技术领域technical field
本发明涉及激光标刻技术领域，具体涉及一种在陶瓷表面进行紫外超快激光精密标刻的方法和系统。The invention relates to the technical field of laser marking, in particular to a method and system for performing ultrafast ultrafast laser precision marking on ceramic surfaces.
背景技术Background technique
陶瓷是以粘土为主要原料以及各种天然矿物经过粉碎混炼、成型和煅烧制得到的材料。陶瓷装饰与器物的用途、造型、社会审美取向等方面有着密切的联系。Ceramics are made of clay as the main raw material and various natural minerals through crushing, kneading, molding and calcination. Ceramic decoration is closely related to the use, shape, and social aesthetic orientation of utensils.
陶瓷装饰，是指利用具有美感的图文对陶瓷器进行艺术加工。传统的陶瓷装饰工艺复杂，效率低。而随着技术的进步，出现了激光标刻陶瓷工艺，典型的代表是基于CO2激光或者纳秒激光的标刻机，其原理是利用激光的热效应烧蚀掉物体最外层表面，留下印迹的技术。然而，对于陶瓷材料采用典型的激光标刻技术有一定难度，是因为陶瓷材料对激光的吸收很弱，会发生漫反射，甚至接近全反射，导致典型的激光很难在陶瓷表面直接打出永久痕迹，因此一般在标刻工艺中利用颜料、涂料或者染色纸作用在陶瓷材料表面位置，通过激光产生局部的高温，再和颜料实现热诱导效应来标刻。因此，在陶瓷上进行激光标刻，不光很难直接刻出永久精细的标记，而且由于纳秒激光热效应导致分辨率低，热影响区大，挂渣和裂纹比较严重，还会受限于颜料、涂料或者染色纸的质量、分辨率，均匀性甚至环保要求的限制，造成标刻质量差，良率低等问题。Ceramic decoration refers to the artistic processing of ceramics with pictures and texts with aesthetic feeling. The traditional ceramic decoration process is complex and inefficient. With the advancement of technology, there has been a laser marking ceramic process. The typical representative is a marking machine based on CO2 laser or nanosecond laser. The principle is to use the thermal effect of the laser to ablate the outermost surface of the object and leave a mark. However, it is difficult to use typical laser marking technology for ceramic materials, because ceramic materials absorb laser light very weakly, and diffuse reflection, or even close to total reflection, makes it difficult for typical lasers to directly mark permanent marks on the ceramic surface. Therefore, laser marking on ceramics is not only difficult to directly engrave permanent and fine marks, but also due to the thermal effect of nanosecond lasers, the resolution is low, the heat-affected zone is large, dross and cracks are serious, and it is also limited by the quality, resolution, uniformity and even environmental protection requirements of pigments, coatings or dyed paper, resulting in poor marking quality and low yield.
发明内容Contents of the invention
有鉴于此，为了克服现有技术的不足，本发明提供一种在陶瓷表面进行紫外超快激光精密标刻的方法和系统。该方法基于锁定的高重复频率、高能量单脉冲工作、单脉冲间能量一致性高的超快激光，无需对陶瓷材料表面处理即可实现加工一致性好的精密标刻。In view of this, in order to overcome the deficiencies of the prior art, the present invention provides a method and system for performing ultrafast ultrafast laser precision marking on ceramic surfaces. The method is based on an ultrafast laser with a locked high repetition rate, high-energy single-pulse operation, and high energy consistency between single pulses. It can achieve precise marking with good processing consistency without surface treatment of ceramic materials.
