技术领域Technical Field
本申请涉及光纤激光器技术领域，具体涉及一种外腔可调谐半导体激光器。The present application relates to the technical field of optical fiber lasers, and in particular to an external cavity tunable semiconductor laser.
背景技术Background technique
外腔可调谐半导体激光器是一种实现半导体激光器可调谐输出的有效结构，主要由半导体激光芯片、准直镜和光反馈元件三部分构成。其中，光反馈元件作为选频元件，对半导体激光芯片输出的激光进行选频和反馈，通过对光反馈元件的调节来实现输出激光波长调谐。The external cavity tunable semiconductor laser is an effective structure for achieving tunable output of semiconductor lasers, which is mainly composed of three parts: semiconductor laser chip, collimator and optical feedback element. Among them, the optical feedback element is used as a frequency selection element to select and feedback the laser output by the semiconductor laser chip, and the output laser wavelength is tuned by adjusting the optical feedback element.
为了实现半导体激光器光功率宽调谐，相关技术中提供的外腔可调谐结构主要通过改变光栅角度，从而调整谐振腔的激射波长，实现波长调谐的功能，但是光束输出方向也会随光栅的旋转而改变。In order to achieve wide tuning of the optical power of semiconductor lasers, the external cavity tunable structure provided in the related art mainly adjusts the lasing wavelength of the resonant cavity by changing the grating angle to achieve the function of wavelength tuning, but the output direction of the light beam will also change with the rotation of the grating.
因此目前亟需一种外腔可调谐半导体激光器，在实现波长调谐的同时，保证光束输出的方向不变。Therefore, there is an urgent need for an external cavity tunable semiconductor laser that can achieve wavelength tuning while ensuring that the direction of the light beam output remains unchanged.
发明内容Summary of the invention
本申请实施例提供一种外腔可调谐半导体激光器，以解决相关技术中的外腔可调谐半导体激光器无法同时保证波长调谐功能和光束输出方向不变的技术问题。The embodiment of the present application provides an external cavity tunable semiconductor laser to solve the technical problem in the related art that the external cavity tunable semiconductor laser cannot simultaneously ensure the wavelength tuning function and the unchanged light beam output direction.
为了解决上述技术问题，本申请实施例提供了一种外腔可调谐半导体激光器，包括依次光连接的半导体激光器、准直透镜、柱面透镜、衍射光栅、部分反射镜；In order to solve the above technical problems, the embodiment of the present application provides an external cavity tunable semiconductor laser, comprising a semiconductor laser, a collimating lens, a cylindrical lens, a diffraction grating, and a partial reflector optically connected in sequence;
所述准直透镜靠近所述柱面透镜侧的一倍焦距处，和所述衍射光栅的中心分别与所述柱面透镜两侧的一倍焦距处位置重合，且所述衍射光栅的刻线方向与经由所述衍射光栅传输至所述部分反光镜的光束的偏振方向相同；The collimating lens is close to the cylindrical lens at one focal length, and the center of the diffraction grating is coincident with the positions of the two sides of the cylindrical lens at one focal length, and the direction of the engraved lines of the diffraction grating is the same as the polarization direction of the light beam transmitted to the partial reflector via the diffraction grating;
所述衍射光栅的法线与传输至所述部分反光镜的光束的传输方向成littrow角，经由所述部分反射镜的光束的传输方向与所述部分反光镜垂直；The normal line of the diffraction grating forms a littrow angle with the transmission direction of the light beam transmitted to the partial reflector, and the transmission direction of the light beam passing through the partial reflector is perpendicular to the partial reflector;
所述柱面透镜用于在垂直于传输至所述柱面透镜的光束的传输方向上移动，以对输出光束进行波长调谐。The cylindrical lens is used to move in a direction perpendicular to a transmission direction of the light beam transmitted to the cylindrical lens, so as to perform wavelength tuning on an output light beam.
