技术领域Technical Field
本申请属于弱电压信号测量技术领域，具体涉及一种场效应管弱电压信号测量装置。The present application belongs to the technical field of weak voltage signal measurement, and specifically relates to a field effect tube weak voltage signal measurement device.
背景技术Background Art
测量物体表面的弱电压信号在多个领域有着广泛的应用，包括工业监测、环境监测、安全监测、电子器件测试、交通运输等。例如，在工业监测中，通过测量金属表面的电位变化，监控腐蚀过程，应用于防腐蚀工程、管道和海洋设施的保护；在环境监测中，通过测量植物的电活动，研究植物对环境变化的反应，应用于植物生长监测、农业环境研究和作物优化；在安全监测中，检测人体接触电子设备时的电位变化，应用于安全开关、防触点保护和人体接触传感器的开发；通过监测电气设备表面的电位变化，识别故障，应用于电力系统维护、设备故障预警和工业安全监测。Measuring weak voltage signals on the surface of objects has a wide range of applications in many fields, including industrial monitoring, environmental monitoring, safety monitoring, electronic device testing, transportation, etc. For example, in industrial monitoring, by measuring the potential changes on the metal surface, the corrosion process is monitored, which is applied to anti-corrosion engineering, pipeline and marine facility protection; in environmental monitoring, by measuring the electrical activity of plants, the response of plants to environmental changes is studied, which is applied to plant growth monitoring, agricultural environmental research and crop optimization; in safety monitoring, the potential changes when the human body touches electronic equipment are detected, which is applied to the development of safety switches, anti-contact protection and human contact sensors; by monitoring the potential changes on the surface of electrical equipment, faults are identified, which is applied to power system maintenance, equipment failure warning and industrial safety monitoring.
传统是将电极直接贴附在被测物体的表面，通过电极接触点获取电信号，选择具有良好导电性的电极，并且将电极通过导电胶、粘合剂或机械固定等方式将电极贴附在被测物体的表面。电极与物体表面的接触电阻容易发生变化，接触不良、运动伪影、物体电阻变化均会导致信号波动和不稳定，影响测量结果；另外，这样的电极也容易拾取环境中的电磁干扰和机械噪声，尤其是在低频信号测量中出现这些情形，显著影响信号质量。这就增加了信号处理的复杂性和成本，需要设置更多的滤波和处理步骤来去除这些干扰和噪声。Traditionally, electrodes are directly attached to the surface of the object to be measured, and electrical signals are obtained through the electrode contact points. Electrodes with good conductivity are selected, and the electrodes are attached to the surface of the object to be measured by means of conductive glue, adhesives or mechanical fixation. The contact resistance between the electrode and the surface of the object is prone to change. Poor contact, motion artifacts, and changes in object resistance can cause signal fluctuations and instability, affecting the measurement results. In addition, such electrodes are also prone to picking up electromagnetic interference and mechanical noise in the environment, especially in low-frequency signal measurements, which significantly affects signal quality. This increases the complexity and cost of signal processing, and more filtering and processing steps are required to remove these interferences and noises.
发明内容Summary of the invention
为解决以上问题，本发明提供了一种场效应管弱电压信号测量装置，包括衬底、源极、漏极、绝缘层、栅极、接地电极，源极和漏极置于衬底的顶部，在源极和漏极之间衬底的表面形成沟道区，绝缘层位于沟道区上，栅极置于绝缘层上，接地电极置于衬底上栅极相对的一侧；应用时，将栅极贴附在待测物体上。To solve the above problems, the present invention provides a field effect transistor weak voltage signal measuring device, including a substrate, a source, a drain, an insulating layer, a gate, and a grounding electrode. The source and the drain are placed on the top of the substrate, a channel region is formed on the surface of the substrate between the source and the drain, the insulating layer is located on the channel region, the gate is placed on the insulating layer, and the grounding electrode is placed on the side of the substrate opposite to the gate; when used, the gate is attached to the object to be measured.