本发明提供的在陶瓷表面进行紫外超快激光精密标刻的方法，包括步骤：The method for carrying out ultraviolet ultrafast laser precision marking on ceramic surface provided by the present invention comprises steps:
1)将陶瓷置于工作台上；1) Place the ceramics on the workbench;
2)将激光器设于工作台的一侧；所述激光器为能够在高重复频率下发射高能量单脉冲且单脉冲能量一致性高的紫外超快激光器，所述高重复频率为 10KHz-200KHz，所述高能量单脉冲能量为50uJ-1000uJ,所述单脉冲间能量差异≤±5％；2) The laser is set on one side of the workbench; the laser is an ultraviolet ultrafast laser capable of emitting a high-energy single pulse at a high repetition rate and has a high consistency of single pulse energy, the high repetition rate is 10KHz-200KHz, the energy of the high-energy single pulse is 50uJ-1000uJ, and the energy difference between the single pulses is ≤±5%;
3)锁定发射频率为10KHz-200KHz之间的一定值；3) Lock the transmission frequency to a certain value between 10KHz-200KHz;
4)所述激光器发射的超快激光，经过整形光路放大光束尺寸、再经过光束传输光路输入到振镜、再经过场镜后聚焦在工作台上的陶瓷工件表面；4) The ultra-fast laser emitted by the laser is amplified by the beam shaping optical path, then input to the vibrating mirror through the beam transmission optical path, and then focused on the surface of the ceramic workpiece on the workbench after passing through the field mirror;
5)在软硬件控制器的控制下，设置激光参数和加工参数，控制激光束X、Y、 Z轴的移动，完成陶瓷表面图案的激光标刻。5) Under the control of the software and hardware controller, set the laser parameters and processing parameters, control the movement of the laser beam in the X, Y, and Z axes, and complete the laser marking of the ceramic surface pattern.
进一步，所述经过光束传输光路的激光经光隔离器后输入到振镜。Further, the laser light passing through the beam transmission optical path is input to the vibrating mirror after passing through the optical isolator.
进一步，所述单脉冲为单脉冲光子尖峰波，所述单脉冲宽度为1-15ps。Further, the single pulse is a single pulse photon spike wave, and the width of the single pulse is 1-15 ps.
进一步，所述激光器为全固态皮秒激光器，所述激光波长为355±5nm。Further, the laser is an all-solid-state picosecond laser, and the laser wavelength is 355±5nm.
进一步，所述激光器窗口光斑为1-3mm，发散角为0.5-1.5mrad。Further, the laser window has a spot size of 1-3 mm and a divergence angle of 0.5-1.5 mrad.
进一步，所述整形光路为放大倍率为1-8倍的扩束光路，所述光束传输光路为传输距离100-1000mm的传输光路组成。Further, the shaping optical path is a beam expanding optical path with a magnification of 1-8 times, and the beam transmission optical path is composed of a transmission optical path with a transmission distance of 100-1000mm.
进一步，所述振镜转速为100-10000转/秒。Further, the rotation speed of the galvanometer is 100-10000 revolutions/second.
进一步，所述场镜是F-θ场镜或远心场镜，焦距为30-300mm。Further, the field lens is an F-θ field lens or a telecentric field lens with a focal length of 30-300mm.
进一步，形成所述标刻图案微型结构的最小分辨率特征尺寸为0.5-25um。Further, the minimum resolution feature size of the microstructure forming the marking pattern is 0.5-25um.
本发明还提供实现上述紫外超快激光精密标刻方法的标刻系统，所述系统包括工作台、激光器光路系统和控制器；The present invention also provides a marking system for realizing the above ultraviolet ultrafast laser precision marking method, the system includes a workbench, a laser optical path system and a controller;
其中，所述工作台上设有陶瓷抓握旋转机构，所述工作台的一侧设有激光器光路系统和控制器，所述控制器分别与所述激光器光路系统、陶瓷抓握旋转机构连接；Wherein, the workbench is provided with a ceramic grasping and rotating mechanism, and one side of the workbench is provided with a laser optical path system and a controller, and the controller is respectively connected with the laser optical path system and the ceramic grasping and rotating mechanism;
激光器通过数据线与安装有激光标刻系统软件的计算机控制器相连，计算机控制器将控制的激光功率、扫描速度及重复频率信号输入到激光器，并接收激光器的脉冲同步信号，同时控制激光器光路系统和所述陶瓷旋转机构完成陶瓷工件的激光标刻。The laser is connected to the computer controller installed with the laser marking system software through the data line. The computer controller inputs the controlled laser power, scanning speed and repetition frequency signals to the laser, and receives the pulse synchronization signal of the laser, and simultaneously controls the laser optical path system and the ceramic rotating mechanism to complete the laser marking of the ceramic workpiece.
