技术领域Technical Field
本方案属于光波导技术领域，具体涉及体全息曲面波导及其制作方法和装置。The present invention belongs to the technical field of optical waveguides, and specifically relates to a volume holographic curved waveguide and a manufacturing method and device thereof.
背景技术Background Art
AR设备的光学显示系统通常由微型显示屏和光学元件组成。概括来说，目前市场上的AR眼镜采用的显示系统就是各种微型显示屏和棱镜、自由曲面、BirdBath、光波导等光学元件的组合，其中光学组合器的不同，是区分AR显示系统的关键部分，而目前光波导方案从光学效果、外观形态和量产前景来说，都具备最好的发展潜力。The optical display system of AR devices is usually composed of micro-displays and optical components. In general, the display system used by AR glasses on the market is a combination of various micro-displays and optical components such as prisms, free-form surfaces, BirdBath, and optical waveguides. The difference in optical combiners is the key part to distinguish AR display systems. At present, the optical waveguide solution has the best development potential in terms of optical effects, appearance, and mass production prospects.
光波导总体上可以分为几何光波导和衍射光波导两种，几何光波导就是所谓的阵列光波导，其通过阵列反射镜堆叠实现图像的输出和动眼框的扩大，衍射光波导主要有利用光刻技术制造的表面浮雕光栅波导和基于全息干涉技术制造的体全息光栅波导。但是由于几何光波导在工艺和制作上的困难，AR眼镜想要具备普通眼镜的外观，真正走向消费市场，衍射光波导是目前的不二之选。Optical waveguides can be generally divided into two types: geometric optical waveguides and diffractive optical waveguides. Geometric optical waveguides are so-called array optical waveguides, which achieve image output and eye box expansion through stacking array reflectors. Diffractive optical waveguides mainly include surface relief grating waveguides made using photolithography technology and volume holographic grating waveguides made based on holographic interference technology. However, due to the difficulties in the process and production of geometric optical waveguides, if AR glasses want to have the appearance of ordinary glasses and truly enter the consumer market, diffractive optical waveguides are currently the only choice.
目前实现研发和量产的AR眼镜光波导技术为平面波导，但是平面波导制作而成的AR眼镜并没有适配近视和远视的人群，导致如近视和远视的人群使用该类AR眼镜体验感十分差，需要在处方眼镜之外增加AR眼镜才能实现增强现实显示的功能。这增加了佩戴者所佩戴眼镜的整体重量和尺寸，造成大众对AR眼镜的接受度较低，限制了AR眼镜的消费级普及。The optical waveguide technology for AR glasses that has been developed and mass-produced is planar waveguide, but AR glasses made of planar waveguide are not suitable for people with myopia and hyperopia, resulting in a very poor experience for people with myopia and hyperopia when using such AR glasses. They need to add AR glasses in addition to prescription glasses to realize the function of augmented reality display. This increases the overall weight and size of the glasses worn by the wearer, resulting in low public acceptance of AR glasses and limiting the consumer-level popularity of AR glasses.
对于体全息光栅波导而言，其难以实现曲面波导的原因在于，体全息光栅是由全息材料经过干涉曝光形成的，曝光时要求全息材料具有平整的表面。因此，现有技术通常在平面上干涉曝光形成具有体全息光栅的全息膜后，再将其转移贴合到曲面波导上。The reason why it is difficult to realize a curved waveguide for a volume holographic grating waveguide is that the volume holographic grating is formed by interference exposure of a holographic material, and the holographic material is required to have a flat surface during exposure. Therefore, the prior art usually forms a holographic film with a volume holographic grating on a plane by interference exposure, and then transfers and bonds it to a curved waveguide.
发明内容Summary of the invention
本方案旨在克服现有技术中的至少一种缺陷，提供一种直接在曲面波导上记录形成体全息光栅的体全息曲面波导制作方法。The present invention aims to overcome at least one defect in the prior art and provide a method for manufacturing a volume holographic curved waveguide by directly recording a volume holographic grating on the curved waveguide.
为了解决上述技术问题，采取下述技术方案：In order to solve the above technical problems, the following technical solutions are adopted:
第一方面，提出一种制作体全息曲面波导的方法。该方法包括如下曝光步骤，用于干涉曝光位于耦出区和/或转折区的全息光敏材料层：In a first aspect, a method for manufacturing a volume holographic curved waveguide is provided. The method comprises the following exposure steps for interferometrically exposing a holographic photosensitive material layer located in an outcoupling region and/or a turning region:
根据虚拟影像的像素分布，将参考光调整为对应第i像素的单像素参考光，将信号光调整为对应第i像素的单像素信号光；According to the pixel distribution of the virtual image, the reference light is adjusted to a single-pixel reference light corresponding to the i-th pixel, and the signal light is adjusted to a single-pixel signal light corresponding to the i-th pixel;
将单像素参考光耦入曲面波导层，使其在曲面波导层内部进行全反射传播，并在全反射传播过程中照射全息光敏材料层，与此同时，将单像素信号光径直出射在全息光敏材料层上，单像素参考光与单像素信号光在全息光敏材料层上发生干涉，全息光敏材料层记录第i像素对应的干涉条纹；The single-pixel reference light is coupled into the curved waveguide layer, so that it is totally reflected and propagated inside the curved waveguide layer, and the holographic photosensitive material layer is irradiated during the totally reflected propagation process. Meanwhile, the single-pixel signal light is directly emitted onto the holographic photosensitive material layer, and the single-pixel reference light and the single-pixel signal light interfere with each other on the holographic photosensitive material layer, and the holographic photosensitive material layer records the interference fringes corresponding to the i-th pixel;
令i＝i+1，重复上述步骤，直至全息光敏材料层记录下所有像素对应的干涉条纹，形成体全息光栅层。Let i=i+1, and repeat the above steps until the holographic photosensitive material layer records the interference fringes corresponding to all pixels, thereby forming a volume holographic grating layer.
本方案以虚拟影像的像素分布为依据将参考光和信号光分别调整为单像素参考光和单像素信号光，通过单像素单像素参考光和单像素信号光对全息光敏材料层进行多次曝光，虚拟影像含有多少像素就曝光多少次，每次曝光只形成对应某个像素的单像素体全息光栅，多次曝光形成了分别对应不同像素的多个单像素体全息光栅。对应第i像素的单像素体全息光栅只衍射对应第i像素的投影光束，不会衍射对应其它像素的投影光束，使得不同波长(不同颜色)的光线在所得体全息曲面波导中的传输和耦出不会相互串扰。与此同时，本方案还通过全反射传播来传输单像素参考光，有利于避免杂光，以免对干涉条纹造成影响。由此，通过单像素照射和全反射传播的协同作用，使得直接在曲面波导层上曝光形成体全息光栅层成为可能。This scheme adjusts the reference light and signal light to single-pixel reference light and single-pixel signal light respectively based on the pixel distribution of the virtual image, and exposes the holographic photosensitive material layer multiple times by single-pixel single-pixel reference light and single-pixel signal light. The virtual image is exposed as many times as the number of pixels it contains. Each exposure forms only a single-pixel volume holographic grating corresponding to a certain pixel, and multiple exposures form multiple single-pixel volume holographic gratings corresponding to different pixels. The single-pixel volume holographic grating corresponding to the i-th pixel only diffracts the projection light beam corresponding to the i-th pixel, and does not diffract the projection light beams corresponding to other pixels, so that the transmission and coupling of light of different wavelengths (different colors) in the resulting volume holographic curved waveguide will not interfere with each other. At the same time, this scheme also transmits the single-pixel reference light by total reflection propagation, which is conducive to avoiding stray light and avoiding the influence on the interference fringes. Therefore, through the synergistic effect of single-pixel illumination and total reflection propagation, it is possible to directly expose the volume holographic grating layer on the curved waveguide layer.
由于曝光过程是通过单像素参考光和单像素信号光对全息光敏材料层进行逐一曝光，形成对应各个像素的单像素体全息光栅，由此得到的体全息光栅层会对每个像素的传输光线进行特定的衍射，使它们出射为同心光束，便于成像。Since the exposure process is to expose the holographic photosensitive material layer one by one through single-pixel reference light and single-pixel signal light to form a single-pixel volume holographic grating corresponding to each pixel, the resulting volume holographic grating layer will specifically diffract the transmission light of each pixel, making them emit as concentric light beams to facilitate imaging.
在曝光步骤前，上述方法还包括前处理步骤：根据佩戴者的眼部参数定制处方眼镜片作为曲面波导层。无论是普通人群还是近视、远视等特殊人群，曲面波导层都可以采用根据佩戴者的眼部参数进行定制的处方眼镜片，以使视觉效果更清晰舒适，眼睛更加轻松，以免引起视觉疲劳等问题。Before the exposure step, the method further includes a pre-processing step: customizing prescription eyeglasses as the curved waveguide layer according to the eye parameters of the wearer. Whether it is a general population or a special population such as myopia or hyperopia, the curved waveguide layer can use prescription eyeglasses customized according to the eye parameters of the wearer to make the visual effect clearer and more comfortable, and the eyes more relaxed, so as to avoid visual fatigue and other problems.
在曝光步骤前，上述方法还包括前处理步骤：将全息光敏材料层设置在曲面波导层的表面或内部。全息光敏材料层由对参考光和信号光敏感的全息光敏材料形成，全息光敏材料可以通过旋涂、喷涂、涂布等方式涂覆在曲面波导层的表面，也可以通过灌注的方式充盈在曲面波导层的内部，从而形成设置在曲面波导层上的全息光敏材料层。Before the exposure step, the method further comprises a pre-treatment step: disposing a holographic photosensitive material layer on the surface or inside the curved waveguide layer. The holographic photosensitive material layer is formed of a holographic photosensitive material that is sensitive to the reference light and the signal light. The holographic photosensitive material can be coated on the surface of the curved waveguide layer by spin coating, spray coating, or the like, or filled inside the curved waveguide layer by injection, thereby forming a holographic photosensitive material layer disposed on the curved waveguide layer.
