Detailed Description
Some embodiments of the present disclosure will be described below with reference to the accompanying drawings. It will be apparent that the described embodiments are merely exemplary embodiments of the present disclosure and not all embodiments.
In the description of the present disclosure, it should be noted that the positional or positional relationship indicated by the terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "top", "bottom", etc. are based on the positional or positional relationship shown in the drawings, are merely for convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present disclosure. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. In the description of the present disclosure, unless explicitly stated and limited otherwise, the terms "mounted," "connected," and "coupled" are to be construed broadly, and may, for example, be fixedly connected or detachably connected, mechanically connected or electrically connected, directly connected or indirectly connected through intermediaries, or communicate between two elements. The specific meaning of the terms in this disclosure will be understood by those of ordinary skill in the art as the case may be.
Fig. 1 illustrates a schematic diagram of a switchable vacuum optic 100 in accordance with some embodiments of the disclosure. Fig. 2 illustrates a structural exploded view of a switchable vacuum optical assembly 100 in accordance with some embodiments of the disclosure.
As shown in fig. 1 and 2, the switchable vacuum optical assembly 100 may include a vacuum receiving chamber 10 and a switching device 20. The vacuum accommodating chamber 10 includes an optical input end 11 and an optical output end 12, and an optical path is formed in the vacuum accommodating chamber 10. The vacuum receiving chamber 10 may be used to receive a working optical element located on an optical path. The optical element may include, for example, one or more of a filter, a lens, a prism, and the like. In this disclosure, a working optical element refers to an optical element that is positioned in the optical path to process or propagate light.
The switching device 20 is connected with the vacuum accommodating chamber 10 in a vacuum sealing manner. As shown in fig. 2, the switching device 20 includes a carrier device 21 and a driving device 22. The carrier 21 may be used to carry a plurality of optical elements. The plurality of optical elements may comprise the same type or different types of optical elements and may be arranged according to actual needs. The driving means 22 may be used to drive the carrying means 21 to switch the working optical element located on the optical path within the vacuum receiving chamber 10.
Those skilled in the art will appreciate that in embodiments of the present disclosure, light from a light source enters the vacuum receiving chamber 10 through the optical input 11, passes through the vacuum receiving chamber 10, and enters the vacuum chamber through the optical output 12, as shown in fig. 4. This is merely exemplary and not limiting.
In some embodiments of the present disclosure, the vacuum receiving chamber 10 is a hollow flange with two open ends, and is cylindrical in shape as a whole, and the optical input end 11 and the optical output end 12 are two open ends. The optical input 11 and the optical output 12 can be used to ensure a sealed connection with the vacuum chamber and the light source without affecting the overall device vacuum.
It will be understood by those skilled in the art that optical input 11 and optical output 12 are relative concepts, with optical input 11 referring to the end of vacuum receiving chamber 10 that receives light and optical output 12 referring to the end of vacuum receiving chamber 10 that outputs light.
In some embodiments of the present disclosure, optical input end 11 includes a first vacuum seal 111 and optical output end 12 includes a second vacuum seal (not shown). The first vacuum seal may comprise a flange or a vacuum seal transparent window. Similarly, the second vacuum seal may also include a flange or a vacuum seal transparent window.
In some embodiments of the present disclosure, a knife edge is provided at the second vacuum sealing structure 121, and can cooperate with a knife edge flange of the vacuum cavity, so that the vacuum accommodating cavity 10 is in vacuum sealing connection with a vacuum cavity window, so as to ensure a vacuum environment in the vacuum cavity.
The first vacuum sealing structure and the second vacuum sealing structure 121 are similar in structure, and only the structure of the second vacuum sealing structure 121 is described here as an example, and the description is omitted.
As shown in fig. 1, in some embodiments of the present disclosure, the vacuum receiving chamber 10 may further include a third vacuum sealing structure 13 that can be used in vacuum sealing connection with the switching device 20.
The third vacuum sealing structure 13 may include a flange provided on a sidewall of the vacuum receiving chamber 10, in communication with the vacuum receiving chamber 10, and in vacuum-tight connection with the switching device 20.