所述激光器光路系统包括装有激光器的承载柜和装载光路的四轴机器人，所述四轴机器人手臂底端设有激光标刻头。The laser optical path system includes a carrying cabinet equipped with a laser and a four-axis robot for loading the optical path. The bottom end of the four-axis robot arm is provided with a laser marking head.
所述激光标刻头旁边设置有位置传感器。A position sensor is arranged beside the laser marking head.
所述激光标刻头旁边还设置有CCD视觉系统。A CCD vision system is also arranged beside the laser marking head.
所述光束传输光路与振镜之间设置光隔离器，隔离反射激光。An optical isolator is arranged between the beam transmission optical path and the vibrating mirror to isolate the reflected laser light.
本发明所述锁频均匀能量单脉冲是指超快激光工作方式为锁定频率下均匀能量单脉冲周期性输出。The frequency-locked uniform energy single pulse in the present invention means that the ultrafast laser works in a periodic output of uniform energy single pulse at a locked frequency.
本发明的有益效果在于：The beneficial effects of the present invention are:
本发明基于锁定的高重复频率、单脉冲工作、高单脉冲能量、单脉冲能量一致性高的超快激光标刻的方法，能够直接对陶瓷表面进行标刻：The present invention is based on an ultrafast laser marking method with locked high repetition frequency, single pulse work, high single pulse energy, and high consistency of single pulse energy, which can directly mark the ceramic surface:
1.该方法陶瓷激光标刻机光子单脉冲能量高，均匀性好，无须调节光子脉冲宽度，在时域上表现唯一，分辨率高。1. This method has high photon single pulse energy and good uniformity. It does not need to adjust the photon pulse width. It has unique performance in the time domain and high resolution.
2.该方法聚焦超精细，均匀光叠加，在加工过程中对陶瓷材料表面形成的颗粒能够达到纳米尺寸级别，提高了标刻精度。2. This method focuses ultra-finely and uniformly superimposes light, and the particles formed on the surface of the ceramic material during processing can reach the nanometer size level, which improves the marking accuracy.
3.该方法不是通过热致熔化材料，而是通过直接汽化材料来实现标刻。材料的晶格和分子之间，还没来得及传热就已经被去除，几乎无挂渣，无裂纹，无热影响区。3. This method does not achieve marking by thermally melting the material, but by directly vaporizing the material. The lattice and molecules of the material have been removed before heat transfer occurs, so there is almost no dross, no cracks, and no heat-affected zone.
4.该方法标刻的效果具有永久性，不会因触摸、高低温、酸碱性等环境关系而消退。4. The marking effect of this method is permanent and will not fade away due to environmental relations such as touch, high and low temperature, acidity and alkalinity.
5.该方法标刻效果是激光和材料表面直接作用成型，无需辅助物料、颜料、涂料或者染色纸等耗材和辅料，标刻效果质量好、分辨率高，均匀性高，满足节能环保的要求，良率高。5. The marking effect of this method is that the laser and the surface of the material are formed directly, without auxiliary materials, pigments, paints, dyed paper and other consumables and auxiliary materials. The marking effect is of good quality, high resolution, and high uniformity, meeting the requirements of energy saving and environmental protection, and the yield rate is high.
附图说明：Description of drawings:
图1为本发明在陶瓷表面进行紫外超快激光精密标刻方法的原理示意图；Fig. 1 is the schematic diagram of the principle of the ultraviolet ultrafast laser precision marking method on the ceramic surface of the present invention;
图2为实现本发明方法的标刻系统结构示意图；Fig. 2 is a schematic structural diagram of a marking system for realizing the method of the present invention;
图3为本发明方法在陶瓷表面标刻的效果照片；Fig. 3 is the photo of the effect of marking on the ceramic surface by the method of the present invention;
其中：1.紫外超快激光器；2.光路；2-1.整形光路；2-2.光束传输光路；3. 振镜；4.场镜；5.陶瓷标刻工件6.工位，7.控制器，8.反射镜，9.工作台，10. 激光光路系统，11.位置传感器，12.支撑台，13.光隔离器，14.激光标刻头，15.CCD 视觉系统，16.四轴机器人手臂，17.四轴机器人，18.激光器承载柜，19.左伸缩臂，20.右伸缩臂，21.滑块，22.驱动机构，23.滑轨，24.抓握旋转机构。Among them: 1. Ultrafast ultraviolet laser; 2. Optical path; 2-1. Shaping optical path; 2-2. Beam transmission optical path; 3. Vibrating mirror; 4. Field mirror; 17. Four-axis robot, 18. Laser loader cabinet, 19. Left telescopic arm, 20. Right telescopic arm, 21. Slider, 22. Driving mechanism, 23. Slide rail, 24. Grab and rotate mechanism.
