技术领域Technical field
本发明涉及高精度光学检测设备领域，尤其是涉及一种零件表面瑕疵三维荧光检测装置及方法。The invention relates to the field of high-precision optical detection equipment, and in particular to a three-dimensional fluorescence detection device and method for surface defects of parts.
背景技术Background technique
零件划痕、损伤、裂缝的快速高精度检测可保证零件在使用过程中的安全性和可靠性，在航空航天、汽车制造、核工业及轨道交通等行业中具有重要的应用价值。传统检测通常是通过人工目视的方法，在不同光照的情况下根据经验进行检查。然而，随着生产任务的逐步加重，人工检测效率低下的缺点日益凸显，且人工检测易受人工视觉疲劳的影响，导致检测结果出现偏差，使产品质量存在严重的检测风险。随着计算机图像处理能力的不断提高，机器视觉检测的方法被逐渐应用在零件划痕、损伤、裂缝检测的检测中。机器视觉方法通过光源照明被测零件，再利用成像镜头和相机对物体进行图像信息的采集并传输至电脑，通过算法和程序对零件表面的划痕、损伤和裂缝信息进行处理和识别。然而，该方法存在以下两个重要问题：(1)由于高分辨成像光学系统存在景深受限的问题，针对具有立体三维起伏的物体，该无法对其三维表面上各个高度下的划痕、损伤和裂缝都实现高分辨成像；(2)某些损伤非常轻微，常规的照明和成像技术无法高灵敏度获取零件表面的划痕、损伤和裂缝信息，导致经常地漏判。Rapid and high-precision detection of scratches, damage, and cracks on parts can ensure the safety and reliability of parts during use, and has important application value in aerospace, automobile manufacturing, nuclear industry, rail transportation and other industries. Traditional inspection is usually carried out through manual visual inspection based on experience under different lighting conditions. However, as production tasks gradually increase, the shortcomings of low manual inspection efficiency have become increasingly prominent, and manual inspection is easily affected by manual visual fatigue, resulting in deviations in inspection results and serious inspection risks to product quality. With the continuous improvement of computer image processing capabilities, machine vision inspection methods are gradually used in the detection of scratches, damage, and cracks on parts. The machine vision method illuminates the tested part with a light source, then uses imaging lenses and cameras to collect image information of the object and transmit it to the computer. The scratches, damage and crack information on the surface of the part are processed and identified through algorithms and programs. However, this method has the following two important problems: (1) Due to the limited depth of field of the high-resolution imaging optical system, it is impossible to detect scratches and damage at various heights on the three-dimensional surface of objects with three-dimensional undulations. High-resolution imaging can be achieved for both parts and cracks; (2) Some damages are very slight, and conventional lighting and imaging technologies cannot obtain information on scratches, damage and cracks on the surface of parts with high sensitivity, resulting in frequent missed judgments.
因此，如何快速高精度检测三维零件表面的划痕、损伤和裂缝，对这些缺陷的宽度、长度和深度等几何量实现高效的数字化表征分析，保障缺陷形貌的真实还原以及检查追溯，目前依旧是困扰高精密零件加工和检测领域的难题，亟待解决。Therefore, how to quickly and accurately detect scratches, damage and cracks on the surface of three-dimensional parts, achieve efficient digital characterization analysis of the width, length and depth of these defects, and ensure the true restoration of the defect morphology and inspection and traceability, is still a problem. It is a problem that plagues the field of high-precision parts processing and testing and needs to be solved urgently.
发明内容Contents of the invention
本发明的目的就是为了克服上述现有技术存在的缺陷而提供一种快速高精度检测三维零件表面的划痕、损伤和裂缝，对这些缺陷的宽度、长度和深度等几何量实现高效的数字化表征分析，保障缺陷形貌的真实还原以及检查追溯的零件表面瑕疵三维荧光检测装置及方法。The purpose of the present invention is to overcome the above-mentioned shortcomings of the prior art and provide a method for fast and high-precision detection of scratches, damage and cracks on the surface of three-dimensional parts, and to achieve efficient digital characterization of geometric quantities such as width, length and depth of these defects. Analysis, three-dimensional fluorescence detection device and method for surface defects of parts to ensure the true restoration of defect morphology and inspection and traceability.
本发明的目的可以通过以下技术方案来实现：The object of the present invention can be achieved through the following technical solutions:
一种零件表面瑕疵三维荧光检测装置，包括一体化底座、图像传感器、筒镜、本征光滤除结构、白光照明光源、荧光激发光源、物镜和物镜平移台，所述图像传感器、筒镜、本征光滤除结构和物镜平移台均安装在一体化底座上；A three-dimensional fluorescence detection device for surface defects of parts, including an integrated base, an image sensor, a tube lens, an intrinsic light filtering structure, a white light illumination source, a fluorescence excitation light source, an objective lens and an objective lens translation stage. The image sensor, tube lens, The intrinsic light filtering structure and objective lens translation stage are installed on the integrated base;
所述图像传感器、筒镜、本征光滤除结构和物镜位于同一光轴方向上；The image sensor, tube lens, intrinsic light filtering structure and objective lens are located in the same optical axis direction;
所述物镜安装在物镜平移台上，并正对被测荧光零件表面，所述物镜平移台可滑动连接一体化底座，且滑动方向为物镜内的光轴方向；The objective lens is installed on the objective lens translation stage and faces the surface of the fluorescent part under test. The objective lens translation stage can be slidably connected to the integrated base, and the sliding direction is the direction of the optical axis within the objective lens;
所述荧光激发光源用于激发荧光信号，并照射到被测荧光零件表面；The fluorescence excitation light source is used to excite fluorescence signals and illuminate the surface of the fluorescent part under test;
所述白光照明光源用于输出白光信号，并照射到被测荧光零件表面。The white light illumination source is used to output a white light signal and illuminate the surface of the fluorescent part under test.
进一步地，所述本征光滤除结构为二向色镜，该二向色镜位于筒镜和物镜之间；所述荧光激发光源为同轴荧光激发光源，与所述二向色镜一侧输入端同轴设置；所述同轴荧光激发光源激发的荧光信号经二向色镜反射后，通过物镜照射至被测荧光零件表面。Further, the intrinsic light filtering structure is a dichroic mirror, which is located between the tube lens and the objective lens; the fluorescence excitation light source is a coaxial fluorescence excitation light source, which is the same as the dichroic mirror. The side input end is coaxially arranged; the fluorescence signal excited by the coaxial fluorescence excitation light source is reflected by the dichroic mirror and then illuminated to the surface of the fluorescent part under test through the objective lens.
