CN112986880A - Probe station fault detection method and system, probe station and use method thereof - Google Patents
Probe station fault detection method and system, probe station and use method thereofDownload PDFInfo
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Abstract
Description
Technical Field
The invention belongs to the technical field of testing in the semiconductor industry, and particularly relates to a probe station fault detection method and system, a probe station and a using method thereof.
Background
The fabrication process of integrated circuits is generally divided into wafer processing, wafer testing, packaging and final testing. Before packaging, an electrical performance test and a wafer test are usually performed on the integrated circuit on the wafer to determine whether the integrated circuit is good, and the integrated circuit after the packaging process needs to be finally tested, that is, a final test is performed to screen out a defective product caused by the poor packaging process, so as to further improve the yield of the final product.
The probe station is the main equipment in the wafer testing system, and mainly consists of software control program and hardware components. Wherein the hardware components mainly include a driver 1, amotor 2, acylinder 3, a sensor 4, a camera, a guide post 5, a lead screw 6, and a motion controller, and fig. 1 shows a structural schematic diagram of a loading part of the probe station. The probe station can be used for a long time, and the running program and hardware components of the probe station can be in failure. Once the module fails, an equipment engineer is difficult to quickly judge a failure point, for example, when the probe station is started up, under the condition that a probe station system is not completely started, if a certain hardware part fails, the failure point cannot be judged, and the equipment engineer needs to check the failure point for a long time, so that the equipment downtime is too long, and the equipment utilization rate is reduced; it may even cause the equipment engineer to replace the wrong fittings, resulting in increased maintenance costs.
For the above reasons, it is necessary to provide a system and a method for detecting a fault of a probe station, which can quickly locate a fault module of the probe station, so that an equipment engineer can quickly and accurately determine a fault point and remove obstacles.
Disclosure of Invention
In view of the above-mentioned shortcomings of the prior art, an object of the present invention is to provide a method and a system for detecting a failure of a probe station, a probe station and a method for using the same, which are used to solve the problems that when a failure occurs in a probe station in the prior art, the position of a component having the failure cannot be accurately determined, which results in an excessively long downtime of equipment, a reduced utilization rate of the equipment, and an increased maintenance cost.
To achieve the above and other related objects, the present invention provides a probe station fault detection system, which at least includes: the device comprises a storage module, a data acquisition module, a data processing module and a display module; wherein,
the storage module is used for storing set parameter values of variables of the hardware part of the probe station;
the data acquisition module is used for acquiring real-time progress data values of variables of a hardware part of the probe station and transmitting the acquired real-time progress data values to the data processing module;
the data processing module is connected with the data acquisition module and the storage module and is used for acquiring the set parameter value and the real-time progress data value, comparing the set parameter value with the real-time progress data value to obtain a comparison result, and acquiring a specific fault point of a hard body part of the probe station according to the comparison result;
the display module is connected with the data processing module and is used for displaying the set parameter value, the real-time progress data value and the comparison result.
Optionally, the probe station hardware section includes a loading section, and a host system.
Optionally, the loading part comprises a magazine lock, a magazine carrier, a magazine cover, a mechanical arm and a pre-alignment chuck; the bearing part comprises a chuck and a needle cleaning table; the main system comprises a main vacuum system, a main compression system and a main power supply system.
Optionally, the variables of the hardware part of the probe station include a power supply state, a sensor switch state, a solenoid valve switch state, a driver state, a gas pressure value, a component operation position and a motor state.
Optionally, when the variable is the gas pressure value and the component operation position, the display module displays the set parameter value and the real-time progress data value of the variable; and when the variable is the power supply state, the sensor switch state, the electromagnetic valve switch state, the driver state and the motor state, the display module displays that the state of the variable is 'ON' or 'OFF'.
Optionally, the probe station fault detection system is used for detecting a fault in a startup process of the probe station and/or detecting a fault in an operation process of the probe station.
The invention also provides a probe station, which comprises the probe station fault detection system.
The invention also provides a probe station fault detection method, which at least comprises the following steps:
acquiring a set parameter value of a variable of a hardware part of a probe station;
acquiring real-time progress data values of variables of hardware parts of a probe station;
comparing the set parameter value with the real-time progress data value to obtain a comparison result, and obtaining a specific fault point of the hard body part of the probe station according to the comparison result;
and displaying the set parameter value, the real-time progress data value and the comparison result.
