Disclosure of Invention
The invention aims to provide a rapid actuator, which solves the defects of the prior shape memory alloy actuator in the aspects of response speed, output force, displacement control precision, energy conversion efficiency and the like, and meets the requirements of various fields on high-performance actuators.
In order to achieve the above purpose, the present invention provides the following technical solutions:
The present invention provides a quick actuator comprising:
An electrostatic adsorption film;
the double-pass shape memory alloy layer is positioned on the surface of the electrostatic adsorption film, and one end of the double-pass shape memory alloy layer can rotate relative to the electrostatic adsorption film;
The temperature control unit is used for heating the double-pass shape memory alloy layer and controlling the temperature of the double-pass shape memory alloy layer;
And the electric field control unit is used for applying voltage between the electrostatic adsorption film and the double-pass shape memory alloy layer so as to form electrostatic adsorption force between the electrostatic adsorption film and the double-pass shape memory alloy layer.
Preferably, the electrostatic adsorption film includes:
A conductor layer;
The first insulating layer is positioned on the surface of the conductor layer;
The second insulating layer is positioned on the surface of the conductor layer far away from the first insulating layer;
the double-pass shape memory alloy layer is positioned on the surface of the first insulating layer, and one end of the double-pass shape memory alloy layer can rotate relative to the first insulating layer.
Preferably, the temperature control unit includes:
a heating film layer positioned on the two-way shape memory alloy layer;
and the positive electrode and the negative electrode of the first power supply are respectively connected with the two ends of the heating film layer and are used for applying voltage to the heating film layer.
Preferably, the electric field control unit includes:
and the positive electrode and the negative electrode of the second power supply are respectively connected with the conductor layer and the double-pass shape memory alloy layer and are used for applying voltage between the conductor layer and the double-pass shape memory alloy layer.
Preferably, the temperature control unit further includes:
a temperature sensor located on the two-way shape memory alloy layer for monitoring the temperature of the two-way shape memory alloy layer.
Preferably, the temperature control unit further includes:
and the temperature controller is electrically connected with the temperature sensor and the first power supply and is used for controlling the double-pass shape memory alloy layer to be heated to a set temperature.
Preferably, the electric field control unit further includes:
and the capacitance measuring unit is used for monitoring the capacitance intensity between the conductor layer and the two-way shape memory alloy layer.
Preferably, the method further comprises:
a base;
The second insulating layer is attached to the base.
Preferably, the material of the conductor layer includes at least one of a metal material, a carbon-based material, and a conductive polymer material.
Preferably, the materials of the first insulating layer and the second insulating layer comprise at least one of polyimide, ceramic, polyethylene and polytetrafluoroethylene.
Compared with the prior art, the quick actuator has the following beneficial effects:
1. The rapid actuator of the invention couples the double-pass shape memory alloy with the electrostatic adsorption technology, combines the advantages of the two, and develops a novel actuator with rapid response, high-precision control and larger output force; the working principle of the quick actuator is that when the actuator works, the temperature control unit firstly heats or cools the double-pass shape memory alloy layer according to a preset program to enable the double-pass shape memory alloy layer to generate phase change force to cause shape change of alloy parts, the process can realize displacement output of a larger stroke, after the double-pass shape memory alloy layer stops heating, the electric field control unit applies voltage between the electrostatic adsorption film and the double-pass shape memory alloy layer to generate electrostatic adsorption force, the electrostatic adsorption force can quickly respond in a short time, the double-pass shape memory alloy layer can quickly recover and lock, and therefore the actuator can meet the requirements on response speed and displacement precision under different working conditions;
2. The quick actuator has the advantages that the electrostatic adsorption force can be instantaneously generated and acted on the actuator structure and combined with the cooling recovery process of the double-pass shape memory alloy layer, so that the response speed of the actuator is obviously improved, the actuation and recovery can be completed in a short time, and the application scene with higher requirement on the response speed is met;
3. the quick actuator can accurately control the phase change degree and the electrostatic adsorption force of the double-pass shape memory alloy layer by accurately regulating and controlling the temperature and the electric field parameters, thereby realizing the quick actuation and the recovery requirements of the actuator, accurately controlling the output force and the displacement, and meeting the requirements of accurate operation, such as minimally invasive surgical instrument control in the biomedical field;
