技术领域Technical field
本公开涉及光传感技术领域，具体涉及一种集成光交叉波导的传感阵列及生化检测系统。The present disclosure relates to the field of optical sensing technology, and specifically to a sensing array and biochemical detection system integrating optical cross-waveguides.
背景技术Background technique
生化传感器用于测定特定的化学或生物物质，由于测定这些化学或生物物质在环境监测、疾病监控以及药物研发中具有重要意义，所以对生化传感器的研究已经显得非常重要。在医疗和工业控制等领域，通常需要同时监测多个环境变量的参数，比如在采矿工程中，甲烷气体的浓度、环境的压强、温度和湿度信息等都是至关重要的；在临床医学中，需要同时检测多种生物分子。Biochemical sensors are used to measure specific chemical or biological substances. Since the measurement of these chemical or biological substances is of great significance in environmental monitoring, disease monitoring, and drug development, the research on biochemical sensors has become very important. In fields such as medical and industrial control, it is usually necessary to monitor the parameters of multiple environmental variables simultaneously. For example, in mining engineering, the concentration of methane gas, environmental pressure, temperature and humidity information are all crucial; in clinical medicine , it is necessary to detect multiple biomolecules simultaneously.
为了能够在单片集成芯片中同时、实时的检测不同浓度的同一物质，或者能够检测出不同的物质或参量，在提高单个生化传感器性能的基础上，基于谐振的多点多路阵列的传感检测模型开始逐步被研究，提高检测效率和器件集成度，进一步缩小芯片的尺寸。但在实际传感器件制备与测试过程中发现，现有的多点多路阵列谐振传感器模型在实际生化传感应用中存在一些问题，例如，由刻蚀沟道引起的微流体通道与传感单元不能完美地键合与外界隔离，会导致实际应用中独立的传感单元仍有待测物泄露，引起传感单元间或与其它集成器件间的串扰问题。In order to be able to detect the same substance at different concentrations in a single integrated chip simultaneously and in real time, or to detect different substances or parameters, on the basis of improving the performance of a single biochemical sensor, a resonance-based multi-point multi-channel array sensing Detection models began to be gradually studied to improve detection efficiency and device integration, and further reduce the size of the chip. However, during the preparation and testing of actual sensing devices, it was found that the existing multi-point multi-channel array resonant sensor model has some problems in actual biochemical sensing applications, such as the microfluidic channel and sensing unit caused by etching channels. Failure to be perfectly bonded and isolated from the outside world will lead to leakage of the object to be measured in independent sensing units in practical applications, causing crosstalk problems between sensing units or with other integrated devices.
发明内容Contents of the invention
本公开的目的是提供一种集成光交叉波导的传感阵列。It is an object of the present disclosure to provide a sensing array integrating optical cross-waveguides.
本公开第一方面实施例提供一种集成光交叉波导的传感阵列，包括：A first embodiment of the present disclosure provides a sensor array integrating optical cross waveguides, including:
基底；base;
光交叉波导，沿着所述基底表面的长度方向设置，在所述光交叉波导两侧设有侧壁，该侧壁与所述光交叉波导形成多个凹槽；An optical intersection waveguide is arranged along the length direction of the substrate surface, and side walls are provided on both sides of the optical intersection waveguide, and the side walls form a plurality of grooves with the optical intersection waveguide;
传感阵列，所述传感阵列包括多个谐振传感器，所述多个谐振传感器分别位于所述光交叉波导同一侧的所述凹槽中，所述多个谐振传感器与所述光交叉波导侧耦合；Sensing array, the sensing array includes a plurality of resonant sensors, the plurality of resonant sensors are respectively located in the grooves on the same side of the optical intersection waveguide, and the multiple resonant sensors are on the side of the optical intersection waveguide. coupling;
盖板，具有多个微流体通道，设置于所述光交叉波导上，与所述光交叉波导键合，所述多个微流体通道与所述多个谐振传感器一一对应。The cover plate has a plurality of microfluidic channels, which are arranged on the optical intersection waveguide and bonded with the optical intersection waveguide. The plurality of microfluidic channels correspond to the plurality of resonant sensors one by one.
