CN115682897A - A high-precision eddy current displacement sensor and a measurement method for nanoscale displacement - Google Patents

Abstract

The invention discloses a high-precision eddy current displacement sensor, which comprises: the sine oscillation module generates sine oscillation electromagnetic waves; the first signal acquisition processing module acquires the variation of the amplitude of the sinusoidal oscillation in an energy-lossless manner, and converts and linearly amplifies the variation into a first-level analog level signal; the second signal acquisition processing module acquires the primary analog level signal at high frequency and converts the primary analog level signal into a linear secondary digital level signal; the output module converts the second-level digital level signal into a third-level analog level signal, and outputs and displays the third-level analog level signal. A measuring method of nanometer displacement, using sine oscillating electromagnetic wave to hit the target position of metal target; collecting and amplifying the variation of the amplitude of the sinusoidal oscillation after the sinusoidal oscillation is inhibited by the metal target; converting the nonlinear signal into a linear signal; and outputting the signal. The device can detect tiny mechanical displacement variation, and realizes the analog signal processing with high speed, high precision and high linearity of the nanometer displacement variation.

Description

Translated fromChinese

一种高精度电涡流位移传感器和纳米级位移的测量方法A high-precision eddy current displacement sensor and a measurement method for nanoscale displacement

技术领域technical field

本发明涉及传感器，具体涉及一种高精度电涡流位移传感器，以及一种纳米级位移的测量方法。The invention relates to a sensor, in particular to a high-precision eddy current displacement sensor and a method for measuring nanoscale displacement.

背景技术Background technique

传统的电涡流传感器，所能测量的最小位移量，一般在几百微米，所能达到的采样速度最多每秒上百次，线性度一般在±10％F.S.左右。且在采集微小位移量时，所产生的微小电信号也会被采集端损耗，这种能量损失会带来失真等问题，让测量微小位移的准确度大大的降低。另外，传统的电涡流传感器也无法权衡高速的位移信号量采集性能和高稳定、高线性信号输出之间的平衡。The minimum displacement that can be measured by traditional eddy current sensors is generally a few hundred microns, the sampling speed that can be achieved is at most hundreds of times per second, and the linearity is generally around ±10% F.S. Moreover, when collecting small displacements, the generated small electrical signals will also be lost by the collection end. This energy loss will cause problems such as distortion, which will greatly reduce the accuracy of measuring small displacements. In addition, traditional eddy current sensors cannot balance the balance between high-speed displacement signal acquisition performance and high stability and high linearity signal output.

发明内容Contents of the invention

本发明要解决的技术问题是提供一种高精度电涡流位移传感器，其能够检测微小的机械位移变化量，实现了纳米级位移变化量的高速度、高精度、高精密、高线性度的模拟信号处理。The technical problem to be solved by the present invention is to provide a high-precision eddy current displacement sensor, which can detect small mechanical displacement changes and realize high-speed, high-precision, high-precision, high-linearity simulation of nanoscale displacement changes signal processing.

为了解决上述技术问题，本发明提供了一种高精度电涡流位移传感器，包括：正弦振荡模块，所述正弦振荡模块产生正弦振荡的电磁波，并发射至金属目标物的目标位，所述金属目标物在所述目标位产生抑制所述电磁波的正弦振荡的电涡流，所述电涡流的强度与所述正弦振荡模块和所述目标位的距离呈正比；第一信号采集处理模块，所述第一信号采集处理模块能量无损的采集所述正弦振荡的幅值的变化量，并转化、线性放大为一级模拟电平信号；第二信号采集处理模块，所述第二信号采集处理模块高频采集由所述第一信号采集处理模块输出的线性放大的所述一级模拟电平信号，并将非线性的一级模拟电平信号转化成线性的二级数字电平信号；输出模块，所述输出模块将所述第二信号采集处理模块输出的所述二级数字电平信号转化成三级模拟电平信号并输出、显示；所述正弦振荡模块、第一信号采集处理模块、第二信号采集处理模块和输出模块依次连接。In order to solve the above technical problems, the present invention provides a high-precision eddy current displacement sensor, including: a sinusoidal oscillation module, the sinusoidal oscillation module generates electromagnetic waves of sinusoidal oscillation, and emits to the target position of the metal target, the metal target The object generates an electric eddy current that suppresses the sinusoidal oscillation of the electromagnetic wave at the target position, and the strength of the electric eddy current is proportional to the distance between the sinusoidal oscillation module and the target position; the first signal acquisition and processing module, the second A signal acquisition and processing module collects the variation of the amplitude of the sinusoidal oscillation without loss of energy, and converts and linearly amplifies it into a first-level analog level signal; a second signal acquisition and processing module, the second signal acquisition and processing module is high-frequency Collect the linearly amplified primary analog level signal output by the first signal acquisition and processing module, and convert the nonlinear primary analog level signal into a linear secondary digital level signal; the output module, the The output module converts the two-level digital level signal output by the second signal acquisition and processing module into a three-level analog level signal and outputs and displays it; the sinusoidal oscillation module, the first signal acquisition and processing module, the second The signal acquisition and processing module and the output module are connected in sequence.

