技术领域Technical field
本发明涉及激光加工技术领域，具体而言，涉及一种基于激光光束时空调制的高效刻蚀方法。The present invention relates to the technical field of laser processing, and specifically to an efficient etching method based on spatial and temporal modulation of laser beams.
背景技术Background technique
现阶段，飞秒激光刻蚀方法作为一种常见的材料表面微纳加工手段，已经广泛应用于航空航天、国防科技及能源化工等领域。At this stage, femtosecond laser etching method, as a common micro-nano processing method for material surfaces, has been widely used in aerospace, defense technology, energy and chemical industry and other fields.
在相关技术中，主要通过高效刻蚀系统采用飞秒激光技术加工微光学元件，其中，高效刻蚀系统主要包括飞秒激光器、激光偏振调整系统、激光反射镜组、反射式物镜和工作台，其中，工作平台上用于安装待加工的工件，激光偏振调整系统用于使得飞秒激光器输出的飞秒激光光束入射到激光发射镜组，而激光发射镜组用于将飞秒激光光束垂直到反射式物镜以及聚焦到工件的表面，以对工件进行激光加工作业。In related technologies, femtosecond laser technology is mainly used to process micro-optical components through high-efficiency etching systems. The high-efficiency etching systems mainly include femtosecond lasers, laser polarization adjustment systems, laser mirror groups, reflective objective lenses and workbenches. Among them, the work platform is used to install the workpiece to be processed, the laser polarization adjustment system is used to make the femtosecond laser beam output by the femtosecond laser incident on the laser transmitting lens group, and the laser transmitting lens group is used to vertically direct the femtosecond laser beam to Reflective objective lens and focus to the surface of the workpiece to perform laser processing operations on the workpiece.
但是由于激光偏振调整系统调整后的激光本身高斯分布引起的分束不均一性，以使得工件材料表面刻蚀存在不均一性，从而严重影响了对工件的激光刻蚀质量。However, due to the non-uniformity of beam splitting caused by the Gaussian distribution of the laser itself after adjustment by the laser polarization adjustment system, the surface etching of the workpiece material is non-uniform, which seriously affects the quality of laser etching of the workpiece.
发明内容Contents of the invention
本发明解决的问题是如何有效提高对工件的激光刻蚀质量。The problem solved by the invention is how to effectively improve the quality of laser etching of workpieces.
为解决上述问题，本发明提供基于激光光束时空调制的高效刻蚀方法，应用于基于激光光束时空调制的高效刻蚀系统，应用于基于激光光束时空调制的高效刻蚀系统包括飞秒激光器、激光偏振调整系统、脉冲整形器、机械快门、第一激光反射镜组、空间光调制器、第二激光反射镜组和工作平台，所述基于激光光束时空调制的高效刻蚀方法包括如下步骤：In order to solve the above problems, the present invention provides an efficient etching method based on the spatio-temporal control of the laser beam, which is applied to an efficient etching system based on the spatio-temporal control of the laser beam. The high-efficiency etching system based on the spatio-temporal control of the laser beam includes femtosecond laser, laser Polarization adjustment system, pulse shaper, mechanical shutter, first laser mirror group, spatial light modulator, second laser mirror group and working platform. The efficient etching method based on laser beam spatiotemporal conditioning includes the following steps:
S1、控制飞秒激光器输出飞秒激光光束，通过激光偏振调整系统对所述飞秒激光光束进行准直调节；S1. Control the femtosecond laser to output a femtosecond laser beam, and adjust the collimation of the femtosecond laser beam through the laser polarization adjustment system;
S2、控制脉冲整形器调节所述飞秒激光光束的脉冲延时和能量比参数，以对所述飞秒激光光束进行时域整形，且通过第一激光反射镜组将经过所述脉冲整形器时域整形后的所述飞秒激光光束入射到空间光调制器上；S2. Control the pulse shaper to adjust the pulse delay and energy ratio parameters of the femtosecond laser beam to perform time domain shaping of the femtosecond laser beam, and pass the first laser mirror group through the pulse shaper The femtosecond laser beam after time domain shaping is incident on the spatial light modulator;
S3、通过所述空间光调制器对所述飞秒激光光束进行空间整形，以形成时空整形飞秒激光脉冲；S3. Spatially shape the femtosecond laser beam through the spatial light modulator to form a spatiotemporally shaped femtosecond laser pulse;
S4、调整第一激光反射镜组和第二激光反射镜组的空间角度，以将所述时空整形飞秒激光脉冲聚焦到工件的表面；S4. Adjust the spatial angle of the first laser mirror group and the second laser mirror group to focus the space-time shaping femtosecond laser pulse onto the surface of the workpiece;
S5、控制机械快门的时间和工作平台的运动，以对所述工件(21)进行激光加工作业。S5. Control the time of the mechanical shutter and the movement of the working platform to perform laser processing on the workpiece (21).
可选地，所述激光偏振调整系统包括飞秒半波片和飞秒偏振分光片，所述飞秒激光器、所述飞秒半波片和所述飞秒偏振分光片相对设置；Optionally, the laser polarization adjustment system includes a femtosecond half-wave plate and a femtosecond polarizing beam splitter, and the femtosecond laser, the femtosecond half-wave plate and the femtosecond polarizing beam splitter are arranged oppositely;
所述通过激光偏振调整系统对所述飞秒激光光束进行准直调节包括：对所述飞秒激光器输出的所述飞秒激光光束进行准直调节，以使出射的所述飞秒激光光束的偏振方向为水平方向。The collimation adjustment of the femtosecond laser beam through the laser polarization adjustment system includes: collimation adjustment of the femtosecond laser beam output by the femtosecond laser, so that the femtosecond laser beam output is The polarization direction is horizontal.