根据本公开的一些实施方式中，所述光交叉波导包括第一光波导和多个第二光波导，所述第一光波导沿水平方向设置，所述多个第二光波导沿垂直方向设置，所述第一光波导和所述多个第二光波导形成多个交叉核心；According to some embodiments of the present disclosure, the optical cross waveguide includes a first optical waveguide and a plurality of second optical waveguides, the first optical waveguide is arranged along a horizontal direction, and the plurality of second optical waveguides are arranged along a vertical direction. , the first optical waveguide and the plurality of second optical waveguides form a plurality of cross cores;
所述多个谐振传感器分别设置于所述第一光波导同一侧的所述凹槽中，所述多个谐振传感器与所述第一光波导侧耦合。The plurality of resonant sensors are respectively disposed in the grooves on the same side of the first optical waveguide, and the plurality of resonant sensors are coupled to the side of the first optical waveguide.
根据本公开的一些实施方式中，所述集成光交叉波导的传感阵列还包括：According to some embodiments of the present disclosure, the sensing array with integrated optical cross waveguide further includes:
探测单元，设置于所述第一光波导的输出端，用于探测输出的光信号。A detection unit is provided at the output end of the first optical waveguide and is used to detect the output optical signal.
根据本公开的一些实施方式中，所述谐振传感器为晶格常数渐变的空气模一维纳米束微腔传感器。According to some embodiments of the present disclosure, the resonant sensor is an air-mode one-dimensional nanobeam microcavity sensor with a gradient lattice constant.
根据本公开的一些实施方式中，所述盖板为PDMS微流板，PDMS微流体通道为多路复用。According to some embodiments of the present disclosure, the cover plate is a PDMS microfluidic plate, and the PDMS microfluidic channel is multiplexed.
根据本公开的一些实施方式中，所述基底包括硅基层及淀积在所述硅基层上的二氧化硅层。According to some embodiments of the present disclosure, the substrate includes a silicon base layer and a silicon dioxide layer deposited on the silicon base layer.
根据本公开的一些实施方式中，所述光交叉波导的制作材料为硅或氮化硅。According to some embodiments of the present disclosure, the optical cross waveguide is made of silicon or silicon nitride.
本公开第二方面实施例提供一种生化检测系统，包括第一方面中所述的集成光交叉波导的传感阵列。An embodiment of the second aspect of the present disclosure provides a biochemical detection system, including the sensor array integrated with optical cross-waveguides described in the first aspect.
本公开与现有技术相比的优点在于：The advantages of this disclosure compared with the prior art are:
本公开提供的集成光交叉波导的传感阵列，集成了低插损的单模光交叉波导，光交叉波导和微流体通道可以完美地键合，解决了待测物质泄漏的问题，实现了传感阵列中单个谐振传感器的物理隔绝，相较于传统的阵列传感器，在不牺牲波导传输效率及结构尺寸的前提下，解决了谐振传感器间或与集成器件间的串扰问题。The sensing array with integrated optical cross waveguide provided by the present disclosure integrates a low insertion loss single-mode optical cross waveguide. The optical cross waveguide and the microfluidic channel can be perfectly bonded, solving the problem of leakage of the substance to be measured and realizing transmission. Compared with traditional array sensors, the physical isolation of a single resonant sensor in the sensing array solves the problem of crosstalk between resonant sensors or between resonant sensors and integrated devices without sacrificing waveguide transmission efficiency and structural size.
附图说明Description of drawings
通过阅读下文优选实施方式的详细描述，各种其他的优点和益处对于本领域普通技术人员将变得清楚明了。附图仅用于示出优选实施方式的目的，而并不认为是对本公开的限制。而且在整个附图中，用相同的参考符号表示相同的部件。在附图中：Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are for the purpose of illustrating preferred embodiments only and are not to be considered limiting of the disclosure. Also throughout the drawings, the same reference characters are used to designate the same components. In the attached picture:
图1示出了一种传统的阵列传感器的立体图；Figure 1 shows a perspective view of a traditional array sensor;
图2示出了图1中传统的阵列传感器的俯视图；Figure 2 shows a top view of the conventional array sensor in Figure 1;
图3示出了图1中阵列传感器与PDMS微流体通道集成的立体图；Figure 3 shows a three-dimensional view of the array sensor integrated with the PDMS microfluidic channel in Figure 1;
图4示出了图3中沿AB线的截面图；Figure 4 shows a cross-sectional view along line AB in Figure 3;
图5示出了本公开所提供的一种集成光交叉波导的传感阵列的立体示意图；Figure 5 shows a three-dimensional schematic diagram of a sensing array integrating optical cross-waveguides provided by the present disclosure;
图6示出了图5中阵列传感器的俯视图；Figure 6 shows a top view of the array sensor in Figure 5;
图7示出了图5中阵列传感器与PDMS微流体通道集成的立体示意图；Figure 7 shows a three-dimensional schematic diagram of the integration of the array sensor and the PDMS microfluidic channel in Figure 5;
图8示出了图7中沿CD线的截面图。FIG. 8 shows a cross-sectional view along line CD in FIG. 7 .
