CN114689952A - Distance compensation method for electrostatic voltage detection - Google Patents
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Abstract
Description
Translated fromChinese技术领域technical field
本发明属于静电检测领域，尤其涉及一种用于静电压检测的距离补偿方法。The invention belongs to the field of electrostatic detection, and in particular relates to a distance compensation method for electrostatic voltage detection.
背景技术Background technique
目前，在电子、光电、半导体行业，已有相当规模的静电传感器安装应用在生产线上。At present, in the electronics, optoelectronics, and semiconductor industries, a considerable scale of electrostatic sensors has been installed and applied on the production line.
这些静电传感器均为非接触式检测，在检测前须设置检测距离(即检测窗口或检测面到带电物体表面的距离，等同于安装距离)；检测距离有固定为单一固定值检测距离，也有设定为多种固定值检测距离。These electrostatic sensors are all non-contact detection, and the detection distance must be set before detection (that is, the distance from the detection window or detection surface to the surface of the charged object, which is equivalent to the installation distance); the detection distance is fixed as a single fixed value detection distance, or set The detection distance is set to various fixed values.
然而，由于现场工艺操作环境的复杂性，如在流水线上当被测物体的大小变化时，会导致检测距离发生变化，此时静电传感器采用单一的检测距离甚至多种检测距离均不能满足实际需要。However, due to the complexity of the on-site process operation environment, for example, when the size of the measured object changes on the assembly line, the detection distance will change. At this time, the electrostatic sensor adopts a single detection distance or even a variety of detection distances.
例如，如图1中所示，在移动方向为V的生产流水线A上的被测物体B1、B2、 B3，由于其高度(厚度)不同，使得固定安装在流水线上方的静电传感器C的检测窗口或检测面到带电物体表面的检测距离D1、D2、D3也不相同。For example, as shown in FIG. 1, the objects B1, B2, B3 to be measured on the production line A whose moving direction is V have different heights (thicknesses), so that the detection window of the electrostatic sensor C installed above the line is fixed. Or the detection distances D1, D2, and D3 from the detection surface to the surface of the charged object are also different.
从静电检测原理上讲，非接触式静电压检测装置针对物体表面静电的检测，其本质上是对物体表面静电荷所产生的合成静电场的检测。From the principle of electrostatic detection, the non-contact electrostatic voltage detection device detects the static electricity on the surface of the object, which is essentially the detection of the synthetic electrostatic field generated by the electrostatic charge on the surface of the object.
静电场随着其传播距离的增大，其对外作用急剧变小，故针对静电场的检测就须要确定检测距离，如此才能准确、全面、客观的描述其性质。As the propagation distance of the electrostatic field increases, its external effect decreases sharply, so the detection of the electrostatic field needs to determine the detection distance, so that its properties can be accurately, comprehensively and objectively described.
随着检测距离的确定，其检测到的静电场(V/m)转换为了静电压值。即，可在每一不同检测距离下，通过设置一个校正操作及数据处理程序/算法，带入相关的参数，即可确定地得到该检测距离下的静电压值。其算法公式为：As the detection distance is determined, the detected electrostatic field (V/m) is converted into an electrostatic voltage value. That is, at each different detection distance, by setting a calibration operation and a data processing program/algorithm, and bringing in relevant parameters, the static voltage value at the detection distance can be obtained with certainty. Its algorithm formula is:
V＝Kn×X (公式1)V=Kn ×X (Formula 1)
其中，X为采样处理后的外界静电压信号，Kn为不同检测距离下的换算系数， V为检测输出的静电压值。Kn值是通过标准检测平板及标准直流高压源在不同检测距离下进行测试校准得到的，其在不同检测距离下各自为一固定值，故上述公式为线性关系，不适用于检测距离不断变化的情况。Among them, X is the external static voltage signal after sampling processing, Kn is the conversion coefficient under different detection distances, and V is the static voltage value of the detection output. The Kn value is obtained by testing and calibrating a standard detection plate and a standard DC high-voltage source at different detection distances. They are each a fixed value at different detection distances. Therefore, the above formula is a linear relationship, which is not suitable for continuously changing detection distances. Case.