4. The quick actuator has larger output force, the two-way shape memory alloy layer can generate larger force in the phase change process, and the two-way shape memory alloy layer and the electrostatic adsorption force cooperate to ensure that the actuator can output enough force to drive heavier load, thereby expanding the application range of the quick actuator, and having potential application value in the aspects of deformation control of wings of aircrafts in the aerospace field, for example;
5. According to the rapid actuator, the structure and the control strategy of the actuator are reasonably designed, so that the phase transformation energy and the electrostatic adsorption energy of the double-pass shape memory alloy layer are fully utilized, the energy loss is reduced, the energy conversion efficiency is improved, the running cost is reduced, and the rapid actuator is more competitive in practical application;
6. The rapid actuator provided by the invention has a plurality of advantages, can be widely applied to the fields of medical appliances, robots, aerospace, micro-electromechanical systems and the like, meets the requirements of various fields on high-performance actuators, and has wide application prospects and important practical values.
Detailed Description
The following description of the embodiments of the present invention will be made in detail and with reference to the embodiments of the present invention, but it should be apparent that the described embodiments are only some embodiments of the present invention, and not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, are intended to fall within the scope of the present invention.
It should be noted that like reference numerals and letters refer to like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
As used herein, the singular forms "a", "an", "the" and "the" are intended to include the plural forms as well, unless expressly stated otherwise, as understood by those skilled in the art. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. It will be understood that when an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. Further, "connected" as used herein may include wireless connections. The term "and/or" as used herein includes all or any element and all combination of one or more of the associated listed items.
In the present application, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.
It should be understood that, although the terms first, second, etc. may be used in this disclosure to describe various information, these information should not be limited by these terms. These terms are only used to distinguish one type of information from another.
The present invention provides a quick actuator, as shown in fig. 1 to 7, comprising:
An electrostatic adsorption film 1;
The double-pass shape memory alloy layer 2 is positioned on the surface of the electrostatic adsorption film 1, and one end of the double-pass shape memory alloy layer 2 can rotate relative to the electrostatic adsorption film 1;
A temperature control unit for heating the two-way shape memory alloy layer 2 and controlling the temperature thereof;
and the electric field control unit is used for applying voltage between the electrostatic adsorption film 1 and the double-pass shape memory alloy layer 2 so as to form electrostatic adsorption force between the electrostatic adsorption film and the double-pass shape memory alloy layer.
The quick actuator comprises an electrostatic adsorption film 1, a double-pass shape memory alloy layer 2, a temperature control unit and an electric field control unit, wherein the double-pass shape memory alloy layer 2 is made of alloy materials subjected to special training treatment, has a stable double-pass shape memory effect, can generate reversible shape change when temperature changes so as to output phase change force, is designed according to specific application requirements in shape and size, such as being made into a complete sheet-shaped, a slit sheet-shaped or a paper folding sheet-shaped structural form so as to adapt to different force transmission and deformation requirements, the double-pass shape memory alloy layer 2 can be reversibly transformed between two different shapes in the heating and cooling processes, and the materials of the double-pass shape memory alloy layer 2 comprise nickel-titanium (Ni-Ti) alloy, copper-zinc-aluminum (Cu-Zn-Al), iron-manganese-silicon (Fe-Mn-Si) and other alloy systems. The electrostatic adsorption film 1 is composed of electrodes (i.e. conductor layers) and dielectric materials (i.e. insulating layers), the electrodes are made of high-conductivity materials such as metal or carbon-based materials and are prepared into specific shapes such as parallel plates, comb teeth or staggered finger structures through photoetching, film plating and other processes so as to generate uniform and adjustable electric fields, the dielectric materials are made of materials with high dielectric constants and low loss such as polyimide, ceramic and the like, the dielectric materials are placed between the electrodes, electrostatic adsorption force can be generated between the electrodes and the dielectric materials when voltage is applied, and the rapid actuator can heat or cool the double-pass shape memory alloy layer 2 and rapidly and accurately adjust the temperature of the double-pass shape memory alloy layer 2, so that the double-pass shape memory alloy layer 2 works in a set phase change temperature range, the rapid shape conversion is realized to actuate, and the electric field control unit can apply voltage between the electrostatic adsorption film 1 and the double-pass shape memory alloy layer 2, and can provide stable direct current or alternating current voltage, so that the electric field intensity between the electrostatic adsorption film 1 and the double-pass shape memory alloy layer 2 can be accurately controlled, and the electrostatic adsorption force can be adjusted, and the memory alloy recovery speed can be adjusted.
