技术领域Technical field
本申请涉及镀膜技术领域，具体而言，涉及一种镀膜挡板及卷绕镀膜装置。The present application relates to the field of coating technology, specifically, to a coating baffle and a rolling coating device.
背景技术Background technique
在蒸发镀膜装置、磁控溅射镀膜装置等卷绕镀膜装置中，为了能够有效对基材幅宽的两端进行的保护，避免溅射的粒子沉积至卷绕镀膜装置的冷却主辊，使冷却主辊受到污染。以及，在基材走膜的时候，基材幅宽的两端与冷却主辊上沉积的金属粒子接触，进而导致基材断膜。设置了用于防止冷却主锟受污染的镀膜挡板，镀膜挡板为弧形板状结构。冷却主辊包括走膜部和非走膜部，非走膜部位于冷却主锟轴线方向的两端，走膜部位于两端的非走膜部之间，走膜部为冷却主辊包覆有基材的部分，非走膜部为冷却主辊未包覆基材的部分。镀膜挡板不接触地包覆于冷却主辊的非走膜部的表面，并且镀膜挡板可以沿着冷却主辊的轴线方向进行移动，即可以达到调控基材的有效镀膜宽度，同时避免冷却主辊被镀层污染。In roll coating devices such as evaporation coating devices and magnetron sputtering coating devices, in order to effectively protect both ends of the substrate width and prevent sputtered particles from depositing on the cooling main roller of the roll coating device, the The main cooling roller is contaminated. Also, when the substrate is being filmed, both ends of the substrate width come into contact with the metal particles deposited on the cooling main roller, causing the substrate to break. A coated baffle is installed to prevent the main cooling roller from being contaminated. The coated baffle is an arc-shaped plate structure. The cooling main roller includes a film-running part and a non-film-running part. The non-film-running part is located at both ends of the cooling main roller in the axial direction. The film-running part is located between the non-film-running parts at both ends. The film-running part is the cooling main roller covered with The non-film-running part of the base material is the part of the cooling main roller that does not cover the base material. The coating baffle is non-contactly covered on the surface of the non-film-running part of the cooling main roller, and the coating baffle can move along the axis of the cooling main roller, that is, the effective coating width of the substrate can be controlled while avoiding cooling The main roller is contaminated with coating.
因为蒸发镀膜装置或磁控溅射镀膜装置镀膜时，都是在真空环境进行的，无论是蒸发镀膜还是磁控溅射镀膜，该真空环境内的温度都很高。因此，镀膜挡板是一个整体部件，内部有相应的冷却流道，冷却流道通常是在镀膜挡板内部设置的冷却腔室或冷却管路。在冷却腔室或冷却管路通入冷却介质，以便及时将溅射或热蒸发辐射照射在镀膜挡板上的热量导走，保持镀膜挡板的长时间的低温状态，实现挡板的冷却。Because the evaporation coating device or the magnetron sputtering coating device performs coating in a vacuum environment, the temperature in the vacuum environment is very high whether it is evaporation coating or magnetron sputtering coating. Therefore, the coated baffle is an integral component with corresponding cooling channels inside. The cooling channels are usually cooling chambers or cooling pipes set inside the coated baffle. The cooling medium is introduced into the cooling chamber or cooling pipeline to promptly conduct away the heat from sputtering or thermal evaporation radiation irradiated on the coating baffle, maintain the long-term low temperature state of the coating baffle, and achieve cooling of the baffle.
为了防止基材被过度烘烤断膜或者冷却主辊被污染，造成冷却主辊积累的镀层引发基材断膜的情况发生，一般会将镀膜挡板挡住基材边缘段(通常，边缘段沿冷却主锟轴线方向的距离为2cm至5cm)。由此，如利用磁控溅射镀膜装置对基材进行镀膜处理时，基材需要被溅射金属粒子的中间段和边缘段之间会产生较大的温差，这样的结果会造成基材在中间段和边缘段的边界上形成受热的突变现象，这样的现象即可观察到基材出现受热侧(边界处被溅射金属粒子的一侧)的软化松弛变形及未烘烤侧(边界处被挡板挡住的一侧)的原始未变形状态。受热侧和未烘烤侧的传动走膜过程的表现是不一样的，最终可以观察到基于这个边界的变形而形成的基材的扭曲，同步形成镀膜过程中传动贴合辊系不良，收卷质量不良，边部容易出现鼓筋的不良缺陷。其结果必然会造成基材镀膜制程的断膜或降低了有效幅宽切裁率。In order to prevent the substrate from being over-baked and film-breaking or the cooling main roller being contaminated, causing the coating accumulated on the cooling main roller to cause film-breaking of the substrate, a coating baffle is generally used to block the edge section of the substrate (usually, along the edge section) The distance in the axis direction of the main cooling roller is 2cm to 5cm). Therefore, when a magnetron sputtering coating device is used to coat a substrate, a large temperature difference will occur between the middle section and the edge section of the substrate where metal particles need to be sputtered. This will cause the substrate to A sudden change in heating is formed on the boundary between the middle section and the edge section. This phenomenon can be observed in the softening, relaxation and deformation of the heated side of the substrate (the side where the metal particles are sputtered at the boundary) and the unbaked side (the boundary). The original undeformed state of the side blocked by the baffle). The performance of the transmission coating process on the heated side and the unbaked side is different. In the end, it can be observed that the distortion of the substrate based on the deformation of this boundary is observed. During the simultaneous formation of the coating process, the transmission lamination roller system is poor and the winding is The quality is poor, and defects such as ribs are prone to appear on the edges. The result will inevitably cause film breakage in the substrate coating process or reduce the effective width cutting rate.
可见，目前卷绕镀膜装置中，镀膜挡板会使基材的中间段和边缘段之间产生较大的温差，造成基材的明显变形。It can be seen that in the current winding coating device, the coating baffle will cause a large temperature difference between the middle section and the edge section of the substrate, causing obvious deformation of the substrate.
发明内容Contents of the invention
本申请的主要目的在于提供一种镀膜挡板及卷绕镀膜装置，以解决镀膜挡板会使基材的中间段和边缘段之间产生较大的温差，造成基材的明显变形的问题。The main purpose of this application is to provide a coating baffle and a roll coating device to solve the problem that the coating baffle will cause a large temperature difference between the middle section and the edge section of the substrate, causing obvious deformation of the substrate.
根据本申请的一个方面，提供了一种镀膜挡板，包括：According to one aspect of the present application, a coating baffle is provided, including:
主体，所述主体包括冷却部和与所述冷却部邻接的加热部，所述冷却部上设置有冷却流道；A main body, the main body includes a cooling part and a heating part adjacent to the cooling part, and a cooling flow channel is provided on the cooling part;
其中，所述冷却部至少用于覆盖卷绕镀膜装置的主辊的非走膜部，所述加热部至少用于覆盖所述主辊的走膜部的边缘，所述边缘为所述走膜部沿第一方向的边缘。Wherein, the cooling part is used to cover at least the non-film-running part of the main roller of the winding coating device, and the heating part is at least used to cover the edge of the film-running part of the main roller, and the edge is the film-running part. edge along the first direction.
进一步地，所述冷却部和所述加热部两者至少之一沿第一方向往复移动，以调节所述冷却部和所述加热部之间的接触面积。Further, at least one of the cooling part and the heating part reciprocates along the first direction to adjust the contact area between the cooling part and the heating part.
进一步地，所述冷却部靠近所述加热部的一侧间隔设置有多个第一接触段，所述加热部靠近所述冷却部的一侧间隔设置有多个第二接触段，所述第一接触段和所述第二接触段两者至少之一沿第二方向往复移动，以调节所述第一接触段和所述第二接触段之间的接触面积。Further, a plurality of first contact segments are provided at intervals on a side of the cooling part close to the heating part, and a plurality of second contact segments are provided at intervals on a side of the heating part close to the cooling part. At least one of a contact segment and the second contact segment moves back and forth along the second direction to adjust the contact area between the first contact segment and the second contact segment.
进一步地，所述主体还包括：Further, the subject also includes:
覆盖板，所述覆盖板覆盖设置于所述第一接触段和所述第二接触段两者至少之一上。A covering plate is provided to cover at least one of the first contact section and the second contact section.
进一步地，所述加热部包括固定板和加热板，所述固定板与所述冷却部邻接，所述加热板固定设置于所述固定板面向所述走膜部的一侧。Further, the heating part includes a fixed plate and a heating plate, the fixed plate is adjacent to the cooling part, and the heating plate is fixedly disposed on a side of the fixed plate facing the film running part.
进一步地，所述加热部还包括：Further, the heating part also includes:
卡槽，所述卡槽固定设置于所述固定板面向所述走膜部的一侧，所述卡槽的形状与所述加热板相适配，所述加热板固定设置于所述卡槽内。The clamping slot is fixedly arranged on the side of the fixing plate facing the film running part. The shape of the clamping slot matches the heating plate. The heating plate is fixedly arranged on the clamping slot. Inside.
进一步地，所述主体还包括：Further, the subject also includes:
第一隔热件，所述第一隔热件设置于所述卡槽的侧壁与所述固定板之间。A first heat insulating member is provided between the side wall of the slot and the fixing plate.
进一步地，所述加热板包括电阻加热板。Further, the heating plate includes a resistance heating plate.
进一步地，所述电阻加热板的宽度沿远离所述冷却部的方向逐渐增大，所述电阻加热板的宽度为所述电阻加热板沿第三方向的宽度。Further, the width of the resistance heating plate gradually increases in a direction away from the cooling part, and the width of the resistance heating plate is the width of the resistance heating plate along the third direction.
进一步地，所述加热部包括耐高温板体，所述耐高温板体的耐温范围位于150℃至300℃之间。Further, the heating part includes a high-temperature-resistant plate body, and the temperature-resistant range of the high-temperature resistant plate body is between 150°C and 300°C.
进一步地，所述主体还包括第二隔热件，所述第二隔热件设置于所述冷却部和所述加热部之间。Further, the main body further includes a second heat insulating member, and the second heat insulating member is disposed between the cooling part and the heating part.
进一步地，所述第二隔热件包括：Further, the second thermal insulation member includes:
第三板体，所述第三板体设置于所述冷却部和所述加热部之间，且所述第三板体的热导率小于所述冷却部的热导率和所述加热部的热导率两者之一。A third plate body, the third plate body is disposed between the cooling part and the heating part, and the thermal conductivity of the third plate body is smaller than the thermal conductivity of the cooling part and the heating part The thermal conductivity of one of the two.
进一步地，所述冷却部和所述第三板体两者至少之一沿第一方向往复移动，以调节所述冷却部和所述第三板体之间的接触面积；和/或，所述加热部和所述第三板体两者至少之一沿所述第一方向往复移动，以调节所述加热部和所述第三板体之间的接触面积。Further, at least one of the cooling part and the third plate body moves back and forth along the first direction to adjust the contact area between the cooling part and the third plate body; and/or, the At least one of the heating part and the third plate body moves back and forth along the first direction to adjust the contact area between the heating part and the third plate body.
进一步地，所述冷却部的板体类型包括铝板、铜板、不锈钢板、铝铜合金板中的至少一种，所述加热部的板体类型包括铝板、铜板、不锈钢板、铝铜合金板中的至少一种，且所述冷却部的板体类型和所述加热部的板体类型相同或不同。Further, the plate type of the cooling part includes at least one of aluminum plate, copper plate, stainless steel plate, and aluminum-copper alloy plate, and the plate type of the heating part includes at least one of aluminum plate, copper plate, stainless steel plate, and aluminum-copper alloy plate. At least one type of plate body of the cooling part and the plate body type of the heating part are the same or different.
进一步地，所述冷却部的板体类型包括所述铝板和/或所述铜板，所述加热部的板体类型包括所述铝板和/或所述铜板，所述第三板体包括铂板、铁板、钢板、锡板、铅板至少之一。Further, the plate body type of the cooling part includes the aluminum plate and/or the copper plate, the plate body type of the heating part includes the aluminum plate and/or the copper plate, and the third plate body includes a platinum plate. , iron plate, steel plate, tin plate, lead plate at least one.
进一步地，所述加热部的宽度沿所述第二方向逐渐减小，所述加热部的宽度为所述加热部沿所述第一方向的宽度。Further, the width of the heating part gradually decreases along the second direction, and the width of the heating part is the width of the heating part along the first direction.
进一步地，所述加热部沿所述第二方向具有第一端和第二端，所述第一端的宽度和所述第二端的宽度之差的绝对值不小于0cm且不大于1.5cm。Further, the heating part has a first end and a second end along the second direction, and the absolute value of the difference between the width of the first end and the width of the second end is not less than 0 cm and not more than 1.5 cm.
另一方面，本申请还提供了一种卷绕镀膜装置，所述卷绕镀膜装置设置有所述的镀膜挡板。On the other hand, the present application also provides a roll coating device, which is provided with the coating baffle.
