CN114690400A - Vibrating mirror driven by electrostatic force - Google Patents

Abstract

The present application relates to the field of projectors, and more particularly, to a component for improving resolution in a projector, which includes: a base; the optical path deviation part is arranged on the base through a rotating shaft mechanism; the drive division, the drive division install in the base with on the light path skew portion, drive through electrostatic force drive mode light path skew portion is followed the pivot swing, for solving prior art's in the background art defect, this application provides the mirror that shakes of electrostatic force drive mode, can realize better that the heat dissipation optimizes, sensitive, stable, lags behind technical effect such as reduction, economic nature.

Description

Vibrating mirror driven by electrostatic force

Technical Field

The present invention relates to the field of projectors, and more particularly, to a component for improving resolution in a projector.

Background

In recent years, various image display technologies have been widely used in daily life.

In an image display device, such as a projector, an optical path adjusting mechanism may be disposed to change the traveling optical path of light in the device, so as to provide various effects, such as improving the imaging resolution and improving the image quality.

However, as in the patent application No. CN111338044A, an optical path adjusting mechanism is known, which uses the principle of magnetic induction to drive a lens, and uses the principle of refraction or reflection to shift a light beam, thereby completing the superposition of photons, improving the imaging resolution, improving the picture quality, and the like.

The magnetic induction coil part is driven by current, and changes the magnetic polarity of related parts by exchanging the direction of the current so as to complete the switching of the forward direction and the reverse direction of the lens, finally obtain the action of ' repeatedly swinging ', and change one light beam into two or four light beams ', and then the light beams have overlapped areas so as to complete the superposition of photons.

However, the switching speed of the current direction has an upper limit, for example, the same speed is 60Hz, the frame of thetraditional galvanometer 1 can be 16.18ms, wherein 1/4 time is in the switching state, and the current fastest speed can only enable the lens to complete the biaxial vibration, for example, as in the patent with the application number of CN111338044A, the pixel is twice or four times of the original pixel.

Meanwhile, the coil of the magnetic induction framework works for a long time to cause a serious heating problem, the coil inductance attribute- -inductive reactance, and the driving waveform is alternating current, so that the generated electromagnetic force has poor stability and is difficult to control, and the reaction of a movable component has certain lag;

meanwhile, the magnetic induction structure has higher cost.

Disclosure of Invention

In the research and development process of the present company, in order to achieve the above object, a galvanometer driven by electrostatic force is manufactured, which includes:

a base;

the optical path deviation part is arranged on the base through a rotating shaft mechanism;

and the driving part is arranged on the base and the optical path deviation part and drives the optical path deviation part to swing along the rotating shaft in an electrostatic force driving mode.

The framework of electrostatic force replaces the magnetic induction framework in the prior art, the electrode plate is generally used for electrostatic driving, is in full contact with the base, has good heat dissipation performance, and can well solve the problem of heat dissipation in the prior art compared with the prior art.

The electrode plate is low in cost and can be easily integrated in various mechanism parts.

However, the electrode plate in the above example is only one way of realizing the electrostatic force, and other ways of realizing the driving of the electrostatic force in the field of generating the electrostatic force, and the electrostatic force is used on the galvanometer, the above problem can be solved well.

In a possible implementation manner, the driving portion is composed of a plurality of electrode plates to which a voltage can be applied, the electrode plates are mounted on the base and the optical path deviation portion, the base and the electrode plates on the optical path deviation portion interact to generate an electrostatic force, and the electrode plate scheme is used as a more preferable scheme of an electrostatic force framework, so that technical effects of heat dissipation optimization, sensitivity, stability, hysteresis reduction, economy and the like can be better achieved.

In one possible implementation form of the method,

the electrode plates capable of being applied with voltage comprise a left electrode part and a right electrode part, the left electrode part and the right electrode part are matched with each other to generate electrostatic force combination, the light path offset part swings along the rotating shaft, the swing optimization mode of the light path offset part is two sides, the electrostatic force is small, if the swing optimization mode is only one-side control, the voltage required by the single-side electrostatic force is large, the real-time operation of a driving mechanism, a power supply and even a heat dissipation scheme is not facilitated, the scheme is that the left electrode part and the right electrode part are matched with each other to generate electrostatic force combination, the overall scheme can be optimized, the design space of the driving mechanism, the power supply and even the heat dissipation scheme is large, and the overall scheme has more optimization possibility.