可选地，所述控制脉冲整形器调节所述飞秒激光光束的脉冲延时和能量比参数，以对所述飞秒激光光束进行时域整形包括：Optionally, controlling the pulse shaper to adjust the pulse delay and energy ratio parameters of the femtosecond laser beam to perform time domain shaping of the femtosecond laser beam includes:
所述脉冲整形器用于对经所述激光偏振调整系统准直后的飞秒激光光束进行时域整形；The pulse shaper is used to perform time domain shaping on the femtosecond laser beam collimated by the laser polarization adjustment system;
所述通过所述空间光调制器对所述飞秒激光光束进行空间整形，以形成时空整形飞秒激光脉冲包括：The spatial shaping of the femtosecond laser beam by the spatial light modulator to form a spatiotemporally shaped femtosecond laser pulse includes:
所述空间光调制器用于对经所述第一激光反射镜组反射后的所述飞秒激光光束进行空间整形以形成时空整形飞秒激光脉冲。The spatial light modulator is used to spatially shape the femtosecond laser beam reflected by the first laser mirror group to form a spatiotemporally shaped femtosecond laser pulse.
可选地，所述调整第一激光反射镜组和第二激光反射镜组的空间角度，以将所述时空整形飞秒激光脉冲聚焦到工件的表面中：Optionally, the spatial angle of the first laser mirror group and the second laser mirror group is adjusted to focus the spatiotemporal shaping femtosecond laser pulse onto the surface of the workpiece:
所述第一激光反射镜组包括飞秒激光全反射镜和第一平凸透镜，所述飞秒激光全反射镜与所述空间光调制器平行间隔设置，且与水平方向呈夹角设置，所述第一平凸透镜设置于所述飞秒激光全反射镜与所述空间光调制器之间。The first laser mirror group includes a femtosecond laser total reflection mirror and a first plano-convex lens. The femtosecond laser total reflection mirror is arranged parallel to the spatial light modulator and is arranged at an angle with the horizontal direction. The first plano-convex lens is disposed between the femtosecond laser total reflection mirror and the spatial light modulator.
可选地，所述调整第一激光反射镜组和第二激光反射镜组的空间角度，以将所述时空整形飞秒激光脉冲聚焦到工件的表面中：Optionally, the spatial angle of the first laser mirror group and the second laser mirror group is adjusted to focus the spatiotemporal shaping femtosecond laser pulse onto the surface of the workpiece:
第二激光反射镜组包括可见光透射激光反射镜，所述第二平凸透镜、所述白光光源分别与所述可见光透射激光反射镜相对设置，所述观测系统与所述可见光透射激光反射镜相对设置，用于将观察所述时空整形飞秒激光脉冲是否聚焦到所述工件的表面。The second laser mirror group includes a visible light transmitting laser mirror, the second plano-convex lens and the white light source are respectively arranged opposite to the visible light transmitting laser mirror, and the observation system is arranged opposite to the visible light transmitting laser mirror. , used to observe whether the spatiotemporal shaping femtosecond laser pulse is focused on the surface of the workpiece.
可选地，所述控制机械快门的时间和工作平台的运动，以对所述工件进行激光加工作业包括：Optionally, controlling the timing of the mechanical shutter and the movement of the work platform to perform laser processing on the workpiece includes:
所述机械快门、所述第一激光反射镜组和所述空间光调制器沿所述飞秒激光器输出的飞秒激光光束方向排列设置，所述机械快门用于控制经所述脉冲整形器时域整形后的所述飞秒激光光束入射到所述空间光调制器上，以产生所述时空整形飞秒激光脉冲。The mechanical shutter, the first laser mirror group and the spatial light modulator are arranged in an array along the direction of the femtosecond laser beam output by the femtosecond laser, and the mechanical shutter is used to control the time of passing through the pulse shaper. The domain-shaped femtosecond laser beam is incident on the spatial light modulator to generate the spatiotemporally shaped femtosecond laser pulse.
可选地，所述调整第一激光反射镜组和第二激光反射镜组的空间角度，以将所述时空整形飞秒激光脉冲聚焦到工件的表面中：Optionally, the spatial angle of the first laser mirror group and the second laser mirror group is adjusted to focus the spatiotemporal shaping femtosecond laser pulse onto the surface of the workpiece:
所述第二激光反射镜组包括第二平凸透镜和反射式物镜，所述第一平凸透镜的焦距与所述第二平凸透镜的焦距相同，且两者之间的间距为所述焦距的两倍；所述第一平凸透镜与所述空间光调制器之间的间距、以及所述第二平凸透镜和所述反射式物镜之间的间距与所述焦距相等。The second laser mirror group includes a second plano-convex lens and a reflective objective lens. The focal length of the first plano-convex lens is the same as the focal length of the second plano-convex lens, and the distance between them is two times of the focal length. times; the distance between the first plano-convex lens and the spatial light modulator, and the distance between the second plano-convex lens and the reflective objective lens are equal to the focal length.
可选地，所述观测系统包括光学镜头、CCD相机、滤光片和衰减片，所述衰减片、所述滤光片、所述CCD相机和所述光学镜头沿经所述可见光透射激光反射镜反射后的白光方向排列设置。Optionally, the observation system includes an optical lens, a CCD camera, an optical filter, and an attenuation plate. The attenuation plate, the optical filter, the CCD camera, and the optical lens reflect the laser light transmitted through the visible light. The direction of white light after mirror reflection is arranged and set.
可选地，所述调整第一激光反射镜组和第二激光反射镜组的空间角度，以将所述时空整形飞秒激光脉冲聚焦到工件的表面包括：Optionally, adjusting the spatial angle of the first laser mirror group and the second laser mirror group to focus the spatiotemporal shaping femtosecond laser pulse onto the surface of the workpiece includes:
白光光源发出的白光经由可见光透射激光反射镜与飞秒激光脉冲同轴入射并照亮工件表面，部分白光会被工件表面反射，经由反射式物镜、可见光透射激光反射镜，进入光学镜头、CCD相机、滤光片和衰减片；滤光片和衰减片用于将白光转变为CCD相机能够识别并处理的光学信号，并通过光学镜头实时观察飞秒激光脉冲是否聚焦到工件表面；光学快门用于通过或阻断飞秒激光脉冲，防止在调试激光脉冲延迟及能量比的过程中激光经由反射式物镜到达工件表面。The white light emitted by the white light source is incident coaxially with the femtosecond laser pulse through the visible light transmission laser mirror and illuminates the workpiece surface. Part of the white light will be reflected by the workpiece surface and enter the optical lens and CCD camera through the reflective objective lens and visible light transmission laser mirror. , filters and attenuators; filters and attenuators are used to convert white light into optical signals that can be recognized and processed by the CCD camera, and observe in real time through the optical lens whether the femtosecond laser pulse is focused on the workpiece surface; the optical shutter is used Pass or block femtosecond laser pulses to prevent the laser from reaching the workpiece surface through the reflective objective lens during the process of adjusting the laser pulse delay and energy ratio.
