技术领域technical field
本实用新型涉及一种电感器，特别是涉及一种磁芯电感器。The utility model relates to an inductor, in particular to a magnetic core inductor.
背景技术Background technique
目前市面上的电感器，主要可分为薄膜式(thinfilm)、积层式(multilayer)及绕线式(wirewound)。如台湾第TWI430300证书号发明专利案(以下称前案1)所公开的一种积层式电感器(图未示)，其包含多个绝缘层与多个线圈图案层，且所述绝缘层与所述线圈图案层是彼此交替地叠置而成，其通过彼此叠置而成的所述绝缘层与所述线圈图案层以分别定义出该积层式电感器的一主体与一线圈。At present, the inductors on the market can be mainly divided into thin film, multilayer and wirewound. A laminated inductor (not shown) as disclosed in the Taiwan Patent of Invention No. TWI430300 certificate (hereinafter referred to as the previous case 1), which includes a plurality of insulating layers and a plurality of coil pattern layers, and the insulating layer The coil pattern layers are alternately stacked with each other, and a main body and a coil of the laminated inductor are respectively defined by the insulating layers and the coil pattern layers stacked with each other.
详细地来说，该前案1的积层式电感器是将各线圈图案层对应镀制于各绝缘层上；其中，各绝缘层上所镀制的各线圈图案层，只围绕该积层式电感器的一轴线的1+7/8圈，且各线圈图案层于其一内端部及其一外端部尚需通过其所对应的绝缘层的位于各线圈图案层的内端部与外端部的两贯孔及两填置于其贯孔内的导电导体，来分别与其下方的绝缘层上的线圈图案层的内端部及其上方的绝缘层上的线圈图案层的外端部导通。此外，以各镀制有线圈图案层的绝缘层的制作程序来看，其皆需经过镀线圈图案层程序、贯孔程序、线圈端部导通程序等三道程序。换句话说，当该积层式电感器的线圈所需匝数高达10圈时，该积层式电感器的制作方法则需交互地叠置达六层镀制有各线圈图案层的绝缘层，且总程序也多达十八道。因此，前案1的制作程序相当繁琐。In detail, in the multilayer inductor of the previous case 1, each coil pattern layer is correspondingly plated on each insulating layer; wherein, each coil pattern layer plated on each insulating layer only surrounds the laminated layer 1+7/8 turns of an axis of the type inductor, and each coil pattern layer needs to pass through the inner end of each coil pattern layer at one inner end and one outer end of its corresponding insulating layer The two through holes on the outer end and the two conductive conductors filled in the through holes are respectively connected to the inner end of the coil pattern layer on the insulating layer below and the outer surface of the coil pattern layer on the insulating layer above. End conduction. In addition, as far as the manufacturing process of each insulating layer plated with the coil pattern layer is concerned, it needs to go through three procedures including the coil pattern layer plating process, the through-hole process, and the coil end conduction process. In other words, when the required number of turns of the coil of the multilayer inductor is as high as 10 turns, the manufacturing method of the multilayer inductor needs to alternately stack up to six insulating layers plated with each coil pattern layer. , and there are as many as eighteen procedures in total. Therefore, the production procedure of the previous case 1 is quite cumbersome.
为了进一步简化积层式电感器的主体形成程序，如台湾第TW201440090A早期公开号发明专利案(以下称前案2)则是公开的另一种积层式磁芯电感器1(magnetic-coreinductor，见图1)及其制造方法(见图2至图7)。该积层式磁芯电感器1的制造方法，包含以下步骤：(A)由下而上依序积层压接一第一电路陶瓷母片110、一第二电路陶瓷母片120、一第三电路陶瓷母片130，及一第四电路陶瓷母片140(如图2所示)；(B)令一表面涂布有一焊垫电极(bondingpad)1501数组(array)的载膜150，面向该第一电路陶瓷母片110的一第一预定电路图案1120数组设置(如图3所示)；(C)将该焊垫电极1501数组转印至该第一电路陶瓷母片110上的第一预定电路图案1120数组从而构成一第一电路图案112数组(如图4所示)；(D)剥离该载膜150(如图5所示)；(E)烧结所述电路陶瓷母片110、120、130、140以构成一集合基板100(如图6所示)，且该集合基板100的厚度是控制在0.6mm以下；及(F)以一刻划具160对该集合基板100施予刻划，令该集合基板100被分割成多个积层体10，且令集合基板100内的第一电路图案112数组被分割成多个第一电路图案112并构成如图1所示的积层式磁芯电感器1。In order to further simplify the main body forming procedure of the multilayer inductor, for example, Taiwan No. TW201440090A Early Publication No. Invention Patent (hereinafter referred to as the previous case 2) is another disclosed multilayer magnetic core inductor 1 (magnetic-coreinductor, See Fig. 1) and manufacturing method thereof (see Fig. 2 to Fig. 7). The manufacturing method of the multilayer magnetic core inductor 1 includes the following steps: (A) stacking and crimping a first circuit ceramic mother sheet 110, a second circuit ceramic mother sheet 120, and a first circuit ceramic mother sheet sequentially from bottom to top. Three-circuit ceramic mother sheet 130, and a fourth circuit ceramic mother sheet 140 (as shown in Figure 2); (B) make a surface coated with a carrier film 150 of a welding pad electrode (bondingpad) 1501 array (array), facing A first predetermined circuit pattern 1120 of the first circuit ceramic mother sheet 110 is arranged in an array (as shown in FIG. 3 ); (C) transfer the pad electrode 1501 array to the first circuit ceramic mother sheet 110 An array of predetermined circuit patterns 1120 to form an array of first circuit patterns 112 (as shown in Figure 4); (D) peeling off the carrier film 150 (as shown in Figure 5); (E) sintering the circuit ceramic mother sheet 110 , 120, 130, 140 to form a collective substrate 100 (as shown in Figure 6), and the thickness of the collective substrate 100 is controlled below 0.6 mm; and (F) applying a scribe 160 to the collective substrate 100 Pre-scribing, so that the collective substrate 100 is divided into a plurality of laminated bodies 10, and the first circuit pattern 112 array in the collective substrate 100 is divided into a plurality of first circuit patterns 112 to form a structure as shown in FIG. Multilayer Core Inductors 1.
如图1所示，经该步骤(F)所刻划出的该积层式磁芯电感器1由下而上依序包含：一第一电路陶瓷片11、一第二电路陶瓷片12、一第三电路陶瓷片13，及一第四电路陶瓷片14。该第一电路陶瓷片11具有一非磁性体111，及该配置于该第一电路陶瓷片11的非磁性体111中的第一电路图案112。该第二电路陶瓷片12与该第三电路陶瓷片13分别具有一磁性体121、131，及一分别配置于其磁性体121、131中的第二电路图案122与第三电路图案132。该第四电路陶瓷片14具有一非磁性体141，及一配置于该第四电路陶瓷片14的非磁性体141中的第四电路图案142。As shown in Fig. 1, the multilayer magnetic core inductor 1 marked by the step (F) includes from bottom to top: a first circuit ceramic sheet 11, a second circuit ceramic sheet 12, A third circuit ceramic sheet 13 and a fourth circuit ceramic sheet 14 . The first circuit ceramic sheet 11 has a non-magnetic body 111 , and the first circuit pattern 112 disposed in the non-magnetic body 111 of the first circuit ceramic sheet 11 . The second circuit ceramic sheet 12 and the third circuit ceramic sheet 13 respectively have a magnetic body 121 , 131 , and a second circuit pattern 122 and a third circuit pattern 132 disposed in the magnetic bodies 121 , 131 respectively. The fourth circuit ceramic sheet 14 has a non-magnetic body 141 and a fourth circuit pattern 142 disposed in the non-magnetic body 141 of the fourth circuit ceramic sheet 14 .
该积层式磁芯电感器1是利用所述电路陶瓷片11、12、13、14的电路图案112、122、132、142以共同构成一内绕式的线圈，并配合所述磁性体121、131以形成该积层式磁芯电感器1的一磁芯。然而，详细地来说，于执行该步骤(A)前，是分别依序对多个陶瓷母片(图未示)贯孔以于各陶瓷母片形成多个通孔、于各通孔内填置导电糊以形成多个导电导体，以及在各陶瓷母片上涂置导电糊以形成各电路图案112、122、132、142等多道程序，才可制得各电路陶瓷母片110、120、130、140。此外，在执行完该步骤(E)的烧结处理与该步骤(F)的刻划后才可取得各积层式磁芯电感器1的积层体10的外观面。The multilayer magnetic core inductor 1 uses the circuit patterns 112, 122, 132, 142 of the circuit ceramic sheets 11, 12, 13, 14 to jointly form an inner winding coil, and cooperates with the magnetic body 121 , 131 to form a magnetic core of the multilayer magnetic core inductor 1 . However, in detail, before performing the step (A), a plurality of ceramic mother sheets (not shown) are sequentially drilled to form a plurality of through holes in each ceramic mother sheet, and in each through hole Filling conductive paste to form a plurality of conductive conductors, and coating conductive paste on each ceramic mother sheet to form various circuit patterns 112, 122, 132, 142 and other procedures, can make each circuit ceramic mother sheet 110, 120 , 130, 140. In addition, the appearance surface of the laminated body 10 of each multilayer magnetic core inductor 1 can be obtained after the sintering process of the step (E) and the scribing of the step (F).