Optionally, the probe station hardware section includes a loading section, and a host system.
Optionally, the loading part comprises a magazine lock, a magazine carrier, a magazine cover, a mechanical arm and a pre-alignment chuck; the bearing part comprises a chuck and a needle cleaning table; the main system comprises a main vacuum system, a main compression system and a main power supply system.
Optionally, the variables of the hardware part of the probe station include a power supply state, a sensor switch state, a solenoid valve switch state, a driver state, a gas pressure value, a component operation position and a motor state.
Optionally, when the variable is the gas pressure value and the component operation position, the display module displays the set parameter value and the real-time progress data value of the variable; and when the variable is the power supply state, the sensor switch state, the electromagnetic valve switch state, the driver state and the motor state, the display module displays that the state of the variable is 'ON' or 'OFF'.
Optionally, the detection method is used for detecting a fault in a startup process of a probe station, and specifically includes the following steps:
when the probe station is started, the probe station control system monitors the real-time progress data value of the variable of the hardware part of the probe station in real time;
when the probe station is started and encounters a fault, acquiring a set parameter value of a variable of a hardware part of the probe station, and acquiring a real-time progress data value of the variable of the hardware part of the probe station when the probe station is started and encounters the fault;
comparing the set parameter value with the real-time progress data value to obtain a comparison result, and obtaining a specific fault point of the hard body part of the probe station according to the comparison result;
and displaying the set parameter value, the real-time progress data value and the comparison result.
Optionally, the detection method is used for detecting a fault in an operation process of a probe station, and specifically includes the following steps:
in the operation process of the probe station, the probe station control system monitors the real-time progress data value of the variable of the hardware part of the probe station in real time;
when a fault occurs in the operation process of the probe station, a fault alarm is generated, and the probe station system judges that the fault is approximately positioned;
acquiring a set parameter value of a variable of a probe station hardware part roughly positioned by the fault judged by a probe station system, and acquiring a real-time progress data value of the variable of the probe station hardware part roughly positioned by the fault judged by the probe station system;
comparing the set parameter value with the real-time progress data value to obtain a comparison result, and obtaining a specific fault point of the hard body part of the probe station according to the comparison result;
and displaying the set parameter value, the real-time progress data value and the comparison result.
The invention also provides a using method of the probe station, which comprises the step of detecting specific fault points of the hard body part of the probe station when the probe station encounters faults in the starting-up process and/or the running process by using the fault detection method of the probe station.
As described above, the probe station fault detection method and system, the probe station and the use method thereof of the invention adopt the probe station fault detection system of the invention, when the probe station has a fault, the specific fault point of the hardware part of the probe station can be rapidly and accurately obtained by comparing the set parameter value of the variable of the hardware part of the probe station with the real-time progress data value when the fault occurs, thereby effectively shortening the machine-down time of the equipment, improving the replacement precision of the accessories, reducing the maintenance cost of the equipment and improving the utilization rate of the equipment.
Drawings
Fig. 1 is a schematic structural view illustrating a loading portion of a conventional probe station.
Fig. 2 is a schematic diagram of a frame of a system for detecting a fault in a probe station according to a first embodiment of the present invention.
FIG. 3 is a block diagram of a hardware portion of a prober in a prober fault detection system according to an embodiment of the present invention.
Fig. 4 is a schematic view showing a display module of a system for detecting a fault of a robot arm in a probe station according to a first embodiment of the invention.
Fig. 5 is a schematic diagram illustrating a fault detection process of the probe station fault detection method according to the second embodiment of the present invention when the probe station fails during the power-on process.
Fig. 6 is a schematic diagram illustrating a fault detection flow of the probe station fault detection method according to the second embodiment of the present invention when a fault occurs during operation of the probe station.
Description of the element reference numerals
1 driver
2 Motor
3 air cylinder
4 sensor
5 guide post
6 lead screw
10 memory module
11 data acquisition module
12 data processing module
13 display module
14 setting parameter values
15 real-time progress data value
Hardware part of 16 probe station
20 loading site
200 magazine lock
201 magazine carrier
202 Magazine lid
203 mechanical arm
204 pre-alignment chuck
21 bearing part
210 chuck
211 needle cleaning table
22 master system
220 main vacuum system
221 Main compression System
222 main power supply system
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention.
