CN114397056A - A coaxial pressure sensor - Google Patents

Abstract

The invention discloses a coaxial pressure taking pressure sensor, which comprises a pressure guiding module, wherein a mounting part used for being connected with an external pressure source is arranged below the pressure guiding module, a signal processing module is arranged above the pressure guiding module, two pressure guiding channels and two pressure taking cavities are arranged in the pressure guiding module, the pressure taking cavities are horizontal thin-layer cavities, the two thin-layer cavities are distributed up and down and are parallel to each other, two ends of each pressure guiding channel are respectively provided with a pressure guiding inlet and a pressure guiding outlet, the two pressure guiding inlets correspond to the two pressure taking cavities one by one, the pressure guiding inlets face the corresponding pressure taking cavities, the two pressure guiding inlets are respectively covered with an isolation diaphragm in a sealing mode so as to separate the pressure taking cavities from the pressure guiding inlets, the pressure guiding module is provided with two external pressure channels used for guiding the external pressure source, and the inner ends of the two external pressure channels are respectively communicated with the two pressure taking cavities. Compared with the conventional left and right pressure guiding structure, the pressure guiding module disclosed by the invention is compact in structure and beneficial to reducing the size of the whole sensor.

Description

Translated fromChinese

一种同轴取压压力传感器A coaxial pressure sensor

技术领域technical field

本发明涉及一种压力测量装置，具体涉及一种同轴取压压力传感器。The invention relates to a pressure measuring device, in particular to a coaxial pressure-taking pressure sensor.

背景技术Background technique

压力传感器广泛用于流体压力测量，其依靠压力敏感元件感应外部压力，压力敏感元件再将压力信号转化为电信号，电信号传给信号处理单元以得到压力值。现有的压力传感器根据压力敏感元件的不同可划分为多种类型，常见地有电阻式压力传感器、压电石英晶体型压力传感器、电容式压力传感器等。其中，电容式压力传感器的核心检测元件是膜片式差压传感器。膜片式差压传感器包括两个圆盘状的膜座，两个膜座之间设有测量膜片，两个膜座对焊连接，将测量膜片夹紧。测量膜片与两个膜座之间分别设有用于容纳硅油的感应腔，两个感应腔分别连接有引压管，引压管将外部待测压力引入测量膜片两侧。由于两侧压强不同，测量膜片向压强较小侧变形，变形量的大小反映为电容信号的变化。由于涉及与外部压力源的连接以及静压传导，现有的电容式压力传感器结构相对复杂。Pressure sensors are widely used in fluid pressure measurement. They rely on pressure sensitive elements to sense external pressure. The pressure sensitive elements convert the pressure signals into electrical signals, and the electrical signals are sent to the signal processing unit to obtain the pressure value. Existing pressure sensors can be divided into various types according to different pressure sensitive elements, and commonly there are resistive pressure sensors, piezoelectric quartz crystal pressure sensors, capacitive pressure sensors, and the like. Among them, the core detection element of the capacitive pressure sensor is a diaphragm type differential pressure sensor. The diaphragm type differential pressure sensor includes two disc-shaped diaphragm seats, a measurement diaphragm is arranged between the two diaphragm seats, and the two diaphragm seats are butt welded to clamp the measurement diaphragm. A sensing cavity for accommodating silicone oil is respectively arranged between the measuring diaphragm and the two membrane bases, and the two sensing cavities are respectively connected with a pressure-inducing tube, and the pressure-inducing tube introduces the external pressure to be measured into both sides of the measuring diaphragm. Due to the different pressure on both sides, the measuring diaphragm is deformed to the side with the smaller pressure, and the magnitude of the deformation is reflected as the change of the capacitance signal. Existing capacitive pressure sensors are relatively complex in structure due to the connection to an external pressure source and the conduction of static pressure.

发明内容SUMMARY OF THE INVENTION

有鉴于此，本发明提供了一种同轴取压压力传感器。In view of this, the present invention provides a coaxial pressure sensor.

其技术方案如下：Its technical solutions are as follows:

一种同轴取压压力传感器，包括引压模块，其关键在于，该引压模块的下方设有用于与外部压力源连接的安装部，该引压模块的上方用于安装信号处理模块；A coaxial pressure-taking pressure sensor includes a pressure-inducing module, the key point of which is that a mounting portion for connecting with an external pressure source is arranged below the pressure-inducing module, and a signal processing module is installed above the pressure-inducing module;

所述引压模块内开设有两个引压通道和两个取压腔，所述取压腔为水平薄层空腔，两个所述薄层空腔上下分布并相互平行；The pressure-inducing module is provided with two pressure-inducing channels and two pressure-taking cavities, the pressure-taking cavities are horizontal thin-layer cavities, and the two thin-layer cavities are distributed up and down and parallel to each other;

所述引压通道的两端分别为引压入口和引压出口，其中两个所述引压入口与两个所述取压腔一一对应，所述引压入口朝向相应的所述取压腔；The two ends of the pressure-inducing channel are respectively a pressure-inducing inlet and a pressure-inducing outlet, wherein the two pressure-inducing inlets are in one-to-one correspondence with the two pressure-taking chambers, and the pressure-inducing inlets face the corresponding pressure-taking cavities. cavity;

两个所述引压入口分别密封覆盖有隔离膜片，以将所述取压腔与所述引压入口分隔；The two pressure-inducing inlets are sealed and covered with isolation diaphragms to separate the pressure-taking chamber and the pressure-inducing inlet;

所述引压模块上开设有两个用于将外部压力源引入的外压通道，两个所述外压通道的内端分别与两个所述取压腔连通。Two external pressure channels for introducing an external pressure source are opened on the pressure-inducing module, and the inner ends of the two external pressure channels are respectively communicated with the two pressure-taking chambers.