本申请提供的镀膜挡板由冷却部和加热部邻接构成，其中，加热部能够作为热源产生热量对传送至卷绕镀膜装置走膜部的基材的边缘段进行烘烤，来降低基材的中间段和边缘段之间的温差。且由于加热部产生的热量不会快速通过邻接的冷却部导走，使得加热部和冷却部能够在彼此之间的邻接边界位置形成一定的热阻效应。在热阻效应下，加热部产生的加热温度将会持续升高，温度升高后的加热部作为热源对基材的边缘段进行烘烤后，能确保基材中间段和边缘段的受热是相对均匀或缓变的，从而避免基材产生变形。The coating baffle provided by this application is composed of an adjacent cooling part and a heating part. The heating part can be used as a heat source to generate heat to bake the edge section of the substrate transferred to the film running part of the roll coating device, thereby reducing the The temperature difference between the middle section and the edge section. And because the heat generated by the heating part will not be quickly conducted through the adjacent cooling part, the heating part and the cooling part can form a certain thermal resistance effect at the adjacent boundary between each other. Under the thermal resistance effect, the heating temperature generated by the heating part will continue to rise. After the temperature rise, the heating part is used as a heat source to bake the edge section of the substrate, which can ensure that the middle section and edge section of the substrate are heated. Relatively uniform or slowly changing to avoid deformation of the substrate.
附图说明Description of drawings
此处所说明的附图用来提供对本申请的进一步理解，构成本申请的一部分，本申请的示意性实施例及其说明用于解释本申请，并不构成对本申请的不当限定。在附图中：The drawings described here are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation of the present application. In the attached picture:
图1为卷绕镀膜装置的结构示意图；Figure 1 is a schematic structural diagram of the roll coating device;
图2为卷绕镀膜装置的主锟的主视图；Figure 2 is a front view of the main roller of the roll coating device;
图3为主锟上包覆的基材的结构示意图；Figure 3 is a schematic structural diagram of the base material coated on the main roller;
图4为本发明一实施例提供的设置于卷绕镀膜装置的镀膜挡板的结构示意图；Figure 4 is a schematic structural diagram of a coating baffle provided in a roll coating device according to an embodiment of the present invention;
图5为本发明一实施例提供的镀膜挡板的冷却部设置第一接触段、加热部设置第二接触段时的结构示意图；Figure 5 is a schematic structural diagram of a coating baffle provided by an embodiment of the present invention when the cooling part is provided with a first contact section and the heating part is provided with a second contact section;
图6为图5中调整冷却部和加热部之间的接触面积的示意图；Figure 6 is a schematic diagram of adjusting the contact area between the cooling part and the heating part in Figure 5;
图7为图5所示的镀膜挡板设置于主锟上的示意图；Figure 7 is a schematic diagram of the coating baffle shown in Figure 5 being arranged on the main roller;
图8为本发明一实施例提供的镀膜挡板设置有覆盖版时的结构示意图；Figure 8 is a schematic structural diagram of a coating baffle provided with a covering plate according to an embodiment of the present invention;
图9为图8中冷却部、加热部以及覆盖版之间的位置关系示意图；Figure 9 is a schematic diagram of the positional relationship between the cooling part, the heating part and the covering plate in Figure 8;
图10为本发明一实施例提供的加热部的宽度沿第二方向逐渐减小的示意图；Figure 10 is a schematic diagram showing the width of the heating portion gradually decreasing along the second direction according to an embodiment of the present invention;
图11为基材受图10中的加热部烘烤时的示意图；Figure 11 is a schematic diagram when the base material is baked by the heating part in Figure 10;
图12为加热部设置加热板时的结构示意图；Figure 12 is a schematic structural diagram when the heating part is equipped with a heating plate;
图13为加热部中设置第一隔热件时的结构示意图；Figure 13 is a schematic structural diagram when the first heat insulating member is installed in the heating part;
图14为图13中A部分的放大示意图；Figure 14 is an enlarged schematic diagram of part A in Figure 13;
图15为加热部中电阻加热板的结构示意图；Figure 15 is a schematic structural diagram of the resistance heating plate in the heating part;
图16为冷却部和加热部之间设置有第三板体的结构示意图。Figure 16 is a schematic structural diagram of a third plate disposed between the cooling part and the heating part.
其中，上述附图包括以下附图标记：Among them, the above-mentioned drawings include the following reference signs:
00、卷绕镀膜装置；01、主锟；011、走膜部；012、非走膜部；02、横梁；03、滑轨；04、蒸发机构；05、放卷锟；06、过锟；07、收卷锟；10、镀膜挡板；11、冷却部；111、第一接触段；12、加热部；120、固定板；121、第二接触段；122、第一端；123、第二端；13、第三板体；14、覆盖板；15、第一隔热件；16、锁紧机构；17、加热板；171、电阻加热板；18、卡槽；20、基材；21、中间段；22、边缘段；23、过渡段。00. Winding coating device; 01. Main roller; 011. Film transporting part; 012. Non-film transporting part; 02. Cross beam; 03. Slide rail; 04. Evaporation mechanism; 05. Unwinding roller; 06. Passing roller; 07. Winding roller; 10. Coating baffle; 11. Cooling part; 111. First contact section; 12. Heating part; 120. Fixed plate; 121. Second contact section; 122. First end; 123. No. Two ends; 13. Third plate body; 14. Covering plate; 15. First insulation piece; 16. Locking mechanism; 17. Heating plate; 171. Resistance heating plate; 18. Card slot; 20. Base material; 21. Middle section; 22. Edge section; 23. Transition section.
具体实施方式Detailed ways
需要说明的是，在不冲突的情况下，本申请中的实施例及实施例中的特征可以相互组合。下面将参考附图并结合实施例来详细说明本申请。It should be noted that, as long as there is no conflict, the embodiments and features in the embodiments of this application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and embodiments.
需要注意的是，这里所使用的术语仅是为了描述具体实施方式，而非意图限制根据本申请的示例性实施方式。如在这里所使用的，除非上下文另外明确指出，否则单数形式也意图包括复数形式，此外，还应当理解的是，当在本说明书中使用术语“包含”和/或“包括”时，其指明存在特征、步骤、操作、器件、组件和/或它们的组合。It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, the singular forms are also intended to include the plural forms unless the context clearly indicates otherwise. Furthermore, it will be understood that when the terms "comprises" and/or "includes" are used in this specification, they indicate There are features, steps, operations, means, components and/or combinations thereof.
除非另外具体说明，否则在这些实施例中阐述的部件和步骤的相对布置、数字表达式和数值不限制本申请的范围。同时，应当明白，为了便于描述，附图中所示出的各个部分的尺寸并不是按照实际的比例关系绘制的。对于相关领域普通技术人员已知的技术、方法和设备可能不作详细讨论，但在适当情况下，技术、方法和设备应当被视为授权说明书的一部分。在这里示出和讨论的所有示例中，任何具体值应被解释为仅仅是示例性的，而不是作为限制。因此，示例性实施例的其它示例可以具有不同的值。应注意到：相似的标号和字母在下面的附图中表示类似项，因此，一旦某一项在一个附图中被定义，则在随后的附图中不需要对其进行进一步讨论。The relative arrangement of components and steps, numerical expressions, and numerical values set forth in these examples do not limit the scope of the application unless specifically stated otherwise. At the same time, it should be understood that, for convenience of description, the dimensions of various parts shown in the drawings are not drawn according to actual proportional relationships. Techniques, methods and equipment known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the techniques, methods and equipment should be considered part of the authorized specification. In all examples shown and discussed herein, any specific values are to be construed as illustrative only and not as limiting. Accordingly, other examples of the exemplary embodiments may have different values. It should be noted that similar reference numerals and letters refer to similar items in the following figures, so that once an item is defined in one figure, it does not need further discussion in subsequent figures.
如图1所示，卷绕镀膜装置00为蒸发镀膜装置时，蒸发镀膜装置包括主锟01、横梁02、滑轨03、蒸发机构04、放卷锟05、过锟06、收卷锟07等。如图2所示，主锟01包括走膜部011和非走膜部012。位于主锟01外表面的横梁02上设置有用于连接镀膜挡板10的滑轨03，镀膜挡板10通过滑轨03可移动地连接包覆于主锟01外表面。卷绕镀膜装置00的冷却主锟01两端设置有镀膜挡板10，镀膜挡板10是一块设置有冷却流道的一体成型的弧形板状结构。由于该镀膜挡板10除了需要保护主锟01两端非走膜部012不受镀膜材料的污染，还需对基材20的边缘段22(如图3所示，基材20的边缘段22位于其中间段21两端)进行遮挡，本发明的发明人经过深入研究发现，在卷绕镀膜装置00对基材20进行镀膜处理的过程中，一体成型结构的镀膜挡板10由于在冷却流道内通入了冷却介质而长时间处于低温状态，这将会使基材20的中间段21和边缘段22之间产生较大的温差，从而造成基材20明显变形。As shown in Figure 1, when the winding coating device 00 is an evaporation coating device, the evaporation coating device includes a main roller 01, a beam 02, a slide rail 03, an evaporation mechanism 04, an unwinding roller 05, a passing roller 06, a winding roller 07, etc. . As shown in FIG. 2 , the main roller 01 includes a film-transmitting part 011 and a non-film-transmitting part 012 . The crossbeam 02 located on the outer surface of the main roller 01 is provided with a slide rail 03 for connecting the coating baffle 10. The coating baffle 10 is movably connected and covered on the outer surface of the main roller 01 through the slide rail 03. Coating baffles 10 are provided at both ends of the cooling main roller 01 of the winding coating device 00. The coating baffle 10 is an integrally formed arc-shaped plate structure provided with cooling channels. Since the coating baffle 10 not only needs to protect the non-film-running parts 012 at both ends of the main roller 01 from being polluted by the coating material, it also needs to protect the edge section 22 of the base material 20 (as shown in FIG. 3 , the edge section 22 of the base material 20 located at both ends of the middle section 21) for shielding. After in-depth research, the inventor of the present invention found that during the coating process of the substrate 20 by the winding coating device 00, the coating baffle 10 of the integrally formed structure is blocked by the cooling flow. If the cooling medium is introduced into the channel and remains in a low temperature state for a long time, a large temperature difference will occur between the middle section 21 and the edge section 22 of the base material 20, resulting in obvious deformation of the base material 20.
鉴于上述问题，本发明第一个实施例提供了一种镀膜挡板10，如图4所示，该镀膜挡板10包括主体，主体包括冷却部11和与冷却部11邻接的加热部12，冷却部11上设置有冷却流道。其中，冷却部11至少用于卷绕镀膜装置00的冷却主辊01的非走膜部012，加热部12至少用于覆盖主辊01的走膜部011的边缘，边缘为走膜部011沿第一方向的边缘，第一方向(如图4所示的箭头A指示的移动方向)为主锟01的轴线方向。冷却部11和加热部12构成的主体整体呈与主锟01外表面相适配的弧形板状结构。本发明实施例中的加热部12作为热源对基材进行加热的方式包括被动加热和主动加热方式，被动加热时，加热部12可通过接收的高温镀膜粒子产生的热量来对基材20进行加热，主动加热时，加热部12自身产生热量实现对基材20的加热即可。由于加热部12覆盖于走膜部011的边缘，在走膜部011传送基材20时，加热部12即能实现对基材20的边缘段22的遮挡。未设置冷却流道的加热部12和冷却部11在彼此之间的邻接边界位置形成一定的热阻效应，加热部12吸收的热量不会快速通过邻接边界位置导走。加热部12自身温度持续升高成为热源来对基材20边缘段22进行烘烤，使得基材20边缘段22和中间段21之间产生的温差较小，从而避免基材20产生变形、断膜、出现鼓筋等缺陷。确保基材20的传动效率和收卷质量，提高基材20的有效幅宽切裁率。In view of the above problems, a first embodiment of the present invention provides a coating baffle 10. As shown in Figure 4, the coating baffle 10 includes a main body, and the main body includes a cooling part 11 and a heating part 12 adjacent to the cooling part 11. The cooling part 11 is provided with cooling flow channels. Among them, the cooling part 11 is at least used to cool the non-film-transmitting part 012 of the main roller 01 of the winding coating device 00, and the heating part 12 is at least used to cover the edge of the film-transmitting part 011 of the main roller 01, and the edge is along the film-transmitting part 011. The edge in the first direction, the first direction (the moving direction indicated by arrow A as shown in Figure 4) is the axis direction of the main roller 01. The entire main body composed of the cooling part 11 and the heating part 12 has an arc-shaped plate structure that matches the outer surface of the main roller 01 . In the embodiment of the present invention, the heating part 12 serves as a heat source to heat the substrate in a manner including passive heating and active heating. During passive heating, the heating part 12 can heat the substrate 20 by receiving heat generated by high-temperature coating particles. , during active heating, the heating part 12 itself generates heat to heat the base material 20 . Since the heating part 12 covers the edge of the film transporting part 011, when the film transporting part 011 transports the substrate 20, the heating part 12 can shield the edge section 22 of the substrate 20. The heating part 12 and the cooling part 11 without cooling channels form a certain thermal resistance effect at the adjacent boundary positions between each other, and the heat absorbed by the heating part 12 will not be quickly conducted away through the adjacent boundary positions. The temperature of the heating part 12 continues to rise and becomes a heat source to bake the edge section 22 of the base material 20, so that the temperature difference between the edge section 22 and the middle section 21 of the base material 20 is small, thereby avoiding deformation and breakage of the base material 20. membrane, drum tendons and other defects. The transmission efficiency and winding quality of the base material 20 are ensured, and the effective width cutting rate of the base material 20 is improved.
