CN112822351B - Imaging device and imaging method based on DMD and AlGaN-based multi-element ultraviolet detector - Google Patents
Imaging device and imaging method based on DMD and AlGaN-based multi-element ultraviolet detectorDownload PDFInfo
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Abstract
Translated fromChinese
Description
Translated fromChinese技术领域technical field
本发明涉及半导体技术领域，具体涉及一种基于DMD与AlGaN基多元紫外探测器的成像装置及成像方法。The invention relates to the technical field of semiconductors, in particular to an imaging device and an imaging method based on DMD and AlGaN-based multi-element ultraviolet detectors.
背景技术Background technique
紫外成像系统在国防建设及国家重大工程项目等领域都具有非常广阔的应用前景。随着电子战对设备抗干扰、精准定位、精准打击、快速反应等要求的提高，单一的红外探测系统已经越来越难以满足现代国防的需求，紫外成像系统则能够实现高抗干扰性、高灵活性、高响应速度，必将成为国防装备的必然选择。Ultraviolet imaging systems have very broad application prospects in the fields of national defense construction and major national engineering projects. With the improvement of electronic warfare requirements for equipment anti-jamming, precise positioning, precise strike, and rapid response, it has become increasingly difficult for a single infrared detection system to meet the needs of modern national defense. The ultraviolet imaging system can achieve high anti-interference, high Flexibility and high response speed will definitely become the inevitable choice for national defense equipment.
宽禁带AlGaN半导体材料是GaN与AlN的三元合金，具备诸多优异特性，诸如击穿电场高、耐高压、耐高温、抗辐射、热稳定性与化学稳定好等，同时其本征工作波长在365nm到200nm之间连续可调，是制备紫外探测器、特别是日盲紫外探测器的理想材料，被认为是最有望取代Si和紫外光电倍增管的宽禁带半导体探测器。但是，由于同质衬底的缺乏，AlGaN材料通常在蓝宝石等衬底上生长，大的晶格失配和热失配使得AlGaN材料中存在高密度的缺陷，使得AlGaN基紫外探测高分辨率成像存在像元良率低、均匀性差等问题。因此，尽管AlGaN基日盲紫外探测器是理想的紫外探测与成像的选择，但是目前并没有取代光电倍增管等探测器实现在紫外波段探测方面的广泛应用。因此，突破传统的紫外成像模式，是实现紫外成像应用的关键。The wide bandgap AlGaN semiconductor material is a ternary alloy of GaN and AlN. It has many excellent properties, such as high breakdown electric field, high voltage resistance, high temperature resistance, radiation resistance, good thermal stability and chemical stability, etc. At the same time, its intrinsic operating wavelength Continuously adjustable between 365nm and 200nm, it is an ideal material for preparing ultraviolet detectors, especially solar-blind ultraviolet detectors. It is considered to be the most promising wide-bandgap semiconductor detector to replace Si and ultraviolet photomultiplier tubes. However, due to the lack of homogeneous substrates, AlGaN materials are usually grown on substrates such as sapphire, and the large lattice mismatch and thermal mismatch make AlGaN materials have high-density defects, which makes AlGaN-based UV detection high-resolution imaging. There are problems such as low pixel yield and poor uniformity. Therefore, although AlGaN-based solar-blind UV detectors are ideal for UV detection and imaging, they have not been widely used in UV detection by replacing detectors such as photomultiplier tubes. Therefore, breaking through the traditional UV imaging mode is the key to realizing UV imaging applications.
