Detailed Description
The conception and technical effects of the present embodiment will be clearly and completely described below with reference to examples to fully understand the objects, features and effects of the present embodiment. It is obvious that the described examples are only some, but not all, examples of the present embodiment, and that other examples, which are obtained by a person skilled in the art without the inventive effort, are within the scope of protection of the present embodiment based on the examples of the present embodiment.
In the description of the embodiment example, if an orientation description such as "upper", "lower", "front", "rear", "left", "right", etc. is referred to, the orientation or positional relationship indicated based on the drawings is merely for convenience of description of the embodiment and simplification of the description, and does not indicate or imply that the apparatus or element referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the embodiment.
In the description of the embodiment, if a feature is referred to as being "disposed", "fixed", "connected" or "mounted" on another feature, it can be directly disposed, fixed or connected to the other feature or be indirectly disposed, fixed or connected or mounted on the other feature. In the description of the embodiment, if "several" is referred to, it means one or more, if "plural" is referred to, it means two or more, if "greater than", "less than", "exceeding" is referred to, it is to be understood that the number is not included, and if "above", "below", "within" is referred to, it is to be understood that the number is included. If reference is made to "first", "second" it is to be understood as being used for distinguishing technical features and not as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.
The vacuum suction system for electronic components according to the present embodiment includes a vacuum generating section 100, a plurality of buffer devices 200, and a plurality of vacuum chucks 300.
The vacuum generator 100 includes a first base 101, a plurality of vacuum generators 121, and a plurality of adjusting switches 102, wherein each of the vacuum generators 121 is accommodated in the first base 101 and is individually blocked or opened by the adjusting switch 102.
Each buffer device 200 has a cylindrical second base 201 and a slide rod 203. One axial end of the slide rod 203 is accommodated in the second base 201 and is slidable in the axial direction with respect to the second base 201. The second base 201 and the slide bar 203 together form a gas path channel 221. Each second base 201 corresponds to each vacuum generator 121 one by one and is connected by an air pipe 222.
Wherein each vacuum chuck 300 corresponds to each buffer device 200 one by one. Each vacuum chuck 300 has a third base 301 and a suction member 302 provided on the third base 301. The third base 301 is mounted to the other end of the slide rod 203 in the axial direction and communicates with the air passage 221. The material of the adsorbing member 302 is a sponge material with shore hardness a below 40 degrees, and the thickness of the adsorbing member 302 is above 5mm under the condition of no compression.
According to the vacuum adsorption system for electronic components of the present embodiment, different assembly processes of electronic components can be easily compatible. Specifically, in the vacuum generating section 100, the vacuum generators 121 are mounted in the first base 101, and the vacuum generators 121 are individually blocked or opened by the adjustment switch 102, so that the on/off of each vacuum generator 121 can be individually controlled. By providing a plurality of vacuum chucks 300, it is possible to adsorb a plurality of electronic components such as chips and the like and transfer them simultaneously to, for example, a circuit board. In addition, when the electronic component needs to be adapted to a different circuit board, for example, a part of the circuit board does not need to be mounted, the vacuum chuck 300 corresponding to the position of the circuit board only needs to be blocked by the adjusting switch 102, so that the vacuum adsorption system of the embodiment can be easily compatible with different assembly processes of the electronic component.
Further, by attaching the air tube 222 to which the vacuum generator 121 and the damper 200 are connected to the second base 201 of the damper 200, since the second base 201 does not need to slide, bending or winding of the air tube 222 along with sliding of the slide rod 203 can be suppressed, and even in the case where a plurality of vacuum chucks 300 and a plurality of dampers 200 are present, bending or winding of the air tube 222 can be suppressed.
Further, since the vacuum chuck 300 uses a sponge material having a shore a hardness of 40 degrees or less as the suction member 302, the force applied when the vacuum chuck 300 abuts against an electronic component such as a chip, a wafer, or the like can be suppressed at least to some extent, and the risk of crushing the electronic component by the vacuum chuck 300 can be reduced.
Hereinafter, each component of the vacuum adsorption system according to the present embodiment will be described in detail.
[ Vacuum generating portion 100]
Fig. 2 and 3 are perspective views of the vacuum generating section 100, fig. 4 and 5 are perspective views of the first base 101, and fig. 6 is a cross-sectional view at A-A in fig. 2. In fig. 2 to 6, schematic diagrams in directions are given for convenience of explanation.