作为优选的，所述第一信号采集处理模块包括依次连接的二级带通滤波器、电容、运算放大器、信号跟随单元和驱动单元；所述二级带通滤波器连接在所述正弦振荡模块的输出端，用于将正弦振荡的变化量转化为一级模拟电平信号；所述驱动单元与所述第二信号采集处理模块连接；所述电容将采集到的一级模拟电平信号中的直流部分滤除，并将滤除直流后的所述一级模拟电平信号输入至所述运算放大器进行同频、同相、同幅的放大；所述运算放大器利用其输入端的高阻特性，与后端的所述信号跟随单元共同实现所述一级模拟电平信号的电压跟随；所述一级模拟电平信号驱动位于所述信号跟随单元后面的所述驱动电路；所述驱动电路的信号与所述正弦振荡模块的信号完全一致。Preferably, the first signal acquisition and processing module includes a secondary bandpass filter, a capacitor, an operational amplifier, a signal follower unit and a drive unit connected in sequence; the secondary bandpass filter is connected to the sinusoidal oscillation module The output end of the sinusoidal oscillation is used to convert the variation of the sinusoidal oscillation into a first-level analog level signal; the drive unit is connected to the second signal acquisition and processing module; the capacitor will collect the first-level analog level signal The DC part of the filter is filtered out, and the first-level analog level signal after filtering the DC is input to the operational amplifier for amplification with the same frequency, phase and amplitude; the operational amplifier utilizes the high-impedance characteristics of its input terminal, Together with the signal follower unit at the rear end, the voltage follower of the first-level analog level signal is realized; the first-level analog level signal drives the drive circuit located behind the signal follower unit; the signal of the drive circuit It is completely consistent with the signal of the sinusoidal oscillation module.

作为优选的，所述能量无损至少包括无延时的无损和不失真的无损。Preferably, the energy lossless includes at least lossless without delay and lossless without distortion.

作为优选的，所述第二信号采集模块包括16位的AD采集单元和ARM处理器，所述AD采集单元和ARM处理器依次串联在所述第一信号采集处理模块和所述输出模块之间；所述AD采集单元用于采集被线性放大的所述二级数字电平信号，并发送给所述ARM处理器；所述ARM处理器用于将随金属目标物相对位移的变化量所输出的非线性的一级模拟电平信号，转化成线性的二级数字电平信号。Preferably, the second signal acquisition module includes a 16-bit AD acquisition unit and an ARM processor, and the AD acquisition unit and the ARM processor are sequentially connected in series between the first signal acquisition processing module and the output module ; The AD acquisition unit is used to collect the linearly amplified secondary digital level signal and send it to the ARM processor; the ARM processor is used to output the change amount with the relative displacement of the metal target The nonlinear primary analog level signal is converted into a linear secondary digital level signal.

作为优选的，所述输出模块包括DA输出单元、±5V输出单元和人机交互界面，所述DA输出单元、所述±5V输出单元和所述人机交互界面分别与所述第二信号采集处理模块连接；所述人机交互界面用于合理的输出指定的三级模拟电平信号和数码显示值，以及输出来自最前端金属目标物的位移量的值。Preferably, the output module includes a DA output unit, a ±5V output unit and a human-computer interaction interface, and the DA output unit, the ±5V output unit and the human-computer interaction interface are respectively connected to the second signal acquisition The processing module is connected; the human-computer interaction interface is used to reasonably output the specified three-level analog level signal and digital display value, and output the displacement value from the frontmost metal target.

