018-02-16 | 尚海芝 | The control method and air purifying robot of air purifying robot |
| US11830730B2 (en) | 2017-08-29 | 2023-11-28 | Asm Ip Holding B.V. | Layer forming method and apparatus |
| US11295980B2 (en) | 2017-08-30 | 2022-04-05 | Asm Ip Holding B.V. | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures |
| US11581220B2 (en) | 2017-08-30 | 2023-02-14 | Asm Ip Holding B.V. | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures |
| US11387120B2 (en) | 2017-09-28 | 2022-07-12 | Asm Ip Holding B.V. | Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber |
| US12033861B2 (en) | 2017-10-05 | 2024-07-09 | Asm Ip Holding B.V. | Method for selectively depositing a metallic film on a substrate |
| US12040184B2 (en) | 2017-10-30 | 2024-07-16 | Asm Ip Holding B.V. | Methods for forming a semiconductor structure and related semiconductor structures |
| CN111344522B (en)* | 2017-11-27 | 2022-04-12 | 阿斯莫Ip控股公司 | Including clean mini-environment device |
| US11682572B2 (en) | 2017-11-27 | 2023-06-20 | Asm Ip Holdings B.V. | Storage device for storing wafer cassettes for use with a batch furnace |
| US11639811B2 (en) | 2017-11-27 | 2023-05-02 | Asm Ip Holding B.V. | Apparatus including a clean mini environment |
| CN111344522A (en)* | 2017-11-27 | 2020-06-26 | 阿斯莫Ip控股公司 | Including clean mini-environment device |
| US11501973B2 (en) | 2018-01-16 | 2022-11-15 | Asm Ip Holding B.V. | Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures |
| US11972944B2 (en) | 2018-01-19 | 2024-04-30 | Asm Ip Holding B.V. | Method for depositing a gap-fill layer by plasma-assisted deposition |
| US11393690B2 (en) | 2018-01-19 | 2022-07-19 | Asm Ip Holding B.V. | Deposition method |
| US12119228B2 (en) | 2018-01-19 | 2024-10-15 | Asm Ip Holding B.V. | Deposition method |
| US11482412B2 (en) | 2018-01-19 | 2022-10-25 | Asm Ip Holding B.V. | Method for depositing a gap-fill layer by plasma-assisted deposition |
| US11735414B2 (en) | 2018-02-06 | 2023-08-22 | Asm Ip Holding B.V. | Method of post-deposition treatment for silicon oxide film |
| US11685991B2 (en) | 2018-02-14 | 2023-06-27 | Asm Ip Holding B.V. | Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
| US11387106B2 (en) | 2018-02-14 | 2022-07-12 | Asm Ip Holding B.V. | Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
| US12173402B2 (en) | 2018-02-15 | 2024-12-24 | Asm Ip Holding B.V. | Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus |
| US11482418B2 (en) | 2018-02-20 | 2022-10-25 | Asm Ip Holding B.V. | Substrate processing method and apparatus |
| US11939673B2 (en) | 2018-02-23 | 2024-03-26 | Asm Ip Holding B.V. | Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment |
| US11473195B2 (en) | 2018-03-01 | 2022-10-18 | Asm Ip Holding B.V. | Semiconductor processing apparatus and a method for processing a substrate |
| US11398382B2 (en) | 2018-03-27 | 2022-07-26 | Asm Ip Holding B.V. | Method of forming an electrode on a substrate and a semiconductor device structure including an electrode |
| US12020938B2 (en) | 2018-03-27 | 2024-06-25 | Asm Ip Holding B.V. | Method of forming an electrode on a substrate and a semiconductor device structure including an electrode |
| CN108434930A (en)* | 2018-03-29 | 2018-08-24 | 深圳市奈士迪技术研发有限公司 | A kind of air cleaning facility of the good purification based on Internet of Things |
| US12230531B2 (en) | 2018-04-09 | 2025-02-18 | Asm Ip Holding B.V. | Substrate supporting apparatus, substrate processing apparatus including the same, and substrate processing method |
| US12025484B2 (en) | 2018-05-08 | 2024-07-02 | Asm Ip Holding B.V. | Thin film forming method |
| US12272527B2 (en) | 2018-05-09 | 2025-04-08 | Asm Ip Holding B.V. | Apparatus for use with hydrogen radicals and method of using same |
| US11908733B2 (en) | 2018-05-28 | 2024-02-20 | Asm Ip Holding B.V. | Substrate processing method and device manufactured by using the same |
| US11361990B2 (en) | 2018-05-28 | 2022-06-14 | Asm Ip Holding B.V. | Substrate processing method and device manufactured by using the same |
| US11718913B2 (en) | 2018-06-04 | 2023-08-08 | Asm Ip Holding B.V. | Gas distribution system and reactor system including same |
| CN108785698A (en)* | 2018-06-14 | 2018-11-13 | 潍坊学院 | A kind of intelligence is from decontamination type multifunctional kitchen apparatus for ultraviolet disinfection |
| US11296189B2 (en) | 2018-06-21 | 2022-04-05 | Asm Ip Holding B.V. | Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures |
| US11530483B2 (en) | 2018-06-21 | 2022-12-20 | Asm Ip Holding B.V. | Substrate processing system |
| US11499222B2 (en) | 2018-06-27 | 2022-11-15 | Asm Ip Holding B.V. | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
| US11952658B2 (en) | 2018-06-27 | 2024-04-09 | Asm Ip Holding B.V. | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
| US11492703B2 (en) | 2018-06-27 | 2022-11-08 | Asm Ip Holding B.V. | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
| US11814715B2 (en) | 2018-06-27 | 2023-11-14 | Asm Ip Holding B.V. | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
| US11646197B2 (en) | 2018-07-03 | 2023-05-09 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
| US11923190B2 (en) | 2018-07-03 | 2024-03-05 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
| US11430674B2 (en) | 2018-08-22 | 2022-08-30 | Asm Ip Holding B.V. | Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
| US11274369B2 (en) | 2018-09-11 | 2022-03-15 | Asm Ip Holding B.V. | Thin film deposition method |
| US11804388B2 (en) | 2018-09-11 | 2023-10-31 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
| US11885023B2 (en) | 2018-10-01 | 2024-01-30 | Asm Ip Holding B.V. | Substrate retaining apparatus, system including the apparatus, and method of using same |
| US11414760B2 (en) | 2018-10-08 | 2022-08-16 | Asm Ip Holding B.V. | Substrate support unit, thin film deposition apparatus including the same, and substrate processing apparatus including the same |
| US11664199B2 (en) | 2018-10-19 | 2023-05-30 | Asm Ip Holding B.V. | Substrate processing apparatus and substrate processing method |
| US12378665B2 (en) | 2018-10-26 | 2025-08-05 | Asm Ip Holding B.V. | High temperature coatings for a preclean and etch apparatus and related methods |
| US11735445B2 (en) | 2018-10-31 | 2023-08-22 | Asm Ip Holding B.V. | Substrate processing apparatus for processing substrates |
| US11866823B2 (en) | 2018-11-02 | 2024-01-09 | Asm Ip Holding B.V. | Substrate supporting unit and a substrate processing device including the same |
| US11499226B2 (en) | 2018-11-02 | 2022-11-15 | Asm Ip Holding B.V. | Substrate supporting unit and a substrate processing device including the same |
| US11572620B2 (en) | 2018-11-06 | 2023-02-07 | Asm Ip Holding B.V. | Methods for selectively depositing an amorphous silicon film on a substrate |
| US11798999B2 (en) | 2018-11-16 | 2023-10-24 | Asm Ip Holding B.V. | Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
| US11411088B2 (en) | 2018-11-16 | 2022-08-09 | Asm Ip Holding B.V. | Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
| US12040199B2 (en) | 2018-11-28 | 2024-07-16 | Asm Ip Holding B.V. | Substrate processing apparatus for processing substrates |
| US11488819B2 (en) | 2018-12-04 | 2022-11-01 | Asm Ip Holding B.V. | Method of cleaning substrate processing apparatus |
| US11769670B2 (en) | 2018-12-13 | 2023-09-26 | Asm Ip Holding B.V. | Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures |
| US11658029B2 (en) | 2018-12-14 | 2023-05-23 | Asm Ip Holding B.V. | Method of forming a device structure using selective deposition of gallium nitride and system for same |
| US11390946B2 (en) | 2019-01-17 | 2022-07-19 | Asm Ip Holding B.V. | Methods of forming a transition metal containing film on a substrate by a cyclical deposition process |
| US11959171B2 (en) | 2019-01-17 | 2024-04-16 | Asm Ip Holding B.V. | Methods of forming a transition metal containing film on a substrate by a cyclical deposition process |
| US11615980B2 (en) | 2019-02-20 | 2023-03-28 | Asm Ip Holding B.V. | Method and apparatus for filling a recess formed within a substrate surface |
| US12176243B2 (en) | 2019-02-20 | 2024-12-24 | Asm Ip Holding B.V. | Method and apparatus for filling a recess formed within a substrate surface |
| US11798834B2 (en) | 2019-02-20 | 2023-10-24 | Asm Ip Holding B.V. | Cyclical deposition method and apparatus for filling a recess formed within a substrate surface |
| US11482533B2 (en) | 2019-02-20 | 2022-10-25 | Asm Ip Holding B.V. | Apparatus and methods for plug fill deposition in 3-D NAND applications |
| US11342216B2 (en) | 2019-02-20 | 2022-05-24 | Asm Ip Holding B.V. | Cyclical deposition method and apparatus for filling a recess formed within a substrate surface |
| US12410522B2 (en) | 2019-02-22 | 2025-09-09 | Asm Ip Holding B.V. | Substrate processing apparatus and method for processing substrates |