数字微反射镜(DMD)是新兴的光学调制器件，它的表面上集成了成千上万个有规律的排列成阵列的正方形精密微小反射镜片。每个微镜都是铝制平面镜，有较高的反射率。每个微镜单元可以绕其对角线转动至±10°或±12°。DMD有三种状态，开态(+10°或+12°)、关态(－10°或－12°)、和平态(0°)。平态即是未通电的初始状态，处于开态时，微镜转向照明方向，将入射光反射到探测器，处于关态时，将入射光反射至一个暗场，同时限定于图像的黑电平背景。DMD与单管探测器理论上能够成像，并且基于这种方法实现的成像已经在红外成像上得以应用。但是，基于DMD单管探测器成像过程中，成像的像素分辨率与成像时间相互依存，要实现高像素成像，成像速度就会降低。Digital Micromirror (DMD) is an emerging optical modulation device, which integrates thousands of square precision micromirrors regularly arranged in an array on its surface. Each micromirror is an aluminum flat mirror with high reflectivity. Each micromirror unit can be rotated to ±10° or ±12° around its diagonal. DMD has three states, open state (+10° or +12°), closed state (-10° or -12°), and flat state (0°). The flat state is the initial state of no power supply. When it is in the on state, the micromirror turns to the illumination direction and reflects the incident light to the detector. When it is in the off state, it reflects the incident light into a dark field and is limited to the black electric field of the image. flat background. DMD and single-tube detectors can theoretically image, and the imaging based on this method has been applied in infrared imaging. However, in the imaging process based on the DMD single-tube detector, the imaging pixel resolution and imaging time are interdependent, and the imaging speed will be reduced to achieve high-pixel imaging.
因此，急需研究一种能够同时实现DMD探测器成像高分辨率和快速成像的方法，并且实现AlGaN基紫外探测器在紫外探测成像的应用。Therefore, there is an urgent need to study a method that can simultaneously achieve high resolution and fast imaging of DMD detectors, and to realize the application of AlGaN-based UV detectors in UV detection and imaging.
发明内容SUMMARY OF THE INVENTION
本发明的目的在于针对现有技术的上述缺陷，提供一种基于DMD与AlGaN基多元紫外探测器的成像装置及成像方法，利用DMD与多元AlGaN基紫外探测器结合使用实现高分辨率紫外成像，利用DMD成像机理，解决了传统AlGaN面阵高分辨率成像盲元率高的问题，并且利用多元AlGaN探测器，解决了单管高分辨率成像中成像时间长的问题。The purpose of the present invention is to aim at the above-mentioned defects of the prior art, to provide an imaging device and an imaging method based on a DMD and an AlGaN-based multi-element UV detector, and to utilize the DMD and the multi-element AlGaN-based UV detector in combination to achieve high-resolution UV imaging, Using the DMD imaging mechanism, the problem of high blind element rate in traditional AlGaN area array high-resolution imaging is solved, and the multi-element AlGaN detector is used to solve the problem of long imaging time in single-tube high-resolution imaging.
本发明的目的可通过以下的技术措施来实现：The purpose of the present invention can be achieved through the following technical measures:
本发明提供了一种基于DMD与AlGaN基多元紫外探测器的成像装置，包括紫外光学透镜、DMD、DMD控制模块、AlGaN基多元紫外探测器、信号处理模块、数据采集模块、图像重建模块；所述DMD控制模块与所述DMD、所述信号处理模块、所述数据采集模块电性连接，所述数据采集模块还与所述图像重建模块电性连接；The invention provides an imaging device based on DMD and AlGaN-based multi-element ultraviolet detectors, comprising an ultraviolet optical lens, a DMD, a DMD control module, an AlGaN-based multi-element ultraviolet detector, a signal processing module, a data acquisition module, and an image reconstruction module; The DMD control module is electrically connected to the DMD, the signal processing module, and the data acquisition module, and the data acquisition module is also electrically connected to the image reconstruction module;
所述DMD用作空间光调制器，其微反射镜的数量决定了成像图像的分辨率，每个微反射镜都是独立驱动控制的，所述DMD包括若干子DMD；所述AlGaN基多元紫外探测器包括若干光敏面，每个光敏面对应一个子DMD，也对应着场景的一部分，与光敏面的数量一致；子DMD的数量、光敏面的数量、数据采集通道的数量相同；The DMD is used as a spatial light modulator, and the number of its micro-mirrors determines the resolution of the imaging image, and each micro-mirror is independently driven and controlled. The DMD includes several sub-DMDs; the AlGaN-based multi-element ultraviolet The detector includes several photosensitive surfaces, and each photosensitive surface corresponds to a sub-DMD, which also corresponds to a part of the scene, which is consistent with the number of photosensitive surfaces; the number of sub-DMDs, the number of photosensitive surfaces, and the number of data acquisition channels are the same;