在本发明实施例中，所述柱面透镜在垂直于传输至所述柱面透镜的光束的传输方向上的移动距离，与第一入射角和第二入射角满足第一预设关系，所述第一入射角为所述柱面透镜移动前光束传输至所述衍射光栅的入射角，所述第二入射角为所述柱面透镜移动后光束传输至所述衍射光栅的入射角；In an embodiment of the present invention, a moving distance of the cylindrical lens in a transmission direction perpendicular to the light beam transmitted to the cylindrical lens satisfies a first preset relationship with a first incident angle and a second incident angle, wherein the first incident angle is the incident angle of the light beam transmitted to the diffraction grating before the cylindrical lens moves, and the second incident angle is the incident angle of the light beam transmitted to the diffraction grating after the cylindrical lens moves;
所述第一预设关系为：The first preset relationship is:
其中，θ’为所述第二入射角，θ为所述第一入射角，Δx为所述移动距离，f为所述柱面透镜的焦距。Among them, θ’ is the second incident angle, θ is the first incident angle, Δx is the moving distance, and f is the focal length of the cylindrical lens.
在本发明实施例中，所述光束调谐后的波长与所述第一入射角和所述第二入射角满足第二预设关系；In an embodiment of the present invention, the wavelength of the tuned light beam satisfies a second preset relationship with the first incident angle and the second incident angle;
所述第二预设关系为：The second preset relationship is:
其中，λ为所述波长，d为所述衍射光栅表面上相邻凹槽之间的间距。Wherein, λ is the wavelength, and d is the spacing between adjacent grooves on the surface of the diffraction grating.
在本发明实施例中，所述半导体激光器为蓝光半导体激光器。In an embodiment of the present invention, the semiconductor laser is a blue light semiconductor laser.
在本发明实施例中，所述准直透镜包括快轴准直透镜和慢轴准直透镜，所述快轴准直透镜设置在所述半导体激光器和所述慢轴准直透镜之间。In an embodiment of the present invention, the collimating lens includes a fast-axis collimating lens and a slow-axis collimating lens, and the fast-axis collimating lens is arranged between the semiconductor laser and the slow-axis collimating lens.
在本发明实施例中，所述快轴准直透镜为非球面柱透镜，所述慢轴准直透镜为球面柱透镜。In an embodiment of the present invention, the fast-axis collimating lens is an aspherical cylindrical lens, and the slow-axis collimating lens is a spherical cylindrical lens.
在本发明实施例中，所述非球面柱透镜的焦距为300微米，所述球面柱透镜的焦距为12毫米。In the embodiment of the present invention, the focal length of the aspherical cylindrical lens is 300 micrometers, and the focal length of the spherical cylindrical lens is 12 millimeters.
在本发明实施例中，所述柱面透镜为平凸柱面透镜，所述平凸柱面透镜的凸起方向靠近所述衍射光栅。In an embodiment of the present invention, the cylindrical lens is a plano-convex cylindrical lens, and a convex direction of the plano-convex cylindrical lens is close to the diffraction grating.
在本发明实施例中，所述衍射光栅为平面光栅。In an embodiment of the present invention, the diffraction grating is a plane grating.
在本发明实施例中，所述平面光栅为透射式光栅。In an embodiment of the present invention, the plane grating is a transmission grating.
本申请实施例提供了一种外腔可调谐半导体激光器，通过将准直透镜靠近柱面透镜侧的一倍焦距处，和衍射光栅的中心分别放置于柱面透镜两侧的一倍焦距处，并保持衍射光栅的刻线方向与光束的偏振方向相同，衍射光栅的法线与传输至部分反光镜的光束的传输方向成littrow角，经由部分反射镜的光束的传输方向与部分反光镜垂直，能够实现通过在垂直于传输至柱面透镜的光束的传输方向上移动柱面透镜，完成对输出光束的波长调谐，同时还能保证光束输出的方向不变。The embodiment of the present application provides an external cavity tunable semiconductor laser, by placing a collimating lens close to one focal length of a cylindrical lens side and the center of a diffraction grating at one focal length on both sides of the cylindrical lens, respectively, and keeping the engraved direction of the diffraction grating the same as the polarization direction of the light beam, the normal of the diffraction grating forms a littrow angle with the transmission direction of the light beam transmitted to the partial reflector, and the transmission direction of the light beam through the partial reflector is perpendicular to the partial reflector, so that the wavelength of the output light beam can be tuned by moving the cylindrical lens in a transmission direction perpendicular to the light beam transmitted to the cylindrical lens, while ensuring that the direction of the light beam output remains unchanged.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
为了更清楚地说明本申请实施例中的技术方案，下面将对实施例描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本申请的一些实施例，对于本领域技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without creative work.