The quick actuator of the invention couples the double-pass shape memory alloy with the electrostatic adsorption technology, combines the advantages of the two, develops a novel actuator with quick response, high-precision control and larger output force to promote the development of the existing actuation technology, and particularly has the working principle that when the actuator works, a temperature control unit firstly heats or cools the double-pass shape memory alloy layer 2 according to a preset program to cause the double-pass shape memory alloy layer 2 to generate phase change force to cause shape change of alloy components, the process can realize displacement output of larger stroke, after the double-pass shape memory alloy layer 2 stops heating, an electric field control unit applies voltage between the electrostatic adsorption film 1 and the double-pass shape memory alloy layer 2 to generate electrostatic adsorption force, the electrostatic adsorption force can quickly respond in a short time to enable the double-pass shape memory alloy layer 2 to quickly recover and lock, so that the actuator can meet the requirements on response speed and displacement precision under different working conditions, and the cooperative action of the phase change force of the double-pass shape memory alloy layer 2 and the electrostatic adsorption force can be realized through precisely adjusting temperature and voltage parameters, and the quick response of the actuator can realize the quick response and the displacement output of various tasks. When the dual-path shape memory alloy device works, the phase change force and the electrostatic adsorption force of the dual-path shape memory alloy layer are alternately and synergistically acted by precisely controlling the temperature and the electric field parameters, so that the rapid response of the driving and the recovery of the actuator is realized, the dual-path shape memory alloy layer and the electrostatic adsorption film with different configurations can provide different output forces and displacements, and the dual-path shape memory alloy device has optimized energy conversion efficiency.
In some embodiments, the electrostatic adsorption film 1 includes:
A conductor layer 11;
a first insulating layer 12 located on the surface of the conductor layer 11;
A second insulating layer 13 located on a surface of the conductor layer 11 away from the first insulating layer 12;
the two-way shape memory alloy layer 2 is located on the surface of the first insulating layer 12, and one end of the two-way shape memory alloy layer 2 can rotate relative to the first insulating layer 13.
In the above embodiment, the electrostatic adsorption film 1 includes a conductive layer 11, a first insulating layer 12, and a second insulating layer 13, where the first insulating layer 12, the conductive layer 11, and the second insulating layer 13 are sequentially stacked from top to bottom, the double-pass shape memory alloy layer 2 is located on the surface of the first insulating layer 12, one end of the double-pass shape memory alloy layer 2 can rotate relative to the first insulating layer 12, specifically, a rotating shaft is disposed on the surface of the first insulating layer 12, the double-pass shape memory alloy layer 2 is sleeved outside the rotating shaft, and the double-pass shape memory alloy layer 2 can rotate around the rotating shaft, so that one end of the double-pass shape memory alloy layer 2 can rotate relative to the first insulating layer 13.
In some embodiments, the temperature control unit includes:
A heating film layer 3 positioned on the two-way shape memory alloy layer 2;
And the positive and negative electrodes of the first power supply 4 are respectively connected with two ends of the heating film layer 3 and are used for applying voltage to the heating film layer 3.
