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CN115458334B - Columnar interdigital supercapacitor - Google Patents

Columnar interdigital supercapacitor
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CN115458334B
CN115458334BCN202211071625.8ACN202211071625ACN115458334BCN 115458334 BCN115458334 BCN 115458334BCN 202211071625 ACN202211071625 ACN 202211071625ACN 115458334 BCN115458334 BCN 115458334B
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贾春阳
苟超
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University of Electronic Science and Technology of China
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Abstract

The columnar interdigital supercapacitor comprises a positive electrode and a negative electrode, wherein the positive electrode comprises a positive shell, a positive cover cap, a positive inner core and a positive insulating sheet; the positive electrode shell comprises a first hollow cylinder and n first electrode plates arranged on the inner side of the first hollow cylinder, the negative electrode inner core comprises a second hollow cylinder and n second electrode plates arranged on the inner side and the outer side of the second hollow cylinder, and the positive electrode inner core comprises a solid cylinder and n third electrode plates arranged on the outer side of the solid cylinder. In the super capacitor, the anode shell and the anode inner core share one cathode inner core, so that two parallel columnar interdigital capacitors are formed. Compared with the common two-dimensional plane interdigital capacitor, the loading capacity of the active material is improved, and meanwhile, as two capacitors are arranged in one columnar device, the utilization rate of the electrode active material is effectively improved, and the energy density of the whole device is improved.

Description

Translated fromChinese
一种柱状叉指型超级电容器A kind of columnar interdigital supercapacitor

技术领域Technical field

本发明涉及一种超级电容器,具体涉及一种柱状叉指型超级电容器。The invention relates to a supercapacitor, in particular to a columnar interdigitated supercapacitor.

背景技术Background technique

随着时代的发展,石油、煤矿等传统能源消耗量与日俱增,与之而来的能源短缺和环境污染等问题也不断加剧,带来了新的挑战。开发新型能源和利用可再生能源代替传统的化石能源是实现可持续发展的一条重要途径。With the development of the times, the consumption of traditional energy sources such as petroleum and coal mines is increasing day by day, and the accompanying problems such as energy shortage and environmental pollution are also intensifying, bringing new challenges. Developing new energy sources and using renewable energy to replace traditional fossil energy is an important way to achieve sustainable development.

超级电容器又称电化学电容,是一种新型绿色储能装置。因其具备高功率密度、长效循环稳定性和环境友好等特点,是有望挑战锂离子电池市场垄断的电能存储技术之一。与传统电介质电容器相比,超级电容器具有较高的能量密度;与传统电池相比,超级电容器的能量密度虽然较低,但其独特的贮电过程使他们能够在短时间内存储或释放大量电荷,因此超级电容器具有更高的功率密度。Supercapacitor, also known as electrochemical capacitor, is a new type of green energy storage device. Because of its high power density, long-term cycle stability and environmental friendliness, it is one of the electrical energy storage technologies expected to challenge the monopoly of the lithium-ion battery market. Compared with traditional dielectric capacitors, supercapacitors have higher energy density; compared with traditional batteries, supercapacitors have lower energy density, but their unique electricity storage process allows them to store or release large amounts of charge in a short period of time. , so supercapacitors have higher power density.

平面叉指电极由于其小型化、易集成和无需隔膜等特点,被广泛应用于微型超级电容器中。但是由于平面结构限制,二维平面叉指结构存在尺寸小、活性材料负载量低、能量密度低等问题,限制了其在更多场景的应用。Planar interdigital electrodes are widely used in micro supercapacitors due to their miniaturization, easy integration, and no need for separators. However, due to the limitations of the planar structure, the two-dimensional planar interdigitated structure has problems such as small size, low active material loading, and low energy density, which limits its application in more scenarios.

发明内容Contents of the invention

本发明的目的在于,针对背景技术中提到的二维叉指结构存在的问题,提出了一种柱状叉指型超级电容器。The purpose of the present invention is to propose a columnar interdigital supercapacitor in view of the problems existing in the two-dimensional interdigital structure mentioned in the background art.

