CN112944307A - Steam generating device - Google Patents

Abstract

Translated fromChinese

本发明提供了一种蒸汽发生装置，包括：用于容纳药液的药液储罐；用于容纳具有设定温度的保温介质的介质保温槽；所述药液储罐置于所述介质保温槽内，药液储罐通过接触保温介质使药液维持设定温度；载气供给模块，包括载气源与载气供给管路；载气供给管路包括进气端和出气端，进气端连接载气源，出气端伸入药液中；载气供给模块还包括载气分布单元，其用于使载气分布为气泡，且与药液液面保持设定距离；连接于药液储罐上部的蒸汽输出管路，用于输出携带有药液蒸汽的载气。本发明通过水浴进行恒温控制，避免了直接加热造成的安全隐患，并结合稳定的载气供给，使其所供给的异丙醇蒸汽含量高且组分稳定，以确保异丙醇取干具有稳定的工艺效果。

The present invention provides a steam generating device, comprising: a medicinal liquid storage tank for accommodating medicinal liquid; a medium thermal insulation tank for accommodating a thermal insulation medium with a set temperature; the medicinal liquid storage tank is placed in the medium for thermal insulation In the tank, the chemical liquid storage tank maintains the set temperature of the chemical liquid by contacting the thermal insulation medium; the carrier gas supply module includes a carrier gas source and a carrier gas supply pipeline; the carrier gas supply pipeline includes an air inlet end and an air outlet end, and the air inlet The end is connected to the carrier gas source, and the gas outlet end extends into the liquid medicine; the carrier gas supply module also includes a carrier gas distribution unit, which is used to distribute the carrier gas into bubbles and maintain a set distance from the liquid surface of the liquid medicine; connected to the liquid medicine The steam output pipeline on the upper part of the storage tank is used to output the carrier gas carrying the liquid chemical vapor. The invention performs constant temperature control through a water bath, avoids the potential safety hazard caused by direct heating, and combines with stable carrier gas supply, so that the supplied isopropanol vapor has a high content and stable components, so as to ensure that the isopropanol is stable in dry extraction. process effect.

Description

Steam generating device

Technical Field

The invention relates to the field of semiconductor manufacturing equipment, in particular to a steam generating device.

Background

In a semiconductor process, a wafer needs to be dried after being cleaned to remove moisture adhered to the surface of the wafer. Several drying methods are generally used as follows: spin drying, hot nitrogen drying, slow Isopropanol (IPA) pulling drying and the like. The isopropanol slow pulling drying is more and more widely applied to semiconductor wet processing because of the advantage of no residue and no damage.

The slow-pull drying of the isopropanol achieves the aim of drying a water film of a wafer by utilizing the characteristics of low surface tension and easy volatilization of the isopropanol. When the wafer is dried, the wafer is firstly immersed in deionized water, and the upper part of the water surface is filled with isopropanol vapor. The wafer is slowly transferred into an isopropanol atmosphere from water in a chip slow pulling or water slow discharging mode, a surface tension gradient is formed due to different surface tensions of the isopropanol and deionized water, the isopropanol replaces moisture on the surface of the wafer (Marangoni effect), and then the wafer is dried by hot nitrogen.

Currently, in the prior art, the isopropanol liquid is usually heated directly by electric heating to generate isopropanol vapor, or high temperature nitrogen is used to overflow the isopropanol storage tank to carry part of the isopropanol vapor. The isopropanol vapor generation method relates to a heating link, and the isopropanol belongs to flammable and explosive chemicals, so that potential safety hazards exist when the isopropanol is directly heated. In addition, the existing method has the problem that the concentration and stability of the isopropanol vapor are not easy to control.

Therefore, there is a need for a new steam generator to solve the above problems.

Disclosure of Invention

In view of the above-mentioned drawbacks of the prior art, an object of the present invention is to provide a steam generating apparatus for solving the problems of the prior art that the obtaining of isopropyl alcohol vapor by heating poses a safety hazard and the concentration and stability of isopropyl alcohol vapor are difficult to control.