所述紫外光学透镜用于对场景辐射光进行准直聚焦，使光线入射到所述DMD上；所述DMD根据加载的掩膜测量矩阵翻转各个子DMD实现光线的确定性调制，所述AlGaN基多元紫外探测器用于探测经所述DMD调制后的光线，并将探测到的光信号转化为电流信号；所述信号处理模块将所述电流信号转换成电压信号放大并通过数据采集模块将信号传输给所述图像重建模块；所述图像重建模块采用算法将获取的测量值组成测量向量，根据不同的算法对测量向量与掩膜测量矩阵进行相应的运算，得到图像；所述DMD控制模块用于存储、加载掩膜测量矩阵，用于控制所述数据采集模块采样，用于控制所述DMD的翻转以及翻转延时时间。The ultraviolet optical lens is used for collimating and focusing the scene radiation light, so that the light is incident on the DMD; the DMD flips each sub-DMD according to the loaded mask measurement matrix to realize the deterministic modulation of the light, and the AlGaN-based The multi-element ultraviolet detector is used to detect the light modulated by the DMD, and convert the detected light signal into a current signal; the signal processing module converts the current signal into a voltage signal, amplifies the signal, and transmits the signal through the data acquisition module to the image reconstruction module; the image reconstruction module adopts an algorithm to form a measurement vector from the acquired measurement values, and performs corresponding operations on the measurement vector and the mask measurement matrix according to different algorithms to obtain an image; the DMD control module is used for The mask measurement matrix is stored and loaded, which is used to control the sampling of the data acquisition module, and is used to control the inversion of the DMD and the inversion delay time.
进一步地，所述DMD的每个微反射镜上均设有一层紫外增透膜，用于提高微反射镜对紫外光的透射度。Further, each micro-reflector of the DMD is provided with a layer of ultraviolet anti-reflection film, which is used to improve the transmittance of the micro-reflector to ultraviolet light.
进一步地，所述图像重建模块采用的算法为关联算法或者压缩传感成像中的正交匹配追踪算法。Further, the algorithm adopted by the image reconstruction module is an association algorithm or an orthogonal matching pursuit algorithm in compressed sensing imaging.
进一步地，所述数据采集模块包括数据采集卡，所述电流信号由跨阻放大器转为电压信号通过所述数据采集卡传输给所述图像重建模块。Further, the data acquisition module includes a data acquisition card, and the current signal is converted into a voltage signal by a transimpedance amplifier and transmitted to the image reconstruction module through the data acquisition card.
进一步地，所述图像重建模块为上机位。Further, the image reconstruction module is an upper camera position.
本发明还提供一种采用如上所述的成像装置进行紫外成像的成像方法，包括以下步骤：The present invention also provides an imaging method for ultraviolet imaging using the above imaging device, comprising the following steps:
步骤S1：所述DMD控制模块控制加载掩膜测量矩阵到所述DMD上，发出翻转触发信号；Step S1: the DMD control module controls to load a mask measurement matrix onto the DMD, and sends a flip trigger signal;
步骤S2：所述DMD接收翻转触发信号，并根据加载的掩膜测量矩阵完成各个子DMD的翻转，锁定状态；Step S2: the DMD receives the flip trigger signal, and completes the flip and lock state of each sub-DMD according to the loaded mask measurement matrix;
步骤S3：所述AlGaN基多元紫外探测器的各个光敏面探测经各个子DMD调制后的光线，并将探测到的子光信号转化为子电流信号；Step S3: each photosensitive surface of the AlGaN-based multi-element UV detector detects the light modulated by each sub-DMD, and converts the detected sub-light signal into a sub-current signal;
步骤S4：所述信号处理模块将各个子电流信号转换成10V以下的电压信号；Step S4: the signal processing module converts each sub-current signal into a voltage signal below 10V;
步骤S5：所述数据采集模块开始采样信号，并将采集到的信号传输给所述图像重建模块，并存储于所述图像重建模块中；Step S5: the data acquisition module starts to sample signals, and transmits the collected signals to the image reconstruction module, and stores them in the image reconstruction module;
步骤S6：重复步骤S1-S5，重复P次即DMD翻转P次，每次所述DMD的翻转状态不同，即每个DMD在每一次翻转中，加载的掩膜测量矩阵是不同的，设子DMD、光敏面的数量均为N×N个，每个子DMD对应探测器的一个光敏面；Step S6: Repeat steps S1-S5, repeating P times, that is, the DMD is flipped P times, and the flip state of the DMD is different each time, that is, the mask measurement matrix loaded by each DMD in each flip is different. The number of DMDs and photosensitive surfaces is N×N, and each sub-DMD corresponds to a photosensitive surface of the detector;
步骤S7：所述图像重建模块对每个测量向量与掩膜测量矩阵进行算法运算，重构出子图形，再按照对应的顺序，重构出整体图像，实现成像。Step S7: The image reconstruction module performs an arithmetic operation on each measurement vector and the mask measurement matrix, reconstructs the sub-graphics, and then reconstructs the overall image according to the corresponding sequence to realize imaging.
