技术领域technical field
本实用新型涉及激光技术领域，尤指一种分离式被动调Q紫外光激光器。The utility model relates to the field of laser technology, in particular to a separate passive Q-switched ultraviolet laser.
背景技术Background technique
自激光问世以来，激光加工技术就受到人们的重视，至今激光加工技术已成为先进制造技术的重要组成部分。由于激光束具有单色性好、能量密度高、空间控制性和时间控制性良好等一系列优点，目前它已广泛应用于材料加工等领域，针对于激光微加工，材料标记等领域的激光器主要有红外激光器、绿光激光器、紫外激光器。但现有的激光器较为复杂，主要采用声光或电光调Q的红外固体激光器及其非线性频率变换的绿光及紫外激光器来实现的，成本也较高。Since the advent of lasers, laser processing technology has been valued by people, and laser processing technology has become an important part of advanced manufacturing technology. Because the laser beam has a series of advantages such as good monochromaticity, high energy density, good space control and time control, it has been widely used in materials processing and other fields. Lasers for laser microprocessing, material marking and other fields are mainly There are infrared lasers, green lasers, and ultraviolet lasers. However, the existing lasers are relatively complex, and are mainly realized by acousto-optic or electro-optic Q-switched infrared solid-state lasers and green and ultraviolet lasers with nonlinear frequency conversion, and the cost is also high.
专利文献CN103633536A于2014年03月12日公开了一种激光头集成泵浦头的技术方案。而同样涉及激光技术领域的本实用新型则公开了一种被动调Q激光器，包括泵浦源、泵浦耦合系统、第一增益晶体、第二增益晶体和可饱和吸收体，泵浦源发出泵浦光经泵浦耦合系统进入第一增益晶体和第二增益晶体，可饱和吸收体置于第二增益晶体后面，通过可饱和吸收体对激光进行调制，从而产生脉冲激光输出。Patent document CN103633536A disclosed on March 12, 2014 a technical solution for integrating a laser head with a pump head. The utility model, which also relates to the field of laser technology, discloses a passive Q-switched laser, including a pump source, a pump coupling system, a first gain crystal, a second gain crystal, and a saturable absorber. The pump source emits a pump The pump light enters the first gain crystal and the second gain crystal through the pump coupling system, and the saturable absorber is placed behind the second gain crystal, and the laser is modulated by the saturable absorber to generate pulsed laser output.
现有的被动调Q或主动调Q的紫外激光器一般都为集成式设计，即将泵浦源与激光头集成在一起。这样的集成式被动调Q激光器体积较大，成本高，维护和使用都不方便，而分离式的主动调Q激光器的激光头部分体积也比较大，主动调Q的装置也比较复杂，成本高。Existing passively Q-switched or actively Q-switched UV lasers are generally of an integrated design, that is, the pump source and the laser head are integrated together. Such an integrated passive Q-switched laser is large in size, high in cost, and inconvenient to maintain and use, while the laser head part of the separated active Q-switched laser is also relatively large in size, and the active Q-switched device is also relatively complicated and high in cost. .
发明内容Contents of the invention
本实用新型提供一种缩减体积、方便安装维护的分离式被动调Q紫外光。The utility model provides a separated passive Q-switching ultraviolet light with reduced volume and convenient installation and maintenance.
本实用新型的目的是通过以下技术方案来实现的：The purpose of this utility model is achieved through the following technical solutions:
一种分离式被动调Q紫外光激光器，包括泵浦系统和激光头，所述泵浦系统与激光头分离，所述激光头依次包括光耦合的准直镜、聚焦镜、谐振腔、二倍频晶体和三倍频晶体；所述泵浦系统包括泵浦源，给泵浦源供电的驱动源；所述泵浦源通过传能光纤与所述准直镜光耦合。A separate passive Q-switched ultraviolet laser, including a pumping system and a laser head, the pumping system is separated from the laser head, and the laser head includes an optically coupled collimating mirror, a focusing mirror, a resonant cavity, a double A frequency crystal and a triple frequency crystal; the pumping system includes a pumping source and a driving source for supplying power to the pumping source; the pumping source is optically coupled to the collimating mirror through an energy transmission fiber.
进一步的，所述驱动源、泵浦源安装于泵浦系统中，为一整体；所述准直镜、聚焦镜、谐振腔、二倍频晶体和三倍频晶体集成在同一壳体内，所述壳体外还固定有与所述三倍频晶体光耦合的扩束镜；扩束镜镀有具有对红外光及二倍频光高反，对紫外光增透的膜系。Further, the driving source and the pumping source are installed in the pumping system as a whole; the collimating mirror, focusing mirror, resonant cavity, double frequency crystal and triple frequency crystal are integrated in the same housing, so A beam expander optically coupled with the triple frequency crystal is also fixed outside the housing; the beam expander is coated with a film system with high reflection to infrared light and double frequency light, and anti-reflection to ultraviolet light.
进一步的，所述谐振腔从聚焦镜一侧起，依次包括光耦合的反射镜、增益组件、被动调Q晶体和输出镜；由反射镜和输出镜构成的谐振腔为稳定腔；所述输出镜的出光面与所述二倍频晶体耦合。Further, from the side of the focusing mirror, the resonant cavity sequentially includes an optically coupled reflector, a gain component, a passive Q-switching crystal, and an output mirror; the resonant cavity formed by the reflector and the output mirror is a stable cavity; the output The light output surface of the mirror is coupled with the double frequency crystal.
进一步的，所述增益组件包括采用各项同性、高上能级寿命和高储能材质的第一增益晶体和采用具备偏振特性材质的第二增益晶体；所述第一增益晶体和第二增益晶体光耦合。Further, the gain component includes a first gain crystal using isotropic, high upper level lifetime and high energy storage materials and a second gain crystal using a material with polarization characteristics; the first gain crystal and the second gain Crystal light coupling.
进一步的，所述第一增益晶体为Nd：YAG晶体或Nd：YAG陶瓷晶体或YAG与Nd:YAG的键合或胶合的晶体，第二增益晶体为Nd：YVO4晶体或YVO4与Nd：YVO4的键合或胶合的晶体；或者，第一增益晶体为Nd：YVO4晶体或YVO4与Nd：YVO4的键合或胶合的晶体，第二增益晶体为Nd：YAG晶体或Nd：YAG陶瓷晶体或YAG与Nd:YAG的键合或胶合的晶体，第一增益晶体的出光面相距第二增益晶体的入光面距离小于10mm。Further, the first gain crystal is Nd:YAG crystal or Nd:YAG ceramic crystal or bonded or glued crystal of YAG and Nd:YAG, and the second gain crystal is Nd:YVO4 crystal or YVO4 and Nd:YVO4 Bonded or cemented crystal; or, the first gain crystal is Nd:YVO4 crystal or bonded or cemented crystal of YVO4 and Nd:YVO4, and the second gain crystal is Nd:YAG crystal or Nd:YAG ceramic crystal or YAG and For Nd:YAG bonded or glued crystals, the distance between the light exit surface of the first gain crystal and the light entrance surface of the second gain crystal is less than 10 mm.
进一步的，所述第一增益晶体为Nd：YAG晶体，其Nd离子的掺杂浓度为0.2％-2％，第二增益晶体为Nd：YVO4晶体，其Nd离子的掺杂浓度为0.1％-3％，或者，第一增益晶体为Nd：YVO4晶体其Nd离子的掺杂浓度为为0.1％-2％，第一增益晶体(10)为Nd：YAG晶体，其Nd离子的掺杂浓度为0.2％-3％。Further, the first gain crystal is Nd:YAG crystal, the doping concentration of Nd ions is 0.2%-2%, and the second gain crystal is Nd:YVO4 crystal, the doping concentration of Nd ions is 0.1%-2%. 3%, or, the first gain crystal is Nd: YVO The doping concentration of its Nd ion is 0.1%-2%, and the first gain crystal (10) is Nd: YAG crystal, and the doping concentration of its Nd ion is 0.2%-3%.
进一步的，所述被动调Q晶体为Cr:YAG、V:YAG、半导体饱和吸收体、石墨烯中的任意一种，被动调Q晶体的初始透过率为10％-95％。Further, the passive Q-switching crystal is any one of Cr:YAG, V:YAG, semiconductor saturable absorber, and graphene, and the initial transmittance of the passive Q-switching crystal is 10%-95%.