具体实施方式Detailed ways
以下，将参照附图来描述本公开的实施例。但是应该理解，这些描述只是示例性的，而并非要限制本公开的范围。此外，在以下说明中，省略了对公知结构和技术的描述，以避免不必要地混淆本公开的概念。Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. It should be understood, however, that these descriptions are exemplary only and are not intended to limit the scope of the present disclosure. Furthermore, in the following description, descriptions of well-known structures and techniques are omitted to avoid unnecessarily confusing the concepts of the present disclosure.
在附图中示出了根据本公开实施例的各种结构示意图。这些图并非是按比例绘制的，其中为了清楚表达的目的，放大了某些细节，并且可能省略了某些细节。图中所示出的各种区域、层的形状以及它们之间的相对大小、位置关系仅是示例性的，实际中可能由于制造公差或技术限制而有所偏差，并且本领域技术人员根据实际所需可以另外设计具有不同形状、大小、相对位置的区域/层。Various structural schematic diagrams according to embodiments of the present disclosure are shown in the accompanying drawings. The drawings are not drawn to scale, with certain details exaggerated and may have been omitted for purposes of clarity. The shapes of the various regions and layers shown in the figures, as well as the relative sizes and positional relationships between them are only exemplary. In practice, there may be deviations due to manufacturing tolerances or technical limitations, and those skilled in the art will base their judgment on actual situations. Additional regions/layers with different shapes, sizes, and relative positions can be designed as needed.
在本公开的上下文中，当将一层/元件称作位于另一层/元件“上”时，该层/元件可以直接位于该另一层/元件上，或者它们之间可以存在居中层/元件。另外，如果在一种朝向中一层/元件位于另一层/元件“上”，那么当调转朝向时，该层/元件可以位于该另一层/元件“下”。In the context of this disclosure, when a layer/element is referred to as being "on" another layer/element, it can be directly on the other layer/element or intervening layers/elements may be present between them. element. Additionally, if one layer/element is "on" another layer/element in one orientation, then the layer/element can be "under" the other layer/element when the orientation is reversed.
图1示出了一种传统的阵列传感器的立体图；图2示出了图1中传统的阵列传感器的俯视图；图3示出了图1中阵列传感器与PDMS微流体通道集成的立体图；图4示出了图3中沿AB线的截面图。Figure 1 shows a perspective view of a traditional array sensor; Figure 2 shows a top view of the traditional array sensor in Figure 1; Figure 3 shows a perspective view of the array sensor integrated with the PDMS microfluidic channel in Figure 1; Figure 4 A cross-sectional view along line AB in Figure 3 is shown.
如图1至图4所示，传统的阵列传感器包括基板10、光波导20、谐振传感器31至34、侧壁41和42、探测单元50、PDMS微流体通道。现有的串行阵列谐振传感器在实际生化传感应用中存在很多问题。As shown in Figures 1 to 4, a traditional array sensor includes a substrate 10, an optical waveguide 20, resonant sensors 31 to 34, side walls 41 and 42, a detection unit 50, and a PDMS microfluidic channel. Existing serial array resonant sensors have many problems in practical biochemical sensing applications.
目前标准CMOS工艺线最常用的是正性光刻胶PMMA，因此在衬底上的硅层中刻蚀形成光波导20和谐振传感器31至34后，会在光波导20两侧形成一定宽度的刻蚀沟槽，如2微米。如图4所示，PDMS微流体通道与图1所示制作好的结构不能完美地键合，可能会存在如图4所示的空隙，导致实际应用中独立的谐振传感器仍有待测物泄露(如图3中所示的泄露)，引起谐振传感器间或与其它集成器件间的串扰问题。At present, the most commonly used standard CMOS process line is positive photoresist PMMA. Therefore, after the optical waveguide 20 and the resonant sensors 31 to 34 are etched into the silicon layer on the substrate, a certain width of grooves will be formed on both sides of the optical waveguide 20. Etch trenches, such as 2 microns. As shown in Figure 4, the PDMS microfluidic channel and the fabricated structure shown in Figure 1 cannot be perfectly bonded, and there may be gaps as shown in Figure 4, resulting in the leakage of the measured object from the independent resonant sensor in practical applications. (Leakage as shown in Figure 3), causing crosstalk problems between resonant sensors or with other integrated devices.