与现有技术相比，本发明利用脉冲整形器搭配空间光调制器对飞秒激光光束进行时空调制，有效避免由于激光本身高斯分布引起的分束不均一性，提高材料表面高效刻蚀的均一性与质量，实现高效率高质量的刻蚀加工。本发明方法显著提高飞秒激光加工材料的效率及质量，可广泛应用于微纳光学元件的微细加工，展现出高度可调节性。Compared with the existing technology, the present invention uses a pulse shaper combined with a spatial light modulator to perform spatiotemporal regulation of the femtosecond laser beam, effectively avoiding beam splitting inhomogeneity caused by the Gaussian distribution of the laser itself, and improving the uniformity of efficient etching on the material surface. performance and quality to achieve high-efficiency and high-quality etching processing. The method of the invention significantly improves the efficiency and quality of femtosecond laser processing materials, can be widely used in micro-processing of micro-nano optical elements, and exhibits a high degree of adjustability.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1为本发明实施例中基于激光光束时空调制的高效刻蚀方法的流程示意图；Figure 1 is a schematic flow chart of an efficient etching method based on spatio-temporal modulation of laser beam in an embodiment of the present invention;
图2为本发明实施例中基于激光光束时空调制的高效刻蚀系统的结构示意图。Figure 2 is a schematic structural diagram of an efficient etching system based on spatio-temporal conditioning of laser beams in an embodiment of the present invention.
附图标记说明：Explanation of reference symbols:
1-飞秒激光器；2-飞秒激光扩束镜；3-二维调整架；4-飞秒半波片；5-飞秒偏振分光片；6-脉冲整形器；7-机械快门；8-飞秒激光全反射镜；9-第一平凸透镜；10-空间光调制器；11-第二平凸透镜；12-光学镜头；13-CCD相机；14-滤光片；15-衰减片；16-白光分束镜；17-白光光源；18-可见光透射激光反射镜；19-光学快门；20-反射式物镜；21-工件；22-工件平台。1-Femtosecond laser; 2-Femtosecond laser beam expander; 3-Two-dimensional adjustment frame; 4-Femtosecond half-wave plate; 5-Femtosecond polarizing beam splitter; 6-Pulse shaper; 7-Mechanical shutter; 8 -Femtosecond laser total reflection mirror; 9-first plano-convex lens; 10-spatial light modulator; 11-second plano-convex lens; 12-optical lens; 13-CCD camera; 14-optical filter; 15-attenuation plate; 16-White light beam splitter; 17-White light source; 18-Visible light transmission laser mirror; 19-Optical shutter; 20-Reflective objective lens; 21-Workpiece; 22-Workpiece platform.
具体实施方式Detailed ways
为使本发明的上述目的、特征和优点能够更为明显易懂，下面结合附图对本发明的具体实施例做详细的说明。In order to make the above objects, features and advantages of the present invention more obvious and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
需要说明的是，本发明的说明书和权利要求书及上述附图中的术语“第一”、“第二”等是用于区别类似的对象，而不必用于描述特定的顺序或先后次序。应该理解这样使用的数据在适当情况下可以互换，以便这里描述的本发明的实施例能够以除了在这里图示或描述的那些以外的顺序实施。It should be noted that the terms "first", "second", etc. in the description and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It is to be understood that the data so used are interchangeable under appropriate circumstances so that the embodiments of the invention described herein are capable of being practiced in sequences other than those illustrated or described herein.
在本发明的描述中，需要说明的是，除非另有明确的规定和限定，术语“设置”、“安装”、“相连”、“连接”应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或一体地连接；可以是机械连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通。对于本领域的普通技术人员而言，可以具体情况理解上述术语在本发明中的具体含义。In the description of the present invention, it should be noted that, unless otherwise clearly stated and limited, the terms "setting", "installation", "connecting" and "connecting" should be understood in a broad sense. For example, it can be a fixed connection, or a fixed connection. It can be a detachable connection or an integral connection; it can be a mechanical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be an internal connection between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood on a case-by-case basis.
在本说明书的描述中，参考术语“实施例”、“一个实施例”和“一个实施方式”等的描述意指结合该实施例或实施方式描述的具体特征、结构、材料或者特点包含于本发明的至少一个实施例或实施方式中。在本说明书中，对上述术语的示意性表述不一定指的是相同的实施例或实施方式。而且，描述的具体特征、结构、材料或者特点可以在任何的一个或多个实施例或实施方式以合适的方式结合。In the description of this specification, reference to the terms "embodiment," "one embodiment," and "one implementation," etc., means that a specific feature, structure, material, or characteristic described in connection with the example or implementation is included herein. In at least one embodiment or implementation of the invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or implementation. Furthermore, the specific features, structures, materials or characteristics described may be combined in any suitable manner in any one or more embodiments or implementations.
