技术领域technical field
本申请涉及光学测量技术领域，特别是涉及一种迈克尔逊干涉仪的量测方法及迈克尔逊干涉仪。The present application relates to the technical field of optical measurement, in particular to a measurement method of a Michelson interferometer and a Michelson interferometer.
背景技术Background technique
随着技术的发展与用户需求的增多，电子产品对光学系统的品质的要求在日益提高。而在具体使用时，光学元件的形貌会影响光学系统的品质，因此生产方一般会通过迈克尔逊干涉仪量测光学元件的形貌。但是，传统的迈克尔逊干涉仪在测试叠层结构时，需要先将叠层结构拆分为多个单层镜片，再分别对每一单层镜片进行量测，容易使得叠层结构产生不必要的损失。With the development of technology and the increase of user demands, the quality requirements of electronic products for optical systems are increasing day by day. In actual use, the shape of the optical element will affect the quality of the optical system, so the manufacturer generally uses a Michelson interferometer to measure the shape of the optical element. However, when the traditional Michelson interferometer tests the laminated structure, it needs to first split the laminated structure into multiple single-layer lenses, and then measure each single-layer lens separately, which easily makes the laminated structure unnecessary. Loss.
发明内容Contents of the invention
基于此，有必要针对传统的迈克尔逊干涉仪在测试叠层结构时，需要将叠层结构拆分为多个单层镜片，再分别对每一单层镜片进行量测而造成叠层结构产生不必要的损失的问题，提供一种迈克尔逊干涉仪的量测方法及迈克尔逊干涉仪。Based on this, it is necessary for the traditional Michelson interferometer to split the laminated structure into multiple single-layer lenses when testing the laminated structure, and then measure each single-layered lens separately to cause the laminated structure to produce For the problem of unnecessary loss, a measurement method of Michelson interferometer and Michelson interferometer are provided.
根据本申请的第一方面，提出一种迈克尔逊干涉仪的量测方法，所述迈克尔逊干涉仪包括光源、反射镜、接收传感器及非偏振分光镜；所述光源、所述非偏振分光镜及叠层结构沿z向依次间隔设置，所述反射镜、所述非偏振分光镜及所述接收传感器沿y向依次间隔设置，且所述z向与所述y向相互垂直；所述叠层结构包括沿所述z向依次层叠设置的第一镜片层和第二镜片层；According to the first aspect of the present application, a measurement method of a Michelson interferometer is proposed, and the Michelson interferometer includes a light source, a reflector, a receiving sensor, and a non-polarizing beam splitter; the light source, the non-polarizing beam splitter and the laminated structure are sequentially arranged at intervals along the z direction, the reflector, the non-polarizing beam splitter and the receiving sensor are sequentially arranged at intervals along the y direction, and the z direction and the y direction are perpendicular to each other; the stack The layer structure includes a first lens layer and a second lens layer sequentially stacked along the z direction;
所述量测方法包括：The measurement methods include:
根据所述第一镜片层的光学特性与所述第二镜片层的光学特性，发出第一偏振光；emitting first polarized light according to the optical characteristics of the first lens layer and the optical characteristics of the second lens layer;
将所述第一偏振光分束为传输至所述反射镜的第一参考偏振光和传输至所述第一镜片层的第一测试偏振光；splitting the first polarized light into a first reference polarized light transmitted to the mirror and a first test polarized light transmitted to the first lens layer;
对所述第一参考偏振光和/或所述第一测试偏振光进行偏振调制，以使由所述反射镜反射至所述接收传感器的所述第一参考偏振光，与经由所述第一镜片层反射并传输至所述接收传感器的第一测试偏振光具有相同的偏振状态；performing polarization modulation on the first reference polarized light and/or the first test polarized light, so that the first reference polarized light reflected by the mirror to the receiving sensor the first test polarized light reflected by the mirror layer and transmitted to the receiving sensor has the same polarization state;
根据所述第一镜片层的光学特性和所述第二镜片层的光学特性，发出第二偏振光；emitting a second polarized light according to the optical properties of the first lens layer and the optical properties of the second lens layer;
将所述第二偏振光分束为传输至所述反射镜的第二参考偏振光和传输至所述叠层结构的第二镜片层的第二测试偏振光；splitting the second polarized light into second reference polarized light transmitted to the mirror and second test polarized light transmitted to the second lens layer of the laminated structure;
对所述第二参考偏振光和/或所述第二测试偏振光进行偏振调制，以使由所述反射镜反射至所述接收传感器的所述第二参考偏振光，与经由所述第二镜片层反射并传输至所述接收传感器的第二测试偏振光具有相同的偏振状态。performing polarization modulation on the second reference polarized light and/or the second test polarized light, so that the second reference polarized light reflected by the mirror to the receiving sensor The second test polarized light reflected by the mirror layer and transmitted to the receiving sensor has the same polarization state.
在其中一个实施例中，所述根据所述第一镜片层的光学特性与所述第二镜片层的光学特性，发出第一偏振光的步骤具体包括：In one of the embodiments, the step of emitting the first polarized light according to the optical characteristics of the first lens layer and the optical characteristics of the second lens layer specifically includes:
当所述第一镜片层包括第一四分之一波片，所述第二镜片层包括反射式偏振片时，朝向所述非偏振分光镜发出x向偏振光或y向偏振光；其中，所述x向、所述y向及所述z向两两垂直设置。When the first lens layer includes a first quarter-wave plate and the second lens layer includes a reflective polarizer, x-polarized light or y-polarized light is emitted toward the non-polarizing beam splitter; wherein, The x-direction, the y-direction and the z-direction are vertically arranged in pairs.
在其中一个实施例中，所述迈克尔逊干涉仪还包括二分之一波片及第二四分之一波片；In one of the embodiments, the Michelson interferometer further includes a half-wave plate and a second quarter-wave plate;
所述对所述第一参考偏振光和/或所述第一测试偏振光进行偏振调制，以使由所述反射镜反射至所述接收传感器的所述第一参考偏振光，与经由所述第一镜片层反射并传输至所述接收传感器的第一测试偏振光具有相同的偏振状态的步骤具体包括：performing polarization modulation on the first reference polarized light and/or the first test polarized light, so that the first reference polarized light reflected by the reflector to the receiving sensor, and the The step that the first test polarized light reflected by the first lens layer and transmitted to the receiving sensor has the same polarization state specifically includes:
当所述第一偏振光为x向偏振光时，利用所述第二四分之一波片，将所述第一参考偏振光与所述第一测试偏振光转化为右旋偏振光；When the first polarized light is x-polarized light, using the second quarter-wave plate to convert the first reference polarized light and the first test polarized light into right-handed polarized light;
当所述第一偏振光为y向偏振光时，利用所述二分之一波片及所述第二四分之一波片，将所述第一参考偏振光与所述第一测试偏振光转化为右旋偏振光。When the first polarized light is polarized light in the y direction, the first reference polarized light and the first test polarized light are separated by using the half-wave plate and the second quarter-wave plate The light is converted to right-handed polarized light.
在其中一个实施例中，所述迈克尔逊干涉仪还包括x向线偏振片与y向线偏振片，所述量测方法还包括：In one of the embodiments, the Michelson interferometer also includes an x-directional linear polarizer and a y-directional linear polarizer, and the measurement method further includes:
利用所述x向线偏振片，将所述第一参考偏振光与所述第一测试偏振光转化为x向偏振光；或converting the first reference polarized light and the first test polarized light into x-directed polarized light by using the x-direction linear polarizer; or
利用所述y向线偏振片，将所述第一参考偏振光与所述第一测试偏振光转化为y向偏振光。The first reference polarized light and the first test polarized light are converted into y-directed polarized light by using the y-direction linear polarizer.
在其中一个实施例中，所述量测方法包括：In one of the embodiments, the measurement method includes:
绕平行于所述z向的轴线旋转所述叠层结构，以使x向偏振光能够穿过所述反射式偏振片。Rotating the stack about an axis parallel to the z-direction allows x-polarized light to pass through the reflective polarizer.
在其中一个实施例中，所述根据所述第一镜片层的光学特性和所述第二镜片层的光学特性，发出第二偏振光的步骤具体包括：In one of the embodiments, the step of emitting the second polarized light according to the optical characteristics of the first lens layer and the optical characteristics of the second lens layer specifically includes:
当所述第一镜片层包括第一四分之一波片，所述第二镜片层包括反射式偏振片时，朝向所述非偏振分光镜发出x向偏振光或y向偏振光；其中，所述x向、所述y向及所述z向两两垂直设置。When the first lens layer includes a first quarter-wave plate and the second lens layer includes a reflective polarizer, x-polarized light or y-polarized light is emitted toward the non-polarizing beam splitter; wherein, The x-direction, the y-direction and the z-direction are vertically arranged in pairs.
在其中一个实施例中，所述迈克尔逊干涉仪还包括第二四分之一波片、x向线偏振片及y向线偏振片；In one of the embodiments, the Michelson interferometer also includes a second quarter-wave plate, an x-direction linear polarizer and a y-direction linear polarizer;
所述对所述第二参考偏振光和/或所述第二测试偏振光进行偏振调制，以使由所述反射镜反射至所述接收传感器的所述第二参考偏振光，与经由所述第二镜片层反射并传输至所述接收传感器的第二测试偏振光具有相同的偏振状态的步骤具体包括：performing polarization modulation on the second reference polarized light and/or the second test polarized light, so that the second reference polarized light reflected by the mirror to the receiving sensor, and the The step that the second test polarized light reflected by the second lens layer and transmitted to the receiving sensor has the same polarization state specifically includes:
当所述第二偏振光为x向偏振光时，利用所述第二四分之一波片，将所述第二参考偏振光转化为y向偏振光，并利用所述y向线偏振片，将所述第二测试偏振光转化为y向偏振光；When the second polarized light is x-polarized light, use the second quarter-wave plate to convert the second reference polarized light into y-directed polarized light, and use the y-directed linear polarizer , converting the second test polarized light into y-direction polarized light;
当所述第二偏振光为y向偏振光时，利用所述第二四分之一波片，将所述第二参考偏振光转化为x向偏振光，并利用所述x向线偏振片，将所述第二测试偏振光转化为x向偏振光。When the second polarized light is polarized light in the y direction, the second reference polarized light is converted into polarized light in the x direction by using the second quarter-wave plate, and the polarized light in the x direction is used to , converting the second test polarized light into x-polarized light.
在其中一个实施例中，所述量测方法包括：In one of the embodiments, the measurement method includes:
绕平行于所述z向的轴线旋转所述叠层结构，以使所述反射式偏振片反射后的线偏振光穿过所述第一四分之一波片后能够转化为圆偏振光。Rotating the laminated structure around an axis parallel to the z-direction, so that the linearly polarized light reflected by the reflective polarizer can be converted into circularly polarized light after passing through the first quarter-wave plate.
