技术领域Technical field
本公开涉及光通信技术领域，具体涉及一种波导结构。The present disclosure relates to the field of optical communication technology, and in particular to a waveguide structure.
背景技术Background technique
随着网络技术的升级和时长需求的扩展，低成本、低能耗和高集成度的光通信器件越来越受到青睐，集成化是光通信器件的发展趋势。With the upgrade of network technology and the expansion of duration requirements, optical communication devices with low cost, low energy consumption and high integration are becoming more and more popular. Integration is the development trend of optical communication devices.
光通信集成器件的基础结构是光波导结构，在实际应用中，为了实现通信目的，需要对光波导结构进行切割；例如，在阵列波导光栅的无热封装方案中采用波导切割的方式以补偿波长随温度的变化。但是波导切割会引入额外的切缝损耗，从而给增大光通信器件的损耗，进而影响通信系统的正常工作。The basic structure of optical communication integrated devices is an optical waveguide structure. In practical applications, in order to achieve communication purposes, the optical waveguide structure needs to be cut; for example, in the athermal packaging solution of arrayed waveguide gratings, waveguide cutting is used to compensate for the wavelength changes with temperature. However, waveguide cutting will introduce additional slicing loss, thereby increasing the loss of optical communication devices and affecting the normal operation of the communication system.
相关技术中虽然提出采用周期分段式波导来降低切缝损耗，但并未给出具体的实施方式，另外，周期分段式波导也具有一定的切缝损耗，不便于在波导芯片筛选时限定插损指标。Although the use of periodic segmented waveguides is proposed to reduce slit loss in related technologies, no specific implementation method is given. In addition, periodic segmented waveguides also have a certain slit loss, which is inconvenient to limit during waveguide chip screening. Insertion loss indicator.
发明内容Contents of the invention
有鉴于此，本公开的主要目的在于提供一种波导结构。In view of this, the main purpose of the present disclosure is to provide a waveguide structure.
本公开实施例提供一种波导结构，包括：Embodiments of the present disclosure provide a waveguide structure, including:
第一波导组件，设置有缝隙；The first waveguide component is provided with a gap;
两个第二波导组件，对称设置于所述第一波导组件相对的两侧，且所述第二波导组件与所述第一波导组件相连，所述第二波导组件的折射率呈周期性变化。Two second waveguide components are symmetrically arranged on opposite sides of the first waveguide component, and the second waveguide component is connected to the first waveguide component. The refractive index of the second waveguide component changes periodically. .
可选地，所述第二波导组件，包括：Optionally, the second waveguide component includes:
多个相连的波导单元，每一个波导单元具有第一区域和第二区域，第一区域的折射率与所述第二区域的折射率不同；A plurality of connected waveguide units, each waveguide unit having a first region and a second region, the refractive index of the first region being different from the refractive index of the second region;
多个波导单元内的所述第一区域和所述第二区域交替间隔排布。The first regions and the second regions in a plurality of waveguide units are alternately arranged at intervals.
可选地，所述第二波导组件内的多个所述波导单元的占空比不同；Optionally, the duty cycles of the plurality of waveguide units in the second waveguide component are different;
其中，所述占空比用于描述所述波导单元内所述第一区域或所述第二区域的区域宽度与所述波导单元的宽度之间的比值。Wherein, the duty cycle is used to describe the ratio between the width of the first region or the second region in the waveguide unit and the width of the waveguide unit.
可选地，所述第二波导组件内多个所述波导单元的占空比，在所述波导单元的光传播方向上呈递增或递减的变化趋势。Optionally, the duty ratios of the plurality of waveguide units in the second waveguide component exhibit an increasing or decreasing trend in the light propagation direction of the waveguide units.
可选地，所述波导单元的占空比，与所述波导单元和所述第一波导组件之间的距离正相关；Optionally, the duty cycle of the waveguide unit is positively related to the distance between the waveguide unit and the first waveguide component;
其中，所述占空比为所述第一区域对应的占空比，所述第一区域的折射率高于所述第二区域的折射率。Wherein, the duty cycle is a duty cycle corresponding to the first region, and the refractive index of the first region is higher than the refractive index of the second region.
可选地，所述第二波导组件内的多个波导单元的占空比，随所述第二波导组件在第一方向上的波导宽度和/或在第二方向上的波导宽度的变化而变化；Optionally, the duty cycle of the plurality of waveguide units in the second waveguide component changes with the waveguide width of the second waveguide component in the first direction and/or the waveguide width in the second direction. Variety;
其中，所述第一方向与所述第二波导组件内的光传播方向平行；所述第二方向与所述第一方向垂直。Wherein, the first direction is parallel to the light propagation direction in the second waveguide component; the second direction is perpendicular to the first direction.
可选地，所述第一波导组件，包括：Optionally, the first waveguide component includes:
波导本体；waveguide body;
切缝标记，设置于所述波导本体上，用于指示所述波导本体上的待切割位置，以形成所述缝隙。A slit mark is provided on the waveguide body and used to indicate the position to be cut on the waveguide body to form the slit.
可选地，所述波导本体的波导宽度由所述波导本体的缝隙宽度和切缝容差确定。Optionally, the waveguide width of the waveguide body is determined by the slot width of the waveguide body and the slit tolerance.
可选地，所述第一波导组件，包括：Optionally, the first waveguide component includes:
匹配液，填充于所述波导本体的缝隙内；其中，所述匹配液的折射率与所述波导本体的折射率相关。Matching liquid is filled in the gap of the waveguide body; wherein the refractive index of the matching liquid is related to the refractive index of the waveguide body.
可选地，所述缝隙靠近于所述波导本体的中心位置；其中，所述波导结构的插损参数，与所述缝隙和所述波导本体的中心位置之间的距离正相关。Optionally, the gap is close to the center position of the waveguide body; wherein the insertion loss parameter of the waveguide structure is positively related to the distance between the gap and the center position of the waveguide body.