具体实施方式Detailed ways
下面结合附图和具体实施例对本发明提供的用于陶瓷的锁频单脉冲紫外超快激光精密标刻方法和系统进一步解释而本发明并不局限于以下实施例。The frequency-locked single-pulse ultraviolet ultrafast laser precision marking method and system for ceramics provided by the present invention will be further explained in conjunction with the accompanying drawings and specific embodiments, but the present invention is not limited to the following embodiments.
本发明用于陶瓷的锁频单脉冲紫外超快激光精密标刻方法，包括步骤：The present invention is used for frequency-locked single-pulse ultraviolet ultrafast laser precision marking method for ceramics, comprising steps:
1)将陶瓷5置于工作台9上；2)将激光器1设于工作台9的一侧；所述激光器1为能够在高重复频率下发射高能量单脉冲且单脉冲能量一致性高的紫外超快激光器，所述高重复频率为10KHz-200KHz，所述高能量单脉冲能量为 50uJ-1000uJ，,所述单脉冲间能量差异≤±5％；1) placing the ceramic 5 on the workbench 9; 2) setting the laser 1 on one side of the workbench 9; the laser 1 is an ultraviolet ultrafast laser capable of emitting a high-energy single pulse at a high repetition rate and having high consistency of single pulse energy, the high repetition rate is 10KHz-200KHz, the energy of the high-energy single pulse is 50uJ-1000uJ, and the energy difference between the single pulses is ≤ ± 5%;
3)锁定发射频率为10KHz-200KHz之间的一定值；3) Lock the transmission frequency to a certain value between 10KHz-200KHz;
4)所述激光器发射的超快激光，经过整形光路2-1放大光束尺寸、再经过光束传输光路2-2输入到振镜3、再经过场镜4后聚焦在工作台9上的陶瓷工件 5表面；4) The ultra-fast laser emitted by the laser is magnified the beam size through the shaping optical path 2-1, then input to the vibrating mirror 3 through the beam transmission optical path 2-2, and then focused on the surface of the ceramic workpiece 5 on the workbench 9 after passing through the field lens 4;
5)在软硬件控制器7的控制下，设置激光参数和加工参数，控制激光束X、 Y、Z轴的移动，完成陶瓷5表面图案的激光标刻。5) Under the control of the software and hardware controller 7, set the laser parameters and processing parameters, control the X, Y, and Z axis movement of the laser beam, and complete the laser marking of the surface pattern of the ceramic 5 .
所述整形光路2-1、光束传输光路2-2和反射镜8构成光路2，经过光路2 的激光经光隔离器13后输入到振镜3。本发明工作原理示意图如图1所示。The shaping optical path 2 - 1 , the beam transmission optical path 2 - 2 and the reflector 8 constitute the optical path 2 , and the laser light passing through the optical path 2 is input to the vibrating mirror 3 after passing through the optical isolator 13 . A schematic diagram of the working principle of the present invention is shown in FIG. 1 .