为实现上述目的,本发明采用的技术方案如下:In order to achieve the above objects, the technical solutions adopted by the present invention are as follows:

一种柱状叉指型超级电容器,包括正极电极和负极电极,所述正极电极包括正极外壳2、正极盖帽3、正极内芯5和正极绝缘片7;所述负极电极包括负极内芯4、负极盖帽1和负极绝缘片6;A columnar interdigital supercapacitor includes a positive electrode and a negative electrode. The positive electrode includes a positive outer shell 2, a positive cap 3, a positive inner core 5 and a positive insulating sheet 7; the negative electrode includes a negative inner core 4, a negative electrode Cap 1 and negative insulation sheet 6;

其中,所述正极外壳2包括第一空心圆柱体和设置于第一空心圆柱体内侧的n个第一电极片,相邻第一电极片构成的圆心角为360°/n;所述负极内芯4包括第二空心圆柱体和设置于第二空心圆柱体内侧和外侧的n个第二电极片,相邻第二电极片构成的圆心角为360°/n,第二电极片设置于两相邻第一电极片之间且平分相邻第一电极片构成的圆心角;所述正极内芯5包括实心圆柱体和位于实心圆柱体外侧的n个第三电极片,第三电极片和第一电极片位于同一直线上;所述正极盖帽3设置于第一空心圆柱体的一个底面,并且与正极内芯和正极外壳接触,正极盖帽与负极内芯之间通过正极绝缘片隔开;所述负极盖帽设置于第一空心圆柱体的另一个底面,并且和负极内芯接触,负极盖帽与正极内芯和正极外壳之间通过负极绝缘片隔开。Wherein, the positive electrode shell 2 includes a first hollow cylinder and n first electrode sheets arranged inside the first hollow cylinder, and the central angle formed by adjacent first electrode sheets is 360°/n; the inside of the negative electrode The core 4 includes a second hollow cylinder and n second electrode sheets arranged inside and outside the second hollow cylinder. The central angle formed by adjacent second electrode sheets is 360°/n. The second electrode sheets are arranged on both sides. between adjacent first electrode sheets and bisects the central angle formed by adjacent first electrode sheets; the positive electrode core 5 includes a solid cylinder and n third electrode sheets located outside the solid cylinder, and the third electrode sheet and The first electrode sheets are located on the same straight line; the positive electrode cap 3 is arranged on a bottom surface of the first hollow cylinder and is in contact with the positive electrode inner core and the positive electrode outer shell. The positive electrode cap and the negative electrode inner core are separated by a positive electrode insulating sheet; The negative electrode cap is disposed on the other bottom surface of the first hollow cylinder and is in contact with the negative electrode core. The negative electrode cap is separated from the positive electrode inner core and the positive electrode shell by a negative electrode insulating sheet.

进一步的,所述n为正整数,4≤n≤12。Further, the n is a positive integer, 4≤n≤12.

进一步的,所述负极盖帽上还可以设置凸起,用于电极接触以及正负极的区分。Furthermore, protrusions may also be provided on the negative electrode cap for electrode contact and distinction between positive and negative electrodes.

进一步的,所述第一电极片、第二电极片和第三电极片的厚度为0.3~0.5mm。Further, the thickness of the first electrode sheet, the second electrode sheet and the third electrode sheet is 0.3-0.5 mm.

进一步的,所述第一电极片的宽度为第一空心圆柱体底面半径的1/6~1/4;第二电极片的宽度为第一空心圆柱体底面半径的2/7~2/5;第三电极片的宽度为第一空心圆柱体底面半径的1/8~1/6。Further, the width of the first electrode sheet is 1/6 to 1/4 of the bottom radius of the first hollow cylinder; the width of the second electrode sheet is 2/7 to 2/5 of the bottom radius of the first hollow cylinder. ; The width of the third electrode piece is 1/8 to 1/6 of the radius of the bottom surface of the first hollow cylinder.

优选地,第二空心圆柱体外侧的第二电极片的宽度与第一电极片的宽度相同,第二空心圆柱体内侧的第二电极片的宽度与第三电极片的宽度相同。Preferably, the width of the second electrode sheet outside the second hollow cylinder is the same as the width of the first electrode sheet, and the width of the second electrode sheet inside the second hollow cylinder is the same as the width of the third electrode sheet.

进一步的,所述正极外壳和正极内芯的制备过程为:首先,采用模具一体成型法得到正极外壳和正极内芯的基体;然后再采用电化学沉积的方法在基体上制备正极活性材料得到。其中,所述正极活性材料可以为聚苯胺等赝电容材料,或者石墨烯等二维片状材料。Further, the preparation process of the positive electrode casing and the positive electrode core is as follows: first, using a mold integrated molding method to obtain the matrix of the cathode casing and the cathode inner core; and then using an electrochemical deposition method to prepare the cathode active material on the matrix. Wherein, the positive active material may be a pseudocapacitive material such as polyaniline, or a two-dimensional sheet material such as graphene.

