技术领域technical field
本发明涉及蒸发镀膜技术领域，具体涉及一种改善蒸发镀膜挡板镀层的结构和蒸镀设备。The invention relates to the technical field of evaporation coating, in particular to a structure and evaporation equipment for improving the coating of an evaporation coating baffle.
背景技术Background technique
真空蒸镀简称蒸镀，是指在真空条件下，采用一定的加热蒸发方式蒸发镀膜材料(或称膜料)并使之气化，粒子飞至基片表面凝聚成膜的工艺方法。蒸镀的物理过程包括：沉积材料蒸发或升华为气态粒子→气态粒子快速从蒸发源向基片表面输送→气态粒子附着在基片表面形核、长大成固体薄膜→薄膜原子重构或产生化学键合。蒸镀因具有成膜方法简单、沉积效率高、膜结构和性能独特等优点得到广泛的应用。Vacuum evaporation, referred to as evaporation, refers to the process of evaporating and vaporizing the coating material (or film material) by using a certain heating and evaporation method under vacuum conditions, and the particles fly to the surface of the substrate to condense into a film. The physical process of evaporation includes: deposition material evaporates or sublimates into gaseous particles → gaseous particles are quickly transported from the evaporation source to the substrate surface → gaseous particles attach to the substrate surface to nucleate and grow into a solid film → thin film atomic reconstruction or chemical bonds combine. Evaporation has been widely used because of its advantages such as simple film formation method, high deposition efficiency, unique film structure and performance.
近年来，随着新能源技术的兴起，复合集流体也开始崭露头角。在复合集流体的制造过程中，为提升生产效率，降低生产成本，各制造厂商均选取了蒸发卷绕镀膜设备在膜材上进行高效率沉积金属镀层(铜层、铝层)的工艺方式。然而在实际生产中，坩埚口正上方处盖板上因非镀膜段膜层沉积，将形成较厚的驼峰状膜层，异常情况下膜层甚至延伸至坩埚杯口以下位置，膜层与坩埚口将产生干涉，导致挡板无法打开，若强行打开盖板，不仅容易撞碎坩埚，而且还会引起驼峰状膜层掉渣导致坩埚报废。In recent years, with the rise of new energy technologies, composite current collectors have also begun to emerge. In the manufacturing process of composite current collectors, in order to improve production efficiency and reduce production costs, various manufacturers have selected the process method of high-efficiency deposition of metal coating (copper layer, aluminum layer) on the membrane material by evaporation coil coating equipment. However, in actual production, a thicker hump-shaped film layer will be formed on the cover plate directly above the crucible mouth due to the deposition of the non-coated film layer. In abnormal cases, the film layer even extends to the position below the crucible cup mouth. If the cover is opened forcibly, it will not only easily break the crucible, but also cause the hump-shaped film layer to drop slag and cause the crucible to be scrapped.
在专利号为CN216378354U，名称为一种挡板机构的发明中公开了一种挡板机构，该机构中挡板由气缸驱动，以翻转的方式打开。但是该机构有三点缺陷：其一，打开方式为翻转式打开，因蒸发区与蒸发物距离限制，不适用于在卷绕镀膜中；其二，气缸需安装在真空腔体内部且紧挨着高温区，工作环境恶劣，气缸密封及气动管路易发生漏气故障，造成镀膜失败；其三，盖板的打开开度及盖板的往复运动均会严格依赖于两个气缸在伸出量尺寸上的关系，控制难度大，例如310执行气缸伸出量的偏差将导致盖板整体不成水平状态，导致320执行气缸执行水平往复运动困难。In the patent No. CN216378354U, a kind of baffle mechanism is disclosed in the invention named as a baffle mechanism. In this mechanism, the baffle is driven by a cylinder and opened in an overturned manner. However, this mechanism has three defects: first, the opening method is flip opening, which is not suitable for coil coating due to the limited distance between the evaporation area and the evaporator; second, the cylinder needs to be installed inside the vacuum chamber and next to it. In the high temperature area, the working environment is harsh, and the air leakage of the cylinder seal and the pneumatic tube Louis causes the failure of the coating. The above relationship makes the control difficult. For example, the deviation of the extension amount of the 310 execution cylinder will cause the overall cover plate to be out of level, which will make it difficult for the 320 execution cylinder to perform horizontal reciprocating motion.
因此，亟需一种能够适用于卷绕镀膜中，且可以避免位于坩埚上面的盖板形成较厚的驼峰状膜层，以至于异常情况下，膜层甚至延伸至坩埚杯口以下位置，膜层与坩埚口将产生干涉，导致挡板无法打开，若强行打开盖板，容易撞碎坩埚。Therefore, there is an urgent need for a method that can be applied to coil coating, and can avoid the cover plate on the crucible from forming a thicker hump-shaped film layer, so that under abnormal conditions, the film layer even extends to the position below the crucible cup mouth, and the film The layer and the mouth of the crucible will interfere, causing the baffle to fail to open. If the cover is opened forcibly, the crucible will be easily broken.
发明内容Contents of the invention
有鉴于此，本发明实施例的目的在于提供一种改善蒸发镀膜挡板镀层的结构和真空蒸镀设备，以解决现有技术中蒸发镀膜过程中挡板镀层厚度不一，导致盖板无法打开或者致使坩埚损坏的技术问题。In view of this, the purpose of the embodiments of the present invention is to provide a structure and vacuum evaporation equipment for improving the coating of the evaporation coating baffle, so as to solve the problem that the thickness of the coating of the baffle is different during the evaporation coating process in the prior art, which leads to the inability to open the cover. Or a technical problem causing damage to the crucible.
为达上述目的，本发明实施例提供了一种改善蒸发镀膜挡板镀层的结构，所述改善蒸发镀膜挡板镀层的结构包括：To achieve the above purpose, an embodiment of the present invention provides a structure for improving the coating of the evaporative coating baffle. The structure for improving the coating of the evaporative coating baffle includes:
蒸发区安装机架体；Install the rack body in the evaporation area;
蒸发挡板，设置在所述蒸发区安装机架体的上方，所述蒸发挡板两侧设置有滑动机构；The evaporation baffle is arranged above the mounting frame body in the evaporation area, and sliding mechanisms are arranged on both sides of the evaporation baffle;
驱动系统，设置在所述蒸发区安装机架体上并与所述蒸发挡板连接，所述驱动系统驱动所述蒸发挡板在所述滑动机构上水平方向往复滑动。The driving system is arranged on the mounting frame body of the evaporation area and connected with the evaporation baffle, and the driving system drives the evaporation baffle to slide horizontally on the sliding mechanism.
在一些可能的实施方式中，所述滑动机构包括：包括滑轨、轨道安装座和导轮；In some possible implementation manners, the sliding mechanism includes: a sliding rail, a rail mounting seat and a guide wheel;
所述滑轨通过所述轨道安装座安装在所述蒸发区安装机架体上；The slide rail is installed on the mounting frame body of the evaporation area through the rail mounting seat;
所述导轮安装在所述蒸发挡板侧面，并在所述滑轨上往复滑动。The guide wheel is installed on the side of the evaporation baffle, and slides reciprocally on the slide rail.