图1是本发明实施例提供的外腔可调谐半导体激光器的一种结构示意图；FIG1 is a schematic structural diagram of an external cavity tunable semiconductor laser provided in an embodiment of the present invention;
图2是本发明实施例提供的外腔可调谐半导体激光器的另一种结构示意图；FIG2 is another schematic diagram of the structure of an external cavity tunable semiconductor laser provided by an embodiment of the present invention;
其中，附图中的附图标记如下：The reference numerals in the accompanying drawings are as follows:
10、半导体激光器；20、准直透镜；21、快轴准直透镜；22、慢轴准直透镜；30、柱面透镜；40、衍射光栅；50、部分反射镜。10. Semiconductor laser; 20. Collimating lens; 21. Fast-axis collimating lens; 22. Slow-axis collimating lens; 30. Cylindrical lens; 40. Diffraction grating; 50. Partial reflector.
具体实施方式Detailed ways
下面将结合本申请实施例中的附图，对本申请实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本申请一部分实施例，而不是全部的实施例。基于本申请中的实施例，本领域技术人员在没有作出创造性劳动前提下所获得的所有其他实施例，都属于本申请保护的范围。The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of this application.
在本申请的描述中，需要理解的是，术语“纵向”、“横向”、“长度”、“宽度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本申请和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本申请的限制。此外，术语“第一”、“第二”仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个所述特征。在本申请的描述中，“多个”的含义是两个或两个以上，除非另有明确具体的限定。在本申请中，“/”表示“或者”的意思。In the description of the present application, it should be understood that the terms "longitudinal", "lateral", "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, the features defined as "first" and "second" may explicitly or implicitly include one or more of the said features. In the description of the present application, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined. In the present application, "/" means "or".
本申请可以在不同例子中重复参考数字和/或参考字母，这种重复是为了简化和清楚的目的，其本身不指示所讨论各种实施方式和/或设置之间的关系。The present application may repeat reference numerals and/or reference letters in different examples. Such repetition is for the purpose of simplicity and clarity and does not in itself indicate the relationship between the various embodiments and/or settings discussed.
在本发明实施例中，外腔可调谐半导体激光器是一种实现半导体激光器可调谐输出的有效结构，主要由半导体激光芯片、准直镜和光反馈元件三部分构成。其中，光反馈元件作为选频元件，对半导体激光芯片输出的激光进行选频和反馈，通过对光反馈元件的调节来实现输出激光波长调谐。In the embodiment of the present invention, the external cavity tunable semiconductor laser is an effective structure for realizing tunable output of semiconductor laser, and is mainly composed of three parts: semiconductor laser chip, collimator and optical feedback element. Among them, the optical feedback element is used as a frequency selection element to select the frequency and feedback the laser output by the semiconductor laser chip, and the output laser wavelength is tuned by adjusting the optical feedback element.
为了实现半导体激光器光功率宽调谐，相关技术中提供的外腔可调谐结构主要通过改变光栅角度，从而调整谐振腔的激射波长，实现波长调谐的功能，但是光束输出方向也会随光栅的旋转而改变。In order to achieve wide tuning of the optical power of semiconductor lasers, the external cavity tunable structure provided in the related art mainly adjusts the lasing wavelength of the resonant cavity by changing the grating angle to achieve the function of wavelength tuning, but the output direction of the light beam will also change with the rotation of the grating.
因此目前亟需一种外腔可调谐半导体激光器，在实现波长调谐的同时，保证光束输出的方向不变。Therefore, there is an urgent need for an external cavity tunable semiconductor laser that can achieve wavelength tuning while ensuring that the direction of the light beam output remains unchanged.