作为优选技术方案，两个所述取压腔分别为第一薄层空腔和第二薄层空腔；As a preferred technical solution, the two pressure-taking cavities are respectively a first thin-layer cavity and a second thin-layer cavity;

所述引压模块包括圆柱状的引压座，该引压座底面上开设有安装盲孔，所述安装盲孔内固定设置有测量引压块，该测量引压块与所述安装盲孔孔底之间密封围成所述第一薄层空腔；The pressure-inducing module includes a cylindrical pressure-inducing seat, a blind installation hole is opened on the bottom surface of the pressure-inducing seat, and a measurement pressure-inducing block is fixed in the installation blind hole, and the measurement and pressure-inducing block is connected with the installation blind hole. The first thin-layer cavity is sealed between the hole bottoms;

所述引压座的底面上扣盖有下端盖，该下端盖与所述测量引压块下表面之间密封围成所述第二薄层空腔。The bottom surface of the pressure-inducing seat is covered with a lower end cover, and the second thin-layer cavity is sealed and enclosed between the lower end cover and the lower surface of the measurement pressure-inducing block.

作为优选技术方案，上述安装盲孔为多级台阶孔，所述测量引压块呈圆柱状，所述测量引压块的侧壁与所述安装盲孔台阶配合，所述测量引压块的外壁圆周面与所述安装盲孔的内壁圆周面密封焊接。As a preferred technical solution, the installation blind hole is a multi-step stepped hole, the measurement pressure-inducing block is cylindrical, the side wall of the measurement pressure-inducing block is step-fitted with the installation blind hole, and the measurement pressure-inducing block is stepped. The peripheral surface of the outer wall is sealed and welded with the peripheral surface of the inner wall of the blind installation hole.

作为优选技术方案，两个所述引压通道分别为大气引压通道和测量引压通道，其中所述大气引压通道对应的取压腔为大气取压腔，所述测量引压通道对应的取压腔为测量取压腔；As a preferred technical solution, the two pressure-inducing channels are respectively an atmospheric pressure-inducing channel and a measurement pressure-inducing channel, wherein the pressure-taking cavity corresponding to the atmospheric pressure-inducing channel is an atmospheric pressure-inducing cavity, and the measurement pressure-inducing channel corresponding to The pressure taking chamber is the measuring pressure taking chamber;

两个所述引压通道的引压入口分别连接有喇叭口，两个所述喇叭口的开口朝向相应的所述取压腔，两个所述喇叭口上分别密封覆盖有所述隔离膜片；The pressure-inducing inlets of the two pressure-inducing channels are respectively connected with bell mouths, the openings of the two bell mouths face the corresponding pressure-taking chambers, and the isolation diaphragms are respectively sealed and covered on the two bell mouths;

其中，所述安装盲孔的孔底上开设有一个所述喇叭口，该喇叭口与所述大气引压通道的引压入口连通；Wherein, the hole bottom of the blind installation hole is provided with a bell mouth, and the bell mouth is communicated with the pressure-inducing inlet of the atmospheric pressure-inducing channel;

所述测量引压块下表面上开设有另一个所述喇叭口，该喇叭口与所述测量引压通道的引压入口连通。The lower surface of the measurement pressure-inducing block is provided with another bell mouth, and the bell mouth is communicated with the pressure-inducing inlet of the measurement pressure-inducing channel.

作为优选技术方案，上述测量引压块上端面开设有第一扩容槽，该第一扩容槽正对所述大气引压通道引压入口处的所述隔离膜片，该第一扩容槽与所述大气取压腔连通；As a preferred technical solution, the upper end face of the above-mentioned measurement pressure-guiding block is provided with a first capacity expansion groove, the first capacity expansion groove is facing the isolation diaphragm at the pressure-guiding inlet of the atmospheric pressure-guiding channel, and the first capacity expansion groove is connected to the The atmospheric pressure taking chamber is communicated;

所述下端盖内壁开设有第二扩容槽，该第二扩容槽正对所述测量引压通道引压入口处的所述隔离膜片，该第二扩容槽与所述测量取压腔连通。The inner wall of the lower end cap is provided with a second capacity expansion groove, the second capacity expansion groove is facing the isolation diaphragm at the pressure induction inlet of the measurement pressure induction channel, and the second capacity expansion groove is communicated with the measurement pressure acquisition chamber.

作为优选技术方案，两个所述外压通道分别为取压通道和大气通道；As a preferred technical solution, the two external pressure channels are respectively a pressure taking channel and an atmospheric channel;

所述大气取压腔侧壁对应的所述引压座上径向开设有所述大气通道；The atmospheric channel is radially opened on the pressure-inducing seat corresponding to the side wall of the atmospheric pressure-taking chamber;

所述下端盖下表面中心一体成型有柱状的取压接头，所述取压接头与所述下端盖中心贯穿有所述取压通道。The center of the lower surface of the lower end cover is integrally formed with a cylindrical pressure-taking joint, and the pressure-taking channel penetrates through the center of the pressure-taking joint and the lower end cover.

与现有技术相比，本发明的有益效果：与现有常规的左右引压结构相比，本发明的引压模块结构紧凑，有利于缩小整个传感器的尺寸。Compared with the prior art, the beneficial effects of the present invention are: compared with the conventional left and right pressure-inducing structures, the pressure-inducing module of the present invention has a compact structure, which is beneficial to reducing the size of the entire sensor.