就制程面来说，构成该内绕式的线圈需经过四道的贯孔程序、四道的填置导电糊程序、四道的涂布导电糊以形成各电路图案112、122、132、142程序，与一道步骤(E)的烧结处理等十三道程序，前案2的程序虽然略较该前案1简化；然而，该前案2的总程序也多达十三道，相当繁琐，导致制造所需耗费的时间成本提升。就实际应用面来说，因为积层体10是经堆栈烧结所述电路陶瓷母片110、120、130、140并施予刻划后所取得，使该积层式磁芯电感器1体积(最大厚度达0.6mm)也随着提高，而不利于安排至电路板上的布局。此外，由于该内绕式线圈是由各电路陶瓷片11、12、13、14的电路图案112、122、132、142所构成，各电路图案112、122、132、142间的非连续的界面易产生非奥姆式接触(non-ohmiccontact)或增加阻抗而产生额外的电热效应(Joule-heating)，皆不利于电感器的运作。As far as the process is concerned, the inner winding coil needs to go through four through-hole procedures, four procedures for filling conductive paste, and four procedures for coating conductive paste to form circuit patterns 112, 122, 132, 142. 13 procedures, including the sintering treatment of step (E), although the procedure of the previous case 2 is slightly simpler than the previous case 1; however, the total procedure of the previous case 2 is as many as 13, which is quite cumbersome. This leads to an increase in the time and cost required for manufacturing. As far as the practical application is concerned, since the laminated body 10 is obtained by stacking and sintering the circuit ceramic mother sheets 110, 120, 130, 140 and scribing, the volume of the laminated magnetic core inductor 1 ( The maximum thickness of 0.6mm) is also increased, which is not conducive to the layout of the arrangement on the circuit board. In addition, since the inner-wound coil is composed of the circuit patterns 112, 122, 132, 142 of the circuit ceramic sheets 11, 12, 13, 14, discontinuous interfaces between the circuit patterns 112, 122, 132, 142 It is easy to produce non-ohmic contact or increase the resistance to generate additional electrothermal effect (Joule-heating), which is not conducive to the operation of the inductor.
经上述说明可知，简化电感器的制作方法以降低制作成本的同时，并解决电感器的阻抗过高的问题，是此技术领域的相关技术人员所待突破的难题。From the above description, it can be known that simplifying the manufacturing method of the inductor to reduce the manufacturing cost and at the same time solve the problem of the high impedance of the inductor is a difficult problem to be solved by those skilled in the art.
发明内容Contents of the invention
本实用新型的目的在于提供一种磁芯电感器。The purpose of the utility model is to provide a magnetic core inductor.
本实用新型的磁芯电感器包含：一主体与一第一线圈。该主体具有一轮廓面，该主体的轮廓面包括相反设置的一第一侧缘及一第二侧缘。该主体是由一磁性材料所构成，且为一体(unity)者。该第一线圈设置于该主体，并包括多个顶部段、多个纵部段，及多个底部段。所述顶部段、所述纵部段与所述底部段是沿一自该主体的该第一侧缘朝该第二侧缘的第一方向彼此间隔排列。所述顶部段与所述底部段是分别设置于该主体的轮廓面的一顶面区与一底面区，且各顶部段是通过其相邻的两纵部段的相反两端缘沿该第一方向与各底部段依序电性连接。The magnetic core inductor of the present invention includes: a main body and a first coil. The main body has a contour surface, and the contour surface of the main body includes a first side edge and a second side edge disposed oppositely. The main body is made of a magnetic material and is a unity. The first coil is disposed on the main body and includes a plurality of top segments, a plurality of vertical segments, and a plurality of bottom segments. The top section, the vertical section and the bottom section are arranged at intervals along a first direction from the first side edge of the main body toward the second side edge. The top section and the bottom section are respectively arranged on a top surface area and a bottom surface area of the profile surface of the main body, and each top section is passed along the opposite end edges of two adjacent vertical sections along the first One direction is electrically connected with each bottom segment sequentially.
本实用新型的的磁芯电感器，该主体还具有两排分设于其主体的轮廓面的一前面区与一背面区的沟槽，各排沟槽是沿该第一方向彼此间隔排列，并自该主体的轮廓面的该顶面区向该底面区延伸，且该两排沟槽是分别从该主体的轮廓面的该前面区与该背面区相向凹陷，该第一线圈的各纵部段容置于各沟槽。In the magnetic core inductor of the present invention, the main body also has two rows of grooves which are respectively arranged on a front area and a back area of the outline surface of the main body, each row of grooves is arranged at intervals along the first direction, and Extending from the top area of the contour surface of the main body to the bottom surface area, and the two rows of grooves are respectively recessed from the front area and the back area of the contour surface of the main body, each longitudinal portion of the first coil Segments are placed in each groove.
本实用新型的的磁芯电感器，该主体还具有两排穿孔，各排穿孔是沿该第一方向彼此间隔排列，所述穿孔是分别贯穿该主体的轮廓面的该顶面区与该底面区，且该第一线圈的各纵部段容置于各穿孔。In the magnetic core inductor of the present invention, the main body also has two rows of perforations, and each row of perforations is arranged at intervals along the first direction, and the perforations respectively penetrate through the top surface area and the bottom surface of the contour surface of the main body area, and each longitudinal section of the first coil is accommodated in each through hole.
本实用新型的的磁芯电感器，还包含一绝缘层与一第二线圈，该绝缘层覆盖于该主体的轮廓面与该第一线圈上，该第二线圈则设置于该绝缘层上以围绕于该主体的轮廓面的该顶面区、该底面区、一前面区与一背面区外。The magnetic core inductor of the present utility model also includes an insulating layer and a second coil, the insulating layer covers the contour surface of the main body and the first coil, and the second coil is arranged on the insulating layer to Surrounding the top surface area, the bottom surface area, a front area and a back area of the outline surface of the main body.
本实用新型的的磁芯电感器，该磁性材料是一磁性金属或一磁性陶瓷。In the magnetic core inductor of the utility model, the magnetic material is a magnetic metal or a magnetic ceramic.
本实用新型的有益效果在于，直接预先成形出结构强度高且呈一体结构的主体，并于主体的轮廓面上镀出各第一线圈，就性能方面来看，结构强度较高，且不会有非奥姆式接触或增加阻抗而产生电热效应等问题，就制程与成本方面来看，因制作程序简化而降低时间成本。The beneficial effect of the utility model is that the main body with high structural strength and an integrated structure is directly preformed, and the first coils are plated on the contour surface of the main body. There are problems such as non-ohmic contact or electrothermal effect caused by increased impedance. From the perspective of manufacturing process and cost, the time cost is reduced due to the simplification of the manufacturing process.