其次，冷却部11上设置冷却流道后基于通入的冷却介质产生冷却效果时，能够带走卷绕镀膜装置00真空腔室内的热量。如果不冷却，那真空腔室内的温度会持续增加，并且不让过多的热量沉积在冷却部11上面，使冷却部11不会变形。此外，冷却部11和加热部12邻接接触虽然在冷却部11和加热部12之间产生了热阻隔，但加热部12上过多的热量会通过冷却部11的冷却作用缓慢导走，从而不会让加热部12持续升温后产生的温度过高，进而避免被遮挡烘烤的边缘段22的温度过高造成基材20的严重变形。Secondly, when the cooling flow channel is provided in the cooling part 11 and a cooling effect is generated based on the passed cooling medium, the heat in the vacuum chamber of the roll coating device 00 can be taken away. If it is not cooled, the temperature in the vacuum chamber will continue to increase, and excessive heat will not be deposited on the cooling part 11, so that the cooling part 11 will not be deformed. In addition, although the cooling part 11 and the heating part 12 are in adjacent contact to create a thermal barrier between the cooling part 11 and the heating part 12, the excess heat on the heating part 12 will be slowly conducted away by the cooling effect of the cooling part 11, so that no This will cause the temperature generated by the continuous heating of the heating part 12 to be too high, thus preventing the substrate 20 from being seriously deformed due to the excessive temperature of the edge section 22 being blocked and baked.
可见，本发明实施例提供的镀膜挡板10由冷却部11和加热部12邻接构成，其中，加热部能够作为热源产生热量对传送至卷绕镀膜装置走膜部的基材的边缘段进行烘烤，来降低基材的中间段和边缘段之间的温差。且由于加热部产生的热量不会快速通过邻接的冷却部导走，使得加热部和冷却部能够在彼此之间的邻接边界位置形成一定的热阻效应。在热阻效应下，加热部产生的加热温度将会持续升高，温度升高后的加热部作为热源对基材的边缘段进行烘烤后，能确保基材中间段和边缘段的受热是相对均匀或缓变的，从而避免基材产生变形。It can be seen that the coating baffle 10 provided by the embodiment of the present invention is composed of a cooling part 11 and a heating part 12 adjacent to each other. The heating part can be used as a heat source to generate heat to bake the edge section of the substrate transferred to the film running part of the roll coating device. Bake to reduce the temperature difference between the middle and edge sections of the substrate. And because the heat generated by the heating part will not be quickly conducted through the adjacent cooling part, the heating part and the cooling part can form a certain thermal resistance effect at the adjacent boundary between each other. Under the thermal resistance effect, the heating temperature generated by the heating part will continue to rise. After the temperature rise, the heating part is used as a heat source to bake the edge section of the substrate, which can ensure that the middle section and edge section of the substrate are heated. Relatively uniform or slowly changing to avoid deformation of the substrate.
被动加热方式下，本发明实施例中的加热部12包括未设置冷却流道并具有导热功能的弧形板体结构，此时，由于加热部12吸收的热量不能快速通过邻接边界位置导走，加热部12的温度会持续升高，温度升高后的加热部12自身成为热源。由此，加热部12即可辐射热量烘烤基材20的边缘段22，使得基材20中间段21和边缘段22的受热是相对均匀或缓变的，从而避免基材20产生变形。In the passive heating mode, the heating part 12 in the embodiment of the present invention includes an arc-shaped plate structure without cooling channels and with a heat conduction function. At this time, because the heat absorbed by the heating part 12 cannot be quickly conducted away through the adjacent boundary position, The temperature of the heating part 12 will continue to rise, and the heated part 12 itself becomes a heat source after the temperature rises. As a result, the heating part 12 can radiate heat to bake the edge section 22 of the base material 20 so that the middle section 21 and the edge section 22 of the base material 20 are heated relatively uniformly or gradually, thereby avoiding deformation of the base material 20 .
在本发明实施例中，为能够实现加热部12称为热源产生的热辐射能够加热基材20的边缘段22，以达到基材20被遮挡的边缘段22与未遮挡的中间段21的受热相近，加热部12包括耐高温板体，耐高温板体的耐温范围位于150℃至300℃之间。In the embodiment of the present invention, in order to realize that the thermal radiation generated by the heating part 12, called a heat source, can heat the edge section 22 of the base material 20, so as to achieve the heating of the shielded edge section 22 and the unshielded middle section 21 of the substrate 20. Similarly, the heating part 12 includes a high-temperature-resistant plate body, and the temperature-resistant range of the high-temperature resistant plate body is between 150°C and 300°C.
为根据实际需求调整冷却部11和加热部12之间边界位置处的热阻效应，提升或降低加热部12吸收的热量传递至冷却部11的速率，可通过调节冷却部11和加热部12之间的接触面积，对此，冷却部11和加热部12两者至少之一沿第一方向往复移动，以调节冷却部11和加热部12之间的接触面积。即通过调节冷却部11沿主锟01轴线方向往复移动来调整其与加热部12之间的接触面积，和/或通过调节加热部12沿主锟01轴线方向往复移动来调整其与冷却部11之间的接触面积。接触面积越小，加热部12被冷却部11导走的热量越少，从而实现通过调节冷却部11和加热部12之间的接触面积，来控制基材20中间段21和边缘段22之间的温差大小，降低基材20在加热部12边界的受热产生突变现象，实现基材20被加热部12遮挡的边缘段22也能够受热，使中间段21至边缘段22的温度缓变，甚至基材20整个幅宽方向(即第一方向)的温度都是非常相近的(如中间段21至边缘段22的温度差异低于10℃)，最终解决基材20镀膜制程中形变的问题，提高基材20的收卷质量和切裁率，达成不耐温的柔性基材20的收卷整体是比较平整的。In order to adjust the thermal resistance effect at the boundary between the cooling part 11 and the heating part 12 according to actual needs, and increase or decrease the rate at which the heat absorbed by the heating part 12 is transferred to the cooling part 11, the relationship between the cooling part 11 and the heating part 12 can be adjusted. In this regard, at least one of the cooling part 11 and the heating part 12 moves back and forth along the first direction to adjust the contact area between the cooling part 11 and the heating part 12 . That is, the contact area between the cooling part 11 and the heating part 12 is adjusted by adjusting the reciprocating movement of the cooling part 11 along the axis of the main roller 01, and/or the contact area between the heating part 12 and the cooling part 11 is adjusted by adjusting the reciprocating movement of the heating part 12 along the axis of the main roller 01. the contact area between them. The smaller the contact area, the less heat the heating part 12 is conducted away by the cooling part 11, thereby controlling the gap between the middle section 21 and the edge section 22 of the base material 20 by adjusting the contact area between the cooling part 11 and the heating part 12. The size of the temperature difference reduces the sudden change in the heating of the substrate 20 at the boundary of the heating part 12, so that the edge section 22 of the substrate 20 that is blocked by the heating section 12 can also be heated, so that the temperature from the middle section 21 to the edge section 22 changes gradually, and even The temperature in the entire width direction of the substrate 20 (i.e., the first direction) is very similar (for example, the temperature difference from the middle section 21 to the edge section 22 is less than 10°C), which ultimately solves the problem of deformation of the substrate 20 during the coating process. Improve the winding quality and cutting rate of the base material 20, so that the entire winding of the flexible base material 20 that is not resistant to temperature is relatively flat.
由上可见，本发明实施例在冷却部11和加热部12接触时，虽然冷却部11会导走加热部12的部分热量，然而，由于可以减小冷却部11和加热部12之间的接触面积，接触面积减小的情况下，能够阻碍冷却部11导走加热部12的热量，从而在冷却部11和加热部12之间的边界位置处形成热阻效应，确保加热部12的温度能够持续升高称为热源实现对基材20的烘烤。It can be seen from the above that in the embodiment of the present invention, when the cooling part 11 and the heating part 12 are in contact, although the cooling part 11 will conduct away part of the heat of the heating part 12, however, since the contact between the cooling part 11 and the heating part 12 can be reduced, When the contact area is reduced, it can prevent the cooling part 11 from conducting away the heat of the heating part 12, thereby forming a thermal resistance effect at the boundary between the cooling part 11 and the heating part 12, ensuring that the temperature of the heating part 12 can be The continuous rise is called a heat source to achieve baking of the substrate 20 .
如图5至图7所示，除了通过上述的调整冷却部11和加热部12之间接触面积的方式来控制两者之间的热阻隔的方式，本发明实施例还能从垂直于第一方向的第二方向来对冷却部11和加热部12之间的接触面积进行调整。其中，第二方向为如图6所示的箭头B指示的方向，本发明实施例主要为主锟01的圆周方向。具体地，冷却部11靠近加热部12的一侧间隔设置有多个第一接触段111，加热部12靠近冷却部11的一侧间隔设置有多个第二接触段121，第一接触段111和第二接触段121两者至少之一沿第二方向往复移动，以调节第一接触段111和第二接触段121之间的接触面积。具体地，冷却部11和加热部12构成的主体通过卷绕镀膜装置00上设置的滑轨03安装包覆于主锟01外表面时，可将冷却部11和加热部12分别固定于相互平行的两条滑轨03上，然后将冷却部11或加热部12沿第二方向移动来调整两者之间的接触面积后，通过锁紧机构16将冷却部11和加热部12锁定于具有当前接触面积的连接状态。As shown in FIGS. 5 to 7 , in addition to the above-mentioned method of controlling the thermal isolation between the cooling part 11 and the heating part 12 by adjusting the contact area between the two, the embodiment of the present invention can also control the thermal isolation between the cooling part 11 and the heating part 12 from a vertical position perpendicular to the first The contact area between the cooling part 11 and the heating part 12 is adjusted in the second direction. The second direction is the direction indicated by arrow B as shown in FIG. 6 , and the embodiment of the present invention is mainly the circumferential direction of the main roller 01 . Specifically, a plurality of first contact segments 111 are provided at intervals on the side of the cooling part 11 close to the heating part 12 , and a plurality of second contact segments 121 are provided on a side of the heating part 12 close to the cooling part 11 . The first contact segments 111 At least one of the first contact segment 111 and the second contact segment 121 reciprocates along the second direction to adjust the contact area between the first contact segment 111 and the second contact segment 121 . Specifically, when the main body composed of the cooling part 11 and the heating part 12 is installed and covered on the outer surface of the main roller 01 through the slide rail 03 provided on the roll coating device 00, the cooling part 11 and the heating part 12 can be fixed to each other parallel to each other. on the two slide rails 03, and then move the cooling part 11 or the heating part 12 in the second direction to adjust the contact area between the two, and then lock the cooling part 11 and the heating part 12 with the current through the locking mechanism 16. The connection status of the contact area.
由于第一接触段111和第二接触段121接触重叠时，第一接触段111和第二接触段121之间会形成孔隙，在基材20镀膜制程过程中，镀膜粒子会穿过孔隙溅射到主锟01上污染主锟01。对此，如图8和图9所示，本发明实施例提供的主体还包括覆盖板14，覆盖板14覆盖设置于第一接触段111和第二接触段121两者至少之一上，从而覆盖住第一接触段111和第二接触段121之间形成的孔隙，避免镀膜粒子溅射到主锟01上。When the first contact section 111 and the second contact section 121 are in contact and overlap, pores will be formed between the first contact section 111 and the second contact section 121. During the coating process of the substrate 20, the coating particles will be sputtered through the pores. Go to the main Kun 01 and contaminate the main Kun 01. In this regard, as shown in FIGS. 8 and 9 , the main body provided by the embodiment of the present invention also includes a cover plate 14 . The cover plate 14 covers at least one of the first contact section 111 and the second contact section 121 , so that Cover the pore formed between the first contact section 111 and the second contact section 121 to prevent coating particles from sputtering onto the main roller 01 .
如图10所示，为进一步使基材20中间段21至边缘段22的受热更加均匀或缓变，本发明实施例中的加热部12的宽度沿第二方向逐渐减小，加热部12的宽度为加热部12沿第一方向的宽度。由此，加热部12从正面看其远离冷却部11一侧的边缘是倾斜的斜线。由此，如图11所示，加热部12可将镀膜制程中的基材20沿其宽度方向(即第一方向)依次被划分为中间段21、过渡段23以及边缘段22，其中，基材20沿加热部12的宽度逐渐减小的方向进行镀膜时，由于过渡段23受到加热部12的遮挡较少，过渡段23的温度将会高于边缘段22的温度、但会低于中间段21的温度，从而实现基材20中间段21至边缘段22的温度达到均匀变化或缓慢变化，进一步避免基材20产生形变，提高基材20的收卷质量和切裁率。As shown in FIG. 10 , in order to further make the heating from the middle section 21 to the edge section 22 of the base material 20 more uniform or gradual, the width of the heating part 12 in the embodiment of the present invention gradually decreases along the second direction. The width is the width of the heating part 12 along the first direction. Therefore, the edge of the heating part 12 on the side away from the cooling part 11 is an inclined oblique line when viewed from the front. Therefore, as shown in FIG. 11 , the heating part 12 can divide the substrate 20 in the coating process into the middle section 21 , the transition section 23 and the edge section 22 along its width direction (ie, the first direction). When the material 20 is coated along the direction in which the width of the heating part 12 gradually decreases, since the transition section 23 is less blocked by the heating section 12, the temperature of the transition section 23 will be higher than the temperature of the edge section 22, but lower than the middle section. The temperature of the section 21 is thereby achieved to achieve a uniform or slow change in temperature from the middle section 21 to the edge section 22 of the base material 20, further avoiding deformation of the base material 20 and improving the winding quality and cutting rate of the base material 20.
