This application is a divisional application of the chinese patent application, which was filed on the original application having an application date of 2015, 10/28/2015, and has an application number of 201580055666.X, entitled "filler-filled film, sheet-like film, laminated film, laminate, and method for producing filler-filled film".
Detailed Description
Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the present specification and the drawings, components having substantially the same functional configuration are denoted by the same reference numerals, and therefore, redundant description thereof is omitted.
< 1. construction of Filler-filled film >
First, the structure of the filler-filledfilm 1 according to the present embodiment will be described with reference to fig. 1 to 3. As shown in fig. 1, a filler-filledfilm 1 has a filmmain body 2, a plurality ofrecesses 3 formed in a surface of the filmmain body 2, and afiller 4 filled in eachrecess 3.
The filmmain body 2 is a film formed with a plurality ofrecesses 3. The material constituting thefilm body 2 is not particularly required. For example, the filmmain body 2 may be formed of any curable resin or plastic resin. Here, examples of the curable resin include a photocurable resin and a thermosetting resin. Examples of the plastic resin include a thermoplastic resin (more specifically, a crystalline resin that melts when heated). Therefore, the filmmain body 2 may be formed of at least 1 or more of a photocurable resin, a thermosetting resin, and a thermoplastic resin, for example. When the filmmain body 2 is formed of a photocurable resin or a thermosetting resin, the filmmain body 2 may be formed of a sheet-shaped transfertarget substrate film 161 and a curedresin layer 162a formed on the transfer target substrate film 161 (see fig. 10). The curedresin layer 162a is a layer obtained by curing a photocurable resin or a thermosetting resin. Therecess 3 is formed on the surface of the curedresin layer 162 a. The filmmain body 2 may be formed in a state in which a curable resin and a resin constituting the film to be transferred are mixed.
Further, the thickness of thefilm body 2 is not particularly required. The thickness of thefilm body 2 can be adjusted according to the presence or absence of the transfer targetbase material film 161. For example, when thefilm body 2 includes the transfer targetbase material film 161, the thickness of thefilm body 2 may be 10 to 300 μm. In this case, the thickness of the curedresin layer 162a may be 1 to 50 μm, and the thickness of thetransfer substrate film 161 may be 9 to 250 μm. On the other hand, in the case where thefilm body 2 does not include the transfer targetbase material film 161, the thickness of thefilm body 2 may be 8 to 200 μm.
Further, the width of the filmmain body 2 is not particularly required. For example, the width of thefilm body 2 may be 0.05 to 300 cm. The length of the filmmain body 2 is not particularly required. However, when the filmmain body 2 is a long film, the later-described unevenness in the filling ratio of the filler tends to increase. Therefore, in the case where the filmmain body 2 is a long film, the effect of the present embodiment is more remarkably exhibited. For example, the lower limit value of the length of the filmmain body 2 may be any one of 5m, 10m, 30m, 50m, 100m, 200m, 300m, and 500 m.
The plurality ofrecesses 3 are formed on the surface of thefilm body 2. The diameter of the opening surface of theconcave portion 3 is larger than at least the wavelength of visible light. Here, the diameter of the opening surface of theconcave portion 3 is, for example, the diameter of the smallest circle (for example, a circumscribed circle of the opening surface of the concave portion 3) including the opening surface of theconcave portion 3. Specifically, the diameter of the opening surface of therecess 3 is preferably 0.8 to 500. mu.m, more preferably 1.0 to 300. mu.m, and particularly preferably more than 1.6 μm and less than 300. mu.m. That is, the lower limit is preferably 0.8 μm or more, more preferably 1.0 μm or more, and particularly preferably more than 1.6. mu.m. The upper limit is 500 μm or less, more preferably 300 μm or less, and particularly preferably less than 300. mu.m.
The shape of the opening surface of therecess 3 is not particularly required, and may be any shape. For example, the shape of the opening surface of therecess 3 may be circular, elliptical, polygonal, or the like. When the opening surface of theconcave portion 3 has a polygonal shape, the diameter of the opening surface may be the longest length among the lengths of 1 side constituting the polygonal shape. The opening surface of therecess 3 may have a partially curved shape. The area of the opening surface may not be constant as long as the above-described conditions of the opening surface are satisfied. In addition, regarding the shape of the opening surface, the opening surface having the smallest area can be regarded as a point, and the opening surfaces having an area larger than the smallest area can be classified into a line and a plane according to the shape. The linear opening surfaces are formed by connecting the recessedportions 3 of the opening surfaces having the minimum area in a linear shape (i.e., in the 1-dimensional direction). The planar opening surfaces are formed by connecting therecesses 3 having opening surfaces of the minimum area in a planar manner (i.e., in the 2-dimensional direction). Therefore, the linear and planarconcave portions 3 can be regarded as an aggregate of theconcave portions 3 having an opening surface with a minimum area. The shape of the line or the plane is not particularly limited. The aggregate of therecesses 3 may be an aggregate in which a surface is joined to a line. The aggregate of therecesses 3 was measured as 1recess 3. The shape of the projections and depressions shown in fig. 1 may be reversed. That is, theconcave portions 3 become convex portions, andconvex portions 3b (see fig. 2) between theconcave portions 3 may become concave portions.
The depth d (see fig. 2) of therecess 3 is not particularly required. For example, the depth d may be 0.08 to 30 μm. The depth d is preferably 0.08 to 15 μm. When the opening surface of therecess 3 is rectangular (square or rectangular) or substantially circular (perfect circle, ellipse, or circle that can be approximated thereto), the aspect ratio of therecess 3 may be about 0.1 to 10. Here, the aspect ratio is a value calculated by dividing the diameter of the opening surface by the depth d.
If the depth of therecess 3 exceeds 30 μm or the aspect ratio of therecess 3 exceeds 10, the formation of therecess 3 becomes difficult, which is not preferable. If the depth of therecess 3 is less than 0.08 μm or the aspect ratio of therecess 3 is less than 0.1, the filling of thefiller 4 may become difficult, which is not preferable.