The heating film layer 3 is a film-shaped material capable of converting electric energy into heat energy, and is generally composed of a conductive material and a matrix material, when current passes through the conductive material, heat is generated due to the resistance of the material, so that the heating function is realized, the heating film layer 3 is positioned on the surface of the double-pass shape memory alloy layer 2, the positive electrode and the negative electrode of the first power supply 4 are respectively connected with the two ends of the heating film layer 3, the heating film layer 3 is heated by controlling the voltage of the first power supply 4, and the heating film layer 3 is attached to the double-pass shape memory alloy layer 2, so that the double-pass shape memory alloy layer 2 is heated.
In some embodiments, the electric field control unit includes:
And the second power supply 5, the positive and negative electrodes of which are respectively connected with the conductor layer 11 and the double-pass shape memory alloy layer 2, is used for applying voltage between the conductor layer 11 and the double-pass shape memory alloy layer 2.
Specifically, the positive electrode of the second power supply 5 is electrically connected with the conductor layer 11, the negative electrode is electrically connected with the double-pass shape memory alloy layer 2, and the voltage between the conductor layer 11 and the double-pass shape memory alloy layer 2 is controlled through the second power supply 5, so that the electrostatic adsorption force between the conductor layer 11 and the double-pass shape memory alloy layer 2 is adjusted.
In some embodiments, the temperature control unit further comprises:
A temperature sensor located on the two-way shape memory alloy layer 2 for monitoring the temperature of the two-way shape memory alloy layer.
In some embodiments, the temperature control unit further comprises:
and the temperature controller is electrically connected with the temperature sensor and the first power supply 4 and is used for controlling the heating of the double-pass shape memory alloy layer 2 to a set temperature.
The temperature control unit comprises a first power supply 4, a temperature sensor and a temperature controller, wherein the temperature controller is a PID temperature controller, the temperature sensor monitors the temperature of the double-pass shape memory alloy layer 2 in real time and feeds signals back to the PID temperature controller to control the double-pass shape memory alloy layer 2 to be heated to a set temperature, closed-loop temperature control is achieved, and the temperature control precision can reach +/-0.1 ℃.
In some embodiments, the voltage range provided by the first power source 4 is 0 to 1500v, and the heating temperature of the two-way shape memory alloy layer 2 is controlled to be a set temperature by adjusting the voltage range of the first power source 4, for example, the heating temperature of the two-way shape memory alloy layer 2 is controlled to be 10 to 200 ℃.
In some embodiments, the electric field control unit further comprises:
A capacitance measuring unit for monitoring the capacitance intensity between the conductor layer 11 and the two-way shape memory alloy layer 2.
In some embodiments, the electric field control unit further comprises a voltage amplifier, wherein the second power supply 5 can output direct current or alternating current voltage of 0V to +/-10000V, the voltage amplifier is used for amplifying a voltage signal to meet the electric field intensity requirement of the electrostatic adsorption component, and the capacitance measuring instrument is used for monitoring the capacitance intensity change between the conductor layer 11 and the double-pass shape memory alloy layer 2 in real time and indirectly reflecting the electrostatic adsorption force, so that the accurate control and closed loop feedback adjustment of the electric field intensity are realized.
In some embodiments, the output voltage of the second power source 5 is controlled such that the capacitance between the conductive layer 11 and the two-way shape memory alloy layer 2 can be varied between 10 pf and 100 pf.
In some embodiments, the output voltage of the second power source 5 is controlled such that the electrostatic attraction between the conductor layer 11 and the two-way shape memory alloy layer 2 is 1n to 500n.
In some embodiments, further comprising:
A base 6;
The second insulating layer 13 is attached to the base 6.
The base 6 is made of a light high-strength aluminum alloy material, has good heat conduction performance and mechanical stability, and provides support and protection for the actuator.
In some embodiments, the material of the conductor layer 11 includes at least one of a metallic material, a carbon-based material, and a conductive polymer material.