本发明应用场效应管测量物体表面弱电压信号，利用场效应管的高输入阻抗特性，减少了信号测量过程中接触电阻变化对信号的影响，提升了信号的稳定性和准确性，降低了最终获得的电压信号中的噪声水平。The present invention applies a field effect tube to measure a weak voltage signal on the surface of an object, utilizes the high input impedance characteristic of the field effect tube, reduces the influence of contact resistance change on the signal during the signal measurement process, improves the stability and accuracy of the signal, and reduces the noise level in the finally obtained voltage signal.
更进一步地，栅极为导电橡胶电极或银/氯化银电极。导电橡胶具有良好的柔韧性，能够很好地贴合在不规则表面上，这种柔韧性有助于维持稳定的电接触，减少因物体微小位移引起的接触电阻变化，提高信号的稳定性；另外，导电橡胶还具有较高的耐磨性和耐环境性，能够在不同的温度和湿度条件下保持稳定的性能，适合在多种环境中进行测量。银/氯化银电极具有极高的导电性和电化学稳定性，提供了低电阻和高质量的电接触，确保了信号传输的准确性和稳定性，减少了信号损耗和失真；另外这种电极具有低噪声特性，适合测量微弱的电信号，提高信号的信噪比，使得测量结果更加可靠和精确。Furthermore, the gate is a conductive rubber electrode or a silver/silver chloride electrode. Conductive rubber has good flexibility and can fit well on irregular surfaces. This flexibility helps maintain stable electrical contact, reduce changes in contact resistance caused by small displacements of objects, and improve signal stability; in addition, conductive rubber also has high wear resistance and environmental resistance, can maintain stable performance under different temperature and humidity conditions, and is suitable for measurement in a variety of environments. Silver/silver chloride electrodes have extremely high conductivity and electrochemical stability, provide low resistance and high-quality electrical contact, ensure the accuracy and stability of signal transmission, and reduce signal loss and distortion; in addition, this electrode has low noise characteristics, is suitable for measuring weak electrical signals, improves the signal-to-noise ratio of the signal, and makes the measurement results more reliable and accurate.
更进一步地，栅极包括周期排布的电极块，相邻电极块之间不接触。这种设计隔离了相邻电极块的信号路径，避免了信号之间的串扰，确保了每个电极块独立采集信号，提高了测量信号的纯净度和准确性，使得整体信号更加稳定和一致。另外，相邻电极块之间的隔离设计减少了寄生电容和电感效应的影响，降低了噪声水平，提升了信号的信噪比，使得测量到的弱电压信号更加清晰，有利于精确的信号分析和处理。Furthermore, the gate includes periodically arranged electrode blocks, and adjacent electrode blocks do not touch each other. This design isolates the signal paths of adjacent electrode blocks, avoids crosstalk between signals, ensures that each electrode block independently collects signals, improves the purity and accuracy of the measured signal, and makes the overall signal more stable and consistent. In addition, the isolation design between adjacent electrode blocks reduces the influence of parasitic capacitance and inductance effects, reduces the noise level, improves the signal-to-noise ratio of the signal, makes the measured weak voltage signal clearer, and is conducive to accurate signal analysis and processing.
更进一步地，相邻所述电极块之间设有隔离层。隔离层的材料为第一绝缘材料。隔离层能够有效地隔绝相邻电极块之间的电信号传导路径，进一步减少电信号的互扰和串扰，提高每个电极块独立采集信号的纯净度和准确性。另外，隔离层还增强了整体结构的机械强度和稳定性，即使在物体表面发生微小位移时，每个电极块仍能够保持稳定的电接触，从而保证测量信号的稳定性和一致性。Furthermore, an isolation layer is provided between adjacent electrode blocks. The material of the isolation layer is a first insulating material. The isolation layer can effectively isolate the electrical signal conduction path between adjacent electrode blocks, further reduce mutual interference and crosstalk of electrical signals, and improve the purity and accuracy of the signal collected independently by each electrode block. In addition, the isolation layer also enhances the mechanical strength and stability of the overall structure. Even when a slight displacement occurs on the surface of the object, each electrode block can still maintain stable electrical contact, thereby ensuring the stability and consistency of the measurement signal.
