CN116408514A - Vacuum adsorption system for electronic components - Google Patents

Abstract

The invention discloses a vacuum adsorption system for electronic components, comprising: a vacuum generating part, the vacuum generating part comprises: the vacuum generator comprises a first base, a plurality of vacuum generators and a plurality of regulating switches, wherein each vacuum generator is respectively contained in the first base and is respectively and independently blocked or opened through the regulating switches. The buffer device has: the second bases and the sliding rods form gas path channels together, and the second bases and the vacuum generators are in one-to-one correspondence and are connected through gas pipes. The vacuum chuck corresponds to each buffer device one by one, and the vacuum chuck is provided with: the material of the absorbing part is sponge material with the Shore hardness A below 40 degrees, and the thickness of the absorbing part is above 5mm under the condition of no compression. The vacuum adsorption system of the invention can be easily compatible with different assembly procedures of electronic components.

Description

Translated fromChinese

电子元器件用真空吸附系统Vacuum adsorption system for electronic components

技术领域technical field

本发明涉及气动技术领域，尤其涉及电子元器件用真空吸附系统。The invention relates to the field of pneumatic technology, in particular to a vacuum adsorption system for electronic components.

背景技术Background technique

目前，真空吸盘作为用于吸取零部件的重要的气动部件，广泛应用于自动化设备当中。在这些设备当中，真空吸盘起到机械手的末端的手指的作用，能够用于吸取例如：晶圆、芯片等片状且轻盈的电子元器件。At present, vacuum chucks are widely used in automation equipment as an important pneumatic component for sucking parts. Among these devices, the vacuum chuck acts as the finger at the end of the manipulator, and can be used to pick up flake and light electronic components such as wafers and chips.

以芯片为例，芯片有时候会被载置在载盘中，从而进行上料。一个载盘中会载置非常多的芯片，芯片以一定的间隔在载盘中放置。此外，芯片会通过真空吸盘搬运到不同的电路板中并进行焊接。为了提高生产效率，通常会设置真空吸盘组，同时吸附多个电子元器件并进行上料。现有的真空吸附装置一般都是使用真空发生器，并通过并联的方式控制多个真空吸盘，即通过一个气源同时控制多个真空吸盘的通断。然而，在有些情况下，由于装配工序的变更，例如装配位置等的变更，存在部分真空吸盘不需要工作的情况。在此情况下，并联连接的真空吸盘组当中，由于部分真空吸盘不工作(破真空)，这可能导致真空吸盘组整体吸附失败。Taking chips as an example, chips are sometimes placed on a tray for loading. A very large number of chips are placed on one tray, and the chips are placed on the tray at certain intervals. In addition, chips are transported by vacuum chucks to different circuit boards and soldered. In order to improve production efficiency, a set of vacuum suction cups is usually set up to absorb and load multiple electronic components at the same time. Existing vacuum adsorption devices generally use vacuum generators to control multiple vacuum chucks in parallel, that is, to simultaneously control the on-off of multiple vacuum chucks through one air source. However, in some cases, due to changes in the assembly process, such as changes in the assembly position, there are cases where some vacuum chucks do not need to work. In this case, among the vacuum chuck groups connected in parallel, because some of the vacuum chucks do not work (break the vacuum), this may cause the overall suction failure of the vacuum chuck group.

此外，由于例如芯片、晶圆等的电子元器件的厚度非常薄且容易破碎，现有的真空吸盘在吸附这些薄且易碎的电子元器件时，经常会出现由于真空吸盘抵接产品的力度过大等导致部件破碎的情况。In addition, since electronic components such as chips and wafers are very thin and easily broken, when the existing vacuum chuck absorbs these thin and fragile electronic components, it often occurs due to the strength of the vacuum chuck against the product. Parts are broken due to excessive size, etc.

发明内容Contents of the invention

本发明旨在至少一定程度上解决现有技术问题之一。为此，本发明提出了真空吸附系统，能够容易地兼容电子元器件的不同的装配工序。The present invention aims at solving one of the problems of the prior art, at least to some extent. For this reason, the present invention proposes a vacuum adsorption system, which can be easily compatible with different assembly processes of electronic components.

根据本发明一方面的电子元器件用真空吸附系统，包括：真空发生部，所述真空发生部具有：第一基座、多个真空发生器和多个调节开关，其中，各所述真空发生器分别容置在所述第一基座内，并分别通过所述调节开关而独立地被封堵或者被打开；多个缓冲装置，各所述缓冲装置分别具有：呈筒状的第二基座和滑动杆，所述滑动杆的轴向的一端容置在所述第二基座内并相对所述第二基座沿轴向可滑动，所述第二基座和所述滑动杆共同形成气路通道，各所述第二基座和各所述真空发生器一一对应并通过气管连接；多个真空吸盘，各所述真空吸盘和各所述缓冲装置一一对应，各所述真空吸盘分别具有：第三基座和设置在所述第三基座上的吸附件，所述第三基座安装到所述滑动杆的轴向的另一端并和所述气路通道连通，所述吸附件的材料为邵氏硬度A在40度以下的海绵材料，且在未受压的情况下，所述吸附件的厚度为5mm以上。The vacuum adsorption system for electronic components according to one aspect of the present invention includes: a vacuum generating part, the vacuum generating part has: a first base, a plurality of vacuum generators and a plurality of adjustment switches, wherein each of the vacuum generating The devices are respectively accommodated in the first base, and are independently blocked or opened by the adjustment switch; a plurality of buffer devices, each of which has a cylindrical second base a seat and a sliding rod, one axial end of the sliding rod is accommodated in the second base and can slide axially relative to the second base, and the second base and the sliding rod jointly An air channel is formed, each of the second bases corresponds to each of the vacuum generators and is connected through a gas pipe; a plurality of vacuum suction cups, each of the vacuum suction cups corresponds to each of the buffer devices, and each of the vacuum suction cups corresponds to each of the buffer devices. The vacuum chucks respectively have: a third base and an adsorption piece arranged on the third base, the third base is installed on the other axial end of the sliding rod and communicated with the air channel, The material of the adsorbent is a sponge material with a Shore A hardness of less than 40 degrees, and the thickness of the adsorbent is more than 5mm under the condition of no pressure.

根据本发明一方面的真空吸附系统，具有如下有益效果：能够容易地兼容电子元器件的不同的装配工序。The vacuum adsorption system according to one aspect of the present invention has the following beneficial effects: it can be easily compatible with different assembly processes of electronic components.

在一些实施例中，所述第一基座开设有：第一孔部，用于和外设高压气源连接，多个第二孔部，所述真空发生器分别容置在所述第二孔部内，多个第三孔部，各所述第三孔部分别将各所述第二孔部和所述第一孔部连通，多个第四孔部，用于和所述气路通道连通，各所述第四孔部分别连通各所述第二孔部，并且，在所述第二孔部内容置有所述真空发生器的状态下，各所述第四孔部分别和各所述真空发生器的吸附端相对；各所述调节开关分别设置有容置在所述第三孔部内的第一端部，所述第一端部沿所述第三孔部的轴向可进给以将所述第一孔部和所述第二孔部之间封堵或者打开。In some embodiments, the first base is provided with: a first hole for connecting with an external high-pressure gas source, a plurality of second holes, the vacuum generators are respectively accommodated in the second In the hole part, there are a plurality of third hole parts, each of the third hole parts communicates with each of the second hole parts and the first hole part, and a plurality of fourth hole parts are used to communicate with the gas path Each of the fourth holes communicates with each of the second holes, and, in the state where the vacuum generator is placed in the second hole, each of the fourth holes is connected to each of the second holes. The suction ends of the vacuum generators are opposite; each of the adjustment switches is respectively provided with a first end portion accommodated in the third hole portion, and the first end portion can be moved along the axial direction of the third hole portion. Feed to seal or open between the first hole and the second hole.

在一些实施例中，所述第一孔部沿第一方向延伸，所述第一方向平行于所述第一基座的长度方向；所述第二孔部沿第二方向延伸，所述第二方向平行于所述第一基座的宽度方向且正交于所述第一方向；所述第三孔部沿第三方向延伸，所述第三方向平行于所述第一基座的高度方向且分别正交于所述第一方向和所述第二方向；所述第四孔部沿所述第三方向延伸。In some embodiments, the first hole extends along a first direction, and the first direction is parallel to the length direction of the first base; the second hole extends along a second direction, and the first The two directions are parallel to the width direction of the first base and orthogonal to the first direction; the third hole extends along a third direction, and the third direction is parallel to the height of the first base directions and are respectively perpendicular to the first direction and the second direction; the fourth hole extends along the third direction.

在一些实施例中，所述第一基座上还开设有多个出气部，各所述出气部分别连通各所述第二孔部，并且，在所述真空发生器容置在所述第二孔部内的状态下，各所述出气部分别和各所述真空发生器的出气端连通。In some embodiments, a plurality of air outlets are provided on the first base, each of the air outlets communicates with each of the second holes, and when the vacuum generator is accommodated in the first In the state of the two holes, each of the air outlets communicates with the air outlet of each of the vacuum generators.

在一些实施例中，所述气路通道包括沿轴向贯通所述第二基座的第六孔部以及沿轴向贯通所述滑动杆的第七孔部，所述第六孔部和所述第七孔部连通；所述第六孔部的轴向的一端密封地安装有第三气管接头，所述第三气管接头通过所述气管和所述真空发生器连接；所述滑动杆至少部分容置在所述第六孔部内且相对所述第六孔部沿轴向可滑动；在所述滑动杆沿远离所述第三气管接头的方向滑动时，所述滑动杆的一部分穿过所述第六孔部的轴向的另一端而显露在所述第二基座之外；所述缓冲装置还包括弹性件，所述弹性件以压缩的状态一端抵接所述滑动杆且另一端抵接所述第二基座。In some embodiments, the air channel includes a sixth hole passing through the second base in the axial direction and a seventh hole passing through the sliding rod in the axial direction, the sixth hole and the The seventh hole is connected; the axial end of the sixth hole is sealed with a third air pipe joint, and the third air pipe joint is connected to the vacuum generator through the air pipe; the sliding rod is at least Part is housed in the sixth hole and is axially slidable relative to the sixth hole; when the sliding rod slides in a direction away from the third tracheal joint, a part of the sliding rod passes through The other end of the axial direction of the sixth hole is exposed outside the second base; the buffer device further includes an elastic member, and one end of the elastic member abuts against the sliding rod in a compressed state and the other end One end abuts against the second base.