本公开实施例提供一种波导结构。Embodiments of the present disclosure provide a waveguide structure.
本公开实施例通过在具有缝隙的第一波导组件相对的两侧分别设置折射率呈周期性变化的第二波导组件，并且两个第二波导组件相对于第一波导组件对称，从而利用两个第二波导组件，降低由于第一波导组件的缝隙而引入的切缝损耗，使得相较于其他具有缝隙的光波导结构，本公开实施例所示出的波导结构的切缝损耗明显降低，并且本公开实施例所示出的波导结构切割后的插损值也比其他具有缝隙的常规光波导结构的插损值小，本公开实施例所示出的波导结构切割后的插损值甚至比该波导结构切割前(即第一波导组件未设置有缝隙)的插损值小，以便于在波导芯片筛选时限定插损指标。Embodiments of the present disclosure provide second waveguide components with periodically changing refractive index on opposite sides of the first waveguide component with a gap, and the two second waveguide components are symmetrical with respect to the first waveguide component, thereby utilizing two The second waveguide component reduces the slit loss introduced by the gap in the first waveguide component, so that compared with other optical waveguide structures with slits, the slit loss of the waveguide structure shown in the embodiment of the present disclosure is significantly reduced, and The insertion loss value after cutting of the waveguide structure shown in the embodiment of the present disclosure is also smaller than the insertion loss value of other conventional optical waveguide structures with gaps. The insertion loss value of the waveguide structure after cutting shown in the embodiment of the present disclosure is even smaller than that of other conventional optical waveguide structures with gaps. The insertion loss value of the waveguide structure before cutting (that is, the first waveguide component is not provided with a gap) is small, so that the insertion loss index can be defined during waveguide chip screening.
附图说明Description of drawings
图1是根据一示例性实施例示出的波导结构的结构示意图一；Figure 1 is a schematic structural diagram of a waveguide structure according to an exemplary embodiment;
图2是根据一示例性实施例示出的波导单元的结构示意图；Figure 2 is a schematic structural diagram of a waveguide unit according to an exemplary embodiment;
图3是根据一示例性实施例示出的一种波导结构的结构示意图二；Figure 3 is a structural schematic diagram 2 of a waveguide structure according to an exemplary embodiment;
图4是根据一示例性实施例示出的一种波导结构的结构示意图三；Figure 4 is a structural schematic diagram three of a waveguide structure according to an exemplary embodiment;
图5是根据一示例性实施例示出的一种波导结构的结构示意图四；Figure 5 is a structural schematic diagram 4 of a waveguide structure according to an exemplary embodiment;
图6是根据一示例性实施例示出的一种PLC的结构示意图；Figure 6 is a schematic structural diagram of a PLC according to an exemplary embodiment;
图7是图6的局部放大示意图；Figure 7 is a partially enlarged schematic diagram of Figure 6;
图8是根据一示例性实施例示出的具有上述波导结构的PLC与常规PLC的切缝损耗对比示意图。FIG. 8 is a schematic diagram illustrating the comparison of slit loss between a PLC with the above waveguide structure and a conventional PLC according to an exemplary embodiment.
具体实施方式Detailed ways
为使本公开实施例的目的、技术方案和优点更加清楚，下面将结合本公开实施例中的附图，对发明的具体技术方案做进一步详细描述。以下实施例用于说明本公开，但不用来限制本公开的范围。In order to make the purpose, technical solutions and advantages of the embodiments of the present disclosure clearer, the specific technical solutions of the invention will be described in further detail below in conjunction with the drawings in the embodiments of the present disclosure. The following examples serve to illustrate the disclosure but are not intended to limit the scope of the disclosure.
本公开实施例提供一种波导结构，如图1所示，图1是根据一示例性实施例示出的波导结构的结构示意图一。所述波导结构10包括：An embodiment of the present disclosure provides a waveguide structure, as shown in Figure 1 . Figure 1 is a schematic structural diagram 1 of a waveguide structure according to an exemplary embodiment. The waveguide structure 10 includes:
第一波导组件101，设置有缝隙101a；The first waveguide component 101 is provided with a gap 101a;
两个第二波导组件102，对称设置于所述第一波导组件101相对的两侧，且所述第二波导组件102与所述第一波导组件101相连，所述第二波导组件102的折射率呈周期性变化。Two second waveguide components 102 are symmetrically arranged on opposite sides of the first waveguide component 101, and the second waveguide component 102 is connected to the first waveguide component 101. The refraction of the second waveguide component 102 The rate changes cyclically.
本公开实施例所示出的波导结构可应用于光通信器件内，该光通信器件可包括：阵列波导光栅滤波器、模场转换器等，本公开实施例对此不做限定。The waveguide structure shown in the embodiment of the present disclosure can be applied in an optical communication device. The optical communication device may include: arrayed waveguide grating filter, mode field converter, etc., which is not limited in the embodiment of the present disclosure.
在本公开实施例中，所述波导结构包括：第一波导组件和两个第二波导组件；两个第二波导组件对称设置于第一波导组件相对的两侧。In an embodiment of the present disclosure, the waveguide structure includes: a first waveguide component and two second waveguide components; the two second waveguide components are symmetrically arranged on opposite sides of the first waveguide component.
这里，第一波导组件相对的两侧可为第一波导组件在光传播方向上的两端。即光在波导结构内的传播方向为：由一个第二波导组件传输至第一波导组件，并由第一波导组件传播至另一个第二波导组件的方向。Here, the opposite sides of the first waveguide component may be two ends of the first waveguide component in the light propagation direction. That is, the propagation direction of light in the waveguide structure is the direction from one second waveguide component to the first waveguide component, and from the first waveguide component to another second waveguide component.
