CN113280046B - A multi-region micro-adjustable air-floating pad - Google Patents
A multi-region micro-adjustable air-floating padDownload PDFInfo
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- CN113280046B CN113280046BCN202110698133.0ACN202110698133ACN113280046BCN 113280046 BCN113280046 BCN 113280046BCN 202110698133 ACN202110698133 ACN 202110698133ACN 113280046 BCN113280046 BCN 113280046B
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- air
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0607—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being retained in a gap, e.g. squeeze film bearings
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
- F16C32/0622—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via nozzles, restrictors
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- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
Translated fromChinese
Description
Translated fromChinese技术领域technical field
本发明涉及气浮垫领域，更具体的说，尤其涉及一种多区域微调节气浮垫。The invention relates to the field of air-floating cushions, and more particularly, to a multi-region micro-adjusting air-floating cushion.
背景技术Background technique
气浮轴承作为超精密测量与加工系统的关键部件，具有清洁、摩阻低、适用速度范围大、适用温度广等优点。气浮垫作为气浮轴承的一种应用，它可通过其底部形成的空气薄层(即气膜)使气浮垫与平面间形成间隙，从而形成一种近似的无摩擦滑动。目前市场上气浮垫存在承载能力差的问题，同时，气浮垫无法应用于平面不够平整的领域。As a key component of ultra-precision measurement and processing systems, air bearing has the advantages of cleanliness, low friction, a wide range of applicable speeds, and a wide range of applicable temperatures. As an application of the air bearing, the air cushion can form a gap between the air cushion and the plane through the thin air layer (ie, the air film) formed at the bottom, thereby forming an approximate frictionless sliding. At present, there is a problem of poor bearing capacity of the air-floating cushion on the market, and at the same time, the air-floating cushion cannot be used in the field where the plane is not flat enough.
发明内容SUMMARY OF THE INVENTION
本发明的目的在于解决上述气浮垫承载能力小、无法应用于平面不够光滑的领域的问题，提出了一种多区域微调节气浮垫，有效提高气浮垫承载能力，同时在不平整平面气浮垫可在多个区域进行微调，实现气浮垫调平。The purpose of the present invention is to solve the above-mentioned problems that the air-floating pad has a small bearing capacity and cannot be applied to the field where the plane is not smooth enough. Floating pads can be fine-tuned in multiple areas to achieve air-floating pad leveling.
本发明通过以下技术方案来实现上述目的：一种多区域微调节气浮垫，包括气浮垫本体，所述气浮垫本体生成气膜的表面上通过十字槽划分出四个区域，每个区域均包括独立的节流孔、进气通道和均压槽；所述进气通道设置在每个区域的气浮垫本体的侧面，均压槽设置在每个区域形成气膜的表面上，节流孔设置在均压槽内，所述节流孔与进气通道相连通。The present invention achieves the above object through the following technical solutions: a multi-region micro-adjustment air-floating pad, comprising an air-floating pad body, and the surface of the air-floating pad body generating the air film is divided into four regions by cross grooves, and each region is divided into four regions. Each includes an independent throttle hole, an air intake channel and a pressure equalizing groove; the air intake channel is arranged on the side of the air flotation pad body in each area, and the pressure equalizing groove is arranged on the surface of the air film formed in each area. The orifice is arranged in the pressure equalizing groove, and the orifice is communicated with the intake passage.
进一步的，每个区域均包含3个进气通道，在使用时可根据实际情况选择任一进气通道，并利用堵气塞堵上其余的进气通道。三个进气通道在气浮垫本体每个区域内部的气腔相连通，且气腔与每个区域的节流孔相连通。Further, each area contains 3 intake passages, and any one of the intake passages can be selected according to the actual situation during use, and the remaining intake passages are blocked by air blocking plugs. The three air intake passages communicate with the air cavity inside each region of the air flotation cushion body, and the air cavity communicates with the throttle hole in each region.
进一步的，每个区域的均压槽均呈日字型，节流孔设置在日字形的均压槽的拐角处和直线中点处。每个区域均在节流孔附近设有均压槽，用于提高形成的气膜承载能力及耐冲击能力。Further, the pressure equalizing grooves in each area are in the shape of a sun, and the throttle holes are arranged at the corners of the sun-shaped equalizing grooves and at the midpoint of the straight line. Each area is provided with a pressure equalizing groove near the orifice, which is used to improve the bearing capacity and impact resistance of the formed air film.
