技术领域Technical Field
本发明涉及金刚石生长技术领域，具体为附带温度调控机构的mpcvd金刚石生长设备。The invention relates to the technical field of diamond growth, in particular to an MPCVD diamond growth device with a temperature control mechanism.
背景技术Background Art
MPCVD法合成金刚石的质量与多种因素有关，包括合成温度、碳源浓度、微波功率、腔体压力、气体流量大小、基板台高度、衬底形状等。其中合成温度的控制对于合成金刚石产品的质量具有极大的关系。在合成温度和碳源浓度确定的情况下，微波功率及谐振腔体压力越大，则等离子体粒子密度越大，金刚石合成速率越快。The quality of diamond synthesized by MPCVD is related to many factors, including synthesis temperature, carbon source concentration, microwave power, cavity pressure, gas flow rate, substrate table height, substrate shape, etc. Among them, the control of synthesis temperature has a great relationship with the quality of synthetic diamond products. When the synthesis temperature and carbon source concentration are determined, the greater the microwave power and the resonant cavity pressure, the greater the plasma particle density and the faster the diamond synthesis rate.
由于混合气体经过不断电离进而产生碳单质，金刚石生长过程中，碳原子随着时间的流逝，沉降在非籽晶上的数量越来越多，导致混合气体内部的碳原子浓度不断下降，进而影响金刚石的生长速率。As the mixed gas is continuously ionized to produce carbon, during the growth of diamond, more and more carbon atoms settle on non-seed crystals over time, causing the concentration of carbon atoms in the mixed gas to decrease continuously, thereby affecting the growth rate of diamond.
发明内容Summary of the invention
本发明的目的在于提供附带温度调控机构的mpcvd金刚石生长设备，以解决上述背景技术中提出的问题。The object of the present invention is to provide an MPCVD diamond growth device with a temperature control mechanism to solve the problems raised in the above background technology.
为了解决上述技术问题，本发明提供如下技术方案：附带温度调控机构的mpcvd金刚石生长设备，包括主体、承载台、水冷系统、微波系统、加热系统和供气系统，所述主体内部下方设置有真空泵，所述主体内部上方设置有混合管，所述混合管内部设置有活塞板，所述活塞板的内部设置有气泵，所述混合管的下方设置有承载台，所述承载台的下方设置有水冷系统，承载台的外侧设置有限压环，承载台位于限压环的内部上方；In order to solve the above technical problems, the present invention provides the following technical solutions: an MPCVD diamond growth device with a temperature control mechanism, comprising a main body, a bearing platform, a water cooling system, a microwave system, a heating system and a gas supply system, wherein a vacuum pump is arranged at the lower part of the main body, a mixing tube is arranged at the upper part of the main body, a piston plate is arranged at the inner part of the mixing tube, an air pump is arranged at the inner part of the piston plate, a bearing platform is arranged at the lower part of the mixing tube, a water cooling system is arranged at the lower part of the bearing platform, a limited pressure ring is arranged at the outer side of the bearing platform, and the bearing platform is located at the upper part of the inner part of the pressure limiting ring;
所述混合管与活塞板之间滑动连接，混合管的外侧设置有两组管道，混合管通过两组管道分别与供气系统和限压环相连通；The mixing tube is slidably connected to the piston plate, and two groups of pipelines are arranged on the outside of the mixing tube. The mixing tube is respectively connected to the air supply system and the pressure limiting ring through the two groups of pipelines;
所述混合管内设置有气流加热区域以及电离区域；设备在使用之前，需要将所需加工的籽晶放置入承载台上，随后封闭主体，启动真空泵对主体进行真空处理，然后气泵配合供气系统向主体内部泵入足量的混合气体，同时启动微波系统和加热系统，对泵入的混合气体进行电离。The mixing tube is provided with an airflow heating area and an ionization area; before using the equipment, the seed crystal to be processed needs to be placed on the carrier, and then the main body is closed, and the vacuum pump is started to vacuum the main body, and then the air pump cooperates with the gas supply system to pump a sufficient amount of mixed gas into the main body, and at the same time, the microwave system and the heating system are started to ionize the pumped mixed gas.
进一步的，所述主体的上方设置有进气管，所述进气管与供气系统相连通，所述活塞板的上方设置有连接管，所述连接管和进气管之间滑动连接，连接管和进气管之间通过弹簧连接，所述活塞板内部设置有两组通道；当主体内为低压状态时，活塞板的上方设置有气囊，即气囊内部气压大于活塞板下方的气压，活塞板通过连接管与进气管相连接，混合管一侧设置管道，混合管通过管道与限压环内空间相连通，当连接管与进气管相连接时，活塞板的外壁对混合管和管道的连接处进行封闭；Furthermore, an air intake pipe is arranged above the main body, the air intake pipe is connected with the air supply system, a connecting pipe is arranged above the piston plate, the connecting pipe and the air intake pipe are slidably connected, the connecting pipe and the air intake pipe are connected by a spring, and two sets of channels are arranged inside the piston plate; when the main body is in a low-pressure state, an air bag is arranged above the piston plate, that is, the air pressure inside the air bag is greater than the air pressure below the piston plate, the piston plate is connected with the air intake pipe through the connecting pipe, a pipeline is arranged on one side of the mixing tube, the mixing tube is connected with the space inside the pressure-limiting ring through the pipeline, and when the connecting pipe is connected with the air intake pipe, the outer wall of the piston plate closes the connection between the mixing tube and the pipeline;
随着供气系统通过气泵不断的将混合气体泵入至主体内，活塞板下方的气压不断增大，在气压差的作用下，活塞板在混合管内部上升，直至连接管和进气管的连通区域相互错开，此时供气系统无法通过气泵向主体内供气，并且活塞板内部的一组通道与混合管和管道的连接处相重合，此时主体内的混合气体通过气泵进行内循环。As the air supply system continuously pumps the mixed gas into the main body through the air pump, the air pressure under the piston plate continues to increase. Under the action of the air pressure difference, the piston plate rises inside the mixing tube until the connecting areas of the connecting tube and the intake pipe are staggered. At this time, the air supply system cannot supply air to the main body through the air pump, and a group of channels inside the piston plate coincides with the connection between the mixing tube and the pipeline. At this time, the mixed gas in the main body is circulated internally through the air pump.