在一些可能的实施方式中，所述滑动机构还包括：In some possible implementation manners, the sliding mechanism further includes:
限位块，位于所述滑轨的两端，分别安装在所述轨道安装座上，所述限位块用于将所述蒸发挡板在水平方向上的移动的距离限制在预设距离内。Limiting blocks, located at both ends of the slide rail, respectively installed on the rail mounting base, the limiting blocks are used to limit the moving distance of the evaporation baffle in the horizontal direction within a preset distance .
在一些可能的实施方式中，所述驱动系统包括：第一链条机构、第二链条机构和驱动机构，所述第一链条机构和所述第二链条机构分别设置在所述蒸发挡板的两侧，并位于所述轨道安装座的外侧；In some possible implementations, the driving system includes: a first chain mechanism, a second chain mechanism and a driving mechanism, the first chain mechanism and the second chain mechanism are respectively arranged on two sides of the evaporation baffle. side, and is located on the outside of the rail mount;
所述第一链条机构和所述第二链条机构均包括：第一安装板、链条、主动链轮和从动链轮，所述链条包裹在所述主动链轮和所述从动链轮的外侧，所述链条安装在所述第一安装板的下方；Both the first chain mechanism and the second chain mechanism include: a first mounting plate, a chain, a driving sprocket and a driven sprocket, and the chain is wrapped around the driving sprocket and the driven sprocket On the outside, the chain is installed under the first mounting plate;
所述从动链轮分别通过第二安装板所述轨道安装座的外侧面的两端；The driven sprocket respectively passes through the two ends of the outer surface of the track mounting seat of the second mounting plate;
所述驱动机构包括：带有联轴器的驱动电机、传动轴和轴承座，所述传动轴通过所述轴承座安装在所述蒸发区安装机架体的下方；The driving mechanism includes: a driving motor with a coupling, a transmission shaft and a bearing seat, and the transmission shaft is installed under the mounting frame of the evaporation area through the bearing seat;
所述传动轴的一端穿过腔体壁上的孔洞与所述联轴器连接，所述传动轴的另一端与所述主动链轮连接。One end of the transmission shaft passes through the hole on the cavity wall and is connected to the coupling, and the other end of the transmission shaft is connected to the driving sprocket.
在一些可能的实施方式中，所述驱动系统还包括：In some possible implementation manners, the drive system also includes:
万向联轴器，设置在所述传动轴与所述腔体壁上的孔洞之间。The universal joint is arranged between the transmission shaft and the hole on the wall of the cavity.
在一些可能的实施方式中，所述驱动系统还包括：磁流体，设置在所述腔体壁的孔洞处，所述万向联轴器与所述联轴器通过所述磁流体连接。In some possible implementations, the drive system further includes: a magnetic fluid disposed at a hole in the cavity wall, and the universal coupling is connected to the coupling through the magnetic fluid.
在一些可能的实施方式中，所述驱动系统还包括：In some possible implementation manners, the drive system also includes:
电机安装座，设置在所述腔体壁的外侧，所述驱动电机安装在所述电机安装座上。The motor mounting base is arranged on the outside of the cavity wall, and the driving motor is mounted on the motor mounting base.
在一些可能的实施方式中，所述第一安装板设置在所述蒸发挡板的边缘中间位置，所述第一安装板的下侧面设有销孔，所述链条通过所述销孔安装在所述第一安装板的下方；所述链条、所述主动链轮与所述从动链轮的在同一平面上。In some possible implementations, the first installation plate is arranged at the middle position of the edge of the evaporation baffle, and the lower side of the first installation plate is provided with a pin hole, and the chain is installed on the Below the first mounting plate; the chain, the driving sprocket and the driven sprocket are on the same plane.
在一些可能的实施方式中，所述改善蒸发镀膜挡板镀层的结构还包括：In some possible implementation manners, the structure for improving the coating of the evaporation coating baffle further includes:
冷媒进出管；Refrigerant inlet and outlet pipes;
第一冷媒进出口，设置在所述腔体壁上，并与所述腔体壁外侧的普冷机连接；The first refrigerant inlet and outlet are arranged on the wall of the cavity and connected to the general cooler outside the wall of the cavity;
第二冷媒进出口，对称设置在所述蒸发挡板的两侧的侧面上；The second refrigerant inlet and outlet are symmetrically arranged on the side surfaces of both sides of the evaporation baffle;
所述第一冷媒进出口和所述第二冷媒进出口分别通过所述冷媒进出管连接。The first refrigerant inlet and outlet are connected to the second refrigerant inlet and outlet respectively through the refrigerant inlet and outlet pipes.
第二方面，本发明实施例提供了一种真空蒸镀设备，其特征在于，所述真空镀膜设备包括：有腔体壁组成的真空腔体，以及设置在所述真空腔体内部的蒸发槽、坩埚和一种改善蒸发镀膜挡板镀层的结构，所述坩埚设置在所述蒸发槽的内部，所述蒸发槽设置在蒸发区安装机架体上。In the second aspect, the embodiment of the present invention provides a vacuum evaporation equipment, which is characterized in that the vacuum coating equipment includes: a vacuum chamber composed of chamber walls, and an evaporation tank arranged inside the vacuum chamber , a crucible and a structure for improving the coating of the evaporation coating baffle, the crucible is arranged inside the evaporation tank, and the evaporation tank is arranged on the mounting frame body of the evaporation area.
在一些可能的实施方式中，所述真空蒸镀设备还包括：自动控制系统，设置在所述真空腔体的外侧，并与所述一种改善蒸发镀膜挡板镀层的结构电连接；所述自动控制系统包括第一控制机构和第二控制机构，In some possible implementations, the vacuum evaporation equipment further includes: an automatic control system, arranged outside the vacuum chamber, and electrically connected to the structure for improving the coating of the evaporation coating baffle; The automatic control system includes a first control mechanism and a second control mechanism,
所述第一控制机构用于在膜料预熔段和停镀段控制蒸发挡板在第一距离内以第一运行速度水平往复运动；在蒸发段控制所述蒸发盖板在第二距离内以第二运行速度水平往复运动；其中，所述第一距离小于所述第二距离，所述第一运行速度小于所述第二运行速度；The first control mechanism is used to control the evaporation baffle to reciprocate horizontally at the first operating speed within the first distance in the film material pre-melting section and the plating stop section; to control the evaporation cover plate to move within the second distance in the evaporation section reciprocating horizontally at a second operating speed; wherein the first distance is less than the second distance, and the first operating speed is less than the second operating speed;
所述第二控制机构用于在膜料预熔段和蒸发段控制冷媒的冷却温度为第一温度，在停镀段控制所述冷媒的冷却温度为第二温度；其中，所述第二温度小于所述第一温度。The second control mechanism is used to control the cooling temperature of the refrigerant to be the first temperature in the film material pre-melting section and the evaporation section, and to control the cooling temperature of the refrigerant to be the second temperature in the plating stop section; wherein, the second temperature less than the first temperature.