When the filmmain body 2 includes the transfertarget base film 161, theconcave portion 3 may penetrate the curedresin layer 162 a. However, therecess 3 preferably does not penetrate thefilm body 2 regardless of whether or not thefilm body 2 is provided with the transfer targetbase material film 161.
The shape (opening surface shape, cross-sectional shape (cross-sectional shape shown in fig. 2)) of eachrecess 3 is preferably substantially the same throughout theentire film body 2. When the cross-sectional shape or the shape of the opening surface of therecess 3 is substantially the same, it is preferable to more easily grasp the formation state of therecess 3 in the filler-filledfilm 1.
Further, the arrangement pattern of therecesses 3 has a periodicity along the longitudinal direction of the filmmain body 2. Specifically, the array pattern of therecesses 3 is an array pattern in which the unit array patterns M are repeated in the longitudinal direction of thefilm body 2. In the example of fig. 1, the unit array pattern M is formed of 2 rows ofrecesses 3 aligned in a direction perpendicular to the longitudinal direction P. Theconcave portions 3 of each row are arranged at equal intervals. Theconcave portions 3 of each row are arranged between theconcave portions 3 of the other rows. The unit array pattern M is repeated along the longitudinal direction P, thereby forming a hexagonal lattice array pattern. The hexagonal lattice arrangement pattern is an example of a pattern in which therecesses 3 are most densely arranged. Of course, the arrangement pattern is not limited to this example. For example, the arrangement pattern may be a square lattice arrangement pattern. In this case, the unit arrangement pattern is formed of 1 row of therecesses 3 aligned in a direction perpendicular to the longitudinal direction P. Therecesses 3 in the rows are arranged at equal intervals. Other arrangement patterns include lattice shapes such as rhombic lattices and parallelogram lattices. Further, arbitrary drawing (stippling) is also possible.
Further, the width MW of the unit arrangement pattern M coincides with the width of the filmmain body 2. On the other hand, the length ML of the unit arrangement pattern M is not particularly limited. For example, when the arrangement pattern of theprojections 113 formed on the circumferential surface of the master 110 (see fig. 10) described later does not have periodicity, the length ML matches the circumferential length of themaster 110. On the other hand, when the arrangement pattern of theprojections 113 has periodicity along the circumferential direction of themaster 110, that is, when the unit arrangement pattern of theprojections 113 is repeated in the circumferential direction of themaster 110, the length ML matches the length of the unit arrangement pattern of the projections 113 (the length in the circumferential direction of the master 110). The length ML of the unit arrangement pattern M is the smallest when the unit arrangement pattern M is constituted by 1 row of theconcave portions 3. That is, in this case, the length ML is about the diameter of therecess 3. On the other hand, the maximum value is obtained when the arrangement pattern of theconvex portions 113 has no periodicity. In this case, the length ML coincides with the circumferential length of themaster 110. Therefore, the range of the length ML of the unit arrangement pattern M is very wide. The diameter of themaster 110 is not particularly limited, and is, for example, 50 to 300 mm.
Here, the arrangement pattern of theconcave portions 3 may also have periodicity with respect to a direction perpendicular to the longitudinal direction of the film main body 2 (the width direction of the film main body 2). That is, the same arrangement pattern may be repeated along the width direction of the filmmain body 2. The periodicity along the longitudinal direction P of thefilm body 2 may be the same as or different from the periodicity in the direction perpendicular thereto. When the filler-filledfilm 1 is formed into a sheet, a substantially uniform sheet-like film can be obtained.
In addition, the method can be used for producing a composite materialThe areal density of therecesses 3, that is, the number ofrecesses 3 formed per unit area of thefilm body 2, is not particularly limited. For example, the number may be 50,000,000/cm2The following. The area density of theconcave portions 3 exceeds 50,000,000 pieces/cm2In this case, when theconcave portion 3 is formed, the contact area between themaster 110 and thefilm body 2 is increased, the releasability between themaster 110 and thefilm body 2 is lowered, and theconcave portion 3 is not easily formed, which is not preferable. The lower limit of the area density of theconcave portion 3 is not particularly limited, and may be, for example, 100 pieces/cm2The above.
When onefiller 4 is filled in onerecess 3, the area density of therecess 3 matches the area density of thefiller 4, that is, the number offillers 4 filled per unit area of thefilm body 2. The distance between theconcave portions 3 is also not particularly limited. For example, the lower limit value of the distance between theconcave portions 3 may be 0.5 μm. More specifically, the lower limit value of the distance between therecesses 3 is preferably 5/8 or more, and more preferably 1/2 or more, of the minimum diameter of thefiller 4. The upper limit of the distance between theconcave portions 3 is not particularly limited, and may be about 1000 μm. Here, the distance between theconcave portions 3 may be the distance between the center points of the opening surfaces.
In addition, the defect of theconcave portion 3 may be formed continuously in the longitudinal direction P, and even in this case, the continuous defect is extremely small. Here, the defect of theconcave portion 3 means that theconcave portion 3 is not formed (in other words, the shape of the convex portion 113 (see fig. 10) is not transferred to the film body 2). The continuous defect in the longitudinal direction P means a defect that continuously occurs on a straight line parallel to the longitudinal direction P. In the present embodiment, the number of defects continuing in the longitudinal direction P is 10 or less, preferably 5 or less.
Fig. 13 and 14 show an example of thefilm body 2. Fig. 13 and 14 are SEM photographs of the membranemain body 2. Fig. 13A and 14A are SEM images of observing the surface of the filmmain body 2, and fig. 13B and 14B are SEM images of observing a cross section of the transfer shown in fig. 13A and 14A along the X-XX line. The up-down direction in fig. 13A and 14A is the longitudinal direction P in fig. 1, and the left-right direction is the width direction of the filmmain body 2. In fig. 13A, the shape of the opening surface is circular, and the array pattern of therecesses 3 is a hexagonal lattice array pattern. In fig. 14A, the shape of the opening surface is a square, and the arrangement pattern of therecesses 3 is a square lattice arrangement pattern.
