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CN117470070A - High-precision reflector angle measurement equipment and measurement method - Google Patents

High-precision reflector angle measurement equipment and measurement method
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Publication number
CN117470070A
CN117470070ACN202311626827.9ACN202311626827ACN117470070ACN 117470070 ACN117470070 ACN 117470070ACN 202311626827 ACN202311626827 ACN 202311626827ACN 117470070 ACN117470070 ACN 117470070A
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CN
China
Prior art keywords
adjusting
angle
laser
measuring
bracket
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CN202311626827.9A
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Chinese (zh)
Inventor
王代宝
王宏军
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Suzhou Jiuwu Intelligent Technology Co ltd
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Suzhou Jiuwu Intelligent Technology Co ltd
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Priority to CN202311626827.9ApriorityCriticalpatent/CN117470070A/en
Publication of CN117470070ApublicationCriticalpatent/CN117470070A/en
Pendinglegal-statusCriticalCurrent

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Abstract

The invention relates to a measuring device and a measuring method for a high-precision reflector angle, comprising the following steps: objective table module, measurement target board, angle chi module and measurement arm module. The objective table module sequentially comprises an objective table, an adjusting table and an inclination angle adjusting table from top to bottom, wherein the top of the objective table is provided with a central concave point; the position adjusting table is arranged to be capable of adjusting the position of the stage at least in the horizontal direction and in the height direction; the measuring target plate is arranged perpendicular to the X direction and is provided with a 0-degree horizontal datum line extending in the Y direction; the angle ruler module comprises an angle ruler and a laser level meter; the angle ruler comprises a supporting part and a measuring part arranged on the supporting part; the supporting part is horizontally arranged, and the measuring part is provided with a circular arc-shaped fixed scale; the measuring arm module comprises a rotating bracket and a transmitting unit, and the outer side of the rotating bracket is provided with circular-arc vernier scales; when the rotating support rotates to a vertical position, the 0 line of the fixed scale corresponds to the 0 line of the vernier scale vertically. The invention has high test precision.

Description

High-precision reflector angle measurement equipment and measurement method
Technical Field
The invention relates to the technical field of laser radar component deflection angle testing, in particular to high-precision reflector angle measuring equipment and a high-precision reflector angle measuring method.
Background
With the rise of intelligent factories and unmanned operation, the application of laser radar is becoming wider and wider. Direct time of flight measurement (Direct Time of Flight, DTOF) lidar is becoming more and more widely accepted for applications such as AMR, service robots, etc., and therefore performance requirements for various aspects of the radar are becoming higher and higher. The radar emits emitted light rays at a certain angle through the reflecting mirror according to the design requirement of the radar, and actively detects a required target to finish a measurement task. Whether the angle of the mirror is at a reasonable position or not determines whether the radar can reach the test object within an effective range. In the present, the optical reflector of the important core component of the semi-solid rotating mirror laser radar or the pure mechanical laser radar needs to determine the angle of the reflector in a reasonable range so as to ensure the angle and accuracy of laser measurement.
In the prior art, the testing of the angle parameters and consistency of the reflecting mirror has great defects all the time, and the method comprises the following steps: there are two main types of tests currently available: the first category utilizes general purpose measuring devices such as: two-dimensional projection, three-dimensional ATOS (photographic three-dimensional scanner), etc.; however, the testing angles of different devices are greatly different, the consistency is poor, and the same product is measured twice, so that great deviation is caused due to inconsistent taking points. The second type is qualitative measurement, for example, a detection device for a laser radar reflector disclosed in chinese patent CN215575643U, which gives a horizontal light through a system composed of a workbench, a motor fixing seat, a motor rotating table, a detected reflector, a reflector receiving wall, a laser transmitter, a damping structure and other column components, the light is reflected to the receiving wall through the reflector, and an area is given on the reflecting wall, and whether the detected reflector meets the requirement is determined by the reflected light entering a specified area. In the test mode, a qualified area is firstly determined through a qualified sample piece, and then whether the tested piece is qualified or not is determined through an analogy mode; but it has the following problems: 1. specific angle values cannot be given, and direct measurement is not available; 2. with the change of the angle of the reflector, the closer to parallel or perpendicular test light, the required test wall is not available or infinitely long, and the analog test cannot be performed. 3. The reflector is arranged on the motor, and when the motor is arranged, the reflector is directly introduced into the judged angle during the self or installation-introduced angle test, so that the accuracy of data is directly influenced. 4. The quality of the measuring beam and the size of the measuring space directly influence the accuracy of the measurement.