Referring to fig. 2 to 6, and with additional reference to fig. 1, as described above for the vacuum generating section 100, the vacuum generating section 100 includes a first base 101, a plurality of vacuum generators 121, and a plurality of adjustment switches 102, each vacuum generator 121 being housed within the first base 101. Specifically, referring to fig. 2 to 6, the vacuum generating part 100 includes a first base 101 and a plurality of adjustment switches 102. The first base 101 is provided with a first hole 103, a plurality of second holes 104, a plurality of third holes 105, and a plurality of fourth holes 106. Wherein, in the first base 101, the first hole 103 is used for connecting with an external high-pressure air supply 107. Each of the second hole portions 104 is for accommodating a vacuum generator 121. Each third hole 105 communicates each second hole 104 with each first hole 103. Each fourth hole 106 communicates with a gas passage 221 (see fig. 8 for assistance) of the buffer 200. The fourth hole portions 106 are respectively connected to the second hole portions 104, and in a state where the vacuum generators 121 are accommodated in the second hole portions 104, the fourth hole portions 106 are respectively opposed to the suction ends 124 of the vacuum generators 121. Each of the adjustment switches 102 is provided with a first end 108 accommodated in the third hole 105, and the first end 108 is movable in the axial direction of the third hole 105 to close or open the space between the first hole 103 and the second hole 104.
With continued reference to fig. 6, the vacuum generator 121 of the present embodiment may be, for example, a cylindrical vacuum generator 121, wherein one axial end of the vacuum generator 121 is provided with an air inlet end 122, the other axial end is provided with an air outlet end 123, and the suction end 124 is provided between the air outlet end 123 and the air inlet end 122. In addition, the outlet port 123 may be connected to a muffler (not shown). When the vacuum generator 121 is accommodated in the second hole 104, the air inlet 122 of one end of the vacuum generator 121 in the axial direction is positioned on the side of the second hole 104 adjacent to the first hole 103, the air outlet 123 of the other end of the vacuum generator 121 in the axial direction is positioned on the outer side (left side in the drawing) of the second hole 104 toward the first base 101, and the suction end 124 is opposed to and communicates with the fourth hole 106. Further, the outer circumference of the vacuum generator 121 may be fitted with, for example, two first seal rings 125, and the two first seal rings 125 are fitted on both sides of the suction end 124, for example, in the axial direction, respectively, whereby the sealing performance between the suction end 124 and the first base 101 of the vacuum generator 121 can be improved.
With continued reference to fig. 4 and 5 and with additional reference to fig. 2 and 3, the first base 101 is, for example, a rectangular parallelepiped block. In order to reasonably arrange the structures of the hole portions, in some embodiments, the first hole portion 103 extends in a first direction (front-rear direction in the drawing), which is parallel to the length direction of the first base 101. In order to facilitate the processing of the first hole 103, the first hole 103 may directly penetrate the first base 101 in the first direction. The specific opening position of the first hole 103 in the first base 101 is not particularly limited, and may be, for example, opened in the lower right of the first base 101. A first plug (not shown) may be attached to one axial end of the first hole 103, and a first air pipe joint 109 for attaching the air pipe 222 may be attached to the other axial end of the first hole 103.
With continued reference to fig. 4, and with additional reference to fig. 2, in order to easily layout the second hole 104, the second hole 104 extends in a second direction (left-right direction in the drawing) that is parallel to the width direction of the first base 101 and orthogonal to the first direction. The second hole 104 may extend from a left side of the first base 101 near the upper portion toward the right side of the first base 101, for example. Further, the second hole 104 may not penetrate the first base 101. The number of the second hole portions 104 is not particularly limited, and may be determined according to the number of the vacuum generators 121 to be mounted. For example, the number of second hole portions 104 may include 6 to 8. The second hole portions 104 may be uniformly spaced apart in the first direction of the first base 101. One end of the second hole portion 104 located at the left side of the first base 101 may be used for exhausting the air outlet end 123 of the vacuum generator 121. In the case where the first base 101 is provided with the gas outlet 110 (described later) for exhausting the vacuum generator 121, and the second hole 104 may be sealed, for example, one end of the second hole 104 located on the left side of the first base 101 may be sealed by the second plug 111.