To achieve the above and other related objects, the present invention provides a steam generating apparatus, comprising:

a liquid medicine tank for containing liquid medicine;

a medium holding tank for holding a holding medium having a set temperature; the liquid medicine storage tank is arranged in the medium heat preservation tank, and the liquid medicine storage tank enables the liquid medicine to maintain the set temperature by contacting the heat preservation medium;

the carrier gas supply module comprises a carrier gas source for providing carrier gas and a carrier gas supply pipeline; the carrier gas supply pipeline comprises an air inlet end and an air outlet end, the air inlet end is connected with the carrier gas source, and the air outlet end extends into the liquid medicine; the carrier gas supply module also comprises a carrier gas distribution unit which is arranged at the gas outlet end of the carrier gas supply pipeline and is used for distributing the carrier gas into bubbles, and the carrier gas distribution unit keeps a set distance from the liquid level of the liquid medicine;

and the steam output pipeline is connected to the upper part of the liquid medicine storage tank and is used for outputting the carrier gas carrying the steam of the liquid medicine.

As an alternative of the present invention, the liquid medicine includes isopropyl alcohol, and the carrier gas includes nitrogen gas.

As an alternative of the present invention, the steam generating device further includes a liquid medicine supply module including a liquid medicine source that supplies the liquid medicine and a liquid medicine supply line that connects the liquid medicine source and the liquid medicine tank.

As an alternative of the present invention, the steam generating device further includes a liquid level monitoring module for monitoring a liquid level position of the liquid medicine.

As an alternative of the present invention, the liquid level monitoring module comprises a liquid level monitoring pipeline and a liquid level sensor; the liquid level monitoring pipeline comprises a liquid receiving end and a gas receiving end, the liquid receiving end is connected with the liquid storage tank, the altitude of the liquid receiving end is lower than the altitude of the liquid level position of the liquid medicine in the liquid storage tank, the altitude of the gas receiving end is higher than the altitude of the liquid level position of the liquid medicine in the liquid storage tank, and the liquid level sensor is used for monitoring the liquid level position of the liquid medicine in the liquid level monitoring pipeline.

As an alternative of the present invention, the medium keeping tank includes a temperature control unit that maintains the temperature of the keeping medium within a set range.

As an alternative of the present invention, the size of the bubbles distributed by the carrier gas through the carrier gas distribution unit is in the order of nanometers, micrometers, or millimeters.

As an alternative of the present invention, the carrier gas distribution unit includes a nano-discoid stone.

As an alternative of the present invention, the carrier gas supply module further includes a float connected to the nano air disk stone, and the float is used for suspending the nano air disk stone in the liquid medicine and keeping the nano air disk stone at a set distance from the liquid level of the liquid medicine.

As an alternative of the present invention, the carrier gas supply module further includes a check valve for maintaining a one-way flow of the carrier gas in the carrier gas supply line and a flow rate control unit for controlling a supply flow rate of the carrier gas.

As described above, the present invention provides a steam generator having the following advantageous effects:

the invention introduces a new steam generating device, constant temperature control is carried out through water bath, potential safety hazard caused by direct heating is avoided, and stable carrier gas supply is combined, so that the content of the supplied isopropanol steam is high, the components are stable, and the stable process effect of drying the isopropanol is ensured.

Drawings

Fig. 1 is a front sectional view of a steam generator provided in a first embodiment of the present invention.

Description of the element reference numerals

101 liquid medicine storage tank

101a liquid medicine

102 medium heat preservation groove

102a thermal insulation medium

103 carrier gas supply line

104 steam output pipeline

105 chemical liquid supply line

106 liquid level monitoring pipeline

107 liquid level sensor

107a first level sensor

107b second liquid level sensor

107c third level sensor

108 nanometer air disk stone

109 float

110 one-way valve

111 flow control unit

112 liquid discharge pipeline

Detailed Description

The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention.

