技术领域Technical field
本发明涉及物理性质测量领域。具体地，本发明涉及用于测量材料的物理性质的系统。The present invention relates to the field of physical property measurement. In particular, the present invention relates to systems for measuring physical properties of materials.
背景技术Background technique
电学性质、磁学性质、光学性质、热学性质等物理性质的测量，是材料科学、凝聚态物理等学科的实验基础。相应的实验装置通常都被放置在普通的大气环境条件下进行实验操作。The measurement of physical properties such as electrical properties, magnetic properties, optical properties, and thermal properties is the experimental basis for materials science, condensed matter physics and other disciplines. The corresponding experimental devices are usually placed under ordinary atmospheric environmental conditions for experimental operations.
但是，近些年来的材料研究进展对目前已有的这些传统的物理性质测量系统提出了前所未有的挑战。具体原因阐述如下，一些新型的量子功能材料，如拓扑绝缘体材料(Science 318,766(2007))、铁基超导体材料(Journal of the American ChemicalSociety 130,3296(2008))、锌砷基稀磁半导体材料(Nature Communications 2,422(2011))、量子反常霍尔效应材料(Science 340,167(2013))等，它们对空气敏感，在空气中容易与氧气、水汽发生反应而变质退化(Reviews of Modern Physics 83,1589(2011))。这些新材料对材料科学、物理学研究和技术应用都具有十分重要的科学意义，获得这些材料在不发生变质和退化前提条件下的内在本征的物理性质，对开展其物理研究和技术应用至关重要。However, the progress of materials research in recent years has posed unprecedented challenges to these existing traditional physical property measurement systems. The specific reasons are explained as follows. Some new quantum functional materials, such as topological insulator materials (Science 318,766 (2007)), iron-based superconductor materials (Journal of the American Chemical Society 130,3296 (2008)), zinc-arsenic-based dilute magnetic semiconductor materials ( Nature Communications 2,422(2011)), quantum anomalous Hall effect materials (Science 340,167(2013)), etc., which are sensitive to air and easily react with oxygen and water vapor in the air to cause deterioration (Reviews of Modern Physics 83,1589( 2011)). These new materials are of very important scientific significance to materials science, physics research and technological applications. Obtaining the intrinsic physical properties of these materials without deterioration and degradation is essential for carrying out their physical research and technological applications. It's important.
目前，利用现有传统的物理性质测量系统开展对氧气、水汽敏感材料的实验研究时，这些材料在样品准备、样品转移放置于实验操作平台等具体的操作过程中，会不可避免地暴露在空气中，进而与氧气、水汽发生反应而导致变质、退化。At present, when using existing traditional physical property measurement systems to carry out experimental research on oxygen and water vapor sensitive materials, these materials will inevitably be exposed to air during specific operations such as sample preparation and sample transfer and placement on the experimental operating platform. in, and then react with oxygen and water vapor to cause deterioration and degradation.
目前急需一种成本节约、易于维护和操作简单且适用于对氧气、水汽敏感的材料的物理性质的测量系统。There is an urgent need for a measurement system that is cost-effective, easy to maintain and simple to operate and suitable for measuring the physical properties of materials sensitive to oxygen and water vapor.
发明内容Contents of the invention
本发明的目的是提供一种用于测量材料的物理性质的系统。本发明的测量系统可以解决现有的物理性质的测量系统在对氧气、水汽敏感的功能材料进行物理性质测量过程中，使得这些功能材料不可避免地与氧气、水汽发生反应从而导致材料变质、退化的问题。It is an object of the present invention to provide a system for measuring physical properties of materials. The measurement system of the present invention can solve the problem that the existing physical property measurement system causes these functional materials to inevitably react with oxygen and water vapor during the physical property measurement process of functional materials that are sensitive to oxygen and water vapor, resulting in material deterioration and degradation. The problem.
本发明的上述目的是通过如下技术方案实现的。The above objects of the present invention are achieved through the following technical solutions.
本发明提供一种用于测量材料的物理性质的系统，其包括：The present invention provides a system for measuring physical properties of materials, which includes:
沉积单元、引线键合单元、变温电输运测量单元以及气体净化单元；其中，Deposition unit, wire bonding unit, variable temperature electrical transport measurement unit and gas purification unit; among which,
所述沉积单元、引线键合单元、变温电输运测量单元通过样品转移通道连通；所述气体净化单元与所述沉积单元、引线键合单元、变温电输运测量单元通过气体循环通道气密性连通，以使得所述系统构成气体循环回路；所述沉积单元包括通过真空闸板阀密封连通的电极沉积准备单元和电极沉积单元；The deposition unit, wire bonding unit, and variable temperature electrical transport measurement unit are connected through a sample transfer channel; the gas purification unit is airtight with the deposition unit, wire bonding unit, and variable temperature electrical transport measurement unit through a gas circulation channel. Sexually connected, so that the system forms a gas circulation loop; the deposition unit includes an electrode deposition preparation unit and an electrode deposition unit that are sealed and connected through a vacuum gate valve;
所述系统还包括用于样品进入和离开所述系统的样品进出管道。The system also includes sample inlet and outlet conduits for samples entering and exiting the system.
优选地，在本发明所述的测量系统中，样品进出管道设置在沉积单元、引线键合单元、变温电输运测量单元中的至少一个单元上。当样品进出管道设置在沉积单元上时，所述样品进出管道设置在沉积单元的电极沉积准备单元上。一方面，电极沉积准备单元与所述测量系统其他功能单元连接，构成气体循环的回路。另一方面，电极沉积准备单元为电极沉积单元提供一个缓冲的和稳定的环境气氛，使得操作人员可以进行放入待处理样品，可以进行取出已处理样品，同时可以进行安装金属掩膜版等服务于电极沉积单元的操作。Preferably, in the measurement system of the present invention, the sample inlet and outlet pipe is provided on at least one of the deposition unit, the wire bonding unit, and the variable temperature electrical transport measurement unit. When the sample inlet and outlet pipe is provided on the deposition unit, the sample inlet and outlet pipe is provided on the electrode deposition preparation unit of the deposition unit. On the one hand, the electrode deposition preparation unit is connected with other functional units of the measurement system to form a gas circulation loop. On the other hand, the electrode deposition preparation unit provides a buffered and stable environmental atmosphere for the electrode deposition unit, allowing operators to put in samples to be processed, take out processed samples, and perform services such as installing metal masks. for the operation of the electrode deposition unit.