附图说明Description of drawings

图1为本发明的第一个视角的结构示意图；1 is a schematic structural diagram of a first viewing angle of the present invention;

图2为本发明的第二个视角的结构示意图；Fig. 2 is the structural representation of the second viewing angle of the present invention;

图3为图2中A-A剖视图；Fig. 3 is A-A sectional view in Fig. 2;

图4为差压传感器模块的结构示意图。FIG. 4 is a schematic structural diagram of a differential pressure sensor module.

具体实施方式Detailed ways

以下结合实施例和附图对本发明作进一步说明。The present invention will be further described below with reference to the embodiments and the accompanying drawings.

如图1～3所示，一种同轴取压压力传感器，包括引压模块，引压模块的下方设有用于与外部压力源连接的安装部，该引压模块的上方用于安装信号处理模块。引压模块的上方设置有差压传感器模块100，所述差压传感器模块100设置有两个引压管160，两个所述引压管160分别与开设在所述引压模块上的两个引压通道连通，所述引压通道的两端分别为引压入口和引压出口，其中两个所述引压出口分别开设于所述引压模块表面，且与两个所述引压管160一一对应并连通，两个所述引压入口均开口于所述引压模块内，所述引压模块内对应两个所述引压入口分别开设有取压腔，两个所述引压入口分别密封覆盖有隔离膜片230，以将所述取压腔与所述引压入口分隔。引压通道内填充液体传压介质如硅油，用于将外部压力传导至差压传感器模块100。As shown in Figures 1 to 3, a coaxial pressure-taking pressure sensor includes a pressure-inducing module. The lower part of the pressure-inducing module is provided with a mounting part for connecting with an external pressure source, and the upper part of the pressure-inducing module is used for installing signal processing. module. A differentialpressure sensor module 100 is arranged above the pressure-inducing module, and the differentialpressure sensor module 100 is provided with two pressure-inducingpipes 160, and the two pressure-inducingpipes 160 are respectively connected with the two pressure-inducingpipes 160 provided on the pressure-inducing module. The pressure-inducing channel is communicated, and the two ends of the pressure-inducing channel are respectively the pressure-inducing inlet and the pressure-inducing outlet, wherein the two pressure-inducing outlets are respectively opened on the surface of the pressure-inducing module, and are connected with the two pressure-inducing pipes. 160 are in one-to-one correspondence and are connected, the two pressure-inducing inlets are both open in the pressure-inducing module, and the pressure-inducing modules are respectively provided with pressure-taking chambers corresponding to the two pressure-inducing inlets, and the two The pressure inlets are respectively sealed and covered withisolation diaphragms 230 to separate the pressure taking chamber from the pressure introduction inlet. The pressure-inducing channel is filled with a liquid pressure-transmitting medium, such as silicone oil, for conducting external pressure to the differentialpressure sensor module 100 .

所述取压腔为水平薄层空腔，两个所述薄层空腔上下分布并相互平行。薄层空腔是指其厚度不超过宽度方向尺寸1/3的腔体。所述引压模块上开设有两个用于将外部压力源引入的外压通道，两个所述外压通道的内端分别与两个所述取压腔连通。The pressure-taking cavity is a horizontal thin-layer cavity, and the two thin-layer cavities are distributed up and down and are parallel to each other. A thin-layer cavity refers to a cavity whose thickness does not exceed 1/3 of the dimension in the width direction. Two external pressure channels for introducing an external pressure source are opened on the pressure-inducing module, and the inner ends of the two external pressure channels are respectively communicated with the two pressure-taking chambers.

本实施例的压力检测传感器用于测量表压，因此两个外压通道分别为取压通道310和大气通道250。所述大气通道250的内端与其中一个所述取压腔连通，外端开口于所述引压模块表面。所述取压通道310的内端与另一所述取压腔连通，所述引压模块上设有取压接头300，所述取压通道310的外端穿出该取压接头300，取压通道310用于将外部流体引入相应的取压腔。The pressure detection sensor in this embodiment is used to measure gauge pressure, so the two external pressure channels are thepressure taking channel 310 and theatmospheric channel 250 respectively. The inner end of theair passage 250 is communicated with one of the pressure-taking chambers, and the outer end is open on the surface of the pressure-inducing module. The inner end of the pressure-takingchannel 310 communicates with the other pressure-taking cavity, the pressure-inducing module is provided with a pressure-takingjoint 300, and the outer end of the pressure-takingchannel 310 passes through the pressure-takingjoint 300, and takes Thepressure channel 310 is used to introduce external fluid into the corresponding pressure taking chamber.

具体地，如图3所示，所述引压模块包括圆柱状的引压座200，该引压座200上方设置有所述差压传感器模块100，两个所述引压出口分别开设于所述引压座200上表面，引压出口处分别设置引压管插座。引压座200上表面开设安装凹槽，安装凹槽内设置差压传感器模块100，差压传感器模块100的两个引压管160分别密封插设在相应的引压管160插座内。差压传感器模块100与安装凹槽的内壁不接触，仅靠两根引压管160支撑而悬空设置。这样设计的目的在于，差压传感器模块100与引压座200之间无紧固装配关系，可以防止装配应力导致差压传感器模块100变形，从而避免因为装配导致差压传感器模块100内的敏感元件即膜片120变形。引压座200上方还用于安装信号处理模块和表头。Specifically, as shown in FIG. 3 , the pressure-inducing module includes a cylindrical pressure-inducingseat 200 , the differentialpressure sensor module 100 is disposed above the pressure-inducingseat 200 , and the two pressure-inducing outlets are respectively opened in the On the upper surface of the pressure-inducingseat 200, pressure-inducing tube sockets are respectively provided at the pressure-inducing outlets. An installation groove is defined on the upper surface of the pressure-inducingseat 200, and the differentialpressure sensor module 100 is arranged in the installation groove. The differentialpressure sensor module 100 is not in contact with the inner wall of the installation groove, and is only supported by two pressure-inducingpipes 160 to be suspended. The purpose of this design is that there is no tight fitting relationship between the differentialpressure sensor module 100 and the pressure-inducingseat 200, which can prevent the differentialpressure sensor module 100 from being deformed due to assembly stress, thereby preventing the sensitive components in the differentialpressure sensor module 100 from being caused by assembly. That is, thediaphragm 120 is deformed. The top of thepressing base 200 is also used for installing a signal processing module and a meter.