附图说明Description of drawings
本实用新型的其他的特征及功效，将于参照图式的实施方式中清楚地呈现，其中：Other features and effects of the present utility model will be clearly presented in the implementation manner with reference to the drawings, wherein:
图1是一立体分解图，说明由台湾第TW201440090A早期公开号发明专利案所公开的一种积层式电感器；Fig. 1 is a three-dimensional exploded view illustrating a multilayer inductor disclosed in Taiwan's early publication No. TW201440090A invention patent;
图2是一截面图，说明该积层式电感器的制造方法的一步骤(A)；Fig. 2 is a cross-sectional view illustrating a step (A) of the manufacturing method of the multilayer inductor;
图3是一截面图，说明该积层式电感器的制造方法的一步骤(B)；Fig. 3 is a cross-sectional view illustrating a step (B) of the manufacturing method of the multilayer inductor;
图4是一截面图，说明该积层式电感器的制造方法的一步骤(C)；Fig. 4 is a cross-sectional view illustrating a step (C) of the manufacturing method of the multilayer inductor;
图5是一截面图，说明该积层式电感器的制造方法的一步骤(D)；Fig. 5 is a cross-sectional view illustrating a step (D) of the manufacturing method of the multilayer inductor;
图6是一截面图，说明该积层式电感器的制造方法的一步骤(E)；Fig. 6 is a cross-sectional view illustrating a step (E) of the manufacturing method of the multilayer inductor;
图7是一截面图，说明该积层式电感器的制造方法的一步骤(F)；Fig. 7 is a cross-sectional view illustrating a step (F) of the manufacturing method of the multilayer inductor;
图8是一立体示意图，说明本实用新型磁芯电感器的一第一实施例；Fig. 8 is a three-dimensional schematic view illustrating a first embodiment of the magnetic core inductor of the present invention;
图9是一立体示意图，说明本实用新型磁芯电感器的一第二实施例；Fig. 9 is a three-dimensional schematic diagram illustrating a second embodiment of the magnetic core inductor of the present invention;
图10是一立体示意图，说明本实用新型磁芯电感器的一第三实施例；Fig. 10 is a three-dimensional schematic diagram illustrating a third embodiment of the magnetic core inductor of the present invention;
图11是一立体示意图，说明本实用新型磁芯电感器的一第四实施例；Fig. 11 is a three-dimensional schematic diagram illustrating a fourth embodiment of the magnetic core inductor of the present invention;
图12是一沿图11的直线XⅡ-XⅡ所取得的剖视示意图；Fig. 12 is a schematic cross-sectional view taken along the line XII-XII in Fig. 11;
图13是一俯视示意图，说明本实用新型磁芯电感器的一第一量产方法的一步骤(a1)；Fig. 13 is a top view diagram illustrating a step (a1) of a first mass production method of the magnetic core inductor of the present invention;
图14是一沿图13的直线XIV-XIV所取得的剖视示意图；Fig. 14 is a schematic sectional view taken along the line XIV-XIV in Fig. 13;
图15是一俯视示意图，说明该第一量产方法的一步骤(b1)；15 is a schematic top view illustrating a step (b1) of the first mass production method;
图16是一沿图15的直线XVI-XVI所取得的剖视示意图；Fig. 16 is a schematic cross-sectional view obtained along the line XVI-XVI of Fig. 15;
图17是一俯视示意图，说明该第一量产方法的一步骤(c1)；FIG. 17 is a schematic top view illustrating a step (c1) of the first mass production method;
图18是一立体示意图，说明该第一量产方法的一步骤(d1)；FIG. 18 is a schematic perspective view illustrating a step (d1) of the first mass production method;
图19是一立体示意图，说明该第一量产方法的一步骤(e1)；FIG. 19 is a schematic perspective view illustrating a step (e1) of the first mass production method;
图20是一立体示意图，说明该第一量产方法的一步骤(f1)；FIG. 20 is a perspective view illustrating a step (f1) of the first mass production method;
图21是一立体示意图，说明该第一量产方法的一步骤(h1)；FIG. 21 is a schematic perspective view illustrating a step (h1) of the first mass production method;
图22是一俯视示意图，说明该第一量产方法的一步骤(g1)；FIG. 22 is a schematic top view illustrating a step (g1) of the first mass production method;
图23是一俯视示意图，说明本实用新型磁芯电感器的一第二量产方法的一步骤(a1)；Fig. 23 is a schematic top view illustrating a step (a1) of a second mass production method of the magnetic core inductor of the present invention;
图24是一俯视示意图，说明本实用新型磁芯电感器的一第三量产方法的一步骤(a1)；Fig. 24 is a schematic top view illustrating a step (a1) of a third mass production method of the magnetic core inductor of the present invention;
图25是一立体示意图，说明本实用新型磁芯电感器的一第四量产方法的一步骤(i11)；Fig. 25 is a three-dimensional schematic diagram illustrating a step (i11) of a fourth mass production method of the magnetic core inductor of the present invention;
图26是一立体示意图，说明该第四量产方法的一步骤(i12)；FIG. 26 is a schematic perspective view illustrating a step (i12) of the fourth mass production method;
图27是一立体示意图，说明该第四量产方法的一步骤(i13)；FIG. 27 is a schematic perspective view illustrating a step (i13) of the fourth mass production method;
图28是一立体示意图，说明该第四量产方法的一步骤(i14)；FIG. 28 is a schematic perspective view illustrating a step (i14) of the fourth mass production method;
图29是一立体示意图，说明本实用新型磁芯电感器的预形体的一第五量产方法的一步骤(a2)的一模具；Fig. 29 is a three-dimensional schematic diagram illustrating a mold of a step (a2) of a fifth mass production method of the preform of the magnetic core inductor of the present invention;
图30是一剖视示意图，说明该第五量产方法的该步骤(a2)；30 is a schematic cross-sectional view illustrating the step (a2) of the fifth mass production method;
图31是一剖视示意图，说明该量产方法的第五实施例的一步骤(b2)Fig. 31 is a schematic sectional view illustrating a step (b2) of the fifth embodiment of the mass production method
具体实施方式Detailed ways
在本实用新型被详细描述前，应当注意在以下的说明内容中，类似的元件是以相同的编号来表示。Before the present utility model is described in detail, it should be noted that in the following description, similar elements are denoted by the same numerals.
参阅图8，本实用新型磁芯电感器2的一第一实施例，包含一主体21与一第一线圈23。Referring to FIG. 8 , a first embodiment of the magnetic core inductor 2 of the present invention includes a main body 21 and a first coil 23 .
该主体21具有一轮廓面210，该主体21的轮廓面210包括相反设置的一第一侧缘211及一第二侧缘212。该主体21是由一磁性材料所构成，且为一体者。The main body 21 has a contour surface 210 , and the contour surface 210 of the main body 21 includes a first side edge 211 and a second side edge 212 oppositely disposed. The main body 21 is made of a magnetic material and is integrated.
该第一线圈23设置于该主体21，并包括多个顶部段231、多个纵部段232，及多个底部段233。所述顶部段231、所述纵部段232与所述底部段233是沿一自该主体21的该第一侧缘211朝该第二侧缘212的第一方向X彼此间隔排列。所述顶部段231与所述底部段233是分别设置于该主体21的轮廓面210的一顶面区2101与一底面区2102，且各顶部段231是通过其相邻的两纵部段232的相反两端缘沿该第一方向X与各底部段233依序电性连接。The first coil 23 is disposed on the main body 21 and includes a plurality of top segments 231 , a plurality of vertical segments 232 , and a plurality of bottom segments 233 . The top section 231 , the vertical section 232 and the bottom section 233 are arranged at intervals along a first direction X from the first side edge 211 toward the second side edge 212 of the main body 21 . The top section 231 and the bottom section 233 are respectively arranged on a top surface area 2101 and a bottom surface area 2102 of the profile surface 210 of the main body 21 , and each top section 231 passes through its two adjacent vertical sections 232 Opposite two edges of each bottom section 233 are electrically connected to each bottom section 233 along the first direction X in sequence.
更具体地来说，在本实用新型该第一实施例中，该主体21的轮廓面210是由如图8所示的该主体21的该顶面区2101、该底面区2102、一左侧面区2103、一右侧面区2104、一前面区2105与一背面区2106所共同定义而成。又，在本实用新型该第一实施例中，该第一线圈23的所述顶部段231、所述纵部段232与所述底部段233是如图8所示，分别沿一与该第一方向夹一小于等于90度的延伸方向延伸，且该第一线圈23的所述纵部段232是分别设置于该前面区2105与该背面区2106；也就是说，本实用新型磁芯电感器的该第一实施例的第一线圈23为一外绕式线圈。此外，该主体21是由该磁性材料所构成，以令该第一实施例的主体21为一体结构。较佳地，该磁性材料是选自一磁性金属或一磁性陶瓷。适用于本实用新型的磁性金属可以是如铁(Fe)、钴(Co)或镍(Ni)；适用于本实用新型的磁性陶瓷可以是具有反尖晶石(inversespinelstructure)结构的铁氧磁体(ferrite，Fe3O4)。More specifically, in the first embodiment of the present invention, the profile surface 210 of the main body 21 is composed of the top surface area 2101, the bottom surface area 2102, a left side of the main body 21 as shown in FIG. The front area 2103 , a right side area 2104 , a front area 2105 and a back area 2106 are jointly defined. Moreover, in the first embodiment of the utility model, the top section 231, the vertical section 232 and the bottom section 233 of the first coil 23 are shown in FIG. One direction extends in an extension direction less than or equal to 90 degrees, and the longitudinal section 232 of the first coil 23 is respectively arranged on the front area 2105 and the back area 2106; that is to say, the utility model magnetic core inductor The first coil 23 of the first embodiment of the device is an externally wound coil. In addition, the main body 21 is made of the magnetic material, so that the main body 21 of the first embodiment has an integrated structure. Preferably, the magnetic material is selected from a magnetic metal or a magnetic ceramic. The magnetic metal suitable for the present utility model can be as iron (Fe), cobalt (Co) or nickel (Ni); The magnetic ceramics suitable for the present utility model can be the ferrite magnet ( ferrite, Fe3O4).
