Disclosure of Invention
Aiming at the defects of the prior art, the invention innovatively provides a solid source allowance detection device and a detection method thereof, which can effectively overcome measurement errors caused by temperature change and corrugated pipe deformation, and eliminate the influence of temperature on a weight detection result by utilizing a weight compensation coefficient; the weighing mode is changed into hoisting weighing, so that the corrugated pipe can be completely replaced, the influence of hardware on a detection result is reduced to the greatest extent, and the detection precision is improved; the detection device can be directly used on the existing source bottle, does not change the installation form of the existing source bottle and devices on the existing source bottle, and is simple and convenient to use.
To achieve the above technical object, a first aspect of the present invention discloses a solid source residue detecting device, comprising a first detecting device, a second detecting device and a controller,
The first detection device and the second detection device are fixed above the source bottle, the first detection device and the second detection device are arranged in a hoisting way,
The first detection device comprises a first annular shell, a first weighing sensor and a first temperature sensor, wherein the first weighing sensor and the first temperature sensor are fixed on the first annular shell, the first annular shell is respectively connected with an air inlet pipe of a source bottle and an air outlet of a carrier gas source in a sealing way,
The second detection device comprises a second annular shell, a second weighing sensor and a second temperature sensor, wherein the second weighing sensor and the second temperature sensor are fixed on the second annular shell, the second annular shell is respectively connected with an air outlet pipe of a source bottle and an air inlet of a reaction chamber in a sealing way,
The first weighing sensor and the second weighing sensor are used for detecting the weight of a source bottle, a heating sleeve, an air inlet pipe, an air outlet pipe, an air inlet valve, an air outlet valve and a solid source in the source bottle below the first weighing sensor and the second weighing sensor, the first temperature sensor and the second temperature sensor are respectively used for detecting the temperature of the position where the first temperature sensor and the second temperature sensor are positioned,
The controller is electrically connected with the first weighing sensor, the second weighing sensor, the first temperature sensor and the second temperature sensor respectively, and is used for calculating a weight compensation coefficient K according to the temperature measured by the first temperature sensor, the temperature measured by the second temperature sensor, the weight measured by the first weighing sensor and the weight measured by the second weighing sensor, and calculating the allowance W of the solid source in the source bottle according to the temperature measured by the first temperature sensor, the temperature measured by the second temperature sensor, the weight measured by the first weighing sensor, the weight measured by the second weighing sensor and the weight compensation coefficient K.
Further, the first annular shell is in sealing connection with an air outlet of the carrier air source through an air inlet pipeline, the second annular shell is in sealing connection with an air inlet of the reaction chamber through an air outlet pipeline, and the air inlet pipeline and the air outlet pipeline are both rigid pipelines.
Further, the controller is further configured to calculate a solid source usage amount W0 required by a process, and determine whether the current solid source allowance W in the source bottle meets the requirement of a next process.
Further, the device also comprises an alarm, wherein the alarm is electrically connected with the controller and is used for alarming when the solid source allowance W in the current source bottle cannot meet the next process.
Further, the method for calculating the weight compensation coefficient K by the controller according to the temperature measured by the first temperature sensor, the temperature measured by the second temperature sensor, the weight measured by the first weighing sensor and the weight measured by the second weighing sensor includes:
When a solid source is not added into a source bottle, gradually heating from room temperature to a first temperature which is larger than or equal to a process temperature, dividing a temperature interval between the first temperature and the room temperature into n equal divisions, wherein n is larger than or equal to 3 and n is an integer, acquiring the sum W1 and Wn of weights measured by the first weighing sensor and the second weighing sensor respectively when the room temperature and each equal division node temperature are respectively increased from the room temperature to the first temperature, wherein the node temperature is an average value of the temperatures measured by the first temperature sensor and the second temperature sensor or the temperature measured by the second temperature sensor, a weight compensation value DeltaW at a certain node temperature is obtained by a difference value W1 and Wn at the certain node temperature, and drawing a linear relation graph by taking the difference DeltaT of the node temperature and the room temperature as a horizontal coordinate and the weight compensation value DeltaW at the node temperature as a vertical coordinate, and the slope of the linear relation graph is a weight compensation coefficient K.
