技术领域Technical Field
本发明涉及一种X射线源，具体涉及一种可快速切换不同靶材的X射线源及其使用方法。The present invention relates to an X-ray source, and in particular to an X-ray source capable of rapidly switching between different target materials and a method for using the same.
背景技术Background Art
X射线光源在医疗及科学研究中具有重要的作用，其基本结构由阴极灯丝、阳极靶和窗体组成，X射线光源一般被封装在一个高真空的玻璃或陶瓷壳体内。X-ray light sources play an important role in medical and scientific research. Their basic structure consists of a cathode filament, an anode target and a window. X-ray light sources are generally encapsulated in a high vacuum glass or ceramic shell.
现有X射线光源，一个X射线管只有一种靶材，且只能产生对应的一种X射线能谱。因X射线在空气中衰减较大，在实际应用中往往将其连接真空系统进行测试，如对探测器、晶体材料测试标定等，而这些测试需要不同的射线能谱，因此需要不断更换不同靶材的X射线管，导致测试效率较低。In existing X-ray light sources, an X-ray tube has only one target material and can only produce one corresponding X-ray energy spectrum. Since X-rays are greatly attenuated in the air, they are often connected to a vacuum system for testing in practical applications, such as testing and calibrating detectors and crystal materials. These tests require different ray energy spectra, so it is necessary to constantly replace X-ray tubes with different target materials, resulting in low test efficiency.
发明内容Summary of the invention
本发明的技术方案是解决现有一个X射线源只适用一种靶材，需不断更换不同靶材的X射线管才能得到不同的射线能谱，导致测试效率较低的技术问题，而提供一种可快速切换不同靶材的X射线源及其使用方法。本发明提出的一种可快速切换不同靶材的X射线源，可在动真空系统下，实时快速切换对应的阳极靶材，从而产生所需的X射线能谱，极大的提高了测试标定的效率，且具有易维修性。The technical solution of the present invention is to solve the technical problem that an existing X-ray source is only suitable for one target material, and X-ray tubes with different target materials need to be constantly replaced to obtain different ray energy spectra, resulting in low test efficiency, and to provide an X-ray source that can quickly switch between different target materials and a method of using the same. The present invention proposes an X-ray source that can quickly switch between different target materials, which can quickly switch the corresponding anode target material in real time under a dynamic vacuum system, thereby generating the required X-ray energy spectrum, greatly improving the efficiency of test calibration, and is easy to maintain.
本发明的技术解决方案是：The technical solution of the present invention is:
一种可快速切换不同靶材的X射线源，其特殊之处在于：An X-ray source that can quickly switch between different target materials. Its special features are:
包括腔体、阳极组件和阴极组件；comprising a chamber, an anode assembly and a cathode assembly;
所述腔体为上端和下端开口结构，侧壁设置有向外延伸的连通孔；连通孔用于将产生的X射线输出到真空管道；The cavity is an open structure at the upper and lower ends, and the side wall is provided with a connecting hole extending outward; the connecting hole is used to output the generated X-rays to the vacuum pipe;
所述阳极组件包括旋转手轮、定位筒、靶座、定位珠和与腔体下端面固连的磁流体；The anode assembly includes a rotating hand wheel, a positioning cylinder, a target seat, a positioning bead and a magnetic fluid fixedly connected to the lower end surface of the cavity;
所述磁流体包括与腔体的下端连接的壳体和位于壳体中心并垂直穿过壳体的中心滚轴；The magnetic fluid comprises a shell connected to the lower end of the cavity and a central roller located at the center of the shell and vertically passing through the shell;
所述定位筒套装在中心滚轴的外侧且固定在壳体的下表面；所述中心滚轴的下端穿过定位筒伸出；定位筒下表面设置有定位珠槽；The positioning cylinder is sleeved on the outside of the central roller and fixed on the lower surface of the shell; the lower end of the central roller extends through the positioning cylinder; and a positioning bead groove is provided on the lower surface of the positioning cylinder;