经前述说明可知，该主体21为一体者，以致该磁芯电感器2的主体21的整体结构强度高，不像图1所示的积层式磁芯电感器1般，于所述电路陶瓷片11、12、13、14相邻界面间存在强度不足的问题。此外，该第一线圈23也为一体结构，不会如图1所示各电路图案112、122、132、142间的不连续界面产生非奥姆式接触或增加阻抗而产生额外的电热效应。It can be seen from the foregoing description that the main body 21 is integrated, so that the overall structural strength of the main body 21 of the magnetic core inductor 2 is high, unlike the multilayer magnetic core inductor 1 shown in FIG. There is a problem of insufficient strength between the adjacent interfaces of the sheets 11, 12, 13, and 14. In addition, the first coil 23 is also an integral structure, and the discontinuous interfaces among the circuit patterns 112 , 122 , 132 , 142 as shown in FIG. 1 will not generate non-ohmic contact or increase impedance to generate additional electrothermal effect.
整合本实用新型该第一实施例上述详细说明，简单地来说，本实用新型于上面所述的一体者，是被定义为一体结构。此外，所谓的一体结构，是指该主体21是经由蚀刻、喷砂或冲断一块材(bulkmatter)所成形取得，以致该主体21结构强度高，且内部不存在层间剥离的问题。该块材可以是一板状的块材，如，磁性陶瓷基板。Integrating the above detailed description of the first embodiment of the present utility model, simply speaking, the present utility model is defined as an integrated structure in the above-mentioned one. In addition, the so-called integrated structure means that the main body 21 is formed by etching, sandblasting or punching a bulkmatter, so that the main body 21 has high structural strength and there is no problem of delamination inside. The bulk material may be a plate-shaped bulk material, such as a magnetic ceramic substrate.
参阅图9，本实用新型磁芯电感器2的一第二实施例，大致相同于该第一实施例，其不同处在于，该主体21还具有两排分设于其主体21的轮廓面210的前面区2105与背面区2106的沟槽213。各排沟槽213是沿该第一方向X彼此间隔排列，并自该主体21的轮廓面210的该顶面区2101向该底面区2102延伸，且该两排沟槽213是分别从该主体21的轮廓面210的该前面区2105与该背面区2106相向凹陷。该第一线圈23的各纵部段232是容置于各沟槽213；也就是说，本实用新型磁芯电感器的该第二实施例的第一线圈23也为一外绕式线圈。Referring to Fig. 9, a second embodiment of the magnetic core inductor 2 of the present invention is substantially the same as the first embodiment, the difference is that the main body 21 also has two rows of contour surfaces 210 which are separately arranged on the main body 21. The trench 213 in the front area 2105 and the back area 2106 . Each row of grooves 213 is arranged at intervals along the first direction X, and extends from the top surface area 2101 to the bottom surface area 2102 of the profile surface 210 of the main body 21, and the two rows of grooves 213 are respectively extended from the main body The front area 2105 and the back area 2106 of the contoured surface 210 of 21 are recessed toward each other. Each vertical section 232 of the first coil 23 is accommodated in each groove 213; that is to say, the first coil 23 of the second embodiment of the magnetic core inductor of the present invention is also an outer winding coil.
参阅图10，本实用新型磁芯电感器2的一第三实施例，大致相同于该第一实施例，其不同处在于，该主体21还具有两排穿孔214。各排穿孔214是沿该第一方向X彼此间隔排列。所述穿孔214是分别贯穿该主体21的轮廓面210的该顶面区2101与该底面区2102。该第一线圈23的各纵部段232是容置于各穿孔214；也就是说，本实用新型磁芯电感器的该第三实施例的第一线圈23为一内绕式线圈。Referring to FIG. 10 , a third embodiment of the magnetic core inductor 2 of the present invention is substantially the same as the first embodiment, except that the main body 21 has two rows of through holes 214 . Each row of through holes 214 is arranged at intervals along the first direction X. The through holes 214 respectively pass through the top area 2101 and the bottom area 2102 of the contour surface 210 of the main body 21 . Each vertical section 232 of the first coil 23 is accommodated in each through hole 214; that is to say, the first coil 23 of the third embodiment of the magnetic core inductor of the present invention is an inner wound coil.
参阅图11与图12，本实用新型磁芯电感器2的一第四实施例，大致相同于该第一实施例，其不同处在于，该第四实施例还包含一绝缘层24与一第二线圈25。该绝缘层24覆盖于该主体21的轮廓面210与该第一线圈23上。该第二线圈25则设置于该绝缘层24上，以围绕于该主体21的轮廓面210的该顶面区2101、该底面区2102、该前面区2105与该背面区2106外，使该第一线圈23与该第二线圈25共同形成一共芯双层线圈(concentriccoilwinding)的结构。于图12中是以两层线圈23、25为例作说明，但不以此为限，可依实际应用面，交替地镀覆绝缘层与线圈以形成共芯多层线圈的结构。Referring to Fig. 11 and Fig. 12, a fourth embodiment of the magnetic core inductor 2 of the present invention is substantially the same as the first embodiment, the difference is that the fourth embodiment also includes an insulating layer 24 and a first embodiment. Second coil 25. The insulating layer 24 covers the outline surface 210 of the main body 21 and the first coil 23 . The second coil 25 is disposed on the insulating layer 24 so as to surround the top area 2101, the bottom area 2102, the front area 2105 and the back area 2106 of the contour surface 210 of the main body 21, so that the second coil 25 The first coil 23 and the second coil 25 together form a concentric coil winding structure. In FIG. 12 , the two-layer coils 23 and 25 are taken as an example for illustration, but it is not limited thereto. Depending on the actual application, insulating layers and coils can be alternately plated to form a co-core multi-layer coil structure.
详细地说，本实用新型磁芯电感器2各实施例的该第一线圈23与该第四实施例的该第二线圈25由于是通过电镀法(electroplating)或化学镀法(electrolessplating)所形成，所以本实用新型磁芯电感器2还包含一设置于该第一线圈23下的第一前驱物层4(图19)与一设置于该第二线圈25下的第二前驱物层7(图27)，详细的制造方法容后说明。In detail, the first coil 23 of each embodiment of the magnetic core inductor 2 of the present invention and the second coil 25 of the fourth embodiment are formed by electroplating or electrolessplating , so the magnetic core inductor 2 of the present invention also includes a first precursor layer 4 ( FIG. 19 ) arranged under the first coil 23 and a second precursor layer 7 arranged under the second coil 25 ( Figure 27), the detailed manufacturing method will be described later.
参阅图13至图22，本实用新型磁芯电感器2的一第一量产方法，是以MEMS制程来制作出如图8所示的第一实施例的磁芯电感器2，其依序包含一步骤(a1)、一步骤(b1)、一步骤(c1)、一步骤(d1)、一步骤(e1)、一步骤(f1)、一步骤(h1)及一步骤(g1)。13 to 22, a first mass production method of the magnetic core inductor 2 of the present invention is to manufacture the magnetic core inductor 2 of the first embodiment shown in FIG. It includes a step (a1), a step (b1), a step (c1), a step (d1), a step (e1), a step (f1), a step (h1) and a step (g1).
参阅图13与图14，该步骤(a1)是于一基板20的一上表面201与一下表面202上各形成一具有一预定图案31的第一光阻层3。各预定图案31具有一覆盖该基板20的上表面201与下表面202的数组，各数组具有多个外观形状310，且各外观形状310沿该第一方向X依序具有彼此连接的一基座部311、两桥接部312与一本体部313。所述外观形状310的本体部313是沿该第一方向X或一与该第一方向X夹一预定角度的第二方向Y彼此间隔排列，且所述外观形状310的基座部311是沿该第一方向X或该第二方向Y彼此连接。Referring to FIG. 13 and FIG. 14 , the step (a1) is to form a first photoresist layer 3 with a predetermined pattern 31 on an upper surface 201 and a lower surface 202 of a substrate 20 respectively. Each predetermined pattern 31 has an array covering the upper surface 201 and the lower surface 202 of the substrate 20, each array has a plurality of appearance shapes 310, and each appearance shape 310 has a base connected to each other in sequence along the first direction X portion 311 , two bridging portions 312 and a body portion 313 . The body portion 313 of the appearance shape 310 is arranged at intervals along the first direction X or a second direction Y forming a predetermined angle with the first direction X, and the base portion 311 of the appearance shape 310 is along the The first direction X or the second direction Y are connected to each other.