为了解决上述技术问题，本申请实施例提供了一种外腔可调谐半导体激光器，具体的，请参见图1，图1是本发明实施例提供的外腔可调谐半导体激光器的一种结构示意图，如图1所示，本申请实施例提供的一种外腔可调谐半导体激光器，包括依次光连接的半导体激光器10、准直透镜20、柱面透镜30、衍射光栅40、部分反射镜50；In order to solve the above technical problems, an embodiment of the present application provides an external cavity tunable semiconductor laser. Specifically, please refer to FIG. 1, which is a structural schematic diagram of an external cavity tunable semiconductor laser provided by an embodiment of the present application. As shown in FIG. 1, an external cavity tunable semiconductor laser provided by an embodiment of the present application includes a semiconductor laser 10, a collimating lens 20, a cylindrical lens 30, a diffraction grating 40, and a partial reflector 50 optically connected in sequence;
所述准直透镜20靠近所述柱面透镜30侧的一倍焦距处，和所述衍射光栅40的中心分别与所述柱面透镜30两侧的一倍焦距处位置重合，且所述衍射光栅40的刻线方向与经由所述衍射光栅40传输至所述部分反光镜的光束的偏振方向相同；The collimating lens 20 is close to the cylindrical lens 30 at one focal length, and the center of the diffraction grating 40 is coincident with the positions of the two sides of the cylindrical lens 30 at one focal length, respectively, and the direction of the engraved lines of the diffraction grating 40 is the same as the polarization direction of the light beam transmitted to the partial reflector via the diffraction grating 40;
所述衍射光栅40的法线与传输至所述部分反光镜的光束的传输方向成littrow角，经由所述部分反射镜50的光束的传输方向与所述部分反光镜垂直；The normal line of the diffraction grating 40 forms a littrow angle with the transmission direction of the light beam transmitted to the partial reflector, and the transmission direction of the light beam passing through the partial reflector 50 is perpendicular to the partial reflector;
所述柱面透镜30用于在垂直于传输至所述柱面透镜30的光束的传输方向上移动，以对输出光束进行波长调谐。The cylindrical lens 30 is used to move in a direction perpendicular to a transmission direction of the light beam transmitted to the cylindrical lens 30 , so as to perform wavelength tuning on the output light beam.
其中，littrow角是光学中的一个重要概念，特别是在光栅衍射和光谱技术中。它指的是在Littrow配置下，光栅的衍射光与入射光重合时的衍射角。Littrow配置是一种特定的几何形状，其中从光栅衍射到给定衍射级的特定波长的光沿着入射光的方向往回传播。在Littrow配置中，入射角和衍射角是相等的，即α＝β。此时，光栅方程可以简化为mλ＝2dsinα，其中m是衍射级数，λ是波长，d是光栅表面上相邻凹槽之间的间距。Littrow角就是在这个配置下，衍射光与光栅法线形成的角度。Among them, the Littrow angle is an important concept in optics, especially in grating diffraction and spectroscopy technology. It refers to the diffraction angle when the diffracted light of the grating coincides with the incident light in the Littrow configuration. The Littrow configuration is a specific geometry in which light of a specific wavelength diffracted from the grating to a given diffraction order propagates back in the direction of the incident light. In the Littrow configuration, the angle of incidence and the angle of diffraction are equal, that is, α=β. At this point, the grating equation can be simplified to mλ=2dsinα, where m is the diffraction order, λ is the wavelength, and d is the spacing between adjacent grooves on the grating surface. The Littrow angle is the angle formed by the diffracted light and the grating normal in this configuration.
采用本发明实施例提供的外腔可调谐半导体激光器，通过将准直透镜20靠近柱面透镜30侧的一倍焦距处，和衍射光栅40的中心分别放置于柱面透镜30两侧的一倍焦距处，并保持衍射光栅40的刻线方向与光束的偏振方向相同，衍射光栅40的法线与传输至部分反光镜的光束的传输方向成littrow角，经由部分反射镜50的光束的传输方向与部分反光镜垂直，能够实现通过在垂直于传输至柱面透镜30的光束的传输方向上移动柱面透镜30，完成对输出光束的波长调谐，同时还能保证光束输出的方向不变。By using the external cavity tunable semiconductor laser provided by the embodiment of the present invention, by placing the collimating lens 20 close to the cylindrical lens 30 at one focal length, and the center of the diffraction grating 40 at one focal length on both sides of the cylindrical lens 30, respectively, and keeping the engraved direction of the diffraction grating 40 the same as the polarization direction of the light beam, the normal of the diffraction grating 40 forms a littrow angle with the transmission direction of the light beam transmitted to the partial reflector, and the transmission direction of the light beam transmitted through the partial reflector 50 is perpendicular to the partial reflector, the wavelength tuning of the output light beam can be completed by moving the cylindrical lens 30 in a transmission direction perpendicular to the transmission direction of the light beam transmitted to the cylindrical lens 30, while ensuring that the direction of the light beam output remains unchanged.
