本申请为申请人于2018年12月26日递交的申请号为201811596755.7，发明名称为“一种具有高的红光亮度和高的可靠性的发光装置”的分案申请。This application is a divisional application with application number 201811596755.7 submitted by the applicant on December 26, 2018, and the invention title is "A light-emitting device with high red light brightness and high reliability".
技术领域Technical field
本发明涉及一种具有高的红光亮度和高的可靠性的发光装置。The present invention relates to a light-emitting device with high red light brightness and high reliability.
背景技术Background technique
目前，通过激光照射荧光粉来发出相应颜色的光是激光光源领域的常规技术。我们都知道，在激光光源应用于白光照明时，提高激光光源的红光占比可以提高照明的显色指数；在激光光源应用于植物照明时，提高激光光源的红光占比可以有利于光合作用与光周期效应，原因是红光不仅有利于植物碳水化合物的合成，还能加速长日植物的发育；以及在激光显示应用中，提高激光光源的红光占比可以较好地实现色彩还原，解决画面红色偏紫、偏黄的问题。现有技术中提高红光占比的其中一种方法是增加红光光源，例如红光LED或红色激光，但是这种方法所存在的问题也很显著，例如系统体积增加，而且温度对红色激光器的输出功率的限制也很明显，所以增加红光光源的方法具有局限性。现有技术中提高红光占比的另一种方法是采用红色荧光粉，但是红色荧光粉在受到激光照射时由于自身吸收了大量的短波长的光，所以其产生的热量更大，温度效应更为明显，因此通常设计一个具有反射作用的散热组件，例如常用的镜面铝反射层或银反射层，兼具反射和散热效果。然而，铝的反射率较低，产生的热量较高，因此散热效果不够好。另一方面，银反射层的反射率虽然比较高，但是其容易发生氧化和硫化，因而可靠性较低。此外，还存在一种采用长波长黄光结合滤光片来产生红光的方法，其中采用热稳定性好且光饱和性能较好的YAG:Ce3+体系的长波长黄光，由于黄光光源的热效应比红光光源的热效应小，所以这种方法产生的红光亮度和效率比较好，但是由于采用了滤光片，导致提升了成本的同时，结构也不紧凑。由此可见，现有技术中的产生红光的激光荧光光源要么是成本高并且结构不紧凑，要么就是其红光效率和亮度较低，制约了其激光显示产品的亮度和色域的提升。Currently, irradiating phosphors with lasers to emit light of corresponding colors is a conventional technology in the field of laser light sources. We all know that when the laser light source is used for white light lighting, increasing the red light ratio of the laser light source can improve the color rendering index of the lighting; when the laser light source is used for plant lighting, increasing the red light ratio of the laser light source can be beneficial to photosynthesis. The reason is that red light is not only beneficial to the synthesis of plant carbohydrates, but also accelerates the development of long-day plants; and in laser display applications, increasing the proportion of red light in the laser light source can better achieve color restoration. , solve the problem of reddish color and yellowish color in the picture. One of the existing methods to increase the proportion of red light is to add red light sources, such as red LEDs or red lasers. However, problems with this method are also significant, such as the increase in system volume and the temperature impact of red lasers. The output power limit is also obvious, so the method of adding red light source has limitations. Another method to increase the proportion of red light in the existing technology is to use red phosphor. However, when the red phosphor is irradiated by laser, it absorbs a large amount of short-wavelength light, so it generates greater heat and has a temperature effect. It is more obvious, so it is usually designed to have a reflective heat dissipation component, such as the commonly used mirror aluminum reflective layer or silver reflective layer, which has both reflection and heat dissipation effects. However, aluminum has lower reflectivity and generates higher heat, so the heat dissipation effect is not good enough. On the other hand, although the reflectivity of the silver reflective layer is relatively high, it is prone to oxidation and sulfation, so its reliability is low. In addition, there is also a method of using long-wavelength yellow light combined with a filter to generate red light, in which the long-wavelength yellow light of the YAG:Ce3+ system with good thermal stability and good light saturation performance is used. The thermal effect of the light source is smaller than that of the red light source, so the red light produced by this method has better brightness and efficiency. However, due to the use of optical filters, the cost is increased and the structure is not compact. It can be seen that the laser fluorescence light source that generates red light in the existing technology is either high in cost and not compact in structure, or its red light efficiency and brightness are low, which restricts the improvement of the brightness and color gamut of its laser display products.
因此，有待于提供一种具有高的红光亮度和高的可靠性的发光装置，使得可以显著提升其激光显示产品的激光显示的亮度和色域。Therefore, it is necessary to provide a light-emitting device with high red light brightness and high reliability, so that the brightness and color gamut of the laser display of its laser display product can be significantly improved.
发明内容Contents of the invention
有鉴于此，本发明旨在提供一种红光发光效率高、结构紧凑、成本较低并且散热性能优良的发光装置。In view of this, the present invention aims to provide a light-emitting device with high red light luminous efficiency, compact structure, low cost and excellent heat dissipation performance.
根据本发明的一方面，提供了一种发光装置，包括从下到上依次层叠设置的导热基板、反射层和发光层，其中，所述反射层为金反射层，所述发光层包括Y3Al5O12:Ce3+荧光粉、(Y,Gd)3Al5O12:Ce3+荧光粉、α-SiAlON:Eu2+荧光粉和(Sr,Ca)AlSiN3:Eu2+荧光粉中的任意一种或多种，所述Y3Al5O12:Ce3+荧光粉中的Ce3+的掺杂浓度为1.2mol％以上，所述(Y,Gd)3Al5O12:Ce3+荧光粉中的Ce3+的掺杂浓度为0.5mol％以上并且Gd3+的掺杂浓度为10mol％以上。According to one aspect of the present invention, a light-emitting device is provided, including a thermally conductive substrate, a reflective layer and a luminescent layer stacked in sequence from bottom to top, wherein the reflective layer is a gold reflective layer, and the luminescent layer includes Y3 Al5 O12 :Ce3+ phosphor, (Y,Gd)3 Al5 O12 :Ce3+ phosphor, α-SiAlON:Eu2+ phosphor and (Sr,Ca)AlSiN3 :Eu2+ phosphor Any one or more of the Y3 Al5 O12 :Ce3+ phosphors, the Ce 3+ doping concentration in the Y 3 Al 5 O 12:Ce3+ phosphor is above 1.2 mol%, and the (Y,Gd)3 Al5 O12 : The doping concentration of Ce3+ in the Ce3+ phosphor is 0.5 mol% or more and the doping concentration of Gd3+ is 10 mol% or more.