在该第一量产方法中，该基板20是由该磁性材料所构成，该预定角度是以90度为例作说明，但不以此为限；各第一光阻层3的所述外观形状310是如图13所示，沿该第一方向X彼此间隔排列，且所述第一光阻层3的预定图案31的所述外观形状310是彼此上下对准；所述外观形状310的本体部313是沿该第二方向Y彼此间隔排列，所述外观形状310的基座部311是沿该第二方向Y彼此连接；各外观形状310的桥接部312的一宽度是沿该第一方向X递减，且各外观形状310的所述桥接部312是沿该第二方向Y彼此间隔设置；形成于该基板20的上表面201与下表面202的第一光阻层3的各外观形状310的各桥接部312于邻近其本体部313处形成有一缺口3121，且各缺口3121是自其桥接部312的一周缘沿该第二方向Y凹陷，以令各桥接部312与各本体部313彼此断开。In the first mass production method, the substrate 20 is made of the magnetic material, and the predetermined angle is 90 degrees as an example for illustration, but not limited thereto; the appearance of each first photoresist layer 3 The shapes 310 are as shown in FIG. 13 , arranged at intervals along the first direction X, and the appearance shapes 310 of the predetermined pattern 31 of the first photoresist layer 3 are aligned up and down with each other; the appearance shapes 310 The body parts 313 are arranged at intervals along the second direction Y, the base parts 311 of the appearance shapes 310 are connected to each other along the second direction Y; a width of the bridging part 312 of each appearance shape 310 is along the first The direction X decreases gradually, and the bridging portions 312 of each appearance shape 310 are arranged at intervals along the second direction Y; each appearance shape of the first photoresist layer 3 formed on the upper surface 201 and the lower surface 202 of the substrate 20 Each bridging portion 312 of 310 is formed with a notch 3121 adjacent to its main body portion 313, and each notch 3121 is recessed from a peripheral edge of its bridging portion 312 along the second direction Y, so that each bridging portion 312 and each main body portion 313 disconnected from each other.
参阅图15与图16，该步骤(b1)是以喷砂、湿式蚀刻或干式蚀刻移除裸露于所述第一光阻层3的预定图案31的数组外的该基板20，并从而形成基座200数组与一预形体数组。各预形体沿该第一方向X包括至少一连接部22，及一如图8所示的主体21。各基座200与各连接部22分别具有一轮廓面203、220。各基座200的轮廓面203包括相反设置的一第一侧缘204及一第二侧缘205，且各连接部22的轮廓面220包括相反设置的一第一端221与一第二端222。各连接部22的第一端221与第二端222是分别对应连接于各基座200的第二侧缘205与各主体21的第一侧缘211，以令各连接部22的轮廓面220是对应衔接于各主体21的轮廓面210与各基座200的轮廓面203。此外，该步骤(b1)的各连接部22的第二端222是形成有两凹槽2221，各连接部22的该两凹槽2221的其中一者(见显示于图16的上方凹槽2221)是自其轮廓面220的一顶面区朝其一底面区延伸，且各连接部22的该两凹槽2221的其中另一者(见显示于图16的下方凹槽2221)是自其轮廓面220的底面区向朝其顶面区延伸，且各连接部22的该两凹槽2221是自其轮廓面220沿该第二方向Y凹陷。在该第一量产方法中，该步骤(b1)是以湿式蚀刻做说明，但并不限于此。Referring to FIG. 15 and FIG. 16, the step (b1) is to remove the substrate 20 exposed outside the array of predetermined patterns 31 of the first photoresist layer 3 by sandblasting, wet etching or dry etching, and thus form An array of bases 200 and an array of preforms. Each preform includes at least one connecting portion 22 along the first direction X, and a main body 21 as shown in FIG. 8 . Each base 200 and each connecting portion 22 respectively have a contour surface 203 , 220 . The contour surface 203 of each base 200 includes a first side edge 204 and a second side edge 205 disposed oppositely, and the contour surface 220 of each connecting portion 22 includes a first end 221 and a second end 222 disposed oppositely. . The first end 221 and the second end 222 of each connecting portion 22 are connected to the second side edge 205 of each base 200 and the first side edge 211 of each main body 21 respectively, so that the profile surface 220 of each connecting portion 22 It is connected to the contour surface 210 of each main body 21 and the contour surface 203 of each base 200 correspondingly. In addition, the second end 222 of each connecting portion 22 in the step (b1) is formed with two grooves 2221, one of the two grooves 2221 of each connecting portion 22 (see the upper groove 2221 shown in FIG. 16 ) is extending from a top surface region of its profile surface 220 toward a bottom surface region thereof, and the other of the two grooves 2221 of each connecting portion 22 (see the lower groove 2221 shown in FIG. 16 ) is from its The bottom surface region of the contour surface 220 extends toward the top surface region thereof, and the two grooves 2221 of each connecting portion 22 are recessed from the contour surface 220 along the second direction Y. In the first mass production method, the step (b1) is illustrated by wet etching, but it is not limited thereto.
此外，需说明的是，该第一量产方法是以该两第一光阻层3的外观形状310的桥接部312皆具有该缺口3121为例做说明，但并不限于此。当该第一量产方法是该两第一光阻层3的其中一者的外观形状310的桥接部312具有该缺口3121时，可令该步骤(b1)的各连接部22的第二端222仅形成有单一个凹槽2221，且该步骤(b1)的各连接部22的凹槽2221是自其轮廓面220的顶面区及底面区两者其中一者，朝其轮廓面220的顶面区及底面区两者其中另一者延伸。In addition, it should be noted that the first mass production method is described by taking the bridging portion 312 of the appearance shape 310 of the two first photoresist layers 3 having the gap 3121 as an example, but it is not limited thereto. When the first mass production method is that the bridging portion 312 of the appearance shape 310 of one of the two first photoresist layers 3 has the gap 3121, the second end of each connecting portion 22 in the step (b1) can be made 222 is only formed with a single groove 2221, and the groove 2221 of each connecting portion 22 of the step (b1) is from one of the top surface area and the bottom surface area of its contour surface 220 to the direction of its contour surface 220 The other of the top area and the bottom area extends.
再参阅图16并配合参阅图17，该步骤(c1)是移除所述第一光阻层3。详细地来说，该第一量产方法于移除所述第一光阻层3后，是成形出如图17所示的基座200数组、连接部22数组与主体21数组，且所述基座200是沿该第二方向Y彼此连接，所述主体21是沿该第二方向Y彼此间隔设置。Referring again to FIG. 16 and referring to FIG. 17 together, the step ( c1 ) is to remove the first photoresist layer 3 . In detail, after removing the first photoresist layer 3 in the first mass production method, an array of bases 200, an array of connecting parts 22, and an array of main bodies 21 are formed as shown in FIG. 17, and the The bases 200 are connected to each other along the second direction Y, and the main bodies 21 are arranged at intervals along the second direction Y.
参阅图18，该步骤(d1)是于各主体21的轮廓面210上形成一第一前驱物层4(图18仅显示单一个主体21与单一个第一前驱物层4为例做说明)。Referring to FIG. 18, the step (d1) is to form a first precursor layer 4 on the contour surface 210 of each body 21 (FIG. 18 only shows a single body 21 and a single first precursor layer 4 as an example for illustration) .
参阅图19，该步骤(e1)是于所述第一前驱物层4上形成一第二光阻层5，且该第二光阻层5具有多个对应裸露出各第一前驱物层4的一局部区域41的线路图案区51。同样地，图19也仅显示单一个第一前驱物层4的一局部区域41与该第二光阻层5的一线路图案区51为例做说明。Referring to FIG. 19, the step (e1) is to form a second photoresist layer 5 on the first precursor layer 4, and the second photoresist layer 5 has a plurality of corresponding exposed first precursor layers 4 The circuit pattern area 51 of a local area 41 . Similarly, FIG. 19 only shows a partial region 41 of a single first precursor layer 4 and a circuit pattern region 51 of the second photoresist layer 5 as an example for illustration.