第一波导组件设置有缝隙；需要说明的是，相关技术中，通常需要在波导结构内设置缝隙，以满足光通信器件的特定需求；例如，阵列波导光栅内通过设置缝隙，以便采用机械结构将具有一定热膨胀系数的金属杆与输入端相连，将金属杆的热膨胀转化为阵列波导光栅输入端的移动，引起阵列波导光栅中心波长的变化，从而实现对中心波长的温度补偿。The first waveguide component is provided with a gap; it should be noted that in related technologies, it is usually necessary to provide a gap in the waveguide structure to meet the specific needs of optical communication devices; for example, a gap is provided in an arrayed waveguide grating so that a mechanical structure can be used to A metal rod with a certain thermal expansion coefficient is connected to the input end, and the thermal expansion of the metal rod is converted into the movement of the input end of the arrayed waveguide grating, causing a change in the center wavelength of the arrayed waveguide grating, thereby achieving temperature compensation for the center wavelength.
但由于第一波导组件的缝隙会对第一波导组件内传输的光功率产生一定的附加光损耗(即切缝损耗)，从而使得光通信器件的损耗增大，进而影响通信系统的正常工作。However, since the gap in the first waveguide component will cause a certain additional optical loss (ie, slit loss) to the optical power transmitted in the first waveguide component, the loss of the optical communication device will increase, thereby affecting the normal operation of the communication system.
第二波导组件的折射率呈周期性变化；可以理解的是，由于第二波导组件的折射率呈周期性变化，使得光在第二波导组件内传播时，在至少一个光场限制方向上，光场的发散角呈现周期性变化，光波的模斑尺寸也呈现周期性变化。The refractive index of the second waveguide component changes periodically; it can be understood that because the refractive index of the second waveguide component changes periodically, when light propagates in the second waveguide component, in at least one light field limiting direction, The divergence angle of the light field changes periodically, and the mode spot size of the light wave also changes periodically.
需要说明的是，切缝损耗主要由以下两部分组成：(1)缝隙两侧的波导折射率失配或不完全匹配引起的菲涅尔反射；(2)缝隙两侧的波导不同的模场形状引起的模场失配。It should be noted that the slit loss mainly consists of the following two parts: (1) Fresnel reflection caused by mismatch or incomplete matching of the refractive index of the waveguides on both sides of the slit; (2) different mode fields of the waveguides on both sides of the slit Shape induced mode field mismatch.
可以理解的是，对常规波导切割后，常规波导的缝隙部分的模场跳跃式变大，虽然此时缝隙两侧波导的波导模场没有失配，但是模场跳跃式变大。并且受限于目前的切缝工艺，缝隙宽度可以达到约20um，从而导致切缝损耗较大。It can be understood that after cutting the conventional waveguide, the mode field of the slot part of the conventional waveguide increases suddenly. Although there is no mismatch in the waveguide mode field of the waveguides on both sides of the gap at this time, the mode field increases suddenly. And limited by the current slitting process, the gap width can reach about 20um, resulting in large slitting loss.
本公开实施例通过在第一波导组件相对的两侧分别设置折射率周期性变化的第二波导组件，使得波导结构的模场呈现周期性变化；相较于模场跳跃式变大的情况，本公开所示的波导结构由于模场周期性变化，从而有效减小切缝损耗。Embodiments of the present disclosure dispose second waveguide components whose refractive index changes periodically on opposite sides of the first waveguide component, so that the mode field of the waveguide structure changes periodically; compared with the situation where the mode field suddenly increases, The waveguide structure shown in the present disclosure effectively reduces slit loss due to periodic changes in the mode field.
本公开实施例通过在具有缝隙的第一波导组件相对的两侧分别设置折射率呈周期性变化的第二波导组件，并且两个第二波导组件相对于第一波导组件对称，从而利用两个第二波导组件，降低由于第一波导组件的缝隙而引入的切缝损耗，使得相较于其他具有缝隙的光波导结构，本公开实施例所示出的波导结构的切缝损耗明显降低，并且本公开实施例所示出的波导结构切割后的插损值也比其他具有缝隙的常规光波导结构的插损值小，本公开实施例所示出的波导结构切割后的插损值甚至比该波导结构切割前(即第一波导组件未设置有缝隙)的插损值小，以便于在波导芯片筛选时限定插损指标。Embodiments of the present disclosure provide second waveguide components with periodically changing refractive index on opposite sides of the first waveguide component with a gap, and the two second waveguide components are symmetrical with respect to the first waveguide component, thereby utilizing two The second waveguide component reduces the slit loss introduced by the gap in the first waveguide component, so that compared with other optical waveguide structures with slits, the slit loss of the waveguide structure shown in the embodiment of the present disclosure is significantly reduced, and The insertion loss value after cutting of the waveguide structure shown in the embodiment of the present disclosure is also smaller than the insertion loss value of other conventional optical waveguide structures with gaps. The insertion loss value of the waveguide structure after cutting shown in the embodiment of the present disclosure is even smaller than that of other conventional optical waveguide structures with gaps. The insertion loss value of the waveguide structure before cutting (that is, the first waveguide component is not provided with a gap) is small, so that the insertion loss index can be defined during waveguide chip screening.
可选地，如图1所示，所述第二波导组件102，包括：Optionally, as shown in Figure 1, the second waveguide component 102 includes:
多个相连的波导单元1021，每一个波导单元1021具有第一区域1021a和第二区域1021b，第一区域1021a的折射率与所述第二区域1021b的折射率不同；A plurality of connected waveguide units 1021, each waveguide unit 1021 has a first area 1021a and a second area 1021b, and the refractive index of the first area 1021a is different from the refractive index of the second area 1021b;
多个波导单元1021内的所述第一区域1021a和所述第二区域1021b交替间隔排布。The first regions 1021a and the second regions 1021b in the plurality of waveguide units 1021 are alternately arranged at intervals.