In some embodiments of the present disclosure, the vacuum receiving chamber 10 may further include a viewing window 14. The window 14 is installed on the side wall of the vacuum accommodating cavity 10 through a flange arranged on the vacuum accommodating cavity 10, can be used for observing the condition in the vacuum accommodating cavity 10, is convenient for judging the switching condition of the optical element, and can find out the fault source in time.
Fig. 3 illustrates a partial structural exploded view of a switchable vacuum optical assembly 100 in accordance with some embodiments of the disclosure.
As shown in fig. 3, in some embodiments of the present disclosure, the carrier 21 may include a feed 211. A plurality of optical elements are disposed on the feed 211. In some embodiments, the feed 211 may be elongated, with multiple optical elements disposed side-by-side on the feed 211.
For example, as shown in fig. 3, the feeding member 211 may be a rectangular plate having a width adapted to the inner diameter of the third vacuum sealing structure 13, and may be fed into the vacuum receiving chamber 10 under the driving of the driving device 22. The feeding member 211 has a T-shaped groove 212 formed at one end and an optical element receiving groove 213 (e.g., optical element receiving grooves 213a, 213b, 213c, 213d, 213 e) formed at the other end, and the optical element is mounted in the optical element receiving groove 213 and fed into the vacuum receiving chamber 10 along with the feeding member 211 to be switched to a working optical element.
It will be appreciated by those skilled in the art that although the feed 211 is shown in fig. 3 as a rectangular plate, the feed 211 may be any structure that is compatible with the third vacuum seal arrangement 13. Further, although the optical element accommodation groove 213 is shown in fig. 3 as a circular groove, the optical element accommodation groove 213 may be a square groove, a diamond groove, or the like, which is adapted to the optical element. Similarly, it will be appreciated by those skilled in the art that although the number of optical element receiving grooves 213 shown in fig. 3 is five, the number of optical element receiving grooves 213 may be less than five or greater than five.
In some embodiments of the present disclosure, the drive device 22 may include a linear mechanism coupled to the feed 211 that can be used to drive the feed 211 in linear motion to switch the working optical element in the vacuum receiving chamber 10 on the optical path.
As shown in fig. 1 and 2, in some embodiments of the present disclosure, the linear mechanism includes a first flange 221, a vacuum seal 222 (shown in fig. 1), a bellows 223, and an adjustment assembly 224. The first flange 221 is vacuum-tightly connected to the vacuum receiving chamber 10, and the vacuum seal 222 is connected to the feed 211. A bellows 223 is in vacuum tight connection with the vacuum seal 222 and the first flange 221, and can be used to house the feed 211. The adjustment assembly 224 can be used to adjust the distance between the vacuum seal 222 and the first flange 221 to feed the feed 211.
As shown in fig. 1 and 2, in some embodiments of the present disclosure, the vacuum seal 222 includes a second flange 2221 and a third flange 2222. The second flange 2221 is vacuum-tightly connected to the bellows 223, and the third flange 2222 is vacuum-tightly connected to the second flange 2221 and to the feed 211.
In some embodiments of the present disclosure, the third flange 2222 is connected to the feed 211 by a T-slot 212. As shown in fig. 2 and 3, the third flange 2222 may include a link and a T-piece provided at the end of the link. The T-piece may cooperate with a T-slot 212 on the feed 211 to effect a connection between the third flange 2222 and the feed 211. Those skilled in the art will appreciate that the T-slot connection provides a displacement margin, providing proper buffering for driving of the feed 211, and also relaxing the accuracy requirements for drive control, making operation simpler and more efficient.
Those skilled in the art will appreciate that the inclusion of the second and third flanges 2221, 2222 in the vacuum seal 222 is merely one exemplary configuration, and that in actual practice, the second and third flanges 2221, 2222 may be a unitary structure, with the vacuum seal 222 being directly connected to the feed 211 via the T-slot 212.
As shown in fig. 1 and 2, in some embodiments of the present disclosure, the adjustment assembly 224 includes a screw assembly 2241. Screw assembly 2241 is coupled to first flange 221 and second flange 2221 or vacuum seal 222, and may be used to adjust the distance between first flange 221 and second flange 2221 or vacuum seal 222.
