技术领域Technical Field
本发明属于微波器件技术领域，涉及一种环行器用微波复合基板及其制备方法。The invention belongs to the technical field of microwave devices and relates to a microwave composite substrate for a circulator and a preparation method thereof.
技术背景technical background
微波环行器是微波收发系统中的重要组件，其在实现微波信号发射和环行接收的同时，对反向传输的微波信号进行隔离，起到稳定和保护微波发射电路的作用。为了实现微带环行器的小型化、高性能和低损耗，一种采用高介电介质陶瓷外环和旋磁铁氧体磁芯组成的环行器复合基板相比全铁氧体基板具有更广泛的应用。Microwave circulator is an important component in microwave transceiver system. It can realize microwave signal transmission and circumferential reception, and isolate the reversely transmitted microwave signal, which plays a role in stabilizing and protecting the microwave transmission circuit. In order to achieve miniaturization, high performance and low loss of microstrip circulator, a circulator composite substrate composed of high dielectric ceramic outer ring and gyromagnetic ferrite core has a wider application than all-ferrite substrate.
现有技术中的环行器复合基板，除了粘接的方式制备以外，最常用的方法就是微波陶瓷生坯和铁氧体生坯在高温下共烧制备，然而这类方法制备的环行器复合基板工艺难度大，且复合基板中两相之间的金属阳离子在长时间高温下交互扩散严重，会严重影响铁氧体磁芯传输电磁波以及陶瓷外环介质波导的性能，降低环行器的整体性能。In the prior art, in addition to the preparation method of bonding, the most commonly used method for circulator composite substrates is to co-fire microwave ceramic green bodies and ferrite green bodies at high temperatures. However, the preparation process of circulator composite substrates by this method is difficult, and the metal cations between the two phases in the composite substrate are severely cross-diffused under long-term high temperature, which will seriously affect the performance of the ferrite core in transmitting electromagnetic waves and the ceramic outer ring dielectric waveguide, thereby reducing the overall performance of the circulator.
发明内容Summary of the invention
本发明的目的是提供一种新的二次共烧烧结方法实现环行器复合基板的制备，该方法用于环行器复合基板，其目的在于降低铁氧体和介电陶瓷异质匹配共烧难度以及改善界面离子扩散对环行器性能造成的不利影响，以实现小型化和高性能的微带环行器。The purpose of the present invention is to provide a new secondary co-firing sintering method for preparing a circulator composite substrate. The method is used for a circulator composite substrate, and its purpose is to reduce the difficulty of heterogeneous matching co-firing of ferrite and dielectric ceramics and to improve the adverse effects of interface ion diffusion on circulator performance, so as to realize a miniaturized and high-performance microstrip circulator.
陶瓷在一次烧结后往往致密度不高，内部仍存在部分孔隙，这就为陶瓷在二次烧结过程中的进一步致密化提供了条件。本发明则是利用了陶瓷在二次烧结过程中晶粒进一步生长，气孔排除导致的尺寸略微收缩实现微波复合基板的制备。After the first sintering, the density of ceramics is often not high, and some pores still exist inside, which provides conditions for further densification of ceramics during the second sintering process. The present invention utilizes the further growth of ceramic grains during the second sintering process and the slight shrinkage of the size caused by the elimination of pores to achieve the preparation of microwave composite substrates.
具体技术方案为：一种环行器用微波复合基板的制备方法，包括以下步骤：The specific technical solution is: a method for preparing a microwave composite substrate for a circulator, comprising the following steps:
(1)铁氧体圆柱制备：根据设计要求，将压制好的铁氧体圆柱生坯使用固相合成法在高温下一次烧结成符合设计要求的介电常数、饱和磁化强度以及铁磁共振线宽的铁氧体基片，通过调控烧结收缩率或者采用精密加工设备加工得到所需要直径的圆片；(1) Preparation of ferrite cylinders: According to the design requirements, the pressed ferrite cylinder green body is sintered at high temperature by solid phase synthesis method to form a ferrite substrate with dielectric constant, saturation magnetization and ferromagnetic resonance line width that meets the design requirements. The required diameter of the disc is obtained by adjusting the sintering shrinkage rate or using precision processing equipment;
(2)微波介电陶瓷环的制备：根据设计要求，将压制好的高介电常数陶瓷环生坯使用固相合成法在高温下一次烧结成具有高介电常数、低介电损耗的微波介质陶瓷环，再根据制备的铁氧体圆柱的直径以及二者之间预留的缝隙大小，通过调控烧结收缩率或者采用精密加工设备加工得到所需内环直径的圆环。(2) Preparation of microwave dielectric ceramic rings: According to the design requirements, the pressed high dielectric constant ceramic ring green body is sintered at high temperature once using a solid phase synthesis method to form a microwave dielectric ceramic ring with high dielectric constant and low dielectric loss. Then, according to the diameter of the prepared ferrite cylinder and the size of the gap reserved between the two, the ring with the required inner ring diameter is obtained by adjusting the sintering shrinkage rate or using precision machining equipment.