由于现有的非接触式静电压检测技术只能采用有限个检测距离设置，故存在如下缺陷：Since the existing non-contact electrostatic voltage detection technology can only use a limited number of detection distance settings, it has the following defects:
1)从检测准确性上来说，只适用于设定好的固有检测距离下的检测，使用条件较严格，限制其应用范围。1) In terms of detection accuracy, it is only suitable for detection under the set inherent detection distance, and the use conditions are strict, which limits its application range.
2)静电检测装置无附加距离检测功能或未配置有距离检测装置，无法为检测程序/算法提供检测距离修正功能。2) The electrostatic detection device has no additional distance detection function or is not equipped with a distance detection device, and cannot provide a detection distance correction function for the detection program/algorithm.
3)在非标准设定的检测距离所检测到的数据是失真的，会成为产品静电安全管控的漏洞，威胁产品静电安全。3) The data detected at the non-standard setting detection distance is distorted, which will become a loophole in the product electrostatic safety control and threaten the product electrostatic safety.
在实际工作中，当静电传感器检测窗口与物体被测平面的垂直距离为任意非固定设置的检测距离时，如何解决静电传感器检测值的失真问题，是实际工作中急待解决的实际问题。In practical work, when the vertical distance between the detection window of the electrostatic sensor and the measured plane of the object is any non-fixed detection distance, how to solve the problem of distortion of the detection value of the electrostatic sensor is an urgent practical problem to be solved in practical work.
发明内容SUMMARY OF THE INVENTION
本发明所要解决的技术问题是提供一种用于静电压检测的距离补偿方法。当静电传感器检测窗口与物体被测平面的垂直距离为任意非固定设置的检测距离时，可依据实际检测距离值对检测接收到的信号进行修正补偿，进而得到当前检测距离下物体表面准确的静电压值。The technical problem to be solved by the present invention is to provide a distance compensation method for static voltage detection. When the vertical distance between the detection window of the electrostatic sensor and the measured plane of the object is any non-fixed detection distance, the received signal can be corrected and compensated according to the actual detection distance value, and then the accurate static state of the object surface under the current detection distance can be obtained. Voltage value.
本发明的技术方案是：提供一种用于静电压检测的距离补偿方法，其特征是：The technical scheme of the present invention is to provide a distance compensation method for static voltage detection, characterized in that:
1)搭建一个任意测试距离静电压测试校正装置；1) Build a static voltage test and correction device for any test distance;
2)测试待测静电传感器在不同标准电压下多个检测距离的静电信号值；2) Test the electrostatic signal values of multiple detection distances of the electrostatic sensor to be tested under different standard voltages;
3)测试待测静电传感器在不同校正距离下多个检测距离的静电信号值；3) Test the electrostatic signal values of multiple detection distances of the electrostatic sensor to be tested under different calibration distances;
4)依据标准电压值和静电传感器的检测值，推导出换算系数；4) According to the standard voltage value and the detection value of the electrostatic sensor, deduce the conversion factor;
5)拟合换算系数与测试距离的数据关系；5) Fitting the data relationship between the conversion factor and the test distance;
6)得到换算系数数学模型；6) Obtain the mathematical model of the conversion coefficient;
7)将换算系数数学模型导入检测输出静电压值的算法公式；7) Import the mathematical model of the conversion coefficient into the algorithm formula for detecting the output static voltage value;
8)得到含有距离补偿的静电压值算法公式；8) Obtain the static voltage value algorithm formula with distance compensation;
9)采用含有距离补偿的检测输出静电压值的算法公式，对静电传感器的输出值进行数据处理，最终得到含有距离补偿的静电检测值。9) Using the algorithm formula of the detection output static voltage value with distance compensation, data processing is performed on the output value of the electrostatic sensor, and finally the electrostatic detection value with distance compensation is obtained.
具体的，所述的任意测试距离静电压测试校正装置，包括静电传感器和静电传感器安装装置，在静电传感器上或其安装装置上，设置一个距离检测装置；所述距离检测装置的检测面与静电传感器检测窗口所在平面之间平行设置；距离检测装置与静电传感器或其安装装置固定安装在一起，随静电传感器一起同步作上、下移动。Specifically, the static voltage test and correction device for any test distance includes an electrostatic sensor and an electrostatic sensor installation device. A distance detection device is installed on the electrostatic sensor or its installation device; the detection surface of the distance detection device is connected to the electrostatic sensor. The planes where the sensor detection windows are located are arranged in parallel; the distance detection device is fixedly installed with the electrostatic sensor or its installation device, and moves up and down synchronously with the electrostatic sensor.