进一步地，所述发光装置还包括过渡层，所述过渡层设置在所述发光层和所述反射层之间，并且所述过渡层由镍或者镍铬合金制成。Further, the light-emitting device further includes a transition layer, the transition layer is disposed between the light-emitting layer and the reflective layer, and the transition layer is made of nickel or nickel-chromium alloy.
进一步地，所述过渡层的厚度为小于2nm。Further, the thickness of the transition layer is less than 2 nm.
进一步地，所述发光装置还包括焊接层，所述焊接层设置在所述反射层与所述导热基板之间，所述焊接层用于将所述反射层与所述导热基板牢固接合。Further, the light-emitting device further includes a welding layer, the welding layer is provided between the reflective layer and the thermally conductive substrate, and the welding layer is used to firmly join the reflective layer and the thermally conductive substrate.
进一步地，所述焊接层为选自金锡、银锡、铋锡的合金焊料层。Further, the soldering layer is an alloy solder layer selected from the group consisting of gold-tin, silver-tin, and bismuth-tin.
进一步地，所述导热基板选自铜基板、表面镀镍金的铜基板或者表面镀镍金的碳化硅、氮化铝基板。Further, the thermally conductive substrate is selected from a copper substrate, a copper substrate with a nickel-gold surface, or a silicon carbide or aluminum nitride substrate with a nickel-gold surface.
进一步地，所述金反射层的厚度为80-200nm。Further, the thickness of the gold reflective layer is 80-200nm.
进一步地，所述发光层为荧光陶瓷或荧光玻璃。Further, the luminescent layer is fluorescent ceramic or fluorescent glass.
进一步地，所述荧光陶瓷为以下陶瓷中的任一种：Y3Al5O12:Ce3+荧光粉或(Y,Gd)3Al5O12:Ce3+荧光粉的纯相陶瓷；Al2O3、Y2O3、Mg2AlO4分别与Y3Al5O12:Ce3+荧光粉或(Y,Gd)3Al5O12:Ce3+荧光粉形成的复相陶瓷；α-SiAlON:Eu2+荧光粉或(Sr,Ca)AlSiN3:Eu2+荧光粉的纯相陶瓷；以及α-SiAlON:Eu2+荧光粉或(Sr,Ca)AlSiN3:Eu2+荧光粉与氟化物形成的复相陶瓷。Further, the fluorescent ceramic is any one of the following ceramics: pure phase ceramics of Y3 Al5 O12 : Ce3+ phosphor or (Y, Gd)3 Al5 O12 : Ce3+ phosphor; Al2 O3 , Y2 O3 , Mg2 AlO4 and Y3 Al5 O12 :Ce3+ phosphor or (Y,Gd)3 Al5 O12 :Ce3+ phosphor are used to form a composite ceramic. ; Pure phase ceramics of α-SiAlON:Eu2+ phosphor or (Sr,Ca)AlSiN3 :Eu2+ phosphor; and α-SiAlON:Eu2+ phosphor or (Sr,Ca)AlSiN3 :Eu2 + Multi-phase ceramic formed by phosphor and fluoride.
进一步地，所述发光装置还包括至少一个第二发光层和至少一个第二反射层，所述第二发光层与所述发光层共平面设置，所述第二反射层与所述反射层共平面设置，且所述第二反射层设置在所述第二发光层下方，用于反射所述第二发光层发出的光。Further, the light-emitting device further includes at least one second light-emitting layer and at least one second reflective layer, the second light-emitting layer is co-planar with the light-emitting layer, and the second reflective layer is co-planar with the reflective layer. The second reflective layer is arranged planarly, and the second reflective layer is arranged below the second luminescent layer for reflecting the light emitted by the second luminescent layer.
进一步地，所述第二发光层包括散射粒子、黄光荧光粉、绿光荧光粉中的至少一种。Further, the second luminescent layer includes at least one of scattering particles, yellow phosphor, and green phosphor.
进一步地，所述第二反射层为银反射层或无机漫反射层。Further, the second reflective layer is a silver reflective layer or an inorganic diffuse reflective layer.
进一步地，在所述第二反射层的下方设置有由金、铂或者其合金制成的保护层，以保护所述第二反射层免受硫化和氧化。Further, a protective layer made of gold, platinum or alloys thereof is provided below the second reflective layer to protect the second reflective layer from sulfide and oxidation.
有益效果beneficial effects
本发明提供了一种发光装置，所述发光装置包括从下到上依次层叠设置的导热基板、反射层和发光层，其中，所述反射层为金反射层，所述发光层包括Y3Al5O12:Ce3+荧光粉、(Y,Gd)3Al5O12:Ce3+荧光粉、α-SiAlON:Eu2+荧光粉和(Sr,Ca)AlSiN3:Eu2+荧光粉中的任意一种或多种，所述Y3Al5O12:Ce3+荧光粉中的Ce3+的掺杂浓度为1.2mol％以上，所述(Y,Gd)3Al5O12:Ce3+荧光粉中的Ce3+的掺杂浓度为0.5mol％以上并且Gd3+的掺杂浓度为10mol％以上。与现有技术中使用银作为反射层相比，由于金不像银那样易于氧化和硫化，因此本发明中使用金作为反射层的发光装置的可靠性较高。另外，本发明的金反射层仅对波长为555nm以上的光的反射率大于80％，对波长为650nm以上的光的反射率大于95％，即金反射层12对波长为650nm以下的光具有一定的吸收，尤其是对波长为555nm以下的光吸收较为严重。也就是说，本发明的金反射层具有选择性地反射红光以及吸收绿光、蓝光和紫光的功能，在不使用滤色片的情况下也能仅反射红光，简化了结构并节省了成本。此外，本发明的发光装置的发光层中具有特定的掺杂浓度的荧光粉使得受激发光的波长向红光波长靠近，提高了红光占比的同时减少了金反射层吸收绿光等而导致的热效应。因此本发明的发光装置具有高的红光亮度和高的可靠性，并且在降低了成本的同时，也可以实现更为紧凑的光学结构。The invention provides a light-emitting device. The light-emitting device includes a thermally conductive substrate, a reflective layer and a luminescent layer that are stacked sequentially from bottom to top. The reflective layer is a gold reflective layer, and the luminescent layer includes Y3 Al.5 O12 :Ce3+ phosphor, (Y,Gd)3 Al5 O12 :Ce3+ phosphor, α-SiAlON:Eu2+ phosphor and (Sr,Ca)AlSiN3 :Eu2+ phosphor Any one or more of them, the doping concentration of Ce3+ in the Y3 Al5 O12 :Ce3+ phosphor is above 1.2 mol%, the (Y,Gd)3 Al5 O12 : The doping concentration of Ce3+ in the Ce3+ phosphor is 0.5 mol% or more and the doping concentration of Gd3+ is 10 mol% or more. Compared with the use of silver as the reflective layer in the prior art, since gold is not as easy to oxidize and sulfide as silver, the light-emitting device using gold as the reflective layer in the present invention has higher reliability. In addition, the gold reflective layer of the present invention only has a reflectivity of greater than 80% for light with a wavelength of 555 nm or more, and greater than 95% for light with a wavelength of 650 nm or more. That is, the gold reflective layer 12 has a certain effect on light with a wavelength of 650 nm or less. The absorption, especially the absorption of light with wavelengths below 555nm is more serious. That is to say, the gold reflective layer of the present invention has the function of selectively reflecting red light and absorbing green light, blue light and purple light. It can only reflect red light without using a color filter, simplifying the structure and saving money. cost. In addition, the phosphor with a specific doping concentration in the light-emitting layer of the light-emitting device of the present invention makes the wavelength of the excited light move closer to the wavelength of red light, which increases the proportion of red light and reduces the absorption of green light by the gold reflective layer. resulting thermal effects. Therefore, the light-emitting device of the present invention has high red light brightness and high reliability, and while reducing the cost, it can also achieve a more compact optical structure.