(3)微波铁氧体复合基片的制备：将微波介质陶瓷环放置在表面干净、平整的氧化铝承烧板上，将铁氧体柱缓慢塞进微波介质陶瓷环中；(3) Preparation of microwave ferrite composite substrate: Place a microwave dielectric ceramic ring on an alumina support plate with a clean and flat surface, and slowly insert the ferrite column into the microwave dielectric ceramic ring;
(4)嵌合后的基片采用马弗炉进行二次共烧；(4) The intercalated substrates are co-fired twice in a muffle furnace;
(5)将烧结后的复合基板进行研磨、抛光处理，以便观察表面是否存在裂痕以及连接处元素扩散情况。(5) Grind and polish the sintered composite substrate to observe whether there are cracks on the surface and the diffusion of elements at the joints.
所述铁氧体为(Ni系、Li系)尖晶石结构、石榴石结构的一种或多种复合,介电常数为：10～30，饱和磁化强度为：1000GS～5000GS,铁磁共振线宽为：20Oe～500Oe；The ferrite is a composite of one or more (Ni-based, Li-based) spinel structure and garnet structure, with a dielectric constant of 10 to 30, a saturation magnetization of 1000 GS to 5000 GS, and a ferromagnetic resonance line width of 20 Oe to 500 Oe;
所述高介电常数微波陶瓷环不限定为钛酸镁、镁钙钛等一种或多种高介电常数复合陶瓷；The high dielectric constant microwave ceramic ring is not limited to one or more high dielectric constant composite ceramics such as magnesium titanate, magnesium calcium titanium, etc.;
所述铁氧体圆柱生坯直径为：4mm～9.94mm；The diameter of the ferrite cylindrical green body is: 4mm～9.94mm;
所述铁氧体圆柱一次烧结后尺寸范围为：3.38mm～8.44mm；The size range of the ferrite cylinder after primary sintering is: 3.38mm～8.44mm;
所述高介电陶瓷环生坯尺寸为：内径4mm～10mm，外径6mm～20mm；The green size of the high dielectric ceramic ring is: inner diameter 4mm-10mm, outer diameter 6mm-20mm;
所述高介电陶瓷环一次烧结后内环直径尺寸范围为：3.39mm～8.45mm；The inner ring diameter of the high dielectric ceramic ring after primary sintering is in the range of 3.39 mm to 8.45 mm;
所述铁氧体圆柱一次烧结温度为：950℃～1350℃，时间为：2-6h；The primary sintering temperature of the ferrite cylinder is 950°C to 1350°C, and the sintering time is 2-6h;
所述高介电陶瓷环一次烧结温度为：900℃～1300℃，时间为：2-6h；The primary sintering temperature of the high dielectric ceramic ring is 900°C to 1300°C, and the sintering time is 2-6h;
所述嵌合后的复合基片二次烧结温度为：800℃～1300℃，时间为：10min～4h。The secondary sintering temperature of the embedded composite substrate is 800° C. to 1300° C., and the time is 10 minutes to 4 hours.
