CN113381279B - A Narrow Linewidth Ultraviolet Raman Laser - Google Patents
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Abstract
Translated fromChinese
Description
Translated fromChinese技术领域technical field
本发明涉及拉曼激光器领域，尤其涉及一种窄线宽紫外拉曼激光器。The invention relates to the field of Raman lasers, in particular to a narrow linewidth ultraviolet Raman laser.
背景技术Background technique
紫外波段的激光拥有波长短、更好的聚焦效果、高单光子能量等特点，因此紫外激光器在工业加工、科学研究、军事及医疗等领域被广泛应用。具有窄线宽的激光器在激光雷达、计量学和量子物理等领域有着广阔的应用前景。目前获得窄线宽紫外波段的方法为先利用倍频效应，然后再利用和频效应，最后获得紫外激光。但是这种获得紫外激光的方式需要进行两次频率变换，最终会导致转换效率过低，且光束质量降低的情况。随着非线性技术的发展，拉曼介质的分子振动引起的受激拉曼散射(SRS)效应成为实现大的激光频率变换的重要手段。基于SRS的拉曼激光器具有诸多优势：通过拉曼频移可以实现稀土离子发射截面空缺波长的激光输出，目前人们利用拉曼转换已经实现了从深紫外到中波红外的输出；拉曼频移只和介质晶格振动相关，与泵浦光的频率无关，因此调谐泵浦光频率可以得到相同频率调谐范围的拉曼光；拉曼增益正比于泵浦光强，没有饱和效应及空间烧孔效应，拉曼激光输出功率直接取决于泵浦光功率，可实现接近量子效率极限的能量转化和窄线宽的输出。Lasers in the ultraviolet band have the characteristics of short wavelength, better focusing effect, and high single-photon energy. Therefore, ultraviolet lasers are widely used in industrial processing, scientific research, military and medical fields. Lasers with narrow linewidths have broad application prospects in lidar, metrology, and quantum physics. At present, the method to obtain the narrow linewidth ultraviolet band is to first use the frequency doubling effect, then use the sum frequency effect, and finally obtain the ultraviolet laser. However, this method of obtaining ultraviolet laser requires two frequency conversions, which will eventually lead to low conversion efficiency and reduced beam quality. With the development of nonlinear technology, the stimulated Raman scattering (SRS) effect caused by the molecular vibration of Raman medium has become an important means to realize large laser frequency conversion. Raman laser based on SRS has many advantages: Raman frequency shift can realize the laser output of rare-earth ion emission cross-section vacancy wavelength. At present, people have realized the output from deep ultraviolet to mid-wave infrared by Raman conversion; Raman frequency shift It is only related to the lattice vibration of the dielectric and has nothing to do with the frequency of the pump light. Therefore, by tuning the frequency of the pump light, Raman light with the same frequency tuning range can be obtained; the Raman gain is proportional to the pump light intensity, and there is no saturation effect and spatial hole burning. The Raman laser output power directly depends on the pump light power, which can achieve energy conversion close to the quantum efficiency limit and output with a narrow linewidth.
目前研究人员已经通过直腔和环形腔实现了拉曼激光输出，然而在高功率运转时，谐振腔内拉曼介质吸收残余泵浦光而产生热效应，对于谐振腔的稳定性有很大的干扰。同时，Stokes的返回光无法与泵浦光分离，导致其直接返回泵浦光源位置，容易对其造成损伤并对稳定性造成影响，因此很大程度上限制了拉曼激光器功率的提升及应用。此外，目前针对空间环境探测，对窄线宽波长范围可调的紫外拉曼激光器具有重要的需求，但基于传统的固体激光器的非线性频率变换很难同时实现窄线宽和紫外波长可调。At present, researchers have achieved Raman laser output through straight cavities and ring cavities. However, during high-power operation, the Raman medium in the resonator absorbs the residual pump light and generates thermal effects, which greatly interferes with the stability of the resonator. . At the same time, the return light of Stokes cannot be separated from the pump light, so that it directly returns to the position of the pump light source, which is easy to damage and affect the stability, thus greatly limiting the improvement and application of Raman laser power. In addition, for the detection of space environment, there is an important demand for ultraviolet Raman lasers with tunable narrow linewidth and wavelength range. However, it is difficult to realize narrow linewidth and tunable ultraviolet wavelength at the same time based on nonlinear frequency conversion of traditional solid-state lasers.