所述定位珠设置在定位珠槽内；The positioning beads are arranged in the positioning bead grooves;
所述靶座固定设置在中心滚轴的上端，且位于腔体内；The target seat is fixedly arranged at the upper end of the central roller and is located in the cavity;
所述靶座的上端面沿周向设置有多个靶材槽，用于安装靶材；The upper end surface of the target base is provided with a plurality of target grooves along the circumferential direction for installing the target;
所述旋转手轮与中心滚轴下端固定连接，并与定位筒下表面接触；旋转手轮上端面设置有与定位珠配合定位的多个第一凹槽，多个第一凹槽与多个靶材槽一一对应；The rotating hand wheel is fixedly connected to the lower end of the central roller and contacts the lower surface of the positioning cylinder; the upper end surface of the rotating hand wheel is provided with a plurality of first grooves for cooperating with the positioning beads for positioning, and the plurality of first grooves correspond one by one to the plurality of target grooves;
所述阴极组件包括绝缘件、阴极灯丝、两个导通螺钉、支撑件、两个高压插头和与腔体上端面固连的阴极盖；The cathode assembly includes an insulating member, a cathode filament, two conducting screws, a support member, two high-voltage plugs and a cathode cover fixedly connected to the upper end surface of the cavity;
所述阴极灯丝通过绝缘件固定设置在阴极盖的下端面，且位于腔体内靠近连通孔一侧，通过选择旋转手轮，使得任一靶材槽内的靶材与阴极灯丝相对；The cathode filament is fixedly arranged on the lower end surface of the cathode cover through an insulating member and is located in the cavity near the connecting hole. By rotating the hand wheel, the target in any target groove is opposite to the cathode filament.
所述阴极盖上设置有第二通孔；The cathode cover is provided with a second through hole;
所述支撑件穿入第二通孔内，并与阴极盖固定连接；The support member passes through the second through hole and is fixedly connected to the cathode cover;
所述支撑件为上端开口的筒状结构，且支撑件底端设置有两个螺钉孔；The support member is a cylindrical structure with an open upper end, and two screw holes are arranged at the bottom end of the support member;
所述两个导通螺钉分别固定设置在两个螺钉孔内；The two conducting screws are respectively fixedly arranged in the two screw holes;
所述两个高压插头伸入到支撑件筒内，并分别与两个导通螺钉连接；所述高压插头(37)用于连接外部高压。The two high-voltage plugs extend into the support tube and are respectively connected to the two conducting screws; the high-voltage plug (37) is used to connect external high voltage.
进一步地，所述腔体为不锈钢材质；所述绝缘件材质为陶瓷材质。Furthermore, the cavity is made of stainless steel; and the insulating component is made of ceramic.
进一步地，所述靶座包括盘体和与盘体下端面固连的柱状支撑件；所述盘体的上端面沿周向设置有多个靶材槽，且盘体上端面中部位于多个靶材槽内侧开设有第二凹槽；所述柱状支撑件的底部设置有与中心滚轴上端适配的第三凹槽，中心滚轴上端伸入第三凹槽内，并与柱状支撑件固连。Furthermore, the target seat includes a disc body and a columnar support member fixedly connected to the lower end surface of the disc body; the upper end surface of the disc body is provided with a plurality of target material grooves along the circumferential direction, and a second groove is provided in the middle of the upper end surface of the disc body and located inside the plurality of target material grooves; the bottom of the columnar support member is provided with a third groove adapted to the upper end of the central roller, the upper end of the central roller extends into the third groove and is fixedly connected to the columnar support member.
进一步地，所述旋转手轮的侧壁上对称设置两个安装孔，通过螺栓拧入安装孔内使旋转手轮与中心滚轴下端固定连接。Furthermore, two mounting holes are symmetrically arranged on the side wall of the rotating hand wheel, and the rotating hand wheel is fixedly connected to the lower end of the central roller by screwing bolts into the mounting holes.