优选地，在本发明所述的用于测量材料的物理性质的系统中，所述样品进出管道的两侧设有密封阀门。Preferably, in the system for measuring physical properties of materials of the present invention, sealing valves are provided on both sides of the sample inlet and outlet pipe.
优选地，在本发明所述的用于测量材料的物理性质的系统中，所述样品转移通道内设有样品载具，使得样品在样品转移通道内自由移动。Preferably, in the system for measuring physical properties of materials of the present invention, a sample carrier is provided in the sample transfer channel so that the sample can move freely in the sample transfer channel.
优选地，在本发明所述的用于测量材料的物理性质的系统中，所述样品转移通道的两端设有密封阀门。Preferably, in the system for measuring physical properties of materials of the present invention, sealing valves are provided at both ends of the sample transfer channel.
优选地，在本发明所述的用于测量材料的物理性质的系统中，所述气体循环通道上设有氧气含量探头、水汽含量探头和气体压力探头，并通过电磁阀分别同气体气源、机械泵相连。Preferably, in the system for measuring the physical properties of materials of the present invention, the gas circulation channel is provided with an oxygen content probe, a water vapor content probe and a gas pressure probe, and are connected to the gas source and gas source through solenoid valves respectively. A mechanical pump is connected.
优选地，在本发明所述的用于测量材料的物理性质的系统中，所述电极沉积准备单元包括电极沉积准备密闭箱体；所述电极沉积准备密闭箱体上开设有第一密闭箱体观察窗和第一橡胶手套接口。Preferably, in the system for measuring physical properties of materials according to the present invention, the electrode deposition preparation unit includes an electrode deposition preparation sealed box; the electrode deposition preparation sealed box is provided with a first sealed box Observation window and first rubber glove interface.
优选地，在本发明所述的用于测量材料的物理性质的系统中，所述电极沉积单元包括电极沉积真空腔室、磁控溅射靶和样品传送杆；所述电极沉积真空腔室内设有沉积样品台。Preferably, in the system for measuring physical properties of materials of the present invention, the electrode deposition unit includes an electrode deposition vacuum chamber, a magnetron sputtering target and a sample transfer rod; the electrode deposition vacuum chamber is equipped with There is a deposition sample stage.
在本发明的具体实施方案中，电极沉积单元还包括与其配套的真空泵，以对电极沉积真空腔室抽真空；优选地，真空泵可以为由分子泵、机械泵构成的两级泵组。分子泵的进气口与电极沉积真空腔室之间，通过真空闸板阀相连，分子泵的出气口与机械泵的进气口相连，机械泵的出气口连接尾气回收管道。In a specific embodiment of the present invention, the electrode deposition unit also includes a matching vacuum pump to evacuate the electrode deposition vacuum chamber; preferably, the vacuum pump can be a two-stage pump set composed of a molecular pump and a mechanical pump. The air inlet of the molecular pump is connected to the electrode deposition vacuum chamber through a vacuum gate valve, the air outlet of the molecular pump is connected to the air inlet of the mechanical pump, and the air outlet of the mechanical pump is connected to the tail gas recovery pipeline.
优选地，在本发明所述的用于测量材料的物理性质的系统中，所述电极沉积真空腔室上开设有真空腔室观察窗。Preferably, in the system for measuring physical properties of materials of the present invention, a vacuum chamber observation window is provided on the electrode deposition vacuum chamber.
优选地，在本发明所述的用于测量材料的物理性质的系统中，所述引线键合单元包括引线键合密闭箱体和置于其内的超声压焊装置、键合样品台、变温测量样品载具、光学显微镜、CCD(Charge-coupled Device，电荷耦合器件)相机和显示器。Preferably, in the system for measuring physical properties of materials according to the present invention, the wire bonding unit includes a wire bonding sealed box and an ultrasonic pressure welding device placed inside it, a bonding sample stage, and a variable temperature Measure sample carriers, optical microscopes, CCD (Charge-coupled Device) cameras and displays.
优选地，在本发明所述的用于测量材料的物理性质的系统中，所述引线键合密闭箱体上开设有第二密闭箱体观察窗和第二橡胶手套接口。Preferably, in the system for measuring physical properties of materials of the present invention, the wire bonding sealed box is provided with a second sealed box observation window and a second rubber glove interface.
优选地，在本发明所述的用于测量材料的物理性质的系统中，所述变温测量样品载具包括热沉、位于热沉上的导热绝缘板以及位于所述导热绝缘板上的键合金属柱。Preferably, in the system for measuring physical properties of materials of the present invention, the variable temperature measurement sample carrier includes a heat sink, a thermally conductive insulating plate located on the heat sink, and a bonding device located on the thermally conductive insulating plate. Metal pillar.
优选地，在本发明所述的用于测量材料的物理性质的系统中，所述变温电输运测量单元包括变温电输运测量密闭箱体和置于其内的测量电缆、微波波导电缆与天线、冷头和变温电输运测量真空腔室，以及置于其外的氦气压缩机、压缩氦气管道、制冷机、测量仪表、真空航空接头。Preferably, in the system for measuring physical properties of materials according to the present invention, the variable temperature electrical transport measurement unit includes a variable temperature electrical transport measurement sealed box and a measurement cable, a microwave waveguide cable and a measurement cable placed inside it. Antenna, cold head and variable temperature electrical transport measurement vacuum chamber, as well as helium compressor, compressed helium pipeline, refrigerator, measuring instrument and vacuum aviation connector placed outside it.
优选地，在本发明所述的用于测量材料的物理性质的系统中，所述变温电输运测量密闭箱体上开设有第三密闭箱体观察窗和第三橡胶手套接口。Preferably, in the system for measuring physical properties of materials of the present invention, the variable temperature electrical transport measurement sealed box is provided with a third sealed box observation window and a third rubber glove interface.
优选地，在本发明所述的用于测量材料的物理性质的系统中，所述气体净化单元包括气体净化箱体和置于其内的风机、有机气体净化柱和氧水净化柱。Preferably, in the system for measuring physical properties of materials according to the present invention, the gas purification unit includes a gas purification box and a fan, an organic gas purification column and an oxygen water purification column placed inside it.