在一些实施例中，所述第六孔部的内壁上设置有限制部，所述滑动杆的容置在所述第六孔部内的部分设置有多边形部，所述多边形部在所述第六孔部内沿周向被所述限制部限制。In some embodiments, the inner wall of the sixth hole is provided with a restricting part, and the part of the sliding rod accommodated in the sixth hole is provided with a polygonal part, and the polygonal part is located in the sixth hole. The inside of the hole is restricted in the circumferential direction by the restricting portion.

在一些实施例中，所述限制部包括开设在所述内壁上的多个第二槽部，多个所述第二槽部沿所述内壁的周向间隔分布，各所述第二槽部分别沿所述第六孔部的轴向延伸；所述多边形部的边角部分别容置在所述第二槽部内，并可沿所述第二槽部滑动。In some embodiments, the restricting portion includes a plurality of second grooves opened on the inner wall, and the plurality of second grooves are distributed along the circumferential direction of the inner wall at intervals, each of the second grooves respectively extend along the axial direction of the sixth hole; the corners of the polygonal portion are respectively accommodated in the second groove and can slide along the second groove.

在一些实施例中，所述第三基座的一侧开设有有用于和所述气路通道连通的第八孔部，所述第三基座的另一侧开设有多个第九孔部，所述第九孔部和所述第八孔部连通；所述吸附件上开设有多个第十孔部，各所述第十孔部分别和各所述第九孔部一一相对。In some embodiments, one side of the third base is provided with an eighth hole for communicating with the air channel, and the other side of the third base is provided with a plurality of ninth holes. , the ninth hole communicates with the eighth hole; a plurality of tenth holes are opened on the adsorbent, and each of the tenth holes is opposite to each of the ninth holes.

在一些实施例中，所述吸附件的材料为发泡海绵材料，所述吸附件的邵氏硬度A为28度以上且32度以下。In some embodiments, the material of the adsorbent is a foamed sponge material, and the Shore A hardness of the adsorbent is not less than 28 degrees and not more than 32 degrees.

在一些实施例中，所述吸附件的厚度为12mm以下。In some embodiments, the thickness of the adsorbent is less than 12 mm.

附图说明Description of drawings

图1是本发明的第一方面的真空发生器用真空发生部的一种实施例的左侧视角的立体图。Fig. 1 is a left side perspective view of an example of a vacuum generating unit for a vacuum generator according to the first aspect of the present invention.

图2是图1的真空发生器用真空发生部的右侧视角的立体图。Fig. 2 is a right side perspective view of the vacuum generating part for the vacuum generator in Fig. 1 .

图3是图1中的第一基座的左侧视角的立体图。FIG. 3 is a perspective view from the left side of the first base in FIG. 1 .

图4是图1中的第一基座的右侧视角的立体图。FIG. 4 is a perspective view from the right side of the first base in FIG. 1 .

图5是图1中的A-A处的剖视图。Fig. 5 is a cross-sectional view at A-A in Fig. 1 .

图6是本发明第二方面的真空吸附装置的一种实施例的示意图。Fig. 6 is a schematic diagram of an embodiment of the vacuum adsorption device of the second aspect of the present invention.

图7是图1的缓冲装置的示意图。FIG. 7 is a schematic diagram of the buffer device of FIG. 1 .

图8是图7中的B-B处的剖视图。Fig. 8 is a cross-sectional view along line B-B in Fig. 7 .

图9是缓冲装置的另一种实施例的示意图。Fig. 9 is a schematic diagram of another embodiment of the buffer device.

图10是缓冲装置的又一种实施例的示意图。Fig. 10 is a schematic diagram of another embodiment of the buffer device.

图11是图7中的C-C处的剖视图。Fig. 11 is a sectional view at line C-C in Fig. 7 .

图12是图1的真空吸盘的仰视图。Fig. 12 is a bottom view of the vacuum chuck of Fig. 1 .

图13是图12中的D-D处的剖视图。Fig. 13 is a cross-sectional view taken along line D-D in Fig. 12 .

具体实施方式Detailed ways

以下将结合实施例对本实施方式的构思及产生的技术效果进行清楚、完整地描述，以充分地理解本实施方式的目的、特征和效果。显然，所描述的实施例只是本实施方式的一部分实施例，而不是全部实施例，基于本实施方式的实施例，本领域的技术人员在不付出创造性劳动的前提下所获得的其他实施例，均属于本实施方式保护的范围。The idea and technical effects of this embodiment will be clearly and completely described below in conjunction with examples, so as to fully understand the purpose, features and effects of this embodiment. Apparently, the described embodiments are only some of the embodiments of this implementation mode, rather than all of them. Based on the examples of this implementation mode, other embodiments obtained by those skilled in the art without paying creative efforts, All belong to the scope of protection of this embodiment.

在本实施方式实施例的描述中，如果涉及到方位描述，例如“上”、“下”、“前”、“后”、“左”、“右”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本实施方式和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本实施方式的限制。In the description of the examples of this embodiment, if it involves orientation descriptions, for example, the orientations or positional relationships indicated by "up", "down", "front", "back", "left", "right" are based on the attached The orientation or positional relationship shown in the figure is only for the convenience of describing the present embodiment and simplifying the description, and does not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as Restrictions on this embodiment.

在本实施方式实施例的描述中，如果某一特征被称为“设置”、“固定”、“连接”、“安装”在另一个特征，它可以直接设置、固定、连接在另一个特征上，也可以间接地设置、固定、连接、安装在另一个特征上。在本实施方式实施例的描述中，如果涉及到“若干”，其含义是一个以上，如果涉及到“多个”，其含义是两个以上，如果涉及到“大于”、“小于”、“超过”，均应理解为不包括本数，如果涉及到“以上”、“以下”、“以内”，均应理解为包括本数。如果涉及到“第一”、“第二”，应当理解为用于区分技术特征，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量或者隐含指明所指示的技术特征的先后关系。In the description of an example of this embodiment, if a certain feature is referred to as being "set", "fixed", "connected", "installed" on another feature, it can be directly set, fixed, or connected on another feature , can also be indirectly set, fixed, connected, mounted on another feature. In the description of the examples of this embodiment, if it involves "several", it means more than one, if it involves "multiple", it means more than two, if it involves "greater than", "less than", " "Exceeding" shall be understood as excluding the original number, and if "above", "below" and "within" are involved, it shall be understood as including the original number. If "first" and "second" are involved, it should be understood as used to distinguish technical features, and should not be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features or implicitly indicating the indicated The sequence of technical features.

根据本实施方式的电子元器件用真空吸附系统，包括：真空发生部100、多个缓冲装置200以及多个真空吸盘300。The vacuum adsorption system for electronic components according to this embodiment includes: avacuum generator 100 , a plurality ofbuffer devices 200 , and a plurality ofvacuum chucks 300 .

其中，真空发生部100具有：第一基座101、多个真空发生器121和多个调节开关102，各真空发生器121分别容置在第一基座101内，并分别通过调节开关102而独立地被封堵或者被打开。Wherein, thevacuum generator 100 has: afirst base 101, a plurality ofvacuum generators 121 and a plurality ofadjustment switches 102, and eachvacuum generator 121 is respectively accommodated in thefirst base 101, and is controlled by theadjustment switches 102 respectively. are independently blocked or opened.

其中，各缓冲装置200分别具有：呈筒状的第二基座201和滑动杆203。滑动杆203的轴向的一端容置在第二基座201内并相对第二基座201沿轴向可滑动。第二基座201和滑动杆203共同形成气路通道221。各第二基座201和各真空发生器121一一对应并通过气管222连接。Wherein, eachbuffer device 200 respectively has: a cylindricalsecond base 201 and asliding rod 203 . An axial end of thesliding rod 203 is accommodated in thesecond base 201 and can slide axially relative to thesecond base 201 . Thesecond base 201 and thesliding rod 203 jointly form anair channel 221 . Eachsecond base 201 is in one-to-one correspondence with eachvacuum generator 121 and is connected through anair pipe 222 .

其中，各真空吸盘300和各缓冲装置200一一对应。各真空吸盘300分别具有：第三基座301和设置在第三基座301上的吸附件302。第三基座301安装到滑动杆203的轴向的另一端并和气路通道221连通。吸附件302的材料为邵氏硬度A在40度以下的海绵材料，且在未受压的情况下，吸附件302的厚度为5mm以上。Wherein, eachvacuum chuck 300 is in one-to-one correspondence with eachbuffer device 200 . Eachvacuum chuck 300 respectively has: athird base 301 and anadsorption member 302 disposed on thethird base 301 . Thethird base 301 is mounted on the other axial end of the slidingrod 203 and communicates with theair channel 221 . The material of the adsorbent 302 is a sponge material with a Shore A hardness of less than 40 degrees, and the thickness of the adsorbent 302 is more than 5 mm under the condition of no pressure.