在本公开实施例中，所述第二波导组件，包括：多个波导单元，并且多个波导单元依次连接。需要说明的是，多个波导单元的宽度相同。In this embodiment of the present disclosure, the second waveguide component includes: a plurality of waveguide units, and the plurality of waveguide units are connected in sequence. It should be noted that the widths of the plurality of waveguide units are the same.
每一个波导单元具有第一区域和第二区域，第一区域和第二区域为波导单元内相邻的两个区域。Each waveguide unit has a first area and a second area, and the first area and the second area are two adjacent areas in the waveguide unit.
波导单元内的第一区域的折射率与第二区域的折射率不同。The refractive index of the first region within the waveguide unit is different from the refractive index of the second region.
可以理解的是，多个波导单元内的第一区域的折射率相同，多个波导单元内的第二区域的折射率相同。It can be understood that the refractive index of the first regions in the plurality of waveguide units is the same, and the refractive index of the second regions in the plurality of waveguide units is the same.
多个波导单元内的第一区域和第二区域交替间隔排布，可以理解的是，相邻两个波导单元内的第一区域和第二区域相邻排布。The first regions and the second regions in the plurality of waveguide units are alternately arranged at intervals. It can be understood that the first regions and the second regions in two adjacent waveguide units are arranged adjacently.
由于不同波导单元内的第一区域的折射率相同，不同波导单元内的第二区域的折射率相同，第一区域的折射率与第二区域的折射率不同；通过将多个波导单元内的第一区域和第二区域交替间隔排布，使得由多个波导单元构成的第二波导组件的折射率，沿第二波导组件内的光传播方向呈现周期性变化；从而使得光在第二波导组件内传播时，在至少一个光场限制方向上，光场的发散角呈现周期性变化，光波的模斑尺寸也呈现周期性变化；以降低波导结构的切缝损耗。Since the refractive index of the first region in different waveguide units is the same and the refractive index of the second region in different waveguide units is the same, the refractive index of the first region is different from the refractive index of the second region; by combining the refractive index of the first region and the second region, The first region and the second region are alternately arranged at intervals, so that the refractive index of the second waveguide component composed of multiple waveguide units changes periodically along the light propagation direction in the second waveguide component; thus, the light passes through the second waveguide component. When propagating within the component, in at least one light field restriction direction, the divergence angle of the light field changes periodically, and the mode spot size of the light wave also changes periodically; in order to reduce the slit loss of the waveguide structure.
可选地，所述第二波导组件内的多个所述波导单元的占空比不同；Optionally, the duty cycles of the plurality of waveguide units in the second waveguide component are different;
其中，所述占空比用于描述所述波导单元内所述第一区域或所述第二区域的区域宽度与所述波导单元的宽度之间的比值。Wherein, the duty cycle is used to describe the ratio between the width of the first region or the second region in the waveguide unit and the width of the waveguide unit.
在本公开实施例中，波导单元的占空比为该波导单元内第一区域或第二区域的区域宽度与波导单元的宽度之间的比值；这里，波导单元的宽度取决于第一区域和第二区域的区域宽度之和。In an embodiment of the present disclosure, the duty cycle of the waveguide unit is the ratio between the area width of the first area or the second area in the waveguide unit and the width of the waveguide unit; here, the width of the waveguide unit depends on the first area and the second area. The sum of the area widths of the second area.
可以理解的是，由于多个波导单元的宽度均相同，则第二波导组件内的多个波导单元的占空比不同，即第二波导组件内多个波导单元的第一区域的区域宽度不同，或者，第二波导组件内多个波导单元的第二区域的区域宽度不同。It can be understood that since the widths of the multiple waveguide units are the same, the duty cycles of the multiple waveguide units in the second waveguide component are different, that is, the area widths of the first regions of the multiple waveguide units in the second waveguide component are different. , or the area widths of the second areas of the plurality of waveguide units in the second waveguide component are different.
示例性地，如图2所示，图2是根据一示例性实施例示出的波导单元的结构示意图。其中，波导单元1021内第一区域1021a的区域宽度为a，第二区域1021b的区域宽度为b，则该波导单元1021的宽度为P＝a+b；占空比可为第一区域1021a的区域宽度与波导单元1021的宽度之间的比值，即占空比DC＝a/P。Illustratively, as shown in Figure 2, Figure 2 is a schematic structural diagram of a waveguide unit according to an exemplary embodiment. Wherein, the area width of the first area 1021a in the waveguide unit 1021 is a, and the area width of the second area 1021b is b, then the width of the waveguide unit 1021 is P=a+b; the duty cycle can be The ratio between the area width and the width of the waveguide unit 1021, that is, the duty cycle DC=a/P.
又示例性地，占空比可为第二区域的区域宽度与波导单元的宽度之间的比值，即占空比DC＝b/P。As another example, the duty cycle may be the ratio between the area width of the second area and the width of the waveguide unit, that is, the duty cycle DC=b/P.
需要说明的是，本公开实施例利用多个占空比不同的波导单元构成第二波导组件，以通过第二波导组件内多个波导单元之间的占空比的变化，使得光在第二波导组件内传播时，光场的发散角和光波的模斑尺寸随多个波导单元的占空比的变化而变化。It should be noted that in the embodiment of the present disclosure, multiple waveguide units with different duty cycles are used to form a second waveguide component, so that through changes in the duty cycle between the multiple waveguide units in the second waveguide component, the light is emitted in the second waveguide component. When propagating within a waveguide assembly, the divergence angle of the light field and the mode spot size of the light wave change as the duty cycle of multiple waveguide units changes.
可选地，所述第二波导组件内多个所述波导单元的占空比，在所述波导单元的光传播方向上呈递增或递减的变化趋势。Optionally, the duty ratios of the plurality of waveguide units in the second waveguide component exhibit an increasing or decreasing trend in the light propagation direction of the waveguide units.