为了解决上述现有技术中存在的问题，本公开实施例提供一种集成光交叉波导的传感阵列及生化检测系统，下面结合附图进行说明。In order to solve the above-mentioned problems existing in the prior art, embodiments of the present disclosure provide a sensing array and biochemical detection system integrating optical cross-waveguides, which will be described below with reference to the accompanying drawings.
图5示出了本公开所提供的一种集成光交叉波导的传感阵列的立体示意图；图6示出了图5中阵列传感器的俯视图；图7示出了图5中阵列传感器与PDMS微流体通道集成的立体示意图；图8示出了图7中沿CD线的截面图。Figure 5 shows a three-dimensional schematic view of a sensing array with integrated optical cross waveguide provided by the present disclosure; Figure 6 shows a top view of the array sensor in Figure 5; Figure 7 shows the array sensor in Figure 5 and the PDMS micro A three-dimensional schematic diagram of fluid channel integration; Figure 8 shows a cross-sectional view along line CD in Figure 7.
为了清楚地说明本申请，图5中未集成PDMS微流体通道，图7中集成了PDMS微流体通道，如图5至图7所示，本公开提供的集成光交叉波导的传感阵列，包括：基底100、光交叉波导200、传感阵列(310、320、330、340)、以及具有多个微流体通道的盖板600。In order to clearly illustrate the present application, the PDMS microfluidic channel is not integrated in Figure 5, and the PDMS microfluidic channel is integrated in Figure 7. As shown in Figures 5 to 7, the sensing array with integrated optical cross waveguide provided by the present disclosure includes : substrate 100, optical cross waveguide 200, sensing array (310, 320, 330, 340), and cover plate 600 with multiple microfluidic channels.
其中，基底100可以包括硅基层110及淀积在硅基层110上的二氧化硅层120。硅基层110的制作材料具体可以为硅或者氮化硅。The substrate 100 may include a silicon base layer 110 and a silicon dioxide layer 120 deposited on the silicon base layer 110 . The silicon base layer 110 may be made of silicon or silicon nitride.
光交叉波导200沿着基底100表面的长度方向(光入射方向)设置。具体的，光交叉波导200包括第一光波导210和多个第二光波导220，第一光波导210沿水平方向设置，多个第二光波导220沿垂直方向设置，第一光波导210和每个第二光波导220垂直交叉形成一个交叉核心，如图5和图6所示，第一光波导210和多个第二光波导220形成多个级联的交叉核心。本申请优选集成低插损的单模光交叉波导。The optical cross waveguide 200 is provided along the length direction (light incident direction) of the surface of the substrate 100 . Specifically, the optical cross waveguide 200 includes a first optical waveguide 210 and a plurality of second optical waveguides 220. The first optical waveguide 210 is arranged along the horizontal direction, and the plurality of second optical waveguides 220 are arranged along the vertical direction. The first optical waveguide 210 and Each second optical waveguide 220 crosses vertically to form a cross core. As shown in FIGS. 5 and 6 , the first optical waveguide 210 and the plurality of second optical waveguides 220 form a plurality of cascaded cross cores. This application preferably integrates a low insertion loss single-mode optical cross waveguide.
根据本公开的一些实施方式中，光交叉波导200的制作材料可以为硅或氮化硅，当然也可以是其它材料，本申请对此不做限定。According to some embodiments of the present disclosure, the optical cross waveguide 200 may be made of silicon or silicon nitride, or of course other materials, which is not limited in this application.
