技术领域Technical Field
本发明涉及激光雷达领域，具体涉及一种基于切趾调制的一维光学相控阵。The present invention relates to the field of laser radar, and in particular to a one-dimensional optical phased array based on apodization modulation.
背景技术Background technique
在万物互联的信息时代，无人驾驶等智能无人系统正逐渐实现商业化。高性能的传感器是智能无人系统的核心环节之一，因此，激光雷达作为目前较为先进的传感器，受到研究人员的广泛关注。In the information age of the Internet of Everything, intelligent unmanned systems such as driverless cars are gradually being commercialized. High-performance sensors are one of the core links of intelligent unmanned systems. Therefore, LiDAR, as a relatively advanced sensor, has attracted extensive attention from researchers.
相控阵是雷达领域中非常经典的概念，通过控制每个阵元的初始相位，形成固定的相位差，使得发射的波束只在指定的方向上满足干涉的条件而发生相互干涉，调整相邻阵元的相位差即可实现波束的旋转、偏移和扫描。目前，电学射频波段和毫米波波段的相控阵雷达已经非常成熟，而光学相控阵由于相应器件的单元尺寸需与光波波长在同一量级，所需的相位控制精度较高，这对现有的制造工艺提出了较高的要求。Phased array is a very classic concept in the field of radar. By controlling the initial phase of each array element and forming a fixed phase difference, the transmitted beams only interfere with each other in the specified direction when the interference conditions are met. By adjusting the phase difference of adjacent array elements, the rotation, offset and scanning of the beams can be achieved. At present, phased array radars in the electrical RF band and millimeter wave band are very mature, while optical phased arrays require higher phase control accuracy because the unit size of the corresponding devices must be at the same order of magnitude as the wavelength of the light wave, which places higher requirements on the existing manufacturing process.
如图1所示，硅基光学相控阵一般由耦合器1、分束器2、移相器3及光学天线4几部分组成(On-chip silicon optical phased array fortwo-dimensional beamsteering)。光源通过耦合器1从光纤耦合到硅基光学相控阵中，随后通过分束器2实现一路到N路的分束进入到移相器3阵列，在移相器3阵列中通过扫描电控系统施加电压改变波导的折射率，对光束添加额外的附加相位，最终，具有不同相位的光经由光学天线4阵列辐射到自由空间中，在远场进行相干叠加，实现光束的偏转，达到扫描的目的。现有光学相控阵仅调控光学天线的相位生成远场波束，对振幅不加以限制，在各天线阵元方向，采用均匀分束方案，光发射振幅保持均匀；而沿着天线方向，光栅天线的刻蚀结构设计为均匀排布，整体的扰动强度相同，发射剖面呈指数形式，天线的有效长度较短。光场的发射振幅会影响远场的旁瓣分布，旁瓣的存在同样分散了主瓣的能量，在扫描的过程中对主瓣构成了干扰，影响相控阵的性能。因而，现有方案仅考虑相位控制并不能完全控制光场，还需要结合振幅控制，以优化发射光束远场分布特性。As shown in FIG1 , a silicon-based optical phased array generally consists of a coupler 1, a beam splitter 2, a phase shifter 3 and an optical antenna 4 (On-chip silicon optical phased array for two-dimensional beamsteering). The light source is coupled from the optical fiber to the silicon-based optical phased array through the coupler 1, and then the beam splitting from one to N paths is realized through the beam splitter 2 and enters the phase shifter 3 array. In the phase shifter 3 array, the refractive index of the waveguide is changed by applying voltage through the scanning electric control system, and an additional additional phase is added to the light beam. Finally, the light with different phases is radiated into the free space through the optical antenna 4 array, and coherent superposition is performed in the far field to realize the deflection of the light beam and achieve the purpose of scanning. The existing optical phased array only regulates the phase of the optical antenna to generate a far-field beam, and does not limit the amplitude. In the direction of each antenna array element, a uniform beam splitting scheme is adopted, and the light emission amplitude remains uniform; while along the antenna direction, the etching structure of the grating antenna is designed to be evenly arranged, the overall disturbance intensity is the same, the emission profile is exponential, and the effective length of the antenna is short. The emission amplitude of the light field will affect the sidelobe distribution in the far field. The existence of the sidelobe also disperses the energy of the main lobe, which interferes with the main lobe during the scanning process and affects the performance of the phased array. Therefore, the existing solution only considers phase control and cannot completely control the light field. It also needs to be combined with amplitude control to optimize the far-field distribution characteristics of the emission beam.