发明内容SUMMARY OF THE INVENTION
本发明提供了一种窄线宽紫外拉曼激光器，本发明实现了窄线宽和紫外波长的可调，详见下文描述：The present invention provides a narrow linewidth ultraviolet Raman laser, and the present invention realizes the tunability of narrow linewidth and ultraviolet wavelength, as described below for details:
本发明提供了一种窄线宽紫外拉曼激光器，所述激光器包括：泵浦源、光隔离器、二分之一波片、聚焦透镜、输入镜、金刚石晶体、第一反射镜、第一倍频晶体、输出镜、第二反射镜、整形透镜、锁腔倍频器和二向色镜，所述输入镜、所述第一反射镜与所述输出镜构成V型腔结构；所述金刚石晶体位于输入镜与第一反射镜之间，第一倍频晶体位于第一反射镜与输出镜之间；The invention provides a narrow linewidth ultraviolet Raman laser, which comprises: a pump source, an optical isolator, a half-wave plate, a focusing lens, an input mirror, a diamond crystal, a first reflection mirror, a first a frequency doubling crystal, an output mirror, a second reflecting mirror, a shaping lens, a cavity-locking frequency doubler and a dichroic mirror, the input mirror, the first reflecting mirror and the output mirror form a V-shaped cavity structure; the The diamond crystal is located between the input mirror and the first reflecting mirror, and the first frequency-doubling crystal is located between the first reflecting mirror and the output mirror;
所述锁腔倍频器由锁腔输入镜、第一锁腔反射镜、第二锁腔反射镜、第二倍频晶体和锁腔输出镜组成；The cavity-locking frequency multiplier is composed of a cavity-locking input mirror, a first cavity-locking reflection mirror, a second cavity-locking reflection mirror, a second frequency doubling crystal and a cavity-locking output mirror;
泵浦源发射具有可调谐的第一预设功率以及第一预设波长的第一光信号，即频率为ωP的泵浦光，泵浦光经二分之一波片、光隔离器、聚焦透镜和输入镜后，聚焦在金刚石晶体的中心，泵浦光将金刚石晶体的基态原子激发到虚拟拉曼上能级，产生一频率为ωS的拉曼光子以及一频率为ωR的光学声子，且满足ωP＝ωS+ωR；The pump source emits a first optical signal with a tunable first preset power and a first preset wavelength, that is, a pump light with a frequency of ωP , and the pump light passes through a half-wave plate, an optical isolator, After the focusing lens and input mirror are focused on the center of the diamond crystal, the pump light excites the ground state atoms of the diamond crystal to the virtual Raman energy level, producing a Raman photon with a frequency of ωS and an optical photon with a frequency of ωR. phonon, and satisfy ωP= ωS+ ωR ;
所述金刚石晶体，用于利用SRS效应，使所述第一光信号转换为Stokes光信号；Stokes光信号在由输入镜、第一反射镜和输出镜组成的拉曼振荡器中振荡，透过第一反射镜剩余的泵浦光经过第二反射镜反射后，重新进入并聚焦在金刚石晶体中以提高泵浦光的利用率；The diamond crystal is used to convert the first optical signal into a Stokes optical signal by utilizing the SRS effect; the Stokes optical signal oscillates in a Raman oscillator composed of an input mirror, a first reflecting mirror and an output mirror, and passes through the After the remaining pump light of the first mirror is reflected by the second mirror, it re-enters and focuses in the diamond crystal to improve the utilization rate of the pump light;
Stokes光信号经所述第一反射镜进入所述第一倍频晶体，Stokes光信号在第一倍频晶体激发第一级倍频光后，第一级倍频光通过输出镜输出；第一级倍频光经整形透镜后入射至锁腔倍频器，并聚焦在第二倍频晶体的中心，并激发出第二级倍频光，并经由锁腔输出镜输出。The Stokes optical signal enters the first frequency doubling crystal through the first reflecting mirror. After the first frequency doubling crystal excites the first frequency doubling light, the first frequency doubling light is output through the output mirror; The first-order frequency-doubling light is incident on the cavity-locked frequency doubler after being shaped by the shaping lens, and is focused on the center of the second frequency-doubling crystal, and the second-order frequency-doubling light is excited, which is output through the lock-cavity output mirror.