再参阅图19并配合参阅图20，该步骤(f1)是于各第一前驱物层4上镀制一第一金属层6，以于各第一前驱物层4的该局部区域41上形成一如图8所示的第一线圈23。同样地，图19与图20也仅显示单一个第一前驱物层4与单一个第一金属层6为例做说明。此处需进一步说明的是，若构成该基板20的该磁性材料是选自该磁性金属时；例如，钴(Co)，于实施步骤(d1)的第一前驱物层4形成步骤前，尚需预先在各主体21镀覆上一电性绝缘层(insulator)，以防止该步骤(f1)所形成的第一线圈23因直接接触该磁性金属而产生短路的问题。Referring again to FIG. 19 and referring to FIG. 20, the step (f1) is to plate a first metal layer 6 on each first precursor layer 4 to form a A first coil 23 as shown in FIG. 8 . Similarly, FIG. 19 and FIG. 20 only show a single first precursor layer 4 and a single first metal layer 6 as examples for illustration. It should be further explained here that, if the magnetic material constituting the substrate 20 is selected from the magnetic metal; for example, cobalt (Co), before the step of forming the first precursor layer 4 in step (d1), there is still An electrical insulating layer (insulator) needs to be plated on each main body 21 in advance to prevent the first coil 23 formed in the step (f1) from being short-circuited due to direct contact with the magnetic metal.
较佳地，该步骤(d1)的各第一前驱物层4是一含有铂(Pt)、钯(Pd)、金(Au)、银(Ag)或铜等催化性金属源的活性材料层(activelayer)，或一含有铬(Cr)、镍(Ni)、钛(Ti)、钨(W)或钼(Mo)的导电性晶种层(conductiveseedlayer)。需补充说明的是，当该步骤(d1)的各第一前驱物层4是该导电性晶种层时，该步骤(f1)的各第一金属层6是以电镀法形成于各第一前驱物层4的该局部区域41；当该步骤(d1)的各第一前驱物层4是该活性材料层时，该步骤(f1)的各第一金属层6是以化学镀法形成于各第一前驱物层4的该局部区域41上。在该第一量产方法中，该步骤(d1)的各第一前驱物层4是该导电性晶种层，且该步骤(f1)是以电镀法于各第一前驱物层4的该局部区域41上形成各第一线圈23。Preferably, each first precursor layer 4 in this step (d1) is an active material layer containing catalytic metal sources such as platinum (Pt), palladium (Pd), gold (Au), silver (Ag) or copper (active layer), or a conductive seed layer containing chromium (Cr), nickel (Ni), titanium (Ti), tungsten (W) or molybdenum (Mo). It should be added that when each first precursor layer 4 in the step (d1) is the conductive seed layer, each first metal layer 6 in the step (f1) is formed on each first metal layer 6 by electroplating. The local region 41 of the precursor layer 4; when each first precursor layer 4 in the step (d1) is the active material layer, each first metal layer 6 in the step (f1) is formed on the on the local region 41 of each first precursor layer 4 . In the first mass production method, each first precursor layer 4 in the step (d1) is the conductive seed layer, and the step (f1) is electroplating on the first precursor layer 4 Each first coil 23 is formed on the partial area 41 .
需进一步说明的是，为了令本实用新型磁芯电感器2能通过表面黏着技术(surface-mounttechnology；SMT)接着于一电路板(图未示)，于该步骤(f1)后，依序还可包含一步骤(j1)、一步骤(j2)及一步骤(j3)。该步骤(j1)是形成一前驱物层(图未示)于各第一线圈23与各主体21上。该步骤(j2)是形成一光阻层(图未示)于该步骤(j1)的所述前驱物层上，且该步骤(j2)的光阻层具有多个对端电极图案区(图未示)。各对端电极图案区是分别位于各主体21的左侧面区2103与右侧面区2104，以局部裸露出各主体21的左侧面区2103与右侧面区2014。该步骤(j3)是于各前驱物层上镀覆一金属层，从而于各前驱物层上对应形成各对端电极(图未示)。It should be further explained that, in order to enable the magnetic core inductor 2 of the present invention to be bonded to a circuit board (not shown) by surface-mount technology (SMT), after the step (f1), sequentially A step (j1), a step (j2) and a step (j3) may be included. The step ( j1 ) is to form a precursor layer (not shown) on each first coil 23 and each main body 21 . The step (j2) is to form a photoresist layer (not shown) on the precursor layer of the step (j1), and the photoresist layer of the step (j2) has a plurality of opposite electrode pattern regions (Fig. not shown). Each pair electrode pattern area is respectively located on the left side area 2103 and the right side area 2104 of each main body 21 to partially expose the left side area 2103 and the right side area 2014 of each main body 21 . The step (j3) is to plate a metal layer on each precursor layer, so as to correspondingly form each pair of terminal electrodes (not shown in the figure) on each precursor layer.
参阅图21并配合参阅图19与图20，该步骤(h1)是移除该第二光阻层5与各第一前驱物层4的被该第二光阻层5的各线路图案区51所覆盖的一剩余区域，从而在各主体21上留下各第一线圈23。值得一提的是，为了保护该第一线圈23免于受外部因素干扰而造成短路或断路，还能在完成步骤(h1)后，形成一绝缘保护层(图未示)于各主体21与各第一线圈23上。Referring to FIG. 21 and referring to FIG. 19 and FIG. 20 together, the step (h1) is to remove the second photoresist layer 5 and each circuit pattern area 51 of each first precursor layer 4 covered by the second photoresist layer 5 A remaining area is covered, thereby leaving each first coil 23 on each main body 21 . It is worth mentioning that, in order to protect the first coil 23 from being short-circuited or disconnected due to external factors, an insulating protective layer (not shown) can be formed between each main body 21 and on each first coil 23 .
参阅图22，该步骤(g1)是于所述连接部22处由上而下或由下而上地分别施予一外力，使各连接部22的第二端222自各主体21的第一侧缘211断裂，从而令各主体21自各连接部22脱离以量产出如图8所示的磁芯电感器2。在该第一量产方法中，是于该步骤(g1)前完成该步骤(h1)为例作说明，然而该步骤(h1)也可于该步骤(g1)后执行，并不以本实施例为限。Referring to Fig. 22, the step (g1) is to apply an external force respectively from top to bottom or bottom to top at the connecting portion 22, so that the second end 222 of each connecting portion 22 is separated from the first side of each main body 21 The edge 211 is broken, so that each main body 21 is separated from each connecting portion 22 to mass-produce the magnetic core inductor 2 as shown in FIG. 8 . In the first mass production method, the step (h1) is completed before the step (g1) as an example for illustration, however, the step (h1) can also be performed after the step (g1), and is not used in this implementation example is limited.
经前述量产方法的详细说明可知，位于各第一光阻层3的外观形状310的桥接部312处所述缺口3121是用来使该基板20于执行步骤(b1)的蚀刻后，可形成多个如图16与图17所显示的各预形体的连接部22的凹槽2221，而显示于图17中的凹槽2221，其目的则是令该量产方法于执行该步骤(g1)时，有利于受该外力所折断以达量产化的效用。值得一提的是，各凹槽2221也可于该步骤(b1)成形出各连接部22后，再以切割(scriber)或蚀刻方式形成于各连接部22上。It can be seen from the detailed description of the aforementioned mass production method that the notch 3121 at the bridging portion 312 of the appearance shape 310 of each first photoresist layer 3 is used to enable the substrate 20 to be formed after performing the etching step (b1). A plurality of grooves 2221 of the connecting portion 22 of each preform shown in Figure 16 and Figure 17, and the groove 2221 shown in Figure 17, its purpose is to make the mass production method perform the step (g1) When it is broken by the external force, it is beneficial to achieve the effect of mass production. It is worth mentioning that each groove 2221 can also be formed on each connecting portion 22 by scriber or etching after forming each connecting portion 22 in the step (b1).
本实用新型磁芯电感器2的一第二量产方法是以MEMS制程来量产出如图9所示的第二实施例的磁芯电感器2，其量产方法大致上是相同于该第一量产方法，不同处是在于，如图23所示，各第一光阻层3的各外观形状310具有两排分设于其本体部313的一周缘的缺口3131，且各本体部313的该两排缺口3131是自其本体部313的周缘相向凹陷。因此，该第二量产方法于实施完该步骤(b1)的蚀刻步骤后，所述第一光阻层3的各本体部313的该两排缺口3131能令各主体21对应成形出如图9所示的该两排沟槽213，以致该步骤(d1)所形成的各第一前驱物层4也可覆盖该两排沟槽213，且在实施完该步骤(f1)后所形成的各第一线圈23是呈该外绕式线圈。A second mass production method of the magnetic core inductor 2 of the present invention is to mass produce the magnetic core inductor 2 of the second embodiment shown in FIG. The first mass production method is different in that, as shown in FIG. 23 , each appearance shape 310 of each first photoresist layer 3 has two rows of notches 3131 that are separately arranged on a peripheral edge of its body portion 313 , and each body portion 313 The two rows of notches 3131 are recessed from the periphery of the body portion 313 toward each other. Therefore, in the second mass production method, after the etching step in the step (b1), the two rows of notches 3131 of each body portion 313 of the first photoresist layer 3 can make each body 21 correspondingly formed as shown in the figure. The two rows of grooves 213 shown in 9, so that each first precursor layer 4 formed in the step (d1) can also cover the two rows of grooves 213, and the formed after the step (f1) is completed Each first coil 23 is the outer wound coil.