发明内容Summary of the invention
为了解决现有技术中存在的问题，本发明提供了一种基于切趾调制的一维光学相控阵，结合相位控制和振幅控制以优化发射光束远场分布特性，解决旁瓣分散主瓣能量的问题。In order to solve the problems existing in the prior art, the present invention provides a one-dimensional optical phased array based on toe-cut modulation, which combines phase control and amplitude control to optimize the far-field distribution characteristics of the emitted light beam and solve the problem of sidelobe dispersing mainlobe energy.
本发明解决技术问题所采用的技术方案如下：The technical solution adopted by the present invention to solve the technical problem is as follows:
基于切趾调制的一维光学相控阵，该相控阵包括：耦合器、分束器、移相器及光学天线，光源通过耦合器从光纤耦合到硅基光学相控阵中，通过分束器进入到移相器阵列，在移相器阵列对光束添加额外的附加相位，最终，具有不同相位的光经由光学天线阵列辐射到自由空间中，在远场进行相干叠加，实现光束的偏转；所述分束器采用多级多模干涉耦合器连接的方式，用于将光功率按照特定的分配比传输给下一级的移相器阵列；所述移相器通过改变波导的有效折射率对光添加额外的附加相位；所述光学天线为条状波导光栅结构，将光耦合到自由空间中，对波导进行侧壁刻蚀，刻蚀结构采用非均匀方式排布，调制天线近场发射强度，以获得所需的近场光强轮廓。A one-dimensional optical phased array based on apodization modulation includes: a coupler, a beam splitter, a phase shifter and an optical antenna. The light source is coupled from the optical fiber to the silicon-based optical phased array through the coupler, enters the phase shifter array through the beam splitter, and an additional phase is added to the light beam in the phase shifter array. Finally, light with different phases is radiated into the free space through the optical antenna array, and coherent superposition is performed in the far field to achieve the deflection of the light beam. The beam splitter adopts a multi-stage multi-mode interference coupler connection method to transmit the optical power to the next-stage phase shifter array according to a specific distribution ratio. The phase shifter adds an additional phase to the light by changing the effective refractive index of the waveguide. The optical antenna is a strip waveguide grating structure, which couples the light into the free space, etches the side wall of the waveguide, and arranges the etched structure in a non-uniform manner to modulate the antenna near-field emission intensity to obtain the required near-field light intensity profile.
优选的，所述移相器采用热光移相器或电光移相器。Preferably, the phase shifter is a thermo-optical phase shifter or an electro-optical phase shifter.
优选的，所述光学天线中间部分为直波导，所述直波导两侧为对称排布的矩形结构，两部分的厚度均相同，为标准的220nm工艺，直波导宽度为工艺所要求的单模波导宽度。Preferably, the middle part of the optical antenna is a straight waveguide, and the two sides of the straight waveguide are symmetrically arranged rectangular structures. The thickness of the two parts is the same, which is a standard 220nm process, and the width of the straight waveguide is the single-mode waveguide width required by the process.
优选的，所述光学天线的矩形结构的间距为非均匀排布形式。Preferably, the spacing between the rectangular structures of the optical antenna is in a non-uniform arrangement.
优选的，所述分束器采用多模干涉耦合器和定向耦合器联立的形式。Preferably, the beam splitter is in the form of a combination of a multimode interference coupler and a directional coupler.
优选的，所述定向耦合器的耦合效率随耦合间隙大小和耦合区域的长度的变化而改变。Preferably, the coupling efficiency of the directional coupler changes with the size of the coupling gap and the length of the coupling region.
优选的，所述耦合器、分束器、移相器及光学天线的材料为硅或者氮化硅。Preferably, the coupler, beam splitter, phase shifter and optical antenna are made of silicon or silicon nitride.
优选的，所述光源的波段为1.3-1.6μm或800-1100nm。Preferably, the wavelength band of the light source is 1.3-1.6 μm or 800-1100 nm.