为解决上述技术问题，结合图1所示，本发明实施例提供一种基于激光光束时空调制的高效刻蚀方法，应用于基于激光光束时空调制的高效刻蚀系统，应用于基于激光光束时空调制的高效刻蚀系统包括飞秒激光器1、激光偏振调整系统、脉冲整形器6、机械快门7、第一激光反射镜组、空间光调制器10、第二激光反射镜组和工作平台，所述基于激光光束时空调制的高效刻蚀方法包括如下步骤：In order to solve the above technical problems, as shown in FIG. 1 , embodiments of the present invention provide an efficient etching method based on laser beam spatio-temporal control, which can be applied to an efficient etching system based on laser beam spatio-temporal control. The high-efficiency etching system includes a femtosecond laser 1, a laser polarization adjustment system, a pulse shaper 6, a mechanical shutter 7, a first laser mirror group, a spatial light modulator 10, a second laser mirror group and a working platform, as described The efficient etching method based on laser beam spatiotemporal modulation includes the following steps:
S1、控制飞秒激光器1输出飞秒激光光束，通过激光偏振调整系统对所述飞秒激光光束进行准直调节；S1. Control the femtosecond laser 1 to output a femtosecond laser beam, and adjust the collimation of the femtosecond laser beam through the laser polarization adjustment system;
S2、控制脉冲整形器6调节所述飞秒激光光束的脉冲延时和能量比参数，以对所述飞秒激光光束进行时域整形，且通过第一激光反射镜组将经过所述脉冲整形器6时域整形后的所述飞秒激光光束入射到空间光调制器10上；S2. Control the pulse shaper 6 to adjust the pulse delay and energy ratio parameters of the femtosecond laser beam to perform time domain shaping of the femtosecond laser beam, and use the first laser mirror group to shape the pulse. The femtosecond laser beam after time domain shaping by the device 6 is incident on the spatial light modulator 10;
S3、通过所述空间光调制器10对所述飞秒激光光束进行空间整形，以形成时空整形飞秒激光脉冲；S3. Spatially shape the femtosecond laser beam through the spatial light modulator 10 to form a spatiotemporally shaped femtosecond laser pulse;
S4、调整第一激光反射镜组和第二激光反射镜组的空间角度，以将所述时空整形飞秒激光脉冲聚焦到工件21的表面；S4. Adjust the spatial angle of the first laser mirror group and the second laser mirror group to focus the space-time shaping femtosecond laser pulse onto the surface of the workpiece 21;
S5、控制机械快门7的时间和工作平台的运动，以对所述工件21进行激光加工作业。S5. Control the time of the mechanical shutter 7 and the movement of the working platform to perform laser processing on the workpiece 21.
需要说明的是，在步骤S1中，可通过总控制装置控制飞秒激光器1输出飞秒激光光束，通过激光偏振调整系统对所述飞秒激光光束进行准直调节，并使出射飞秒激光的偏振方向为水平。It should be noted that in step S1, the femtosecond laser 1 can be controlled to output a femtosecond laser beam through the overall control device, and the femtosecond laser beam can be collimated and adjusted through the laser polarization adjustment system, and the femtosecond laser beam can be emitted. The polarization direction is horizontal.
在步骤S2、通过脉冲整形器的时域整形可以调控材料的局部瞬态电子动态，通过空间光调制器设计并改变激光光场的空间分布，可以改变自由电子密度的空间分布，从而实现新的制造方法，有效提高激光的加工效率和加工质量。其中，飞秒激光器，其输出中心波长1030nm，脉冲宽度为255fs，脉冲频率调节范围为1kHz～1.1MHz，峰值平均功率15W，为光束输出。In step S2, the local transient electron dynamics of the material can be controlled through the time domain shaping of the pulse shaper. By designing and changing the spatial distribution of the laser light field through the spatial light modulator, the spatial distribution of the free electron density can be changed, thereby achieving new The manufacturing method effectively improves the processing efficiency and processing quality of laser. Among them, the femtosecond laser has an output center wavelength of 1030nm, a pulse width of 255fs, a pulse frequency adjustment range of 1kHz to 1.1MHz, and a peak average power of 15W, which is a beam output.
在步骤S3、调整第一激光反射镜组和第二激光反射镜组的空间角度，使得飞秒激光垂直到反射式物镜并聚焦到工件的表面。In step S3, the spatial angle of the first laser mirror group and the second laser mirror group is adjusted so that the femtosecond laser is perpendicular to the reflective objective lens and focused on the surface of the workpiece.
在步骤S5、调节机械快门控制时间调控时域整形后的飞秒激光通过飞秒激光全反射镜与第一平凸透镜入射到空间光调制器上。In step S5, the mechanical shutter control time is adjusted to adjust the time domain shaping. The femtosecond laser passes through the femtosecond laser total reflection mirror and the first plano-convex lens and is incident on the spatial light modulator.
本发明结合了激光光束时域与空间整形的优点，同时克服了飞秒激光刻蚀工艺低效率的缺点，通过调控脉冲整形器和空间光调制器对飞秒激光脉冲序列进行灵活的调制，实现调控材料表面的电子动态提高能量沉积效率，最终实现材料的高质量和高精度的加工。This invention combines the advantages of laser beam time domain and spatial shaping, and at the same time overcomes the shortcomings of low efficiency of the femtosecond laser etching process. By regulating the pulse shaper and the spatial light modulator, the femtosecond laser pulse sequence is flexibly modulated to achieve Regulating the electron dynamics on the material surface improves energy deposition efficiency, and ultimately achieves high-quality and high-precision processing of materials.
其中，结合图2所示，一种基于激光光束时空调制的高效刻蚀系统，包括飞秒激光器1、激光偏振调整系统、脉冲整形器6、机械快门7、第一激光反射镜组、空间光调制器10、第二激光反射镜组和工作平台，所述飞秒激光器1、所述激光偏振调整系统、所述脉冲整形器6、所述机械快门7、所述第一激光反射镜组和所述空间光调制器10沿所述飞秒激光器1输出的飞秒激光光束方向排列设置，所述脉冲整形器6用于对经所述激光偏振调整系统准直后的飞秒激光光束进行时域整形，所述空间光调制器10用于对经所述第一激光反射镜组反射后的所述飞秒激光光束进行空间整形以形成时空整形飞秒激光脉冲，所述工作平台设置于所述第二激光反射镜组的一侧，所述工作平台上安装工件21，所述空间光调制器10与所述第二激光反射镜组相对设置，所述第二激光反射镜组用于对经所述空间光调制器10空间整形后的所述时空整形飞秒激光脉冲进行空间角度调整，以将所述时空整形飞秒激光脉冲聚焦到所述工件21的表面。Among them, as shown in Figure 2, an efficient etching system based on the spatio-temporal regulation of the laser beam includes a femtosecond laser 1, a laser polarization adjustment system, a pulse shaper 6, a mechanical shutter 7, a first laser mirror group, a spatial light Modulator 10, the second laser mirror group and the working platform, the femtosecond laser 1, the laser polarization adjustment system, the pulse shaper 6, the mechanical shutter 7, the first laser mirror group and The spatial light modulator 10 is arranged along the direction of the femtosecond laser beam output by the femtosecond laser 1, and the pulse shaper 6 is used to perform timing processing on the femtosecond laser beam collimated by the laser polarization adjustment system. Domain shaping, the spatial light modulator 10 is used to spatially shape the femtosecond laser beam reflected by the first laser mirror group to form a spatiotemporally shaped femtosecond laser pulse, and the working platform is disposed on the On one side of the second laser mirror group, the workpiece 21 is installed on the working platform, and the spatial light modulator 10 is arranged opposite to the second laser mirror group. The second laser mirror group is used for The spatio-temporal shaped femtosecond laser pulses spatially shaped by the spatial light modulator 10 undergo spatial angle adjustment to focus the spatio-temporal shaped femtosecond laser pulses onto the surface of the workpiece 21 .