Please refer to fig. 1 to 6. It should be noted that the drawings provided in the present embodiment are only for illustrating the basic idea of the present invention, and the drawings only show the components related to the present invention rather than being drawn according to the number, shape and size of the components in actual implementation, and the type, quantity and proportion of each component in actual implementation may be changed arbitrarily, and the layout of the components may be more complicated.
The probe station is the main equipment in the wafer testing system, is used for loading and unloading the wafer, fixing the wafer and moving the wafer, and fixing the probe card, and mainly comprises a software control program and hardware components. In the process of starting up a probe station (such as TEL and TSK) in the market at present, the progress of a program is only displayed, if a fault occurs in the process of starting up the probe station, the program cannot be carried out, the probe station is always in a starting up state, and any fault of the probe station can cause the program to be unable to be carried out, so that an equipment engineer can hardly judge a fault point when the fault occurs in the process of starting up the probe station; in addition, if a fault occurs in the operation process of the probe station, fault information can be popped up, and a very small fault can prompt an equipment engineer to check a plurality of relevant places, so that the equipment engineer cannot quickly judge an actual fault point. The specific fault point of the probe station cannot be timely and accurately judged, so that more manpower is required to troubleshoot the fault, the downtime of the equipment is too long, and the utilization rate of the equipment is reduced; even the possibility of replacing the wrong fitting by manpower increases the maintenance cost.
Based on the problems and by analyzing software and hardware facilities of the conventional probe station in detail, the inventor provides a probe station fault detection system, and the system can be used for quickly and accurately positioning specific fault points of the probe station, so that the machine halt time of equipment is shortened, the replacement precision of accessories is improved, the maintenance cost of the equipment is reduced, and the utilization rate of the equipment is improved.
The probe station fault detection system of the present invention will be described in detail with reference to the accompanying drawings, and it is to be understood that the described embodiments are only a part, and not all, of the embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example one
As shown in fig. 2 and 4, the present embodiment provides a probe station fault detection system, which includes: the device comprises astorage module 10, a data acquisition module 11, adata processing module 12 and adisplay module 13; wherein,
thestorage module 10 is used for storing theset parameter value 14 of the variable of the hardware part of the probe station;
the data acquisition module 11 is configured to acquire a real-time progress data value 15 of a variable of a hardware portion of a probe station, and transmit the acquired real-time progress data value 15 to thedata processing module 12;
thedata processing module 12 is connected to the data acquisition module 11 and thestorage module 10, and is configured to obtain theset parameter value 14 and the real-timeprogress data value 15, compare theset parameter value 14 with the real-timeprogress data value 15, obtain a comparison result, and obtain a specific fault point of a hardware part of the probe station according to the comparison result;
thedisplay module 13 is connected to thedata processing module 12, and is configured to display the settingparameter value 14, the real-timeprogress data value 15, and the comparison result.
By adopting the probe station fault detection system of the embodiment, when the probe station fails, the set parameter value of the variable of the hard part of the probe station is compared with the real-time progress data value when the probe station fails, so that the specific fault point of the hard part of the probe station which fails can be quickly and accurately obtained, the machine-down time of equipment is effectively shortened, the replacement precision of accessories is improved, the maintenance cost of the equipment is reduced, and the utilization rate of the equipment is improved.
It should be noted that, the system for detecting a fault in a probe station according to this embodiment may be integrated into a control system (e.g., a programmable logic controller, PLC) of the probe station itself; or a control system independent of the probe station; or may be partially integrated into the control system of the probe station itself, or partially independent from the control system of the probe station itself, which is not limited herein.
As shown in FIG. 3, the probestation hardware section 16 includes, by way of example, aloading section 20, aloading section 21, and ahost system 22. Preferably, theloading site 20 comprises acartridge lock 200, acartridge carrier 201, acartridge lid 202, arobot arm 203, and apre-alignment chuck 204; the bearingpart 21 comprises achuck 210 and a needle cleaning table 211; themain system 22 includes amain vacuum system 220, amain compression system 221, and amain power system 222. Of course, the probestation hardware portion 16 may also include other components, which may be disposed in the detection object of the fault detection system according to the specific requirement, and is not limited herein.