进一步的，所述的含有距离补偿的静电压值算法公式如下：Further, the algorithm formula of the static voltage value with distance compensation is as follows:
其中，V为检测输出的静电压值，X为采样处理后的外界静电压信号，An， Bn为e指数函数的系数，d为检测距离、测试距离或校正距离，n为自然数。Among them, V is the static voltage value of the detection output, X is the external static voltage signal after sampling processing, An and Bn are the coefficients of the exponential function of e, d is the detection distance, test distance or correction distance, andn is a natural number.
具体的，静电传感器进行任意距离检测的流程为：读取拨码开关所设定的校正距离，并接收距离传感器发送来的检测距离信号；静电传感器接收物体表面静电荷产生的电场信号，并对其进行处理、采样；随后对采样数据进行分析、运算，得到采样处理后的外界静电压信号值X，并根据读取到的校正距离设定值调用与其对应的含有距离补偿的静电压值算法公式，再将读取到的检测距离值带入含有距离补偿的静电压值算法公式，最终得到静电检测值。Specifically, the process of detecting any distance by the electrostatic sensor is as follows: reading the correction distance set by the DIP switch, and receiving the detection distance signal sent by the distance sensor; It performs processing and sampling; then analyzes and calculates the sampled data, obtains the external static voltage signal value X after sampling processing, and calls the corresponding static voltage value algorithm with distance compensation according to the read correction distance setting value. formula, and then bring the read detection distance value into the electrostatic voltage value algorithm formula with distance compensation, and finally obtain the electrostatic detection value.
本发明还提供了一种按照上述距离补偿方法工作的静电检测装置，其特征是静电检测装置的工作流程包括下列步骤：The present invention also provides an electrostatic detection device working according to the above distance compensation method, characterized in that the work flow of the electrostatic detection device includes the following steps:
1)接通静电检测装置电源，检测程序初始化运行，装置开始正常工作。1) Turn on the power of the electrostatic detection device, the detection program is initialized and run, and the device starts to work normally.
2)根据现场情况，通过校正距离拨码开关设置静电传感器校正距离，检测程序开始读取校正距离设置信息；2) According to the on-site situation, set the correction distance of the electrostatic sensor through the correction distance DIP switch, and the detection program starts to read the correction distance setting information;
3)检测程序读取距离检测装置发送来的距离信号值；3) The detection program reads the distance signal value sent by the distance detection device;
4)采样程序将对信号放大、检波、整形电路模块输出的静电信号进行采样处理，并对采样后的多个数据剔除最大值和最小值后，进行均值化处理，最终向后续程序输出均值化处理后的采样数据，即X值；4) The sampling program will sample and process the electrostatic signal output by the signal amplification, detection and shaping circuit modules, remove the maximum and minimum values from the sampled data, and perform averaging processing, and finally output the averaging to the subsequent program. The processed sample data, that is, the X value;
5)算法程序分为多个子程序，每一个校正距离对应一个子程序；计算时将当前检测距离下所得的采样处理后的外界静电压信号值X和读取的检测距离值d带入对应算法公式的子程序，计算得出最终的静电检测值；5) The algorithm program is divided into multiple subroutines, and each correction distance corresponds to a subroutine; during the calculation, the sampled and processed external static voltage signal value X obtained at the current detection distance and the read detection distance value d are brought into the corresponding algorithm The subroutine of the formula calculates the final electrostatic detection value;
6)如计算出的静电检测值大于此校正距离下的最大静电量程，则检测程序将此校正距离下的最大静电量程作为检测到的静电值，并报警输出，通知管理人员调整静电传感器校正距离设置至较大校正距离，同时将安装距离增加到校正距离及以上，以便可以检测到更大的静电压值；6) If the calculated electrostatic detection value is greater than the maximum electrostatic range under this calibration distance, the detection program will take the maximum electrostatic range under this calibration distance as the detected electrostatic value, and output an alarm to notify the administrator to adjust the electrostatic sensor calibration distance Set to a larger correction distance, and at the same time increase the installation distance to the correction distance and above, so that a larger static voltage value can be detected;
7)如计算出的静电检测值不超过此校正距离下的最大静电量程，则检测程序将保存算法程序得出的静电检测值，并等待输出请求。7) If the calculated electrostatic detection value does not exceed the maximum electrostatic range under this correction distance, the detection program will save the electrostatic detection value obtained by the algorithm program and wait for the output request.