Further, the method for calculating the residual W of the solid source in the source bottle by the controller according to the temperature measured by the first temperature sensor, the temperature measured by the second temperature sensor, the weight measured by the first weighing sensor, the weight measured by the second weighing sensor and the weight compensation coefficient K comprises the following steps:
Obtaining the sum W1 of the weights measured by the first weighing sensor and the second weighing sensor when the solid source is not added in the source bottle at room temperature;
Acquiring the sum W2 of the weights measured by the first weighing sensor and the second weighing sensor at the current temperature in the process or after the process is finished; the current temperature is the average value of the temperatures measured by the first temperature sensor and the second temperature sensor or the temperature measured by the second temperature sensor;
Calculating a temperature difference DeltaT: Δt=t-T0, where T is the current temperature and T0 is room temperature;
Calculating the solid source allowance W in the source bottle: w=w2+K*△T-W1.
To achieve the above object, a second aspect of the present invention discloses a solid source balance detecting method using the above solid source balance detecting device, comprising the steps of:
calculating weight compensation coefficients K at different temperatures;
Obtaining the total mass W1 of a source bottle, a heating sleeve, an air inlet pipe, an air outlet pipe, an air inlet valve and an air outlet valve at room temperature;
Obtaining the sum W1 of the weights measured by the first weighing sensor and the second weighing sensor when the solid source is not added in the source bottle at room temperature;
acquiring the sum W2 of the weights measured by the first weighing sensor and the second weighing sensor at the current temperature in the process or after the process is finished, wherein the current temperature is the average value of the temperatures measured by the first temperature sensor and the second temperature sensor or the temperature measured by the second temperature sensor;
Calculating a temperature difference DeltaT: Δt=t-T0, where T is the current temperature and T0 is room temperature;
calculating the solid source allowance W in the source bottle: w=w2+K△T-W1.
Further, calculating the weight compensation coefficient K includes:
When a solid source is not added into a source bottle, gradually heating from room temperature to a first temperature which is larger than or equal to a process temperature, dividing a temperature interval between the first temperature and the room temperature into n equal divisions, wherein n is larger than or equal to 3 and n is an integer, acquiring the sum W1 and Wn of weights measured by the first weighing sensor and the second weighing sensor respectively when the room temperature and each equal division node temperature are respectively increased from the room temperature to the first temperature, wherein the node temperature is an average value of the temperatures measured by the first temperature sensor and the second temperature sensor or the temperature measured by the second temperature sensor, a weight compensation value DeltaW at a certain node temperature is obtained by a difference value W1 and Wn at the certain node temperature, and drawing a linear relation graph by taking the difference DeltaT of the node temperature and the room temperature as a horizontal coordinate and the weight compensation value DeltaW at the node temperature as a vertical coordinate, and the slope of the linear relation graph is a weight compensation coefficient K.
Further, the method also comprises the step of judging whether the solid source allowance W in the current source bottle meets the requirement of the next process.
Further, the determining whether the solid source allowance W in the current source bottle meets the requirement of the next process includes:
obtaining the solid source dosage W0 required by the primary process at the process temperature;
And judging whether the difference value between the solid source allowance W and the solid source allowance W0 is larger than or equal to zero, if so, carrying out the next process, otherwise, giving an alarm.
The beneficial effects of the invention are as follows:
The solid source allowance detection device and the detection method thereof can effectively overcome measurement errors caused by temperature change and corrugated pipe deformation, and eliminate the influence of temperature on a weight detection result by using a weight compensation coefficient; the weighing mode is changed into hoisting weighing, so that the corrugated pipe can be completely replaced, the influence of hardware on a detection result is reduced to the greatest extent, and the detection precision is improved; the detection device can be directly used on the existing source bottle, does not change the installation form of the existing source bottle and devices on the existing source bottle, and is simple and convenient to use.