进一步地，所述零件表面瑕疵三维荧光检测装置还包括分光镜，所述白光照明光源为同轴白光照明光源，所述同轴白光照明光源与所述分光镜的一侧输入端同轴设置，所述分光镜位于二向色镜和同轴荧光激发光源之间，所述同轴白光照明光源发出的白光信号经过分光镜反射后，经过二向色镜、并通过物镜照射至被测荧光零件表面。Further, the three-dimensional fluorescence detection device for surface defects of parts also includes a spectroscope, and the white light illumination source is a coaxial white light illumination light source. The coaxial white light illumination source is coaxially arranged with one input end of the spectroscope. The spectroscope is located between the dichroic mirror and the coaxial fluorescence excitation light source. After the white light signal emitted by the coaxial white light illumination source is reflected by the spectroscope, it passes through the dichroic mirror and is irradiated to the fluorescent part under test through the objective lens. surface.
进一步地，所述荧光激发光源为环形荧光激发光源，该环形荧光激发光源为环形结构，安装在物镜的外边缘。Further, the fluorescence excitation light source is an annular fluorescence excitation light source. The annular fluorescence excitation light source is an annular structure and is installed on the outer edge of the objective lens.
进一步地，所述本征光滤除结构为二向色镜或滤光片，所述二向色镜位于筒镜和物镜之间，所述滤光片位于图像传感器和筒镜之间。Further, the intrinsic light filtering structure is a dichroic mirror or a filter, the dichroic mirror is located between the tube lens and the objective lens, and the filter is located between the image sensor and the tube lens.
进一步地，所述零件表面瑕疵三维荧光检测装置还包括环形白光照明光源，该环形白光照明光源为环形结构，所述环形白光照明光源安装在物镜的外边缘。Further, the three-dimensional fluorescence detection device for surface defects of parts also includes an annular white light illumination source, which is an annular structure, and the annular white light illumination source is installed on the outer edge of the objective lens.
本发明还提供一种采用如上所述的一种零件表面瑕疵三维荧光检测装置的检测方法，包括以下步骤：The present invention also provides a detection method using a three-dimensional fluorescence detection device for surface defects of parts as described above, which includes the following steps:
通过物镜平移台带动物镜移动，当物镜移动到某一位置时，打开白光照明光源，照射到被测荧光零件表面，被测荧光零件表面的纹理信息被反射进入物镜后，再经过筒镜，被图像传感器捕获；物镜位置保持不动，关闭白光照明光源，打开荧光激发光源并照射到被测荧光零件表面，被测荧光零件表面的荧光物质被激发后发射荧光，该荧光进入物镜后透过本征光滤除结构滤除本征光，再经过筒镜，被图像传感器捕获；The objective translation stage drives the objective lens to move. When the objective lens moves to a certain position, the white light illumination source is turned on and illuminates the surface of the fluorescent part under test. The texture information on the surface of the fluorescent part under test is reflected into the objective lens and then passes through the tube lens. Captured by the image sensor; the position of the objective lens remains fixed, the white light illumination source is turned off, the fluorescence excitation light source is turned on and illuminated on the surface of the fluorescent part under test. The fluorescent material on the surface of the fluorescent part under test is excited and emits fluorescence. The fluorescence enters the objective lens and passes through the object. The eigenlight filtering structure filters out the eigenlight, and then passes through the tube lens and is captured by the image sensor;
通过物镜平移台带动物镜沿光轴方向移动，每隔预设的扫描距离，对被测荧光零件表面附着的荧光物质的各层高度台阶进行扫描，进而改变图像传感器感光面所对应的物平面，记录下各层高度台阶的物平面所对应的白光纹理图像和荧光图像；The objective translation stage drives the objective lens to move along the optical axis. Every preset scanning distance, the height steps of each layer of fluorescent material attached to the surface of the fluorescent part under test are scanned, thereby changing the object plane corresponding to the photosensitive surface of the image sensor. Record the white light texture image and fluorescence image corresponding to the object plane of each height step;
对获得的各层高度台阶的白光纹理图像进行三维融合，得到被测荧光零件的表面纹理信息和白光深度图，根据白光深度图中各数据点的坐标对相应坐标位置处的荧光图像进行遍历，对遍历得到的荧光信息进行三维融合处理后，得到荧光深度图，从而检测被测荧光零件表面的瑕疵。Perform three-dimensional fusion of the obtained white light texture images of each height step to obtain the surface texture information and white light depth map of the fluorescent part under test. According to the coordinates of each data point in the white light depth map, the fluorescence image at the corresponding coordinate position is traversed. After three-dimensional fusion processing of the fluorescence information obtained through the traversal, a fluorescence depth map is obtained to detect defects on the surface of the fluorescent parts under test.
进一步地，所述方法还包括：Further, the method also includes:
对各层白光纹理图像进行图像特征处理，所述图像特征处理的过程包括：Image feature processing is performed on each layer of white light texture images. The image feature processing process includes:
通过特征空间变换函数对荧光图像进行特征分解，得到包含不同频率分量的多个子图像；Perform feature decomposition on the fluorescence image through the feature space transformation function to obtain multiple sub-images containing different frequency components;
通过显著度评价函数对得到的各个子图像进行评价，根据评价结果构建融合权重图；Evaluate each obtained sub-image through the saliency evaluation function, and construct a fusion weight map based on the evaluation results;
通过滤波函数，根据融合权重图中各权重值的相关程度和位置毗邻情况，对权重值进行交叉优化，以提升融合权重图的整体信噪比和各子区域的信噪比；Through the filter function, the weight values are cross-optimized according to the correlation degree and position adjacency of each weight value in the fusion weight map to improve the overall signal-to-noise ratio of the fusion weight map and the signal-to-noise ratio of each sub-region;
采用优化后的融合权重图对白光纹理图像分解后的各个子图像进行加权融合，得到优化后的特征图像。The optimized fusion weight map is used to perform weighted fusion of each sub-image after the decomposition of the white light texture image, and the optimized feature image is obtained.