With continued reference to fig. 6, the third hole 105 is appropriately opened according to the positions of the first hole 103 and the second holes 104. The third hole portion 105 may extend, for example, in a third direction (up-down direction in the drawing) that is parallel to the height direction of the first base 101 and orthogonal to the first direction and the second direction, respectively. In order to easily communicate the second hole 104 and the first hole 103, the third hole 105 is opened from a position near the right side of the upper surface of the first base 101. The diameter and depth of the third hole 105 are not particularly limited, and, for example, one end in the axial direction of the third hole 105 penetrates the wall of the first hole 103 and communicates with the first hole 103. Further, one end in the axial direction of the second hole 104 penetrates the wall of the third hole 105 and communicates with the third hole 105. That is, the third hole 105 may extend downward to a depth that can penetrate the wall of the first hole 103. The depth of the second hole 104 extending in the right direction may be so long as it can penetrate the wall of the third hole 105. Thus, the lower end portion in the axial direction of the third hole 105 communicates with the first hole 103, and the right end portion in the axial direction of the second hole 104 communicates with the third hole 105 at the wall portion of the third hole 105. By communicating the lower end portion of the third hole portion 105 with the first hole portion 103 and communicating the wall portion of the third hole portion 105 with the right end portion of the second hole portion 104, it is possible to easily realize the closing or opening of the lower end portion of the third hole portion 105 and/or the right end portion of the second hole portion 104 by the adjustment switch 102, thereby easily realizing the closing or opening between the first hole portion 103 and the third hole portion 105.
With continued reference to fig. 6 and with additional reference to fig. 2 and 3, the fourth aperture 106 may extend in a third direction, for example. Specifically, the fourth hole 106 may be appropriately provided according to the position of the suction hole of the suction end 124 of the vacuum generator 121. In order to easily attach the second air pipe joint 112 to which the air pipe 222 is connected, the fourth hole 106 may be opened in a downward direction from a substantially middle portion in a left-right direction of the upper surface of the first base 101, for example. The fourth hole 106 may be a screw hole, for example.
With continued reference to fig. 6 and with additional reference to fig. 2-5, in some embodiments, in order to facilitate the evacuation of the vacuum generator 121, the first base 101 may further be provided with a plurality of air outlet portions 110, where each air outlet portion 110 communicates with each second hole 104, and, in a state in which the vacuum generator 121 is accommodated in the second hole 104, each air outlet portion 110 communicates with an air outlet end 123 of each vacuum generator 121. Specifically, in some embodiments, the air outlet 110 includes a plurality of air outlet holes 113, each air outlet hole 113 being in communication with a corresponding second hole 104 of the air outlet 110. The air outlet hole 113 may be opened at the upper surface of the first base 101 and opposite to the air outlet end 123 of the vacuum generator 121, thereby enabling easy air discharge of the vacuum generator 121. By providing the air outlet 110, the left end of the second hole 104 can be blocked by the second plug 111, thereby preventing the vacuum generator 121 from being exposed to the outside.
With continued reference to fig. 6, as described above, each of the adjustment switches 102 is provided with the first end portion 108 accommodated in the third hole portion 105, and the first end portion 108 is movable in the axial direction of the third hole portion 105 to close or open between the first hole portion 103 and the second hole portion 104. Specifically, the adjustment switch 102 further includes, for example, a knob portion 114 exposed outside the first base 101, and the knob portion 114 and the first end portion 108 are integrally formed. By rotating or pushing the knob portion 114, the first end portion 108 can be fed into the third hole portion 105.
In some embodiments, in order to easily and reliably disconnect the first hole 103 from the second hole 104 corresponding to the adjustment switch 102, a distal end (lower end in the drawing) of the first end 108 is provided with a tapered portion 115, and the tapered portion 115 may abut against a position where a wall portion of the first hole 103 communicates with the third hole 105. By providing the tapered portion 115, the adjustment switch 102 can be adaptively adjusted according to the lower end portion of the third hole portion 105, and the position where the lower end portion of the third hole portion 105 communicates with the wall portion of the first hole portion 103 can be reliably blocked.