在一些实施例中，请同时参见图1和图2，图2是本发明实施例提供的外腔可调谐半导体激光器的另一种结构示意图，图2是图1中柱面透镜30移动后的示意图。如图1和图2所示，本发明实施例可以通过在垂直于传输至柱面透镜30的光束的传输方向上移动柱面透镜30，即可完成对输出光束的波长调谐，同时还能保证光束输出的方向不变。In some embodiments, please refer to Figure 1 and Figure 2 at the same time, Figure 2 is another structural schematic diagram of the external cavity tunable semiconductor laser provided by an embodiment of the present invention, and Figure 2 is a schematic diagram after the cylindrical lens 30 in Figure 1 is moved. As shown in Figures 1 and 2, the embodiment of the present invention can complete the wavelength tuning of the output light beam by moving the cylindrical lens 30 in a direction perpendicular to the transmission direction of the light beam transmitted to the cylindrical lens 30, while ensuring that the direction of the light beam output remains unchanged.
具体的，本发明实施例提供的所述柱面透镜30在垂直于传输至所述柱面透镜30的光束的传输方向上的移动距离，与第一入射角和第二入射角满足第一预设关系，所述第一入射角为所述柱面透镜30移动前光束传输至所述衍射光栅40的入射角，所述第二入射角为所述柱面透镜30移动后光束传输至所述衍射光栅40的入射角；Specifically, the moving distance of the cylindrical lens 30 provided in the embodiment of the present invention in the transmission direction perpendicular to the light beam transmitted to the cylindrical lens 30 satisfies a first preset relationship with a first incident angle and a second incident angle, wherein the first incident angle is the incident angle of the light beam transmitted to the diffraction grating 40 before the cylindrical lens 30 moves, and the second incident angle is the incident angle of the light beam transmitted to the diffraction grating 40 after the cylindrical lens 30 moves;
其中，本发明实施例提供的所述第一预设关系为：Among them, the first preset relationship provided by the embodiment of the present invention is:
其中，θ’为所述第二入射角，θ为所述第一入射角，Δx为所述移动距离，f为所述柱面透镜30的焦距。Wherein, θ’ is the second incident angle, θ is the first incident angle, Δx is the moving distance, and f is the focal length of the cylindrical lens 30.
在本实施例中，本发明实施例提供的所述光束调谐后的波长与所述第一入射角和所述第二入射角满足第二预设关系；In this embodiment, the wavelength of the light beam after tuning provided by the embodiment of the present invention satisfies a second preset relationship with the first incident angle and the second incident angle;
其中，本发明实施例提供的所述第二预设关系为：The second preset relationship provided in the embodiment of the present invention is:
其中，λ为所述波长，d为所述衍射光栅40表面上相邻凹槽之间的间距。Wherein, λ is the wavelength, and d is the spacing between adjacent grooves on the surface of the diffraction grating 40 .
在一些实施例中，本发明实施例提供的所述半导体激光器10为蓝光半导体激光器，其中，蓝光半导体激光器能够直接发射蓝光，且具有结构简单、使用方便、电光转换效率高等优点。此外，本实施例提供的半导体激光器10还可以为其他类型的半导体激光器，在此不作具体的限定。In some embodiments, the semiconductor laser 10 provided in the embodiment of the present invention is a blue light semiconductor laser, wherein the blue light semiconductor laser can directly emit blue light and has the advantages of simple structure, convenient use, high electro-optical conversion efficiency, etc. In addition, the semiconductor laser 10 provided in this embodiment can also be other types of semiconductor lasers, which are not specifically limited here.