上述技术方案的有益技术效果在于：The beneficial technical effect of the above-mentioned technical scheme is:
本发明实施例提供的本发明实施例提供了一种改善蒸发镀膜挡板镀层的结构和真空蒸镀设备，该改善蒸发镀膜挡板镀层的结构包括：蒸发区安装机架体；蒸发挡板，设置在蒸发区安装机架体的上方，蒸发挡板两侧设置有滑动机构；驱动系统，设置在蒸发区安装机架体上并与蒸发挡板连接，驱动系统驱动蒸发挡板在滑动机构上水平方向往复滑动。本发明实施例中通过驱动系统驱动蒸发挡板在所述滑动机构上水平方向往复滑动，使膜层均匀的沉积在蒸发挡板上，从而避免了蒸发挡板沉积过厚为驼峰状后，使得蒸发挡板无法打开，或者强行打开撞坏坩埚的问题。The embodiment of the present invention provided by the embodiment of the present invention provides a structure and a vacuum evaporation equipment for improving the coating of the evaporation coating baffle, and the structure for improving the coating of the evaporation coating baffle includes: an evaporation area installation frame body; It is installed above the installation frame in the evaporation area, and there are sliding mechanisms on both sides of the evaporation baffle; the drive system is installed on the installation rack in the evaporation area and connected with the evaporation baffle, and the drive system drives the evaporation baffle on the sliding mechanism Slide back and forth horizontally. In the embodiment of the present invention, the driving system drives the evaporation baffle to reciprocate and slide horizontally on the sliding mechanism, so that the film layer is evenly deposited on the evaporation baffle, thereby avoiding that the evaporation baffle is deposited in a hump shape after being too thick, so that The evaporation damper cannot be opened, or the crucible is damaged due to forced opening.
附图说明Description of drawings
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only These are some embodiments of the present invention. Those skilled in the art can also obtain other drawings based on these drawings without creative work.
图1是现有技术中蒸发镀膜时蒸发挡板上层积镀层的结构示意图；Fig. 1 is a schematic structural view of the layered coating on the evaporation baffle when evaporating the coating in the prior art;
图2是本发明实施例中蒸发镀膜时蒸发挡板上层积镀层的结构示意图；Fig. 2 is a schematic structural view of the layered coating on the evaporation baffle when evaporating the coating in the embodiment of the present invention;
图3是本发明实施例的一种改善蒸发镀膜挡板镀层的结构的主视图；Fig. 3 is a front view of a structure for improving the coating of the evaporation coating baffle according to an embodiment of the present invention;
图4是本发明实施例的一种改善蒸发镀膜挡板镀层的结构的侧视图；Fig. 4 is a side view of a structure for improving the coating of an evaporation coating baffle according to an embodiment of the present invention;
图5是本发明实施例的一种改善蒸发镀膜挡板镀层的结构的俯视图。Fig. 5 is a top view of a structure for improving the coating of an evaporation coating baffle according to an embodiment of the present invention.
附图标号说明：Explanation of reference numbers:
100、腔体壁；101、蒸发槽；102、坩埚；100, cavity wall; 101, evaporation tank; 102, crucible;
201、蒸发区安装机架体；202、蒸发挡板；203、滑轨；204、轨道安装座；205、导轮；206、限位块；207、第一安装板；208、链条；209、主动链轮；210、从动链轮；211、第二安装板；212、驱动电机；213、联轴器；214、传动轴；215、轴承座；216、万向联轴器；217、磁流体；218、电机安装座；219、冷媒进出管；220、第一冷媒进出口；221、第二冷媒进出口。201, installation frame body in evaporation area; 202, evaporation baffle; 203, slide rail; 204, track mounting seat; 205, guide wheel; 206, limit block; 207, first installation plate; 208, chain; 209, Drive sprocket; 210, driven sprocket; 211, second mounting plate; 212, drive motor; 213, shaft coupling; 214, transmission shaft; 215, bearing seat; 216, universal shaft coupling; Fluid; 218, motor mounting seat; 219, refrigerant inlet and outlet pipe; 220, first refrigerant inlet and outlet; 221, second refrigerant inlet and outlet.
具体实施方式Detailed ways
下面将详细描述本发明的各个方面的特征和示例性实施例。在下面的详细描述中，提出了许多具体细节，以便提供对本发明的全面理解。但是，对于本领域技术人员来说很明显的是，本发明可以在不需要这些具体细节中的一些细节的情况下实施。下面对实施例的描述仅仅是为了通过示出本发明的示例来提供对本发明的更好的理解。在附图和下面的描述中，至少部分的公知结构和技术没有被示出，以便避免对本发明造成不必要的模糊；并且，为了清晰，可能夸大了部分结构的尺寸。此外，下文中所描述的特征、结构或特性可以以任何合适的方式结合在一个或更多实施例中。Features and exemplary embodiments of various aspects of the invention will be described in detail below. In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without some of these specific details. The following description of the embodiments is only to provide a better understanding of the present invention by showing examples of the present invention. In the drawings and the following description, at least some well-known structures and techniques have not been shown in order to avoid unnecessarily obscuring the present invention; and, for clarity, the dimensions of some structures may have been exaggerated. Furthermore, the features, structures, or characteristics described hereinafter may be combined in any suitable manner in one or more embodiments.
在蒸发镀膜过程中，主要分为膜料预熔段、镀膜段和停镀段这三个阶段。图1是现有技术中蒸发镀膜时蒸发挡板上层积镀层的结构示意图，如图1所示，蒸发槽101正上方均设置的蒸发挡板202，蒸发挡板202在膜料预熔段及停镀段处于蒸发槽101正上方，处于关闭状态，蒸发出的膜料粒子沉积在蒸发挡板202下侧平面上，此时蒸发挡板202起到隔断蒸发区与镀膜区，防止预熔料及停镀时热量过大导致受镀膜材烧断的作用。当预熔料完成，辊系带动受镀膜料高速转动，打开蒸发挡板202，坩埚102中蒸发出的膜料粒子则开始沉积在受镀料上。因为在膜料预熔端及停镀段，蒸发挡板202处于静止闭合状态，膜料持续沉积在蒸发挡板202下方的同一位置，最终形成驼峰状的镀层。当镀层过厚与坩埚102口发生干涉，将导致蒸发挡板202无法打开以及撞损坩埚102的情况。In the evaporation coating process, it is mainly divided into three stages: the pre-melting section of the film material, the coating section and the stopping section. Fig. 1 is the structure schematic diagram of laminated coating layer on the evaporation baffle when evaporation coating in the prior art, as shown in Fig. The stop plating section is directly above the evaporation tank 101 and is in a closed state. The evaporated film material particles are deposited on the lower plane of the evaporation baffle 202. At this time, the evaporation baffle 202 functions to isolate the evaporation area and the coating area to prevent the premelt and When the plating is stopped, the heat is too large, which causes the coating material to be blown. When the pre-melt material is finished, the roller system drives the coating material to rotate at a high speed, the evaporation baffle 202 is opened, and the film material particles evaporated from the crucible 102 begin to deposit on the coating material. Because the evaporation baffle 202 is in a static and closed state at the pre-melting end of the film material and the plating stop section, the film material is continuously deposited at the same position below the evaporation baffle 202, finally forming a hump-shaped coating. When the coating is too thick and interferes with the opening of the crucible 102 , the evaporation baffle 202 cannot be opened and the crucible 102 will be damaged.
