CN113776994B - Piezoelectric-excitation annular-surface micro-control device and working method thereof - Google Patents
Piezoelectric-excitation annular-surface micro-control device and working method thereofDownload PDFInfo
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Abstract
Translated fromChinese
Description
Translated fromChinese技术领域technical field
本发明涉及压电换能器、声操控和微球操控领域，尤其涉及一种压电激励的圆环面内微操控装置及其工作方法。The invention relates to the fields of piezoelectric transducers, acoustic manipulation and microsphere manipulation, in particular to a piezoelectric excitation in-toroid micro manipulation device and a working method thereof.
背景技术Background technique
微操控技术对于生物、医疗、化学等领域有着广泛的应用前景。目前，对于微操控技术的研究，已发展出多种类型的微操控装置。其中，按照微操控装置基于的原理可以将它们分为光镊、磁镊、电镊、声镊（声操控）等。然而，光镊在工作过程中由于激光产生大量热量可能对微颗粒表面造成损伤，且光镊价格高昂、结构复杂，不适用于大规模应用。磁镊和电镊对被操控物体的属性有选择性，需要被操控物体具有磁性或电荷才可以操控。对于不满足条件的颗粒，磁镊和电镊需要对被操控颗粒进行处理，而处理过程可能会对颗粒造成损伤。声镊与上述微操控装置不同，对被操控物体的属性没有特殊要求，且具有高生物相容性、无损、稳定操控的优点。所以，声操控具有更广阔的应用前景。Micro-manipulation technology has broad application prospects in biology, medicine, chemistry and other fields. At present, for the research of micro-control technology, various types of micro-control devices have been developed. Among them, micro-manipulation devices can be divided into optical tweezers, magnetic tweezers, electric tweezers, acoustic tweezers (acoustic manipulation), etc. according to the principle they are based on. However, the optical tweezers may cause damage to the surface of the microparticles due to the large amount of heat generated by the laser during the working process, and the optical tweezers are expensive and complex, making them unsuitable for large-scale applications. Magnetic tweezers and electric tweezers are selective for the properties of the object to be manipulated, and the object to be manipulated needs to be magnetic or electric to be manipulated. For particles that do not meet the conditions, magnetic tweezers and electric tweezers need to process the particles to be manipulated, and the processing may cause damage to the particles. Different from the above-mentioned micro-manipulation devices, acoustic tweezers have no special requirements on the properties of the manipulated object, and have the advantages of high biocompatibility, non-destructive and stable manipulation. Therefore, acoustic manipulation has broader application prospects.
声操控按照产生声波的类型可以分为表面声波和体声波。表面声波一般由叉指换能器激发，而体声波一般由压电陶瓷激发。相比于体声波器件，表面声波器件结构复杂，造价高。体声波器件结构简单、可以对大尺度微颗粒（亚毫米级）进行有效操控。体声波微操控装置的工作原理主要是由压电换能器激励出装置的振动模态，从而产生相应的声场。而处于液体环境中的微球在声场中会朝着声压节点运动。压电陶瓷激发的振动模态可以分为面外振动模态和面内振动模态。Acoustic manipulation can be divided into surface acoustic waves and bulk acoustic waves according to the type of sound waves generated. Surface acoustic waves are generally excited by interdigital transducers, while bulk acoustic waves are generally excited by piezoelectric ceramics. Compared with bulk acoustic wave devices, surface acoustic wave devices have complex structures and high cost. BAW devices have a simple structure and can effectively manipulate large-scale micro-particles (sub-millimeter scale). The working principle of the bulk acoustic wave micro-manipulation device is mainly to excite the vibration mode of the device by the piezoelectric transducer, thereby generating the corresponding sound field. The microspheres in the liquid environment will move towards the sound pressure node in the sound field. The vibration modes excited by piezoelectric ceramics can be divided into out-of-plane vibration modes and in-plane vibration modes.
面外振动模态由于质点振动方向与被操控颗粒运动方向垂直，在微球运动中会产生振荡现象，使操控稳定性下降。而面内振动模态由于质点运动方向与被操控颗粒运动方向平行，意味着其可以用于提高微操控装置的操控稳定性，减少操控过程中的振荡问题。所以，为了实现对于大尺度微颗粒的无损、稳定操控，本发明提出一种基于面内体声波的压电激励的圆环微操控装置。In the out-of-plane vibration mode, since the vibration direction of the particle is perpendicular to the motion direction of the controlled particle, oscillation will occur during the motion of the microsphere, which reduces the control stability. The in-plane vibration mode, because the moving direction of the particle is parallel to the moving direction of the controlled particle, means that it can be used to improve the control stability of the micro-control device and reduce the oscillation problem during the control process. Therefore, in order to achieve non-destructive and stable manipulation of large-scale micro-particles, the present invention proposes a ring-shaped micro-manipulation device based on piezoelectric excitation of in-plane bulk acoustic waves.