Thefiller 4 is a material filled in theconcave portion 3. The filling means a state in which the excessive half of the filler is embedded in therecess 3. It should be noted that onerecess 3 is preferably filled with onefiller 4. However, the aggregate of therecesses 3 may be filled with a plurality offillers 4. The material (composition) constituting thefiller 4 is not particularly limited, and may be appropriately selected depending on the use of the filler-filledfilm 1. For example, thefiller 4 may be an inorganic material, an organic material, a multilayer structure made of inorganic materials, a mixture of inorganic materials (inorganic materials) and organic materials (organic materials) (for example, a substance in which a fine solid substance made of organic materials is coated with an inorganic material), or the like. Specifically, thefiller 4 may be a pigment, a dye, a crystalline inorganic substance, or the like. Thefiller 4 may be obtained by pulverizing a crystalline organic material or inorganic material. All therecesses 3 may be filled with thesame filler 4, or may be filled with different types offillers 4. For example, when the diameters of the opening surfaces of theconcave portions 3 are different, thefiller 4 having the diameters can be filled. The shape of thefiller 4 is not particularly required. The shape of thefiller 4 may be an isotropic shape, for example, a spherical shape. The specific gravity of the filler is not particularly limited, and may be, for example, 0.8 to 23. The maximum length of the filler is preferably equal to or less than the minimum length of the opening surface of therecess 3. The filler may be a material that imparts various physical properties and functionalities.
Further, thefiller 4 may be integrated with the filmmain body 2 in therecess 3. The integration with the filmmain body 2 may be performed, for example, by filling thefiller 4 into therecess 3 in a state where only a part of therecess 3 is cured, and then completely curing therecess 3. After filling therecess 3 with thefiller 4, the uncured curable resin may be applied or spread on the surface of the filler-filledfilm 1 to cure the curable resin.
In the present embodiment, the filling ratio of the filler 4 (hereinafter, also referred to as "filler filling ratio") is very stable. That is, the difference between the filler filling rate in the one end portion F of thefilm body 2 and the filler filling rate in the other portion of thefilm body 2 is less than 0.5%, preferably 0.3% or less, and more preferably 0.1% or less.
Here, the one end F is an end on a side where theconcave portion 3 is initially formed by themaster 110 described later, that is, a starting point of transfer. On the other hand, the other end portion R is an end portion on the side where theconcave portion 3 is finally formed from themaster 110, i.e., a transfer termination point. In the present embodiment, the direction from one end F to the other end F is the positive direction of the longitudinal direction P. The filling rate of the filler in each portion (spot) of thefilm body 2 is calculated as follows, for example.
That is, the unit array pattern M including the portion of interest is extracted, and a predetermined number M (M is an arbitrary integer of 0 or more) of unit array patterns M arranged in the positive direction side in the longitudinal direction P with respect to the unit array pattern M are extracted. Then, the extracted unit array pattern M is set as a measurement target region.
Then, a plurality of representative regions are set in the measurement target region, and the number offillers 4 in each representative region is measured by observation with an optical microscope or the like. Then, the filler filling ratio is measured by dividing the sum of the measured values in each representative region by the sum of the ideal number offillers 4 present in each representative region. Here, the ideal number offillers 4 present in the representative region is the number offillers 4 to be present in the representative region. That is, the number offillers 4 measured when there is no defect of anyrecess 3 in the representative region and allrecesses 3 in the representative region are filled with thefillers 4.
The filling ratio of the filler may be less than 100 (%) for various reasons. Such causes include positional deviation of the concave portion 3 (theconcave portion 3 is formed at a position different from the position to be formed originally), a defect in theconcave portion 3, deformation (a shape different from the original shape), and the like. When the position of therecess 3 is displaced or deformed, thefiller 4 may not be filled in therecess 3. When a defect occurs in therecess 3, there is norecess 3 to be filled with thefiller 4. Therefore, the packing filling ratio is lowered in each case. In fig. 1, 2concave portions 3a are missing in the unit array pattern M at the point X. Oneconcave portion 3a is missing in the unit array pattern M at the other end portion R.
The distribution of the packing fraction is in various modes. For example, the packing filling rate may have a periodicity along the longitudinal direction P. Specifically, as shown by a curve L1 in fig. 3, the filling rate of the filler in each portion may be wavy along the longitudinal direction P.
Here, the horizontal axis of fig. 3 represents the distance from the starting point of thefilm body 2 to each portion on the film body 2 (i.e., the distance in the longitudinal direction), and the vertical axis represents the filler filling rate. A curve L1 shows the correspondence relationship between the longitudinal distance and the filler filling ratio of the filler-filledfilm 1 according to the present embodiment. On the other hand, a curve L2 shows the correspondence between the longitudinal distance and the filling rate of a conventional filler-filled film (i.e., a film produced using a master).
As shown by the curves L1 and L2, the filler filling rate of both the filler-filledfilm 1 according to the present embodiment and the conventional filler-filled film is waved along the longitudinal direction. However, thefiller filling film 1 according to the present embodiment has a small variation in the filler filling rate, whereas the conventional filler filling film has a very large variation in the filler filling rate. In addition, in the conventional filler-filled film, the longer the film body is, the greater the unevenness of the filler filling rate becomes. In contrast, in the present embodiment, as shown in the example described later, even if thefilm body 2 is long, the unevenness of the filling rate of the filler can be suppressed. That is, in the present embodiment, the difference between the filler filling rate in each portion and the filler filling rate in one end portion F is suppressed to less than 0.5%.