所述引压座200下端设置有所述取压接头300，所述取压接头300的连接端朝下，沿着所述取压接头300的轴向开设有所述取压通道310，所述取压通道310的上端正对与其连通的所述取压腔。The lower end of the pressure-inducingseat 200 is provided with the pressure-takingjoint 300 , the connecting end of the pressure-taking joint 300 faces downward, and the pressure-takingchannel 310 is opened along the axial direction of the pressure-takingjoint 300 . The upper end of the pressure-takingchannel 310 is facing the pressure-taking cavity communicated with it.

在使用时，取压接头300直接与待测压力源连接，方便直接观察表头示数。When in use, thepressure tap 300 is directly connected to the pressure source to be measured, which is convenient to directly observe the indication of the meter.

如图3所示，两个所述引压通道分别为大气引压通道220和测量引压通道210，其中所述大气引压通道220对应的取压腔为大气取压腔240，所述测量引压通道210对应的取压腔为测量取压腔260。两个所述引压通道的引压入口分别连接有喇叭口，两个所述喇叭口的开口朝向相应的所述取压腔，两个所述喇叭口上分别密封覆盖有所述隔离膜片230。大气引压通道220用于将环境气压引入大气取压腔240，测量引压通道210将待测流体引入测量取压腔260。这样，差压传感器模块100测得的为表压。As shown in FIG. 3 , the two pressure-inducing channels are the atmospheric pressure-inducingchannel 220 and the measurement pressure-inducingchannel 210 respectively, wherein the pressure-taking cavity corresponding to the atmospheric pressure-inducingchannel 220 is the atmospheric pressure-inducingcavity 240 . The pressure-taking cavity corresponding to the pressure-inducingchannel 210 is the measurement pressure-takingcavity 260 . The pressure-inducing inlets of the two pressure-inducing channels are respectively connected with bell mouths, the openings of the two bell mouths face the corresponding pressure-taking chambers, and theisolation diaphragms 230 are respectively sealed and covered on the two bell mouths. . Theatmospheric pressure channel 220 is used to introduce ambient air pressure into theatmospheric pressure chamber 240 , and themeasurement pressure channel 210 introduces the fluid to be measured into themeasurement pressure chamber 260 . In this way, the differentialpressure sensor module 100 measures the gauge pressure.

引压座200具体结构为：引压座200底面上开设有安装盲孔，该安装盲孔的孔底上开设有一个所述喇叭口，该喇叭口与所述大气引压通道220的引压入口连通。所述安装盲孔内固定设置有测量引压块，该测量引压块与所述安装盲孔孔底之间密封围成第一薄层空腔，该第一薄层空腔形成所述大气取压腔240。The specific structure of the pressure-inducingseat 200 is as follows: a blind installation hole is formed on the bottom surface of the pressure-inducingseat 200; The entrance is connected. A measurement pressure-inducing block is fixed in the blind installation hole, and a first thin-layer cavity is sealed between the measurement pressure-inducing block and the bottom of the installation blind hole, and the first thin-layer cavity forms theatmosphere Pressure chamber 240.

所述大气引压通道220包括开设于所述引压座200上的两个第一竖向段，两个第一竖向段上下隔开，位于上方的第一竖向段上端形成所述大气引压通道220的引压出口，位于上方的第一竖向段下端与位于下方的第一竖向段上端之间连接有第一横向段，位于下方的第一竖向段下端形成所述大气引压通道220的引压入口。The atmosphericpressure guiding channel 220 includes two first vertical sections opened on thepressure guiding seat 200, the two first vertical sections are spaced up and down, and the upper end of the first vertical section located above forms the atmosphere. At the pressure-inducing outlet of the pressure-inducingchannel 220, a first transverse section is connected between the lower end of the first vertical section located above and the upper end of the first vertical section located below, and the lower end of the first vertical section located below forms the atmosphere The suction inlet of thesuction channel 220 .

所述测量引压块上端面开设有第一扩容槽，该第一扩容槽正对所述大气引压通道220引压入口处的所述隔离膜片230，该第一扩容槽与所述大气取压腔240连通，以增大大气取压腔240的容积，使得大气压力更灵敏地作用于相应的隔离膜片230。The upper end surface of the measurement pressure-inducing block is provided with a first capacity expansion groove, and the first capacity expansion groove is facing theisolation diaphragm 230 at the pressure inlet of the atmosphericpressure induction channel 220 , and the first capacity expansion groove is connected to the atmosphere. Thepressure taking chambers 240 are connected to increase the volume of the atmosphericpressure taking chamber 240 , so that the atmospheric pressure acts on thecorresponding isolation diaphragm 230 more sensitively.

所述大气取压腔240侧壁对应的所述引压座200上径向开设有所述大气通道250。Theatmospheric channel 250 is radially opened on the pressure-inducingseat 200 corresponding to the side wall of the atmospheric pressure-takingchamber 240 .