As shown in fig. 3 and 4, the variables of the probestation hardware portion 16 include, by way of example, a power supply state, a sensor switch state, a solenoid valve switch state, a driver state, a gas pressure value, a component operating position, and a motor state. Of course, the probestation hardware portion 16 may also include other variables, which may be set in the variable detection object of the fault detection system according to the specific requirement, and is not limited herein.
As shown in fig. 4, the content displayed by thedisplay module 13 can be set according to the variables of thehard part 16 of the probe station, for example, when the variables are the gas pressure value and the component operating position, thedisplay module 13 displays the set parameter value and the real-time progress data value of the variables; when the variable is the power supply state, the sensor switch state, the electromagnetic valve switch state, the driver state and the motor state, the display module displays that the state of the variable is 'ON' or 'OFF', the 'ON' represents normal operation, and the 'OFF' represents abnormal operation. The contrast result shows that the red color represents that the part is abnormal, and the contrast result shows that the green color represents that the part is normal.
As an example, the system for detecting a fault of a probe station of the present embodiment may be used for detecting a fault during a startup process of the probe station and/or detecting a fault during an operation process of the probe station.
Based on the system for detecting a fault of a probe station in this embodiment, this embodiment further provides a probe station, where the probe station includes the system for detecting a fault of a probe station in this embodiment, so as to quickly and accurately locate a specific fault point of a hardware part of the probe station when the probe station is abnormally operated.
It should be noted that, all the modules involved in this embodiment are logic modules, and in practical application, one logic unit may be one physical unit, may also be a part of one physical unit, and may also be implemented by a combination of multiple physical units. In addition, in order to highlight the innovative part of the present invention, a unit which is not so closely related to solve the technical problem proposed by the present invention is not introduced in the present embodiment, but it does not indicate that there is no other unit in the present embodiment.
Example two
The present embodiment provides a method for detecting a fault of a probe station, which can be implemented based on the system for detecting a fault of a probe station in the first embodiment, but may not be limited to the system for detecting a fault of a probe station.
The detection method at least comprises the following steps:
acquiring a set parameter value of a variable of a hardware part of a probe station;
acquiring real-time progress data values of variables of hardware parts of a probe station;
comparing the set parameter value with the real-time progress data value to obtain a comparison result, and obtaining a specific fault point of the hard body part of the probe station according to the comparison result;
and displaying the set parameter value, the real-time progress data value and the comparison result.
As shown in FIG. 3, the probestation hardware section 16 includes, by way of example, aloading section 20, aloading section 21, and ahost system 22. Preferably, theloading site 20 comprises acartridge lock 200, acartridge carrier 201, acartridge lid 202, arobot arm 203, and apre-alignment chuck 204; the bearingpart 21 comprises achuck 210 and a needle cleaning table 211; themain system 22 includes amain vacuum system 220, amain compression system 221, and amain power system 222. Of course, the probestation hardware portion 16 may also include other components, which may be disposed in the detection object of the fault detection system according to the specific requirement, and is not limited herein.
As shown in fig. 3 and 4, the variables of the probestation hardware portion 16 include, by way of example, a power supply state, a sensor switch state, a solenoid valve switch state, a driver state, a gas pressure value, a component operating position, and a motor state. Of course, the probestation hardware portion 16 may also include other variables, which may be set in the variable detection object of the fault detection system according to the specific requirement, and is not limited herein.
As shown in fig. 4, the content displayed by thedisplay module 13 can be set according to the variables of thehard part 16 of the probe station, for example, when the variables are the gas pressure value and the component operating position, thedisplay module 13 displays the set parameter value and the real-time progress data value of the variables; when the variable is the power supply state, the sensor switch state, the electromagnetic valve switch state, the driver state and the motor state, the display module displays that the state of the variable is 'ON' or 'OFF', the 'ON' represents normal operation, and the 'OFF' represents abnormal operation. The contrast result shows that the red color represents that the part is abnormal, and the contrast result shows that the green color represents that the part is normal.