与现有技术相比，本发明具有如下有益效果：Compared with the prior art, the present invention has the following beneficial effects:
一、根据电磁波传输理论，基板材料的介电常数越高，电磁波的波长越小，器件体积也就越小，选用高介电常数的介质陶瓷做外环，能够显著压缩环行器中匹配微带线的尺寸，有利于器件的小型化；1. According to the electromagnetic wave transmission theory, the higher the dielectric constant of the substrate material, the smaller the wavelength of the electromagnetic wave, and the smaller the device volume. Selecting high dielectric constant dielectric ceramics as the outer ring can significantly reduce the size of the matching microstrip line in the circulator, which is conducive to the miniaturization of the device;
二、相较于全铁氧体基片，介质陶瓷中不存在磁损耗，且介电损耗也极低，能够降低电磁波在匹配微带线中传输的损耗，从而降低器件的整体损耗；Second, compared with all-ferrite substrates, there is no magnetic loss in dielectric ceramics, and the dielectric loss is also extremely low, which can reduce the loss of electromagnetic waves transmitted in matching microstrip lines, thereby reducing the overall loss of the device;
三、传统的复合基片共烧工艺采用的是铁氧体圆柱生坯与介电陶瓷环生坯嵌套后共烧，为了防止开裂需要调控不同陶瓷的热膨胀系数和烧结温度一致，该方法难度大且符合要求的材料种类有限。而本发明提出的二次共烧方法能够将热膨胀系数和烧结温度不一致的陶瓷材料共烧在一起不开裂，大大降低了复合基板的制备难度。同时复合基片一体化过程主要发生在降温阶段，大大减少了铁氧体和介电陶瓷过渡区的离子扩散程度，有利于降低环行器的工作损耗。3. The traditional composite substrate co-firing process uses a ferrite cylindrical green body and a dielectric ceramic ring green body to be nested and co-fired. In order to prevent cracking, the thermal expansion coefficients and sintering temperatures of different ceramics need to be adjusted to be consistent. This method is difficult and the types of materials that meet the requirements are limited. The secondary co-firing method proposed in the present invention can co-fire ceramic materials with inconsistent thermal expansion coefficients and sintering temperatures without cracking, greatly reducing the difficulty of preparing the composite substrate. At the same time, the composite substrate integration process mainly occurs in the cooling stage, which greatly reduces the degree of ion diffusion in the transition zone between ferrite and dielectric ceramics, which is beneficial to reducing the working loss of the circulator.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1为本发明的环行器用复合基板示意图。FIG. 1 is a schematic diagram of a composite substrate for a circulator according to the present invention.
图2为本发明的环行器用复合基板二次共烧工艺流程示意图。FIG. 2 is a schematic diagram of the secondary co-firing process flow of the composite substrate for the circulator of the present invention.
图3为本发明的环行器用复合基板二次共烧工艺实物效果图。FIG. 3 is a diagram showing the actual effect of the secondary co-firing process of the composite substrate for the circulator of the present invention.
图4为本发明的环行器用复合基板二次共烧工艺实物局部放大效果图之一；FIG4 is one of the actual partial enlarged effect diagrams of the secondary co-firing process of the composite substrate for the circulator of the present invention;
图5为本发明的环行器用复合基板二次共烧工艺实物局部放大效果图之二；FIG5 is a second partial enlarged effect diagram of the secondary co-firing process of the composite substrate for the circulator of the present invention;
图中：1为高介电微波陶瓷环，2为铁氧体柱。In the figure: 1 is a high dielectric microwave ceramic ring, and 2 is a ferrite column.
具体实施方式Detailed ways
下面将结合实施例对本发明的具体实施方式做进一步详细描述。以下实施例用于说明本发明，所描述的实施例是本发明的一部分实施例，而不是全部的实施例。所有基于本发明宗旨范围内的合理的变换和组合均在本发明的保护范围内。The specific embodiments of the present invention will be described in further detail below in conjunction with the examples. The following examples are used to illustrate the present invention, and the described embodiments are part of the embodiments of the present invention, rather than all of the embodiments. All reasonable changes and combinations within the scope of the present invention's purpose are within the protection scope of the present invention.
为此，本发明提供了一种二次烧结法用于制备环行器用微波复合基板，环行器复合基板的结构如图1所示，包括高介电常数微波陶瓷环1、高性能铁氧体圆柱2。其制备流程如图2所示。To this end, the present invention provides a secondary sintering method for preparing a microwave composite substrate for a circulator. The structure of the circulator composite substrate is shown in FIG1 , and includes a high dielectric constant microwave ceramic ring 1 and a high-performance ferrite cylinder 2. The preparation process is shown in FIG2 .