第二方面，提出一种制作体全息曲面波导的装置。该装置包括参考光生成器和信号光生成器，用于干涉曝光位于耦出区和/或转折区的全息光敏材料层，使之形成体全息光栅层。In a second aspect, a device for making a volume holographic curved waveguide is provided, which includes a reference light generator and a signal light generator, and is used for interferometrically exposing a holographic photosensitive material layer located in an outcoupling region and/or a turning region to form a volume holographic grating layer.
参考光生成器用于产生对应第i像素的单像素参考光，单像素参考光耦入曲面波导层后在曲面波导层内部进行全反射传播，并在全反射传播过程中照射全息光敏材料层。信号光生成器用于产生对应第i像素的单像素信号光，单像素信号光径直出射在全息光敏材料层上。单像素参考光和单像素信号光在全息光敏材料层上发生干涉，其干涉条纹被全息光敏材料层记录。The reference light generator is used to generate a single-pixel reference light corresponding to the i-th pixel. After the single-pixel reference light is coupled into the curved waveguide layer, it is totally reflected and propagated inside the curved waveguide layer, and irradiates the holographic photosensitive material layer during the total reflection propagation process. The signal light generator is used to generate a single-pixel signal light corresponding to the i-th pixel. The single-pixel signal light is directly emitted on the holographic photosensitive material layer. The single-pixel reference light and the single-pixel signal light interfere with each other on the holographic photosensitive material layer, and their interference fringes are recorded by the holographic photosensitive material layer.
本方案通过参考光生成器产生对应第i像素的单像素参考光照射全息光敏材料层，并通过信号光生成器产生对应第i像素的单像素信号光照射全息光敏材料层，使得全息光敏材料层记录的干涉条纹，形成的单像素体全息光栅只衍射对应第i像素的投影光束，不会衍射对应其它像素的投影光束，使得不同波长(不同颜色)的光线在所得体全息曲面波导中的传输和耦出不会相互串扰。参考光生成器产生的单像素参考光通过在曲面波导层中全反射传播照射到全息光敏材料层，有利于避免杂光，以免对干涉条纹造成影响。由此，通过单像素照射和全反射传播的协同作用，使得直接在曲面波导层上曝光形成体全息光栅层成为可能。In this scheme, a single-pixel reference light corresponding to the i-th pixel is generated by a reference light generator to illuminate the holographic photosensitive material layer, and a single-pixel signal light corresponding to the i-th pixel is generated by a signal light generator to illuminate the holographic photosensitive material layer, so that the interference fringes recorded by the holographic photosensitive material layer and the formed single-pixel volume holographic grating only diffract the projection light beam corresponding to the i-th pixel, and do not diffract the projection light beams corresponding to other pixels, so that the transmission and coupling of light beams of different wavelengths (different colors) in the resulting volume holographic curved waveguide will not interfere with each other. The single-pixel reference light generated by the reference light generator is irradiated to the holographic photosensitive material layer through total reflection propagation in the curved waveguide layer, which is conducive to avoiding stray light to avoid affecting the interference fringes. Therefore, through the synergistic effect of single-pixel irradiation and total reflection propagation, it is possible to directly expose and form a volume holographic grating layer on the curved waveguide layer.
由于曝光过程是通过单像素参考光和单像素信号光对全息光敏材料层进行逐一曝光，形成对应各个像素的单像素体全息光栅，由此得到的体全息光栅层会对每个像素的传输光线进行特定的衍射，使它们出射为同心光束，便于成像。Since the exposure process is to expose the holographic photosensitive material layer one by one through single-pixel reference light and single-pixel signal light to form a single-pixel volume holographic grating corresponding to each pixel, the resulting volume holographic grating layer will specifically diffract the transmission light of each pixel, making them emit as concentric light beams to facilitate imaging.
参考光生成器包括参考光光源、第一空间光调制器和第一透镜组，参考光光源产生参考光并出射至第一空间光调制器，第一空间光调制器将参考光调制为对应第i像素的单像素的第一点光源并出射至第一透镜组，第一透镜组对第一点光源进行整形并出射为上述单像素参考光。第一透镜组可以将第一点光源整形为平行光束，也可以将第一点光源整形为发散光束。换言之，第一透镜组出射的单像素参考光可以是平行光束，也可以是发散光束，对于虚像的再现没有影响。The reference light generator includes a reference light source, a first spatial light modulator and a first lens group. The reference light source generates reference light and emits it to the first spatial light modulator. The first spatial light modulator modulates the reference light into a first point light source of a single pixel corresponding to the i-th pixel and emits it to the first lens group. The first lens group shapes the first point light source and emits it as the above-mentioned single-pixel reference light. The first lens group can shape the first point light source into a parallel light beam or a divergent light beam. In other words, the single-pixel reference light emitted by the first lens group can be a parallel light beam or a divergent light beam, which has no effect on the reproduction of the virtual image.
信号光生成器包括信号光光源、第二空间光调制器和第二透镜组，信号光光源产生信号光并出射至第二空间光调制器，第二空间光调制器将信号光调制为对应第i像素的单像素的第二点光源并出射至第二透镜组，第二透镜组对第二点光源进行整形并出射为上述单像素信号光。第二透镜组可以将第二点光源整形为平行光束，也可以将第二点光源整形为发散光束。若单像素信号光为平行光束，则所得体全息曲面波导再现的虚像在无穷远。若单像素信号光为发散光束，则所得体全息曲面波导再现的虚像在有限远，该虚像至体全息曲面波导的距离可以通过调节第二透镜组的焦距、第二透镜组与第二空间光调制器的距离、第二透镜组与全息光敏材料层之间的距离中的至少两者进行调节，其中第二透镜组与第二空间光调制器的距离、第二透镜组与全息光敏材料层之间的距离具体可以通过移动第二透镜组、第二空间光调制器、体全息曲面波导进行调节，从而制作出不同虚像距的体全息曲面波导，使得虚像距离也能够适配不同视力的人群。The signal light generator includes a signal light source, a second spatial light modulator and a second lens group. The signal light source generates signal light and emits it to the second spatial light modulator. The second spatial light modulator modulates the signal light into a second point light source of a single pixel corresponding to the i-th pixel and emits it to the second lens group. The second lens group shapes the second point light source and emits it as the above-mentioned single-pixel signal light. The second lens group can shape the second point light source into a parallel light beam or a divergent light beam. If the single-pixel signal light is a parallel light beam, the virtual image reproduced by the resulting volume holographic curved waveguide is at infinity. If the single-pixel signal light is a divergent light beam, the virtual image reproduced by the resulting volume holographic curved waveguide is at a finite distance, and the distance from the virtual image to the volume holographic curved waveguide can be adjusted by adjusting at least two of the focal length of the second lens group, the distance between the second lens group and the second spatial light modulator, and the distance between the second lens group and the holographic photosensitive material layer. The distance between the second lens group and the second spatial light modulator, and the distance between the second lens group and the holographic photosensitive material layer can be adjusted specifically by moving the second lens group, the second spatial light modulator, and the volume holographic curved waveguide, thereby producing volume holographic curved waveguides with different virtual image distances, so that the virtual image distance can also be adapted to people with different vision.
上述装置还可以包括第一移动机构、第二移动机构、第三移动机构中的至少两种。信号光光源和第二空间光调制器安装在第一移动机构上，可以通过第一移动机构调节第二空间光调制器的位置，从而调节第二透镜组与第二空间光调制器的距离；第二透镜组安装在第二移动机构上，可以通过第二移动机构调节第二透镜组的位置，从而调节第二透镜组与第二空间光调制器的距离、第二透镜组与全息光敏材料层之间的距离；体全息曲面波导安装在第三移动机构上，可以通过第三移动机构调节体全息曲面波导的位置，从而调节第二透镜组与全息光敏材料层之间的距离，以便调节有限远虚像的距离。The above device may also include at least two of a first moving mechanism, a second moving mechanism, and a third moving mechanism. The signal light source and the second spatial light modulator are mounted on the first moving mechanism, and the position of the second spatial light modulator can be adjusted by the first moving mechanism, thereby adjusting the distance between the second lens group and the second spatial light modulator; the second lens group is mounted on the second moving mechanism, and the position of the second lens group can be adjusted by the second moving mechanism, thereby adjusting the distance between the second lens group and the second spatial light modulator and the distance between the second lens group and the holographic photosensitive material layer; the volume holographic curved waveguide is mounted on the third moving mechanism, and the position of the volume holographic curved waveguide can be adjusted by the third moving mechanism, thereby adjusting the distance between the second lens group and the holographic photosensitive material layer, so as to adjust the distance of the finite distance virtual image.
上述装置还可以包括载物台，以便安装定位待曝光的体全息曲面波导。载物台可以安装在第三移动机构上，以便通过第三移动机构调节载物台的位置，即调节第二透镜组至全息光敏材料层的距离，从而调节有限远虚像的距离。The above device may further include an object stage for mounting and positioning the volume holographic curved waveguide to be exposed. The object stage may be mounted on a third moving mechanism so that the position of the object stage can be adjusted by the third moving mechanism, that is, the distance from the second lens group to the holographic photosensitive material layer can be adjusted, thereby adjusting the distance of the finite distance virtual image.