附图说明Description of the drawings
附图表示本文所述的非限制性示例性实施例。本领域技术人员将要理解的是，附图不一定按比例绘制，而是用于重点说明本发明的原理。The drawings represent non-limiting exemplary embodiments of the invention described herein. Those skilled in the art will appreciate that the drawings are not necessarily to scale but instead serve to illustrate the principles of the invention.
在附图中：In the attached picture:
图1是根据本发明的发光装置的示意图。Figure 1 is a schematic diagram of a light emitting device according to the present invention.
图2是示出了几种金属材料在不同波长范围的光下的反射率的曲线图。Figure 2 is a graph showing the reflectivity of several metallic materials under light in different wavelength ranges.
图3是根据本发明实施例1的发光装置的结构示意图。FIG. 3 is a schematic structural diagram of a light-emitting device according to Embodiment 1 of the present invention.
图4是根据本发明实施例2的转动式色轮结构的示意图和截面示意图。4 is a schematic diagram and a schematic cross-sectional view of a rotating color wheel structure according to Embodiment 2 of the present invention.
附图标记列表：List of reference signs:
10,45：激发光10,45: Excitation light
11,41：发光层11,41: Luminous layer
14,44,55：导热基板14,44,55: Thermal conductive substrate
15,46：受激发光15,46: stimulated luminescence
12,42：反射层12,42: Reflective layer
13,43,54：焊接层13,43,54: Welding layer
51a：红光发光层51a: red light emitting layer
51b：绿光发光层51b: Green light emitting layer
51c：蓝光发光层51c: Blue light emitting layer
51d：黄光发光层51d: yellow light emitting layer
52a：红光反射层52a: Red light reflective layer
52b：绿光反射层52b: Green light reflective layer
52c：蓝光反射层52c: Blue light reflective layer
52d：黄光反射层52d: Yellow light reflective layer
53b,53c,53d：保护层53b, 53c, 53d: protective layer
具体实施方式Detailed ways
以下，参照附图更全面地说明本发明的一个或多个示例性实施例，在附图中，本领域技术人员能够容易地确定本发明的一个或多个示例性实施例。如本领域技术人员应认识到的，只要不脱离本发明的精神或范围，可以以各种不同的方式对所述示例性实施例进行修改，本发明的精神或范围不限于本文所述的示例性实施例。One or more exemplary embodiments of the present invention will be described more fully hereinafter with reference to the accompanying drawings, in which one or more exemplary embodiments of the present invention will be readily identifiable by those skilled in the art. As those skilled in the art will realize, the exemplary embodiments may be modified in various different ways without departing from the spirit or scope of the invention, which is not limited to the examples described herein. sexual examples.
现在参照附图对本发明进行详细说明。The present invention will now be described in detail with reference to the accompanying drawings.
如图1所示，本发明提供了一种发光装置，该发光装置包括从下到上依次层叠设置的导热基板14、反射层12和发光层11。导热基板14具有高的导热性，优选为铜基板或者表面镀镍金的铜基板，也可以是镀镍金的碳化硅(SiC)或氮化铝(AlN)基板。As shown in FIG. 1 , the present invention provides a light-emitting device, which includes a thermally conductive substrate 14 , a reflective layer 12 and a light-emitting layer 11 that are stacked in sequence from bottom to top. The thermally conductive substrate 14 has high thermal conductivity and is preferably a copper substrate or a copper substrate with a surface plated with nickel and gold. It may also be a silicon carbide (SiC) or aluminum nitride (AlN) substrate with nickel and gold plating.