In one possible implementation, the left and right electrode portions each include:

the fixed electrode is fixedly arranged on the base;

a movable electrode fixedly arranged at the edge of the optical path deviation part;

interact with movable electrode and fixed electrode belonging to the said left electrode part, produce the left side electrostatic force;

or interact with the movable electrode and the fixed electrode which belong to the right electrode part to generate a right electrostatic force.

The movable electrode is arranged at the edge of the light path deviation part, the light path deviation part can be driven in a most labor-saving mode, the whole scheme of electrostatic force is better, meanwhile, the electrode plate is divided into the fixed electrode and the movable electrode, constant voltage can be applied to the movable electrode in the actual floor scheme, the fixed electrode is subjected to voltage transformation, control is achieved, and the scheme is more optimal and simpler.

In a possible implementation manner, the optical path offset part is acted by the left side electrostatic force and the right side electrostatic force simultaneously in the swinging process towards one direction, and the scheme can further split the electrostatic force, so that the requirement on the electrostatic force at the output position of a single electrostatic force is reduced, the area requirement on an electrode plate is smaller, and the space utilization is further optimized.

In one possible implementation, the fixed electrode includes:

fixing the upper electrode;

fixing the lower electrode;

the fixed upper electrode and the fixed lower electrode are both arranged on the base, and are arranged up and down in space together with the fixed upper electrode and the fixed lower electrode belonging to the left electrode part, and a gap is formed between the fixed upper electrode and the fixed lower electrode, and the movable electrode moves up and down in the gap;

the scheme can further split the electrostatic force, so that the requirement on the electrostatic force at the output position of the single electrostatic force is reduced, the requirement on the area of the electrode plate is smaller, further optimization on space utilization is facilitated, and diversification of the control scheme is facilitated.

In one possible implementation, the moving electrode includes:

moving the upper electrode;

moving the lower electrode;

interacting with a fixed upper electrode and a movable upper electrode belonging to said left electrode portion, with a movable lower electrode and a fixed lower electrode belonging to said left electrode portion, with a fixed upper electrode and a movable upper electrode belonging to said right electrode portion, and with a movable lower electrode and a fixed lower electrode belonging to said right electrode portion;

the scheme can further split the electrostatic force, so that the requirement on the electrostatic force at the output position of the single electrostatic force is reduced, the requirement on the area of the electrode plate is smaller, further optimization on space utilization is facilitated, and diversification of the control scheme is facilitated.

In a possible implementation manner, all or part of the surfaces of the electrode plates are provided with insulating layers for preventing the adjacent electrode plates from contacting and short-circuiting, and the scheme can improve the safety and the stability of the mechanism.

In a possible implementation manner, the lower surface of the fixed upper electrode and the upper surface of the fixed lower electrode are both provided with insulating layers, or the surface of the movable electrode is provided with an insulating layer, and the scheme can improve the safety and stability of the mechanism.

In a possible implementation manner, the rotating shaft mechanism is a bearing mechanism, which is a scheme of the rotating shaft.

In a possible implementation manner, the rotating shaft mechanism is a spring piece rotating shaft mechanism, which is a scheme of a rotating shaft.

In a possible implementation, the insulating layer is a coating or plating layer, defining the processing way of the layered structure.

In one possible implementation, the insulating layer material includes silicon nitride, an insulating layer material scheme.

Drawings

The present application will now be described by way of example only and with reference to the accompanying drawings in which:

FIG. 1 is an exploded view of an embodiment of the present application;

FIG. 2 is a schematic diagram of a light path shifting portion according to an embodiment of the present disclosure;

FIG. 3 is a schematic view of the present application after assembly;

wherein, the marks are sequentially as follows: 1-base, 2-moving electrode, 3-fixed lower electrode, 31-moving upper electrode, 32-moving lower electrode, 4-fixed upper electrode, 5-bearing seat, 6-light path deviation part, 7-bearing mechanism and 9-pressing plate.

Detailed Description

It is to be understood that the present invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, the size and relative sizes of layers and regions may be exaggerated for clarity. Like reference numerals refer to like elements throughout.