在本公开实施例中，第二波导组件包含有多个相连的波导单元，并且多个波导单元的占空比，在第二波导组件的光传播方向上呈单向变化趋势。In the embodiment of the present disclosure, the second waveguide component includes multiple connected waveguide units, and the duty ratios of the multiple waveguide units change in one direction in the light propagation direction of the second waveguide component.
可以理解的是，多个波导单元的占空比，在第二波导组件的光传播方向呈递增或者递减的变化趋势。It can be understood that the duty ratios of the plurality of waveguide units show an increasing or decreasing trend in the light propagation direction of the second waveguide component.
在一个实施例中，两个第二波导组件内的多个波导单元的占空比，在所述波导单元的光传播方向上的变化趋势相反。In one embodiment, the duty ratios of the plurality of waveguide units in the two second waveguide assemblies have opposite changing trends in the light propagation direction of the waveguide units.
需要说明的是，由于两个第二波导组件相对于第一波导组件对称，若一个第二波导组件内的多个波导单元的占空比，在第二波导组件的光传播方向呈递减的变化趋势，则另一个第二波导组件内的多个波导单元的占空比，在第二波导组件的光传播方向呈递增的变化趋势。It should be noted that since the two second waveguide components are symmetrical with respect to the first waveguide component, if the duty ratios of multiple waveguide units in a second waveguide component change in a decreasing direction in the light propagation direction of the second waveguide component trend, then the duty ratios of the plurality of waveguide units in another second waveguide component show an increasing trend in the light propagation direction of the second waveguide component.
可选地，所述波导单元的占空比，与所述波导单元和所述第一波导组件之间的距离正相关；Optionally, the duty cycle of the waveguide unit is positively related to the distance between the waveguide unit and the first waveguide component;
其中，所述占空比为所述第一区域对应的占空比，所述第一区域的折射率高于所述第二区域的折射率。Wherein, the duty cycle is a duty cycle corresponding to the first region, and the refractive index of the first region is higher than the refractive index of the second region.
在本公开实施例中，波导单元的第一区域的折射率高于第二区域的折射率；即第一区域可为波导单元内的高折射率区域，第二区域可为波导单元内的低折射率区域。In embodiments of the present disclosure, the refractive index of the first region of the waveguide unit is higher than the refractive index of the second region; that is, the first region may be a high refractive index region within the waveguide unit, and the second region may be a low refractive index region within the waveguide unit. refractive index region.
可将第一区域的区域宽度与波导单元的宽度之间的比值，确定为所述占空比，则占空比可用于描述每一个波导单元内高折射率区域所占据的比例。The ratio between the area width of the first area and the width of the waveguide unit can be determined as the duty cycle, and then the duty cycle can be used to describe the proportion occupied by the high refractive index area in each waveguide unit.
每一个第二波导组件内的多个波导单元的占空比在波导单元的光传播方向上呈单向变化的趋势。The duty ratios of the plurality of waveguide units in each second waveguide component tend to change unidirectionally in the light propagation direction of the waveguide unit.
可基于波导单元与第一波导组件之间的距离，确定波导单元的占空比；这里，波导单元的占空比，与波导单元和第一波导组件之间的距离正相关；可以理解的是，在第二波导组件内，靠近于第一波导组件的占空比小于远离于第一波导组件的占空比。The duty cycle of the waveguide unit can be determined based on the distance between the waveguide unit and the first waveguide component; here, the duty cycle of the waveguide unit is positively related to the distance between the waveguide unit and the first waveguide component; it can be understood that , in the second waveguide component, the duty cycle close to the first waveguide component is smaller than the duty cycle far away from the first waveguide component.
由于第二波导组件对称设置于第一波导组件相对的两侧，使得在波导结构的光传播方向上，位于第一波导组件的输入侧的第二波导组件的占空比呈现递减的趋势，即在光传播方向上，第二波导组件内的占空比由大变小。位于第一波导组件的输出侧的第二波导组件的占空比呈现递增的趋势，即在光传播方向上，第二波导组件内的占空比由小变大。Since the second waveguide component is symmetrically arranged on opposite sides of the first waveguide component, in the light propagation direction of the waveguide structure, the duty cycle of the second waveguide component located on the input side of the first waveguide component shows a decreasing trend, that is, In the direction of light propagation, the duty cycle in the second waveguide component changes from large to small. The duty cycle of the second waveguide component located on the output side of the first waveguide component shows an increasing trend, that is, in the light propagation direction, the duty cycle in the second waveguide component changes from small to large.
需要说明的是，由于光在第二波导组件内传播时，光场的发散角和光波的模斑尺寸随多个波导单元的占空比的变化而变化，通过令位于第一波导组件的输入侧的第二波导组件的占空比呈现递减的趋势，位于第一波导组件的输出侧的第二波导组件的占空比呈现递增的趋势，使得光在波导结构内传播时，光场的发散角和光波的模斑尺寸均呈现由小变大，再由大变小的趋势，以对波导结构的切缝损耗进行补偿。It should be noted that when light propagates in the second waveguide component, the divergence angle of the light field and the mode spot size of the light wave change with the change of the duty cycle of the multiple waveguide units. By setting the input of the first waveguide component The duty cycle of the second waveguide component on the output side of the first waveguide component shows a decreasing trend, and the duty cycle of the second waveguide component located on the output side of the first waveguide component shows an increasing trend, so that when light propagates within the waveguide structure, the light field diverges. Both the angle and the mode spot size of the light wave show a trend from small to large, and then from large to small to compensate for the slit loss of the waveguide structure.