Disclosure of Invention
In order to solve the above technical problems, in one aspect, the present invention provides a measurement device for a high-precision mirror angle, including:
the objective table module sequentially comprises an objective table with a central concave point at the top, a position adjusting table for adjusting the space position of the objective table and an inclination angle adjusting table for adjusting the levelness of the objective table from top to bottom; the position adjusting table is arranged to be capable of adjusting the position of the stage at least in the horizontal direction and in the height direction;
a measurement target plate provided perpendicular to the X direction and provided with a 0 DEG horizontal reference line extending in the Y direction;
the angle ruler module comprises an angle ruler and a laser level meter; the angle ruler comprises a supporting part and a measuring part arranged on the supporting part; the supporting part is horizontally arranged, the length direction of the supporting part points to the measurement target plate along the X direction, and the bottom of the supporting part is provided with a cavity structure for accommodating the objective table module from bottom to top; a horizontal slit is formed at one end of the supporting part, which is far away from the measurement target plate; the measuring part is provided with a circular arc-shaped fixed scale; the laser level meter is arranged on one side of the supporting part far away from the measurement target plate; the emission port of the laser level meter is flush with the horizontal seam;
the measuring arm module comprises a rotating bracket with the bottom end hinged with the supporting part and a transmitting unit arranged at the top end of the rotating bracket along the length direction of the rotating bracket; the rotation axis of the rotation bracket is along the Y direction and is flush with the horizontal seam; a beam channel along the length direction is arranged in the rotating bracket; the outer side of the rotating bracket is provided with circular-arc vernier scales; when the rotating support rotates to a vertical position, the 0 line of the fixed scale corresponds to the 0 line of the vernier scale vertically; the emission unit includes a laser emitter for emitting a laser beam.
In one embodiment of the invention, the rotating bracket comprises a bottom bracket, a top bracket, and an intermediate bracket connecting the bottom bracket and the top bracket;
the bottom bracket comprises a hinge seat and a first supporting plate arranged at the top end of the hinge seat, and the hinge seat is hinged with the supporting part; the first supporting plate is provided with a strip-shaped first through groove;
the middle support comprises a frame structure formed by surrounding a plurality of support side plates, and a beam channel extending along the length direction of the middle support is formed in the middle support;
the top support comprises a second support plate connected with the middle support and a plurality of adjusting side plates arranged on the side edges of the second support plate; the second supporting plate is provided with a strip-shaped second through groove, and the second through groove is mutually perpendicular to the first through groove; the laser transmitter angle is adjustably installed in the top support, can make the laser beam of laser transmitter transmission pass through the second through groove, light beam passageway and first through groove in proper order through adjusting.
In one embodiment of the invention, the measuring arm module further comprises an adjusting unit for adjusting the angle of the laser beam of the laser transmitter;
the adjusting unit comprises a lower adjusting ball connected with the laser transmitter, an upper adjusting ball which is positioned above the lower adjusting ball and connected with the laser transmitter, and an adjusting component for horizontally adjusting the position of the upper adjusting ball; the lower adjusting ball and the second supporting plate form a spherical pair.
In one embodiment of the invention, the adjusting unit further comprises a lower adjusting protective cylinder arranged at the top of the second supporting plate, a locking sleeve detachably connected with the lower adjusting protective cylinder and a locking washer arranged in the locking sleeve; the lower adjusting ball is arranged in the lower adjusting protective cylinder and forms a spherical pair with the inner wall surface of the anti-loose washer.
In one embodiment of the invention, the adjustment assembly includes an upper adjustment sleeve that covers the upper adjustment ball and at least two sets of adjustment portions; a spherical structure forming a spherical pair with the upper adjusting ball is arranged in the upper adjusting protective cylinder; the extending directions of the at least two groups of adjusting parts are intersected; the adjusting part comprises an adjusting bolt and an adjusting spring which are coaxially arranged, and the adjusting bolt and the adjusting spring are arranged at two sides of the upper adjusting casing; the adjusting bolt is in threaded connection with the adjusting side plate, and the end part of the adjusting bolt is propped against the outer wall of the upper adjusting casing; one end of the adjusting spring is connected to the inner side of the adjusting side plate, and the other end of the adjusting spring abuts against the outer wall of the upper adjusting protective cylinder.
In one embodiment of the invention, the transmitting unit further comprises a first optical filter detachably mounted on the top of the first support plate and a second optical filter detachably mounted on the bottom of the second support plate; the second optical filter and the first optical filter are oppositely arranged along the extending direction of the rotating bracket, the second optical filter is provided with a second through hole which is long-strip-shaped and is communicated with the second through groove, the first optical filter is provided with a first through hole which is long-strip-shaped and is communicated with the first through groove, and the first through hole and the second through hole are mutually perpendicular; the laser beam sequentially passes through the second through hole, the second through groove, the beam channel, the first through hole and the first through groove to be incident to the central concave point.
In one embodiment of the invention, the emission unit further comprises a light chopper connected to the bottom end of the laser emitter.