进一步的，每个区域的进气通道和每个区域内部的气腔相互独立，每个区域独立控制进气通道内的气流，借此通过节流孔在气浮垫表面形成厚度不一的气膜，通过多区域微调实现气浮垫在不平整平面的调平。Further, the air intake channel of each area and the air cavity inside each area are independent of each other, and each area independently controls the airflow in the air intake channel, thereby forming air with different thicknesses on the surface of the air flotation pad through the throttle hole. Membrane, through multi-region fine-tuning to achieve the leveling of the air-floating pad on uneven surfaces.
进一步的，气浮垫本体的整体形状呈方柱形或圆柱形。每个区域的形状对应为扇形或者方形，若气浮垫本体为方柱形则在方柱形的四个拐角处切出一个平面，用于生成其中一个进气通道的进气面。Further, the overall shape of the air flotation pad body is a square column or a cylinder. The shape of each area corresponds to a fan shape or a square shape. If the air flotation pad body is a square column shape, a plane is cut out at the four corners of the square column shape to generate the air intake surface of one of the air intake channels.
本发明一种多区域微调节气浮垫的调平可通过激光位移传感器判定，具体的调平判定机构包括底座、激光位移传感器安装板、传感器安装座、四个激光位移传感器和配重，四个激光位移传感器通过传感器安装座固定在激光位移传感器安装板上，激光位移传感器安装板安装在底座上，气浮垫本体生成气膜的平面朝下设置在底座上，气浮垫本体产生气膜后使得气浮垫本体悬浮在底座上，配重固定在气浮垫本体的背面上，四个激光位移传感器的激光方向朝下且正对气浮垫本体上的四个区域。The leveling of the multi-region micro-adjustment air-floating pad of the present invention can be determined by a laser displacement sensor, and the specific leveling determination mechanism includes a base, a laser displacement sensor mounting plate, a sensor mounting seat, four laser displacement sensors and a counterweight, four The laser displacement sensor is fixed on the laser displacement sensor mounting plate through the sensor mounting seat, the laser displacement sensor mounting plate is installed on the base, and the plane of the air-floating pad body that generates the air film is set on the base downward. The air-floating pad body is suspended on the base, the counterweight is fixed on the back of the air-floating pad body, and the laser directions of the four laser displacement sensors face downward and face the four areas on the air-floating pad body.
利用四个激光位移传感器同时测量四个区域的高度，当各传感器读数相同时，代表气浮垫已调平。Use four laser displacement sensors to measure the height of four areas at the same time. When the readings of each sensor are the same, it means that the air-floating pad has been leveled.
本发明的有益效果在于：The beneficial effects of the present invention are:
1、本发明可通过独立控制各区域进气通道，实现气浮垫各区域气膜厚度微调，进而达到在不平整平面上对气浮垫调平的功能；1. The present invention can realize the fine-tuning of the thickness of the air film in each area of the air flotation pad by independently controlling the air inlet channels in each area, thereby achieving the function of leveling the air flotation pad on an uneven plane;
2、本发明节流孔附近开有均压槽，可有效提升气膜的承载能力及耐冲击能力；2. There is a pressure equalizing groove near the orifice of the present invention, which can effectively improve the bearing capacity and impact resistance of the air film;
3、相对于多个气浮垫，本发明多区域微调节气浮垫结构更为简洁，同时可有效避免因安装等因素所造成的误差远大于气浮垫所能微调的距离的问题。3. Compared with multiple air-floating pads, the multi-region micro-adjustment air-floating pad of the present invention has a simpler structure, and at the same time, it can effectively avoid the problem that the error caused by factors such as installation is far greater than the fine-tuning distance of the air-floating pad.
附图说明Description of drawings
图1是本发明一种多区域微调节气浮垫的整体结构示意图。FIG. 1 is a schematic diagram of the overall structure of a multi-region micro-adjustment air flotation pad of the present invention.
图2是本发明一种多区域微调节气浮垫的区域结构图；Fig. 2 is the regional structure diagram of a kind of multi-regional micro-adjustment air flotation pad of the present invention;
图3是本发明一种多区域微调节气浮垫的调平判定机构结构图。FIG. 3 is a structural diagram of a leveling determination mechanism for a multi-region micro-adjustment air-floating pad according to the present invention.