上述装置还可以包括耦入器，以便将单像素参考光耦入曲面波导层。该耦入器包括耦入光栅，具体可以是体全息光栅，也可以是表面浮雕光栅，可以通过贴合等方式固定安装在待曝光的体全息曲面波导表面。除此之外，单像素参考光还可以通过体全息曲面波导自带的耦入光栅耦入曲面波导层，该耦入光栅可以是体全息光栅，还可以是表面浮雕光栅，可以通过贴合等方式固定在体全息曲面波导中。若体全息曲面波导自带的耦入光栅是体全息光栅，则该耦入光栅还可以是体全息光栅层的一部分，可以在曲面波导层上曝光成型。The above-mentioned device may also include a coupler to couple the single-pixel reference light into the curved waveguide layer. The coupler includes a coupling grating, which may be a volume holographic grating or a surface relief grating, and may be fixedly mounted on the surface of the volume holographic curved waveguide to be exposed by bonding or the like. In addition, the single-pixel reference light may also be coupled into the curved waveguide layer through the coupling grating provided by the volume holographic curved waveguide, and the coupling grating may be a volume holographic grating or a surface relief grating, and may be fixed in the volume holographic curved waveguide by bonding or the like. If the coupling grating provided by the volume holographic curved waveguide is a volume holographic grating, the coupling grating may also be a part of the volume holographic grating layer, and may be exposed and formed on the curved waveguide layer.
上述装置还可以包括具有空腔的箱体，上述参考光生成器、信号光生成器、载物台等器件都安装在该空腔中，既便于器件的装配定位，又利于营造适合曝光的环境。The above-mentioned device may also include a box having a cavity, in which the above-mentioned reference light generator, signal light generator, stage and other devices are installed, which is convenient for assembly and positioning of the devices and helps to create an environment suitable for exposure.
第三方面，提出一种体全息曲面波导。该体全息曲面波导由上述方法或装置制作而成，包括曲面波导层和体全息光栅层，体全息光栅层位于曲面波导层的表面或内部，且至少覆盖耦出区和/或转折区。In a third aspect, a volume holographic curved waveguide is provided. The volume holographic curved waveguide is made by the above method or device, and comprises a curved waveguide layer and a volume holographic grating layer, wherein the volume holographic grating layer is located on the surface or inside of the curved waveguide layer and at least covers the outcoupling region and/or the turning region.
本方案通过至少一表面为曲面的曲面波导层来实现光的全反射传播，使得体全息曲面波导能够更好地适应眼睛本身的曲率，更加贴合眼睛表面，从而消除视觉畸变，光线在通过体全息曲面波导时能够更好地与眼睛的生理结构相匹配，提高视觉的清晰度和舒适度。曲面波导层的曲面参数可以根据个人眼部特征和视力数据精确定制，定制得到的曲面波导层相当于处方眼镜片，具有屈光度，适配佩戴者视力，应用于AR等头显产品时不必加戴处方眼镜也可以透过体全息曲面波导清晰地看到真实环境，减少了佩戴者佩戴头显产品时需要承受的整体重量和尺寸，提高大众对头显产品的接受度。This solution realizes total reflection propagation of light through a curved waveguide layer with at least one curved surface, so that the volume holographic curved waveguide can better adapt to the curvature of the eye itself and fit the surface of the eye more closely, thereby eliminating visual distortion. When light passes through the volume holographic curved waveguide, it can better match the physiological structure of the eye, improving visual clarity and comfort. The surface parameters of the curved waveguide layer can be precisely customized according to personal eye characteristics and vision data. The customized curved waveguide layer is equivalent to a prescription lens, which has a refractive power and adapts to the wearer's vision. When applied to AR and other head-mounted display products, it is not necessary to wear prescription glasses to clearly see the real environment through the volume holographic curved waveguide, reducing the overall weight and size that the wearer needs to bear when wearing the head-mounted display product, and improving the public's acceptance of the head-mounted display product.
耦出区和/或转折区的体全息光栅层通过上述方法或装置曝光而成，由于曝光过程是通过单像素参考光和单像素信号光对全息光敏材料层进行逐一曝光，形成对应各个像素的单像素体全息光栅，由此得到的体全息光栅层会对每个像素的传输光线进行特定的衍射，使得不同波长(不同颜色)的光线在所得体全息曲面波导中的传输和耦出不会相互串扰，并使它们出射为同心光束，便于成像。The volume holographic grating layer in the out-coupling area and/or the turning area is exposed by the above method or device. Since the exposure process is to expose the holographic photosensitive material layer one by one by single-pixel reference light and single-pixel signal light to form a single-pixel volume holographic grating corresponding to each pixel, the volume holographic grating layer obtained will specifically diffract the transmission light of each pixel, so that the transmission and out-coupling of light of different wavelengths (different colors) in the obtained volume holographic curved waveguide will not interfere with each other, and they are emitted as concentric light beams to facilitate imaging.
体全息光栅层还覆盖耦入区。耦入区的体全息光栅层可以先成型再安装到曲面波导层上，也可以采用传统的曝光方法直接在曲面波导层上曝光而成。The volume holographic grating layer also covers the coupling-in region. The volume holographic grating layer in the coupling-in region can be formed first and then mounted on the curved waveguide layer, or can be formed by directly exposing on the curved waveguide layer using a conventional exposure method.
第四方面，提出一种头显产品。该头显产品包括投影光机和体全息曲面波导。体全息曲面波导由上述方法或装置制作而成，包括曲面波导层和体全息光栅层，且设有耦入区和耦出区。体全息光栅层位于所述曲面波导层的表面或内部，且至少覆盖耦出区。In a fourth aspect, a head-mounted display product is provided. The head-mounted display product includes a projection optical machine and a volume holographic curved waveguide. The volume holographic curved waveguide is made by the above method or device, includes a curved waveguide layer and a volume holographic grating layer, and is provided with an incoupling region and an outcoupling region. The volume holographic grating layer is located on the surface or inside of the curved waveguide layer, and at least covers the outcoupling region.
投影光机类似投影机，将带有虚拟影像的光线从体全息曲面波导的耦入区投射进入体全息曲面波导。体全息曲面波导的耦入区将来自投影光机的光束耦合进入波导，使得该光束可以在曲面波导层内部进行全反射传播。由于耦出区的曝光过程是通过单像素参考光和单像素信号光对全息光敏材料层进行逐一曝光，由此得到的体全息光栅层会对每个像素的传输光线进行特定的衍射，使得不同波长(不同颜色)的光线在所得体全息曲面波导中的传输和耦出不会相互串扰，并使它们出射为同心光束，便于成像。The projection optical machine is similar to a projector, and projects the light with the virtual image from the coupling-in area of the volume holographic curved waveguide into the volume holographic curved waveguide. The coupling-in area of the volume holographic curved waveguide couples the light beam from the projection optical machine into the waveguide, so that the light beam can be fully reflected and propagated inside the curved waveguide layer. Since the exposure process of the coupling-out area is to expose the holographic photosensitive material layer one by one through single-pixel reference light and single-pixel signal light, the resulting volume holographic grating layer will perform specific diffraction on the transmission light of each pixel, so that the transmission and coupling of light beams of different wavelengths (different colors) in the resulting volume holographic curved waveguide will not interfere with each other, and make them emerge as concentric light beams, which is convenient for imaging.
而且，曲面波导层至少一面为曲面，能够更好地适应眼睛本身的曲率，更加贴合眼睛表面，从而消除视觉畸变，光线在通过体全息曲面波导时能够更好地与眼睛的生理结构相匹配，提高视觉的清晰度和舒适度。曲面波导层的曲面参数可以根据个人眼部特征和视力数据精确定制，定制得到的曲面波导层相当于处方眼镜片，具有屈光度，适配佩戴者视力，应用于AR等头显产品时不必加戴处方眼镜也可以透过体全息曲面波导清晰地看到真实环境，减少了佩戴者佩戴头显产品时需要承受的整体重量和尺寸，提高大众对头显产品的接受度。Moreover, at least one side of the curved waveguide layer is a curved surface, which can better adapt to the curvature of the eye itself and fit the surface of the eye more closely, thereby eliminating visual distortion. When light passes through the volume holographic curved waveguide, it can better match the physiological structure of the eye, improving visual clarity and comfort. The curved parameters of the curved waveguide layer can be precisely customized according to individual eye characteristics and vision data. The customized curved waveguide layer is equivalent to a prescription lens, which has a refractive power and adapts to the wearer's vision. When applied to AR and other head-mounted display products, it is not necessary to wear prescription glasses to clearly see the real environment through the volume holographic curved waveguide, reducing the overall weight and size that the wearer needs to bear when wearing the head-mounted display product, and improving the public's acceptance of the head-mounted display product.
体全息光栅层还可以覆盖耦入区。耦入区的体全息光栅层可以先成型再安装到曲面波导层上，也可以采用传统的曝光方法直接在曲面波导层上曝光而成。The volume holographic grating layer can also cover the coupling-in region. The volume holographic grating layer in the coupling-in region can be formed first and then mounted on the curved waveguide layer, or can be formed by directly exposing on the curved waveguide layer using a conventional exposure method.
体全息曲面波导还可以设转折区。体全息光栅层还可以覆盖转折区，耦入区的体全息光栅层可以先成型再安装到曲面波导层上，也可以采用上述方法或装置直接在曲面波导层上曝光而成。The volume holographic curved waveguide can also be provided with a turning zone. The volume holographic grating layer can also cover the turning zone. The volume holographic grating layer in the coupling zone can be formed first and then installed on the curved waveguide layer, or it can be formed by directly exposing on the curved waveguide layer using the above method or device.