更进一步地，第一绝缘材料为聚酰亚胺。聚酰亚胺属于高性能的电绝缘材料，具有较高的绝缘电阻，使用聚酰亚胺作为隔离层，能够有效防止电信号在相邻电极块之间的传导，确保每个电极块独立采集信号，减少信号互扰和串扰。另外，聚酰亚胺在宽温度范围内均具有较高的稳定性能，具有高强度、耐磨性和优异的机械稳定性聚酰亚胺提供了额外的机械支撑，增强电极块的整体结构强度和稳定性。Furthermore, the first insulating material is polyimide. Polyimide is a high-performance electrical insulating material with high insulation resistance. Using polyimide as an isolation layer can effectively prevent the conduction of electrical signals between adjacent electrode blocks, ensure that each electrode block independently collects signals, and reduce signal interference and crosstalk. In addition, polyimide has high stability in a wide temperature range, high strength, wear resistance and excellent mechanical stability. Polyimide provides additional mechanical support to enhance the overall structural strength and stability of the electrode block.
更进一步地，还包括阻断环，阻断环置于衬底上环绕所述绝缘层和栅极。阻断环屏蔽不必要的电场干扰，减少寄生电容对信号的影响，提升信号的纯净度和测量准确性。另外，阻断环阻断和屏蔽了外部噪声，特别是沿着待测物体表面传输到栅极区域的噪声，避免其直接影响栅极区域的信号测量，提升测量信号的信噪比，使得弱电压信号的测量更加清晰和精确。Furthermore, a blocking ring is also included, which is placed on the substrate and surrounds the insulating layer and the gate. The blocking ring shields unnecessary electric field interference, reduces the influence of parasitic capacitance on the signal, and improves the purity of the signal and the measurement accuracy. In addition, the blocking ring blocks and shields external noise, especially the noise transmitted to the gate area along the surface of the object to be measured, to avoid its direct impact on the signal measurement of the gate area, improve the signal-to-noise ratio of the measurement signal, and make the measurement of weak voltage signals clearer and more accurate.
更进一步地，阻断环处于源极和漏极之间。这不仅减小了装置尺寸，而且阻断环包围栅极，使得测量系统能够在各种复杂环境条件下保持稳定的工作状态，减少因外界干扰引起的故障风险，提高了系统的长期可靠性和使用寿命。Furthermore, the blocking ring is located between the source and the drain. This not only reduces the size of the device, but also the blocking ring surrounds the gate, allowing the measurement system to maintain a stable working state under various complex environmental conditions, reducing the risk of failure caused by external interference, and improving the long-term reliability and service life of the system.
更进一步地，阻断环的底部为第二绝缘材料，阻断环的顶部为金属多孔材料。这种设计中，第二绝缘材料提供了电气隔离和机械支撑，防止了电流泄露，确保了电气隔离的可靠性，当然也提供了稳固的机械支撑；多孔金属材料均匀分布电池，减少了电场集中现象，减少了电磁干扰，金属多孔材料还屏蔽了外部电磁干扰，保护栅极免受外部噪声的影响，提高信号的信噪比。另外，金属多孔材料有助于散热，防止局部过热，使得装置在高温环境下能够稳定运行，延长装置的使用寿命，提高装置的可靠性。Furthermore, the bottom of the blocking ring is a second insulating material, and the top of the blocking ring is a metal porous material. In this design, the second insulating material provides electrical isolation and mechanical support, prevents current leakage, ensures the reliability of electrical isolation, and of course provides stable mechanical support; the porous metal material evenly distributes the batteries, reduces the electric field concentration phenomenon, reduces electromagnetic interference, and the metal porous material also shields external electromagnetic interference, protects the gate from external noise, and improves the signal-to-noise ratio of the signal. In addition, the metal porous material helps to dissipate heat and prevent local overheating, so that the device can operate stably in a high temperature environment, extend the service life of the device, and improve the reliability of the device.