Please refer to fig. 1. It should be noted that the drawings provided in the present embodiment are only for illustrating the basic idea of the present invention in a schematic manner, and the drawings only show the components related to the present invention rather than being drawn according to the number, shape and size of the components in actual implementation, and the form, quantity and proportion of each component in actual implementation may be changed arbitrarily, and the layout form of the components may be more complicated.

Example one

Referring to fig. 1, the present embodiment provides a steam generating apparatus, including:

a chemicalliquid tank 101 for containing achemical liquid 101 a;

amedium holding tank 102 for holding aholding medium 102a having a set temperature; the chemicalliquid storage tank 101 is placed in the medium heat-preservingtank 102, and the chemicalliquid storage tank 101 maintains the set temperature of thechemical liquid 101a by contacting the heat-preservingmedium 102 a;

a carrier gas supply module, which comprises a carrier gas source for providing carrier gas and a carriergas supply pipeline 103; the carriergas supply pipeline 103 comprises an air inlet end and an air outlet end, the air inlet end is connected with the carrier gas source, and the air outlet end extends into theliquid medicine 101 a; the carrier gas supply module further comprises a carrier gas distribution unit which is installed at the gas outlet end of the carriergas supply pipeline 103, is used for distributing the carrier gas into bubbles, and keeps a set distance from the liquid level of theliquid medicine 101 a;

avapor output line 104 connected to an upper portion of thechemical liquid tank 101, for outputting the carrier gas carrying the vapor of thechemical liquid 101 a.

As an example, as shown in fig. 1, is a steam generating device provided in the present embodiment. Wherein, the liquidmedicine storage tank 101 is positioned in the mediumheat preservation tank 102. Thechemical liquid tank 101 contains an appropriate amount of chemical liquid 101 a. In the embodiment, thechemical liquid 101a includes isopropyl alcohol (IPA), and the vapor generation device provides isopropyl alcohol vapor for a wafer drying process after wet etching or cleaning. In other embodiments of the present invention, thechemical solution 101a may be other chemical solutions that need to be converted into steam for the process.

As an example, as shown in fig. 1, themedium keeping tank 102 accommodates therein a keeping medium 102a having a set temperature. Optionally, theincubation medium 102a in themedium incubation groove 102 comprises deionized water. The specific range of the set temperature of the heat-insulatingmedium 102a is not limited in the present invention, and the temperature of the heat-insulatingmedium 102a is used as a process adjustable parameter, so that the temperature of theliquid medicine 101a can be adjusted, and further, the concentration of the liquid medicine component in the generated steam can be controlled. Compared with the existing methods such as electric heating, the method has the advantages that the temperature of the heat-insulatingmedium 102a can be set to be close to the room temperature with lower temperature, the heat transfer process of water bath heat insulation is stable, and potential safety hazards caused by directly heating flammable and explosive chemicals such as isopropanol can be avoided. Alternatively, the liquid level of thethermal insulation medium 102a needs to be higher than the liquid level of thechemical liquid 101a to ensure better thermal insulation effect. In addition, according to the difference of the components, evaporation temperature, and process requirements of thechemical liquid 101a, thethermal insulation medium 102a may be an oil bath or other thermal insulation medium used in a salt bath in addition to the deionized water used in the embodiment of the present invention.