在光交叉波导200两侧设有侧壁410和420，侧壁的制作材料可以是硅，如图5所示，侧壁410和420与光交叉波导200形成多个相互之间物理隔绝的凹槽；该凹槽后续用于设置谐振传感器，该谐振传感器是一种谐振腔。根据本公开的一些实施方式中，谐振传感器为晶格常数渐变的空气模一维纳米束微腔传感器，提高灵敏度，与所述光交叉波导的耦合方式可采用圆弧型点耦合，提高耦合效率。Side walls 410 and 420 are provided on both sides of the optical intersection waveguide 200. The side walls may be made of silicon. As shown in FIG. 5, the side walls 410 and 420 and the optical intersection waveguide 200 form a plurality of concavities that are physically isolated from each other. groove; this groove is subsequently used to set the resonant sensor, which is a resonant cavity. According to some embodiments of the present disclosure, the resonant sensor is an air-mode one-dimensional nanobeam microcavity sensor with a gradient lattice constant to improve sensitivity. The coupling mode with the optical cross waveguide can adopt arc-type point coupling to improve coupling efficiency. .
具体的，传感阵列包括多个谐振传感器，如图5中所示的310、320、330、340，多个谐振传感器分别设置于光交叉波导同一侧的凹槽中，多个谐振传感器与光交叉波导侧耦合；具体的，如图6所示，多个谐振传感器(310、320、330、340)分别位于第一光波导210同一侧的凹槽中，多个谐振传感器与第一光波导210侧耦合。Specifically, the sensing array includes multiple resonant sensors, such as 310, 320, 330, and 340 as shown in Figure 5. The multiple resonant sensors are respectively arranged in grooves on the same side of the optical cross waveguide. The multiple resonant sensors are connected to the optical Cross waveguide side coupling; specifically, as shown in Figure 6, multiple resonant sensors (310, 320, 330, 340) are respectively located in grooves on the same side of the first optical waveguide 210, and the multiple resonant sensors are connected to the first optical waveguide. 210 side coupling.
应理解，当谐振传感器的边缘与其他器件(例如直波导)在空间内相互靠近，直到两者的间距达到与波长同一数量级(例如微米量级)或者更小(例如纳米量级)，两者中的光场发生相互作用，我们称之为耦合。It should be understood that when the edge of the resonant sensor and other devices (such as straight waveguides) are close to each other in space until the distance between them reaches the same order of magnitude as the wavelength (such as micron order) or smaller (such as nanometer order), both The light fields in the light fields interact, which we call coupling.
根据本公开的一些实施方式中，如图5所示，该集成光交叉波导的传感阵列还包括：探测单元500，设置于第一光波导210的输出端，用于探测输出的光信号。According to some embodiments of the present disclosure, as shown in FIG. 5 , the integrated optical cross waveguide sensing array further includes: a detection unit 500 disposed at the output end of the first optical waveguide 210 for detecting the output optical signal.
盖板600具有多个微流体通道，设置于光交叉波导200上，与光交叉波导200键合，具体为多个微流体通道与多个谐振传感器一一对应设置，微流体通道用于通入待测物或者说待测溶液。具体的，如图8所示，本申请中由于集成的是光交叉波导，使得微流体通道的侧壁可以和410、220、420完美地键合，不会产生如图4所示的空隙，真正实现了谐振传感器间的物理隔离。The cover plate 600 has a plurality of microfluidic channels, which are arranged on the optical cross waveguide 200 and bonded with the optical cross waveguide 200. Specifically, the multiple microfluidic channels are arranged in one-to-one correspondence with the plurality of resonant sensors. The microfluidic channels are used for access. The substance to be tested or the solution to be tested. Specifically, as shown in Figure 8, since the optical cross waveguide is integrated in this application, the side walls of the microfluidic channel can be perfectly bonded to 410, 220, and 420 without creating gaps as shown in Figure 4. Really achieve physical isolation between resonant sensors.
由信号源产生的光信号导入第一光波导210，经第一光波导210传输耦合到谐振传感器，谐振传感器的反射信号导入探测单元600，当微流体通道内溶液浓度发生变化时，也就是当感知区域内折射率发生变化时，谐振腔的谐振频率也随之发生偏移，通过测量和分析反射谱中谐振波长峰值的偏移变化，来得到相应的溶液浓度。The optical signal generated by the signal source is introduced into the first optical waveguide 210, and is coupled to the resonant sensor through the first optical waveguide 210. The reflected signal of the resonant sensor is introduced into the detection unit 600. When the solution concentration in the microfluidic channel changes, that is, when When the refractive index changes in the sensing area, the resonant frequency of the resonant cavity also shifts. By measuring and analyzing the shift of the resonance wavelength peak in the reflection spectrum, the corresponding solution concentration is obtained.