In one embodiment of the invention, the rotating bracket is in locking connection with the measuring part; the measurement target plate is also provided with a plurality of upper reference lines disposed in parallel above the 0 ° horizontal reference line and a plurality of lower reference lines disposed in parallel below the 0 ° horizontal reference line.
In one embodiment of the invention, the present application further comprises a threaded fastener for locking the rotating bracket to the measurement portion; the measuring part is provided with an arc-shaped groove, and the threaded fastener passes through the arc-shaped groove and is in threaded connection with the rotating bracket.
On the other hand, the invention provides a method for measuring the angle of the high-precision reflector, which adopts the measuring equipment in any embodiment to measure, and comprises the following steps:
starting a laser level meter, and adjusting the relative position of an angle ruler and a test target plate through laser emitted by the laser level meter to enable a horizontal seam to be level with a 0-degree horizontal datum line on the test target plate;
adjusting the dip angle adjusting table to enable the objective table to be horizontal;
rotating the measuring arm module to a vertical state, so that the 0 line on the vernier scale vertically coincides with the 0 line on the fixed scale;
starting a laser emitter, and adjusting a position adjusting table to enable the objective table to adjust the position in the horizontal direction until the laser beam emitted by the laser emitter is projected on a central concave point of the objective table;
reversely mounting the reflecting mirror to be measured on the objective table, and adjusting the position adjusting table to adjust the position of the objective table in the height direction until the laser beam of the laser transmitter and the laser beam of the laser level meter form a junction point on the plane to be measured of the reflecting mirror; closing the laser level meter;
the method comprises the steps of horizontally rotating a reflecting mirror to be measured for 180 degrees, installing the reflecting mirror to be measured on an objective table in the forward direction, reflecting a laser beam emitted by a laser emitter to a measurement target plate by the reflecting mirror to be measured, rotating a measurement arm module until the laser beam reflected by the reflecting mirror coincides with a 0-degree horizontal datum line on the measurement target plate, and reading a rotation angle a of the measurement arm module;
the angle θ=45° +a/2 of the mirror is obtained based on the read rotation angle a.
In one embodiment of the invention, when the measurement target plate is further provided with an upper reference line and a lower reference line; the measuring method further comprises the following steps:
locking the rotating bracket and the measuring part;
changing a reflector to be measured, and reading a scale value of a light spot of a laser beam reflected by the reflector projected on a measurement target plate, which is overlapped with an upper datum line, a lower datum line or a 0-degree horizontal datum line;
and replacing different reflectors to be measured and circularly executing the previous step until all the reflectors to be measured are measured.
Compared with the prior art, the technical scheme of the invention has the following advantages:
1. the embodiment can directly measure the angle value of the reflecting mirror by testing quickly without contacting the mirror surface of the reflecting mirror;
2. by the embodiment, the reflector angles of different angles can be measured at limited space positions;
3. the measurement is carried out according to the actual installation condition of the reflector, so that the angle distortion of the reflector caused by the deflection angle introduced by other components is avoided, and the measurement accuracy is further improved;
4. the embodiment is a fixed test rather than a selective test, avoids the defect caused by vibration in the rotation process, ensures consistency of comparison references, and improves measurement consistency.
Drawings
In order that the invention may be more readily understood, a more particular description of the invention will be rendered by reference to specific embodiments thereof that are illustrated in the appended drawings, in which
FIG. 1 is a schematic diagram of a high precision mirror angle measurement device;
FIG. 2 is a schematic diagram of a stage module and a mirror under test;
FIG. 3 is a top view of the stage module;
FIG. 4 is a schematic view of the structure of the measurement target plate;
FIG. 5 is a schematic view of the structure of the angle rule module;
FIG. 6 is a schematic structural view of a measurement arm module;
FIG. 7 is a schematic diagram of the structure of the angle rule module and the measuring arm module;
FIG. 8 is a schematic view of the structure of the bottom bracket;
FIG. 9 is a schematic view of another view of the bottom bracket;
FIG. 10 is a schematic view of the structure of the top bracket and the adjustment unit;
FIG. 11 is a cross-sectional view of FIG. 10;
fig. 12 is a schematic view of the connection of the adjustment unit and the second support plate;
FIG. 13 is a schematic illustration of the connection of the lower and upper adjustment balls to the laser transmitter in the adjustment unit;
fig. 14 is a schematic view of the connection of the second support plate to the lower adjustment sleeve.