其中，加热部12沿第二方向具有第一端122和第二端123，第一端122的宽度和第二端123的宽度之差的绝对值不小于0cm且不大于1.5cm，从而使加热部12靠近中间段21的一侧与主锟01的水平界面保持一定的倾斜角度。具体地，加热部12为与主锟01外表面相适配的弧形板体时，第一端122和第二端123分别为弧形板体的位于第二方向上的相对两端，本发明实施例通过限定加热部12的第一端122和第二端123之间差值的大小，来对加热部12的宽度变化进行控制，从而控制基材20中间段21至边缘段22的温度均匀变化或缓慢变化，提高基材20的收卷质量和切裁率。具体地，具有一定倾斜角度的加热部12将镀膜制程中的基材20沿主锟01的轴线方向被依次划分为中间段21、过渡段23以及边缘段22，其中，基材20沿加热部12的宽度逐渐减小的方向进行镀膜时，由于过渡段23受到加热部12的遮挡较少，过渡段23的温度将会高于边缘段22的温度、但会低于中间段21的温度，从而实现基材20中间段21至边缘段22的温度达到均匀变化或缓慢变化，进一步避免基材20产生形变，提高基材20的收卷质量和切裁率。因此，本发明应用实施例通过限定加热部12的第一端122和第二端123之间差值的大小，来对加热部12的宽度变化进行控制，从而控制基材20中间段21至边缘段22的温度均匀变化或缓慢变化，提高基材20的收卷质量和切裁率。Wherein, the heating part 12 has a first end 122 and a second end 123 along the second direction, and the absolute value of the difference between the width of the first end 122 and the width of the second end 123 is not less than 0 cm and not more than 1.5 cm, so that the heating The side of the portion 12 close to the middle section 21 maintains a certain inclination angle with the horizontal interface of the main roller 01 . Specifically, when the heating part 12 is an arc-shaped plate that matches the outer surface of the main roller 01, the first end 122 and the second end 123 are respectively the opposite ends of the arc-shaped plate located in the second direction. The present invention The embodiment controls the change in width of the heating part 12 by limiting the difference between the first end 122 and the second end 123 of the heating part 12, thereby controlling the temperature uniformity from the middle section 21 to the edge section 22 of the base material 20 Change or change slowly to improve the winding quality and cutting rate of the base material 20. Specifically, the heating part 12 with a certain inclination angle divides the substrate 20 in the coating process into a middle section 21, a transition section 23 and an edge section 22 along the axis direction of the main roller 01. The substrate 20 is divided along the heating section. When coating is performed in the direction in which the width of 12 gradually decreases, since the transition section 23 is less blocked by the heating part 12, the temperature of the transition section 23 will be higher than the temperature of the edge section 22, but lower than the temperature of the middle section 21. Thereby, the temperature from the middle section 21 to the edge section 22 of the base material 20 can be uniformly changed or changed slowly, thereby further avoiding deformation of the base material 20 and improving the winding quality and cutting rate of the base material 20 . Therefore, the application embodiment of the present invention controls the change in width of the heating part 12 by limiting the difference between the first end 122 and the second end 123 of the heating part 12, thereby controlling the middle section 21 to the edge of the base material 20 The temperature of the section 22 changes evenly or slowly to improve the winding quality and cutting rate of the substrate 20 .
如图12所示，在本发明实施例中的加热部12作为具备主动加热功能的弧形板体时，加热部12包括固定板120和加热板17，固定板120与冷却部11邻接，加热板17固定设置于固定板120面向走膜部011的一侧。其中，固定板120和加热板17均为与主辊01外表面相适配的弧形板状结构，从而对走膜部011上的基材20的边缘段22进行均匀加热，从而确保边缘段22沿主辊01圆周方向的受热是均衡的。加热板17能够更好地实现加热部12对基材20边缘段22的加热效果，从而使基材20中间段21至边缘段22的温差可控。且加热板17来对基材20边缘段22进行主动烘烤加热，可更加精准地对基材20中间段21至边缘段22的温差进行控制，使温差达到预期变化效果，避免基材20产生形变。As shown in FIG. 12 , when the heating part 12 in the embodiment of the present invention is an arc-shaped plate with an active heating function, the heating part 12 includes a fixed plate 120 and a heating plate 17 . The fixed plate 120 is adjacent to the cooling part 11 . The plate 17 is fixedly disposed on the side of the fixed plate 120 facing the film running part 011 . Among them, the fixed plate 120 and the heating plate 17 are both arc-shaped plate structures that match the outer surface of the main roller 01, so as to uniformly heat the edge section 22 of the base material 20 on the film running part 011, thereby ensuring that the edge section 22 The heating along the circumferential direction of the main roller 01 is balanced. The heating plate 17 can better realize the heating effect of the heating part 12 on the edge section 22 of the base material 20 , thereby making the temperature difference from the middle section 21 to the edge section 22 of the base material 20 controllable. And the heating plate 17 is used to actively bake and heat the edge section 22 of the substrate 20, which can more accurately control the temperature difference from the middle section 21 to the edge section 22 of the substrate 20, so that the temperature difference can achieve the expected change effect, and avoid the occurrence of deformation.
其次，加热部12的多个第二接触段121间隔设置在固定板120靠近冷却部11的一侧，从而通过调节第一接触段111和固定板120上的第二接触段121之间的接触面积，来调整冷却部11和加热部12之间热阻隔效应的大小。固定板120包括设置了冷却流道的弧形板体结构或未设置冷流道的弧形板体结构。固定板120为未设置冷流道的弧形板体结构时，可具备被动加热功能，即固定板120可通过接收的高温镀膜粒子产生的热量来对基材20进行加热，此时，固定板120可为耐温范围位于150℃至300℃之间的耐高温板体，从而使本发明实施例能够结合加热板的主动加热功能和固定板120的被动加热功能共同实现对基材20的加热，避免基材20产生变形。Secondly, the plurality of second contact segments 121 of the heating part 12 are arranged at intervals on the side of the fixing plate 120 close to the cooling part 11, so that the contact between the first contact segments 111 and the second contact segments 121 on the fixing plate 120 is adjusted. area to adjust the size of the thermal barrier effect between the cooling part 11 and the heating part 12. The fixed plate 120 includes an arc-shaped plate structure provided with cooling flow channels or an arc-shaped plate structure without cold flow channels. When the fixed plate 120 is an arc-shaped plate structure without a cold runner, it can have a passive heating function, that is, the fixed plate 120 can heat the base material 20 by receiving the heat generated by the high-temperature coating particles. At this time, the fixed plate 120 can be a high-temperature resistant plate with a temperature resistance range between 150°C and 300°C, so that the embodiment of the present invention can combine the active heating function of the heating plate and the passive heating function of the fixed plate 120 to jointly realize heating of the base material 20 , to avoid deformation of the base material 20.
其中，加热板17包括多块，且多块加热板17沿第二方向依次设置于固定板120上，且多块加热板17一体设置或者分体设置。具体地，在本发明实施例中，可在固定板120的长度方向设置长条形的空腔区域，且空腔区域位于固定板120靠近走膜部011边缘的一端，空腔区域的开口朝向走膜部011的外表面。其中，固定板120的长度为加热部12沿第二方向的长度。加热板17为一体成型并与空腔区域相适配的板状结构，为便于加热板17的安装，加热板17可选用柔性可弯曲的柔性加热板，从而将加热板17更好地设置于加热部12的空腔区域内，由于装配进空腔区域的加热板17位于加热部12远离冷却部11的一侧，能够更好地对基材20边缘段22靠近中间段21的一侧进行烘烤，进一步确保了基材20中间段21至边缘段22的温度缓慢变化，减小了中间段21和边缘段22之间的温差，进而提高基材20的收卷质量和切裁率。Among them, the heating plates 17 include multiple pieces, and the multiple heating plates 17 are sequentially arranged on the fixed plate 120 along the second direction, and the multiple heating plates 17 are arranged integrally or separately. Specifically, in the embodiment of the present invention, a long cavity area can be provided in the length direction of the fixed plate 120, and the cavity area is located at one end of the fixed plate 120 close to the edge of the film running part 011, and the opening of the cavity area faces The outer surface of the film running part 011. The length of the fixing plate 120 is the length of the heating part 12 along the second direction. The heating plate 17 is a plate-like structure that is integrally formed and adapted to the cavity area. In order to facilitate the installation of the heating plate 17, a flexible and bendable heating plate can be used for the heating plate 17, so that the heating plate 17 can be better placed in the cavity. In the cavity area of the heating part 12, since the heating plate 17 assembled into the cavity area is located on the side of the heating part 12 away from the cooling part 11, the side of the edge section 22 of the base material 20 close to the middle section 21 can be better processed. Baking further ensures that the temperature from the middle section 21 to the edge section 22 of the base material 20 changes slowly, reducing the temperature difference between the middle section 21 and the edge section 22 , thereby improving the winding quality and cutting rate of the base material 20 .
如图12和图13所示，在本发明实施例中，加热部12还包括卡槽18，卡槽18固定设置于固定板120面向走膜部011的一侧，卡槽18的形状与加热板17相适配，加热板17固定设置于卡槽18内。具体地，本发明实施例中的卡槽18固定设置于固定板120的空腔区域，卡槽18沿第一方向的两端可设置卡扣结构(该卡扣结构为防止加热板17的止挡凸台即可)，且为便于加热板17与卡槽18之间的装配配合，加热板17选用柔性加热板。As shown in Figures 12 and 13, in the embodiment of the present invention, the heating part 12 also includes a slot 18. The slot 18 is fixedly provided on the side of the fixing plate 120 facing the film feeding part 011. The shape of the slot 18 is related to the heating function. The heating plate 17 is adapted to fit the heating plate 17 and is fixedly arranged in the slot 18 . Specifically, the clamping slot 18 in the embodiment of the present invention is fixedly disposed in the cavity area of the fixing plate 120 , and buckling structures can be provided at both ends of the clamping slot 18 along the first direction (the buckling structure is to prevent the heating plate 17 from being blocked. It is enough to block the boss), and in order to facilitate the assembly and cooperation between the heating plate 17 and the card slot 18, the heating plate 17 is a flexible heating plate.
如图14所示，本发明实施例提供的主体还包括第一隔热件15，第一隔热件15设置于卡槽18的侧壁(即卡槽18面对加热部12空腔区域一侧的侧壁)与固定板120之间。第一隔热件15可为耐温塑料板，该耐温塑料如聚四氟乙烯，聚四氟乙烯可在260℃左右长期使用，第一隔热件15将卡槽18和固定板120隔离开，以降低加热板17产生的热量向固定板120传导的速度。As shown in Figure 14, the main body provided by the embodiment of the present invention also includes a first heat insulator 15. The first heat insulator 15 is disposed on the side wall of the slot 18 (that is, the slot 18 faces the cavity area of the heating part 12. between the side walls) and the fixing plate 120. The first heat insulator 15 can be a temperature-resistant plastic plate. The heat-resistant plastic such as polytetrafluoroethylene can be used for a long time at about 260°C. The first heat insulator 15 isolates the slot 18 and the fixing plate 120 to reduce the speed at which the heat generated by the heating plate 17 is transferred to the fixed plate 120 .
本发明实施例中的加热板17包括电阻加热板171和/或硅胶加热板，硅胶加热板包括耐高温硅胶体和电阻加热丝，电阻加热丝嵌设于耐高温硅胶体。耐高温硅胶体是硅胶产品一种常见性能硅胶制品，普通的硅胶耐高温度在200～300摄氏度之间。而耐高温硅胶体短时间内如两个小时内最高温度可达到350摄氏度左右，构成的硅胶加热板能在较高温度下实现对基材20的烘烤，从而降低基材20中间段21和边缘段22之间的温差。The heating plate 17 in the embodiment of the present invention includes a resistance heating plate 171 and/or a silica gel heating plate. The silica gel heating plate includes a high-temperature resistant silica gel body and a resistance heating wire. The resistance heating wire is embedded in the high-temperature resistant silica gel body. High temperature resistant silica gel is a common performance silica gel product. Ordinary silica gel can withstand high temperatures between 200 and 300 degrees Celsius. The high-temperature-resistant silicone body can reach a maximum temperature of about 350 degrees Celsius in a short period of time, such as two hours. The silicone heating plate can bake the base material 20 at a higher temperature, thereby reducing the temperature of the middle section 21 of the base material 20 and The temperature difference between edge segments 22.
