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CN115824486B - Air pressure sensor based on optical fiber ring resonant cavity - Google Patents

Air pressure sensor based on optical fiber ring resonant cavity

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Publication number
CN115824486B
CN115824486BCN202211695274.8ACN202211695274ACN115824486BCN 115824486 BCN115824486 BCN 115824486BCN 202211695274 ACN202211695274 ACN 202211695274ACN 115824486 BCN115824486 BCN 115824486B
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optical fiber
fiber ring
air pressure
cavity
gas
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CN115824486A (en
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孙旦临
杨凤丽
林伟
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Changzhou Tonight Opto Electrical Technology Co ltd
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Changzhou Tonight Opto Electrical Technology Co ltd
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Abstract

The invention relates to an air pressure sensor based on an optical fiber ring resonator. The invention relates to the technical field of optical sensing, which comprises a voltage source, a light source, an optical fiber coupler, an optical fiber ring, a first gas cavity, a second gas cavity, an outer sleeve, a photoelectric detector and a processing system, wherein the optical fiber coupler is arranged on the outer sleeve; the invention comprises an optical fiber ring resonant cavity, which comprises an optical fiber ring, a sealed gas cavity and an open gas cavity, when the measured ambient air pressure changes, the cavity length of the optical fiber ring resonant cavity changes, and the free spectrum range of the optical fiber ring resonant cavity is changed, therefore, the invention has the advantages of simple structure, electromagnetic interference resistance, good corrosion resistance, high response speed, and high intellectualization and integration degree.

Description

Air pressure sensor based on optical fiber ring resonant cavity
Technical Field
The invention relates to the technical field of optical sensing, in particular to an air pressure sensor based on an optical fiber ring resonant cavity.
Background
The air pressure sensor on the regenerated organic resin composite profile device can transmit internal pressure change in real time, and accurately master pressure change of internal waste gas, so that the molten state of the reaction material is changed, data parameters can be adjusted in time when abnormality occurs, and the profile is prevented from being unqualified when extrusion molding occurs. However, the air pressure sensor used on the current regenerated organic resin composite section device has low sensitivity, is easy to be corroded and damaged, and is frequently replaced, so that manpower and material resources are wasted, and the section production progress is delayed, so that the pressure value change is judged through experience at present. The air pressure sensor with high sensitivity and corrosion resistance can effectively solve the problems, can accurately and effectively feed back pressure change, and is beneficial to the automatic and intelligent transformation of the later stage of the regenerated organic resin composite section device.
At present, the physical and chemical properties of waste photoresist waste are tested and analyzed to research the structural characteristics, the specific surface of particles and the like of the waste photoresist, the waste gas automatic treatment equipment, resin surface activation equipment, waste resin innocent treatment and other automatic equipment in the waste photoresist and WEEE plastic recovery process are designed and developed to build corresponding production lines, and the production wastewater and waste gas generated in the composite material preparation process are treated. Aiming at VOCs in waste gas, a low-temperature plasma device is researched on the traditional photocatalytic oxidation technology, the influence of parameters such as electron energy, electron density, gas temperature, pollutant gas components and the like on the reaction efficiency is researched, the catalytic activity is improved, and the photochemical coupling low-temperature plasma device is designed and manufactured, so that the integrated equipment and technology for waste gas treatment are realized, and the harmless target of secondary pollution generated in the whole process is realized. The air pressure sensor is an instrument for measuring air pressure, the essence of the air pressure is the collision of air atoms or air molecules to the container wall, reflects the rarefaction degree of the air, and has very important significance for life and production of people. The relative air pressure is calculated by taking the local air pressure at the moment as a reference point, and is also called as the gauge air pressure, the most widely used at present is a mechanical air pressure sensor, which has the advantages of high mechanical strength, convenient production and low cost, but has obvious defects, such as low sensitivity, low intellectualization and low integration degree, and especially in the biological and chemical fields, the sensor can only be used for measuring the air pressure in dry and non-corrosive environments, and is difficult to meet the development demands of modern industry.
The air pressure sensor is an instrument for measuring air pressure, the essence of the air pressure is the collision of air atoms or air molecules to the container wall, reflects the rarefaction degree of the air, and has very important significance for life and production of people. One of the barometric sensors widely used at present is a mercury barometer, which is measured by using the balance of mercury gravity and gas pressure, but the accuracy of human eye reading is very limited and is easily influenced by other factors in the environment, and the other barometric sensor widely used is an electronic barometer, which has higher sensitivity and better stability than the mercury barometer, but has obvious defects, such as easy electromagnetic interference, complex preparation process, high cost, poor adaptability and the like, and particularly in the fields of biology, chemistry and the like, has poor corrosion resistance, can only be used for measuring the gas pressure in dry and non-corrosive environments, and is difficult to meet the development requirements of modern industry.