本方案与现有技术相比较有如下有益效果：本方案开创性地提出了一种直接在曲面基底上曝光形成体全息光栅层的方法，由其制得的体全息曲面波导可以根据佩戴者视力进行定制，提高大众对头显产品的接受度，而且会对每个像素的传输光线进行特定的衍射，使它们出射为同心光束，便于成像。Compared with the prior art, this solution has the following beneficial effects: This solution innovatively proposes a method for directly exposing a volume holographic grating layer on a curved substrate. The volume holographic curved waveguide produced by this method can be customized according to the wearer's vision, thereby improving the public's acceptance of head-mounted display products. In addition, the transmission light of each pixel will be specifically diffracted so that they are emitted as concentric light beams, which is convenient for imaging.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
附图仅用于示例性说明，不能理解为对本方案的限制；为了更好说明本方案，附图某些部件会有省略、放大或缩小，并不代表实际产品的尺寸；附图中的光线只表示光线传播的大致方向，不表示某一条具体光线，不作为对光线数量、传播路径、角度等的限制；对于本领域技术人员来说，附图中某些公知结构及其说明可能省略是可以理解的。The drawings are only used for illustrative purposes and should not be construed as limitations on the present invention. In order to better illustrate the present invention, some parts of the drawings may be omitted, enlarged or reduced, and do not represent the size of the actual product. The light in the drawings only indicates the general direction of light propagation, not a specific light ray, and is not intended to limit the number of light rays, propagation paths, angles, etc. It is understandable to those skilled in the art that some well-known structures and their descriptions may be omitted in the drawings.
图1是头显产品可能的结构示意图。FIG1 is a schematic diagram of a possible structure of a head-mounted display product.
图2是体全息曲面波导可能的结构示意图。FIG. 2 is a schematic diagram of a possible structure of a volume holographic curved waveguide.
图3是体全息曲面波导制作方法的流程图。FIG3 is a flow chart of a method for manufacturing a volume holographic curved waveguide.
图4是体全息曲面波导制作装置的结构及曝光示意图。FIG. 4 is a schematic diagram showing the structure and exposure of a volume holographic curved waveguide manufacturing device.
图5是采用图4所示装置制得体全息曲面波导的成像示意图。FIG. 5 is a schematic diagram of imaging of a volume holographic curved waveguide made using the apparatus shown in FIG. 4 .
图6是信号光为平行光束的体全息曲面波导制作装置的曝光示意图。FIG6 is a schematic diagram of the exposure of a volume holographic curved waveguide manufacturing device in which the signal light is a parallel beam.
图7是采用图6所示装置制得体全息曲面波导的成像示意图。FIG. 7 is a schematic diagram of imaging of a volume holographic curved waveguide made using the apparatus shown in FIG. 6 .
图8是信号光和参考光均为平行光束的体全息曲面波导制作装置的结构示意图。FIG8 is a schematic structural diagram of a volume holographic curved waveguide manufacturing device in which both the signal light and the reference light are parallel beams.
图9是信号光为平行光束、参考光为发散光束的体全息曲面波导制作装置的结构示意图。FIG9 is a schematic structural diagram of a volume holographic curved waveguide manufacturing device in which the signal light is a parallel beam and the reference light is a divergent beam.
图10是信号光为发散光束的体全息曲面波导制作装置的曝光示意图。FIG10 is a schematic diagram of an exposure diagram of a volume holographic curved waveguide manufacturing device in which the signal light is a divergent beam.
图11是采用图10所示装置制得体全息曲面波导的成像示意图。FIG. 11 is a schematic diagram of imaging of a volume holographic curved waveguide made using the apparatus shown in FIG. 10 .
图12是信号光为发散光束、参考光为平行光束的体全息曲面波导制作装置的结构示意图。FIG12 is a schematic structural diagram of a volume holographic curved waveguide manufacturing device in which the signal light is a divergent beam and the reference light is a parallel beam.
图13是信号光和参考光均为发散光束的体全息曲面波导制作装置的结构示意图。FIG13 is a schematic diagram of the structure of a volume holographic curved waveguide manufacturing device in which both the signal light and the reference light are divergent beams.
附图标记说明：投影光机100，体全息曲面波导200，曲面波导层210，第一表面211，第二表面212，体全息光栅层220，全息光敏材料层221，耦入光栅300，参考光生成器410，参考光光源411，第一空间光调制器412，第一透镜组413，信号光生成器420，信号光光源421，第二空间光调制器422，第二透镜组423，投影光束101，复现信号光201，复现信号光的反向延长线201’，参考光4011，第一点光源4012，单像素参考光4013，信号光4021，第二点光源4022，单像素信号光4023，虚像I’，人眼E’。Explanation of the reference numerals: projection optical machine 100, volume holographic curved waveguide 200, curved waveguide layer 210, first surface 211, second surface 212, volume holographic grating layer 220, holographic photosensitive material layer 221, coupling grating 300, reference light generator 410, reference light source 411, first spatial light modulator 412, first lens group 413, signal light generator 420, signal light source 421, second spatial light modulator 422, second lens group 423, projection light beam 101, reproduced signal light 201, reverse extension line 201' of reproduced signal light, reference light 4011, first point light source 4012, single-pixel reference light 4013, signal light 4021, second point light source 4022, single-pixel signal light 4023, virtual image I', human eye E'.
具体实施方式DETAILED DESCRIPTION
为了让本领域的技术人员更好地理解本方案，下面结合具体实施例对本方案做进一步详细说明。In order to enable those skilled in the art to better understand the present solution, the present solution is further described in detail below in conjunction with specific embodiments.
图1示意了可能的头显产品。如图1所示，该头显产品包括投影光机100和体全息曲面波导200。投影光机100类似投影机，将带有虚拟影像的光线投射进入体全息曲面波导200。体全息曲面波导200对来自投影光机100的光线进行传输和耦出，耦出的光线进入人眼，形成虚拟影像，实现虚拟现实(VR)、增强现实(AR)、混合现实(MR)等不同效果。根据效果的不同，可以将头显产品区分为不同的类型。其中，VR头显产品是虚拟现实技术的载体，通过计算机技术等产生一个允许佩戴者与其交互的三维虚拟世界，使佩戴者产生一种身临其境的感觉。AR头显产品是增强实现技术的载体，通过计算机技术等将虚拟的信息应用到真实世界，使真实的环境和虚拟的物体实时地叠加到同一个画面或空间而同时存在。MR头显产品是混合现实技术的载体，结合了VR和AR的特性，允许佩戴者与真实和虚拟环境进行交互。FIG1 illustrates a possible head-mounted display product. As shown in FIG1 , the head-mounted display product includes a projection optical machine 100 and a volume holographic curved waveguide 200. The projection optical machine 100 is similar to a projector, and projects light with a virtual image into the volume holographic curved waveguide 200. The volume holographic curved waveguide 200 transmits and couples the light from the projection optical machine 100, and the coupled light enters the human eye to form a virtual image, thereby achieving different effects such as virtual reality (VR), augmented reality (AR), and mixed reality (MR). According to different effects, head-mounted display products can be divided into different types. Among them, VR head-mounted display products are the carriers of virtual reality technology, which use computer technology to generate a three-dimensional virtual world that allows the wearer to interact with it, so that the wearer has an immersive feeling. AR head-mounted display products are the carriers of augmented reality technology, which use computer technology to apply virtual information to the real world, so that the real environment and virtual objects are superimposed on the same screen or space in real time and exist simultaneously. MR head-mounted display products are the carriers of mixed reality technology, combining the characteristics of VR and AR, allowing the wearer to interact with real and virtual environments.
头显产品可以设计为眼罩式结构，也可以设计为眼镜式结构。对于前者，体全息曲面波导200设为单片，投影光机100可以设置在体全息曲面波导200的中间，也可以设置在体全息曲面波导200的左侧或右侧，还可以在体全息曲面波导200的左右两侧各设一个投影光机100。对于后者，体全息曲面波导200设为双片，投影光机100可以设置在两片体全息曲面波导200之间，也可以设置在左侧体全息曲面波导200的左侧或右侧体全息曲面波导200的右侧，还可以在左侧体全息曲面波导200的左侧和右侧体全息曲面波导200的右侧各设一个投影光机100。The head display product can be designed as an eye mask structure or a glasses structure. For the former, the volume holographic curved waveguide 200 is set as a single piece, and the projection optical machine 100 can be set in the middle of the volume holographic curved waveguide 200, or on the left or right side of the volume holographic curved waveguide 200, or one projection optical machine 100 can be set on the left and right sides of the volume holographic curved waveguide 200. For the latter, the volume holographic curved waveguide 200 is set as a double piece, and the projection optical machine 100 can be set between the two pieces of volume holographic curved waveguides 200, or on the left side of the left volume holographic curved waveguide 200 or on the right side of the right volume holographic curved waveguide 200, or one projection optical machine 100 can be set on the left side of the left volume holographic curved waveguide 200 and on the right side of the right volume holographic curved waveguide 200.