根据本申请的第二方面，还提出一种迈克尔逊干涉仪，用于测试叠层结构中各层结构的形貌，所述迈克尔逊干涉仪包括：According to the second aspect of the present application, a Michelson interferometer is also proposed, which is used to test the morphology of each layer structure in the laminated structure, and the Michelson interferometer includes:
光源，用以沿z向与所述叠层结构相对设置，所述光源用以沿z向朝所述叠层结构射出偏振光；a light source, configured to be arranged opposite to the laminated structure along the z direction, and the light source is used to emit polarized light toward the laminated structure along the z direction;
非偏振分光镜，用以设于所述光源与所述叠层结构之间，所述非偏振分光镜的朝向与所述z向之间呈45度角设置；所述非偏振分光镜用以将所述光源发出的偏振光分束为参考偏振光和测试偏振光，所述测试偏振光用以传输至所述叠层结构；A non-polarizing beam splitter is used to be arranged between the light source and the laminated structure, and the orientation of the non-polarizing beam splitter is set at an angle of 45 degrees to the z direction; the non-polarizing beam splitter is used for splitting the polarized light emitted by the light source into reference polarized light and test polarized light, and the test polarized light is used for transmission to the laminated structure;
反射镜，沿y向与所述非偏振分光镜相对设置；所述参考偏振光用以传输至所述反射镜；a mirror, arranged opposite to the non-polarizing beam splitter along the y direction; the reference polarized light is used to transmit to the mirror;
接收传感器，沿所述y向与所述非偏振分光镜相对设置，且所述接收传感器相对所述反射镜设于所述非偏振分光镜的另一侧；以及The receiving sensor is arranged opposite to the non-polarizing beam splitter along the y direction, and the receiving sensor is arranged on the other side of the non-polarizing beam splitting mirror relative to the mirror; and
偏振调制组件，用以对所述参考偏振光和所述测试偏振光进行偏振调制，以使由所述反射镜反射至所述接收传感器的所述参考偏振光，与经由所述叠层结构反射并传输至所述接收传感器的所述测试偏振光具有相同的偏振状态；a polarization modulation component, configured to perform polarization modulation on the reference polarized light and the test polarized light, so that the reference polarized light reflected by the mirror to the receiving sensor is the same as that reflected by the laminated structure and the test polarized light transmitted to the receiving sensor has the same polarization state;
其中，所述y向与所述z向垂直设置。Wherein, the y direction is perpendicular to the z direction.
在其中一个实施例中，所述叠层结构包括沿所述z向依次层叠设置的第一镜片层和第二镜片层，所述第一镜片层包括第一四分之一波片，所述第二镜片层包括反射式偏振片，其中：In one of the embodiments, the laminated structure includes a first lens layer and a second lens layer that are sequentially stacked along the z direction, the first lens layer includes a first quarter-wave plate, and the The second optic layer includes a reflective polarizer, wherein:
所述偏振调制组件包括设于所述光源与所述非偏振分光镜之间的第二四分之一波片，所述第二四分之一波片用以将x向偏振光转化为右旋偏振光；或The polarization modulation component includes a second quarter-wave plate arranged between the light source and the non-polarizing beam splitter, and the second quarter-wave plate is used to convert x-polarized light into right polarized light; or
所述偏振调制组件包括设于所述反射镜与所述非偏振分光镜之间的第二四分之一波片，所述第二四分之一波片用以将y向偏振光转化为左旋偏振光，或是将右旋偏振光转化为x向偏振光，或是将x向偏振光转化为右旋偏振光，或是将左旋偏振光转化为y偏振光；The polarization modulation component includes a second quarter-wave plate arranged between the mirror and the non-polarizing beam splitter, and the second quarter-wave plate is used to convert the y-polarized light into Left-handed polarized light, or convert right-handed polarized light into x-polarized light, or convert x-polarized light into right-handed polarized light, or convert left-handed polarized light into y-polarized light;
其中，所述x向、所述y向与所述z向呈两两垂直设置。Wherein, the x-direction, the y-direction and the z-direction are vertically arranged in pairs.
在其中一个实施例中，所述叠层结构包括沿所述z向依次层叠设置的第一镜片层和第二镜片层，所述第一镜片层包括第一四分之一波片，所述第二镜片层包括反射式偏振片；In one of the embodiments, the laminated structure includes a first lens layer and a second lens layer that are sequentially stacked along the z direction, the first lens layer includes a first quarter-wave plate, and the the second lens layer includes a reflective polarizer;
所述偏振调制组件包括二分之一波片及第二四分之一波片，自所述光源指向所述非偏振分光镜，所述二分之一波片与所述第二四分之一波片依次间隔设于所述光源与所述非偏振分光镜之间；The polarization modulation component includes a half-wave plate and a second quarter-wave plate, pointing from the light source to the non-polarizing beam splitter, the half-wave plate and the second quarter-wave plate A wave plate is sequentially spaced between the light source and the non-polarizing beam splitter;
所述二分之一波片用以将y向偏振光转化为x向偏振光，所述四分之一波板用以将x向偏振光转化为右旋偏振光。The half-wave plate is used to convert the y-polarized light into x-polarized light, and the quarter-wave plate is used to convert the x-polarized light into right-handed polarized light.
在其中一个实施例中，所述迈克尔逊干涉仪还包括安装于所述非偏振分光镜与所述接收传感器之间的第一光学元件，所述第一光学元件设为x向线偏振片或y向线偏振片。In one of the embodiments, the Michelson interferometer further includes a first optical element installed between the non-polarizing beam splitter and the receiving sensor, and the first optical element is set as an x-direction linear polarizer or y-direction linear polarizer.
在本申请的技术方案中，迈克尔逊干涉仪通过光源发出第一偏振光与第二偏振光，再通过非偏振分光镜将光源发出的偏振光分束为测试偏振光与参考偏振光。比如，非偏振分光镜能够将第一偏振光分束为第一参考偏振光与第一测试偏振光，还能将第二偏振光分束为第二参考偏振光与第二测试偏振光。其中，参考偏振光会被非偏振分光镜通过反射射向反射镜，再由反射镜反射至接收传感器；测试偏振光则会直接穿过非偏振分光镜，从而射向叠层结构，并在经由叠层结构反射后再次射向非偏振分光镜，最后由非偏振分光镜反射至接收传感器。In the technical solution of the present application, the Michelson interferometer emits first polarized light and second polarized light through a light source, and then splits the polarized light emitted by the light source into test polarized light and reference polarized light through a non-polarizing beam splitter. For example, the non-polarizing beam splitter can split the first polarized light into the first reference polarized light and the first test polarized light, and can also split the second polarized light into the second reference polarized light and the second test polarized light. Among them, the reference polarized light will be reflected by the non-polarized beam splitter to the mirror, and then reflected by the mirror to the receiving sensor; the test polarized light will directly pass through the non-polarized beam splitter, so as to be directed to the laminated structure, and then passed through After being reflected by the laminated structure, it goes to the non-polarizing beam splitter again, and finally is reflected by the non-polarizing beam splitter to the receiving sensor.
本申请的迈克尔逊干涉仪还设有偏振调制组件，偏振调制组件包括一个或多个光学元件，偏振调制组件能够调整测试偏振光与参考偏振光的偏振状态，从而使得测试偏振光与参考偏振光的偏振状态相同。当偏振状态相同的测试偏振光与参考偏振光射入接收传感器后，迈克尔逊干涉仪能够生成两组干涉条纹，通过对比测试偏振光与参考偏振光分别生成的干涉条纹，就能反推出叠层结构中第一镜片层与第二镜片层的形貌。本申请通过偏振调制组件对测试偏振光与参考偏振光进行偏振调制，使得测试偏振光与参考偏振光的偏振状态相同，从而避免叠层结构中不同层的光学元件的影响与干扰。这使得迈克尔逊干涉仪通过调整偏振调制组件的组成与安装位置，就能够测量叠层结构中各层光学元件的形貌，减少了叠层结构因拆分而产生的损失。The Michelson interferometer of the present application is also provided with a polarization modulation component, which includes one or more optical elements, and the polarization modulation component can adjust the polarization states of the test polarized light and the reference polarized light, so that the test polarized light and the reference polarized light same polarization state. When the test polarized light and the reference polarized light with the same polarization state enter the receiving sensor, the Michelson interferometer can generate two sets of interference fringes. By comparing the interference fringes generated by the test polarized light and the reference polarized light respectively, the stack can be deduced The morphology of the first lens layer and the second lens layer in the structure. In this application, the polarization modulation of the test polarized light and the reference polarized light is carried out by the polarization modulation component, so that the polarization states of the test polarized light and the reference polarized light are the same, thereby avoiding the influence and interference of optical elements of different layers in the laminated structure. This enables the Michelson interferometer to measure the shape of each layer of optical elements in the stacked structure by adjusting the composition and installation position of the polarization modulation component, reducing the loss of the stacked structure due to splitting.
附图说明Description of drawings
图1为本申请提出的迈克尔逊干涉仪的第一实施例的结构示意图。FIG. 1 is a schematic structural diagram of the first embodiment of the Michelson interferometer proposed in the present application.
图2为本申请提出的迈克尔逊干涉仪的第二实施例的结构示意图。FIG. 2 is a schematic structural diagram of a second embodiment of the Michelson interferometer proposed in the present application.
图3为本申请提出的迈克尔逊干涉仪的第三实施例的结构示意图。FIG. 3 is a schematic structural diagram of a third embodiment of the Michelson interferometer proposed in the present application.
图4为图1至图3中叠层结构中各层结构的正视图(叠层结构拆分后)。FIG. 4 is a front view of each layer structure in the laminated structure shown in FIGS. 1 to 3 (after the laminated structure is disassembled).
图5为本申请提出的迈克尔逊干涉仪的第四实施例的结构示意图。FIG. 5 is a schematic structural diagram of a fourth embodiment of the Michelson interferometer proposed in the present application.
图6为图5中叠层结构中各层结构的正视图(叠层结构拆分后)。FIG. 6 is a front view of each layer structure in the laminated structure in FIG. 5 (after the laminated structure is disassembled).
图7为本申请提出的迈克尔逊干涉仪的量测方法的第一实施例的流程示意图。FIG. 7 is a schematic flowchart of a first embodiment of the measurement method of the Michelson interferometer proposed in the present application.
图8为本申请提出的迈克尔逊干涉仪的量测方法的第二实施例的流程示意图。FIG. 8 is a schematic flowchart of a second embodiment of the measurement method of the Michelson interferometer proposed in the present application.
图9为本申请提出的迈克尔逊干涉仪的量测方法的第三实施例的流程示意图。FIG. 9 is a schematic flowchart of a third embodiment of the measuring method of the Michelson interferometer proposed in the present application.