进一步的，当检测程序读取到外部静电检测值输出请求时，检测程序将保存的静电检测值发送给接收或显示装置。Further, when the detection program reads the external static electricity detection value output request, the detection program sends the stored static electricity detection value to the receiving or display device.
进一步的，当没有静电检测请求时，所述的检测程序控制单片机进入休眠状态，直至接收到静电检测请求后，将单片机从休眠状态唤醒。Further, when there is no static electricity detection request, the detection program controls the single-chip microcomputer to enter a sleep state, and wakes up the single-chip microcomputer from the sleep state after receiving the static electricity detection request.
与现有技术比较，本发明的优点是：Compared with the prior art, the advantages of the present invention are:
1、相比于现有静电检测装置无附加距离检测功能或未配置有距离检测装置，无法实现任意距离的静电检测功能，本技术方案通过设置距离检测装置为静电检测装置提供检测距离信号，并利用含有距离补偿的算法公式，实现了任意检测距离的静电检测功能。1. Compared with the existing electrostatic detection device which has no additional distance detection function or is not equipped with a distance detection device, it cannot realize the electrostatic detection function of any distance. The technical solution provides a detection distance signal for the electrostatic detection device by setting the distance detection device, and Using the algorithm formula with distance compensation, the electrostatic detection function of any detection distance is realized.
2、相比于现有静电检测装置，本技术方案增加了校正距离设置，当事先安装距离较小，检测超量程时，可调整静电传感器校正距离设置为较大校正距离，并使检测距离(安装距离)大于等于校正距离，以便可以实施正确的检测得到更大的静电压值。2. Compared with the existing electrostatic detection device, this technical solution increases the correction distance setting. When the pre-installation distance is small and the detection exceeds the range, the correction distance of the electrostatic sensor can be adjusted to a larger correction distance, and the detection distance ( Installation distance) is greater than or equal to the correction distance, so that correct detection can be performed to obtain a larger static voltage value.
3、由于实现了任意距离检测，并可得到准确的检测结果，故静电传感器的安装不必再考虑检测距离变化的问题，适用性大大增加。3. Due to the realization of arbitrary distance detection and accurate detection results, the installation of the electrostatic sensor does not need to consider the change of detection distance, and the applicability is greatly increased.
4、由于对任意检测距离所得检测数据进行了数据修正补偿，得到了准确的测量结果，杜绝了产品静电安全管控的漏洞，确保了产品静电安全，而且没有额外增加现场的管理成本。4. Due to the data correction and compensation for the detection data obtained at any detection distance, accurate measurement results are obtained, which eliminates the loopholes in the product electrostatic safety management and control, ensures the product electrostatic safety, and does not increase the additional on-site management costs.
附图说明Description of drawings
图1为静电传感器不同检测距离的示意图；Figure 1 is a schematic diagram of different detection distances of electrostatic sensors;
图2为本发明距离补偿换算系数确定方法的流程图；Fig. 2 is the flow chart of the distance compensation conversion factor determination method of the present invention;
图3为不同电压下换算系数K与检测距离的测试曲线图；Fig. 3 is the test curve diagram of conversion factor K and detection distance under different voltages;
图4为不同校正距离下换算系数K与检测距离的关系(拟合)曲线图；Fig. 4 is the relationship (fitting) curve diagram of conversion coefficient K and detection distance under different correction distances;
图5为本发明任意检测距离下的静电检测流程图；Fig. 5 is the static electricity detection flow chart under the arbitrary detection distance of the present invention;
表1为不同标准电压下换算系数K对检测距离的数据统计；Table 1 is the data statistics of the conversion factor K on the detection distance under different standard voltages;
表2为不同校正距离下换算系数K对检测距离的拟合方程。Table 2 is the fitting equation of the conversion coefficient K to the detection distance under different correction distances.