在本发明的具体实施方案中，电极沉积准备密闭箱体、引线键合密闭箱体、变温电输运测量密闭箱体和气体净化箱体通过样品转移通道或气体循环通道连接，内部填充一个大气压的保护性气氛气体，并形成该气体环境的闭环。In a specific embodiment of the present invention, the electrode deposition preparation sealed box, the wire bonding sealed box, the variable temperature electrical transport measurement sealed box and the gas purification box are connected through a sample transfer channel or a gas circulation channel, and an atmospheric pressure is filled inside protective atmosphere gas and form a closed loop of the gas environment.
在本发明的具体实施方案中，变温测量样品载具由热沉、导热绝缘板、键合金属柱构成。热沉的材质优选为无氧铜，导热绝缘板的材质优选为蓝宝石，键合金属柱优选为表面电镀金涂层的不锈钢柱。In a specific embodiment of the present invention, the variable temperature measurement sample carrier is composed of a heat sink, a thermally conductive insulation plate, and a bonded metal column. The material of the heat sink is preferably oxygen-free copper, the material of the thermally conductive insulation plate is preferably sapphire, and the bonding metal pillar is preferably a stainless steel pillar with a gold coating on the surface.
在本发明的具体实施方案中，样品转移通道既可以满足气体的密闭性，又可以实现在一个大气压的环境下，在电极沉积准备密闭箱体、引线键合密闭箱体、变温电输运测量密闭箱体之间转移样品。In the specific embodiment of the present invention, the sample transfer channel can not only meet the airtightness of the gas, but also realize the preparation of a sealed box for electrode deposition, a sealed box for wire bonding, and a variable temperature electrical transport measurement in an atmospheric pressure environment. Transfer samples between closed chambers.
在本发明的具体实施方案中，样品转移通道内可以设有样品载具以转移样品。具体地，可以在样品转移通道的两端放置定滑轮来移动样品载具，进而实现对样品的转移。In specific embodiments of the present invention, a sample carrier may be provided in the sample transfer channel to transfer the sample. Specifically, fixed pulleys can be placed at both ends of the sample transfer channel to move the sample carrier, thereby realizing the transfer of the sample.
在本发明的具体实施方案中，测量系统内的气压是由气体净化单元进行调控的。可以在气体循环通道上设置气体压力探头，以检测测量系统内的压力。可以将机械泵和气体气源与气体循环通道分别通过电磁阀相连。为了保持气体循环通道内的气压与系统周围环境气压之间的平衡，在设定的误差范围内，当气体压力探头探测到的数值小于系统周围环境的气压值，第一电磁阀打开，气体气源向气体循环通道内补充气体；而当气体压力探头探测到的数值大于系统周围环境的气压值，第二电磁阀打开，机械泵从气体循环通道中抽取气体。In a specific embodiment of the invention, the gas pressure within the measurement system is regulated by a gas purification unit. A gas pressure probe can be set on the gas circulation channel to detect the pressure within the measurement system. The mechanical pump, gas source and gas circulation channel can be connected through solenoid valves respectively. In order to maintain the balance between the air pressure in the gas circulation channel and the air pressure around the system, within the set error range, when the value detected by the gas pressure probe is less than the air pressure value around the system, the first solenoid valve opens and the gas is released. The source replenishes gas into the gas circulation channel; and when the value detected by the gas pressure probe is greater than the pressure value of the system's surrounding environment, the second solenoid valve opens and the mechanical pump extracts gas from the gas circulation channel.
在本发明的具体实施方案中，保护性气氛气体一般为氮气、氩气。在本发明的测量系统中，控制系统内部的总体气压为1个标准大气压左右，同时，控制系统内部的气体中的残余的氧气、水汽含量维持在较低的水平。一般残余的氧气、水汽的相对含量都小于1×10-7，即0.1ppm。In specific embodiments of the present invention, the protective atmosphere gas is generally nitrogen or argon. In the measurement system of the present invention, the overall air pressure inside the control system is about 1 standard atmosphere, and at the same time, the residual oxygen and water vapor content in the gas inside the control system is maintained at a low level. Generally, the relative contents of residual oxygen and water vapor are less than 1×10-7 , that is, 0.1ppm.
在本发明的具体实施方案中，样品进出管道的一端可以与电极沉积准备密闭箱体、引线键合密闭箱体或变温电输运测量密闭箱体相连接。样品进出管道的另一端可以与其它保护性气氛环境下的密闭箱体相连接，也可以按照实际工作需求同空气环境相连接。In a specific embodiment of the present invention, one end of the sample inlet and outlet pipe can be connected to an electrode deposition preparation sealed box, a wire bonding sealed box, or a variable temperature electrical transport measurement sealed box. The other end of the sample inlet and outlet pipe can be connected to a closed box in other protective atmosphere environments, or it can be connected to an air environment according to actual work requirements.
在本发明的具体实施方案中，样品进出管道的气体环境可以随着工作需求，在真空环境和一个大气压的保护性气氛环境之间切换。In a specific embodiment of the present invention, the gas environment of the sample inlet and outlet pipe can be switched between a vacuum environment and a protective atmosphere environment of atmospheric pressure according to work requirements.
在本发明的具体实施方案中，有机气体净化柱内部填充活性炭等吸附有机分子的材料，并且氧水净化柱的内部填充铜触媒、分子筛等吸附氧气、吸附水汽的材料。In a specific embodiment of the present invention, the interior of the organic gas purification column is filled with materials such as activated carbon that adsorb organic molecules, and the interior of the oxygen water purification column is filled with materials such as copper catalysts and molecular sieves that adsorb oxygen and water vapor.
在本发明的具体实施方案中，真空腔室观察窗、密闭箱体观察窗的材质可以为玻璃、有机玻璃、石英等。In specific embodiments of the present invention, the material of the vacuum chamber observation window and the sealed box observation window can be glass, organic glass, quartz, etc.
在本发明的具体实施方案中，磁控溅射靶材的材料有金、银、铂等常用的电极金属，以及钛、镍等常用的过渡层金属。In specific embodiments of the present invention, the materials of the magnetron sputtering target include commonly used electrode metals such as gold, silver, and platinum, as well as commonly used transition layer metals such as titanium and nickel.