根据本实施方式的电子元器件用真空吸附系统，能够容易地兼容电子元器件的不同的装配工序。具体而言，在真空发生部100中，由于将真空发生器121安装在第一基座101内，并通过调节开关102独立地使真空发生器121被封堵或者被打开，因此，能够独立地控制各真空发生器121的通断。通过设置多个真空吸盘300，能够吸附多个例如芯片等的电子元器件，并将这些电子元器件同时转移到例如电路板中。此外，当电子元器件需要适应不同的电路板、例如电路板的部分位置不需要安装电子元器件时，只需要通过调节开关102封堵与电路板的该位置对应的真空吸盘300即可，因此，本实施方式的真空吸附系统能够容易地兼容电子元器件的不同的装配工序。According to the vacuum suction system for electronic components of the present embodiment, it is possible to easily accommodate different assembly processes of electronic components. Specifically, in thevacuum generating part 100, since thevacuum generator 121 is installed in thefirst base 101, and thevacuum generator 121 is blocked or opened independently by adjusting theswitch 102, it is possible to independently The on-off of eachvacuum generator 121 is controlled. By providing a plurality of vacuum chucks 300, it is possible to absorb a plurality of electronic components, such as chips, and simultaneously transfer these electronic components to, for example, a circuit board. In addition, when electronic components need to be adapted to different circuit boards, for example, when electronic components do not need to be installed in some positions of the circuit board, it is only necessary to block thevacuum chuck 300 corresponding to the position of the circuit board by adjusting theswitch 102, so Therefore, the vacuum adsorption system of this embodiment can easily be compatible with different assembly processes of electronic components.

此外，通过将连接真空发生器121和缓冲装置200的气管222安装到缓冲装置200的第二基座201中，由于该第二基座201不需要滑动，因此，能够抑制气管222随着滑动杆203的滑动而折弯或者缠绕等，即使在存在多个真空吸盘300以及多个缓冲装置200的情况下，也能够抑制气管222的折弯或者缠绕。In addition, by installing theair tube 222 connecting thevacuum generator 121 and thebuffer device 200 into thesecond base 201 of thebuffer device 200, since thesecond base 201 does not need to slide, it is possible to suppress theair tube 222 from following the sliding rod. Bending or entanglement due to the sliding of theair tube 203 , even when there are a plurality of vacuum chucks 300 and a plurality ofcushioning devices 200 , the bending or entanglement of theair tube 222 can be suppressed.

进一步地，由于真空吸盘300使用邵氏硬度A在40度以下的海绵材料作为吸附件302，因此能够至少一定程度上抑制真空吸盘300抵接例如芯片、晶圆等的电子元器件时候的作用力，降低真空吸盘300将电子元器件压碎的风险。Further, since thevacuum chuck 300 uses a sponge material with a Shore A hardness of 40 degrees or less as theadsorption member 302, it can at least to a certain extent suppress the force when thevacuum chuck 300 abuts against electronic components such as chips and wafers. , to reduce the risk of electronic components being crushed by thevacuum chuck 300 .

以下，分别对本实施方式的真空吸附系统的各部件进行详细说明。Each component of the vacuum adsorption system of this embodiment will be described in detail below.

[真空发生部100][vacuum generator 100]

图2、图3是真空发生部100的立体图，图4、图5是第一基座101的立体图，图6是图2中的A-A处的剖视图。在图2至图6中，为了便于说明，赋予了方向上的示意。2 and 3 are perspective views of thevacuum generator 100 , FIGS. 4 and 5 are perspective views of thefirst base 101 , and FIG. 6 is a cross-sectional view at A-A in FIG. 2 . In FIGS. 2 to 6 , for convenience of description, directions are shown schematically.

参照图2至图6，并辅助参照图1，真空发生部100的如上所述，真空发生部100包括：第一基座101、多个真空发生器121和多个调节开关102，各真空发生器121分别容置在第一基座101内。具体地，参照图2至图6，真空发生部100包括：第一基座101和多个调节开关102。其中，第一基座101开设有：第一孔部103、多个第二孔部104、多个第三孔部105以及多个第四孔部106。其中，在第一基座101中，第一孔部103用于和外设高压气源107连接。各第二孔部104分别用于容置真空发生器121。各第三孔部105分别将各第二孔部104和第一孔部103连通。各第四孔部106用于和缓冲装置200的气路通道221(辅助参照图8)连通。各第四孔部106分别连通各第二孔部104，并且，在第二孔部104内容置有真空发生器121的状态下，各第四孔部106分别和各真空发生器121的吸附端124相对。各调节开关102分别设置有容置在第三孔部105内的第一端部108，第一端部108沿第三孔部105的轴向可进给以将第一孔部103和第二孔部104之间封堵或者打开。Referring to Fig. 2 to Fig. 6, and auxiliary reference to Fig. 1, thevacuum generating part 100 is as described above, thevacuum generating part 100 includes: afirst base 101, a plurality ofvacuum generators 121 and a plurality of regulatingswitches 102, each vacuum generator Thedevices 121 are accommodated in thefirst base 101 respectively. Specifically, referring to FIG. 2 to FIG. 6 , thevacuum generator 100 includes: afirst base 101 and a plurality of adjustment switches 102 . Wherein, thefirst base 101 defines: afirst hole 103 , a plurality ofsecond holes 104 , a plurality ofthird holes 105 and a plurality offourth holes 106 . Wherein, in thefirst base 101 , thefirst hole 103 is used to connect with an external high-pressure gas source 107 . Eachsecond hole portion 104 is used to accommodate thevacuum generator 121 respectively. Eachthird hole 105 communicates with eachsecond hole 104 andfirst hole 103 . Each of thefourth holes 106 is used to communicate with theair channel 221 of the buffer device 200 (see FIG. 8 for assistance). Eachfourth hole portion 106 communicates with eachsecond hole portion 104 respectively, and, in the state where thevacuum generator 121 is housed in thesecond hole portion 104, eachfourth hole portion 106 is connected to the suction end of eachvacuum generator 121 respectively. 124 relative. Eachadjustment switch 102 is respectively provided with afirst end 108 accommodated in thethird hole 105, and thefirst end 108 can be advanced along the axial direction of thethird hole 105 to connect thefirst hole 103 and the second Theholes 104 are closed or opened.

继续参照图6，本实施方式的真空发生器121，例如可以是圆筒状的真空发生器121，真空发生器121的轴向的一端，设置有进气端122，轴向的另一端设置有出气端123，吸附端124设置在出气端123和进气端122之间。此外，出气端123可以连接消音器(未图示)。在真空发生器121容置在第二孔部104的情况下，真空发生器121的轴向的一端的进气端122位于第二孔部104的和第一孔部103相邻的一侧，真空发生器121的轴向的另一端的出气端123位于第二孔部104的朝向第一基座101的外侧(附图中为左侧)的一端，吸附端124则和第四孔部106相对并连通。此外，真空发生器121的外周可以套嵌有例如两个第一密封圈125，两个第一密封圈125例如沿轴向分别套嵌在吸附端124的两侧，由此，能够提高真空发生器121的吸附端124和第一基座101之间的密封性能。Continuing to refer to Fig. 6, thevacuum generator 121 of the present embodiment may be, for example, acylindrical vacuum generator 121, one axial end of thevacuum generator 121 is provided with anair inlet port 122, and the other axial end is provided with a Theair outlet 123 and theadsorption end 124 are arranged between theair outlet 123 and theair inlet 122 . In addition, thegas outlet 123 may be connected to a muffler (not shown). When thevacuum generator 121 is housed in thesecond hole 104, theinlet end 122 of the axial end of thevacuum generator 121 is located on the side adjacent to thefirst hole 103 of thesecond hole 104, Theair outlet 123 at the other axial end of thevacuum generator 121 is located at the end of thesecond hole 104 towards the outside of the first base 101 (left side in the drawings), and thesuction end 124 is connected to thefourth hole 106 relative and connected. In addition, the outer periphery of thevacuum generator 121 can be nested with, for example, two first sealing rings 125, and the two first sealing rings 125 are respectively nested on both sides of thesuction end 124 along the axial direction, thereby improving the vacuum generation. The sealing performance between theadsorption end 124 of thedevice 121 and thefirst base 101.

继续参照图4、图5，并辅助参照图2、图3，第一基座101例如呈长方体形状的块状。为了合理地布局各孔部的结构，在一些实施例中，第一孔部103沿第一方向(附图中为前后方向)延伸，第一方向平行于第一基座101的长度方向。为了便于加工第一孔部103，第一孔部103可以沿第一方向直接贯通第一基座101。第一孔部103在第一基座101的具体的开设位置并不特别限定，例如可以开设在第一基座101的右下方。第一孔部103的轴向的一端可以安装第一堵头(未图示，位于第一基座101的前面侧)，第一孔部103的轴向的另一端则可以安装用于安装气管222的第一气管接头109。With continued reference to FIG. 4 and FIG. 5 , and supplementary reference to FIG. 2 and FIG. 3 , thefirst base 101 is, for example, in the shape of a cuboid block. In order to reasonably arrange the structures of the holes, in some embodiments, thefirst holes 103 extend along a first direction (the front-back direction in the figure), and the first direction is parallel to the length direction of thefirst base 101 . In order to facilitate the processing of thefirst hole portion 103 , thefirst hole portion 103 may directly pass through thefirst base 101 along the first direction. The specific opening position of thefirst hole 103 on thefirst base 101 is not particularly limited, for example, it may be opened on the lower right side of thefirst base 101 . One axial end of thefirst hole 103 can be installed with a first plug (not shown, located on the front side of the first base 101), and the other axial end of thefirst hole 103 can be installed for installing an air pipe. 222 of thefirst trachea connector 109.