进一步地，所述DMD的每个微反射镜上均设有一层紫外增透膜，用于提高微反射镜对紫外光的透射度。Further, each micro-reflector of the DMD is provided with a layer of ultraviolet anti-reflection film, which is used to improve the transmittance of the micro-reflector to ultraviolet light.
进一步地，所述图像重建模块采用的算法为关联算法或者压缩传感成像中的正交匹配追踪算法。Further, the algorithm adopted by the image reconstruction module is an association algorithm or an orthogonal matching pursuit algorithm in compressed sensing imaging.
进一步地，所述数据采集模块包括数据采集卡，所述电流信号转换成电压信号后通过所述数据采集卡传输给所述图像重建模块。Further, the data acquisition module includes a data acquisition card, and the current signal is converted into a voltage signal and transmitted to the image reconstruction module through the data acquisition card.
进一步地，所述图像重建模块为上机位。Further, the image reconstruction module is an upper camera position.
本发明的基于DMD与AlGaN基多元紫外探测器的成像装置及成像方法，利用DMD与多元AlGaN基紫外探测器结合使用实现高分辨率紫外成像，能够实现AlGaN基紫外探测器在紫外探测成像的广泛应用，本发明利用DMD成像机理，解决了传统AlGaN面阵高分辨率成像盲元率高的问题，并且利用多元AlGaN探测器，解决了单管高分辨率成像中成像时间长的问题。The imaging device and imaging method based on DMD and AlGaN-based multi-element ultraviolet detectors of the present invention utilize DMD and multi-element AlGaN-based ultraviolet detectors in combination to realize high-resolution ultraviolet imaging, and can realize a wide range of AlGaN-based ultraviolet detectors in ultraviolet detection and imaging. Application, the present invention utilizes the DMD imaging mechanism to solve the problem of high blind element rate in traditional AlGaN surface array high-resolution imaging, and utilizes multiple AlGaN detectors to solve the problem of long imaging time in single-tube high-resolution imaging.
附图说明Description of drawings
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其它的附图。In order to explain the embodiments of the present invention or the technical solutions in the prior art more clearly, the following briefly introduces the accompanying drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only These are some embodiments of the present invention, and for those of ordinary skill in the art, other drawings can also be obtained from these drawings without creative effort.
图1是本发明的基于DMD与AlGaN基多元紫外探测器的成像原理示意图；Fig. 1 is the imaging principle schematic diagram based on DMD and AlGaN-based multi-element ultraviolet detector of the present invention;
图2是本发明的基于DMD与AlGaN基多元紫外探测器的成像装置的结构框架示意图。FIG. 2 is a schematic structural frame diagram of an imaging device based on DMD and AlGaN-based multi-element ultraviolet detectors of the present invention.
具体实施方式Detailed ways
为了使本发明的目的、技术方案及优点更加清楚明白，下面结合附图和具体实施例对本发明作进一步详细说明。应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不限定本发明。In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to illustrate the present invention, but not to limit the present invention.
