技术领域Technical field
本发明涉及半导体专用器件技术领域，具体是一种基于Stewart衍生结构的四自由度防振平台。The invention relates to the technical field of semiconductor special devices, specifically a four-degree-of-freedom anti-vibration platform based on a Stewart-derived structure.
背景技术Background technique
目前半导体行业飞速发展，半导体生产设备的精度要求越来越高，设备对微振动等环境的要求也越来越敏感，少许的微振动就会降低设备的产出良率，甚至使设备不能正常工作，因此对微振动的隔离变得越来越重要。At present, the semiconductor industry is developing rapidly. The precision requirements of semiconductor production equipment are getting higher and higher. The equipment is also becoming more and more sensitive to micro-vibration and other environmental requirements. A small amount of micro-vibration will reduce the output yield of the equipment and even cause the equipment to malfunction. work, so the isolation of micro-vibrations becomes increasingly important.
Stewart平台并联机构由于具有刚度大、承载能力强、位置误差不累计等特点，在应用上与串联机构形成互补，已成为空间机构学的研究热点。目前，Stewart平台并联机构已经在航空、航天、海底作业、地下开采、制造装配等行业有着广泛的应用。传统的Stewart平台的支腿采用液压缸驱动，装置较为笨重，并且精度不高，存在一定的局限性。为了提高其定位精度，出现了利用直线电机、压电驱动器作为驱动装置的Stewart 平台，虽然定位精度提高了，但其承重能力下降明显。虽然也有采用伺服电机作为驱动装置的Stewart 平台，定位精度较液压缸驱动好些，但其仍然无法满足微振控制。另外，传统的Stewart 平台系统刚度固定，应用对象单一固定，适用范围较窄，通用性差。Due to its characteristics of high stiffness, strong load-bearing capacity, and non-accumulation of position errors, the Stewart platform parallel mechanism complements the series mechanism in application and has become a research hotspot in space mechanics. At present, the Stewart platform parallel mechanism has been widely used in aviation, aerospace, submarine operations, underground mining, manufacturing and assembly and other industries. The legs of the traditional Stewart platform are driven by hydraulic cylinders. The device is bulky and has low precision, which has certain limitations. In order to improve its positioning accuracy, the Stewart platform has emerged that uses linear motors and piezoelectric actuators as driving devices. Although the positioning accuracy has been improved, its load-bearing capacity has dropped significantly. Although there is also a Stewart platform that uses a servo motor as a driving device, and its positioning accuracy is better than that of a hydraulic cylinder drive, it still cannot satisfy micro-vibration control. In addition, the traditional Stewart platform system has fixed stiffness, a single fixed application object, a narrow scope of application, and poor versatility.
发明内容Contents of the invention
本发明的目的在于提供一种基于Stewart衍生结构的四自由度防振平台，以解决上述背景技术中存在的问题。The purpose of the present invention is to provide a four-degree-of-freedom anti-vibration platform based on a Stewart-derived structure to solve the problems existing in the above background technology.
本发明的技术方案是这样实现的：一种基于Stewart衍生结构的四自由度防振平台，包括顶板、支腿和底座，所述顶板与底座结构尺寸相同，均为剪去三个角的三角形，所述支腿为六根安装在顶板与底座之间，所述支腿中的三条支腿分别垂直安装在顶板与底座的三个角之间且通过虎克铰分别与顶板、底座连接，所述支腿中的另外三条支腿分别安装在顶板与底座同侧三个边之间与顶板和底座的夹角为45°且通过球铰分别与顶板、底座连接，所述支腿包括外壳，所述外壳底部内侧安装有伺服电机，所述伺服电机顶部与丝杠连接，所述丝杠外侧套装有滚珠丝杠螺母，所述滚珠丝杠螺母顶部、丝杠外侧套装有第一导杆，所述第一导杆顶部安装有永磁体，所述永磁体垂直上方安装有第二导杆，所述第二导杆底部安装有电磁铁，所述伺服电机底部安装有空气弹簧，所述空气弹簧底部中间垂直安装有支杆，所述丝杠下部靠近伺服电机、外壳内侧安装有轴承，所述外壳顶部安装有导轨，所述空气弹簧一侧下方开设有进气管，所述进气管上安装有气动阀，所述第二导杆上安装有加速度传感器，所述底座顶部还安装有控制器。The technical solution of the present invention is implemented as follows: a four-degree-of-freedom anti-vibration platform based on a Stewart-derived structure, including a top plate, legs and a base. The top plate and the base structure have the same size and are both triangles with three corners cut off. , the six outriggers are installed between the top plate and the base. Three of the outriggers are installed vertically between the three corners of the top plate and the base and are connected to the top plate and the base respectively through Hooke hinges. The other three legs among the legs are respectively installed between the three sides on the same side of the top plate and the base. The angle between the top plate and the base is 45° and are respectively connected to the top plate and the base through spherical hinges. The legs include a shell, A servo motor is installed inside the bottom of the housing. The top of the servo motor is connected to the screw. A ball screw nut is installed on the outside of the screw. A first guide rod is installed on the top of the ball screw nut and outside the screw. A permanent magnet is installed on the top of the first guide rod, a second guide rod is installed vertically above the permanent magnet, an electromagnet is installed on the bottom of the second guide rod, and an air spring is installed on the bottom of the servo motor. A support rod is installed vertically in the middle of the bottom of the spring. The lower part of the screw is close to the servo motor. A bearing is installed inside the housing. A guide rail is installed on the top of the housing. An air inlet pipe is provided below one side of the air spring. The air inlet pipe is installed on the There is a pneumatic valve, an acceleration sensor is installed on the second guide rod, and a controller is installed on the top of the base.