附图标号说明：Explanation of reference numbers:
具体实施方式Detailed ways
为使本申请的上述目的、特征和优点能够更加明显易懂，下面结合附图对本申请的具体实施方式做详细的说明。在下面的描述中阐述了很多具体细节以便于充分理解本申请。但是本申请能够以很多不同于在此描述的其它方式来实施，本领域技术人员可以在不违背本申请内涵的情况下做类似改进，因此本申请不受下面公开的具体实施例的限制。In order to make the above-mentioned purpose, features and advantages of the present application more obvious and understandable, the specific implementation manners of the present application will be described in detail below in conjunction with the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the application. However, the present application can be implemented in many other ways different from those described here, and those skilled in the art can make similar improvements without departing from the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.
在本申请的描述中，需要理解的是，若有出现这些术语“中心”、“纵向”、“横向”、“长度”、“宽度”、“厚度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”、“顺时针”、“逆时针”、“轴向”、“径向”、“周向”等，这些术语指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本申请和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本申请的限制。In the description of the present application, it should be understood that if any of these terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", " Front", "Back", "Left", "Right", "Vertical", "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise", "Axial", "radial", "circumferential", etc., the orientation or positional relationship indicated by these terms is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the application and simplifying the description, rather than indicating Or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be construed as limiting the application.
此外，若有出现这些术语“第一”、“第二”，这些术语仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括该特征。在本申请的描述中，若有出现术语“多个”，“多个”的含义是至少两个，例如两个，三个等，除非另有明确具体的限定。In addition, if these terms "first" and "second" appear, these terms are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, features defined as "first" and "second" may include such features explicitly or implicitly. In the description of the present application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise specifically defined.
在本申请中，除非另有明确的规定和限定，若有出现术语“安装”、“相连”、“连接”、“固定”等，这些术语应做广义理解。例如，可以是固定连接，也可以是可拆卸连接，或成一体；可以是机械连接，也可以是电连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通或两个元件的相互作用关系，除非另有明确的限定。对于本领域的普通技术人员而言，可以根据具体情况理解上述术语在本申请中的具体含义。In this application, unless otherwise clearly specified and limited, if any terms such as "mounted", "connected", "connected" and "fixed" appear, these terms should be interpreted in a broad sense. For example, it can be a fixed connection, or a detachable connection, or integrated; it can be a mechanical connection, or it can be an electrical connection; it can be a direct connection or an indirect connection through an intermediary, or it can be the internal communication of two components Or the interaction relationship between two elements, unless expressly defined otherwise. Those of ordinary skill in the art can understand the specific meanings of the above terms in this application according to specific situations.
在本申请中，除非另有明确的规定和限定，若有出现第一特征在第二特征“上”或“下”等类似的描述，其含义可以是第一和第二特征直接接触，或第一和第二特征通过中间媒介间接接触。而且，第一特征在第二特征“之上”、“上方”和“上面”可是第一特征在第二特征正上方或斜上方，或仅仅表示第一特征水平高度高于第二特征。第一特征在第二特征“之下”、“下方”和“下面”可以是第一特征在第二特征正下方或斜下方，或仅仅表示第一特征水平高度小于第二特征。In this application, unless otherwise clearly specified and limited, if there is a similar description that the first feature is "on" or "under" the second feature, the meaning may be that the first and second features are in direct contact, or The first and second features are in indirect contact through an intermediary. Moreover, "above", "above" and "above" the first feature on the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. "Below", "beneath" and "beneath" the first feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is less horizontally than the second feature.
需要说明的是，若元件被称为“固定于”或“设置于”另一个元件，它可以直接在另一个元件上或者也可以存在居中的元件。若一个元件被认为是“连接”另一个元件，它可以是直接连接到另一个元件或者可能同时存在居中元件。如若存在，本申请所使用的术语“垂直的”、“水平的”、“上”、“下”、“左”、“右”以及类似的表述只是为了说明的目的，并不表示是唯一的实施方式。It should be noted that, if an element is referred to as being “fixed on” or “disposed on” another element, it may be directly on the other element or there may be an intervening element. If an element is considered to be "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. As used herein, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions are used for purposes of illustration only and are not intended to be exclusive implementation.
随着技术的发展与用户需求的增多，电子产品对光学系统的品质的要求在日益提高。而在具体使用时，光学元件的形貌会影响光学系统的品质，因此生产方一般会通过迈克尔逊干涉仪量测光学元件的形貌。但是，传统的迈克尔逊干涉仪在测试叠层结构时，需要先将叠层结构拆分为多个单层镜片，再分别对每一单层镜片进行量测，容易使得叠层结构产生不必要的损失。With the development of technology and the increase of user demands, the quality requirements of electronic products for optical systems are increasing day by day. In actual use, the shape of the optical element will affect the quality of the optical system, so the manufacturer generally uses a Michelson interferometer to measure the shape of the optical element. However, when the traditional Michelson interferometer tests the laminated structure, it needs to first split the laminated structure into multiple single-layer lenses, and then measure each single-layer lens separately, which easily makes the laminated structure unnecessary. Loss.
本申请的技术人员通过研究发现，迈克尔逊干涉仪需要对比参考偏振光与测试偏振光分别生成的干涉条纹的不同，从而反推出待测光学元件与反射镜的形貌的不同，从而量测出待测光学元件的形貌。但是，传统的迈克尔逊干涉仪如果对叠层结构进行形貌量测，叠层结构中不同层的光学元件会相互干扰，导致叠层结构中待测光学元件所射出的偏振光与反射镜射出的偏振光的类型不同，无法比对两者生成的干涉条纹。The technicians of the present application have found through research that the Michelson interferometer needs to compare the difference between the interference fringes generated by the reference polarized light and the test polarized light, so as to deduce the difference in the shape of the optical element to be tested and the mirror, thereby measuring The shape of the optical element under test. However, if the traditional Michelson interferometer measures the shape of the laminated structure, the optical elements of different layers in the laminated structure will interfere with each other, resulting in the polarized light emitted by the optical element to be measured in the laminated structure and the reflection mirror. The types of polarized light are different, and the interference fringes generated by the two cannot be compared.
鉴于此，本申请提出一种迈克尔逊干涉仪，旨在解决传统的迈克尔逊干涉仪在测试叠层结构时，只能先将叠层结构拆分为单层，再分别进行量测的问题。图1至图6为本申请中提出的迈克尔逊干涉仪的一实施例的结构示意图。In view of this, the present application proposes a Michelson interferometer, aiming at solving the problem that when the traditional Michelson interferometer tests the laminated structure, the laminated structure can only be split into single layers and then measured separately. 1 to 6 are structural schematic diagrams of an embodiment of a Michelson interferometer proposed in this application.
请参阅图1至图3，本申请提出的迈克尔逊干涉仪用于测试叠层结构100中各层结构的形貌，迈克尔逊干涉仪包括光源1、非偏振分光镜4、反射镜2、接收传感器3及偏振调制组件5。光源1用以沿z向与叠层结构100相对设置，光源1用以沿z向朝叠层结构100射出偏振光。Please refer to Fig. 1 to Fig. 3, the Michelson interferometer that the application proposes is used for testing the topography of each layer structure in laminated structure 100, Michelson interferometer comprises light source 1, non-polarizing beam splitter 4, mirror 2, receiving Sensor 3 and polarization modulation component 5 . The light source 1 is arranged opposite to the stack structure 100 along the z direction, and the light source 1 is used to emit polarized light toward the stack structure 100 along the z direction.
非偏振分光镜4用以设于光源1与叠层结构100之间，非偏振分光镜4的朝向与z向之间呈45度角设置；非偏振分光镜4用以将光源1发出的偏振光分束为参考偏振光和测试偏振光，测试偏振光用以传输至叠层结构100。The non-polarizing beam splitter 4 is used to be arranged between the light source 1 and the laminated structure 100, and the orientation of the non-polarizing beam splitter 4 is set at an angle of 45 degrees between the z direction; the non-polarizing beam splitter 4 is used to polarize the light emitted by the light source 1 The light is split into reference polarized light and test polarized light, and the test polarized light is used to transmit to the laminated structure 100 .
反射镜2沿y向与非偏振分光镜4相对设置；参考偏振光用以传输至反射镜2。接收传感器3沿y向与非偏振分光镜4相对设置，且接收传感器3相对反射镜2设于非偏振分光镜4的另一侧。偏振调制组件5用以对参考偏振光和测试偏振光进行偏振调制，以使由反射镜2反射至接收传感器3的参考偏振光，与经由叠层结构100反射并传输至接收传感器3的测试偏振光具有相同的偏振状态。其中，y向与z向垂直设置。The mirror 2 is arranged opposite to the non-polarizing beam splitter 4 along the y direction; the reference polarized light is used to transmit to the mirror 2 . The receiving sensor 3 is arranged opposite to the non-polarizing beam splitter 4 along the y direction, and the receiving sensor 3 is arranged on the other side of the non-polarizing beam splitting mirror 4 relative to the reflecting mirror 2 . The polarization modulation component 5 is used to perform polarization modulation on the reference polarized light and the test polarized light, so that the reference polarized light reflected by the mirror 2 to the receiving sensor 3 and the test polarized light reflected by the laminated structure 100 and transmitted to the receiving sensor 3 The light has the same polarization state. Wherein, the y direction and the z direction are vertically set.
在本申请中，y向与z向为两个相对方向，其中z向可以设为光源1与叠层结构100的相对方向，y向可以为反射镜2与接收传感器3的相对方向。In this application, the y direction and the z direction are two relative directions, wherein the z direction can be set as the relative direction of the light source 1 and the laminated structure 100 , and the y direction can be set as the relative direction of the reflector 2 and the receiving sensor 3 .
在本申请的技术方案中，迈克尔逊干涉仪通过光源1发出第一偏振光200与第二偏振光300，再通过非偏振分光镜4能够将光源1发出的偏振光分束为测试偏振光与参考偏振光。比如，非偏振分光镜4能够将第一偏振光200分束为第一参考偏振光220与第一测试偏振光210，还能将第二偏振光300分束为第二参考偏振光320与第二测试偏振光310。其中，参考偏振光会被非偏振分光镜4通过反射射向反射镜2，再由反射镜2反射至接收传感器3；测试偏振光则会直接穿过非偏振分光镜4，从而射向叠层结构100，并在经由叠层结构100反射后再次射向非偏振分光镜4，最后由非偏振分光镜4反射至接收传感器3。In the technical solution of the present application, the Michelson interferometer emits the first polarized light 200 and the second polarized light 300 through the light source 1, and then through the non-polarizing beam splitter 4, the polarized light emitted by the light source 1 can be split into test polarized light and Reference polarized light. For example, the non-polarizing beam splitter 4 can split the first polarized light 200 into the first reference polarized light 220 and the first test polarized light 210, and can also split the second polarized light 300 into the second reference polarized light 320 and the first polarized light 320. Two test polarized light 310 . Among them, the reference polarized light will be reflected by the non-polarized beam splitter 4 to the mirror 2, and then reflected by the mirror 2 to the receiving sensor 3; the test polarized light will directly pass through the non-polarized beam splitter 4, so as to be directed to the stack structure 100 , and after being reflected by the laminated structure 100 , it goes to the non-polarizing beam splitter 4 again, and finally is reflected by the non-polarizing beam splitter 4 to the receiving sensor 3 .