所述高介电常数微波陶瓷环1采用固相法烧结制备而成，通过调控收缩率或者精密加工使圆环内径大小满足需求。The high dielectric constant microwave ceramic ring 1 is prepared by solid phase sintering, and the inner diameter of the ring is adjusted to meet the requirements by adjusting the shrinkage rate or precision processing.
所述高性能铁氧体圆柱2采用固相法烧结制备而成，通过调控收缩率或者精密加工使圆柱直径大小满足二次烧结过程需求。The high-performance ferrite cylinder 2 is prepared by solid-phase sintering, and the cylinder diameter is adjusted to meet the requirements of the secondary sintering process by adjusting the shrinkage rate or precision processing.
具体制备方法如下：The specific preparation method is as follows:
实施例一：Embodiment 1:
(1)铁氧体柱制备：(1) Preparation of ferrite columns:
根据Ni0.7Cu0.05Zn0.25Fe2O4的分子式的比例计算出所需的NiO、ZnO、CuO、原料重量，并采用缺铁配方计算并称量Fe2O3原料，将其配置得到主成分粉料。将主成分粉料进行一次球磨混合，一次球磨时长为4小时，球磨转速为250转/分钟，充分混合均匀后得到一次球磨后的混合料，其后置于恒温烘箱中烘干。然后将得到的混合料放入烧结炉中在850℃下保温两小时进行预烧处理，得到NiCuZn预烧主料。将聚乙烯醇(PVA)粘合剂加入到预烧料中造粒成型并使用直径为9.94mm的不锈钢压片模具压制成铁氧体圆柱胚体，最后将胚体放入烧结炉中，在烧结气氛为空气的条件下升温至1125℃并保温4小时，得到一次烧结直径为8.44mm的NiCuZn铁氧体圆柱。According to the ratio of the molecular formula of Ni0.7 Cu0.05 Zn0.25 Fe2 O4, the required weight of NiO, ZnO, CuO and raw materials is calculated, and the Fe2 O3 raw material is calculated and weighed using the iron-deficient formula, and the main component powder is configured. The main component powder is ball-milled for 4 hours at a ball-milling speed of 250 rpm. After fully mixing, the mixture after ball milling is obtained, which is then placed in a constant temperature oven for drying. Then the obtained mixture is placed in a sintering furnace and kept at 850°C for two hours for pre-sintering treatment to obtain NiCuZn pre-sintered main material. Polyvinyl alcohol (PVA) adhesive was added to the pre-sintered material for granulation and pressed into a ferrite cylindrical embryo using a stainless steel tableting mold with a diameter of 9.94 mm. Finally, the embryo was placed in a sintering furnace, heated to 1125°C in an air atmosphere and kept warm for 4 hours to obtain a NiCuZn ferrite column with a primary sintering diameter of 8.44 mm.
(2)微波介电陶瓷环的制备：(2) Preparation of microwave dielectric ceramic rings:
根据Li2MgTi3O4的分子式的比例计算出所需的Li2CO3、MgO、TiO2、原料重量，将其配置得到主成分粉料。将主成分粉料进行一次球磨混合，一次球磨时长为4小时，球磨转速为250转/分钟，充分混合均匀后得到一次球磨后的混合料，其后置于恒温烘箱中烘干。然后将得到的混合料放入烧结炉中在900℃下保温两小时进行预烧处理，得到Li2MgTi3O4预烧主料。将聚乙烯醇(PVA)粘合剂加入到预烧料中造粒成型并使用内径为10mm，外径为20mm的不锈钢压环模具压制成介电陶瓷圆环胚体，最后将胚体放入烧结炉中，在烧结气氛为空气的条件下升温至950℃并保温4小时，得到一次烧结内径为8.45mm的Li2MgTi3O4介电陶瓷圆环。According to the ratio of the molecular formula of Li2 MgTi3 O4, the required weight of Li2 CO3 , MgO, TiO2 and raw materials are calculated and configured to obtain the main component powder. The main component powder is subjected to a ball milling for 4 hours at a ball milling speed of 250 rpm. After being fully mixed, a ball milled mixture is obtained, which is then placed in a constant temperature oven for drying. The obtained mixture is then placed in a sintering furnace and kept at 900°C for two hours for pre-sintering treatment to obtain Li2 MgTi3 O4 pre-sintered main material. Polyvinyl alcohol (PVA) binder was added to the pre-sintered material for granulation and pressing into a dielectric ceramic ring embryo using a stainless steel pressing ring mold with an inner diameter of 10 mm and an outer diameter of 20 mm. Finally, the embryo was placed in a sintering furnace, heated to 950°C and kept warm for 4 hours under the condition of a sintering atmosphere of air, to obtain a Li2 MgTi3 O4 dielectric ceramic ring with a primary sintering inner diameter of 8.45 mm.