发明内容SUMMARY OF THE INVENTION
本发明所要解决的技术问题是针对背景技术中所涉及到的缺陷，提供一种压电激励的圆环面内微操控装置及其工作方法。The technical problem to be solved by the present invention is to provide a piezoelectric excitation in-toroidal micro-manipulation device and a working method thereof, aiming at the defects involved in the background technology.
本发明为解决上述技术问题采用以下技术方案：The present invention adopts the following technical solutions for solving the above-mentioned technical problems:
一种压电激励的圆环面内微操控装置，包括容器、换能器阵列和基板；A piezoelectric excitation micro-manipulation device in a torus, comprising a container, a transducer array and a substrate;
所述换能器阵列包含第一至第四换能器；the transducer array includes first to fourth transducers;
所述第一至第四换能器结构相同，均包括预紧螺栓、预紧柱、压电陶瓷模块、夹持座、以及连接台；The first to fourth transducers have the same structure, including pre-tightening bolts, pre-tightening columns, piezoelectric ceramic modules, clamping seats, and connecting platforms;
所述预紧螺栓包含螺帽和螺柱；所述预紧柱为正棱柱或圆柱体，其一个端面中心设有和所述预紧螺栓相匹配的沉头通孔；The preloaded bolt includes a nut and a stud; the preloaded column is a right prism or a cylinder, and the center of one end face is provided with a countersunk head through hole matching the preloaded bolt;
所述连接台包含第一连接部和第二连接部，其中，所述第一连接部为正棱柱或圆柱体，所述第二连接部为面积较大的端面和第一连接部一端端面形状相同的正棱台或圆台，且第二连接部为面积较大的端面和所述第一连接部一端对应同轴固连；所述第一连接部的另一端设有和所述预紧螺栓相匹配的螺纹孔；The connection table includes a first connection part and a second connection part, wherein the first connection part is a regular prism or a cylinder, and the second connection part is an end face with a larger area and an end face shape of one end of the first connection part The same regular prism or circular susceptor, and the second connecting part is an end face with a larger area and one end of the first connecting part is correspondingly fixed coaxially; the other end of the first connecting part is provided with the pre-tightening bolt Matching threaded holes;
所述压电陶瓷模块包含2组压电陶瓷片，每组压电陶瓷片均包含n片圆环状的压电陶瓷片，n为大于等于1的自然数；The piezoelectric ceramic module includes two groups of piezoelectric ceramic sheets, each group of piezoelectric ceramic sheets includes n annular piezoelectric ceramic sheets, and n is a natural number greater than or equal to 1;
所述夹持座包括连接圆环、连接条和固定部；所述连接条一端和所述连接圆环的外壁固连且指向连接圆环的圆心，另一端和所述固定部固连；所述固定部用于和所述基板固连；所述连接条在靠近连接圆环一端的两个侧面上对应设有和连接条长度方向垂直的凹槽，形成柔铰；The clamping seat includes a connecting ring, a connecting bar and a fixing part; one end of the connecting bar is fixedly connected with the outer wall of the connecting ring and points to the center of the connecting ring, and the other end is fixedly connected with the fixing part; the fixing part is used for fixing the base plate; the connecting strip is correspondingly provided with grooves perpendicular to the length direction of the connecting strip on two side surfaces close to one end of the connecting ring to form a flexible hinge;
所述预紧螺栓的螺柱依次穿过所述预紧柱的沉头通孔、1组压电陶瓷片、夹持座的连接圆环、另1组压电陶瓷片后和所述连接台的螺纹孔螺纹相连，将2组压电陶瓷片压紧；The studs of the pre-tightening bolts pass through the countersunk head through holes of the pre-tightening column, one group of piezoelectric ceramic sheets, the connecting ring of the clamping seat, the other group of piezoelectric ceramic sheets and the connecting table. The threaded holes are connected by thread, and the 2 groups of piezoelectric ceramic sheets are pressed tightly;
所述2组压电陶瓷片关于连接圆环对称设置，每组压电陶瓷片中的压电陶瓷片均沿其厚度方向极化，且同一组压电陶瓷片中相邻压电陶瓷片的极化方向相反；The two groups of piezoelectric ceramic sheets are symmetrically arranged about the connection ring, the piezoelectric ceramic sheets in each group of piezoelectric ceramic sheets are polarized along its thickness direction, and the adjacent piezoelectric ceramic sheets in the same group of piezoelectric ceramic sheets are polarized. The direction of polarization is opposite;
所述容器呈圆环状，其上端面设有和容器同轴的环形凹槽，用于盛放承载液体介质以及待操控的微球；所述容器的外壁上周向均匀设有四个端面和所述第二连接部面积较小的端面形状相同的凸台；The container is in the shape of an annular shape, and its upper end surface is provided with an annular groove coaxial with the container, which is used to hold the carrying liquid medium and the microspheres to be manipulated; the outer wall of the container is uniformly provided with four end surfaces in the circumferential direction. a boss having the same shape as the end face with a smaller area of the second connecting portion;
所述第一至第四换能器第二连接部面积较小的端面分别和所述容器的外壁上四个凸台一一对应固连，使得第一至第四换能器连接台的轴线均指向容器的中心；且第一至第四换能器的固定部均和所述基板的上端面固连。The end faces of the second connection parts of the first to fourth transducers with smaller area are respectively fixedly connected with the four bosses on the outer wall of the container in a one-to-one correspondence, so that the axes of the connection platforms of the first to fourth transducers All point to the center of the container; and the fixing parts of the first to fourth transducers are all fixedly connected with the upper end surface of the base plate.