The optical fiber device has the advantages of simple structure, small volume, light weight, small loss, good spectral characteristics, high reliability and the like, the application of the optical fiber in the sensing field is wider and wider at present, the huge advantages of the optical fiber sensor are gradually highlighted, such as high sensitivity, electromagnetic interference resistance, small influence on the measured environment, high response speed, high intelligent and integrated degree and the like, and the optical fiber sensor is particularly suitable for working in severe environments, can be used for measuring environments with strong electromagnetic radiation, strong nuclear radiation, strong corrosiveness in the fields of physics, biology, chemistry and the like.
Disclosure of Invention
Aiming at the defects or improvement demands of the prior art, the air pressure sensor based on the optical fiber ring resonant cavity solves the problems that the existing air pressure sensor is complex in structure, easy to suffer from electromagnetic interference, poor in corrosion resistance, low in response speed and low in intelligent and integrated degree.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
The invention provides an air pressure sensor based on an optical fiber ring resonant cavity, which provides the following technical scheme:
The air pressure sensor based on the optical fiber ring resonant cavity comprises a voltage source, a light source, an optical fiber coupler, an optical fiber ring, a first air cavity, a second air cavity, an outer sleeve, a photoelectric detector and a processing system;
The optical output end of the light source is connected with the first optical input end of the optical fiber coupler, the optical fiber ring is connected with the second optical output end and the second optical input end of the optical fiber coupler, the optical fiber ring is provided with two unclosed optical fiber rings, the outer sleeve is arranged outside the optical fiber ring and wraps the two unclosed positions of the optical fiber ring, so that a first gas cavity and a second gas cavity are formed at the two unclosed positions of the optical fiber ring, a small hole on the side surface of the outer sleeve is communicated with the first gas cavity, the first optical output end of the optical fiber coupler is connected with the optical input end of the photoelectric detector;
the optical fiber coupler 3, the optical fiber ring 4, the first gas cavity 5 and the second gas cavity 6 form an optical fiber ring resonant cavity.
Preferably, the first gas cavity is open, the first gas cavity is communicated with the external environment through the small hole on the side surface of the outer sleeve, and the gas freely flows between the first gas cavity and the external environment;
the second gas chamber is sealed, the second gas chamber is sealed inside the outer sleeve, the second gas chamber is filled with gas, and when the outer sleeve is not deformed, the gas pressure in the second gas chamber is the known gas pressure P.
Preferably, the voltage source outputs a periodic triangular wave voltage, and the triangular wave voltage is applied to the voltage modulation input end of the light source to tune the frequency of the output light of the light source, and the frequency tuning range of the output light of the light source is made to be larger than 2 times of the free spectral range of the optical fiber ring resonator.
Preferably, the optical fiber ring is an optical fiber ring which consists of three sections of optical fibers and has two parts which are not closed, wherein the optical fiber ring is wrapped by the outer sleeve, and the optical fiber is fixed inside the outer sleeve.
Preferably, the optical fiber coupler, the optical fiber ring, the first gas chamber and the second gas chamber form an optical fiber ring resonator.
Preferably, the processing system comprises an acquisition circuit, a comparison analysis circuit and an output circuit;
the first electric input end of the acquisition circuit is the first electric input end of the processing system, the second electric input end of the acquisition circuit is the second electric input end of the processing system, the electric output end of the output circuit is the electric output end of the processing system, the second electric output end of the voltage source is connected with the first electric input end of the acquisition circuit, the electric output end of the photoelectric detector is connected with the second electric input end of the acquisition circuit, the first electric output end of the acquisition circuit is connected with the first electric input end of the comparison analysis circuit, the second electric output end of the acquisition circuit is connected with the second electric input end of the comparison analysis circuit, the electric output end of the comparison analysis circuit is connected with the electric input end of the output circuit, and the electric output end of the output circuit outputs a sensor output signal.
A gas pressure detection device is a gas pressure sensor based on an optical fiber ring resonator.
A method of measuring a gas pressure sensor based on a fiber optic ring resonator, the method comprising the steps of:
When the outer sleeve is not deformed, recording a transmission spectrum of the optical fiber ring resonant cavity, and recording the transmission spectrum as a transmission spectrum lambda, obtaining a frequency interval of transmission valleys in the transmission spectrum lambda, and recording the frequency interval as a first free spectrum range;
Placing a first gas cavity in a measured environment, enabling the gas pressure in the first gas cavity to be equal to the gas pressure of the measured environment, recording a transmission spectrum of the optical fiber ring resonator, marking the transmission spectrum as a transmission spectrum lambda, obtaining a frequency interval of a transmission valley in the transmission spectrum lambda, marking the frequency interval as a second free spectrum range, and dividing the frequency interval into the following three cases according to the sizes of the first free spectrum range and the second free spectrum range:
when the first free spectrum range is equal to the second free spectrum range, judging that the air pressure of the measured environment is equal to the known air pressure P;
when the first free spectrum range is smaller than the second free spectrum range, the air pressure of the measured environment is judged to be larger than the known air pressure P, and the air pressure is obtained by the difference value between the second free spectrum range and the first free spectrum range;
when the first free spectrum range is larger than the second free spectrum range, the air pressure of the measured environment is judged to be smaller than the known air pressure P, and the air pressure is obtained by the difference value between the first free spectrum range and the second free spectrum range.