更进一步地，阻断环的顶部与栅极的顶部齐平。阻断环的顶部与栅极的顶部齐平，形成一个统一的平面，能够更为有效地阻挡来自物体表面的电信号直接跨过阻断环，增强电气隔离效果，减少栅极受到的外部电信号干扰。另外，齐平的顶部也提供了一个平整的表面，这样的表面提高了装置的机械稳定性。Furthermore, the top of the blocking ring is flush with the top of the gate. The top of the blocking ring is flush with the top of the gate, forming a unified plane, which can more effectively block the electrical signal from the surface of the object from directly crossing the blocking ring, enhance the electrical isolation effect, and reduce the external electrical signal interference on the gate. In addition, the flush top also provides a flat surface, which improves the mechanical stability of the device.
本发明的有益效果：Beneficial effects of the present invention:
（1）本发明利用场效应管的高输入阻抗特性，减少了信号测量过程中接触电阻变化对信号的影响，场效应管的低噪声特性提高了信号的信噪比，使得测量结果更为稳定和准确。(1) The present invention utilizes the high input impedance characteristics of the field effect tube to reduce the influence of the contact resistance change on the signal during the signal measurement process. The low noise characteristics of the field effect tube improve the signal-to-noise ratio of the signal, making the measurement result more stable and accurate.
（2）本发明可以使用场效应管的放大特性，对微弱的电压信号进行放大，提高测量灵敏度和准确性；通过控制栅极电压，能够调节增益，以适应不同强度的信号测量需求。(2) The present invention can use the amplification characteristics of the field effect tube to amplify weak voltage signals and improve measurement sensitivity and accuracy; by controlling the gate voltage, the gain can be adjusted to meet the measurement requirements of signals of different intensities.
（3）本发明的场效应管测量装置适合集成到复杂电路中，通过集成场效应管和相关电路，设计出小型化、集成度高的测量装置，具有便携和长时间监测的特点；另外场效应管还具有低功耗特点，这延长了设备的工作时间，使其适用于需要长期监测的场景。(3) The field effect tube measuring device of the present invention is suitable for integration into complex circuits. By integrating the field effect tube and related circuits, a miniaturized and highly integrated measuring device is designed, which has the characteristics of portability and long-term monitoring. In addition, the field effect tube also has the characteristics of low power consumption, which prolongs the working time of the device and makes it suitable for scenarios requiring long-term monitoring.
综合以上有益效果，本发明在弱电压信号测量技术领域具有良好的应用前景。In summary of the above beneficial effects, the present invention has good application prospects in the field of weak voltage signal measurement technology.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1是一种场效应管弱电压信号测量装置的示意图。FIG. 1 is a schematic diagram of a field effect tube weak voltage signal measuring device.
图2是一种栅极的示意图。FIG. 2 is a schematic diagram of a gate.
图3是一种阻断环的截面图。FIG. 3 is a cross-sectional view of a blocking ring.
图中：1、衬底；2、源极；3、漏极；4、绝缘层；5、栅极；6、接地电极；7、阻断环；51、电极块；52、间隙；71、第二绝缘材料；72、金属多孔材料。In the figure: 1, substrate; 2, source; 3, drain; 4, insulating layer; 5, gate; 6, ground electrode; 7, blocking ring; 51, electrode block; 52, gap; 71, second insulating material; 72, metal porous material.
具体实施方式DETAILED DESCRIPTION
为使本申请的目的、技术方案及优点更加清楚明白，以下参照附图并举实施例，对本申请作进一步详细说明。In order to make the objectives, technical solutions and advantages of the present application more clearly understood, the present application is further described in detail below with reference to the accompanying drawings and examples.