作为本发明一种压电激励的圆环面内微操控装置进一步的优化方案，所述预紧柱为圆柱体，第一连接部为正四棱柱, 第二连接部为正四棱台。As a further optimized solution of a piezoelectrically excited torus in-plane micro-manipulation device of the present invention, the preloading column is a cylinder, the first connecting portion is a regular quadrangular prism, and the second connecting portion is a regular quadrangular prism.
作为本发明一种压电激励的圆环面内微操控装置进一步的优化方案，所述第一至第四换能器的固定部呈条状，其一端和其对应连接条垂直固连，且固定部通过螺栓和所述基板固连。As a further optimized solution of the piezoelectric excitation in-toroidal micro-manipulation device of the present invention, the fixing parts of the first to fourth transducers are in the shape of strips, one end of which is vertically fixed with the corresponding connecting strip, and The fixing part is fastened to the base plate by means of bolts.
作为本发明一种压电激励的圆环面内微操控装置进一步的优化方案，所述n取2。As a further optimized solution of a piezoelectrically excited in-circle micro-manipulation device of the present invention, the n is taken as 2.
本发明还公开了一种该压电激励的圆环面内微操控装置的控制方法，包括以下步骤：The invention also discloses a control method of the piezoelectrically excited torus in-plane micro-manipulation device, comprising the following steps:
令第一至第四换能器在基板上按顺时针依次排列，对第一至第四换能器分别施加第一至第四简谐电压信号；The first to fourth transducers are arranged on the substrate in a clockwise order, and the first to fourth harmonic voltage signals are respectively applied to the first to fourth transducers;
所述第一至第四简谐电压信号均为交流谐波信号，电压幅值相等，相位依次相差π/2且角频率均等于预设的旋转模态频率值ω，同时在容器上激发出空间相位差为π/2的面内振动模态，进而在容器中耦合出行波模态；The first to fourth simple harmonic voltage signals are all AC harmonic signals, the voltage amplitudes are equal, the phases differ by π/2 in turn, and the angular frequencies are all equal to the preset rotational modal frequency value ω. The in-plane vibration mode with a spatial phase difference of π/2 is then coupled to the traveling wave mode in the container;
在行波模态下，圆环容器内的承载液体介质中产生相应的声压场，声压场的大小分布与振型的幅值分布相对应；随着在圆环容器内激发的行波模态旋转，声压场也随之旋转；由于放置在容器承载液体介质内的微球在声压场中受到声辐射力和液体粘滞力的作用朝着声压节点运动，而声压场的旋转导致声压节点产生绕圆环容器圆心的旋转，所以微球会在声辐射力和液体粘滞力的作用下绕着容器中心做旋转运动，从而实现对微球的旋转操控。In the traveling wave mode, the corresponding sound pressure field is generated in the supporting liquid medium in the annular container, and the size distribution of the sound pressure field corresponds to the amplitude distribution of the mode shape; with the traveling wave excited in the annular container The mode rotates, and the sound pressure field also rotates; because the microspheres placed in the container-bearing liquid medium are affected by the sound radiation force and the liquid viscous force in the sound pressure field and move toward the sound pressure node, while the sound pressure field The rotation of the sound pressure node produces a rotation around the center of the torus container, so the microspheres will rotate around the center of the container under the action of the acoustic radiation force and the liquid viscous force, so as to realize the rotation control of the microspheres.