进一步的，所述混合管内部由上至下设置有多个分流环，所述分流环与混合管之间转动连接，所述混合管内部开设有多个V型槽，所述分流环设置于V型槽内，所述混合管内有混合气体经过，混合气体在分流环上方开始分流；混合气体在主体内进行内循环时，同时启动微波系统和加热系统，对混合管内部的混合气体进行电离，其中微波系统和加热系统工作区域为分流环所在的区域，由于混合管的内壁结构，配合分流环的外壁结构，当混合气体经过分流环所在的区域时，混合气体沿着分流环的外壁被分为两股气流，其中一股气流通过分流环的中心处向下运动，另一股气流沿着分流环的外壁进入V型槽，由于V型槽的结构设置，会对经过的气流进行导向，经过导向后的气流的运动方向为倾斜向上，最终向下的气流会与倾斜向上的气流产生交互，两股气流相互冲击，以达到混合效果，以保证混合气体内的各种气体之间充分混合。Furthermore, a plurality of diverter rings are arranged from top to bottom inside the mixing tube, and the diverter rings are rotatably connected to the mixing tube, and a plurality of V-shaped grooves are opened inside the mixing tube, and the diverter rings are arranged in the V-shaped grooves. A mixed gas passes through the mixing tube, and the mixed gas begins to be diverted above the diverter rings; when the mixed gas circulates internally in the main body, the microwave system and the heating system are started at the same time to ionize the mixed gas inside the mixing tube, wherein the working area of the microwave system and the heating system is the area where the diverter ring is located, and due to the inner wall structure of the mixing tube and the outer wall structure of the diverter ring, when the mixed gas passes through the area where the diverter ring is located, the mixed gas is divided into two airflows along the outer wall of the diverter ring, wherein one airflow moves downward through the center of the diverter ring, and the other airflow enters the V-shaped groove along the outer wall of the diverter ring, and due to the structural setting of the V-shaped groove, the passing airflow will be guided, and the movement direction of the guided airflow is inclined upward, and finally the downward airflow will interact with the inclined upward airflow, and the two airflows impact each other to achieve a mixing effect, so as to ensure that the various gases in the mixed gas are fully mixed.
进一步的，所述分流环的外侧开设有多个导流槽，所述导流槽为倾斜设置，分流环的外侧设置有若干个导向片，所述导向片的外壁尺寸与V型槽的内壁尺寸相匹配；经过电离后的混合气体，里面的部分碳原子会发生沉降，沉降后的碳原子在V型槽内形成石墨层，由于分流环的外侧开设有导流槽，并且导流槽为倾斜设置，当气流经过分流环外侧时，由于导流槽处的气流通过截面大于分流环外侧其它区域的气流通过截面，使得部分气流会通过导流槽进行运动，当气流经过导流槽期间，在气流的推动下带动分流环进行旋转；Furthermore, a plurality of guide grooves are provided on the outer side of the diverter ring, the guide grooves are arranged obliquely, and a plurality of guide plates are provided on the outer side of the diverter ring, and the outer wall size of the guide plates matches the inner wall size of the V-shaped groove; after ionization, part of the carbon atoms in the mixed gas will settle, and the settled carbon atoms will form a graphite layer in the V-shaped groove. Since the guide grooves are provided on the outer side of the diverter ring, and the guide grooves are arranged obliquely, when the airflow passes through the outer side of the diverter ring, since the airflow passing cross section at the guide grooves is larger than the airflow passing cross section in other areas of the outer side of the diverter ring, part of the airflow will move through the guide grooves, and when the airflow passes through the guide grooves, the diverter ring is driven to rotate by the airflow;
由于分流环的外侧设置有导向片，并且导向片的外壁尺寸与V型槽的内壁尺寸相匹配，导向片呈环形分布于分流环的外侧，实现分流环在闲置状态下的相对位置与旋转状态下的分流环的相对位置相同，分流环在气流的作用下进行旋转期间，分流环外侧的导向片同步进行旋转，旋转状态下的导向片对V型槽内沉降产生的石墨层进行清理，清理后产生石墨粉碎跟随气流离开V型槽；Since a guide plate is arranged on the outside of the diverter ring, and the outer wall size of the guide plate matches the inner wall size of the V-shaped groove, the guide plates are distributed in an annular shape on the outside of the diverter ring, so that the relative position of the diverter ring in an idle state is the same as the relative position of the diverter ring in a rotating state. When the diverter ring rotates under the action of the airflow, the guide plates on the outside of the diverter ring rotate synchronously. The guide plates in the rotating state clean the graphite layer generated by sedimentation in the V-shaped groove, and the graphite crushed after cleaning follows the airflow and leaves the V-shaped groove;
由于混合管内分流环所在的区域为微波系统和加热系统的工作区域，导致分流环所在的区域分子以及原子的电离速率要大于沉降速率，同时气流内部电离产生的氢离子能够对石墨进行清理，使得石墨再次回到碳原子状态。Since the area where the splitter ring in the mixing tube is located is the working area of the microwave system and the heating system, the ionization rate of molecules and atoms in the area where the splitter ring is located is greater than the sedimentation rate. At the same time, the hydrogen ions generated by the ionization inside the airflow can clean the graphite, making the graphite return to the carbon atom state again.