Description of the specification reference numerals: 100. a substrate;
200. a stage module; 210. an objective table; 211. a central pit; 220. a tilt adjustment stage; 230. an X-direction adjusting table; 240. a Y-direction adjusting table; 250. a Z-direction adjustment stage; 260. a differentiating head;
300. measuring a target plate; 310. a 0 ° horizontal reference line; 320. an upper datum line; 330. a lower datum line;
400. an angle ruler module; 410. an angle ruler; 411. a support part; 4111. a horizontal channel; 4112. a horizontal slit; 4113. a lateral opening; 412. a measuring section; 4121. fixing the scales; 4122. an arc-shaped groove; 420. a laser level; 430. a two-dimensional level;
500. a measurement arm module; 510. a transmitting unit; 511. a laser emitter; 512. a second filter; 513. a first optical filter; 514. a light chopper; 520. rotating the bracket; 521. a beam path; 522. a vernier scale; 523. a bottom bracket; 5231. a hinge base; 5232. a first support plate; 5233. a first through groove; 524. a top bracket; 5241. a second support plate; 5242. adjusting the side plates; 5244. a second through slot; 5245. a spherical groove; 525. a middle bracket; 5251. supporting the side plates; 5252. an arc-shaped sliding block; 526. a hinge shaft; 5261. a rotator mark line; 530. an adjusting unit; 531. a lower adjusting ball; 532. an upper adjusting ball; 533. a lower adjusting protective cylinder; 534. the upper adjusting protection cylinder; 540. an anti-loose sleeve; 550. a lock washer; 560. an adjusting section; 561. an adjusting bolt; 562. an adjusting spring;
600. a threaded fastener;
700. and a reflecting mirror to be measured.
Detailed Description
The invention will be further described in connection with the accompanying drawings and specific examples which are set forth so that those skilled in the art will better understand the invention and will be able to practice it, but the examples are not intended to be limiting of the invention.
Referring to fig. 1 to 14, the invention provides a measuring apparatus for a high-precision mirror angle, comprising: a substrate 100, a stage module 200, a measurement target plate 300, an angle gauge module 400, and a measurement arm module 500. Wherein:
the substrate 100 is disposed horizontally.
The stage module 200 is disposed on the substrate 100. The stage module 200 sequentially includes a stage 210 having a central recess 211 at the top thereof, a position adjusting stage for adjusting the spatial position of the stage 210, and an inclination adjusting stage 220 for adjusting the levelness of the stage 210 from top to bottom. The position adjustment table is provided so as to be able to adjust the position of the stage 210 at least in the horizontal direction as well as in the height direction. In some embodiments, the tilt station 220 is fixed on top of the substrate 100. The position adjustment stages include an X-direction adjustment stage 230, a Y-direction adjustment stage 240, and a Z-direction adjustment stage 250. The X direction, the Y direction and the Z direction are perpendicular to each other. The X direction and the Y direction are horizontal and two mutually perpendicular directions. Specifically, the X direction is perpendicular to the measurement target plate 300 (i.e., the length direction of the angle gauge module 400). The Y direction is the width direction of the angle square module 400. The Z direction is a vertical direction perpendicular to the horizontal, i.e., the height direction of the angle square module 400. The Y-direction adjustment stage 240 is connected to the top of the tilt adjustment stage 220. The X-direction adjustment stage 230 is connected to the top of the Y-direction adjustment stage 240. The Z-direction adjustment stage 250 is connected to the top of the X-direction adjustment stage 230. Stage 210 is attached to the top of Z-stage 250. The movement of the X-direction adjustment stage 230, the Y-direction adjustment stage 240, and the Z-direction adjustment stage 250 is controlled by the respective differential heads 260. The present embodiment exemplifies a simple explanation of the position adjustment table and the adjustment stage structure. In practical application, only 3 dimensions of the objective table can be adjusted in the horizontal and vertical directions, and the level adjustment of the objective table can be realized. There are many such adjusting structures, and in this embodiment, no description will be given.
The measurement target plate 300 is disposed perpendicularly to the X direction and is provided with a 0 ° horizontal reference line 310 extending in the Y direction.
The angle scale module 400 includes an angle scale 410 and a laser level 420. The angle ruler 410 includes a supporting portion 411 and a measuring portion 412 with a fan-shaped structure disposed on the supporting portion 411, and the supporting portion 411 and the measuring portion 412 may be integrally disposed. The supporting portion 411 is horizontally disposed, the length direction of the supporting portion 411 is directed to the measurement target plate 300 along the X direction, and the bottom of the supporting portion 411 is opened from bottom to top with a cavity structure accommodating the stage module 200. One side of the support 411 is provided with a lateral opening 4113 at a position where the cavity structure is provided, so that an operator can easily insert from the lateral opening 4113 and then manually adjust the tilt adjusting stage 220 and the micro heads 260 of the X-direction adjusting stage 230, the Y-direction adjusting stage 240 and the Z-direction adjusting stage 250. The support 411 is provided with a horizontal slit 4112 at an end thereof remote from the measurement target plate 300. The support portion 411 is provided with a horizontal channel 4111 extending in the X direction and having one end opened, and the opening of the horizontal channel 4111 is directed toward the measurement target plate 300. The horizontal channel 4111 communicates with the cavity structure. Thereby reducing the material cost and the dead weight of the angle ruler to a certain extent. The measuring section 412 includes a fixed scale 4121 provided with a circular arc shape. The laser level 420 is disposed on a side of the support 411 away from the measurement target plate 300, an emission port of the laser level 420 is flush with the horizontal slit 4112, and a laser beam of the laser level 420 passes through the horizontal slit 4112 and enters the horizontal channel 4111.