可选地，所述第二波导组件内的多个波导单元的占空比，随所述第二波导组件在第一方向上的波导宽度和/或在第二方向上的波导宽度的变化而变化；Optionally, the duty cycle of the plurality of waveguide units in the second waveguide component changes with the waveguide width of the second waveguide component in the first direction and/or the waveguide width in the second direction. Variety;
其中，所述第一方向与所述第二波导组件内的光传播方向平行；所述第二方向与所述第一方向垂直。Wherein, the first direction is parallel to the light propagation direction in the second waveguide component; the second direction is perpendicular to the first direction.
在本公开实施例中，由于波导单元的占空比为第一区域的区域宽度与波导单元的宽度之间的比值；因而可通过改变波导单元的宽度，实现对波导单元的占空比的调整。In the embodiment of the present disclosure, since the duty cycle of the waveguide unit is the ratio between the area width of the first region and the width of the waveguide unit; therefore, the duty cycle of the waveguide unit can be adjusted by changing the width of the waveguide unit. .
在一些实施例中，如图3所示，图3是根据一示例性实施例示出的一种波导结构的结构示意图二；可通过同时调整第二波导组件在第一方向和第二方向上的波导宽度，实现对第二波导组件的占空比的调整。In some embodiments, as shown in Figure 3, which is a structural schematic diagram 2 of a waveguide structure according to an exemplary embodiment; the second waveguide component can be adjusted in the first direction and the second direction simultaneously. The waveguide width enables adjustment of the duty cycle of the second waveguide component.
这里，所述第一方向为：与第二波导组件内的光传播方向平行的方向；第二方向与所述第一方向垂直。Here, the first direction is: a direction parallel to the light propagation direction in the second waveguide component; the second direction is perpendicular to the first direction.
在另一些实施例中，如图4所示，图4是根据一示例性实施例示出的一种波导结构的结构示意图三；可通过调整第二波导组件在第一方向上的波导宽度，实现对第二波导组件的占空比的调整。In other embodiments, as shown in Figure 4, Figure 4 is a structural schematic diagram 3 of a waveguide structure according to an exemplary embodiment; this can be achieved by adjusting the waveguide width of the second waveguide component in the first direction. Adjustment of the duty cycle of the second waveguide component.
考虑到工艺的问题，第二波导组件在第二方向上的波导宽度的调整难度较高，可仅通过调整第二波导组件在第一方向上的波导宽度，实现对第二波导组件的占空比的调整。Considering process issues, it is difficult to adjust the waveguide width of the second waveguide component in the second direction. The duty of the second waveguide component can be achieved only by adjusting the waveguide width of the second waveguide component in the first direction. Ratio adjustment.
示例性地，当所述第二波导组件为单模波导组件时，可通过调整第二波导组件的横向波导宽度，或者，同时调整第二波导组件的横向波导宽度和纵向波导宽度，实现对第二波导组件的占空比的调整。For example, when the second waveguide component is a single-mode waveguide component, the second waveguide component can be adjusted by adjusting the transverse waveguide width, or by simultaneously adjusting the transverse waveguide width and longitudinal waveguide width of the second waveguide component. Adjustment of the duty cycle of the second waveguide component.
又示例性地，当所述第二波导组件为多模波导组件时，仅能够通过调整第二波导组件的横向波导宽度，实现对第二波导组件的占空比的调整。For another example, when the second waveguide component is a multi-mode waveguide component, the duty cycle of the second waveguide component can be adjusted only by adjusting the lateral waveguide width of the second waveguide component.
可选地，如图1、图3和图4所示，所述第一波导组件101，包括：Optionally, as shown in Figures 1, 3 and 4, the first waveguide component 101 includes:
波导本体；waveguide body;
切缝标记101b，设置于所述波导本体上，用于指示所述波导本体上的待切割位置，以形成所述缝隙。A slit mark 101b is provided on the waveguide body to indicate the position to be cut on the waveguide body to form the slit.
在本公开实施例中，所述第一波导组件，包括：波导本体。In this embodiment of the present disclosure, the first waveguide component includes: a waveguide body.
为了便于对波导本体进行切割，可在波导本体的表面设置切缝标记，利用切缝标记指示波导本体上的待切割位置，从而在对波导本体进行切割时，能够基于切缝标记进行切缝，以形成缝隙。In order to facilitate cutting of the waveguide body, slit marks can be set on the surface of the waveguide body, and the slit marks can be used to indicate the positions to be cut on the waveguide body, so that when cutting the waveguide body, slits can be made based on the slit marks. to form a gap.
在一些实施例中，波导本体可设置有多个切缝标记，波导本体的缝隙位置可由多个切缝标记所在的直线位置确定。In some embodiments, the waveguide body may be provided with multiple slit marks, and the slit position of the waveguide body may be determined by the linear position of the multiple slit marks.
这里，波导本体可设置有至少两个切缝标记，基于至少两个切缝标记所在的直线，更准确的定位波导本体的缝隙位置。Here, the waveguide body may be provided with at least two slit marks, and based on the straight line where the at least two slit marks are located, the slit position of the waveguide body can be more accurately positioned.
所述切缝标记的形状可根据实际使用的切缝设备来确定，例如，切缝标记可为“一”字形、“十”字形等。The shape of the slit mark can be determined according to the actual slit equipment used. For example, the slit mark can be in the shape of a "one", a "cross", etc.
可选地，所述波导本体的波导宽度由所述波导本体的缝隙宽度和切缝容差确定。Optionally, the waveguide width of the waveguide body is determined by the slot width of the waveguide body and the slit tolerance.
在本公开实施例中，波导本体的波导宽度可取决于波导本体的缝隙宽度和切缝容差。In embodiments of the present disclosure, the waveguide width of the waveguide body may depend on the slot width and kerf tolerance of the waveguide body.