为进一步确保基材20中间段21至边缘段22的温度缓慢变化，可对基材20边缘段22靠近中间段21的一侧进行烘烤。对此，如图15所示，电阻加热板171的宽度沿远离冷却部11的方向逐渐增大，电阻加热板171的宽度为电阻加热板171沿第三方向(即如图15所示的箭头C指示的方向)的宽度，第三方向为分别垂直于第一方向和第二方向的方向，即第三方向相当于主锟01的径向。由于电阻加热板171远离冷却部11的一侧截面更大则电阻更大，进而在施加电压后产生的热量也就更高，电阻加热板171远离冷却部11的一侧对边缘段22靠近中间段21的一侧进行烘烤时，边缘段22靠近中间段21的一侧温度更高、更接近中间段21的温度，避免中间段21和边缘段22的分界处产生温度突变而影响基材20形态和质量。同理，硅胶加热板的宽度也可设置成沿远离冷却部11的方向逐渐增大，硅胶加热板的宽度为硅胶加热板沿第三方向的宽度，其中，硅胶加热板沿远离冷却部11的方向依次具有第一加热端和第二加热端，第二加热端的宽度大于第一加热端，第二加热端内嵌设的电阻加热丝多于第一加热端，以使第二加热端具有更大的电阻，当向硅胶加热板施加工作电压后，第二加热端产生的热量较高，第二加热端对边缘段22靠近中间段21的一侧进行烘烤时，边缘段22靠近中间段21的一侧能够获得更高的温度、从而更接近中间段21的温度，避免中间段21和边缘段22的分界处产生温度突变而影响基材20形态和质量。To further ensure that the temperature from the middle section 21 to the edge section 22 of the base material 20 changes slowly, the side of the edge section 22 of the base material 20 close to the middle section 21 can be baked. In this regard, as shown in FIG. 15 , the width of the resistance heating plate 171 gradually increases in the direction away from the cooling part 11 , and the width of the resistance heating plate 171 is the third direction of the resistance heating plate 171 (that is, the arrow shown in FIG. The width of the direction indicated by C), the third direction is the direction perpendicular to the first direction and the second direction respectively, that is, the third direction is equivalent to the radial direction of the main roller 01. Since the cross-section of the side of the resistance heating plate 171 away from the cooling part 11 is larger, the resistance is greater, and the heat generated after applying a voltage is higher. The side of the resistance heating plate 171 away from the cooling part 11 is closer to the middle of the edge section 22 When one side of the segment 21 is baked, the side of the edge segment 22 close to the middle segment 21 has a higher temperature and is closer to the temperature of the middle segment 21 to avoid a sudden temperature change at the boundary between the middle segment 21 and the edge segment 22 that affects the substrate. 20Form and quality. In the same way, the width of the silicone heating plate can also be set to gradually increase in the direction away from the cooling part 11. The width of the silicone heating plate is the width of the silicone heating plate along the third direction, where the width of the silicone heating plate is along the direction away from the cooling part 11. The direction has a first heating end and a second heating end in sequence. The width of the second heating end is larger than that of the first heating end. There are more resistance heating wires embedded in the second heating end than the first heating end, so that the second heating end has a better When the working voltage is applied to the silicone heating plate, the heat generated by the second heating end is relatively high. When the second heating end bakes the side of the edge section 22 close to the middle section 21, the edge section 22 is close to the middle section. One side of 21 can obtain a higher temperature, thereby being closer to the temperature of the middle section 21 , thereby avoiding a sudden temperature change at the boundary between the middle section 21 and the edge section 22 that would affect the shape and quality of the base material 20 .
本发明实施例对加热板17(如电阻加热板171和硅胶加热板)施加的工作电压的控制方式是随着基材20的镀膜走速、镀膜功率的大小变化而变化的，镀膜走速越快，基材20中间段21受热较少，因此可以降低施加于加热板17的电压，从而降低基材20边缘段22的温度。镀膜功率越小，基材20薄膜中间段21受热较少，因此可以降低施加于加热板17的电压，从而降低基材20边缘段22的温度。由此，本发明实施例通过基于基材20的镀膜走速和镀膜功率来对施加于加热板17上的电压进行调整，进而确保中间段21和边缘段22之间的温差在避免基材20产生形变的预定范围内。The control method of the working voltage applied to the heating plate 17 (such as the resistance heating plate 171 and the silicone heating plate) in the embodiment of the present invention changes with the change of the coating speed and coating power of the substrate 20. The faster the coating speed, the more the coating power changes. Fast, the middle section 21 of the substrate 20 is less heated, so the voltage applied to the heating plate 17 can be reduced, thereby reducing the temperature of the edge section 22 of the substrate 20 . The smaller the coating power is, the less the middle section 21 of the film on the substrate 20 is heated, so the voltage applied to the heating plate 17 can be reduced, thereby reducing the temperature of the edge section 22 of the substrate 20 . Therefore, the embodiment of the present invention adjusts the voltage applied to the heating plate 17 based on the coating speed and coating power of the substrate 20 , thereby ensuring that the temperature difference between the middle section 21 and the edge section 22 avoids affecting the substrate 20 within a predetermined range of deformation.
本发明实施例提供的主体还包括第二隔热件，第二隔热件设置于冷却部11和加热部12之间。本发明实施例通过在加热部12靠近冷却部11的一侧引入第二隔热件，该第二隔热件可直接通过焊接等方式衔接于加热部12和冷却部11之间，从而在加热部12和冷却部11之间形成热阻隔，防止加热部12的热量被冷却部11快速导走，实现加热部12持续升温称为热源来对基材20边缘段22进行烘烤。The main body provided by the embodiment of the present invention further includes a second heat insulation member, and the second heat insulation member is disposed between the cooling part 11 and the heating part 12 . In the embodiment of the present invention, a second heat insulating member is introduced on the side of the heating part 12 close to the cooling part 11. The second heat insulating part can be directly connected between the heating part 12 and the cooling part 11 through welding or other methods, so that the heating part is heated. A thermal barrier is formed between the heating part 12 and the cooling part 11 to prevent the heat of the heating part 12 from being quickly conducted away by the cooling part 11, so that the heating part 12 can continue to heat up and serve as a heat source to bake the edge section 22 of the base material 20.
具体地，如图16所示，第二隔热件包括第三板体13，第三板体13设置于冷却部11和加热部12之间，且第三板体13的热导率小于冷却部11的热导率和加热部12的热导率两者之一。由于第三板体13的热导率更小，从而对加热部12传导至冷却部11的热量起到阻隔作用，第三板体13的热导率小于冷却部11和加热部12时，冷却部11和加热部12之间的热阻效应更佳，从而实现加热部12持续升温成为热源来对基材20边缘段22进行烘烤。Specifically, as shown in Figure 16, the second heat insulating member includes a third plate body 13. The third plate body 13 is disposed between the cooling part 11 and the heating part 12, and the thermal conductivity of the third plate body 13 is smaller than that of the cooling part 13. One of the thermal conductivity of the portion 11 and the thermal conductivity of the heating portion 12 . Since the thermal conductivity of the third plate 13 is smaller, it blocks the heat transmitted from the heating part 12 to the cooling part 11. When the thermal conductivity of the third plate 13 is smaller than the cooling part 11 and the heating part 12, the cooling The thermal resistance effect between the portion 11 and the heating portion 12 is better, so that the heating portion 12 continues to heat up and becomes a heat source to bake the edge section 22 of the substrate 20 .
在增加第三板体13增强冷却部11和加热部12之间的热阻隔的基础上，为使冷却部11和加热部12之间的热阻隔能够依据实际需求进行调整，如需要根据基材20中间段21受热量的大小，需要增强或降低冷却部11和加热部12之间的热阻隔。对此，本发明实施例中的冷却部11和第三板体13两者至少之一沿第一方向往复移动，以调节冷却部11和第三板体13之间的接触面积。和/或，加热部12和第三板体13两者至少之一沿第一方向往复移动，以调节加热部12和第三板体13之间的接触面积。如果中间段21耐受热量大则需要让冷却部11和第三板体13之间的接触面积(即冷却部11和第三板体13的重叠面积)更小。和/或，如果中间段21耐受热量大则需要让加热部12和第三板体13之间的接触面积更小。接触面积越小，导走的热量越少，从而确保中间段21至边缘段22的温差均匀缓慢变化，避免基材20产生形变。On the basis of adding the third plate body 13 to enhance the thermal isolation between the cooling part 11 and the heating part 12, in order to enable the thermal isolation between the cooling part 11 and the heating part 12 to be adjusted according to actual needs, if necessary, according to the base material 20 The amount of heat received by the middle section 21 requires the thermal isolation between the cooling part 11 and the heating part 12 to be enhanced or reduced. In this regard, at least one of the cooling part 11 and the third plate body 13 in the embodiment of the present invention reciprocates along the first direction to adjust the contact area between the cooling part 11 and the third plate body 13 . And/or, at least one of the heating part 12 and the third plate body 13 moves back and forth along the first direction to adjust the contact area between the heating part 12 and the third plate body 13 . If the heat resistance of the middle section 21 is high, the contact area between the cooling part 11 and the third plate body 13 (that is, the overlapping area of the cooling part 11 and the third plate body 13) needs to be smaller. And/or, if the heat resistance of the middle section 21 is large, the contact area between the heating part 12 and the third plate body 13 needs to be smaller. The smaller the contact area, the less heat is conducted away, thereby ensuring that the temperature difference from the middle section 21 to the edge section 22 changes evenly and slowly to avoid deformation of the base material 20 .
本发明实施例中的冷却部11的板体类型包括铝板、铜板、不锈钢板、铝铜合金板中的至少一种，加热部12的板体类型包括铝板、铜板、不锈钢板、铝铜合金板中的至少一种，且冷却部11的板体类型和加热部12的板体类型相同或不同。其中，冷却部11的板体类型包括铝板和/或铜板，加热部12的板体类型包括铝板和/或铜板，由于铝板的热导率是237、铜板的热导率是401，第三板体13的热导率需小于铝板和铜板的热导率，对此，第三板体13可包括铂板、铁板、钢板、锡板、铅板至少之一。其中，铂板的热导率是70、铁板的热导率是60、钢板的热导率是60、锡板的热导率是67、铅板的热导率是34.8。由此，冷却部11和加热部12之间设置第三板体13后两者之间的热阻效应更佳，从而实现加热部12持续升温成为热源来对基材20边缘段22进行烘烤。In the embodiment of the present invention, the plate type of the cooling part 11 includes at least one of aluminum plate, copper plate, stainless steel plate, and aluminum-copper alloy plate. The plate type of the heating part 12 includes an aluminum plate, a copper plate, a stainless steel plate, and an aluminum-copper alloy plate. At least one of them, and the plate type of the cooling part 11 and the plate type of the heating part 12 are the same or different. Among them, the plate type of the cooling part 11 includes aluminum plate and/or copper plate, and the plate type of the heating part 12 includes aluminum plate and/or copper plate. Since the thermal conductivity of the aluminum plate is 237 and the thermal conductivity of the copper plate is 401, the third plate The thermal conductivity of the body 13 needs to be smaller than the thermal conductivity of the aluminum plate and the copper plate. For this reason, the third plate body 13 may include at least one of a platinum plate, an iron plate, a steel plate, a tin plate, and a lead plate. Among them, the thermal conductivity of the platinum plate is 70, the thermal conductivity of the iron plate is 60, the thermal conductivity of the steel plate is 60, the thermal conductivity of the tin plate is 67, and the thermal conductivity of the lead plate is 34.8. Therefore, the thermal resistance effect between the cooling part 11 and the heating part 12 is better after the third plate 13 is provided between the two, thereby enabling the heating part 12 to continue to heat up and become a heat source to bake the edge section 22 of the base material 20 .
本发明第二实施例还提供了一种卷绕镀膜装置00，该卷绕镀膜装置00设置有本发明第一个实施例提供的镀膜挡板10。The second embodiment of the present invention also provides a roll coating device 00. The roll coating device 00 is provided with the coating baffle 10 provided in the first embodiment of the present invention.
本发明实施例提供的卷绕镀膜装置00，其内设置的镀膜挡板10由冷却部11和加热部12邻接构成，加热部12和设置有冷却流道的冷却部11能够在彼此之间的邻接边界位置形成热阻效应，加热部12产生的热量不会快速通过邻接边界位置导走，加热部12的温度持续升高，温度升高后的加热部12自身成为热源。由此，加热部12即可辐射热量烘烤传送至卷绕镀膜装置00走膜部011的基材20宽度方向的边缘段22，使得基材20中间段21和边缘段22的受热是相对均匀或缓变的，从而避免基材20产生变形。In the roll coating device 00 provided by the embodiment of the present invention, the coating baffle 10 provided therein is composed of a cooling part 11 and a heating part 12 adjacent to each other. The heating part 12 and the cooling part 11 provided with cooling channels can be connected between each other. The adjacent boundary position forms a thermal resistance effect, and the heat generated by the heating part 12 will not be quickly conducted through the adjacent boundary position. The temperature of the heating part 12 continues to rise, and the heated part 12 itself becomes a heat source after the temperature rises. As a result, the heating part 12 can radiate heat to bake the edge sections 22 in the width direction of the substrate 20 transmitted to the film running section 011 of the roll coating device 00, so that the middle section 21 and the edge section 22 of the substrate 20 are heated relatively uniformly. Or gradually, thereby preventing the base material 20 from deforming.
本发明第三个实施例在上述两个实施例的基础上，提供了一种镀膜挡板10的应用实施例。本发明应用实施例以磁控溅射镀膜装置为例来说明镀膜挡板10是如何解决基材20镀膜制程的形变问题的。The third embodiment of the present invention provides an application embodiment of the coating baffle 10 based on the above two embodiments. The application embodiment of the present invention takes a magnetron sputtering coating device as an example to illustrate how the coating baffle 10 solves the deformation problem of the substrate 20 during the coating process.