一种纳米级位移的测量方法，包括以下步骤：A method for measuring nanoscale displacement, comprising the steps of:

S1，使用正弦振荡的电磁波打到金属目标物的目标位；S1, using sinusoidal oscillating electromagnetic waves to hit the target position of the metal target;

S2，采集正弦振荡受金属目标物抑制后幅值的变化量，将其转化成一级模拟电平信号，并进行线性跟随放大；S2, collecting the change in the amplitude of the sinusoidal oscillation after being suppressed by the metal target, converting it into a first-level analog level signal, and performing linear follow-up amplification;

S3，将非线性的一级模拟电平信号转化成线性的二级数字电平信号；S3, converting the nonlinear primary analog level signal into a linear secondary digital level signal;

S4，将二级数字电平信号转化成三级模拟电平信号，并输出。S4, converting the secondary digital level signal into a tertiary analog level signal, and outputting it.

作为优选的，进行线性跟随放大包括以下步骤，提供一信号与正弦振荡的信号完全一致的驱动电路，进行驱动。Preferably, performing linear follower amplification includes the following steps of providing a driving circuit whose signal is completely consistent with the sinusoidal oscillation signal for driving.

与现有技术相比，本发明的有益效果是：Compared with prior art, the beneficial effect of the present invention is:

本发明通过优化的设计，达到80nm了的位移量的信号处理，和高达40000次/秒的信号采集速度；并且具有±0.3％F.S.的高线性度输出。能够检测微小的机械位移变化量，解决了纳米级位移变化量的高精度、高精密模拟信号处理的难题，能够非常准确的识别高精度机床的执行部件的位置信息，使得该传感器可以使用在高机密的机床上，比如生产芯片的光刻机和晶圆生长设备上。另外，发本明输出的模拟信号具有高稳定性，保障了系统所得到的信号量是稳定无误差的。Through optimized design, the present invention achieves signal processing with a displacement of 80nm and a signal acquisition speed up to 40,000 times per second; and has a high linearity output of ±0.3% F.S. It can detect small mechanical displacement changes, solve the problem of high-precision and high-precision analog signal processing of nano-level displacement changes, and can very accurately identify the position information of the executive parts of high-precision machine tools, so that the sensor can be used in high-precision Confidential machine tools, such as lithography machines and wafer growth equipment that produce chips. In addition, the analog signal output by the invention has high stability, which ensures that the signal quantity obtained by the system is stable and error-free.

附图说明Description of drawings

为了更清楚的说明本发明实施例技术中的技术方案，下面将对实施例技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还能够根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiment technology of the present invention, the following will briefly introduce the drawings that need to be used in the technical description of the embodiment. Obviously, the drawings in the following description are only some implementations of the present invention For example, those of ordinary skill in the art can also obtain other drawings based on these drawings on the premise of not paying creative efforts.

图1为本发明一个优选的实施例中高精度电涡流位移传感器的连接结构示意图一；Fig. 1 is a schematic diagram of the connection structure of a high-precision eddy current displacement sensor in a preferred embodiment of the present invention;

图2为本发明一个优选的实施例中高精度电涡流位移传感器的连接结构示意图二。Fig. 2 is a second schematic diagram of the connection structure of the high-precision eddy current displacement sensor in a preferred embodiment of the present invention.

具体实施方式Detailed ways

下面将对本发明实施例中的技术方案进行清楚、完整的描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有作出创造性劳动的前提下所获得的所有其他实施例，都属于本发明保护的范围。The following will clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

实施例Example

参照图1和图2所示，本发明公开了一种高精度电涡流位移传感器，包括依次连接的正弦振荡模块、第一信号采集处理模块、第二信号采集处理模块和输出模块。Referring to Fig. 1 and Fig. 2, the present invention discloses a high-precision eddy current displacement sensor, which includes a sinusoidal oscillation module, a first signal acquisition and processing module, a second signal acquisition and processing module and an output module connected in sequence.