< 2. various modifications
Next, various modifications of the filler-filledfilm 1 will be described with reference to fig. 4 to 9. In the filler-filledfilm 1a shown in fig. 4, acoating layer 5 is added to the filler-filledfilm 1. Thecoating layer 5 covers the surface of thefilm body 2, that is, the surface (wall surface and bottom surface) of therecess 3 and the surface (tip surface) of theprojection 3b between therecesses 3. Thecoating layer 5 may cover only one of the surface of theconcave portion 3 and the surface of theconvex portion 3 b. Thefiller 4 is filled in therecess 3 covered with thecoating layer 5.
Here, the material (composition) constituting thecoating layer 5 is not particularly limited, and may be an organic material or an inorganic material. The material constituting thecoating layer 5 may be appropriately selected depending on the use of the filler-filledfilm 1a, but is preferably made of a material different from that of thefilm body 2. For example, thecoating layer 5 may be an inorganic layer. Thecoating layer 5 can be formed by, for example, vapor-depositing a material constituting thecoating layer 5 on thefilm body 2. The thickness of thecoating layer 5 is not particularly required, and is preferably substantially uniform on the surface of thefilm body 2 regardless of the shape of therecess 3. Further, the portion formed on the surface of therecess 3 is preferably formed on the surface of therecess 3 at a ratio of 30 vol% or less of the hollow portion of therecess 3. Further, the method of vapor deposition is not particularly required. For example, thecoating layer 5 may be formed only on a part of the recess 3 (i.e., obliquely) by oblique vapor deposition. In this case, since the wall surface of therecess 3 can be inclined, thefiller 4 can be easily filled in therecess 3. When thecoating layer 5 is made of an organic material, thecoating layer 5 may be formed by applying or spreading the organic material. In this case, the opening surface may be inclined in the scattering direction.
Filler-filledfilm 1b shown in fig. 5 is a film in whichcoating layer 6 is further formed on the surface of filler-filledfilm 1a shown in fig. 4. Thecoating layer 6 covers the portion of thecoating layer 5 covering theconvex portion 3b and the exposed surface of thefiller 4. Here, the exposed surface of thefiller 4 is a surface exposed to the outside through the opening surface of therecess 3. The material constituting thecoating layer 6 is also not particularly limited, and may be an organic material or an inorganic material. The material constituting thecoating layer 6 may be appropriately selected depending on the use of the filler-filledfilm 1 b. For example, thecoating layer 6 may be made of the same inorganic material as thecoating layer 5, or may be made of a different inorganic material. Thecoating layer 6 is formed by the same method as thecoating layer 5.
Filler-filledfilm 1c shown in fig. 6 is a film in whichcoating layer 7 is formed on the surface of filler-filledfilm 1. Thecoating layer 7 covers the surface of theconvex portion 3b and the exposed surface of thefiller 4. The material (composition) constituting thecoating layer 7 is not particularly limited, and may be an organic material or an inorganic material. The material constituting thecoating layer 7 may be selected as appropriate depending on the use of the filler-filledfilm 1 c. For example, thecoating layer 7 may be an inorganic layer. Thecoating layer 7 is formed by the same method as thecoating layer 5.
The filler-filledfilm 1d shown in fig. 7 is a film in which anadhesive layer 8 is formed on the back surface (the surface opposite to the surface on which therecesses 3 are formed) of thefilm body 2. The filler-filledfilm 1d may be bonded to another object (for example, another filler-filled film according to the present embodiment, an arbitrary substrate, or the like) via theadhesive layer 8. Theadhesive layer 8 may be formed on the filler-filledfilms 1a to 1c shown in fig. 4 to 6.
Thelaminate film 20 shown in fig. 8 is formed by laminating 2 sheets of the filler-filledfilm 1 with theadhesive layer 8 interposed therebetween. The number oflaminated films 20 shown in fig. 8 is 2, but the number of laminated films is not limited to this. The arrangement pattern of therecesses 3 of each filler-filledfilm 1 may be the same or different. For example, the arrangement pattern of theconcave portions 3 of each filler-filledfilm 1 may be similar to each other. Thesame filler 4 may be filled in each of the filler-filledfilms 1, ordifferent fillers 4 may be filled in each of the filler-filledfilms 1.
Thelaminated film 20 can be produced by laminating the filler-filledfilm 1d shown in fig. 7. Thelaminated film 20 may be produced by repeating the step of applying theadhesive layer 8 to the surface of the filler-filledfilm 1 and attaching another filler-filledfilm 1 thereto. Needless to say, the filler-filledfilms 1a to 1c shown in fig. 4 to 6 may be laminated.
The bonded body 30 shown in fig. 9 is obtained by bonding a filler-filledfilm 1 to the surface of asubstrate 31 via anadhesive layer 8. The kind of thebase material 31 is not particularly limited. Thesubstrate 31 may be a planar member (e.g., a film or a plate) or a three-dimensional member (e.g., various housings). The filler-filledfilms 1a to 1d, thelaminate film 20, and a sheet-like film described later may be bonded to thebase material 31.
< 3. sheet-like film >
By cutting the filler-filledfilm 1 into a plurality of sheets, a sheet-like film can be formed. Since the filler-filledfilm 1 according to the present embodiment can stabilize the filler filling rate in all regions, a plurality of sheet-like films having the same property can be produced. The film according to each of the above modifications may be similarly formed into a sheet-like film.
The use of each film is not particularly limited, and the film can be used in, for example, a printed electronic product and an application field (related field) thereof. Further, the present invention is not limited to the above-described fields, and may be used as a functional film (device). For example, the optical element may be used in medical treatment, biology, health care, life science, and the like such as biosensors and diagnostic equipment, and may be used as an optical element. Furthermore, the present invention can be used in the fields of batteries, energy correlation, and vehicle (automobile) correlation.
< 4. composition of transfer device
Thefilm body 2 can be manufactured by a roll-to-roll type transfer device. The configuration of atransfer device 100 as an example of a transfer device will be described below with reference to fig. 10. In thetransfer device 100 shown in fig. 10, the filmmain body 2 is made of a photocurable resin.