所述测量引压块下表面上开设有一个所述喇叭口，该喇叭口与所述测量引压通道210的引压入口连通，所述测量引压通道210开设在所述测量引压块和所述引压座200上。所述引压座200的下端面上扣盖有下端盖301，该下端盖301与所述测量引压块下表面之间围成密封的第二薄层空腔，该第二薄层空腔形成所述测量取压腔260。A described bell mouth is opened on the lower surface of the described measurement pressure-inducing block, and this bell mouth is communicated with the pressure-inducing inlet of the described measurement pressure-inducingchannel 210, and the measurement pressure-inducingchannel 210 is opened on the measurement pressure-inducing block and the pressure-inducing inlet. on the pressure-inducingseat 200 . Alower end cover 301 is buckled on the lower end surface of the pressure-inducingseat 200, and a sealed second thin-layer cavity is enclosed between the lower-end cover 301 and the lower surface of the measurement pressure-inducing block. The second thin-layer cavity The measurementpressure taking cavity 260 is formed.

所述测量引压通道210包括开设于所述引压座200上的位于上方的第二竖向段，以及开设于所述测量引压块上的位于下方的第二竖向段。位于上方的所述第二竖向段上端形成所述测量引压通道210的引压出口，位于下方的所述第二竖向段下端形成所述测量引压通道210的引压入口。所述测量引压块具有连通腔270，该连通腔270将位于上方的所述第二竖向段下端和位于下方的所述第二竖向段连通。The measurement and pressure-inducingchannel 210 includes a second upper vertical section opened on the pressure-inducingseat 200 and a lower second vertical section opened on the measurement pressure-inducing block. The upper end of the second vertical section located above forms the pressure-inducing outlet of the measurement pressure-inducingchannel 210 , and the lower end of the second vertical section located below forms the pressure-inducing inlet of the measurement pressure-inducingchannel 210 . The measuring and pressing block has acommunication cavity 270, and thecommunication cavity 270 communicates the lower end of the second vertical section located above and the second vertical section located below.

为方便在引压座200内形成引压通道以及取压腔：所述安装盲孔为多级台阶孔，所述测量引压块包括圆柱状的上块体201和下块体202，所述下块体202的直径大于所述上块体201直径。所述上块体201与所述安装盲孔上段通过台阶定位并且圆周面之间焊接密封，所述下块体202与所述安装盲孔下段也通过台阶定位并且圆周面之间焊接密封。所述上块体201下表面和所述下块体202上表面之间分隔开，从而与所述安装盲孔内壁之间围成所述连通腔270，位于下方的所述第二竖向段开设在所述下块体202中心，位于下方的所述第二竖向段上端与连通腔270连接，下端连接相应的喇叭口。In order to facilitate the formation of a pressure-inducing channel and a pressure-taking cavity in the pressure-inducing seat 200: the installation blind hole is a multi-step stepped hole, and the measurement pressure-inducing block includes a cylindrical upper block 201 and a lower block 202. The diameter of the lower block 202 is larger than the diameter of the upper block 201 . The upper block 201 and the upper section of the blind mounting hole are positioned by steps and welded and sealed between the circumferential surfaces, and the lower block 202 and the lower section of the blind mounting hole are also positioned by steps and welded and sealed between the circumferential surfaces. The lower surface of the upper block 201 and the upper surface of the lower block 202 are separated, so that thecommunication cavity 270 is enclosed with the inner wall of the blind installation hole, and the second vertical The segment is opened in the center of the lower block body 202, the upper end of the second vertical segment located below is connected to thecommunication cavity 270, and the lower end is connected to the corresponding bell mouth.

所述下端盖301内壁开设有第二扩容槽，该第二扩容槽正对所述测量引压通道210引压入口处的所述隔离膜片230，该第二扩容槽与所述测量取压腔260连通，以扩大测量取压腔260的容积，便于外部待测流体压力更灵敏地作用于相应的隔离膜片230。The inner wall of thelower end cover 301 is provided with a second capacity expansion groove, the second capacity expansion groove is facing theisolation diaphragm 230 at the pressure inlet of themeasurement pressure channel 210, and the second capacity expansion groove is connected to the measurement pressure Thecavity 260 is connected to expand the volume of the measurement pressure-takingcavity 260, so that the external fluid pressure to be measured can act on thecorresponding isolation diaphragm 230 more sensitively.

所述下端盖301与所述引压座200下端侧壁螺纹密封连接。所述下端盖301下表面中心一体成型有柱状的取压接头300，所述取压接头300与所述下端盖301中心贯穿有取压通道310。所述取压接头300下端部外壁加工有连接螺纹320，以便于与外部压力源通过螺纹直接连接。取压接头300上端外壁为外六角形330，便于拧转操作。Thelower end cover 301 is connected to the lower end sidewall of the pressure-inducingseat 200 in a screw-tight manner. A cylindrical pressure-taking joint 300 is integrally formed in the center of the lower surface of thelower end cover 301 , and a pressure-takingchannel 310 penetrates through the center of the pressure taking joint 300 and thelower end cover 301 . A connectingthread 320 is processed on the outer wall of the lower end of the pressure-taking joint 300 so as to be directly connected with an external pressure source through a thread. The outer wall of the upper end of the pressure-taking joint 300 is anouter hexagon 330, which is convenient for screwing operation.

上述压力检测传感器的引压结构简洁紧凑，且使用时与外部压力源连接非常方便，易于使用。The pressure-inducing structure of the above-mentioned pressure detection sensor is simple and compact, and it is very convenient to connect with an external pressure source during use, and is easy to use.

为提高电容式差压传感器的测量精度从而提高压力检测传感器的检测精度，差压传感器模块100相对于传统电容式差压传感器进行了结构改进。In order to improve the measurement accuracy of the capacitive differential pressure sensor and thus the detection accuracy of the pressure detection sensor, the differentialpressure sensor module 100 is improved in structure compared with the traditional capacitive differential pressure sensor.