本发明的有益效果是：本发明结合相位控制和振幅控制以优化发射光束远场分布特性，解决旁瓣分散主瓣能量的问题。本发明的振幅控制体现在如下两个方面：在分束器阵列，选择合适的光场分配比，通过多级多模干涉耦合器的连接，实现光场的振幅分配调节；在光学天线单元，通过对条状波导光栅天线的刻蚀结构的参数设置，改变天线沿向的扰动强度分布，增大天线的有效长度的同时产生所需的近场光强轮廓。通过两种方式结合，实现光学相控阵的切趾调制，控制光场的发射振幅，对远场的旁瓣加以限制。The beneficial effects of the present invention are as follows: the present invention combines phase control and amplitude control to optimize the far-field distribution characteristics of the emitted light beam, solving the problem of side lobes dispersing the main lobe energy. The amplitude control of the present invention is embodied in the following two aspects: in the beam splitter array, a suitable light field distribution ratio is selected, and the amplitude distribution adjustment of the light field is achieved through the connection of multi-stage multimode interference couplers; in the optical antenna unit, the disturbance intensity distribution along the antenna is changed by setting the parameters of the etching structure of the strip waveguide grating antenna, and the effective length of the antenna is increased while generating the required near-field light intensity profile. By combining the two methods, the toe-cut modulation of the optical phased array is realized, the emission amplitude of the light field is controlled, and the side lobes of the far field are limited.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1现有技术一维硅基光学相控阵示意图。FIG1 is a schematic diagram of a one-dimensional silicon-based optical phased array in the prior art.
图2本发明某一级分束器示意图。FIG. 2 is a schematic diagram of a beam splitter at a certain level of the present invention.
图3本发明切趾光栅天线示意图。FIG3 is a schematic diagram of an apodized grating antenna according to the present invention.
图4本发明一种分束器示意图。FIG. 4 is a schematic diagram of a beam splitter according to the present invention.
图5本发明定向耦合器示意图。FIG5 is a schematic diagram of a directional coupler of the present invention.
图6现有技术均匀振幅阵列及其远场衍射图样示意图。FIG. 6 is a schematic diagram of a prior art uniform amplitude array and its far-field diffraction pattern.
图7本发明余弦分布振幅阵列及其远场衍射图样示意图。FIG. 7 is a schematic diagram of a cosine distributed amplitude array and its far-field diffraction pattern of the present invention.
图中：1、耦合器，2、分束器，2-1、多模干涉耦合器，2-1-1、输入端口，2-1-2、1×N多模干涉耦合器，2-1-3、N×M多模干涉耦合器，2-1-4、输出端口，2-2、多模干涉耦合器和定向耦合器联立形式，2-3、定向耦合器联立形式，2-3-1、耦合间距，2-3-2、耦合区域，3、移相器，4、光学天线，4-1、切趾光栅天线，4-1-1、直波导，4-1-2、矩形结构.In the figure: 1. Coupler, 2. Beam splitter, 2-1. Multimode interference coupler, 2-1-1. Input port, 2-1-2. 1×N multimode interference coupler, 2-1-3. N×M multimode interference coupler, 2-1-4. Output port, 2-2. Multimode interference coupler and directional coupler combined form, 2-3. Directional coupler combined form, 2-3-1. Coupling spacing, 2-3-2. Coupling region, 3. Phase shifter, 4. Optical antenna, 4-1. Apodized grating antenna, 4-1-1. Straight waveguide, 4-1-2. Rectangular structure.
具体实施方式Detailed ways
下面结合附图和实施例对本发明做进一步详细说明。The present invention is further described in detail below with reference to the accompanying drawings and embodiments.
本发明的架构包括耦合器1、分束器、移相器、光学天线阵列及各单元间的连接波导。耦合器1采用光栅耦合器、边缘耦合器或其他方式，用于将外部激光耦合到光学相控阵中。光分束器采用多级MMI耦合器(multimode interference coupler，多模干涉耦合器2-1)连接的方式，用于将光按照特定的分配比传输给下一级的移相器阵列。基于硅材料的热光效应和等离子色散效应，移相器3采用热光移相器或电光移相器，通过改变波导的有效折射率对光添加额外的附加相位。切趾光栅天线4-1为条状波导光栅结构，将光耦合到自由空间中，对波导进行侧壁刻蚀，刻蚀结构采用非均匀方式排布，调制天线近场发射强度，以获得所需的近场光强轮廓。分束器和切趾光栅天线4-1相结合的切趾调制实现对近场发射振幅的控制，限制远场的旁瓣。The architecture of the present invention includes a coupler 1, a beam splitter, a phase shifter, an optical antenna array and connecting waveguides between each unit. The coupler 1 adopts a grating coupler, an edge coupler or other methods to couple an external laser into an optical phased array. The optical beam splitter adopts a multi-stage MMI coupler (multimode interference coupler, multimode interference coupler 2-1) connection method to transmit light to the next stage phase shifter array according to a specific distribution ratio. Based on the thermo-optical effect and plasma dispersion effect of silicon materials, the phase shifter 3 adopts a thermo-optical phase shifter or an electro-optical phase shifter to add an additional additional phase to the light by changing the effective refractive index of the waveguide. The toe-cut grating antenna 4-1 is a strip waveguide grating structure, which couples light into free space, etches the side wall of the waveguide, and arranges the etched structure in a non-uniform manner to modulate the antenna near-field emission intensity to obtain the desired near-field light intensity profile. The toe-cut modulation combined with the beam splitter and the toe-cut grating antenna 4-1 realizes the control of the near-field emission amplitude and limits the side lobes of the far field.