本申请的迈克尔逊干涉仪还设有偏振调制组件5，偏振调制组件5包括一个或多个光学元件，偏振调制组件5能够调整测试偏振光与参考偏振光的偏振状态，从而使得测试偏振光与参考偏振光的偏振状态相同。当偏振状态相同的测试偏振光与参考偏振光射入接收传感器3后，迈克尔逊干涉仪能够生成两组干涉条纹，通过对比测试偏振光与参考偏振光分别生成的干涉条纹，就能反推出叠层结构100中第一镜片层110与第二镜片层120的形貌。The Michelson interferometer of the present application is also provided with a polarization modulation component 5, the polarization modulation component 5 includes one or more optical elements, the polarization modulation component 5 can adjust the polarization states of the test polarized light and the reference polarized light, so that the test polarized light and the reference polarized light The polarization state of the reference polarized light is the same. When the test polarized light and the reference polarized light with the same polarization state enter the receiving sensor 3, the Michelson interferometer can generate two sets of interference fringes. By comparing the interference fringes generated by the test polarized light and the reference polarized light respectively, the overlapping The morphology of the first lens layer 110 and the second lens layer 120 in the layer structure 100 .
本申请通过偏振调制组件5对测试偏振光与参考偏振光进行偏振调制，使得测试偏振光与参考偏振光的偏振状态相同，从而避免叠层结构100中不同层的光学元件的影响与干扰。这使得迈克尔逊干涉仪通过调整偏振调制组件5的组成与安装位置，就能够测量叠层结构100中各层光学元件的形貌，减少了叠层结构因拆分而产生的损失。实际上，迈克尔逊干涉仪通过调整偏振调制组件5的组成与安装位置，也能对不同的叠层结构100进行量测。In this application, the polarization modulation component 5 performs polarization modulation on the test polarized light and the reference polarized light, so that the polarization states of the test polarized light and the reference polarized light are the same, thereby avoiding the influence and interference of optical elements of different layers in the laminated structure 100 . This enables the Michelson interferometer to measure the morphology of each layer of optical elements in the laminated structure 100 by adjusting the composition and installation position of the polarization modulation component 5 , reducing the loss caused by the splitting of the laminated structure. In fact, the Michelson interferometer can also measure different laminated structures 100 by adjusting the composition and installation position of the polarization modulation component 5 .
在本申请的说明中，叠层结构100包括沿z向依次层叠设置的第一镜片层110和第二镜片层120，第一镜片层110包括第一四分之一波片110a，第二镜片层120包括反射式偏振片120a。当然，叠层结构100还可以是其他结构。In the description of this application, the laminated structure 100 includes a first lens layer 110 and a second lens layer 120 that are sequentially stacked along the z direction, the first lens layer 110 includes a first quarter-wave plate 110a, and the second lens layer Layer 120 includes reflective polarizer 120a. Certainly, the laminated structure 100 may also be other structures.
请参阅图1至图4，在本申请的一实施例中，偏振调制组件5包括设于光源1与非偏振分光镜4之间的第二四分之一波片51，第二四分之一波片51用以将x向偏振光转化为右旋偏振光。1 to 4, in an embodiment of the present application, the polarization modulation component 5 includes a second quarter-wave plate 51 disposed between the light source 1 and the non-polarizing beam splitter 4, the second quarter wave plate 51 A wave plate 51 is used to convert x-polarized light into right-handed polarized light.
实际上，当四分之一波片的快轴F与入射的偏振光的偏振方向的夹角为+45°时，四分之一波片会将入射的偏振光转化为左旋圆偏光；当四分之一波片的快轴F与偏振光的偏振方向的夹角为-45°时，四分之一波片会将入射的偏振光转化为右旋圆偏振光。In fact, when the angle between the fast axis F of the quarter-wave plate and the polarization direction of the incident polarized light is +45°, the quarter-wave plate will convert the incident polarized light into left-handed circularly polarized light; when When the angle between the fast axis F of the quarter-wave plate and the polarization direction of the polarized light is -45°, the quarter-wave plate will convert the incident polarized light into right-handed circularly polarized light.
也就是说，本实施例中，第二四分之一波片51的快轴F的延伸方向与x向为-45°。此时，光源1选为x向偏振光源1，而第二四分之一波片51将x向偏振光转化为右旋偏振光后，非偏振分光镜4会将右旋偏振光分为两束，其中一束作为测试偏振光射入叠层结构100，另一束作为参考偏振光射入反射镜2，并由反射镜2反射至接收传感器3。此时，叠层结构100中的第一四分之一波片110a会将右旋偏振光反射转化为左旋偏振光，再经过非偏振分光镜4反射转化成右旋偏振光，并射入接收传感器3。同样的，另一束右旋偏振光经过非偏振分光镜4反射后朝向反射镜2射出，并被转化为左旋偏振光，该左旋偏振光会经过反射镜2再次反射，并被转化为右旋偏振光，最后射入接收传感器3。因此测试偏振光与参考偏振光的偏振方向相同，从而能够完成对叠层结构100中第一镜片层110的量测。That is to say, in this embodiment, the extension direction of the fast axis F of the second quarter wave plate 51 and the x direction are -45°. At this time, the light source 1 is selected as the x-polarized light source 1, and after the second quarter-wave plate 51 converts the x-polarized light into right-handed polarized light, the non-polarizing beam splitter 4 will split the right-handed polarized light into two One beam is incident into the laminated structure 100 as a test polarized light, and the other beam is incident into the mirror 2 as a reference polarized light, and is reflected by the mirror 2 to the receiving sensor 3 . At this time, the first quarter-wave plate 110a in the laminated structure 100 will reflect and convert right-handed polarized light into left-handed polarized light, and then reflect and convert it into right-handed polarized light through the non-polarizing beam splitter 4, and enter the receiver sensor 3. Similarly, another beam of right-handed polarized light is reflected by the non-polarizing beam splitter 4 and then emitted towards the mirror 2, and is converted into left-handed polarized light, which will be reflected again by the mirror 2 and converted into right-handed polarized light The polarized light finally enters the receiving sensor 3. Therefore, the polarization direction of the test polarized light is the same as that of the reference polarized light, so that the measurement of the first lens layer 110 in the laminated structure 100 can be completed.
请参阅图5及图6，在本申请的另一实施例中，偏振调制组件5包括设于反射镜2与非偏振分光镜4之间的第二四分之一波片51，第二四分之一波片51用以将y向偏振光转化为左旋偏振光，或是将右旋偏振光转化为x向偏振光，或是将x向偏振光转化为右旋偏振光，或是将左旋偏振光转化为y偏振光。5 and 6, in another embodiment of the present application, the polarization modulation component 5 includes a second quarter-wave plate 51 disposed between the mirror 2 and the non-polarizing beam splitter 4, the second four One-half wave plate 51 is used for converting y-polarized light into left-handed polarized light, or converting right-handed polarized light into x-polarized light, or converting x-directed polarized light into right-handed polarized light, or converting Left-handed polarized light is converted to y-polarized light.
如上所说的，在这一实施例中，第二四分之一波片51的快轴F的延伸方向与y向的夹角为+45°，也就是与x向的夹角为-45°，因此能够将y向偏振光转化为左旋偏振光，将右旋偏振光转化为x向偏振光，也能将x向偏振光转化为右旋偏振光，还能将左旋偏振光转化为y偏振光。As mentioned above, in this embodiment, the included angle between the extension direction of the fast axis F of the second quarter-wave plate 51 and the y direction is +45°, that is, the included angle with the x direction is -45°. °, so it is possible to convert y-polarized light into left-handed polarized light, convert right-handed polarized light into x-polarized light, and convert x-polarized light into right-handed polarized light, and convert left-handed polarized light into y polarized light.
实际上，当叠层结构100的具体组成与本申请中所提出的不同时，只需要调整第二四分之一波片51的朝向，或者根据需求采用不同的偏振调制组件5进行偏振调制，如此同样能够量测叠层结构100中各层结构的形貌。In fact, when the specific composition of the laminated structure 100 is different from that proposed in this application, it is only necessary to adjust the orientation of the second quarter-wave plate 51, or use different polarization modulation components 5 for polarization modulation according to requirements, In this way, the topography of each layer structure in the laminated structure 100 can also be measured.
此外，x向为本申请中另一相对方向，实际上x向是与y向及z向分别垂直的另一方向。In addition, the x direction is another relative direction in the present application, and actually the x direction is another direction perpendicular to the y direction and the z direction respectively.
请参阅图3，在一些实施例中，叠层结构100包括沿z向依次层叠设置的第一镜片层110和第二镜片层120，第一镜片层110包括第一四分之一波片110a，第二镜片层120包括反射式偏振片120a。偏振调制组件5包括二分之一波片52及第二四分之一波片51，自光源1指向非偏振分光镜4，二分之一波片52与第二四分之一波片51依次间隔设于光源1与非偏振分光镜4之间。二分之一波片52用以将y向偏振光转化为x向偏振光，四分之一波板用以将x向偏振光转化为右旋偏振光。Referring to FIG. 3 , in some embodiments, the laminated structure 100 includes a first lens layer 110 and a second lens layer 120 sequentially stacked along the z direction, and the first lens layer 110 includes a first quarter-wave plate 110a , the second lens layer 120 includes a reflective polarizer 120a. The polarization modulation component 5 includes a half-wave plate 52 and a second quarter-wave plate 51, pointing from the light source 1 to the non-polarizing beam splitter 4, the half-wave plate 52 and the second quarter-wave plate 51 They are sequentially arranged between the light source 1 and the non-polarizing beam splitter 4 at intervals. The half-wave plate 52 is used to convert the y-polarized light into x-polarized light, and the quarter-wave plate is used to convert the x-polarized light into right-handed polarized light.
二分之一波片52会使线偏振光的角度转变90度，因此能够将y向偏振光转化为x向偏振光。而第二四分之一波片51的快轴F的延伸方向与x向为-45°，此时第二四分之一波片51能够将x向偏振光转化为右旋偏振光，从而完成后续的量测。The half-wave plate 52 can change the angle of the linearly polarized light by 90 degrees, thus converting the y-polarized light into x-polarized light. The extension direction of the fast axis F of the second quarter-wave plate 51 is -45° to the x-direction. At this time, the second quarter-wave plate 51 can convert the x-polarized light into right-handed polarized light, thereby Complete subsequent measurements.