A computer readable storage medium having stored thereon a computer program for execution by a processor for performing a method of measuring a gas pressure sensor based on a fiber optic ring resonator.
A computer device comprising a memory and a processor, the memory having a computer program stored therein, the processor performing a method of measuring a gas pressure sensor based on a fiber optic ring resonator when the processor runs the computer program stored in the memory.
The invention has the following beneficial effects:
the invention comprises an optical fiber ring resonator, which comprises an optical fiber ring, a sealed gas cavity and an open gas cavity, when the measured ambient air pressure changes, the cavity length of the optical fiber ring resonator changes, and the free spectrum range of the optical fiber ring resonator is changed, therefore, the invention has the advantages of simple structure, electromagnetic interference resistance, good corrosion resistance, high response speed, and high intellectualization and integration degree.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of the overall structure of the present invention;
FIG. 2 is a waveform diagram of a triangular wave voltage output by a voltage source;
fig. 3 is a schematic circuit diagram of a processing system.
Detailed Description
The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, unless explicitly stated or limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected, mechanically connected, electrically connected, directly connected, indirectly connected via an intervening medium, or in communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
In addition, the technical features of the different embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
The present invention will be described in detail with reference to specific examples.
First embodiment:
According to the specific optimization technical scheme adopted by the invention for solving the technical problems, as shown in the figures 1 to 3, the invention relates to an air pressure sensor based on an optical fiber ring resonant cavity.
The invention aims at realizing the air pressure sensor based on the optical fiber ring resonant cavity, which comprises a voltage source 1, a light source 2, an optical fiber coupler 3, an optical fiber ring 4, a first gas cavity 5, a second gas cavity 6, an outer sleeve 7, a photoelectric detector 8 and a processing system 9;
The optical output end of the light source 2 is connected with the first optical input end of the optical fiber coupler 3, the optical fiber ring 4 is connected with the second optical output end and the second optical input end of the optical fiber coupler 3, the optical fiber ring 4 is an optical fiber ring with two unclosed positions, the outer sleeve 7 is arranged outside the optical fiber ring 4 and wraps the two unclosed positions of the optical fiber ring 4, so that a first gas cavity 5 and a second gas cavity 6 are formed at the two unclosed positions of the optical fiber ring 4, a small hole on the side surface of the outer sleeve 7 is communicated with the first gas cavity 5, the first optical output end of the optical fiber coupler 3 is connected with the optical input end of the photoelectric detector 8, the first electric output end of the voltage source 1 is connected with the voltage modulation input end of the light source 2, the second electric output end of the voltage source 1 is connected with the first electric input end of the processing system 9, the electric output end of the photoelectric detector 8 is connected with the second electric input end of the processing system 9, and the electric output end of the processing system 9 outputs a sensor output signal;
the optical fiber coupler 3, the optical fiber ring 4, the first gas cavity 5 and the second gas cavity 6 form an optical fiber ring resonant cavity;
Said jacket 7 is elastic and the elastic coefficient of the jacket 7 is known;
The first gas cavity 5 is open, the first gas cavity 5 is communicated with the external environment through small holes on the side surface of the outer sleeve 7, and gas can freely flow between the first gas cavity 5 and the external environment;
the second gas cavity 6 is sealed, the second gas cavity 6 is sealed inside the outer sleeve 7, the second gas cavity 6 is filled with gas, and when the outer sleeve 7 is not deformed, the gas pressure in the second gas cavity 6 is the known gas pressure P;
The optical fiber ring 4 is an optical fiber ring which consists of three sections of optical fibers and is not closed, the optical fiber ring 4 is wrapped by the outer sleeve 7, and the optical fiber is fixed inside the outer sleeve 7;
the reflectivity of the inner surface of the outer sleeve 7 to the output light of the light source 2 is larger, so that the power of the output light of the first light output end of the optical fiber coupler 3 meets the detection requirement of the photoelectric detector 8;
The voltage source 1 outputs periodic triangular wave voltage, the waveform of the triangular wave voltage is shown in figure 2, the triangular wave voltage is loaded to the voltage modulation input end of the light source 2 to tune the frequency of the output light of the light source 2, and the frequency tuning range of the output light of the light source 2 is made to be larger than 2 times of the free spectrum range of the optical fiber ring resonant cavity;
the output light of the light source 2 is continuous in time, the line width of the light is smaller than that of the transmission trough of the optical fiber ring resonator, the frequency of the light is determined by the voltage of the voltage modulation input end of the light source 2, and the relation between the frequency of the light and the voltage of the voltage modulation input end of the light source 2 is a linear relation;
the processing system 9 consists of an acquisition circuit 9-1, a comparison analysis circuit 9-2 and an output circuit 9-3;