上述光信号可以为TM模式和TE模式的光束。其中，模式是特定形状的波导能够支持的一种电磁场分布，数学上讲是此结构的麦克斯韦方程的一个导模解，对应一个特征值，即有效折射率。有效折射率是波导中的一个重要参数，它与波导的结构、材料特性(折射率)、工作波长以及模式阶数有关。一旦波导的这些参数特性确定之后，波导的某个模式的有效折射率也将确定。The above-mentioned optical signals may be light beams in TM mode and TE mode. Among them, the mode is an electromagnetic field distribution that a waveguide of a specific shape can support. Mathematically speaking, it is a guided mode solution of Maxwell's equations for this structure, corresponding to an eigenvalue, that is, the effective refractive index. The effective refractive index is an important parameter in waveguides, which is related to the structure of the waveguide, material properties (refractive index), operating wavelength and mode order. Once these parametric characteristics of the waveguide are determined, the effective refractive index of a certain mode of the waveguide will also be determined.
根据本公开的一些实施方式中，盖板600可以为PDMS微流板，与PDMS微流体通道集成，PDMS微流体通道为多路复用，本申请的集成光交叉波导的传感阵列可以用于多路生化传感检测。According to some embodiments of the present disclosure, the cover plate 600 can be a PDMS microfluidic plate, integrated with a PDMS microfluidic channel, and the PDMS microfluidic channel is multiplexed. The sensor array integrated with optical cross waveguides of the present application can be used for Multiplexed biochemical sensing detection.
PDMS又称为聚二甲基硅氧烷，是广泛应用于微流体芯片的加工和原型制造的一种有机高分子聚合物(含碳和硅的结构)。为了制造微流体器件，PDMS与交联剂混合(液体)后倒入微结构化模具中并加热以获得模具的弹性复制品(PDMS交联)。PDMS, also known as polydimethylsiloxane, is an organic polymer (containing carbon and silicon structure) widely used in the processing and prototype manufacturing of microfluidic chips. To fabricate microfluidic devices, PDMS is mixed with a cross-linking agent (liquid), poured into a microstructured mold and heated to obtain an elastic replica of the mold (PDMS cross-linking).
上述集成光交叉波导的传感阵列思路适用于任何基于正性光刻胶制备的波导型传感器模型，器件材料可以是硅、氮化硅聚合物等。The above-mentioned integrated optical cross waveguide sensing array idea is applicable to any waveguide sensor model based on positive photoresist. The device material can be silicon, silicon nitride polymer, etc.
本公开与现有技术相比的优点在于：The advantages of this disclosure compared with the prior art are:
本公开提供的集成光交叉波导的传感阵列，集成了低插损的单模光交叉波导，光交叉波导和微流体通道可以完美地键合，实现了传感阵列中单个谐振传感器的物理隔绝，相较于传统的阵列传感器，在不牺牲波导传输效率及结构尺寸的前提下，解决了由于待测物质泄漏引起的谐振传感器间或与集成器件间的串扰问题。The sensing array with integrated optical cross waveguide provided by the present disclosure integrates a low insertion loss single-mode optical cross waveguide. The optical cross waveguide and the microfluidic channel can be perfectly bonded to achieve physical isolation of a single resonant sensor in the sensing array. , compared with traditional array sensors, without sacrificing waveguide transmission efficiency and structural size, it solves the crosstalk problem between resonant sensors or between integrated devices due to leakage of the substance to be measured.
本公开还提供了一种生化检测系统，该生化检测系统包括上述实施例中的集成光交叉波导的传感阵列。The present disclosure also provides a biochemical detection system, which includes the sensing array with integrated optical cross waveguide in the above embodiment.
如图5至图7所示，本公开提供的集成光交叉波导的传感阵列，包括：基底100、光交叉波导200、传感阵列(310、320、330、340)、以及具有多个微流体通道的盖板600。As shown in Figures 5 to 7, the sensor array with integrated optical cross waveguide provided by the present disclosure includes: a substrate 100, an optical cross waveguide 200, a sensor array (310, 320, 330, 340), and a sensor array with multiple micro Cover plate 600 for the fluid channel.