进一步的,所述负极内芯采用压铸一体成型的工艺得到,负极内芯采用的材料为锌。Further, the negative electrode inner core is obtained by a die-casting one-piece molding process, and the material used in the negative electrode inner core is zinc.

进一步的,所述正极绝缘片和负极绝缘片为橡胶材质,厚度为1mm。Further, the positive insulating sheet and the negative insulating sheet are made of rubber and have a thickness of 1 mm.

进一步的,所述正极盖帽和负极盖帽为不锈钢材质,厚度为1mm。Further, the positive electrode cap and negative electrode cap are made of stainless steel with a thickness of 1 mm.

进一步的,所述第一电极片、第二电极片和第三电极片为不锈钢材质。Further, the first electrode sheet, the second electrode sheet and the third electrode sheet are made of stainless steel.

与现有技术相比,本发明的有益效果为:Compared with the prior art, the beneficial effects of the present invention are:

本发明提供的一种柱状叉指型超级电容器,正极外壳和正极内芯共用一个负极内芯,形成了并联的两个柱状叉指型电容器。相比普通的二维平面叉指电容器,柱状叉指型超级电容器提高了活性材料的负载量,同时由于一个柱状器件中有两个电容器,有效提高了电极活性材料的利用率,提高了整个器件的能量密度。并且,正负电极之间无须使用隔膜,加快了电解液离子的传输速率,有利于电容器快充快放,适用于大功率需求的应用场景。除此之外,该柱状叉指型超级电容器易于模组化,有利于批量制备和实际应用。The present invention provides a columnar interdigital supercapacitor in which the positive electrode shell and the positive electrode core share a negative electrode core, forming two parallel columnar interdigital capacitors. Compared with ordinary two-dimensional planar interdigital capacitors, columnar interdigital supercapacitors increase the load capacity of active materials. At the same time, because there are two capacitors in a columnar device, the utilization rate of electrode active materials is effectively improved, and the overall device performance is improved. energy density. In addition, there is no need to use a separator between the positive and negative electrodes, which speeds up the transmission rate of electrolyte ions, facilitates fast charging and discharging of capacitors, and is suitable for application scenarios with high power requirements. In addition, the columnar interdigital supercapacitor is easy to modularize, which is conducive to batch preparation and practical application.

附图说明Description of the drawings

图1为本发明提供的一种柱状叉指型超级电容器的正视图(a)和立体图(b);其中,1为负极盖帽,2为正极外壳,3为正极盖帽;Figure 1 is a front view (a) and a perspective view (b) of a columnar interdigitated supercapacitor provided by the present invention; wherein, 1 is a negative electrode cap, 2 is a positive electrode shell, and 3 is a positive electrode cap;

图2为无负极盖帽的电容器的俯视图(a)和立体图(b);其中,2为正极外壳,3为正极盖帽,4为负极内芯,5为正极内芯;Figure 2 is a top view (a) and a perspective view (b) of a capacitor without a negative electrode cap; where 2 is the positive electrode shell, 3 is the positive electrode cap, 4 is the negative electrode inner core, and 5 is the positive electrode inner core;

图3为负极盖帽1的俯视图(a)和剖面图(b);Figure 3 is a top view (a) and a cross-sectional view (b) of the negative electrode cap 1;

图4为负极绝缘片6的俯视图(a)和剖面图(b);Figure 4 is a top view (a) and a cross-sectional view (b) of the negative electrode insulating sheet 6;

图5为正极外壳2的俯视图(a)、侧视图(b)、立体图(c)和剖面图(d);Figure 5 is a top view (a), a side view (b), a perspective view (c) and a cross-sectional view (d) of the positive electrode casing 2;

图6为负极内芯4的示意图;Figure 6 is a schematic diagram of the negative electrode inner core 4;

图7为负极内芯4的俯视图(a)和侧视图(b);Figure 7 is a top view (a) and a side view (b) of the negative electrode core 4;

图8为正极内芯5的俯视图(a)、侧视图(b)、立体图(c)和剖面图(d);Figure 8 is a top view (a), a side view (b), a perspective view (c) and a cross-sectional view (d) of the positive electrode core 5;

图9为正极盖帽3的俯视图(a)和剖面图(b);Figure 9 is a top view (a) and a cross-sectional view (b) of the positive electrode cap 3;

图10为正极绝缘片7的俯视图(a)和剖面图(b)。Figure 10 is a top view (a) and a cross-sectional view (b) of the positive electrode insulating sheet 7.