进一步的，所述混合管的下方设置有聚气环，所述聚气环与混合管之间转动连接，所述聚气环的下方开设有若干个导气孔，若干个所述导气孔以聚气环的中轴线为中心呈环状分布，导气孔的输出朝向为聚气环圆心所在的一侧；混合管的最下端设置有聚气环，气泵泵出的气流最终通过导气孔进入限压环所包围的空间内，其中聚气环与上方的分流环相连接，分流环带动聚气环同步旋转，其次导气孔的位置设置，以及导气孔的输出方向，混合管内的气流分为若干股进入导气孔，由于导气孔的输出朝向为聚气环圆心所在的一侧，经过导向的气流，从沿着聚气环径向运动的气流，最终在聚气环的中心处聚集，若干股气流在聚气环的中心处产生交互；Furthermore, an air gathering ring is provided below the mixing tube, and the air gathering ring is rotatably connected to the mixing tube, and a plurality of air guide holes are opened below the air gathering ring, and the plurality of air guide holes are distributed in a ring shape with the central axis of the air gathering ring as the center, and the output direction of the air guide holes is the side where the center of the air gathering ring is located; an air gathering ring is provided at the lowermost end of the mixing tube, and the airflow pumped out by the air pump finally enters the space surrounded by the pressure limiting ring through the air guide holes, wherein the air gathering ring is connected to the diverter ring above, and the diverter ring drives the air gathering ring to rotate synchronously, and secondly, the position setting of the air guide holes and the output direction of the air guide holes, the airflow in the mixing tube is divided into several streams entering the air guide holes, and since the output direction of the air guide holes is the side where the center of the air gathering ring is located, the airflow passing through the guide, from the airflow moving radially along the air gathering ring, finally gathers at the center of the air gathering ring, and several airflows interact at the center of the air gathering ring;
气流之间相互冲击之后，气流在离开导气孔后携带的动能被损耗，由于限压环内部存在有大量混合气体，气流以多股小流量快速的方式进入至限压环内，气流所携带的动能不断减小，直至消失，随后与限压环内部气流融合，使得限压环内部的混合气体以低动态的形式存在，以便于混合气体内部的碳原子自然沉降，同时离开导气孔气流的聚集点与承载台上籽晶的放置点的中心处相重合，使得中心处自然沉降的碳原子含量大于承载台上边缘区域的碳原子的沉降含量。After the air flows collide with each other, the kinetic energy carried by the air flows after leaving the air guide holes is lost. Since there is a large amount of mixed gas inside the pressure limiting ring, the air flows into the pressure limiting ring in multiple small flow rates and quickly. The kinetic energy carried by the air flows continues to decrease until it disappears, and then merges with the air flow inside the pressure limiting ring, so that the mixed gas inside the pressure limiting ring exists in a low-dynamic form, so as to facilitate the natural sedimentation of carbon atoms in the mixed gas. At the same time, the gathering point of the air flow leaving the air guide holes coincides with the center of the placement point of the seed crystal on the supporting platform, so that the content of naturally settled carbon atoms at the center is greater than the sedimentation content of carbon atoms in the edge area of the supporting platform.
进一步的，所述导气孔的外壁表面为倾斜设置，所述导气孔与混合管的内壁相互配合构成气流通道，所述聚气环的中轴线与承载台的中轴线相重合；由于聚气环与上方的分流环相连接，分流环带动聚气环同步旋转，导气孔与混合管的内壁相互配合构成气流通道，使得导气孔的最下端与混合管的内壁产生相对运动，进而对沉降在混合管内部下方的石墨层进行清理，同时产生的石墨粉碎跟随气流离开导气孔。Furthermore, the outer wall surface of the air guide hole is inclined, and the air guide hole and the inner wall of the mixing tube cooperate with each other to form an air flow channel, and the central axis of the air gathering ring coincides with the central axis of the supporting platform; since the air gathering ring is connected to the diverter ring above, the diverter ring drives the air gathering ring to rotate synchronously, and the air guide hole and the inner wall of the mixing tube cooperate with each other to form an air flow channel, so that the lower end of the air guide hole and the inner wall of the mixing tube produce relative movement, and then the graphite layer settled at the bottom of the mixing tube is cleaned, and the graphite crushed generated at the same time follows the air flow to leave the air guide hole.
进一步的，所述限压环的中部设置有连接环，所述连接环的中部贯穿有若干个引导片，所述引导片的下端表面与承载台的上端表面相贴合，引导片的外壁尺寸与连接环的内壁尺寸相匹配，所述连接环的外侧有齿槽，连接环与限压环之间转动连接，连接环通过齿槽和齿轮与驱动电机相连接，所述承载台的中轴线位于引导片之间；Further, a connecting ring is provided in the middle of the pressure limiting ring, a plurality of guide pieces are passed through the middle of the connecting ring, the lower end surface of the guide piece is fitted with the upper end surface of the bearing platform, the outer wall size of the guide piece matches the inner wall size of the connecting ring, the outer side of the connecting ring has a tooth groove, the connecting ring is rotatably connected to the pressure limiting ring, the connecting ring is connected to the driving motor through the tooth groove and the gear, and the central axis of the bearing platform is located between the guide pieces;
所述引导片由上下两片构成，上下两片所述引导片的倾斜角度相反；驱动电机通过齿轮和齿槽带动引导片进行运动，其中引导片的下端表面与承载台的上端表面相互贴合，引导片在驱动电机的带动下进行旋转，引导片相对承载台工作期间，对沉降在承载台上的石墨层进行清理，同时在离心的作用下石墨粉末向四周运动，随后石墨粉末跟随气流通过管道和气泵再次进入混合管内部的电离区域；The guide piece is composed of an upper and a lower piece, and the inclination angles of the upper and lower guide pieces are opposite; the driving motor drives the guide piece to move through the gear and the tooth groove, wherein the lower end surface of the guide piece and the upper end surface of the bearing platform are mutually attached, and the guide piece rotates under the drive of the driving motor. When the guide piece is working relative to the bearing platform, the graphite layer settled on the bearing platform is cleaned, and at the same time, the graphite powder moves around under the action of centrifugation, and then the graphite powder follows the airflow through the pipeline and the air pump to enter the ionization area inside the mixing tube again;
位于籽晶上方的引导片上倾斜角度与位于籽晶上下方的引导片上倾斜角度不同，其中位于籽晶上方的引导片旋转状态下主要对限压环内的气流进行作用，将限压环内壁附近的混合气体向中心区域进行推动，即将混合气体向籽晶的中部上方进行推动，位于籽晶下方的引导片旋转状态下主要对附着在承载台上的石墨层进行粉碎导向，让粉碎后的石墨再次进入混合管内部的电离区域，然后与氢离子发生接触，让石墨再次回到碳原子的状态，以保证混合气体所提供的碳源主要沉降在籽晶上，同时维持混合气体的碳原子浓度。The inclination angle of the guide plate above the seed crystal is different from the inclination angle of the guide plate above and below the seed crystal. The guide plate above the seed crystal mainly acts on the airflow in the pressure limiting ring when it is rotating, and pushes the mixed gas near the inner wall of the pressure limiting ring toward the central area, that is, pushes the mixed gas toward the middle and upper part of the seed crystal. The guide plate below the seed crystal mainly crushes and guides the graphite layer attached to the supporting platform when it is rotating, so that the crushed graphite enters the ionization area inside the mixing tube again, and then contacts with the hydrogen ions, so that the graphite returns to the state of carbon atoms again, so as to ensure that the carbon source provided by the mixed gas is mainly deposited on the seed crystal, while maintaining the carbon atom concentration of the mixed gas.