请参阅图2及图5，在实际应用时，测试偏振光在射入叠层结构100中后，叠层结构100中的其他结构可能会反射出多余的光线，与测试偏振光一同朝向接收传感器3射出，干扰形貌的量测。因此在一些实施例中，迈克尔逊干涉仪还包括安装于非偏振分光镜4与接收传感器3之间的第一光学元件6，第一光学元件6设为x向线偏振片61或y向线偏振片62。Please refer to FIG. 2 and FIG. 5. In practical applications, after the test polarized light enters the stacked structure 100, other structures in the stacked structure 100 may reflect excess light, and the test polarized light will go toward the receiving sensor together. 3 Injection, measurement of interference topography. Therefore, in some embodiments, the Michelson interferometer also includes a first optical element 6 installed between the non-polarizing beam splitter 4 and the receiving sensor 3, and the first optical element 6 is set as the x-direction polarizer 61 or the y-direction line Polarizer 62.
当非偏振分光镜4与接收传感器3之间设置y向线偏振片62时，只有y向偏振光与圆偏振光中y向的分量能够进入接收传感器3中；当非偏振分光镜4与接收传感器3之间设置x向线偏振片61时，只有x向偏振光与圆偏振光中x向的分量能够进入接收传感器3中；从而避免了多余的光线对形貌量测的干扰。而在本申请中，第一光学元件6可以根据需求进行调整与选择，比如可以是x向线偏振片61，也可以是y向线偏振片62，甚至第一光学元件6可以不进行设置。When the y-direction linear polarizer 62 is arranged between the non-polarizing beam splitter 4 and the receiving sensor 3, only the component of the y-direction in the y-polarized light and the circularly polarized light can enter in the receiving sensor 3; when the non-polarizing beam splitting mirror 4 and the receiving sensor When the x-direction linear polarizer 61 is arranged between the sensors 3, only the x-direction polarized light and the x-direction component of the circularly polarized light can enter the receiving sensor 3; thereby avoiding the interference of excess light on the shape measurement. In this application, the first optical element 6 can be adjusted and selected according to requirements, for example, it can be an x-direction linear polarizer 61 or a y-direction linear polarizer 62 , or even the first optical element 6 may not be provided.
基于上述硬件条件，本申请还提出了一种迈克尔逊干涉仪的量测方法，图7至图9为本申请提出的迈克尔逊干涉仪的量测方法的一实施例的流程示意图。迈克尔逊干涉仪包括光源1、反射镜2、接收传感器3及非偏振分光镜4。光源1、非偏振分光镜4及叠层结构100沿z向依次间隔设置，反射镜2、非偏振分光镜4及接收传感器3沿y向依次间隔设置，且z向与y向相互垂直。叠层结构100包括沿z向依次层叠设置的第一镜片层110和第二镜片层120。Based on the above hardware conditions, the present application also proposes a measurement method of Michelson interferometer. FIG. 7 to FIG. 9 are schematic flow charts of an embodiment of the measurement method of Michelson interferometer proposed in the present application. The Michelson interferometer includes a light source 1 , a mirror 2 , a receiving sensor 3 and a non-polarizing beam splitter 4 . The light source 1, the non-polarizing beam splitter 4 and the laminated structure 100 are arranged at intervals along the z direction, and the mirror 2, the non-polarizing beam splitter 4 and the receiving sensor 3 are arranged at intervals along the y direction, and the z direction and the y direction are perpendicular to each other. The laminated structure 100 includes a first lens layer 110 and a second lens layer 120 which are sequentially stacked along the z direction.
请参阅图1及图7，量测方法包括：Please refer to Figure 1 and Figure 7, the measurement methods include:
S10：根据第一镜片层110的光学特性与第二镜片层120的光学特性，发出第一偏振光200。在实际应用时，迈克尔逊干涉仪可能需要测试不同的叠层结构100的形貌。因此在开始测试前，需要根据叠层结构100的具体结构，也就是第一镜片层110的光学特性与第二镜片层120的光学特性，选择光源1种类并发出对应的第一偏振光200，方便后续对第一镜片层110的量测。S10 : According to the optical properties of the first lens layer 110 and the optical properties of the second lens layer 120 , emit the first polarized light 200 . In practical applications, the Michelson interferometer may need to test the morphology of different stacked structures 100 . Therefore, before starting the test, it is necessary to select the type of light source 1 and emit the corresponding first polarized light 200 according to the specific structure of the laminated structure 100, that is, the optical characteristics of the first lens layer 110 and the optical characteristics of the second lens layer 120, It is convenient for subsequent measurement of the first lens layer 110 .
S20：将第一偏振光200分束为传输至反射镜2的第一参考偏振光220和传输至第一镜片层110的第一测试偏振光210。第一偏振光200会经过非偏振分光镜4，非偏振分光镜4会将第一偏振光200中的部分反射至反射镜2，从而形成第一参考偏振光220，而第一偏振光200中的另一部分会直接穿过非偏振分光镜4，射向叠层结构100，从而形成第一测试偏振光210。要说明的是，非偏振分光镜4是根据光线的能量进行分光，但会转化被反射光线的偏振状态，因此此时第一参考偏振光220与第一测试偏振光210的偏振状态不同。S20 : Split the first polarized light 200 into a first reference polarized light 220 transmitted to the mirror 2 and a first test polarized light 210 transmitted to the first lens layer 110 . The first polarized light 200 will pass through the non-polarized beam splitter 4, and the non-polarized beam splitter 4 will reflect part of the first polarized light 200 to the reflector 2, thereby forming the first reference polarized light 220, and the first polarized light 200 The other part will directly pass through the non-polarizing beam splitter 4 and shoot toward the laminated structure 100 , thereby forming the first test polarized light 210 . It should be noted that the non-polarizing beam splitter 4 splits light according to the energy of the light, but converts the polarization state of the reflected light. Therefore, the polarization states of the first reference polarized light 220 and the first test polarized light 210 are different at this time.
S30：对第一参考偏振光220和第一测试偏振光210进行偏振调制，以使由反射镜2反射至接收传感器3的第一参考偏振光220，与经由第一镜片层110反射并传输至接收传感器3的第一测试偏振光210具有相同的偏振状态。叠层结构100中各光学元件会对第一测试偏振光210进行转换，导致第一测试偏振光210与第一参考偏振光220的偏振不同，无法进行量测。因此在申请中，迈克尔逊干涉仪会通过偏振调制组件5对第一参考偏振光220和第一测试偏振光210分别进行偏振调制，从而使得第一参考偏振光220与第一测试偏振光210具有相同的偏振状态，从而完成对叠层结构100中第一镜片层110形貌的量测。S30: Perform polarization modulation on the first reference polarized light 220 and the first test polarized light 210, so that the first reference polarized light 220 reflected by the mirror 2 to the receiving sensor 3 is the same as the first reference polarized light 220 reflected by the first mirror layer 110 and transmitted to The first test polarized light 210 received by the sensor 3 has the same polarization state. Each optical element in the laminated structure 100 converts the first test polarized light 210 , resulting in a different polarization between the first test polarized light 210 and the first reference polarized light 220 , which cannot be measured. Therefore, in the application, the Michelson interferometer will respectively perform polarization modulation on the first reference polarized light 220 and the first test polarized light 210 through the polarization modulation component 5, so that the first reference polarized light 220 and the first test polarized light 210 have same polarization state, so as to complete the measurement of the topography of the first lens layer 110 in the laminated structure 100 .
S40：根据第一镜片层110的光学特性和第二镜片层120的光学特性，发出第二偏振光300。在实际应用时，迈克尔逊干涉仪可能需要测试不同的叠层结构100的形貌。因此在开始测试前，需要根据叠层结构100的具体结构，也就是第一镜片层110的光学特性与第二镜片层120的光学特性，选择光源1种类并发出对应的第二偏振光300，方便后续对第二镜片层120的量测。S40: Emit second polarized light 300 according to the optical properties of the first lens layer 110 and the optical properties of the second lens layer 120 . In practical applications, the Michelson interferometer may need to test the morphology of different stacked structures 100 . Therefore, before starting the test, it is necessary to select the type of light source 1 and emit the corresponding second polarized light 300 according to the specific structure of the laminated structure 100, that is, the optical characteristics of the first lens layer 110 and the optical characteristics of the second lens layer 120, It is convenient for subsequent measurement of the second lens layer 120 .
S50：将第二偏振光300分束为传输至反射镜2的第二参考偏振光320和传输至叠层结构100的第二镜片层120的第二测试偏振光310。第二偏振光300会经过非偏振分光镜4，非偏振分光镜4会将第二偏振光300中的部分反射至反射镜2，从而形成第二参考偏振光320，而第二偏振光300中的另一部分会直接穿过非偏振分光镜4，射向叠层结构100，从而形成第二测试偏振光310。要说明的是，非偏振分光镜4是根据光线的能量进行分光，但会转化被反射光线的偏振状态，因此此时第二参考偏振光320与第二测试偏振光310偏振状态不同。S50 : splitting the second polarized light 300 into a second reference polarized light 320 transmitted to the mirror 2 and a second test polarized light 310 transmitted to the second lens layer 120 of the laminated structure 100 . The second polarized light 300 will pass through the non-polarized beam splitter 4, and the non-polarized beam splitter 4 will reflect part of the second polarized light 300 to the reflector 2, thereby forming the second reference polarized light 320, and the second polarized light 300 The other part will directly pass through the non-polarizing beam splitter 4 and shoot toward the laminated structure 100 , thereby forming the second test polarized light 310 . It should be noted that the non-polarizing beam splitter 4 splits light according to the energy of the light, but converts the polarization state of the reflected light, so the polarization state of the second reference polarized light 320 is different from that of the second test polarized light 310 .
S60：对第二参考偏振光320和第二测试偏振光310进行偏振调制，以使由反射镜2反射至接收传感器3的第二参考偏振光320，与经由第二镜片层120反射并传输至接收传感器3的第二测试偏振光310具有相同的偏振状态。叠层结构100中各光学元件会对第二测试偏振光310进行转换，导致第二测试偏振光310与第二参考偏振光320的偏振不同，无法进行量测。因此在申请中，迈克尔逊干涉仪会通过偏振调制组件5对第二参考偏振光320和第二测试偏振光310分别进行偏振调制，从而使得第二参考偏振光320与第二测试偏振光310具有相同的偏振状态，从而完成对叠层结构100中第二镜片层120形貌的量测。S60: Perform polarization modulation on the second reference polarized light 320 and the second test polarized light 310, so that the second reference polarized light 320 reflected by the mirror 2 to the receiving sensor 3 is the same as that reflected by the second lens layer 120 and transmitted to The second test polarized light 310 received by the sensor 3 has the same polarization state. Each optical element in the stacked structure 100 converts the second test polarized light 310 , resulting in a different polarization of the second test polarized light 310 and the second reference polarized light 320 , which cannot be measured. Therefore, in the application, the Michelson interferometer will respectively perform polarization modulation on the second reference polarized light 320 and the second test polarized light 310 through the polarization modulation component 5, so that the second reference polarized light 320 and the second test polarized light 310 have same polarization state, so as to complete the measurement of the topography of the second lens layer 120 in the laminated structure 100 .