需要说明的是，波导本体切割形成所述缝隙，应参照缝隙的缝隙宽度，确定波导本体的波导宽度；考虑到切缝容差，应基于缝隙的缝隙宽度和切缝容差，共同确定波导本体的波导宽度。It should be noted that when the waveguide body is cut to form the slit, the waveguide width of the waveguide body should be determined with reference to the slit width of the slit; taking into account the slit tolerance, the waveguide body should be determined based on the slit width and slit tolerance. the waveguide width.
在一些实施例中，波导本体的波导宽度等于波导本体的缝隙宽度和切缝容差之和。In some embodiments, the waveguide width of the waveguide body is equal to the sum of the slot width of the waveguide body and the kerf tolerance.
可选地，如图5所示，图5是根据一示例性实施例示出的一种波导结构的结构示意图四；所述第一波导组件101，包括：Optionally, as shown in Figure 5, Figure 5 is a structural schematic diagram 4 of a waveguide structure according to an exemplary embodiment; the first waveguide component 101 includes:
匹配液101c，填充于所述波导本体的缝隙内；其中，所述匹配液101c的折射率与所述波导本体的折射率相关。The matching liquid 101c is filled in the gap of the waveguide body; the refractive index of the matching liquid 101c is related to the refractive index of the waveguide body.
在本公开实施例中，第一波导组件，包括：匹配液；In the embodiment of the present disclosure, the first waveguide component includes: matching liquid;
匹配液填充于波导本体的缝隙内；需要说明的是，匹配液对波导本体中传播的光具有高透射率；匹配液的折射率与波导本体的折射率相同或相近。由于缝隙两侧的波导折射率失配或不完全匹配引起的菲涅尔反射也是造成切缝损耗的原因之一，为了降低切缝损耗，可通过在缝隙内填充合适的匹配液，以减少菲涅尔反射。The matching liquid is filled in the gap of the waveguide body; it should be noted that the matching liquid has a high transmittance to the light propagating in the waveguide body; the refractive index of the matching liquid is the same as or similar to that of the waveguide body. Fresnel reflection caused by mismatch or incomplete matching of the refractive index of the waveguides on both sides of the gap is also one of the causes of slit loss. In order to reduce slit loss, appropriate matching liquid can be filled in the gap to reduce Fresnel reflection. Neel reflex.
在一些实施例中，可基于波导本体的材质，确定匹配液的折射率。In some embodiments, the refractive index of the matching liquid may be determined based on the material of the waveguide body.
示例性地，若波导本体是平面波导(Planar Lightwave Circuit，PLC)SiO2材质的，其对应的匹配液的折射率与波导本体的折射率相同。For example, if the waveguide body is made of Planar Lightwave Circuit (PLC)SiO2 , the refractive index of the corresponding matching liquid is the same as the refractive index of the waveguide body.
又示例性地，若波导本体是硅光材质的，其对应的匹配液的折射率小于波导本体的折射率。For another example, if the waveguide body is made of silicon optical material, the refractive index of the corresponding matching liquid is smaller than the refractive index of the waveguide body.
可选地，所述缝隙靠近于所述波导本体的中心位置；其中，所述波导结构的插损参数，与所述缝隙和所述波导本体的中心位置之间的距离正相关。Optionally, the gap is close to the center position of the waveguide body; wherein the insertion loss parameter of the waveguide structure is positively related to the distance between the gap and the center position of the waveguide body.
在本公开实施例中，缝隙可靠近于波导本体的中心位置；并且缝隙越靠近于波导本体的中心位置，该波导结构的插损参数越小；反之，缝隙越远离波导本体的中心位置，该波导结构的插损参数就越大。In embodiments of the present disclosure, the gap can be close to the center of the waveguide body; and the closer the gap is to the center of the waveguide body, the smaller the insertion loss parameter of the waveguide structure is; conversely, the farther the gap is from the center of the waveguide body, the smaller the insertion loss parameter. The insertion loss parameter of the waveguide structure is larger.
需要说明的是，由于两个第二波导组件对称设置于第一波导组件两侧，若缝隙位于波导本体的中心位置，从而两个第二波导组件相对于缝隙对称设置，从而能够有效降低切割后波导结构的插损。It should be noted that since the two second waveguide components are symmetrically disposed on both sides of the first waveguide component, if the gap is located at the center of the waveguide body, the two second waveguide components are symmetrically disposed relative to the gap, which can effectively reduce the damage caused by cutting. Insertion loss of waveguide structures.
在一些实施例中，可在波导本体的中心位置设置所述切缝标记，以便在波导本体的中心位置进行切割，以形成缝隙。In some embodiments, the slit mark may be disposed at the center of the waveguide body so that cutting is performed at the center of the waveguide body to form the slit.
为了对比本公开实施例所示的波导结构与常规波导结构的切缝损耗，本公开实施例将具有上述波导结构的PLC作为测试样品，且该波导为平板多模波导结构；将常规PLC作为常规测试样品；分别对两类测试样品切割前的插损值和切割后的插损值进行测量，分别确定两类测试样品的切缝损耗。In order to compare the slit loss of the waveguide structure shown in the embodiment of the present disclosure and the conventional waveguide structure, the embodiment of the present disclosure uses a PLC with the above waveguide structure as a test sample, and the waveguide is a flat multi-mode waveguide structure; the conventional PLC is used as a conventional Test samples; measure the insertion loss values of the two types of test samples before cutting and the insertion loss values after cutting, and determine the slitting losses of the two types of test samples.
这里，如图6和7所示，图6是根据一示例性实施例示出的一种PLC的结构示意图；图7是图6的局部放大示意图。图6的标号6a所示为上述波导结构；具有上述波导结构的PLC内的缝隙宽度为20±5μm，余量为5μm，则PLC内的第一波导组件的波导宽度为30μm，第一波导组件的缝隙内填充折射率约为1.5的高透射率匹配液。Here, as shown in Figures 6 and 7, Figure 6 is a schematic structural diagram of a PLC according to an exemplary embodiment; Figure 7 is a partial enlarged schematic diagram of Figure 6. Reference number 6a in Figure 6 shows the above-mentioned waveguide structure; the gap width in the PLC with the above-mentioned waveguide structure is 20±5 μm, and the margin is 5 μm, then the waveguide width of the first waveguide component in the PLC is 30 μm, and the first waveguide component The gap is filled with a high transmittance matching liquid with a refractive index of approximately 1.5.