The measuring arm module 500 includes a transmitting unit 510 and a rotating bracket 520. The bottom end of the rotating bracket 520 is hinged with the supporting part 411 by a hinge shaft 526, and the axis of the hinge shaft 526 extends in the Y direction and is flush with the horizontal slit 4112. The hinge shaft 526 is provided at the top of the support 411 at the position of the cavity structure. The emitting unit 510 is provided at the top end of the rotating bracket 520 along the length direction of the rotating bracket 520. The rotating bracket 520 is provided inside with a beam passage 521 extending in the length direction thereof. The outer side of the rotating bracket 520 is provided with a circular-arc vernier scale 522, and the vernier scale 522 is matched with the fixed scale 4121. When the rotary bracket 520 rotates to the vertical position, the 0 scale mark of the fixed scale 4121 vertically corresponds to the 0 scale mark of the vernier scale 522. Wherein, the scale mark of the fixed scale 4121 is an angle scale mark. The graduation marks of the vernier graduation 522 are vernier graduation marks. The emission unit 510 includes a laser emitter 511 for emitting a laser beam. The laser beam of the emission unit 510 is projected at the center concave spot 211 through the beam path 521, and the position of the stage module 200 can be adjusted by the X-direction adjustment stage 230 and the Y-direction adjustment stage 240 such that the center concave spot 211 at the center of the stage module 200 is aligned with the spot irradiated with the laser beam.
The specific steps of the method for measuring by using the measuring device in the embodiment are as follows:
the laser level 420 is activated, and the relative position of the angle ruler 410 and the test target plate is adjusted by the laser emitted by the laser level 420, so that the horizontal slit 4112 is flush with the 0-degree horizontal reference line 310 on the test target plate. Specifically, the projection of the axis of the hinge in the X direction on the measurement target plate 300 is determined to coincide with the 0 ° horizontal reference line 310; the laser beam of the laser level 420 passes through the horizontal slit 4112, the axis of articulation (i.e., the rotation body marking line 5261 marked on the articulation shaft 526, the rotation body marking line 5261 coinciding with the axis of articulation) and the 0 ° horizontal reference line 310 in this order, so that the projection of the axis of articulation onto the measurement target plate 300 in the X direction, which coincides with the 0 ° horizontal reference line 310, can be determined.
The tilt adjustment stage 220 is adjusted to level the stage 210.
The measuring arm module 500 is rotated to a vertical state such that the 0 scale mark on the vernier scale 522 vertically coincides with the 0 scale mark on the fixed scale 4121.
The laser transmitter 511 is activated and the position adjustment stage is adjusted to adjust the position of the stage 210 in the horizontal direction until the laser beam emitted by the laser transmitter 511 is projected onto the central concave spot 211 of the stage, i.e., the laser beam of the laser transmitter 511 overlaps the central concave spot 211 at the spot irradiated by the stage.
Reversely mounting the mirror to be measured on the objective table 210, and adjusting the position adjustment table to adjust the position of the objective table 210 in the height direction until the laser beam of the laser transmitter 511 and the laser beam of the laser level 420 form an intersection point on the plane to be measured of the mirror; turning off laser level 420;
the mirror to be measured is horizontally rotated by 180 degrees, the mirror to be measured is positively installed on the objective table 210, the mirror to be measured 700 reflects the laser beam emitted by the laser emitter 511 onto the measurement target plate 300, the measurement arm module 500 is rotated until the laser beam reflected by the mirror coincides with the 0-degree horizontal reference line 310 on the measurement target plate, and the rotation angle a of the measurement arm module 500 is read;
the angle θ=45+a/2 of the mirror is obtained based on the read rotation angle a.
It can be seen that this embodiment has the following advantages:
1. the embodiment can directly measure the angle value of the reflecting mirror by testing quickly without contacting the mirror surface of the reflecting mirror;
2. by the embodiment, the reflector angles of different angles can be measured at limited space positions;
3. the measurement is carried out according to the actual installation condition of the reflector, so that the angle distortion of the reflector caused by the deflection angle introduced by other components is avoided, and the measurement accuracy is further improved;
4. the embodiment is a fixed test rather than a selective test, avoids the defect caused by vibration in the rotation process, ensures consistency of comparison references, and improves measurement consistency.
Further, when the measurement target plate 300 is further provided with an upper reference line 320 and a lower reference line 330. The measurement method at this time is performed after the test step in the above embodiment as follows:
the rotating bracket 520 and the measuring part 412 are locked. The angle gauge 410 and the intermediate bracket 525 are secured, for example, by threaded fasteners 600.