本实用新型磁芯电感器2的一第三量产方法是以MEMS制程来量产出如图10所示的第三实施例的磁芯电感器2，其量产方法大致上是相同于该第一量产方法，不同处是在于，如图24所示，各第一光阻层3的各外观形状310具有两排分设于其本体部313的孔洞3132，各本体部313的该两排孔洞3132是沿该第一方向X彼此间隔排列。因此，该第三量产方法于实施完该步骤(b1)的蚀刻步骤后，所述第一光阻层3的各本体部313的该两排孔洞3132能令各主体21对应成形出如图10所示的该两排穿孔214，以致该步骤(d1)所形成的各第一前驱物层4也可覆盖界定出该两排穿孔214的两排内环面，且在实施完该步骤(f1)后所形成的各第一线圈23是呈该内绕式线圈。A third mass production method of the magnetic core inductor 2 of the present invention is to mass produce the magnetic core inductor 2 of the third embodiment shown in FIG. The first mass production method is different in that, as shown in FIG. 24 , each appearance shape 310 of each first photoresist layer 3 has two rows of holes 3132 respectively arranged in its body portion 313 , and the two rows of holes 3132 of each body portion 313 The holes 3132 are arranged at intervals along the first direction X. Therefore, in the third mass production method, after the etching step of the step (b1), the two rows of holes 3132 of each body portion 313 of the first photoresist layer 3 can make each body 21 correspondingly formed as shown in the figure The two rows of perforations 214 shown in 10, so that each first precursor layer 4 formed in step (d1) can also cover the two rows of inner annulus that define the two rows of perforations 214, and after implementing this step ( The first coils 23 formed after f1) are the inner-wound coils.
参阅图25至图28，本实用新型磁芯电感器2的一第四量产方法是以MEMS制程来量产出如图11与图12所示的第四实施例的磁芯电感器2，其量产方法大致上是相同于该第一量产方法，不同之处是在于，于该步骤(h1)后，还依序包含一步骤(i11)、一步骤(i12)、一步骤(i13)，及一步骤(i14)。Referring to Fig. 25 to Fig. 28, a fourth mass production method of the magnetic core inductor 2 of the present invention is to mass produce the magnetic core inductor 2 of the fourth embodiment shown in Fig. 11 and Fig. 12 through the MEMS process, The mass production method is substantially the same as the first mass production method, except that after the step (h1), a step (i11), a step (i12), and a step (i13 ), and a step (i14).
参阅图25，该步骤(i11)是于各主体21与各第一线圈23上形成一绝缘层24。参图26，该步骤(i12)是于各绝缘层24上形成一第二前驱物层7。参图27，该步骤(i13)是于所述第二前驱物层7上形成一第三光阻层8，且该第三光阻层8具有多个对应裸露出各第二前驱物层7的一局部区域71的线路图案区81。再参阅图27并配合参阅图28，该步骤(i14)是于各第二前驱物层7上镀制一第二金属层9，以于各第二前驱物层7的该局部区域71上形成一如图11与图12所示的第二线圈25。最后，再移除该第三光阻层8与各第二前驱物层7的被该第三光阻层8的各线路图案区81所覆盖的一剩余区域即可得到如图11与图12所示的共芯双层线圈的磁芯电感器2。需说明的是，图25至图28皆只显示出单一个主体21的轮廓面210、单一个第二前驱物层7、该第二光阻层8的单一个线路图案区81，与单一个第二金属层9为例做说明。在该第四量产方法中，该步骤(i12)与该步骤(i14)的实施方式是比照该第一量产方法，于此不再多加赘述。Referring to FIG. 25 , the step (i11) is to form an insulating layer 24 on each main body 21 and each first coil 23 . Referring to FIG. 26 , the step ( i12 ) is to form a second precursor layer 7 on each insulating layer 24 . Referring to FIG. 27, the step (i13) is to form a third photoresist layer 8 on the second precursor layer 7, and the third photoresist layer 8 has a plurality of corresponding exposed second precursor layers 7 The circuit pattern area 81 of a local area 71. Referring again to FIG. 27 and referring to FIG. 28, the step (i14) is to plate a second metal layer 9 on each second precursor layer 7 to form a metal layer 9 on the local area 71 of each second precursor layer 7. A second coil 25 as shown in FIG. 11 and FIG. 12 . Finally, remove the third photoresist layer 8 and a remaining area of each second precursor layer 7 covered by each circuit pattern area 81 of the third photoresist layer 8 to obtain the results shown in FIGS. 11 and 12 . A core inductor 2 with a co-core double-layer coil is shown. It should be noted that, FIGS. 25 to 28 only show the profile surface 210 of a single body 21, a single second precursor layer 7, a single circuit pattern area 81 of the second photoresist layer 8, and a single The second metal layer 9 is described as an example. In the fourth mass production method, the implementation of the step (i12) and the step (i14) is compared with the first mass production method, and will not be repeated here.
参阅图29图30与图31，本实用新型磁芯电感器的一第五量产方法是以一模具4通过冲压来实施，其依序包含一步骤(a2)、一步骤(b2)、一步骤(b2’)、一步骤(c2)、一步骤(d2)、一步骤(e2)、步骤(g2)，及一步骤(f2)。Referring to Fig. 29, Fig. 30 and Fig. 31, a fifth mass production method of the magnetic core inductor of the present invention is implemented by stamping with a mold 4, which sequentially includes a step (a2), a step (b2), a Step (b2'), a step (c2), a step (d2), a step (e2), a step (g2), and a step (f2).
参阅图29与图30，该步骤(a2)是令该模具4的一模穴41数组面向该基板20的上表面201或下表面202设置，以使该基板20的一部分区域2011是面向该模穴41数组。在该第五量产方法中，该模具4的模穴41数组是面向该基板20的上表面201，但本实用新型并不以此为限。Referring to Fig. 29 and Fig. 30, the step (a2) is to make a mold cavity 41 array of the mold 4 face the upper surface 201 or the lower surface 202 of the substrate 20, so that a part of the region 2011 of the substrate 20 is facing the mold. An array of 41 holes. In the fifth mass production method, the array of mold cavities 41 of the mold 4 faces the upper surface 201 of the substrate 20 , but the present invention is not limited thereto.
较佳地，构成该步骤(a2)的基板20的磁性材料是选自该磁性金属或一磁性陶瓷生坯(green)。在该第四量产方法中，构成该步骤(a2)的基板20的磁性材料是选自该磁性陶瓷生坯，如铁氧磁体生坯。Preferably, the magnetic material constituting the substrate 20 of the step (a2) is selected from the magnetic metal or a magnetic ceramic green body (green). In the fourth mass production method, the magnetic material constituting the substrate 20 in the step (a2) is selected from the magnetic ceramic green body, such as a ferrite magnet green body.
参阅图31，该步骤(b2)是用该模具4冲断该基板20的上表面201与下表面202，以使该基板20的该部分区域2011置入该模穴41数组内，且移除该基板20的面对该模穴41数组外的一剩余区域2012，并从而成形出如图17所示一基座200数组与一预形体数组。该预形体数组中的各预形体沿该第一方向包括该两连接部22，及一如图8所示的主体21，但各预形体的该两连接部22处未成形出该两凹槽2221。Referring to FIG. 31 , the step (b2) is to use the mold 4 to punch out the upper surface 201 and the lower surface 202 of the substrate 20, so that the partial area 2011 of the substrate 20 is placed in the array of mold cavities 41, and removed The substrate 20 faces a remaining area 2012 outside the array of mold cavities 41 , thereby forming an array of bases 200 and an array of preforms as shown in FIG. 17 . Each preform in the preform array includes the two connecting portions 22 along the first direction, and a main body 21 as shown in FIG. 8 , but the two connecting portions 22 of each preform do not form the two grooves. 2221.
需补充说明的是，为了进一步形成各连接部22的凹槽2221，可于该步骤(b2)后以切割(scriber)或蚀刻方式将各凹槽2221形成于各连接部22上。It should be added that, in order to further form the grooves 2221 of the connecting portions 22 , the grooves 2221 may be formed on the connecting portions 22 by scriber or etching after the step (b2).