Detailed Description
The solid source balance detection device and the detection method thereof provided by the invention are explained and illustrated in detail below with reference to the accompanying drawings.
The source bottle 5 is used for holding solid source, and the outer parcel of source bottle 5 has heating jacket 6, and the top of source bottle 5 is connected with intake pipe 1 and outlet duct 3, is equipped with admission valve 2 on the intake pipe 1, is equipped with air outlet valve 4 on the outlet duct 3, and the solid source surplus detection device of this embodiment is installed on the top of intake pipe 1 and outlet duct 3 for detect the surplus of solid source in the source bottle 5. The above-described apparatus is typically housed within a source cabinet.
The embodiment specifically discloses a solid source allowance detection device, as shown in fig. 2-3, including a first detection device 10, a second detection device 11 and a controller, the first detection device 10 and the second detection device 11 are fixed above the source bottle 5, and the first detection device 10 and the second detection device 11 are lifted and arranged.
The first detection device 10 comprises a first annular shell 101, a first weighing sensor and a first temperature sensor 102, wherein the first weighing sensor and the first temperature sensor 102 are fixed on the first annular shell 101, and the first annular shell 101 is respectively and hermetically connected with the air inlet pipe 1 of the source bottle 5 and the air outlet of the carrier gas source. As shown in fig. 3, the first annular housing 101 includes a top plate, an inner ring and an outer ring, the top plate is annular and fixed at the top of the inner ring and the outer ring, the inner side of the top plate is fixedly connected with the inner ring, the outer side of the top plate is fixedly connected with the outer ring, the top plate and the inner ring and the outer ring enclose a U-shaped annular groove, the notch of the U-shaped annular groove faces downwards, the first temperature sensor 102 and the first weighing sensor are fixed in the U-shaped annular groove, the first weighing sensor is connected with the air inlet pipe 1 and used for detecting the weight of a device below the first weighing sensor, the lifting manner is adopted for weighing, and the detection result is accurate and is not influenced by other devices. The first temperature sensor 102 is in contact with the end part of the air inlet pipe 1 or is positioned in the air inlet of the air inlet pipe 1, the air inlet of the air inlet pipe 1 is communicated with the inner ring of the first annular shell 101, the air outlet of the carrier gas source is positioned above the first annular shell 101, the inner ring of the first annular shell 101 is communicated with the air outlet of the carrier gas source, and the carrier gas source enters the source bottle 5 through the inner ring of the first annular shell 101 and the air inlet pipe 1.
The second detection device 11 comprises a second annular shell 111, a second weighing sensor and a second temperature sensor 112, wherein the second weighing sensor and the second temperature sensor 112 are fixed on the second annular shell 111, and the second annular shell 111 is respectively and hermetically connected with the air outlet pipe 3 of the source bottle 5 and the air inlet of the reaction chamber. The structure of the second detection device 11 is the same as that of the first detection device 10, as shown in fig. 3, the second annular shell 111 comprises a top plate, an inner ring and an outer ring, the top plate is annular and fixed at the top of the inner ring and the outer ring, the inner side of the top plate is fixedly connected with the inner ring, the outer side of the top plate is fixedly connected with the outer ring, the top plate and the inner ring and the outer ring enclose a U-shaped annular groove, the notch of the U-shaped annular groove faces downwards, the second temperature sensor 112 and the second weighing sensor are fixed in the U-shaped annular groove, the second weighing sensor is connected with the air outlet pipe 3 and used for detecting the weight of a device below the second weighing sensor, the lifting manner is adopted for weighing, and the detection result is accurate and is not influenced by other devices. The second temperature sensor 112 is in contact with the end part of the air outlet pipe 3 or is positioned in the air outlet of the air outlet pipe 3, the air outlet of the air outlet pipe 3 is communicated with the inner ring of the second annular shell 111, the air inlet of the reaction chamber is positioned above the second annular shell 111, the inner ring of the second annular shell 111 is communicated with the air inlet of the reaction chamber, and the gas carrying solid source is discharged from the air outlet pipe, passes through the inner ring of the second annular shell 111 and enters the reaction chamber from the air inlet of the reaction chamber.