进一步地，所述顶板与底座均由不锈钢板制成。Further, both the top plate and the base are made of stainless steel plates.
进一步地，所述第二导杆穿过导轨，与导轨滑动连接。Further, the second guide rod passes through the guide rail and is slidingly connected with the guide rail.
进一步地，所述控制器通过电缆与伺服电机、电磁铁和加速度传感器连接。Further, the controller is connected to the servo motor, electromagnet and acceleration sensor through cables.
进一步地，所述导轨为陶瓷导轨，既具有导向作用同时可避免支腿中的磁场对顶板上方的精密仪器运转形成干扰。Furthermore, the guide rail is a ceramic guide rail, which not only has a guiding role but also prevents the magnetic field in the legs from interfering with the operation of precision instruments above the top plate.
本发明的有益效果为：The beneficial effects of the present invention are:
本发明可以根据不同精密仪器的振动属性不同，通过改变空气弹簧的压力，从而改变系统刚度以满足不同精密仪器的要求。The present invention can change the system stiffness by changing the pressure of the air spring according to the different vibration attributes of different precision instruments to meet the requirements of different precision instruments.
本发明基于Stewart结构，通过将其中三个支腿调整为垂直方向，并通过虎克铰与顶板、底座连接，提高其承重能力，同时采用伺服电机与滚珠丝杠组合的承重结构，可以满足500kg的承重要求。This invention is based on the Stewart structure. By adjusting three of the legs to the vertical direction and connecting them to the top plate and base through Hooke hinges, the load-bearing capacity is improved. At the same time, a load-bearing structure combining a servo motor and a ball screw is used, which can meet the load of 500kg. load-bearing requirements.
本发明通过伺服电机与滚珠丝杠组合将旋转驱动改为直线运动可以满足50Hz~200Hz的高频振源隔振，并通过磁力驱动实现0.1 Hz ~50Hz的低频振源隔振，通过控制电磁铁电流方向实现与永磁铁引力和斥力改变，从而实现高频与低频振源时驱动方式的改变。The present invention changes the rotation drive into linear motion through the combination of servo motor and ball screw, which can meet the vibration isolation of high-frequency vibration sources of 50Hz ~ 200Hz, and realizes the vibration isolation of low-frequency vibration sources of 0.1 Hz ~ 50Hz through magnetic drive. By controlling the direction of the electromagnet current Realize the change of attraction and repulsion with the permanent magnet, thereby changing the driving mode between high-frequency and low-frequency vibration sources.
本发明系统三个支腿通过虎克铰与顶板、底座垂直连接，另外三个支腿通过球铰与顶板、底座45°夹角连接，可以实现上下、前后、左右以及绕z轴转动四个自由度0.1Hz~200Hz的振动控制，隔振带宽，定位精确，可以适应于不同型号的精密仪器，适用范围广，通用性强。The three legs of the system of the present invention are vertically connected to the top plate and the base through Hooke hinges, and the other three legs are connected to the top plate and the base through spherical hinges at an angle of 45°, which can realize four rotations of up and down, front and back, left and right, and around the z-axis. Vibration control with a degree of freedom of 0.1Hz~200Hz, vibration isolation bandwidth, and accurate positioning. It can be adapted to different types of precision instruments. It has a wide range of applications and strong versatility.
附图说明Description of the drawings
图1为本发明的结构示意图。Figure 1 is a schematic structural diagram of the present invention.
图2位支腿的结构示意图。Figure 2 shows the structural diagram of the outriggers.