具体地，本发明应用实施例为能够解决或减少基材20在镀膜挡板10遮挡边界的形变变形，同时，防止基材20边部被卷绕镀膜装置00产生的镀膜粒子直接溅射或蒸发热辐射烘烤而出现断膜，以及主锟01能够得到更好地收到镀膜挡板10的保护而避免镀上镀膜的问题。通过本发明第一个实施例提供的镀膜挡板10来降低基材20在传统镀膜挡板10边界存在的受热突变现象，镀膜挡板10的加热部12包括未设置冷却流道的耐高温的弧形板体，加热部12能够让基材20被遮挡的边缘段22也能够受热，使基材20的中间段21和边缘段22之间的温度缓慢变化，甚至实现从基材20中间段21的起始端至边缘段22的终止端之间的温度都是非常相近的。从而最终解决基材20镀膜制程中形变变形的问题，确保了基材20的收卷质量，达成不耐温的柔性基材20在收卷状态下整体是比较平整的，并尤其提高了大幅宽基材20的切裁率，达到高效切裁的目的。Specifically, application embodiments of the present invention can solve or reduce the deformation of the substrate 20 at the blocking boundary of the coating baffle 10 , and at the same time, prevent the edges of the substrate 20 from being directly sputtered or evaporated by the coating particles generated by the winding coating device 00 Film breakage occurs due to heat radiation baking, and the main roller 01 can be better protected by the coating baffle 10 to avoid the problem of coating. The coating baffle 10 provided in the first embodiment of the present invention is used to reduce the thermal mutation phenomenon of the substrate 20 existing at the boundary of the traditional coating baffle 10. The heating part 12 of the coating baffle 10 includes a high-temperature resistant material without cooling channels. The arc-shaped plate body and the heating part 12 can also heat the shielded edge section 22 of the base material 20 , causing the temperature between the middle section 21 and the edge section 22 of the base material 20 to slowly change, and even achieve a change from the middle section of the base material 20 to The temperatures from the starting end of 21 to the ending end of edge section 22 are very similar. This ultimately solves the problem of deformation of the base material 20 during the coating process, ensures the winding quality of the base material 20, and achieves that the flexible base material 20, which is not temperature-resistant, is relatively flat as a whole in the winding state, and especially improves the large width. The cutting rate of the base material 20 achieves the purpose of efficient cutting.
其中，温度缓慢变化体现在被镀膜挡板10挡住的边缘段22的左侧(即边缘段22靠近中间段21的一侧)与基材20中间段21的右侧(中间段21靠近边缘段22的一侧)的温度相近，边缘段22的左侧到其远离中间段21的右侧，温度缓慢变化，越来越低，可以解决基材20的形变问题。Among them, the slow temperature change is reflected on the left side of the edge section 22 blocked by the coating baffle 10 (that is, the side of the edge section 22 close to the middle section 21) and the right side of the middle section 21 of the substrate 20 (the middle section 21 is close to the edge section). 22), the temperature slowly changes from the left side of the edge section 22 to the right side away from the middle section 21, getting lower and lower, which can solve the deformation problem of the base material 20.
为解决上述问题，本发明应用实施例提供了镀膜挡板10的设计方案一和设计方案二。其中，方案一为被动式热烘烤方案，即通过设置有冷却流道的冷却部11和未设置冷却流道的加热部12邻接构成的主体来实现对基材20的烘烤，同时保护主锟01非走膜部012。加热部12选用耐温范围位于150℃至300℃之间的耐高温板体。方案二为主动式热烘烤方案，即在作为弧形本体的加热部12上设置能够主动加热提供热源的加热板17来实现对基材20的主动烘烤及对主锟01的保护作用。In order to solve the above problems, application embodiments of the present invention provide a first design solution and a second design solution for the coating baffle 10 . Among them, the first solution is a passive thermal baking solution, that is, the main body is formed by adjoining the cooling part 11 with cooling channels and the heating part 12 without cooling channels to achieve baking of the substrate 20 while protecting the main ingot. 01 Non-filming part 012. The heating part 12 is made of a high-temperature resistant plate with a temperature resistance range between 150°C and 300°C. The second solution is an active thermal baking solution, that is, a heating plate 17 capable of actively heating and providing a heat source is provided on the heating part 12 as an arc-shaped body to achieve active baking of the base material 20 and protection of the main roller 01 .
具体地，无论是方案一还是方案二，如图2所示，本发明应用实施例中的卷绕镀膜装置00的主锟01均包括走膜部011和非走膜部012，位于主锟01外表面的横梁02上设置有两条相互平行的滑轨03，镀膜挡板10通过滑轨03可移动地连接包覆于主锟01外表面。其中，镀膜挡板10的冷却部11和加热部12分别与不同的滑轨03连接。Specifically, whether it is scheme one or scheme two, as shown in Figure 2, the main drum 01 of the roll coating device 00 in the application embodiment of the present invention includes a film-transmitting part 011 and a non-film-transmitting part 012, located on the main drum 01 The crossbeam 02 on the outer surface is provided with two mutually parallel slide rails 03. The coated baffle 10 is movably connected and covered on the outer surface of the main roller 01 through the slide rails 03. Among them, the cooling part 11 and the heating part 12 of the coating baffle 10 are connected to different slide rails 03 respectively.
本发明应用实施例方案一的技术内容包括：The technical content of the first application embodiment of the present invention includes:
如图4所示，将原有的一体成型(整体部件)的弧形冷却挡板设计为可分列的冷却部11和加热部12两部分组成，加热部12主要用于遮挡并烘烤基材20的边缘段22段，冷却部11主要用于保护主锟01两端无基材20覆盖的非走膜部012。其中，冷却部11和加热部12可以实现便捷的邻接，冷却部11和加热部12在邻接边界位置形成一定受控的热阻效应，以达成加热部12受到溅射或热蒸发镀膜热辐射的烘烤时积累热量来提升自身温度。加热部12是完全遮挡基材20的边缘段22的，加热部12自身不具备导走热量的情况下，加热部12吸收的热量不会快速的通过邻接边界导走，邻接边界形成热阻效应。即冷却部11和加热部12邻接边界形成非连续性的热分布变化，加热部12的温度持续升高，冷却部11的温度低。最终的效果是加热部12温度升高后相对于蒸发物来源方向的另一面可以向边缘段22提供热辐射。即加热部12自身成为热源辐射热量来烘烤被遮挡的边缘段22，达成基材20在遮挡边界的受热是相对均匀或缓变的。本发明应用实施例中的加热部12可以理解为导热块，加热部12外侧形成的热量会传导至内侧，从而实现对薄膜边缘烘烤。加热部12的热量是镀膜粒子溅射或者热蒸发形成的。加热部12遮挡的边缘段22表面的温度与未遮挡的中间段21表面的温度非常相近，中间段21沿第一方向至边缘段22的温度差异低于10℃。As shown in Figure 4, the original one-piece arc-shaped cooling baffle is designed to be composed of a separable cooling part 11 and a heating part 12. The heating part 12 is mainly used to shield and bake the substrate. The cooling part 11 is mainly used to protect the non-film-running parts 012 at both ends of the main roller 01 that are not covered by the base material 20 . Among them, the cooling part 11 and the heating part 12 can be conveniently adjacent, and the cooling part 11 and the heating part 12 form a certain controlled thermal resistance effect at the adjacent boundary position, so as to achieve the thermal radiation of the heating part 12 by sputtering or thermal evaporation coating. It accumulates heat during baking to raise its own temperature. The heating part 12 completely blocks the edge section 22 of the base material 20. If the heating part 12 itself does not have the ability to conduct heat, the heat absorbed by the heating part 12 will not be quickly conducted through the adjacent boundaries, and the adjacent boundaries form a thermal resistance effect. . That is, the adjacent boundary between the cooling part 11 and the heating part 12 forms a discontinuous heat distribution change, the temperature of the heating part 12 continues to rise, and the temperature of the cooling part 11 is low. The final effect is that after the temperature of the heating part 12 is increased, the other side relative to the direction of the source of evaporation can provide heat radiation to the edge section 22 . That is, the heating part 12 itself becomes a heat source and radiates heat to bake the blocked edge section 22, so that the heating of the base material 20 at the blocked boundary is relatively uniform or gradual. The heating part 12 in the application embodiment of the present invention can be understood as a thermal conductive block. The heat generated on the outside of the heating part 12 will be conducted to the inside, thereby achieving baking of the edge of the film. The heat of the heating part 12 is formed by sputtering or thermal evaporation of coating particles. The temperature of the surface of the edge section 22 shielded by the heating part 12 is very similar to the temperature of the surface of the unshielded middle section 21 , and the temperature difference from the middle section 21 to the edge section 22 along the first direction is less than 10°C.
方案一通过加热部12实现对基材20的被动烘烤时，还可以通过调节基材20的走速快慢(即走膜速度的快慢)来确保收卷质量，具体地，如果边缘段22的温度高于中间段21的温度，则可以减慢走膜速度，如果边缘段22的温度低于中间段21的温度，则可以加快走膜速度，始终使中间段21和边缘段22之间的温差在可控温度范围内甚至保持一致。When the first solution realizes passive baking of the substrate 20 through the heating part 12, the winding quality can also be ensured by adjusting the traveling speed of the substrate 20 (that is, the film traveling speed). Specifically, if the edge section 22 If the temperature is higher than the temperature of the middle section 21, the film walking speed can be slowed down. If the temperature of the edge section 22 is lower than the temperature of the middle section 21, the film walking speed can be accelerated, always keeping the distance between the middle section 21 and the edge section 22 The temperature difference even remains consistent within the controllable temperature range.
冷却部11上设置冷却流道后基于通入的冷却介质产生冷却效果时，能够带走卷绕镀膜装置00真空腔室内的热量。如果不冷却，那真空腔室内的温度会持续增加，并且不让过多的热量沉积在冷却部11上面，使冷却部11不会变形。此外，冷却部11和加热部12邻接接触虽然在冷却部11和加热部12之间产生了热阻隔，但加热部12在称为热源为基材20边缘段22提供烘烤作用的同时，加热部12上过多的热量会通过冷却部11的冷却作用缓慢导走，从而不会让加热部12持续升温后的温度过高，避免被遮挡烘烤的边缘段22的温度过高造成基材20的严重变形。When the cooling flow channel is provided in the cooling part 11 and a cooling effect is generated based on the passed cooling medium, the heat in the vacuum chamber of the roll coating device 00 can be taken away. If it is not cooled, the temperature in the vacuum chamber will continue to increase, and excessive heat will not be deposited on the cooling part 11, so that the cooling part 11 will not be deformed. In addition, although the cooling part 11 and the heating part 12 are in adjacent contact, although a thermal barrier is generated between the cooling part 11 and the heating part 12 , the heating part 12 provides a baking effect for the edge section 22 of the base material 20 while being called a heat source. Excessive heat on the part 12 will be slowly dissipated through the cooling effect of the cooling part 11, so that the temperature of the heating part 12 after continuous heating will not be too high, and the temperature of the edge section 22 that is blocked and baked will not be too high, causing the base material to be too high. 20 severely deformed.
加热部12与冷却部11可以是属于相同或不同的板体类型，冷却部11通常是铝、铜、不锈钢及其包含有这些金属元素的合金成分构成的部件。具体地，冷却部11的板体类型可包括铝板、铜板、不锈钢板、铝铜合金板中的至少一种，加热部12的板体类型包括铝板、铜板、不锈钢板、铝铜合金板中的至少一种。The heating part 12 and the cooling part 11 may be of the same or different plate types. The cooling part 11 is usually made of aluminum, copper, stainless steel and alloy components containing these metal elements. Specifically, the plate type of the cooling part 11 may include at least one of an aluminum plate, a copper plate, a stainless steel plate, and an aluminum-copper alloy plate, and the plate type of the heating part 12 may include at least one of an aluminum plate, a copper plate, a stainless steel plate, and an aluminum-copper alloy plate. At least one.
加热部12与冷却部11之间具有的热阻效应的大小可以通过调整两者相互之间的接触面积的大小来进行控制，具体地，冷却部11和加热部12两者至少之一能够在滑轨03上沿第一方向往复移动，从而实现冷却部11和加热部12之间接触面积的调节。The size of the thermal resistance effect between the heating part 12 and the cooling part 11 can be controlled by adjusting the size of the contact area between the two. Specifically, at least one of the cooling part 11 and the heating part 12 can be in The slide rail 03 moves back and forth along the first direction, thereby adjusting the contact area between the cooling part 11 and the heating part 12 .