为了使本揭示内容的叙述更加详尽与完备，下文针对本发明的实施方式与具体实施例提出了说明性的描述；但这并非实施或运用本发明具体实施例的唯一形式。实施方式中涵盖了多个具体实施例的特征以及用以建构与操作这些具体实施例的方法步骤与其顺序。然而，亦可利用其它具体实施例来达成相同或均等的功能与步骤顺序。In order to make the description of the present disclosure more detailed and complete, the following provides an illustrative description of the embodiments and specific embodiments of the present invention; but this is not the only form of implementing or using the specific embodiments of the present invention. The features of various specific embodiments as well as method steps and sequences for constructing and operating these specific embodiments are encompassed in the detailed description. However, other embodiments may also be utilized to achieve the same or equivalent function and sequence of steps.
传统的基于DMD的单像素成像采用单管的光电探测器，为了实现图像的高分辨率和高速的重构，需要的DMD的阵列尺寸更大，像元数更多，相应的图像数据的存储量猛增，成本增加，重构速度反而变慢。The traditional DMD-based single-pixel imaging uses a single-tube photodetector. In order to achieve high resolution and high-speed reconstruction of the image, the required DMD array size is larger, the number of pixels is larger, and the storage of the corresponding image data is required. As the volume soars, the cost increases, and the reconstruction speed slows down.
本发明提供一种基于DMD与AlGaN基多元紫外探测器的成像装置及成像方法，其成像原理示意图如图1所示，DMD包括N×N(图中为2×2)个子DMD，每个子DMD为一个基本编码单位，每个基本编码单位中有M×M(图中为3×3)个数字微反射镜，每个子DMD对应AlGaN基多元紫外探测器的一个光敏面，每个子DMD上加载的掩膜测量矩阵与相应的光敏面的关联将对应物体的一部分重构图像，最后将所有子图像按照一定的顺序组合起来，完成图像重构。The present invention provides an imaging device and an imaging method based on a DMD and an AlGaN-based multi-element ultraviolet detector. The schematic diagram of the imaging principle is shown in Figure 1. The DMD includes N×N (2×2 in the figure) sub-DMDs, each sub-DMD is a basic coding unit, each basic coding unit has M×M (3×3 in the figure) digital micro-mirrors, each sub-DMD corresponds to a photosensitive surface of the AlGaN-based multi-element UV detector, and each sub-DMD is loaded with The correlation between the mask measurement matrix and the corresponding photosensitive surface will reconstruct the image of a part of the corresponding object, and finally combine all the sub-images in a certain order to complete the image reconstruction.
如图2所示，本发明提供一种基于DMD与AlGaN基多元紫外探测器的成像装置，包括紫外光学透镜、DMD、DMD控制模块、AlGaN基多元紫外探测器、信号处理模块、数据采集模块、图像重建模块；所述DMD控制模块与所述DMD、所述信号处理模块、所述数据采集模块电性连接，所述数据采集模块还与所述图像重建模块电性连接。As shown in FIG. 2 , the present invention provides an imaging device based on DMD and AlGaN-based multi-element ultraviolet detectors, including an ultraviolet optical lens, a DMD, a DMD control module, an AlGaN-based multi-element UV detector, a signal processing module, a data acquisition module, an image reconstruction module; the DMD control module is electrically connected to the DMD, the signal processing module, and the data acquisition module, and the data acquisition module is also electrically connected to the image reconstruction module.