In some embodiments of the present disclosure, screw assembly 2241 includes at least one screw 2241-1 and at least one nut 2241-2. Screw 2241-1 is inserted between first flange 221 and second flange 2221, one end is fixed on first flange 221, and the other end is slidably connected with second flange 2221 and passes through second flange 2221. A nut 2241-2 engaged with the screw 2241-1 is sleeved on an end of the screw 2241-1 passing through the second flange 2221.
The distance between the second flange 2221 and the first flange 221 can be shortened or increased by rotating the nut 2241-2, so that the third flange 2222 fixed with the second flange 2221 moves the feeding member 211 linearly in the vacuum receiving chamber 10 to switch the working optical element on the optical path.
Those skilled in the art will appreciate that while only one screw 2241-1 and one nut 2241-2 are shown in fig. 1 and 2, the number of screws and nuts may be greater than one in practical applications. Still further, it will be appreciated by those skilled in the art that the screw assembly 2241 may also include only at least one screw that is threadably coupled to the second flange 2221, such that rotation of the screw brings the second flange 2221 and the third flange 2222 closer to or farther from the first flange 221. Similarly, the screw assembly 2241 may also include at least one screw and at least one pair of nuts. For example, a pair of nuts may be disposed at both ends of the screw, and the second flange 2221 and the third flange 2222 are moved toward or away from the first flange 221 by rotating the pair of nuts that are engaged with each other. Or a pair of nuts may be disposed at one end of the screw adjacent to the second flange 2221, respectively disposed at both sides of the second flange 2221. The distance between the second and third flanges 2221 and 2222 and the first flange 221 is adjusted by rotating the nuts outside the second flange 2221, and this distance is loosened or locked by rotating the nuts inside the second flange 2221.
As shown in fig. 1 and 2, in some embodiments of the present disclosure, the screw assembly 2241 further includes one or more guide rods 2241-3 slidably coupled with the vacuum seal 222.
In some embodiments of the present disclosure, a sliding aperture 2241-4 is included on either the vacuum seal 222 or the second flange 2221 for sliding connection with the guide bar 2241-3.
One end of the guide rod 2241-3 is fixed to the first flange 221, and the other end is slidably coupled to the second flange 2221 through the sliding hole 2241-4. When the second flange 2221 approaches the first flange 221, the guide rods 2241-3 pass out of the sliding holes 2241-4 and can be used for guiding and supporting, thereby preventing the screw 2241-1 from being bent during distance adjustment, resulting in damage to the apparatus.
Those skilled in the art will appreciate that although two guide rods 2241-3 are shown in FIGS. 1 and 2, the number of guide rods 2241-3 may be one or more.
In some embodiments of the present disclosure, the adjustment assembly further includes a motor (not shown) having an output coupled to the screw assembly 2241 (e.g., a screw or nut) that may be used to drive the screw assembly 2241.
As shown in fig. 2 and 3, in some embodiments of the present disclosure, the switchable vacuum optical assembly 100 may further include a stop 30. A stopper 30 is provided in the vacuum receiving chamber 10, and cooperates with the feed 211 for stopping the working optical element.
In some embodiments of the present disclosure, the stop 30 includes a stop seat 31 (e.g., stop seats 31a, 31 b) and a stop plunger 32 (e.g., stop plungers 32a, 32b, 32c, 32 d). As shown in fig. 2 and 3, the limiting seat 31 may include left and right portions, and the limiting seats 31a and 31b. The stopper 31 includes stopper grooves 311 (e.g., stopper grooves 311a, 311 b) that cooperate with the feeding member 211. The stopper plungers 32 are provided on the stopper seat 31 to be engaged with stopper holes 2111 (for example, stopper holes 2111a, 2111b, 2111c, 2111d, 2111 e) on both sides of the feed 211. The spacing hole structures on both sides of the feeding member 211 may be symmetrically distributed, and only one side spacing hole 2111 is illustrated here as an example.
The limiting holders 31a, 31b are fixed in the vacuum receiving chamber 10 by bolts 312a, 312b, 312c, 312d and are located at both sides of the feeding member 211. The limiting grooves 311a and 311b are formed on the inner sides of the limiting seats 31a and 31b, and the width of the limiting grooves is matched with the thickness of the feeding piece 211, so that the feeding piece 211 can slide between the limiting seats 31a and 31b and cannot deviate.