步骤5)包括以下步骤：Step 5) comprises the following steps:
1.设定激光发射参数及电平形式的激光脉冲同步信号，将所述激光脉冲同步信号和起始时间T1发送给软硬件控制器7，作为加工基准时间；1. Set the laser emission parameters and the laser pulse synchronization signal in the form of level, and send the laser pulse synchronization signal and the start time T1 to the software and hardware controller 7 as the processing reference time;
2.调试激光光束：光束经整形光路2-1、光闸和光束传输2-2，所述光闸由 TTL电平控制；所述软硬件控制器7向光闸发送控制其开关的信号以及起始时间 T2；2. Debug the laser beam: the beam passes through the shaping optical path 2-1, the optical gate and the beam transmission 2-2, and the optical gate is controlled by TTL level; the software and hardware controller 7 sends a signal to control its switch and the starting time T2 to the optical gate;
3.调试振镜：所述软硬件控制器7将振镜的5V高低电平形式的控制信号以及起始时间T3，发送给振镜3，3. Debugging the vibrating mirror: the software and hardware controller 7 sends the control signal of the 5V high and low level form of the vibrating mirror and the start time T3 to the vibrating mirror 3,
4.调试激光光束，经场镜4聚焦在工作台9附近，在场镜有效范围内工作。4. Debug the laser beam, focus it near the workbench 9 through the field mirror 4, and work within the effective range of the field mirror.
5.通过软硬件控制器7将准备标刻的内容分解，得到可读格式的像素、直径、填充密度，走线路径和图形，其边界范围以不大于所述激光标刻机的区域边界为限。5. The content to be marked is decomposed by the software and hardware controller 7 to obtain the pixels, diameter, filling density, wiring path and graphics in a readable format, and the boundary range is limited to be no larger than the area boundary of the laser marking machine.
6.根据切片图形内容和次序，以激光同步信号输入给软硬件控制器7作为时间基准，校准工作台的坐标为空间基准，经软硬件控制器7依次给振镜3、光闸、驱动机构发射控制信号，时间基准，延时时间和控制信号时序，进行整体时序校准以及初步打样。6. According to the content and order of the slicing graphics, the laser synchronous signal is input to the software and hardware controller 7 as the time reference, and the coordinates of the calibration workbench are used as the space reference. The software and hardware controller 7 sends control signals, time reference, delay time and control signal timing to the vibrating mirror 3, the shutter, and the driving mechanism in turn, and performs overall timing calibration and preliminary proofing.
7.根据初步打样效果，验证其与预设的效果符合程度，如果有差异，微调各个部件的工艺和参数，直到效果最佳，锁定参数，开始标刻。7. According to the preliminary proofing effect, verify its conformity with the preset effect. If there is a difference, fine-tune the process and parameters of each component until the effect is the best, lock the parameters, and start marking.
本发明的步骤(2)优选地，所述激光器的发射频率为50KHz-200KHz之间的一定值,所述激光器发射的单脉冲能量为50uJ-800uJ，更优选地，所述激光器的发射频率为100KHz-200KHz之间的一定值,所述激光器发射的单脉冲能量为8、 300uJ-800uJ。Step (2) of the present invention Preferably, the emission frequency of the laser is a certain value between 50KHz-200KHz, the single pulse energy emitted by the laser is 50uJ-800uJ, more preferably, the emission frequency of the laser is a certain value between 100KHz-200KHz, and the single pulse energy emitted by the laser is 8, 300uJ-800uJ.
作为本发明的一个实施方案，所述光束传输光路2-2的传输距离为 100-1000mm；优选为100-800mm；更优选为500-800mm。As an embodiment of the present invention, the transmission distance of the beam transmission optical path 2-2 is 100-1000mm; preferably 100-800mm; more preferably 500-800mm.
作为本发明的另一个实施方案，所述整形光路2-1为放大倍率为1-8倍的扩束光路；优选地，所述整形光路为放大倍率为2-6倍的扩束光路；更优选地，所述整形光路为放大倍率为5倍的扩束光路。As another embodiment of the present invention, the shaping optical path 2-1 is a beam expanding optical path with a magnification of 1-8 times; preferably, the shaping optical path is a beam expanding optical path with a magnification of 2-6 times; more preferably, the shaping optical path is a beam expanding optical path with a magnification of 5 times.
作为本发明的再一个实施方案，所述振镜的转速为100-10000转/秒；优选地，振镜的转速为400-5000转/秒；更优选地，振镜的转速为500-1000转/秒。As another embodiment of the present invention, the rotating speed of the vibrating mirror is 100-10000 rpm; preferably, the rotating speed of the vibrating mirror is 400-5000 rpm; more preferably, the rotating speed of the vibrating mirror is 500-1000 rpm.