本发明提供了一种窄线宽紫外拉曼激光器，有益效果如下：The invention provides a narrow linewidth ultraviolet Raman laser, and the beneficial effects are as follows:
1、本发明提供了一种V型腔结构的激光谐振腔，通过腔内反射镜的设计，在反射镜处实现剩余泵浦光与Stokes光的分离，降低输出耦合镜的镀膜需求，同时降低对光隔离器的需求并提高了谐振腔的稳定性；采用V型腔结构设计的激光器，使得腔内形成多个光腰，将拉曼晶体以及其他非线性晶体置于光腰处，降低非线性过程的阈值并提高拉曼转换以及非线性转换的效率，而且在拉曼激光谐振的同时，进而产生纯净的特殊波长激光的输出(如589nm、620nm等)。1. The present invention provides a laser resonator with a V-shaped cavity structure. Through the design of the mirror in the cavity, the separation of the remaining pump light and the Stokes light is realized at the mirror, which reduces the coating requirements of the output coupling mirror and reduces the The demand for optical isolators improves the stability of the resonant cavity; the laser designed with the V-shaped cavity structure forms multiple optical waists in the cavity, and the Raman crystal and other nonlinear crystals are placed at the optical waist to reduce the non-linearity. The threshold value of the linear process is improved and the efficiency of Raman conversion and nonlinear conversion is improved, and at the same time of Raman laser resonance, the output of pure special wavelength laser (such as 589nm, 620nm, etc.) is generated.
2、本发明提供了一种环形腔结构的锁腔倍频器，该结构降低传输过程中的损耗，而且可以有效地增加锁腔倍频腔的长度，有利于缩小输出光信号的线宽。本发明基于该结构实现了窄线宽310nm紫外波长输出，详见实例1或实例2所述。2. The present invention provides a cavity-locked frequency multiplier with a ring cavity structure, which reduces the loss in the transmission process, and can effectively increase the length of the cavity-locked frequency multiplier cavity, which is beneficial to reduce the line width of the output optical signal. Based on this structure, the present invention realizes the output of ultraviolet wavelength with a narrow line width of 310 nm, as described in Example 1 or Example 2 for details.
附图说明Description of drawings
图1为单通泵浦窄线宽紫外拉曼激光器结构示意图；Figure 1 is a schematic diagram of the structure of a single-pass pumped narrow linewidth ultraviolet Raman laser;
图2为双通泵浦窄线宽紫外拉曼激光器结构示意图；Figure 2 is a schematic diagram of the structure of a double-pass pumped narrow linewidth ultraviolet Raman laser;
图3为锁腔倍频器的结构示意图。FIG. 3 is a schematic structural diagram of a cavity-locked frequency multiplier.
附图中，各标号所代表的部件列表如下：In the accompanying drawings, the list of components represented by each number is as follows:
1：泵浦源； 2：二分之一波片；1: Pump source; 2: Half wave plate;
3：聚焦透镜； 4：输入镜；3: Focusing lens; 4: Input mirror;
5：金刚石晶体； 6：第一反射镜；5: diamond crystal; 6: first mirror;
7：第一倍频晶体； 8：输出镜；7: The first frequency doubling crystal; 8: Output mirror;
9：整形透镜； 10：锁腔倍频器；9: Shaping lens; 10: Lock cavity frequency multiplier;
11：二向色镜； 12：光隔离器；11: Dichroic mirror; 12: Optical isolator;
13：第一反射镜； 14：第二反射镜。13: the first reflector; 14: the second reflector.
其中：in:
10-1：锁腔输入镜； 10-2：第一锁腔反射镜；10-1: Lock cavity input mirror; 10-2: First lock cavity reflector;
10-3：第二锁腔反射镜； 10-4：第二倍频晶体；10-3: The second cavity-locking mirror; 10-4: The second frequency doubling crystal;
10-5：锁腔输出镜；10-5: Lock cavity output mirror;
L1：输入镜与金刚石晶体左端面的距离；L1: the distance between the input mirror and the left end face of the diamond crystal;
L2：金刚石晶体右端面与第一反射镜的距离；L2: the distance between the right end face of the diamond crystal and the first mirror;
L3：第一反射镜与第一倍频晶体右端面的距离；L3: the distance between the first mirror and the right end face of the first frequency doubling crystal;
L4：第一倍频晶体左端面与输出镜的距离；L4: the distance between the left end face of the first frequency doubling crystal and the output mirror;
L5：第一反射镜与第二反射镜的距离。L5: The distance between the first reflector and the second reflector.