As an example, as shown in fig. 1, the carrier gas supply module includes a carrier gas source for providing a carrier gas and a carriergas supply line 103. In fig. 1, the carrier gas source is not shown, and the carrier gas is introduced into thechemical solution 101a through the carriergas supply line 103. Optionally, the carrier gas comprises nitrogen. In other embodiments of the present invention, the carrier gas may also include an inert gas or other process gases required for the process. The carrier gas is introduced into thechemical solution 101a and overflows from the interior of thechemical solution 101a in a bubble-like manner, so that the vapor component with thechemical solution 101a can be carried under normal temperature conditions, thereby forming a carrier gas flow containing the vapor component of thechemical solution 101 a. For isopropyl alcohol, isopropyl alcohol vapor with stable and controllable components can be formed under normal temperature conditions without heating. As shown in fig. 1, the isopropyl alcohol vapor carried by the carrier gas is output through thevapor output pipe 104 connected to the upper portion of thechemical liquid tank 101, and may be transferred to a receiving device, such as a wafer drying device, not shown, to perform a wafer drying process. Of course, the steam generating device provided by the invention can also be integrated in wet equipment for wafer cleaning and the like, and the connection method of the steam generating device and the equipment can also be adjusted according to actual requirements.

Illustratively, as shown in fig. 1, the vapor generation device further includes a chemical solution supply module including a chemical solution source providing thechemical solution 101a and a chemicalsolution supply line 105 connecting the chemical solution source and thechemical solution tank 101. In fig. 1, the chemical liquid source is not shown, is connected to thechemical liquid tank 101 through the chemicalliquid supply line 105, and is capable of supplying thechemical liquid 101a into thechemical liquid tank 101. Since thechemical liquid 101a is continuously reduced in the process as thevapor output pipe 104 outputs the carrier gas flow containing the isopropyl alcohol vapor, the vapor generation device can continuously supplement the isopropyl alcohol through the chemical liquid supply module to ensure that the process is normally performed. The medicalfluid supply line 105 extends below the surface of themedical fluid 101a to reduce disturbance to the system during the fluid supply process.

As an example, as shown in fig. 1, the steam generating device further includes a liquid level monitoring module for monitoring a liquid level position of themedical liquid 101 a. Optionally, the liquid level monitoring module comprises a liquidlevel monitoring line 106 and aliquid level sensor 107; the liquidlevel monitoring pipeline 106 comprises a liquid receiving end and a gas receiving end which are connected with the liquidmedicine storage tank 101, the altitude of the liquid receiving end is lower than the altitude of the liquid level position of theliquid medicine 101a in the liquidmedicine storage tank 101, the altitude of the gas receiving end is higher than the altitude of the liquid level position of theliquid medicine 101a in the liquidmedicine storage tank 101, and theliquid level sensor 107 is used for monitoring the liquid level position of theliquid medicine 101a in the liquidlevel monitoring pipeline 106.

In the embodiment, as shown in fig. 1, the liquidlevel monitoring line 106 passes through themedium holding tank 102 and is connected to the medicalfluid storage tank 101, most of the liquid level monitoring line is located outside themedium holding tank 102, and the liquid level in the liquidlevel monitoring line 106 is at the same level as the liquid level in the medicalfluid storage tank 101. Through the arrangement, the liquid level position of theliquid medicine 101a in the liquidmedicine storage tank 101 can be visually observed outside the medium heat-preservingtank 102, the liquid medicine supply module is controlled to supplement theliquid medicine 101a in time, and the liquid level of theliquid medicine 101a is prevented from being too low. As shown in fig. 1, in this embodiment, adrain line 112 for draining excess liquid medicine in the liquidmedicine storage tank 101 is further connected to the bottom of themedium incubation tank 102, and a liquid receiving end of the liquidlevel monitoring line 106 is connected to thedrain line 112 and is communicated to the liquidmedicine storage tank 101 through thedrain line 112; the gas receiving end of the liquidlevel monitoring pipeline 106 is connected to thevapor output pipeline 104 and is communicated to the liquidmedicine storage tank 101 through thevapor output pipeline 104. In other embodiments of the present invention, the connection positions of the liquid receiving end and the gas receiving end on the medicalfluid storage tank 101 may be adjusted according to actual conditions.