进一步的，所述反射镜、输出镜中至少一个为凹面镜；或者，所述第一增益晶体的入光面镀膜，形成所述反射镜；所述输出镜为凹面镜。Further, at least one of the reflection mirror and the output mirror is a concave mirror; or, the light-incident surface of the first gain crystal is coated to form the reflection mirror; the output mirror is a concave mirror.
进一步的，所述二倍频晶体为LBO晶体、KTP晶体、BBO晶体、BiBO晶体、CLBO晶体、PPLN晶体，匹配方式可采用临界相位匹配或非临界相位匹配，三倍频晶体为LBO晶体、BBO晶体、BiBO晶体、CLBO晶体、KDP晶体，匹配方式可采用临界相位匹配或非临界相位匹配。Further, the double frequency crystals are LBO crystals, KTP crystals, BBO crystals, BiBO crystals, CLBO crystals, PPLN crystals, the matching method can be critical phase matching or non-critical phase matching, and the triple frequency crystals are LBO crystals, BBO crystals, etc. Crystal, BiBO crystal, CLBO crystal, KDP crystal, the matching method can adopt critical phase matching or non-critical phase matching.
进一步的，所述泵浦源为连续半导体激光器或脉冲半导体激光器，当泵浦源为光纤耦合输出的脉冲半导体激光器时，其中心波长为808nm±5nm，880nm±5nm，885nm±5nm中的一种或以上任意两种波长的组合；激光器壳体体积小于80x80x430mm3，其横截面积小于80x80mm2，长度小于430mm3。Further, the pumping source is a continuous semiconductor laser or a pulsed semiconductor laser. When the pumping source is a fiber-coupled pulsed semiconductor laser, its central wavelength is one of 808nm±5nm, 880nm±5nm, and 885nm±5nm. Or a combination of any two wavelengths above; the volume of the laser shell is less than 80x80x430mm3 , its cross-sectional area is less than 80x80mm2 , and its length is less than 430mm3 .
一种如本实用新型所述的分离式被动调Q紫外激光器，包括步骤：A separate passive Q-switched ultraviolet laser as described in the utility model, comprising steps:
泵浦系统发出泵浦光通过传能光纤输出到激光头的准直镜；The pumping system emits pumping light and outputs it to the collimating mirror of the laser head through the energy transmission fiber;
通过第一增益晶体和第二增益晶体产生粒子数反转，发生自发辐射；The population inversion is generated by the first gain crystal and the second gain crystal, and spontaneous radiation occurs;
在反射镜和输出镜组成的谐振腔的反馈作用下，产生受激辐射；Under the feedback of the resonant cavity composed of the reflector and the output mirror, stimulated radiation is generated;
在被动调Q晶体的作用下产生红外脉冲激光；Infrared pulsed laser is generated under the action of passive Q-switched crystal;
通过输出镜输出红外脉冲激光，再经过二倍频晶体和三倍频晶体产生单一波长的紫外线激光。The infrared pulse laser is output through the output mirror, and then the single-wavelength ultraviolet laser is generated through the double frequency crystal and the triple frequency crystal.
本实用新型的泵浦系统与激光器壳体采用分离式设计，泵浦系统与激光器壳体用传能光纤相连接，这样使得激光头的体积更小巧，结构更紧凑；且激光头和泵浦分离形成独立配件，也方便独立维修、更换，便于安置使用及后期维护。另外，本实用新型采用被动调Q设计，降低了激光器的成本，具有更好的稳定性。The pumping system and the laser shell of the utility model adopt a separate design, and the pumping system and the laser shell are connected by energy-transmitting optical fibers, so that the volume of the laser head is smaller and the structure is more compact; and the laser head and the pump are separated The formation of independent accessories is also convenient for independent maintenance and replacement, and is convenient for placement, use and later maintenance. In addition, the utility model adopts a passive Q-switching design, which reduces the cost of the laser and has better stability.
附图说明Description of drawings
图1是本实用新型实施例一分离式被动调Q紫外光激光器的原理示意图；Fig. 1 is a schematic diagram of the principle of a separate passive Q-switched ultraviolet laser according to an embodiment of the present invention;
图2是本实用新型双增益晶体紧凑型被动调Q紫外光激光器的原理示意图；Fig. 2 is the schematic diagram of the principle of the dual-gain crystal compact passive Q-switched ultraviolet laser of the present invention;
图3是本实用新型各种平凹腔被动调Q激光器的原理第一示意图；Fig. 3 is the first schematic diagram of the principle of various flat-cavity passive Q-switched lasers of the present invention;
图4是本实用新型各种平凹腔被动调Q激光器的原理第二示意图；Fig. 4 is the second schematic diagram of the principle of various flat-cavity passive Q-switched lasers of the present invention;
图5是本实用新型各种平凹腔被动调Q激光器的原理第三示意图；Fig. 5 is the third schematic diagram of the principle of various flat-cavity passive Q-switched lasers of the present invention;
图6是本实用新型各种平凹腔被动调Q激光器的原理第四示意图；Fig. 6 is the fourth schematic diagram of the principle of various flat-cavity passive Q-switched lasers of the present invention;
图7是本实用新型实施例八采用高温角度匹配非线性晶体的被动调Q激光器的原理示意图；7 is a schematic diagram of the principle of a passive Q-switched laser using a high-temperature angle-matched nonlinear crystal in Embodiment 8 of the present invention;
图8是本实用新型一种被动调Q紫外光激光器的原理示意图；Fig. 8 is a schematic diagram of the principle of a passive Q-switched ultraviolet laser of the present invention;
图9是现有的平平腔腔内的光斑半径随热透镜焦距的变化的曲线示意图；Fig. 9 is a schematic diagram showing the variation of the spot radius in the existing flat cavity with the focal length of the thermal lens;
图10是本实用新型平凹腔腔内的光斑半径随热透镜焦距的变化的曲线示意图。Fig. 10 is a schematic diagram of the curve of the variation of the radius of the light spot in the flat concave cavity with the focal length of the thermal lens of the present invention.
其中：in:
1、泵浦系统；11、驱动源；12、泵浦源；2、传能光纤；3、激光头；4、壳体；5、扩束镜；6、准直镜；7、聚焦镜；8、谐振腔；81、反射镜；82、增益组件；821、第一增益晶体；822、第二增益晶体；83、被动调Q晶体；84、输出镜；86、半反半透膜；9、非线性晶体；91、二倍频晶体；92、三倍频晶体。1. Pumping system; 11. Driving source; 12. Pumping source; 2. Energy transmission fiber; 3. Laser head; 4. Housing; 5. Beam expander; 6. Collimating mirror; 7. Focusing mirror; 8. Resonant cavity; 81. Mirror; 82. Gain component; 821. First gain crystal; 822. Second gain crystal; 83. Passive Q-switching crystal; 84. Output mirror; 86. Semi-reflective and semi-permeable membrane; 9 , nonlinear crystal; 91, double frequency crystal; 92, triple frequency crystal.
具体实施方式Detailed ways
实施例一Embodiment one
如图1所示，本实施方式公开一种分离式被动调Q紫外光激光器，包括泵浦系统1，所述泵浦系统1还耦合有与其分离设置的激光头3，所述激光头3依次包括光耦合的准直镜6、聚焦镜7、谐振腔8、二倍频晶体91和三倍频晶体92；所述泵浦系统1包括泵浦源12，给泵浦源12供电并提供制冷、为二倍频晶体91和三倍频晶体92提供温度控制的驱动源11；所述泵浦源12通过传能光纤2与所述准直镜6光耦合。As shown in Figure 1, this embodiment discloses a separate passive Q-switched ultraviolet laser, including a pumping system 1, and the pumping system 1 is also coupled with a laser head 3 that is separately arranged from it, and the laser head 3 is in turn Comprising an optically coupled collimating mirror 6, a focusing mirror 7, a resonant cavity 8, a double frequency crystal 91 and a triple frequency crystal 92; the pumping system 1 includes a pumping source 12, which supplies power to the pumping source 12 and provides refrigeration 1. Provide a temperature-controlled drive source 11 for the frequency-doubler crystal 91 and the frequency-triple crystal 92 ;
本实施方式还公开一种如本实用新型所述的分离式被动调Q紫外激光器，包括步骤：This embodiment also discloses a separate passive Q-switched ultraviolet laser according to the utility model, including steps:
泵浦系统发出泵浦光通过传能光纤输出到激光头的准直镜；The pumping system emits pumping light and outputs it to the collimating mirror of the laser head through the energy transmission fiber;
通过第一增益晶体和第二增益晶体产生粒子数反转，发生自发辐射；The population inversion is generated by the first gain crystal and the second gain crystal, and spontaneous radiation occurs;
在反射镜和输出镜组成的谐振腔的反馈作用下，产生受激辐射；Under the feedback of the resonant cavity composed of the reflector and the output mirror, stimulated radiation is generated;
在被动调Q晶体的作用下产生红外脉冲激光；Infrared pulsed laser is generated under the action of passive Q-switched crystal;
通过输出镜输出红外脉冲激光，再经过二倍频晶体和三倍频晶体产生单一波长的紫外线激光。The infrared pulse laser is output through the output mirror, and then the single-wavelength ultraviolet laser is generated through the double frequency crystal and the triple frequency crystal.