多模干涉耦合器2-1是一种新型耦合器，基本原理是基于多模波导中光场的自映像效应，具有带宽宽、对偏振不敏感、器件制作容差大等优点。如图2所示，多模干涉耦合器2-1由输入端口2-1-1、输出端口2-1-4、单模波导和矩形的多模波导MMI区构成。光从一端进入MMI区时，各高阶的导模被激发产生，在MMI区内产生干涉，在一定的相位条件下，在MMI区的某些位置会产生输入光场的像。现有光学相控阵采用多级1×23dB多模干涉耦合器2-1实现功率的等分。本发明中采用不同的多级多模干涉耦合器2-1实现特定光功率分配。例如，针对某一级所需的M端口输出，可采用1×N多模干涉耦合器2-1-2和N×M多模干涉耦合器2-1-3联立来实现。第一级1×N多模干涉耦合器2-1-2将输入端口2-1-1的光进行第一次功率分配，进入下一级N×M多模干涉耦合器2-1-3中，两级多模波导区域的自映像效应相联立从而实现这一级所需的功率分配，通过对这样的M端输出的分束器进行多级联立，即可实现相控阵天线阵列特定的光功率分配，例如高斯分布、余弦分布等有利于压缩旁瓣的分布方案，完成天线阵列的切趾调制。The multimode interference coupler 2-1 is a new type of coupler. The basic principle is based on the self-image effect of the light field in the multimode waveguide. It has the advantages of wide bandwidth, insensitivity to polarization, and large tolerance for device manufacturing. As shown in Figure 2, the multimode interference coupler 2-1 is composed of an input port 2-1-1, an output port 2-1-4, a single-mode waveguide, and a rectangular multimode waveguide MMI region. When light enters the MMI region from one end, each high-order guided mode is excited and generated, and interference is generated in the MMI region. Under certain phase conditions, an image of the input light field will be generated at certain positions in the MMI region. The existing optical phased array uses a multi-stage 1×23dB multimode interference coupler 2-1 to achieve equal power division. In the present invention, different multi-stage multimode interference couplers 2-1 are used to achieve specific optical power distribution. For example, for the M-port output required for a certain level, a 1×N multimode interference coupler 2-1-2 and an N×M multimode interference coupler 2-1-3 can be used in combination to achieve it. The first-stage 1×N multimode interference coupler 2-1-2 performs the first power distribution on the light from the input port 2-1-1 and enters the next-stage N×M multimode interference coupler 2-1-3. The self-image effects of the two-stage multimode waveguide regions are connected to achieve the power distribution required for this stage. By connecting multiple stages of such M-end output beam splitters, the specific optical power distribution of the phased array antenna array can be achieved, such as Gaussian distribution, cosine distribution and other distribution schemes that are conducive to compressing side lobes, thereby completing the toe-cut modulation of the antenna array.
本发明中的分束器可采用其他可实现非均匀功率分配的分束器件实现。如图4所示，采用多模干涉耦合器和定向耦合器联立的形式2-2，多模干涉耦合器2-1进行第一级功率分配，定向耦合器2-3进行第二级功率分配。定向耦合器2-3通过对耦合间隙2-3-1大小及耦合区域2-3-2长度的设计，可实现更为精细的功率分配，将不同能量的光耦合到下一阵列中。The beam splitter in the present invention can be implemented by other beam splitting devices that can achieve non-uniform power distribution. As shown in FIG4 , a multimode interference coupler and a directional coupler are combined in a form 2-2, where the multimode interference coupler 2-1 performs the first-level power distribution and the directional coupler 2-3 performs the second-level power distribution. The directional coupler 2-3 can achieve more precise power distribution by designing the size of the coupling gap 2-3-1 and the length of the coupling region 2-3-2, and couple light of different energies to the next array.