进一步地，所述壳体和腔体之间设置有第一密封胶圈；所述阴极盖与腔体之间设置有第一密封胶圈；所述导通螺钉与支撑件之间设置有第二密封胶圈；所述支撑件和阴极盖之间设置有第三密封胶圈。Furthermore, a first sealing rubber ring is provided between the shell and the cavity; a first sealing rubber ring is provided between the cathode cover and the cavity; a second sealing rubber ring is provided between the conducting screw and the support member; and a third sealing rubber ring is provided between the support member and the cathode cover.
进一步地，还包括两个高压插头固定法兰；所述两个高压插头通过两个高压插头固定法兰与阴极盖固定连接。Furthermore, it also includes two high-voltage plug fixing flanges; the two high-voltage plugs are fixedly connected to the cathode cover via the two high-voltage plug fixing flanges.
进一步地，所述腔体的上、下端，阴极盖的边部，壳体的上端边部，定位筒的上端，均设置有法兰；所述腔体分别与阴极盖和壳体通过法兰固连；所述定位筒通过法兰与壳体固连；所述柱状支撑件通过螺钉与中心滚轴的上端固定连接。Furthermore, flanges are provided at the upper and lower ends of the cavity, the edge of the cathode cover, the upper edge of the shell, and the upper end of the positioning cylinder; the cavity is fixedly connected to the cathode cover and the shell by flanges respectively; the positioning cylinder is fixedly connected to the shell by flanges; and the columnar support is fixedly connected to the upper end of the central roller by screws.
进一步地，所述壳体包括圆盘和同轴固定设置在圆盘底部的柱状体，圆盘和柱状体中心设置与中心滚轴适配的安装孔，中心滚轴分别与圆盘和柱状体的安装孔可旋转连接；所述圆盘的上端面与腔体下端面固定连接；所述定位筒的上端面与圆盘的下端面连接，且定位筒下端与柱状体的内部底面固定连接；所述圆盘的上端面设置有密封圈安装槽，所述壳体和腔体之间的第一密封胶圈位于密封圈安装槽内。Furthermore, the shell includes a disc and a column coaxially fixed at the bottom of the disc, the disc and the column are centrally provided with mounting holes adapted to the central roller, and the central roller is rotatably connected to the mounting holes of the disc and the column respectively; the upper end surface of the disc is fixedly connected to the lower end surface of the cavity; the upper end surface of the positioning cylinder is connected to the lower end surface of the disc, and the lower end of the positioning cylinder is fixedly connected to the inner bottom surface of the column; the upper end surface of the disc is provided with a sealing ring mounting groove, and the first sealing rubber ring between the shell and the cavity is located in the sealing ring mounting groove.
进一步地，所述定位筒的下端面刻有分别与多个靶材槽位置对应的标记。Furthermore, the lower end surface of the positioning tube is engraved with marks corresponding to the positions of multiple target grooves respectively.
同时，本发明还提供了一种上述的可快速切换不同靶材的X射线源的使用方法，其特殊之处在于，包括以下步骤：At the same time, the present invention also provides a method for using the above-mentioned X-ray source capable of quickly switching different target materials, which is special in that it includes the following steps:
1)将X射线源安装于真空系统管道上，并接地；1) Install the X-ray source on the vacuum system pipeline and ground it;
2)将高压插头连接高压电源后插入支撑件中的导通螺钉孔中；2) Connect the high-voltage plug to the high-voltage power supply and insert it into the conduction screw hole in the support;
3)转动旋转手轮，将所需靶材转到阴极灯丝正下方，通过定位珠与该靶材对应的靶材槽配合进行限位；3) Turn the rotary hand wheel to move the required target material to the position directly below the cathode filament, and limit the position by cooperating with the positioning bead and the target material groove corresponding to the target material;
4)调节高压电源输出所需的电压，输出得到所需的X射线能谱。4) Adjust the voltage required by the high voltage power supply to output the required X-ray energy spectrum.