Optionally, the present embodiment further employs theliquid level sensor 107 to monitor the liquid level position of themedical fluid 101a in the liquidlevel monitoring line 106. In particular, thelevel sensors 107 include afirst level sensor 107a, asecond level sensor 107b, and athird level sensor 107 c. Wherein thefirst level sensor 107a is used to monitor whether the liquid level position exceeds the allowed highest liquid level position, thethird level sensor 107c is used to monitor whether the liquid level position is lower than the allowed lowest liquid level position, and thesecond level sensor 107b is used to monitor whether the liquid level position is at the most suitable set position. It should be noted that fig. 1 only schematically shows the high-low position relationship of the firstliquid level sensor 107a, the secondliquid level sensor 107b and the thirdliquid level sensor 107 c. Due to the influence of the remaining space in thechemical liquid tank 101 on the vapor pressure of the isopropyl alcohol, the present invention also needs to strictly control the liquid level position of the isopropyl alcohol, that is, the firstliquid level sensor 107a, the secondliquid level sensor 107b and the thirdliquid level sensor 107c are located near the set liquid level position and their distances are closer to each other than those shown in fig. 1. When the firstliquid level sensor 107a monitors that the liquid level rises to the position of the liquid level, the liquid medicine supply module stops supplying liquid and can discharge part of theliquid medicine 101 a; when the thirdliquid level sensor 107c detects that the liquid level is lowered to the position of the liquid level, the liquid medicine supply module starts to supply liquid until the liquid level is restored to the position detected by the secondliquid level sensor 107 b. It should be noted that, in this embodiment, theliquid level sensor 107 may be an optical sensor, and the liquidlevel monitoring pipeline 106 is made of a transparent or translucent material at the position monitored by theliquid level sensor 107. In other embodiments of the present invention, the liquid level position may also be monitored by other monitoring means, for example, a magnetic suspension type, a pressure type or an acoustic liquid level sensor, and the related arrangement of theliquid level sensor 107 may also be adjusted according to different types thereof.

As an example, themedium keeping tank 102 includes a temperature control unit that maintains the temperature of the keeping medium 102a within a set range. In this embodiment, the temperature of thechemical liquid 101a is controlled by thethermal insulation medium 102a, and therefore the temperature of thethermal insulation medium 102a is an important parameter for maintaining the stability of steam supply. Optionally, the temperature control unit comprises a heat insulation structure surrounding the mediumheat insulation groove 102 to ensure that the temperature of theheat insulation medium 102a is always maintained within a set temperature range. Further, when the set temperature is higher than the normal temperature, the temperature control unit includes a heating device that heats thethermal insulation medium 102 a; and when the set temperature is lower than the normal temperature, the temperature control unit comprises a refrigerating device for refrigerating theheat preservation medium 102 a.

As an example, as shown in fig. 1, the carrier gas distribution unit includes a nano-air disk stone 108, and an air inlet of the nano-air disk stone 108 is connected to an air outlet end of the carriergas supply pipeline 103 extending into the liquid level. The nanoair disk stone 108 is distributed with high-density holes as air outlets, and can output small-size bubbles in nano grade after input carrier gas such as nitrogen is subjected to low-pressure refining, so that the contact area between the nano air disk stone and liquid medicine such as isopropanol in theliquid medicine 101a is increased, and the content of isopropanol vapor in the carrier gas is increased. For the isopropanol liquid medicine, since the nano air stone is introduced as the carrier gas distribution unit in the embodiment, the requirement of the isopropanol vapor content can be met by introducing the carrier gas such as nitrogen at normal temperature without additionally heating theheat preservation medium 102 a. Of course, besides the nano-scalegas disk stone 108, the invention can also adopt other types of gas distribution devices as the carrier gas distribution unit, and the size of the formed carrier gas bubbles is not limited to the nano-scale, and can be adjusted according to the process requirements, such as the micro-scale or the millimeter-scale.