The first electric input end of the acquisition circuit 9-1 is the first electric input end of the processing system 9, the second electric input end of the acquisition circuit 9-1 is the second electric input end of the processing system 9, the electric output end of the output circuit 9-3 is the electric output end of the processing system 9, the second electric output end of the voltage source 1 is connected with the first electric input end of the acquisition circuit 9-1, the electric output end of the photoelectric detector 8 is connected with the second electric input end of the acquisition circuit 9-1, the first electric output end of the acquisition circuit 9-1 is connected with the first electric input end of the comparison analysis circuit 9-2, the second electric output end of the acquisition circuit 9-1 is connected with the second electric input end of the comparison analysis circuit 9-2, the electric output end of the comparison analysis circuit 9-2 is connected with the electric input end of the output circuit 9-3, and the electric output end of the output circuit 9-3 outputs a sensor output signal.
When the invention measures the air pressure of the measured environment, the first air cavity 5 is placed in the measured environment, so that the air pressure in the first air cavity 5 is equal to the air pressure of the measured environment;
(2) When the air pressure of the measured environment is equal to the known air pressure P, the air pressure in the first air cavity 5 is equal to the air pressure in the second air cavity 6, and compared with the case that the outer sleeve 7 is not deformed, the length of the first air cavity 5 is unchanged, the length of the second air cavity 6 is unchanged, and the cavity length of the optical fiber ring resonant cavity is unchanged, and at the moment, the free spectral range of the optical fiber ring resonant cavity is unchanged;
(3) When the air pressure of the measured environment is larger than the known air pressure P, the air pressure in the first air cavity 5 is larger than the air pressure in the second air cavity 6, and compared with the case that the outer sleeve 7 is not deformed, the length of the first air cavity 5 is unchanged, the length of the second air cavity 6 is reduced, the cavity length of the optical fiber ring resonant cavity is reduced, and at the moment, the free spectral range of the optical fiber ring resonant cavity is increased;
(4) When the air pressure of the measured environment is smaller than the known air pressure P, the air pressure in the first air cavity 5 is smaller than the air pressure in the second air cavity 6, the length of the first air cavity 5 is unchanged, the length of the second air cavity 6 is increased, the cavity length of the optical fiber ring resonator is increased, and at the moment, the free spectral range of the optical fiber ring resonator is reduced.
Specific embodiment II:
The present embodiment is described with reference to fig. 1,2, and 3, and is composed of a voltage source 1, a light source 2, an optical fiber coupler 3, an optical fiber ring 4, a first gas chamber 5, a second gas chamber 6, an outer jacket 7, a photodetector 8, and a processing system 9;
The optical output end of the light source 2 is connected with the first optical input end of the optical fiber coupler 3, the optical fiber ring 4 is connected with the second optical output end and the second optical input end of the optical fiber coupler 3, the optical fiber ring 4 is an optical fiber ring with two unclosed positions, the outer sleeve 7 is arranged outside the optical fiber ring 4 and wraps the two unclosed positions of the optical fiber ring 4, so that a first gas cavity 5 and a second gas cavity 6 are formed at the two unclosed positions of the optical fiber ring 4, a small hole on the side surface of the outer sleeve 7 is communicated with the first gas cavity 5, the first optical output end of the optical fiber coupler 3 is connected with the optical input end of the photoelectric detector 8, the first electric output end of the voltage source 1 is connected with the voltage modulation input end of the light source 2, the second electric output end of the voltage source 1 is connected with the first electric input end of the processing system 9, the electric output end of the photoelectric detector 8 is connected with the second electric input end of the processing system 9, and the electric output end of the processing system 9 outputs a sensor output signal;
the optical fiber coupler 3, the optical fiber ring 4, the first gas cavity 5 and the second gas cavity 6 form an optical fiber ring resonant cavity;
Said jacket 7 is elastic and the elastic coefficient of the jacket 7 is known;
The first gas cavity 5 is open, the first gas cavity 5 is communicated with the external environment through small holes on the side surface of the outer sleeve 7, and gas can freely flow between the first gas cavity 5 and the external environment;
the second gas cavity 6 is sealed, the second gas cavity 6 is sealed inside the outer sleeve 7, the second gas cavity 6 is filled with gas, and when the outer sleeve 7 is not deformed, the gas pressure in the second gas cavity 6 is the known gas pressure P;
The optical fiber ring 4 is an optical fiber ring which consists of three sections of optical fibers and is not closed, the optical fiber ring 4 is wrapped by the outer sleeve 7, and the optical fiber is fixed inside the outer sleeve 7;
the reflectivity of the inner surface of the outer sleeve 7 to the output light of the light source 2 is larger, so that the power of the output light of the first light output end of the optical fiber coupler 3 meets the detection requirement of the photoelectric detector 8;
The voltage source 1 outputs periodic triangular wave voltage, the waveform of the triangular wave voltage is shown in figure 2, the triangular wave voltage is loaded to the voltage modulation input end of the light source 2 to tune the frequency of the output light of the light source 2, and the frequency tuning range of the output light of the light source 2 is made to be larger than 2 times of the free spectrum range of the optical fiber ring resonant cavity;