Further, in some embodiments, at least a portion of the wall of the third bore portion 105 is provided with a first internal thread 116, and the first end portion 108 is provided with a first external thread 117 that threads with the first internal thread 116. Specifically, by providing the first female screw 116 and the first male screw 117, the first end 108 can be easily fed into the third hole 105 by rotating the knob 114 of the adjustment switch 102, and when the vacuum generator 121 needs to be turned on or off, only the knob 114 of the adjustment switch 102 needs to be rotated. The first female screw 116 may be provided at the lower end portion of the third hole 105, for example, and the first male screw 117 may be provided at the lower end portion of the first end portion 108. Thus, the first female screw 116 can seal the position where the lower end of the third hole 105 and the wall of the first hole 103 communicate with each other, as well as the screw for feeding the first end 108 of the adjustment switch 102. That is, by double-sealing by screwing the tapered portion 115 and the first female screw 116 and the first male screw 117, the reliability of the position of the first end portion 108 of the adjustment switch 102 to close the lower end portion of the third hole portion 105 can be greatly improved.
In some embodiments, in order to limit the feeding travel of the adjusting switch 102 and prevent the adjusting switch 102 from falling off, the first base 101 is further provided with a plurality of fifth holes 118, and each fifth hole 118 is respectively communicated with each third hole 105. Each fifth hole 118 accommodates a stopper 119 therein, and an end (left end) of the stopper 119 extends into the third hole 105 to restrict a stroke of the adjustment switch 102 in the third hole 105 in a direction to open between the first hole 103 and the second hole 104. Specifically, the fifth hole 118 is formed in the right surface of the first base 101, for example, and the position of the fifth hole 118 is appropriately determined according to the position of the third hole 105. The fifth hole 118 may be a screw hole, for example, and the restricting member 119 may be a screw member, for example. In the present embodiment, the direction of the adjustment switch 102 in which the first hole 103 and the second hole 104 open is referred to as the upward direction. That is, in the present embodiment, when the first end 108 of the adjustment switch 102 is fed in the downward direction, the first hole 103 and the second hole 104 are blocked by blocking the lower end of the third hole 105. When the first end 108 of the adjustment switch 102 is fed in the upward direction, the lower end of the third hole 105 is opened, so that the first hole 103 and the second hole 104 communicate with each other.
Further, in some embodiments, to limit the travel of the feed of the adjustment switch 102, the first end 108 of the adjustment switch 102 may be provided with an annular first slot 120, for example, with an end of the limiter 119 protruding into the first slot 120. Specifically, the diameter of the first groove 120 is smaller than the pitch diameter of the first external thread 117, for example, and after the first end 108 is inserted into the third hole 105 and the lower end of the first end 108 where the first external thread 117 is provided straddles the fifth hole 118, the position of the first groove 120 and the position of the fifth hole 118 are opposite to each other. Thereby, when the adjustment switch 102 is fed in the upward direction, the lower end portion of the first end portion 108 is restricted by the left end portion of the restriction piece 119, so that the stroke of the adjustment switch 102 in the upward direction can be restricted.
[ Buffer device 200]
Fig. 7 is a schematic diagram of a cushioning device 200. Fig. 8 is a cross-sectional view at B-B in fig. 7. Fig. 9 is a schematic view of another embodiment of a cushioning device 200. Fig. 10 is a schematic view of yet another embodiment of a cushioning device 200. Fig. 11 is a cross-sectional view at C-C in fig. 7.
Referring to fig. 7 to 11, each damper 200 has a cylindrical second base 201 and a slide rod 203, as described above. The second base 201 and the slide bar 203 together form a gas path channel 221. Specifically, the damper 200 includes a cylindrical second base 201, a third air pipe joint 202, a slide rod 203, and an elastic member 204. The air passage 221 includes a sixth hole portion 205 penetrating the second base 201 in the axial direction, and a seventh hole portion 206 penetrating the slide rod 203 in the axial direction, and the sixth hole portion 205 and the seventh hole portion 206 communicate. The third air tube fitting 202 is sealingly mounted to one axial end of the sixth bore portion 205. The third air pipe joint 202 is connected to the vacuum generator 121 through the fourth hole portion 106 of the first base 101 via the air pipe 222. At least a portion of the slide rod 203 is accommodated in the sixth hole portion 205 and is slidable in the axial direction with respect to the sixth hole portion 205. When the slide rod 203 slides in a direction away from the third air tube joint 202, a part of the slide rod 203 passes through the other end in the axial direction of the sixth hole portion 205 and is exposed outside the second base 201. One end of the elastic member 204 abuts against the slide rod 203 in a compressed state and the other end abuts against the second base 201.