发光层11可以是发光峰值波长大于555nm的Y3Al5O12:Ce3+荧光粉或(Y,Gd)3Al5O12:Ce3+荧光粉的纯相陶瓷，或者是Al2O3、Y2O3、Mg2AlO4分别与发光峰值波长大于555nm的Y3Al5O12:Ce3+荧光粉或(Y,Gd)3Al5O12:Ce3+荧光粉形成的复相陶瓷，也可以是α-SiAlON:Eu2+荧光粉的纯相陶瓷或(Sr,Ca)AlSiN3:Eu2+荧光粉的纯相陶瓷或其与氟化钙、氟化镁等氟化物形成的复相陶瓷，还可以是上述这些荧光粉与玻璃粉混合烧结所形成的荧光玻璃。进一步地，Y3Al5O12:Ce3+中Ce3+的掺杂浓度为1.2mol％以上，(Y,Gd)3Al5O12:Ce3+中Ce3+的掺杂浓度为0.5mol％以上并且Gd3+的掺杂浓度为10mol％以上。Ce3+在Y3Al5O12中的掺杂浓度越高，Y3Al5O12的发光波长越长，Ce3+的掺杂浓度为1.2mol％时，Y3Al5O12的发光峰值波长为555nm，而Gd3+在(Y,Gd)3Al5O12中的掺杂浓度越高，(Y,Gd)3Al5O12的发光波长也越长，Ce3+的掺杂浓度为0.5mol％并且Gd3+的掺杂浓度为10mol％时，(Y,Gd)3Al5O12的发光峰值波长为555nm。发光层11受到激发光光源的蓝色激光(激发光)10的激发之后可以产生黄色或红色荧光，优选发光层11的厚度大于0.15mm，以保证由上述荧光粉制成的本发明的发光层11对来自激光光源的蓝色激光10的吸收率能够达到95％以上。The light-emitting layer 11 can be a pure phase ceramic of Y3 Al5 O12 : Ce3+ phosphor or (Y, Gd)3 Al5 O12 : Ce3+ phosphor with a luminescence peak wavelength greater than 555 nm, or Al2 O3. Y2 O3 and Mg2 AlO4 are respectively formed with Y3 Al5 O12 : Ce3+ phosphor or (Y, Gd)3 Al5 O12 : Ce3+ phosphor whose luminescence peak wavelength is greater than 555nm. The composite phase ceramic can also be a pure phase ceramic of α-SiAlON:Eu2+ phosphor or a pure phase ceramic of (Sr,Ca)AlSiN3 :Eu2+ phosphor or it can be combined with fluorine such as calcium fluoride and magnesium fluoride. The composite-phase ceramic formed of chemical compounds may also be fluorescent glass formed by mixing and sintering the above-mentioned phosphor powder and glass powder. Furthermore, the doping concentration of Ce3+ in Y3 Al5 O12 : Ce3+ is 1.2 mol% ormore , and the doping concentration of Ce 3+ in (Y,Gd)3 Al5 O12 : Ce3+ is 0.5 mol% or more and the doping concentration of Gd3+ is 10 mol% or more. The higher the doping concentration of Ce3+ in Y3 Al5 O12 , the longer the luminescence wavelength of Y3 Al5 O12. When the doping concentration ofCe3+ is 1.2mol %,the The luminescence peak wavelength is 555nm, and the higher the doping concentration of Gd3+ in (Y,Gd)3 Al5 O12 , the longer the luminescence wavelength of (Y,Gd)3 Al5 O12 , and the longer the luminescence wavelength of Ce3+ When the doping concentration is 0.5 mol% and the doping concentration of Gd3+ is 10 mol%, the emission peak wavelength of (Y,Gd)3 Al5 O12 is 555 nm. The luminescent layer 11 can produce yellow or red fluorescence after being excited by the blue laser (excitation light) 10 of the excitation light source. The thickness of the luminescent layer 11 is preferably greater than 0.15mm to ensure that the luminescent layer of the present invention made of the above phosphors The absorption rate of 11 pairs of blue lasers 10 from the laser light source can reach more than 95%.
反射层12用于对在发光层11中产生的黄色或红色荧光进行反射。反射层12为金(Au)反射层，其厚度为80-200nm，厚度太薄，不能对红色荧光进行充分反射，导致红光反射率下降，厚度太厚会产生应力，导致反射层与发光层之间的附着力下降，从而也会导致反射率下降。需要说明的是，金反射层12仅对波长为555nm以上的光的反射率大于80％，对波长为650nm以上的光的反射率大于95％，即金反射层12对波长为650nm以下的光具有一定的吸收，尤其是对波长为555nm以下的光吸收较为严重。也就是说，金反射层12对绿光、蓝光和紫光的吸收是比较严重的。当在发光层11中产生的受激发光是红光时，金反射层12能够将绝大部分的红光进行反射，对红光的反射率较高，产生的热量较低，同时与现有技术中使用银作为反射层相比，由于金不像银那样易于氧化和硫化，因此可靠性较高。当在发光层11中产生的受激发光是黄光时，由于发光层11产生的黄光是宽谱光，而非单一波长的单色光，可视为绿光和红光的混合光，而又由于金反射层12对绿光部分具有强吸收并对红光部分具有强反射，所以本发明的金反射层12既能够起到对红光部分进行反射的反射层的作用，也能够起到对绿光部分进行吸收使得仅反射红光部分的滤光片的作用。另外，为了提高红光占比以及为了减小由于金反射层12吸收大量绿光而导致的热效应，本发明的发光层11含有如上所述具有特定掺杂浓度的黄色荧光粉，使得受激发光的波长向红光波长靠近，减少绿光的成份，从而提高红光部分的比例，减少金反射层12由于吸收绿光而产生的热量，增强对红光部分的出射，既起到降低荧光粉的热效应的作用，又可以获得较高纯度的红光，而且不必使用滤光片，降低了系统的体积和成本，实现了更为紧凑的光学结构。也就是说，在本发明中，可以通过使用具有一定掺杂浓度的黄色荧光粉来构成本发明的发光层11并且通过使用金反射层作为本发明的反射层12，可以实现低热效应、高红光占比以及结构紧凑的发光装置。The reflective layer 12 is used to reflect yellow or red fluorescence generated in the light-emitting layer 11 . The reflective layer 12 is a gold (Au) reflective layer with a thickness of 80-200 nm. The thickness is too thin and cannot fully reflect red fluorescence, resulting in a decrease in red light reflectivity. If the thickness is too thick, stress will be generated, causing the reflective layer to separate from the luminescent layer. The adhesion between them decreases, which also leads to a decrease in reflectivity. It should be noted that the gold reflective layer 12 only has a reflectivity greater than 80% for light with a wavelength above 555 nm, and a reflectivity greater than 95% for light with a wavelength above 650 nm. That is, the gold reflective layer 12 has a reflectivity for light with a wavelength below 650 nm. Certain absorption, especially serious absorption of light with wavelengths below 555nm. That is to say, the gold reflective layer 12 absorbs green light, blue light and violet light relatively seriously. When the stimulated light generated in the light-emitting layer 11 is red light, the gold reflective layer 12 can reflect most of the red light, has a high reflectivity for the red light, and generates low heat. At the same time, it is consistent with the existing Compared with using silver as a reflective layer in technology, gold is not as easy to oxidize and sulfide as silver, so its reliability is higher. When the stimulated light generated in the light-emitting layer 11 is yellow light, since the yellow light generated by the light-emitting layer 11 is broad-spectrum light, rather than monochromatic light of a single wavelength, it can be regarded as a mixed light of green light and red light, and Since the gold reflective layer 12 has strong absorption of the green light part and strong reflection of the red light part, the gold reflective layer 12 of the present invention can not only function as a reflective layer that reflects the red light part, but also can function as a reflective layer that reflects the red light part. It acts as a filter that absorbs the green light part and reflects only the red light part. In addition, in order to increase the proportion of red light and to reduce the thermal effect caused by the gold reflective layer 12 absorbing a large amount of green light, the luminescent layer 11 of the present invention contains a yellow phosphor with a specific doping concentration as described above, so that the excited light The wavelength is closer to the red light wavelength, reducing the green light component, thereby increasing the proportion of the red light part, reducing the heat generated by the gold reflective layer 12 due to the absorption of green light, and enhancing the emission of the red light part, which not only reduces the phosphor Due to the thermal effect, higher purity red light can be obtained without using filters, which reduces the volume and cost of the system and achieves a more compact optical structure. That is to say, in the present invention, by using yellow phosphor with a certain doping concentration to constitute the luminescent layer 11 of the present invention and by using a gold reflective layer as the reflective layer 12 of the present invention, low thermal effect and high red light occupancy can be achieved. Lighting device with a compact structure.