如图4，所述差压传感器模块100内设有由膜片120分隔形成的两个密封的感应腔130，每个所述感应腔130分别连接有引压管160。所述差压传感器模块100分别对应其感应腔130设置有静压补偿结构。As shown in FIG. 4 , the differentialpressure sensor module 100 is provided with two sealedsensing chambers 130 separated by adiaphragm 120 , and each of thesensing chambers 130 is respectively connected with a pressure-inducingtube 160 . The differentialpressure sensor modules 100 are respectively provided with static pressure compensation structures corresponding to thesensing chambers 130 thereof.

差压传感器模块100包括两个圆盘状的第一膜座110，两个所述第一膜座110之间夹设有金属材质的膜片120，两个所述第一膜座110边缘对焊连接以将所述膜片120固定，每个所述第一膜座110与所述膜片120之间形成密封的感应腔130，每个所述感应腔130分别连接有所述引压管160。The differentialpressure sensor module 100 includes two disc-shapedfirst diaphragm bases 110 , ametal diaphragm 120 is sandwiched between the twofirst diaphragm bases 110 , and the edges of the twofirst diaphragm bases 110 are opposite to each other. Soldering to fix thediaphragm 120, a sealedinduction cavity 130 is formed between each of thefirst diaphragm base 110 and thediaphragm 120, and each of theinduction chambers 130 is respectively connected with the pressure-inducingtube 160.

静压补偿结构用于抑制第一膜座110在感应腔130内液体高压作用下向外变形。静压补偿结构包括设置在每个所述第一膜座110外的第二膜座140，所述第二膜座140与相应的所述第一膜座110外侧边缘密封固定连接，所述第二膜座140与相应的所述第一膜座110之间围成稳压腔150，所述稳压腔150与位于所述膜片120同侧的所述感应腔130连通。The static pressure compensation structure is used to restrain the outward deformation of thefirst diaphragm seat 110 under the action of the high pressure of the liquid in theinduction chamber 130 . The static pressure compensation structure includes asecond diaphragm seat 140 disposed outside each of thefirst diaphragm seats 110 , thesecond diaphragm seat 140 is sealed and fixedly connected with the corresponding outer edge of thefirst diaphragm seat 110 , and thefirst diaphragm seat 140 is sealed and fixed. A pressure-stabilizing cavity 150 is enclosed between the twomembrane bases 140 and the correspondingfirst membrane bases 110 , and the pressure-stabilizing cavity 150 communicates with thesensing cavity 130 located on the same side of thediaphragm 120 .

所述第二膜座140与所述第一膜座110结构相同。所述第一膜座110朝向所述膜片120一侧开有凹槽，所述第二膜座140上的凹槽朝向相应的所述第一膜座110外侧面。每个所述感应腔130连接的所述引压管160向外先后密封穿过所述第一膜座110和第二膜座140，并在相应的稳压腔150内开口。Thesecond membrane base 140 has the same structure as thefirst membrane base 110 . Thefirst membrane base 110 has a groove on the side facing themembrane sheet 120 , and the groove on thesecond membrane base 140 faces the corresponding outer side of thefirst membrane base 110 . The pressure-inducingtubes 160 connected to each of thesensing chambers 130 are sealed outward and pass through thefirst diaphragm seat 110 and thesecond diaphragm seat 140 successively, and open in the corresponding pressure-stabilizing chamber 150 .

每个所述第一膜座110的内侧面上分别设有镀膜电极。每个第一膜座110内侧面的镀膜电极以及与其正对的膜片120相应侧面组成一个第一电容，即测量电容。每个所述第一膜座110的镀膜电极分别连接有第一信号引线170，所述第一信号引线170分别密封穿出所述第一膜座110。Coated electrodes are respectively provided on the inner surface of each of the first membrane bases 110 . The coated electrode on the inner side of eachfirst diaphragm 110 and the corresponding side of thediaphragm 120 opposite to it form a first capacitance, that is, a measurement capacitance. The plated electrodes of each of thefirst membrane bases 110 are respectively connected with first signal leads 170 , and the first signal leads 170 are sealed and pass through thefirst membrane base 110 respectively.

所述第二膜座140的内侧面上也设有镀膜电极，每个所述第一膜座110的外侧面为金属面，第二膜座140的镀膜电极与第一膜座110的外侧面形成第二电容，即补偿电容。每个所述第二膜座140的镀膜电极连接有第二信号引线180，所述第二信号引线180分别密封穿出所述第二膜座140。The inner surface of thesecond membrane base 140 is also provided with a coating electrode, the outer surface of each of thefirst membrane bases 110 is a metal surface, and the coating electrode of thesecond membrane base 140 is connected to the outer surface of thefirst membrane base 110 . A second capacitor, ie, a compensation capacitor, is formed. Asecond signal lead 180 is connected to the plated electrode of each of thesecond membrane bases 140 , and the second signal leads 180 are sealed and pass through thesecond membrane base 140 respectively.

本实施例中，所述第二膜座140的结构与所述第一膜座110相同。所述第一膜座110包括玻璃材质的内圆盘111和金属材质的外圆盘112，所述内圆盘111的内侧面上开设有凹槽，所述内圆盘111与所述外圆盘112熔结，所述内圆盘111的外侧面和边缘被所述外圆盘112覆盖。两个所述第一膜座110的外圆盘112的边缘夹持所述膜片120并焊接连接。所述第二膜座140上的凹槽朝向相应的所述第一膜座110外侧面。In this embodiment, the structure of thesecond membrane base 140 is the same as that of thefirst membrane base 110 . Thefirst membrane base 110 includes aninner disk 111 made of glass and anouter disk 112 made of metal. A groove is formed on the inner side of theinner disk 111 . Theinner disk 111 is connected to the outer disk. Thedisk 112 is sintered, and the outer side surface and edge of theinner disk 111 are covered by theouter disk 112 . The edges of theouter disks 112 of the twofirst diaphragm bases 110 clamp thediaphragms 120 and are connected by welding. The grooves on thesecond membrane bases 140 face the corresponding outer surfaces of the first membrane bases 110 .