| US11629407B2 (en) | 2019-02-22 | 2023-04-18 | Asm Ip Holding B.V. | Substrate processing apparatus and method for processing substrates |
| US11424119B2 (en) | 2019-03-08 | 2022-08-23 | Asm Ip Holding B.V. | Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer |
| US11901175B2 (en) | 2019-03-08 | 2024-02-13 | Asm Ip Holding B.V. | Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer |
| US11742198B2 (en) | 2019-03-08 | 2023-08-29 | Asm Ip Holding B.V. | Structure including SiOCN layer and method of forming same |
| US11378337B2 (en) | 2019-03-28 | 2022-07-05 | Asm Ip Holding B.V. | Door opener and substrate processing apparatus provided therewith |
| US11551925B2 (en) | 2019-04-01 | 2023-01-10 | Asm Ip Holding B.V. | Method for manufacturing a semiconductor device |
| US11447864B2 (en) | 2019-04-19 | 2022-09-20 | Asm Ip Holding B.V. | Layer forming method and apparatus |
| US11814747B2 (en) | 2019-04-24 | 2023-11-14 | Asm Ip Holding B.V. | Gas-phase reactor system-with a reaction chamber, a solid precursor source vessel, a gas distribution system, and a flange assembly |
| US11781221B2 (en) | 2019-05-07 | 2023-10-10 | Asm Ip Holding B.V. | Chemical source vessel with dip tube |
| US11355338B2 (en) | 2019-05-10 | 2022-06-07 | Asm Ip Holding B.V. | Method of depositing material onto a surface and structure formed according to the method |
| US11515188B2 (en) | 2019-05-16 | 2022-11-29 | Asm Ip Holding B.V. | Wafer boat handling device, vertical batch furnace and method |
| US11996309B2 (en) | 2019-05-16 | 2024-05-28 | Asm Ip Holding B.V. | Wafer boat handling device, vertical batch furnace and method |
| USD947913S1 (en) | 2019-05-17 | 2022-04-05 | Asm Ip Holding B.V. | Susceptor shaft |
| USD975665S1 (en) | 2019-05-17 | 2023-01-17 | Asm Ip Holding B.V. | Susceptor shaft |
| US12195855B2 (en) | 2019-06-06 | 2025-01-14 | Asm Ip Holding B.V. | Gas-phase reactor system including a gas detector |
| US11345999B2 (en) | 2019-06-06 | 2022-05-31 | Asm Ip Holding B.V. | Method of using a gas-phase reactor system including analyzing exhausted gas |
| US12252785B2 (en) | 2019-06-10 | 2025-03-18 | Asm Ip Holding B.V. | Method for cleaning quartz epitaxial chambers |
| US11476109B2 (en) | 2019-06-11 | 2022-10-18 | Asm Ip Holding B.V. | Method of forming an electronic structure using reforming gas, system for performing the method, and structure formed using the method |
| US11908684B2 (en) | 2019-06-11 | 2024-02-20 | Asm Ip Holding B.V. | Method of forming an electronic structure using reforming gas, system for performing the method, and structure formed using the method |
| US11390945B2 (en) | 2019-07-03 | 2022-07-19 | Asm Ip Holding B.V. | Temperature control assembly for substrate processing apparatus and method of using same |
| US11746414B2 (en) | 2019-07-03 | 2023-09-05 | Asm Ip Holding B.V. | Temperature control assembly for substrate processing apparatus and method of using same |
| US11605528B2 (en) | 2019-07-09 | 2023-03-14 | Asm Ip Holding B.V. | Plasma device using coaxial waveguide, and substrate treatment method |
| US11664267B2 (en) | 2019-07-10 | 2023-05-30 | Asm Ip Holding B.V. | Substrate support assembly and substrate processing device including the same |
| US12107000B2 (en) | 2019-07-10 | 2024-10-01 | Asm Ip Holding B.V. | Substrate support assembly and substrate processing device including the same |
| US11664245B2 (en) | 2019-07-16 | 2023-05-30 | Asm Ip Holding B.V. | Substrate processing device |
| US11996304B2 (en) | 2019-07-16 | 2024-05-28 | Asm Ip Holding B.V. | Substrate processing device |
| US11615970B2 (en) | 2019-07-17 | 2023-03-28 | Asm Ip Holding B.V. | Radical assist ignition plasma system and method |
| US11688603B2 (en) | 2019-07-17 | 2023-06-27 | Asm Ip Holding B.V. | Methods of forming silicon germanium structures |
| US12129548B2 (en) | 2019-07-18 | 2024-10-29 | Asm Ip Holding B.V. | Method of forming structures using a neutral beam |
| US11643724B2 (en) | 2019-07-18 | 2023-05-09 | Asm Ip Holding B.V. | Method of forming structures using a neutral beam |
| US12112940B2 (en) | 2019-07-19 | 2024-10-08 | Asm Ip Holding B.V. | Method of forming topology-controlled amorphous carbon polymer film |
| US11557474B2 (en) | 2019-07-29 | 2023-01-17 | Asm Ip Holding B.V. | Methods for selective deposition utilizing n-type dopants and/or alternative dopants to achieve high dopant incorporation |
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