本发明还公开了另一种压电激励的圆环面内微操控装置，包括容器、换能器阵列和基板；The invention also discloses another piezoelectric excitation in-toroid micro-manipulation device, comprising a container, a transducer array and a substrate;
所述换能器阵列包含第一至第四换能器；the transducer array includes first to fourth transducers;
所述第一至第四换能器结构相同，均包含基体、连接块、固定座、第一压电陶瓷片和第二压电陶瓷片；The first to fourth transducers have the same structure and include a base body, a connecting block, a fixing seat, a first piezoelectric ceramic sheet and a second piezoelectric ceramic sheet;
所述基体为正四棱柱包含两个端面和依次首尾相连的第一至第四侧壁，其中，第一侧壁平行于第三侧壁，第二侧壁平行于第四侧壁；The base body is a regular quadrangular prism including two end faces and first to fourth side walls connected end to end in sequence, wherein the first side wall is parallel to the third side wall, and the second side wall is parallel to the fourth side wall;
所述连接块为面积较大的端面和基体一端端面形状相同的正四棱台，且连接块为面积较大的端面和所述基体一端对应同轴固连；The connecting block is a regular quadrangular prism with the same shape as the end face with a larger area and one end face of the base body, and the connecting block is an end face with a larger area and one end of the base body correspondingly coaxially fixed;
所述固定座包含连接条和固定部；所述连接条一端和所述基体的第三侧壁垂直固连，另一端和所述固定部固连；所述固定部用于和所述基板固连；所述连接条在靠近基体一端的两个侧面上对应设有和连接条长度方向垂直的凹槽，形成柔铰；The fixing base includes a connecting bar and a fixing part; one end of the connecting bar is vertically fixed with the third side wall of the base body, and the other end is fixed with the fixing part; the fixing part is used for fixing with the base plate. connected; the connecting strip is correspondingly provided with grooves perpendicular to the length direction of the connecting strip on two side surfaces close to one end of the base to form a flexible hinge;
所述第一、第二压电陶瓷片分别设置在所述基体的第二、第四侧壁上，均沿厚度方向极化，且第一、第二压电陶瓷片的极化方向相反；The first and second piezoelectric ceramic sheets are respectively disposed on the second and fourth sidewalls of the base body, and both are polarized along the thickness direction, and the polarization directions of the first and second piezoelectric ceramic sheets are opposite;
所述容器呈圆环状，其上端面设有和容器同轴的环形凹槽，用于盛放承载液体介质以及待操控的微球；所述容器的外壁上周向均匀设有四个端面和所述第二连接部面积较小的端面形状相同的凸台，且容器的下端面和所述基体的第三侧壁平行；The container is in the shape of an annular shape, and its upper end surface is provided with an annular groove coaxial with the container, which is used to hold the carrying liquid medium and the microspheres to be manipulated; the outer wall of the container is uniformly provided with four end surfaces in the circumferential direction. a boss having the same shape as the end face with the smaller area of the second connecting portion, and the lower end face of the container is parallel to the third side wall of the base body;
所述第一至第四换能器第二连接部面积较小的端面分别和所述容器的外壁上四个凸台一一对应固连，使得第一至第四换能器连接台的轴线均指向容器的中心；且第一至第四换能器的固定部均和所述基板的上端面固连。The end faces of the second connection parts of the first to fourth transducers with smaller area are respectively fixedly connected with the four bosses on the outer wall of the container in a one-to-one correspondence, so that the axes of the connection platforms of the first to fourth transducers All point to the center of the container; and the fixing parts of the first to fourth transducers are all fixedly connected with the upper end surface of the base plate.
作为该另一种压电激励的圆环面内微操控装置进一步的优化方案，所述第一至第四换能器的固定部呈条状，其一端和其对应连接条垂直固连，且固定部通过螺栓和所述基板固连。As a further optimized solution of the another piezoelectric excitation in-toroidal micro-manipulation device, the fixing parts of the first to fourth transducers are strip-shaped, one end of which is vertically fixed with the corresponding connecting strip, and The fixing part is fastened to the base plate by means of bolts.
本发明还公开了该另一种压电激励的圆环面内微操控装置的控制方法，包括以下步骤：The present invention also discloses another control method of the piezoelectrically excited torus in-plane micro-manipulation device, comprising the following steps:
令第一至第四换能器在基板上按顺时针依次排列，对第一至第四换能器分别施加第一至第四简谐电压信号；The first to fourth transducers are arranged on the substrate in a clockwise order, and the first to fourth harmonic voltage signals are respectively applied to the first to fourth transducers;
所述第一至第四简谐电压信号均为交流谐波信号，电压幅值相等，相位依次相差π/2且角频率均等于预设的旋转模态频率值ω，同时在容器上激发出空间相位差为π/2的面内振动模态，进而在容器中耦合出行波模态；The first to fourth simple harmonic voltage signals are all AC harmonic signals, the voltage amplitudes are equal, the phases differ by π/2 in turn, and the angular frequencies are all equal to the preset rotational modal frequency value ω. The in-plane vibration mode with a spatial phase difference of π/2 is then coupled to the traveling wave mode in the container;
在行波模态下，圆环容器内的承载液体介质中产生相应的声压场，声压场的大小分布与振型的幅值分布相对应；随着在圆环容器内激发的行波模态旋转，声压场也随之旋转；由于放置在容器承载液体介质内的微球在声压场中受到声辐射力和液体粘滞力的作用朝着声压节点运动，而声压场的旋转导致声压节点产生绕圆环容器圆心的旋转，所以微球会在声辐射力和液体粘滞力的作用下绕着容器中心做旋转运动，从而实现对微球的旋转操控。In the traveling wave mode, the corresponding sound pressure field is generated in the supporting liquid medium in the annular container, and the size distribution of the sound pressure field corresponds to the amplitude distribution of the mode shape; with the traveling wave excited in the annular container The mode rotates, and the sound pressure field also rotates; because the microspheres placed in the container-bearing liquid medium are affected by the sound radiation force and the liquid viscous force in the sound pressure field and move toward the sound pressure node, while the sound pressure field The rotation of the sound pressure node produces a rotation around the center of the torus container, so the microspheres will rotate around the center of the container under the action of the acoustic radiation force and the liquid viscous force, so as to realize the rotation control of the microspheres.