本发明提供了一种场效应管弱电压信号测量装置，如图1所示，包括衬底1、源极2、漏极3、绝缘层4、栅极5、接地电极6。衬底1为高纯度硅或其他半导体材料，衬底1为平板状，厚度为100微米-500微米，提供结构支撑、机械稳定性和导电性。源极2和漏极3为重掺杂N型硅（Highly Doped N-Type Silicon）或金属（如铝或金），源极2和漏极3的宽度和长度为50微米-500微米，源极2和漏极3的厚度为1微米-6微米。源极2和漏极3置于衬底的顶部，提供电流输入，用于注入电子或空穴。在源极2和漏极3之间衬底1的表面形成沟道区。沟道区由轻掺杂或本征半导体材料构成，沟道区是电流从源极向漏极的主要通道，通过栅极5电压的控制，调节沟道区内的载流子浓度和移动性，从而控制电流的大小。绝缘层4的材料为二氧化硅，厚度为20纳米-200纳米。绝缘层4位于沟道区上，绝缘层4覆盖沟道区，绝缘层4提供电气隔离，防止栅极5电流直接流入沟道区，同时允许电场影响沟道区的电导率。栅极5的材料为导电橡胶电极或银/氯化银电极，厚度为2微米-20微米。栅极5置于绝缘层4上，栅极5不直接接触沟道区，但是栅极5覆盖整个沟道区的面积。接地电极6置于衬底1上栅极5相对的一侧。接地电极6为铝或铜，接地电极6提供参考电位，确保电路稳定。The present invention provides a field effect transistor weak voltage signal measuring device, as shown in FIG1, comprising a substrate 1, a source 2, a drain 3, an insulating layer 4, a gate 5, and a ground electrode 6. The substrate 1 is high-purity silicon or other semiconductor materials, and the substrate 1 is in a flat plate shape with a thickness of 100 microns to 500 microns, providing structural support, mechanical stability and conductivity. The source 2 and the drain 3 are highly doped N-type silicon or metal (such as aluminum or gold), and the width and length of the source 2 and the drain 3 are 50 microns to 500 microns, and the thickness of the source 2 and the drain 3 is 1 micron to 6 microns. The source 2 and the drain 3 are placed on the top of the substrate to provide current input for injecting electrons or holes. A channel region is formed on the surface of the substrate 1 between the source 2 and the drain 3. The channel region is composed of lightly doped or intrinsic semiconductor materials. The channel region is the main channel for current from the source to the drain. By controlling the voltage of the gate 5, the carrier concentration and mobility in the channel region are adjusted, thereby controlling the magnitude of the current. The material of the insulating layer 4 is silicon dioxide, and the thickness is 20 nanometers to 200 nanometers. The insulating layer 4 is located on the channel region, and the insulating layer 4 covers the channel region. The insulating layer 4 provides electrical isolation to prevent the gate 5 current from directly flowing into the channel region, while allowing the electric field to affect the conductivity of the channel region. The material of the gate 5 is a conductive rubber electrode or a silver/silver chloride electrode, and the thickness is 2 micrometers to 20 micrometers. The gate 5 is placed on the insulating layer 4, and the gate 5 does not directly contact the channel region, but the gate 5 covers the area of the entire channel region. The grounding electrode 6 is placed on the opposite side of the gate 5 on the substrate 1. The grounding electrode 6 is aluminum or copper, and the grounding electrode 6 provides a reference potential to ensure circuit stability.