进一步的，所述连接环的外侧设置有偏心环，所述引导片的一端与偏心环滑动连接，所述偏心环圆心所在的中垂线与限压环圆心所在的中垂线相平行，偏心环与主体之间转动连接，偏心环与连接环的中轴线为圆心进行旋转，偏心环与引导片之间存在阻尼；由于偏心环相对限压环呈偏心设置，同时引导片的一端与偏心环相连接，引导片贯穿连接环，故每片引导片深入至限压环内长度不同，伸入长度最短的引导片末端位于连接环内，伸入长度最长的引导片末端位于靠近籽晶放置的区域，引导片相对连接环滑动过程中，连接环对附着在引导片石墨层进行清理；Furthermore, an eccentric ring is arranged on the outer side of the connecting ring, one end of the guide piece is slidably connected with the eccentric ring, the perpendicular bisector of the center of the eccentric ring is parallel to the perpendicular bisector of the center of the pressure-limiting ring, the eccentric ring is rotatably connected with the main body, the eccentric ring and the central axis of the connecting ring are rotated as the center, and there is damping between the eccentric ring and the guide piece; since the eccentric ring is eccentrically arranged relative to the pressure-limiting ring, and one end of the guide piece is connected to the eccentric ring, and the guide piece passes through the connecting ring, each guide piece has a different length of penetration into the pressure-limiting ring, the end of the guide piece with the shortest insertion length is located in the connecting ring, and the end of the guide piece with the longest insertion length is located near the area where the seed crystal is placed, and during the sliding process of the guide piece relative to the connecting ring, the connecting ring cleans the graphite layer attached to the guide piece;
由于偏心环与连接环的中轴线为圆心进行旋转，偏心环与引导片之间存在阻尼，引导片的旋转期间，通过引导片和偏心环之间阻尼效果带动偏心环进行旋转，实现偏心环以连接环为圆心进行旋转，同时引导片旋转角速度大于偏心环旋转角速度，实现在不同的时间段内，深入连接环内最长的引导片所处的区域同步发生变化，进而实现对承载台上端表面进行清理，以及配合位于籽晶上方的引导片，通过带动气流将碳原子向籽晶的正上方推动。Since the eccentric ring and the connecting ring rotate with the central axis as the center of the circle, there is damping between the eccentric ring and the guide piece. During the rotation of the guide piece, the eccentric ring is driven to rotate by the damping effect between the guide piece and the eccentric ring, so that the eccentric ring rotates with the connecting ring as the center of the circle. At the same time, the angular velocity of the guide piece is greater than the angular velocity of the eccentric ring, so that in different time periods, the area where the longest guide piece deep in the connecting ring is located changes synchronously, thereby cleaning the upper end surface of the supporting platform, and cooperating with the guide piece located above the seed crystal to drive the airflow to push the carbon atoms to the top of the seed crystal.
与现有技术相比，本发明所达到的有益效果是：Compared with the prior art, the beneficial effects achieved by the present invention are:
通过混合管的设置，混合管内部设置有若干个分流环，配合分流环表面结构，对经过分流环表面的气流进行扰乱，同时分流环对气流附带分流效果，配合导流槽，实现混合气体内各种气体之间相互混合，进而提高混合气体在电离后内部各个区域碳原子浓度差距减小；Through the setting of the mixing tube, a plurality of diverter rings are arranged inside the mixing tube, and the surface structure of the diverter ring is used to disturb the airflow passing through the surface of the diverter ring. At the same time, the diverter ring has a diverting effect on the airflow, and cooperates with the guide groove to achieve mutual mixing of various gases in the mixed gas, thereby reducing the difference in carbon atom concentration in various regions inside the mixed gas after ionization;
通过聚气环的设置，聚气环将经过电离的混合气体导向至籽晶的正上方，同时利用多股气流之间相互冲击，以实现气流在籽晶的正上方聚集，同时聚集后的气流所携带的动能下降，以便于混合气体内部的碳原子能够自然沉降，避免因气流运动，导致混合气体内部的碳原子与籽晶的接触概率降低；The gas gathering ring is set to guide the ionized mixed gas to the top of the seed crystal, and the multiple airflows are impacted with each other to gather the airflows above the seed crystal. The kinetic energy of the gathered airflows is reduced, so that the carbon atoms in the mixed gas can settle naturally, avoiding the reduction of the contact probability between the carbon atoms in the mixed gas and the seed crystal due to the movement of the airflow.
通过限压环及其内部机构的设置，配合偏心环，实现引导片将籽晶周围的气流向籽晶正上方所在的一侧进行推动，同时引导片对承载台上籽晶附近的石墨层进行清理，清理后的石墨粉末跟随气流再次进入至混合管内部电离，以保证气流内部的碳原子浓度。Through the setting of the pressure limiting ring and its internal mechanism, in cooperation with the eccentric ring, the guide plate pushes the airflow around the seed crystal to the side directly above the seed crystal. At the same time, the guide plate cleans the graphite layer near the seed crystal on the supporting platform. The cleaned graphite powder follows the airflow and enters the mixing tube again for ionization to ensure the carbon atom concentration inside the airflow.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
附图用来提供对本发明的进一步理解，并且构成说明书的一部分，与发明的实施例一起用于解释本发明，并不构成对本发明的限制。在附图中：The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:
图1是本发明的主体主视结构示意图；FIG1 is a schematic diagram of the main structure of the present invention;
图2是本发明的主体主视全剖结构示意图；FIG2 is a schematic diagram of the main body of the present invention in full cross-section;
图3是本发明的混合管主视全剖结构示意图；FIG3 is a schematic diagram of the front view of the mixing tube of the present invention;
图4是本发明的图3中A处放大结构示意图；FIG4 is an enlarged structural schematic diagram of point A in FIG3 of the present invention;
图5是本发明的分流环结构示意图；FIG5 is a schematic diagram of the structure of the diverter ring of the present invention;
图6是本发明的图3中B处放大结构示意图；FIG6 is an enlarged schematic diagram of the structure at B in FIG3 of the present invention;
图7是本发明的聚气环结构示意图；FIG7 is a schematic diagram of the structure of a gas gathering ring according to the present invention;
图8是本发明的承载台俯视结构示意图。FIG. 8 is a schematic diagram of the top view of the supporting platform of the present invention.