本实用新型的泵浦系统1与激光器壳体4采用分离式设计，泵浦系统1与激光器壳体4用传能光纤2相连接，这样使得激光头3的体积更小巧，结构更紧凑；且激光头3和泵浦分离形成独立配件，也方便独立维修、更换，便于安置使用及后期维护。另外，本实用新型采用被动调Q设计，降低了激光器的成本，具有更好的稳定性。The pumping system 1 and the laser housing 4 of the utility model adopt a separate design, and the pumping system 1 and the laser housing 4 are connected by an energy-transmitting optical fiber 2, so that the volume of the laser head 3 is smaller and the structure is more compact; and The laser head 3 and the pump are separated to form independent accessories, which is also convenient for independent maintenance and replacement, and is convenient for installation, use and later maintenance. In addition, the utility model adopts a passive Q-switching design, which reduces the cost of the laser and has better stability.
实施例二Embodiment two
如图8所示，本实施方式公开一种分离式被动调Q紫外光激光器，包括泵浦系统1，所述泵浦系统1还耦合有与其分离设置的激光头3，所述激光头3依次包括光耦合的准直镜6、聚焦镜7、谐振腔8、二倍频晶体91和三倍频晶体92；所述泵浦系统1包括泵浦源12，给泵浦源12供电并提供制冷、为二倍频晶体91和三倍频晶体92提供温度控制的驱动源11；所述泵浦源12通过传能光纤2与所述准直镜6光耦合。所述二倍频晶体91为LBO晶体、KTP晶体、BBO晶体、BiBO晶体、CLBO晶体、PPLN晶体，匹配方式可采用临界相位匹配或非临界相位匹配，三倍频晶体92为LBO晶体、BBO晶体、BiBO晶体、CLBO晶体、KDP晶体，匹配方式可采用临界相位匹配或非临界相位匹配。As shown in FIG. 8 , this embodiment discloses a separate passive Q-switched ultraviolet laser, including a pumping system 1, and the pumping system 1 is also coupled with a laser head 3 that is separated from it, and the laser head 3 is in turn Comprising an optically coupled collimating mirror 6, a focusing mirror 7, a resonant cavity 8, a double frequency crystal 91 and a triple frequency crystal 92; the pumping system 1 includes a pumping source 12, which supplies power to the pumping source 12 and provides cooling 1. Provide a temperature-controlled drive source 11 for the frequency-doubler crystal 91 and the frequency-triple crystal 92 ; The double frequency crystal 91 is LBO crystal, KTP crystal, BBO crystal, BiBO crystal, CLBO crystal, PPLN crystal, the matching method can adopt critical phase matching or non-critical phase matching, and the triple frequency crystal 92 is LBO crystal, BBO crystal , BiBO crystal, CLBO crystal, KDP crystal, the matching method can adopt critical phase matching or non-critical phase matching.
所述驱动源11、泵浦源12安装于泵浦系统1中，为一整体；所述准直镜6、聚焦镜7、谐振腔8、二倍频晶体91和三倍频晶体92集成在同一壳体4内，所述壳体4外还固定有与所述三倍频晶体92光耦合的扩束镜5；扩束镜5镀有具有对红外光高反，对紫外光增透的膜系。The driving source 11 and the pumping source 12 are installed in the pumping system 1 as a whole; the collimating mirror 6, the focusing mirror 7, the resonant cavity 8, the frequency doubling crystal 91 and the frequency doubling crystal 92 are integrated in the In the same housing 4, a beam expander 5 optically coupled with the triple frequency crystal 92 is fixed outside the housing 4; film system.
所述谐振腔8从聚焦镜7一侧起，依次包括光耦合的反射镜81、增益组件82、被动调Q晶体83和输出镜84；由反射镜81和输出镜84构成的谐振腔8为稳定腔；所述输出镜84的出光面与所述二倍频晶体91耦合。所述增益组件82Described resonant cavity 8 comprises optically coupled reflecting mirror 81, gain component 82, passive Q-switching crystal 83 and output mirror 84 successively from the side of focusing mirror 7; Stable cavity; the light output surface of the output mirror 84 is coupled to the frequency doubling crystal 91 . The gain component 82
所述被动调Q晶体83为Cr:YAG、V:YAG、半导体饱和吸收体、石墨烯中的任意一种，被动调Q晶体83的初始透过率为10％-95％。The passive Q-switching crystal 83 is any one of Cr:YAG, V:YAG, semiconductor saturable absorber, and graphene, and the initial transmittance of the passive Q-switching crystal 83 is 10%-95%.
所述反射镜81、输出镜84中至少一个为凹面镜；或者，所述增益组件82的入光面镀膜，形成所述反射镜81；所述输出镜84为凹面镜。具体来说，反射镜81和输出镜84构成的谐振腔8为稳定腔，反射镜81为凹面镜，输出镜84为平面镜；或者，反射镜81为平面镜输出镜84为凹面镜；或者，反射镜81为凹面镜，输出镜84为凹面镜；或者，反射镜81由增益组件82的左端面镀膜代替，输出镜84为凹面镜，具体参见图3-6所示。At least one of the reflecting mirror 81 and the output mirror 84 is a concave mirror; or, the incident surface of the gain component 82 is coated to form the reflecting mirror 81; the output mirror 84 is a concave mirror. Specifically, the resonant cavity 8 formed by reflector 81 and output mirror 84 is a stable cavity, reflector 81 is a concave mirror, and output mirror 84 is a plane mirror; perhaps, reflector 81 is a plane mirror and output mirror 84 is a concave mirror; or, reflection The mirror 81 is a concave mirror, and the output mirror 84 is a concave mirror; or, the mirror 81 is replaced by a coating on the left end surface of the gain component 82, and the output mirror 84 is a concave mirror, as shown in Fig. 3-6 for details.
所述泵浦源12为连续半导体激光器或脉冲半导体激光器，当泵浦源12为光纤耦合输出的脉冲半导体激光器时，其中心波长为808nm±5nm，880nm±5nm，885nm±5nm中的一种或以上任意两种波长的组合；传能光纤2长度大于50cm，激光器壳体4体积小于80x80x430mm3，其横截面积小于80x80mm2，长度小于430mm3，泵浦系统1与激光头3的冷却方式为风冷。The pumping source 12 is a continuous semiconductor laser or a pulsed semiconductor laser. When the pumping source 12 is a fiber-coupled pulsed semiconductor laser, its central wavelength is one of 808nm ± 5nm, 880nm ± 5nm, 885nm ± 5nm or A combination of any two wavelengths above; the length of the energy transmission fiber 2 is greater than 50cm, the volume of the laser housing 4 is less than 80x80x430mm3 , its cross-sectional area is less than 80x80mm2 , and the length is less than 430mm3 , the cooling method of the pumping system 1 and the laser head 3 is wind cold.
实施例三Embodiment three
如图2所示，本实施方式公开的紫外光激光器包括：泵浦系统1、传能光纤2、激光头3，激光头3包括激光器壳体4；激光器壳体4内集成有准直镜6，聚焦镜7，反射镜81，第一增益晶体821，第二增益晶体822，被动调Q晶体83，输出镜84，二倍频晶体91、三倍频晶体92，以及集成在壳体4外的扩束镜5。As shown in Figure 2, the ultraviolet laser disclosed in this embodiment includes: a pumping system 1, an energy transmission fiber 2, and a laser head 3, and the laser head 3 includes a laser housing 4; a collimating mirror 6 is integrated in the laser housing 4 , focusing mirror 7, reflector 81, first gain crystal 821, second gain crystal 822, passive Q-switching crystal 83, output mirror 84, double frequency crystal 91, triple frequency crystal 92, and integrated outside the housing 4 The beam expander 5.