具体实施方式Detailed ways

下面结合附图和实施例,详述本发明的技术方案。The technical solution of the present invention will be described in detail below with reference to the accompanying drawings and examples.

实施例Example

一种柱状叉指型超级电容器,包括正极电极和负极电极,所述正极电极包括正极外壳2、正极盖帽3、正极内芯5和正极绝缘片7;所述负极电极包括负极内芯4、负极盖帽1和负极绝缘片6,如图1和2所示;A columnar interdigital supercapacitor includes a positive electrode and a negative electrode. The positive electrode includes a positive outer shell 2, a positive cap 3, a positive inner core 5 and a positive insulating sheet 7; the negative electrode includes a negative inner core 4, a negative electrode Cap 1 and negative insulation sheet 6, as shown in Figures 1 and 2;

其中,所述正极外壳2包括第一空心圆柱体和设置于第一空心圆柱体内侧的8个第一电极片,相邻第一电极片构成的圆心角为45°,如图5所示;所述负极内芯4包括第二空心圆柱体和设置于第二空心圆柱体内侧和外侧的8个第二电极片,相邻第二电极片构成的圆心角为45°,第二电极片设置于两相邻第一电极片之间且平分相邻第一电极片构成的圆心角,即与相邻第一电极片的夹角为22.5°,如图6和7所示;所述正极内芯5包括实心圆柱体和位于实心圆柱体外侧的8个第三电极片,第三电极片和第一电极片位于同一直线上,如图8所示;Wherein, the positive electrode housing 2 includes a first hollow cylinder and 8 first electrode sheets arranged inside the first hollow cylinder, and the central angle formed by adjacent first electrode sheets is 45°, as shown in Figure 5; The negative electrode core 4 includes a second hollow cylinder and eight second electrode sheets arranged inside and outside the second hollow cylinder. The central angle formed by adjacent second electrode sheets is 45°. The second electrode sheets are arranged Between two adjacent first electrode sheets and bisecting the central angle formed by the adjacent first electrode sheets, that is, the included angle with the adjacent first electrode sheets is 22.5°, as shown in Figures 6 and 7; inside the positive electrode The core 5 includes a solid cylinder and 8 third electrode sheets located outside the solid cylinder. The third electrode sheets and the first electrode sheets are located on the same straight line, as shown in Figure 8;

所述正极盖帽3设置于第一空心圆柱体的一个底面,并且与正极内芯和正极外壳通过焊接的方式连接,正极盖帽与负极内芯之间通过正极绝缘片隔开,如图9和10所示;所述负极盖帽设置于第一空心圆柱体的另一个底面,并且和负极内芯通过焊接的方式连接,负极盖帽与正极内芯和正极外壳之间通过负极绝缘片隔开,如图3和4所示。The positive electrode cap 3 is arranged on a bottom surface of the first hollow cylinder, and is connected to the positive electrode core and the positive electrode shell by welding. The positive electrode cap and the negative electrode inner core are separated by a positive electrode insulating sheet, as shown in Figures 9 and 10 As shown; the negative electrode cap is arranged on the other bottom surface of the first hollow cylinder and is connected to the negative electrode core by welding. The negative electrode cap is separated from the positive electrode inner core and the positive electrode shell by a negative electrode insulating sheet, as shown in the figure 3 and 4 shown.

所述负极盖帽上通过设置凸起,用于电极接触以及正负极的区分;凸起部分为半径3mm、厚度0.5mm的扁圆柱体,如图3所示。The negative electrode cap is provided with protrusions for electrode contact and distinction between positive and negative electrodes; the protruding part is an oblate cylinder with a radius of 3 mm and a thickness of 0.5 mm, as shown in Figure 3.

所述第一电极片、第二电极片和第三电极片为不锈钢材质,厚度为0.5mm。The first electrode sheet, the second electrode sheet and the third electrode sheet are made of stainless steel and have a thickness of 0.5mm.