It will be understood that when an element or layer is referred to as being "on" …, "adjacent to …," connected to, "or" coupled to "other elements or layers, it can be directly on, adjacent to, connected to, or coupled to the other elements or layers, or intervening elements or layers may be present. In contrast, when an element is referred to as being "directly on …", "directly adjacent to …", "directly connected to", or "directly coupled to" other elements or layers, there are no intervening elements or layers present. It will be understood that, although the terms first, second, third, etc. may be used to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the present invention.

Spatial relationship terms such as "under …", "below …", "below …", "above …", "above", and the like, may be used herein for ease of description to describe the relationship of one element or feature to another element or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, then elements or features described as "below" or "beneath" other elements or features would then be oriented "above" the other elements or features. Thus, the exemplary terms "below …" and "below …" can include both an upper and a lower orientation. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatial descriptors used herein interpreted accordingly.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. As used herein, the term "and/or" includes any and all combinations of the associated listed items.

Referring to fig. 1, 2 and 3, fig. 1 is an exploded view of a galvanometer, and the present embodiment discloses a galvanometer driven by electrostatic force, which includes:

abase 1;

the opticalpath deviation part 6 is arranged on thebase 1 through a rotating shaft mechanism, wherein the opticalpath deviation part 6 is a lens, can be a lens for reflection or a lens for refraction, and is adjusted according to specific product requirements;

and the driving part is arranged on thebase 1 and the opticalpath deviation part 6, and drives the opticalpath deviation part 6 to swing along the rotating shaft in an electrostatic force driving mode.

The framework of electrostatic force replaces the magnetic induction framework in the prior art, the electrode plate is generally used for electrostatic driving, is fully contacted with thebase 1, has good heat dissipation performance, and can well solve the problem of heat dissipation in the prior art compared with the prior art.

The electrode plate is low in cost and can be easily integrated in various mechanism parts.

However, the electrode plate in the above example is only one way of realizing the electrostatic force, and other ways of realizing the driving of the electrostatic force in the field of generating the electrostatic force, and the electrostatic force is used on the galvanometer, the above problem can be solved well.

In a possible implementation manner, the driving portion is composed of a plurality of electrode plates to which a voltage can be applied, the electrode plates are mounted on both thebase 1 and the opticalpath deviation portion 6, and the electrode plates on thebase 1 and the opticalpath deviation portion 6 interact to generate an electrostatic force, and the electrode plate scheme is used as a more preferable scheme of an electrostatic force architecture, so that technical effects of optimized heat dissipation, sensitivity, stability, reduced hysteresis, economy and the like can be better achieved.

In one possible implementation form of the method,

the plurality of electrode plates capable of being applied with voltage comprise a left electrode part and a right electrode part, the left electrode part and the right electrode part are matched with each other to generate electrostatic force combination, the light path offsetpart 6 swings along the rotating shaft, the swing optimization mode of the light path offsetpart 6 is two sides, the electrostatic force is small, if the swing optimization mode is only one-side control, the voltage required by the electrostatic force provided on one side is large, the real-time situation of a driving mechanism, a power supply and a heat dissipation scheme is not facilitated, the scheme is that the left electrode part and the right electrode part are matched with each other to generate electrostatic force combination, the whole scheme can be optimized, the design space of the driving mechanism, the power supply and the heat dissipation scheme is large, and the whole optimization possibility is high;

as shown in fig. 1, the left electrode parts refer to themarks 2, 3 and 4 at the upper left corner of the figure, and the right electrode parts refer to themarks 2, 3 and 4 at the lower right corner of the figure, but the "left" and "right" herein do not specifically refer to the left or right, and if fig. 1 is rotated by 180 °, the left side now becomes the rotated right side, so the left and right herein are only one of the examples, and do not limit the specific directions, and are intended to distinguish the orientations of the two sides of the lens.

In one possible implementation, the left and right electrode portions each include:

a fixed electrode fixedly arranged on thebase 1;

amovable electrode 2 fixedly disposed at an edge of the optical path shiftportion 6;

interacts with themovable electrode 2 and the fixed electrode belonging to the left electrode part to generate a left electrostatic force;

or interact with the movable electrode and the fixed electrode which belong to the right electrode part to generate a right electrostatic force.