Changing the mirror 700 to be measured, and reading the scale value of the laser beam reflected by the mirror projected on the spot of the measurement target plate 300 overlapping with the upper reference line 320, the lower reference line 330 or the 0 ° horizontal reference line 310; because of various factors in the batch production process, the angles of the mirrors 700 to be measured have some differences, so that the angles of the different mirrors 700 to be measured can be calculated by overlapping the light spot of the laser beam of the laser transmitter 511 projected on the measurement target plate 300 with the upper reference line 320, the lower reference line 330 or the 0 ° horizontal reference line 310 when measuring the different mirrors 700 to be measured. The specific principle is as follows: the angle of the mirror 700 to be measured can be calculated by reading the degree b on the uniformity measurement target plate 300, and the calculation formula of the degree b is as follows: b=arctan (d/l), where d is the vertical distance of the scale line (upper reference line 320, lower reference line 330, or 0 ° horizontal reference line 310) corresponding to the light spot from 0 ° horizontal reference line 310, and l is the horizontal distance of the uniformity measurement target plate 300 to the stage 210. The calculation formula of the angle θ' of the mirror 700 to be measured is: θ' =θ±b/2, where θ is the angle of the mirror in the above embodiment and b is the degree. Note that, when the scale line corresponding to the light spot is the upper reference line 320, the angle θ 'is negative, and when the scale line corresponding to the light spot is the lower reference line 330, the angle θ' is positive. The resolution of the uniformity measurement target plate 300 can be determined by the distance of the mirror 700 to be measured from the uniformity measurement target plate 300, with the greater the distance, the higher the resolution. Typically the resolution of the compliance measurement plate is higher than the fit of the vernier scale 522 and the fixed scale 4121.
And for different reflectors in the same batch, the previous steps are circularly executed by replacing different reflectors 700 to be measured until all the reflectors 700 to be measured are measured.
Therefore, the embodiment can accurately measure a plurality of reflectors with the same specification in the same batch, thereby realizing consistency measurement of the plurality of reflectors.
Further, the rotating bracket 520 includes a bottom bracket 523, a top bracket 524, and an intermediate bracket 525 connecting the bottom bracket 523 and the top bracket 524. The bottom bracket 523 includes a hinge base 5231 and a first support plate 5232 provided at a top end of the hinge base 5231, the hinge base 5231 being hinged to the support 411 through a hinge shaft 526; the first support plate 5232 is provided with a first through groove 5233 in a bar shape.
The middle bracket 525 includes a frame structure formed by surrounding a plurality of support side plates 5251, and forms a beam path 521 extending along the length direction of the middle bracket 525 inside the middle bracket 525. In some embodiments, the support side plates 5251 are two, with the two support side plates 5251 opposing such that the beam path 521 is formed therebetween. In some embodiments, an arc-shaped slider 5252 is fixed to the outer side of the support side plate 5251 near the top, and a vernier scale 522 is disposed on the arc-shaped slider 5252.
The top bracket 524 includes a second support plate 5241 and a plurality of adjustment side plates 5242. The second support plate 5241 is connected to the intermediate bracket 525, and the adjusting side plate 5242 is disposed on the side of the second support plate 5241. The second support plate 5241 is provided with a strip-shaped second through groove 5244, and the second through groove 5244 is perpendicular to the first through groove 5233. The laser transmitter 511 is angularly adjustably mounted in the top bracket 524, and is adjusted to enable the laser light emitted from the laser transmitter 511 to sequentially pass through the second through slot 5244, the beam path 521 and the first through slot 5233. The laser beam emitted by the laser emitter can be limited through the second through groove 5244 and the first through groove 5233, so that the laser beam emitted by the laser emitter 511 is ensured to irradiate the light spot on the reflecting mirror to be concentrated, and inaccurate measurement caused by overlarge light spots is avoided. Compared with the prior art, the quality of the laser beam can be improved, and the measuring precision is improved.
Further, the measuring arm module 500 further includes an adjusting unit 530 for adjusting the angle of the laser beam of the laser transmitter 511. The adjusting unit 530 includes a lower adjusting ball 531, an upper adjusting ball 532, and an adjusting assembly. The lower adjustment ball 531 is connected to the laser transmitter 511, and the upper adjustment ball 532 is located above the lower adjustment ball 531 and is connected to the laser transmitter 511. The adjustment assembly is used to adjust the position of the upper adjustment ball 532. The lower adjusting ball 531 and the second support plate 5241 constitute a spherical pair. Specifically, the present embodiment can realize adjustment of the light emitting angle of the laser emitter 511 by the adjustment component, so as to ensure that the laser beam of the laser emitter 511 can pass through the second through slot 5244 and the first through slot 5233 to be incident on the central concave point 211.