进一步地，所述对各层高度台阶的物平面所对应的白光纹理图像进行三维融合处理的过程具体为：Further, the process of performing three-dimensional fusion processing on the white light texture images corresponding to the object planes of each height step is specifically as follows:
采用显著度评价函数，对采集的白光纹理图像序列所构成的图像立方体，进行显著度评价，得到初始显著度评价立方体；The saliency evaluation function is used to evaluate the saliency of the image cube composed of the collected white light texture image sequence, and the initial saliency evaluation cube is obtained;
采用特征图像对为初始显著度评价立方体提供颜色、形状、距离上的先验知识，并应用边缘保持的引导式滤波方法，对初始显著度评价立方体进行优化，得到修正显著度评价立方体；Feature image pairs are used to provide prior knowledge of color, shape, and distance for the initial saliency evaluation cube, and the edge-preserving guided filtering method is applied to optimize the initial saliency evaluation cube to obtain a modified saliency evaluation cube;
对修正显著度评价立方体中的每个像素，分别从该像素在荧光图像序列中提取显著度评价形成集合，构建显著度评价曲线；对该显著度评价曲线进行拟合，并标记最大显著度值对应的位置；将标记的位置作为图像立方体在沿光轴方向上的深度，从而形成初始深度图；For each pixel in the corrected saliency evaluation cube, extract the saliency evaluation from the pixel in the fluorescence image sequence to form a set and construct a saliency evaluation curve; fit the saliency evaluation curve and mark the maximum significance value Corresponding position; use the marked position as the depth of the image cube along the optical axis to form an initial depth map;
根据修正显著度评价立方体的显著度评价值及其与初始深度图的相关性，构建初始深度图置信度信息，并编码为二值蒙版；以特征图像作为特征图，根据二值蒙版指定待处理区域，对初始深度图进行加权中值滤波处理，从而区分并处理强特征区域与弱特征区域，得到最终修正的深度图；Based on the saliency evaluation value of the modified saliency evaluation cube and its correlation with the initial depth map, the initial depth map confidence information is constructed and encoded into a binary mask; the feature image is used as the feature map and specified according to the binary mask In the area to be processed, weighted median filtering is performed on the initial depth map to distinguish and process strong feature areas and weak feature areas to obtain the final corrected depth map;
对荧光深度图数据和白光深度图数据分别构建荧光高斯金字塔和白光高斯金字塔；Construct a fluorescence Gaussian pyramid and a white light Gaussian pyramid for the fluorescence depth map data and the white light depth map data respectively;
基于荧光高斯金字塔和白光高斯金字塔分别构建荧光拉普拉斯金字塔和白光拉普拉斯金字塔；Based on the fluorescent Gaussian pyramid and the white-light Gaussian pyramid, the fluorescent Laplacian pyramid and the white-light Laplacian pyramid are constructed respectively;
定义蒙版图，同时对蒙版图也构建相应的高斯金字塔；Define the mask map and construct the corresponding Gaussian pyramid for the mask map;
使用蒙版图的高斯金字塔的相应层对荧光拉普拉斯金字塔和白光拉普拉斯金字塔进行加权融合，得到融合后的深度图，并采样和滤波处理，得到最终的融合深度图，该最终的融合深度图的计算表达式为：Use the corresponding layer of the Gaussian pyramid of the mask map to perform weighted fusion of the fluorescent Laplacian pyramid and the white light Laplacian pyramid to obtain the fused depth map, and perform sampling and filtering processing to obtain the final fused depth map. The final The calculation expression of the fused depth map is:
式中，Dc为最终的融合深度图，n是层数，为融合后的深度图的第i层，/>为蒙版图的高斯金字塔的第i层，/>为荧光拉普拉斯金字塔的第i层，/>为白光拉普拉斯金字塔的第i层。In the formula, Dc is the final fusion depth map, n is the number of layers, is the i-th layer of the fused depth map,/> is the i-th layer of the Gaussian pyramid of the mask image,/> is the i-th layer of the fluorescent Laplacian pyramid,/> is the i-th layer of the Laplacian pyramid of white light.
与现有技术相比，本发明具有以下优点：Compared with the prior art, the present invention has the following advantages:
(1)本发明提出的零件表面瑕疵三维荧光检测装置和方法结合了荧光检测和三维检测的技术优势，通过移动物镜平移台逐层改变成像位置，分别提取被测零件的白光纹理图像和荧光图像，通过三维融合处理得到被测荧光零件的表面纹理信息和白光深度图，以白光深度图中数据点的坐标位置信息为基础对稀疏的荧光图像进行重构和三维融合，获取三维的荧光检测图像，实现零件表面的瑕疵检测，能有效实现三维起伏物体的各个高度下的划痕、损伤和裂缝的高分辨成像，可有效解决传统人工目检中存在的效率低下和易出现偏差的问题。(1) The device and method for three-dimensional fluorescence detection of surface defects of parts proposed by the present invention combine the technical advantages of fluorescence detection and three-dimensional detection. By moving the objective lens translation stage, the imaging position is changed layer by layer, and the white light texture image and fluorescence image of the tested part are respectively extracted. , obtain the surface texture information and white light depth map of the fluorescent part under test through three-dimensional fusion processing. Based on the coordinate position information of the data points in the white light depth map, the sparse fluorescence image is reconstructed and three-dimensionally fused to obtain a three-dimensional fluorescence detection image. , realizes defect detection on the surface of parts, can effectively achieve high-resolution imaging of scratches, damage and cracks at various heights of three-dimensional undulating objects, and can effectively solve the problems of low efficiency and prone to deviations in traditional manual visual inspection.
(2)本发明提出的零件表面瑕疵三维荧光检测装置采用一体化底座连接，结构简单，体积小巧，使其能够在一些空间受限的环境中进行检测工作，适用性强。(2) The three-dimensional fluorescence detection device for surface defects of parts proposed by the present invention adopts an integrated base connection, has a simple structure and is compact in size, allowing it to perform detection work in some space-limited environments and has strong applicability.
(3)本发明构建了一个成像位置可以逐层改变的光学系统，将不同成像位置下的荧光图像信息采集后对其进行图像融合，解决了高分辨成像光学系统存在景深受限的问题。(3) The present invention constructs an optical system in which the imaging position can be changed layer by layer. The fluorescence image information at different imaging positions is collected and then image fused, thereby solving the problem of limited depth of field in high-resolution imaging optical systems.
(4)本发明提出的白光纹理图像和荧光图像的同步检测以及三维融合技术，可实现对待测物体的缺陷的全面检测并准确获取缺陷区域的相对位置。(4) The synchronous detection of white light texture images and fluorescence images and the three-dimensional fusion technology proposed by the present invention can achieve comprehensive detection of defects in the object to be tested and accurately obtain the relative position of the defect area.