图2是本发明实施例中蒸发镀膜时蒸发挡板上层积镀层的结构示意图，如图2所示，本发明实施例在不改变坩埚102及蒸发槽101的情况下，通改变蒸发挡板202的尺寸，使得蒸发挡板202的尺寸较原蒸发挡板202更宽，并通过驱动系统使得改变尺寸后的蒸发挡板202在膜料预熔段及停镀段可以使得蒸发挡板202在两侧边界不超出蒸发槽101闭合需求宽度的范围内往复水平运动(即，虽然蒸发挡板202在水平方向往复运动，但是仍然可以盖住蒸发槽101，使得蒸发槽101处于闭合状态)，使得膜料均匀的沉积在整个蒸发挡板202的下方，蒸发挡板202上各个部位的镀层厚度均匀，形成如图2所示的连续薄镀层。可见，本发明的一种改善蒸发镀膜挡板镀层的结构，蒸发挡板202能够执行水平往复运动，使得膜层在盖板上连续沉积，在相同沉积量的情况下，减薄最大沉积厚度；而且，由于镀层厚度薄，还可以提升膜层与蒸发挡板202的附着牢固度，同时相比与驼峰状膜层，连续均匀的薄膜层距离蒸发挡板202的冷却源更接近，距离坩埚102发热源更远，故而也提升了最外层膜层的冷却效果，避免了因外层镀层距离坩埚102热源近，再次发生受热融化而掉入坩埚102内情况，进一步解决了蒸发挡板202因驼峰状镀层过厚附着不牢及镀层过厚致外层冷却不足再次融化掉渣，膜料经冷却凝固后导致坩埚102出裂纹而大量报废的问题。Fig. 2 is a schematic diagram of the structure of the layered coating on the evaporation baffle when evaporating the coating in the embodiment of the present invention. As shown in Fig. The size of the evaporation baffle 202 is wider than that of the original evaporator baffle 202, and the evaporation baffle 202 after changing the size can make the evaporation baffle 202 in both the film material pre-melting section and the stop plating section through the driving system The side boundary does not exceed the closed width of the evaporation tank 101 and reciprocates horizontally (that is, although the evaporation baffle 202 reciprocates in the horizontal direction, it can still cover the evaporation tank 101, so that the evaporation tank 101 is in a closed state), so that the film The material is uniformly deposited under the entire evaporation baffle 202, and the thickness of the coating on each part of the evaporation baffle 202 is uniform, forming a continuous thin coating as shown in FIG. 2 . It can be seen that the structure of the present invention improves the coating of the evaporation coating baffle, the evaporation baffle 202 can perform horizontal reciprocating motion, so that the film layer is continuously deposited on the cover plate, and the maximum deposition thickness is reduced under the same deposition amount; Moreover, because the thickness of the coating is thin, the adhesion firmness between the film layer and the evaporation baffle 202 can also be improved. At the same time, compared with the hump-shaped film layer, the continuous and uniform film layer is closer to the cooling source of the evaporation baffle 202, and the distance from the crucible 102 The heat source is farther away, so the cooling effect of the outermost film layer is also improved, and the situation that the outer coating layer is close to the heat source of the crucible 102 and falls into the crucible 102 due to heat and melting again is avoided, further solving the problem of evaporation baffle 202 The hump-shaped coating is too thick, the adhesion is not strong, and the coating is too thick, resulting in insufficient cooling of the outer layer to melt the slag again. After the film material is cooled and solidified, the crucible 102 is cracked and a large number of scraps are scrapped.
图3是本发明实施例的一种改善蒸发镀膜挡板镀层的结构的主视图，图4是本发明实施例的一种改善蒸发镀膜挡板镀层的结构的侧视图，图5是本发明实施例的一种改善蒸发镀膜挡板镀层的结构的俯视图，如图3至图5所示，该改善蒸发镀膜挡板镀层的结构包括：蒸发区安装机架体201；蒸发挡板202，设置在蒸发区安装机架体201的上方，蒸发挡板202两侧设置有滑动机构；驱动系统，设置在蒸发区安装机架体201上并与蒸发挡板202连接，驱动系统驱动蒸发挡板202在滑动机构上水平方向往复滑动。本发明实施例中，蒸发挡板202的宽度大于蒸发槽101的宽度，在驱动系统的驱动下，蒸发挡板202在滑动机构上水平方向往复滑动，使膜层均匀的沉积在蒸发挡板202上，从而避免了蒸发挡板202沉积过厚为驼峰状膜层后，使得蒸发挡板202无法打开，或者强行打开撞坏坩埚102的问题。另外，在相同沉积量的情况下，可以减薄最大沉积厚度，提升膜层与蒸发挡板202的附着牢固度，同时提升了最外层膜层的冷却效果，从而解决了蒸发挡板202因镀层过厚附着不牢，镀层过厚冷却不足再次融化掉渣导致坩埚102大量报废的问题。Fig. 3 is a front view of a structure of an improved evaporation coating baffle coating according to an embodiment of the present invention, Fig. 4 is a side view of a structure of an improved evaporation coating baffle coating according to an embodiment of the present invention, and Fig. 5 is an embodiment of the present invention An example of a top view of the structure of the improved evaporation coating baffle coating, as shown in Figure 3 to Figure 5, the structure of the improved evaporation coating baffle coating includes: the evaporation area installation frame body 201; evaporation baffle 202, arranged on Above the evaporation area installation frame body 201, sliding mechanisms are arranged on both sides of the evaporation baffle plate 202; the drive system is arranged on the evaporation area installation frame body 201 and connected with the evaporation baffle plate 202, and the drive system drives the evaporation baffle plate 202 in the The sliding mechanism slides reciprocally in the horizontal direction. In the embodiment of the present invention, the width of the evaporation baffle 202 is greater than the width of the evaporation tank 101. Driven by the driving system, the evaporation baffle 202 slides horizontally on the sliding mechanism so that the film layer is evenly deposited on the evaporation baffle 202. Therefore, the problem that the evaporation baffle 202 cannot be opened after the evaporation baffle 202 is deposited into a hump-shaped film layer too thick, or the crucible 102 is damaged when it is forcibly opened is avoided. In addition, in the case of the same deposition amount, the maximum deposition thickness can be reduced, the adhesion firmness between the film layer and the evaporation baffle 202 can be improved, and the cooling effect of the outermost film layer can be improved, thereby solving the problem of the evaporation baffle 202. If the coating is too thick, the adhesion is not strong, and if the coating is too thick and the cooling is insufficient, the slag will be melted again, resulting in a large number of crucibles 102 being scrapped.