As an example, as shown in fig. 1, the carrier gas supply module further includes afloat 109 connected to the nanoair disk stone 108, and thefloat 109 is configured to suspend the nanoair disk stone 108 in theliquid medicine 101a and maintain the nanoair disk stone 108 at a predetermined distance d from the liquid surface of theliquid medicine 101 a. In fig. 1, thefloat 109 is indirectly connected to the nano-discoid stone 108 through the carriergas supply line 103, and has a set distance d. This also means that at least a part of the carriergas supply line 103 is movable up and down with respect to thechemical liquid tank 101. In this setting, the nano-air disk stone 108 will always be at the fixed distance d from the liquid level position. The bubbles formed by the carrier gas passing through the nano-air disk stone 108 will always travel a certain distance in theliquid medicine 101a, ensuring that the content of the isopropyl alcohol vapor carried in the carrier gas is stable. Thefloat 109 can also be directly connected with the nanometerair disk stone 108 and control the distance between the nanometer air disk stone and the liquid surface.

As an example, as shown in fig. 1, the carrier gas supply module further includes acheck valve 110 for maintaining a unidirectional flow of the carrier gas in the carriergas supply line 103 and aflow control unit 111 for controlling a supply flow rate of the carrier gas. Thecheck valve 110 is provided in the carriergas supply line 103, and ensures that the carrier gas such as nitrogen gas in the carriergas supply line 103 can flow only in the direction of thechemical liquid 101a from the carrier gas source, and does not flow backward. Theflow control unit 111 can precisely control the flow rate of the carrier gas such as nitrogen supplied from the carrier gas source, and further ensure stable supply of the isopropyl alcohol vapor by maintaining a constant carrier gas flow rate. Optionally, theflow control unit 111 comprises a mass flow Meter (MFC).

In the present embodiment, the introduction of the medium-warming tank 102 capable of providing a constant temperature environment ensures that thechemical liquid 101a in thechemical liquid tank 101 is maintained at a constant temperature during the steam generation. A carrier gas bubble having a set small size is introduced through the carriergas supply line 103 and the nano-air stone 108 to carry the vapor of thechemical liquid 101a having a stable composition. By introducing a flow control unit such as MFC and maintaining the nano-air stones 108 at a certain distance from the liquid surface, a stable and controllable isopropyl alcohol vapor composition is ensured. In addition, by adjusting parameters such as the heat preservation temperature, the carrier gas flow, the distance d between the nanometer air disk stone and the liquid level and the like, the concentration components of the steam such as isopropanol and the like supplied by the steam generating device can be accurately adjusted.

Example two

This embodiment provides a vapor generation device, which is different from the first embodiment in that the vapor generation device includes a plurality of carrier gas distribution units, i.e., a plurality of nano-discoid stones. The nano air disk stones can keep the same determined distance with the liquid level of the liquid medicine, are uniformly distributed in the horizontal plane of the liquid medicine storage tank at the same height and are connected to the same carrier gas supply pipeline. Optionally, the number of the nano-scale qi 'pan stones is six, and the connecting lines of the adjacent individuals form a regular hexagon so as to be uniformly distributed in the horizontal plane where the nano-scale qi' pan stones are located. The number of the nano-gas disk stones can be adjusted according to the size and the shape of the nano-gas disk stones. By arranging the nano air disk stones which are uniformly distributed, the steam generating device provided by the embodiment improves the carrier gas supply capacity, and further improves the steam supply capacity of the liquid medicine.

Other embodiments of this embodiment are the same as the first embodiment, and are not described herein again.