图中V为移动方向，A为生产流水线，B1、B2、B3为被测物体，C为静电传感器，D1、D2、D3为检测距离。In the figure, V is the moving direction, A is the production line, B1, B2, and B3 are the objects to be measured, C is the electrostatic sensor, and D1, D2, and D3 are the detection distances.
具体实施方式Detailed ways
下面结合附图和实施例对本发明做进一步说明。The present invention will be further described below with reference to the accompanying drawings and embodiments.
本申请人此前申请的申请公布日为2019年04月09日，申请公布号为CN 109596902A的中国发明专利申请中，公开了一种静电传感器及其检测方法，该静电传感器包括传感支架单元、传感驱动单元和传感信号处理单元；设置一单片机电路、检测距离拨码开关、检测档位拨码开关和设备地址拨码开关；传感信号处理单元的输出端与单片机电路的I/O端口对应连接；前述各拨码开关的输出端与单片机电路的I/O端口分别对应连接；其通过检测档位拨码开关选择相应的检测档位，来调节静电传感器不同的检测距离；通过拨动不同的距离编码，使单片机电路接收到不同的距离编码，进而调用不同的检测计算子程序。该静电传感器能在不同检测距离下，实现精度相同或相近的静电测量。The application publication date of the applicant's previous application is April 9, 2019. In the Chinese invention patent application with the application publication number CN 109596902A, an electrostatic sensor and a detection method thereof are disclosed. The electrostatic sensor includes a sensing bracket unit, a Sensing drive unit and sensing signal processing unit; set up a single chip circuit, detection distance DIP switch, detection gear DIP switch and device address DIP switch; the output end of the sensing signal processing unit and the I/O of the single chip circuit The ports are correspondingly connected; the output ends of the aforementioned DIP switches are respectively connected with the I/O ports of the single-chip circuit; it selects the corresponding detection gear through the detection gear switch to adjust the different detection distances of the electrostatic sensor; Move different distance codes, so that the single-chip circuit receives different distance codes, and then calls different detection and calculation subroutines. The electrostatic sensor can realize electrostatic measurement with the same or similar accuracy under different detection distances.
本发明的技术方案中，所针对的静电传感器，即为上述专利申请中带有检测距离拨码开关的静电传感器。In the technical solution of the present invention, the targeted electrostatic sensor is the electrostatic sensor with the detection distance dial switch in the above patent application.
为了使静电传感器能够实现在任意垂直距离下的检测，本发明的技术方案，首先搭建一个可调节至任意检测距离，进行静电测试的校正装置(称为静电压距离检测校正装置)。在静电传感器上或其安装装置上，设置一距离检测装置，该距离检测装置的检测面须与静电传感器检测窗口所在平面平行设置。距离检测装置与静电传感器或其安装装置固定安装在一起，随静电传感器一起同步作上、下移动。利用任意距离静电检测校正装置测试不同标准电压和不同校正距离下的多个检测距离的静电信号值，并依据标准值和检测信号值推导换算系数；将换算系数与测试距离(检测距离)的数据关系进行曲线拟合，得到检测距离换算系数的数学模型：In order to enable the electrostatic sensor to detect at any vertical distance, the technical solution of the present invention first builds a calibration device (called an electrostatic voltage distance detection and calibration device) that can be adjusted to any detection distance for electrostatic testing. A distance detection device is arranged on the electrostatic sensor or its installation device, and the detection surface of the distance detection device must be arranged parallel to the plane where the detection window of the electrostatic sensor is located. The distance detection device is fixedly installed with the electrostatic sensor or its installation device, and moves up and down synchronously with the electrostatic sensor. Use any distance electrostatic detection and correction device to test the electrostatic signal values of multiple detection distances under different standard voltages and different calibration distances, and derive conversion coefficients according to the standard values and detection signal values; Curve fitting is performed on the relationship to obtain the mathematical model of the detection distance conversion factor:
将此数学模型导入算法公式V＝Kn×X中，得到含有距离补偿的算法公式：Import this mathematical model into the algorithm formula V=Kn ×X, and obtain the algorithm formula with distance compensation:
静电传感器进行任意距离检测的流程为：读取距离拨码开关所设定的校正距离，并接收距离传感器发送来的检测距离信号；传感器接收物体表面静电荷产生的电场信号，并对其进行处理、采样；随后对采样数据进行分析运算得到X值，并根据读取到的校正距离设定值调用与其对应的算法公式3，再将读取到的检测距离值带入公式3，最终得到静电检测值。The process of the electrostatic sensor for arbitrary distance detection is: read the correction distance set by the distance DIP switch, and receive the detection distance signal sent by the distance sensor; the sensor receives the electric field signal generated by the electrostatic charge on the surface of the object, and processes it , sampling; then analyze and calculate the sampled data to obtain the X value, and call the
1、参见图2所示，在搭建的静电压距离检测校正装置(或称校准装置)上，测试不同标准电压下(如：2.5KV，5.0KV，7.5KV，10.0KV，12.5KV，15.0KV， 17.5KV，20.0KV)，静电传感器处于不同检测距离时(如：100mm，150mm，200mm， 250mm，300mm，350mm，400mm，450mm，500mm，550mm，600mm，700mm)检测到的静电信号；根据各个标准电压值和与其对应的静电信号值，推导出换算系数。1. Referring to Figure 2, on the static voltage distance detection and correction device (or calibration device) built, test under different standard voltages (such as: 2.5KV, 5.0KV, 7.5KV, 10.0KV, 12.5KV, 15.0KV , 17.5KV, 20.0KV), the electrostatic signal detected by the electrostatic sensor at different detection distances (such as: 100mm, 150mm, 200mm, 250mm, 300mm, 350mm, 400mm, 450mm, 500mm, 550mm, 600mm, 700mm); A conversion factor is derived from the standard voltage value and the corresponding electrostatic signal value.
2、参照图3及表1所示，将推导出的换算系数对检测距离做出测试数据图，从图可看出各标准电压下的曲线基本重合，表示不同标准电压下的K值对检测距离的关系可共用一个数学公式表达。表1中各自给出了相同检测距离下，不同标准电压下的K值及其算数平均值、平均绝对偏差、偏差对算数平均值的占比(最高不超过1.5％)，由此亦可得出不同标准电压下的K值对检测距离的关系可共用一个数学公式表达。2. Referring to Figure 3 and Table 1, the derived conversion factor is used to make a test data chart for the detection distance. It can be seen from the figure that the curves under each standard voltage are basically overlapped, indicating that the K value under different standard voltages is very important for detection. The relationship of distance can be expressed by a common mathematical formula. Table 1 gives the K value and its arithmetic mean value, mean absolute deviation, and the ratio of the deviation to the arithmetic mean value under different standard voltages under the same detection distance (maximum no more than 1.5%), which can also be obtained. The relationship between the K value and the detection distance under different standard voltages can be expressed by a common mathematical formula.
3、参照图2所示，在搭建的静电压校正(准)装置上，测试不同校正距离下(如：100mm，150mm，200mm，250mm，300mm，350mm，400mm，450mm)，静电传感器处于不同检测距离时(如：100mm，150mm，200mm，250mm，300mm， 350mm，400mm，450mm，500mm，550mm，600mm，700mm)检测到的静电信号；根据标准电压值和与其对应的静电信号值，推导出换算系数。3. Referring to Figure 2, on the built electrostatic voltage correction (quasi) device, test under different correction distances (such as: 100mm, 150mm, 200mm, 250mm, 300mm, 350mm, 400mm, 450mm), the electrostatic sensor is in different detection Electrostatic signal detected at distance (such as: 100mm, 150mm, 200mm, 250mm, 300mm, 350mm, 400mm, 450mm, 500mm, 550mm, 600mm, 700mm); according to the standard voltage value and the corresponding electrostatic signal value, deduce the conversion coefficient.