需要说明的是，飞秒激光器1用于输出飞秒激光光束；激光偏振调整系统用于对飞秒激光光束进行准直调节，以使出射飞秒激光的偏振方向为水平。It should be noted that the femtosecond laser 1 is used to output a femtosecond laser beam; the laser polarization adjustment system is used to align and adjust the femtosecond laser beam so that the polarization direction of the emitted femtosecond laser is horizontal.
调整脉冲整形器6的脉冲延时和能量比参数，对飞秒激光进行时域整形；机械快门7用于控制时间调控时域整形后的飞秒激光通过飞秒激光全反射镜8与第一平凸透镜9入射到空间光调制器10上；调节空间光调制器10对飞秒激光光束进行空间整形，生成需要的多焦点光场。Adjust the pulse delay and energy ratio parameters of the pulse shaper 6 to perform time domain shaping of the femtosecond laser; the mechanical shutter 7 is used to control the time and regulate the time domain shaped femtosecond laser through the femtosecond laser total reflection mirror 8 and the first The plano-convex lens 9 is incident on the spatial light modulator 10; the spatial light modulator 10 is adjusted to spatially shape the femtosecond laser beam to generate the required multi-focus light field.
本发明利用脉冲整形器6搭配空间光调制器10对飞秒激光光束进行时空调制，有效避免由于激光本身高斯分布引起的分束不均一性，提高材料表面高效刻蚀的均一性与质量，实现高效率高质量的刻蚀加工。本发明方法显著提高飞秒激光加工材料的效率及质量，可广泛应用于微纳光学元件的微细加工，展现出高度可调节性。The present invention uses the pulse shaper 6 and the spatial light modulator 10 to perform spatiotemporal regulation of the femtosecond laser beam, effectively avoiding the beam splitting non-uniformity caused by the Gaussian distribution of the laser itself, improving the uniformity and quality of efficient etching on the material surface, and achieving High efficiency and high quality etching processing. The method of the invention significantly improves the efficiency and quality of femtosecond laser processing materials, can be widely used in micro-processing of micro-nano optical elements, and exhibits a high degree of adjustability.
在本发明的一个实施例中，所述激光偏振调整系统包括飞秒半波片4和飞秒偏振分光片5，所述飞秒激光器1、所述飞秒半波片4和所述飞秒偏振分光片5相对设置；In one embodiment of the present invention, the laser polarization adjustment system includes a femtosecond half-wave plate 4 and a femtosecond polarization beam splitter 5. The femtosecond laser 1, the femtosecond half-wave plate 4 and the femtosecond polarization beam splitter 5. The polarizing beam splitters 5 are arranged relatively;
所述通过激光偏振调整系统对所述飞秒激光光束进行准直调节包括：对所述飞秒激光器1输出的所述飞秒激光光束进行准直调节，以使出射的所述飞秒激光光束的偏振方向为水平方向。The collimation adjustment of the femtosecond laser beam through the laser polarization adjustment system includes: collimation adjustment of the femtosecond laser beam output by the femtosecond laser 1, so that the emitted femtosecond laser beam The polarization direction is horizontal.
需要说明的是，飞秒半波片4用于飞秒激光器1输出的对飞秒激光光束进行旋转，以改变飞秒激光光束的偏振方向，而飞秒偏振分光片5可以选择透过的偏振方向，以实现对飞秒激光光束的光能量的连续调节，且调节后的飞秒激光光束出射至脉冲整形器6。It should be noted that the femtosecond half-wave plate 4 is used to rotate the femtosecond laser beam output by the femtosecond laser 1 to change the polarization direction of the femtosecond laser beam, while the femtosecond polarization beam splitter 5 can select the polarization transmitted through direction to achieve continuous adjustment of the light energy of the femtosecond laser beam, and the adjusted femtosecond laser beam is emitted to the pulse shaper 6 .
在本发明的一个实施例中，所述控制脉冲整形器6调节所述飞秒激光光束的脉冲延时和能量比参数，以对所述飞秒激光光束进行时域整形包括：In one embodiment of the present invention, the control pulse shaper 6 adjusts the pulse delay and energy ratio parameters of the femtosecond laser beam to perform time domain shaping of the femtosecond laser beam including:
所述脉冲整形器6用于对经所述激光偏振调整系统准直后的飞秒激光光束进行时域整形；The pulse shaper 6 is used to perform time domain shaping of the femtosecond laser beam collimated by the laser polarization adjustment system;
所述通过所述空间光调制器10对所述飞秒激光光束进行空间整形，以形成时空整形飞秒激光脉冲包括：The spatial shaping of the femtosecond laser beam by the spatial light modulator 10 to form a spatiotemporally shaped femtosecond laser pulse includes:
所述空间光调制器10用于对经所述第一激光反射镜组反射后的所述飞秒激光光束进行空间整形以形成时空整形飞秒激光脉冲。The spatial light modulator 10 is used to spatially shape the femtosecond laser beam reflected by the first laser mirror group to form a spatiotemporally shaped femtosecond laser pulse.