如图3至图5所示，滑动机构包括：包括滑轨203、轨道安装座204和导轮205；滑轨203通过轨道安装座204安装在蒸发区安装机架体201上；导轮205安装在蒸发挡板202侧面，并在滑轨203上往复滑动。滑动机构还包括限位块206，位于滑轨203的两端，分别安装在轨道安装座204上，限位块206用于将蒸发挡板202在水平方向上的移动的距离限制在预设距离内。本实施例中，蒸发槽101固定安装在蒸发区安装机架体201上，而蒸发槽101左右两侧通过螺栓固定安装有两块轨道安装座204，滑轨203由内六角螺栓固定安装在轨道安装座204正上平面，蒸发挡板202两侧面各安装有两个导轮205，导轮205正落于滑轨203上，滑轨203的两端分别设置有限位块206，以防止蒸发挡板202因误操作等超出滑轨203极限，导致蒸发挡板202不能完全挡住蒸发槽101，使得蒸发槽101处于非闭合状态，致使坩埚102中的膜料烧坏薄膜，降低产品质量和生产效率。另外，本发明实施例中，导轮205两侧的设置有凸缘，可保证蒸发挡板202在滑轨203上水平往复运动的过程中不会发生偏移而脱离滑轨203。As shown in Figures 3 to 5, the sliding mechanism includes: a slide rail 203, a track mounting seat 204 and a guide wheel 205; the slide rail 203 is installed on the evaporation area installation frame body 201 through the track mounting seat 204; It is on the side of the evaporation baffle plate 202 and slides back and forth on the slide rail 203 . The sliding mechanism also includes limit blocks 206, which are located at both ends of the slide rail 203 and respectively installed on the rail mounting bases 204. The limit blocks 206 are used to limit the moving distance of the evaporation baffle plate 202 in the horizontal direction to a preset distance. Inside. In this embodiment, the evaporation tank 101 is fixedly installed on the mounting frame body 201 in the evaporation area, and the left and right sides of the evaporation tank 101 are fixed with two rail mounting seats 204 by bolts, and the slide rail 203 is fixed on the track by hexagon socket bolts. The mounting base 204 is directly above the plane, and two guide wheels 205 are installed on both sides of the evaporation baffle 202. The guide wheels 205 are falling on the slide rail 203, and the two ends of the slide rail 203 are respectively provided with limit blocks 206 to prevent the evaporation baffle from The plate 202 exceeds the limit of the slide rail 203 due to misoperation, etc., so that the evaporation baffle plate 202 cannot completely block the evaporation tank 101, so that the evaporation tank 101 is in a non-closed state, causing the film material in the crucible 102 to burn the film, reducing product quality and production efficiency . In addition, in the embodiment of the present invention, flanges are provided on both sides of the guide wheel 205 to ensure that the evaporation baffle plate 202 will not deviate from the sliding rail 203 during the horizontal reciprocating movement on the sliding rail 203 .
如图3至图5所示，在一些实施例中，该驱动系统包括：第一链条机构、第二链条机构和驱动机构，第一链条机构和第二链条机构分别设置在蒸发挡板202的两侧，并位于轨道安装座204的外侧；第一链条机构和第二链条机构均包括：第一安装板207、链条208、主动链轮209和从动链轮210，链条208包裹在主动链轮209和从动链轮210的外侧，链条208安装在第一安装板207的下方；从动链轮210分别通过第二安装板211轨道安装座204的外侧面的两端；驱动机构包括：带有联轴器213的驱动电机212、传动轴214和轴承座215，传动轴214通过轴承座215安装在蒸发区安装机架体201的下方；传动轴214的一端穿过腔体壁100上的孔洞与联轴器213连接，传动轴214的另一端与主动链轮209连接。As shown in FIGS. 3 to 5 , in some embodiments, the driving system includes: a first chain mechanism, a second chain mechanism and a driving mechanism, and the first chain mechanism and the second chain mechanism are respectively arranged on the evaporation baffle 202 Both sides, and are positioned at the outside of track mount 204; The first chain mechanism and the second chain mechanism all comprise: first mounting plate 207, chain 208, driving sprocket 209 and driven sprocket 210, and chain 208 is wrapped in driving chain On the outside of the wheel 209 and the driven sprocket 210, the chain 208 is installed below the first mounting plate 207; the driven sprocket 210 passes through the two ends of the outer side of the second mounting plate 211 track mount 204 respectively; the drive mechanism includes: Drive motor 212 with coupling 213, transmission shaft 214 and bearing seat 215, transmission shaft 214 is installed on the bottom of evaporation area installation frame body 201 through bearing seat 215; The hole in the shaft coupling 213 is connected, and the other end of the transmission shaft 214 is connected with the driving sprocket 209.
具体的，轨道安装座204的外侧面上方的两端通过六角螺栓分别固定安装的有第一安装板207，从动链轮210分别安装在第一安装板207，此时，两个从动链轮210与一个主动链轮209在一个平面上。传动轴214通过两个轴承座215固定在蒸发区安装机架体201的下方，驱动电机212控制主动链轮209的传动轴214张反转，同时带动链条208转动，链条208转动带动蒸发挡板202往复运动，使膜层均匀的沉积在蒸发挡板202上，从而避免了蒸发挡板202沉积过厚为驼峰状后，使得蒸发挡板202无法打开，或者强行打开撞坏坩埚102的问题。另外，在相同沉积量的情况下，可以减薄最大沉积厚度，提升膜层与蒸发挡板202的附着牢固度，同时提升了最外层膜层的冷却效果，从而解决了盖板因镀层过厚附着不牢，镀层过厚冷却不足再次融化掉渣导致坩埚102大量报废的问题。Specifically, the two ends above the outer surface of the track mounting seat 204 are respectively fixed and installed with a first mounting plate 207 by hexagonal bolts, and the driven sprockets 210 are respectively installed on the first mounting plate 207. At this time, the two driven chains Wheel 210 is in a plane with a drive sprocket 209 . The transmission shaft 214 is fixed below the mounting frame body 201 in the evaporation area through two bearing seats 215. The driving motor 212 controls the rotation of the transmission shaft 214 of the driving sprocket 209, and at the same time drives the chain 208 to rotate, and the rotation of the chain 208 drives the evaporation baffle 202 moves back and forth, so that the film layer is evenly deposited on the evaporation baffle 202, thereby avoiding the problem that the evaporation baffle 202 cannot be opened after the evaporation baffle 202 is deposited too thick and becomes a hump shape, or the crucible 102 is damaged by forcibly opening. In addition, in the case of the same deposition amount, the maximum deposition thickness can be reduced, the adhesion firmness between the film layer and the evaporation baffle 202 can be improved, and the cooling effect of the outermost film layer can be improved at the same time, thus solving the problem of the cover plate due to over-coating. Thick adhesion is not firm, and the coating layer is too thick and cooling is insufficient to melt the slag again, resulting in a large number of crucibles 102 being scrapped.