The first weighing sensor and the second weighing sensor are used for detecting the weight of the source bottle 5, the heating jacket 6, the air inlet pipe 1, the air outlet pipe 3, the air inlet valve 2, the air outlet valve 4 and the solid source in the source bottle 5, a hoisting weighing mode is adopted, only the source bottle 5, the heating jacket 6, the air inlet pipe 1, the air outlet pipe 3, the air inlet valve 2, the air outlet valve 4 and the solid source in the source bottle 5 are arranged below the weighing sensors, the weight of the devices is measured every time, the influence of measuring errors caused by deformation of a corrugated pipe and other devices on a measuring result is effectively overcome, and the measuring precision is higher. The first temperature sensor 102 and the second temperature sensor 112 are respectively used for detecting the temperature of the place where they are located. The controller is electrically connected with the first weighing sensor, the second weighing sensor, the first temperature sensor 102 and the second temperature sensor 112 respectively, and is used for receiving and processing data measured by the first weighing sensor, the second weighing sensor, the first temperature sensor 102 and the second temperature sensor 112, calculating a weight compensation coefficient K according to the temperature measured by the first temperature sensor 102, the temperature measured by the second temperature sensor 112, the weight measured by the first weighing sensor and the weight measured by the second weighing sensor, and calculating the allowance W of the solid source in the source bottle 5 according to the temperature measured by the first temperature sensor 102, the temperature measured by the second temperature sensor 112, the weight measured by the first weighing sensor, the weight measured by the second weighing sensor and the weight compensation coefficient K.
The first temperature sensor, the second temperature sensor, the first weighing sensor, the second weighing sensor, the first annular shell and the second annular shell are all fixed in the source cabinet together with the source bottle, the controller is fixed outside the source cabinet, the first temperature sensor 102 and the first weighing sensor are connected with the controller outside the source cabinet through a first cable 103 penetrating through the outer ring of the first annular shell 101, the second temperature sensor 112 and the second weighing sensor are connected with the controller outside the source cabinet through a second cable 113 penetrating through the outer ring of the second annular shell 111, the first cable 103 and the second cable 113 adopt high-temperature flexible cables, detected temperature signals and weight signals are transmitted to the controller, and the controller performs operation processing.
The first weighing sensor and the second weighing sensor of the embodiment are of a high temperature resistant type, and can normally work in a high temperature environment.
The data transmission and processing method of the conventional solid-state source balance detection device shown in fig. 1 is as follows:
The weighing controller of the detection platform 7 measures the total weight of substances borne above the weighing sensor (including the weight of a solid source, a source bottle, a heating jacket, an air inlet valve, an air outlet valve and the soft connection weight of the first corrugated pipe and the second corrugated pipe), and transmits the measurement result to the main controller in a signal form through operation; meanwhile, as the weighing controller needs to calculate the measurement data and then send the measurement data to the main controller, the time factors of data sending and sampling are considered, so that the numerical value on the weighing sensor acquired by the main controller is delayed; greatly reduces the utilization rate of the equipment.
The data transmission and processing method of the application comprises the following steps:
the weighing sensor of the application is of a high temperature resistant type, can normally work in a high temperature environment, cancels the original weighing controller, directly collects initial signals to the controller, collects weight and temperature signals through the controller, the method has the advantages that the method can directly collect and process the signals, reduce the communication processing time of the equipment, at the moment, the data collected by the controller is the current value of the weighing sensor, and the weight compensation of the collected value is completed due to the addition of the temperature signals, so that the measurement accuracy is improved; in addition, the controller is not arranged in the source cabinet, so that the damage to the controller caused by high temperature is reduced; the utilization rate of the equipment is improved.
The embodiment introduces the weight compensation coefficient K to eliminate the influence of temperature change on the weight detection result, and the detection result is more accurate.