(3)复合基板的制备：将一次烧结完成的微波介质陶瓷环放置在表面干净、平整的氧化铝承烧板上，随后将一次烧结好的铁氧体柱缓慢嵌进介质陶瓷环中。嵌合好的基板放置在马弗炉中进行二次烧结，在烧结气氛为空气的条件下以2℃/分钟的升温速率缓慢升温至950℃并保温2小时，随后以-2℃/分钟的降温速率缓慢降温至600℃，最后使其自然冷却至室温，得到复合为一体的复合基片。烧结完成后使用研磨抛光机对基片表面进行研磨抛光，表面平整光滑无豁口即可。(3) Preparation of composite substrate: Place the microwave dielectric ceramic ring that has been sintered once on a clean and flat alumina support plate, and then slowly embed the ferrite column that has been sintered once into the dielectric ceramic ring. The embedded substrate is placed in a muffle furnace for secondary sintering. Under the condition that the sintering atmosphere is air, the temperature is slowly increased to 950°C at a heating rate of 2°C/min and kept at this temperature for 2 hours. Then the temperature is slowly decreased to 600°C at a cooling rate of -2°C/min, and finally it is naturally cooled to room temperature to obtain a composite substrate. After sintering, use a grinding and polishing machine to grind and polish the surface of the substrate until the surface is flat, smooth and without notches.
如图3所示，为所得的环行器用微波复合基板。实物表面磨抛过后如图4和图5所示，可以看到铁氧体柱与介电陶瓷环的连接区域没有明显的颜色改变，表明复合基板两相之间的离子扩散程度很低。As shown in Figure 3, the obtained microwave composite substrate for circulator is shown. As shown in Figures 4 and 5 after the actual surface is polished, it can be seen that there is no obvious color change in the connection area between the ferrite column and the dielectric ceramic ring, indicating that the degree of ion diffusion between the two phases of the composite substrate is very low.
实施例二：Embodiment 2:
(1)铁氧体柱制备：(1) Preparation of ferrite columns:
根据Ni0.7Cu0.05Zn0.25Fe2O4的分子式的比例计算出所需的NiO、ZnO、CuO、原料重量，并采用缺铁配方计算并称量Fe2O3原料，将其配置得到主成分粉料。将主成分粉料进行一次球磨混合，一次球磨时长为4小时，球磨转速为250转/分钟，充分混合均匀后得到一次球磨后的混合料，其后置于恒温烘箱中烘干。然后将得到的混合料放入烧结炉中在850℃下保温两小时进行预烧处理，得到NiCuZn预烧主料。将聚乙烯醇(PVA)粘合剂加入到预烧料中造粒成型并使用直径为4mm的不锈钢压片模具压制成铁氧体圆柱胚体，最后将胚体放入烧结炉中，在烧结气氛为空气的条件下升温至1125℃并保温4小时，得到一次烧结直径为3.38mm的NiCuZn铁氧体圆柱。According to the ratio of the molecular formula of Ni0.7 Cu0.05 Zn0.25 Fe2 O4, the required weight of NiO, ZnO, CuO and raw materials is calculated, and the Fe2 O3 raw material is calculated and weighed using the iron-deficient formula, and the main component powder is configured. The main component powder is ball-milled for 4 hours at a ball-milling speed of 250 rpm. After fully mixing, the mixture after ball milling is obtained, which is then placed in a constant temperature oven for drying. Then the obtained mixture is placed in a sintering furnace and kept at 850°C for two hours for pre-sintering treatment to obtain NiCuZn pre-sintered main material. Polyvinyl alcohol (PVA) adhesive was added to the pre-sintered material for granulation and pressed into a ferrite cylindrical embryo using a stainless steel tableting mold with a diameter of 4 mm. Finally, the embryo was placed in a sintering furnace, heated to 1125°C under the condition of sintering atmosphere of air and kept warm for 4 hours to obtain a NiCuZn ferrite column with a primary sintering diameter of 3.38 mm.