头显产品通常还包括支架。支架既用于安装固定投影光机100和体全息曲面波导200，使得投影光机100和体全息曲面波导200的相对位置得到固定，又用于实现佩戴，使得佩戴者佩戴该头显产品时体全息曲面波导200处于人眼的正前方。对于眼镜式结构的头显产品，支架包括镜框和镜腿。镜腿可以转动连接于镜框，镜腿向靠近镜框的方向转动后形成折叠状态，以便于头显产品的收纳，镜腿向远离镜框的方向转动后形成展开状态，以使头显产品能够佩戴在佩戴者的头部。体全息曲面波导200作为镜片安装在镜框中，使得佩戴者可以通过体全息曲面波导200看到上述虚拟影像。The head-mounted display product usually also includes a bracket. The bracket is used to install and fix the projection optical machine 100 and the volume holographic curved waveguide 200, so that the relative positions of the projection optical machine 100 and the volume holographic curved waveguide 200 are fixed, and is also used to achieve wearing, so that the volume holographic curved waveguide 200 is directly in front of the human eye when the wearer wears the head-mounted display product. For head-mounted display products with a glasses-like structure, the bracket includes a frame and temples. The temples can be rotatably connected to the frame. After the temples are rotated in a direction close to the frame, they form a folded state to facilitate the storage of the head-mounted display product. After the temples are rotated in a direction away from the frame, they form an unfolded state so that the head-mounted display product can be worn on the wearer's head. The volume holographic curved waveguide 200 is installed in the frame as a lens, so that the wearer can see the above-mentioned virtual image through the volume holographic curved waveguide 200.
人的眼睛不是平面的，角膜、晶状体等部位都具有一定的曲率。相比于平面波导，曲面设计的体全息曲面波导200能够更好地适应眼睛本身的曲率，更加贴合眼睛表面，从而消除视觉畸变，光线在通过体全息曲面波导200时能够更好地与眼睛的生理结构相匹配，提高视觉的清晰度和舒适度。体全息曲面波导200的曲面可以根据个人眼部特征和视力数据精确定制，使体全息曲面波导200的曲率更适合佩戴者的眼球形状，使视觉效果更清晰舒适，使眼睛更加轻松，避免由于头显产品所引起的视觉疲劳等问题。如此一来，存在近视、远视等视力问题的人群佩戴本头显产品时不必加戴处方眼镜就可以清晰地看到头显产品投射虚拟影像，佩戴AR或MR头显产品时不必加戴处方眼镜也可以透过体全息曲面波导200清晰地看到真实环境，减少了佩戴者佩戴头显产品时需要承受的整体重量和尺寸，提高大众对头显产品的接受度。The human eye is not flat, and the cornea, lens and other parts have a certain curvature. Compared with a planar waveguide, the curved volume holographic curved waveguide 200 can better adapt to the curvature of the eye itself and fit the surface of the eye more closely, thereby eliminating visual distortion. When light passes through the volume holographic curved waveguide 200, it can better match the physiological structure of the eye, improving visual clarity and comfort. The curved surface of the volume holographic curved waveguide 200 can be precisely customized according to personal eye characteristics and vision data, so that the curvature of the volume holographic curved waveguide 200 is more suitable for the shape of the wearer's eyeball, making the visual effect clearer and more comfortable, making the eyes more relaxed, and avoiding problems such as visual fatigue caused by head-mounted display products. In this way, people with vision problems such as myopia and hyperopia can clearly see the virtual images projected by the head-mounted display product without wearing prescription glasses when wearing the head-mounted display product. They can also clearly see the real environment through the volume holographic curved waveguide 200 without wearing prescription glasses when wearing AR or MR head-mounted display products, thereby reducing the overall weight and size that the wearer needs to bear when wearing the head-mounted display product, and improving the public's acceptance of the head-mounted display product.
图2示意了可能的体全息曲面波导200。如图2所示，该体全息曲面波导200包括曲面波导层210和体全息光栅层220。曲面波导层210为层状结构，具有相背的第一表面211和第二表面212，耦入体全息曲面波导200的光线可以在第一表面211和第二表面212之间进行全反射传播。第一表面211和第二表面212中的至少一个为曲面，以匹配人眼的生理结构，提高视觉的清晰度和舒适度。曲面的参数可以根据个人眼部特征和视力数据精确定制，定制得到的曲面波导层210相当于处方眼镜片，具有屈光度，适配佩戴者视力。体全息光栅层220也是层状结构，可以设置在曲面波导层210的多个位置，具体可以设置在曲面波导层210的第一表面211，也可以设置在曲面波导层210的第二表面212，还可以设置在第一表面211和第二表面212之间的曲面波导层210内部。FIG2 illustrates a possible volume holographic curved waveguide 200. As shown in FIG2, the volume holographic curved waveguide 200 includes a curved waveguide layer 210 and a volume holographic grating layer 220. The curved waveguide layer 210 is a layered structure having a first surface 211 and a second surface 212 opposite to each other. The light coupled into the volume holographic curved waveguide 200 can be totally reflected and propagated between the first surface 211 and the second surface 212. At least one of the first surface 211 and the second surface 212 is a curved surface to match the physiological structure of the human eye and improve the visual clarity and comfort. The parameters of the curved surface can be precisely customized according to personal eye characteristics and vision data. The customized curved waveguide layer 210 is equivalent to a prescription eyeglass, which has a refractive power and is adapted to the wearer's vision. The volume holographic grating layer 220 is also a layered structure and can be set at multiple positions of the curved waveguide layer 210, specifically, it can be set at the first surface 211 of the curved waveguide layer 210, it can also be set at the second surface 212 of the curved waveguide layer 210, and it can also be set inside the curved waveguide layer 210 between the first surface 211 and the second surface 212.
波导通常设有耦入区和耦出区两个功能区，有的波导还设有转折区。耦入区用于将来自投影光机100的光束耦合进入波导，使得该光束可以在波导内部进行全反射传播，从而实现耦入功能。转折区用于改变来自耦入区的光束在波导中的传播方向，并对光束范围进行扩增，从而实现转折功能。若波导不设转折区，则耦出区用于对来自耦入区的光束的范围进行扩增，并将光束耦合出波导，若波导设有转折区，则耦出区用于对来自转折区的光束的范围进行扩增，并将光束耦合出波导，从而实现耦出功能。耦入、耦出、转折等功能通常由光栅来实现，实现耦入功能的光栅可以称之为耦入光栅，实现耦出功能的光栅可以称之为耦出光栅，实现转折功能的光栅可以称之为转折光栅。The waveguide is usually provided with two functional areas, namely, an in-coupling area and an out-coupling area, and some waveguides are also provided with a turning area. The in-coupling area is used to couple the light beam from the projection optical machine 100 into the waveguide, so that the light beam can be totally reflected and propagated inside the waveguide, thereby realizing the in-coupling function. The turning area is used to change the propagation direction of the light beam from the in-coupling area in the waveguide, and to expand the range of the light beam, thereby realizing the turning function. If the waveguide is not provided with a turning area, the out-coupling area is used to expand the range of the light beam from the in-coupling area and couple the light beam out of the waveguide. If the waveguide is provided with a turning area, the out-coupling area is used to expand the range of the light beam from the turning area and couple the light beam out of the waveguide, thereby realizing the out-coupling function. The functions of in-coupling, out-coupling, and turning are usually realized by gratings. The grating that realizes the in-coupling function can be called an in-coupling grating, the grating that realizes the out-coupling function can be called an out-coupling grating, and the grating that realizes the turning function can be called a turning grating.
本体全息曲面波导200中，体全息光栅层220至少用于实现耦出或转折功能，相应地，其至少覆盖体全息曲面波导200的耦出区或转折区。即，体全息光栅层220可以只覆盖耦出区或只覆盖转折区，也可以覆盖转折区和耦出区、覆盖耦入区和耦出区或覆盖耦入区和转折区，还可以覆盖耦入区、转折区和耦出区，以实现相应的功能。换言之，体全息光栅层220可以是耦出光栅或转折光栅，也可以是耦出光栅和转折光栅的集合，还可以是耦出光栅和/或转折光栅与耦入光栅的集合。未被体全息光栅层220覆盖的耦入区、转折区或耦出区的相应功能可以采用表面浮雕光栅等其它类型的光栅实现，其中转折区还可以取消。当然，体全息曲面波导200的耦入功能、耦出功能，甚至转折功能，最好都采用体全息光栅层220实现。覆盖不同功能区的体全息光栅层220可以是同一体全息光栅层220，也可以是不同的体全息光栅层220。不同的体全息光栅层220可以层叠设置在曲面波导层210的同一位置，也可以设置在曲面波导层210的不同位置，例如第一表面211、第二表面212或第一表面211与第二表面212之间。In the volume holographic curved waveguide 200, the volume holographic grating layer 220 is at least used to realize the outcoupling or turning function, and accordingly, it at least covers the outcoupling area or the turning area of the volume holographic curved waveguide 200. That is, the volume holographic grating layer 220 can only cover the outcoupling area or only cover the turning area, or cover the turning area and the outcoupling area, cover the incoupling area and the outcoupling area, or cover the incoupling area and the turning area, and can also cover the incoupling area, the turning area, and the outcoupling area to realize the corresponding functions. In other words, the volume holographic grating layer 220 can be an outcoupling grating or a turning grating, or a collection of an outcoupling grating and a turning grating, or a collection of an outcoupling grating and/or a turning grating and an incoupling grating. The corresponding functions of the incoupling area, the turning area, or the outcoupling area not covered by the volume holographic grating layer 220 can be realized by using other types of gratings such as surface relief gratings, wherein the turning area can also be eliminated. Of course, the coupling-in function, coupling-out function, and even the turning function of the volume holographic curved waveguide 200 are preferably implemented by the volume holographic grating layer 220. The volume holographic grating layer 220 covering different functional areas can be the same volume holographic grating layer 220, or different volume holographic grating layers 220. Different volume holographic grating layers 220 can be stacked and arranged at the same position of the curved waveguide layer 210, or can be arranged at different positions of the curved waveguide layer 210, such as the first surface 211, the second surface 212, or between the first surface 211 and the second surface 212.