继续参照图4，并辅助参照图2，为了容易地布局第二孔部104，第二孔部104沿第二方向(附图中为左右方向)延伸，第二方向平行于第一基座101的宽度方向且正交于第一方向。第二孔部104例如可以从第一基座101的左侧的靠近上部的一侧，朝第一基座101的右侧延伸。此外，第二孔部104可以不贯通第一基座101。第二孔部104的数量并不特别限定，根据所需要安装的真空发生器121的数量确定即可。例如，第二孔部104的数量可以包括6个至8个。第二孔部104可以沿第一基座101的第一方向均匀地间隔分布。第二孔部104的位于第一基座101的左侧的一端可以用于真空发生器121的出气端123的排气。此外，在第一基座101上开设有用于真空发生器121排气的出气部110(后述)开设在其他位置的情况下，也可以将第二孔部104封堵，例如，第二孔部104的位于第一基座101的左侧的一端可以通过第二堵头111进行封堵。Continuing to refer to FIG. 4 , and with auxiliary reference to FIG. 2 , in order to easily lay out thesecond hole portion 104 , thesecond hole portion 104 extends along a second direction (the left-right direction in the drawings), and the second direction is parallel to thefirst base 101 The width direction is perpendicular to the first direction. For example, thesecond hole 104 may extend from the upper side of the left side of thefirst base 101 toward the right side of thefirst base 101 . In addition, thesecond hole portion 104 may not pass through thefirst base 101 . The number of thesecond holes 104 is not particularly limited, it can be determined according to the number ofvacuum generators 121 to be installed. For example, the number ofsecond hole parts 104 may include 6 to 8. Thesecond hole portions 104 may be evenly spaced along the first direction of thefirst base 101 . An end of thesecond hole portion 104 on the left side of thefirst base 101 can be used for exhausting theair outlet 123 of thevacuum generator 121 . In addition, when the air outlet 110 (described later) for the exhaust of thevacuum generator 121 is opened on thefirst base 101 and opened in other positions, thesecond hole 104 can also be blocked, for example, the second hole One end of theportion 104 on the left side of thefirst base 101 may be blocked by asecond plug 111 .

继续参照图6，第三孔部105根据第一孔部103和各第二孔部104的位置而适当地开设。第三孔部105例如可以沿第三方向(附图中为上下方向)延伸，第三方向平行于第一基座101的高度方向且分别正交于第一方向和第二方向。为了容易地将第二孔部104和第一孔部103连通，第三孔部105从第一基座101的上表面的靠近右侧的位置开设。第三孔部105的直径和深度并不特别限定，例如，第三孔部105的轴向的一端贯通第一孔部103的壁部以和第一孔部103连通。此外，第二孔部104的轴向的一端贯通第三孔部105的壁部以和第三孔部105连通。即，第三孔部105朝下延伸的深度只要能够贯通第一孔部103的壁部即可。此外，第二孔部104的朝右方向延伸的深度只要能够贯通第三孔部105的壁部即可。由此，第三孔部105的轴向的下端部和第一孔部103连通，第二孔部104的轴向的右端部则在第三孔部105的壁部处和第三孔部105连通。通过使第三孔部105的下端部和第一孔部103连通且第三孔部105的壁部和第二孔部104的右端部连通，能够容易地实现通过调节开关102封堵或者打开第三孔部105的下端部和/或第二孔部104的右端部，从而容易地实现第一孔部103和第三孔部105之间的封堵或者打开。Continuing to refer to FIG. 6 , thethird holes 105 are appropriately opened according to the positions of thefirst holes 103 and the respectivesecond holes 104 . Thethird hole 105 may extend, for example, along a third direction (a vertical direction in the drawing), which is parallel to the height direction of thefirst base 101 and perpendicular to the first direction and the second direction respectively. In order to easily connect thesecond hole 104 and thefirst hole 103 , thethird hole 105 is opened from a position near the right side of the upper surface of thefirst base 101 . The diameter and depth of thethird hole 105 are not particularly limited. For example, one axial end of thethird hole 105 passes through the wall of thefirst hole 103 to communicate with thefirst hole 103 . In addition, one axial end of thesecond hole 104 passes through the wall of thethird hole 105 to communicate with thethird hole 105 . That is, the depth to which thethird hole 105 extends downward is sufficient as long as it can pass through the wall of thefirst hole 103 . In addition, the depth extending in the right direction of thesecond hole 104 is sufficient as long as it can pass through the wall of thethird hole 105 . Thus, the axial lower end of thethird hole 105 communicates with thefirst hole 103 , and the axial right end of thesecond hole 104 connects with thethird hole 105 at the wall of thethird hole 105 . connected. By making the lower end of thethird hole 105 communicate with thefirst hole 103 and the wall of thethird hole 105 communicate with the right end of thesecond hole 104, it can be easily realized by adjusting theswitch 102 to block or open the second hole. The lower end portion of the threehole portion 105 and/or the right end portion of thesecond hole portion 104 can easily realize the sealing or opening between thefirst hole portion 103 and thethird hole portion 105 .

继续参照图6，并辅助参照图2、图3，第四孔部106例如也可以沿第三方向延伸。具体地，第四孔部106可以根据真空发生器121的吸附端124的吸附孔的位置适当设置即可。为了容易地安装用于连接气管222连接的第二气管接头112，第四孔部106例如可以从第一基座101的上表面的大致左右方向的中部，朝下方向开设。第四孔部106例如可以是螺纹孔。With continued reference to FIG. 6 and auxiliary reference to FIGS. 2 and 3 , thefourth hole portion 106 may also extend along the third direction, for example. Specifically, thefourth hole portion 106 may be properly set according to the position of the suction hole of thesuction end 124 of thevacuum generator 121 . In order to easily install the second air pipe joint 112 for connecting theair pipe 222 , thefourth hole 106 may be opened downward from approximately the middle of the upper surface of thefirst base 101 in the left-right direction, for example. Thefourth hole portion 106 may be, for example, a screw hole.

继续参照图6，并辅助参照图2至图5，此外，在一些实施例中，为了便于真空发生器121的排气，第一基座101上还可以开设有多个出气部110，各出气部110分别连通各第二孔部104，并且，在第二孔部104内容置有真空发生器121的状态下，各出气部110分别和各真空发生器121的出气端123连通。具体而言，在一些实施例中，出气部110包括多个出气孔113，各出气孔113分别和与出气部110对应的第二孔部104连通。出气孔113可以在第一基座101的上表面开设，并和真空发生器121的出气端123相对，由此，能够便于真空发生器121的排气。此外，通过设置出气部110，也能够通过第二堵头111对第二孔部104的左端部进行封堵，防止真空发生器121显露在外面。Continuing to refer to FIG. 6 and supplementary reference to FIG. 2 to FIG. 5 , in addition, in some embodiments, in order to facilitate the exhaust of thevacuum generator 121, a plurality ofair outlets 110 may be provided on thefirst base 101, and each air outlet Theparts 110 communicate with thesecond holes 104 respectively, and when thevacuum generators 121 are placed in thesecond holes 104 , thegas outlets 110 communicate with thegas outlets 123 of thevacuum generators 121 . Specifically, in some embodiments, theair outlet portion 110 includes a plurality of air outlet holes 113 , and eachair outlet hole 113 communicates with thesecond hole portion 104 corresponding to theair outlet portion 110 . Theair outlet hole 113 can be opened on the upper surface of thefirst base 101 and is opposite to theair outlet end 123 of thevacuum generator 121 , thereby facilitating the exhaust of thevacuum generator 121 . In addition, by providing theair outlet 110 , the left end of thesecond hole 104 can also be blocked by thesecond plug 111 to prevent thevacuum generator 121 from being exposed outside.

继续参照图6，如上所述，各调节开关102分别设置有容置在第三孔部105内的第一端部108，第一端部108沿第三孔部105的轴向可进给以将第一孔部103和第二孔部104之间封堵或者打开。具体而言，调节开关102例如还包括显露在第一基座101之外的旋钮部114，旋钮部114和第一端部108一体成型。通过把持旋钮部114旋转或者推动调节开关102，能够使第一端部108在第三孔部105内进给。Continuing to refer to FIG. 6 , as mentioned above, each adjustingswitch 102 is respectively provided with afirst end portion 108 accommodated in thethird hole portion 105 , and thefirst end portion 108 can be advanced along the axial direction of thethird hole portion 105 to The space between thefirst hole 103 and thesecond hole 104 is blocked or opened. Specifically, theadjustment switch 102 further includes, for example, aknob portion 114 exposed outside thefirst base 101 , and theknob portion 114 and thefirst end portion 108 are integrally formed. By rotating theknob portion 114 or pushing theadjustment switch 102 , thefirst end portion 108 can be advanced in thethird hole portion 105 .

在一些实施例中，为了容易且可靠地断开第一孔部103和与该调节开关102对应的第二孔部104，第一端部108的远端(附图中为下端部)设置有锥形部115，锥形部115可抵接第一孔部103的壁部的和第三孔部105连通的位置。通过设置锥形部115，能够使调节开关102能够根据第三孔部105的下端部而自适应地调节，从而能够可靠地封堵第三孔部105的下端部和第一孔部103的壁部的连通的位置。In some embodiments, in order to easily and reliably disconnect thefirst hole 103 and thesecond hole 104 corresponding to theadjustment switch 102, the distal end (lower end in the drawings) of thefirst end 108 is provided with The taperedportion 115 can abut against a position of the wall portion of thefirst hole portion 103 communicating with thethird hole portion 105 . By providing the taperedportion 115, the regulatingswitch 102 can be adaptively adjusted according to the lower end of thethird hole 105, thereby reliably blocking the lower end of thethird hole 105 and the wall of thefirst hole 103. Connected position of the department.