需要说明的是，所述第一激光反射镜组包括飞秒激光全反射镜8和第一平凸透镜9，所述飞秒激光全反射镜8与所述空间光调制器10平行间隔设置，且与水平方向呈夹角设置，所述第一平凸透镜9设置于所述飞秒激光全反射镜8与所述空间光调制器10之间；所述机械快门7用于控制经所述脉冲整形器6时域整形后的所述飞秒激光光束入射到所述空间光调制器10上，以产生所述时空整形飞秒激光脉冲。It should be noted that the first laser mirror group includes a femtosecond laser total reflection mirror 8 and a first plano-convex lens 9. The femtosecond laser total reflection mirror 8 is spaced parallel to the spatial light modulator 10, and Set at an angle with the horizontal direction, the first plano-convex lens 9 is set between the femtosecond laser total reflection mirror 8 and the spatial light modulator 10; the mechanical shutter 7 is used to control the pulse shaping The femtosecond laser beam after time domain shaping by the device 6 is incident on the spatial light modulator 10 to generate the spatiotemporally shaped femtosecond laser pulse.
在本发明的一个实施例中，调节机械快门7控制时间调控时域整形后的飞秒激光通过飞秒激光全反射镜8与第一平凸透镜9入射到空间光调制器10上。In one embodiment of the present invention, the femtosecond laser after time domain shaping is controlled by adjusting the mechanical shutter 7 to be incident on the spatial light modulator 10 through the femtosecond laser total reflection mirror 8 and the first plano-convex lens 9 .
所述调整第一激光反射镜组和第二激光反射镜组的空间角度，以将所述时空整形飞秒激光脉冲聚焦到工件21的表面中：The spatial angle of the first laser mirror group and the second laser mirror group is adjusted to focus the spatiotemporal shaping femtosecond laser pulse onto the surface of the workpiece 21:
第二激光反射镜组包括可见光透射激光反射镜18，所述第二平凸透镜11、所述白光光源17分别与所述可见光透射激光反射镜18相对设置，所述观测系统与所述可见光透射激光反射镜18相对设置，用于将观察所述时空整形飞秒激光脉冲是否聚焦到所述工件21的表面。The second laser mirror group includes a visible light transmitting laser mirror 18. The second plano-convex lens 11 and the white light source 17 are respectively arranged opposite to the visible light transmitting laser mirror 18. The observation system is connected to the visible light transmitting laser mirror 18. The reflecting mirrors 18 are arranged opposite each other for observing whether the spatiotemporal shaping femtosecond laser pulse is focused onto the surface of the workpiece 21 .
需要说明的是，结合图2所示，第一平凸透镜9、第二平凸透镜11和反射式物镜20共同构成4F系统，即第一平凸透镜9的焦距f和第二平凸透镜11的焦距f相同，且两者之间的间距等于焦距f的两倍，并使第一平凸透镜9和空间光调制器10之间的距离调节为焦距f，第二平凸透镜11于反射式物镜20之间的间距同样为焦距f，实现空间光调制器10的光场到达反射式物镜20之前无衍射效应。It should be noted that, as shown in FIG. 2 , the first plano-convex lens 9 , the second plano-convex lens 11 and the reflective objective lens 20 together constitute a 4F system, that is, the focal length f of the first plano-convex lens 9 and the focal length f of the second plano-convex lens 11 The same, and the distance between them is equal to twice the focal length f, and the distance between the first plano-convex lens 9 and the spatial light modulator 10 is adjusted to the focal length f, and the second plano-convex lens 11 is between the reflective objective lens 20 The spacing is also the focal length f, so that there is no diffraction effect before the light field of the spatial light modulator 10 reaches the reflective objective lens 20 .
所述控制机械快门7的时间和工作平台的运动，以对所述工件21进行激光加工作业包括：The control of the time of the mechanical shutter 7 and the movement of the work platform to perform laser processing on the workpiece 21 includes:
所述机械快门7、所述第一激光反射镜组和所述空间光调制器10沿所述飞秒激光器1输出的飞秒激光光束方向排列设置，所述机械快门7用于控制经所述脉冲整形器6时域整形后的所述飞秒激光光束入射到所述空间光调制器10上，以产生所述时空整形飞秒激光脉冲。The mechanical shutter 7, the first laser mirror group and the spatial light modulator 10 are arranged along the direction of the femtosecond laser beam output by the femtosecond laser 1, and the mechanical shutter 7 is used to control the The femtosecond laser beam time-domain-shaped by the pulse shaper 6 is incident on the spatial light modulator 10 to generate the spatio-temporally shaped femtosecond laser pulse.
需要说明的是，所述第二激光反射镜组包括可见光透射激光反射镜18，所述第二平凸透镜11、所述白光光源17分别与所述可见光透射激光反射镜18相对设置，所述观测系统与所述可见光透射激光反射镜18相对设置，用于将观察所述时空整形飞秒激光脉冲是否聚焦到所述工件21的表面。It should be noted that the second laser mirror group includes a visible light transmitting laser mirror 18. The second plano-convex lens 11 and the white light source 17 are respectively arranged opposite to the visible light transmitting laser mirror 18. The observation The system is arranged opposite to the visible light transmitting laser mirror 18 and is used to observe whether the spatiotemporal shaping femtosecond laser pulse is focused on the surface of the workpiece 21 .
白光光源17发出的白光经由可见光透射激光反射镜18与飞秒激光脉冲同轴入射并照亮工件21的表面，部分白光会被工件21表面反射，经由反射式物镜20、可见光透射激光反射镜18，进入观测系统，以便于通过光学镜头12实时观察飞秒激光脉冲是否聚焦到工件21的表面。The white light emitted by the white light source 17 is incident coaxially with the femtosecond laser pulse through the visible light transmission laser mirror 18 and illuminates the surface of the workpiece 21 . Part of the white light will be reflected by the surface of the workpiece 21 and passes through the reflective objective lens 20 and the visible light transmission laser mirror 18 , enter the observation system to observe whether the femtosecond laser pulse is focused on the surface of the workpiece 21 through the optical lens 12 in real time.