该步骤(b2’)是烧结该磁性陶瓷生坯，令该磁性陶瓷生坯结晶化(crystallization)，从而使该基座200数组与该预形体数组整体结构强度提升。然而，此处需补充说明的是，当构成该第五量产方法的该基板20的磁性材料是选自该磁性金属时，是可以省略该步骤(b2’)。在该第五量产方法中，实施该步骤(b2’)与否，是决定于该基板20的材质的选用。The step (b2') is to sinter the magnetic ceramic green body to crystallize the magnetic ceramic green body, so that the overall structural strength of the base 200 array and the preform array is improved. However, it should be added here that when the magnetic material constituting the substrate 20 of the fifth mass production method is selected from the magnetic metal, the step (b2') can be omitted. In the fifth mass production method, whether to implement the step (b2') depends on the selection of the material of the substrate 20.
该步骤(c2)、该步骤(d2)、该步骤(e2)、该步骤(g2)分别相同于该第一量产方法中的该步骤(d1)、该步骤(e1)、该步骤(f1)，及该步骤(h1)，也就是，形成各第一线圈23于各主体21上，此处不再赘述。The step (c2), the step (d2), the step (e2), and the step (g2) are respectively the same as the step (d1), the step (e1), and the step (f1) in the first mass production method. ), and the step (h1), that is, forming each first coil 23 on each main body 21, which will not be repeated here.
再参阅图18，该步骤(f2)是相同于该第一量产方法的步骤(g1)，将各磁芯电感器2的主体21自各连接部22脱离，此处不再多加赘述。Referring to FIG. 18 again, the step (f2) is the same as the step (g1) of the first mass production method, that is, the main body 21 of each magnetic core inductor 2 is separated from each connecting portion 22, and no further description is given here.
值得一提的是，为了形成如该第四量产方法的共芯双层线圈结构，于该步骤(g2)后，还包含一步骤(i21)、一步骤(i22)、一步骤(i23)，及一步骤(i24)。该步骤(i21)、该步骤(i22)、该步骤(i23)，及该步骤(i24)是分别相同于该第四量产方法的该步骤(i11)、该步骤(i12)、该步骤(i13)，及该步骤(i14)，此处不再多加赘述。It is worth mentioning that, in order to form the co-core double-layer coil structure as in the fourth mass production method, after the step (g2), a step (i21), a step (i22), and a step (i23) are also included. , and a step (i24). The step (i21), the step (i22), the step (i23), and the step (i24) are respectively the same as the step (i11), the step (i12), and the step ( i13), and the step (i14), which will not be repeated here.
经上述本实用新型磁芯电感器2的各量产方法的详细说明可知，本实用新型仅需通过该步骤(a1)至该步骤(f1)或该步骤(a2)至该步骤(e2)等步骤，即可形成出外绕式或内绕式的第一线圈23。此外，本实用新型的量产方法也只需要通过步骤(i11)至步骤(i14)或步骤(i21)至步骤(i24)等四道程序，即可简易地量产出共芯双层线圈结构的磁芯电感器2。无需如同前案2般，尚需经过四道的贯孔程序、四道的填置导电糊程序、四道的涂布导电糊以形成各电路图案112、122、132、142程序，与一道步骤(E)的烧结处理等十三道程序，才可构成该内绕式的线圈。就制程面来说，本实用新型的量产方法程序简化；就成本面来说，本实用新型的量产方法可因程序简化而减少制程上所需耗费的时间成本。It can be known from the detailed description of the various mass production methods of the magnetic core inductor 2 of the present invention that the present invention only needs to go through the step (a1) to the step (f1) or the step (a2) to the step (e2), etc. step, the outer-wound or inner-wound first coil 23 can be formed. In addition, the mass production method of the present invention only needs to go through four procedures such as step (i11) to step (i14) or step (i21) to step (i24) to easily mass produce the co-core double-layer coil structure The magnetic core inductor 2. It is not necessary to go through four procedures of through holes, four procedures of filling conductive paste, and four procedures of coating conductive paste to form the circuit patterns 112, 122, 132, 142 as in the previous case 2, and one step Thirteen procedures such as the sintering treatment in (E) can form the inner winding coil. In terms of process, the procedure of the mass production method of the present invention is simplified; in terms of cost, the mass production method of the present invention can reduce the time cost required for the process due to the simplification of the procedure.
再者，本实用新型各实施例的磁芯电感器2是通过MEMS制程直接由该基板20经过上述量产方法的步骤(b1)或步骤(b2)来成形出各磁芯电感器2的主体21。具体来说，各主体21为一体结构，以致各磁芯电感器2的主体21的整体结构强度高，不像图1所示的积层式磁芯电感器1般，于所述电路陶瓷片11、12、13、14相邻界面间存在强度不足的问题。此外，本实用新型各实施例的磁芯电感器2的第一线圈23与第二线圈25也为一体结构，不会如图1所示各电路图案112、122、132、142间因不连续界面而产生非奥姆式接触或增加阻抗而产生额外的电热效应。Furthermore, the magnetic core inductors 2 of the various embodiments of the present utility model are directly formed from the substrate 20 through the step (b1) or step (b2) of the above-mentioned mass production method through the MEMS process to form the main body of each magnetic core inductor 2 twenty one. Specifically, each main body 21 has an integrated structure, so that the overall structural strength of the main body 21 of each magnetic core inductor 2 is high, unlike the multilayer magnetic core inductor 1 shown in FIG. There is a problem of insufficient strength between adjacent interfaces of 11, 12, 13, and 14. In addition, the first coil 23 and the second coil 25 of the magnetic core inductor 2 in each embodiment of the present utility model are also of an integrated structure, and there is no discontinuity among the circuit patterns 112, 122, 132, 142 as shown in FIG. interface to produce non-ohmic contact or increase impedance to produce additional electrothermal effects.
综上所述，本实用新型磁芯电感器2是通过MEMS制程直接对该基板20进行喷砂、蚀刻或冲断以预先成形出结构强度高且呈一体结构的各主体21，并于各主体21的轮廓面210上形成各第一前驱物层4，以进一步地在呈立体态的各轮廓面210上的各第一前驱物层4上电镀/或化学镀出各外绕式或内绕式的第一线圈23，也可在各第一线圈23上与各主体21的立体态的轮廓面210上继续形成出各第二线圈25，就电感器的性能方面来看，结构强度高且不易产生过热问题，就制程与成本方面来看，因制作程序简化而降低时间成本，所以确实能达成本实用新型的目的。To sum up, the magnetic core inductor 2 of the present invention directly sandblasts, etches or punches the substrate 20 through the MEMS process to form the main bodies 21 with high structural strength and an integrated structure in advance, and place them on each main body. Each first precursor layer 4 is formed on the outline surface 210 of 21, so as to further electroplate/or chemically plate each outer winding or inner winding The first coil 23 of the formula can also continue to form each second coil 25 on each first coil 23 and the three-dimensional contour surface 210 of each main body 21. In terms of the performance of the inductor, the structural strength is high and The problem of overheating is not easy to occur. In terms of manufacturing process and cost, the time cost is reduced due to the simplification of the manufacturing process, so the purpose of the utility model can be achieved indeed.
以上所述，仅为本实用新型的实施例，当不能以此限定本实用新型实施的范围，即凡依本实用新型权利要求书及说明书内容所作的简单的等效变化与修饰，皆仍属本实用新型所涵盖的范围。The above is only an embodiment of the utility model, and should not limit the scope of implementation of the utility model, that is, all simple equivalent changes and modifications made according to the claims of the utility model and the contents of the description are still within the scope of the utility model. The scope covered by the utility model.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW104210227 | 2015-06-25 | ||
| TW104210227UTWM511111U (en) | 2015-06-25 | 2015-06-25 | Magnetic core inductor |
| Publication Number | Publication Date |
|---|---|
| CN204884757Utrue CN204884757U (en) | 2015-12-16 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520597653.2UExpired - Fee RelatedCN204884757U (en) | 2015-06-25 | 2015-08-11 | Magnetic core inductor |
| Country | Link |
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| CN (1) | CN204884757U (en) |
| TW (1) | TWM511111U (en) |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | Effective date of registration:20190528 Address after:Taichung City, Taiwan, China Patentee after:SIWARD CRYSTAL TECHNOLOGY CO.,LTD. Address before:Miaoli County, Taiwan, China Patentee before:WAFER MEMS CO.,LTD. | |
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| CF01 | Termination of patent right due to non-payment of annual fee | Granted publication date:20151216 Termination date:20210811 | |
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