与现有技术相比，本发明具有如下有益效果：Compared with the prior art, the present invention has the following beneficial effects:
(1)本发明一种可快速切换不同靶材的X射线源，通过结构设计，一个靶做上可放置多个不同的靶材，采用旋转手轮与定位珠配合定位，可快速切换不同靶材的测试，得到所需的不同X射线能谱，极大提高测试效率。(1) The present invention provides an X-ray source that can quickly switch between different target materials. Through structural design, multiple different target materials can be placed on one target. The rotating hand wheel and the positioning beads are used to coordinate positioning, and the test of different target materials can be quickly switched to obtain the required different X-ray energy spectra, which greatly improves the test efficiency.
(2)本发明一种可快速切换不同靶材的X射线源，结构简单，操作容易，各零部件采用机械组装方式安装，各零部件可随时进行更换，可提高各零部件的利用率，节约成本。(2) The present invention provides an X-ray source that can quickly switch between different target materials. It has a simple structure and is easy to operate. Each component is installed by mechanical assembly. Each component can be replaced at any time, which can improve the utilization rate of each component and save costs.
(3)本发明一种可快速切换不同靶材的X射线源中与阴极灯丝连接的绝缘件采用陶瓷，既可以很好的起到绝缘作用又能起到导热作用。(3) In the X-ray source of the present invention that can quickly switch between different target materials, the insulating part connected to the cathode filament is made of ceramic, which can play a good role in insulation and heat conduction.
(4)本发明一种可快速切换不同靶材的X射线源，靶座上端面设置第三凹槽，使靶座与导通螺钉尽量远离，防止高压导通，同时可以起到减重的作用。(4) The present invention provides an X-ray source capable of quickly switching between different target materials. A third groove is provided on the upper end surface of the target base so that the target base is as far away from the conducting screw as possible to prevent high voltage conduction and reduce weight.
(5)本发明一种可快速切换不同靶材的X射线源，高压插头通过高压插头固定法兰与阴极盖固定连接，确保高压插头的安装稳固，提高可靠性。(5) The present invention provides an X-ray source that can quickly switch between different target materials. The high-voltage plug is fixedly connected to the cathode cover through a high-voltage plug fixing flange, thereby ensuring that the high-voltage plug is firmly installed and improving reliability.
(6)本发明一种可快速切换不同靶材的X射线源，在定位筒的下端面设计各靶材对应的标记，方便操作，快速旋转到位。(6) The present invention provides an X-ray source that can quickly switch between different target materials. Marks corresponding to each target material are designed on the lower end surface of the positioning tube to facilitate operation and quickly rotate into place.
(7)一种可快速切换不同靶材的X射线源的使用方法，操作简单，快速高效。(7) A method for using an X-ray source that can quickly switch between different target materials, which is simple to operate, fast and efficient.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1为本发明一种可快速切换不同靶材的X射线源实施例的结构示意图；FIG1 is a schematic structural diagram of an embodiment of an X-ray source capable of rapidly switching between different target materials according to the present invention;
图2为本发明一种可快速切换不同靶材的X射线源实施例的立体装配图；FIG2 is a three-dimensional assembly diagram of an embodiment of an X-ray source capable of rapidly switching between different target materials according to the present invention;
图3为本发明一种可快速切换不同靶材的X射线源实施例中阳极组件的结构示意图；FIG3 is a schematic structural diagram of an anode assembly in an embodiment of an X-ray source capable of rapidly switching between different target materials according to the present invention;
图4为本发明实施例中阳极组件的装配图；FIG4 is an assembly diagram of an anode assembly in an embodiment of the present invention;
图5为本发明一种可快速切换不同靶材的X射线源实施例中阴极组件的结构示意图；FIG5 is a schematic structural diagram of a cathode assembly in an embodiment of an X-ray source capable of rapidly switching between different target materials according to the present invention;
图6为本发明实施例中阴极组件装配图。FIG. 6 is an assembly diagram of a cathode assembly in an embodiment of the present invention.