图中：1、主体；2、混合管；201、分流环；202、V型槽；203、导流槽；204、导向片；3、活塞板；301、连接管；4、承载台；5、限压环；501、引导片；502、连接环；6、聚气环；601、导气孔；7、偏心环。In the figure: 1. main body; 2. mixing tube; 201. diverter ring; 202. V-shaped groove; 203. guide groove; 204. guide plate; 3. piston plate; 301. connecting pipe; 4. supporting platform; 5. pressure limiting ring; 501. guide plate; 502. connecting ring; 6. gas gathering ring; 601. gas guide hole; 7. eccentric ring.
具体实施方式DETAILED DESCRIPTION
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
请参阅图1-图8，本发明提供技术方案：附带温度调控机构的mpcvd金刚石生长设备，包括主体1、承载台4、水冷系统、微波系统、加热系统和供气系统，主体1内部下方设置有真空泵，主体1内部上方设置有混合管2，混合管2内设置有气流加热区域以及电离区域，混合管2内部由上至下设置有多个分流环201，分流环201与混合管2之间转动连接，混合管2内部开设有多个V型槽202，分流环201设置于V型槽202内，混合管2内有混合气体经过，混合气体在分流环201上方开始分流；Please refer to Figures 1 to 8. The present invention provides a technical solution: an MPCVD diamond growth device with a temperature control mechanism, including a main body 1, a carrier 4, a water cooling system, a microwave system, a heating system and a gas supply system. A vacuum pump is arranged at the lower part of the main body 1, a mixing tube 2 is arranged at the upper part of the main body 1, and an airflow heating area and an ionization area are arranged in the mixing tube 2. A plurality of diverter rings 201 are arranged from top to bottom in the mixing tube 2, and the diverter rings 201 are rotatably connected to the mixing tube 2. A plurality of V-shaped grooves 202 are opened in the mixing tube 2, and the diverter rings 201 are arranged in the V-shaped grooves 202. A mixed gas passes through the mixing tube 2, and the mixed gas starts to be diverted above the diverter rings 201.
分流环201的外侧开设有多个导流槽203，导流槽203为倾斜设置，分流环201的外侧设置有若干个导向片204，导向片204的外壁尺寸与V型槽202的内壁尺寸相匹配；A plurality of guide grooves 203 are provided on the outer side of the flow dividing ring 201. The guide grooves 203 are inclined. A plurality of guide plates 204 are provided on the outer side of the flow dividing ring 201. The outer wall size of the guide plates 204 matches the inner wall size of the V-shaped groove 202.
混合管2的下方设置有聚气环6，聚气环6与混合管2之间转动连接，聚气环6的下方开设有若干个导气孔601，若干个导气孔601以聚气环6的中轴线为中心呈环状分布，导气孔601的输出朝向为聚气环6圆心所在的一侧；A gas gathering ring 6 is provided below the mixing tube 2, and the gas gathering ring 6 is rotatably connected to the mixing tube 2. A plurality of gas guide holes 601 are provided below the gas gathering ring 6, and the plurality of gas guide holes 601 are distributed in a ring shape with the central axis of the gas gathering ring 6 as the center, and the output direction of the gas guide holes 601 is the side where the center of the gas gathering ring 6 is located;
导气孔601的外壁表面为倾斜设置，导气孔601与混合管2的内壁相互配合构成气流通道，聚气环6的中轴线与承载台4的中轴线相重合；The outer wall surface of the air guide hole 601 is inclined, and the air guide hole 601 cooperates with the inner wall of the mixing tube 2 to form an air flow channel, and the central axis of the air gathering ring 6 coincides with the central axis of the supporting platform 4;
混合管2内部设置有若干个分流环201，配合分流环201表面结构，对经过分流环201表面的气流进行扰乱，同时分流环201对气流附带分流效果，配合导流槽203，实现混合气体内各种气体之间相互混合，进而提高混合气体在电离后内部各个区域碳原子浓度差距减小；A plurality of diverter rings 201 are arranged inside the mixing tube 2. The surface structure of the diverter ring 201 disturbs the airflow passing through the surface of the diverter ring 201. The diverter ring 201 has a diverting effect on the airflow. The diverter groove 203 is used to achieve mixing of various gases in the mixed gas, thereby reducing the difference in carbon atom concentration in various regions of the mixed gas after ionization.
混合管2内部设置有活塞板3，活塞板3的内部设置有气泵，主体1的上方设置有进气管，进气管与供气系统相连通，活塞板3的上方设置有连接管301，连接管301和进气管之间滑动连接，连接管301和进气管之间通过弹簧连接，活塞板3内部设置有两组通道；A piston plate 3 is arranged inside the mixing tube 2, an air pump is arranged inside the piston plate 3, an air intake pipe is arranged above the main body 1, the air intake pipe is connected to the air supply system, a connecting pipe 301 is arranged above the piston plate 3, the connecting pipe 301 and the air intake pipe are slidably connected, the connecting pipe 301 and the air intake pipe are connected by a spring, and two sets of channels are arranged inside the piston plate 3;
聚气环6将经过电离的混合气体导向至籽晶的正上方，同时利用多股气流之间相互冲击，以实现气流在籽晶的正上方聚集，同时聚集后的气流所携带的动能下降，以便于混合气体内部的碳原子能够自然沉降，避免因气流运动，导致混合气体内部的碳原子与籽晶的接触概率降低；The gas gathering ring 6 guides the ionized mixed gas to the top of the seed crystal, and uses the impact between multiple airflows to achieve the gathering of airflows above the seed crystal. At the same time, the kinetic energy carried by the gathered airflows decreases, so that the carbon atoms in the mixed gas can settle naturally, avoiding the reduction of the contact probability between the carbon atoms in the mixed gas and the seed crystal due to the movement of the airflow;
混合管2的下方设置有承载台4，承载台4的下方设置有水冷系统，承载台4的外侧设置有限压环5，承载台4位于限压环5的内部上方；A bearing platform 4 is provided below the mixing tube 2, a water cooling system is provided below the bearing platform 4, a pressure limiting ring 5 is provided outside the bearing platform 4, and the bearing platform 4 is located above the inside of the pressure limiting ring 5;
混合管2与活塞板3之间滑动连接，混合管2的外侧设置有两组管道，混合管2通过两组管道分别与供气系统和限压环5相连通；The mixing tube 2 is slidably connected to the piston plate 3. Two groups of pipelines are arranged on the outside of the mixing tube 2. The mixing tube 2 is connected to the air supply system and the pressure limiting ring 5 respectively through the two groups of pipelines.