the output light of the light source 2 is continuous in time, the line width of the light is smaller than that of the transmission trough of the optical fiber ring resonator, the frequency of the light is determined by the voltage of the voltage modulation input end of the light source 2, and the relation between the frequency of the light and the voltage of the voltage modulation input end of the light source 2 is a linear relation;
the processing system 9 consists of an acquisition circuit 9-1, a comparison analysis circuit 9-2 and an output circuit 9-3;
The first electric input end of the acquisition circuit 9-1 is the first electric input end of the processing system 9, the second electric input end of the acquisition circuit 9-1 is the second electric input end of the processing system 9, the electric output end of the output circuit 9-3 is the electric output end of the processing system 9, the second electric output end of the voltage source 1 is connected with the first electric input end of the acquisition circuit 9-1, the electric output end of the photoelectric detector 8 is connected with the second electric input end of the acquisition circuit 9-1, the first electric output end of the acquisition circuit 9-1 is connected with the first electric input end of the comparison analysis circuit 9-2, the second electric output end of the acquisition circuit 9-1 is connected with the second electric input end of the comparison analysis circuit 9-2, the electric output end of the comparison analysis circuit 9-2 is connected with the electric input end of the output circuit 9-3, and the electric output end of the output circuit 9-3 outputs a sensor output signal.
The working principle of the invention is as follows:
The voltage source 1 outputs periodic triangular wave voltage, the waveform of which is shown in the figure 2, the voltage source 1 outputs the triangular wave voltage to the voltage modulation input end of the light source 2 to tune the frequency of the output light of the light source 2, meanwhile, the voltage source 1 also sends the triangular wave voltage to the processing system 9, the output light of the light source 2 enters the optical fiber ring resonant cavity through the optical fiber coupler 3, and the reflectivity of the output light of the light source 2 on the inner surface of the outer sleeve 7 is larger, so that the power of the output light of the first light output end of the optical fiber coupler 3 meets the detection requirement of the photoelectric detector 8, the light can be transmitted through the optical fiber ring 4, the first gas cavity 5 and the second gas cavity 6, and then enters the photoelectric detector 8 after being output by the coupler 3, the photoelectric detector 8 converts the output light into a signal, and sends the signal to the processing system 9 for the final analysis, and the signal is sent to the processing system 9 for the final analysis;
When light enters the optical fiber ring resonator, light with certain specific light wavelength exists, the phase when the light is transmitted in the optical fiber ring resonator for one circle is an integral multiple of 2 pi, the light wavelength is called as the resonant wavelength of the optical fiber ring resonator, the light frequency corresponding to the resonant wavelength of the optical fiber ring resonator is called as the resonant frequency of the optical fiber ring resonator, the frequency interval between any two adjacent resonant frequencies of the optical fiber ring resonator is equal, the frequency interval is called as the free spectral range of the optical fiber ring resonator, the light with the light frequency being the resonant frequency of the optical fiber ring resonator is resonated in the optical fiber ring resonator, and the transmittance of the light is minimum when the light is resonated, therefore, the transmission spectrum of the optical fiber ring resonator is a transmission valley with equal frequency interval, and the frequency interval is the free spectral range of the optical fiber ring resonator;
The voltage source 1 outputs periodic triangular wave voltage to the voltage modulation input end of the light source 2 to tune the frequency of the output light of the light source 2, the line width of the light is smaller than the line width of the transmission trough of the optical fiber ring resonator because the output light of the light source 2 is continuous in time, the frequency of the light is determined by the voltage of the voltage modulation input end of the light source 2, and the relation between the frequency of the light and the voltage of the voltage modulation input end of the light source 2 is linear, so that the transmission spectrum of the optical fiber ring resonator can be obtained;
When the invention measures the air pressure of the measured environment, the first air cavity 5 is placed in the measured environment, the first air cavity 5 is communicated with the external environment through the small holes on the side surface of the outer sleeve 7, and air can freely flow between the first air cavity 5 and the external environment, so that the air pressure in the first air cavity 5 is equal to the air pressure of the measured environment, the second air cavity 6 is sealed inside the outer sleeve 7 because the second air cavity 6 is sealed, the second air cavity 6 is filled with air, and when the outer sleeve 7 is not deformed, the air pressure in the second air cavity 6 is the known air pressure P, and therefore, according to the air pressure of the measured environment and the known air pressure P, the invention is divided into the following three conditions:
① When the air pressure of the measured environment is equal to the known air pressure P, the air pressure in the first air chamber 5 is equal to the air pressure of the measured environment, and the air pressure in the second air chamber 6 is equal to the known air pressure P, so the air pressure in the first air chamber 5 is equal to the air pressure in the second air chamber 6, and since the optical fiber wrapped by the outer sleeve 7 of the optical fiber ring 4 is fixed inside the outer sleeve 7, the outer sleeve 7 is elastic, and the elastic coefficient of the outer sleeve 7 is known, so the length of the first air chamber 5 is unchanged, and the length of the second air chamber 6 is unchanged, compared with the case when the outer sleeve 7 is unchanged, so the cavity length of the optical fiber ring resonator is unchanged, and at the moment, the free spectral range of the optical fiber ring resonator is unchanged;
② When the air pressure of the measured environment is greater than the known air pressure P, the air pressure in the first air chamber 5 is equal to the air pressure of the measured environment, and the air pressure in the second air chamber 6 is equal to the known air pressure P, so the air pressure in the first air chamber 5 is greater than the air pressure in the second air chamber 6, and since the optical fiber wrapped by the outer jacket 7 of the optical fiber ring 4 is fixed inside the outer jacket 7, the outer jacket 7 is elastic, and the elastic coefficient of the outer jacket 7 is known, so the length of the first air chamber 5 is unchanged, the length of the second air chamber 6 is reduced, and thus the cavity length of the optical fiber ring resonator is reduced, and at this time, the free spectral range of the optical fiber ring resonator is increased, compared with when the outer jacket 7 is not deformed;
③ When the air pressure of the measured environment is smaller than the known air pressure P, the air pressure in the first air chamber 5 is equal to the air pressure of the measured environment, and the air pressure in the second air chamber 6 is equal to the known air pressure P, so the air pressure in the first air chamber 5 is smaller than the air pressure in the second air chamber 6, and since the optical fiber wrapped by the outer sleeve 7 of the optical fiber ring 4 is fixed inside the outer sleeve 7, the outer sleeve 7 is elastic, and the elastic coefficient of the outer sleeve 7 is known, so the length of the first air chamber 5 is unchanged, the length of the second air chamber 6 is increased, and thus the cavity length of the optical fiber ring resonator is increased, and at this time, the free spectral range of the optical fiber ring resonator is reduced, compared with the case where the outer sleeve 7 is not deformed;
when the jacket 7 is free from deformation, recording a transmission spectrum of the optical fiber ring resonant cavity, recording the transmission spectrum as a transmission spectrum lambda, obtaining a frequency interval of a transmission valley in the transmission spectrum lambda and recording the frequency interval as a first free spectral range, and (2) placing the first gas cavity 5 in the measured environment to enable the gas pressure in the first gas cavity 5 to be equal to the gas pressure of the measured environment, at the moment, recording the transmission spectrum of the optical fiber ring resonant cavity, recording the transmission spectrum as a transmission spectrum lambda, obtaining a frequency interval of the transmission valley in the transmission spectrum lambda, recording the frequency interval as a second free spectral range, and judging that the gas pressure of the measured environment is equal to the known gas pressure P according to the magnitudes of the first free spectral range and the second free spectral range, ① judging that the gas pressure of the measured environment is equal to the known gas pressure P if the first free spectral range is smaller than the second free spectral range, ② judging that the atmospheric pressure of the measured environment is smaller than the known gas pressure P is smaller than the free spectral range of the second free spectral range if the first free spectral range is smaller than the known gas pressure P is smaller than the free spectral range;
When the invention measures the air pressure of the measured environment, the photoelectric detector 8 converts the optical signal into the voltage signal and sends the voltage signal to the processing system 9, the processing system 9 specifically measures the process that (1) when the outer sleeve 7 is not deformed, the processing system 9 collects the voltage signal and records the voltage signal as a transmission spectrum lambda, then the frequency interval of a transmission valley in the transmission spectrum lambda is obtained, and the frequency interval is recorded as a free spectrum range 1; (2) placing the first gas chamber 5 in the measured environment so that the gas pressure in the first gas chamber 5 is equal to the gas pressure of the measured environment, at this time, the processing system 9 collects a voltage signal and records the voltage signal as a transmission spectrum lambda, then obtains a frequency interval of a transmission valley in the transmission spectrum lambda and records the frequency interval as a free spectrum range 2, according to the magnitudes of the free spectrum range 1 and the free spectrum range 2, the three cases are ①, if the free spectrum range 1 is equal to the free spectrum range 2, determining that the gas pressure of the measured environment is equal to the known gas pressure P, ②, if the free spectrum range 1 is smaller than the free spectrum range 2, determining that the gas pressure of the measured environment is greater than the known gas pressure P, and ③, if the free spectrum range 1 is greater than the free spectrum range 2, determining that the gas pressure of the measured environment is less than the known gas pressure P, and according to the magnitudes of the free spectrum range 1 and the free spectrum range 2, finally, the processing system 9 outputs a sensor output signal, wherein the sensor output signal comprises the gas pressure magnitude.