4、参照图4所示，将推导出的换算系数对检测距离做出测试数据图，从图可看出各校正距离下的曲线差异较大，表示不同校正距离下的K值对检测距离的关系须用一组数学公式表达，即每个校正距离对应一个数学公式。4. Referring to Figure 4, the derived conversion factor is used to make a test data chart for the detection distance. It can be seen from the figure that the curves under each calibration distance are quite different, indicating that the K value under different calibration distances is the difference between the detection distances. The relationship must be expressed by a set of mathematical formulas, that is, one mathematical formula for each correction distance.
5、结合图2、图3、图4所示，对各个校正距离下的K值对检测距离的关系进行曲线拟合，得出公式2，拟合参数见表2。从拟合参数可看出，各个校正距离下的K值对检测距离的关系符合exp函数(e指数函数)。最终将拟合的检测距离换算系数表达式带入算法公式1，得到含有距离补偿的算法公式3。5. Combined with Fig. 2, Fig. 3 and Fig. 4, curve fitting is performed on the relationship between the K value under each correction distance and the detection distance, and
6、结合图5所示，针对任意安装距离的静电检测，在计算最终静电检测值前，须要得到检测距离值，其具体检测流程如下：6. As shown in Figure 5, for the electrostatic detection of any installation distance, before calculating the final electrostatic detection value, it is necessary to obtain the detection distance value. The specific detection process is as follows:
1)接通静电检测装置电源，检测程序初始化运行，装置开始正常工作。1) Turn on the power of the electrostatic detection device, the detection program is initialized and run, and the device starts to work normally.
2)根据现场情况设置静电传感器校正距离(校正距离应小于等于最小检测距离，以避免错误检测或超量程检测)，检测程序开始读取校正距离设置信息。校正距离可通过拨码开关将其设置到与其对应的编码处。2) Set the electrostatic sensor calibration distance according to the site conditions (the calibration distance should be less than or equal to the minimum detection distance to avoid false detection or over-range detection), and the detection program starts to read the calibration distance setting information. The correction distance can be set to the corresponding code through the DIP switch.
3)检测程序读取距离检测装置发送来的距离信号值。3) The detection program reads the distance signal value sent by the distance detection device.
4)采样程序将对信号放大、检波、整形电路模块输出的静电信号进行采样处理，并对采样后的多个数据剔除最大值和最小值后，进行均值化处理，最终向后续程序输出均值化处理后的采样数据，即X值。4) The sampling program will sample and process the electrostatic signal output by the signal amplification, detection and shaping circuit modules, remove the maximum and minimum values from the sampled data, and perform averaging processing, and finally output the averaging to the subsequent program. The processed sample data, that is, the X value.
5)算法程序分为多个子程序，每个校正距离对应一个子程序；计算时将当前检测距离下所得的X值和读取的检测距离d值带入对应的算法公式，计算得出最终的静电检测值。5) The algorithm program is divided into multiple subroutines, and each correction distance corresponds to a subroutine; when calculating, the X value obtained under the current detection distance and the read detection distance d value are brought into the corresponding algorithm formula, and the final calculation is obtained. Static detection value.
6)如计算出的静电检测值大于此校正距离下的最大静电量程，则检测程序将此校正距离下的最大静电量程作为检测到的静电值，并报警输出，,通知管理人员调整静电传感器校正距离设置至较大校正距离，同时将安装距离增加到校正距离及以上，以便可以检测到更大的静电压值。6) If the calculated electrostatic detection value is greater than the maximum electrostatic range under this calibration distance, the detection program will take the maximum electrostatic range under this calibration distance as the detected electrostatic value, and output an alarm, and notify the administrator to adjust the electrostatic sensor calibration Set the distance to a larger correction distance, while increasing the installation distance to the correction distance and above, so that a larger static voltage value can be detected.
7)如计算出的静电检测值不超过此校正距离下的最大静电量程，则检测程序将保存算法程序得出的静电检测值，并等待输出请求。7) If the calculated electrostatic detection value does not exceed the maximum electrostatic range under this correction distance, the detection program will save the electrostatic detection value obtained by the algorithm program and wait for the output request.
8)当检测程序读取到外部静电检测值输出请求时，检测程序将保存的静电检测值发送给接收或显示装置。8) When the detection program reads the external static electricity detection value output request, the detection program sends the stored static electricity detection value to the receiving or display device.