在实际应用时，迈克尔逊干涉仪有时能够通过偏振调制组件5将第一测试偏振光210的偏振方向调整至与第一参考偏振光220的偏振方向一致，或者是将第一参考偏振光220的偏振方向调整至与第一测试偏振光210的偏振方向一致。也就是说，迈克尔逊干涉仪不需要每次都同时对第一测试偏振光210与第一参考偏振光220进行调制，而是可以根据实际需求，对第一测试偏振光210与第一参考偏振光220其中之一进行调制。因此在本申请中，步骤S30还具有其他实施方式。步骤S30还可以是：对第一参考偏振光220或第一测试偏振光210进行偏振调制，以使由反射镜2反射至接收传感器3的第一参考偏振光220，与经由第一镜片层110反射并传输至接收传感器3的第一测试偏振光210具有相同的偏振状态。In practical applications, the Michelson interferometer can sometimes adjust the polarization direction of the first test polarized light 210 to be consistent with the polarization direction of the first reference polarized light 220 through the polarization modulation component 5, or adjust the polarization direction of the first reference polarized light 220 to The polarization direction is adjusted to be consistent with the polarization direction of the first test polarized light 210 . That is to say, the Michelson interferometer does not need to modulate the first test polarized light 210 and the first reference polarized light 220 at the same time every time, but can modulate the first test polarized light 210 and the first reference polarized light according to actual needs. One of the lights 220 is modulated. Therefore, in this application, step S30 also has other implementation manners. Step S30 may also be: perform polarization modulation on the first reference polarized light 220 or the first test polarized light 210, so that the first reference polarized light 220 reflected by the mirror 2 to the receiving sensor 3, and the The first test polarized light 210 reflected and transmitted to the receiving sensor 3 has the same polarization state.
同样的，迈克尔逊干涉仪有时能够通过偏振调制组件5将第二测试偏振光310的偏振方向调整至与第二参考偏振光320的偏振方向一致，或者是将第二参考偏振光320的偏振方向调整至与第二测试偏振光310的偏振方向一致。因此迈克尔逊干涉仪不需要每次都同时对第二测试偏振光310与第二参考偏振光320进行调制，而是可以根据实际需求，对第二测试偏振光310与第二参考偏振光320其中之一进行调制。因此在本申请中，步骤S30还具有其他实施方式。步骤S30还可以是：对第二参考偏振光320或第二测试偏振光310进行偏振调制，以使由反射镜2反射至接收传感器3的第二参考偏振光320，与经由第二镜片层120反射并传输至接收传感器3的第二测试偏振光310具有相同的偏振状态。Similarly, the Michelson interferometer can sometimes adjust the polarization direction of the second test polarized light 310 to be consistent with the polarization direction of the second reference polarized light 320 through the polarization modulation component 5, or adjust the polarization direction of the second reference polarized light 320 to Adjust to be consistent with the polarization direction of the second test polarized light 310 . Therefore, the Michelson interferometer does not need to modulate the second test polarized light 310 and the second reference polarized light 320 at the same time every time, but can modulate the second test polarized light 310 and the second reference polarized light 320 according to actual needs. One of them is modulated. Therefore, in this application, step S30 also has other implementation manners. Step S30 may also be: perform polarization modulation on the second reference polarized light 320 or the second test polarized light 310, so that the second reference polarized light 320 reflected by the mirror 2 to the receiving sensor 3, and the The second test polarized light 310 reflected and transmitted to the receiving sensor 3 has the same polarization state.
此外，在本申请中，x向、y向及z向为三个相对方向。其中，z向为光源1射出光线的射出方向，而x向偏振光为光学领域中s偏振光，y向偏振光为光学领域中的p偏振光。在本申请中，为便于说明，统一称为x向偏振光与y向偏振光。In addition, in the present application, x direction, y direction and z direction are three relative directions. Wherein, the z-direction is the direction in which light is emitted from the light source 1 , the x-polarized light is s-polarized light in the optical field, and the y-polarized light is p-polarized light in the optical field. In this application, for the convenience of description, they are collectively referred to as x-polarized light and y-polarized light.
请参阅图1，在一些实施例中，步骤S10具体包括：Please refer to FIG. 1, in some embodiments, step S10 specifically includes:
S11：当第一镜片层110包括第一四分之一波片110a，第二镜片层120包括反射式偏振片120a时，朝向非偏振分光镜4发出x向偏振光或y向偏振光。其中，x向、y向及z向两两垂直设置。当测试第一镜片层110，即第一四分之一波片110a的形貌时，迈克尔逊干涉仪可以选用x向偏振光源1，也可以选用y向偏振光源1，迈克尔逊干涉仪在选用这两种光源1时都能测量出第一四分之一波片110a的形貌，不会受到光源1类型的限制。S11: When the first lens layer 110 includes the first quarter-wave plate 110a and the second lens layer 120 includes the reflective polarizer 120a, emit x-polarized light or y-polarized light toward the non-polarizing beam splitter 4 . Wherein, x-direction, y-direction and z-direction are arranged vertically in pairs. When testing the shape of the first lens layer 110, that is, the first quarter-wave plate 110a, the Michelson interferometer can use the x-direction polarized light source 1, or the y-directed polarized light source 1, and the Michelson interferometer selects The shape of the first quarter-wave plate 110 a can be measured when the two light sources 1 are used, and will not be limited by the type of the light source 1 .
在本申请中，将以第一镜片层110为第一四分之一波片110a，第二镜片层120为反射式偏振片120a进行举例说明，实际上叠层结构100还可以是更多层的光学结构，而第一镜片层110与第二镜片层120也可以是其他光学结构，迈克尔逊干涉仪只需要适应性调整偏振调制组件5就可以。In this application, the first lens layer 110 is the first quarter-wave plate 110a, and the second lens layer 120 is the reflective polarizer 120a for illustration. In fact, the laminated structure 100 can also be more layers The optical structure of the first lens layer 110 and the second lens layer 120 can also be other optical structures, and the Michelson interferometer only needs to adjust the polarization modulation component 5 adaptively.
在一些实施例中，迈克尔逊干涉仪还包括二分之一波片52及第二四分之一波片51。步骤S30具体包括：In some embodiments, the Michelson interferometer further includes a half-wave plate 52 and a second quarter-wave plate 51 . Step S30 specifically includes:
S31：当第一偏振光200为x向偏振光时，利用第二四分之一波片51，将第一参考偏振光220与第一测试偏振光210转化为右旋偏振光。请参阅图1，第二四分之一波片51的快轴F的延伸方向与x向为-45°，此时，当光源1选为x向偏振光源1，第二四分之一波片51会将x向偏振光转化为右旋偏振光。非偏振分光镜4会将右旋偏振光分为两束，其中一束作为第一测试偏振光210射入叠层结构100，另一束作为第一参考偏振光220射入反射镜2。此时，叠层结构100中的第一四分之一波片110a会将第一测试偏振光210通过反射转化为左旋偏振光，左旋偏振光经过非偏振分光镜4的反射会进入接收传感器3，并转化为右旋偏振光。第一参考偏振光经过非偏振分光镜4反射转化为左旋偏振光，并射入反射镜2，反射镜2会将左旋偏振光通过反射转化为右旋偏振光，并射入接收传感器3。因此在一些实施例中，迈克尔逊干涉仪通过在光源1与非偏振分光镜4之间设置第二四分之一波片51，就能使得第一测试偏振光210与第一参考偏振光220的偏振方向相同，从而能够完成对叠层结构100中第一镜片层110的量测。要说明的是，四分之一波片本身具备一定的反射率，而这使得四分之一波片能够完成形貌的量测。S31: When the first polarized light 200 is x-polarized light, use the second quarter-wave plate 51 to convert the first reference polarized light 220 and the first test polarized light 210 into right-handed polarized light. Referring to Fig. 1, the extension direction of the fast axis F of the second quarter wave plate 51 is -45° to the x direction. At this time, when the light source 1 is selected as the x direction polarized light source 1, the second quarter wave Plate 51 will convert x-polarized light to right-handed polarized light. The non-polarizing beam splitter 4 splits the right-handed polarized light into two beams, one of which enters the laminated structure 100 as the first test polarized light 210 , and the other beam enters the mirror 2 as the first reference polarized light 220 . At this time, the first quarter-wave plate 110a in the laminated structure 100 will convert the first test polarized light 210 into left-handed polarized light through reflection, and the left-handed polarized light will enter the receiving sensor 3 after being reflected by the non-polarizing beam splitter 4 , and converted to right-handed polarized light. The first reference polarized light is reflected by the non-polarizing beam splitter 4 and converted into left-handed polarized light, and enters the mirror 2 , and the mirror 2 converts the left-handed polarized light into right-handed polarized light through reflection, and enters the receiving sensor 3 . Therefore, in some embodiments, the Michelson interferometer can make the first test polarized light 210 and the first reference polarized light 220 have the same polarization direction, so that the measurement of the first lens layer 110 in the laminated structure 100 can be completed. It should be noted that the quarter-wave plate itself has a certain reflectivity, which enables the quarter-wave plate to complete the measurement of the shape.