(2)微波介电陶瓷环的制备：(2) Preparation of microwave dielectric ceramic rings:
根据Li2MgTi3O4的分子式的比例计算出所需的Li2CO3、MgO、TiO2、原料重量，将其配置得到主成分粉料。将主成分粉料进行一次球磨混合，一次球磨时长为4小时，球磨转速为250转/分钟，充分混合均匀后得到一次球磨后的混合料，其后置于恒温烘箱中烘干。然后将得到的混合料放入烧结炉中在900℃下保温两小时进行预烧处理，得到Li2MgTi3O4预烧主料。将聚乙烯醇(PVA)粘合剂加入到预烧料中造粒成型并使用内径为4mm，外径为8mm的不锈钢压环模具压制成介电陶瓷圆环胚体，最后将胚体放入烧结炉中，在烧结气氛为空气的条件下升温至950℃并保温4小时，得到一次烧结内径为3.39mm的Li2MgTi3O4介电陶瓷圆环。According to the ratio of the molecular formula of Li2 MgTi3 O4, the required Li2 CO3 , MgO, TiO2, and the weight of the raw materials are calculated, and the main component powder is configured. The main component powder is subjected to a ball milling and mixing, and the ball milling time is 4 hours, and the ball milling speed is 250 rpm. After being fully mixed, the mixture after the first ball milling is obtained, and then placed in a constant temperature oven for drying. Then the obtained mixture is placed in a sintering furnace and kept at 900°C for two hours for pre-sintering treatment to obtain Li2 MgTi3 O4 pre-sintering main material. Polyvinyl alcohol (PVA) adhesive is added to the pre-sintered material for granulation and molding, and a stainless steel pressure ring mold with an inner diameter of 4mm and an outer diameter of 8mm is used to press it into a dielectric ceramic ring embryo. Finally, the embryo is placed in a sintering furnace, and the temperature is raised to 950°C and kept for 4 hours under the condition that the sintering atmosphere is air, to obtain a Li2 MgTi3 O4 dielectric ceramic ring with a first sintering inner diameter of 3.39mm.
(3)复合基板的制备：将一次烧结完成的微波介质陶瓷环放置在表面干净、平整的氧化铝承烧板上，随后将一次烧结好的铁氧体柱缓慢嵌进介质陶瓷环中。嵌合好的基板放置在马弗炉中进行二次烧结，在烧结气氛为空气的条件下以2℃/分钟的升温速率缓慢升温至950℃并保温2小时，随后以-2℃/分钟的降温速率缓慢降温至600℃，最后使其自然冷却至室温，得到复合为一体的复合基片。烧结完成后使用研磨抛光机对基片表面进行研磨抛光。(3) Preparation of composite substrate: Place the microwave dielectric ceramic ring that has been sintered once on a clean and flat alumina support plate, and then slowly embed the ferrite column that has been sintered once into the dielectric ceramic ring. The embedded substrate is placed in a muffle furnace for secondary sintering. Under the condition that the sintering atmosphere is air, the temperature is slowly increased to 950°C at a heating rate of 2°C/min and kept at this temperature for 2 hours, and then the temperature is slowly decreased to 600°C at a cooling rate of -2°C/min, and finally it is naturally cooled to room temperature to obtain a composite substrate. After sintering, the substrate surface is ground and polished using a grinding and polishing machine.
所制备的复合基片与实施例一类似，两种陶瓷连接紧密无裂痕且过渡区无明显的阳离子扩散现象。The prepared composite substrate is similar to that of Example 1, the two ceramics are tightly connected without cracks and there is no obvious cation diffusion phenomenon in the transition zone.
以上实施例仅是本发明的优选实施方式，本发明的保护范围并不仅局限于上述实施例。凡属于本发明思路下的技术方案均属于本发明的保护范围。应该指出，对于本技术领域的普通技术人员来说，在不脱离本发明原理的前提下的改进和润饰，这些改进和润饰也应视为本发明的保护范围。The above embodiments are only preferred implementations of the present invention, and the protection scope of the present invention is not limited to the above embodiments. All technical solutions under the concept of the present invention belong to the protection scope of the present invention. It should be pointed out that for ordinary technicians in this technical field, improvements and modifications without departing from the principle of the present invention should also be regarded as the protection scope of the present invention.
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