内圆盘111内侧凹槽的槽底面上加工有镀膜电极。Coated electrodes are processed on the groove bottom surface of the inner groove of theinner disk 111 .

所述内圆盘111局部向外延伸出所述外圆盘112的外壁圆周面，从而形成延伸块113，所述第一信号引线170从所述内圆盘111内向外经所述延伸块113引出，从而使第一信号引线170以及镀膜电极均与外圆盘112绝缘。这样的结构主要从工艺角度考虑，制造第一膜座110时，第一信号引线170被包埋在内圆盘111内一体成型。第二信号引线180在第二膜座140上的安装结构与第一信号引线170相同。Theinner disk 111 partially extends outward from the outer circumferential surface of theouter disk 112 to form anextension block 113 , and thefirst signal lead 170 passes from theinner disk 111 to the outside through theextension block 113 lead out, so that thefirst signal lead 170 and the coating electrode are insulated from theouter disk 112 . Such a structure is mainly considered from a process point of view. When manufacturing thefirst membrane base 110 , thefirst signal lead 170 is embedded in theinner disk 111 and integrally formed. The mounting structure of thesecond signal lead 180 on thesecond membrane base 140 is the same as that of thefirst signal lead 170 .

所述第一信号引线170或第二信号引线180与相应镀膜电极的连接点靠近对应凹槽的边缘，以便于加工。The connection point between thefirst signal lead 170 or thesecond signal lead 180 and the corresponding plated electrode is close to the edge of the corresponding groove, so as to facilitate processing.

传感器组装完成后，金属材质的所有外圆盘112与膜片120焊接，形成一个导体，所有外圆盘112与膜片120连接同一电容引线，该电容引线与第一信号引线170形成测量电容的两个引线，该电容引线与第二信号引线180形成补偿电容的两个引线。所有第一信号引线170、第二信号引线180以及电容引线均连接至外部信号处理电路。After the sensor is assembled, all theouter disks 112 made of metal are welded with thediaphragm 120 to form a conductor, and all theouter disks 112 and thediaphragm 120 are connected to the same capacitor lead, which forms a capacitance measurement lead with thefirst signal lead 170. Two leads, the capacitor lead and thesecond signal lead 180 form two leads of the compensation capacitor. All of thefirst signal lead 170, thesecond signal lead 180, and the capacitor lead are connected to an external signal processing circuit.

在压力差存在的条件下，膜片120向压力较小侧变形，从而引起两个第一电容的电容大小改变，形成的电容变化信号分别从第一信号引线170传导至外部信号处理电路，从而用于计算压力。对于每个第一膜座110，由于其两侧的稳压腔150与感应腔130内液压始终一致，因此可以抑制高压状态下第一膜座110向外变形，从而提高测量精度。这是从机械角度提高测量精度。In the presence of the pressure difference, thediaphragm 120 is deformed to the side with the lower pressure, thereby causing the capacitance of the two first capacitors to change, and the formed capacitance change signals are respectively conducted from thefirst signal lead 170 to the external signal processing circuit, thereby Used to calculate pressure. For eachfirst diaphragm 110 , since the hydraulic pressure in the pressure-stabilizing chambers 150 on both sides and thesensing chamber 130 are always consistent, the outward deformation of thefirst diaphragm 110 under high pressure can be suppressed, thereby improving the measurement accuracy. This is to improve measurement accuracy from a mechanical point of view.

由于硅油是第二电容两极板之间的介质，当其温度发生变化时介电常数将发生变化，从而使第二电容的电容大小改变。同时，虽然第一膜座110的向外变形被抑制，但第一膜座110受到的液体压力被传递至膜片120同侧的第二膜座140，于是第二膜座140发生微弱的向外变形，这样也使得第二电容的电容大小改变。形成的电容变化信号分别从第二信号引线180传导至外部信号处理电路。这一信号可以用于检测硅油温度、静压等参数，也可以代入压力值的计算，用于修正基于第一电容测得的差压值，进一步从电学角度提高传感器的测量精度。Since the silicone oil is the medium between the two electrode plates of the second capacitor, the dielectric constant will change when its temperature changes, so that the capacitance of the second capacitor changes. At the same time, although the outward deformation of thefirst diaphragm seat 110 is suppressed, the liquid pressure received by thefirst diaphragm seat 110 is transmitted to thesecond diaphragm seat 140 on the same side of thediaphragm 120 , so that thesecond diaphragm seat 140 is weakly moved toward thediaphragm 140 . external deformation, which also changes the capacitance of the second capacitor. The formed capacitance change signals are respectively conducted from the second signal leads 180 to external signal processing circuits. This signal can be used to detect parameters such as silicone oil temperature and static pressure, and can also be substituted into the calculation of the pressure value to correct the differential pressure value measured based on the first capacitor, further improving the measurement accuracy of the sensor from an electrical point of view.