本发明采用以上技术方案与现有技术相比，具有以下技术效果：Compared with the prior art, the present invention adopts the above technical scheme, and has the following technical effects:
1. 结构简单、设计容易，可以降低微操控装置的成本；1. The structure is simple and the design is easy, which can reduce the cost of the micro-control device;
2. 采用压电激励的体声波作为驱动源，可以实现对于大尺度(亚毫米极)微颗粒的无损、非接触操控；2. The use of piezoelectrically excited bulk acoustic waves as the driving source can realize non-destructive and non-contact manipulation of large-scale (sub-millimeter) micro-particles;
3. 采用面内振动模态，可以提高微颗粒操控的稳定性，减少因共振而产生的承载液体介质振荡问题。3. The use of in-plane vibration mode can improve the stability of micro-particle manipulation and reduce the oscillation problem of the bearing liquid medium caused by resonance.
附图说明Description of drawings
图1是本发明中一种布置方式的结构示意图；1 is a schematic structural diagram of an arrangement in the present invention;
图2是本发明中第一换能器的结构示意图；Fig. 2 is the structural representation of the first transducer in the present invention;
图3是本发明中夹持座的结构示意图；Fig. 3 is the structural representation of the clamping seat in the present invention;
图4是本发明中另一种布置方式的结构示意图；4 is a schematic structural diagram of another arrangement in the present invention;
图5是本发明中电信号施加方式示意图；5 is a schematic diagram of an electrical signal application mode in the present invention;
图6是本发明中耦合出行波模态的其中一个模态仿真示意图；Fig. 6 is one of the modal simulation schematic diagrams of coupled traveling wave modes in the present invention;
图7是本发明中耦合出行波模态的相差π/2空间相位差的另一个模态仿真示意图；Fig. 7 is another mode simulation schematic diagram of the phase difference of π/2 space phase difference of the coupled traveling wave mode in the present invention;
图8是本发明中耦合出的行波模态在一个周期内的仿真示意图；Fig. 8 is the simulation schematic diagram of the traveling wave mode coupled out in one cycle in the present invention;
图9是本发明中微球在圆环容器中进行旋转操控的示意图。FIG. 9 is a schematic diagram of the rotation control of the microspheres in the annular container according to the present invention.
图中，1-圆环容器，2-第三换能器，3-基板，4-基体，5-第二压电陶瓷片，2.1-预紧螺栓，2.2-预紧柱，2.3-压电陶瓷模块，2.4-夹持座，2.5-连接台，2.4.1-连接圆环，2.4.2-柔铰，2.4.3-连接条，2.4.4-固定部。In the figure, 1-ring container, 2-third transducer, 3-substrate, 4-base, 5-second piezoelectric ceramic sheet, 2.1-preload bolt, 2.2-preload column, 2.3-piezoelectric Ceramic module, 2.4-holding seat, 2.5-connecting table, 2.4.1-connecting ring, 2.4.2-flexible hinge, 2.4.3-connecting strip, 2.4.4-fixing part.
具体实施方式Detailed ways
下面结合附图对本发明的技术方案做进一步的详细说明：Below in conjunction with accompanying drawing, the technical scheme of the present invention is described in further detail:
本发明可以以许多不同的形式实现，而不应当认为限于这里所述的实施例。相反，提供这些实施例以便使本公开透彻且完整，并且将向本领域技术人员充分表达本发明的范围。在附图中，为了清楚起见放大了组件。The present invention may be embodied in many different forms and should not be considered limited to the embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, components are exaggerated for clarity.