另外，如图1所示，在本发明的发光装置中还可以包括焊接层13，其中该焊接层13设置在导热基板14与反射层12之间。焊接层13用于将反射层12牢固焊接到导热基板14上，以增加反射层12与导热基板14之间的附着力而使得二者牢固接合。焊接层13可以为金锡、银锡、铋锡等合金焊料层。In addition, as shown in FIG. 1 , the light-emitting device of the present invention may also include a soldering layer 13 , where the soldering layer 13 is disposed between the thermally conductive substrate 14 and the reflective layer 12 . The welding layer 13 is used to firmly weld the reflective layer 12 to the thermally conductive substrate 14 to increase the adhesion between the reflective layer 12 and the thermally conductive substrate 14 so that they are firmly joined. The solder layer 13 may be an alloy solder layer such as gold-tin, silver-tin, bismuth-tin, or the like.
此外，在发光层11与反射层12之间可以设置过渡层，以增加发光层11与反射层12之间的附着力。该过渡层可以为镍层或者镍铬合金层，过渡层的厚度为2nm以下。当过渡层的厚度为2nm以下时，发光层11中产生的受激发光可以穿透过渡层并到达金反射层12，从而被金反射层12反射。为了防止发光层11中产生的受激发光进一步穿透金反射层12，将金反射层12的厚度设定为80-200nm以确保对发光层11中产生的受激发光进行充分反射。In addition, a transition layer may be provided between the luminescent layer 11 and the reflective layer 12 to increase the adhesion between the luminescent layer 11 and the reflective layer 12 . The transition layer may be a nickel layer or a nickel-chromium alloy layer, and the thickness of the transition layer is less than 2 nm. When the thickness of the transition layer is less than 2 nm, the stimulated light generated in the light-emitting layer 11 can penetrate the transition layer and reach the gold reflective layer 12 , thereby being reflected by the gold reflective layer 12 . In order to prevent the stimulated light generated in the luminescent layer 11 from further penetrating the gold reflective layer 12 , the thickness of the gold reflective layer 12 is set to 80-200 nm to ensure sufficient reflection of the stimulated light generated in the luminescent layer 11 .
本发明选用可以被蓝光激发的发光峰值波长大于555nm的Y3Al5O12:Ce3+荧光粉、(Y,Gd)3Al5O12:Ce3+荧光粉、α-SiAlON:Eu2+荧光粉和(Sr,Ca)AlSiN3:Eu2+荧光粉中的任意一种或多种作为发光层11的波长转换材料，并且采用金属金(Au)作为反射层12的材料，上述荧光粉和金分别构成本发明的发光装置的发光层11及反射层12，而后将其接合在导热基板14上，从而构成本发明的发光装置。与铝相比，金对发光层11中产生的受激发红光的反射率较高，与银相比，金具有更好的化学稳定性和热稳定性，并且金可以直接焊接到高导热的铜散热器上，以及更为重要地，金对发光波长大于555nm的荧光的反射率在80％以上，与现有技术中将铝及银作为反射金属相比，本发明中将金作为反射金属可以同时实现发光装置的高光效及高可靠性。The present invention selects Y3 Al5 O12 : Ce3+ phosphors, (Y, Gd)3 Al5 O12 : Ce3+ phosphors, and α-SiAlON: Eu2 that can be excited by blue light and have a luminescence peak wavelength greater than 555 nm.+ phosphor and any one or more of (Sr,Ca)AlSiN3 :Eu2+ phosphor as the wavelength conversion material of the light-emitting layer 11, and metallic gold (Au) is used as the material of the reflective layer 12. The above-mentioned phosphor Powder and gold constitute the light-emitting layer 11 and the reflective layer 12 of the light-emitting device of the present invention respectively, and then they are bonded to the thermally conductive substrate 14 to form the light-emitting device of the present invention. Compared with aluminum, gold has a higher reflectivity for the stimulated red light generated in the luminescent layer 11. Compared with silver, gold has better chemical stability and thermal stability, and gold can be directly welded to highly thermally conductive materials. On the copper radiator, and more importantly, gold has a reflectivity of more than 80% for fluorescence with a wavelength greater than 555 nm. Compared with aluminum and silver as reflective metals in the prior art, gold is used as a reflective metal in the present invention. High luminous efficiency and high reliability of the light-emitting device can be achieved at the same time.
另一方面，参见图2的反射率曲线，由表面没有镀层的金的反射率曲线可知，金层对于波长短于555nm的光的吸收作用相当于一个滤光片的作用。也就是说，金层将波长大于555nm的光大部分反射回去，而将波长短于555nm的光大部分吸收。在本发明中通过如上所述的特定掺杂浓度的荧光粉制成的发光层11可以使得发光层11中产生的受激发光红移，使得受激发光中绿光含量减少，于是金反射层12吸收的绿光减少，由此产生的热量也减少，降低了荧光粉的热效应。因此，通过上述这种荧光材料和金反射层相配合的方式能够在不需要滤光片的情况下，实现高亮度红光，降低了成本的同时，也可以实现更为紧凑的光学结构。On the other hand, referring to the reflectance curve in Figure 2, it can be seen from the reflectance curve of gold without coating on the surface that the gold layer's absorption effect on light with a wavelength shorter than 555nm is equivalent to the function of a filter. In other words, the gold layer reflects back most of the light with wavelengths greater than 555nm, and absorbs most of the light with wavelengths shorter than 555nm. In the present invention, the luminescent layer 11 made of phosphors with a specific doping concentration as described above can cause the stimulated light generated in the luminescent layer 11 to be red-shifted, so that the green light content in the stimulated light is reduced, so the gold reflective layer 12 The absorbed green light is reduced, and the resulting heat is also reduced, reducing the thermal effect of the phosphor. Therefore, through the above-mentioned combination of fluorescent materials and gold reflective layers, high-brightness red light can be achieved without the need for filters, which reduces costs and enables a more compact optical structure.