Themovable electrode 2 is arranged at the edge of the lightpath deviation part 6, the lightpath deviation part 6 can be driven in a most labor-saving mode, the whole scheme of electrostatic force is better, meanwhile, the electrode plate is divided into the fixed electrode and themovable electrode 2, constant voltage can be used for themovable electrode 2 in the actual floor scheme, the fixed electrode is transformed, control is achieved, and the scheme is better and simpler.

In a possible implementation manner, the opticalpath deflecting unit 6 is acted by the left side electrostatic force and the right side electrostatic force simultaneously during the swinging process towards one direction, and this scheme can further split the electrostatic force, so that the requirement of the electrostatic force at the output position of a single electrostatic force is reduced, the requirement of the area of the electrode plate is smaller, and further optimization in space utilization is facilitated.

In one possible implementation, the fixed electrode includes:

a fixed upper electrode 4;

a fixedlower electrode 3;

the fixed upper electrode 4 and the fixedlower electrode 3 are both arranged on thebase 1, and are arranged up and down in space with the fixed upper electrode 4 and the fixedlower electrode 3 belonging to the left electrode part, and a gap is formed between the fixed upper electrode 4 and the fixedlower electrode 3, and themovable electrode 2 moves up and down in the gap;

the scheme can further split the electrostatic force, so that the requirement on the electrostatic force at the output position of the single electrostatic force is reduced, the requirement on the area of the electrode plate is smaller, further optimization on space utilization is facilitated, and diversification of the control scheme is facilitated.

In a possible implementation, as shown in fig. 2, themobile electrode 2 comprises:

theupper electrode 31 is moved;

moving the lower electrode 21;

interacting with the fixed upper electrode 4 and the movingupper electrode 31 belonging to said left electrode portion, with the moving lower electrode 21 and the fixedlower electrode 3 belonging to said left electrode portion, with the fixed upper electrode 4 and the movingupper electrode 31 belonging to said right electrode portion, and with the moving lower electrode 21 and the fixedlower electrode 3 belonging to said right electrode portion;

for example, when performing a deflection in one direction, the fixed upper electrode 4 and the movableupper electrode 31 belonging to the left electrode portion interact with each other, and at this time, the movable lower electrode 21 and the fixedlower electrode 3 belonging to the right electrode portion interact synchronously, and these two actions are synchronized, so that the flipping of the lens is not performed by either the left electrode portion or the right electrode portion alone;

while a constant low voltage is applied to the movingupper electrode 31 and the moving lower electrode 21, and a high voltage is applied to the fixed upper electrode 4 and the fixedlower electrode 3 as driving electrodes, the principle is as follows:

the specific formula for generating the electrostatic force F is:

in the formula: v is a driving voltage; a is the area of the electrode; epsilon₀Is the dielectric constant of air; g is the gap height after the two electrode plates move; t is the thickness of the dielectric layer; epsilon_rIs the dielectric constant of the medium;

the area of intersection of the movingupper electrode 31 and the fixedlower electrode 3 on the projection plane is A, g is a real-time variable value, and for t and ε_rHere the thickness and dielectric constant of the insulating layer described below, and for V, assuming a constant low voltage of-1 volt applied to the movingupper electrode 31 and a high voltage of +2 volts applied to the fixedlower electrode 3, then V is 3 volts here.

The scheme can further split the electrostatic force, so that the requirement on the electrostatic force at the output position of a single electrostatic force is reduced, the requirement on the area of the electrode plate is smaller, further optimization on space utilization is facilitated, and diversification of the rich control scheme is facilitated;

in this embodiment, the fixed upper electrode 4, the fixedlower electrode 3, the movableupper electrode 31, and the movable lower electrode 21, which are the same as the left electrode part, are all plate-shaped structures and are arranged in parallel to each other.

In a possible implementation manner, all or part of the surfaces of the electrode plates are provided with insulating layers for preventing the adjacent electrode plates from contacting and short-circuiting, and the scheme can improve the safety and the stability of the mechanism.

And meanwhile, the insulating layer also has good wear-resistant property, the insulating layer is contacted with the vibrating mirror at high frequency in the using process of the vibrating mirror, if the insulating layer does not have good wear-resistant property, the insulating layer is easy to damage after being used for a period of time to cause possible short-circuit accidents, the insulating layer is a coating or a plating layer, and the insulating layer material comprises silicon nitride.