如图1所示，本发明公开了一种压电激励的圆环面内微操控装置，包括容器、换能器阵列和基板；As shown in FIG. 1 , the present invention discloses a piezoelectric excitation micro-manipulation device in a torus, including a container, a transducer array and a substrate;
所述换能器阵列包含第一至第四换能器；the transducer array includes first to fourth transducers;
如图2所示，所述第一至第四换能器结构相同，均包括预紧螺栓、预紧柱、压电陶瓷模块、夹持座、以及连接台；As shown in FIG. 2 , the first to fourth transducers have the same structure, including pre-tightening bolts, pre-tightening columns, piezoelectric ceramic modules, clamping bases, and connection platforms;
所述预紧螺栓包含螺帽和螺柱；所述预紧柱为正棱柱或圆柱体，其一个端面中心设有和所述预紧螺栓相匹配的沉头通孔；The preloaded bolt includes a nut and a stud; the preloaded column is a right prism or a cylinder, and the center of one end face is provided with a countersunk head through hole matching the preloaded bolt;
所述连接台包含第一连接部和第二连接部，其中，所述第一连接部为正棱柱或圆柱体，所述第二连接部为面积较大的端面和第一连接部一端端面形状相同的正棱台或圆台，且第二连接部为面积较大的端面和所述第一连接部一端对应同轴固连；所述第一连接部的另一端设有和所述预紧螺栓相匹配的螺纹孔；The connection table includes a first connection part and a second connection part, wherein the first connection part is a regular prism or a cylinder, and the second connection part is an end face with a larger area and an end face shape of one end of the first connection part The same regular prism or circular susceptor, and the second connecting part is an end face with a larger area and one end of the first connecting part is correspondingly fixed coaxially; the other end of the first connecting part is provided with the pre-tightening bolt Matching threaded holes;
所述压电陶瓷模块包含2组压电陶瓷片，每组压电陶瓷片均包含n片圆环状的压电陶瓷片，n为大于等于1的自然数；The piezoelectric ceramic module includes two groups of piezoelectric ceramic sheets, each group of piezoelectric ceramic sheets includes n annular piezoelectric ceramic sheets, and n is a natural number greater than or equal to 1;
如图3所示，所述夹持座包括连接圆环、连接条和固定部；所述连接条一端和所述连接圆环的外壁固连且指向连接圆环的圆心，另一端和所述固定部固连；所述固定部用于和所述基板固连；所述连接条在靠近连接圆环一端的两个侧面上对应设有和连接条长度方向垂直的凹槽，形成柔铰；As shown in FIG. 3 , the clamping base includes a connecting ring, a connecting bar and a fixing part; one end of the connecting bar is fixedly connected to the outer wall of the connecting ring and points to the center of the connecting ring, and the other end is connected to the outer wall of the connecting ring. the fixing part is fixedly connected; the fixing part is used for fixing the base plate; the two side surfaces of the connecting strip are correspondingly provided with grooves perpendicular to the length direction of the connecting strip on two sides close to one end of the connecting ring to form a flexible hinge;
所述预紧螺栓的螺柱依次穿过所述预紧柱的沉头通孔、1组压电陶瓷片、夹持座的连接圆环、另1组压电陶瓷片后和所述连接台的螺纹孔螺纹相连，将2组压电陶瓷片压紧；The studs of the pre-tightening bolts pass through the countersunk head through holes of the pre-tightening column, one group of piezoelectric ceramic sheets, the connecting ring of the clamping seat, the other group of piezoelectric ceramic sheets and the connecting table. The threaded holes are connected by thread, and the 2 groups of piezoelectric ceramic sheets are pressed tightly;
所述2组压电陶瓷片关于连接圆环对称设置，每组压电陶瓷片中的压电陶瓷片均沿其厚度方向极化，且同一组压电陶瓷片中相邻压电陶瓷片的极化方向相反；The two groups of piezoelectric ceramic sheets are symmetrically arranged about the connection ring, the piezoelectric ceramic sheets in each group of piezoelectric ceramic sheets are polarized along its thickness direction, and the adjacent piezoelectric ceramic sheets in the same group of piezoelectric ceramic sheets are polarized. The direction of polarization is opposite;
所述容器呈圆环状，其上端面设有和容器同轴的环形凹槽，用于盛放承载液体介质以及待操控的微球；所述容器的外壁上周向均匀设有四个端面和所述第二连接部面积较小的端面形状相同的凸台；The container is in the shape of an annular shape, and its upper end surface is provided with an annular groove coaxial with the container, which is used to hold the carrying liquid medium and the microspheres to be manipulated; the outer wall of the container is uniformly provided with four end surfaces in the circumferential direction. a boss having the same shape as the end face with a smaller area of the second connecting portion;
所述第一至第四换能器第二连接部面积较小的端面分别和所述容器的外壁上四个凸台一一对应固连，使得第一至第四换能器连接台的轴线均指向容器的中心；且第一至第四换能器的固定部均和所述基板的上端面固连。The end faces of the second connection parts of the first to fourth transducers with smaller area are respectively fixedly connected with the four bosses on the outer wall of the container in a one-to-one correspondence, so that the axes of the connection platforms of the first to fourth transducers All point to the center of the container; and the fixing parts of the first to fourth transducers are all fixedly connected with the upper end surface of the base plate.
所述预紧柱优先采用圆柱体，第一连接部优先采用正四棱柱, 第二连接部优先采用正四棱台，n优先取2。The preloading column is preferably a cylinder, the first connecting part is preferably a regular quadrangular prism, the second connecting part is preferably a regular quadrangular prism, and n is preferably 2.
所述第一至第四换能器的固定部呈条状，其一端和其对应连接条垂直固连，且固定部通过螺栓和所述基板固连。The fixing parts of the first to fourth transducers are in the shape of strips, one end of which is vertically fixed with the corresponding connecting strip, and the fixing parts are fixedly connected with the base plate by bolts.