在一些实施例中，本发明实施例提供的所述准直透镜20可以包括快轴准直透镜21和慢轴准直透镜22，所述快轴准直透镜21设置在所述半导体激光器10和所述慢轴准直透镜22之间，通过快轴准直透镜21对半导体激光器10发射出的光束进行快轴准直，通过慢轴准直透镜22对经由所述快轴准直透镜21传输至所述慢轴准直透镜22的光束进行慢轴准直。其中，本实施例提供的慢轴准直透镜22靠近所述柱面透镜30一侧的一倍焦距位置，与所述柱面透镜30靠近所述慢轴准直透镜22一侧的一倍焦距位置重合。In some embodiments, the collimating lens 20 provided in the embodiment of the present invention may include a fast-axis collimating lens 21 and a slow-axis collimating lens 22, wherein the fast-axis collimating lens 21 is disposed between the semiconductor laser 10 and the slow-axis collimating lens 22, and the fast-axis collimating lens 21 is used to perform fast-axis collimation on the light beam emitted by the semiconductor laser 10, and the slow-axis collimating lens 22 is used to perform slow-axis collimation on the light beam transmitted to the slow-axis collimating lens 22 via the fast-axis collimating lens 21. The one-fold focal length position of the slow-axis collimating lens 22 provided in this embodiment close to the cylindrical lens 30 coincides with the one-fold focal length position of the cylindrical lens 30 close to the slow-axis collimating lens 22.
在一些实施例中，本发明实施例提供的所述快轴准直透镜21可以为非球面柱透镜，所述慢轴准直透镜22可以为球面柱透镜。可选的，本发明实施例提供的所述非球面柱透镜的焦距可以为300微米，所述球面柱透镜的焦距可以为12毫米。In some embodiments, the fast axis collimating lens 21 provided in the embodiment of the present invention may be an aspherical cylindrical lens, and the slow axis collimating lens 22 may be a spherical cylindrical lens. Optionally, the focal length of the aspherical cylindrical lens provided in the embodiment of the present invention may be 300 microns, and the focal length of the spherical cylindrical lens may be 12 mm.
需要说明的是，本实施例提供的所述非球面柱透镜的焦距和所述球面柱透镜的焦距，并不限于为上述实施例提供的数值，还可以根据具体的应用场景进行定制和调整，在此不作具体的限定。It should be noted that the focal length of the aspherical cylindrical lens and the focal length of the spherical cylindrical lens provided in this embodiment are not limited to the values provided in the above embodiments, and can also be customized and adjusted according to specific application scenarios, and are not specifically limited here.
在一些实施例中，本发明实施例提供的所述柱面透镜30可以为平凸柱面透镜30，所述平凸柱面透镜30的凸起方向靠近所述衍射光栅40。In some embodiments, the cylindrical lens 30 provided in the embodiment of the present invention may be a plano-convex cylindrical lens 30 , and the convex direction of the plano-convex cylindrical lens 30 is close to the diffraction grating 40 .
作为可选的实施例，本发明实施例提供的所述衍射光栅40可以为平面光栅。可选的，所述平面光栅可以为透射式光栅。其中，透射式光栅的主要特点是高透光性、高分辨率和高稳定性。由于光栅的刻线间距非常微小，通常只有几百纳米到几微米之间，因此透射式光栅能够实现对光波的高精度调制。此外，透射式光栅的透光性也非常高，能够有效地减少光能的损失。As an optional embodiment, the diffraction grating 40 provided in the embodiment of the present invention may be a plane grating. Optionally, the plane grating may be a transmission grating. Among them, the main features of the transmission grating are high light transmittance, high resolution and high stability. Since the spacing of the grating lines is very small, usually only between a few hundred nanometers and a few microns, the transmission grating can achieve high-precision modulation of light waves. In addition, the light transmittance of the transmission grating is also very high, which can effectively reduce the loss of light energy.