应用时，清洁和平整待测物体的表面，使得栅极5能够紧密地贴合待测物体。在实际操作中，使用适当的清洁溶剂和工具对待测物体表面进行处理，去除污垢和油脂，以便于增强接触质量。在操作时，将栅极5通过轻压、粘贴或夹持等方式固定在待测物体表面上，确保接触稳定。为了进一步增强接触质量和信号传输，在栅极5和待测物体之间使用导电胶或导电膏。测量物体弱电压信号的原理基于场效应管的工作特性：当栅极5贴附在待测物体表面时，待测物体上的弱电压信号将通过栅极5施加到场效应管的绝缘层上4。由于栅极5和绝缘层4直接接触，弱电压信号能够有效地影响沟道区的电导率。具体而言，栅极5上的弱电压信号在绝缘层4上形成电场，该电场会调节沟道区的载流子浓度。通过这种方式，源极2和漏极3之间的电流会收到栅极5电压控制。弱电压信号的变化将导致沟道区电导率的变化，从而引起漏极3电流的变化。通过测量漏极3电流的变化，间接获得待测物体表面的弱电压信号。这种测量方法具有高输入阻抗和低噪声的优势，能够有效地放大和检测微弱的电压信号。When applied, clean and level the surface of the object to be tested so that the gate 5 can fit the object to be tested closely. In actual operation, use appropriate cleaning solvents and tools to treat the surface of the object to be tested to remove dirt and grease in order to enhance the contact quality. During operation, the gate 5 is fixed on the surface of the object to be tested by light pressure, pasting or clamping to ensure stable contact. In order to further enhance the contact quality and signal transmission, a conductive glue or conductive paste is used between the gate 5 and the object to be tested. The principle of measuring the weak voltage signal of the object is based on the working characteristics of the field effect tube: when the gate 5 is attached to the surface of the object to be tested, the weak voltage signal on the object to be tested will be applied to the insulating layer 4 of the field effect tube through the gate 5. Since the gate 5 is in direct contact with the insulating layer 4, the weak voltage signal can effectively affect the conductivity of the channel region. Specifically, the weak voltage signal on the gate 5 forms an electric field on the insulating layer 4, which adjusts the carrier concentration in the channel region. In this way, the current between the source 2 and the drain 3 is controlled by the gate 5 voltage. The change of weak voltage signal will lead to the change of conductivity in the channel region, thus causing the change of drain 3 current. By measuring the change of drain 3 current, the weak voltage signal on the surface of the object to be measured is indirectly obtained. This measurement method has the advantages of high input impedance and low noise, and can effectively amplify and detect weak voltage signals.
优选地，如图2所示，栅极5包括周期排布的电极块51，相邻电极块51之间不接触，相邻电极块51之间设有间隙52。每个电极块51的宽度和长度在10微米-100微米之间，厚度在1微米-10微米之间。相邻电极块51之间的间距在1微米-5微米之间。Preferably, as shown in FIG2 , the gate 5 includes periodically arranged electrode blocks 51, adjacent electrode blocks 51 are not in contact with each other, and gaps 52 are provided between adjacent electrode blocks 51. The width and length of each electrode block 51 are between 10 microns and 100 microns, and the thickness is between 1 micron and 10 microns. The spacing between adjacent electrode blocks 51 is between 1 micron and 5 microns.
另外，相邻电极块51之间设有隔离层，即在图2的间隙处设有隔离层。隔离层的材料为聚酰亚胺。聚酰亚胺的高度大于电极块51的高度，聚酰亚胺与电极块51的高度差为1-5微米，便于对柔性物体表面的弱电压信号测量。In addition, an isolation layer is provided between adjacent electrode blocks 51, that is, an isolation layer is provided at the gap in FIG2. The material of the isolation layer is polyimide. The height of the polyimide is greater than the height of the electrode block 51, and the height difference between the polyimide and the electrode block 51 is 1-5 microns, which is convenient for measuring weak voltage signals on the surface of flexible objects.