Thetransfer device 100 includes amaster 110, a substrate supply roller 15, a take-uproller 152, guiderollers 153 and 154, anip roller 155, a peelingroller 156, acoating device 157, and alight source 158.
Themaster 110 is a cylindrical or columnar member, and a plurality ofprojections 113 are formed on the circumferential surface of themaster 110. Theseprojections 113 have an inverted shape of therecess 3. That is, in thetransfer apparatus 100, thefilm body 2 is manufactured by transferring the arrangement pattern of theconvex portions 113 formed on the circumferential surface of themaster 110 onto thetransfer target film 2 a.
The material constituting themaster 110 and the size (diameter, etc.) of themaster 110 are not particularly required. For example, themaster 110 may be made of fused silica glass (SiO), synthetic silica glass, or other silica glass2) And stainless steel. The diameter (outer diameter) of themaster 110 may be 50 to 300 mm. When themaster 110 is cylindrical, the thickness may be 2 to 50 mm.
There is no particular requirement for the method of forming theconvex portions 113 on the circumferential surface of themaster 110. For example, theconvex portion 113 may be formed by mechanically cutting the circumferential surface of themaster 110, or may be formed by etching. The outline of the process of manufacturing themaster 110 by etching is as follows. That is, the circumferential surface of the cylindrical or columnar substrate is covered with the resist layer. Then, a portion of the resist layer where theconvex portion 113 is not formed (a portion to be a concave portion) is irradiated with laser light, and a latent image is formed in the resist layer. An example of the configuration of an exposure apparatus for irradiating a substrate with laser light will be described later. Next, the latent image portion is removed by developing the resist layer. Next, the substrate is etched using the resist layer as a mask. This etches the portions between theprojections 113, thereby forming theprojections 113. Further, a mark indicating a position on the circumferential surface of themaster 110 may be applied to the circumferential surface of themaster 110. By transferring such a mark to thetransfer target film 2a, the progress of transfer can be confirmed. Instead of applying a mark to themaster 110, a part of theconvex portion 113 formed on themaster 110 may be formed by intentionally shifting. In this case, the position of theconcave portion 3 corresponding to theconvex portion 113 is also shifted, and theconcave portion 3 becomes a substitute for the mark. The positional deviation of theprojection 113 is preferably set within a range that does not affect the quality of thefilm body 2.
Fig. 12 shows an example of themaster 110. A plurality ofprojections 113 are formed on the circumferential surface of themaster 110. The arrangement pattern of theconvex portions 113 is an inverted shape of the arrangement pattern of theconcave portions 3 shown in fig. 1. That is, the arrangement pattern of theprojections 113 is a hexagonal lattice arrangement pattern, and has periodicity in any direction of the axial direction a and the circumferential direction B with respect to themaster 110.
Thesubstrate supply roller 151 is a roller for winding the long transfertarget substrate film 161 in a roll shape, and the windingroller 152 is a roller for winding the filmmain body 2. Theguide rollers 153 and 154 are rollers for conveying the transfer targetbase material film 161. Thenip roller 155 is a roller for bringing thetransfer base film 161 on which theuncured resin layer 162 is laminated, i.e., the transferredfilm 2a into close contact with themaster 110. The peelingroller 156 is a roller that peels thefilm body 2, which is the transfertarget substrate film 161 on which the curedresin layer 162a is laminated, from themaster 110.
Thecoating device 157 has a coating device such as a coater, and coats the uncured photocurable resin composition on the transfertarget substrate film 161 to form theuncured resin layer 162. Thecoating device 157 may be, for example, a gravure coater, a wire bar coater, a die coater, or the like. Thelight source 158 is a light source that emits light having a wavelength capable of curing the photocurable resin composition, and may be, for example, an ultraviolet lamp.
The photocurable resin composition is a resin which is cured by being irradiated with light of a predetermined wavelength to decrease fluidity. Specifically, the photocurable resin composition may be an ultraviolet curable resin such as an acrylic resin. The photocurable resin composition may further contain an initiator, a filler, a functional additive, a solvent, an inorganic material, a pigment, an antistatic agent, a sensitizing pigment, and the like as necessary.
In thetransfer device 100, first, the transfertarget substrate film 161 is continuously fed out from thesubstrate supply roller 151 via theguide roller 153. Thesubstrate supply roller 151 may be changed to another batch ofsubstrate supply rollers 151 during the feeding. The uncured photocurable resin composition is applied to the transferredbase film 161 that has been sent out by theapplication device 157, and theuncured resin layer 162 is laminated on the transferredbase film 161. Thereby, the transferredfilm 2a is produced. The transferredfilm 2a is closely attached to themaster 110 by a holdingroller 155. Thelight source 158 irradiates theuncured resin layer 162 that is in close contact with themaster 110 with light to cure theuncured resin layer 162. Thereby, the arrangement pattern of theconvex portions 113 formed on the outer peripheral surface of themaster 110 is transferred to theuncured resin layer 162. That is, the curedresin layer 162a is formed, and therecess 3 is formed. Here, thelight source 158 may also irradiate light obliquely with respect to theconcave portion 3. In this case, only a part of therecess 3 is cured. Then, thefilm body 2, which is the transfertarget substrate film 161 on which the curedresin layer 162a is laminated, is peeled from themaster 110 by the peelingroller 156. Subsequently, the filmmain body 2 passes through theguide roller 154 and is wound by the windingroller 152.
In this way, in thetransfer apparatus 100, the peripheral surface shape of themaster 110 is transferred to thetransfer target film 2a while thetransfer target film 2a is conveyed by the roll-to-roll method. Thereby, thefilm body 2 is produced.