附图标记：Reference numerals:
1-阳极组件，11-旋转手轮，111-第一凹槽，112-安装孔，12-定位筒，121-第一通孔，13-磁流体，131-壳体，132-中心滚轴，133-密封圈安装槽，14-靶座，141-盘体，142-柱状支撑件，143-第二凹槽，144-第三凹槽，15-靶材，16-螺钉，17-定位珠；2-腔体，21-连通孔；3-阴极组件，31-阴极盖，311-第二通孔，32-绝缘件，33-阴极灯丝，34-导通螺钉，35-支撑件，36-高压插头固定法兰，37-高压插头，4-密封胶圈。1-anode assembly, 11-rotating hand wheel, 111-first groove, 112-mounting hole, 12-positioning cylinder, 121-first through hole, 13-magnetic fluid, 131-shell, 132-center roller, 133-sealing ring mounting groove, 14-target seat, 141-disk, 142-columnar support, 143-second groove, 144-third groove, 15-target, 16-screw, 17-positioning bead; 2-cavity, 21-connecting hole; 3-cathode assembly, 31-cathode cover, 311-second through hole, 32-insulating member, 33-cathode filament, 34-conduction screw, 35-support, 36-high-voltage plug fixing flange, 37-high-voltage plug, 4-sealing rubber ring.
具体实施方式DETAILED DESCRIPTION
下面通过附图和具体实施例对本发明进行详细的说明。The present invention is described in detail below through the accompanying drawings and specific embodiments.
如图1和图2所示，本发明一种可快速切换不同靶材的X射线源，包括腔体2、阳极组件1和阴极组件3。As shown in FIG. 1 and FIG. 2 , an X-ray source capable of rapidly switching between different target materials according to the present invention includes a cavity 2 , an anode assembly 1 and a cathode assembly 3 .
腔体2形似三通结构，其上、下端均为开口结构，侧壁设置有向外延伸的连通孔21，连通孔21用于将产生的X射线输出到真空管道。腔体2的上、下端分别设置有法兰，阴极盖31的边部、壳体的上端边部也分别设置有法兰，腔体2的上、下端分别与阴极组件3的阴极盖31和阳极组件1的壳体131上端面通过法兰安装连接，安装后，阴极组件3和阳极组件1与腔体2的上、下端形成密封。腔体2侧壁上的连通孔21用于与外部设备真空系统管道连接。腔体2的材质一般采用不锈钢材质。The cavity 2 is shaped like a three-way structure, and its upper and lower ends are both open structures. The side wall is provided with a connecting hole 21 extending outward, and the connecting hole 21 is used to output the generated X-rays to the vacuum pipe. The upper and lower ends of the cavity 2 are respectively provided with flanges, and the edges of the cathode cover 31 and the upper edges of the shell are also respectively provided with flanges. The upper and lower ends of the cavity 2 are respectively connected to the cathode cover 31 of the cathode assembly 3 and the upper end surface of the shell 131 of the anode assembly 1 through flange mounting. After installation, the cathode assembly 3 and the anode assembly 1 form a seal with the upper and lower ends of the cavity 2. The connecting hole 21 on the side wall of the cavity 2 is used to connect to the vacuum system pipeline of the external equipment. The material of the cavity 2 is generally stainless steel.