图中，101-气膜，1-区域、2-进气通道、3-均压槽、4-节流孔、5-底座、6-激光位移传感器安装板、7-传感器安装座、8-激光位移传感器、9-配重、10-气浮垫本体。In the figure, 101-air film, 1-area, 2-air inlet channel, 3-pressure equalizing groove, 4-throttle hole, 5-base, 6-laser displacement sensor mounting plate, 7-sensor mounting seat, 8- Laser displacement sensor, 9-counterweight, 10-air-floating pad body.
具体实施方式Detailed ways
下面结合附图对本发明作进一步说明：The present invention will be further described below in conjunction with the accompanying drawings:
如图1～3所示，一种多区域微调节气浮垫，包括气浮垫本体10，所述气浮垫本体10生成气膜101的表面上通过十字槽划分出四个区域1，每个区域1均包括独立的节流孔4、进气通道2和均压槽3；所述进气通道2设置在每个区域1的气浮垫本体10的侧面，均压槽3设置在每个区域1形成气膜101的表面上，节流孔4设置在均压槽3内，所述节流孔4与进气通道2相连通。As shown in FIGS. 1 to 3 , a multi-region micro-adjustment air flotation pad includes an air
每个区域1均包含3个进气通道2，在使用时可根据实际情况选择任一进气通道2，并利用堵气塞堵上其余的进气通道2。Each
每个区域1的均压槽3均呈日字型，节流孔4设置在日字形的均压槽3的拐角处和直线中点处。每个区域1均在节流孔4附近设有均压槽3，用于提高气膜101承载能力及耐冲击能力。The
每个区域1的进气通道2和每个区域1内部的气腔相互独立，每个区域1独立控制进气通道2内的气流，借此通过节流孔4在气浮垫表面形成厚度不一的气膜101，通过多区域1微调实现气浮垫在不平整平面的调平。The
气浮垫本体10的整体形状呈方柱形或圆柱形。每个区域1的形状对应为扇形或者方形，若气浮垫本体10为方柱形则在方柱形的四个拐角处切出一个平面，用于生成其中一个进气通道2的进气面。The overall shape of the air-floating
本发明一种多区域微调节气浮垫的调平判定机构结构图可参考图3。所述一种多区域微调节气浮垫的调平判定机构包括底座5、激光位移传感器8安装板6、传感器安装座7、四个激光位移传感器8和配重9，四个激光位移传感器8通过传感器安装座7固定在激光位移传感器8安装板6上，激光位移传感器8安装板6安装在底座5上，气浮垫本体10生成气膜101的平面朝下设置在底座5上，气浮垫本体10产生气膜101后使得气浮垫本体10悬浮在底座5上，配重9固定在气浮垫本体10的背面上，四个激光位移传感器8的激光方向朝下且正对气浮垫本体10上的四个区域1。所述发明一种多区域微调节气浮垫10的调平可通过激光位移传感器8判定，利用四个激光位移传感器8同时测量四个区域1的高度，当各传感器8读数相同时，代表气浮垫10已调平。Refer to FIG. 3 for the structure diagram of the leveling determination mechanism of a multi-region micro-adjustment air-floating pad according to the present invention. The leveling determination mechanism of the multi-region micro-adjustment air-floating pad includes a
上述实施例只是本发明的较佳实施例，并不是对本发明技术方案的限制，只要是不经过创造性劳动即可在上述实施例的基础上实现的技术方案，均应视为落入本发明专利的权利保护范围内。The above-described embodiments are only preferred embodiments of the present invention, and are not intended to limit the technical solutions of the present invention. As long as the technical solutions that can be realized on the basis of the above-described embodiments without creative work, all should be regarded as falling into the patent of the present invention. within the scope of protection of rights.
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| DE3639770A1 (en)* | 1986-11-21 | 1988-06-01 | Peter Pertl | SENSOR CONTROLLED LEVELING DEVICE |
| JPH11132232A (en)* | 1997-10-30 | 1999-05-18 | Disco Abrasive Syst Ltd | Air spindle tilt adjustment mechanism |
| WO2007077878A1 (en)* | 2005-12-27 | 2007-07-12 | Pneumatic Servo Controls Ltd. | Gas pressure control actuator, gas bearing mechanism for the gas pressure control actuator, and minute displacement output device using the gas pressure control actuator |
| JP2016161007A (en)* | 2015-02-27 | 2016-09-05 | 株式会社日本製鋼所 | Gas flotation workpiece support device and non-contact workpiece support method |
| CN110450993B (en)* | 2019-09-11 | 2021-03-19 | 北京邮电大学 | Zero-gravity self-adjusting air floatation platform and zero-gravity simulation system |
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