When the filmmain body 2 is made of a thermoplastic resin, thecoating device 157 and thelight source 158 are not required. The transfer targetbase material film 161 is a thermoplastic resin film, and a heating device is disposed on the upstream side of themaster 110. By this heating device, the transfertarget substrate film 161 is heated to be soft, and then, the transfertarget substrate film 161 is pressed against themaster 110. Thereby, the arrangement pattern of theconvex portions 113 formed on the circumferential surface of themaster 110 is transferred to the transfertarget base film 161. Note that a film in which the transfertarget substrate film 161 is made of a resin other than a thermoplastic resin may be formed, and the transfertarget substrate film 161 and the thermoplastic resin film may be laminated. In this case, the laminated film is heated by the heating device and then pressed against themaster 110.
Therefore, thetransfer apparatus 100 can continuously produce thefilm body 2, which is a transfer product to which the arrangement pattern of theconvex portions 113 formed on themaster 110 is transferred. Further, the filmmain body 2 manufactured using thetransfer apparatus 100 can suppress the occurrence of defects in theconcave portions 3, and can ultimately suppress the unevenness in the filling rate of the filler.
< 5. construction of Exposure apparatus
Next, the configuration of theexposure apparatus 200 will be described with reference to fig. 11. Theexposure apparatus 200 is an apparatus for forming themaster 110. Theexposure apparatus 200 has alaser light source 221, afirst mirror 223, a light emitting diode (PD) 224, a polarizationoptical system 225, acontrol mechanism 237, asecond mirror 231, a moving optical table 232, aspindle motor 235, and a rotation table 236. Thebase material 110a is placed on theturntable 236 and can rotate.
Thelaser light source 221 is a light source that emits thelaser light 220, and is, for example, a solid laser, a semiconductor laser, or the like. The wavelength of thelaser beam 220 emitted from thelaser source 221 is not particularly limited, and may be, for example, a wavelength in the blue light region of 400nm to 500 nm. The spot diameter of the laser beam 220 (the diameter of a spot irradiated on the resist layer) may be smaller than the diameter of the opening surface of therecess 3, and may be, for example, about 200 nm. Thelaser light 220 emitted by thelaser light source 221 is controlled by thecontrol mechanism 237.
Thelaser light 220 emitted from thelaser light source 221 travels as a parallel beam, is reflected by thefirst mirror 223, and is guided to the polarizingoptical system 225.
Thefirst mirror 223 is composed of a polarization beam splitter, and has a function of reflecting a part of the polarized light component and transmitting the other part of the polarized light component. The polarized light component transmitted through thefirst mirror 223 receives light emission from thelight emitting diode 224, and generates photoelectric conversion. The light receiving signal photoelectrically converted by thelight emitting diode 224 is input to thelaser light source 221, and thelaser light source 221 performs phase modulation of thelaser light 220 based on the input light receiving signal.
Further, the polarizationoptical system 225 has acondenser lens 226, an Electro-optical deflecting Element (EOD) 227, and acollimator lens 228.
In the polarizingoptical system 225, thelaser beam 220 is condensed by acondenser lens 226 to an electron optical deflection element 227. The electron optical deflection element 227 is an element capable of controlling the irradiation position of thelaser light 220. Theexposure apparatus 200 can change the irradiation position of thelaser beam 220 introduced onto the moving optical table 232 by the electro-optical deflection element 227. Thelaser beam 220 is adjusted in irradiation position by the electron optical deflection element 227, and then converted again into a parallel beam by thecollimator lens 228. Thelaser light 220 emitted from the polarizationoptical system 225 is reflected by asecond mirror 231 and is directed horizontally and in parallel onto a moving optical table 232.
The movingoptical stage 232 has a Beam Expander (BEX) 233 and anobjective lens 234. Thelaser beam 220 guided to the movableoptical stage 232 is shaped into a desired beam shape by abeam expander 233, and then irradiated to the resist layer of thesubstrate 110a through anobjective lens 234. Further, the moving optical table 232 moves only one feed pitch in the arrow R direction (feed pitch direction) with each rotation of thebase material 110 a. Thesubstrate 110a is set on theturntable 236. Thespindle motor 235 rotates theturntable 236 to rotate thesubstrate 110 a.
Further, thecontrol mechanism 237 has a formatter (フォーマッタ)240 and adriver 230, and controls the irradiation of thelaser light 220. Theformatter 240 generates a modulation signal that controls irradiation of thelaser light 220, and thedriver 230 controls thelaser light source 221 based on the modulation signal generated by theformatter 240. Thereby, irradiation of thelaser beam 220 to thesubstrate 110a is controlled.
Theformatter 240 generates a control signal for irradiating thelaser 220 to themaster 110 based on an input image drawn in an arbitrary pattern drawn on themaster 110. Specifically, first, theformatter 240 takes an input image drawn by an arbitrary pattern drawn on themaster 110. The input image is an image corresponding to a developed view of the outer peripheral surface of themaster 110, which is obtained by cutting the outer peripheral surface of themaster 110 in the axial direction and extending in one plane. Next, theformatter 240 divides the input image into small regions of a predetermined size (for example, into a grid pattern), and determines whether or not a drawing pattern is included in each of the small regions. Then, theformatter 240 generates a control signal for controlling the irradiation of thelaser light 220 to each small region determined to contain the drawing pattern. Further, thedriver 230 controls the output of thelaser light source 221 based on the control signal generated by theformatter 240. Thereby controlling the irradiation of thelaser beam 220 to themaster 110.