本发明应用实施例还可在加热部12靠近冷却部11的一侧引入不同于加热部12成分的第三板体13，通过焊接等方式将第三板体13衔接于冷却部11和加热部12之间，第三板体13具有相对于加热部12和冷却部11更低的热导率，从而通过第三板体13实现对加热部12热的阻隔。其中，冷却部11的板体类型包括铝板和/或铜板，加热部12的板体类型包括铝板和/或铜板，由于铝板的热导率是237、铜板的热导率是401，第三板体13的热导率需小于铝板和铜板的热导率，对此，第三板体13可包括铂板、铁板、钢板、锡板、铅板至少之一。其中，铂板的热导率是70、铁板的热导率是60、钢板的热导率是60、锡板的热导率是67、铅板的热导率是34.8。由此，冷却部11和加热部12之间设置第三板体13后两者之间的热阻效应更佳，从而实现加热部12持续升温成为热源来对基材20边缘段22进行烘烤。The application embodiment of the present invention can also introduce a third plate body 13 with a different composition from the heating part 12 on the side of the heating part 12 close to the cooling part 11, and connect the third plate body 13 to the cooling part 11 and the heating part through welding or other methods. 12 , the third plate body 13 has a lower thermal conductivity than the heating part 12 and the cooling part 11 , so that the third plate body 13 achieves heat isolation from the heating part 12 . Among them, the plate type of the cooling part 11 includes aluminum plate and/or copper plate, and the plate type of the heating part 12 includes aluminum plate and/or copper plate. Since the thermal conductivity of the aluminum plate is 237 and the thermal conductivity of the copper plate is 401, the third plate The thermal conductivity of the body 13 needs to be smaller than the thermal conductivity of the aluminum plate and the copper plate. For this reason, the third plate body 13 may include at least one of a platinum plate, an iron plate, a steel plate, a tin plate, and a lead plate. Among them, the thermal conductivity of the platinum plate is 70, the thermal conductivity of the iron plate is 60, the thermal conductivity of the steel plate is 60, the thermal conductivity of the tin plate is 67, and the thermal conductivity of the lead plate is 34.8. Therefore, the thermal resistance effect between the cooling part 11 and the heating part 12 is better after the third plate 13 is provided between the two, thereby enabling the heating part 12 to continue to heat up and become a heat source to bake the edge section 22 of the base material 20 .
在增加第三板体13增强冷却部11和加热部12之间的热阻隔的基础上，为使冷却部11和加热部12之间的热阻隔效应能够依据实际需求进行调整，如可根据基材20中间段21受热量的大小，增强或降低冷却部11和加热部12之间的热阻隔。对此，本发明应用实施例中的冷却部11和第三板体13可设置成两者至少之一能沿第一方向往复移动，以调节冷却部11和第三板体13之间的接触面积。和/或，加热部12和第三板体13两者至少之一沿第一方向往复移动，以调节加热部12和第三板体13之间的接触面积。如果中间段21耐受热量大则需要让冷却部11和第三板体13之间的接触面积(即冷却部11和第三板体13的重叠面积)更小。和/或，如果中间段21耐受热量大则需要让加热部12和第三板体13之间的接触面积更小。接触面积越小，导走的热量越少，从而确保中间段21至边缘段22的温差均匀缓慢变化，避免基材20产生形变。On the basis of adding the third plate body 13 to enhance the thermal isolation between the cooling part 11 and the heating part 12, in order to enable the thermal isolation effect between the cooling part 11 and the heating part 12 to be adjusted according to actual needs, for example, according to the basic The amount of heat received by the middle section 21 of the material 20 can enhance or reduce the thermal barrier between the cooling part 11 and the heating part 12 . In this regard, the cooling part 11 and the third plate body 13 in the application embodiment of the present invention can be configured so that at least one of them can reciprocate along the first direction to adjust the contact between the cooling part 11 and the third plate body 13 area. And/or, at least one of the heating part 12 and the third plate body 13 moves back and forth along the first direction to adjust the contact area between the heating part 12 and the third plate body 13 . If the heat resistance of the middle section 21 is high, the contact area between the cooling part 11 and the third plate body 13 (that is, the overlapping area of the cooling part 11 and the third plate body 13) needs to be smaller. And/or, if the heat resistance of the middle section 21 is large, the contact area between the heating part 12 and the third plate body 13 needs to be smaller. The smaller the contact area, the less heat is conducted away, thereby ensuring that the temperature difference from the middle section 21 to the edge section 22 changes evenly and slowly to avoid deformation of the base material 20 .
此外，冷却部11和加热部12之间接触面积的改变还可以是沿着主锟01圆周方向的滑移动。具体地，为实现沿着主锟01圆周方向的滑移动，冷却部11靠近加热部12的一侧间隔设置有多个第一接触段111，加热部12靠近冷却部11的一侧间隔设置有多个第二接触段121，第一接触段111和第二接触段121两者至少之一沿第二方向(即主锟01圆周方向)往复移动，以调节第一接触段111和第二接触段121之间的接触面积。具体地，冷却部11和加热部12构成的主体通过卷绕镀膜装置00上设置的滑轨03安装包覆于主锟01外表面时，可将冷却部11和加热部12分别固定于相互平行的两条滑轨03上，然后将冷却部11或加热部12沿第二方向移动来调整两者之间的接触面积后，通过锁紧机构16将冷却部11和加热部12锁定于具有当前接触面积的连接状态。In addition, the change of the contact area between the cooling part 11 and the heating part 12 may also be a sliding movement along the circumferential direction of the main roller 01 . Specifically, in order to realize sliding movement along the circumferential direction of the main roller 01, a plurality of first contact segments 111 are provided at intervals on the side of the cooling part 11 close to the heating part 12, and a plurality of first contact segments 111 are provided at intervals on the side of the heating part 12 close to the cooling part 11. A plurality of second contact segments 121, at least one of the first contact segment 111 and the second contact segment 121 moves back and forth along the second direction (ie, the circumferential direction of the main roller 01) to adjust the first contact segment 111 and the second contact segment 121. The contact area between segments 121. Specifically, when the main body composed of the cooling part 11 and the heating part 12 is installed and covered on the outer surface of the main roller 01 through the slide rail 03 provided on the roll coating device 00, the cooling part 11 and the heating part 12 can be fixed to each other parallel to each other. on the two slide rails 03, and then move the cooling part 11 or the heating part 12 in the second direction to adjust the contact area between the two, and then lock the cooling part 11 and the heating part 12 with the current through the locking mechanism 16. The connection status of the contact area.
由于第一接触段111和第二接触段121沿第一方向移动和/或第二方向接触重叠时，第一接触段111和第二接触段121之间会形成孔隙，在基材20镀膜制程过程中，镀膜粒子会穿过孔隙溅射到主锟01上污染主锟01。对此，本发明应用实施例提供的主体还包括覆盖板14，覆盖板14覆盖设置于第一接触段111和第二接触段121两者至少之一上，从而覆盖住第一接触段111和第二接触段121之间形成的孔隙，避免镀膜粒子溅射到主锟01上。当然，第一接触段111和第二接触段121沿第一方向移动后，第一接触段111和第二接触段121在第一方向的水平距离为零时更好，从而确保镀膜挡板10整体的密封性，防止镀膜粒子溅射至主锟01上。Since the first contact segment 111 and the second contact segment 121 move in the first direction and/or contact and overlap in the second direction, a pore will be formed between the first contact segment 111 and the second contact segment 121 , and during the coating process of the substrate 20 During the process, the coating particles will be sputtered through the pores onto the main drum 01 and contaminate the main drum 01. In this regard, the main body provided by the application embodiment of the present invention also includes a covering plate 14. The covering plate 14 is disposed to cover at least one of the first contact section 111 and the second contact section 121, thereby covering the first contact section 111 and the second contact section 121. The pores formed between the second contact segments 121 prevent coating particles from being sputtered onto the main roller 01 . Of course, after the first contact segment 111 and the second contact segment 121 move along the first direction, it is better when the horizontal distance between the first contact segment 111 and the second contact segment 121 in the first direction is zero, thereby ensuring that the coating baffle 10 The overall sealing prevents coating particles from being sputtered onto the main roller 01.
此外，加热部12沿第二方向具有第一端122和第二端123，可设置第一端122的宽度和第二端123的宽度之差的绝对值不小于0cm且不大于1.5cm，从而使加热部12靠近中间段21的一侧与主锟01的水平界面保持一定的倾斜角度。本发明实施例的镀膜挡板10为弧形板状结构时，弧形板状结构的直径可设置于75cm至100cm之间，从而更好地包覆于主锟01外表面。具体地，加热部12为与主锟01外表面相适配的弧形板体时，第一端122和第二端123分别为弧形板体的位于第二方向上的相对两端，基材20沿加热部12的宽度逐渐减小的方向进行镀膜时(如第二端123的宽度大于第一端122时，基材20沿第二端123至第一端122的方向走膜)，由于过渡段23受到加热部12的遮挡较少，过渡段23的温度将会高于边缘段22的温度、但会低于中间段21的温度，从而实现基材20中间段21至边缘段22的温度达到均匀变化或缓慢变化，进一步避免基材20产生形变，提高基材20的收卷质量和切裁率。因此，本发明应用实施例通过限定加热部12的第一端122和第二端123之间差值的大小，来对加热部12的宽度变化进行控制，从而控制基材20中间段21至边缘段22的温度均匀变化或缓慢变化，提高基材20的收卷质量和切裁率。In addition, the heating part 12 has a first end 122 and a second end 123 along the second direction, and the absolute value of the difference between the width of the first end 122 and the width of the second end 123 can be set to not less than 0 cm and not more than 1.5 cm, so that The horizontal interface between the side of the heating part 12 close to the middle section 21 and the main roller 01 maintains a certain inclination angle. When the coating baffle 10 in the embodiment of the present invention has an arc-shaped plate structure, the diameter of the arc-shaped plate structure can be set between 75 cm and 100 cm, so as to better cover the outer surface of the main roller 01 . Specifically, when the heating part 12 is an arc-shaped plate that matches the outer surface of the main roller 01, the first end 122 and the second end 123 are respectively the opposite ends of the arc-shaped plate located in the second direction, and the base material 20 When coating along the direction in which the width of the heating part 12 gradually decreases (for example, when the width of the second end 123 is greater than the width of the first end 122, the substrate 20 is coated along the direction from the second end 123 to the first end 122), due to The transition section 23 is less blocked by the heating part 12, and the temperature of the transition section 23 will be higher than the temperature of the edge section 22, but lower than the temperature of the middle section 21, thereby realizing the heating of the base material 20 from the middle section 21 to the edge section 22. The temperature changes evenly or slowly, further preventing deformation of the base material 20 and improving the winding quality and cutting rate of the base material 20 . Therefore, the application embodiment of the present invention controls the change in width of the heating part 12 by limiting the difference between the first end 122 and the second end 123 of the heating part 12, thereby controlling the middle section 21 to the edge of the base material 20 The temperature of the section 22 changes evenly or slowly to improve the winding quality and cutting rate of the substrate 20 .
基材20的中间段21和边缘段22的边界左右可能具有一定的温差，但这个温差在控制范围内(如位于10℃内)。针对加热部12这个部件，其靠近中间段21的一侧的侧边斜一点，其作用是：如果不是斜边是直线，那这个直线界面的两边可能具有温差，有温差就会有形变，并且基材20在其长度方向是张紧的，因此，直线界面两边的形变不同，会影响基材20的收卷质量，而如果是斜边，则会减少或避免这个问题。There may be a certain temperature difference around the boundary between the middle section 21 and the edge section 22 of the base material 20 , but this temperature difference is within a control range (for example, within 10° C.). For the heating part 12, the side of the side close to the middle section 21 is a little sloped. Its function is: if the slope is not a straight line, then there may be a temperature difference on both sides of the straight line interface. If there is a temperature difference, there will be deformation, and The base material 20 is tensioned in its length direction. Therefore, the deformation on both sides of the linear interface is different, which will affect the winding quality of the base material 20. If it is a bevel edge, this problem will be reduced or avoided.
加热部12的第一热膨胀系数在热状态下(即第一温度范围下)与镀膜层(如Cu膜膜层)的第二热膨胀系数具有相近的特点，但是当加热部12被取下冷却后第一热膨胀系数需与第二热膨胀系数具有较大的差异，即第一热膨胀系数和第二热膨胀系数之差在第二温度范围内大于第二预定数值范围，以至于镀膜层能够基于较大差异的热膨胀系数或有关应力的差异从加热部12表面剥离，从而达到清洁加热部12表面镀膜层的作用。The first thermal expansion coefficient of the heating part 12 has similar characteristics to the second thermal expansion coefficient of the coating layer (such as a Cu film layer) in a hot state (i.e., in the first temperature range). However, when the heating part 12 is removed and cooled, The first thermal expansion coefficient needs to be significantly different from the second thermal expansion coefficient, that is, the difference between the first thermal expansion coefficient and the second thermal expansion coefficient is greater than the second predetermined value range in the second temperature range, so that the coating layer can be based on the larger difference. The difference in thermal expansion coefficient or related stress is peeled off from the surface of the heating part 12, thereby achieving the function of cleaning the coating layer on the surface of the heating part 12.
本发明应用实施例提高的方案二是通过在镀膜挡板10加热部12的内侧(即朝向主锟01外表面的一侧)增加加热板17来实现对基材20的主动式热烘烤，达成减小基材20的中间段21至边缘段22的受热的温度差异或累积热量的差异。The second solution for improving the application embodiment of the present invention is to achieve active thermal baking of the substrate 20 by adding a heating plate 17 inside the heating part 12 of the coating baffle 10 (that is, the side facing the outer surface of the main roller 01). This is achieved by reducing the heated temperature difference or the difference in accumulated heat from the middle section 21 to the edge section 22 of the base material 20 .