附图说明Description of the drawings
图1为本发明实施例中提供的一种零件表面瑕疵三维荧光检测装置的结构示意图；Figure 1 is a schematic structural diagram of a three-dimensional fluorescence detection device for surface defects of parts provided in an embodiment of the present invention;
图2为本发明实施例中提供的一种零件表面瑕疵三维荧光检测装置的光路示意图；Figure 2 is a schematic optical path diagram of a three-dimensional fluorescence detection device for surface defects of parts provided in an embodiment of the present invention;
图3为本发明实施例中提供的一种零件表面瑕疵三维荧光检测装置中加入环形光源的光路示意图；Figure 3 is a schematic diagram of the optical path of a ring light source added to a three-dimensional fluorescence detection device for surface defects of parts provided in an embodiment of the present invention;
图4为本发明实施例中提供的一种零件表面瑕疵三维荧光检测装置中取消同轴光源，加入环形光源的光路示意图；Figure 4 is a schematic diagram of the optical path in which a coaxial light source is eliminated and a ring light source is added to a three-dimensional fluorescence detection device for surface defects of parts provided in an embodiment of the present invention;
图5为本发明实施例中提供的一种零件表面瑕疵三维荧光检测装置中取消同轴光源和二向色镜，加入环形光源和滤光片的光路示意图；Figure 5 is a schematic diagram of the optical path in which a coaxial light source and a dichroic mirror are eliminated and an annular light source and a filter are added to a three-dimensional fluorescence detection device for surface defects of parts provided in an embodiment of the present invention;
图6为本发明实施例中提供的一种白光纹理图像示意图；Figure 6 is a schematic diagram of a white light texture image provided in an embodiment of the present invention;
图7为本发明实施例中提供的一种荧光图像示意图；Figure 7 is a schematic diagram of a fluorescence image provided in an embodiment of the present invention;
图8为本发明实施例中提供的一种三维融合结果示意图；FIG8 is a schematic diagram of a three-dimensional fusion result provided in an embodiment of the present invention;
图中，1、一体化底座，2、图像传感器，3、筒镜，4、同轴荧光激发光源，5、二向色镜，6、物镜平移台，7、物镜，8、分光镜，9、同轴白光照明光源，10、环形荧光激发光源，11、滤光片，12、环形白光照明光源。In the figure, 1. Integrated base, 2. Image sensor, 3. Tube lens, 4. Coaxial fluorescence excitation light source, 5. Dichroic mirror, 6. Objective translation stage, 7. Objective lens, 8. Spectroscope, 9 , coaxial white light illumination source, 10. annular fluorescence excitation light source, 11. filter, 12. annular white light illumination source.
具体实施方式Detailed ways
为使本发明实施例的目的、技术方案和优点更加清楚，下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例是本发明一部分实施例，而不是全部的实施例。通常在此处附图中描述和示出的本发明实施例的组件可以以各种不同的配置来布置和设计。In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments These are some embodiments of the present invention, rather than all embodiments. The components of the embodiments of the invention generally described and illustrated in the figures herein may be arranged and designed in a variety of different configurations.
因此，以下对在附图中提供的本发明的实施例的详细描述并非旨在限制要求保护的本发明的范围，而是仅仅表示本发明的选定实施例。基于本发明中的实施例，本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。Therefore, the following detailed description of the embodiments of the invention provided in the appended drawings is not intended to limit the scope of the claimed invention, but rather to represent selected embodiments of the invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts fall within the scope of protection of the present invention.
应注意到：相似的标号和字母在下面的附图中表示类似项，因此，一旦某一项在一个附图中被定义，则在随后的附图中不需要对其进行进一步定义和解释。It should be noted that similar reference numerals and letters represent similar items in the following figures, therefore, once an item is defined in one figure, it does not need further definition and explanation in subsequent figures.
在本发明的描述中，需要说明的是，术语“中心”、“上”、“下”、“左”、“右”、“竖直”、“水平”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系，或者是该发明产品使用时惯常摆放的方位或位置关系，仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本发明的限制。In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the invention is customarily placed when used. It is only for the convenience of describing the invention and simplifying the description, and is not intended to indicate or imply. The devices or elements referred to must have a specific orientation, be constructed and operate in a specific orientation and therefore are not to be construed as limitations of the invention.
需要说明的是，术语“第一”、“第二”仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个该特征。在本申请的描述中，“多个”的含义是两个或两个以上，除非另有明确具体的限定。It should be noted that the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.
此外，术语“水平”、“竖直”等术语并不表示要求部件绝对水平或悬垂，而是可以稍微倾斜。如“水平”仅仅是指其方向相对“竖直”而言更加水平，并不是表示该结构一定要完全水平，而是可以稍微倾斜。In addition, the terms "horizontal", "vertical", etc. do not mean that the component is required to be absolutely horizontal or suspended, but may be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical". It does not mean that the structure must be completely horizontal, but can be slightly tilted.
实施例1Example 1
如图1所示，本实施例提供一种零件表面瑕疵三维荧光检测装置，包括一体化底座1、图像传感器2、筒镜3、本征光滤除结构、白光照明光源、荧光激发光源、物镜7和物镜平移台6，图像传感器2、筒镜3、本征光滤除结构和物镜平移台6均安装在一体化底座1上；As shown in Figure 1, this embodiment provides a three-dimensional fluorescence detection device for surface defects of parts, including an integrated base 1, an image sensor 2, a tube lens 3, an intrinsic light filtering structure, a white light illumination source, a fluorescence excitation light source, and an objective lens. 7 and objective lens translation stage 6, image sensor 2, tube lens 3, intrinsic light filtering structure and objective lens translation stage 6 are all installed on the integrated base 1;
图像传感器2、筒镜3、本征光滤除结构和物镜7位于同一光轴方向上；The image sensor 2, tube lens 3, intrinsic light filtering structure and objective lens 7 are located in the same optical axis direction;
物镜7安装在物镜平移台6上，并正对被测荧光零件表面，物镜平移台6可滑动连接一体化底座1，且滑动方向为物镜7内的光轴方向；The objective lens 7 is installed on the objective lens translation stage 6 and faces the surface of the fluorescent part under test. The objective lens translation stage 6 can be slidably connected to the integrated base 1, and the sliding direction is the direction of the optical axis within the objective lens 7;
白光照明光源通过发射白光并照射到三维零件表面，从而获取被测荧光零件表明的纹理信息。The white light illumination source emits white light and illuminates the surface of the three-dimensional part to obtain the texture information displayed by the fluorescent part under test.
荧光激发光源用于发射本征光至被测荧光零件表面，从而激发荧光信号；The fluorescence excitation light source is used to emit intrinsic light to the surface of the fluorescent part under test, thereby stimulating the fluorescence signal;
本征光滤除结构用于滤除荧光激发光源发出的本征光，而将波长大于本征光的荧光透过。本征光滤除结构可以为二向色镜5或滤光片11，二向色镜5位于筒镜3和物镜7之间，滤光片11位于图像传感器2和筒镜3之间。The intrinsic light filtering structure is used to filter out the intrinsic light emitted by the fluorescence excitation light source, and transmit the fluorescence with a wavelength larger than the intrinsic light. The intrinsic light filtering structure may be a dichroic mirror 5 or a filter 11 . The dichroic mirror 5 is located between the tube lens 3 and the objective lens 7 . The filter 11 is located between the image sensor 2 and the tube lens 3 .