在上述说明中，仅描述了本发明的发光装置具有红光发光结构，能够发出红光，但是本发明不限于此，除了上述结构之外，本发明的发光装置还可以包括至少一个其他颜色的发光结构，还能够发出至少一种其他颜色的光。例如，本发明的发光装置还可以包括一个第二发光层和一个第二反射层，该第二发光层与上述发光层11共平面设置，该第二反射层与上述反射层12共平面设置，且第二反射层设置在第二发光层下方，第二反射层用于反射第二发光层发出的光。该第二发光层可以是只包含散射粒子的散射层，此时当蓝色激光10照射在第二发光层上时会发生漫反射，从而发出蓝光。可选择地，第二发光层可以包含黄色荧光粉或绿色荧光粉，此时当蓝色激光10照射在第二发光层上时，第二发光层会吸收激发光并发出黄色光或绿色光。当然，第二发光层也可以同时包含散射粒子、黄色荧光粉和绿色荧光粉中的任意两种或者同时包含这三种，此时优选分区域设置散射粒子、黄色荧光粉和绿色荧光粉。也就是说，第二发光层形成有分别富集散射粒子、黄光荧光粉和绿光荧光粉的三个区域，当蓝色激光10分别照射在上述三个区域时，将分别发出蓝光、黄光和绿光。In the above description, it is only described that the light-emitting device of the present invention has a red light-emitting structure and can emit red light. However, the present invention is not limited thereto. In addition to the above structure, the light-emitting device of the present invention may also include at least one other color. The light-emitting structure can also emit light of at least one other color. For example, the light-emitting device of the present invention may further include a second light-emitting layer and a second reflective layer. The second light-emitting layer is co-planar with the above-mentioned light-emitting layer 11, and the second reflective layer is co-planar with the above-mentioned reflective layer 12. And the second reflective layer is disposed below the second luminescent layer, and the second reflective layer is used to reflect the light emitted by the second luminescent layer. The second luminescent layer may be a scattering layer containing only scattering particles. In this case, when the blue laser 10 is irradiated on the second luminescent layer, diffuse reflection will occur, thereby emitting blue light. Alternatively, the second luminescent layer may contain yellow phosphor or green phosphor. When the blue laser 10 irradiates the second luminescent layer, the second luminescent layer will absorb the excitation light and emit yellow light or green light. Of course, the second light-emitting layer may also contain any two or three of the scattering particles, yellow phosphor and green phosphor at the same time. In this case, it is preferable to arrange the scattering particles, yellow phosphor and green phosphor in different regions. That is to say, the second light-emitting layer is formed with three areas where scattering particles, yellow phosphors and green phosphors are respectively enriched. When the blue laser 10 is irradiated on the above three areas respectively, blue light, yellow light and yellow light will be emitted respectively. light and green light.
下面参照本发明的具体实施例进行说明。The following description will be made with reference to specific embodiments of the present invention.
实施例1(具有固定式红光发光模块的发光装置)Embodiment 1 (Light-emitting device with fixed red light-emitting module)
根据本发明实施例1的具有固定式红光发光模块的发光装置的结构的示意图如图3所示，该发光装置的固定式红光发光模块由发光层41、反射层42、焊接层43和导热基板44构成。焊接层43设置在导热基板44上。反射层42设置在焊接层43上。发光层41设置在反射层42上。在本实施例中，发光层41具体由作为发光部分的发光陶瓷构成，其中发光陶瓷优选为Ce3+掺杂浓度为1.2mol％的Y3Al5O12纯相陶瓷或Al2O3-Y3Al5O12复相陶瓷，或者Ce3+掺杂浓度大于0.5mol％并且Gd3+掺杂浓度大于10mol％的(Y,Gd)3Al5O12纯相陶瓷或Al2O3-(Y,Gd)3Al5O12复相陶瓷，又或者发光陶瓷选择为α-SiAlON:Eu2+陶瓷或(Sr,Ca)AlSiN3:Eu2+陶瓷。该发光陶瓷受到激光光源的蓝色激光(激发光)45的激发之后，发射主波长大于555nm的荧光。该发光装置的反射层42主要用于对由上述发光陶瓷制成的发光层41中产生的红光(受激发光)46起反射作用，该反射层42由反射金属金(Au)构成。A schematic diagram of the structure of a light-emitting device with a fixed red light-emitting module according to Embodiment 1 of the present invention is shown in Figure 3. The fixed red light-emitting module of the light-emitting device consists of a light-emitting layer 41, a reflective layer 42, a welding layer 43 and Thermal conductive substrate 44 is formed. The soldering layer 43 is provided on the thermally conductive substrate 44 . The reflective layer 42 is provided on the welding layer 43 . The light-emitting layer 41 is provided on the reflective layer 42 . In this embodiment, the light-emitting layer 41 is specifically composed of a light-emitting ceramic as a light-emitting part, wherein the light-emitting ceramic is preferably Y3 Al5 O12 pure phase ceramic or Al2 O3 - with a Ce3+ doping concentration of 1.2 mol%. Y3 Al5 O12 complex phase ceramics, or (Y,Gd)3 Al5 O12 pure phase ceramics or Al2 O3 with a Ce3+ doping concentration greater than 0.5 mol% and a Gd3+ doping concentration greater than 10 mol%. -(Y,Gd)3 Al5 O12 composite phase ceramics, or the luminescent ceramics are α-SiAlON:Eu2+ ceramics or (Sr,Ca)AlSiN3 :Eu2+ ceramics. After being excited by the blue laser (excitation light) 45 of the laser light source, the luminescent ceramic emits fluorescence with a dominant wavelength greater than 555 nm. The reflective layer 42 of the light-emitting device is mainly used to reflect the red light (stimulated light) 46 generated in the light-emitting layer 41 made of the above-mentioned luminescent ceramic. The reflective layer 42 is composed of reflective metal gold (Au).