此外，在一些实施例中，第三孔部105的壁部的至少部分设置有第一内螺纹116，第一端部108设置有和第一内螺纹116螺合的第一外螺纹117。具体而言，通过设置第一内螺纹116和第一外螺纹117，能够通过旋转调节开关102的旋钮部114，从而容易地使第一端部108在第三孔部105内进给，当需要打开或者关闭真空发生器121时，只需要旋转调节开关102的旋钮部114即可。第一内螺纹116例如可以设置在第三孔部105的下端部的位置，与此对应，第一外螺纹117同样设置在第一端部108的下端部的位置。由此，第一内螺纹116在作为使调节开关102的第一端部108进给的螺纹的同时，也能够密封第三孔部105的下端部和第一孔部103的壁部连通的位置。即，能够通过锥形部115和第一内螺纹116以及第一外螺纹117的螺合两重密封，从而大大提高地提高调节开关102的第一端部108的封堵第三孔部105的下端部的位置的可靠性。Furthermore, in some embodiments, at least part of the wall of thethird hole portion 105 is provided with a firstinternal thread 116 , and thefirst end portion 108 is provided with a firstexternal thread 117 screwed with the firstinternal thread 116 . Specifically, by providing the firstinternal thread 116 and the firstexternal thread 117, theknob portion 114 of theadjustment switch 102 can be rotated to easily feed thefirst end portion 108 in thethird hole portion 105. When thevacuum generator 121 is turned on or off, it is only necessary to rotate theknob part 114 of theadjustment switch 102 . For example, the firstinternal thread 116 may be provided at the lower end of thethird hole 105 , and correspondingly, the firstexternal thread 117 may also be provided at the lower end of thefirst end 108 . Thus, the firstinternal thread 116 can seal the position where the lower end of thethird hole 105 communicates with the wall of thefirst hole 103 while serving as a thread for feeding thefirst end 108 of theadjustment switch 102. . That is, it is possible to greatly improve the ability of thefirst end portion 108 of the regulatingswitch 102 to block thethird hole portion 105 by screwing the taperedportion 115 and the firstinternal thread 116 and the firstexternal thread 117 into double seals. The reliability of the position of the lower end.

在一些实施例中，为了限制调节开关102进给的行程，防止调节开关102脱落，第一基座101上还开设有多个第五孔部118，各第五孔部118分别连通各第三孔部105。各第五孔部118内分别容置有限制件119，限制件119的端部(左端部)伸入第三孔部105内，并限制调节开关102在第三孔部105内沿使第一孔部103和第二孔部104之间打开的方向进给的行程。具体而言，第五孔部118例如在第一基座101的右侧的表面开设，第五孔部118的位置根据第三孔部105的位置而适当确定。第五孔部118例如可以是螺纹孔，限制件119例如可以选择螺丝件。在本实施例中，调节开关102的沿使第一孔部103和第二孔部104之间打开的方向，是指上方向。即，在本实施例中，当调节开关102的第一端部108朝下方向进给时，通过封堵第三孔部105的下端部从而封堵第一孔部103和第二孔部104。当调节开关102的第一端部108朝上方向进给时，则通过使第三孔部105的下端部被打开，从而使第一孔部103和第二孔部104连通。In some embodiments, in order to limit the feed stroke of theadjustment switch 102 and prevent theadjustment switch 102 from falling off, a plurality offifth holes 118 are opened on thefirst base 101, and eachfifth hole 118 communicates with eachthird hole portion 105 . Eachfifth hole 118 is respectively accommodated with a restrictingpiece 119, and the end (left end) of the restrictingpiece 119 extends into thethird hole 105, and restricts theadjustment switch 102 in thethird hole 105 along the first The stroke in the direction of opening between thehole portion 103 and thesecond hole portion 104 . Specifically, thefifth hole 118 is opened, for example, on the right side surface of thefirst base 101 , and the position of thefifth hole 118 is appropriately determined according to the position of thethird hole 105 . Thefifth hole portion 118 may be, for example, a threaded hole, and the limitingmember 119 may be, for example, a screw member. In this embodiment, the direction along which theadjustment switch 102 opens between thefirst hole 103 and thesecond hole 104 refers to the upward direction. That is, in this embodiment, when thefirst end portion 108 of theadjustment switch 102 is fed downward, thefirst hole portion 103 and thesecond hole portion 104 are blocked by blocking the lower end portion of thethird hole portion 105 . When thefirst end 108 of theadjustment switch 102 is moved upward, the lower end of thethird hole 105 is opened, so that thefirst hole 103 and thesecond hole 104 communicate.

进一步地，在一些实施例中，为了限制调节开关102进给的行程，调节开关102的第一端部108例如可以设置有环形的第一槽部120，限制件119的端部伸入第一槽部120内。具体而言，第一槽部120的直径例如小于第一外螺纹117的中径，在第一端部108插入第三孔部105且第一端部108的设置有第一外螺纹117的下端部跨过第五孔部118之后，第一槽部120的位置和第五孔部118的位置相对。由此，当调节开关102朝上方向进给时，第一端部108的下端部被限制件119的左端部限制，从而能够限制调节开关102朝上方向进给的行程。Further, in some embodiments, in order to limit the feeding stroke of the adjustingswitch 102, thefirst end 108 of the adjustingswitch 102 may be provided with an annularfirst groove 120, for example, and the end of the limitingmember 119 extends into the first inside thegroove portion 120 . Specifically, the diameter of thefirst groove portion 120 is, for example, smaller than the middle diameter of the firstexternal thread 117, thethird hole portion 105 is inserted into thefirst end portion 108 and the lower end of thefirst end portion 108 is provided with the firstexternal thread 117 After crossing thefifth hole portion 118 , the position of thefirst groove portion 120 is opposite to the position of thefifth hole portion 118 . Thus, when theadjustment switch 102 is moved upward, the lower end of thefirst end 108 is restricted by the left end of thestopper 119 , so that the upward movement of theadjustment switch 102 can be restricted.

[缓冲装置200][buffer device 200]

图7是的缓冲装置200的示意图。图8是图7中的B-B处的剖视图。图9是缓冲装置200的另一种实施例的示意图。图10是缓冲装置200的又一种实施例的示意图。图11是图7中的C-C处的剖视图。FIG. 7 is a schematic diagram of thebuffer device 200 . Fig. 8 is a cross-sectional view along line B-B in Fig. 7 . FIG. 9 is a schematic diagram of another embodiment of abuffer device 200 . FIG. 10 is a schematic diagram of another embodiment of thebuffer device 200 . Fig. 11 is a sectional view at line C-C in Fig. 7 .

参照图7至图11，如上所述，各缓冲装置200分别具有：呈筒状的第二基座201和滑动杆203。第二基座201和滑动杆203共同形成气路通道221。具体地，缓冲装置200包括：呈筒状的第二基座201、第三气管接头202、滑动杆203以及弹性件204。气路通道221包括沿轴向贯通第二基座201的第六孔部205以及沿轴向贯通滑动杆203的第七孔部206，第六孔部205和第七孔部206连通。第三气管接头202密封地安装到第六孔部205的轴向的一端。第三气管接头202通过气管222并经由第一基座101的第四孔部106和真空发生器121连接。滑动杆203的至少部分容置在第六孔部205内且相对第六孔部205沿轴向可滑动。在滑动杆203沿远离第三气管接头202的方向滑动时，滑动杆203的一部分穿过第六孔部205的轴向的另一端而显露在第二基座201之外。弹性件204以压缩的状态一端抵接滑动杆203且另一端抵接第二基座201。Referring to FIG. 7 to FIG. 11 , as mentioned above, eachbuffer device 200 respectively has: a cylindricalsecond base 201 and a slidingrod 203 . Thesecond base 201 and the slidingrod 203 jointly form anair channel 221 . Specifically, thebuffer device 200 includes: a cylindricalsecond base 201 , a thirdair pipe connector 202 , a slidingrod 203 and anelastic member 204 . Theair channel 221 includes asixth hole 205 passing through thesecond base 201 in the axial direction and aseventh hole 206 passing through the slidingrod 203 in the axial direction. Thesixth hole 205 and theseventh hole 206 are in communication. The third air pipe joint 202 is hermetically attached to one axial end of thesixth hole portion 205 . The third air pipe joint 202 is connected to thevacuum generator 121 through theair pipe 222 via thefourth hole portion 106 of thefirst base 101 . At least part of the slidingrod 203 is accommodated in thesixth hole 205 and is axially slidable relative to thesixth hole 205 . When the slidingrod 203 slides away from the third trachea joint 202 , a part of the slidingrod 203 passes through the other axial end of thesixth hole 205 and is exposed outside thesecond base 201 . In a compressed state, one end of theelastic member 204 abuts against the slidingrod 203 and the other end abuts against thesecond base 201 .

在本实施方式的缓冲装置200中，作为第三气管接头202的种类并不特别限定，可列举：直通接头、快插接头的公头或者快插接头的母头等。为了使缓冲装置200的结构整体更加紧凑，同时方便气管222的插拔，优选地，第三气管接头202选择快插接头的公头。In theshock absorber 200 of the present embodiment, the type of the third air pipe joint 202 is not particularly limited, and examples thereof include a straight joint, a male end of a push-in joint, or a female end of a push-in joint. In order to make the overall structure of thebuffer device 200 more compact and at the same time facilitate the insertion and removal of theair pipe 222 , preferably, the thirdair pipe connector 202 is a male end of a quick-plug connector.

作为弹性件204，可以使用例如公知的压缩弹簧。弹性件204只要能够以压缩的状态一端抵接滑动杆203且另一端抵接第二基座201，其安装方式并不特别限定。例如，弹性件204可以设置在第二基座201的外部并套嵌在滑动杆203上，一端抵接滑动杆203且另一端抵接第二基座201。此外，弹性件204也可以容置在第六孔部205内(参照图8至图10)，一端抵接滑动杆203且另一端抵接第二基座201。As theelastic member 204, for example, a known compression spring can be used. As long as one end of theelastic member 204 abuts against the slidingrod 203 and the other end abuts against thesecond base 201 in a compressed state, its installation method is not particularly limited. For example, theelastic member 204 can be disposed outside thesecond base 201 and nested on the slidingrod 203 , one end abuts the slidingrod 203 and the other end abuts thesecond base 201 . In addition, theelastic member 204 can also be accommodated in the sixth hole portion 205 (refer to FIG. 8 to FIG. 10 ), with one end abutting against the slidingrod 203 and the other end abutting against thesecond base 201 .