泵浦系统1由驱动源11和泵浦源12组成，驱动源11为泵浦源12供电，泵浦源12发出泵浦光，经过传能光纤2，经过准直镜6和聚焦镜7后对第一增益晶体821和第二增益晶体822进行泵浦，第一增益晶体821和第二增益晶体822产生粒子数反转，发生自发辐射，在反射镜81和输出镜84组成的谐振腔8的反馈作用下，产生受激辐射，在被动调Q晶体83的作用下产生红外脉冲激光，激光由输出镜84输出，红外脉冲激光通过二倍频晶体91以及三倍频晶体92产生紫外光激光输出，输出的激光经过扩束镜5进行准直，扩束镜5镀有具有对红外光高反，对紫外光增透的膜系，最终输出单一波长的紫外光激光。The pumping system 1 is composed of a driving source 11 and a pumping source 12. The driving source 11 supplies power to the pumping source 12. The pumping source 12 emits pumping light, passes through the energy transmission fiber 2, and passes through the collimating mirror 6 and the focusing mirror 7. The first gain crystal 821 and the second gain crystal 822 are pumped, the first gain crystal 821 and the second gain crystal 822 generate particle population inversion, and spontaneous radiation occurs, and the resonant cavity 8 composed of the reflector 81 and the output mirror 84 Under the action of feedback, stimulated radiation is generated, and infrared pulse laser is generated under the action of passive Q-switching crystal 83. The laser is output by output mirror 84, and the infrared pulse laser passes through double frequency crystal 91 and triple frequency crystal 92 to generate ultraviolet light laser. Output, the output laser is collimated by the beam expander 5, the beam expander 5 is coated with a film system with high reflection to infrared light and anti-reflection to ultraviolet light, and finally outputs a single-wavelength ultraviolet laser.
泵浦系统1的体积为293mmx195mmx95mm，内部安装驱动源11和泵浦源12驱动源11具有一路电压自适应的恒流输出，和两路温控输出，分别为泵浦源12提供电能，为泵浦源12提供制冷，为二倍频晶体91以及三倍频晶体92提供精确的温度控制，泵浦源12的输出功率为30W，在温度为25℃时，其中心波长为808nm，泵浦源12输出的泵浦光通过一条长度为2.5m，芯径400um，数值孔径为0.22的传能光纤2传输到激光器壳体4内部，激光器壳体4的体积为48mmx48mmx170mm，光纤用金属铠甲作为保护套，保护套的直径为7mm，泵浦光经过准直镜6和聚焦镜7聚焦到第一增益晶体821和第二增益晶体822中，对第一增益晶体821和第二增益晶体822进行泵浦，反射镜81的曲率半径为5000mm，镀有808nm高透和1064nm高反的膜系，被动调Q晶体83为Cr：YAG晶体，其小信号透过率为83％，输出镜84的透过率为25％，二倍频晶体91和三倍频晶体92采用临界相位匹配方式的LBO晶体，其中二倍频晶体91的切割角为为(θ＝90°Φ＝10.9°)，三倍频晶体92的切割角为(θ＝43.9°Φ＝90°)，当泵浦源12输出的泵浦功率为25W时，此时输出的红外基频光功率为9.2W,经过二倍频晶体91后得到1.8W的绿光激光和7.1W的剩余红外基频光，经过三倍频晶体92后最终获得了1.5W的355nm紫外光激光输出，经过扩束镜5后，滤掉剩余的红外基频光和绿光后，得到了发散角为1.2mrad，功率为1.3W的紫外光激光输出。如无特殊说明，本实施方式的工作原理，各部件的参数适用于以下实施例的所有紫外光激光器。The volume of the pumping system 1 is 293mmx195mmx95mm, and the driving source 11 and the pumping source 12 are installed inside. The pump source 12 provides refrigeration and provides precise temperature control for the frequency-doubler crystal 91 and the frequency-triple crystal 92. The output power of the pump source 12 is 30W. When the temperature is 25°C, its central wavelength is 808nm. 12 The output pump light is transmitted to the inside of the laser housing 4 through an energy-transmitting optical fiber 2 with a length of 2.5m, a core diameter of 400um, and a numerical aperture of 0.22. The volume of the laser housing 4 is 48mmx48mmx170mm, and the optical fiber is protected by a metal armor , the diameter of the protective cover is 7 mm, the pumping light is focused into the first gain crystal 821 and the second gain crystal 822 through the collimating mirror 6 and the focusing mirror 7, and the first gain crystal 821 and the second gain crystal 822 are pumped , the radius of curvature of reflector 81 is 5000mm, coated with 808nm high-transparency and 1064nm high-reflection film system, passive Q-switching crystal 83 is Cr: YAG crystal, its small-signal transmittance is 83%, and the transmittance of output mirror 84 is Ratio is 25%, double frequency crystal 91 and triple frequency crystal 92 adopt the LBO crystal of critical phase matching mode, wherein the cut angle of double frequency crystal 91 is (θ=90°Φ=10.9°), triple frequency The cutting angle of the crystal 92 is (θ=43.9°Φ=90°). When the pumping power output by the pumping source 12 is 25W, the output infrared fundamental frequency optical power is 9.2W. Finally, 1.8W of green laser and 7.1W of remaining infrared base frequency light are obtained, and finally 1.5W of 355nm ultraviolet light laser output is obtained after passing through the triple frequency crystal 92, and after passing through the beam expander 5, the remaining infrared base frequency is filtered out. After frequency light and green light, a UV laser output with a divergence angle of 1.2mrad and a power of 1.3W was obtained. Unless otherwise specified, the working principle of this embodiment and the parameters of each component are applicable to all ultraviolet lasers in the following embodiments.
实施例四Embodiment four
如图2所示，本实施方式公开一种双增益晶体紧凑型被动调Q紫外光激光器，包括泵浦系统1，所述泵浦系统1还耦合有依次光耦合的准直镜6、聚焦镜7、谐振腔8、二倍频晶体91和三倍频晶体92；所述泵浦系统1包括泵浦源12，给泵浦源12供电并提供制冷、为二倍频晶体91和三倍频晶体92提供温度控制的驱动源11；所述谐振腔8从聚焦镜7一侧起，依次包括光耦合的反射镜81、采用各项同性、高上能级寿命和高储能材质的第一增益晶体821、采用具备偏振特性材质的第二增益晶体822、被动调Q晶体83和输出镜84；由反射镜81和输出镜84构成的谐振腔8为稳定腔；所述输出镜84的出光面与所述二倍频晶体91耦合。所述泵浦源12通过传能光纤2与所述准直镜6光耦合。泵浦系统1与激光头3的冷却方式为风冷。As shown in Figure 2, this embodiment discloses a dual-gain crystal compact passive Q-switched ultraviolet laser, including a pumping system 1, and the pumping system 1 is also coupled with a collimating mirror 6 and a focusing mirror that are sequentially optically coupled. 7. Resonant cavity 8, frequency doubling crystal 91 and frequency doubling crystal 92; the pumping system 1 includes a pumping source 12, which supplies power to the pumping source 12 and provides cooling, and is a frequency doubling crystal 91 and a frequency doubling crystal The crystal 92 provides the drive source 11 for temperature control; the resonant cavity 8 sequentially includes an optically coupled reflector 81 from one side of the focusing mirror 7, and adopts the first material of isotropy, high upper energy level life and high energy storage material. The gain crystal 821, the second gain crystal 822 with polarization characteristic material, the passive Q-switching crystal 83 and the output mirror 84; the resonant cavity 8 composed of the reflector 81 and the output mirror 84 is a stable cavity; the light output of the output mirror 84 The surface is coupled with the double frequency crystal 91. The pumping source 12 is optically coupled to the collimating mirror 6 through the energy transmission fiber 2 . The cooling method of the pumping system 1 and the laser head 3 is air cooling.
所述驱动源11、泵浦源12安装于泵浦系统1中，为一整体；所述准直镜6、聚焦镜7、谐振腔8、二倍频晶体91和三倍频晶体92集成在同一壳体4内，所述壳体4外还固定有与所述三倍频晶体92光耦合的扩束镜5；扩束镜5镀有具有对红外光高反，对紫外光增透的膜系。The driving source 11 and the pumping source 12 are installed in the pumping system 1 as a whole; the collimating mirror 6, the focusing mirror 7, the resonant cavity 8, the frequency doubling crystal 91 and the frequency doubling crystal 92 are integrated in the In the same housing 4, a beam expander 5 optically coupled with the triple frequency crystal 92 is fixed outside the housing 4; film system.