如上所述，与银反射层相比，由金构成的反射层42具有以下优点：一方面，由于金为惰性金属，热稳定性及化学稳定性更强，所以由金构成的反射层42的使用可靠性增加；另一方面，金对波长大于555nm的光的反射率超过80％，而对波长低于500nm的光的反射率只有50％左右，这种选择性反射的特性使得其反射光中波长大于555nm的光的相对强度更高，也就是说，发光装置中红光的亮度更高。焊接层43主要是用于将发光层41和反射层42与导热基板44焊合，使得易于发光装置的热量的传递，焊接层43的焊料优选为金锡、银锡、铋锡合金。导热基板44主要是用于将发光模块中的热量传递出去，其优选为铜基板或者表面镀镍金的铜基板，也可以是镀镍金的碳化硅或氮化铝基板。As mentioned above, compared with the silver reflective layer, the reflective layer 42 composed of gold has the following advantages: on the one hand, since gold is an inert metal and has stronger thermal stability and chemical stability, the reflective layer 42 composed of gold has better Increased reliability in use; on the other hand, the reflectivity of gold for light with wavelengths greater than 555nm exceeds 80%, while the reflectivity for light with wavelengths below 500nm is only about 50%. This selective reflection characteristic makes it reflect light The relative intensity of light with a medium wavelength greater than 555nm is higher, that is to say, the brightness of red light in the light-emitting device is higher. The welding layer 43 is mainly used to weld the light-emitting layer 41 and the reflective layer 42 to the thermally conductive substrate 44 to facilitate the heat transfer of the light-emitting device. The solder of the welding layer 43 is preferably gold-tin, silver-tin, or bismuth-tin alloy. The thermally conductive substrate 44 is mainly used to transfer heat out of the light-emitting module. It is preferably a copper substrate or a copper substrate with a nickel-gold plated surface. It may also be a nickel-gold-plated silicon carbide or aluminum nitride substrate.
根据本发明实施例1的发光装置为红光发光效率高、结构紧凑并且散热性能优良的发光装置。The light-emitting device according to Embodiment 1 of the present invention is a light-emitting device with high red light luminous efficiency, compact structure and excellent heat dissipation performance.
本发明的实施例2(转动式荧光色轮)Embodiment 2 of the present invention (rotating fluorescent color wheel)
在根据本发明的实施例2中，提供了一种转动式荧光色轮，其结构示意图如图4所示，该转动式荧光色轮包括环形的导热基板55、焊接层54、反射层(包括共平面设置的红光反射层52a、绿光反射层52b、蓝光反射层52c和黄光反射层52d)和发光层(包括共平面设置的红光发光层51a、绿光发光层51b、蓝光发光层51c和黄光发光层51d)。焊接层54设置于导热基板55上。红光反射层52a、绿光反射层52b、蓝光反射层52c和黄光反射层52d分别设置在焊接层54的不同部分上。红光发光层51a设置于红光反射层52a上。绿光发光层51b、蓝光发光层51c和黄光发光层51d分别设置在绿光反射层52b、蓝光反射层52c和黄光反射层52d上。红光发光层51a与红光反射层52a构成红光发光模块；绿光发光层51b与绿光反射层52b构成绿光发光模块；蓝光发光层51c与蓝光反射层52c构成蓝色发光模块；黄光发光层51d与黄光反射层52d构成黄光发光模块。In Embodiment 2 according to the present invention, a rotating fluorescent color wheel is provided, the structural diagram of which is shown in Figure 4. The rotating fluorescent color wheel includes an annular thermally conductive substrate 55, a welding layer 54, a reflective layer (including The red light reflective layer 52a, the green light reflective layer 52b, the blue light reflective layer 52c and the yellow light reflective layer 52d arranged coplanarly) and the luminescent layer (including the red light luminescent layer 51a, the green light luminescent layer 51b, the blue light luminescent layer 51b arranged coplanarly) layer 51c and yellow light emitting layer 51d). The soldering layer 54 is provided on the thermally conductive substrate 55 . The red light reflective layer 52a, the green light reflective layer 52b, the blue light reflective layer 52c and the yellow light reflective layer 52d are respectively disposed on different parts of the welding layer 54. The red light emitting layer 51a is provided on the red light reflecting layer 52a. The green light emitting layer 51b, the blue light emitting layer 51c and the yellow light emitting layer 51d are respectively provided on the green light reflecting layer 52b, the blue light reflecting layer 52c and the yellow light reflecting layer 52d. The red light emitting layer 51a and the red light reflective layer 52a constitute a red light emitting module; the green light emitting layer 51b and the green light reflective layer 52b constitute a green light emitting module; the blue light emitting layer 51c and the blue light reflective layer 52c constitute a blue light emitting module; yellow The light emitting layer 51d and the yellow light reflecting layer 52d constitute a yellow light emitting module.
在本实施例中，转动式荧光色轮的发光部分是由红光发光模块、绿光发光模块、蓝光发光模块和黄光发光模块四个发光模块构成的。四个发光模块单独制作后通过焊接层54粘接到导热基板55上以形成荧光色轮，该导热基板55可以为铝。发光模块均选用可被激发光激发、产生相应颜色荧光的荧光材料，例如，可以选用玻璃封装的红色荧光粉、绿色荧光粉、蓝色荧光粉以及黄色荧光粉或者由这些荧光粉烧结而成的荧光陶瓷。需要具体说明的是，当激发光全部为蓝光(例如：蓝激光)时，蓝光发光层51c可主要由散射粒子构成，蓝光照射在蓝光发光层51c上后被散射粒子和蓝光反射层52c所反射。此种情况下，绿色荧光粉以及黄色荧光粉为常用荧光粉，而红色荧光粉优选为Ce3+掺杂浓度为1.2mol％的Y3Al5O12或者Ce3+掺杂浓度大于0.5mol％并且Gd3+离子掺杂浓度大于10mol％的(Y,Gd)3Al5O12，又或者是α-SiAlON:Eu2+或(Sr,Ca)AlSiN3:Eu2+。In this embodiment, the light-emitting part of the rotating fluorescent color wheel is composed of four light-emitting modules: a red light-emitting module, a green light-emitting module, a blue light-emitting module and a yellow light-emitting module. The four light-emitting modules are individually manufactured and then bonded to a thermally conductive substrate 55 through a welding layer 54 to form a fluorescent color wheel. The thermally conductive substrate 55 may be aluminum. The light-emitting modules all use fluorescent materials that can be excited by excitation light and produce fluorescence of corresponding colors. For example, glass-encapsulated red phosphors, green phosphors, blue phosphors and yellow phosphors can be used or sintered from these phosphors. Fluorescent ceramics. It should be noted that when the excitation light is all blue light (for example, blue laser), the blue light emitting layer 51c can be mainly composed of scattering particles, and the blue light is reflected by the scattering particles and the blue light reflective layer 52c after being irradiated on the blue light emitting layer 51c. . In this case, green phosphor and yellow phosphor are commonly used phosphors, and the red phosphor is preferably Y3 Al5 O12 with a Ce3+ doping concentration of 1.2 mol% or a Ce3+ doping concentration greater than 0.5 mol. % and the Gd3+ ion doping concentration is greater than 10 mol% of (Y,Gd)3 Al5 O12 , or α-SiAlON:Eu2+ or (Sr,Ca)AlSiN3 :Eu2+ .