继续参照图8，在一些实施例中，为了连通第三气管接头202和第七孔部206，以使真空吸盘300能够通过滑动杆203以及气管222和真空发生器121连通，第三气管接头202和第七孔部206通过第六孔部205连通。具体而言，例如，滑动杆203沿第六孔部205滑动，第七孔部206的轴向的一端容置在第六孔部205内，由此和第六孔部205连通。第六孔部205的轴向的一端设置有螺纹，第三气管接头202则直接通过该螺纹拧紧到第六孔部205的轴向的一端。为了提高第三气管接头202的安装位置的密封性，第三气管接头202可以通过打密封胶、缠绕密封胶带等方式锁紧到第六孔部205的轴向的一端。由此，能够实现第三气管接头202的安装位置的密封性。Continuing to refer to FIG. 8 , in some embodiments, in order to communicate with the third trachea joint 202 and theseventh hole 206 so that thevacuum chuck 300 can communicate with thevacuum generator 121 through the slidingrod 203 and thetrachea 222 , the third trachea joint 202 It communicates with theseventh hole 206 through thesixth hole 205 . Specifically, for example, theslide rod 203 slides along thesixth hole 205 , and one axial end of theseventh hole 206 is accommodated in thesixth hole 205 , thereby communicating with thesixth hole 205 . One axial end of thesixth hole portion 205 is provided with a thread, and the third air pipe joint 202 is directly screwed to the axial end of thesixth hole portion 205 through the thread. In order to improve the tightness of the installation position of the third air pipe joint 202 , the third air pipe joint 202 can be locked to the axial end of thesixth hole 205 by applying sealant, winding a sealing tape, and the like. Thereby, the airtightness of the mounting position of the third air pipe joint 202 can be realized.

另外，为了实现第六孔部205和滑动杆203之间的密封性，第六孔部205和滑动杆203之间可以设置有第二密封圈207。作为第二密封圈207，列举例如O型橡胶密封圈等。第二密封圈207可以套嵌在滑动杆203上。由此，能够实现第六孔部205的连通第三气管接头202以及滑动杆203的第七孔部206之间的区域的密封性。In addition, in order to achieve sealing between thesixth hole 205 and the slidingrod 203 , asecond sealing ring 207 may be provided between thesixth hole 205 and the slidingrod 203 . As thesecond packing 207, for example, an O-ring rubber packing or the like is mentioned. Thesecond sealing ring 207 can be nested on the slidingrod 203 . Thereby, the sealing performance of the region of thesixth hole 205 communicating with the third air tube joint 202 and theseventh hole 206 of theslide rod 203 can be achieved.

继续参照图9，此外，在一些实施例中，为了连通第三气管接头202和第七孔部206，也可以在第三气管接头202的第一安装端208的端部设置有沿轴向延伸的第一延伸部209，第一延伸部209插入第七孔部206内，第一延伸部209和第七孔部206之间设置有第三密封圈210。具体而言，例如，第七孔部206可以是圆孔。第一延伸部209的外周也呈圆柱状。第三密封圈210可以选择例如O型橡胶密封圈等。第三密封圈210可以嵌入在第七孔部206内，也可以套嵌在第一延伸部209中。第一延伸部209沿轴向被贯通并和第三气管接头202连通。由此，能够实现滑动杆203和第三气管接头202直接连通并且相对于第六孔部205被隔绝。通过这种连接方式，能够使第六孔部205仅作为用于对滑动杆203进行导向的孔而使用。由于无需在第六孔部205和滑动杆203之间设置密封圈，因此，能够抑制滑动杆203相对第二基座201的摆动，提高滑动杆203相对第六孔部205的滑动精度。Continuing to refer to FIG. 9 , in addition, in some embodiments, in order to communicate with the third air pipe joint 202 and theseventh hole 206 , an axially extending Thefirst extension 209 is inserted into theseventh hole 206 , and thethird sealing ring 210 is disposed between thefirst extension 209 and theseventh hole 206 . Specifically, for example, theseventh hole portion 206 may be a circular hole. The outer circumference of thefirst extension portion 209 is also cylindrical. Thethird sealing ring 210 can be an O-shaped rubber sealing ring, for example. Thethird sealing ring 210 can be embedded in theseventh hole portion 206 , and can also be nested in thefirst extension portion 209 . Thefirst extension portion 209 is penetrated in the axial direction and communicates with the third air pipe joint 202 . As a result, the slidingrod 203 can be directly communicated with the third trachea joint 202 while being isolated from thesixth hole 205 . With this connection, thesixth hole 205 can be used only as a hole for guiding theslide bar 203 . Since there is no need to provide a sealing ring between thesixth hole 205 and the slidingrod 203 , the swinging of the slidingrod 203 relative to thesecond base 201 can be suppressed, and the sliding accuracy of the slidingrod 203 relative to thesixth hole 205 can be improved.

继续参照图10，在一些实施例中，缓冲装置200还可以包括沿轴向被贯通的安装座211，安装座211安装到第六孔部205的轴向的一端，第三气管接头202密封地安装到安装座211。此外，为了提高零件的通用性以及降低缓冲装置200的成本，安装座211的第二安装端部212设置有沿轴向延伸的第二延伸部213，第二延伸部213插入第七孔部206内，第二延伸部213和第七孔部206之间设置有第三密封件214。具体而言，由于第三气管接头202通常是标准件，为了实现滑动杆203的第七孔部206和第三气管接头202直接连通而在第三气管接头202的一端设置第一延伸部209，可能会增加第三气管接头202的加工成本。因此，在本实施例中，通过设置安装座211，并使安装座211的第二延伸部213连通滑动杆203以及第三气管接头202，在能够确保滑动杆203的第七孔部206以及第三气管接头202相对第六孔部205被隔绝的同时，也能够使用市购的第三气管接头202。因此，能够提高第三气管接头202的通用性，降低缓冲装置200的成本。Continuing to refer to FIG. 10 , in some embodiments, thebuffer device 200 may further include a mountingseat 211 penetrated in the axial direction, the mountingseat 211 is mounted to one end of thesixth hole 205 in the axial direction, and the third air pipe joint 202 is hermetically sealed. Installed to mount 211. In addition, in order to improve the versatility of parts and reduce the cost of thebuffer device 200, the second mountingend 212 of the mountingseat 211 is provided with asecond extension 213 extending in the axial direction, and thesecond extension 213 is inserted into theseventh hole 206 Inside, athird sealing member 214 is provided between thesecond extension portion 213 and theseventh hole portion 206 . Specifically, since the third trachea joint 202 is usually a standard part, in order to realize the direct communication between theseventh hole 206 of the slidingrod 203 and the third trachea joint 202, afirst extension 209 is provided at one end of the third trachea joint 202, The processing cost of the third air pipe joint 202 may be increased. Therefore, in this embodiment, by setting the mountingbase 211 and making thesecond extension portion 213 of the mountingbase 211 communicate with the slidingrod 203 and the third trachea joint 202, theseventh hole 206 of the slidingrod 203 and the third air pipe joint 202 can be ensured. While the third air pipe joint 202 is isolated from thesixth hole 205 , a commercially available third air pipe joint 202 can also be used. Therefore, the versatility of the third air pipe joint 202 can be improved, and the cost of thebuffer device 200 can be reduced.

继续参照图11，在一些实施例中，为了抑制滑动杆203相对第二基座201的转动，从而提高真空吸盘300吸附电子元器件的精度，第六孔部205的内壁上设置有限制部215，滑动杆203的容置在第六孔部205内的部分设置有多边形部216，多边形部216在第六孔部205内沿周向被限制部215限制。具体而言，限制部215可以包括开设在内壁上的多个第二槽部217，多个槽部217槽部217沿第六孔部205的内壁的周向间隔分布，各第二槽部217分别沿第六孔部205的轴向延伸。多边形部216的边角部218分别容置在第二槽部217内，并可沿第二槽部217滑动。通过在第六孔部205的内壁上设置作为限制部215的第二槽部217，并在滑动杆203的容置在第六孔部205内的部分设置多边形部216，多边形部216的转动被限制部215限制，由此，能够抑制滑动杆203相对第二基座201的转动。在对安装到滑动杆203的真空吸盘300要求角度精度的时候，能够提高真空吸盘300的装配和/或工作的角度精度。Continuing to refer to FIG. 11 , in some embodiments, in order to suppress the rotation of the slidingrod 203 relative to thesecond base 201 , thereby improving the accuracy of thevacuum chuck 300 for absorbing electronic components, a restrictingportion 215 is provided on the inner wall of thesixth hole portion 205 , the portion of theslide bar 203 housed in thesixth hole portion 205 is provided with apolygonal portion 216 , and thepolygonal portion 216 is restricted by therestriction portion 215 in thesixth hole portion 205 in the circumferential direction. Specifically, the restrictingportion 215 may include a plurality ofsecond grooves 217 opened on the inner wall, and the plurality ofgrooves 217 are distributed at intervals along the circumference of the inner wall of thesixth hole 205, and eachsecond groove 217 Each extends in the axial direction of thesixth hole portion 205 . Thecorner portions 218 of thepolygonal portion 216 are respectively accommodated in thesecond groove portion 217 and can slide along thesecond groove portion 217 . By providing thesecond groove portion 217 as the restrictingportion 215 on the inner wall of thesixth hole portion 205, and providing thepolygonal portion 216 on the portion of theslide bar 203 housed in thesixth hole portion 205, the rotation of thepolygonal portion 216 is controlled. The restrictingportion 215 restricts, thereby suppressing the rotation of theslide bar 203 relative to thesecond base 201 . When angular accuracy is required for thevacuum chuck 300 attached to theslide bar 203 , the angular accuracy of the assembly and/or operation of thevacuum chuck 300 can be improved.