本发明还公开了一种该压电激励的圆环面内微操控装置的控制方法，包括以下步骤：The invention also discloses a control method of the piezoelectrically excited torus in-plane micro-manipulation device, comprising the following steps:
如图5所示，令第一至第四换能器在基板上按顺时针依次排列，对第一至第四换能器分别施加第一至第四简谐电压信号U1、U2、U3、U4，；As shown in FIG. 5 , the first to fourth transducers are arranged clockwise on the substrate, and the first to fourth harmonic voltage signals U1, U2, U3, U4,;
所述第一至第四简谐电压信号均为交流谐波信号，电压幅值相等，相位依次相差π/2且角频率均等于预设的旋转模态频率值ω，同时在容器上激发出空间相位差为π/2的面内振动模态，如图6和图7所示，进而在容器中耦合出行波模态；一个周期内的行波振动模态仿真示意图如图8所示；The first to fourth simple harmonic voltage signals are all AC harmonic signals, the voltage amplitudes are equal, the phases differ by π/2 in turn, and the angular frequencies are all equal to the preset rotational modal frequency value ω. The in-plane vibration mode with a spatial phase difference of π/2 is shown in Figures 6 and 7, and then the traveling wave mode is coupled in the container; the simulation schematic diagram of the traveling wave vibration mode in one cycle is shown in Figure 8;
在行波模态下，圆环容器内的承载液体介质中产生相应的声压场，声压场的大小分布与振型的幅值分布相对应；随着在圆环容器内激发的行波模态旋转，声压场也随之旋转；由于放置在容器承载液体介质内的微球在声压场中受到声辐射力和液体粘滞力的作用朝着声压节点运动，而声压场的旋转导致声压节点产生绕圆环容器圆心的旋转，所以微球会在声辐射力和液体粘滞力的作用下绕着容器中心做旋转运动，从而实现对微球的旋转操控，如图9所示。In the traveling wave mode, the corresponding sound pressure field is generated in the supporting liquid medium in the annular container, and the size distribution of the sound pressure field corresponds to the amplitude distribution of the mode shape; with the traveling wave excited in the annular container The mode rotates, and the sound pressure field also rotates; because the microspheres placed in the container-bearing liquid medium are affected by the sound radiation force and the liquid viscous force in the sound pressure field and move toward the sound pressure node, while the sound pressure field The rotation of the sound pressure node causes the rotation of the sound pressure node around the center of the torus container, so the microspheres will rotate around the center of the container under the action of the acoustic radiation force and the liquid viscous force, so as to realize the rotation control of the microspheres, as shown in the figure 9 shown.
如图4所示，本发明还公开了另一种压电激励的圆环面内微操控装置，包括容器、换能器阵列和基板；As shown in FIG. 4 , the present invention also discloses another piezoelectric excitation in-toroidal micro-manipulation device, comprising a container, a transducer array and a substrate;
所述换能器阵列包含第一至第四换能器；the transducer array includes first to fourth transducers;
所述第一至第四换能器结构相同，均包含基体、连接块、固定座、第一压电陶瓷片和第二压电陶瓷片；The first to fourth transducers have the same structure and include a base body, a connecting block, a fixing seat, a first piezoelectric ceramic sheet and a second piezoelectric ceramic sheet;
所述基体为正四棱柱包含两个端面和依次首尾相连的第一至第四侧壁，其中，第一侧壁平行于第三侧壁，第二侧壁平行于第四侧壁；The base body is a regular quadrangular prism including two end faces and first to fourth side walls connected end to end in sequence, wherein the first side wall is parallel to the third side wall, and the second side wall is parallel to the fourth side wall;
所述连接块为面积较大的端面和基体一端端面形状相同的正四棱台，且连接块为面积较大的端面和所述基体一端对应同轴固连；The connecting block is a regular quadrangular prism with the same shape as the end face with a larger area and one end face of the base body, and the connecting block is an end face with a larger area and one end of the base body correspondingly coaxially fixed;
所述固定座包含连接条和固定部；所述连接条一端和所述基体的第三侧壁垂直固连，另一端和所述固定部固连；所述固定部用于和所述基板固连；所述连接条在靠近基体一端的两个侧面上对应设有和连接条长度方向垂直的凹槽，形成柔铰；The fixing base includes a connecting bar and a fixing part; one end of the connecting bar is vertically fixed with the third side wall of the base body, and the other end is fixed with the fixing part; the fixing part is used for fixing with the base plate. connected; the connecting strip is correspondingly provided with grooves perpendicular to the length direction of the connecting strip on two side surfaces close to one end of the base to form a flexible hinge;
所述第一、第二压电陶瓷片分别设置在所述基体的第二、第四侧壁上，均沿厚度方向极化，且第一、第二压电陶瓷片的极化方向相反；The first and second piezoelectric ceramic sheets are respectively disposed on the second and fourth sidewalls of the base body, and both are polarized along the thickness direction, and the polarization directions of the first and second piezoelectric ceramic sheets are opposite;
所述容器呈圆环状，其上端面设有和容器同轴的环形凹槽，用于盛放承载液体介质以及待操控的微球；所述容器的外壁上周向均匀设有四个端面和所述第二连接部面积较小的端面形状相同的凸台，且容器的下端面和所述基体的第三侧壁平行；The container is in the shape of an annular shape, and its upper end surface is provided with an annular groove coaxial with the container, which is used to hold the carrying liquid medium and the microspheres to be manipulated; the outer wall of the container is uniformly provided with four end surfaces in the circumferential direction. a boss having the same shape as the end face with the smaller area of the second connecting portion, and the lower end face of the container is parallel to the third side wall of the base body;
所述第一至第四换能器第二连接部面积较小的端面分别和所述容器的外壁上四个凸台一一对应固连，使得第一至第四换能器连接台的轴线均指向容器的中心；且第一至第四换能器的固定部均和所述基板的上端面固连。The end faces of the second connection parts of the first to fourth transducers with smaller area are respectively fixedly connected with the four bosses on the outer wall of the container in a one-to-one correspondence, so that the axes of the connection platforms of the first to fourth transducers All point to the center of the container; and the fixing parts of the first to fourth transducers are all fixedly connected with the upper end surface of the base plate.