该转动式荧光色轮的反射层由不同的材料制成，其中红光反射层52a由金属金(Au)制成，而绿光反射层52b、蓝光反射层52c和黄光反射层52d由于其反射光的热效应较小而由金属银(Ag)制成。此外，由于银性质不稳定，在空气中易被硫化和氧化，因而需要在其外层包裹一层保护材料作为银层的保护层53b、53c以及53d，该保护材料可以选用金属金、铂或者其合金，主要起隔绝空气及水蒸气作用，防止银反射层被硫化和氧化。具体地，保护层53b、53c以及53d设置在绿光反射层52b、蓝光反射层52c和黄光反射层52d与空气的交界处，例如荧光色轮的外沿。焊接层54主要用于将发光层、反射层及保护层与导热基板55焊合起来，使得易于发光模块导热散热，该焊接层优选由金锡、银锡或者铋锡合金构成。导热基板55为色轮的散热部分，主要是用于将发光层中的热量传导出去，因而需要其具有较好的散热性能，例如，可以为碳化硅或氮化铝等陶瓷导热基板，进一步地，为了提高粘接和散热效果，可以在碳化硅基板和氮化铝基板表面镀镍金。The reflective layers of the rotating fluorescent color wheel are made of different materials. The red light reflective layer 52a is made of metallic gold (Au), while the green light reflective layer 52b, blue light reflective layer 52c and yellow light reflective layer 52d are made of metal gold (Au). The thermal effect of reflected light is small and made of metallic silver (Ag). In addition, since silver is unstable in nature and is easily sulfurized and oxidized in the air, it is necessary to wrap a layer of protective material on its outer layer as the protective layers 53b, 53c and 53d of the silver layer. The protective material can be made of metal gold, platinum or Its alloy mainly functions to isolate air and water vapor and prevent the silver reflective layer from being sulfated and oxidized. Specifically, the protective layers 53b, 53c and 53d are provided at the interface between the green light reflective layer 52b, the blue light reflective layer 52c and the yellow light reflective layer 52d and the air, such as the outer edge of the fluorescent color wheel. The welding layer 54 is mainly used to weld the light-emitting layer, the reflective layer and the protective layer to the thermally conductive substrate 55 to facilitate heat conduction and heat dissipation of the light-emitting module. The welding layer is preferably composed of gold-tin, silver-tin or bismuth-tin alloy. Thermal conductive substrate 55 is the heat dissipation part of the color wheel and is mainly used to conduct heat out of the luminescent layer. Therefore, it needs to have good heat dissipation performance. For example, it can be a ceramic thermal conductive substrate such as silicon carbide or aluminum nitride. Further, , in order to improve the bonding and heat dissipation effect, nickel gold can be plated on the surface of silicon carbide substrate and aluminum nitride substrate.
特别地，当绿光发光层51b采用发光波长为510nm的Lu3Al5O12:Ce3+绿色荧光粉，黄光发光层51d采用发光波长为540～555nm Y3Al5O12:Ce3+黄色荧光粉，红光发光层51a采用发光波长长于555nm的Y3Al5O12:Ce3+、(Y,Gd)3Al5O12:Ce3+或者α-SiAlON:Eu2+、(Sr,Ca)AlSiN3:Eu2+荧光粉时，能够实现无修饰片的高效紧凑的荧光色轮结构。In particular, when the green light emitting layer 51b uses Lu3 Al5 O12 : Ce3 + green phosphor with a light emitting wavelength of 510 nm, the yellow light emitting layer 51 d uses Y3 Al5 O12 : Ce3 with a light emitting wavelength of 540 to 555 nm.+ Yellow phosphor, the red light-emitting layer 51a uses Y3 Al5 O12 : Ce3+ , (Y,Gd)3 Al5 O12 : Ce3+ or α-SiAlON: Eu2+ , whose emission wavelength is longer than 555nm. When (Sr,Ca)AlSiN3 :Eu2+ phosphor is used, an efficient and compact fluorescent color wheel structure without modification pieces can be realized.
由于荧光色轮在使用时需要长时间转动，因此对发光层和金属反射层之间的附着力有着较高的要求，此时优选在发光层与金属反射层之间设置可提高两者附着力的过渡层，如镍层或者镍铬合金层，该过渡层厚度小于2nm。Since the fluorescent color wheel needs to rotate for a long time during use, it has high requirements on the adhesion between the luminescent layer and the metal reflective layer. In this case, it is preferably placed between the luminescent layer and the metal reflective layer to improve the adhesion between the two. Transition layer, such as nickel layer or nickel-chromium alloy layer, the thickness of the transition layer is less than 2nm.
使用根据本发明实施例2的转动式荧光色轮能够得到红光发光效率高、高效紧凑的发光装置。Using the rotating fluorescent color wheel according to Embodiment 2 of the present invention, a high-efficiency and compact light-emitting device with high red light luminous efficiency can be obtained.
本发明所列举的各原料，以及本发明各原料的上下限、工艺参数的上下限、区间取值都能实现本发明，在此不一一列举实施例；凡是依据本发明的技术实质对以上实施例所作的任何简单修改或等同变化，均仍属于本发明的技术方案的范围之内。The raw materials listed in the present invention, as well as the upper and lower limits of each raw material, the upper and lower limits of the process parameters, and the interval values of the present invention can realize the present invention. The embodiments are not listed one by one here; all the above are based on the technical essence of the present invention. Any simple modifications or equivalent changes made to the embodiments still fall within the scope of the technical solution of the present invention.
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