在本发明的一个实施例中，结合图1所示，所述观测系统包括光学镜头12、CCD相机13、滤光片14和衰减片15，所述衰减片15、所述滤光片14、所述CCD相机13和所述光学镜头12沿经所述可见光透射激光反射镜18反射后的白光方向排列设置。In one embodiment of the present invention, as shown in FIG. 1 , the observation system includes an optical lens 12, a CCD camera 13, a filter 14 and an attenuation plate 15. The attenuation plate 15, the filter 14, The CCD camera 13 and the optical lens 12 are arranged along the direction of the white light reflected by the visible light transmitting laser mirror 18 .
需要说明的是，部分白光会被工件21表面反射，经由反射式物镜20、可见光透射激光反射镜18，进入光学镜头12、CCD相机13、滤光片14和衰减片15。滤光片14和衰减片15用于将白光转变为CCD相机13能够识别并处理的光学信号，并通过光学镜头12实时观察飞秒激光脉冲是否聚焦到工件21表面。光学快门19用于通过或阻断飞秒激光脉冲。防止在调试激光脉冲延迟及能量比的过程中激光经由反射式物镜20到达工件21表面，从而对其产生不必要的烧蚀，以得到较好的加工结果。It should be noted that part of the white light will be reflected by the surface of the workpiece 21 , pass through the reflective objective lens 20 and the visible light transmission laser mirror 18 , and enter the optical lens 12 , CCD camera 13 , filter 14 and attenuator 15 . The filter 14 and the attenuation plate 15 are used to convert the white light into an optical signal that can be recognized and processed by the CCD camera 13, and observe whether the femtosecond laser pulse is focused on the surface of the workpiece 21 through the optical lens 12 in real time. The optical shutter 19 is used to pass or block femtosecond laser pulses. In the process of adjusting the laser pulse delay and energy ratio, it is prevented that the laser reaches the surface of the workpiece 21 through the reflective objective lens 20, thereby causing unnecessary ablation, so as to obtain better processing results.
借助衰减片15、滤光片14、CCD相机13和光学镜头12的观测，调整飞秒激光全反射镜8和可见光透射激光反射镜18的空间角度，使得飞秒激光垂直到反射式物镜20并聚焦到工件21表面。With the help of the attenuation plate 15, filter 14, CCD camera 13 and optical lens 12 for observation, adjust the spatial angle of the femtosecond laser total reflection mirror 8 and the visible light transmission laser mirror 18 so that the femtosecond laser is vertical to the reflective objective lens 20 and Focus on the surface of workpiece 21.
在本发明的一个实施例中，基于激光光束时空调制的高效刻蚀系统还包括第一调节架和第二调节架，所述第一调节架与所述飞秒激光全反射镜8连接，用于调节所述飞秒激光全反射镜8的倾角，所述第二调节架与所述可见光透射激光反射镜18连接，用于调节所述可见光透射激光反射镜18的倾角。In one embodiment of the present invention, the high-efficiency etching system based on the spatio-temporal conditioning of the laser beam also includes a first adjustment frame and a second adjustment frame. The first adjustment frame is connected to the femtosecond laser total reflection mirror 8. In order to adjust the inclination angle of the femtosecond laser total reflection mirror 8, the second adjustment frame is connected to the visible light transmitting laser reflector 18 for adjusting the inclination angle of the visible light transmitting laser reflector 18.
需要说明的是，通过第一调节架调节飞秒激光全反射镜8的倾角即空间角度，使得飞秒激光垂直到反射式物镜20并聚焦到工件21的表面；通过所述第二调节架调节所述可见光透射激光反射镜18的倾角即空间角度，使得飞秒激光垂直到反射式物镜20并聚焦到工件21的表面。It should be noted that the inclination angle, that is, the spatial angle, of the femtosecond laser total reflection mirror 8 is adjusted through the first adjustment frame, so that the femtosecond laser is perpendicular to the reflective objective lens 20 and focused on the surface of the workpiece 21; it is adjusted through the second adjustment frame. The inclination angle of the visible light transmission laser mirror 18 , that is, the spatial angle, makes the femtosecond laser perpendicular to the reflective objective lens 20 and focused on the surface of the workpiece 21 .
在本发明的一个实施例中，基于激光光束时空调制的高效刻蚀系统还包括光学快门19，所述光学快门19设置于所述可见光透射激光反射镜18与所述反射式物镜20之间处，所述光学快门19用于通过或阻断所述时空整形飞秒激光脉冲。In one embodiment of the present invention, the high-efficiency etching system based on the spatio-temporal conditioning of the laser beam also includes an optical shutter 19, which is disposed between the visible light transmitting laser mirror 18 and the reflective objective lens 20 , the optical shutter 19 is used to pass or block the spatiotemporally shaped femtosecond laser pulse.
需要说明的是，光学快门19用于通过或阻断飞秒激光脉冲。防止在调试激光脉冲延迟及能量比的过程中激光经由反射式物镜20到达工件21表面，从而对其产生不必要的烧蚀，以得到较好的加工结果。It should be noted that the optical shutter 19 is used to pass or block femtosecond laser pulses. In the process of adjusting the laser pulse delay and energy ratio, it is prevented that the laser reaches the surface of the workpiece 21 through the reflective objective lens 20, thereby causing unnecessary ablation, so as to obtain better processing results.
在本发明的一个实施例中，基于激光光束时空调制的高效刻蚀系统还包括激光光路整形系统，所述激光光路整形系统包括飞秒激光扩束镜2和二维调整架3，所述飞秒激光扩束镜2安装于所述二维调整架3上，所述飞秒激光扩束镜2与所述飞秒激光器1相对设置，用于对所述飞秒激光器1输出的所述飞秒激光光束进行扩束。In one embodiment of the present invention, the high-efficiency etching system based on the spatio-temporal conditioning of the laser beam also includes a laser optical path shaping system. The laser optical path shaping system includes a femtosecond laser beam expander 2 and a two-dimensional adjustment frame 3. The femtosecond laser beam expander 2 is installed on the two-dimensional adjustment frame 3. The femtosecond laser beam expander 2 is arranged opposite to the femtosecond laser 1 and is used to adjust the femtosecond laser beam output by the femtosecond laser 1. seconds the laser beam is expanded.