The stopper plungers 32a, 32b, 32c, 32d pass through the stopper seats 31a, 31b to abut against the feeding member 211, and when the feeding member 211 slides on the stopper seats 31a, 31b, the ends of the stopper plungers 32a, 32b, 32c, 32d can be pressed into the stopper holes 2111, thereby determining that the optical element is fed in place. The feed 211 may also include a chute for sliding abutment with the stopper plungers 32a, 32b, 32c, 32 d. Limiting holes 2111a, 2111b, 2111c, 2111d, 2111e may be provided in the chute.
As shown in fig. 2 and 3, in some embodiments of the present disclosure, the switchable vacuum optical assembly 100 may also include an optical sensor 40 that may be used to detect light passing through the working optical element.
An optical sensor 40 is installed in the vacuum receiving chamber 10, and is capable of detecting an optical signal passing through the optical element.
In some embodiments of the present disclosure, the switchable vacuum optical assembly 100 further comprises a controller (not shown). The controller is configured to receive signals from the optical sensor 40 to control the switching device 20 to switch the working optical element located on the optical path within the vacuum receiving chamber 10. For example, the controller may determine whether the working optical element is in place in the stopper 30 by a signal transmitted from the optical sensor 40, thereby determining whether to stop driving the feeding member 211.
The switchable vacuum optical assembly 100 of the present disclosure switches working optical elements located on the optical path by adjusting the distance between the first flange 221 and the vacuum seal 222 such that the feed 211 fixedly connected to the vacuum seal 222 moves the plurality of optical elements linearly within the vacuum receiving chamber 10 to vary the processing of light. The present disclosure can provide optical elements (e.g., color filters) as desired, in combination with gratings in a monochromator, to directly switch various optical elements during production or experimentation without compromising the vacuum environment, resulting in various spectral lines that can be used in production or experimentation.
Fig. 4 illustrates a schematic diagram of a vacuum light source system 1000 according to some embodiments of the present disclosure.
As shown in fig. 4, vacuum light source system 1000 includes a vacuum chamber (not shown), a light source 200, and a switchable vacuum optical assembly 100. The light source 200 is disposed outside the vacuum chamber and can be used to emit light into the vacuum chamber. The optical output 12 of the switchable vacuum optical assembly 100 is sealingly connected to the vacuum chamber and the optical input 11 is sealingly connected to the light source 200.
Light emitted by the light source 200 enters the vacuum cavity through the switchable vacuum optical assembly 100 to form a light path, different optical elements on the light path can be switched through the switchable vacuum optical assembly 100, and the optical elements are switched according to the requirements of experiments or production, so that the vacuum environment is not required to be destroyed, the experiment or production time is shortened, and the experiment or production efficiency is improved.
Switchable vacuum optical assemblies according to some embodiments of the present disclosure can provide beneficial technical effects. For example, the switchable vacuum optical assembly of some embodiments of the present disclosure can solve the problems that the number of spectral lines that can be used in one experimental process in the conventional technology is limited by the number of gratings is at most two, the number of experiments is passively increased, the experimental steps are more complicated, and the like, and can realize the technical effects that various optical elements can be switched, so that various spectral lines can be used in the experimental process, the experimental operation is convenient, and the experimental steps are simplified.
Vacuum light source systems according to some embodiments of the present disclosure can provide beneficial technical effects. For example, the vacuum light source system of some embodiments of the present disclosure can solve the problems that in the conventional technology, a monochromator needs to be disassembled to replace a grating to change a spectral line, a vacuum environment needs to be broken, and after an optical element is replaced, high vacuum needs to be pumped again, which is time-consuming and labor-consuming, prolongs an experiment time, reduces experiment efficiency, and the like, and can realize that an optical element matched with the grating is switched under the condition that the vacuum environment is not broken so as to achieve the technical effect of switching multiple spectral lines. Meanwhile, the vacuum light source system in some embodiments of the present disclosure does not need to destroy the vacuum environment when switching optical elements, and is time-saving and labor-saving, shortens the experiment time, and improves the experiment efficiency.
It should be noted that the foregoing is merely a preferred embodiment of the present disclosure, and is not intended to limit the present disclosure, but any modification, equivalent replacement, improvement, etc. that comes within the spirit and principles of the present disclosure are included in the protection scope of the present disclosure.