The working principle of the processing system 9:
The voltage source 1 outputs periodic triangular wave voltage, the waveform of the triangular wave voltage is shown in figure 2, the triangular wave voltage is output by the voltage source 1 and sent to the acquisition circuit 9-1, meanwhile, the photoelectric detector 8 converts an optical signal into a voltage signal and sends the voltage signal to the acquisition circuit 9-1, and then the specific measurement process is as follows (1) when the outer sleeve 7 is not deformed, the acquisition circuit 9-1 acquires the triangular wave voltage sent by the voltage source 1, meanwhile, the acquisition circuit 9-1 acquires the voltage signal sent by the photoelectric detector 8 and records the voltage signal as a transmission spectrum lambda, then the acquisition circuit 9-1 respectively sends the triangular wave voltage and the transmission spectrum lambda to the comparison analysis circuit 9-2, the comparison analysis circuit 9-2 compares the triangular wave voltage and the transmission spectrum lambda, and then the transmission spectrum lambda is intercepted in the time range of any rising edge or falling edge of the triangular wave voltage, and the frequency interval of the transmission valley is obtained in the intercepted part of the transmission spectrum and the frequency interval is recorded as a free spectrum range 1; (2) placing the first gas chamber 5 in the measured environment so that the gas pressure in the first gas chamber 5 is equal to the gas pressure of the measured environment, at this time, the acquisition circuit 9-1 acquires the triangular wave voltage fed from the voltage source 1, and at the same time, the acquisition circuit 9-1 acquires the voltage signal fed from the photodetector 8 and records it as a transmission spectrum Λ, then the acquisition circuit 9-1 feeds the triangular wave voltage and the transmission spectrum Λ into the contrast analysis circuit 9-2, the contrast analysis circuit 9-2 compares the triangular wave voltage and the transmission spectrum Λ, intercepts the transmission spectrum Λ in the time range of any one rising edge or falling edge of the triangular wave voltage, then, the frequency interval of the transmission valley is obtained at the cut-out part of the transmission spectrum lambda and recorded as the free spectral range 2, at this time, the comparison analysis circuit 9-2 judges that the air pressure of the measured environment is equal to the known air pressure P if the free spectral range 1 is equal to the free spectral range 2, ② judges that the air pressure of the measured environment is greater than the known air pressure P if the free spectral range 1 is smaller than the free spectral range 2, ③ judges that the air pressure of the measured environment is smaller than the known air pressure P if the free spectral range 1 is greater than the free spectral range 2, and the air pressure is obtained by the difference between the free spectral range 1 and the free spectral range 2, and finally, the comparison analysis circuit 9-2 sends the air pressure information of the measured environment into the output circuit 9-3, and the output circuit 9-3 outputs a sensor output signal containing the air pressure.
Third embodiment:
the invention provides a gas pressure detection device, which is a gas pressure sensor based on an optical fiber ring resonant cavity.
Fourth embodiment:
The invention provides a measuring method of an air pressure sensor based on an optical fiber ring resonator, which comprises the following steps:
When the outer sleeve is not deformed, recording a transmission spectrum of the optical fiber ring resonant cavity, and recording the transmission spectrum as a transmission spectrum lambda, obtaining a frequency interval of transmission valleys in the transmission spectrum lambda, and recording the frequency interval as a first free spectrum range;
Placing a first gas cavity in a measured environment, enabling the gas pressure in the first gas cavity to be equal to the gas pressure of the measured environment, recording a transmission spectrum of the optical fiber ring resonator, marking the transmission spectrum as a transmission spectrum lambda, obtaining a frequency interval of a transmission valley in the transmission spectrum lambda, marking the frequency interval as a second free spectrum range, and dividing the frequency interval into the following three cases according to the sizes of the first free spectrum range and the free spectrum range 2:
when the first free spectrum range is equal to the second free spectrum range, judging that the air pressure of the measured environment is equal to the known air pressure P;
when the first free spectrum range is smaller than the second free spectrum range, the air pressure of the measured environment is judged to be larger than the known air pressure P, and the air pressure is obtained by the difference value between the second free spectrum range and the first free spectrum range;
when the first free spectrum range is larger than the second free spectrum range, the air pressure of the measured environment is judged to be smaller than the known air pressure P, and the air pressure is obtained by the difference value between the first free spectrum range and the second free spectrum range.