需要说明的是，飞秒激光扩束镜2与所述飞秒激光器1相对设置，以对所述飞秒激光器1输出的所述飞秒激光光束进行扩束；二维调整架3用于调整飞秒激光扩束镜2的空间位置，使得其轴线与飞秒激光光路轴线重合。It should be noted that the femtosecond laser beam expander 2 is arranged opposite to the femtosecond laser 1 to expand the femtosecond laser beam output by the femtosecond laser 1; the two-dimensional adjustment frame 3 is used for adjustment. The spatial position of the femtosecond laser beam expander 2 is such that its axis coincides with the axis of the femtosecond laser optical path.
本发明另一实施例提供一种基于激光光束时空调制的高效刻蚀方法中，Another embodiment of the present invention provides an efficient etching method based on spatio-temporal modulation of laser beam,
S1、打开飞秒激光器1，等待30-40分钟后飞秒激光器1出光稳定，将各光路元件依次按图1顺序置入光学平台，之后输出低功率飞秒激光，调整飞秒激光扩束镜2将飞秒激光器11发出的飞秒激光光束进行扩束。二维调整架3用于调整飞秒激光扩束镜2的空间位置，使得其轴线与飞秒激光光路轴线重合。飞秒半波片4和飞秒偏振分光片5用于飞秒激光准直调节，并使出射飞秒激光的偏振方向为水平。S1. Turn on the femtosecond laser 1. Wait for 30-40 minutes before the light output of the femtosecond laser 1 becomes stable. Place each optical path component on the optical platform in sequence as shown in Figure 1. Then output a low-power femtosecond laser and adjust the femtosecond laser beam expander. 2 Expand the femtosecond laser beam emitted by the femtosecond laser 11. The two-dimensional adjustment frame 3 is used to adjust the spatial position of the femtosecond laser beam expander 2 so that its axis coincides with the axis of the femtosecond laser optical path. The femtosecond half-wave plate 4 and the femtosecond polarizing beam splitter 5 are used to adjust the alignment of the femtosecond laser, and make the polarization direction of the emitted femtosecond laser horizontal.
S2、调整脉冲整形器6的脉冲延时和能量比参数，对飞秒激光进行时域整形，调节机械快门7控制时间调控时域整形后的飞秒激光通过飞秒激光全反射镜8与第一平凸透镜9入射到空间光调制器10上。S2. Adjust the pulse delay and energy ratio parameters of the pulse shaper 6 to perform time domain shaping on the femtosecond laser. Adjust the mechanical shutter 7 to control the time. The femtosecond laser after time domain shaping passes through the femtosecond laser total reflection mirror 8 and the first A plano-convex lens 9 is incident on the spatial light modulator 10 .
S3、调节空间光调制器10对飞秒激光进行空间整形，生成需要的多焦点光场。白光光源17发出的白光经由可见光透射激光反射镜18与飞秒激光脉冲同轴入射并照亮工件21表面，部分白光会被工件21表面反射，经由反射式物镜20、可见光透射激光反射镜18，进入光学镜头12、CCD相机13、滤光片14和衰减片15。滤光片14和衰减片15用于将白光转变为CCD相机13能够识别并处理的光学信号，并通过光学镜头12实时观察飞秒激光脉冲是否聚焦到工件21表面。光学快门19用于通过或阻断飞秒激光脉冲。防止在调试激光脉冲延迟及能量比的过程中激光经由反射式物镜20到达工件21表面，从而对其产生不必要的烧蚀，以得到较好的加工结果。S3, adjust the spatial light modulator 10 to perform spatial shaping on the femtosecond laser to generate the required multi-focus light field. The white light emitted by the white light source 17 is incident coaxially with the femtosecond laser pulse through the visible light transmission laser reflector 18 and illuminates the surface of the workpiece 21. Part of the white light will be reflected by the surface of the workpiece 21, and enter the optical lens 12, CCD camera 13, filter 14 and attenuation plate 15 through the reflective objective lens 20 and the visible light transmission laser reflector 18. The filter 14 and the attenuation plate 15 are used to convert the white light into an optical signal that can be recognized and processed by the CCD camera 13, and observe in real time through the optical lens 12 whether the femtosecond laser pulse is focused on the surface of the workpiece 21. The optical shutter 19 is used to pass or block the femtosecond laser pulse. Prevent the laser from reaching the surface of the workpiece 21 through the reflective objective lens 20 during the process of debugging the laser pulse delay and energy ratio, thereby causing unnecessary ablation to it, so as to obtain better processing results.
S4、借助衰减片15、滤光片14、CCD相机13和光学镜头12的观测，调整飞秒激光全反射镜8和可见光透射激光反射镜18的空间角度，使得飞秒激光垂直到反射式物镜20并聚焦到工件21的表面。S4. With the help of the attenuation plate 15, filter 14, CCD camera 13 and optical lens 12, adjust the spatial angle of the femtosecond laser total reflection mirror 8 and the visible light transmission laser mirror 18 so that the femtosecond laser is perpendicular to the reflective objective lens 20 and focus on the surface of the workpiece 21.
S5、利用设定的飞秒激光光束时空调制光场，将此飞秒激光光场聚焦到工件21的表面，同时控制机械快门7的时间与工作平台的运动，实现高质量和高精度的加工。S5. Use the set femtosecond laser beam to regulate the light field in space and time, focus the femtosecond laser light field on the surface of the workpiece 21, and simultaneously control the time of the mechanical shutter 7 and the movement of the work platform to achieve high-quality and high-precision processing. .
虽然本发明披露如上，但本发明的保护范围并非仅限于此。本领域技术人员在不脱离本发明的精神和范围的前提下，可进行各种变更与修改，这些变更与修改均将落入本发明的保护范围。Although the present invention is disclosed as above, the protection scope of the present invention is not limited thereto. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, and these changes and modifications will fall within the protection scope of the present invention.
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| CN202311871353.4ACN117754145A (en) | 2023-12-31 | 2023-12-31 | Efficient etching method based on laser beam space-time modulation |
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