正弦振荡模块：Sine oscillator module:

上述正弦振荡模块产生正弦振荡的电磁波，并发射至金属目标物的目标位，金属目标物在目标位产生抑制电磁波的正弦振荡的电涡流，电涡流的强度与正弦振荡模块和目标位的距离呈正比。即，当正弦振荡模块靠近金属目标物时，目标位所产生的电涡流使电磁波的正弦振荡减弱。在一些情况下，可以使电磁波的正弦振荡的幅值减损至零。The above-mentioned sinusoidal oscillation module generates sinusoidal oscillating electromagnetic waves and emits them to the target position of the metal target. The metal target generates an electric eddy current that suppresses the sinusoidal oscillation of the electromagnetic wave at the target position. The intensity of the eddy current is positive to the distance between the sinusoidal oscillation module and the target position. Compare. That is, when the sinusoidal oscillation module is close to the metal target, the eddy current generated by the target will weaken the sinusoidal oscillation of the electromagnetic wave. In some cases, the amplitude of the sinusoidal oscillations of the electromagnetic waves can be damped to zero.

第一信号采集处理模块：The first signal acquisition and processing module:

上述第一信号采集处理模块能量无损的采集正弦振荡的幅值的变化量，并转化、线性放大为一级模拟电平信号。能量无损至少包括无延时的无损和不失真的无损。The above-mentioned first signal acquisition and processing module acquires the variation of the amplitude of the sinusoidal oscillation without loss of energy, and converts and linearly amplifies it into a first-level analog level signal. Energy lossless includes at least lossless without delay and lossless without distortion.

当，正弦振荡模块和金属目标物之间的距离发生微小的变化时，正弦振荡会产生非常微弱的幅值变化，传统的采集模块或方法，在采集这种非常微弱的幅值变化时，会引起正弦振荡模块一定能量的损耗，这种损耗会导致信号处理上的误差，也是无法实现高精密信号处理的最大障碍。所以，为了实现能量无损的采集，上述第一信号采集处理模块包括依次连接的二级带通滤波器、电容、运算放大器、信号跟随单元和驱动单元。二级带通滤波器连接在正弦振荡模块的输出端，用于将正弦振荡的变化量转化为一级模拟电平信号。驱动单元与第二信号采集处理模块连接。电容将采集到的一级模拟电平信号中的直流部分滤除，并将滤除直流后的一级模拟电平信号输入至运算放大器进行同频、同相、同幅的放大。运算放大器利用其输入端的高阻特性，与后端的信号跟随单元共同实现一级模拟电平信号的电压跟随。一级模拟电平信号驱动位于信号跟随单元后面的驱动电路。驱动电路的信号与正弦振荡模块的信号完全一致。驱动电路同时兼具了大能量的驱动能力。以上，将正弦振荡的变化量转化为了一级模拟电平信号，并把一级模拟电平信号进行了适当的线性放大，抗干扰能力强，抑制了采集到的正弦振荡中的非正弦振荡，实现了能量无损的采集和处理。When the distance between the sinusoidal oscillation module and the metal target changes slightly, the sinusoidal oscillation will produce a very weak amplitude change. When the traditional acquisition module or method collects this very weak amplitude change, it will It causes a certain energy loss of the sinusoidal oscillation module, which will lead to errors in signal processing, and is also the biggest obstacle to the inability to achieve high-precision signal processing. Therefore, in order to achieve lossless energy collection, the above-mentioned first signal collection and processing module includes a secondary band-pass filter, a capacitor, an operational amplifier, a signal follower unit and a drive unit connected in sequence. The second-stage band-pass filter is connected to the output end of the sinusoidal oscillation module, and is used to convert the variation of the sinusoidal oscillation into an analog level signal of the first stage. The drive unit is connected with the second signal acquisition and processing module. The capacitor filters the DC part of the collected primary analog level signal, and inputs the DC filtered primary analog level signal to the operational amplifier for amplification with the same frequency, same phase and same amplitude. The operational amplifier utilizes the high-impedance characteristic of its input terminal, and realizes the voltage follower of a level analog level signal together with the signal follower unit at the back end. The primary analog level signal drives the drive circuit located behind the signal follower unit. The signal of the drive circuit is completely consistent with the signal of the sinusoidal oscillation module. The drive circuit also has a high-energy drive capability. Above, the variation of the sinusoidal oscillation is converted into a first-level analog level signal, and the first-level analog level signal is properly linearly amplified, and the anti-interference ability is strong, and the non-sinusoidal oscillation in the collected sinusoidal oscillation is suppressed. The energy lossless collection and processing is realized.