In some embodiments, the material of the first insulating layer 12 and the second insulating layer 13 includes at least one of polyimide, ceramic, polyethylene, and polytetrafluoroethylene.
Specifically, the material of the conductive layer 11 includes at least one of a metal material, a carbon-based material, and a conductive polymer material, the metal material includes a metal foil such as aluminum foil, copper foil, etc., the aluminum foil has good conductivity, can effectively conduct charges, can be thin, and can ensure rapid movement of charges, the aluminum foil can be used as a conductive layer in the electrostatic adsorption film to help establish a uniform electric field on the whole film surface, in addition, some conductive polymers can be used as the conductive material, the conductive polymers such as poly (3, 4-ethylenedioxythiophene) -poly (styrene sulfonate) (PEDOT: PSS) have good flexibility and processability, and can better adapt to adsorption requirements of different shapes than the metal material, and Polyethylene (PE), polytetrafluoroethylene (PTFE), polyimide, ceramic, etc. have good insulation properties, and can effectively prevent leakage of charges.
Preferably, in some embodiments, the conductor layer 11 is made of a conductive material film such as copper foil, and is made into a sheet shape or other optimized shapes by a photolithography process, the first insulating layer 12 and the second insulating layer 13 are made of polyimide films, and the conductor layer 11, the first insulating layer 12 and the second insulating layer 13 are assembled together by a bonding process to form an electrostatic adsorption film, and are respectively connected with the positive electrode and the negative electrode of the second power supply with the double-pass shape memory alloy layer 2.
In some embodiments, the heating film layer 3 is a flexible heating ink coating, which is a coating material capable of generating heat after applying electric energy, has good flexibility, and can be attached to various flexible substrates, such as plastic films, textiles and the like, so as to realize a heating function, wherein the flexible heating ink coating comprises a conductive material, a bonding material, a dispersing agent, an auxiliary agent and the like, the conductive material comprises carbon nanotubes, graphene, metal nanoparticles (such as silver nanoparticles) and the like, and high molecular polymers such as Polyurethane (PU), polyimide (PI) and the like are commonly used as the bonding material. The flexible heating ink coating is adhered to the double-pass shape memory alloy layer 2, the two ends of the flexible heating ink coating are led out by leads to be connected with the positive electrode and the negative electrode of the first power supply 4, in addition, the double-pass shape memory alloy layer 2 is connected with the negative electrode of the second power supply 5, the conductor layer 11 is connected with the positive electrode of the second power supply 5, the movable part is the double-pass shape memory alloy layer 2, the electrostatic adsorption film is fixed, and then the whole assembly is installed on a base to finally obtain the actuator.
In some embodiments, the thickness of the two-way shape memory alloy layer 2 is 0.1-0.2 mm, for example, 0.1mm, 0.15mm, 0.2mm, and the thickness is specifically selected according to practical situations.
In some embodiments, the thickness of the conductive layer 11 is 10-15 μm, for example, the thickness of the conductive layer 11 may be 10 μm, 11 μm, 12 μm, 13 μm, 14 μm, 15 μm, etc., and the thickness is selected according to practical situations.
In some embodiments, the thickness of each group of the first insulating layer 12 and the second insulating layer 13 is 10 μm to 15 μm independently, for example, the thickness of each group of the first insulating layer 12 and the second insulating layer 13 is 10 μm, 11 μm, 12 μm, 12.5 μm, 13 μm, 14 μm, 15 μm independently, and the thickness is selected according to practical situations.
In some embodiments, the thickness of the heating coating 10 is 8-12 μm, for example, the thickness of the heating coating 10 is 8 μm, 9 μm, 10 μm, 11 μm, 12 μm, etc., and the thickness is specifically selected according to practical situations.
In some embodiments, the two-way shape memory alloy layer 2 is made of nickel-titanium-based two-way shape memory alloy, and is processed into a sheet-like structure through wire cutting, and after multiple thermo-mechanical training, the two-way shape memory alloy layer has a stable two-way shape memory effect.