如图3和图4所示，阳极组件1包括旋转手轮11、定位筒12、靶座14、定位珠17和与腔体2下端面固连的磁流体13。磁流体13包括与腔体2的下端连接的壳体131和位于壳体中心并垂直穿过壳体131的中心滚轴132。壳体131包括圆盘和同轴固定设置在圆盘底部的柱状体，圆盘和柱状体中心设置与中心滚轴132设配的安装孔，中心滚轴132分别与圆盘和柱状体的安装孔滚动连接。壳体131圆盘的上端面设置有法兰，圆盘的法兰与腔体2下端法兰固定连接。圆盘的上端面设置有密封圈安装槽133，壳体131与腔体2之间设置有第一密封胶圈4，第一密封胶圈4位于密封圈安装槽133内。定位筒12的上端设置有法兰；定位筒12通过法兰与壳体131圆盘的下端面固定连接。定位筒12套装固定在壳体131的柱状体上，且定位筒12下端与柱状体的下端面通过螺钉固定连接，定位筒12的下端设置有第一通孔121，中心滚轴132的下端穿过第一通孔121伸出，方便与旋转手轮11固定连接。定位筒12下表面设置有定位珠槽，定位珠17固定设置在定位珠槽内。为方便旋转靶材时方便知道靶材15是否旋转到位，在定位筒12的下端面刻有分别与八个靶材槽位置对应的名称标记，名称标记分别为八个靶材15的名称。As shown in Figures 3 and 4, the anode assembly 1 includes a rotating hand wheel 11, a positioning cylinder 12, a target seat 14, a positioning bead 17 and a magnetic fluid 13 fixedly connected to the lower end surface of the cavity 2. The magnetic fluid 13 includes a shell 131 connected to the lower end of the cavity 2 and a central roller 132 located at the center of the shell and vertically passing through the shell 131. The shell 131 includes a disc and a columnar body coaxially fixedly arranged at the bottom of the disc, and the disc and the columnar body are provided with mounting holes equipped with the central roller 132, and the central roller 132 is respectively connected to the mounting holes of the disc and the columnar body in a rolling manner. The upper end surface of the disc of the shell 131 is provided with a flange, and the flange of the disc is fixedly connected to the lower end flange of the cavity 2. The upper end surface of the disc is provided with a sealing ring mounting groove 133, and a first sealing rubber ring 4 is provided between the shell 131 and the cavity 2, and the first sealing rubber ring 4 is located in the sealing ring mounting groove 133. The upper end of the positioning cylinder 12 is provided with a flange; the positioning cylinder 12 is fixedly connected to the lower end surface of the disc of the shell 131 through the flange. The positioning cylinder 12 is fixedly mounted on the columnar body of the shell 131, and the lower end of the positioning cylinder 12 is fixedly connected to the lower end surface of the columnar body by screws. The lower end of the positioning cylinder 12 is provided with a first through hole 121, and the lower end of the center roller 132 extends through the first through hole 121, so as to be conveniently fixedly connected to the rotating handwheel 11. The lower surface of the positioning cylinder 12 is provided with a positioning bead groove, and the positioning bead 17 is fixedly set in the positioning bead groove. In order to facilitate knowing whether the target 15 is rotated into place when rotating the target, name marks corresponding to the positions of the eight target grooves are engraved on the lower end surface of the positioning cylinder 12, and the name marks are the names of the eight targets 15 respectively.
靶座14安装在阳极组件1的中心滚轴132上端，且靶座14位于腔体2内。靶座14包括盘体141和与盘体141下端面固连的柱状支撑件142。盘体141的上端面沿周向设置有八个靶材槽，八个靶材槽用于安装八种不同的靶材15，且盘体141上端面中部位于八个靶材槽内侧开设有第二凹槽143，当所需靶材转到位后，开设的第二凹槽143正好与导通螺钉34相对，第二凹槽143可以使导通螺钉34尽量远离靶座14的上端面，防止高压导通。柱状支撑件142的底部设置有与中心滚轴132上端适配的第三凹槽144，中心滚轴132伸入第三凹槽144内，柱状支撑件通过螺钉16与中心滚轴132的上端固定连接。旋转手轮11与中心滚轴132下端固定连接，旋转手轮11上端面与定位筒12的下表面接触。旋转手轮11上端面设置有与定位珠配合定位的八个第一凹槽111，八个第一凹槽111与八个靶材槽位置一一对应，旋转旋转手轮11使所需的靶材位于阴极灯丝33正下方且与阴极灯丝33正对时，定位珠17正好转到与所需靶材对应的第一凹槽111内，定位珠17弹向第一凹槽111内，与对应的第一凹槽111配合限位。旋转手轮11的侧壁上对称设置两个安装孔112，通过螺栓拧入安装孔112内使旋转手轮11与中心滚轴132下端固定连接。The target holder 14 is mounted on the upper end of the central roller 132 of the anode assembly 1, and the target holder 14 is located in the cavity 2. The target holder 14 includes a disk 141 and a columnar support member 142 fixedly connected to the lower end face of the disk 141. The upper end face of the disk 141 is provided with eight target material grooves along the circumferential direction, and the eight target material grooves are used to install eight different target materials 15, and a second groove 143 is provided in the middle of the upper end face of the disk 141, located inside the eight target material grooves. When the required target material is rotated into place, the second groove 143 is just opposite