< 6. method for producing filler-filled film
Next, a method for producing filler-filledfilm 1 will be described. First, themaster 110 is prepared. Next, the circumferential surface shape of themaster 110 is transferred onto thetransfer target film 2a by using thetransfer device 100. Thereby, thefilm body 2 is produced. Next, the plurality ofrecesses 3 formed in the surface of thefilm body 2 are filled with thefiller 4. Here, there is no particular requirement for the method of filling thefiller 4 in therecess 3. For example, thefiller 4 is dispersed on the surface of thefilm body 2. Next, the surface of thefilm body 2 is wiped with cloth or the like. Thereby, thefiller 4 can be filled in theconcave portion 3 formed on the surface of the filmmain body 2. When only a part of theconcave portion 3 is cured, theconcave portion 3 may be completely cured after theconcave portion 3 is filled with thefiller 4. Thereby, thefiller 4 is integrated with thefilm body 2 in therecess 3. Thefiller 4 filled in the filler-filledfilm 1 may be transferred to another film or the like. Further, such transfer films may be laminated in order. Further, the film may be laminated with another film. That is, by repeating transfer and lamination, a part or all of the filler is provided at a predetermined position of another film.
Examples
(examples)
Next, examples of the present invention will be explained. In the embodiment, thefilm body 2 is manufactured using thetransfer apparatus 100. Themaster 110 is manufactured by the following steps. Specifically, DLC (Diamond Like Carbon) having a film thickness of 800nm was formed as an intermediate layer on the outer peripheral surface of asubstrate 110a made of cylindrical quartz glass having a thickness of 4.5mm by CVD (Chemical Vapor Deposition) using a hydrocarbon gas. Subsequently, tungsten oxide having a film thickness of 55nm was formed as a resist layer on the intermediate layer by a sputtering method.
Next, thermal etching with laser light is performed by theexposure apparatus 100, and a latent image is formed in the resist layer. The laser light source of theexposure apparatus 100 uses a blue semiconductor laser that emits laser light having a wavelength of 405 nm. The exposure pattern used was an array pattern in which circles having a diameter of 7 μm were arranged in a hexagonal lattice at a pitch of 10 μm (distance between centers of circles). In addition, theexposure apparatus 100 exposes the portion other than the circle having the diameter of 7 μm so that the circle having the diameter of 7 μm becomes a convex portion on the master (that is, the circle having the diameter of 7 μm becomes aconcave portion 3 in thefilm body 2 after the transfer).
Next, thesubstrate 110a on which the resist layer was exposed was developed using a 2.38 mass% aqueous solution of TMAH (tetramethylammonium hydroxide), and the resist layer of the exposed portion was dissolved.
Further, the resist layer after development was used as a mask, and the mask was made of O2The gas undergoes reactive ion etching to etch the intermediate layer. Next, thesubstrate 110a is etched by reactive ion etching with a CF-based gas using the resist layer and the intermediate layer as masks. The etching of thesubstrate 110a was performed until the height of theprojection 113 was 7 μm so that the aspect ratio of therecess 3 in thefilm body 2 was 1. Through the above steps, thecylindrical master 110 having the concave-convex structure formed on the outer peripheral surface is produced.
Subsequently, a photocurable resin composition containing 100 parts by mass of an acrylate resin (M208, Tokya) and 2 parts by mass of a photopolymerization initiator (IRGCUR184, BASF) was coated on a base film (thickness: 50 μ M) of PET having a width of 50cm so that the film thickness was 30 μ M. Further, the original plate is pressed against the base film by using thetransfer device 100, and the uneven structure is transferred to the base film having a length of more than 1000 m. The light irradiation was performed at 1000mJ using a high-pressure mercury lamp. Thus, afilm body 2 was produced in which circular recesses having a diameter of 7 μm and a depth of 7 μm (aspect ratio 1) were arranged in a hexagonal lattice with the distance between the centers of the recesses being 10 μm.
Further, 1mm at 100 is arbitrarily extracted2The number of concave portions in each representative region was measured by an optical microscope. The total number of the counted number in each representative region is divided by the total area of the representative region, thereby calculating the areal density of the recesses 3 (the number ofrecesses 3 formed per unit area of the film body 2). As a result, the areal density of therecesses 3 was 11,500 pieces/mm21,150,000 pieces/cm2. Here, theconcave portions 3 to be counted are theconcave portions 3 that are not connected to each other (theconvex portions 3b are present between the concave portions 3). That is, in the present embodiment, the mutuallyconnected recesses 3 are determined to be defective. Such a defect is caused by a positional shift of therecess 3 or the like.
Further, Epostar MA1006 manufactured by Japan catalyst corporation was prepared, and the resin filler was classified into an average diameter of 5 μm. The diameter of the resin filler is a diameter when each particle of the resin filler is regarded as a sphere, i.e., a sphere-equivalent diameter. Further, the average diameter refers to an arithmetic average of the diameters of the resin fillers. The classification was performed using an image type particle size distribution meter FPIA3000 (manufactured by Sysmex, Malvern). The classified resin filler was used asfiller 4. The filling of thefiller 4 is carried out according to the method described above. That is, thefiller 4 is dispersed on the surface of thefilm body 2. Next, thepad 4 is filled into therecess 3 by wiping thepad 4 with a cloth. Thus, a filler-filledfilm 1 was produced.
Further, 1mm at 100 is arbitrarily extracted2The number offillers 4 in each representative region was measured by an optical microscope. The total number of the counted numbers in each representative region is divided by the total area of the representative region, and the areal density of the filler 4 (the number of therecesses 3 formed per unit area of the film body 2) is calculated. As a result, the areal density of thefiller 4 was 11,500 pieces/mm21,150,000 pieces/cm2. Thefiller 4 to be counted is thefiller 4 completely filled in therecess 3. Even when therecesses 3 are connected to each other, thefiller 4 is counted when thefiller 4 is completely filled in therecess 3. The measurement of the filling rate of the filler described later is also similarly targeted for counting. When 2recesses 3 are connected, a maximum of 2fillers 4 can be filled in therecesses 3.
Then, the filler filling ratio at each point 1m, 250m, 500m, 750m, and 1000m from the leading edge (edge initially inserted into the master 110) was calculated with a point 1m from the leading edge in the longitudinal direction P of thefiller filling film 1 as one end F (starting point) and a point 1000m from the leading edge as the other end R (ending point).