荧光激发光源可以为同轴荧光激发光源4或环形荧光激发光源10，环形荧光激发光源10为环形结构，安装在物镜7的外边缘。The fluorescence excitation light source can be a coaxial fluorescence excitation light source 4 or an annular fluorescence excitation light source 10 . The annular fluorescence excitation light source 10 has an annular structure and is installed on the outer edge of the objective lens 7 .
优选的，上述零件表面瑕疵三维荧光检测装置还可设置环形白光照明光源12，该环形白光照明光源12为环形结构，环形白光照明光源12安装在物镜7的外边缘，用于待测被测荧光零件表面的表面纹理图像。Preferably, the above-mentioned three-dimensional fluorescence detection device for surface defects of parts can also be equipped with an annular white light illumination light source 12. The annular white light illumination light source 12 is an annular structure. The annular white light illumination light source 12 is installed on the outer edge of the objective lens 7 for fluorescence to be measured. Surface texture image of the part surface.
需要注意的是，上述方法所提及的被测荧光零件为经过预处理，即将待测零件在荧光液中浸没后取出，荧光液将残留在表面的瑕疵区域，实现缺陷标记，从而得到的被测荧光零件。It should be noted that the fluorescent parts to be tested mentioned in the above method have been pre-processed, that is, the parts to be tested are immersed in fluorescent liquid and then taken out. The fluorescent liquid will remain in the defective area on the surface to achieve defect marking, thereby obtaining the measured parts. Measure fluorescent parts.
如图1和图2所示，本实施例中，本征光滤除结构为二向色镜5，该二向色镜5位于筒镜3和物镜7之间；荧光激发光源为同轴荧光激发光源4，与二向色镜5一侧输入端同轴设置；同轴荧光激发光源4激发的荧光信号经二向色镜5反射后，通过物镜7照射至被测荧光零件表面；被测荧光零件表面的荧光物质被激发后发射荧光，该荧光进入物镜后透过二向色镜，再经过筒镜，最终被图像传感器捕获。As shown in Figures 1 and 2, in this embodiment, the intrinsic light filtering structure is a dichroic mirror 5, which is located between the tube lens 3 and the objective lens 7; the fluorescence excitation light source is coaxial fluorescence The excitation light source 4 is coaxially arranged with the input end on one side of the dichroic mirror 5; the fluorescence signal excited by the coaxial fluorescence excitation light source 4 is reflected by the dichroic mirror 5 and then illuminated to the surface of the fluorescent part under test through the objective lens 7; The fluorescent material on the surface of the fluorescent part is excited and emits fluorescence. The fluorescence enters the objective lens, passes through the dichroic mirror, then passes through the tube lens, and is finally captured by the image sensor.
采用上述零件表面瑕疵三维荧光检测装置的检测方法，包括以下步骤：The detection method using the above-mentioned three-dimensional fluorescence detection device for surface defects on parts includes the following steps:
S1：通过物镜平移台6带动物镜7移动，当物镜7移动到某一位置时，打开白光照明光源，照射到被测荧光零件表面，被测荧光零件表面的纹理信息被反射进入物镜7后，再经过筒镜3，被图像传感器2捕获；物镜7位置保持不动，关闭白光照明光源，打开荧光激发光源，激发出荧光信号，并照射到被测荧光零件表面，被测荧光零件表面的荧光物质被激发后发射荧光，该荧光进入物镜7后透过本征光滤除结构滤除本征光，再经过筒镜3，被图像传感器2捕获；S1: The objective lens 7 is driven by the objective lens translation stage 6. When the objective lens 7 moves to a certain position, the white light illumination source is turned on and illuminates the surface of the fluorescent part under test. The texture information on the surface of the fluorescent part under test is reflected into the objective lens 7. Then it passes through the tube lens 3 and is captured by the image sensor 2; the objective lens 7 remains stationary, turns off the white light illumination source, turns on the fluorescence excitation light source, excites the fluorescence signal, and illuminates the surface of the fluorescent part under test. The fluorescence on the surface of the fluorescent part under test is The substance emits fluorescence after being excited. The fluorescence enters the objective lens 7 and filters out the intrinsic light through the intrinsic light filtering structure. It then passes through the tube lens 3 and is captured by the image sensor 2;
S2：通过物镜平移台6带动物镜7沿光轴方向移动，每隔预设的扫描距离，对被测荧光零件表面附着的荧光物质的各层高度台阶进行扫描，进而改变图像传感器2感光面所对应的物平面，记录下各层高度台阶的物平面所对应的白光纹理图像和荧光图像，如图6和图7所示；S2: Use the objective lens translation stage 6 to drive the objective lens 7 to move along the optical axis direction, and scan the height steps of each layer of fluorescent material attached to the surface of the fluorescent part under test at preset scanning distances, thereby changing the position of the photosensitive surface of the image sensor 2 For the corresponding object plane, record the white light texture image and fluorescence image corresponding to the object plane of each height step, as shown in Figures 6 and 7;
S3：对获得的各层高度台阶的白光纹理图像进行三维融合，得到被测荧光零件的表面纹理信息和白光深度图，根据白光深度图中各数据点的坐标对相应坐标位置处的荧光图像进行遍历，对遍历得到的荧光信息进行三维融合处理后，得到荧光深度图，从而检测被测荧光零件表面的瑕疵。S3: Perform three-dimensional fusion of the obtained white light texture images of each height step to obtain the surface texture information and white light depth map of the fluorescent part under test. According to the coordinates of each data point in the white light depth map, the fluorescence image at the corresponding coordinate position is processed. After traversal, the fluorescence information obtained through the traversal is subjected to three-dimensional fusion processing to obtain a fluorescence depth map, thereby detecting defects on the surface of the fluorescent part under test.
具体地，在步骤S2中，对于零件表面瑕疵三维荧光检测装置在各层高度台阶记录的图像数据，需要进行图像特征处理，处理方法如下：Specifically, in step S2, image feature processing needs to be performed on the image data recorded at each height step by the three-dimensional fluorescence detection device for surface defects of the part. The processing method is as follows:
S21：通过特征空间变换函数对白光纹理图像进行特征分解，得到包含不同频率分量的多个子图像，具体为：S21: Perform feature decomposition on the white light texture image through the feature space transformation function to obtain multiple sub-images containing different frequency components, specifically:
设图像的尺寸为H×W，通过特征空间变换函数ftrans(·)，对图像进行特征分解。对物镜等间隔扫描得到的原始图像序列中的每一张图In，其中进行多尺度分解，分解为分别包含不同频率分量的子图像/>其中n＝1,2,...,N为图像序号，c∈[2,C]为分量标号，C为分解层次。Assume the size of the image is H×W, and perform feature decomposition on the image through the feature space transformation function ftrans (·). Each picture In in the original image sequence obtained by scanning the objective lens at equal intervals, where Perform multi-scale decomposition into sub-images containing different frequency components/> Where n=1,2,...,N is the image sequence number, c∈[2,C] is the component label, and C is the decomposition level.