优选地，如图3所示，本发明的场效应管弱电压信号测量装置还包括阻断环7，阻断环7为环形。阻断环7置于衬底1上环绕绝缘层4和栅极5。阻断环7处于源极2和漏极3之间。阻断环7的底部为第二绝缘材料71，第二绝缘材料71为氧化铝，第二绝缘材料71的厚度为1微米-4微米。阻断环7的顶部为金属多孔材料72，具体地金属多孔材料72为多孔金或多孔银，孔隙率大于30%、小于70%，金属多孔材料72中的孔径大于10纳米、小于100纳米。金属多孔材料的厚度为3微米-8微米。阻断环7的顶部与栅极5的顶部齐平，提供高导电性和良好的电磁屏蔽效果，有效阻挡外部噪声进入信号测量区域，同时保持较低的电阻。在热管理方面，氧化铝具有良好的热导率，能够有效散热，防止器件过热。金属多孔材料72的多孔结构有助于热量的均匀分布和散发，进一步提升了器件的热管理性能。Preferably, as shown in FIG3 , the field effect tube weak voltage signal measuring device of the present invention further includes a blocking ring 7, which is annular. The blocking ring 7 is placed on the substrate 1 to surround the insulating layer 4 and the gate 5. The blocking ring 7 is between the source 2 and the drain 3. The bottom of the blocking ring 7 is a second insulating material 71, the second insulating material 71 is aluminum oxide, and the thickness of the second insulating material 71 is 1 micron-4 microns. The top of the blocking ring 7 is a metal porous material 72, specifically the metal porous material 72 is porous gold or porous silver, the porosity is greater than 30% and less than 70%, and the pore size in the metal porous material 72 is greater than 10 nanometers and less than 100 nanometers. The thickness of the metal porous material is 3 microns-8 microns. The top of the blocking ring 7 is flush with the top of the gate 5, providing high conductivity and good electromagnetic shielding effect, effectively blocking external noise from entering the signal measurement area, while maintaining low resistance. In terms of thermal management, aluminum oxide has good thermal conductivity, can effectively dissipate heat, and prevent the device from overheating. The porous structure of the metal porous material 72 helps to evenly distribute and dissipate heat, further improving the thermal management performance of the device.
总之，本发明提供了一种场效应管弱电压信号测量装置，包括衬底1、源极2、漏极3、绝缘层4、栅极5、接地电极6，源极2和漏极3置于衬底1的顶部，在源极2和漏极3之间衬底1的表面形成沟道区，绝缘层位于沟道区上，栅极5置于绝缘层4上，接地电极6置于衬底1上栅极5相对的一侧；应用时，将栅极5贴附在待测物体上。本发明应用场效应管测量物体表面弱电压信号，利用场效应管的高输入阻抗特性，减少了信号测量过程中接触电阻变化对信号的影响，提升了信号的稳定性和准确性，降低了最终获得的电压信号中的噪声水平，在弱电压信号测量技术领域具有良好的应用前景。In summary, the present invention provides a field effect tube weak voltage signal measuring device, including a substrate 1, a source 2, a drain 3, an insulating layer 4, a gate 5, and a grounding electrode 6, wherein the source 2 and the drain 3 are placed on the top of the substrate 1, a channel region is formed on the surface of the substrate 1 between the source 2 and the drain 3, the insulating layer is located on the channel region, the gate 5 is placed on the insulating layer 4, and the grounding electrode 6 is placed on the substrate 1 on the side opposite to the gate 5; when used, the gate 5 is attached to the object to be measured. The present invention uses a field effect tube to measure the weak voltage signal on the surface of an object, and utilizes the high input impedance characteristics of the field effect tube to reduce the influence of the change in contact resistance on the signal during the signal measurement process, improve the stability and accuracy of the signal, and reduce the noise level in the voltage signal finally obtained, which has a good application prospect in the field of weak voltage signal measurement technology.
以上所述仅为本申请的较佳实施例而已，并不用以限制本申请，凡在本申请的精神和原则之内，所做的任何修改、等同替换、改进等，均应包含在本申请保护的范围之内。The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application shall be included in the scope of protection of the present application.
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| CN202411035993.6ACN118837609A (en) | 2024-07-31 | 2024-07-31 | Weak voltage signal measuring device of field effect tube |
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