As shown in fig. 5, as an example, the detection method is used for detecting a fault in a startup process of a probe station, and includes the specific steps of:
when the probe station is started, the probe station control system monitors the real-time progress data value of the variable of the hardware part of the probe station in real time;
when the probe station does not encounter faults, the probe station is normally started to operate; when the probe station is started and encounters a fault, acquiring a set parameter value of a variable of a hardware part of the probe station, and acquiring a real-time progress data value of the variable of the hardware part of the probe station when the probe station is started and encounters the fault;
comparing the set parameter value with the real-time progress data value to obtain a comparison result, and obtaining a specific fault point of the hard body part of the probe station according to the comparison result;
and displaying the set parameter value, the real-time progress data value and the comparison result.
And directly acquiring a specific fault point (namely fault positioning) by an equipment engineer according to the content displayed by the display module, removing the fault of the specific fault point, and continuously starting the machine to complete the starting process of the probe station.
As shown in fig. 6, as an example, the detection method is used for detecting a fault in an operation process of a probe station, and includes the specific steps of:
in the operation process of the probe station, the probe station control system monitors the real-time progress data value of the variable of the hardware part of the probe station in real time;
when a fault occurs in the operation process of the probe station, a fault alarm is generated, and the probe station system judges that the fault is approximately positioned;
acquiring a set parameter value of a variable of a probe station hardware part roughly positioned by the fault judged by a probe station system, and acquiring a real-time progress data value of the variable of the probe station hardware part roughly positioned by the fault judged by the probe station system;
comparing the set parameter value with the real-time progress data value to obtain a comparison result, and obtaining a specific fault point of the hard body part of the probe station according to the comparison result;
and displaying the set parameter value, the real-time progress data value and the comparison result.
And directly acquiring a specific fault point (namely fault positioning) by the equipment engineer according to the content displayed by the display module, removing the fault of the specific fault point, and then initializing.
Based on the method for detecting the fault of the probe station in the embodiment, the embodiment further provides a method for using the probe station, and the method for using the probe station comprises the step of detecting a specific fault point of a hardware part of the probe station when the probe station encounters a fault in a starting-up process and/or an operating process by using the method for detecting the fault of the probe station in the embodiment.
In summary, the invention provides a probe station fault detection method and system, a probe station and a use method thereof, when the probe station has a fault, the probe station fault detection system of the invention can rapidly and accurately obtain a specific fault point of the fault of the hardware part of the probe station by comparing the set parameter value of the variable of the hardware part of the probe station with the real-time progress data value when the fault occurs, thereby effectively shortening the machine-down time of equipment, improving the replacement precision of accessories, reducing the maintenance cost of the equipment and improving the utilization rate of the equipment. Therefore, the invention effectively overcomes various defects in the prior art and has high industrial utilization value.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (15)
1. A probe station fault detection system, characterized in that the probe station fault detection system comprises at least: the device comprises a storage module, a data acquisition module, a data processing module and a display module; wherein,
the storage module is used for storing set parameter values of variables of the hardware part of the probe station;
the data acquisition module is used for acquiring real-time progress data values of variables of a hardware part of the probe station and transmitting the acquired real-time progress data values to the data processing module;
the data processing module is connected with the data acquisition module and the storage module and is used for acquiring the set parameter value and the real-time progress data value, comparing the set parameter value with the real-time progress data value to obtain a comparison result, and acquiring a specific fault point of a hard body part of the probe station according to the comparison result;
the display module is connected with the data processing module and is used for displaying the set parameter value, the real-time progress data value and the comparison result.
2. The probe station fault detection system of claim 1, wherein: the hardware part of the probe station comprises a loading part, a bearing part and a main system.
3. The probe station fault detection system of claim 2, wherein: the loading part comprises a material box lock, a material box bearing part, a material box cover, a mechanical arm and a pre-alignment chuck; the bearing part comprises a chuck and a needle cleaning table; the main system comprises a main vacuum system, a main compression system and a main power supply system.
4. The probe station fault detection system of claim 1, wherein: the variables of the hardware part of the probe station comprise a power supply state, a sensor switch state, an electromagnetic valve switch state, a driver state, a gas pressure value, a part running position and a motor state.