S22：通过显著度评价函数对得到的各个子图像进行评价，根据评价结果构建融合权重图，具体为：S22: Evaluate each obtained sub-image through the saliency evaluation function, and construct a fusion weight map based on the evaluation results, specifically as follows:
通过显著度评价函数fsal(·)，对各子图像进行评价，评价结果为/>并依据显著度水平评价结果构建融合权重图/>其中/>且/>Through the saliency evaluation function fsal (·), for each sub-image Evaluate and the evaluation result is/> And construct a fusion weight map based on the significance level evaluation results/> Among them/> And/>
S23：通过滤波函数，根据融合权重图中各权重值的相关程度和位置毗邻情况，对权重值进行交叉优化，以提升融合权重图的整体信噪比和各子区域的信噪比，具体为：S23: Through the filter function, cross-optimize the weight values according to the correlation degree and position adjacency of each weight value in the fusion weight map to improve the overall signal-to-noise ratio of the fusion weight map and the signal-to-noise ratio of each sub-region, specifically as follows :
通过滤波函数，对融合权重图中相关程度高、位置毗邻的权重值进行交叉优化，从而提高融合权重图的整体信噪比SNRoverall以及各子区域的信噪比SNRlocal。Through the filter function, the fusion weight map The weight values with high correlation and adjacent positions are cross-optimized, thereby improving the overall signal-to-noise ratio SNRoverall of the fused weight map and the signal-to-noise ratio SNRlocal of each sub-region.
S24：采用优化后的融合权重图对白光纹理图像分解后的各个子图像进行加权融合，得到优化后的特征图像，具体为：S24: Use the optimized fusion weight map to perform weighted fusion of each sub-image after the decomposition of the white light texture image, and obtain the optimized feature image, specifically:
利用权重对多尺度分解的图像序列进行加权融合。具体来说，对于每一个子图像/>和其对应的权重图/>融合分量/>是通过在相同位置的像素值进行加权平均得到的：Use weights Weighted fusion of multi-scale decomposed image sequences. Specifically, for each sub-image/> and its corresponding weight map/> Fusion component/> It is obtained by performing a weighted average of pixel values at the same location:
其中，(x,y)是像素位置，Wi,j(x,y)是位置(x,y)处图像分量i,j的融合权重，Ii,j(x,y)是位置(x,y)处图像分量i,j的像素值。这样，每个位置(x,y)的融合像素值就是其在所有图像序列和频率分量上的加权平均值。Among them, (x,y) is the pixel position, Wi,j (x,y) is the fusion weight of image component i,j at position (x,y), Ii,j (x,y) is the position (x ,y) the pixel value of image component i,j. In this way, the fused pixel value of each position (x, y) It is the weighted average of all image sequences and frequency components.
通过步骤特征空间变换函数ftrans(·)的逆变换可以将这些融合分量重组，得到全局清晰的特征图像/>Inverse transformation by step feature space transformation function ftrans (·) These fusion components can be reorganized to obtain a globally clear feature image/>
步骤S22中，采用的显著度评价函数通过如下方式实现：In step S22, the adopted significance evaluation function is implemented in the following way:
1、基于信息统计的显著度评价函数，如灰度方差函数、图像信息熵函数等；1. Salience evaluation functions based on information statistics, such as gray variance function, image information entropy function, etc.;
对于大小为M×N的图像f(x,y)，灰度方差函数Variance的表达式为：For an image f(x,y) of size M×N, the expression of the gray variance function Variance is:
其中，μ是图像灰度值的均值：Among them, μ is the mean of the image gray value:
2、基于频域信息的显著度评价函数，如空间频率函数、离散余弦变换函数等；2. Salience evaluation functions based on frequency domain information, such as spatial frequency functions, discrete cosine transform functions, etc.;
对于大小为M×N的图像f(x,y)，空间频率函数SF的表达式为：For an image f(x,y) of size M×N, the expression of the spatial frequency function SF is:
其中，RF和CF分别是行频率和列频率：Among them, RF and CF are the row frequency and column frequency respectively:
3、基于空域的显著度评价函数，如修正拉普拉斯和函数、灰度梯度函数、梯度能量函数、FSWM滤波函数、局部最大梯度等；3. Salience evaluation functions based on the spatial domain, such as modified Laplacian sum function, gray gradient function, gradient energy function, FSWM filter function, local maximum gradient, etc.;
对于大小为N×N的窗口大小，修正拉普拉斯和函数SML的表达式为：For a window size of N×N, the expressions of the modified Laplacian and function SML are:
其中，T是判别阈值，N是窗口大小，为修正拉普拉斯算子ML的离散近似表达式：Among them, T is the discrimination threshold, N is the window size, For the discrete approximate expression of the modified Laplacian ML:
具体地，在步骤S3中，对各层高度台阶的物平面所对应的白光纹理图像进行三维融合处理，获取白光深度图和荧光深度图，从而检测被测荧光零件表面的瑕疵的过程具体为：Specifically, in step S3, the white light texture image corresponding to the object plane of each height step is subjected to three-dimensional fusion processing to obtain the white light depth map and the fluorescence depth map, so as to detect defects on the surface of the fluorescent part under test. The process is specifically as follows:
31)采用显著度评价函数，对采集的白光纹理图像序列所构成的图像立方体，进行显著度评价，得到初始显著度评价立方体，具体为：31) Use the saliency evaluation function to evaluate the saliency of the image cube composed of the collected white light texture image sequence, and obtain the initial saliency evaluation cube, specifically as follows:
设原始图像序列所构成的图像立方体为其中H、W分别代表图像的高和宽，N表示图像序列的数量。通过显著度评价函数fsal(·)，对Corig进行像素级或窗口级显著度评价，得到初始显著度评价立方体/>其中/>Let the image cube composed of the original image sequence be Where H and W represent the height and width of the image respectively, and N represents the number of image sequences. Through the saliency evaluation function fsal (·), Corig is evaluated for pixel-level or window-level saliency to obtain the initial saliency evaluation cube/> Among them/>
32)采用特征图像对为初始显著度评价立方体提供颜色、形状、距离上的先验知识，并应用边缘保持的引导式滤波方法，对初始显著度评价立方体进行优化，得到修正显著度评价立方体，具体为：32) Use feature image pairs to provide a priori knowledge of color, shape, and distance for the initial saliency evaluation cube, and apply the edge-preserving guided filtering method to optimize the initial saliency evaluation cube to obtain a modified saliency evaluation cube. Specifically:
采用特征图像为/>提供颜色、形状、距离上的先验知识，应用边缘保持的引导式滤波方法，对/>进行优化，从而得到修正显著度评价立方体/>Feature image for/> Provide prior knowledge on color, shape, and distance, and apply edge-preserving guided filtering method to/> Optimize to obtain the corrected saliency evaluation cube/>
33)对修正显著度评价立方体中的每个像素，分别从该像素在白光纹理图像序列中提取显著度评价形成集合，构建显著度评价曲线；对该显著度评价曲线进行拟合，并标记最大显著度值对应的位置；将标记的位置作为图像立方体在沿光轴方向上的深度，从而形成初始深度图，具体为：33) For each pixel in the modified saliency evaluation cube, extract the saliency evaluation from the pixel in the white light texture image sequence to form a set, and construct a saliency evaluation curve; fit the saliency evaluation curve and mark the maximum The position corresponding to the saliency value; use the marked position as the depth of the image cube along the optical axis to form an initial depth map, specifically:
考虑的每个像素(i,j)，从该像素在N个图像序列中提取显著度评价形成集合{v1,v2,...,vN}。对该集合进行处理，建立显著度评价曲线Curveij(k)＝vk，其中k∈[1,N]。然后，利用高阶多项式p(k)进行拟合Curveij，并在该曲线上标记最大显著度值对应的位置。这些标记的位置对应于立方体Corig在沿光轴方向上的深度，从而形成初始深度图Dinit。consider For each pixel (i, j), the saliency evaluation is extracted from the pixel in N image sequences to form a set {v1 , v2 ,..., vN }. This set is processed to establish a significance evaluation curve Curveij (k) = vk , where k∈[1,N]. Then, high-order polynomial p(k) is used to fit Curveij , and the position corresponding to the maximum significance value is marked on the curve. The positions of these markers correspond to the depth of the cube Corig in the direction along the optical axis, thus forming an initial depth map Dinit .
34)根据修正显著度评价立方体的显著度评价值及其与初始深度图的相关性，构建初始深度图置信度信息，并编码为二值蒙版；以特征图像作为特征图，根据二值蒙版指定待处理区域，对初始深度图进行加权中值滤波处理，从而区分并处理强特征区域与弱特征区域，得到最终修正的深度图；34) Based on the saliency evaluation value of the modified saliency evaluation cube and its correlation with the initial depth map, construct the initial depth map confidence information and encode it into a binary mask; use the feature image as the feature map, and use the binary mask according to the Specify the area to be processed, and perform weighted median filtering on the initial depth map to distinguish and process strong feature areas and weak feature areas to obtain the final corrected depth map;
采用显著度评价值及其与Dinit的相关性，构建初始深度图置信度信息，这种信息被编码为一个二值蒙版M。利用作为特征图，并依据M指定待处理区域，对Dinit进行加权中值滤波处理，从而区分并处理强特征区域与弱特征区域，得到最终修正的深度图Dfinal。The saliency evaluation value and its correlation with Dinit are used to construct the initial depth map confidence information, which is encoded as a binary mask M. use As a feature map, and based on M specifying the area to be processed, weighted median filtering is performed on Dinit to distinguish and process strong feature areas and weak feature areas, and obtain the final corrected depth map Dfinal .
根据最终修正的白光深度图，进而得到荧光深度图，并显示被测荧光零件表面的瑕疵，具体为：Based on the final corrected white light depth map, a fluorescence depth map is obtained and the defects on the surface of the fluorescent part under test are displayed, specifically:
根据白光深度图中各数据点的坐标对相应坐标位置处的荧光图像进行遍历，对遍历得到的荧光信息进行三维融合处理后，得到荧光深度图，从而检测被测荧光零件表面的瑕疵。The fluorescence image at the corresponding coordinate position is traversed according to the coordinates of each data point in the white light depth map. After three-dimensional fusion processing of the fluorescence information obtained through the traversal, a fluorescence depth map is obtained, thereby detecting defects on the surface of the fluorescent part under test.
实施例2Example 2
本实施例与实施例1大体相同，不同点在于，零件表面瑕疵三维荧光检测装置的检测方法，还包括：This embodiment is generally the same as Embodiment 1. The difference lies in that the detection method of the three-dimensional fluorescence detection device for surface defects of parts also includes:
S4：若要突出显示潜在的缺陷区域，并准确获取缺陷区域的相对位置，可以通过融合白光深度图和荧光深度图，其具体流程如下：S4: To highlight potential defect areas and accurately obtain the relative position of the defect areas, you can fuse the white light depth map and the fluorescence depth map. The specific process is as follows:
41)提取荧光深度数据Df和白光深度图数据Dp；41) Extract fluorescence depth data Df and white light depth map data Dp ;
42)为Df和Dp分别构建高斯金字塔和/>其中i是层级。42) Construct Gaussian pyramids for Df and Dp respectively and/> where i is the level.
43)基于高斯金字塔和/>构建拉普拉斯金字塔/>和/>其中，每一层的拉普拉斯金字塔都是通过计算当前层的高斯金字塔与下一层的高斯金字塔经过上采样和滤波后的差异得到的，即/>同理对于Dp进行类似处理。43) Based on Gaussian Pyramid and/> Construct Laplacian Pyramid/> and/> Among them, the Laplacian pyramid of each layer is obtained by calculating the difference between the Gaussian pyramid of the current layer and the Gaussian pyramid of the next layer after upsampling and filtering, that is, /> In the same way, similar processing is performed for Dp .
44)定义蒙版图M，同时对蒙版图也构建相应的高斯金字塔44) Define the mask map M, and also construct the corresponding Gaussian pyramid for the mask map
45)使用蒙版图的高斯金字塔的相应层对荧光拉普拉斯金字塔和白光拉普拉斯金字塔进行加权融合，得到融合后的深度图，并采样和滤波处理，得到最终的融合深度图，具体为：45) Use the corresponding layer of the Gaussian pyramid of the mask map to perform weighted fusion of the fluorescent Laplacian pyramid and the white light Laplacian pyramid to obtain the fused depth map, and perform sampling and filtering processing to obtain the final fused depth map. Specifically for:
在每个尺度i上，使用蒙版图的相应层来对/>和/>进行加权融合。具体地，融合后的深度图/>At each scale i, use the corresponding layer of the mask map Come on/> and/> Perform weighted fusion. Specifically, the fused depth map/>
从最粗糙的拉普拉斯金字塔层开始，每一层都加到其下一层经过上采样和滤波后的结果上，直到最细的层，具体地，其中n是层数；最后，得到最终的融合深度图。Starting from the coarsest Laplacian pyramid layer, each layer is added to the upsampled and filtered result of the layer below it, until the finest layer, specifically, where n is the number of layers; finally, the final fused depth map is obtained.