The detection device provided by the application has a simple structure, can be directly installed on the structure of the existing source bottle 5, does not need to change the installation form of the existing source bottle 5 and devices thereon, and is simple and convenient to use.
Optionally, the first annular housing 101 is connected with the gas outlet of the carrier gas source in a sealing manner through a gas inlet pipeline 12, the second annular housing 111 is connected with the gas inlet of the reaction chamber in a sealing manner through a gas outlet pipeline 13, and the gas inlet pipeline 12 and the gas outlet pipeline 13 are both rigid pipelines. The air inlet pipeline 12 is fixed above the first annular shell 101, the bottom end of the air inlet pipeline 12 is in sealing connection with the first annular shell 101, the air inlet pipeline 12 is communicated with the inner ring of the first annular shell 101, and the top end of the air inlet pipeline 12 is in sealing connection with the air outlet of the carrier gas source; the air outlet pipeline 13 is fixed above the second annular shell 111, the bottom end of the air outlet pipeline 13 is connected with the second annular shell 111 in a sealing way, the air outlet pipeline 13 is communicated with the inner ring of the second annular shell 111, and the top end of the air outlet pipeline 13 is connected with the air inlet of the reaction chamber in a sealing way. In the prior art, the residual solid source can appear between the gaps of the corrugated pipes in the long-term use process due to the introduction of the corrugated pipes, and part of particles can be inevitably caused to enter the reaction chamber during the passing of carrier gas, so that the problem of indistinguishable particles is caused. The air outlet pipeline 13 and the air inlet pipeline 12 are rigid pipelines, so that the condition that particles at the joint part enter the reaction chamber due to deformation is avoided. Preferably, both the inlet pipe 12 and the outlet pipe 13 are smooth surfaces.
The first detection device 10 and the second detection device 11 can be hung in the source cabinet through a hanging rope, and can be hung below the carrier gas source and the reaction chamber through the gas inlet pipeline 12 and the gas outlet pipeline 13, and the hanging of the first detection device 10, the second detection device 11 and the source bottle 5, the gas inlet pipe 1, the gas inlet valve 2, the gas outlet pipe 3, the gas outlet valve 4 and the heating jacket 6 below the first detection device and the second detection device can be realized through the gas inlet pipeline 12 and the gas outlet pipeline 13, so that hanging weighing is realized, weighing is more accurate, and the influence of other devices is avoided.
Further, the method for calculating the weight compensation coefficient K by the controller according to the temperature measured by the first temperature sensor 102, the temperature measured by the second temperature sensor 112, the weight measured by the first load cell and the weight measured by the second load cell includes:
When a solid source is not added into the source bottle 5, gradually heating from room temperature to a first temperature, wherein the first temperature is greater than or equal to a process temperature, dividing a temperature interval between the first temperature and the room temperature into n equal divisions, wherein n is greater than or equal to 3 and n is an integer, respectively obtaining the sum W1 and Wn of weights measured by a first weighing sensor and a second weighing sensor when the room temperature is heated to the first temperature and each equal division node temperature, wherein the node temperature is the average value of the temperatures measured by the first temperature sensor 102 and the second temperature sensor 112 or the temperature measured by the second temperature sensor 112, the difference between W1 and Wn at a certain node temperature is obtained, the weight compensation value DeltaW at the node temperature is drawn by taking the difference DeltaT between the node temperature and the room temperature as an abscissa, the weight compensation value DeltaW at the node temperature as a longitudinal linear relation graph, and the slope of the linear relation graph is a weight compensation coefficient K.
Preferably, n is 5, so that the result of the calculation is more accurate.