Specifically, the unit array pattern M including each spot is extracted, and the unit array pattern M existing in the range of 10cm (20% of the film width) on the positive direction side in the longitudinal direction P with respect to the unit array pattern M is extracted. These unit array patterns M are defined as the measurement target regions.
Further, a representative region of 200 μm to 200 μm is set to about 25cm in the measurement target region2On the left and right sides, the number offillers 4 in each representative region was measured by observation with an optical microscope. The filler filling rate is measured by dividing the sum of the measured values in each representative region by the sum of the ideal number offillers 4 present in each representative region. The filling rate of the filler at each site is shown in table 1 below. As shown in table 1, when the length of the filler-filledfilm 1 was 1000m, the filler filling rate from the front end edge 1m and the filler filling rates at the points 250m, 500m, 750m, and 1000m were almost unchanged. Therefore, a stable (i.e., highly reproducible) filler filling ratio can be obtained at 0.1%, 25%, 50%, 75%, and 100% of the entire length of the filler-filledfilm 1.
[ Table 1]
| Length position (m) | Filling ratio (%) |
| 1 | 99.9 |
| 250 | 99.9 |
| 500 | 99.9 |
| 750 | 99.9 |
| 1000 | 99.8 |
The filling rate was measured similarly at a point 100m from the front end edge, and almost the same values as in table 1 were obtained. As can be seen from this, in the present example, the difference between the filler filling rate in the one end portion F of thefilm body 2 and the filler filling rate in the other portion of thefilm body 2 was 0.1% or less. In the filler-filledfilm 1, therecesses 3 are arranged in a hexagonal lattice shape, that is, in the closest-packed pattern. That is, in the filler-filledfilm 1, thefillers 4 are filled in the closest-packed pattern. Moreover, even with such an arrangement pattern, a very stable (i.e., very high reproducibility) filler filling ratio is obtained in the longitudinal direction of the filler-filledfilm 1. Therefore, the same effect can be expected by filling thefiller 4 in any arrangement pattern as long as therecess 3 is provided.
In the representative region, defects of theconcave portions 3 continuing in the longitudinal direction P were observed, and no portion having 10 or more continuous defects was observed.
Comparative example
A stamp master having projections of the same alignment pattern as in example was obtained by mechanically cutting a SUS plate having a size of 10cm by 10 cm. Further, a fluorine-based release agent (DAIFREEGA 70500 manufactured by Daiko industries) was sprayed on the surface (uneven surface) of the stamp master on which the convex portions were formed. The film body is produced by performing the same process except that themaster 110 of thetransfer apparatus 100 is replaced with a stamp master.
As a result of observing the shape of the concave portion of the film body with an optical microscope, a defect of the concave portion (connection between the concave portions) was observed at a point where the stamp was repeated 200 times (a point 20m from the front end edge). Here, the stamp was stopped when the stamp was repeated more than 200 times, and the concave portion was filled with the filler. The filler was the same as in the examples. The filling rate of the filler was measured at a point 200m from the front edge, and as a result, the filling rate was 99.5%. Then, as the number of times of the stamp is increased, the number of defects of the concave portion is also increased. Therefore, as the number of stamps was increased, the unevenness of the filling rate of the filler was increased, and the filling rate of the filler was estimated to be a value lower than 99.5%.
From the above results, it was found that the filler filling ratio in the examples can be maintained in a range higher than that in the comparative examples.
As described above, the filler filling rate of the filler-filledfilm 1 of the present embodiment is more stable. Here, thefilm body 2 may be a long film. In the conventional filler-filled film, the longer thefilm body 2 is, the more the filler filling rate becomes unstable, and therefore, the effect of the present embodiment is more easily exhibited remarkably.
Further, the filler filling rate may also have a periodicity along the length direction of the filmmain body 2. Even in such a case, the filler filling rate is stable.
All therecesses 3 may have substantially the same shape. In this case, the packing ratio is more stable.
Further, the amount of filler filled per unit area of the filmmain body 2 may be 50,000,000 pieces/cm2The following. Even in this case, the filler filling rate is stable.
Thefiller 4 may be integrated with thefilm body 2 in therecess 3. In this case, the wasteful consumption of thefiller 4 can be suppressed, and the filler filling rate can be further stabilized.
Further, the film may havecoating layers 5, 6, and 7 formed on at least a part of the surface of thefilm body 2. Even in this case, the filler filling rate is stable. Further, the coating layers 5, 6, and 7 are formed according to the use of the filler-filledfilm 1, and the use of the filler-filledfilm 1 can be expanded.
Further, the coating layer may be formed on at least a part of the surface of the recess, the surface of the projection between the recesses, and the exposed surface of the filler. In this case, the packing ratio is also stable.
The coating layer may contain an inorganic material. In this case, the packing ratio is also stable.
Further, the film main body may be formed of a curable resin or a plastic resin. In this case, the packing ratio is also stable.
In the present embodiment, the filler-filledfilm 1 may be a sheet-like film. In this case, the sheet-like film has stable quality.
Further, a laminated film in which a plurality of films are laminated may be formed. In this case, the quality of the laminated film is stable.
In addition, an adhesive layer formed on the back surface of the film main body may be provided. This makes it possible to easily bond the filler-filledfilm 1 to anothersubstrate 31 or the like.
In the present embodiment, the bonded body 30 can also be produced by bonding the films to thebase material 31. In this case, the function of the bonded body 30 can be stabilized. This is because the filler filling rate of the filler-filledfilm 1 and the like is stable.
While preferred embodiments of the present invention have been described in detail with reference to the accompanying drawings, the present invention is not limited to these examples. It is obvious that a person having ordinary knowledge in the technical field of the present invention can conceive various modifications and alterations within the scope of the technical idea described in the claims, and these should be understood as falling within the technical scope of the present invention.
Description of the symbols
1. 1 a-1 d filler filled film
2 film body
3 concave part
4 stuffing
5. 6, 7 coating layer
8 adhesive layer