如图8所示，将最终的融合深度图结合得到的白光下的表面纹理信息，生成三维融合图像，实现对待测物体的缺陷的全面检测并准确获取缺陷区域的相对位置。As shown in Figure 8, the final fusion depth map is combined with the obtained surface texture information under white light to generate a three-dimensional fusion image, achieving comprehensive detection of defects in the object to be measured and accurately obtaining the relative position of the defect area.
实施例3Example 3
本实施例与实施例1大体相同，不同点在于，如图3所示，在物镜外边缘放置环形白光照明光源12，在各层高度台阶，环形白光光源和同轴荧光光源交替开启，通过检测和计算生成的白光深度图数据点坐标对荧光图像进行重构，经计算获得三维的荧光检测图像。This embodiment is generally the same as Embodiment 1. The difference is that, as shown in Figure 3, an annular white light illumination source 12 is placed on the outer edge of the objective lens. At each height step, the annular white light source and the coaxial fluorescent light source are turned on alternately. Through the detection The fluorescence image is reconstructed with the calculated data point coordinates of the white light depth map, and a three-dimensional fluorescence detection image is obtained through calculation.
实施例4Example 4
本实施例与实施例1大体相同，不同点在于，如图4所示，荧光激发光源为环形荧光激发光源10，该环形荧光激发光源10为环形结构，安装在物镜7的外边缘。环形荧光激发光源10照明被测荧光零件表面，激发荧光信号，本征光被二向色镜5反射后无法透过筒镜3进入图像传感器2，荧光信号可以通过筒镜3后被图像传感器2记录。This embodiment is substantially the same as Embodiment 1. The difference is that, as shown in FIG. 4 , the fluorescence excitation light source is an annular fluorescence excitation light source 10 . The annular fluorescence excitation light source 10 is an annular structure and is installed on the outer edge of the objective lens 7 . The annular fluorescence excitation light source 10 illuminates the surface of the fluorescent part under test and excites the fluorescence signal. After being reflected by the dichroic mirror 5, the intrinsic light cannot pass through the tube lens 3 and enter the image sensor 2. The fluorescence signal can pass through the tube lens 3 and then be transmitted to the image sensor 2. Record.
实施例5Example 5
本实施例与实施例1大体相同，不同点在于，如图5所示，荧光激发光源为环形荧光激发光源10，该环形荧光激发光源10为环形结构，安装在物镜7的外边缘。零件表面瑕疵三维荧光检测装置还包括环形白光照明光源12，该环形白光照明光源12为环形结构，环形白光照明光源12安装在物镜7的外边缘。本征光滤除结构为滤光片11，滤光片11位于图像传感器2和筒镜3之间。环形荧光激发光源10照明被测荧光零件表面，激发荧光信号，本征光被滤光片11滤除，荧光信号可以通过筒镜3后被图像传感器2记录。This embodiment is substantially the same as Embodiment 1. The difference is that, as shown in FIG. 5 , the fluorescence excitation light source is an annular fluorescence excitation light source 10 . The annular fluorescence excitation light source 10 is an annular structure and is installed on the outer edge of the objective lens 7 . The three-dimensional fluorescence detection device for surface defects of parts also includes an annular white light illumination source 12 . The annular white light illumination source 12 has an annular structure. The annular white light illumination source 12 is installed on the outer edge of the objective lens 7 . The intrinsic light filtering structure is the filter 11, and the filter 11 is located between the image sensor 2 and the tube lens 3. The ring-shaped fluorescence excitation light source 10 illuminates the surface of the fluorescent part under test and excites the fluorescence signal. The intrinsic light is filtered by the filter 11 and the fluorescence signal can be recorded by the image sensor 2 after passing through the tube lens 3 .
实施例6Example 6
荧光激发光源为环形荧光激发光源10，该环形荧光激发光源10为环形结构，安装在物镜7的外边缘。零件表面瑕疵三维荧光检测装置还包括环形白光照明光源12，该环形白光照明光源12为环形结构，环形白光照明光源12安装在物镜7的外边缘。The fluorescence excitation light source is an annular fluorescence excitation light source 10 . The annular fluorescence excitation light source 10 has an annular structure and is installed on the outer edge of the objective lens 7 . The three-dimensional fluorescence detection device for surface defects of parts also includes an annular white light illumination source 12 . The annular white light illumination source 12 has an annular structure. The annular white light illumination source 12 is installed on the outer edge of the objective lens 7 .
将环形荧光激发光源10和环形白光照明光源12合成一个环形光源，利用环形光源中的环形白光照明光源12拍摄待测物体表面纹理的下一时刻，利用环形光源中的环形荧光激发光源10激发拍摄荧光图像，通过对不同高度台阶的图像数据的记录，实现白光纹理图像和荧光图像的同步检测，通过检测和计算生成的白光深度图数据点坐标对荧光图像进行重构，经计算获得三维的荧光检测图像。The annular fluorescence excitation light source 10 and the annular white light illumination light source 12 are combined into a ring light source, the annular white light illumination source 12 in the annular light source is used to photograph the surface texture of the object to be measured at the next moment, and the annular fluorescence excitation light source 10 in the annular light source is used to excite and photograph Fluorescence image, by recording the image data of different height steps, realizes the simultaneous detection of white light texture image and fluorescence image. The fluorescence image is reconstructed by detecting and calculating the data point coordinates of the white light depth map generated, and the three-dimensional fluorescence is obtained through calculation. Detect images.
以上详细描述了本发明的较佳具体实施例。应当理解，本领域的普通技术人员无需创造性劳动就可以根据本发明的构思做出诸多修改和变化。因此，凡本技术领域中技术人员依本发明的构思在现有技术的基础上通过逻辑分析、推理或者有限的实验可以得到的技术方案，皆应在由权利要求书所确定的保护范围内。The preferred embodiments of the present invention are described in detail above. It should be understood that those skilled in the art can make many modifications and changes based on the concept of the present invention without creative efforts. Therefore, any technical solutions that can be obtained by those skilled in the art through logical analysis, reasoning or limited experiments based on the concept of the present invention and on the basis of the prior art should be within the scope of protection determined by the claims.
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