第二信号采集处理模块：The second signal acquisition and processing module:

上述第二信号采集处理模块高频采集由第一信号采集处理模块输出的线性放大的一级模拟电平信号，并将非线性的一级模拟电平信号转化成线性的二级数字电平信号。The above-mentioned second signal acquisition and processing module collects the linearly amplified primary analog level signal output by the first signal acquisition and processing module at high frequency, and converts the nonlinear primary analog level signal into a linear secondary digital level signal .

具体而言，上述第二信号采集模块包括16位的AD采集单元和ARM处理器。AD采集单元和ARM处理器依次串联在第一信号采集处理模块和输出模块之间。AD采集单元优选高吞吐量、高精度的型号。AD采集单元在采集被线性放大的二级数字电平信号后，发送给ARM处理器，ARM处理器将随金属目标物相对位移的变化量所输出的非线性的一级模拟电平信号，转化成线性的二级数字电平信号。Specifically, the above-mentioned second signal acquisition module includes a 16-bit AD acquisition unit and an ARM processor. The AD acquisition unit and the ARM processor are sequentially connected in series between the first signal acquisition and processing module and the output module. The AD acquisition unit is preferably a model with high throughput and high precision. After the AD acquisition unit collects the linearly amplified secondary digital level signal, it sends it to the ARM processor, and the ARM processor converts the non-linear primary analog level signal output with the relative displacement of the metal target to into a linear secondary digital level signal.

输出模块：Output module:

上述输出模块将第二信号采集处理模块输出的二级数字电平信号转化成三级模拟电平信号并输出、显示。The above-mentioned output module converts the secondary digital level signal output by the second signal acquisition and processing module into a tertiary analog level signal and outputs and displays it.

具体而言，上述输出模块包括DA输出单元、±5V输出单元和人机交互界面。DA输出单元、±5V输出单元和人机交互界面分别与第二信号采集处理模块连接。DA输出单元和±5V输出单元可以采用其中一种方式输出，也可以采用两种方式输出；通过人机交互界面，可以合理的输出指定的三级模拟电平信号和数码显示值，以及输出来自最前端金属目标物的位移量的值。Specifically, the above-mentioned output module includes a DA output unit, a ±5V output unit and a man-machine interface. The DA output unit, the ±5V output unit and the man-machine interface are respectively connected to the second signal acquisition and processing module. The DA output unit and the ±5V output unit can be output in one of the ways, or in two ways; through the human-computer interaction interface, the specified three-level analog level signal and digital display value can be reasonably output, and the output comes from The value of the displacement amount of the frontmost metal target.

本发明公开了一种纳米级位移的测量方法，包括以下步骤：The invention discloses a method for measuring nanoscale displacement, comprising the following steps:

S1，使用正弦振荡的电磁波打到金属目标物的目标位；S1, using sinusoidal oscillating electromagnetic waves to hit the target position of the metal target;

S2，采集正弦振荡受金属目标物抑制后幅值的变化量，将其转化成一级模拟电平信号，并进行线性跟随放大；S2, collecting the change in the amplitude of the sinusoidal oscillation after being suppressed by the metal target, converting it into a first-level analog level signal, and performing linear follow-up amplification;

在进行线性跟随放大时，可以提供一信号与正弦振荡的信号完全一致的驱动电路，进行驱动，以使线性跟随放大后的一级模拟电平信号无任何形式的能量损失。When performing linear follow-up amplification, a driving circuit whose signal is completely consistent with the sinusoidal oscillation signal can be provided for driving, so that the first-level analog level signal after linear follow-up amplification has no energy loss in any form.