第六孔部205的横截面的形状并不特别限定，只要能够容置多边形部216，并使多边形部216的边角部218容置在第二槽部217内即可。例如，优选地，第六孔部205的横截面呈圆形状，多个第二槽部217沿第六孔部205的周向均匀分布。更加优选地，多边形部216的横截面可以是正六边形状。第二槽部217则包括六个，沿第六孔部205的周向均匀分布。第六孔部205的直径R1稍小多边形部216即正六边形的直径R2(例如小0.2mm左右)。此外，以第六孔部205为中心相对的两个第二槽部217的最大距离S1则稍大于正六边形的直径(例如大0.2mm左右)。由此，多边形部216能够以边角部218被卡在第二槽部217内的方式，容置在第六孔部205内。The shape of the cross section of thesixth hole 205 is not particularly limited, as long as thepolygonal portion 216 can be accommodated and thecorner portion 218 of thepolygonal portion 216 can be accommodated in thesecond groove portion 217 . For example, preferably, the cross-section of thesixth hole portion 205 is circular, and the plurality ofsecond groove portions 217 are evenly distributed along the circumferential direction of thesixth hole portion 205 . More preferably, the cross section of thepolygonal part 216 may be a regular hexagon. Sixsecond grooves 217 are evenly distributed along the circumference of thesixth hole 205 . The diameter R1 of thesixth hole portion 205 is slightly smaller than the diameter R2 of thepolygonal portion 216 , that is, the regular hexagon (for example, about 0.2 mm smaller). In addition, the maximum distance S1 between the twosecond grooves 217 facing each other with thesixth hole 205 as the center is slightly larger than the diameter of the regular hexagon (for example, about 0.2 mm larger). Accordingly, thepolygonal portion 216 can be accommodated in thesixth hole portion 205 in such a manner that thecorner portion 218 is caught in thesecond groove portion 217 .

此外，上面虽然以正六边形状的多边形部216为例进行了说明，但是并不限于此。只要多边形部216的以中心为基准相对的两个边角部218的连线的长度(即直径R2)，稍大于第六孔部205的直径R1，且这些多边形部216的边角部218能够容置在第二槽部217，多边形部216的横截面也可以选择例如正方形状或者正五边形状等。In addition, although the regular hexagonalpolygonal part 216 was demonstrated as an example above, it is not limited to this. As long as the length (i.e. diameter R2) of the line connecting twoopposite corners 218 of thepolygonal part 216 based on the center is slightly larger than the diameter R1 of thesixth hole 205, and thecorners 218 of thesepolygonal parts 216 can Accommodated in thesecond groove portion 217 , the cross section of thepolygonal portion 216 can also be selected, for example, a square shape or a regular pentagonal shape.

继续参照图8至图10，在一些实施例中，为了进一步对滑动杆203进行导向且抑制滑动杆203的磨损，第六孔部205的另一端嵌设有衬套219，滑动杆203上设置有圆柱部220，圆柱部220在衬套219内滑动。通过在第六孔部205的一端嵌设衬套219，能够更高精度地对滑动杆203进行导向，抑制滑动杆203相对第二基座201摆动，从而能够提高滑动杆203的滑动精度并抑制滑动杆203的磨损。Continuing to refer to FIG. 8 to FIG. 10 , in some embodiments, in order to further guide the slidingrod 203 and restrain the wear of the slidingrod 203 , the other end of thesixth hole 205 is embedded with abushing 219 , and the slidingrod 203 is provided with There is acylindrical portion 220 which slides within thebushing 219 . By inserting thebushing 219 at one end of thesixth hole 205, the slidingrod 203 can be guided with higher precision, and the swinging of the slidingrod 203 relative to thesecond base 201 can be suppressed, so that the sliding accuracy of the slidingrod 203 can be improved and the Wear ofslide bar 203 .

作为衬套219，例如可以选择PEEK、赛钢等塑料材质加工的衬套，也可以使用无油衬套。此外，衬套219可以通过打胶等方式固定在第六孔部205的轴向的另一端。另外，为了提高滑动杆203相对第二基座201的滑动顺畅度，也可以在第六孔部205和/或衬套219内注入例如高温、低粘度的润滑脂等。As thebush 219 , for example, a bush made of plastic materials such as PEEK and Segrex can be selected, and an oil-free bush can also be used. In addition, thebushing 219 may be fixed on the other axial end of thesixth hole portion 205 by means of glue or the like. In addition, in order to improve the sliding smoothness of the slidingrod 203 relative to thesecond base 201 , for example, high-temperature, low-viscosity grease may be injected into thesixth hole 205 and/or thebushing 219 .

[真空吸盘300][Vacuum suction cup 300]

图12是图1的真空吸盘300的仰视图，图13是图12中的D-D处的剖视图。参照图12/13，并辅助参照图1，如上所述，各真空吸盘300分别具有：第三基座301和设置在第三基座301上的吸附件302。具体地，第三基座301的一侧开设有用于和缓冲装置200的气路通道221连通的第八孔部303。第三基座301的另一侧开设有多个第九孔部304，第九孔部304和第八孔部303连通。吸附件302上开设有多个第十孔部305，各第十孔部305分别和各第九孔部304一一相对。FIG. 12 is a bottom view of thevacuum chuck 300 in FIG. 1 , and FIG. 13 is a cross-sectional view along line D-D in FIG. 12 . Referring to FIGS. 12 and 13 , and with auxiliary reference to FIG. 1 , as mentioned above, eachvacuum chuck 300 respectively has: athird base 301 and anadsorption member 302 disposed on thethird base 301 . Specifically, aneighth hole 303 for communicating with theair channel 221 of thebuffer device 200 is opened on one side of thethird base 301 . The other side of thethird base 301 defines a plurality ofninth holes 304 , and theninth holes 304 communicate with theeighth holes 303 . A plurality oftenth hole portions 305 are defined on theadsorption member 302 , and eachtenth hole portion 305 is opposite to eachninth hole portion 304 one by one.

第三基座301可以通过例如铝合金加工而成。第三基座301的形状并不特别限定，例如可以选择正方体形状、长方体形状或者圆柱状等。第八孔部303可以开设在第三基座301的连接到滑动杆203的一侧，第八孔部303通过缓冲装置200的气路通道221、第一基座101的第四孔部106和真空发生器121的吸附端124连接。Thethird base 301 can be processed by, for example, aluminum alloy. The shape of thethird base 301 is not particularly limited, for example, a cube shape, a cuboid shape, or a cylinder shape can be selected. Theeighth hole 303 can be opened on the side of thethird base 301 connected to the slidingrod 203 , theeighth hole 303 passes through theair channel 221 of thebuffer device 200 , thefourth hole 106 of thefirst base 101 and Thesuction end 124 of thevacuum generator 121 is connected.

在一些实施例中，吸附件302的材料为发泡海绵材料。具体而言，为了增加吸附件302的柔软性和弹性，吸附件302可以选择发泡海绵材料。作为发泡海绵材料的制作方法，可以列举例如一步发泡法、预聚体发泡法、半预聚体发泡法以及手工发泡法等。In some embodiments, the material of theadsorption member 302 is a foamed sponge material. Specifically, in order to increase the softness and elasticity of the adsorbent 302, the adsorbent 302 can be made of foamed sponge material. Examples of methods for producing the foamed sponge material include a one-step foaming method, a prepolymer foaming method, a semi-prepolymer foaming method, and a manual foaming method.

此外，作为吸附件302使用的海绵材料，还可以选择例如精品海绵(具有泡孔均匀、拉力性、延伸性等优越性)、高回弹海绵等。作为高回弹海绵，可列举例如橡胶棉等。In addition, as the sponge material used for the adsorbent 302, for example, high-quality sponge (with advantages such as uniform cells, tensile force, and extensibility), high-resilience sponge, etc. can also be selected. As a high resilience sponge, rubber cotton etc. are mentioned, for example.

吸附件302的邵氏硬度A的最小值并不特别限定，可以根据所要吸附的易碎部件的重量适当地选择即可。在一些实施例中，吸附件302的邵氏硬度A为28度以上且32度以下。具体而言，例如，作为吸附件302的海绵材料的邵氏硬度A可以为30度。通过选择邵氏硬度A30度的海绵材料，在保持足够的柔软性以及回弹性的同时，也能够兼顾吸附件302的强度，防止吸附件302变形量过大。由此，能够提高真空吸盘300的可靠性。The minimum value of the Shore hardness A of theadsorption member 302 is not particularly limited, and may be appropriately selected according to the weight of the fragile component to be adsorbed. In some embodiments, the Shore hardness A of theadsorption member 302 is not less than 28 degrees and not more than 32 degrees. Specifically, for example, the Shore hardness A of the sponge material used as theadsorption member 302 may be 30 degrees. By selecting a sponge material with a Shore A hardness of 30 degrees, while maintaining sufficient softness and resilience, the strength of the adsorbent 302 can also be taken into account, preventing excessive deformation of the adsorbent 302 . Thereby, the reliability of thevacuum chuck 300 can be improved.

在一些实施例中，吸附件302的厚度(附图中为上下方向的厚度)为12mm以下。即，在本实施方式中，吸附件302的厚度可以是5mm以上且12mm以下。由此，能够使吸附件302的压缩行程在一定的范围之内，防止吸附件302的压缩行程过大导致可靠性降低。In some embodiments, the thickness of the adsorption member 302 (thickness in the vertical direction in the figure) is less than 12 mm. That is, in this embodiment, the thickness of the adsorbent 302 may be not less than 5 mm and not more than 12 mm. Thus, the compression stroke of theadsorption member 302 can be kept within a certain range, preventing the reliability reduction caused by the compression stroke of theadsorption member 302 being too large.

在一些实施例中，吸附件302通过粘接件贴附到第三基座301的下部。例如，吸附件302的上表面贴附有作为粘接件的双面胶。吸附件302通过该双面胶贴附到第三基座301的下部。由此，能够使吸附件302可靠地贴附到第三基座301的下部，且能够便于吸附件302的更换。In some embodiments, theadsorption member 302 is attached to the lower part of thethird base 301 by an adhesive member. For example, the upper surface of theadsorption member 302 is pasted with double-sided tape as an adhesive member. Theadsorption member 302 is attached to the lower part of thethird base 301 through the double-sided adhesive tape. Thus, theadsorption member 302 can be reliably attached to the lower part of thethird base 301 , and the replacement of theadsorption member 302 can be facilitated.