In the damper device 200 of the present embodiment, the type of the third air pipe joint 202 is not particularly limited, and examples thereof include a straight joint, a male joint of a quick connector, and a female joint of a quick connector. In order to make the overall structure of the cushioning device 200 more compact and facilitate the insertion and extraction of the air tube 222, the third air tube connector 202 is preferably a male connector of a quick connector.
As the elastic member 204, for example, a known compression spring can be used. The mounting manner of the elastic member 204 is not particularly limited as long as one end thereof can abut against the slide rod 203 and the other end thereof can abut against the second base 201 in a compressed state. For example, the elastic member 204 may be disposed outside the second base 201 and fit over the sliding rod 203 with one end abutting the sliding rod 203 and the other end abutting the second base 201. The elastic member 204 may be accommodated in the sixth hole 205 (see fig. 8 to 10), and one end may abut against the slide rod 203 and the other end may abut against the second base 201.
With continued reference to fig. 8, in some embodiments, to communicate the third air fitting 202 and the seventh aperture 206 to enable the vacuum cup 300 to communicate through the sliding rod 203 and the air tube 222 and the vacuum generator 121, the third air fitting 202 and the seventh aperture 206 communicate through the sixth aperture 205. Specifically, for example, the slide rod 203 slides along the sixth hole 205, and one axial end of the seventh hole 206 is accommodated in the sixth hole 205, thereby communicating with the sixth hole 205. The sixth hole 205 is provided with a screw thread at one axial end thereof, and the third air tube joint 202 is directly screwed to the sixth hole 205 at one axial end thereof. In order to improve the sealability of the installation position of the third air tube connector 202, the third air tube connector 202 may be locked to one end of the sixth hole portion 205 in the axial direction by means of a sealant, a wrapping sealing tape, or the like. Thereby, sealability of the attachment position of third tracheal tube 202 can be achieved.
In addition, in order to achieve sealability between the sixth hole portion 205 and the sliding rod 203, a second seal ring 207 may be provided between the sixth hole portion 205 and the sliding rod 203. As the second seal ring 207, for example, an O-ring rubber seal ring or the like is cited. The second seal 207 may be fitted over the sliding rod 203. Thereby, the sealing property of the region between the sixth hole 205 and the seventh hole 206 communicating with the third air pipe joint 202 and the slide rod 203 can be achieved.
With continued reference to fig. 9, in some embodiments, in order to communicate the third tracheal joint 202 with the seventh hole 206, a first extending portion 209 extending in the axial direction may be provided at an end portion of the first mounting end 208 of the third tracheal joint 202, the first extending portion 209 being inserted into the seventh hole 206, and a third sealing ring 210 being provided between the first extending portion 209 and the seventh hole 206. Specifically, for example, the seventh hole portion 206 may be a circular hole. The outer periphery of the first extension 209 is also cylindrical. The third seal 210 may be, for example, an O-ring rubber seal or the like. The third seal ring 210 may be embedded in the seventh hole 206 or may be sleeved in the first extension 209. The first extension 209 is penetrated in the axial direction and communicates with the third air tube joint 202. Thereby, it is possible to achieve direct communication between the slide rod 203 and the third air tube joint 202 and to be insulated from the sixth hole portion 205. With this connection, the sixth hole 205 can be used only as a hole for guiding the slide rod 203. Since there is no need to provide a seal ring between the sixth hole 205 and the slide rod 203, the slide rod 203 can be prevented from swinging relative to the second base 201, and the sliding accuracy of the slide rod 203 relative to the sixth hole 205 can be improved.