所述第一增益晶体821为Nd：YAG晶体或Nd：YAG陶瓷晶体或YAG与Nd:YAG的键合或胶合的晶体，第二增益晶体822为Nd：YVO4晶体或YVO4与Nd：YVO4的键合或胶合的晶体；或者，第一增益晶体821为Nd：YVO4晶体或YVO4与Nd：YVO4的键合或胶合的晶体，第二增益晶体822为Nd：YAG晶体或Nd：YAG陶瓷晶体或YAG与Nd:YAG的键合或胶合的晶体，第一增益晶体821的出光面相距第二增益晶体822的入光面距离小于10mm。The first gain crystal 821 is a Nd:YAG crystal or Nd:YAG ceramic crystal or a bonded or glued crystal of YAG and Nd:YAG, and the second gain crystal 822 is a Nd:YVO4 crystal or a bond of YVO4 and Nd:YVO4 Or, the first gain crystal 821 is Nd: YVO4 crystal or YVO4 and Nd: YVO4 bonded or bonded crystal, and the second gain crystal 822 is Nd: YAG crystal or Nd: YAG ceramic crystal or YAG With Nd:YAG bonded or glued crystals, the distance between the light exit surface of the first gain crystal 821 and the light entrance surface of the second gain crystal 822 is less than 10 mm.
所述第一增益晶体821为Nd：YAG晶体，其Nd离子的掺杂浓度为0.2％-2％，第二增益晶体822为Nd：YVO4晶体，其Nd离子的掺杂浓度为0.1％-3％，或者，第一增益晶体821为Nd：YVO4晶体其Nd离子的掺杂浓度为为0.1％-2％，第一增益晶体821(10)为Nd：YAG晶体，其Nd离子的掺杂浓度为0.2％-3％。The first gain crystal 821 is Nd:YAG crystal, the doping concentration of Nd ions is 0.2%-2%, the second gain crystal 822 is Nd:YVO4 crystal, the doping concentration of Nd ions is 0.1%-3% %, or, the first gain crystal 821 is Nd: YVO The doping concentration of its Nd ion is 0.1%-2%, and the first gain crystal 821 (10) is Nd: YAG crystal, the doping concentration of its Nd ion 0.2%-3%.
所述被动调Q晶体83为Cr:YAG、V:YAG、半导体饱和吸收体、石墨烯中的任意一种，被动调Q晶体83的初始透过率为10％-95％。The passive Q-switching crystal 83 is any one of Cr:YAG, V:YAG, semiconductor saturable absorber, and graphene, and the initial transmittance of the passive Q-switching crystal 83 is 10%-95%.
所述反射镜81、输出镜84中至少一个为凹面镜。具体来说，反射镜81和输出镜84构成的谐振腔8为稳定腔，反射镜81为凹面镜，输出镜84为平面镜；或者，反射镜81为平面镜输出镜84为凹面镜；或者，反射镜81为凹面镜，输出镜84为凹面镜；或者，反射镜81由第一增益晶体821的左端面镀膜代替，输出镜84为凹面镜，具体参见图3-6所示。At least one of the reflecting mirror 81 and the output mirror 84 is a concave mirror. Specifically, the resonant cavity 8 formed by reflector 81 and output mirror 84 is a stable cavity, reflector 81 is a concave mirror, and output mirror 84 is a plane mirror; perhaps, reflector 81 is a plane mirror and output mirror 84 is a concave mirror; or, reflection The mirror 81 is a concave mirror, and the output mirror 84 is a concave mirror; or, the reflecting mirror 81 is replaced by a coating on the left end surface of the first gain crystal 821, and the output mirror 84 is a concave mirror, as shown in Fig. 3-6 for details.
所述二倍频晶体91为LBO晶体、KTP晶体、BBO晶体、BiBO晶体、CLBO晶体、PPLN晶体，匹配方式可采用临界相位匹配或非临界相位匹配，三倍频晶体92为LBO晶体、BBO晶体、BiBO晶体、CLBO晶体、KDP晶体，匹配方式可采用临界相位匹配或非临界相位匹配。The double frequency crystal 91 is LBO crystal, KTP crystal, BBO crystal, BiBO crystal, CLBO crystal, PPLN crystal, the matching method can adopt critical phase matching or non-critical phase matching, and the triple frequency crystal 92 is LBO crystal, BBO crystal , BiBO crystal, CLBO crystal, KDP crystal, the matching method can adopt critical phase matching or non-critical phase matching.
传能光纤2长度大于50cm，激光器壳体4体积小于80x80x430mm3，其横截面积小于80x80mm2，长度小于430mm3。所述泵浦源12为连续半导体激光器或脉冲半导体激光器，当泵浦源12为光纤耦合输出的脉冲半导体激光器时，其中心波长为808nm±5nm，880nm±5nm，885nm±5nm中的一种或以上任意两种波长的组合。The energy transmitting optical fiber 2 is longer than 50cm, the volume of the laser housing 4 is less than 80x80x430mm3 , the cross-sectional area is less than 80x80mm2 , and the length is less than 430mm3 . The pumping source 12 is a continuous semiconductor laser or a pulsed semiconductor laser. When the pumping source 12 is a fiber-coupled pulsed semiconductor laser, its central wavelength is one of 808nm ± 5nm, 880nm ± 5nm, 885nm ± 5nm or A combination of any two of the above wavelengths.
实施例五Embodiment five
如图1、8所示，本实施方式公开一种平凹腔被动调Q激光器，包括泵浦系统1，与泵浦系统1依次光耦合的准直镜6、聚焦镜7、谐振腔8，所述谐振腔8从聚焦镜7一侧起，依次包括光耦合的反射镜81、增益组件82、被动调Q晶体83和输出镜84；所述输出镜84出光面依次耦合有非线性晶体9和扩束镜5；所述泵浦系统1包括泵浦源12，给泵浦源12供电并提供制冷、为非线性晶体9提供温度控制的驱动源11；所述反射镜81、输出镜84中至少一个为凹面镜。一般来说，激光器的腔长范围为10mm-300mm，如果以凹面镜为坐标原点的话，其范围应为0-L/2，L为腔长。As shown in Figures 1 and 8, this embodiment discloses a flat-cavity passive Q-switched laser, including a pumping system 1, a collimating mirror 6, a focusing mirror 7, and a resonant cavity 8 that are sequentially optically coupled to the pumping system 1, From the side of the focusing mirror 7, the resonant cavity 8 sequentially includes an optically coupled reflector 81, a gain component 82, a passive Q-switching crystal 83, and an output mirror 84; the output mirror 84 is sequentially coupled with a nonlinear crystal 9 and beam expander 5; the pumping system 1 includes a pumping source 12, which supplies power to the pumping source 12 and provides refrigeration, and provides a drive source 11 for temperature control of the nonlinear crystal 9; the reflector 81, the output mirror 84 At least one of them is a concave mirror. Generally speaking, the laser cavity length ranges from 10mm to 300mm. If the concave mirror is used as the coordinate origin, the range should be 0-L/2, where L is the cavity length.
实现上述反射镜81、输出镜84的凹面镜子，包括但不局限于以下方式：Realize the concave mirror of above-mentioned mirror 81, output mirror 84, include but not limited to the following ways:
方案一、如图3所示，所述第一增益晶体821的入光面镀膜，形成所述反射镜81；所述输出镜84为凹面镜。Solution 1: As shown in FIG. 3 , the incident surface of the first gain crystal 821 is coated to form the reflection mirror 81 ; the output mirror 84 is a concave mirror.
方案二、如图4所示，所述反射镜81为凹面镜，输出镜84为平面镜。Solution 2. As shown in FIG. 4 , the reflecting mirror 81 is a concave mirror, and the output mirror 84 is a plane mirror.
方案三、如图5所示，所述反射镜81为平面镜，输出镜84为凹面镜。Solution 3. As shown in FIG. 5 , the reflecting mirror 81 is a plane mirror, and the output mirror 84 is a concave mirror.
方案四、如图6所示，所述反射镜81和输出镜84均为凹面镜。Solution 4. As shown in FIG. 6 , the reflecting mirror 81 and the output mirror 84 are both concave mirrors.
如果激光器为紫外光激光器。所述增益组件82包括采用各项同性、高上能级寿命和高储能材质的第一增益晶体821和采用具备偏振特性材质的第二增益晶体822；所述第一增益晶体821和第二增益晶体822光耦合。If the laser is an ultraviolet laser. The gain component 82 includes a first gain crystal 821 using isotropic, high upper energy level lifetime and high energy storage materials and a second gain crystal 822 using a material with polarization characteristics; the first gain crystal 821 and the second gain crystal 821 A gain crystal 822 is optically coupled.