S32：当第一偏振光200为y向偏振光时，利用二分之一波片52及第二四分之一波片51，将第一参考偏振光220与第一测试偏振光210转化为右旋偏振光。请参阅图3，实际上，二分之一波片52与第二四分之一波片51可以依次间隔设于光源1与非偏振分光镜4之间。此时，第一偏振光200会先射入二分之一波片52，从而由y向偏振光被转化为x向偏振光，再射入第二四分之一波片51，第二四分之一波片51会将x向偏振光转化为右旋偏振光。右旋偏振光再由非偏振分光镜4分为两束，其中一束作为第一测试偏振光210射入叠层结构100，另一束作为第一参考偏振光220射入反射镜2。后续的光线转化与步骤S31相同，迭层结构100中的第一四分之一波片110a会将第一测试偏振光210通过反射转化为左旋偏振光，左旋偏振光经过非偏振分光镜4的反射会进入接收传感器3，并转化为右旋偏振光。第一参考偏振光经过非偏振分光镜4反射转化为左旋偏振光，并射入反射镜2，反射镜2会将左旋偏振光通过反射转化为右旋偏振光，并射入接收传感器。S32: When the first polarized light 200 is polarized light in the y direction, use the half-wave plate 52 and the second quarter-wave plate 51 to convert the first reference polarized light 220 and the first test polarized light 210 into Right-handed polarized light. Please refer to FIG. 3 , in fact, the half-wave plate 52 and the second quarter-wave plate 51 can be sequentially and spaced between the light source 1 and the non-polarizing beam splitter 4 . At this time, the first polarized light 200 will first enter the half-wave plate 52, so that the y-polarized light is converted into x-polarized light, and then enters the second quarter-wave plate 51, and the second four The one-wave plate 51 converts the x-polarized light into right-handed polarized light. The right-handed polarized light is then divided into two beams by the non-polarizing beam splitter 4 , one of which enters the laminated structure 100 as the first test polarized light 210 , and the other beam enters the mirror 2 as the first reference polarized light 220 . Subsequent light conversion is the same as step S31. The first quarter-wave plate 110a in the laminated structure 100 will convert the first test polarized light 210 into left-handed polarized light through reflection, and the left-handed polarized light passes through the non-polarizing beam splitter 4. The reflection enters the receiving sensor 3 and is converted to right-handed polarized light. The first reference polarized light is reflected by the non-polarizing beam splitter 4 and transformed into left-handed polarized light, and enters the mirror 2. The mirror 2 converts the left-handed polarized light into right-handed polarized light through reflection, and enters the receiving sensor.
也就是说，迈克尔逊干涉仪中选用x向偏振光源1或y向偏振光源1都能对第一镜片层110进行形貌量测，只是需要通过不同光学元件进行偏振调制。实际上，当叠层结构100的组成不同时，迈克尔逊干涉仪通过调整，利用不同光学元件进行偏振调制，同样能够完成量测。That is to say, the shape measurement of the first lens layer 110 can be performed by selecting the x-direction polarized light source 1 or the y-direction polarized light source 1 in the Michelson interferometer, but the polarization modulation needs to be performed through different optical elements. In fact, when the composition of the stacked structure 100 is different, the Michelson interferometer can be adjusted to use different optical elements for polarization modulation, and the measurement can also be completed.
在实际应用时，测试偏振光在射入叠层结构100中后，叠层结构100中的其他结构可能会反射出多余的光线，与测试偏振光一同朝向接收传感器3射出，干扰形貌的量测。因此在一些实施例中，迈克尔逊干涉仪还包括x向线偏振片61与y向线偏振片62。请参阅图2，量测方法还包括步骤S33：In practical applications, after the test polarized light is injected into the laminated structure 100, other structures in the laminated structure 100 may reflect excess light, and the test polarized light is emitted toward the receiving sensor 3 together, and the amount of interference shape Measurement. Therefore, in some embodiments, the Michelson interferometer further includes an x-direction linear polarizer 61 and a y-direction linear polarizer 62 . Please refer to Fig. 2, the measurement method also includes step S33:
利用x向线偏振片61，将第一参考偏振光220与第一测试偏振光210转化为x向偏振光。The first reference polarized light 220 and the first test polarized light 210 are converted into x-directed polarized light by using the x-direction linear polarizer 61 .
通过x向偏振片能够阻挡除x向偏振光以外的其余光线，从而避免其他光线干扰形貌的量测。实际上，当射入x向偏振片的光线为圆偏振光时，x向偏振片会将圆偏振光中y向的偏振分量阻挡。比如在本实施例中，第一参考偏振光220与第一测试偏振光210都为右旋偏振光，当射入x向线偏振片61时，第一参考偏振光220与第一测试偏振光210中的y向偏振分量会被阻挡，而只有x偏振分量才能射入接收传感器3，从而将第一参考偏振光220与第一测试偏振光210都转化为x向偏振光。The x-direction polarizer can block other light rays except the x-direction polarized light, so as to prevent other light rays from interfering with the measurement of the shape. In fact, when the light entering the x-direction polarizer is circularly polarized light, the x-direction polarizer will block the y-direction polarization component of the circularly polarized light. For example, in this embodiment, both the first reference polarized light 220 and the first test polarized light 210 are right-handed polarized light. The y-polarized component in 210 will be blocked, and only the x-polarized component can enter the receiving sensor 3, so that both the first reference polarized light 220 and the first test polarized light 210 are converted into x-polarized light.
此外，请参阅图2，量测方法还可以包括步骤S34：In addition, referring to FIG. 2, the measurement method may also include step S34:
利用y向线偏振片62，将第一参考偏振光220与第一测试偏振光210转化为y向偏振光。Using the y-direction linear polarizer 62, the first reference polarized light 220 and the first test polarized light 210 are converted into y-directed polarized light.
当射入y向线偏振片62的光线为圆偏振光时，y向偏振片会将圆偏振光中x向的偏振分量阻挡。比如在本实施例中，第一参考偏振光220与第一测试偏振光210都为右旋偏振光，当射入y向线偏振片62时，第一参考偏振光220与第一测试偏振光210中的x向偏振分量会被阻挡，而只有y偏振分量才能射入接收传感器3，从而将第一参考偏振光220与第一测试偏振光210都转化为y向偏振光。When the light entering the y-direction linear polarizer 62 is circularly polarized light, the y-direction polarizer will block the x-direction polarization component of the circularly polarized light. For example, in this embodiment, both the first reference polarized light 220 and the first test polarized light 210 are right-handed polarized light. When entering the y-direction linear polarizer 62, the first reference polarized light 220 and the first test polarized light The x-polarized component in 210 will be blocked, and only the y-polarized component can enter the receiving sensor 3, so that both the first reference polarized light 220 and the first test polarized light 210 are converted into y-polarized light.
在一些实施例中，请参阅图4，量测方法还包括步骤S35：In some embodiments, referring to FIG. 4, the measurement method further includes step S35:
绕平行于z向的轴线旋转叠层结构100，以使x向偏振光能够穿过反射式偏振片120a。Rotating the stack 100 about an axis parallel to the z-direction allows x-polarized light to pass through the reflective polarizer 120a.
在实际应用时，叠层结构100中具有多层依次叠设的光学元件，因此当转动叠层结构100时，能够在一定程度上利用光学元件的不同的特性。而绕平行于z向的轴线转动叠层结构100后，可以将叠层结构100中反射式偏振片120a的穿透轴T的轴向调整至x向。此时，当x向偏振光射入反射式偏振片120a时会直接穿过，从而避免反射式偏振片120a反射额外的光线，因此此时只有第一测试偏振光210与第一参考偏振光220进入接收传感器3，也就避免了迈克尔逊干涉仪对第一镜片层110的量测受到干扰，使得迈克尔逊干涉仪的量测更加顺利。In practical applications, the laminated structure 100 has multiple layers of optical elements stacked in sequence, so when the laminated structure 100 is rotated, different characteristics of the optical elements can be utilized to a certain extent. After rotating the laminated structure 100 around an axis parallel to the z direction, the axial direction of the transmission axis T of the reflective polarizer 120 a in the laminated structure 100 can be adjusted to the x direction. At this time, when the x-polarized light enters the reflective polarizer 120a, it will pass through directly, thereby avoiding the reflection of extra light by the reflective polarizer 120a, so at this time only the first test polarized light 210 and the first reference polarized light 220 Entering the receiving sensor 3 , it also prevents the measurement of the first lens layer 110 by the Michelson interferometer from being disturbed, making the measurement of the Michelson interferometer smoother.
在一些实施例中，步骤S40具体包括：In some embodiments, step S40 specifically includes:
当第一镜片层110包括第一四分之一波片110a，第二镜片层120包括反射式偏振片120a时，朝向非偏振分光镜4发出x向偏振光或y向偏振光。其中，x向、y向及z向两两垂直设置。当测试第二镜片层120，即反射式偏振片120a的形貌时，迈克尔逊干涉仪可以选用x向偏振光源1，也可以选用y向偏振光源1，迈克尔逊干涉仪在选用这两种光源1时都能测量出反射式偏振片120a的形貌，不会受到光源1类型的限制。When the first lens layer 110 includes the first quarter-wave plate 110 a and the second lens layer 120 includes the reflective polarizer 120 a, the x-polarized light or the y-polarized light is sent toward the non-polarizing beam splitter 4 . Wherein, x-direction, y-direction and z-direction are arranged vertically in pairs. When testing the shape of the second lens layer 120, that is, the reflective polarizer 120a, the Michelson interferometer can use either the x-direction polarized light source 1 or the y-directed polarized light source 1, and the Michelson interferometer selects these two light sources 1, the shape of the reflective polarizer 120a can be measured without being limited by the type of light source 1.
在一些实施例中，迈克尔逊干涉仪还包括第二四分之一波片51、x向线偏振片61及y向线偏振片62。请参阅图5及图9，步骤S60具体包括：In some embodiments, the Michelson interferometer further includes a second quarter-wave plate 51 , an x-direction polarizer 61 and a y-direction linear polarizer 62 . Please refer to Fig. 5 and Fig. 9, step S60 specifically includes:
S61：当第二偏振光300为x向偏振光时，利用第二四分之一波片51，将第二参考偏振光320转化为y向偏振光，并利用y向线偏振片62，将第二测试偏振光310转化为y向偏振光。在实际应用时，第二四分之一波片51可以设于反射镜2与非偏振分光镜4之间，y向线偏振片62可以设置在非偏振分光镜4与接收传感器3之间。在此时对于第二参考偏振光320，第二四分之一波片51能够将射向反射镜2的x向偏振光转化为右旋偏振光，右旋偏振光再射至反射镜2，并经过反射转化为左旋偏振光，而左旋偏振光再次穿过第二四分之一波片51而转化为y偏振光。S61: When the second polarized light 300 is polarized light in the x direction, use the second quarter-wave plate 51 to convert the second reference polarized light 320 into polarized light in the y direction, and use the linear polarizer 62 in the y direction to transform the The second test polarized light 310 is converted to y-polarized light. In practical application, the second quarter-wave plate 51 can be arranged between the mirror 2 and the non-polarizing beam splitter 4 , and the y-direction linear polarizer 62 can be arranged between the non-polarizing beam splitter 4 and the receiving sensor 3 . At this time, for the second reference polarized light 320, the second quarter-wave plate 51 can convert the x-polarized light incident on the mirror 2 into right-handed polarized light, and then the right-handed polarized light is incident on the mirror 2, The left-handed polarized light is converted into left-handed polarized light after reflection, and the left-handed polarized light passes through the second quarter-wave plate 51 again to be converted into y-polarized light.