作为本发明的又一个实施方案，所述场镜为F-θ场镜或远心场镜4，焦距为30-300mm；优选地，所述场镜为F-θ场镜或远心场镜，焦距为100-300mm；更优选地，所述场镜为F-θ场镜或远心场镜，焦距为150-250mm。As yet another embodiment of the present invention, the field lens is an F-θ field lens or a telecentric field lens 4 with a focal length of 30-300mm; preferably, the field lens is an F-θ field lens or a telecentric field lens with a focal length of 100-300mm; more preferably, the field lens is an F-θ field lens or a telecentric field lens with a focal length of 150-250mm.
本发明还提供实现上述紫外超快激光精密标刻方法的标刻系统，其特征在于，所述系统包括工作台9、激光器光路系统10和控制器7；The present invention also provides a marking system for realizing the above ultraviolet ultrafast laser precision marking method, which is characterized in that the system includes a workbench 9, a laser optical path system 10 and a controller 7;
其中，所述工作台9上设有陶瓷抓握旋转机构24，所述工作台9的一侧设有激光器光路系统10和控制器7，所述控制器7分别与所述激光器光路系统10、陶瓷抓握旋转机构24连接；Wherein, the workbench 9 is provided with a ceramic grasping and rotating mechanism 24, and one side of the workbench 9 is provided with a laser optical path system 10 and a controller 7, and the controller 7 is respectively connected with the laser optical path system 10 and the ceramic grasping and rotating mechanism 24;
激光器1通过数据线与安装有激光标刻系统软件的计算机控制器7相连，计算机控制器7将控制的激光功率、扫描速度及重复频率信号输入到激光器1，并接收激光器1的脉冲同步信号，同时控制激光器光路系统10、及所述陶瓷抓握旋转机构24完成标刻。The laser 1 is connected to the computer controller 7 equipped with the laser marking system software through the data line, and the computer controller 7 inputs the controlled laser power, scanning speed and repetition frequency signals to the laser 1, and receives the pulse synchronization signal of the laser 1, and simultaneously controls the laser optical path system 10 and the ceramic grasping and rotating mechanism 24 to complete the marking.
所述激光器光路系统10包括装有激光器1的承载柜18和装载光路2、3、4 的四轴机器人17，所述四轴机器人手臂16底端设有激光标刻头14。The laser optical path system 10 includes a loading cabinet 18 equipped with the laser 1 and a four-axis robot 17 for loading the optical paths 2 , 3 , 4 . The bottom end of the four-axis robot arm 16 is provided with a laser marking head 14 .
所述激光标刻头旁边设置有位置传感器11。A position sensor 11 is arranged beside the laser marking head.
所述激光标刻头旁边设置有CCD视觉系统15。A CCD vision system 15 is arranged beside the laser marking head.
所述整形光路2-1与光束传输光路2-2之间设置光闸。An optical gate is set between the shaping optical path 2-1 and the beam transmission optical path 2-2.
所述光束传输光路2-2与振镜3之间设置光隔离器13，隔离反射激光。An optical isolator 13 is arranged between the beam transmission optical path 2-2 and the vibrating mirror 3 to isolate the reflected laser light.
所述工作台上设有支撑台和工位12、6，用于支撑陶瓷工件5，陶瓷工件5 两侧设有抓握旋转机构24，以及左伸缩臂19、右伸缩臂20用于在标刻过程中准确调节陶瓷工件的标刻位置。所述工作台1两侧设置有滑轨23；滑轨23内设有滑块21，驱动机构22驱动滑块21沿滑轨23移动实现陶瓷工件沿工作台X轴的移动。The workbench is provided with a supporting platform and stations 12 and 6 for supporting the ceramic workpiece 5, and the two sides of the ceramic workpiece 5 are provided with a grasping and rotating mechanism 24, and the left telescopic arm 19 and the right telescopic arm 20 are used to accurately adjust the marking position of the ceramic workpiece during the marking process. Slide rails 23 are provided on both sides of the workbench 1; slide rails 23 are provided with sliders 21, and the drive mechanism 22 drives the slider 21 to move along the slide rails 23 to realize the movement of the ceramic workpiece along the X-axis of the workbench.