具体地，本发明应用实施例提高的方案二的技术内容包括：Specifically, the technical content of the second solution improved by the application embodiment of the present invention includes:
将原有的一体成型(整体部件)的弧形冷却挡板进行优化设计(原本的弧形挡板是整体具有相应的可以通冷却介质的流道及保护罩的结构)，改进后为镀膜挡板10靠近基材20中央有效镀膜区域的内侧(即中间段21靠近边缘段22的一侧)设定具有加热功能的柔性材质的加热板17，从而通过加热板17实现对边缘段22的热烘烤。Optimize the design of the original one-piece (whole component) arc-shaped cooling baffle (the original arc-shaped baffle has a corresponding flow channel and protective cover that can pass the cooling medium), and the improved coating baffle is A heating plate 17 of flexible material with a heating function is set on the inner side of the plate 10 close to the effective coating area in the center of the substrate 20 (that is, the side of the middle section 21 close to the edge section 22), so that the edge section 22 can be heated through the heating plate 17. bake.
其中，在加热部12朝向主锟01的侧面并靠近主锟01走膜部011的一侧设置有一个空腔区域，柔性可弯曲的加热板17设置于空腔区域内，且加热部12位于空腔区域以外的位置可设置冷却流道，将过多的热量散发出去保护自身结构，使得加热部12在加热板17对基材20进行加热的同时自身始终保持较低的温度。本发明应用实施例可以通过调节加热板17的电压或功率来达成加热温度高低的调控，温度的高低即以实现基材20边缘段22实际受到的热量与中间段21的受热基本相近，避免基材20在被镀膜挡板10遮挡边缘位置因温度突变而造成的变形问题。Among them, a cavity area is provided on the side of the heating part 12 facing the main roller 01 and close to the film feeding part 011 of the main roller 01. The flexible and bendable heating plate 17 is arranged in the cavity area, and the heating part 12 is located Cooling flow channels can be provided outside the cavity area to dissipate excess heat and protect its own structure, so that the heating part 12 always maintains a lower temperature while the heating plate 17 heats the base material 20 . In the application embodiment of the present invention, the heating temperature can be adjusted by adjusting the voltage or power of the heating plate 17. The temperature can be adjusted so that the actual heat received by the edge section 22 of the base material 20 is basically similar to the heat received by the middle section 21, which avoids the basic problem. The problem of deformation caused by sudden changes in temperature at the edge of the material 20 that is blocked by the coating baffle 10 .
本发明应用实施例中的加热板17和镀膜挡板10都是弧形板状结构，通常情况下，设置有加热板17的镀膜挡板10覆盖半周的主锟01。The heating plate 17 and the coating baffle 10 in the application embodiment of the present invention are both arc-shaped plate structures. Normally, the coating baffle 10 provided with the heating plate 17 covers half of the main drum 01 .
设置有加热板17的冷却部11和加热部12可以是一体成型结构也可是邻接的分体结构，冷却部11靠近加热部12的一侧侧设定有可以通入冷却介质进行散热冷却的冷却流道。冷却部11和加热部12可以是一体成型结构时，这个一体成型结构具有冷却流道。加热部12和冷却部11是分体结构时，两者也都可设置冷却流道，加热部12不设置冷却流道时，即实现了方案一和方案二的组合，从而通过被动加主动的方式实现对基材20的烘烤。The cooling part 11 and the heating part 12 provided with the heating plate 17 may be an integral structure or an adjacent separate structure. The side of the cooling part 11 close to the heating part 12 is provided with a cooling device that can pass a cooling medium for heat dissipation and cooling. flow channel. When the cooling part 11 and the heating part 12 can be an integrally formed structure, this integrally formed structure has a cooling flow channel. When the heating part 12 and the cooling part 11 are separate structures, both of them can also be provided with cooling flow channels. When the heating part 12 is not provided with a cooling flow channel, the combination of the first and second solutions is realized, so that through passive and active In this way, the base material 20 is baked.
加热板17为柔性可弯曲的电阻加热板171时，可对电阻加热板171施加12V至36V范围内的任一电压值。从而根据对电阻加热板171施加的不同电压，来调节基材20边缘段22的受热量。加热板17还可为硅胶加热板，硅胶加热板包括耐高温硅胶体和电阻加热丝，电阻加热丝嵌设于耐高温硅胶体。具体地，施加于电阻加热板171的电压的控制方式可根据镀膜走速、镀膜功率的大小来确定。镀膜走速越快，基材20中间段21的受热量越少，因此可以降低施加于电阻加热板的电压。镀膜功率越小，基材20中间段21的受热量越少，因此可以降低施加于电阻加热板的电压，从而降低基材20边缘段22的温度，使中间段21和边缘段22之间的温差始终位于能够避免基材20变形的可控温度范围内，如使温差小于10℃。When the heating plate 17 is a flexible and bendable resistance heating plate 171, any voltage value in the range of 12V to 36V can be applied to the resistance heating plate 171. Thereby, the heat amount of the edge section 22 of the substrate 20 is adjusted according to different voltages applied to the resistance heating plate 171 . The heating plate 17 can also be a silicone heating plate. The silicone heating plate includes a high-temperature resistant silicone body and a resistance heating wire. The resistance heating wire is embedded in the high-temperature resistance silicone body. Specifically, the control method of the voltage applied to the resistance heating plate 171 can be determined according to the coating speed and the coating power. The faster the coating speed is, the less heat is received by the middle section 21 of the substrate 20, so the voltage applied to the resistance heating plate can be reduced. The smaller the coating power, the less heat is received by the middle section 21 of the substrate 20, so the voltage applied to the resistance heating plate can be reduced, thereby reducing the temperature of the edge section 22 of the substrate 20, so that the gap between the middle section 21 and the edge section 22 can be reduced. The temperature difference is always within a controllable temperature range that can avoid deformation of the base material 20 , for example, the temperature difference is less than 10°C.
加热部12的空腔区域内设定了可以容纳固定电阻加热板171的卡槽18，并且卡槽18面对加热部12的一侧设定有第一隔热件15，第一隔热件15可以为聚四氟乙烯板，聚四氟乙烯板阻隔电阻加热板171产生的热量传递至加热部12。A slot 18 that can accommodate the fixed resistance heating plate 171 is set in the cavity area of the heating part 12, and a first heat insulating piece 15 is set on the side of the slot 18 facing the heating part 12. The first heat insulating piece 15 may be a polytetrafluoroethylene plate, which blocks the heat generated by the resistance heating plate 171 from being transmitted to the heating part 12 .
此外，方案二设置有电阻加热板171的加热部12沿第二方向具有第一端122和第二端123，在镀膜挡板10位于75cm至100cm的直径范围下，可设置第一端122的宽度和第二端123的宽度之差的绝对值不小于0cm且不大于1.5cm，从而使加热部12靠近中间段21的一侧与主锟01的水平界面保持一定的倾斜角度。具体地，加热部12为与主锟01外表面相适配的弧形板体时，第一端122和第二端123分别为弧形板体的位于第二方向上的相对两端，基材20沿加热部12的宽度逐渐减小的方向进行镀膜时，由于过渡段23受到加热部12的遮挡较少，过渡段23的温度将会高于边缘段22的温度、但会低于中间段21的温度，从而实现基材20中间段21至边缘段22的温度达到均匀变化或缓慢变化，进一步避免基材20产生形变，提高基材20的收卷质量和切裁率。因此，本发明应用实施例通过限定加热部12的第一端122和第二端123之间差值的大小，来对加热部12的宽度变化进行控制，从而控制基材20中间段21至边缘段22的温度均匀变化或缓慢变化，提高基材20的收卷质量和切裁率。In addition, the heating part 12 provided with the resistance heating plate 171 in the second solution has a first end 122 and a second end 123 along the second direction. When the coating baffle 10 is located in the diameter range of 75cm to 100cm, the first end 122 can be set The absolute value of the difference between the width and the width of the second end 123 is not less than 0 cm and not greater than 1.5 cm, so that the side of the heating part 12 close to the middle section 21 maintains a certain tilt angle with the horizontal interface of the main roller 01 . Specifically, when the heating part 12 is an arc-shaped plate that matches the outer surface of the main roller 01, the first end 122 and the second end 123 are respectively the opposite ends of the arc-shaped plate located in the second direction, and the base material 20 When coating along the direction in which the width of the heating part 12 gradually decreases, since the transition section 23 is less blocked by the heating section 12, the temperature of the transition section 23 will be higher than the temperature of the edge section 22, but lower than the middle section. 21, so that the temperature from the middle section 21 to the edge section 22 of the base material 20 can change evenly or slowly, further avoiding deformation of the base material 20 and improving the winding quality and cutting rate of the base material 20. Therefore, the application embodiment of the present invention controls the change in width of the heating part 12 by limiting the difference between the first end 122 and the second end 123 of the heating part 12, thereby controlling the middle section 21 to the edge of the base material 20 The temperature of the section 22 changes evenly or slowly to improve the winding quality and cutting rate of the substrate 20 .
由于冷却部11靠近加热部12的一侧间隔设置有多个第一接触段111，加热部12靠近冷却部11的一侧间隔设置有多个第二接触段121，本发明方案二也可通过调整第一接触段111和第二接触段121之间的接触面积来改变加热部12和冷却部11之间额热阻隔效应大小，从而实现对加热部12的热量通过冷却部11带走的热量多少进行调整。Since the side of the cooling part 11 close to the heating part 12 is provided with a plurality of first contact segments 111 at intervals, and the side of the heating part 12 close to the cooling part 11 is provided with a plurality of second contact segments 121 at intervals, the second solution of the present invention can also be adopted The contact area between the first contact section 111 and the second contact section 121 is adjusted to change the size of the thermal isolation effect between the heating part 12 and the cooling part 11 , thereby realizing the heat removal from the heating part 12 through the cooling part 11 How much to adjust.
本发明应用实施例中的冷却部11和加热部12在滑轨03上的水平移动或者圆周转动，都可以是人手操作。对冷却部11和加热部12之间接触面积以水平调节或圆周调节的方式调整好后再启动卷绕镀膜装置00对基材20进行镀膜。在镀膜过程中，可以调节电阻加热板171的功率或者基材20的走速，使基材20中间段21和边缘段22的交界处不会形变。In the application embodiment of the present invention, the horizontal movement or circular rotation of the cooling part 11 and the heating part 12 on the slide rail 03 can be operated by human hands. After the contact area between the cooling part 11 and the heating part 12 is adjusted horizontally or circularly, the roll coating device 00 is started to coat the substrate 20 . During the coating process, the power of the resistance heating plate 171 or the traveling speed of the substrate 20 can be adjusted so that the junction between the middle section 21 and the edge section 22 of the substrate 20 will not be deformed.
为了便于描述，在这里可以使用空间相对术语，如“在……之上”、“在……上方”、“在……上表面”、“上面的”等，用来描述如在图中所示的一个器件或特征与其他器件或特征的空间位置关系。应当理解的是，空间相对术语旨在包含除了器件在图中所描述的方位之外的在使用或操作中的不同方位。例如，如果附图中的器件被倒置，则描述为“在其他器件或构造上方”或“在其他器件或构造之上”的器件之后将被定位为“在其他器件或构造下方”或“在其他器件或构造之下”。因而，示例性术语“在……上方”可以包括“在……上方”和“在……下方”两种方位。该器件也可以其他不同方式定位(旋转90度或处于其他方位)，并且对这里所使用的空间相对描述作出相应解释。For the convenience of description, spatially relative terms can be used here, such as "on...", "on...", "on the upper surface of...", "above", etc., to describe what is shown in the figure. The spatial relationship between one device or feature and other devices or features. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a feature in the figure is turned upside down, then one feature described as "above" or "on top of" other features or features would then be oriented "below" or "below" the other features or features. under other devices or structures". Thus, the exemplary term "over" may include both orientations "above" and "below." The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
此外，需要说明的是，使用“第一”、“第二”等词语来限定零部件，仅仅是为了便于对相应零部件进行区别，如没有另行声明，上述词语并没有特殊含义，因此不能理解为对本申请保护范围的限制。In addition, it should be noted that the use of words such as "first" and "second" to define parts is only to facilitate the distinction between corresponding parts. Unless otherwise stated, the above words have no special meaning and therefore cannot be understood. To limit the scope of protection of this application.
以上仅为本申请的优选实施例而已，并不用于限制本申请，对于本领域的技术人员来说，本申请可以有各种更改和变化。凡在本申请的精神和原则之内，所作的任何修改、等同替换、改进等，均应包含在本申请的保护范围之内。The above are only preferred embodiments of the present application and are not intended to limit the present application. For those skilled in the art, the present application may have various modifications and changes. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of this application shall be included in the protection scope of this application.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311203224.8ACN117230425A (en) | 2023-09-15 | 2023-09-15 | Coating baffle and winding coating device |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311203224.8ACN117230425A (en) | 2023-09-15 | 2023-09-15 | Coating baffle and winding coating device |
| Publication Number | Publication Date |
|---|---|
| CN117230425Atrue CN117230425A (en) | 2023-12-15 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311203224.8APendingCN117230425A (en) | 2023-09-15 | 2023-09-15 | Coating baffle and winding coating device |
| Country | Link |
|---|---|
| CN (1) | CN117230425A (en) |
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