在此时对于第二测试偏振光310，x向偏振光射入第一四分之一波片110a后不会发生变化，而x向偏振光继续射向反射式偏振片120a，并被反射式偏振片120a反射而转化为偏振方向与y向呈45°角的线偏振光，此线偏振光再次穿透第一四分之一波片110a后会转化为右旋偏振光，此右旋偏振光经非偏振分光镜4反射转化成左旋偏振光，左旋偏振光最后会穿过y向线偏振片62而被转化为y向偏振光。因此，迈克尔逊干涉仪通过第二四分之一波片51与y向线偏振片62就能够将第二参考偏振光320与第二测试偏振光310都调整为y向偏振光，从而完成对反射式偏振片120a的量测。At this time, for the second test polarized light 310, the x-polarized light will not change after entering the first quarter-wave plate 110a, while the x-polarized light continues to enter the reflective polarizer 120a and is reflected by the reflective polarizer 120a. Polarizer 120a is reflected and converted into linearly polarized light whose polarization direction is at an angle of 45° to the y direction. This linearly polarized light will be converted into right-handed polarized light after passing through the first quarter-wave plate 110a again. The right-handed polarized light The light is reflected by the non-polarizing beam splitter 4 and converted into left-handed polarized light, and the left-handed polarized light will finally pass through the y-direction linear polarizer 62 to be converted into y-directed polarized light. Therefore, the Michelson interferometer can adjust both the second reference polarized light 320 and the second test polarized light 310 to the y-directed polarized light through the second quarter-wave plate 51 and the y-directed linear polarizing plate 62, thereby completing the alignment Measurement of reflective polarizer 120a.
S62：当第二偏振光300为y向偏振光时，利用第二四分之一波片51，将第二参考偏振光320转化为x向偏振光，并利用x向线偏振片61，将第二测试偏振光310转化为x向偏振光。同样在实际应用时，第二四分之一波片51可以设于反射镜2与非偏振分光镜4之间，x向线偏振片61可以设置在非偏振分光镜4与接收传感器3之间。在此时对于第二参考偏振光320，第二四分之一波片51能够将射向反射镜2的y向偏振光转化为左旋偏振光，左旋偏振光再射至反射镜2，并经过反射转化为右旋偏振光，而右旋偏振光再次穿过第二四分之一波片51而转化为x向偏振光。S62: When the second polarized light 300 is polarized light in the y direction, use the second quarter-wave plate 51 to convert the second reference polarized light 320 into polarized light in the x direction, and use the linear polarizer 61 in the x direction to transform the The second test polarized light 310 is converted to x-polarized light. Also in actual application, the second quarter-wave plate 51 can be arranged between the mirror 2 and the non-polarizing beam splitter 4, and the x-direction linear polarizer 61 can be arranged between the non-polarizing beam splitter 4 and the receiving sensor 3 . At this time, for the second reference polarized light 320, the second quarter-wave plate 51 can convert the y-polarized light directed toward the reflector 2 into left-handed polarized light, and the left-handed polarized light then enters the reflector 2 and passes through The reflection is converted to right-handed polarized light, and the right-handed polarized light is converted to x-polarized light by passing through the second quarter-wave plate 51 again.
在此时对于第二测试偏振光310，y向偏振光射入第一四分之一波片110a后不会发生变化，而y向偏振光会继续射向反射式偏振片120a，并被反射式偏振片120a反射而转化为偏振方向与x向呈45°角的线偏振光，此线偏振光再次穿透第一四分之一波片110a后会转化为左旋偏振光，此左旋偏振光经非偏振分光镜4反射转化成右旋偏振光，右旋偏振光最后会穿过x向线偏振片61而被转化为x向偏振光。因此，迈克尔逊干涉仪通过第二四分之一波片51与x向线偏振片61同样能够将第二参考偏振光320与第二测试偏振光310都调整为x向偏振光，从而完成对反射式偏振片120a的量测。At this time, for the second test polarized light 310, the y-polarized light will not change after entering the first quarter-wave plate 110a, but the y-polarized light will continue to enter the reflective polarizer 120a and be reflected Type polarizer 120a is reflected and converted into linearly polarized light whose polarization direction is at an angle of 45° to the x direction. This linearly polarized light will be converted into left-handed polarized light after passing through the first quarter-wave plate 110a again. This left-handed polarized light After being reflected by the non-polarizing beam splitter 4, the right-handed polarized light is converted into right-handed polarized light, and the right-handed polarized light will pass through the x-direction linear polarizer 61 to be converted into x-directed polarized light. Therefore, the Michelson interferometer can also adjust the second reference polarized light 320 and the second test polarized light 310 to the x-polarized light through the second quarter-wave plate 51 and the x-linear polarizing plate 61, thereby completing the alignment Measurement of reflective polarizer 120a.
在一些实施例中，请参阅图6，量测方法还包括步骤S63：In some embodiments, referring to FIG. 6, the measurement method further includes step S63:
绕平行于z向的轴线旋转叠层结构100，以使反射式偏振片120a反射后的线偏振光穿过第一四分之一波片110a后能够转化为圆偏振光。The laminated structure 100 is rotated around an axis parallel to the z direction, so that the linearly polarized light reflected by the reflective polarizer 120a can be converted into circularly polarized light after passing through the first quarter-wave plate 110a.
在实际应用时，叠层结构100中具有多层依次叠设的光学元件，因此当转动叠层结构100时，能够在一定程度上利用光学元件的不同的特性。而绕平行于z向的轴线转动叠层结构100后，可以使叠层结构100中第一四分之一波片110a的快轴F的延伸方向与y向平行，此时反射式偏振片120a的反射轴R的延伸方向与y向的夹角为45度。In practical applications, the laminated structure 100 has multiple layers of optical elements stacked in sequence, so when the laminated structure 100 is rotated, different characteristics of the optical elements can be utilized to a certain extent. After rotating the laminated structure 100 around an axis parallel to the z direction, the extension direction of the fast axis F of the first quarter-wave plate 110a in the laminated structure 100 can be parallel to the y direction, and at this time, the reflective polarizer 120a The angle between the extension direction of the reflection axis R and the y direction is 45 degrees.
此时，当y向偏振光射入第一四分之一波片110a时不会发生变化，y向偏振光会继续射向反射式偏振片120a，并被反射式偏振片120a反射而转化为偏振方向与x向呈45°角的线偏振光，此线偏振光再次穿透第一四分之一波片110a后会转化为左旋偏振光，从而使得迈克尔逊干涉仪后续的偏振调制更加顺利。At this time, when the y-polarized light enters the first quarter-wave plate 110a, it will not change, and the y-polarized light will continue to enter the reflective polarizer 120a, and will be reflected by the reflective polarizer 120a and converted into Linearly polarized light whose polarization direction is at an angle of 45° to the x direction, this linearly polarized light will be converted into left-handed polarized light after passing through the first quarter-wave plate 110a again, so that the subsequent polarization modulation of the Michelson interferometer will be smoother .
另外，当x向偏振光射入第一四分之一波片110a时同样不会发生变化，而x向偏振光会继续射向反射式偏振片120a，并被反射式偏振片120a反射而转化为偏振方向与y向呈45°角的线偏振光，此线偏振光再次穿透第一四分之一波片110a后会转化为右旋偏振光，从而使得迈克尔逊干涉仪后续的偏振调制更加顺利。In addition, when the x-polarized light enters the first quarter-wave plate 110a, it will not change, but the x-polarized light will continue to enter the reflective polarizer 120a, and be reflected by the reflective polarizer 120a to be converted It is a linearly polarized light whose polarization direction is at an angle of 45° to the y direction. After this linearly polarized light passes through the first quarter-wave plate 110a again, it will be converted into right-handed polarized light, so that the subsequent polarization modulation of the Michelson interferometer more smoothly.
要说明的是，在使用本方法进行光路设计与调整时需要考虑叠层结构100本身的组成，而本申请进行说明时，所举例的叠层结构100包括作为第一镜片层110的第一四分之一波片110a及作为第二镜片层120的反射式偏振片120a，但这并不表示本申请只能应用于量测该叠层结构100。本申请提出的迈克尔逊干涉仪与迈克尔逊干涉仪的量测方法，再经过适应性的调整后，都能应用于不同的叠层结构100。It should be noted that when using this method to design and adjust the optical path, the composition of the laminated structure 100 itself needs to be considered. The quarter-wave plate 110 a and the reflective polarizer 120 a as the second lens layer 120 , but this does not mean that this application can only be applied to measure the laminated structure 100 . The Michelson interferometer and the measuring method of the Michelson interferometer proposed in this application can be applied to different stacked structures 100 after adaptive adjustment.
实际上，本申请提出的叠层结构100还可以包括第三镜片层130，而第三镜片层130实际为线偏振片130a。线偏振片130a在实际应用时不会出现反射，而是只会出现吸收与穿透，因此这并不会对光学系统造成干扰，也不会对形貌的量测造成干扰。线偏振片130a实际应用时也无需进行形貌量测，因此在本申请中未提及，但是在附图进行了标识。In fact, the laminated structure 100 proposed in this application may further include a third lens layer 130, and the third lens layer 130 is actually a linear polarizer 130a. The linear polarizer 130a does not reflect in actual application, but only absorbs and transmits, so this will not cause interference to the optical system, nor will it cause interference to the measurement of the shape. The shape measurement of the linear polarizer 130a is not required in practical application, so it is not mentioned in this application, but is identified in the drawings.
以上所述实施例的各技术特征可以进行任意的组合，为使描述简洁，未对上述实施例中的各个技术特征所有可能的组合都进行描述，然而，只要这些技术特征的组合不存在矛盾，都应当认为是本说明书记载的范围。The technical features of the above-mentioned embodiments can be combined arbitrarily. To make the description concise, all possible combinations of the technical features in the above-mentioned embodiments are not described. However, as long as there is no contradiction in the combination of these technical features, should be considered as within the scope of this specification.
以上所述实施例仅表达了本申请的几种实施方式，其描述较为具体和详细，但并不能因此而理解为对申请专利范围的限制。应当指出的是，对于本领域的普通技术人员来说，在不脱离本申请构思的前提下，还可以做出若干变形和改进，这些都属于本申请的保护范围。因此，本申请专利的保护范围应以所附权利要求为准。The above-mentioned embodiments only express several implementation modes of the present application, and the description thereof is relatively specific and detailed, but should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the scope of protection of the patent application should be based on the appended claims.
| Application Number | Priority Date | Filing Date | Title |
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| CN202310380265.8ACN116625229B (en) | 2023-04-11 | 2023-04-11 | Michelson interferometer measurement method and Michelson interferometer |
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| CN202310380265.8ACN116625229B (en) | 2023-04-11 | 2023-04-11 | Michelson interferometer measurement method and Michelson interferometer |
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| CN202310380265.8AActiveCN116625229B (en) | 2023-04-11 | 2023-04-11 | Michelson interferometer measurement method and Michelson interferometer |
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