9)当没有静电检测请求时，单片机将进入休眠状态，直至接收到静电检测请求，从休眠状态唤醒。9) When there is no static electricity detection request, the microcontroller will enter the sleep state until it receives the static electricity detection request and wakes up from the sleep state.
本发明的技术方案，通过设置距离检测装置为静电检测装置提供检测距离信号，并利用含有距离补偿的算法公式，实现了任意检测距离的静电检测功能；可调整静电传感器校正距离设置为较大校正距离，并使检测距离大于等于校正距离，以便可以实施正确的检测得到更大的静电压值；静电传感器的安装不必再考虑检测距离变化的问题，适用性大大增加，杜绝了产品静电安全管控的漏洞，确保了产品静电安全，而且没有额外增加现场的管理成本。The technical solution of the present invention is to provide a detection distance signal for the electrostatic detection device by setting a distance detection device, and to realize the electrostatic detection function of any detection distance by using an algorithm formula including distance compensation; the correction distance of the electrostatic sensor can be adjusted to set a larger correction distance distance, and make the detection distance greater than or equal to the correction distance, so that correct detection can be performed to obtain a larger electrostatic voltage value; the installation of electrostatic sensors does not need to consider the change of detection distance, and the applicability is greatly increased, eliminating the need for product electrostatic safety control. The loopholes ensure the electrostatic safety of the product, and there is no additional on-site management cost.
本发明可广泛用于静电检测或静电消除装置的设计或制造领域。The invention can be widely used in the fields of design or manufacture of static electricity detection or static electricity elimination devices.
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201965186U (en)* | 2011-02-25 | 2011-09-07 | 中国人民解放军第二炮兵工程学院 | Portable non-contact static electricity measuring device based on ultrasonic technology |
| JP2013007694A (en)* | 2011-06-27 | 2013-01-10 | Kasuga Electric Works Ltd | Surface potential measuring apparatus |
| JP2016090276A (en)* | 2014-10-30 | 2016-05-23 | 春日電機株式会社 | Surface potential measuring apparatus |
| CN109596902A (en)* | 2018-12-27 | 2019-04-09 | 上海安平静电科技有限公司 | A kind of electrostatic transducer and its detection method |
| CN109683028A (en)* | 2018-12-25 | 2019-04-26 | 上海安平静电科技有限公司 | A kind of electrostatic detection methods and device |
| CN110007160A (en)* | 2019-03-15 | 2019-07-12 | 山东超越数控电子股份有限公司 | A kind of Electrostatic Potential Measure System, method and equipment |
| CN111521884A (en)* | 2020-06-11 | 2020-08-11 | 青岛大学 | A kind of human body electrostatic field quantitative non-contact detection device and detection method |
- 2020
- 2020-12-31CNCN202011644149.5Apatent/CN114689952A/enactivePending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201965186U (en)* | 2011-02-25 | 2011-09-07 | 中国人民解放军第二炮兵工程学院 | Portable non-contact static electricity measuring device based on ultrasonic technology |
| JP2013007694A (en)* | 2011-06-27 | 2013-01-10 | Kasuga Electric Works Ltd | Surface potential measuring apparatus |
| JP2016090276A (en)* | 2014-10-30 | 2016-05-23 | 春日電機株式会社 | Surface potential measuring apparatus |
| CN109683028A (en)* | 2018-12-25 | 2019-04-26 | 上海安平静电科技有限公司 | A kind of electrostatic detection methods and device |
| CN109596902A (en)* | 2018-12-27 | 2019-04-09 | 上海安平静电科技有限公司 | A kind of electrostatic transducer and its detection method |
| CN110007160A (en)* | 2019-03-15 | 2019-07-12 | 山东超越数控电子股份有限公司 | A kind of Electrostatic Potential Measure System, method and equipment |
| CN111521884A (en)* | 2020-06-11 | 2020-08-11 | 青岛大学 | A kind of human body electrostatic field quantitative non-contact detection device and detection method |
Non-Patent Citations (1)
| Title |
|---|
| 韩开进 等: "变距离静电电位检测研究", 后勤工程学院学报, vol. 29, no. 03, 30 May 2013 (2013-05-30), pages 71 - 78* |
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