Fifth embodiment:
A computer readable storage medium having stored thereon a computer program for execution by a processor for performing a method of measuring a gas pressure sensor, such as a fiber optic ring resonator based gas pressure sensor.
Specific embodiment six:
a computer device comprising a memory and a processor, the memory having a computer program stored therein, the processor performing a method of measuring a gas pressure sensor based on a fiber optic ring resonator when the processor runs the computer program stored in the memory.
In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or N embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "N" means at least two, for example, two, three, etc., unless specifically defined otherwise. Any process or method descriptions in flow charts or otherwise described herein may be understood as representing modules, segments, or portions of code which include one or more N executable instructions for implementing specific logical functions or steps of the process, and further implementations are included within the scope of the preferred embodiment of the present invention in which functions may be executed out of order from that shown or discussed, including substantially concurrently or in reverse order, depending on the functionality involved, as would be understood by those reasonably skilled in the art of the embodiments of the present invention. Logic and/or steps represented in the flowcharts or otherwise described herein, e.g., a ordered listing of executable instructions for implementing logical functions, can be embodied in any computer-readable medium for use by or in connection with an instruction execution system, apparatus, or device, such as a computer-based system, processor-containing system, or other system that can fetch the instructions from the instruction execution system, apparatus, or device and execute the instructions. For the purposes of this description, a "computer-readable medium" can be any means that can contain, store, communicate, propagate, or transport the program for use by or in connection with the instruction execution system, apparatus, or device. More specific examples (a non-exhaustive list) of the computer-readable medium would include an electrical connection (an electronic device) having one or more wires, a portable computer diskette (a magnetic device), a Random Access Memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber device, and a portable compact disc read-only memory (CDROM). In addition, the computer readable medium may even be paper or other suitable medium on which the program is printed, as the program may be electronically captured, via, for instance, optical scanning of the paper or other medium, then compiled, interpreted or otherwise processed in a suitable manner, if necessary, and then stored in a computer memory. It is to be understood that portions of the present invention may be implemented in hardware, software, firmware, or a combination thereof. In the above-described embodiments, the N steps or methods may be implemented in software or firmware stored in a memory and executed by a suitable instruction execution system. If implemented in hardware as in another embodiment, may be implemented using any one or combination of techniques known in the art, discrete logic circuits with logic gates for implementing logic functions on data signals, application specific integrated circuits with appropriate combinational logic gates, programmable Gate Arrays (PGAs), field Programmable Gate Arrays (FPGAs), etc.
Those of ordinary skill in the art will appreciate that all or a portion of the steps carried out in the method of the above-described embodiments may be implemented by a program to instruct related hardware, where the program may be stored in a computer readable storage medium, and where the program, when executed, includes one or a combination of the steps of the method embodiments. In addition, each functional unit in the embodiments of the present invention may be integrated in one processing module, or each unit may exist alone physically, or two or more units may be integrated in one module. The integrated modules may be implemented in hardware or in software functional modules. The integrated modules may also be stored in a computer readable storage medium if implemented in the form of software functional modules and sold or used as a stand-alone product.
The above-mentioned embodiments are only preferred embodiments of an air pressure sensor based on an optical fiber ring resonator, and the protection scope of an air pressure sensor based on an optical fiber ring resonator is not limited to the above-mentioned embodiments, and all technical solutions under the concept belong to the protection scope of the present invention. It should be noted that modifications and variations can be made by those skilled in the art without departing from the principles of the present invention, which is also considered to be within the scope of the present invention.

Claims (7)

the first electric input end of the acquisition circuit is the first electric input end of the processing system, the second electric input end of the acquisition circuit is the second electric input end of the processing system, the electric output end of the output circuit is the electric output end of the processing system, the second electric output end of the voltage source is connected with the first electric input end of the acquisition circuit, the electric output end of the photoelectric detector is connected with the second electric input end of the acquisition circuit, the first electric output end of the acquisition circuit is connected with the first electric input end of the comparison analysis circuit, the second electric output end of the acquisition circuit is connected with the second electric input end of the comparison analysis circuit, the electric output end of the comparison analysis circuit is connected with the electric input end of the output circuit, and the electric output end of the output circuit outputs a sensor output signal.
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