本发明具有以下有益效果：The invention has the following beneficial effects:
本发明的测量系统能够在保护性气氛环境下完成样品的物理性质测量，从而获得对氧气、水汽敏感材料的更为本质的物理性质。The measurement system of the present invention can complete the physical property measurement of the sample in a protective atmosphere environment, thereby obtaining more essential physical properties of materials sensitive to oxygen and water vapor.
本发明的测量系统把物理性质测量的部分功能单元放置于无氧、无水的保护性气氛环境中。相比于把物理性质测量平台整体放置于无氧、无水的保护性气氛环境的技术方案，本方案的系统成本和测量操作成本均比较低。另外，可以设想，如果将物理性质测量系统整体放置在某一密闭环境内，并将此密闭环境内的气氛都转变为无氧、无水的保护性气氛环境，很显然，这种方案的装备制作和运维成本将会非常昂贵，而且，更为重要的是，操作人员需要穿戴成本高昂的防护服来完成实验测量操作，这些都非常不利于实际使用。The measurement system of the present invention places some functional units for physical property measurement in an oxygen-free and water-free protective atmosphere environment. Compared with the technical solution of placing the entire physical property measurement platform in an oxygen-free and water-free protective atmosphere environment, the system cost and measurement operation cost of this solution are relatively low. In addition, it is conceivable that if the entire physical property measurement system is placed in a closed environment, and the atmosphere in this closed environment is transformed into an oxygen-free and water-free protective atmosphere environment, it is obvious that the equipment of this solution The production and operation and maintenance costs will be very expensive, and, more importantly, operators need to wear expensive protective clothing to complete experimental measurement operations, which is very unfavorable for practical use.
本发明的测量系统具有可扩展性，通过设计、整合，可以使得样品的制作、晶体结构表征、微纳加工、物理性质测量等操作，全部在保护性气氛环境中进行。The measurement system of the present invention is scalable. Through design and integration, operations such as sample production, crystal structure characterization, micro-nano processing, and physical property measurement can all be performed in a protective atmosphere environment.
附图说明Description of the drawings
以下，结合附图来详细说明本发明的实施方案，其中：Below, the embodiments of the present invention are described in detail with reference to the accompanying drawings, wherein:
图1为本发明的一个具体实施方案的用于测量材料的物理性质的系统的示意图；Figure 1 is a schematic diagram of a system for measuring physical properties of materials according to a specific embodiment of the present invention;
图2为本发明的一个具体实施方案的变温测量样品载具的结构示意图；Figure 2 is a schematic structural diagram of a variable temperature measurement sample carrier according to a specific embodiment of the present invention;
其中，附图标记：Among them, the reference signs are:
1-电极沉积真空腔室；2-磁控溅射靶；3-样品传送杆；4-电极沉积样品台；5-真空腔室观察窗；6-真空闸板阀；7-电极沉积准备密闭箱体；8-第一密闭箱体观察窗；9-第一橡胶手套接口；10-第一样品转移通道；11-样品载具；12-样品进出管道；13-其它保护性气氛环境下的密闭箱体；14-引线键合密闭箱体；15-第二密闭箱体观察窗；16-第二橡胶手套接口；17-超声压焊装置；18-键合样品台；19-变温测量样品载具；20-光学显微镜；21-CCD相机；22-显示器；23-第二样品转移通道；24-变温电输运测量密闭箱体；25-第三密闭箱体观察窗；26-第三橡胶手套接口；27-变温电输运测量真空腔室；28-冷头；29-测量电缆；30-微波波导电缆与天线；31-制冷机；32-真空航空接头；33-压缩氦气管道；34-氦气压缩机；35-测量仪表；36-第一气体循环通道；37-气体净化箱体；38-风机；39-氧水净化柱；40-有机气体净化柱；41-第二气体循环通道；42-第一电磁阀；43-气体气源；44-第二电磁阀；45-机械泵；46-气体压力探头；47-氧气含量探头；48-水汽含量探头；49-热沉；50-键合金属柱；51-导热绝缘板。1-electrode deposition vacuum chamber; 2-magnetron sputtering target; 3-sample transfer rod; 4-electrode deposition sample stage; 5-vacuum chamber observation window; 6-vacuum gate valve; 7-electrode deposition preparation sealed Box; 8-first closed box observation window; 9-first rubber glove interface; 10-first sample transfer channel; 11-sample carrier; 12-sample inlet and outlet pipe; 13-other protective atmosphere environments sealed box; 14-wire bonding sealed box; 15-second sealed box observation window; 16-second rubber glove interface; 17-ultrasonic pressure welding device; 18-bonding sample stage; 19-variable temperature measurement Sample carrier; 20-optical microscope; 21-CCD camera; 22-display; 23-second sample transfer channel; 24-variable temperature electrical transport measurement sealed box; 25-third sealed box observation window; 26-th Three rubber glove interfaces; 27-variable temperature electrical transport measurement vacuum chamber; 28-cold head; 29-measurement cable; 30-microwave waveguide cable and antenna; 31-refrigerator; 32-vacuum aviation connector; 33-compressed helium Pipeline; 34-helium compressor; 35-measuring instrument; 36-first gas circulation channel; 37-gas purification box; 38-fan; 39-oxygen water purification column; 40-organic gas purification column; 41-No. Two gas circulation channels; 42-first solenoid valve; 43-gas source; 44-second solenoid valve; 45-mechanical pump; 46-gas pressure probe; 47-oxygen content probe; 48-water vapor content probe; 49- Heat sink; 50-bonded metal column; 51-thermal conductive insulation board.
具体实施方式Detailed ways
现参考附图，详细说明本发明所公开的结构的示意性方案。尽管提供附图是为了呈现本发明的实施方式，但附图不必按具体实施方案的尺寸绘制，并且某些特征可被放大、移除或局剖以更好地示出和解释本发明的公开内容。在下文中用于描述附图的某些方向性术语，将被理解为具有其通常含义并且指正常看附图时所涉及的那些方向。Referring now to the accompanying drawings, a schematic scheme of the structure disclosed in the present invention will be described in detail. Although the drawings are provided to present embodiments of the invention, they are not necessarily drawn to the dimensions of the particular embodiments and certain features may be exaggerated, removed, or sectioned away to better illustrate and explain the disclosure of the invention. content. Certain directional terms used in the following description of the Figures will be understood to have their ordinary meaning and refer to those directions in which the Figures are normally viewed.