to the conduction screw 34. The second groove 143 can make the conduction screw 34 as far away from the upper end face of the target holder 14 as possible to prevent high voltage conduction. The bottom of the columnar support member 142 is provided with a third groove 144 adapted to the upper end of the central roller 132, and the central roller 132 extends into the third groove 144. The columnar support member is fixedly connected to the upper end of the central roller 132 by a screw 16. The rotating hand wheel 11 is fixedly connected to the lower end of the central roller 132, and the upper end surface of the rotating hand wheel 11 contacts the lower surface of the positioning tube 12. The upper end surface of the rotating hand wheel 11 is provided with eight first grooves 111 for positioning with the positioning beads, and the eight first grooves 111 correspond to the eight target grooves one by one. When the rotating hand wheel 11 is rotated so that the required target is located directly below the cathode filament 33 and directly opposite to the cathode filament 33, the positioning beads 17 just turn to the first groove 111 corresponding to the required target, and the positioning beads 17 bounce into the first groove 111 and cooperate with the corresponding first groove 111 to limit the position. Two mounting holes 112 are symmetrically arranged on the side wall of the rotating hand wheel 11, and the rotating hand wheel 11 is fixedly connected to the lower end of the central roller 132 by screwing bolts into the mounting holes 112.
如图5和图6所示，阴极组件3包括绝缘件32、阴极灯丝33、两个导通螺钉34、支撑件35、两个高压插头37和与腔体2上端面固连的阴极盖31。阴极灯丝33通过绝缘件32固定设置在阴极盖31的下端面，且阴极灯丝33和绝缘件32位于腔体2内靠近连通孔21一侧，通过选择旋转手轮11，使得任一靶材槽内的靶材15与阴极灯丝33相对，本实施例中绝缘件32材质为陶瓷，可以起到绝缘及导热作用。阴极盖31上设置有第二通孔311。支撑件35穿入第二通孔311内，并与阴极盖31固定连接；支撑件35为上端开口的筒状结构，且支撑件35底端设置有两个螺钉孔；两个导通螺钉34分别固定设置在两个螺钉孔内。两个高压插头37伸入到支撑件35筒内，高压插头采用防呆设计将两个高压插头37插入两个导通螺钉34中，高压插头37用于连接外部高压。为防止高压插头脱落，本实施例中还设置有两个高压插头固定法兰36，两个高压插头37通过两个高压插头固定法兰36与阴极盖31固定连接。为防止泄露保证密封性，阴极盖31与腔体2之间设置有第一密封胶圈4，导通螺钉34与支撑件35之间设置有第二密封胶圈；支撑件35和阴极盖31之间设置有第三密封胶圈。As shown in Figures 5 and 6, the cathode assembly 3 includes an insulating member 32, a cathode filament 33, two conducting screws 34, a supporting member 35, two high-voltage plugs 37 and a cathode cover 31 fixedly connected to the upper end surface of the cavity 2. The cathode filament 33 is fixedly arranged on the lower end surface of the cathode cover 31 through the insulating member 32, and the cathode filament 33 and the insulating member 32 are located on the side of the cavity 2 close to the connecting hole 21. By selecting and rotating the hand wheel 11, the target 15 in any target groove is opposite to the cathode filament 33. In this embodiment, the insulating member 32 is made of ceramic, which can play an insulating and heat-conducting role. A second through hole 311 is provided on the cathode cover 31. The supporting member 35 penetrates into the second through hole 311 and is fixedly connected to the cathode cover 31; the supporting member 35 is a cylindrical structure with an open upper end, and two screw holes are provided at the bottom end of the supporting member 35; the two conducting screws 34 are fixedly arranged in the two screw holes respectively. Two high-voltage plugs 37 extend into the support member 35 tube. The high-voltage plugs are designed to be foolproof so that the two high-voltage plugs 37 are inserted into the two conduction screws 34. The high-voltage plugs 37 are used to connect external high voltage. To prevent the high-voltage plugs from falling off, two high-voltage plug fixing flanges 36 are also provided in this embodiment. The two high-voltage plugs 37 are fixedly connected to the cathode cover 31 through the two high-voltage plug fixing flanges 36. To prevent leakage and ensure sealing, a first sealing rubber ring 4 is provided between the cathode cover 31 and the cavity 2, a second sealing rubber ring is provided between the conduction screws 34 and the support member 35; and a third sealing rubber ring is provided between the support member 35 and the cathode cover 31.