具体实施方式Detailed ways
为使本发明的目的、技术方案和优点更加清楚，下面对本发明实施方式作进一步地详细描述。In order to make the objectives, technical solutions and advantages of the present invention clearer, the embodiments of the present invention are further described in detail below.
区别于传统驻波腔结构拉曼激光器，采用V型腔结构，在腔的折返镜处可轻松地实现泵浦光与Stokes光的分离并且可以有效地降低残余泵浦光对谐振腔稳定性的干扰。而且采用V型腔结构，可以使腔内存在两个光腰，进而增益介质、非线性晶体能够各自独立地安放在位置各不相同的光腰处，并实现各个参数的相互匹配，增大光光转化效率，将拉曼激光器的结构设计成V型折叠腔，这样更紧凑、更有利于工程化。同时，采用具有良好热性能的拉曼晶体，可以承受更高的泵浦功率，从而有利于获得更高功率的激光输出。Different from the traditional standing wave cavity structure Raman laser, the V-shaped cavity structure is adopted, the pump light and the Stokes light can be easily separated at the reflex mirror of the cavity, and the effect of the residual pump light on the stability of the resonator can be effectively reduced. interference. In addition, the V-shaped cavity structure can make two optical waists exist in the cavity, and then the gain medium and nonlinear crystal can be independently placed at different optical waists, and the mutual matching of various parameters can be achieved to increase the optical power. Light conversion efficiency, the structure of the Raman laser is designed as a V-shaped folded cavity, which is more compact and more conducive to engineering. At the same time, the use of Raman crystals with good thermal properties can withstand higher pump power, which is beneficial to obtain higher power laser output.
采用新型拉曼振荡器结构及高热导率工作物质来实现自由空间运转的拉曼激光器，是一种获得高功率特殊波长输出的有利途径，对生物医疗、天文成像、空间探测等领域的发展具有重要意义。Using a new type of Raman oscillator structure and high thermal conductivity working material to realize the Raman laser operating in free space is a favorable way to obtain high-power special wavelength output, which has great potential for the development of biomedical, astronomical imaging, space exploration and other fields. important meaning.
实施例1Example 1
参见图1和图3，一种窄线宽紫外拉曼激光器包括：泵浦源1、二分之一波片2、聚焦透镜3、输入镜4、金刚石晶体5、第一反射镜6、第一倍频晶体7、输出镜8、整形透镜9、锁腔倍频器10和二向色镜11。1 and 3, a narrow linewidth ultraviolet Raman laser includes: a pump source 1, a half-
其中，泵浦源1输出频率为ωP的线偏振态泵浦光，波长在1.02-1.08μm可调，光谱线宽<0.1nm；二分之一波片2用于调节泵浦光的偏振态；聚焦透镜3为镀有对泵浦光波长1.02-1.08μm增透的宽带介质膜；输入镜4为曲率半径为50mm的平凹镜，两面镀有对泵浦光增透的宽带介质膜，凹面镀有对Stokes光1.18-1.26μm波段反射率>99.8％的宽带介质膜；金刚石晶体5为沿<110>轴切割的人造金刚石晶体，尺寸为7×4×1.2mm3，两端面镀有对泵浦光1.02-1.08μm和Stokes光1.18-1.26μm波段透过率>99.5％的宽带介质膜；第一反射镜6为曲率半径为100mm平凹镜，凹面镀有对泵浦光透过率>98％的宽带介质膜以及对Stokes光反射率>99.8％的宽带介质膜，第一反射镜6与入射泵浦光的夹角为2°；第一倍频晶体7为切割角度θ＝90°，Φ＝0°的温度相位匹配LBO晶体，两端镀有对1.18-1.26μm波段增透的宽带介质膜，尺寸为4×4×10mm3；输出镜8为曲率半径为100mm平凹镜，凹面镀有对Stokes光反射率>99.8％的宽带介质膜，以及对第一级倍频光0.59-0.63μm部分透射的宽带介质膜，平面镀有对第一级倍频光0.59-0.63μm透过率>99.8％的宽带介质膜。Among them, the pump source 1 outputs linearly polarized pump light with a frequency of ωP , the wavelength is adjustable from 1.02 to 1.08 μm, and the spectral line width is less than 0.1 nm; the half-