所述第一电极片的宽度为5mm;第二空心圆柱体外侧的第二电极片宽度为5mm;第二空心圆柱体内侧的第二电极片宽度为4mm;第三电极片的宽度为4mm。The width of the first electrode sheet is 5 mm; the width of the second electrode sheet outside the second hollow cylinder is 5 mm; the width of the second electrode sheet inside the second hollow cylinder is 4 mm; and the width of the third electrode sheet is 4 mm.

所述第一空心圆柱体厚度为0.5mm、底面半径为13.5mm;第二空心圆柱体的厚度为0.5mm、底面半径为7.5mm;实心圆柱体的半径为2.5mm。The first hollow cylinder has a thickness of 0.5mm and a bottom radius of 13.5mm; the second hollow cylinder has a thickness of 0.5mm and a bottom radius of 7.5mm; and the solid cylinder has a radius of 2.5mm.

所述正极绝缘片和负极绝缘片为橡胶材质,厚度为1mm。The positive electrode insulation sheet and the negative electrode insulation sheet are made of rubber and have a thickness of 1 mm.

所述正极盖帽和负极盖帽为不锈钢材质,厚度为1mm。The positive electrode cap and negative electrode cap are made of stainless steel and have a thickness of 1mm.

所述正极外壳的基体、正极内芯的基体、正极盖帽、负极盖帽这些不锈钢材质的部件通过浇铸一体成型工艺得到,具体为:将不锈钢粉末熔化得到的金属液体注入相应的浇铸腔体模具中,待冷却成型后取出;经过落砂、清理、热处理、整形、抛光等工序得到最终部件。The stainless steel components such as the base body of the positive electrode casing, the base body of the positive electrode core, the positive electrode cap, and the negative electrode cap are obtained through a casting integrated molding process. Specifically, the metal liquid obtained by melting the stainless steel powder is injected into the corresponding casting cavity mold. After being cooled and formed, it is taken out; the final parts are obtained through sand blasting, cleaning, heat treatment, shaping, polishing and other processes.

所述正极外壳、正极内芯上的活性材料采用电化学沉积聚苯胺到制备的不锈钢基体上形成,具体过程为:采用三电极的方式电沉积聚苯胺正极材料,在含有0.1M苯胺和1MHClO4的水溶液中,以正极外壳、正极内芯基体为工作电极,Ag/AgCl电极和铂片分别作为参考电极和对电极,先在0-1V的电位窗口内与Ag/AgCl循环5次,采用去离子水清洗工作电极,再在0.25mA/cm2的电流密度下沉积2小时,最后采用去离子水清洗沉积于基体表面的聚苯胺活性材料,并在60℃下真空干燥12小时。The active materials on the positive electrode shell and the positive electrode core are formed by electrochemical deposition of polyaniline onto the prepared stainless steel substrate. The specific process is: using a three-electrode method to electrodeposit polyaniline positive electrode material in a solution containing 0.1M aniline and 1MHClO4 In the aqueous solution, the positive electrode shell and the positive electrode inner core matrix are used as the working electrode, and the Ag/AgCl electrode and platinum sheet are used as the reference electrode and counter electrode respectively. First, cycle with Ag/AgCl 5 times in the potential window of 0-1V, and use the deionization method. Clean the working electrode with ionized water, and then deposit it at a current density of 0.25 mA/cm for2 hours. Finally, use deionized water to clean the polyaniline active material deposited on the surface of the substrate, and vacuum dry it at 60°C for 12 hours.

所述负极内芯通过压铸一体成型的工艺得到,具体过程为:将金属锌熔化得到的金属液体注入相应的压铸腔体模具中,待冷却成型后取出,再经落砂、清理、热处理、整形、抛光等工序得到。The negative electrode inner core is obtained through a die-casting integrated molding process. The specific process is as follows: inject the metal liquid obtained by melting the metallic zinc into the corresponding die-casting cavity mold, take it out after cooling and molding, and then go through sanding, cleaning, heat treatment, and shaping. , polishing and other processes.

所述正极绝缘片和负极绝缘片通过注射成型工艺得到,具体为:先将预先混炼好的胶料经搅拌和加热,以增加橡胶可塑性;再通过喷嘴与模型的浇口接触,胶料经喷嘴注入模腔中并保持压力一段时间,在保压过程中,胶料在高温下进行硫化阶段直至出模。The positive insulating sheet and negative insulating sheet are obtained through an injection molding process. Specifically, the pre-mixed rubber material is first stirred and heated to increase the plasticity of the rubber; then the nozzle is contacted with the gate of the model, and the rubber material is The nozzle is injected into the mold cavity and the pressure is maintained for a period of time. During the pressure holding process, the rubber material undergoes a vulcanization stage at high temperature until it is ejected from the mold.