In a possible implementation manner, the lower surface of the fixed upper electrode 4 and the upper surface of the fixedlower electrode 3 are both provided with an insulating layer, or the surface of themovable electrode 2 is provided with an insulating layer, which can improve the safety and stability of the mechanism, and it is preferable that what kind of manner of providing an insulating layer is not discussed in this solution.

In a possible implementation manner, the rotating shaft mechanism is abearing mechanism 7, and in a rotating shaft scheme, as shown in fig. 1-3, two bearingmechanisms 7 coaxial with the central line of the lens are arranged on two sides of the lens, abearing seat 5 matched with thebearing mechanism 7 is arranged on thebase 1, and the bearingmechanisms 7 are fixed in position through apressing plate 9 after being matched with thebearing seat 5.

In a possible implementation manner, the rotating shaft mechanism is a spring plate rotating shaft mechanism, and a scheme of the rotating shaft is not illustrated in the application.

The above description is only for the specific embodiments of the present application, but the scope of the present application is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present application, and shall be covered by the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims (13)

1. An electrostatic force driven galvanometer, comprising:

a base;

the optical path deviation part is arranged on the base through a rotating shaft mechanism;

it is characterized by also comprising:

and the driving part is arranged on the base and the optical path deviation part and drives the optical path deviation part to swing along the rotating shaft in an electrostatic force driving mode.

2. The electrostatic force driven mode galvanometer of claim 1,

the driving part is composed of a plurality of electrode plates capable of being applied with voltage, the electrode plates are arranged on the base and the light path deviation part, and electrostatic force is generated by interaction of the electrode plates on the base and the light path deviation part.

3. The electrostatic force driven mode galvanometer of claim 2,

the plurality of electrode plates capable of being applied with voltage comprise a left electrode part and a right electrode part, and the left electrode part and the right electrode part are matched with each other to generate electrostatic force combination so that the light path offset part swings along the rotating shaft.

4. The electrostatic force driven galvanometer of claim 3, wherein the left electrode portion and the right electrode portion each comprise:

the fixed electrode is fixedly arranged on the base;

a movable electrode fixedly arranged at the edge of the optical path deviation part;

interacting with the movable electrode and the fixed electrode belonging to the left electrode part to generate a left electrostatic force;

or interact with the movable electrode and the fixed electrode which belong to the right electrode part to generate a right electrostatic force.

5. The electrostatic force driven galvanometer of claim 4, wherein the optical path shifter is configured to be simultaneously acted on by the left side electrostatic force and the right side electrostatic force during the swinging in one direction.

6. The electrostatic force driven mode galvanometer of claim 4, wherein the fixed electrode comprises:

fixing the upper electrode;

fixing the lower electrode;

the fixed upper electrode and the fixed lower electrode are both arranged on the base, and are arranged up and down in space together with the fixed upper electrode and the fixed lower electrode belonging to the left electrode part, and gaps are arranged between the fixed upper electrode and the fixed lower electrode, and the movable electrode moves up and down in the gaps.

7. The electrostatic force driven mode galvanometer of claim 6, wherein the moving electrode comprises:

moving the upper electrode;

moving the lower electrode;

the movable electrode is arranged in a fixed position on the left electrode part, the movable electrode is arranged in a movable position on the right electrode part, the movable electrode is arranged in a movable position on the left electrode part, the movable electrode is arranged in a movable position on the right electrode part, and the movable electrode is arranged in a movable position on the left electrode part.

8. The electrostatic force driven mode galvanometer of claim 2, wherein all or a portion of the surfaces of said electrode plates are provided with an insulating layer for preventing contact short-circuiting of adjacent electrode plates.

9. The electrostatic force driven mode galvanometer of claim 6, wherein a lower surface of the fixed upper electrode and an upper surface of the fixed lower electrode are each provided with an insulating layer, or a surface of the moving electrode is provided with an insulating layer.

10. The electrostatic force driven mode galvanometer of claim 1, wherein the spindle mechanism is a bearing mechanism.

11. The electrostatic force driven mode galvanometer of claim 1, wherein the spindle mechanism is a leaf spring spindle mechanism.

12. The electrostatic force driven galvanometer of any one of claims 8 or 9, wherein the insulating layer is a coating or plating.

13. The electrostatic force actuated mode galvanometer of claim 12, wherein the insulating layer material comprises silicon nitride.

Images