如图3至图5所示，在一些实施例中，驱动系统还包括：万向联轴器216，设置在传动轴214与腔体壁100的孔洞之间。另外，在腔体壁100的孔洞处设置有磁流体217，万向联轴器216与联轴器213通过磁流体217连接。本发明实施例中，通过万向联轴器216可以可靠地传递转矩和运动，以提高传动效率高；另外，磁流体217安装于腔体壁100上的孔洞处，可形成良好的密封性。As shown in FIGS. 3 to 5 , in some embodiments, the driving system further includes: a universal joint 216 disposed between the transmission shaft 214 and the hole in the cavity wall 100 . In addition, a magnetic fluid 217 is provided at the hole of the cavity wall 100 , and the universal coupling 216 and the coupling 213 are connected through the magnetic fluid 217 . In the embodiment of the present invention, the universal coupling 216 can reliably transmit torque and motion to improve transmission efficiency; in addition, the magnetic fluid 217 is installed at the hole on the cavity wall 100 to form a good seal .
如图3至图5所示，在一些实施例中，驱动系统还包括：电机安装座218，设置在腔体壁100的外侧，驱动电机212安装在电机安装座218上。驱动电机212由螺栓固定安装在腔体壁100的外侧的电机安装座218上。本发明实施例中，通过将驱动电机212设置在腔体壁100的外部，不仅工作环境更佳，故障率低，且维修方便。As shown in FIG. 3 to FIG. 5 , in some embodiments, the drive system further includes: a motor mount 218 disposed on the outside of the cavity wall 100 , and the drive motor 212 is mounted on the motor mount 218 . The driving motor 212 is fixedly installed on the motor mount 218 on the outside of the cavity wall 100 by bolts. In the embodiment of the present invention, by arranging the driving motor 212 outside the cavity wall 100, not only the working environment is better, the failure rate is low, and the maintenance is convenient.
如图3至图5所示，在一些实施例中，第一安装板207设置在蒸发挡板202的边缘中间位置，第一安装板207的下侧面设有销孔，链条208通过销孔安装在第一安装板207的下方；链条208、主动链轮209与从动链轮210的在同一平面上，本实施例中，第一安装板207设置在蒸发挡板202的边缘中间位置，不仅可以使得蒸发挡板202前后移动的距离相等，便于控制，另外，链条208、主动链轮209与从动链轮210的在同一平面上，可以保证蒸发挡板202在水平方向运动无偏差。As shown in Figures 3 to 5, in some embodiments, the first mounting plate 207 is arranged in the middle of the edge of the evaporation baffle 202, the lower side of the first mounting plate 207 is provided with a pin hole, and the chain 208 is installed through the pin hole Below the first mounting plate 207; the chain 208, the driving sprocket 209 and the driven sprocket 210 are on the same plane. The forward and backward movement distance of the evaporating baffle 202 can be equal, which is convenient for control. In addition, the chain 208, the driving sprocket 209 and the driven sprocket 210 are on the same plane, which can ensure that the evaporating baffle 202 moves without deviation in the horizontal direction.
如图3至图5所示，在一些实施例中，改善蒸发镀膜挡板镀层的结构还包括：冷媒进出管219；第一冷媒进出口220，设置在腔体壁100上，并位于与腔体壁100外侧的普冷机连接；第二冷媒进出口221，对称设置在蒸发挡板202的两侧的侧面上；第一冷媒进出口220和第二冷媒进出口221分别通过冷媒进出管219连接。As shown in Figures 3 to 5, in some embodiments, the structure for improving the coating of the evaporative coating baffle further includes: a refrigerant inlet and outlet pipe 219; a first refrigerant inlet and outlet 220, arranged on the cavity wall 100, and located in the The general refrigerator outside the body wall 100 is connected; the second refrigerant inlet and outlet 221 are symmetrically arranged on the sides of both sides of the evaporation baffle 202; the first refrigerant inlet and outlet 220 and the second refrigerant inlet and outlet 221 pass through the refrigerant inlet and outlet pipes 219 respectively connect.
具体的，第二冷媒进出口221中一个口为蒸发挡板202的冷媒进口，另一个口为蒸发挡板202的冷媒出口，腔体壁100上设置的第一冷媒进出口220中的一个口连接普冷机的进口，另一个口连接普冷机的出口，普冷机的进口与蒸发挡板202的冷媒进口通过一个冷媒进出管219连接，蒸发挡板202的冷媒出口与普冷机的出口通过另一个冷媒进出管219连接，普冷机的冷媒从普冷机出口通过一个冷媒进出管219到达蒸发挡板202的入口，从蒸发挡板202的入口到达到蒸发挡板202的内部，在从蒸发挡板202的出口经过另一个冷媒进出管219回到普冷机的进口，形成一个冷却循环通路。Specifically, one port of the second refrigerant inlet and outlet 221 is the refrigerant inlet of the evaporation baffle 202 , the other port is the refrigerant outlet of the evaporation baffle 202 , and one port of the first refrigerant inlet and outlet 220 provided on the cavity wall 100 It is connected to the inlet of the general cooler, and the other port is connected to the outlet of the general cooler. The inlet of the general cooler is connected to the refrigerant inlet of the evaporator baffle 202 through a refrigerant inlet and outlet pipe 219, and the refrigerant outlet of the evaporator baffle 202 is connected to the outlet of the general cooler. The outlet is connected through another refrigerant inlet and outlet pipe 219. The refrigerant of the general cooler passes through a refrigerant inlet and outlet pipe 219 from the outlet of the general cooler to the inlet of the evaporation baffle 202, and from the inlet of the evaporation baffle 202 to the inside of the evaporation baffle 202. From the outlet of the evaporator baffle 202 through another refrigerant inlet and outlet pipe 219 back to the inlet of the general cooler, a cooling circulation path is formed.