限压环5的中部设置有连接环502，连接环502的中部贯穿有若干个引导片501，引导片501的下端表面与承载台4的上端表面相贴合，引导片501的外壁尺寸与连接环502的内壁尺寸相匹配，连接环502的外侧有齿槽，连接环502与限压环5之间转动连接，连接环502通过齿槽和齿轮与驱动电机相连接，承载台4的中轴线位于引导片501之间；A connecting ring 502 is provided in the middle of the pressure limiting ring 5, and a plurality of guide pieces 501 are passed through the middle of the connecting ring 502. The lower end surface of the guide piece 501 is in contact with the upper end surface of the bearing platform 4, and the outer wall size of the guide piece 501 matches the inner wall size of the connecting ring 502. There are teeth grooves on the outer side of the connecting ring 502. The connecting ring 502 is rotatably connected to the pressure limiting ring 5. The connecting ring 502 is connected to the driving motor through the teeth grooves and gears, and the central axis of the bearing platform 4 is located between the guide pieces 501.
引导片501由上下两片构成，上下两片引导片501的倾斜角度相反；The guide piece 501 is composed of two pieces, the upper and lower pieces, and the inclination angles of the two guide pieces 501 are opposite;
连接环502的外侧设置有偏心环7，引导片501的一端与偏心环7滑动连接，偏心环7圆心所在的中垂线与限压环5圆心所在的中垂线相平行，偏心环7与主体1之间转动连接，偏心环7与连接环502的中轴线为圆心进行旋转，偏心环7与引导片501之间存在阻尼；An eccentric ring 7 is arranged on the outside of the connecting ring 502, one end of the guide piece 501 is slidably connected to the eccentric ring 7, the midpoint perpendicular line where the center of the eccentric ring 7 is located is parallel to the midpoint perpendicular line where the center of the pressure limiting ring 5 is located, the eccentric ring 7 is rotatably connected to the main body 1, the eccentric ring 7 rotates with the central axis of the connecting ring 502 as the center, and there is damping between the eccentric ring 7 and the guide piece 501;
实现引导片501将籽晶周围的气流向籽晶正上方所在的一侧进行推动，同时引导片501对承载台4上籽晶附近的石墨层进行清理，清理后的石墨粉末跟随气流再次进入至混合管2内部电离，以保证气流内部的碳原子浓度。The guide plate 501 pushes the airflow around the seed crystal to the side directly above the seed crystal. At the same time, the guide plate 501 cleans the graphite layer near the seed crystal on the supporting platform 4. The cleaned graphite powder follows the airflow and enters the mixing tube 2 again for ionization to ensure the carbon atom concentration inside the airflow.
本发明的工作原理：设备在使用之前，需要将所需加工的籽晶放置入承载台4上，随后封闭主体1，启动真空泵对主体1进行真空处理，然后气泵配合供气系统向主体1内部泵入足量的混合气体，同时启动微波系统和加热系统，对泵入的混合气体进行电离；The working principle of the present invention is as follows: before using the device, the seed crystal to be processed needs to be placed on the carrier 4, then the main body 1 is closed, the vacuum pump is started to vacuum the main body 1, and then the air pump cooperates with the gas supply system to pump a sufficient amount of mixed gas into the main body 1, and at the same time, the microwave system and the heating system are started to ionize the pumped mixed gas;
当主体1内为低压状态时，活塞板3的上方设置有气囊，即气囊内部气压大于活塞板3下方的气压，活塞板3通过连接管301与进气管相连接，混合管2一侧设置管道，混合管2通过管道与限压环5内空间相连通，当连接管301与进气管相连接时，活塞板3的外壁对混合管2和管道的连接处进行封闭；When the main body 1 is in a low-pressure state, an airbag is arranged above the piston plate 3, that is, the air pressure inside the airbag is greater than the air pressure below the piston plate 3, the piston plate 3 is connected to the intake pipe through the connecting pipe 301, a pipeline is arranged on one side of the mixing pipe 2, and the mixing pipe 2 is connected to the space inside the pressure-limiting ring 5 through the pipeline. When the connecting pipe 301 is connected to the intake pipe, the outer wall of the piston plate 3 seals the connection between the mixing pipe 2 and the pipeline;
随着供气系统通过气泵不断的将混合气体泵入至主体1内，活塞板3下方的气压不断增大，在气压差的作用下，活塞板3在混合管2内部上升，直至连接管301和进气管的连通区域相互错开，此时供气系统无法通过气泵向主体1内供气，并且活塞板3内部的一组通道与混合管2和管道的连接处相重合，此时主体1内的混合气体通过气泵进行内循环；As the air supply system continuously pumps the mixed gas into the main body 1 through the air pump, the air pressure below the piston plate 3 continuously increases. Under the action of the air pressure difference, the piston plate 3 rises inside the mixing tube 2 until the connecting area of the connecting tube 301 and the air inlet pipe are staggered. At this time, the air supply system cannot supply air to the main body 1 through the air pump, and a group of channels inside the piston plate 3 coincide with the connection between the mixing tube 2 and the pipeline. At this time, the mixed gas in the main body 1 is internally circulated through the air pump;
混合气体在主体1内进行内循环时，同时启动微波系统和加热系统，对混合管2内部的混合气体进行电离，其中微波系统和加热系统工作区域为分流环201所在的区域，由于混合管2的内壁结构，配合分流环201的外壁结构，当混合气体经过分流环201所在的区域时，混合气体沿着分流环201的外壁被分为两股气流，其中一股气流通过分流环201的中心处向下运动，另一股气流沿着分流环201的外壁进入V型槽202，由于V型槽202的结构设置，会对经过的气流进行导向，经过导向后的气流的运动方向为倾斜向上，最终向下的气流会与倾斜向上的气流产生交互，两股气流相互冲击，以达到混合效果，以保证混合气体内的各种气体之间充分混合；When the mixed gas circulates internally in the main body 1, the microwave system and the heating system are started at the same time to ionize the mixed gas inside the mixing tube 2, wherein the working area of the microwave system and the heating system is the area where the diverter ring 201 is located. Due to the inner wall structure of the mixing tube 2 and the outer wall structure of the diverter ring 201, when the mixed gas passes through the area where the diverter ring 201 is located, the mixed gas is divided into two airflows along the outer wall of the diverter ring 201, wherein one airflow moves downward through the center of the diverter ring 201, and the other airflow enters the V-shaped groove 202 along the outer wall of the diverter ring 201. Due to the structural setting of the V-shaped groove 202, the passing airflow will be guided, and the movement direction of the guided airflow is inclined upward. Finally, the downward airflow will interact with the inclined upward airflow, and the two airflows will impact each other to achieve a mixing effect, so as to ensure that the various gases in the mixed gas are fully mixed.