Further, the adjusting unit 530 further includes a lower adjusting cage 533, a locking sleeve 540, and a locking washer 550. The lower adjusting casing 533 is arranged at the top of the second supporting plate 5241, the locking sleeve 540 is detachably connected with the lower adjusting casing 533, and the locking washer 550 is arranged in the locking sleeve 540. The lower adjusting casing 533 has a spherical structure inside, the second support plate 5241 has a spherical groove 5245, the lower adjusting ball 531 is disposed in the lower adjusting casing 533, and the spherical structure of the lower adjusting ball 531 and the lower adjusting casing 533 and the spherical groove 5245 form a spherical pair. The lock washer 550 has a spherical structure forming a spherical pair with the lower adjusting ball 531, and the lower adjusting ball 531 forms a spherical pair with an inner wall surface of the lock washer 550. The first through groove 5233 communicates with the spherical groove 5245. Upper adjustment ball 532 rotates in upper adjustment sleeve 534; the lower adjusting ball 531 rotates in the spherical groove 5245 at the top of the second support plate 5241. In some embodiments, the lock washer 550 is made of PA material, and has a certain lubrication effect. Specifically, the locking sleeve 540 and the locking washer 550 of the present embodiment play a loosening role, and avoid the influence of the shaking of the laser transmitter 511 on the measurement result in the measurement process, thereby further improving the measurement accuracy of the present application.
Further, the adjustment assembly includes an upper adjustment sleeve 534 that covers the upper adjustment ball 532 and at least two sets of adjustment portions 560. The upper adjustment cage 534 has a spherical structure inside, which forms a spherical pair with the upper adjustment ball 532. The extending directions of at least two sets of adjusting portions 560 intersect. Thus, at least two sets of adjustment portions 560 are capable of adjusting the horizontal coordinate position of upper adjustment sleeve 534 in combination from at least two directions. The adjusting portion 560 includes an adjusting bolt 561 and an adjusting spring 562 coaxially disposed. The adjusting bolts 561 and the adjusting springs 562 are disposed at both sides of the upper adjusting casing 534; the adjustment bolt 561 is screwed with the adjustment side plate 5242 and the end abuts against the outer wall of the upper adjustment casing 534. For example, the adjustment side plate 5242 is provided with a screw hole in which the adjustment bolt 561 is screwed. One end of the adjusting spring 562 is connected to the inner side of the adjusting side plate 5242, and the other end of the adjusting spring 562 abuts against the outer wall of the upper adjusting casing 534. Specifically, the light emitting angle of the laser transmitter 511 is adjusted by adjusting the adjustment bolt 561 on the bracket and the opposite adjustment spring 562 to make the light spot of the laser transmitter 511 pass through the second filter 512 and the first filter 513 completely.
Further, the transmitting unit 510 further includes a second filter 512 and a first filter 513. The second filter 512 is detachably mounted to the bottom of the second support plate 5241, and the first filter 513 is detachably mounted to the top of the first support plate 5232. The second filter 512 and the first filter 513 are disposed opposite to each other in the extending direction (i.e., Z direction) of the rotating bracket 520. The second filter 512 is provided with a second through hole having a long shape and communicating with the second through groove 5244, and the first filter 513 is provided with a first through hole having a long shape and communicating with the first through groove 5233. The second through hole and the first through hole are mutually perpendicular, and the hole width of the second through hole is the same as that of the first through hole and is D. The laser beam sequentially passes through the second through hole, the second through groove 5244 beam channel 521, the first through hole and the first through groove 5233 to be incident on the central concave point 211. In some embodiments, the second through hole is the same shape and direction of extension as the second through slot 5244, and the first through hole is the same shape and direction of extension as the first through slot 5233. Preferably, the hole width of the second through hole and/or the first through hole is smaller than or equal to the groove width of the second through groove 5244 and/or the first through groove 5233.
In practical applications, the spot size is further controlled by replacing the matched first and second filters.
The hole widths of the second through holes and the first through holes are set to D, and the length L of the intermediate bracket 525. The laser beam reaches the object to be measured with a ray deflection angle gamma of: γ=arctan (D/L). Where D is the hole width of the second through hole and the first through hole, and L is the vertical distance from the first optical filter 513 to the hinge point of the bottom bracket 523. In this embodiment, when D is 0.5mm and l is 500mm, the light deflection angle γ is approximately 0.001 °, so that it can be seen that the light deflection angle γ of the present application is small, so that the measurement accuracy is high. Therefore, the second filter 512 and the first filter 513 provided in this embodiment can perform a filtering function, and control the beam quality according to the test requirement, so that higher accuracy can be measured in a smaller space.
Further, the emitting unit 510 further includes a light chopper 514, and the light chopper 514 is connected to the bottom end of the laser emitter 511. Specifically, since the spot from laser transmitter 511 is of a larger energy, the spot is larger. The light beam is intercepted to an ideal size by the light interceptor 514 of the embodiment, and only the part with higher intermediate energy is reserved, so that the test effect is better.