在材料的物理性质测量中，电输运测量的测量通常是必不可少的。参照图1，图1示出了本发明的一个具体实施方案的测量系统的示意图。本发明的用于测量材料的物理性质的系统，其包括：沉积单元、引线键合单元、变温电输运测量单元以及气体净化单元；其中，所述沉积单元、引线键合单元、变温电输运测量单元通过样品转移通道连通；所述气体净化单元与所述沉积单元、引线键合单元、变温电输运测量单元通过气体循环通道气密性连通，以使得所述系统构成气体循环回路；所述沉积单元包括通过真空闸板阀6密封连通的电极沉积准备单元和电极沉积单元；所述系统还包括样品进出管道12，使得样品能够进出所述系统。Measurements of electrical transport measurements are often essential in the measurement of physical properties of materials. Referring to Figure 1, a schematic diagram of a measurement system according to a specific embodiment of the present invention is shown. The system for measuring the physical properties of materials of the present invention includes: a deposition unit, a wire bonding unit, a variable temperature electrical transport measurement unit, and a gas purification unit; wherein, the deposition unit, the wire bonding unit, the variable temperature electrical transport measurement unit, and the gas purification unit. The measurement unit is connected through a sample transfer channel; the gas purification unit is airtightly connected with the deposition unit, wire bonding unit, and variable temperature electrical transport measurement unit through a gas circulation channel, so that the system forms a gas circulation loop; The deposition unit includes an electrode deposition preparation unit and an electrode deposition unit that are sealed and communicated through a vacuum gate valve 6; the system also includes a sample inlet and outlet pipe 12 so that samples can enter and exit the system.
在本发明的具体实施方案中，样品进出管道12的两侧设有密封阀门。第一样品转移通道10内设有样品载具11，使得样品在样品转移通道内自由移动。第二样品转移通道23内可以不设有样品载具，而是通过手动进行样品的转移。In a specific embodiment of the present invention, sealing valves are provided on both sides of the sample inlet and outlet pipe 12 . The first sample transfer channel 10 is provided with a sample carrier 11 so that the sample can move freely in the sample transfer channel. The second sample transfer channel 23 may not be provided with a sample carrier, and the sample may be transferred manually.
在本发明的具体实施方案中，第二气体循环通道41上设有气体压力探头46、氧气含量探头47和水汽含量探头48。In the specific embodiment of the present invention, the second gas circulation channel 41 is provided with a gas pressure probe 46, an oxygen content probe 47 and a water vapor content probe 48.
在本发明的具体实施方案中，所述电极沉积准备单元包括电极沉积准备密闭箱体7；电极沉积准备密闭箱体7上开设有第一密闭箱体观察窗8和第一橡胶手套接口9。In a specific embodiment of the present invention, the electrode deposition preparation unit includes an electrode deposition preparation sealed box 7; the electrode deposition preparation sealed box 7 is provided with a first sealed box observation window 8 and a first rubber glove interface 9.
在本发明的具体实施方案中，所述电极沉积单元包括电极沉积真空腔室1、磁控溅射靶2和样品传送杆3；电极沉积真空腔室1内设有电极沉积样品台4；优选地，电极沉积真空腔室1上开设有真空腔室观察窗5。In a specific embodiment of the present invention, the electrode deposition unit includes an electrode deposition vacuum chamber 1, a magnetron sputtering target 2 and a sample transfer rod 3; the electrode deposition vacuum chamber 1 is provided with an electrode deposition sample stage 4; preferably Ground, the electrode deposition vacuum chamber 1 is provided with a vacuum chamber observation window 5.
在本发明的具体实施方案中，所述引线键合单元包括引线键合密闭箱体14和置于其内的超声压焊装置17、键合样品台18、变温测量样品载具19、光学显微镜20、CCD相机21和显示器22；优选地，引线键合密闭箱体14上开设有第二密闭箱体观察窗15和第二橡胶手套接口16。In a specific embodiment of the present invention, the wire bonding unit includes a wire bonding closed box 14 and an ultrasonic pressure welding device 17 placed therein, a bonding sample stage 18, a variable temperature measurement sample carrier 19, and an optical microscope. 20. CCD camera 21 and display 22; preferably, the wire bonding sealed box 14 is provided with a second sealed box observation window 15 and a second rubber glove interface 16.
参照图2，在本发明的具体实施方案中，变温测量样品载具19包括热沉49、位于热沉49上的导热绝缘板51以及位于导热绝缘板51上的键合金属柱50。Referring to Figure 2, in a specific embodiment of the present invention, the variable temperature measurement sample carrier 19 includes a heat sink 49, a thermally conductive insulating plate 51 located on the heat sink 49, and a bonded metal post 50 located on the thermally conductive insulating plate 51.
在本发明的具体实施方案中，所述变温电输运测量单元包括变温电输运测量密闭箱体24和置于其内的测量电缆29、微波波导电缆与天线30、冷头28和变温电输运测量真空腔室27，以及置于其外的氦气压缩机34、压缩氦气管道33、制冷机31、测量仪表35、真空航空接头32；优选地，变温电输运测量密闭箱体24上开设有第三密闭箱体观察窗25和第三橡胶手套接口26。In a specific embodiment of the present invention, the variable temperature electrical transport measurement unit includes a variable temperature electrical transport measurement sealed box 24 and a measurement cable 29 placed therein, a microwave waveguide cable and antenna 30, a cold head 28 and a variable temperature electrical Transport measurement vacuum chamber 27, as well as helium compressor 34, compressed helium pipeline 33, refrigerator 31, measuring instrument 35, and vacuum aviation connector 32 placed outside it; preferably, a variable temperature electric transport measurement sealed box 24 is provided with a third sealed box observation window 25 and a third rubber glove interface 26.
在本发明的具体实施方案中，所述气体净化单元包括气体净化箱体37和置于其内的风机38、有机气体净化柱40和氧水净化柱39。In a specific embodiment of the present invention, the gas purification unit includes a gas purification box 37 and a fan 38 placed therein, an organic gas purification column 40 and an oxygen water purification column 39.