所述第一增益晶体821为Nd：YAG晶体或Nd：YAG陶瓷晶体或YAG与Nd:YAG的键合或胶合的晶体，第二增益晶体822为Nd：YVO4晶体或YVO4与Nd：YVO4的键合或胶合的晶体；或者，第一增益晶体821为Nd：YVO4晶体或YVO4与Nd：YVO4的键合或胶合的晶体，第二增益晶体822为Nd：YAG晶体或Nd：YAG陶瓷晶体或YAG与Nd:YAG的键合或胶合的晶体，第一增益晶体821的出光面相距第二增益晶体822的入光面距离小于10mm。所述被动调Q晶体83为Cr:YAG、V:YAG、半导体饱和吸收体、石墨烯中的任意一种，被动调Q晶体83的初始透过率为10％-95％。The first gain crystal 821 is a Nd:YAG crystal or Nd:YAG ceramic crystal or a bonded or glued crystal of YAG and Nd:YAG, and the second gain crystal 822 is a Nd:YVO4 crystal or a bond of YVO4 and Nd:YVO4 Or, the first gain crystal 821 is Nd: YVO4 crystal or YVO4 and Nd: YVO4 bonded or bonded crystal, and the second gain crystal 822 is Nd: YAG crystal or Nd: YAG ceramic crystal or YAG With Nd:YAG bonded or glued crystals, the distance between the light exit surface of the first gain crystal 821 and the light entrance surface of the second gain crystal 822 is less than 10 mm. The passive Q-switching crystal 83 is any one of Cr:YAG, V:YAG, semiconductor saturable absorber, and graphene, and the initial transmittance of the passive Q-switching crystal 83 is 10%-95%.
所述非线性晶体9从输出镜84一侧起，依次包括二倍频晶体91和三倍频晶体92；所述二倍频晶体91为LBO晶体、KTP晶体、BBO晶体、BiBO晶体、CLBO晶体、PPLN晶体，匹配方式可采用临界相位匹配或非临界相位匹配，三倍频晶体92为LBO晶体、BBO晶体、BiBO晶体、CLBO晶体、KDP晶体，匹配方式可采用临界相位匹配或非临界相位匹配。The nonlinear crystal 9 includes a frequency-doubler crystal 91 and a frequency-triple crystal 92 successively from the side of the output mirror 84; the frequency-doubler crystal 91 is an LBO crystal, a KTP crystal, a BBO crystal, a BiBO crystal, and a CLBO crystal. , PPLN crystal, the matching method can adopt critical phase matching or non-critical phase matching, the frequency tripler crystal 92 is LBO crystal, BBO crystal, BiBO crystal, CLBO crystal, KDP crystal, the matching method can adopt critical phase matching or non-critical phase matching .
所述泵浦源12为连续半导体激光器或脉冲半导体激光器，当泵浦源12为光纤耦合输出的脉冲半导体激光器时，其中心波长为808nm±5nm，880nm±5nm，885nm±5nm中的一种或以上任意两种波长的组合；传能光纤2长度大于50cm，激光器壳体4体积小于80x80x430mm3，其横截面积小于80x80mm2，长度小于430mm3，泵浦系统1与激光头3的冷却方式为风冷。The pumping source 12 is a continuous semiconductor laser or a pulsed semiconductor laser. When the pumping source 12 is a fiber-coupled pulsed semiconductor laser, its central wavelength is one of 808nm ± 5nm, 880nm ± 5nm, 885nm ± 5nm or A combination of any two wavelengths above; the length of the energy transmission fiber 2 is greater than 50cm, the volume of the laser housing 4 is less than 80x80x430mm3 , its cross-sectional area is less than 80x80mm2 , and the length is less than 430mm3 , the cooling method of the pumping system 1 and the laser head 3 is wind cold.
如果激光器为紫外光激光器，还可以有另外一种实施方案。Another embodiment is possible if the laser is an ultraviolet laser.
所述第一增益晶体821为所述第一增益晶体821为Nd：YAG晶体，其Nd离子的掺杂浓度为0.2％-2％，第二增益晶体822为Nd：YVO4晶体，其Nd离子的掺杂浓度为0.1％-3％，Nd：YAG的长度为1mm-15mm，Nd：YVO4晶体长度为1-15mm。或者，第一增益晶体821为Nd：YVO4晶体其Nd离子的掺杂浓度为为0.1％-2％，第一增益晶体821(10)为Nd：YAG晶体，其Nd离子的掺杂浓度为0.2％-3％；The first gain crystal 821 is Nd:YAG crystal, the doping concentration of Nd ions is 0.2%-2%, and the second gain crystal 822 is Nd:YVO4 crystal, the doping concentration of Nd ions is The doping concentration is 0.1%-3%, the length of Nd:YAG is 1mm-15mm, and the length of Nd:YVO4 crystal is 1-15mm. Or, the first gain crystal 821 is Nd: YVO Crystal whose Nd ion doping concentration is 0.1%-2%, and the first gain crystal 821 (10) is Nd: YAG crystal, whose Nd ion doping concentration is 0.2% %-3%;
所述被动调Q晶体83为Cr:YAG、V:YAG、半导体饱和吸收体、石墨烯中的任意一种，被动调Q晶体83的初始透过率为10％-95％；The passive Q-switching crystal 83 is any one of Cr:YAG, V:YAG, semiconductor saturable absorber, and graphene, and the initial transmittance of the passive Q-switching crystal 83 is 10%-95%;
所述非线性晶体9从输出镜84一侧起，依次包括二倍频晶体91和三倍频晶体92；所述二倍频晶体91为LBO晶体、KTP晶体、BBO晶体、BiBO晶体、CLBO晶体、PPLN晶体，匹配方式可采用临界相位匹配或非临界相位匹配，三倍频晶体92为LBO晶体、BBO晶体、BiBO晶体、CLBO晶体、KDP晶体，匹配方式可采用临界相位匹配或非临界相位匹配；所述泵浦源12为连续半导体激光器或脉冲半导体激光器，当泵浦源12为光纤耦合输出的脉冲半导体激光器时，其中心波长为808nm±5nm，880nm±5nm，885nm±5nm中的一种或以上任意两种波长的组合；传能光纤2长度大于50cm，激光器壳体4体积小于80x80x430mm3，其横截面积小于80x80mm2，长度小于430mm3，泵浦系统1与激光头3的冷却方式为风冷。The nonlinear crystal 9 includes a frequency-doubler crystal 91 and a frequency-triple crystal 92 successively from the side of the output mirror 84; the frequency-doubler crystal 91 is an LBO crystal, a KTP crystal, a BBO crystal, a BiBO crystal, and a CLBO crystal. , PPLN crystal, the matching method can adopt critical phase matching or non-critical phase matching, the frequency tripler crystal 92 is LBO crystal, BBO crystal, BiBO crystal, CLBO crystal, KDP crystal, the matching method can adopt critical phase matching or non-critical phase matching ; The pumping source 12 is a continuous semiconductor laser or a pulsed semiconductor laser, and when the pumping source 12 is a pulsed semiconductor laser output by fiber coupling, its central wavelength is one of 808nm ± 5nm, 880nm ± 5nm, and 885nm ± 5nm Or a combination of any two of the above wavelengths; the length of the energy transmission fiber 2 is greater than 50cm, the volume of the laser housing 4 is less than 80x80x430mm3 , its cross-sectional area is less than 80x80mm2 , and the length is less than 430mm3 , the cooling method of the pumping system 1 and the laser head 3 For air cooling.
实施例六Embodiment six
如图7所示，本实施方式公开一种采用高温角度匹配非线性晶体的被动调Q激光器，包括泵浦系统1，与泵浦系统1依次光耦合的准直镜6、聚焦镜7、谐振腔8，所述谐振腔8从聚焦镜7一侧起，依次包括光耦合的反射镜81、增益组件82、被动调Q晶体83和输出镜84；所述输出镜84出光面依次耦合有非线性晶体9和扩束镜5，非线性晶体9匹配的温度大于室温。优选的，非线性晶体9匹配的温度大于等于40℃，小于等于60℃。比如45℃、48℃、52℃、55℃、57℃等。更优的选择，非线性晶体9匹配的温度等于50度。As shown in FIG. 7 , this embodiment discloses a passive Q-switched laser using a high-temperature angle-matched nonlinear crystal, including a pumping system 1, a collimating mirror 6, a focusing mirror 7, and a resonator optically coupled to the pumping system 1 in sequence. Cavity 8, the resonant cavity 8, starting from the focusing mirror 7 side, sequentially includes an optically coupled reflector 81, a gain component 82, a passive Q-switching crystal 83, and an output mirror 84; the output mirror 84 is sequentially coupled with non- The matching temperature of the linear crystal 9 and the beam expander 5 and the nonlinear crystal 9 is greater than room temperature. Preferably, the matching temperature of the nonlinear crystal 9 is greater than or equal to 40°C and less than or equal to 60°C. For example, 45°C, 48°C, 52°C, 55°C, 57°C, etc. More optimally, the temperature matched by the nonlinear crystal 9 is equal to 50 degrees.