体全息光栅层220的前身是全息光敏材料层。当来自不同方向的参考光和信号光在全息光敏材料层发生干涉时，其干涉条纹会被记录到全息光敏材料层中，形成体全息光栅层220。当投影光机100所出射的光束经过该体全息光栅层220时，会发生衍射，从而实现耦入、耦出、转折等功能。The predecessor of the volume holographic grating layer 220 is a holographic photosensitive material layer. When the reference light and the signal light from different directions interfere with each other in the holographic photosensitive material layer, the interference fringes will be recorded in the holographic photosensitive material layer to form the volume holographic grating layer 220. When the light beam emitted by the projection optical machine 100 passes through the volume holographic grating layer 220, diffraction will occur, thereby realizing the functions of coupling in, coupling out, and turning.
图3示意了制作上述体全息曲面波导200的方法。该方法可以直接在曲面波导层210上曝光全息光敏材料层，具体可以曝光形成用于耦出的体全息光栅层220，也可以曝光形成用于转折的体全息光栅层220，还可以曝光形成用于转折和耦出的体全息光栅层220。如图3所示，该方法可以包括如下曝光步骤。Fig. 3 illustrates a method for manufacturing the above-mentioned volume holographic curved waveguide 200. The method can directly expose the holographic photosensitive material layer on the curved waveguide layer 210, specifically, can expose to form a volume holographic grating layer 220 for outcoupling, can also expose to form a volume holographic grating layer 220 for turning, can also expose to form a volume holographic grating layer 220 for turning and outcoupling. As shown in Fig. 3, the method can include the following exposure steps.
步骤S311：根据虚拟影像的像素分布，将参考光调整为对应第i像素的单像素参考光，将信号光调整为对应第i像素的单像素信号光。Step S311 : According to the pixel distribution of the virtual image, the reference light is adjusted to be a single-pixel reference light corresponding to the i-th pixel, and the signal light is adjusted to be a single-pixel signal light corresponding to the i-th pixel.
投影光机100出射的虚拟影像为全彩影像时，其所出射的光线含多种颜色的光，要求体全息光栅层220各处具有相同的表面周期，才能避免不同颜色相互串扰。针对耦出区和转折区，曝光形成体全息光栅层220的参考光通常具有较大的入射角，很容易在波导界面发生反射。对于平面波导而言，即便参考光在波导界面发生反射，由其反射光和信号光干涉形成的体全息光栅的表面周期，也与由参考光和信号光干涉形成的体全息光栅的表面周期一致。而对于曲面波导来说，如果参考光在波导界面发生反射，由其反射光和信号光干涉形成的体全息光栅的表面周期，则不同于由参考光和信号光干涉形成的体全息光栅的表面周期。When the virtual image emitted by the projection optical machine 100 is a full-color image, the light emitted contains light of multiple colors, and the volume holographic grating layer 220 is required to have the same surface period everywhere to avoid crosstalk between different colors. For the outcoupling area and the turning area, the reference light exposed to form the volume holographic grating layer 220 usually has a large incident angle, and it is easy to reflect at the waveguide interface. For a planar waveguide, even if the reference light is reflected at the waveguide interface, the surface period of the volume holographic grating formed by the interference of its reflected light and the signal light is consistent with the surface period of the volume holographic grating formed by the interference of the reference light and the signal light. For a curved waveguide, if the reference light is reflected at the waveguide interface, the surface period of the volume holographic grating formed by the interference of its reflected light and the signal light is different from the surface period of the volume holographic grating formed by the interference of the reference light and the signal light.
投影光机100出射的虚拟影像包含多个像素，每个像素所对应的光线在体全息曲面波导200中传输的情况不同。以虚拟影像的像素分布为依据，将参考光调整为对应第i像素的单像素参考光，并将信号光调整为对应第i像素的单像素信号光，可以使由该单像素参考光和单像素信号光干涉形成的单像素体全息光栅只能被同样对应第i像素的投影光束照亮，被对应其它像素的投影光束照射时不会复现出信号光，因而不会被照亮。与由多像素参考光和多像素信号光干涉形成的多像素体全息光栅相比，单像素体全息光栅只衍射单个特定像素的投影光束，即便该单像素体全息光栅各处的表面周期不一致，也不会产生串扰，由多个单像素体全息光栅组成的体全息光栅层可以确保全彩影响的传输。The virtual image emitted by the projection optical machine 100 includes multiple pixels, and the light corresponding to each pixel is transmitted differently in the volume holographic curved waveguide 200. Based on the pixel distribution of the virtual image, the reference light is adjusted to the single-pixel reference light corresponding to the i-th pixel, and the signal light is adjusted to the single-pixel signal light corresponding to the i-th pixel, so that the single-pixel volume holographic grating formed by the interference of the single-pixel reference light and the single-pixel signal light can only be illuminated by the projection light beam corresponding to the i-th pixel, and will not reproduce the signal light when illuminated by the projection light beam corresponding to other pixels, so it will not be illuminated. Compared with the multi-pixel volume holographic grating formed by the interference of multi-pixel reference light and multi-pixel signal light, the single-pixel volume holographic grating only diffracts the projection light beam of a single specific pixel. Even if the surface period of the single-pixel volume holographic grating is inconsistent at various locations, crosstalk will not be generated. The volume holographic grating layer composed of multiple single-pixel volume holographic gratings can ensure the transmission of full-color effects.
步骤S312：将单像素参考光耦入曲面波导层，使其在曲面波导层内部进行全反射传播，并在全反射传播过程中照射全息光敏材料层，与此同时，将单像素信号光径直出射在全息光敏材料层上，单像素参考光与单像素信号光在全息光敏材料层上发生干涉，全息光敏材料层记录第i像素对应的干涉条纹。Step S312: couple the single-pixel reference light into the curved waveguide layer, so that it is totally reflected and propagated inside the curved waveguide layer, and irradiates the holographic photosensitive material layer during the totally reflected propagation process. At the same time, the single-pixel signal light is directly emitted onto the holographic photosensitive material layer, and the single-pixel reference light and the single-pixel signal light interfere with each other on the holographic photosensitive material layer, and the holographic photosensitive material layer records the interference fringes corresponding to the i-th pixel.
单像素参考光可以通过预先设置在曲面波导层210上的耦入光栅耦入曲面波导层210。该耦入光栅可以设置在曲面波导层210的耦入区，还可以作为最终产品的一部分，用于将来自投影光机100的光线耦合进入曲面波导层210，使得该光线可以在曲面波导层210的第一表面211与第二表面212之间进行全反射传播。耦入光栅可以是体全息光栅，也可以是表面浮雕光栅。无论是体全息光栅还是表面浮雕光栅，耦入光栅都可以先成型再安装到曲面波导层210。对于体全息光栅而言，由于投影光机100投射进入体全息曲面波导200的光线的入射角一般较小，相应地，用于曝光形成耦入光栅的参考光的入射角也不大，不容易反光而造成对干涉条纹的影响，因而可以采用传统的曝光方法直接在曲面波导层210的耦入区曝光形成耦入光栅。耦入曲面波导层210的单像素参考光将在曲面波导层210内部进行全反射传播，并在全反射传播的过程中照射到全息光敏材料层，有利于避免杂光，以免对干涉条纹造成影响。The single pixel reference light can be coupled into the curved waveguide layer 210 through a coupling grating pre-set on the curved waveguide layer 210. The coupling grating can be set in the coupling region of the curved waveguide layer 210, and can also be used as a part of the final product to couple the light from the projection optical machine 100 into the curved waveguide layer 210, so that the light can be totally reflected and propagated between the first surface 211 and the second surface 212 of the curved waveguide layer 210. The coupling grating can be a volume holographic grating or a surface relief grating. Whether it is a volume holographic grating or a surface relief grating, the coupling grating can be formed first and then installed on the curved waveguide layer 210. For the volume holographic grating, since the incident angle of the light projected by the projection optical machine 100 into the volume holographic curved waveguide 200 is generally small, correspondingly, the incident angle of the reference light used for exposure to form the coupling grating is also small, and it is not easy to reflect light and cause the influence on the interference fringes. Therefore, the conventional exposure method can be used to directly expose the coupling region of the curved waveguide layer 210 to form the coupling grating. The single-pixel reference light coupled into the curved waveguide layer 210 will be fully reflected and propagated inside the curved waveguide layer 210, and will irradiate the holographic photosensitive material layer during the process of total reflection and propagation, which is conducive to avoiding stray light and thus avoiding the influence on the interference fringes.
单像素信号光可以从曲面波导层210的一侧向曲面波导层210出射，曲面波导层210朝向单像素信号光的表面211可以称之为正面，背向单像素信号光的表面212可以称之为背面。单像素信号光可以直接照射到位于曲面波导层210正面的全息光敏材料层，也可以径直穿过曲面波导层210照射到位于曲面波导层210内部或背面的全息光敏材料层。相互叠加于全息光敏材料层的单像素信号光和单像素参考光会在该像素对应的位置上发生干涉，全息光敏材料层将记录单像素信号光和单像素参考光的波前信息以及干涉条纹的空间分布情况，形成体全息光栅。The single-pixel signal light can be emitted from one side of the curved waveguide layer 210 toward the curved waveguide layer 210. The surface 211 of the curved waveguide layer 210 facing the single-pixel signal light can be referred to as the front surface, and the surface 212 facing away from the single-pixel signal light can be referred to as the back surface. The single-pixel signal light can directly irradiate the holographic photosensitive material layer located on the front surface of the curved waveguide layer 210, or can directly pass through the curved waveguide layer 210 to irradiate the holographic photosensitive material layer located inside or on the back surface of the curved waveguide layer 210. The single-pixel signal light and the single-pixel reference light superimposed on the holographic photosensitive material layer will interfere at the position corresponding to the pixel, and the holographic photosensitive material layer will record the wavefront information of the single-pixel signal light and the single-pixel reference light as well as the spatial distribution of the interference fringes to form a volume holographic grating.