在本发明的具体实施方案中，测量系统内的气压是由气体净化单元进行调控的。可以在第二气体循环通道41上设置气体压力探头46，以检测测量系统内的气体压力。可以将机械泵45和保护性气体气源43与第二气体循环通道41分别通过电磁阀相连。为了保持第二气体循环通道41内的气压与系统周围环境气压之间的平衡，在设定的误差范围内，当气体压力探头46探测到的数值小于系统周围环境的气压值，第一电磁阀42门打开，保护性气体气源43向第二气体循环通道41内补充气体；而当气体压力探头44探测到的数值大于系统周围环境的气压值，第二电磁阀44门打开，机械泵45从第二气体循环通道41中抽取气体。In a specific embodiment of the invention, the gas pressure within the measurement system is regulated by a gas purification unit. A gas pressure probe 46 can be provided on the second gas circulation channel 41 to detect the gas pressure within the measurement system. The mechanical pump 45 and the protective gas source 43 can be connected to the second gas circulation channel 41 through solenoid valves respectively. In order to maintain the balance between the air pressure in the second gas circulation channel 41 and the air pressure around the system, within the set error range, when the value detected by the gas pressure probe 46 is less than the air pressure value around the system, the first solenoid valve Door 42 is opened, and the protective gas source 43 replenishes gas into the second gas circulation channel 41; when the value detected by the gas pressure probe 44 is greater than the air pressure value of the surrounding environment of the system, the door of the second solenoid valve 44 is opened, and the mechanical pump 45 Gas is extracted from the second gas circulation channel 41 .
样品电输运测量一般由前期准备和实际测量构成。前期准备一般又包括，样品转移、电极沉积、引线键合等三个步骤。在本发明的具体实施方案中，样品转移是在样品转移通道内进行。样品的转移都是在可控地保护性气氛环境下进行的。当样品转移涉及的两个密闭箱体之间的距离较近时，可以直接将样品通过样品转移通道手动转移。当两个密闭箱体之间的距离较远时，可以借助样品载具来实现样品的转移。在本发明的具体实施方案中，在较长的样品转移通道的两端都放置一个定滑轮，借助定滑轮、线绳，可以使得样品载具在样品转移通道来回移动，进而实现样品的转移。以下通过具体的操作步骤来进一步阐述本发明的公开内容。Sample electrical transport measurement generally consists of preliminary preparation and actual measurement. Preliminary preparation generally includes three steps: sample transfer, electrode deposition, and wire bonding. In specific embodiments of the invention, sample transfer is performed within a sample transfer channel. Sample transfers are performed under a controlled protective atmosphere. When the distance between the two sealed boxes involved in sample transfer is relatively short, the sample can be transferred manually directly through the sample transfer channel. When the distance between two sealed boxes is long, the sample carrier can be used to transfer the sample. In a specific embodiment of the present invention, a fixed pulley is placed at both ends of the longer sample transfer channel. With the help of the fixed pulley and the wire, the sample carrier can be moved back and forth in the sample transfer channel, thereby realizing the transfer of the sample. The disclosure of the present invention is further explained below through specific operating steps.
步骤1：电极沉积Step 1: Electrode Deposition
首先，将在其它保护性气氛环境下的密闭箱体中处理过(比如微纳加工)的样品，经过样品样品进出管道转移到引线键合密闭箱体内，然后通过样品载具经由第一样品转移通道进一步转移至电极沉积准备密闭箱体中。随后，将样品放置在电极沉积专用载具上，并在样品表面固定具有人工设计的图形的金属掩膜版。然后，将电极沉积真空腔室内充入1个大气压的保护性气氛，打开真空闸板阀，再使用样品传送杆将上述电极沉积专用载具，放置到电极沉积样品台上。接下来，将电极沉积真空腔室抽至约2×10-6Pa的高真空，并且将加热台加热到合适的温度。最后，关闭真空系统，向电极沉积真空腔室内充入10Pa左右的高纯氩气，然后给磁控溅射靶施加合适的电压。此时，在电场与磁场的共同作用下，电极沉积真空腔室内形成氩与待沉积金属的等离子辉光。当等离子体到达样品台，会生长成按照金属掩膜版设计图形的薄膜电极。待沉积金属一般为金、银、铂等。First, the sample that has been processed in a closed box under other protective atmosphere environments (such as micro-nano processing) is transferred to the wire bonding closed box through the sample sample inlet and outlet pipe, and then passes through the first sample through the sample carrier. The transfer channel is further transferred to an airtight box for electrode deposition preparation. Subsequently, the sample is placed on a special carrier for electrode deposition, and a metal mask with an artificially designed pattern is fixed on the surface of the sample. Then, fill the electrode deposition vacuum chamber with a protective atmosphere of 1 atmosphere, open the vacuum gate valve, and then use the sample transfer rod to place the above-mentioned electrode deposition special carrier on the electrode deposition sample stage. Next, the electrode deposition vacuum chamber was evacuated to a high vacuum of approximately 2×10-6 Pa, and the heating stage was heated to a suitable temperature. Finally, close the vacuum system, fill the electrode deposition vacuum chamber with high-purity argon gas of about 10 Pa, and then apply an appropriate voltage to the magnetron sputtering target. At this time, under the combined action of the electric field and the magnetic field, a plasma glow of argon and the metal to be deposited is formed in the electrode deposition vacuum chamber. When the plasma reaches the sample stage, a thin film electrode will grow according to the design pattern of the metal mask. The metal to be deposited is generally gold, silver, platinum, etc.