将正极盖帽和正极外壳、正极内芯焊接到一起后,竖直放置;然后采用注射器将1MZnSO4电解液注入壳体中,直到液面与第一电极片齐平;最后再将负极盖帽与正极外壳通过打绝缘胶的方式连接到一起,实现绝缘密封连接。得到所述柱状叉指型超级电容器。After welding the positive electrode cap, positive electrode shell and positive electrode inner core together, place them vertically; then use a syringe to inject 1MZnSO4 electrolyte into the case until the liquid level is flush with the first electrode piece; finally, connect the negative electrode cap to the positive electrode The shells are connected together with insulating glue to achieve an insulated and sealed connection. The columnar interdigitated supercapacitor is obtained.

最后应说明的是:以上所述仅为本专利的优选实施例,并不局限于本专利,尽管参照前述实施例对本专利进行了详细的说明,对于本领域的技术人员来说,依然可以对前述实施例所记载的技术方案进行修改,或者对其中部分技术进行等同替换,例如增减内芯和电极片的数量、更换正负极的活性材料等。凡在本专利的精神和原则之内,所做的任何修改、等同替换、改进等,均应包含在本专利的保护范围之内。Finally, it should be noted that the above are only preferred embodiments of this patent and are not limited to this patent. Although this patent has been described in detail with reference to the foregoing embodiments, those skilled in the art can still The technical solutions described in the foregoing embodiments are modified, or some of the technologies are equivalently replaced, such as increasing or decreasing the number of inner cores and electrode sheets, replacing the active materials of the positive and negative electrodes, etc. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of this patent shall be included in the protection scope of this patent.

Claims (10)

the positive electrode shell (2) comprises a first hollow cylinder and n first electrode plates arranged on the inner side of the first hollow cylinder, and the central angle formed by the adjacent first electrode plates is 360 degrees/n; the negative electrode inner core (4) comprises a second hollow cylinder and n second electrode plates arranged on the inner side and the outer side of the second hollow cylinder, the central angle formed by the adjacent second electrode plates is 360 degrees/n, and the second electrode plates are arranged between two adjacent first electrode plates and bisect the central angle formed by the adjacent first electrode plates; the positive electrode inner core (5) comprises a solid cylinder and n third electrode slices positioned outside the solid cylinder, wherein the third electrode slices and the first electrode slices are positioned on the same straight line, and n is a positive integer; the positive electrode cap (3) is arranged on one bottom surface of the first hollow cylinder, is contacted with the positive electrode inner core and the positive electrode outer shell, and is separated from the negative electrode inner core through a positive electrode insulating sheet; the negative electrode cap is arranged on the other bottom surface of the first hollow cylinder and is contacted with the negative electrode inner core, and the negative electrode cap is separated from the positive electrode inner core and the positive electrode outer shell through a negative electrode insulating sheet.
CN202211071625.8A2022-08-312022-08-31Columnar interdigital supercapacitorActiveCN115458334B (en)

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CN101644718A (en)*2009-07-022010-02-10中国科学院声学研究所Capacitive acceleration sensor with acoustic cavity
CN103531358A (en)*2012-07-052014-01-22株式会社和冠Variable capacitance type capacitor
CN206619636U (en)*2017-03-302017-11-07陕西沃特玛新能源有限公司A kind of battery

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JP2014120615A (en)*2012-12-172014-06-30Fujitsu Semiconductor LtdCapacity element, capacity array, and a/d converter
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JPH06168842A (en)*1992-11-301994-06-14Tokin CorpColumn ceramic capacitor and manufacture thereof
JP2003197758A (en)*2001-12-272003-07-11Toshiba Corp Microwave integrated circuit
CN101644718A (en)*2009-07-022010-02-10中国科学院声学研究所Capacitive acceleration sensor with acoustic cavity
CN103531358A (en)*2012-07-052014-01-22株式会社和冠Variable capacitance type capacitor
CN206619636U (en)*2017-03-302017-11-07陕西沃特玛新能源有限公司A kind of battery

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