现有的蒸发挡板202普遍采用冷却塔等提供的水作为冷却媒介，其冷却能力有限，在实际镀膜过程中，某些镀膜工艺要求坩埚102需要冷却到常温才能出仓(如镀铝)，但坩埚102冷却时间比较长，大大限制了生产效率。本发明实施例中，将蒸发挡板202采用普冷机提供的冷冻液进行冷却，相较于普通水冷方式，普冷机制冷冷却方式的优势在于其温度的可控性，制冷极限温度更低，实例中水冷方式温度一般为20℃左右，而使用普冷机温度最低则可达到-30℃，或者性能较好的普冷机制冷能力可以达到更低温度，其冷却效率则大大的提升，另外，本实施例中的普冷机可以使用现有设备中的任何一种，与空调类似，空调利用的是制冷剂，而本实施例中的普冷利用的是冷冻液，冷冻液由压缩机压缩制冷。在实际镀膜中，蒸发挡板202的温度也不宜过低，因为若其温度过低将导致镀膜区温度偏低，进而引起蒸发效率降低或不能蒸发，但因为普冷温度的可控性，在膜料预熔段及镀膜段可以将冷却温度设置在常温以上，而仅在停镀段将制冷温度调控到零度以下进行制冷，加快蒸发区换热速率，进而缩短蒸镀区冷却时间，提升生产效率，蒸发挡板202冷却效果的提升也将进一步减少膜层受热再次融化掉渣的风险。The existing evaporation baffle 202 generally uses water provided by cooling towers as the cooling medium, and its cooling capacity is limited. In the actual coating process, some coating processes require that the crucible 102 needs to be cooled to normal temperature before it can be released from the warehouse (such as aluminum coating). But the cooling time of the crucible 102 is relatively long, which greatly limits the production efficiency. In the embodiment of the present invention, the evaporator baffle 202 is cooled by the refrigerant provided by the ordinary cooler. Compared with the ordinary water cooling method, the advantage of the ordinary cooler cooling method lies in the controllability of its temperature, and the cooling limit temperature is lower. In the example, the temperature of the water cooling method is generally about 20°C, and the lowest temperature can reach -30°C when using a general cooler, or the cooling capacity of a general cooler with better performance can reach a lower temperature, and its cooling efficiency is greatly improved. In addition, the general cold machine in this embodiment can use any of the existing equipment, similar to the air conditioner, what the air conditioner uses is refrigerant, and what the general colder in this embodiment uses is refrigerated liquid, which is compressed by compressor refrigeration. In the actual coating, the temperature of the evaporation baffle 202 should not be too low, because if the temperature is too low, the temperature of the coating area will be low, and then the evaporation efficiency will be reduced or cannot be evaporated, but because of the controllability of the general cooling temperature, in The cooling temperature can be set above normal temperature in the pre-melting section of the film material and the coating section, and the cooling temperature can be adjusted to below zero in the coating stop section to accelerate the heat transfer rate of the evaporation area, thereby shortening the cooling time of the evaporation area and improving production Efficiency, the improvement of the cooling effect of the evaporation baffle plate 202 will further reduce the risk of melting the slag again when the film layer is heated.
另一方面，本发明实施例还提供了一种真空蒸镀设备，其特征在于，真空镀膜设备包括：由腔体壁100组成的真空腔体，以及设置在真空腔体内部的蒸发槽101、坩埚102和一种改善蒸发镀膜挡板镀层的结构，坩埚102设置在蒸发槽101的内部，蒸发槽101设置在蒸发区安装机架体201上。On the other hand, the embodiment of the present invention also provides a vacuum evaporation equipment, which is characterized in that the vacuum coating equipment includes: a vacuum chamber composed of a chamber wall 100, and an evaporation tank 101 arranged inside the vacuum chamber, The crucible 102 and a structure for improving the coating of the evaporation coating baffle, the crucible 102 is arranged inside the evaporation tank 101 , and the evaporation tank 101 is arranged on the mounting frame body 201 of the evaporation area.
本发明实施例中，通过使用改善蒸发镀膜挡板镀层的结构，蒸发挡板202在滑动机构上水平方向往复滑动，使膜层均匀的沉积在蒸发挡板202上，从而避免了蒸发挡板沉积过厚为驼峰状后，使得蒸发挡板202无法打开，或者强行打开撞坏坩埚102的问题。另外，在相同沉积量的情况下，可以减薄最大沉积厚度，提升膜层与蒸发挡板202的附着牢固度，同时提升了最外层膜层的冷却效果，从而解决了蒸发挡板202因镀层过厚附着不牢，镀层过厚冷却不足再次融化掉渣导致坩埚102大量报废的问题。In the embodiment of the present invention, by using the structure of improving the coating of the evaporation coating baffle, the evaporation baffle 202 reciprocates and slides horizontally on the sliding mechanism, so that the film layer is evenly deposited on the evaporation baffle 202, thereby avoiding the deposition of the evaporation baffle If it is too thick and becomes hump-shaped, the evaporation baffle 202 cannot be opened, or the crucible 102 will be damaged due to forced opening. In addition, in the case of the same deposition amount, the maximum deposition thickness can be reduced, the adhesion firmness between the film layer and the evaporation baffle 202 can be improved, and the cooling effect of the outermost film layer can be improved, thereby solving the problem of the evaporation baffle 202. If the coating is too thick, the adhesion is not strong, and if the coating is too thick and the cooling is insufficient, the slag will be melted again, resulting in a large number of crucibles 102 being scrapped.
在一些实施例中，真空蒸镀设备还包括：自动控制系统，自动控制系统包括第一控制机构和第二控制机构，第一控制机构用于在膜料预熔段和停镀段控制蒸发挡板202在第一距离内以第一运行速度水平往复运动；在蒸发段控制蒸发挡板202在第二距离内以第二运行速度水平往复运动；其中，第一距离小于第二距离，第一运行速度小于第二运行速度；第二控制机构用于在膜料预熔段和蒸发段控制冷媒的冷却温度为第一温度，在停镀段控制冷媒的冷却温度为第二温度；其中，第二温度小于第一温度。In some embodiments, the vacuum evaporation equipment also includes: an automatic control system, the automatic control system includes a first control mechanism and a second control mechanism, the first control mechanism is used to control the evaporation block in the film material pre-melting section and the stop plating section The plate 202 reciprocates horizontally at a first operating speed within a first distance; in the evaporation section, the evaporation baffle 202 is controlled to reciprocate horizontally at a second operating speed within a second distance; wherein, the first distance is smaller than the second distance, and the first The operating speed is less than the second operating speed; the second control mechanism is used to control the cooling temperature of the refrigerant in the film material pre-melting section and the evaporation section to be the first temperature, and to control the cooling temperature of the refrigerant in the plating stop section to be the second temperature; wherein, the first The second temperature is less than the first temperature.
本发明实施例中，可以通过自动控制系统中的第一控制机构控制驱动电机212正反转的圈数即可控制蒸发挡板202水平运动的距离宽度，通过驱动电机212的转速，即可控制蒸发挡板202的水平往返运动的速度快慢。具体的，在主控屏处，通过程序控制自动控制膜料预熔段及停镀段设定蒸发挡板202的水平运动距离为L1，运行速度为V1，即可在蒸发挡板202上形成连续较薄的膜层；而在镀膜需要打开蒸发挡板202时，则设置蒸发挡板202单侧打开运行距离为L2，运行速度为V2，其中，L1＜L2，V1＜V2，由于L1和V1均是在预熔段，在预熔段蒸发槽101处于关闭状态，蒸发挡板202需要小范围运动，因为如果蒸发挡板202运动距离过大，那么蒸发槽101就会处于开放状态，坩埚102内部的金属就可能层积在真空腔体内部的其他部件上，而蒸发挡板202慢速移动也可以在预熔段使得蒸发挡板202上的镀层更加均匀。In the embodiment of the present invention, the distance and width of the horizontal movement of the evaporation baffle 202 can be controlled by controlling the number of forward and reverse rotations of the drive motor 212 through the first control mechanism in the automatic control system, and the speed of the drive motor 212 can be controlled. The speed of the horizontal reciprocating movement of the evaporation baffle plate 202 is slow. Concretely, at the main control panel, the horizontal movement distance of the evaporation baffle 202 is set to be L1 and the running speed is V1 through the automatic control of the film material pre-melting section and the stop plating section through program control, so that the evaporation baffle 202 can be formed on the evaporation baffle 202. Continuous thinner film layer; and when the evaporation baffle 202 needs to be opened for coating, the evaporating baffle 202 is set to open on one side and the running distance is L2, and the running speed is V2, wherein, L1<L2, V1<V2, due to L1 and V1 is in the pre-melting section. In the pre-melting section, the evaporation tank 101 is in a closed state, and the evaporation baffle 202 needs to move in a small range, because if the moving distance of the evaporation baffle 202 is too large, the evaporation tank 101 will be in an open state, and the crucible The metal inside 102 may be laminated on other components inside the vacuum cavity, and the slow movement of the evaporation baffle 202 can also make the coating on the evaporation baffle 202 more uniform in the pre-melting section.