所述DMD用作空间光调制器，其微反射镜的数量决定了成像图像的分辨率，每个微反射镜都是独立驱动控制的，所述DMD包括若干子DMD；所述AlGaN基多元紫外探测器包括若干光敏面，每个光敏面对应一个子DMD，也对应着场景的一部分，与光敏面的数量一致；所述数据采集模块包括数据采集卡；子DMD的数量、光敏面的数量、数据采集通道的数量相同；The DMD is used as a spatial light modulator, and the number of its micro-mirrors determines the resolution of the imaging image, and each micro-mirror is independently driven and controlled. The DMD includes several sub-DMDs; the AlGaN-based multi-element ultraviolet The detector includes a number of photosensitive surfaces, each photosensitive surface corresponds to a sub-DMD, and also corresponds to a part of the scene, which is consistent with the number of photosensitive surfaces; the data acquisition module includes a data acquisition card; the number of sub-DMDs, the number of photosensitive surfaces , the same number of data acquisition channels;
所述紫外光学透镜用于对场景辐射光进行准直聚焦，使光线入射到所述DMD上；所述DMD根据加载的掩膜测量矩阵翻转各个子DMD实现光线的确定性调制，所述AlGaN基多元紫外探测器用于探测经所述DMD调制后的光线，并将探测到的光信号转化为电流信号；所述信号处理模块将所述电流信号转换成电压信号放大并通过数据采集模块将信号传输给所述图像重建模块；所述图像重建模块采用算法将获取的测量值组成测量向量，根据不同的算法对测量向量与掩膜测量矩阵进行相应的运算，得到图像；所述DMD控制模块用于存储、加载掩膜测量矩阵，用于控制A/D采样芯片采样，用于控制所述DMD的翻转以及翻转延时时间。The ultraviolet optical lens is used for collimating and focusing the scene radiation light, so that the light is incident on the DMD; the DMD flips each sub-DMD according to the loaded mask measurement matrix to realize the deterministic modulation of the light, and the AlGaN-based The multi-element ultraviolet detector is used to detect the light modulated by the DMD, and convert the detected light signal into a current signal; the signal processing module converts the current signal into a voltage signal, amplifies the signal, and transmits the signal through the data acquisition module to the image reconstruction module; the image reconstruction module adopts an algorithm to form a measurement vector from the acquired measurement values, and performs corresponding operations on the measurement vector and the mask measurement matrix according to different algorithms to obtain an image; the DMD control module is used for The mask measurement matrix is stored and loaded, used to control the sampling of the A/D sampling chip, and used to control the inversion of the DMD and the inversion delay time.
AlGaN基多元紫外探测器是不具有成像的空间分辨率，需要DMD作为空间光调制器实现光的空间调制，DMD中每个微反射镜(像素)都是可以独立驱动并且控制的，所以可以实现光线的确定性调制，从而可以通过计算DMD出射或者反射的光束得到该光束在物平面的空间分布。而本发明中，由于DMD应用在紫外成像领域，所以，所述DMD的每个微反射镜上均设有一层紫外增透膜，用于提高微反射镜对紫外光的透射度。所述DMD的微反射镜的数量决定了成像图像的分辨率，所述DMD的翻转状态决定了入射到AlGaN基多元紫外探测器光敏面的光强值，所以所述DMD是起到了光强调制的作用。The AlGaN-based multi-element UV detector does not have the spatial resolution of imaging, and requires DMD as a spatial light modulator to realize the spatial modulation of light. Each micro-mirror (pixel) in the DMD can be independently driven and controlled, so it can be realized Deterministic modulation of light, so that the spatial distribution of the light beam in the object plane can be obtained by calculating the light beam emitted or reflected by the DMD. In the present invention, since the DMD is used in the field of ultraviolet imaging, each micro-reflector of the DMD is provided with a layer of ultraviolet anti-reflection film, which is used to improve the transmittance of the micro-reflector to ultraviolet light. The number of micro-mirrors of the DMD determines the resolution of the imaging image, and the inversion state of the DMD determines the light intensity value incident on the photosensitive surface of the AlGaN-based multi-element UV detector, so the DMD plays a role in light intensity regulation. effect.
其中，所述图像重建模块采用的算法为关联算法或者压缩传感成像中的正交匹配追踪算法。所述数据采集模块包括数据采集卡，所述电流信号转换成电压信号放大并通过所述数据采集卡传输给所述图像重建模块。所述图像重建模块可以为上机位，此时掩膜测量矩阵可以通过上机位传输给DMD控制模块。Wherein, the algorithm adopted by the image reconstruction module is an association algorithm or an orthogonal matching pursuit algorithm in compressed sensing imaging. The data acquisition module includes a data acquisition card, and the current signal is converted into a voltage signal for amplification and transmitted to the image reconstruction module through the data acquisition card. The image reconstruction module may be the upper camera position, and the mask measurement matrix may be transmitted to the DMD control module through the upper camera position.