In summary, the present invention provides a steam generating apparatus, comprising: a liquid medicine tank for containing liquid medicine; a medium holding tank for holding a holding medium having a set temperature; the liquid medicine storage tank is arranged in the medium heat preservation tank, and the liquid medicine storage tank enables the liquid medicine to maintain the set temperature by contacting the heat preservation medium; the carrier gas supply module comprises a carrier gas source for providing carrier gas and a carrier gas supply pipeline; the carrier gas supply pipeline comprises an air inlet end and an air outlet end, the air inlet end is connected with the carrier gas source, and the air outlet end extends into the liquid medicine; the carrier gas supply module also comprises a carrier gas distribution unit which is arranged at the gas outlet end of the carrier gas supply pipeline and is used for distributing the carrier gas into bubbles, and the carrier gas distribution unit keeps a set distance from the liquid level of the liquid medicine; and the steam output pipeline is connected to the upper part of the liquid medicine storage tank and is used for outputting the carrier gas carrying the steam of the liquid medicine. The invention carries out constant temperature control through water bath, avoids potential safety hazard caused by direct heating, and combines with stable carrier gas supply to ensure that the vapor content of the isopropanol supplied by the device is high and the components are stable, thereby ensuring that the isopropanol is taken to be dried and has stable process effect.

The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.

Claims (10)

1. A steam generating apparatus, comprising:

a liquid medicine tank for containing liquid medicine;

a medium holding tank for holding a holding medium having a set temperature; the liquid medicine storage tank is arranged in the medium heat preservation tank, and the liquid medicine storage tank enables the liquid medicine to maintain the set temperature by contacting the heat preservation medium;

the carrier gas supply module comprises a carrier gas source for providing carrier gas and a carrier gas supply pipeline; the carrier gas supply pipeline comprises an air inlet end and an air outlet end, the air inlet end is connected with the carrier gas source, and the air outlet end extends into the liquid medicine; the carrier gas supply module also comprises a carrier gas distribution unit which is arranged at the gas outlet end of the carrier gas supply pipeline and is used for distributing the carrier gas into bubbles, and the carrier gas distribution unit keeps a set distance from the liquid level of the liquid medicine;

and the steam output pipeline is connected to the upper part of the liquid medicine storage tank and is used for outputting the carrier gas carrying the steam of the liquid medicine.

2. The vapor generation device of claim 1, wherein the medical fluid comprises isopropyl alcohol and the carrier gas comprises nitrogen.

3. The steam generating device of claim 1, further comprising a medical fluid supply module including a medical fluid source providing the medical fluid and a medical fluid supply line connecting the medical fluid source and the medical fluid reservoir.

4. The steam generating device as claimed in claim 1, further comprising a liquid level monitoring module for monitoring a liquid level position of the liquid medicine.

5. The steam generating device of claim 4, wherein the liquid level monitoring module comprises a liquid level monitoring line and a liquid level sensor; the liquid level monitoring pipeline comprises a liquid receiving end and a gas receiving end, the liquid receiving end is connected with the liquid storage tank, the altitude of the liquid receiving end is lower than the altitude of the liquid level position of the liquid medicine in the liquid storage tank, the altitude of the gas receiving end is higher than the altitude of the liquid level position of the liquid medicine in the liquid storage tank, and the liquid level sensor is used for monitoring the liquid level position of the liquid medicine in the liquid level monitoring pipeline.

6. The steam generating apparatus according to claim 1, wherein the medium keeping tank includes a temperature control unit that maintains the temperature of the keeping medium within a set range.

7. The vapor generation apparatus according to claim 1, wherein the size of the bubbles in which the carrier gas is distributed by the carrier gas distribution unit is in the order of nanometers, micrometers, or millimeters.

8. The vapor generation apparatus of claim 1, wherein the carrier gas distribution unit comprises a nano-discoid stone.

9. The steam generator as recited in claim 8, wherein the carrier gas supply module further comprises a float connected to the nano air disk stone, the float being configured to suspend the nano air disk stone in the liquid medicine and maintain the nano air disk stone at a predetermined distance from a liquid level of the liquid medicine.

10. The vapor generation device according to claim 1, wherein the carrier gas supply module further comprises a check valve for maintaining a unidirectional flow of the carrier gas in the carrier gas supply line and a flow control unit for controlling a supply flow rate of the carrier gas.

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