经过电离后的混合气体，里面的部分碳原子会发生沉降，沉降后的碳原子在V型槽202内形成石墨层，由于分流环201的外侧开设有导流槽203，并且导流槽203为倾斜设置，当气流经过分流环201外侧时，由于导流槽203处的气流通过截面大于分流环201外侧其它区域的气流通过截面，使得部分气流会通过导流槽203进行运动，当气流经过导流槽203期间，在气流的推动下带动分流环201进行旋转；After the ionization, some carbon atoms in the mixed gas will settle, and the settled carbon atoms will form a graphite layer in the V-shaped groove 202. Since the guide groove 203 is provided on the outside of the diverter ring 201, and the guide groove 203 is inclined, when the airflow passes through the outside of the diverter ring 201, since the airflow passing cross section at the guide groove 203 is larger than the airflow passing cross section in other areas outside the diverter ring 201, part of the airflow will move through the guide groove 203. When the airflow passes through the guide groove 203, the diverter ring 201 is driven to rotate;
由于分流环201的外侧设置有导向片204，并且导向片204的外壁尺寸与V型槽202的内壁尺寸相匹配，导向片204呈环形分布于分流环201的外侧，实现分流环201在闲置状态下的相对位置与旋转状态下的分流环201的相对位置相同，分流环201在气流的作用下进行旋转期间，分流环201外侧的导向片204同步进行旋转，旋转状态下的导向片204对V型槽202内沉降产生的石墨层进行清理，清理后产生石墨粉碎跟随气流离开V型槽202；Since the guide piece 204 is arranged on the outside of the diverter ring 201, and the outer wall size of the guide piece 204 matches the inner wall size of the V-shaped groove 202, the guide piece 204 is distributed in an annular shape on the outside of the diverter ring 201, so that the relative position of the diverter ring 201 in an idle state is the same as the relative position of the diverter ring 201 in a rotating state. When the diverter ring 201 rotates under the action of the airflow, the guide piece 204 on the outside of the diverter ring 201 rotates synchronously, and the guide piece 204 in the rotating state cleans the graphite layer generated by the sedimentation in the V-shaped groove 202, and the graphite crushed after cleaning follows the airflow and leaves the V-shaped groove 202;
由于混合管2内分流环201所在的区域为微波系统和加热系统的工作区域，导致分流环201所在的区域分子以及原子的电离速率要大于沉降速率，同时气流内部电离产生的氢离子能够对石墨进行清理，使得石墨再次回到碳原子状态；Since the area where the split ring 201 in the mixing tube 2 is located is the working area of the microwave system and the heating system, the ionization rate of the molecules and atoms in the area where the split ring 201 is located is greater than the sedimentation rate. At the same time, the hydrogen ions generated by the ionization inside the airflow can clean the graphite, so that the graphite returns to the carbon atom state again;
混合管2的最下端设置有聚气环6，气泵泵出的气流最终通过导气孔601进入限压环5所包围的空间内，其中聚气环6与上方的分流环201相连接，分流环201带动聚气环6同步旋转，其次导气孔601的位置设置，以及导气孔601的输出方向，混合管2内的气流分为若干股进入导气孔601，由于导气孔601的输出朝向为聚气环6圆心所在的一侧，经过导向的气流，从沿着聚气环6径向运动的气流，最终在聚气环6的中心处聚集，若干股气流在聚气环6的中心处产生交互；An air gathering ring 6 is arranged at the bottom end of the mixing tube 2, and the air flow pumped out by the air pump finally enters the space surrounded by the pressure limiting ring 5 through the air guide hole 601, wherein the air gathering ring 6 is connected with the diverter ring 201 above, and the diverter ring 201 drives the air gathering ring 6 to rotate synchronously. Secondly, the position setting of the air guide hole 601 and the output direction of the air guide hole 601 cause the air flow in the mixing tube 2 to be divided into several streams and enter the air guide hole 601. Since the output direction of the air guide hole 601 is the side where the center of the air gathering ring 6 is located, the air flow that passes through the guidance, from the air flow that moves radially along the air gathering ring 6, finally gathers at the center of the air gathering ring 6, and several air flows interact at the center of the air gathering ring 6.
