Online coating detection device based on reference light path spectrum ellipsometry technologyTechnical Field
The invention belongs to the technical field of online coating detection, and particularly relates to an online coating detection device based on a reference light path spectrum ellipsometry technology.
Background
Along with the development of technologies such as microelectronics, optical coating, semiconductors, flat panel displays and the like, the high-precision ellipsometry film technology becomes an important means for detecting films in the field, and has the advantages of non-contact, nondestructive and high precision. Real-time detection of coating ellipsometry parameters in a coating machine in the film processing process in the fields is a main guarantee for improving the performance and reliability of the coating machine, and the coating parameters can be adjusted according to the real-time detection parameters so as to optimize the coating performance. The internal detection technology of the existing coating equipment is difficult, a balance method is used for monitoring the thickness of the online coating of the coating machine, but the equipment needs to be replaced every time, different materials need different parameters, and the universality is poor. The ellipsometry method causes errors in coating detection due to the problems of optical parameter change of the internal environment of the coating box, pollution of the coating window and the like.
Disclosure of Invention
Aiming at the technical problems that the internal environment optical parameter change of a coating box, pollution of a coating window and the like in the existing ellipsometry film monitoring are not obtained, so that the coating detection has errors, the invention provides an online coating detection device based on a reference light path spectrum ellipsometry technology, which realizes the detection of the internal environment optical parameter change of the coating box and the pollution of the coating window, further corrects the ellipsometry online coating detection result and improves the measurement precision.
In order to solve the technical problems, the invention adopts the following technical scheme:
The utility model provides an online coating film detection device based on reference light path spectrum ellipsometry technique, includes light source, polarizing arm, first movable speculum, coating film case, by the coating film substrate, second movable speculum, analyzer and detector, be provided with the polarizing arm in the light path direction of light source, be provided with the coating film case in the light path direction of polarizing arm, by the coating film setting in the coating film incasement, by the setting of coating film in the light path direction of polarizing arm, be provided with the analyzer in the reflection light path direction of coating film, be provided with the detector in the light path direction of analyzer.
A first movable reflecting mirror is arranged between the polarizing arm and the coating box, and a second movable reflecting mirror is arranged between the coating box and the analyzer.
The bottoms of the first movable reflector and the second movable reflector are respectively provided with a track, and the first movable reflector and the second movable reflector respectively move along the tracks.
The film plating box is internally provided with a film substrate to be plated, and the film to be plated is arranged on the film substrate to be plated.
The coating box comprises a coating box wall, a first optical window and a second optical window, wherein the first optical window and the second optical window are respectively arranged on two sides of the coating box wall.
The first optical window is arranged in the light path direction of the polarizing arm, and the second optical window is arranged on the reflection light path of the plated film.
The light source adopts laser, compound color light or monochromator.
A detection method of an online coating detection device based on a reference light path spectrum ellipsometry technology comprises the following steps:
s1, detecting background optical parameters of the inside of a coating box and an optical window through a reference light path;
s2, detecting parameters of the film to be plated;
S3, carrying the background optical parameters measured in the step S1 into the parameters measured in the step S2 to be subtracted, and obtaining the actual parameters of the plated film at the moment.
The method for detecting the background optical parameters of the inner part of the coating box and the optical window through the reference light path in the S1 comprises the following steps: the light emitted by the light source is modulated by the polarizing arm to generate light with a known polarization state, the first adjustable movable reflecting mirror is moved to the light path direction of the polarizing arm, the light modulated by the polarizing arm is reflected by the first adjustable movable reflecting mirror and then enters the coating box through the first optical window, the second movable reflecting mirror is moved to the reflecting light path direction of the first adjustable movable reflecting mirror, the light path does not pass through the coated film, directly reaches the second movable reflecting mirror through the second optical window, enters the polarization state modulation analysis of the polarization state modulation movable reflecting mirror, and the polarization state modulation analysis is carried out by the detector.
The method for detecting the parameters of the plated film in the step S2 comprises the following steps: light emitted by the light source is modulated by the polarizing arm to generate light with a known polarization state, the first movable reflecting mirror and the second movable reflecting mirror are respectively arranged below the first optical window and the second optical window, so that the light path is directly transmitted through the first optical window to enter the inside of the film coating box, then passes through the film to be coated and the film to be coated substrate, is reflected through the second optical window, enters the polarization state modulation analysis of the polarization state by the polarizing arm, and is subjected to photoelectric conversion by the detector.
Compared with the prior art, the invention has the beneficial effects that:
According to the invention, the first movable reflecting mirror and the second movable reflecting mirror can move to change the light path, and the optical parameter change of the internal environment of the film plating box and the detection of pollution of the film plating window are realized through the externally added reference light path, so that the ellipsometric online film plating detection result is corrected, and the film measurement precision in film plating is improved. The invention is non-contact, and can measure various coating materials, optical parameters and thickness.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. It will be apparent to those skilled in the art from this disclosure that the drawings described below are merely exemplary and that other embodiments may be derived from the drawings provided without undue effort.