综上所述，本发明实施例提供了一种外腔可调谐半导体激光器，包括依次光连接的半导体激光器、准直透镜、柱面透镜、衍射光栅、部分反射镜，准直透镜靠近柱面透镜侧的一倍焦距处，和衍射光栅的中心分别与柱面透镜两侧的一倍焦距处位置重合，且衍射光栅的刻线方向与经由衍射光栅传输至部分反光镜的光束的偏振方向相同，衍射光栅的法线与传输至部分反光镜的光束的传输方向成littrow角，经由部分反射镜的光束的传输方向与部分反光镜垂直，柱面透镜用于在垂直于传输至柱面透镜的光束的传输方向上移动，以对输出光束进行波长调谐。采用本发明实施例提供的外腔可调谐半导体激光器，能够实现以下有益效果：In summary, an embodiment of the present invention provides an external cavity tunable semiconductor laser, comprising a semiconductor laser, a collimating lens, a cylindrical lens, a diffraction grating, and a partial reflector optically connected in sequence, wherein the collimating lens is close to the cylindrical lens at one focal length, and the center of the diffraction grating coincides with the positions at one focal length on both sides of the cylindrical lens, respectively, and the engraved direction of the diffraction grating is the same as the polarization direction of the light beam transmitted to the partial reflector via the diffraction grating, the normal of the diffraction grating forms a littrow angle with the transmission direction of the light beam transmitted to the partial reflector, the transmission direction of the light beam via the partial reflector is perpendicular to the partial reflector, and the cylindrical lens is used to move in a transmission direction perpendicular to the transmission direction of the light beam transmitted to the cylindrical lens to perform wavelength tuning on the output light beam. The external cavity tunable semiconductor laser provided by the embodiment of the present invention can achieve the following beneficial effects:
通过将准直透镜靠近柱面透镜侧的一倍焦距处，和衍射光栅的中心分别放置于柱面透镜两侧的一倍焦距处，并保持衍射光栅的刻线方向与光束的偏振方向相同，衍射光栅的法线与传输至部分反光镜的光束的传输方向成littrow角，经由部分反射镜的光束的传输方向与部分反光镜垂直，能够实现通过在垂直于传输至柱面透镜的光束的传输方向上移动柱面透镜，完成对输出光束的波长调谐，同时还能保证光束输出的方向不变。By placing the collimating lens close to one focal length of the cylindrical lens side and the center of the diffraction grating at one focal length on both sides of the cylindrical lens, and keeping the engraved direction of the diffraction grating the same as the polarization direction of the light beam, the normal of the diffraction grating forms a littrow angle with the transmission direction of the light beam transmitted to the partial reflector, and the transmission direction of the light beam passing through the partial reflector is perpendicular to the partial reflector, the wavelength tuning of the output light beam can be completed by moving the cylindrical lens in the transmission direction perpendicular to the light beam transmitted to the cylindrical lens, and the direction of the light beam output can be guaranteed to remain unchanged.
本说明书中部分实施例采用递进的方式描述，每个实施例重点说明的都是与其他实施例的不同之处，各个实施例之间相同相似部分互相参见即可。Some embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the embodiments can be referenced to each other.
以上仅是本发明的具体实施方式，使本领域技术人员能够理解或实现本发明。对这些实施例的多种修改对本领域的技术人员来说将是显而易见的，本文中所定义的一般原理可以在不脱离本发明的精神或范围的情况下，在其它实施例中实现。因此，本发明将不会被限制于本文所示的这些实施例，而是要符合与本文所申请的原理和新颖特点相一致的最宽的范围。The above is only a specific embodiment of the present invention, so that those skilled in the art can understand or implement the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but should conform to the widest scope consistent with the principles and novel features applied herein.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410553266.2ACN118249199A (en) | 2024-05-07 | 2024-05-07 | External cavity tunable semiconductor laser |
| Application Number | Priority Date | Filing Date | Title |
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| CN202410553266.2ACN118249199A (en) | 2024-05-07 | 2024-05-07 | External cavity tunable semiconductor laser |
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| CN118249199Atrue CN118249199A (en) | 2024-06-25 |
| Application Number | Title | Priority Date | Filing Date |
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| CN202410553266.2APendingCN118249199A (en) | 2024-05-07 | 2024-05-07 | External cavity tunable semiconductor laser |
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