如图8所示，图8是根据一示例性实施例示出的具有上述波导结构的PLC与常规PLC的切缝损耗对比示意图。需要说明的是，图8是基于40个测试样品和40个常规测试样品的测试值确定的。As shown in FIG. 8 , FIG. 8 is a schematic diagram illustrating the comparison of slit loss between a PLC with the above waveguide structure and a conventional PLC according to an exemplary embodiment. It should be noted that Figure 8 is determined based on the test values of 40 test samples and 40 conventional test samples.
由图8可知，具有上述波导结构的PLC的切缝损耗约为-0.22dB，常规PLC的切缝损耗约为0.6dB。It can be seen from Figure 8 that the slit loss of the PLC with the above waveguide structure is about -0.22dB, and the slit loss of the conventional PLC is about 0.6dB.
可以理解的是，一方面对于具有上述波导结构的PLC而言，切割后的插损值比切割前的插损值小；另一方面相对于常规PLC，具有上述波导结构的PLC的切缝损耗减小了约0.82dB，但是由于第二波导组件会引入约0.4dB的损耗，相较于常规PLC切割后的插损值，具有上述波导结构的PLC切割后的插损值减小了约0.42dB。It can be understood that, on the one hand, for a PLC with the above-mentioned waveguide structure, the insertion loss value after cutting is smaller than the insertion loss value before cutting; on the other hand, compared with a conventional PLC, the slit loss of a PLC with the above-mentioned waveguide structure is It is reduced by about 0.82dB, but since the second waveguide component will introduce a loss of about 0.4dB, compared with the insertion loss value after cutting of conventional PLC, the insertion loss value after cutting of PLC with the above waveguide structure is reduced by about 0.42 dB.
本公开是实例中记载的波导结构只以本公开所述实施例为例，但不仅限于此，只要涉及到该波导结构均在本公开的保护范围。The waveguide structure described in the examples of this disclosure only takes the embodiments of this disclosure as an example, but is not limited thereto. As long as the waveguide structure is involved, it is within the protection scope of this disclosure.
应理解，说明书通篇中提到的“一个实施例”或“一实施例”意味着与实施例有关的特定特征、结构或特性包括在本公开的至少一个实施例中。因此，在整个说明书各处出现的“在一个实施例中”或“在一实施例中”未必一定指相同的实施例。此外，这些特定的特征、结构或特性可以任意适合的方式结合在一个或多个实施例中。应理解，在本公开的各种实施例中，上述各过程的序号的大小并不意味着执行顺序的先后，各过程的执行顺序应以其功能和内在逻辑确定，而不应对本公开实施例的实施过程构成任何限定。上述本公开实施例序号仅仅为了描述，不代表实施例的优劣。It will be understood that reference throughout this specification to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic associated with the embodiment is included in at least one embodiment of the present disclosure. Thus, the appearances of "in one embodiment" or "in an embodiment" in various places throughout this specification are not necessarily referring to the same embodiment. Furthermore, the particular features, structures or characteristics may be combined in any suitable manner in one or more embodiments. It should be understood that in various embodiments of the present disclosure, the size of the sequence numbers of the above-mentioned processes does not mean the order of execution. The execution order of each process should be determined by its functions and internal logic, and should not be used in the embodiments of the present disclosure. The implementation process constitutes any limitation. The above serial numbers of the embodiments of the present disclosure are only for description and do not represent the advantages and disadvantages of the embodiments.
需要说明的是，在本文中，术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含，从而使得包括一系列要素的过程、方法、物品或者装置不仅包括那些要素，而且还包括没有明确列出的其他要素，或者是还包括为这种过程、方法、物品或者装置所固有的要素。在没有更多限制的情况下，由语句“包括一个……”限定的要素，并不排除在包括该要素的过程、方法、物品或者装置中还存在另外的相同要素。It should be noted that, in this document, the terms "comprising", "comprises" or any other variations thereof are intended to cover a non-exclusive inclusion, such that a process, method, article or device that includes a series of elements not only includes those elements, It also includes other elements not expressly listed or inherent in the process, method, article or apparatus. Without further limitation, an element defined by the statement "comprises a..." does not exclude the presence of additional identical elements in a process, method, article or apparatus that includes that element.
以上所述，仅为本公开的实施方式，但本公开的保护范围并不局限于此，任何熟悉本技术领域的技术人员在本公开揭露的技术范围内，可轻易想到变化或替换，都应涵盖在本公开的保护范围之内。因此，本公开的保护范围应以所述权利要求的保护范围为准。The above are only embodiments of the present disclosure, but the protection scope of the present disclosure is not limited thereto. Any person familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present disclosure, and should are covered by the protection scope of this disclosure. Therefore, the protection scope of the present disclosure should be subject to the protection scope of the claims.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310750305.3ACN116774355A (en) | 2023-06-21 | 2023-06-21 | waveguide structure |
| PCT/CN2023/107745WO2024259764A1 (en) | 2023-06-21 | 2023-07-17 | Waveguide structure |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310750305.3ACN116774355A (en) | 2023-06-21 | 2023-06-21 | waveguide structure |
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| CN116774355Atrue CN116774355A (en) | 2023-09-19 |
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| CN202310750305.3APendingCN116774355A (en) | 2023-06-21 | 2023-06-21 | waveguide structure |
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| WO (1) | WO2024259764A1 (en) |
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