The structures, proportions, sizes, etc. shown in the present specification are shown only for the purposes of illustration and description, and are not intended to limit the scope of the invention, which is defined by the claims, so that any structural modifications, changes in proportions, or adjustments of sizes, which do not affect the efficacy or the achievement of the present invention, should fall within the scope of the invention.
FIG. 1 is a schematic diagram of the overall structure of the present invention;
FIG. 2 is a reference light path diagram of the present invention;
FIG. 3 is a diagram of the detection light path for testing parameters of a film to be coated according to the present invention.
Wherein: 1 is a light source, 2 is a polarizing arm, 3 is a first movable reflecting mirror, 4 is a coating box, 4-1 is a coating box wall, 4-2 is a first optical window, 4-3 is a second optical window, 5 is a coated film, 6 is a coated film substrate, 7 is a second movable reflecting mirror, 8 is an analyzer, and 9 is a detector.
Detailed Description
For the purposes of making the objects, technical solutions and advantages of the embodiments of the present application more apparent, the technical solutions in the embodiments of the present application will be clearly and completely described below, and it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments, and these descriptions are only for further illustrating the features and advantages of the present application, not limiting the claims of the present application; all other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
The following describes in further detail the embodiments of the present invention with reference to the drawings and examples. The following examples are illustrative of the invention and are not intended to limit the scope of the invention.
The terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present application, unless otherwise indicated, the meaning of "a plurality" is two or more.
In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present application will be understood in specific cases by those of ordinary skill in the art.
In this embodiment, as shown in fig. 1, the whole system is composed of a light source 1, a polarizing arm 2, a movable mirror 3, a film plating tank 4, a film plated 5, a film plated substrate 6, a movable mirror 7, an analyzer 8, and a detector 9. Wherein the film plating box 4 consists of a film plating box arm 4-1, an optical window 4-2 and an optical window 4-3. Preferably, the light source 1 may be a light source such as a laser, a multi-color light, a monochromator, etc.; the polarization arm 2 is light modulated into a known polarization state by the light source 1, and the polarization detection arm 8 is light for detecting the polarization state of the polarization state light of the polarization arm after passing through the film plating box and the film to be plated 5; the first movable mirror 3 and the second movable mirror 7 can be moved to change the optical path according to whether the film 5 to be coated or the optical parameters inside the coating tank 4 are tested. The specific detection method comprises the following steps:
The first step: the reference light path detects the optical parameters of the background such as the inside of the film plating box and the optical window, etc., as shown in figure 2, the light emitted by the light source 1 is modulated by the polarizing arm 2 to generate light with known polarization state, the light path is reflected by the first movable reflector 3 and the second movable reflector 7 to the upper end through adjusting the first optical window 4-2 to enter the inside of the film plating box 4, the light path directly reaches the second movable reflector 7 through the second optical window 4-3 without passing through the film 5, enters the polarization analysis arm 8 to carry out the polarization state modulation analysis, the detector 9 carries out photoelectric conversion, and finally the detailed calculation analysis is carried out. The method mainly comprises the steps of obtaining optical parameters such as the internal environment of the coating box 4, pollution of the first optical window 4-2 and the second optical window 4-3 of the coating box and the like.
And a second step of: the light emitted by the light source 1 is modulated by the polarizing arm 2 to generate light with known polarization state, the light path is directly transmitted through the first optical window 4-2 to enter the film coating box 4, then reflected through the film coating 5 and the film coating substrate 6, and then enters the polarization state modulation analysis of the polarization state by the polarizing arm 8, photoelectric conversion is carried out by the detector 9, and finally detailed calculation analysis is carried out. The step mainly obtains the optical parameters such as the film 5 to be coated, the internal environment of the coating box 4, the pollution of the first optical window 4-2 and the second optical window 4-3 of the coating box, and the like. And then the result is analyzed and subtracted by the interference of the first step to obtain the real parameters of the plated film 5.
According to actual needs, optical parameters such as the internal environment of the film plating box 4, the pollution of the first optical window 4-2 and the second optical window 4-3 of the film plating box are obtained in a first step at intervals, then optical parameters such as the pollution of the film plated 5, the internal environment of the film plating box 4, the pollution of the first optical window 4-2 and the second optical window 4-3 of the film plating box are obtained in a second step, and the actual parameters of the film plated 5 at the moment can be obtained after the result of the first step is carried into the second step for deduction. The first step and the second step can be switched back and forth according to the requirements of coating material type, coating time, coating speed, coating mode and the like, so that high-precision online film detection of the coating equipment can be realized.
The preferred embodiments of the present invention have been described in detail, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the spirit of the present invention, and the various changes are included in the scope of the present invention.