引压管160的一种具体的结构为：引压管160包括直管161和弯管162。其中直管161穿设在所述第一膜座110中心，该直管161的两端分别开口于所述内圆盘111的凹槽槽底面和外圆盘112外侧面，该直管161管壁与所述内圆盘111和外圆盘112密封。A specific structure of the pressure-inducingtube 160 is as follows: the pressure-inducingtube 160 includes astraight tube 161 and acurved tube 162 . Thestraight tube 161 is inserted through the center of thefirst membrane base 110 , and the two ends of thestraight tube 161 are respectively opened to the bottom surface of the groove groove of theinner disc 111 and the outer surface of theouter disc 112 . The walls are sealed with saidinner disc 111 andouter disc 112 .

所述第二膜座140中心穿设有所述弯管162，该弯管162的内端开口于所述第二膜座140的凹槽槽底面，该弯管162的内端与所述直管161的外端正对，该弯管162的外端向外穿出所述第二膜座140，该弯管162的外壁与所述第二膜座140密封。Theelbow 162 is penetrated in the center of thesecond membrane base 140 . The outer ends of thepipes 161 are facing each other, the outer ends of theelbows 162 pass out of thesecond membrane base 140 , and the outer walls of theelbows 162 are sealed with the second membrane bases 140 .

最后需要说明的是，上述描述仅仅为本发明的优选实施例，本领域的普通技术人员在本发明的启示下，在不违背本发明宗旨及权利要求的前提下，可以做出多种类似的表示，这样的变换均落入本发明的保护范围之内。Finally, it should be noted that the above description is only a preferred embodiment of the present invention, and those of ordinary skill in the art can make a variety of similar It is indicated that such transformations fall within the protection scope of the present invention.

Claims (6)

1. The utility model provides a coaxial pressure sensor of getting, includes and draws pressure module, its characterized in that: an installation part used for being connected with an external pressure source is arranged below the pressure leading module, and a signal processing module is arranged above the pressure leading module;

the pressure guiding module is internally provided with two pressure guiding channels and two pressure taking cavities, the pressure taking cavities are horizontal thin-layer cavities, and the two thin-layer cavities are vertically distributed and are parallel to each other;

two ends of the pressure guide channel are respectively provided with a pressure guide inlet and a pressure guide outlet, wherein the two pressure guide inlets correspond to the two pressure taking cavities one by one, and the pressure guide inlets face the corresponding pressure taking cavities;

the two pressure introduction inlets are respectively covered with an isolation diaphragm (230) in a sealing way so as to separate the pressure taking cavity from the pressure introduction inlets;

the pressure leading module is provided with two external pressure channels for leading an external pressure source, and the inner ends of the two external pressure channels are respectively communicated with the two pressure taking cavities.

2. A coaxial pressure tapping pressure sensor according to claim 1, wherein: the two pressure taking cavities are respectively a first thin layer cavity and a second thin layer cavity;

the pressure guiding module comprises a cylindrical pressure guiding seat (200), a mounting blind hole is formed in the bottom surface of the pressure guiding seat (200), a measurement pressure guiding block is fixedly arranged in the mounting blind hole, and the first thin-layer cavity is sealed and enclosed between the measurement pressure guiding block and the bottom of the mounting blind hole;

and a lower end cover (301) is buckled and covered on the bottom surface of the pressure guide seat (200), and the second thin-layer cavity is sealed and enclosed between the lower end cover (301) and the lower surface of the measurement pressure guide block.

3. A coaxial pressure tapping pressure sensor according to claim 2, wherein: the mounting blind hole is a multi-stage step hole, the measuring guide pressing block is cylindrical, the side wall of the measuring guide pressing block is matched with the mounting blind hole step, and the circumferential surface of the outer wall of the measuring guide pressing block is welded with the circumferential surface of the inner wall of the mounting blind hole in a sealing mode.

4. A coaxial pressure tapping pressure sensor according to claim 3, wherein: the two pressure leading channels are respectively an atmospheric pressure leading channel (220) and a measurement pressure leading channel (210), wherein a pressure taking cavity corresponding to the atmospheric pressure leading channel (220) is an atmospheric pressure taking cavity (240), and a pressure taking cavity corresponding to the measurement pressure leading channel (210) is a measurement pressure taking cavity (260);

the pressure-inducing inlets of the two pressure-inducing channels are respectively connected with a bell mouth, the openings of the two bell mouths face to the corresponding pressure-taking cavities, and the two bell mouths are respectively covered with the isolation diaphragms (230) in a sealing manner;

the bottom of the mounting blind hole is provided with the bell mouth which is communicated with a pressure introduction inlet of the atmospheric pressure introduction channel (220);

the lower surface of the measurement pressure guiding block is provided with another horn mouth which is communicated with a pressure guiding inlet of the measurement pressure guiding channel (210).

5. A coaxial pressure tapping pressure sensor according to claim 4, wherein: the upper end surface of the measurement pressure guide block is provided with a first capacity expansion groove, the first capacity expansion groove is over against the isolation diaphragm (230) at the pressure guide inlet of the atmosphere pressure guide channel (220), and the first capacity expansion groove is communicated with the atmosphere pressure taking cavity (240);

the inner wall of the lower end cover (301) is provided with a second capacity expansion groove, the second capacity expansion groove is over against the isolation diaphragm (230) at the pressure introduction inlet of the measurement pressure introduction channel (210), and the second capacity expansion groove is communicated with the measurement pressure introduction cavity (260).

6. A coaxial pressure tapping pressure sensor according to claim 4, wherein: the two external pressure channels are a pressure taking channel (310) and an atmospheric channel (250) respectively;

the atmospheric channel (250) is radially arranged on the pressure guide seat (200) corresponding to the side wall of the atmospheric pressure taking cavity (240);

the pressure measuring device is characterized in that a columnar pressure measuring connector (300) is integrally formed in the center of the lower surface of the lower end cover (301), and the pressure measuring channel (310) penetrates through the centers of the pressure measuring connector (300) and the lower end cover (301).

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