在上述具体实施方式中所描述的各个具体的技术特征，在不矛盾的情况下，可以通过任何方式进行组合，为了不必要的重复，本实施方式对各种可能的组合方式不另行说明。The various specific technical features described in the above specific implementation manners can be combined in any manner if there is no contradiction. For unnecessary repetition, this embodiment does not separately describe various possible combination manners.

以上实施例仅用于说明本实施方式的技术方案而并非对其进行限制，凡未脱离本实施方式范围的任何修改或者等同替换，均应当涵括在本实施方式的技术方案内。The above embodiments are only used to illustrate the technical solution of this embodiment and not to limit it. Any modification or equivalent replacement that does not depart from the scope of this embodiment shall be included in the technical solution of this embodiment.

Claims (10)

Translated fromChinese

1.电子元器件用真空吸附系统，其特征在于，包括：1. A vacuum adsorption system for electronic components, characterized in that it includes:真空发生部，所述真空发生部具有：第一基座、多个真空发生器和多个调节开关，其中，各所述真空发生器分别容置在所述第一基座内，并分别通过所述调节开关而独立地被封堵或者被打开；A vacuum generating part, the vacuum generating part has: a first base, a plurality of vacuum generators and a plurality of adjustment switches, wherein each of the vacuum generators is respectively housed in the first base, and passes through The regulating switch is independently blocked or opened;多个缓冲装置，各所述缓冲装置分别具有：呈筒状的第二基座和滑动杆，所述滑动杆的轴向的一端容置在所述第二基座内并相对所述第二基座沿轴向可滑动，所述第二基座和所述滑动杆共同形成气路通道，各所述第二基座和各所述真空发生器一一对应并通过气管连接；A plurality of buffer devices, each of which has a cylindrical second base and a sliding rod, and one axial end of the sliding rod is accommodated in the second base and opposite to the second The base is slidable in the axial direction, the second base and the sliding rod together form an air channel, and each of the second bases corresponds to each of the vacuum generators and is connected through a gas pipe;多个真空吸盘，各所述真空吸盘和各所述缓冲装置一一对应，各所述真空吸盘分别具有：第三基座和设置在所述第三基座上的吸附件，所述第三基座安装到所述滑动杆的轴向的另一端并和所述气路通道连通，所述吸附件的材料为邵氏硬度A在40度以下的海绵材料，且在未受压的情况下，所述吸附件的厚度为5mm以上。A plurality of vacuum chucks, each of the vacuum chucks corresponds to each of the buffer devices, each of the vacuum chucks respectively has: a third base and an adsorption piece arranged on the third base, the third The base is installed on the other end of the sliding rod in the axial direction and communicates with the air channel. The material of the adsorbent is a sponge material with a Shore A hardness of less than 40 degrees, and under the condition of no pressure , the thickness of the adsorbent is more than 5mm.2.根据权利要求1所述的电子元器件用真空吸附系统，其特征在于，所述第一基座开设有：2. The vacuum adsorption system for electronic components according to claim 1, wherein the first base is provided with:第一孔部，用于和外设高压气源连接，The first hole is used to connect with the external high-pressure air source,多个第二孔部，所述真空发生器分别容置在所述第二孔部内，a plurality of second hole portions, the vacuum generators are accommodated in the second hole portions respectively,多个第三孔部，各所述第三孔部分别将各所述第二孔部和所述第一孔部连通，A plurality of third holes, each of the third holes communicates with each of the second holes and the first holes,多个第四孔部，用于和所述气路通道连通，各所述第四孔部分别连通各所述第二孔部，并且，在所述第二孔部内容置有所述真空发生器的状态下，各所述第四孔部分别和各所述真空发生器的吸附端相对；A plurality of fourth holes are used to communicate with the gas passage, each of the fourth holes communicates with each of the second holes, and the vacuum generator is placed in the second hole In the state of the vacuum generator, each of the fourth holes is respectively opposite to the adsorption end of each of the vacuum generators;各所述调节开关分别设置有容置在所述第三孔部内的第一端部，所述第一端部沿所述第三孔部的轴向可进给以将所述第一孔部和所述第二孔部之间封堵或者打开。Each of the adjustment switches is respectively provided with a first end portion accommodated in the third hole portion, and the first end portion can be advanced along the axial direction of the third hole portion to move the first hole portion and the second hole is blocked or opened.3.根据权利要求2所述的电子元器件用真空吸附系统，其特征在于，所述第一孔部沿第一方向延伸，所述第一方向平行于所述第一基座的长度方向；3. The vacuum adsorption system for electronic components according to claim 2, wherein the first hole extends along a first direction, and the first direction is parallel to the length direction of the first base;所述第二孔部沿第二方向延伸，所述第二方向平行于所述第一基座的宽度方向且正交于所述第一方向；The second hole extends along a second direction parallel to the width direction of the first base and perpendicular to the first direction;所述第三孔部沿第三方向延伸，所述第三方向平行于所述第一基座的高度方向且分别正交于所述第一方向和所述第二方向；The third hole portion extends along a third direction, the third direction is parallel to the height direction of the first base and is respectively orthogonal to the first direction and the second direction;所述第四孔部沿所述第三方向延伸。The fourth hole portion extends along the third direction.4.根据权利要求2或3所述的电子元器件用真空吸附系统，其特征在于，所述第一基座上还开设有多个出气部，各所述出气部分别连通各所述第二孔部，并且，在所述真空发生器容置在所述第二孔部内的状态下，各所述出气部分别和各所述真空发生器的出气端连通。4. The vacuum adsorption system for electronic components according to claim 2 or 3, wherein a plurality of air outlets are provided on the first base, and each of the air outlets communicates with each of the second and each of the air outlets communicates with the air outlet of each of the vacuum generators when the vacuum generator is accommodated in the second hole.5.根据权利要求1所述的电子元器件用真空吸附系统，其特征在于，所述气路通道包括沿轴向贯通所述第二基座的第六孔部以及沿轴向贯通所述滑动杆的第七孔部，所述第六孔部和所述第七孔部连通；5. The vacuum adsorption system for electronic components according to claim 1, wherein the air channel includes a sixth hole penetrating the second base in the axial direction and a sixth hole penetrating the sliding base in the axial direction. the seventh hole of the rod, the sixth hole communicates with the seventh hole;所述第六孔部的轴向的一端密封地安装有第三气管接头，所述第三气管接头通过所述气管和所述真空发生器连接；One axial end of the sixth hole portion is hermetically installed with a third air pipe joint, and the third air pipe joint is connected to the vacuum generator through the air pipe;所述滑动杆至少部分容置在所述第六孔部内且相对所述第六孔部沿轴向可滑动；The sliding rod is at least partially accommodated in the sixth hole and is axially slidable relative to the sixth hole;在所述滑动杆沿远离所述第三气管接头的方向滑动时，所述滑动杆的一部分穿过所述第六孔部的轴向的另一端而显露在所述第二基座之外；When the sliding rod slides in a direction away from the third tracheal joint, a part of the sliding rod passes through the other axial end of the sixth hole and is exposed outside the second base;所述缓冲装置还包括弹性件，所述弹性件以压缩的状态一端抵接所述滑动杆且另一端抵接所述第二基座。The buffer device further includes an elastic member, and one end of the elastic member abuts against the sliding rod and the other end abuts against the second base in a compressed state.6.根据权利要求5所述的电子元器件用真空吸附系统，其特征在于，所述第六孔部的内壁上设置有限制部，所述滑动杆的容置在所述第六孔部内的部分设置有多边形部，所述多边形部在所述第六孔部内沿周向被所述限制部限制。6. The vacuum adsorption system for electronic components according to claim 5, wherein a restricting portion is provided on the inner wall of the sixth hole, and the part of the sliding rod accommodated in the sixth hole A polygonal portion is partially provided that is restricted by the restricting portion in the circumferential direction within the sixth hole portion.7.根据权利要求6所述的电子元器件用真空吸附系统，其特征在于，所述限制部包括开设在所述内壁上的多个第二槽部，多个所述第二槽部沿所述内壁的周向间隔分布，各所述第二槽部分别沿所述第六孔部的轴向延伸；7. The vacuum adsorption system for electronic components according to claim 6, wherein the restricting portion includes a plurality of second grooves formed on the inner wall, and the plurality of second grooves are arranged along the The inner wall is distributed at intervals in the circumferential direction, and each of the second grooves extends along the axial direction of the sixth hole;所述多边形部的边角部分别容置在所述第二槽部内，并可沿所述第二槽部滑动。The corner portions of the polygonal portion are respectively accommodated in the second groove portion and can slide along the second groove portion.8.根据权利要求1所述的电子元器件用真空吸附系统，其特征在于，所述第三基座的一侧开设有有用于和所述气路通道连通的第八孔部，所述第三基座的另一侧开设有多个第九孔部，所述第九孔部和所述第八孔部连通；8. The vacuum adsorption system for electronic components according to claim 1, wherein an eighth hole for communicating with the air channel is opened on one side of the third base, and the first The other side of the three bases is provided with a plurality of ninth holes, and the ninth holes communicate with the eighth holes;所述吸附件上开设有多个第十孔部，各所述第十孔部分别和各所述第九孔部一一相对。A plurality of tenth holes are opened on the adsorbent, and each of the tenth holes is opposite to each of the ninth holes.9.根据权利要求1所述的电子元器件用真空吸附系统，其特征在于，所述吸附件的材料为发泡海绵材料，所述吸附件的邵氏硬度A为28度以上且32度以下。9. The vacuum adsorption system for electronic components according to claim 1, wherein the material of the adsorbent is a foamed sponge material, and the Shore hardness A of the adsorbent is not less than 28 degrees and not more than 32 degrees .10.根据权利要求9所述的电子元器件用真空吸附系统，其特征在于，所述吸附件的厚度为12mm以下。10 . The vacuum adsorption system for electronic components according to claim 9 , wherein the thickness of the adsorption piece is less than 12 mm. 11 .

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