非线性晶体一般采用两种方式进行匹配。一种是温度匹配，一般折射率随温度有明显变化的非线性晶体适合于温度匹配，温度匹配对温度的控制的要求非常严格，一般精度要小于+/-0.1摄氏度，并且很多晶体的匹配温度较高，超过150摄氏度，需要精度较高的温控炉，增加了成本。相比之下另一种非线性晶体匹配方式，即角度匹配较为方便，这种匹配方式是先设置好非线性晶体的使用温度，然后根据这个温度进行匹配角计算，最后按照这个匹配角对晶体进行切割，切割出来的晶体只有在之前设置的那个温度下使用，效率才能最高，这种方式匹配的晶体在工作时使用比较方便，对温度的控制精度要求也没有那么高，因此系统较为简单。Generally, nonlinear crystals are matched in two ways. One is temperature matching. Generally, nonlinear crystals whose refractive index changes significantly with temperature are suitable for temperature matching. Temperature matching has very strict requirements on temperature control, and the general accuracy is less than +/-0.1 degrees Celsius, and the matching temperature of many crystals Higher, more than 150 degrees Celsius, requires a temperature-controlled furnace with higher precision, which increases the cost. In contrast, another nonlinear crystal matching method, that is, angle matching is more convenient. This matching method is to set the operating temperature of the nonlinear crystal first, then calculate the matching angle according to this temperature, and finally adjust the crystal according to this matching angle. After cutting, the cut crystals can only be used at the previously set temperature to have the highest efficiency. The crystals matched in this way are more convenient to use during work, and the requirements for temperature control accuracy are not so high, so the system is relatively simple.
但是现有技术中常规的角度匹配方式，一般晶体的相位匹配角都采用匹配室温(本申请所称室温是指室内温度，根据地域环境不同存在差异一般是指25℃)的切割方式，这种方式会有不足之处：However, in the conventional angle matching method in the prior art, the phase matching angle of the general crystal adopts the cutting method of matching the room temperature (the room temperature in this application refers to the indoor temperature, and there is a difference according to the regional environment, which generally refers to 25°C). The method has disadvantages:
首先，匹配室温切割方式得到的角度匹配非线性晶体在工作时会需要双向的温度控制，即在夏天使用时需要制冷，冬天使用时需要加热，极大增加了系统的复杂性。First of all, the angle-matching nonlinear crystal obtained by matching the room temperature cutting method requires two-way temperature control during operation, that is, cooling is required when used in summer, and heating is required when used in winter, which greatly increases the complexity of the system.
其次，由于激光通过非线性晶体时和没有激光通过非线性晶体时，该晶体的温度有较大的变化，需要较长的温度平衡时间，导致首脉冲序列的能量不足，使加工效果不稳定。假设匹配温度为25℃时其接受温度为+/-1℃，只有在这个温度范围内，其倍频的效率才比较高，如温度不在此范围则倍频效率会下降，出激光的时候激光穿过非线性晶体部分的温度会急剧上升，例如上升至40℃，在不出激光的时候其温度又会迅速降低至25℃，这时出激光和不出激光时温度差的比较大，因此在不出激光到出激光的一瞬间需要一段的温度平衡时间，这段时间会导致首脉冲序列能量不足，响应速度慢，使加工效果不稳定，且要在短时间内平衡温差，造成控制电路复杂，推高成本。而本实用新型采用高温角度匹配方式则解决了上述问题，例如，假设采用高温角度匹配(以50℃匹配为例)的非线性晶体，该非线性晶体的切割角为(θ＝90°Φ＝10.9°)，其接受温度为+/-1℃，则出激光时为51℃，不出激光的时候为49℃，避免了室温匹配情况下，从室温25℃上升到工作温度50℃所需要的温度平衡时间并且接近非线性晶体的最佳工作温度，因此采用高温匹配时其出激光和不出激光的状态相差较小，可以让非线性晶体更快进入最佳工作温度，使得响应速度明显加快，且调温范围小，也有利于简化控制电路，降低成本。最后，由于能够充分利用了激光通过非线性晶体时产生的能量来提高非线性晶体的温度，因此，采用高温角度匹配的方式还能够进一步降低能耗。Secondly, when the laser passes through the nonlinear crystal and when the laser does not pass through the nonlinear crystal, the temperature of the crystal changes greatly, requiring a long time for temperature equilibrium, resulting in insufficient energy of the first pulse sequence, making the processing effect unstable. Assuming that the matching temperature is 25°C, the acceptance temperature is +/-1°C. Only within this temperature range, the frequency doubling efficiency is relatively high. If the temperature is not in this range, the frequency doubling efficiency will decrease. When the laser is emitted The temperature of the part passing through the nonlinear crystal will rise sharply, for example, to 40°C, and its temperature will drop rapidly to 25°C when the laser is not out. At this time, the temperature difference between the laser and the laser is relatively large, so It takes a period of temperature balance time from the moment when the laser is not released to the laser is released. This period of time will lead to insufficient energy in the first pulse sequence, slow response speed, and unstable processing effect. In addition, it is necessary to balance the temperature difference in a short time, causing the control circuit Complexity drives up costs. And the utility model adopts the high-temperature angle matching mode and then solves the above-mentioned problem, for example, suppose adopts the nonlinear crystal of high-temperature angle matching (with 50 ℃ matching as example), the cutting angle of this nonlinear crystal is (θ=90°Φ= 10.9°), its acceptance temperature is +/-1°C, then it is 51°C when the laser is out, and 49°C when the laser is not out, avoiding the need to rise from room temperature 25°C to working temperature 50°C under the condition of room temperature matching The temperature equilibrium time is short and close to the optimal working temperature of the nonlinear crystal, so when the high temperature matching is used, the difference between the state of laser emission and the state of laser emission is small, which can make the nonlinear crystal enter the optimal operating temperature faster, making the response speed obvious Faster, and the temperature adjustment range is small, which is also conducive to simplifying the control circuit and reducing costs. Finally, since the energy generated when the laser passes through the nonlinear crystal can be fully utilized to increase the temperature of the nonlinear crystal, the high temperature angle matching method can further reduce energy consumption.
实施例七Embodiment seven
如图2所示，本实施方式公开一种双第一增益晶体紧凑型被动调Q紫外光激光器，包括泵浦系统1，所述泵浦系统1还耦合有依次光耦合的准直镜6、聚焦镜7、谐振腔8、二倍频晶体91和三倍频晶体92；所述泵浦系统1包括泵浦源12，给泵浦源12供电并提供制冷、为二倍频晶体91和三倍频晶体92提供温度控制的驱动源11；所述谐振腔8从聚焦镜7一侧起，依次包括光耦合的反射镜81、采用各项同性、高上能级寿命和高储能材质的第一增益晶体821、采用具备偏振特性材质的第二增益晶体822、被动调Q晶体83和输出镜84；由反射镜81和输出镜84构成的谐振腔8为稳定腔；所述输出镜84的出光面与所述二倍频晶体91耦合。As shown in Figure 2, this embodiment discloses a compact passive Q-switched ultraviolet laser with dual first gain crystals, including a pumping system 1, and the pumping system 1 is also coupled with a collimating mirror 6, which is sequentially optically coupled, Focusing mirror 7, resonant cavity 8, double frequency crystal 91 and triple frequency crystal 92; described pumping system 1 includes pump source 12, supplies power to pump source 12 and provides refrigeration, double frequency crystal 91 and three The frequency doubling crystal 92 provides a temperature-controlled drive source 11; the resonant cavity 8 includes optically coupled reflectors 81 from one side of the focusing mirror 7, and isotropic, high upper energy level life and high energy storage materials. The first gain crystal 821, the second gain crystal 822 with polarization characteristic material, the passive Q-switching crystal 83 and the output mirror 84; the resonant cavity 8 formed by the reflection mirror 81 and the output mirror 84 is a stable cavity; the output mirror 84 The light-emitting surface of the is coupled with the double frequency crystal 91.