输入镜4与金刚石晶体5的左端面的距离L1＝48mm，金刚石晶体5的右端面与第一反射镜6的距离L2＝98mm，第一反射镜6与第一倍频晶体7右端面的距离L3＝96mm；第一倍频晶体7左端面与输出镜8的距离L4＝95mm。The distance L1=48mm between the
整形透镜9为两个凸透镜组成的透镜组，两个凸透镜均镀有对第一级倍频光0.59-0.63μm高透射的宽带介质膜。The shaping
参见图3，锁腔倍频器10为由锁腔输入镜10-1、第一锁腔反射镜10-2、第二锁腔反射镜10-3、第二倍频晶体10-4和锁腔输出镜10-5组成。锁腔输入镜10-1为平面反射镜，左端镀有对第一级倍频光0.59-0.63μm增透膜，右端镀有对第一级倍频光0.59-0.63μm透射率为2-4％的宽带介质膜；第一锁腔反射镜10-2为平面反射镜，镀有对第一级倍频光0.59-0.63μm反射率>99.9％的宽带介质膜；第二锁腔反射镜10-3为曲率半径为100mm的凹面反射镜，凹面一侧左端镀有对第一级倍频光0.59-0.63μm反射率>99.9％的宽带介质膜；第二倍频晶体10-4为切割角度θ＝90°，Φ＝57°的温度相位匹配LBO晶体，两端镀有对第一级倍频光0.59-0.63μm波段的增透膜，尺寸为4×4×10mm3；锁腔输出镜10-5为曲率半径为100mm的凹面反射镜，凹面一侧左端镀有对第一级倍频光0.59-0.63μm反射率>99.9％的宽带介质膜以及对第二级倍频光0.29-0.32μm透过率>90％的宽带介质膜，平面一侧镀有对第二级倍频光0.29-0.32μm透过率>99.5％的宽带介质膜。Referring to FIG. 3 , the lock
二向色镜11镀有对第一级倍频光0.59-0.63μm高透过率、对第二级倍频光0.29-0.32μm高反射的宽带介质膜。The
泵浦光经过二分之一波片2、聚焦透镜3和输入镜4后，聚焦在金刚石晶体5中心，泵浦光束腰半径为42μm。聚焦后的泵浦光效率提高，更可简便滤除非目标波段光。频率为ωP的泵浦光将金刚石晶体5的基态原子激发到虚拟拉曼上能级，同时产生一个频率为ωS的拉曼光子以及一个频率为ωR的光学声子，且满足ωP＝ωS+ωR。金刚石晶体5的拉曼频移为1332cm-1，当泵浦光波长为1.02-1.08μm时，激发的Stokes光波长为1.18-1.26μm。Stokes光在由输入镜4、第一反射镜6和输出镜8组成的拉曼振荡器中振荡，腔内较高的Stokes光功率密度通过与第一倍频晶体7相互作用，Stokes光在第一倍频晶体7的束腰半径为42μm，激发频率ωD＝2ωR的第一级倍频光0.59-0.63μm后，第一级倍频光ωD通过输出镜8输出。第一级倍频光ωD经过整形透镜9后入射至锁腔倍频器10，并聚焦在第二倍频晶体10-4的中心，并激发出ω2D＝2ωD的第二级倍频光0.29-0.32μm，并经由锁腔输出镜10-5输出。残余的第一级倍频光ωD和第二级倍频光ω2D经过二向色镜11后，0.59-0.63μm的第一级倍频光透过、0.29-0.32μm第二级倍频光反射，起到分离的作用。After the pump light passes through the half-
综上所述，本发明实施例提出了一种基于V型腔的单通泵浦窄线宽紫外拉曼激光器，将高功率泵浦源输出的1.02-1.08μm激光直接耦合进V型腔拉曼激光器，实现1.18-1.26μm的高拉曼转换效率和0.59-0.63μm的高倍频转换效率的激光输出，然后通过锁腔倍频结构，实现了窄线宽且光谱宽度可调的0.29-0.32μm紫外激光输出。To sum up, the embodiment of the present invention proposes a single-pass pumped narrow linewidth ultraviolet Raman laser based on a V-shaped cavity, which directly couples the 1.02-1.08 μm laser output from the high-power pump source into the V-shaped cavity to pull the laser. Mann laser to achieve high Raman conversion efficiency of 1.18-1.26μm and high frequency doubling conversion efficiency of 0.59-0.63μm. Laser output, and then through the cavity-locked frequency doubling structure, a narrow linewidth and adjustable spectral width of 0.29-0.32 μm UV laser output.