其中，基底100可以包括硅基层110及淀积在硅基层110上的二氧化硅层120。硅基层110的制作材料具体可以为硅或者氮化硅。The substrate 100 may include a silicon base layer 110 and a silicon dioxide layer 120 deposited on the silicon base layer 110 . The silicon base layer 110 may be made of silicon or silicon nitride.
光交叉波导200沿着基底100表面的长度方向设置。具体的，光交叉波导200包括第一光波导210和多个第二光波导220，第一光波导210沿水平方向设置，多个第二光波导220沿垂直方向设置，第一光波导210和每个第二光波导220垂直交叉形成一个交叉核心，如图5和图6所示，第一光波导210和多个第二光波导220形成多个交叉核心。本申请优选集成低插损的单模光交叉波导。The optical cross waveguide 200 is arranged along the length direction of the surface of the substrate 100 . Specifically, the optical cross waveguide 200 includes a first optical waveguide 210 and a plurality of second optical waveguides 220. The first optical waveguide 210 is arranged along the horizontal direction, and the plurality of second optical waveguides 220 are arranged along the vertical direction. The first optical waveguide 210 and Each second optical waveguide 220 crosses vertically to form a cross core. As shown in FIGS. 5 and 6 , the first optical waveguide 210 and the plurality of second optical waveguides 220 form a plurality of cross cores. This application preferably integrates a low insertion loss single-mode optical cross waveguide.
根据本公开的一些实施方式中，光交叉波导200的制作材料可以为氮化硅，当然也可以是其它材料，本申请对此不做限定。According to some embodiments of the present disclosure, the optical cross waveguide 200 may be made of silicon nitride, or of course other materials, which is not limited in this application.
在光交叉波导200两侧设有侧壁410和420，侧壁的制作材料可以是硅，如图5所示，侧壁410和420与光交叉波导200形成多个相互之间物理隔绝的凹槽；该凹槽后续用于设置谐振传感器，该谐振传感器是一种谐振腔。根据本公开的一些实施方式中，谐振传感器为一维纳米束微腔传感器。Side walls 410 and 420 are provided on both sides of the optical intersection waveguide 200. The side walls may be made of silicon. As shown in FIG. 5, the side walls 410 and 420 and the optical intersection waveguide 200 form a plurality of concavities that are physically isolated from each other. groove; this groove is subsequently used to set the resonant sensor, which is a resonant cavity. In some embodiments according to the present disclosure, the resonant sensor is a one-dimensional nanobeam microcavity sensor.
具体的，传感阵列包括多个谐振传感器，如图5中所示的310、320、330、340，多个谐振传感器分别设置于光交叉波导同一侧的凹槽中，多个谐振传感器与光交叉波导侧耦合；具体的，如图6所示，多个谐振传感器(310、320、330、340)分别设置于第一光波导210同一侧的凹槽中，多个谐振传感器与第一光波导210侧耦合。Specifically, the sensing array includes multiple resonant sensors, such as 310, 320, 330, and 340 as shown in Figure 5. The multiple resonant sensors are respectively arranged in grooves on the same side of the optical cross waveguide. The multiple resonant sensors are connected to the optical Cross waveguide side coupling; specifically, as shown in Figure 6, multiple resonant sensors (310, 320, 330, 340) are respectively arranged in grooves on the same side of the first optical waveguide 210, and the multiple resonant sensors are connected to the first optical waveguide 210. Waveguide 210 side coupling.
根据本公开的一些实施方式中，如图5所示，该集成光交叉波导的传感阵列还包括：探测单元500，设置于第一光波导210的输出端，用于探测输出的光信号。According to some embodiments of the present disclosure, as shown in FIG. 5 , the integrated optical cross waveguide sensing array further includes: a detection unit 500 disposed at the output end of the first optical waveguide 210 for detecting the output optical signal.
盖板600具有多个微流体通道，设置于光交叉波导200上，与光交叉波导200键合，具体为多个微流体通道与多个谐振传感器一一对应设置，微流体通道用于通入待测物或者说待测溶液。具体的，如图8所示，本申请中由于集成的是光交叉波导，使得微流体通道的侧壁可以和410、220、420完美地键合，不会产生如图4所示的空隙，真正实现了谐振传感器间的物理隔离。The cover plate 600 has a plurality of microfluidic channels, which are arranged on the optical cross waveguide 200 and bonded with the optical cross waveguide 200. Specifically, the multiple microfluidic channels are arranged in one-to-one correspondence with the plurality of resonant sensors. The microfluidic channels are used for access. The substance to be tested or the solution to be tested. Specifically, as shown in Figure 8, since the optical cross waveguide is integrated in this application, the side walls of the microfluidic channel can be perfectly bonded to 410, 220, and 420 without creating gaps as shown in Figure 4. Really achieve physical isolation between resonant sensors.