The process temperatures of different solid sources are different, taking the highest process temperature as 200 ℃ as an example, the first temperature can be set to 220 ℃, when the solid source is not added in the source bottle 5, the temperature is gradually increased to 220 ℃ from the room temperature of 20 ℃, the sum of the weights measured by the first weighing sensor and the second weighing sensor is recorded at the room temperature, 60 ℃,100 ℃, 140 ℃, 180 ℃ and 220 ℃ respectively in the heating process, the difference between the sum of the weights measured by the two weighing sensors at the room temperature and the sum of the weights measured by the two weighing sensors at the node temperature is the weight compensation value DeltaW of the node temperature, the node temperature is based on the average value of the temperatures measured by the first temperature sensor 102 and the second temperature sensor 112 or the temperature measured by the second temperature sensor 112, a linear relation graph is drawn by taking the difference DeltaT between the node temperature and the room temperature as an abscissa and the weight compensation value DeltaW at the node temperature as an ordinate, and the slope of the linear relation graph is the weight compensation coefficient K.
Further, the method for calculating the residual W of the solid source in the source bottle 5 according to the temperature measured by the first temperature sensor 102, the temperature measured by the second temperature sensor 112, the weight measured by the first weighing sensor, the weight measured by the second weighing sensor and the weight compensation coefficient K by the controller comprises the following steps:
Obtaining the sum W1 of the weights measured by the first weighing sensor and the second weighing sensor when the solid source is not added in the source bottle at room temperature, namely the total mass W1 of the source bottle 5, the heating jacket 6, the air inlet pipe 1, the air outlet pipe 3, the air inlet valve 2 and the air outlet valve 4 at room temperature;
After the temperature is raised to the process temperature, an air inlet valve 2 is opened, carrier gas is continuously introduced into a source bottle 5, an air outlet valve 4 is opened, and a solid source carried by the carrier gas is continuously introduced into a reaction chamber for processing; acquiring the sum W2 of the weights measured by the first weighing sensor and the second weighing sensor at the current temperature in the process or after the process is finished; wherein the current temperature is an average value of temperatures measured by the first temperature sensor 102 and the second temperature sensor 112 or a temperature measured by the second temperature sensor 112;
Calculating a temperature difference DeltaT: Δt=t-T0, where T is the current temperature and T0 is room temperature;
Calculating the solid source allowance W in the source bottle 5: w=w2+K△T-W1.
And a weight compensation coefficient K is introduced, the influence of temperature on a weight detection result is eliminated, the measured W is the actual allowance of the solid source, and the detection result is more accurate.
In some embodiments, the controller is further configured to calculate the amount of solid source W0 required for one process and determine whether the remaining amount of solid source W in the current source bottle 5 meets the requirement for the next process. If W is greater than or equal to W0, then the next process requirements are met, and the process may continue.
Further, the device also comprises an alarm electrically connected with the controller and used for alarming when the residual quantity W of the solid source in the current source bottle 5 cannot meet the requirement of the next process, namely, when the W is smaller than W0, the process is stopped, and the risk of influencing the process result due to insufficient solid source is reduced before the process.
The application also discloses a solid source residue detection method using the solid source residue detection device, which comprises the following steps:
s1, calculating a weight compensation coefficient K; the method specifically comprises the following steps:
When a solid source is not added into the source bottle 5, gradually heating from room temperature to a first temperature, wherein the first temperature is greater than or equal to a process temperature, dividing a temperature interval between the first temperature and the room temperature into n equal divisions, wherein n is greater than or equal to 3 and n is an integer, respectively obtaining the sum W1 and Wn of weights measured by a first weighing sensor and a second weighing sensor when the room temperature is heated to the first temperature and each equal division node temperature, wherein the node temperature is the average value of the temperatures measured by the first temperature sensor 102 and the second temperature sensor 112 or the temperature measured by the second temperature sensor 112, the difference between W1 and Wn at a certain node temperature is obtained, the weight compensation value DeltaW at the node temperature is drawn by taking the difference DeltaT between the node temperature and the room temperature as an abscissa, the weight compensation value DeltaW at the node temperature as a longitudinal linear relation graph, and the slope of the linear relation graph is a weight compensation coefficient K.
S2, obtaining the sum W1 of the weights measured by the first weighing sensor and the second weighing sensor when the solid source is not added in the source bottle at room temperature, namely obtaining the total mass W1 of the source bottle 5, the heating jacket 6, the air inlet pipe 1, the air outlet pipe 3, the air inlet valve 2 and the air outlet valve 4 at room temperature.