Further, the rotating bracket 520 is in locking connection with the measuring part 412. The measurement target plate 300 is also provided with a plurality of upper reference lines 320 disposed in parallel above the 0 ° horizontal reference line 310 and a plurality of lower reference lines 330 disposed in parallel below the 0 ° horizontal reference line 310. In some embodiments, the plurality of upper fiducial lines 320 are equally spaced apart and the plurality of lower fiducial lines 330 are equally spaced apart.
The present application also includes a threaded fastener 600 for locking the rotating bracket 520 to the measurement portion 412; the measuring portion 412 has an arcuate slot 4122 therein and the threaded fastener 600 is threaded through the arcuate slot 4122 to the intermediate bracket 525 of the rotating bracket 520. Specifically, the threaded fastener 600 in this embodiment can lock the arrangement of the rotating bracket 520 and the measuring part 412, and the upper reference line 320 and the lower reference line 330, so that the subsequent batch test of the mirror 700 to be tested is facilitated.
Further, the angle square module 400 further includes a high two-dimensional level 430 provided on the supporting portion 411. When the angle gauge 410 is installed, the high two-dimensional level 430 provides a horizontal digital display, and the horizontal installation condition of the angle gauge 410 is adjusted according to the display.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations and modifications of the present invention will be apparent to those of ordinary skill in the art in light of the foregoing description. It is not necessary here nor is it exhaustive of all embodiments. And obvious changes and modifications which are extended therefrom are still within the scope of the invention.

Claims (10)

the angle ruler module comprises an angle ruler and a laser level meter; the angle ruler comprises a supporting part and a measuring part arranged on the supporting part; the supporting part is horizontally arranged, the length direction of the supporting part points to the measurement target plate along the X direction, and the bottom of the supporting part is provided with a cavity structure for accommodating the objective table module from bottom to top; a horizontal slit is formed at one end of the supporting part, which is far away from the measurement target plate; the measuring part is provided with a circular arc-shaped fixed scale; the laser level meter is arranged on one side of the supporting part far away from the measurement target plate; the emission port of the laser level meter is flush with the horizontal seam;
5. The high precision mirror angle measurement apparatus of claim 4, wherein: the adjusting assembly comprises an upper adjusting protective cylinder covered on the upper adjusting ball and at least two groups of adjusting parts; a spherical structure forming a spherical pair with the upper adjusting ball is arranged in the upper adjusting protective cylinder; the extending directions of at least two groups of the adjusting parts are intersected; the adjusting part comprises an adjusting bolt and an adjusting spring which are coaxially arranged, and the adjusting bolt and the adjusting spring are arranged on two sides of the upper adjusting casing; the adjusting bolt is in threaded connection with the adjusting side plate, and the end part of the adjusting bolt abuts against the outer wall of the upper adjusting casing; one end of the adjusting spring is connected to the inner side of the adjusting side plate, and the other end of the adjusting spring abuts against the outer wall of the upper adjusting casing.
6. The high precision mirror angle measurement device of claim 2, wherein: the emitting unit further comprises a first optical filter detachably mounted on the top of the first supporting plate and a second optical filter detachably mounted on the bottom of the second supporting plate; the second optical filter and the first optical filter are oppositely arranged along the extending direction of the rotating bracket, the second optical filter is provided with a second through hole which is long-strip-shaped and is communicated with the second through groove, the first optical filter is provided with a first through hole which is long-strip-shaped and is communicated with the first through groove, and the first through hole and the second through hole are mutually perpendicular; the laser beam sequentially passes through the second through hole, the second through groove, the beam channel, the first through hole and the first through groove to be incident to the central concave point.
CN202311626827.9A2023-11-302023-11-30High-precision reflector angle measurement equipment and measurement methodPendingCN117470070A (en)

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CN202311626827.9ACN117470070A (en)2023-11-302023-11-30High-precision reflector angle measurement equipment and measurement method

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Application NumberPriority DateFiling DateTitle
CN202311626827.9ACN117470070A (en)2023-11-302023-11-30High-precision reflector angle measurement equipment and measurement method

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
CN118346948A (en)*2024-05-212024-07-16深圳市华怡丰科技有限公司Laser adjusting mechanism
CN120028015A (en)*2025-04-232025-05-23长春通视光电技术股份有限公司 An in-situ measurement device for vibration and thermal coupling of a reflector and a method of use thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
CN118346948A (en)*2024-05-212024-07-16深圳市华怡丰科技有限公司Laser adjusting mechanism
CN120028015A (en)*2025-04-232025-05-23长春通视光电技术股份有限公司 An in-situ measurement device for vibration and thermal coupling of a reflector and a method of use thereof

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