步骤S313：令i＝i+1，重复步骤S311～S312，直至全息光敏材料层记录下所有像素对应的干涉条纹，形成体全息光栅层220。Step S313 : let i=i+1, and repeat steps S311 to S312 until the holographic photosensitive material layer records the interference fringes corresponding to all pixels, thereby forming a volume holographic grating layer 220 .
对应第i像素的单像素参考光和单像素信号光干涉只能形成对应第i像素的单像素体全息光栅，该单像素体全息光栅只衍射对应第i像素的投影光束，只有让全息光敏材料层记录下对应各个像素的干涉条纹，形成对应各个像素的单像素体全息光栅，才能确保虚拟影像的各个像素都能被呈现。按照步骤S311～S312，针对虚拟影像的各个像素进行逐一曝光，每次曝光只记录一个像素对应的干涉条纹，有多少个像素就曝光多少次，假设虚拟影像含有m×n个像素，则须曝光m×n次，直到把所有像素对应的干涉条纹都记录下来，便形成最终的体全息光栅层220。The interference of the single-pixel reference light and the single-pixel signal light corresponding to the i-th pixel can only form a single-pixel volume holographic grating corresponding to the i-th pixel. The single-pixel volume holographic grating only diffracts the projection light beam corresponding to the i-th pixel. Only by allowing the holographic photosensitive material layer to record the interference fringes corresponding to each pixel and forming a single-pixel volume holographic grating corresponding to each pixel can it be ensured that each pixel of the virtual image can be presented. According to steps S311 to S312, each pixel of the virtual image is exposed one by one, and each exposure only records the interference fringes corresponding to one pixel. The number of exposures is the same as the number of pixels. Assuming that the virtual image contains m×n pixels, it must be exposed m×n times until the interference fringes corresponding to all pixels are recorded, thereby forming the final volume holographic grating layer 220.
采用上述方法曝光形成的体全息光栅层220，会对每个像素的传输光线进行特定的衍射，既能避免不同波长的光相互串扰，又能使之出射为同心光束，有利于成像。成像过程中，投影光机100出射的光线将沿着曝光制作时参考光的方向耦入体全息曲面波导200中，在曲面波导层210内进行全反射传播，传播到转折区的体全息光栅层220时通过衍射原理改变传播方向，传播到耦出区的体全息光栅层220时通过衍射原理再现信号光的信息。由于体全息光栅层220记录了虚拟影像的所有像素，所以再现时虚拟影像的所有像素都会再现出来，形成一个虚像，人眼通过这个体全息曲面波导200就能看到这个虚像。对于耦出区，若曝光时的信号光是平行光束，则再现的信号光也是平行光束，人眼会在体全息曲面波导200上看见一个无穷远的虚像，如图7；若曝光时的信号光是发散光束，则再现的信号光也是发散光束，人眼会在体全息曲面波导200上看见一个有限远的虚像，如图8，该虚像的距离可以调节，调节方法将在下文进行详细描述。The volume holographic grating layer 220 formed by exposure using the above method will perform specific diffraction on the transmission light of each pixel, which can not only avoid crosstalk between lights of different wavelengths, but also make them emerge as concentric light beams, which is conducive to imaging. During the imaging process, the light emitted by the projection optical machine 100 will be coupled into the volume holographic curved waveguide 200 along the direction of the reference light during exposure, and will be propagated by total reflection in the curved waveguide layer 210. When it propagates to the volume holographic grating layer 220 in the turning area, the propagation direction will be changed according to the diffraction principle. When it propagates to the volume holographic grating layer 220 in the outcoupling area, the information of the signal light will be reproduced according to the diffraction principle. Since the volume holographic grating layer 220 records all the pixels of the virtual image, all the pixels of the virtual image will be reproduced during reproduction to form a virtual image, and the human eye can see this virtual image through this volume holographic curved waveguide 200. For the out-coupling region, if the signal light during exposure is a parallel beam, the reproduced signal light is also a parallel beam, and the human eye will see an infinitely far virtual image on the volume holographic curved waveguide 200, as shown in FIG7 ; if the signal light during exposure is a divergent beam, the reproduced signal light is also a divergent beam, and the human eye will see a finitely far virtual image on the volume holographic curved waveguide 200, as shown in FIG8 . The distance of the virtual image can be adjusted, and the adjustment method will be described in detail below.
此外，本方法还可以包括如下前处理步骤，这些步骤需要在曝光前执行。In addition, the method may further include the following pre-processing steps, which need to be performed before exposure.
S301：根据佩戴者的眼部参数定制处方眼镜片作为曲面波导层。S301: Customizing a prescription eyeglass lens as a curved waveguide layer according to eye parameters of the wearer.
无论是普通人群还是近视、远视等特殊人群，曲面波导层210都可以采用根据佩戴者的眼部参数进行定制的处方眼镜片，以使视觉效果更清晰舒适，眼睛更加轻松，以免引起视觉疲劳等问题。对于普通人群而言，曲面波导层210还可以采用普适性的眼镜片，以提高制作效率，降低制作成本。Whether it is the general population or special populations such as myopia and hyperopia, the curved waveguide layer 210 can use prescription eyeglasses customized according to the wearer's eye parameters to make the visual effect clearer and more comfortable, and the eyes more relaxed, so as to avoid visual fatigue and other problems. For the general population, the curved waveguide layer 210 can also use universal eyeglasses to improve production efficiency and reduce production costs.
S302：将全息光敏材料层设置在曲面波导层上。S302: Disposing a holographic photosensitive material layer on the curved waveguide layer.
全息光敏材料层由对参考光和信号光敏感的全息光敏材料形成，全息光敏材料可以通过旋涂、喷涂、涂布等方式涂覆在曲面波导层210的表面，即第一表面211或第二表面212，也可以通过灌注的方式充盈在曲面波导层210的内部，即第一表面211与第二表面212之间，形成设置在曲面波导层210上的全息光敏材料层。The holographic photosensitive material layer is formed of a holographic photosensitive material that is sensitive to the reference light and the signal light. The holographic photosensitive material can be coated on the surface of the curved waveguide layer 210, i.e., the first surface 211 or the second surface 212, by spin coating, spray coating, or the like, or can be filled into the interior of the curved waveguide layer 210, i.e., between the first surface 211 and the second surface 212, by injection to form a holographic photosensitive material layer disposed on the curved waveguide layer 210.
图4～13示意了制作上述体全息曲面波导200的装置及其制得的体全息曲面波导200的成像光路。该装置可以直接在曲面波导层210上曝光全息光敏材料层221，具体可以曝光形成用于耦出的体全息光栅层220，也可以曝光形成用于转折的体全息光栅层220，还可以曝光形成用于转折和耦出的体全息光栅层220。如图4所示，该装置包括参考光生成器410和信号光生成器420，用于干涉曝光位于曲面波导层210耦出区和/或转折区的全息光敏材料层221，使之形成体全息光栅层220。4 to 13 illustrate an apparatus for making the above-mentioned volume holographic curved waveguide 200 and an imaging optical path of the made volume holographic curved waveguide 200. The apparatus can directly expose the holographic photosensitive material layer 221 on the curved waveguide layer 210, specifically, can expose to form a volume holographic grating layer 220 for outcoupling, can also expose to form a volume holographic grating layer 220 for turning, and can also expose to form a volume holographic grating layer 220 for turning and outcoupling. As shown in FIG4 , the apparatus includes a reference light generator 410 and a signal light generator 420, which are used for interference exposure of the holographic photosensitive material layer 221 located in the outcoupling region and/or turning region of the curved waveguide layer 210, so as to form a volume holographic grating layer 220.
参考光生成器410用于产生对应第i像素的单像素参考光，单像素参考光耦入曲面波导层210后在曲面波导层210内部进行全反射传播，并在全反射传播过程中照射全息光敏材料层221。信号光生成器420用于产生对应第i像素的单像素信号光，单像素信号光径直出射在全息光敏材料层221上。单像素参考光和单像素信号光在全息光敏材料层221上发生干涉，其干涉条纹被全息光敏材料层221记录。The reference light generator 410 is used to generate a single-pixel reference light corresponding to the i-th pixel. After the single-pixel reference light is coupled into the curved waveguide layer 210, it is totally reflected and propagated inside the curved waveguide layer 210, and irradiates the holographic photosensitive material layer 221 during the totally reflected propagation process. The signal light generator 420 is used to generate a single-pixel signal light corresponding to the i-th pixel. The single-pixel signal light is directly emitted on the holographic photosensitive material layer 221. The single-pixel reference light and the single-pixel signal light interfere with each other on the holographic photosensitive material layer 221, and the interference fringes are recorded by the holographic photosensitive material layer 221.