S3，将非线性的一级模拟电平信号转化成线性的二级数字电平信号；S3, converting the nonlinear primary analog level signal into a linear secondary digital level signal;

S4，将二级数字电平信号转化成三级模拟电平信号，并输出。S4, converting the secondary digital level signal into a tertiary analog level signal, and outputting it.

对所公开的实施例的上述说明，使本领域专业技术人员能够实现或使用本发明。对这些实施例的多种修改对本领域的专业技术人员来说将是显而易见的，本文中所定义的一般原理能够在不脱离本发明的精神或范围的情况下，在其它实施例中实现。因此，本发明将不会被限制于本文所示的这些实施例，而是要符合与本文所公开的原理和新颖点相一致的最宽的范围。The above description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the present invention will not be limited to these embodiments shown herein, but will conform to the widest scope consistent with the principles and novel points disclosed herein.

Claims (7)

Translated fromChinese

1.一种高精度电涡流位移传感器，其特征在于，包括：1. A high-precision eddy current displacement sensor, is characterized in that, comprising:正弦振荡模块，所述正弦振荡模块产生正弦振荡的电磁波，并发射至金属目标物的目标位，所述金属目标物在所述目标位产生抑制所述电磁波的正弦振荡的电涡流，所述电涡流的强度与所述正弦振荡模块和所述目标位的距离呈正比；A sinusoidal oscillation module, the sinusoidal oscillation module generates electromagnetic waves of sinusoidal oscillation, and emits them to the target position of the metal target, and the metal target generates an electric eddy current that suppresses the sinusoidal oscillation of the electromagnetic wave at the target position, and the electric The strength of the eddy current is proportional to the distance between the sinusoidal oscillation module and the target position;第一信号采集处理模块，所述第一信号采集处理模块能量无损的采集所述正弦振荡的幅值的变化量，并转化、线性放大为一级模拟电平信号；The first signal acquisition and processing module, the first signal acquisition and processing module collects the variation of the amplitude of the sinusoidal oscillation without loss of energy, and converts and linearly amplifies it into a first-level analog level signal;第二信号采集处理模块，所述第二信号采集处理模块高频采集由所述第一信号采集处理模块输出的线性放大的所述一级模拟电平信号，并将非线性的一级模拟电平信号转化成线性的二级数字电平信号；The second signal acquisition and processing module, the second signal acquisition and processing module collects the linearly amplified first-level analog level signal output by the first signal acquisition and processing module at high frequency, and converts the nonlinear first-level analog level signal Level signals are converted into linear secondary digital level signals;输出模块，所述输出模块将所述第二信号采集处理模块输出的所述二级数字电平信号转化成三级模拟电平信号并输出、显示；An output module, the output module converts the secondary digital level signal output by the second signal acquisition and processing module into a tertiary analog level signal and outputs and displays it;所述正弦振荡模块、第一信号采集处理模块、第二信号采集处理模块和输出模块依次连接。The sinusoidal oscillation module, the first signal acquisition and processing module, the second signal acquisition and processing module and the output module are connected in sequence.2.如权利要求1所述的高精度电涡流位移传感器，其特征在于，所述第一信号采集处理模块包括依次连接的二级带通滤波器、电容、运算放大器、信号跟随单元和驱动单元；所述二级带通滤波器连接在所述正弦振荡模块的输出端，用于将正弦振荡的变化量转化为一级模拟电平信号；所述驱动单元与所述第二信号采集处理模块连接；所述电容将采集到的一级模拟电平信号中的直流部分滤除，并将滤除直流后的所述一级模拟电平信号输入至所述运算放大器进行同频、同相、同幅的放大；所述运算放大器利用其输入端的高阻特性，与后端的所述信号跟随单元共同实现所述一级模拟电平信号的电压跟随；所述一级模拟电平信号驱动位于所述信号跟随单元后面的所述驱动电路；所述驱动电路的信号与所述正弦振荡模块的信号完全一致。2. The high-precision eddy current displacement sensor according to claim 1, wherein the first signal acquisition and processing module includes a secondary bandpass filter, a capacitor, an operational amplifier, a signal follower unit and a drive unit connected in sequence ; The secondary band-pass filter is connected to the output of the sinusoidal oscillation module, and is used to convert the variation of the sinusoidal oscillation into a primary analog level signal; the drive unit and the second signal acquisition and processing module connected; the capacitor filters out the DC portion of the collected primary analog level signal, and