气流之间相互冲击之后，气流在离开导气孔601后携带的动能被损耗，由于限压环5内部存在有大量混合气体，气流以多股小流量快速的方式进入至限压环5内，气流所携带的动能不断减小，直至消失，随后与限压环5内部气流融合，使得限压环5内部的混合气体以低动态的形式存在，以便于混合气体内部的碳原子自然沉降，同时离开导气孔601气流的聚集点与承载台4上籽晶的放置点的中心处相重合，使得中心处自然沉降的碳原子含量大于承载台4上边缘区域的碳原子的沉降含量；After the airflows collide with each other, the kinetic energy carried by the airflow after leaving the air guide hole 601 is lost. Since there is a large amount of mixed gas inside the pressure limiting ring 5, the airflow enters the pressure limiting ring 5 in a fast manner with multiple small flows, and the kinetic energy carried by the airflow is continuously reduced until it disappears, and then merges with the airflow inside the pressure limiting ring 5, so that the mixed gas inside the pressure limiting ring 5 exists in a low-dynamic form, so as to facilitate the natural sedimentation of carbon atoms inside the mixed gas. At the same time, the gathering point of the airflow leaving the air guide hole 601 coincides with the center of the placement point of the seed crystal on the carrier 4, so that the content of naturally settled carbon atoms at the center is greater than the sedimentation content of carbon atoms in the edge area on the carrier 4;
由于聚气环6与上方的分流环201相连接，分流环201带动聚气环6同步旋转，导气孔601与混合管2的内壁相互配合构成气流通道，使得导气孔601的最下端与混合管2的内壁产生相对运动，进而对沉降在混合管2内部下方的石墨层进行清理，同时产生的石墨粉碎跟随气流离开导气孔601；Since the gas gathering ring 6 is connected to the flow dividing ring 201 above, the flow dividing ring 201 drives the gas gathering ring 6 to rotate synchronously, and the gas guide hole 601 and the inner wall of the mixing tube 2 cooperate with each other to form an air flow channel, so that the lower end of the gas guide hole 601 and the inner wall of the mixing tube 2 produce relative movement, thereby cleaning the graphite layer settled at the bottom of the mixing tube 2, and the graphite crushed by the generated graphite follows the air flow to leave the gas guide hole 601;
驱动电机通过齿轮和齿槽带动引导片501进行运动，其中引导片501的下端表面与承载台4的上端表面相互贴合，引导片501在驱动电机的带动下进行旋转，引导片501相对承载台4工作期间，对沉降在承载台4上的石墨层进行清理，同时在离心的作用下石墨粉末向四周运动，随后石墨粉末跟随气流通过管道和气泵再次进入混合管2内部的电离区域；The driving motor drives the guide piece 501 to move through the gears and tooth grooves, wherein the lower end surface of the guide piece 501 is in contact with the upper end surface of the carrier 4, and the guide piece 501 rotates under the drive of the driving motor. During the working period of the guide piece 501 relative to the carrier 4, the graphite layer settled on the carrier 4 is cleaned, and at the same time, the graphite powder moves around under the action of centrifugation, and then the graphite powder follows the airflow through the pipeline and the air pump to enter the ionization area inside the mixing tube 2 again;
位于籽晶上方的引导片501上倾斜角度与位于籽晶上下方的引导片501上倾斜角度不同，其中位于籽晶上方的引导片501旋转状态下主要对限压环5内的气流进行作用，将限压环5内壁附近的混合气体向中心区域进行推动，即将混合气体向籽晶的中部上方进行推动，位于籽晶下方的引导片501旋转状态下主要对附着在承载台4上的石墨层进行粉碎导向，让粉碎后的石墨再次进入混合管2内部的电离区域，然后与氢离子发生接触，让石墨再次回到碳原子的状态，以保证混合气体所提供的碳源主要沉降在籽晶上，同时维持混合气体的碳原子浓度；The inclination angle of the guide piece 501 located above the seed crystal is different from the inclination angle of the guide piece 501 located above and below the seed crystal. The guide piece 501 located above the seed crystal mainly acts on the airflow in the pressure limiting ring 5 in a rotating state, and pushes the mixed gas near the inner wall of the pressure limiting ring 5 toward the central area, that is, pushes the mixed gas toward the middle and upper part of the seed crystal. The guide piece 501 located below the seed crystal mainly guides the graphite layer attached to the supporting platform 4 in a rotating state, so that the crushed graphite enters the ionization area inside the mixing tube 2 again, and then contacts with the hydrogen ions, so that the graphite returns to the state of carbon atoms again, so as to ensure that the carbon source provided by the mixed gas is mainly deposited on the seed crystal, while maintaining the carbon atom concentration of the mixed gas;
由于偏心环7相对限压环5呈偏心设置，同时引导片501的一端与偏心环7相连接，引导片501贯穿连接环502，故每片引导片501深入至限压环5内长度不同，伸入长度最短的引导片501末端位于连接环502内，伸入长度最长的引导片501末端位于靠近籽晶放置的区域，引导片501相对连接环502滑动过程中，连接环502对附着在引导片501石墨层进行清理；Since the eccentric ring 7 is eccentrically arranged relative to the pressure-limiting ring 5, and one end of the guide sheet 501 is connected to the eccentric ring 7, and the guide sheet 501 penetrates the connecting ring 502, each guide sheet 501 penetrates into the pressure-limiting ring 5 to a different length, and the end of the guide sheet 501 with the shortest insertion length is located in the connecting ring 502, and the end of the guide sheet 501 with the longest insertion length is located near the area where the seed crystal is placed. During the sliding process of the guide sheet 501 relative to the connecting ring 502, the connecting ring 502 cleans the graphite layer attached to the guide sheet 501;
由于偏心环7与连接环502的中轴线为圆心进行旋转，偏心环7与引导片501之间存在阻尼，引导片501的旋转期间，通过引导片501和偏心环7之间阻尼效果带动偏心环7进行旋转，实现偏心环7以连接环502为圆心进行旋转，同时引导片501旋转角速度大于偏心环7旋转角速度，实现在不同的时间段内，深入连接环502内最长的引导片501所处的区域同步发生变化，进而实现对承载台4上端表面进行清理，以及配合位于籽晶上方的引导片501，通过带动气流将碳原子向籽晶的正上方推动。Since the eccentric ring 7 rotates with the central axis of the connecting ring 502 as the center, there is damping between the eccentric ring 7 and the guide piece 501. During the rotation of the guide piece 501, the eccentric ring 7 is driven to rotate by the damping effect between the guide piece 501 and the eccentric ring 7, so that the eccentric ring 7 rotates with the connecting ring 502 as the center. At the same time, the rotation angular velocity of the guide piece 501 is greater than the rotation angular velocity of the eccentric ring 7, so that in different time periods, the area where the longest guide piece 501 deep in the connecting ring 502 is located changes synchronously, thereby realizing the cleaning of the upper end surface of the support platform 4, and cooperating with the guide piece 501 located above the seed crystal, the carbon atoms are pushed to the top of the seed crystal by driving the airflow.
需要说明的是，在本文中，诸如第一和第二等之类的关系术语仅仅用来将一个实体或者操作与另一个实体或操作区分开来，而不一定要求或者暗示这些实体或操作之间存在任何这种实际的关系或者顺序。而且，术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含，从而使得包括一系列要素的过程、方法、物品或者设备不仅包括那些要素，而且还包括没有明确列出的其他要素，或者是还包括为这种过程、方法、物品或者设备所固有的要素。It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.
最后应说明的是：以上所述仅为本发明的优选实施例而已，并不用于限制本发明，尽管参照前述实施例对本发明进行了详细的说明，对于本领域的技术人员来说，其依然可以对前述各实施例所记载的技术方案进行修改，或者对其中部分技术特征进行等同替换。凡在本发明的精神和原则之内，所作的任何修改、等同替换、改进等，均应包含在本发明的保护范围之内。Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.
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| CN202311604966.1ACN117778999B (en) | 2023-11-28 | 2023-11-28 | Mpcvd diamond growth equipment with temperature regulating mechanism |
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