参考光生成器410包括参考光光源411、第一空间光调制器412和第一透镜组413，参考光光源411产生参考光并出射至第一空间光调制器412，第一空间光调制器412将参考光调制为对应第i像素的单像素的第一点光源并出射至第一透镜组413，第一透镜组413对第一点光源进行整形并出射为前述单像素参考光。第一空间光调制器412可以是透射式空间光调制器，也可以是反射式空间光调制器。第一透镜组413可以将第一点光源整形为平行光束(如图8和图12)，也可以将第一点光源整形为发散光束(如图9和图13)。换言之，第一透镜组413出射的单像素参考光可以是平行光束，也可以是发散光束，对于虚像的再现没有影响。The reference light generator 410 includes a reference light source 411, a first spatial light modulator 412 and a first lens group 413. The reference light source 411 generates a reference light and emits it to the first spatial light modulator 412. The first spatial light modulator 412 modulates the reference light into a first point light source of a single pixel corresponding to the i-th pixel and emits it to the first lens group 413. The first lens group 413 shapes the first point light source and emits it as the aforementioned single-pixel reference light. The first spatial light modulator 412 can be a transmissive spatial light modulator or a reflective spatial light modulator. The first lens group 413 can shape the first point light source into a parallel light beam (as shown in Figures 8 and 12), or it can shape the first point light source into a divergent light beam (as shown in Figures 9 and 13). In other words, the single-pixel reference light emitted by the first lens group 413 can be a parallel light beam or a divergent light beam, which has no effect on the reproduction of the virtual image.
信号光生成器420包括信号光光源421、第二空间光调制器422和第二透镜组423，信号光光源421产生信号光并出射至第二空间光调制器422，第二空间光调制器422将信号光调制为对应第i像素的单像素的第二点光源并出射至第二透镜组423，第二透镜组423对第二点光源进行整形并出射为前述单像素信号光。第二空间光调制器422可以是透射式空间光调制器，也可以是反射式空间光调制器。第二透镜组423可以将第二点光源整形为平行光束(如图8～9)，也可以将第二点光源整形为发散光束(如图12～13)。若单像素信号光为平行光束，则所得体全息曲面波导200再现的虚像在无穷远，如图6～7。若单像素信号光为发散光束，则所得体全息曲面波导200再现的虚像在有限远，如图10～11。The signal light generator 420 includes a signal light source 421, a second spatial light modulator 422 and a second lens group 423. The signal light source 421 generates signal light and emits it to the second spatial light modulator 422. The second spatial light modulator 422 modulates the signal light into a second point light source of a single pixel corresponding to the i-th pixel and emits it to the second lens group 423. The second lens group 423 shapes the second point light source and emits it as the aforementioned single-pixel signal light. The second spatial light modulator 422 can be a transmissive spatial light modulator or a reflective spatial light modulator. The second lens group 423 can shape the second point light source into a parallel light beam (as shown in Figures 8 to 9), or it can shape the second point light source into a divergent light beam (as shown in Figures 12 to 13). If the single-pixel signal light is a parallel light beam, the virtual image reproduced by the resulting volume holographic curved waveguide 200 is at infinity, as shown in Figures 6 to 7. If the single-pixel signal light is a divergent light beam, the virtual image reconstructed by the resulting volume holographic curved waveguide 200 is at a finite distance, as shown in FIGS. 10-11 .
对于有限远的虚像，虚像I’至全息光敏材料层221的距离VID等于第二空间光调制器422至第二透镜组423的距离d1与第二透镜组423至全息光敏材料层221的距离d2之和，即VID＝d1+d2，其中第二空间光调制器422至第二透镜组423的距离d1等于第二透镜组423的物距u，即d1＝u，第二透镜组423至全息光敏材料层221的距离d2等于第二透镜组423的物距v，即d2＝v。根据成像公式1/u+1/v＝1/f(f表示第二透镜组423的焦距)可知，调节第二透镜组423的焦距f、第二空间光调制器422至第二透镜组423的距离d1和/或第二透镜组423至全息光敏材料层221的距离d2，即可调节虚像I’至体全息光栅层220的距离VID，从而制作出不同虚像距的体全息曲面波导200，使得虚像距离VID也能够适配不同视力的人群。For a virtual image at finite distance, a distance VID from the virtual image I' to the holographic photosensitive material layer 221 is equal to the sum of a distanced1 from the second spatial light modulator 422 to the second lens group 423 and a distanced2 from the second lens group 423 to the holographic photosensitive material layer 221, i.e., VID=d1 +d2 , wherein the distanced1 from the second spatial light modulator 422 to the second lens group 423 is equal to an object distance u of the second lens group 423, i.e.,d1 =u, and a distanced2 from the second lens group 423 to the holographic photosensitive material layer 221 is equal to an object distance v of the second lens group 423, i.e.,d2 =v. According to the imaging formula 1/u+1/v=1/f (f represents the focal length of the second lens group 423), it can be known that by adjusting the focal length f of the second lens group 423, the distanced1 from the second spatial light modulator 422 to the second lens group 423 and/or the distanced2 from the second lens group 423 to the holographic photosensitive material layer 221, the distance VID from the virtual image I' to the volume holographic grating layer 220 can be adjusted, so that the volume holographic curved waveguide 200 with different virtual image distances can be manufactured, so that the virtual image distance VID can also be adapted to people with different vision.
为方便调节有限远虚像的距离，本装置还可以包括第一移动机构(未示出)、第二移动机构(未示出)、第三移动机构(未示出)中的至少两种。信号光光源421和第二空间光调制器422安装在第一移动机构上，以便通过第一移动机构调节第二空间光调制器422的位置，从而调节第二空间光调制器422至第二透镜组423的距离d1。第二透镜组423安装在第二移动机构上，以便通过第二移动机构调节第二透镜组423的位置，从而调节第二空间光调制器422至第二透镜组423的距离d1和/或第二透镜组423至全息光敏材料层221的距离d2。体全息曲面波导200安装在第三移动机构上，以便通过第三移动机构调节体全息曲面波导200的位置，从而调节第二透镜组423至全息光敏材料层221的距离d2。In order to facilitate the adjustment of the distance of the virtual image at a finite distance, the device may further include at least two of a first moving mechanism (not shown), a second moving mechanism (not shown), and a third moving mechanism (not shown). The signal light source 421 and the second spatial light modulator 422 are mounted on the first moving mechanism, so that the position of the second spatial light modulator 422 is adjusted by the first moving mechanism, thereby adjusting the distance d1 from the second spatial light modulator 422 to the second lens group 423. The second lens group 423 is mounted on the second moving mechanism, so that the position of the second lens group 423 is adjusted by the second moving mechanism, thereby adjusting the distance d 1from the second spatial light modulator 422 to the second lens group 423 and/or the distance d2 from the second lens group 423 to the holographic photosensitive material layer 221. The volume holographic curved waveguide 200 is mounted on the third moving mechanism, so that the position of the volume holographic curved waveguide 200 is adjusted by the third moving mechanism, thereby adjusting the distance d2 from the second lens group 423 to the holographic photosensitive material layer 221.
本装置还可以包括载物台(未示出)，以便安装定位待曝光的体全息曲面波导200。载物台可以安装在第三移动机构上，以便通过第三移动机构调节载物台的位置，即调节第二透镜组423至全息光敏材料层221的距离d2，从而调节有限远虚像的距离。The device may further include a stage (not shown) to install and position the volume holographic curved waveguide 200 to be exposed. The stage may be installed on a third moving mechanism, so that the position of the stage can be adjusted by the third moving mechanism, that is, the distanced2 from the second lens group 423 to the holographic photosensitive material layer 221 can be adjusted, thereby adjusting the distance of the finite distance virtual image.
本装置还可以包括耦入器，以便将单像素参考光耦入曲面波导层210。该耦入器包括耦入光栅300，具体可以是体全息光栅，也可以是表面浮雕光栅，可以通过贴合等方式固定安装在待曝光的体全息曲面波导200表面。除此之外，单像素参考光还可以通过体全息曲面波导200自带的耦入光栅300耦入曲面波导层210，该耦入光栅300可以是体全息光栅，还可以是表面浮雕光栅，可以通过贴合等方式固定在体全息曲面波导200中。若体全息曲面波导200自带的耦入光栅300是体全息光栅，还可以通过传统的曝光方法在曲面波导层210上曝光成型。The device may also include a coupler to couple the single-pixel reference light into the curved waveguide layer 210. The coupler includes a coupling grating 300, which may be a volume holographic grating or a surface relief grating, and may be fixedly mounted on the surface of the volume holographic curved waveguide 200 to be exposed by bonding or the like. In addition, the single-pixel reference light may also be coupled into the curved waveguide layer 210 through the coupling grating 300 provided by the volume holographic curved waveguide 200, and the coupling grating 300 may be a volume holographic grating or a surface relief grating, and may be fixed in the volume holographic curved waveguide 200 by bonding or the like. If the coupling grating 300 provided by the volume holographic curved waveguide 200 is a volume holographic grating, it may also be exposed and formed on the curved waveguide layer 210 by conventional exposure methods.
本装置还可以包括具有空腔的箱体(未示出)，上述参考光生成器410、信号光生成器420、载物台等器件都安装在该空腔中，既便于器件的装配定位，又利于营造适合曝光的环境。The device may also include a box (not shown) having a cavity, in which the reference light generator 410, signal light generator 420, stage and other devices are installed, which is convenient for assembly and positioning of the devices and helps to create an environment suitable for exposure.
显然，本方案的上述实施例仅仅是为清楚地说明本方案所作的举例，而并非是对本方案的实施方式的限定。对于所属领域的普通技术人员来说，在上述说明的基础上还可以做出其它不同形式的变化或变动。这里无需也无法对所有的实施方式予以穷举。凡在本方案的精神和原则之内所作的任何修改、等同替换和改进等，均应包含在本方案权利要求的保护范围之内。Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included in the protection scope of the claims of the present invention.
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