S3, acquiring the sum W2 of the weights measured by the first weighing sensor and the second weighing sensor at the current temperature in the process or after the process is finished, wherein the current temperature is the average value of the temperatures measured by the first temperature sensor 102 and the second temperature sensor 112 or the temperature measured by the second temperature sensor 112; the air inlet pipe 1 of the source bottle 5 is opened, carrier gas is continuously introduced into the source bottle 5, the air outlet pipeline 13 is opened, a solid source carried by the carrier gas is continuously introduced into the reaction chamber for processing, and the current weight W2 can be measured in real time in the process or at the end of one process.
S4, calculating a temperature difference value delta T: Δt=t-T0, where T is the current temperature and T0 is room temperature.
S5, calculating the solid source allowance W in the source bottle 5: w=w2+K△T-W1.
A plurality of source bottles are fixed in the source cabinet, the process temperatures of the same solid source are the same, the amount of the solid source in the same source bottle can possibly be processed for a plurality of times, and when the same source bottle is processed for a plurality of times, the amount of the solid source consumed by each work can be different due to different flow of the carrier gas source, so that whether the residual amount of the solid source meets the requirement of the next process is calculated.
Further, the solid source allowance detection method of the present application further includes step S6 of determining whether the solid source allowance W in the current source bottle 5 meets the requirement of the next process. The method specifically comprises the following steps:
S61, obtaining the solid source dosage W0 required by the primary process at the process temperature; specifically, the solid source dosage W0 of the first process after the solid source is introduced is obtained. After the temperature is raised to the process temperature, before carrier gas is introduced, the sum of the weights measured by the first weighing sensor and the second weighing sensor is read, namely the total weight of the source bottle 5, the heating jacket 6, the air inlet pipe 1, the air outlet pipe 3, the air inlet valve 2, the air outlet valve 4 and the solid source in the source bottle 5 before the process; the air inlet valve of the source bottle 5 is opened, the carrier gas is continuously introduced into the source bottle 5, the air outlet valve is opened, the solid source carried by the carrier gas is continuously introduced into the reaction chamber, the sum of the weights measured by the first weighing sensor and the second weighing sensor is read after the process is finished, and the difference + (process temperature-room temperature) K of the sum of the weights before and after the process is the solid source dosage W0 required by one process.
S62, judging whether the difference value between the solid source allowance W and the solid source allowance W0 is larger than or equal to zero, if so, carrying out the next process, otherwise, giving an alarm. The controller is electrically connected with the air inlet valve 2 and the air outlet valve 4, and if the difference value between W and W0 is larger than or equal to zero, the opening state of the air inlet valve 2 and the air outlet valve 4 is kept, and the next process is carried out; if the difference between W and W0 is smaller than zero, the controller closes the air inlet valve 2 and the air outlet valve 4, stops introducing carrier gas, and controls the alarm to alarm.
And from the second process, judging once before each process is started, so that the risk of influencing the process result due to insufficient solid source is reduced.
The detection method is simple, can overcome the influence of temperature on the detection structure, and further obtains relatively stable and accurate solid source allowance, and has high detection precision. And a judging and alarming step is introduced, so that the utilization rate of the solid source is improved, and the cost is saved.
The application introduces the weight compensation coefficient K, and can calculate the weight compensation value DeltaW under different process temperatures according to the weight compensation coefficient K, and the detection device can be suitable for all source bottles.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention.
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In the description of the present specification, a description referring to the terms "present embodiment," "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any at least one embodiment or example. Furthermore, the features of the different embodiments or examples described in the present specification and their different embodiments or examples may be combined and combined by those skilled in the art without contradiction.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present invention, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.
The above description is only of the preferred embodiments of the present invention, and is not intended to limit the invention, but any modifications, equivalents, and simple improvements made within the spirit of the present invention should be included in the scope of the present invention.