5. The probe station fault detection system of claim 4, wherein: when the variable is the gas pressure value and the component running position, the display module displays the set parameter value and the real-time progress data value of the variable; and when the variable is the power supply state, the sensor switch state, the electromagnetic valve switch state, the driver state and the motor state, the display module displays that the state of the variable is 'ON' or 'OFF'.
6. The probe station fault detection system of claim 1, wherein: the probe station fault detection system is used for detecting faults in the starting process of the probe station and/or detecting faults in the operation process of the probe station.
7. A probe station, characterized by: the probe station comprises a probe station fault detection system according to any one of claims 1 to 6.
8. A method for detecting faults of a probe station is characterized by at least comprising the following steps:
acquiring a set parameter value of a variable of a hardware part of a probe station;
acquiring real-time progress data values of variables of hardware parts of a probe station;
comparing the set parameter value with the real-time progress data value to obtain a comparison result, and obtaining a specific fault point of the hard body part of the probe station according to the comparison result;
and displaying the set parameter value, the real-time progress data value and the comparison result.
9. The method of claim 8, wherein the probe station comprises: the hardware part of the probe station comprises a loading part, a bearing part and a main system.
10. The method of claim 9, wherein the probe station fault detection method comprises: the loading part comprises a material box lock, a material box bearing part, a material box cover, a mechanical arm and a pre-alignment chuck; the bearing part comprises a chuck and a needle cleaning table; the main system comprises a main vacuum system, a main compression system and a main power supply system.
11. The method of claim 8, wherein the probe station comprises: the variables of the hardware part of the probe station comprise a power supply state, a sensor switch state, an electromagnetic valve switch state, a driver state, a gas pressure value, a part running position and a motor state.
12. The method of claim 11, wherein the probe station comprises: when the variable is the gas pressure value and the component running position, the display module displays the set parameter value and the real-time progress data value of the variable; and when the variable is the power supply state, the sensor switch state, the electromagnetic valve switch state, the driver state and the motor state, the display module displays that the state of the variable is 'ON' or 'OFF'.
13. The method for detecting the fault of the probe station according to claim 8, wherein the method is used for detecting the fault in the process of starting up the probe station, and comprises the following specific steps:
when the probe station is started, the probe station control system monitors the real-time progress data value of the variable of the hardware part of the probe station in real time;
when the probe station is started and encounters a fault, acquiring a set parameter value of a variable of a hardware part of the probe station, and acquiring a real-time progress data value of the variable of the hardware part of the probe station when the probe station is started and encounters the fault;
comparing the set parameter value with the real-time progress data value to obtain a comparison result, and obtaining a specific fault point of the hard body part of the probe station according to the comparison result;
and displaying the set parameter value, the real-time progress data value and the comparison result.
14. The method for detecting the fault of the probe station according to claim 8, wherein the method is used for detecting the fault in the operation process of the probe station, and comprises the following specific steps:
in the operation process of the probe station, the probe station control system monitors the real-time progress data value of the variable of the hardware part of the probe station in real time;
when a fault occurs in the operation process of the probe station, a fault alarm is generated, and the probe station system judges that the fault is approximately positioned;
acquiring a set parameter value of a variable of a probe station hardware part roughly positioned by the fault judged by a probe station system, and acquiring a real-time progress data value of the variable of the probe station hardware part roughly positioned by the fault judged by the probe station system;
comparing the set parameter value with the real-time progress data value to obtain a comparison result, and obtaining a specific fault point of the hard body part of the probe station according to the comparison result;
and displaying the set parameter value, the real-time progress data value and the comparison result.
15. A use method of a probe station is characterized in that: the using method comprises the step of detecting specific fault points of the hard body parts of the probe station when the probe station encounters faults in the starting-up process and/or the running process by using the fault detection method of the probe station as claimed in any one of claims 8 to 14.
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| CN201911302332.4ACN112986880A (en) | 2019-12-17 | 2019-12-17 | Probe station fault detection method and system, probe station and use method thereof |
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| CN201911302332.4ACN112986880A (en) | 2019-12-17 | 2019-12-17 | Probe station fault detection method and system, probe station and use method thereof |
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| CN201911302332.4APendingCN112986880A (en) | 2019-12-17 | 2019-12-17 | Probe station fault detection method and system, probe station and use method thereof |
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