目前所有的技术方案都采用一块晶体作为第一增益晶体821，如要么采用采用各项同性、高上能级寿命和高储能材质的第一增益晶体821(以下以Nd：YAG晶体为例分析)；要么采用具备偏振特性材质的第一增益晶体821(以下以Nd：YVO4晶体为例分析)；由于Nd：YAG晶体为各项同性晶体，其输出的基频光不具有偏振性，从而使后续的非线性频率变换的效率较低，但Nd：YAG晶体上能级寿命长，储能大，在被动调Q时可以获得很高的峰值功率，而采用Nd：YVO4晶体作为第一增益晶体821虽然发射的基频光具有很好的偏振特性，但由于Nd：YVO4晶体的受激截面大，上能级寿命较短，储能小，因此在被动调Q情形下，发射的基频光的峰值功率不高，这也影响了其后续非线性频率变换的效率，为了弥补两种情形的不足，本实用新型采用类似于Nd：YAG+Nd：YVO4的双第一增益晶体821方案，并且两者晶体具有对泵浦光基本相同的吸收峰(808.5nm和810nm)，因此采用单一泵浦源12即可满足对两种第一增益晶体821的抽运，相同的发射峰(1064nm)，因此采用本实用新型的双第一增益晶体821会使发射的基频光在Nd：YVO4晶体的偏振发射方向上具有明显的模式竞争优势，从而使输出的基频光具有很好的偏振性；由于非线性晶体要求输入为偏振光，因此，本方案更有利于提高非线性晶体的工作效率。At present, all technical solutions use a crystal as the first gain crystal 821, such as using the first gain crystal 821 with isotropy, high upper energy level life and high energy storage material (the following uses Nd:YAG crystal as an example for analysis) ); or adopt the first gain crystal 821 with polarization characteristic material (below taking Nd:YVO4 crystal as an example); because Nd:YAG crystal is an isotropic crystal, the fundamental frequency light of its output has no polarization, so that The efficiency of the subsequent nonlinear frequency conversion is low, but the Nd:YAG crystal has a long lifetime of the energy level and large energy storage, and can obtain high peak power during passive Q-switching, and the Nd:YVO4 crystal is used as the first gain crystal Although the fundamental frequency light emitted by 821 has good polarization characteristics, due to the large excited cross-section of the Nd:YVO4 crystal, the upper energy level life is short, and the energy storage is small, so in the case of passive Q-switching, the emitted fundamental frequency light The peak power is not high, which also affects the efficiency of its subsequent nonlinear frequency conversion. In order to make up for the shortcomings of the two situations, the utility model adopts a dual first gain crystal 821 scheme similar to Nd:YAG+Nd:YVO4, and The two crystals have basically the same absorption peaks (808.5nm and 810nm) for the pump light, so a single pump source 12 can satisfy the pumping of the two first gain crystals 821, the same emission peak (1064nm), Therefore, the adoption of the double first gain crystal 821 of the present invention will make the emitted fundamental frequency light have obvious mode competitive advantages in the polarized emission direction of the Nd:YVO4 crystal, so that the output fundamental frequency light has good polarization; Since the nonlinear crystal requires the input to be polarized light, this solution is more conducive to improving the working efficiency of the nonlinear crystal.
实施例八Embodiment eight
如图7所示，本实施方式公开平凹腔被动调Q激光器，包括泵浦系统1，与泵浦系统1依次光耦合的准直镜6、聚焦镜7、谐振腔8，所述谐振腔8从聚焦镜7一侧起，依次包括光耦合的反射镜81、增益组件82、被动调Q晶体83和输出镜84；所述输出镜84出光面依次耦合有非线性晶体9和扩束镜5；所述泵浦系统1包括泵浦源12，给泵浦源12供电并提供制冷、为非线性晶体9提供温度控制的驱动源11；所述反射镜81、输出镜84中至少一个为凹面镜。As shown in FIG. 7 , this embodiment discloses a flat-cavity passive Q-switched laser, including a pumping system 1, a collimating mirror 6, a focusing mirror 7, and a resonant cavity 8 that are sequentially optically coupled to the pumping system 1. The resonant cavity 8 From the side of the focusing mirror 7, it includes an optically coupled reflector 81, a gain component 82, a passive Q-switching crystal 83, and an output mirror 84 in sequence; the output surface of the output mirror 84 is sequentially coupled with a nonlinear crystal 9 and a beam expander 5; the pumping system 1 includes a pumping source 12, which supplies power to the pumping source 12 and provides cooling, and provides a driving source 11 for temperature control of the nonlinear crystal 9; at least one of the reflecting mirror 81 and the output mirror 84 is concave mirror.
目前所有的技术方案的反射镜81和输出镜84都采用的是平面结构，即其构成的谐振腔8为平平腔。图9所示为平平腔中，腔内的光斑半径随热透镜焦距的变化的曲线示意图；该谐振腔8的腔长为70mm，可以看出当热焦距从5000mm变化到80mm时，腔内的光斑半径从0.42mm变化到0.12mm，变化范围比较大。而本实用新型反射镜81、输出镜84中至少一个为凹面镜，形成的为平凹腔，如图10所示，凹面镜R＝500mm，腔长也为70mm，腔内的光斑半径从0.25mm变化到0.11mm，相对平平腔其光斑变化较小，对热效应不敏感。热焦距与泵浦功率的关系如下：The reflecting mirror 81 and the output mirror 84 of all current technical solutions adopt a planar structure, that is, the resonant cavity 8 formed by them is a planar cavity. Fig. 9 shows in the flat cavity, the curve diagram of the variation of the spot radius in the cavity with the thermal lens focal length; The spot radius changes from 0.42mm to 0.12mm, and the range of change is relatively large. And at least one is concave mirror in reflector 81 of the present utility model, output mirror 84, what form is flat concave cavity, as shown in Figure 10, concave mirror R=500mm, cavity length also is 70mm, and the light spot radius in the cavity is from 0.25 mm changes to 0.11mm, compared with the flat cavity, the spot change is small, and it is not sensitive to thermal effects. The relationship between thermal focal length and pump power is as follows:
δPin＝ηPpumpδPin = ηPpump
其中η为热转换率，Ppump为泵浦功率。Where η is the heat conversion rate, and Ppump is the pump power.
以上内容是结合具体的优选实施方式对本实用新型所作的进一步详细说明，不能认定本实用新型的具体实施只局限于这些说明。对于本实用新型所属技术领域的普通技术人员来说，在不脱离本实用新型构思的前提下，还可以做出若干简单推演或替换，都应当视为属于本实用新型的保护范围。The above content is a further detailed description of the utility model in combination with specific preferred embodiments, and it cannot be assumed that the specific implementation of the utility model is only limited to these descriptions. For a person of ordinary skill in the technical field to which the utility model belongs, without departing from the concept of the utility model, some simple deduction or substitutions can also be made, which should be regarded as belonging to the protection scope of the utility model.
| Application Number | Priority Date | Filing Date | Title |
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| CN201520146614.0UCN204464748U (en) | 2015-03-13 | 2015-03-13 | A separate passive Q-switched ultraviolet laser |
| Application Number | Priority Date | Filing Date | Title |
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| CN201520146614.0UCN204464748U (en) | 2015-03-13 | 2015-03-13 | A separate passive Q-switched ultraviolet laser |
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| CN204464748Utrue CN204464748U (en) | 2015-07-08 |
| Application Number | Title | Priority Date | Filing Date |
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| CN201520146614.0UExpired - LifetimeCN204464748U (en) | 2015-03-13 | 2015-03-13 | A separate passive Q-switched ultraviolet laser |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104701720A (en)* | 2015-03-13 | 2015-06-10 | 李斌 | Split type passively Q-switched UV-light laser device and laser generation method thereof |
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104701720A (en)* | 2015-03-13 | 2015-06-10 | 李斌 | Split type passively Q-switched UV-light laser device and laser generation method thereof |
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| TR01 | Transfer of patent right | Effective date of registration:20180521 Address after:300000 room 266 and 273, science research west road, Nankai District, Tianjin (Science and Technology Park), 12 Patentee after:Tianjin Mayman Laser Technology Co.,Ltd. Address before:No. 54 red sun Road, Nankai District, Tianjin, Tianjin Co-patentee before:Sun Bing Patentee before:Li Bin | |
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