还可以通过第二控制机构手动或自动控制膜料预熔段及蒸发段的温度为T1，在停镀段(即冷却蒸发区时段)设置温度为T2，因为在预熔段，蒸发槽101处于关闭状态，如果温度过低会影响预熔，所以本实施例中，T2＜T1，以达到不影响镀膜的情况下，又减少镀后冷却时间，提高生产效率。本发明实施例中，蒸发挡板202的非镀膜时段水平往返运动与镀膜时打开，以及蒸发挡板202在镀膜段与非镀膜段的冷却温度均可以通过程序优化设计达到全程的半自动或全自动控制，极大地提高生产效率。It is also possible to manually or automatically control the temperature of the film material pre-melting section and the evaporation section by the second control mechanism to be T1, and set the temperature to be T2 in the stop plating section (that is, the cooling evaporation section period), because in the pre-melting section, the evaporation tank 101 is in In the closed state, if the temperature is too low, it will affect the pre-melting, so in this embodiment, T2<T1, so as to reduce the cooling time after plating and improve production efficiency without affecting the coating film. In the embodiment of the present invention, the horizontal reciprocating movement of the evaporation baffle 202 during the non-coating period and the opening of the coating, and the cooling temperature of the evaporation baffle 202 in the coating section and the non-coating section can all be semi-automatic or fully automatic through program optimization design. control, greatly improving production efficiency.
在本发明实施例的描述中，需要说明的是，术语中的“上、下、内和外”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本发明的限制。此外，术语“第一、第二或第三”仅用于描述目的，而不能理解为指示或暗示相对重要性。In the description of the embodiments of the present invention, it should be noted that the orientations or positional relationships indicated by the terms "upper, lower, inner, and outer" are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of description The present invention and simplified description do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and thus should not be construed as limiting the present invention. In addition, the terms "first, second or third" are used for descriptive purposes only, and should not be construed as indicating or implying relative importance.
本发明实施例中除非另有明确的规定和限定，术语“安装、相连、连接”应做广义理解，例如：可以是固定连接、可拆卸连接或一体式连接；同样可以是机械连接、电连接或直接连接，也可以通过中间媒介间接相连，也可以是两个元件内部的连通。对于本领域的普通技术人员而言，可以具体情况理解上述术语在本发明中的具体含义。In the embodiments of the present invention, unless otherwise specified and limited, the term "installation, connection, connection" should be understood in a broad sense, for example: it can be a fixed connection, a detachable connection or an integrated connection; it can also be a mechanical connection, an electrical connection Either direct connection, indirect connection through an intermediary, or internal communication between two elements. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention in specific situations.
虽然已经参考优选实施例对本发明进行了描述，但在不脱离本发明的范围的情况下，可以对其进行各种改进并且可以用等效物替换其中的部件。尤其是，只要不存在结构冲突，各个实施例中所提到的各项技术特征均可以任意方式组合起来。本发明并不局限于文中公开的特定实施例，而是包括落入权利要求的范围内的所有技术方案。While the invention has been described with reference to a preferred embodiment, various modifications may be made and equivalents may be substituted for parts thereof without departing from the scope of the invention. In particular, as long as there is no structural conflict, the technical features mentioned in the various embodiments can be combined in any manner. The present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310384113.5ACN116575002A (en) | 2023-04-11 | 2023-04-11 | Structure for improving coating of evaporation coating baffle plate and vacuum evaporation equipment |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310384113.5ACN116575002A (en) | 2023-04-11 | 2023-04-11 | Structure for improving coating of evaporation coating baffle plate and vacuum evaporation equipment |
| Publication Number | Publication Date |
|---|---|
| CN116575002Atrue CN116575002A (en) | 2023-08-11 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310384113.5APendingCN116575002A (en) | 2023-04-11 | 2023-04-11 | Structure for improving coating of evaporation coating baffle plate and vacuum evaporation equipment |
| Country | Link |
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| CN (1) | CN116575002A (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117230425A (en)* | 2023-09-15 | 2023-12-15 | 深圳金美新材料科技有限公司 | Coating baffle and winding coating device |
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2007126698A (en)* | 2005-11-02 | 2007-05-24 | Fujifilm Corp | Vacuum deposition method |
| CN102195007A (en)* | 2010-03-11 | 2011-09-21 | 三星移动显示器株式会社 | Thin film deposition apparatus |
| CN103328681A (en)* | 2011-01-20 | 2013-09-25 | 夏普株式会社 | Crucible and deposition apparatus |
| CN216614822U (en)* | 2022-01-17 | 2022-05-27 | 江阴纳力新材料科技有限公司 | Cooling device for PVD equipment coating baffle |
| JP2022188811A (en)* | 2021-06-10 | 2022-12-22 | キヤノントッキ株式会社 | Film deposition apparatus and electronic device manufacturing method |
| CN219010436U (en)* | 2022-04-20 | 2023-05-12 | 重庆金美新材料科技有限公司 | Metal film evaporation equipment |
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2007126698A (en)* | 2005-11-02 | 2007-05-24 | Fujifilm Corp | Vacuum deposition method |
| CN102195007A (en)* | 2010-03-11 | 2011-09-21 | 三星移动显示器株式会社 | Thin film deposition apparatus |
| CN103328681A (en)* | 2011-01-20 | 2013-09-25 | 夏普株式会社 | Crucible and deposition apparatus |
| JP2022188811A (en)* | 2021-06-10 | 2022-12-22 | キヤノントッキ株式会社 | Film deposition apparatus and electronic device manufacturing method |
| CN216614822U (en)* | 2022-01-17 | 2022-05-27 | 江阴纳力新材料科技有限公司 | Cooling device for PVD equipment coating baffle |
| CN219010436U (en)* | 2022-04-20 | 2023-05-12 | 重庆金美新材料科技有限公司 | Metal film evaporation equipment |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117230425A (en)* | 2023-09-15 | 2023-12-15 | 深圳金美新材料科技有限公司 | Coating baffle and winding coating device |
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