With continued reference to fig. 10, in some embodiments, the cushioning device 200 may further include a mount 211 that is axially penetrated, the mount 211 being mounted to an axial end of the sixth bore portion 205, the third air tube fitting 202 being sealingly mounted to the mount 211. In addition, in order to improve the versatility of the parts and reduce the cost of the damper 200, the second mounting end 212 of the mounting seat 211 is provided with a second extending portion 213 extending in the axial direction, the second extending portion 213 is inserted into the seventh hole portion 206, and a third seal 214 is provided between the second extending portion 213 and the seventh hole portion 206. Specifically, since the third air tube connector 202 is generally a standard, providing the first extension portion 209 at one end of the third air tube connector 202 in order to achieve direct communication between the seventh hole portion 206 of the slide rod 203 and the third air tube connector 202 may increase the processing cost of the third air tube connector 202. Therefore, in the present embodiment, by providing the mount 211 and allowing the second extension portion 213 of the mount 211 to communicate with the slide rod 203 and the third air tube connector 202, it is possible to use the third air tube connector 202 commercially available while ensuring that the seventh hole portion 206 of the slide rod 203 and the third air tube connector 202 are isolated from the sixth hole portion 205. Therefore, the versatility of third air tube connector 202 can be improved, and the cost of damper device 200 can be reduced.
With continued reference to fig. 11, in some embodiments, in order to inhibit the sliding rod 203 from rotating relative to the second base 201, thereby improving the accuracy of the vacuum chuck 300 for adsorbing the electronic component, a limiting portion 215 is provided on the inner wall of the sixth hole 205, and a polygonal portion 216 is provided on a portion of the sliding rod 203 accommodated in the sixth hole 205, and the polygonal portion 216 is limited by the limiting portion 215 in the sixth hole 205 in the circumferential direction. Specifically, the restriction portion 215 may include a plurality of second groove portions 217 formed in the inner wall, the plurality of groove portions 217 being spaced apart from each other in the circumferential direction of the inner wall of the sixth hole portion 205, and each of the second groove portions 217 extending in the axial direction of the sixth hole portion 205. The corners 218 of the polygonal portion 216 are respectively received in the second groove portions 217 and are slidable along the second groove portions 217. By providing the second groove portion 217 as the restricting portion 215 on the inner wall of the sixth hole portion 205 and providing the polygonal portion 216 on the portion of the slide rod 203 accommodated in the sixth hole portion 205, the rotation of the polygonal portion 216 is restricted by the restricting portion 215, whereby the rotation of the slide rod 203 with respect to the second base 201 can be suppressed. When angular accuracy is required for the vacuum chuck 300 mounted to the slide rod 203, angular accuracy of assembly and/or operation of the vacuum chuck 300 can be improved.
The shape of the cross section of the sixth hole 205 is not particularly limited as long as the polygonal portion 216 can be accommodated and the corner 218 of the polygonal portion 216 can be accommodated in the second groove 217. For example, it is preferable that the cross section of the sixth hole portion 205 is circular in shape, and the plurality of second groove portions 217 are uniformly distributed along the circumferential direction of the sixth hole portion 205. More preferably, the polygonal portion 216 may have a regular hexagonal shape in cross section. The second groove portions 217 include six grooves uniformly distributed along the circumferential direction of the sixth hole portion 205. The diameter R1 of the sixth hole 205 is slightly smaller than the diameter R2 of the regular hexagon, which is the polygonal portion 216 (for example, smaller by about 0.2 mm). The maximum distance S1 between the two second grooves 217 facing each other about the sixth hole 205 is slightly larger than the diameter of the regular hexagon (for example, about 0.2mm larger). Thus, the polygonal portion 216 can be accommodated in the sixth hole 205 so that the corner portion 218 is engaged with the second groove portion 217.
Although the regular hexagonal polygonal portion 216 is described above as an example, the present invention is not limited thereto. As long as the length (i.e., the diameter R2) of the line connecting the two corner portions 218 of the polygonal portion 216 facing each other with respect to the center is slightly larger than the diameter R1 of the sixth hole portion 205, and the corner portions 218 of the polygonal portion 216 can be accommodated in the second groove portion 217, the cross section of the polygonal portion 216 may be, for example, square, regular pentagon, or the like.
With continued reference to fig. 8-10, in some embodiments, to further guide the sliding rod 203 and inhibit wear of the sliding rod 203, a bushing 219 is embedded at the other end of the sixth bore 205, and a cylindrical portion 220 is provided on the sliding rod 203, with the cylindrical portion 220 sliding within the bushing 219. By fitting the bush 219 at one end of the sixth hole 205, the slide rod 203 can be guided with higher accuracy, and the slide rod 203 can be prevented from swinging relative to the second base 201, so that the sliding accuracy of the slide rod 203 can be improved and the abrasion of the slide rod 203 can be prevented.