切趾光栅天线4-1采用侧壁刻蚀的条状波导光栅结构，如图3所示，中间部分为直波导4-1-1，两侧为对称排布的矩形结构4-1-2，两部分的厚度均相同，为标准的220nm工艺，直波导4-1-1宽度为工艺所要求的单模波导宽度。两侧矩形结构4-1-2的排布及大小表明了天线的扰动强度，决定光从天线向外的辐射效率。因而，在确定天线传播常数一定的情况下，改变两侧方块的排列周期及矩形大小，可以改变光的辐射效率。根据近场所需的发射光场轮廓，对两侧矩形的大小及周期进行参数设置，即可实现对单个天线的切趾调制。The apodized grating antenna 4-1 adopts a strip waveguide grating structure with sidewall etching, as shown in FIG3 , the middle part is a straight waveguide 4-1-1, and the two sides are symmetrically arranged rectangular structures 4-1-2, the thickness of the two parts are the same, which is a standard 220nm process, and the width of the straight waveguide 4-1-1 is the single-mode waveguide width required by the process. The arrangement and size of the rectangular structures 4-1-2 on both sides indicate the disturbance intensity of the antenna and determine the radiation efficiency of light from the antenna to the outside. Therefore, when the antenna propagation constant is determined to be constant, the radiation efficiency of light can be changed by changing the arrangement period and rectangular size of the blocks on both sides. According to the emission light field profile required by the near field, the size and period of the rectangles on both sides are parameterized to achieve apodized modulation of a single antenna.
天线阵列及单个天线的切趾调制相结合则实现了对于整个光学相控阵发射口径的近场光强调制，限制了远场的旁瓣分布。本发明中天线阵列的排布可为非均匀排布形式，通过对天线间距的优化，破坏栅瓣的相干条件以压缩栅瓣实现较大的扫描范围，天线阵列非均匀排布的技术手段与本发明所提出的切趾调制相结合，可以达到同时优化栅瓣和旁瓣的目的。The combination of antenna array and single antenna apodization modulation achieves near-field light intensity modulation for the entire optical phased array emission aperture and limits the side lobe distribution in the far field. The antenna array in the present invention can be arranged in a non-uniform arrangement. By optimizing the antenna spacing, the coherence condition of the grating lobe is destroyed to compress the grating lobe to achieve a larger scanning range. The technical means of the non-uniform arrangement of the antenna array is combined with the apodization modulation proposed in the present invention to achieve the purpose of optimizing the grating lobe and the side lobe at the same time.
本发明中耦合器1、分束器、移相器及光学天线的硅基材料不限于硅或氮化硅材料，所用激光器波段可为1.3-1.6μm(硅)和800-1100nm(氮化硅)或其他波段；The silicon-based materials of the coupler 1, beam splitter, phase shifter and optical antenna in the present invention are not limited to silicon or silicon nitride materials, and the laser band used can be 1.3-1.6 μm (silicon) and 800-1100 nm (silicon nitride) or other bands;
本发明所设计的硅基光学相控阵可用于激光雷达、避障、3D打印、图像显示、自由空间光通信等应用领域。The silicon-based optical phased array designed by the present invention can be used in application fields such as laser radar, obstacle avoidance, 3D printing, image display, and free space optical communication.
如图6所示，左侧为一个12阵元的光学相控阵振幅分布示意图，该分布为均匀分束情况下示意图，振幅近似相等，右图为其的远场衍射图样。如图7所示，左侧为一个12阵元的光学相控阵振幅分布示意图，该分布为通过切趾调制下分束情况示意图，振幅呈现为余弦分布，右图为其的远场衍射图样。与图6相比，旁瓣明显受到抑制。As shown in Figure 6, the left side is a schematic diagram of the amplitude distribution of a 12-element optical phased array. This distribution is a schematic diagram of the uniform beam splitting case, and the amplitudes are approximately equal. The right figure is its far-field diffraction pattern. As shown in Figure 7, the left side is a schematic diagram of the amplitude distribution of a 12-element optical phased array. This distribution is a schematic diagram of the beam splitting case under apodization modulation. The amplitude presents a cosine distribution. The right figure is its far-field diffraction pattern. Compared with Figure 6, the side lobes are obviously suppressed.
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| CN202110153267.4ACN112946929B (en) | 2021-02-04 | 2021-02-04 | One-dimensional optical phased array based on apodization modulation |
| Application Number | Priority Date | Filing Date | Title |
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| CN202110153267.4ACN112946929B (en) | 2021-02-04 | 2021-02-04 | One-dimensional optical phased array based on apodization modulation |
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| CN112946929A CN112946929A (en) | 2021-06-11 |
| CN112946929Btrue CN112946929B (en) | 2024-07-23 |
| Application Number | Title | Priority Date | Filing Date |
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| CN202110153267.4AActiveCN112946929B (en) | 2021-02-04 | 2021-02-04 | One-dimensional optical phased array based on apodization modulation |
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