所述第一至第四换能器的固定部呈条状，其一端和其对应连接条垂直固连，且固定部通过螺栓和所述基板固连。The fixing parts of the first to fourth transducers are in the shape of strips, one end of which is vertically fixed with the corresponding connecting strip, and the fixing parts are fixedly connected with the base plate by bolts.
该另一种压电激励的圆环面内微操控装置的控制方法和第一种压电激励的圆环面内微操控装置的控制方法一样，包含如下步骤：The control method of the another piezoelectrically excited in-torus micro-manipulation device is the same as the control method of the first piezoelectrically excited in-torus micro-manipulation device, and includes the following steps:
令第一至第四换能器在基板上按顺时针依次排列，对第一至第四换能器分别施加第一至第四简谐电压信号；The first to fourth transducers are arranged on the substrate in a clockwise order, and the first to fourth harmonic voltage signals are respectively applied to the first to fourth transducers;
所述第一至第四简谐电压信号均为交流谐波信号，电压幅值相等，相位依次相差π/2且角频率均等于预设的旋转模态频率值ω，同时在容器上激发出空间相位差为π/2的面内振动模态，进而在容器中耦合出行波模态；The first to fourth simple harmonic voltage signals are all AC harmonic signals, the voltage amplitudes are equal, the phases differ by π/2 in turn, and the angular frequencies are all equal to the preset rotational modal frequency value ω. The in-plane vibration mode with a spatial phase difference of π/2 is then coupled to the traveling wave mode in the container;
在行波模态下，圆环容器内的承载液体介质中产生相应的声压场，声压场的大小分布与振型的幅值分布相对应；随着在圆环容器内激发的行波模态旋转，声压场也随之旋转；由于放置在容器承载液体介质内的微球在声压场中受到声辐射力和液体粘滞力的作用朝着声压节点运动，而声压场的旋转导致声压节点产生绕圆环容器圆心的旋转，所以微球会在声辐射力和液体粘滞力的作用下绕着容器中心做旋转运动，从而实现对微球的旋转操控。In the traveling wave mode, the corresponding sound pressure field is generated in the supporting liquid medium in the annular container, and the size distribution of the sound pressure field corresponds to the amplitude distribution of the mode shape; with the traveling wave excited in the annular container The mode rotates, and the sound pressure field also rotates; because the microspheres placed in the container-bearing liquid medium are affected by the sound radiation force and the liquid viscous force in the sound pressure field and move toward the sound pressure node, while the sound pressure field The rotation of the sound pressure node produces a rotation around the center of the torus container, so the microspheres will rotate around the center of the container under the action of the acoustic radiation force and the liquid viscous force, so as to realize the rotation control of the microspheres.
本技术领域技术人员可以理解的是，除非另外定义，这里使用的所有术语（包括技术术语和科学术语）具有与本发明所属领域中的普通技术人员的一般理解相同的意义。还应该理解的是，诸如通用字典中定义的那些术语应该被理解为具有与现有技术的上下文中的意义一致的意义，并且除非像这里一样定义，不会用理想化或过于正式的含义来解释。It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It should also be understood that terms such as those defined in the general dictionary should be understood to have meanings consistent with their meanings in the context of the prior art and, unless defined as herein, are not to be taken in an idealized or overly formal sense. explain.
以上所述的具体实施方式，对本发明的目的、技术方案和有益效果进行了进一步详细说明，所应理解的是，以上所述仅为本发明的具体实施方式而已，并不用于限制本发明，凡在本发明的精神和原则之内，所做的任何修改、等同替换、改进等，均应包含在本发明的保护范围之内。The specific embodiments described above further describe the purpose, technical solutions and beneficial effects of the present invention in further detail. It should be understood that the above descriptions are only specific embodiments of the present invention, and are not intended to limit the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.
Claims (8)
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