inputs the primary analog level signal after filtering the DC to the operational amplifier for the same frequency, phase and phase amplitude amplification; the operational amplifier utilizes the high-impedance characteristic of its input terminal, and realizes the voltage follow-up of the one-stage analog level signal together with the signal follower unit at the rear end; the one-stage analog level signal driver is located in the The signal follows the drive circuit behind the unit; the signal of the drive circuit is completely consistent with the signal of the sinusoidal oscillation module.3.如权利要求2所述的高精度电涡流位移传感器，其特征在于，所述能量无损至少包括无延时的无损和不失真的无损。3. The high-precision eddy current displacement sensor according to claim 2, characterized in that, the lossless energy includes at least lossless without delay and lossless without distortion.4.如权利要求1所述的高精度电涡流位移传感器，其特征在于，所述第二信号采集模块包括16位的AD采集单元和ARM处理器，所述AD采集单元和ARM处理器依次串联在所述第一信号采集处理模块和所述输出模块之间；所述AD采集单元用于采集被线性放大的所述二级数字电平信号，并发送给所述ARM处理器；所述ARM处理器用于将随金属目标物相对位移的变化量所输出的非线性的一级模拟电平信号，转化成线性的二级数字电平信号。4. the high precision eddy current displacement sensor as claimed in claim 1, is characterized in that, described second signal acquisition module comprises 16 AD acquisition units and ARM processor, and described AD acquisition unit and ARM processor are connected in series successively Between the first signal acquisition processing module and the output module; the AD acquisition unit is used to acquire the linearly amplified secondary digital level signal and send it to the ARM processor; the ARM The processor is used to convert the nonlinear primary analog level signal output with the variation of the relative displacement of the metal target into a linear secondary digital level signal.5.如权利要求1所述的高精度电涡流位移传感器，其特征在于，所述输出模块包括DA输出单元、±5V输出单元和人机交互界面，所述DA输出单元、所述±5V输出单元和所述人机交互界面分别与所述第二信号采集处理模块连接；所述人机交互界面用于合理的输出指定的三级模拟电平信号和数码显示值，以及输出来自最前端金属目标物的位移量的值。5. The high-precision eddy current displacement sensor according to claim 1, wherein the output module comprises a DA output unit, a ±5V output unit and a man-machine interface, the DA output unit, the ±5V output The unit and the human-computer interaction interface are respectively connected to the second signal acquisition and processing module; the human-computer interaction interface is used to reasonably output the specified three-level analog level signal and digital display value, and output the signal from the front end metal The value of the target's displacement.6.一种纳米级位移的测量方法，其特征在于，包括以下步骤：6. A method for measuring nanoscale displacement, comprising the following steps:S1，使用正弦振荡的电磁波打到金属目标物的目标位；S1, using sinusoidal oscillating electromagnetic waves to hit the target position of the metal target;S2，采集正弦振荡受金属目标物抑制后幅值的变化量，将其转化成一级模拟电平信号，并进行线性跟随放大；S2, collecting the change in the amplitude of the sinusoidal oscillation after being suppressed by the metal target, converting it into a first-level analog level signal, and performing linear follow-up amplification;S3，将非线性的一级模拟电平信号转化成线性的二级数字电平信号；S3, converting the nonlinear primary analog level signal into a linear secondary digital level signal;S4，将二级数字电平信号转化成三级模拟电平信号，并输出。S4, converting the secondary digital level signal into a tertiary analog level signal, and outputting it.7.如权利要求6所述的纳米级位移的测量方法，其特征在于，在步骤S2中，进行线性跟随放大包括以下步骤，提供一信号与正弦振荡的信号完全一致的驱动电路，进行驱动。7. The method for measuring nanoscale displacement as claimed in claim 6, characterized in that, in step S2, performing linear follower amplification comprises the following steps of providing a driving circuit whose signal is completely consistent with the sinusoidal oscillation signal for driving.

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