图中1-顶板，2-支腿，201-外壳，202-伺服电机，203-丝杠，204-滚珠丝杠螺母，205-第一导杆，206-永磁体，207-第二导杆，208-电磁铁，209-空气弹簧，210-支杆，211-轴承，212-导轨，213-进气管，214气动阀，3-底座，4-加速度传感器，5-控制器，6-虎克铰，7-球铰。In the figure, 1-top plate, 2-legs, 201-casing, 202-servo motor, 203-screw, 204-ball screw nut, 205-first guide rod, 206-permanent magnet, 207-second guide rod , 208-electromagnet, 209-air spring, 210-strut, 211-bearing, 212-guide rail, 213-intake pipe, 214 pneumatic valve, 3-base, 4-acceleration sensor, 5-controller, 6-tiger Gram hinge, 7-ball hinge.
实施方式Implementation
下面将结合实施例对本发明技术方案进行清楚、完整地描述，显然，所描述地实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。The technical solution of the present invention will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present invention.
如图1-2所示，一种基于Stewart衍生结构的四自由度防振平台，包括顶板1、支腿2和底座3，所述顶板1与底座3结构尺寸相同，均为剪去三个角的三角形，所述支腿2为六根安装在顶板1与底座3之间，所述支腿2中的三条支腿2分别垂直安装在顶板1与底座3的三个角之间且通过虎克铰6分别与顶板1、底座3连接，所述支腿2中的另外三条支腿2分别安装在顶板1与底座3同侧三个边之间与顶板1和底座3的夹角为45°且通过球铰7分别与顶板1、底座3连接，所述支腿2包括外壳201，所述外壳201底部内侧安装有伺服电机202，所述伺服电机202顶部与丝杠203连接，所述丝杠203外侧套装有滚珠丝杠螺母204，所述滚珠丝杠螺母204顶部、丝杠203外侧套装有第一导杆205，所述第一导杆205顶部安装有永磁体206，所述永磁体206垂直上方安装有第二导杆207，所述第二导杆207底部安装有电磁铁208，所述伺服电机202底部安装有空气弹簧209，所述空气弹簧209底部中间垂直安装有支杆210，所述丝杠203下部靠近伺服电机202、外壳202内侧安装有轴承211，所述外壳201顶部安装有导轨212，所述空气弹簧209一侧下方开设有进气管213，所述进气管213上安装有气动阀214，所述第二导杆207上安装有加速度传感器4，所述底座3顶部还安装有控制器5。As shown in Figure 1-2, a four-degree-of-freedom anti-vibration platform based on the Stewart-derived structure includes a top plate 1, a leg 2 and a base 3. The top plate 1 and the base 3 have the same structural dimensions, with three parts cut off. There are six legs 2 installed between the top plate 1 and the base 3. Three of the legs 2 are installed vertically between the three corners of the top plate 1 and the base 3 and pass through the tiger. The hinge 6 is connected to the top plate 1 and the base 3 respectively. The other three legs 2 of the legs 2 are respectively installed between the three sides on the same side of the top plate 1 and the base 3. The angle between the top plate 1 and the base 3 is 45 ° and are connected to the top plate 1 and the base 3 through ball hinges 7 respectively. The legs 2 include a shell 201. A servo motor 202 is installed inside the bottom of the shell 201. The top of the servo motor 202 is connected to the screw 203. A ball screw nut 204 is installed on the outside of the screw 203. A first guide rod 205 is installed on the top of the ball screw nut 204 and on the outside of the screw 203. A permanent magnet 206 is installed on the top of the first guide rod 205. A second guide rod 207 is installed vertically above the magnet 206. An electromagnet 208 is installed at the bottom of the second guide rod 207. An air spring 209 is installed at the bottom of the servo motor 202. A support rod is installed vertically in the middle of the bottom of the air spring 209. 210. The lower part of the screw 203 is close to the servo motor 202. A bearing 211 is installed inside the housing 202. A guide rail 212 is installed on the top of the housing 201. An air inlet pipe 213 is provided below one side of the air spring 209. The air inlet pipe 213 A pneumatic valve 214 is installed on the second guide rod 207 , an acceleration sensor 4 is installed on the second guide rod 207 , and a controller 5 is also installed on the top of the base 3 .
所述顶板1与底座3均由不锈钢板制成。The top plate 1 and the base 3 are both made of stainless steel plates.
所述第二导杆207穿过导轨212，与导轨212滑动连接。The second guide rod 207 passes through the guide rail 212 and is slidingly connected with the guide rail 212 .