本发明提供的一种可快速切换不同靶材的X射线源，阴极灯丝33两端连接导通螺钉34上的悬浮负高压，高压插头37一端连接高压电源，另一端插入导通螺钉34中从而实现高压电过真空，阳极靶材15接地。在动真空系统环境下，通过转动安装于磁流体13上的旋转手轮11带动靶座14上的不同靶材15快速切换到阴极灯丝33正下方，当灯丝接通电源后发热产生电子，电子通过灯丝和靶材之间电场作用而加速撞击靶材，从而产生X射线，X射线通过连通孔21输出到真空管道。本发明将极大的提高测试中需要不同X射线能谱测量的效率，而且具有易维修和各部件易更换等优点。The present invention provides an X-ray source that can quickly switch between different target materials. Both ends of the cathode filament 33 are connected to the suspended negative high voltage on the conduction screw 34. One end of the high-voltage plug 37 is connected to the high-voltage power supply, and the other end is inserted into the conduction screw 34 to achieve high-voltage electricity passing through a vacuum, and the anode target material 15 is grounded. In a dynamic vacuum system environment, by rotating the rotating hand wheel 11 installed on the magnetic fluid 13, the different target materials 15 on the target holder 14 are quickly switched to the bottom of the cathode filament 33. When the filament is connected to the power supply, it generates heat to generate electrons. The electrons are accelerated to hit the target material through the electric field between the filament and the target material, thereby generating X-rays. The X-rays are output to the vacuum pipe through the connecting hole 21. The present invention will greatly improve the efficiency of different X-ray energy spectrum measurements required in the test, and has the advantages of easy maintenance and easy replacement of various components.
同时，本发明还提供了一种上述的可快速切换不同靶材的X射线源的使用方法，包括以下步骤：At the same time, the present invention also provides a method for using the above-mentioned X-ray source capable of quickly switching between different target materials, comprising the following steps:
1)将X射线源通过连通孔21安装于真空系统管道上，并将壳体接地；1) Install the X-ray source on the vacuum system pipeline through the connecting hole 21 and ground the shell;
2)将高压插头37连接高压电源后插入支撑件35中的导通螺钉孔34中；2) Connect the high-voltage plug 37 to the high-voltage power supply and then insert it into the conductive screw hole 34 in the support member 35;
3)转动旋转手轮11，将所需靶材15转到阴极灯丝33正下方，通过定位珠17进行限位；3) Turn the rotary hand wheel 11 to move the desired target material 15 to the position directly below the cathode filament 33 and limit the position using the positioning beads 17;
4)调节高压电源输出所需的电压，则可在测试方输出得到所需的X射线能谱。4) By adjusting the voltage required by the high voltage power supply output, the required X-ray energy spectrum can be obtained at the test output.
以上公开的仅为本发明的具体实施例，但是，本发明实施例并非局限于此，任何本领域的技术人员能思之的变化都应落入本发明的保护范围。The above disclosure is only a specific embodiment of the present invention, but the embodiments of the present invention are not limited thereto, and any changes that can be conceived by those skilled in the art should fall within the protection scope of the present invention.
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| CN202211476658.0ACN116053100B (en) | 2022-11-23 | 2022-11-23 | An X-ray source capable of quickly switching between different target materials and a method of using the same |
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