实施例2Example 2
参见图2和图3，一种窄线宽紫外拉曼激光器包括：泵浦源1、光隔离器12、二分之一波片2、聚焦透镜3、输入镜4、金刚石晶体5、第一反射镜13(本实施例中采用标号13代表实施例1中的第一反射镜6)、第一倍频晶体7、输出镜8、第二反射镜14、整形透镜9、锁腔倍频器10和二向色镜11。2 and 3, a narrow linewidth ultraviolet Raman laser includes: a pump source 1, an
其中，泵浦源1输出频率为ωP的线偏振态泵浦光，波长在1.02-1.08μm可调，光谱线宽<0.1nm；二分之一波片2用于调节泵浦光的偏振态；光隔离器12用于单向传输泵浦光，反向传输的光无法返回泵浦源1，实现对泵浦源1的保护；聚焦透镜3为镀有对泵浦光波长1.02-1.08μm增透的宽带介质膜；输入镜4为曲率半径为50mm的平凹镜，两面镀有对泵浦光增透的宽带介质膜，凹面镀有对Stokes光1.18-1.26μm波段反射率>99.8％的宽带介质膜；金刚石晶体5为沿<110>轴切割的人造金刚石晶体，尺寸为7×4×1.2mm3，两端面镀有对泵浦光1.02-1.08μm和Stokes光1.18-1.26μm波段透过率>99.5％的宽带介质膜；第一反射镜13为曲率半径为100mm的平凹镜，凹面镀有对泵浦光透过率>98％的宽带介质膜以及对Stokes光反射率>99.8％的宽带介质膜，平面镀有泵浦光透过率>99.5％的宽带介质膜，第一反射镜13与入射泵浦光的夹角为2°；第二反射镜14为曲率半径为100mm的平凹镜，凹面镀有对泵浦光反射率>99％的宽带介质膜；第一倍频晶体7为切割角度θ＝90°，Φ＝0°的温度相位匹配LBO晶体，两端镀有对1.18-1.26μm波段增透的宽带介质膜，尺寸为4×4×10mm3；输出镜8为曲率半径为100mm的平凹镜，凹面镀有对Stokes光反射率>99.8％的宽带介质膜，以及对第一级倍频光0.59-0.63μm部分透射的宽带介质膜，平面镀有对第一级倍频光0.59-0.63μm透过率>99.8％的宽带介质膜。Among them, the pump source 1 outputs linearly polarized pump light with a frequency of ωP , the wavelength is adjustable from 1.02 to 1.08 μm, and the spectral line width is less than 0.1 nm; the half-
输入镜4与金刚石晶体5的左端面的距离L1＝48mm，金刚石晶体5的右端面与第一反射镜13的距离L2＝98mm，第一反射镜13与第一倍频晶体7右端面的距离L3＝96mm；第一倍频晶体7左端面与输出镜8的距离L4＝95mm；第一反射镜13与第二反射镜14的距离L5198mm–202mm可调。The distance L1=48mm between the
整形透镜9为两个凸透镜组成的透镜组，两个凸透镜均镀有对第一级倍频光0.59-0.63μm高透射的宽带介质膜。The shaping
锁腔倍频器10为由锁腔输入镜10-1、第一锁腔反射镜10-2、第二锁腔反射镜10-3、第二倍频晶体10-4和锁腔输出镜10-5组成。锁腔输入镜10-1为平面反射镜，左端镀有对第一级倍频光0.59-0.63μm增透膜，右端镀有对第一级倍频光0.59-0.63μm透射率为2-4％的宽带介质膜；第一锁腔反射镜10-2为平面反射镜，镀有对第一级倍频光0.59-0.63μm反射率>99.9％的宽带介质膜；第二锁腔反射镜10-3为曲率半径为100mm的凹面反射镜，凹面一侧左端镀有对第一级倍频光0.59-0.63μm反射率>99.9％的宽带介质膜；第二倍频晶体10-4为切割角度θ＝90°，Φ＝57°的温度相位匹配LBO晶体，两端镀有对0.59-0.62μm波段增透的宽带介质膜，尺寸为4×4×10mm3；锁腔输出镜10-5为曲率半径为100mm的凹面反射镜，凹面一侧左端镀有对第一级倍频光0.59-0.63μm反射率>99.9％的宽带介质膜以及对第二级倍频光0.29-0.32μm透过率>90％的宽带介质膜，平面一侧镀有对第二级倍频光0.29-0.32μm透过率>99.5％的宽带介质膜。The lock
二向色镜11镀有对第一级倍频光0.59-0.63μm高透过率、对第二级倍频光0.29-0.32μm高反射的宽带介质膜。The