步骤2：引线键合Step 2: Wire Bonding
首先，将步骤1得到的样品转移到引线键合密闭箱体中。随后，将变温测量样品载具放置到键合样品台上，使用低温导热胶将样品粘到该载具的热沉上。然后，将粘有样品的变温测量样品载具移到光学显微镜的焦点上，以确定电极的位置。因为引线键合在密闭箱体内完成，光学显微镜的目镜不方便观察，所以配备CCD相机和显示器，以确定电极的位置来辅助电极的引线键合。最后，调试好超声压焊装置的工作参数，将样品上沉积的电极与变温测量样品载具上的键合金属柱使用金属丝线键合在一起。键合金属柱部分嵌入于导热绝缘板之上，以保证其与热沉之间绝缘的同时又不会有较大的温差。First, transfer the sample obtained in step 1 into a wire bonding closed box. Subsequently, the variable temperature measurement sample carrier is placed on the bonded sample stage, and the sample is adhered to the heat sink of the carrier using low-temperature thermally conductive glue. Then, the variable temperature measurement sample holder with the sample stuck on it is moved to the focus of the optical microscope to determine the position of the electrode. Because the wire bonding is completed in a closed box, the eyepiece of the optical microscope is inconvenient for observation, so a CCD camera and monitor are equipped to determine the position of the electrode to assist in the wire bonding of the electrode. Finally, the working parameters of the ultrasonic pressure welding device are adjusted, and the electrodes deposited on the sample and the bonding metal posts on the variable temperature measurement sample carrier are bonded together using metal wires. The bonded metal pillar is partially embedded on the thermally conductive insulating plate to ensure insulation between it and the heat sink without causing a large temperature difference.
步骤3：变温电输运性质测量Step 3: Measurement of temperature-variable electrical transport properties
首先，将步骤2得到的带有样品的变温测量样品载具转移到变温电输运测量密闭箱体。然后，打开变温电输运测量真空腔室。将变温测量样品载具固定在冷头上，连接好测量电缆和微波波导电缆与天线。测量电缆和微波波导电缆经过真空航空接头与在密闭箱体外部的测量仪表相连。如此，已经可以测量常温(约300K)下的电输运性质如电阻率、电阻抗、电流-电压曲线、微波辐照下的电输运性质等。最后，关闭变温电输运测量真空腔室，并将其抽至真空，随后打开制冷机或加热器。随着样品温度的下降或上升，可以得到测量样品变温条件下的电输运性质。本发明的实施方案使用的低温制冷机为McMahon-Gifford制冷机(具体原理可参见：In Advances in Cryogenic Engineering,page 354.Springer(1960))，其配备氦气压缩机和压缩氦气管道等部件。本发明的实施方案使用的低温制冷机属于干法制冷的制冷机，即不需要经常补充液氦。本发明的实施方案使用的低温制冷机最低温度可以达到2.5K。First, transfer the variable temperature measurement sample carrier with the sample obtained in step 2 to the variable temperature electrical transport measurement closed box. Then, open the temperature-variable electrical transport measurement vacuum chamber. Fix the variable temperature measurement sample carrier on the cold head, and connect the measurement cable, microwave waveguide cable and antenna. The measuring cable and the microwave waveguide cable are connected to the measuring instrument outside the closed box through the vacuum aviation connector. In this way, it is possible to measure electrical transport properties at normal temperature (about 300K) such as resistivity, electrical impedance, current-voltage curve, electrical transport properties under microwave irradiation, etc. Finally, the temperature-variable electrical transport measurement vacuum chamber is closed and evacuated to vacuum, followed by turning on the refrigerator or heater. As the sample temperature decreases or increases, the electrical transport properties of the sample under varying temperature conditions can be measured. The cryogenic refrigerator used in the embodiment of the present invention is a McMahon-Gifford refrigerator (for specific principles, see: In Advances in Cryogenic Engineering, page 354. Springer (1960)), which is equipped with components such as a helium compressor and a compressed helium pipeline. . The low-temperature refrigerator used in the embodiment of the present invention is a dry refrigeration refrigerator, that is, it does not require frequent replenishment of liquid helium. The lowest temperature of the low-temperature refrigerator used in the embodiment of the present invention can reach 2.5K.
通过本发明的实施方案可以得到样品本征的、不同温度条件下的电输运性质。上述所有的操作都是在密闭箱体或者真空腔室内完成的，即样品从始至终都是在可控地保护性气氛环境的保护之下。在实际使用过程中，密闭箱体内会不可避免的漏入空气，使得保护性气氛气体的氧气、水汽的含量不断增加。同时，在涂抹低温胶等操作中，可能会有机气体分子进入到本发明中的密闭箱体的气体环境中。为了使保护性气氛中残余的氧气、水汽的含量一直保持在一个较低的水平，以及去除气体中少量的有机气体分子，需要配备气体净化单元。本发明的气体净化单元主要由气体净化箱体、风机、氧水净化柱、有机分子净化柱构成。气体净化单元与密闭箱体之间，通过气体循环通道相连，形成闭环。在风机的作用下，保护性气体在闭环内循环。当气体循环至氧水净化柱处时，其通过内部的铜触媒和分子筛会分别吸附保护性气氛气体中残余的氧气、水汽，来保证氧气、水汽含量都符合小于0.1ppm的标准。氧气、水汽含量由氧气含量探头与水汽含量探头读取。当气体循环至有机分子净化柱时，其通过内部的活性炭会吸附保护性气氛气体中的有机气体分子。Through the embodiments of the present invention, the intrinsic electrical transport properties of the sample under different temperature conditions can be obtained. All the above operations are completed in a closed box or vacuum chamber, that is, the sample is protected by a controllable protective atmosphere environment from beginning to end. During actual use, air will inevitably leak into the sealed box, causing the oxygen and water vapor content of the protective atmosphere gas to continue to increase. At the same time, during operations such as applying low-temperature glue, organic gas molecules may enter the gas environment of the sealed box in the present invention. In order to keep the residual oxygen and water vapor content in the protective atmosphere at a low level and to remove a small amount of organic gas molecules in the gas, a gas purification unit is required. The gas purification unit of the present invention mainly consists of a gas purification box, a fan, an oxygen water purification column, and an organic molecule purification column. The gas purification unit and the closed box are connected through a gas circulation channel to form a closed loop. Under the action of the fan, the protective gas circulates in the closed loop. When the gas circulates to the oxygen and water purification column, it will absorb the residual oxygen and water vapor in the protective atmosphere gas through the internal copper catalyst and molecular sieve respectively to ensure that the oxygen and water vapor content meet the standard of less than 0.1ppm. The oxygen and water vapor content are read by the oxygen content probe and water vapor content probe. When the gas circulates to the organic molecule purification column, it passes through the internal activated carbon to adsorb the organic gas molecules in the protective atmosphere gas.