由信号源产生的光信号导入第一光波导210，经第一光波导210传输耦合到谐振传感器，谐振传感器的反射信号导入探测单元600，当微流体通道内溶液浓度发生变化时，也就是当感知区域内折射率发生变化时，谐振腔的谐振频率也随之发生偏移，通过测量和分析反射谱中谐振波长峰值的偏移变化，来得到相应的溶液浓度。The optical signal generated by the signal source is introduced into the first optical waveguide 210, and is coupled to the resonant sensor through the first optical waveguide 210. The reflected signal of the resonant sensor is introduced into the detection unit 600. When the solution concentration in the microfluidic channel changes, that is, when When the refractive index changes in the sensing area, the resonant frequency of the resonant cavity also shifts. By measuring and analyzing the shift of the resonance wavelength peak in the reflection spectrum, the corresponding solution concentration is obtained.
根据本公开的一些实施方式中，盖板600可以为PDMS微流板，与PDMS微流体通道集成，本申请的集成光交叉波导的传感阵列可以用于多路生化传感检测。According to some embodiments of the present disclosure, the cover plate 600 can be a PDMS microfluidic plate integrated with a PDMS microfluidic channel. The sensing array integrated with optical cross-waveguides of the present application can be used for multi-channel biochemical sensing detection.
本公开与现有技术相比的优点在于：The advantages of this disclosure compared with the prior art are:
本公开提供的生化检测系统，其中集成光交叉波导的传感阵列集成了低插损的单模光交叉波导，光交叉波导和微流体通道可以完美地键合，实现了传感阵列中单个谐振传感器的物理隔绝，相较于传统的阵列传感器，在不牺牲波导传输效率及结构尺寸的前提下，解决了谐振传感器间或与集成器件间的串扰问题。In the biochemical detection system provided by the present disclosure, the sensing array integrating optical cross waveguide integrates a low insertion loss single-mode optical cross waveguide. The optical cross waveguide and the microfluidic channel can be perfectly bonded to achieve a single resonance in the sensing array. Compared with traditional array sensors, the physical isolation of sensors solves the problem of crosstalk between resonant sensors or between integrated devices without sacrificing waveguide transmission efficiency and structural size.
在以上的描述中，对于各层的构图、刻蚀等技术细节并没有做出详细的说明。但是本领域技术人员应当理解，可以通过各种技术手段，来形成所需形状的层、区域等。另外，为了形成同一结构，本领域技术人员还可以设计出与以上描述的方法并不完全相同的方法。另外，尽管在以上分别描述了各实施例，但是这并不意味着各个实施例中的措施不能有利地结合使用。In the above description, there is no detailed explanation of the technical details such as patterning and etching of each layer. However, those skilled in the art should understand that various technical means can be used to form layers, regions, etc. in desired shapes. In addition, in order to form the same structure, those skilled in the art can also design methods that are not exactly the same as those described above. In addition, although each embodiment is described separately above, this does not mean that the measures in the various embodiments cannot be used in combination to advantage.
以上对本公开的实施例进行了描述。但是，这些实施例仅仅是为了说明的目的，而并非为了限制本公开的范围。本公开的范围由所附权利要求及其等价物限定。不脱离本公开的范围，本领域技术人员可以做出多种替代和修改，这些替代和修改都应落在本公开的范围之内。The embodiments of the present disclosure have been described above. However, these examples are for illustrative purposes only and are not intended to limit the scope of the present disclosure. The scope of the disclosure is defined by the appended claims and their equivalents. Without departing from the scope of the present disclosure, those skilled in the art can make various substitutions and modifications, and these substitutions and modifications should all fall within the scope of the present disclosure.
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| CN202110126293.8ACN112945907B (en) | 2021-01-29 | 2021-01-29 | Sensing array integrating optical cross waveguide and biochemical detection system |
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| CN202110126293.8ACN112945907B (en) | 2021-01-29 | 2021-01-29 | Sensing array integrating optical cross waveguide and biochemical detection system |
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