Further, referring to fig. 2, the first power source 4 is operated (the switch corresponding to the first power source 4 is turned off), and the second power source 5 is not operated (the switch corresponding to the second power source 5 is turned on), so that the shape of the two-way shape memory alloy layer 2 is changed due to heating. Fig. 3 shows that the first power source 4 is not operated (the switch corresponding to the first power source 4 is turned on), and the second power source 5 is operated (the switch corresponding to the second power source 5 is turned off), and the two-way shape memory alloy layer 2 is restored and locked due to electrostatic attraction.
Further, fig. 4 to 5 are schematic diagrams of the working principle of the two-way shape memory alloy layer 2, the schematic diagrams of the state of the two-way shape memory alloy layer 2 when the first power source 4 is not working (the switch corresponding to the first power source 4 is turned on) in fig. 4, and the schematic diagrams of the state of the two-way shape memory alloy layer 2 when the first power source 4 is working (the switch corresponding to the first power source 4 is turned off) in fig. 5.
Fig. 6 to 7 are schematic diagrams of electrostatic adsorption film operation principle, schematic diagrams of the state of the double-pass shape memory alloy layer 2 when the second power supply 5 is operated (the switch corresponding to the second power supply 5 is turned off), the double-pass shape memory alloy layer 2 is negatively charged when operated, the conductor layer 11 is positively charged, and schematic diagrams of the state of the double-pass shape memory alloy layer 2 when the second power supply 5 is not operated (the switch corresponding to the second power supply 5 is turned on) in fig. 7.
When the rapid actuator is applied, the laser displacement sensor and the high-precision force sensor are used for measuring the displacement and output force of the actuator, and the displacement-time curve and the force-displacement curve of the actuator under different working conditions are recorded by changing the set temperature of the temperature control unit and the voltage value of the electric field control unit, so that the performance indexes such as response speed, output force range, displacement precision, energy conversion efficiency and the like are tested. The double-pass shape memory alloy layer and electrostatic adsorption coupled rapid actuator can be optimized and customized according to different application requirements by adjusting materials, structures, control parameters and the like so as to meet the diversified requirements of various fields on the high-performance actuator.
The quick actuator of the present invention has the following advantages:
the quick response is that because the electrostatic adsorption force can be instantaneously generated and acted on the actuator structure and combined with the cooling recovery process of the double-pass shape memory alloy layer, the response speed of the actuator is obviously improved, the actuation and recovery can be completed in a short time, and the application scene with higher requirement on the response speed is satisfied;
The phase change degree and the electrostatic adsorption force of the double-pass shape memory alloy layer can be accurately controlled by accurately regulating and controlling the temperature and the electric field parameters, so that the requirements on quick actuation and reversion of the actuator are met, the output force and displacement are accurately controlled, and the requirements on precise operation, such as minimally invasive surgical instrument control in the biomedical field, are met;
The double-pass shape memory alloy layer can generate larger force in the phase change process, and the double-pass shape memory alloy layer and the electrostatic adsorption force cooperate to ensure that the actuator can output enough force to drive heavier load, thereby expanding the application range of the double-pass shape memory alloy layer and having potential application value in the aspects of deformation control of aircraft wings and the like in the aerospace field;
The energy conversion efficiency is optimized, namely, the phase transformation energy and the electrostatic adsorption energy of the double-pass shape memory alloy layer are fully utilized by reasonably designing the structure and the control strategy of the actuator, so that the energy loss is reduced, the energy conversion efficiency is improved, the running cost is reduced, and the actuator has more competitive power in practical application.
In summary, the dual-path shape memory alloy and electrostatic adsorption coupled rapid actuator has a plurality of advantages, can be widely applied to the fields of medical instruments, robots, aerospace, micro-electromechanical systems and the like, meets the requirements of various fields on high-performance actuators, and has wide application prospects and important practical values.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the invention.