气体净化单元的操作主要包括循环、洗气、氧水净化柱材料再生、有机分子净化柱材料更换等。循环操作为：打开风机，并且打开两个净化柱，使保护性气氛在净化系统和密闭箱体内循环。洗气操作为：关闭风机，并且关闭两个净化柱，使用干净的保护性气氛置换密闭箱体内部被污染的保护性气氛。氧水净化柱材料再生操作为：关闭风机，并且关闭氧水净化柱，使用还原性气体如氢气与氩气的混合气，还原氧水净化柱内已经吸附了足够的氧气、水汽的净化材料(铜触媒、分子筛)。有机分子净化柱材料更换，则为对有机分子净化柱中的活性炭进行定期更换。The operations of the gas purification unit mainly include circulation, gas scrubbing, oxygen water purification column material regeneration, organic molecule purification column material replacement, etc. The cycle operation is: turn on the fan and open the two purification columns to circulate the protective atmosphere in the purification system and the closed box. The gas scrubbing operation is as follows: turn off the fan, close the two purification columns, and replace the contaminated protective atmosphere inside the closed box with clean protective atmosphere. The oxygen water purification column material regeneration operation is as follows: turn off the fan and the oxygen water purification column, use reducing gas such as a mixture of hydrogen and argon, and reduce the purification material that has absorbed enough oxygen and water vapor in the oxygen water purification column ( Copper catalyst, molecular sieve). The replacement of the organic molecule purification column material means regular replacement of the activated carbon in the organic molecule purification column.
最后所应说明的是，以上实施例仅用以说明本发明的技术方案而非限制。尽管参照实施例对本发明进行了详细说明，本领域的普通技术人员应当理解，对本发明的技术方案进行修改或者等同替换，都不脱离本发明技术方案的精神和范围，其均应涵盖在本发明的权利要求范围当中。Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not limiting. Although the present invention has been described in detail with reference to the embodiments, those of ordinary skill in the art will understand that modifications or equivalent substitutions may be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and they shall all be covered by the scope of the present invention. within the scope of the claims.
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| CN202110208277.3ACN114965866B (en) | 2021-02-24 | 2021-02-24 | System for measuring physical properties of a material |
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| CN202110208277.3AActiveCN114965866B (en) | 2021-02-24 | 2021-02-24 | System for measuring physical properties of a material |
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|---|---|
| CN (1) | CN114965866B (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2837831Y (en)* | 2005-11-11 | 2006-11-15 | 中国科学院物理研究所 | Ultra-high vacuum in-situ growth, characterization and test system |
| CN101243543A (en)* | 2005-07-13 | 2008-08-13 | 富士胶片迪麦提克斯公司 | Fluid deposition cluster tool |
| CN101921999A (en)* | 2009-06-12 | 2010-12-22 | 甘志银 | Multiple-reaction cavity metallorganic chemical vapor deposition equipment |
| CN102220565A (en)* | 2011-06-13 | 2011-10-19 | 南开大学 | Chemical vapor deposition equipment used for studying light trapping structure of silicon thin-film cell |
| CN104190202A (en)* | 2014-09-05 | 2014-12-10 | 安徽亚格盛电子新材料有限公司 | MO source dedicated circulation inert gas glove box circulation purification system |
| CN104316385A (en)* | 2014-10-13 | 2015-01-28 | 赵烨梁 | Device for preparing mono-molecule sample and electric spraying method of device |
| CN104513951A (en)* | 2014-12-25 | 2015-04-15 | 天津大学 | Reactive ballistic deposition equipment and operating method thereof |
| CN108288816A (en)* | 2018-01-12 | 2018-07-17 | 长春理工大学 | A kind of semiconductor laser material passivating method |
| CN108396294A (en)* | 2018-01-26 | 2018-08-14 | 中国科学院物理研究所 | A kind of thin film deposition system and control method |
| CN109797373A (en)* | 2019-03-04 | 2019-05-24 | 苏州华杨赛斯真空设备有限公司 | Satellite-type vacuum film deposition system |
| CN112222425A (en)* | 2020-08-31 | 2021-01-15 | 西安交通大学 | Method and system for rapidly reducing water oxygen content of forming chamber in additive manufacturing process |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101243543A (en)* | 2005-07-13 | 2008-08-13 | 富士胶片迪麦提克斯公司 | Fluid deposition cluster tool |
| CN2837831Y (en)* | 2005-11-11 | 2006-11-15 | 中国科学院物理研究所 | Ultra-high vacuum in-situ growth, characterization and test system |
| CN101921999A (en)* | 2009-06-12 | 2010-12-22 | 甘志银 | Multiple-reaction cavity metallorganic chemical vapor deposition equipment |
| CN102220565A (en)* | 2011-06-13 | 2011-10-19 | 南开大学 | Chemical vapor deposition equipment used for studying light trapping structure of silicon thin-film cell |
| CN104190202A (en)* | 2014-09-05 | 2014-12-10 | 安徽亚格盛电子新材料有限公司 | MO source dedicated circulation inert gas glove box circulation purification system |
| CN104316385A (en)* | 2014-10-13 | 2015-01-28 | 赵烨梁 | Device for preparing mono-molecule sample and electric spraying method of device |
| CN104513951A (en)* | 2014-12-25 | 2015-04-15 | 天津大学 | Reactive ballistic deposition equipment and operating method thereof |
| CN108288816A (en)* | 2018-01-12 | 2018-07-17 | 长春理工大学 | A kind of semiconductor laser material passivating method |
| CN108396294A (en)* | 2018-01-26 | 2018-08-14 | 中国科学院物理研究所 | A kind of thin film deposition system and control method |
| CN109797373A (en)* | 2019-03-04 | 2019-05-24 | 苏州华杨赛斯真空设备有限公司 | Satellite-type vacuum film deposition system |
| CN112222425A (en)* | 2020-08-31 | 2021-01-15 | 西安交通大学 | Method and system for rapidly reducing water oxygen content of forming chamber in additive manufacturing process |
| Title |
|---|
| R. Wang et. al.Out-of-plane easy-axis in thin films of diluted magnetic semiconductor Ba1−xKx(Zn1−yMny)2As2.《AIP Advances》.2017,第1-5页.* |
| Publication number | Publication date |
|---|---|
| CN114965866A (en) | 2022-08-30 |
| Publication | Publication Date | Title |
|---|---|---|
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