所述控制器5通过电缆与伺服电机202、电磁铁208和加速度传感器4连接。The controller 5 is connected to the servo motor 202, the electromagnet 208 and the acceleration sensor 4 through cables.
所述导轨212为陶瓷导轨，既具有导向作用同时可避免支腿2中的磁场对顶板1上方的精密仪器运转形成干扰。The guide rail 212 is a ceramic guide rail, which not only has a guiding function, but also can prevent the magnetic field in the leg 2 from interfering with the operation of the precision instruments above the top plate 1 .
安装时，精密仪器安装在顶板1上，根据精密仪器的要求，通过控制气动阀214调整空气弹簧209的气压从而调整整个系统的刚度，以满足顶部精密仪器的承重和刚度要求。During installation, the precision instrument is installed on the top plate 1. According to the requirements of the precision instrument, the air pressure of the air spring 209 is adjusted by controlling the pneumatic valve 214 to adjust the stiffness of the entire system to meet the load-bearing and stiffness requirements of the top precision instrument.
工作时，精密仪器产生振动，通过加速度传感器4采集振动信号，然后将振动信号传递给控制器5。高频振源时，首先通过控住器5控制电磁铁208的电流方向和大小，使得电磁铁208与永磁体206之间表现为引力作用，此时第一导杆205与第二导杆207紧密连接在一起，合二为一，然后控制器5控制伺服电机202驱动，通过丝杠203与滚珠丝杠螺母204的配合将旋转驱动变化为直线驱动，然后驱动第一导杆205与第二导杆207伸缩实现高频隔振；低频振源时，控制器5控制伺服电机202不运转，控制电磁铁208的电流方向与大小，使得电磁铁208与永磁体206之间表现为斥力作用，然后驱动第二导杆207伸缩实现低频隔振。另外，六条支腿2分别独立运动，可以实现上下、前后、左右以及绕z轴转动四个自由度的隔振。When working, the precision instrument generates vibration, collects the vibration signal through the acceleration sensor 4, and then transmits the vibration signal to the controller 5. When a high-frequency vibration source is used, the current direction and size of the electromagnet 208 are first controlled by the controller 5, so that the electromagnet 208 and the permanent magnet 206 exhibit a gravitational force. At this time, the first guide rod 205 and the second guide rod 207 are closely connected. Together, the two become one, and then the controller 5 controls the driving of the servo motor 202, changes the rotational drive into a linear drive through the cooperation of the screw 203 and the ball screw nut 204, and then drives the first guide rod 205 and the second guide rod 207 expands and contracts to achieve high-frequency vibration isolation; when the source of low-frequency vibration is low, the controller 5 controls the servo motor 202 not to operate, controls the current direction and size of the electromagnet 208, so that there is a repulsive force between the electromagnet 208 and the permanent magnet 206, and then drives The second guide rod 207 telescopically achieves low-frequency vibration isolation. In addition, the six supporting legs 2 move independently, which can achieve vibration isolation with four degrees of freedom: up and down, front and back, left and right, and rotation around the z-axis.
以上所述仅为本发明的较佳实施例而已，并不用以限制本发明，凡在本发明的精神和原则之内，所作的任何修改、等同替换、改进等，均应包含在本发明的保护范围之内。The above descriptions are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included in the present invention. within the scope of protection.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310906700.6ACN116753265B (en) | 2023-07-24 | 2023-07-24 | Four-degree-of-freedom vibration-proof platform based on Stewart derivative structure |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310906700.6ACN116753265B (en) | 2023-07-24 | 2023-07-24 | Four-degree-of-freedom vibration-proof platform based on Stewart derivative structure |
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| CN116753265Atrue CN116753265A (en) | 2023-09-15 |
| CN116753265B CN116753265B (en) | 2025-08-15 |
| Application Number | Title | Priority Date | Filing Date |
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| CN202310906700.6AActiveCN116753265B (en) | 2023-07-24 | 2023-07-24 | Four-degree-of-freedom vibration-proof platform based on Stewart derivative structure |
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| CN (1) | CN116753265B (en) |
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| CN117108679A (en)* | 2023-09-18 | 2023-11-24 | 大连地拓电子工程技术有限公司 | Quasi-zero-stiffness six-degree-of-freedom vibration isolation platform |
| CN118188736A (en)* | 2024-04-25 | 2024-06-14 | 大连地拓精密科技股份有限公司 | Ultralow frequency vibration isolation platform based on Stewart configuration |
| CN119163855A (en)* | 2024-11-25 | 2024-12-20 | 南通网仁网络科技有限公司 | Computer display screen angle adjustment mechanism |
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