泵浦光经过二分之一波片2、光隔离器12、聚焦透镜3和输入镜4后，聚焦在金刚石晶体5中心，泵浦光束腰半径为42μm。聚焦后的泵浦光效率提高，更可简便滤除非目标波段光。频率为ωP的泵浦光将金刚石晶体5的基态原子激发到虚拟拉曼上能级，同时产生一个频率为ωS的拉曼光子以及一个频率为ωR的光学声子，且满足ωP＝ωS+ωR。金刚石晶体5的拉曼频移为1332cm-1，当泵浦光波长为1.02-1.08μm时，激发的Stokes光波长为1.18-1.26μm。Stokes光在由输入镜4、第一反射镜13和输出镜8组成的拉曼振荡器中振荡，透过第一反射镜13剩余的泵浦光经过第二反射镜14反射后，重新进入并聚焦在金刚石晶体5中以提高泵浦光的利用率。腔内较高的Stokes光功率密度通过与第一倍频晶体7相互作用，Stokes光在第一倍频晶体7的束腰半径为42μm，激发频率ωD＝2ωR的第一级倍频光0.59-0.63μm后，第一级倍频光ωD通过输出镜8输出。第一级倍频光ωD经过整形透镜9后入射至锁腔倍频器10，并聚焦在第二倍频晶体10-4的中心，并激发出ω2D＝2ωD的第二级倍频光0.29-0.32μm，并经由锁腔输出镜10-5输出。残余的第一级倍频光ωD和第二级倍频光ω2D经过二向色镜11后，0.59-0.63μm的第一级倍频光透过、0.29-0.32μm第二级倍频光反射，起到分离的作用。After the pump light passes through the half-
综上所述，本发明实施例提出了一种基于V型腔的双通泵浦窄线宽紫外拉曼激光器，将高功率泵浦源输出的1.02-1.08μm激光直接耦合进V型腔拉曼激光器，再通过第二反射镜14将剩余泵浦光耦合进V型腔拉曼激光器，对泵浦光进行二次泵浦，实现1.18-1.26μm的高拉曼转换效率和0.59-0.63μm的高倍频转换效率的激光输出，然后通过锁腔倍频结构，实现了窄线宽且光谱宽度可调的0.29-0.32μm紫外激光输出。To sum up, the embodiment of the present invention proposes a double-pass pumped narrow linewidth ultraviolet Raman laser based on a V-shaped cavity, which directly couples the 1.02-1.08 μm laser output from the high-power pump source into the V-shaped cavity to pull the laser. Raman laser, the remaining pump light is coupled into the V-cavity Raman laser through the
本发明实施例对各器件的型号除做特殊说明的以外，其他器件的型号不做限制，只要能完成上述功能的器件均可。In the embodiment of the present invention, the models of each device are not limited unless otherwise specified, as long as the device can perform the above functions.
本领域技术人员可以理解附图只是一个优选实施例的示意图，上述本发明实施例序号仅仅为了描述，不代表实施例的优劣。Those skilled in the art can understand that the accompanying drawing is only a schematic diagram of a preferred embodiment, and the above-mentioned serial numbers of the embodiments of the present invention are only for description, and do not represent the advantages or disadvantages of the embodiments.
以上所述仅为本发明的较佳实施例，并不用以限制本发明，凡在本发明的精神和原则之内，所作的任何修改、等同替换、改进等，均应包含在本发明的保护范围之内。The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included in the protection of the present invention. within the range.
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