As the bushing 219, for example, a bushing made of plastic such as PEEK or steel, or an oilless bushing may be used. The bush 219 may be fixed to the other end of the sixth hole portion 205 in the axial direction by, for example, glue-applying. In order to improve the sliding smoothness of the sliding rod 203 with respect to the second base 201, grease having a high temperature and a low viscosity, for example, may be injected into the sixth hole 205 and/or the bush 219.
[ Vacuum chuck 300]
Fig. 12 is a bottom view of the vacuum chuck 300 of fig. 1, and fig. 13 is a sectional view at D-D in fig. 12. Referring to fig. 12/13, and with additional reference to fig. 1, each vacuum chuck 300 has a third base 301 and an adsorption member 302 provided on the third base 301, respectively, as described above. Specifically, an eighth hole portion 303 for communicating with the air passage 221 of the buffer device 200 is opened at one side of the third base 301. A plurality of ninth hole portions 304 are opened at the other side of the third base 301, and the ninth hole portions 304 and the eighth hole portions 303 communicate. The suction member 302 is provided with a plurality of tenth hole portions 305, and each tenth hole portion 305 is opposed to each ninth hole portion 304 one by one.
The third base 301 may be machined from, for example, an aluminum alloy. The shape of the third base 301 is not particularly limited, and may be, for example, a square shape, a rectangular parallelepiped shape, or a cylindrical shape. The eighth hole portion 303 may be opened at a side of the third base 301 connected to the slide bar 203, and the eighth hole portion 303 is connected through the air path 221 of the buffer device 200, the fourth hole portion 106 of the first base 101, and the suction end 124 of the vacuum generator 121.
In some embodiments, the material of the absorbent member 302 is a foamed sponge material. Specifically, to increase the softness and elasticity of the absorbent member 302, the absorbent member 302 may be selected from a foamed sponge material. Examples of the method for producing the foam sponge include a one-step foaming method, a prepolymer foaming method, a semi-prepolymer foaming method, and a manual foaming method.
Further, as the sponge material used for the absorbent member 302, for example, a fine sponge (excellent in cell uniformity, stretchability, extensibility, and the like), a high-resilience sponge, and the like can be selected. Examples of the high resilience sponge include rubber cotton.
The minimum value of the shore a hardness of the adsorbing member 302 is not particularly limited, and may be appropriately selected according to the weight of the fragile member to be adsorbed. In some embodiments, the absorbent member 302 has a shore a hardness of 28 degrees or more and 32 degrees or less. Specifically, for example, the sponge material as the absorbent member 302 may have a shore a hardness of 30 degrees. By selecting a sponge material with a shore a30 degree hardness, the strength of the absorbent member 302 can be maintained while maintaining sufficient softness and resilience, and the deformation of the absorbent member 302 can be prevented from becoming excessive. Thereby, the reliability of the vacuum chuck 300 can be improved.
In some embodiments, the thickness of the absorbent member 302 (the thickness in the up-down direction in the drawing) is 12mm or less. That is, in the present embodiment, the thickness of the adsorbing member 302 may be 5mm or more and 12mm or less. This can keep the compression stroke of the suction member 302 within a certain range, and prevent the reliability from being lowered due to an excessive compression stroke of the suction member 302.
In some embodiments, the absorbent member 302 is attached to the lower portion of the third base 301 by an adhesive member. For example, a double-sided tape as an adhesive is attached to the upper surface of the adsorbing member 302. The suction member 302 is attached to the lower portion of the third base 301 by the double-sided adhesive tape. Thereby, the adsorbing member 302 can be reliably attached to the lower portion of the third base 301, and replacement of the adsorbing member 302 can be facilitated.
The specific features described in the above embodiments may be combined in any manner without contradiction, and for unnecessary repetition, the present embodiment does not separately describe various possible combinations.
The above examples are only for illustrating the technical solution of the present embodiment and are not limited thereto, and any modification or equivalent substitution that does not depart from the scope of the present embodiment should be included in the technical solution of the present embodiment.