本发明标刻系统结构示意图如图2所示。The structural schematic diagram of the marking system of the present invention is shown in FIG. 2 .
实施例1：陶瓷表面“二维码”图案的精密标刻Example 1: Precise marking of "two-dimensional code" pattern on ceramic surface
将激光器通过数据线与安装有激光标刻系统软件的计算机相连，计算机将控制的激光功率，扫描速度，重复频率等信号输入到激光器，激光器为全固态皮秒激光器。控制器接收激光器的脉冲同步信号，同时控制激光器光路系统10、及所述陶瓷抓握旋转机构24完成标刻。The laser is connected to the computer installed with the laser marking system software through the data line, and the computer inputs the controlled laser power, scanning speed, repetition frequency and other signals to the laser, and the laser is an all-solid-state picosecond laser. The controller receives the pulse synchronization signal of the laser, and at the same time controls the laser optical system 10 and the ceramic gripping and rotating mechanism 24 to complete marking.
锁定激光器的发射频率为100KHz,单脉冲能量为200uJ；The emission frequency of the locking laser is 100KHz, and the single pulse energy is 200uJ;
单脉冲为单脉冲光子尖峰波，单脉冲宽度为10ps。The single pulse is a single pulse photon spike wave, and the single pulse width is 10ps.
激光波长为355±5nm。Laser wavelength is 355±5nm.
激光器窗口光斑为1mm，发散角为1mrad。The laser window spot is 1mm, and the divergence angle is 1mrad.
整形光路为放大倍率为6倍的扩束光路，光束传输光路为传输距离1000mm 的传输光路组成。The shaping optical path is a beam expanding optical path with a magnification of 6 times, and the beam transmission optical path is composed of a transmission optical path with a transmission distance of 1000mm.
振镜转速为5000转/秒。The rotating speed of the galvanometer is 5000 rpm.
场镜是F-θ场镜，焦距为100mm。The field lens is an F-theta field lens with a focal length of 100mm.
形成所述标刻图案微型结构的最小分辨率特征尺寸为15um。The minimum resolution feature size of the microstructure forming the marking pattern is 15um.
使用上述激光器进行标刻：Marking with the above lasers:
(1)将要标刻的图像导入到计算机中；(1) Import the image to be marked into the computer;
(2)通过安装于计算机的激光标刻系统软件读取待标刻图像，设置激光输出功率、激光器重复频率和振镜工作频率；(2) Read the image to be marked through the laser marking system software installed on the computer, and set the laser output power, laser repetition rate and galvanometer working frequency;
打开激光器，激光运动控制系统根据计算机输出的图像信号进行扫描，高能量的激光束透过陶瓷在工作面上进行激光标刻。Turn on the laser, the laser motion control system scans according to the image signal output by the computer, and the high-energy laser beam passes through the ceramic to perform laser marking on the working surface.
标刻效果如图3所示。The marking effect is shown in Figure 3.
以上实施例仅用以说明本发明的技术方案而非对其限制，尽管参照上述实施例对本发明进行了详细的说明，所属领域的普通技术人员依然可以对本发明的具体实施方式进行修改或者等同替换，而这些未脱离本发明精神和范围的任何修改或者等同替换，其均在申请待批的本发明的权利要求保护范围之内。The above embodiments are only used to illustrate the technical solutions of the present invention and not to limit them. Although the present invention has been described in detail with reference to the above embodiments, those of ordinary skill in the art can still modify or equivalently replace the specific embodiments of the present invention. Any modification or equivalent replacement that does not depart from the spirit and scope of the present invention is within the protection scope of the claims of the pending application.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210032857.6ACN116460446A (en) | 2022-01-12 | 2022-01-12 | Method and system for ultrafast ultrafast laser precision marking on ceramic surface |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210032857.6ACN116460446A (en) | 2022-01-12 | 2022-01-12 | Method and system for ultrafast ultrafast laser precision marking on ceramic surface |
| Publication Number | Publication Date |
|---|---|
| CN116460446Atrue CN116460446A (en) | 2023-07-21 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210032857.6APendingCN116460446A (en) | 2022-01-12 | 2022-01-12 | Method and system for ultrafast ultrafast laser precision marking on ceramic surface |
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