本发明还提供一种采用如上所述的成像装置进行紫外成像的成像方法，包括以下步骤：The present invention also provides an imaging method for ultraviolet imaging using the above imaging device, comprising the following steps:
步骤S1：所述DMD控制模块控制加载掩膜测量矩阵到所述DMD上，发出翻转触发信号；Step S1: the DMD control module controls to load a mask measurement matrix onto the DMD, and sends a flip trigger signal;
步骤S2：所述DMD接收翻转触发信号，并根据加载的掩膜测量矩阵完成各个子DMD的翻转，锁定状态；Step S2: the DMD receives the flip trigger signal, and completes the flip and lock state of each sub-DMD according to the loaded mask measurement matrix;
步骤S3：所述AlGaN基多元紫外探测器的各个光敏面探测经各个子DMD调制后的光线，并将探测到的子光信号转化为子电流信号；Step S3: each photosensitive surface of the AlGaN-based multi-element UV detector detects the light modulated by each sub-DMD, and converts the detected sub-light signal into a sub-current signal;
步骤S4：所述信号处理模块将各个子电流信号转换成10V以下的电压信号；Step S4: the signal processing module converts each sub-current signal into a voltage signal below 10V;
步骤S5：所述数据采集模块开始采样信号，并将采集到的信号传输给所述图像重建模块，并存储于所述图像重建模块中；Step S5: the data acquisition module starts to sample signals, and transmits the collected signals to the image reconstruction module, and stores them in the image reconstruction module;
步骤S6：重复步骤S1-S5，重复P次即DMD翻转P次，每次所述DMD的翻转状态不同，即每个DMD在每一次翻转中，加载的掩膜测量矩阵是不同的，设子DMD、光敏面的数量均为N×N个，每个子DMD对应探测器的一个光敏面；步骤S7：所述图像重建模块对每个测量向量与掩膜测量矩阵进行算法运算，重构出子图形，再按照对应的顺序，重构出整体图像，实现成像。Step S6: Repeat steps S1-S5, repeating P times, that is, the DMD is flipped P times, and the flip state of the DMD is different each time, that is, the mask measurement matrix loaded by each DMD in each flip is different. The number of DMDs and photosensitive surfaces are both N×N, and each sub-DMD corresponds to a photosensitive surface of the detector; Step S7: the image reconstruction module performs an arithmetic operation on each measurement vector and the mask measurement matrix, and reconstructs the sub-DMD. Then, according to the corresponding sequence, the whole image is reconstructed to realize imaging.
具体地，步骤S6中，每个子DMD对应场景的不同部分，而每个子DMD在每一次翻转中，都加载不同的掩膜测量矩阵，每次加载结束后，整个DMD在翻转控制信号的控制下进行全帧翻转，此时，AlGaN基多元紫外探测器的每个光敏面相应的接收到不同的入射光强。Specifically, in step S6, each sub-DMD corresponds to a different part of the scene, and each sub-DMD loads a different mask measurement matrix in each flip. After each loading, the entire DMD is under the control of the flip control signal. A full frame flip is performed. At this time, each photosensitive surface of the AlGaN-based multi-element ultraviolet detector receives different incident light intensities correspondingly.
本发明中采用AlGaN基多元紫外探测器，AlGaN基多元紫外探测器相比其他的紫外探测器灵敏度更高，带宽也更大，能适应DMD的快速翻转以及实现对光强变化的即时响应。并且多元紫外探测器模块大大提高了成像速度，解决了单管高分辨率成像中成像时间长的问题。本发明中的图像重建模块采用的算法可以为关联算法或者压缩传感成像中的正交匹配追踪算法(OMP)。Compared with other UV detectors, the AlGaN-based multi-element UV detector is used, and the AlGaN-based multi-element UV detector has higher sensitivity and wider bandwidth, and can adapt to the rapid turnover of DMD and realize immediate response to light intensity changes. And the multi-element ultraviolet detector module greatly improves the imaging speed, and solves the problem of long imaging time in single-tube high-resolution imaging. The algorithm adopted by the image reconstruction module in the present invention may be a correlation algorithm or an Orthogonal Matching Pursuit (OMP) algorithm in compressed sensing imaging.
本发明的基于DMD与AlGaN基多元紫外探测器的成像装置及成像方法，利用DMD与多元AlGaN基紫外探测器结合使用实现高分辨率紫外成像，能够实现AlGaN基紫外探测器在紫外探测成像的广泛应用，本发明利用DMD成像机理，解决了传统AlGaN面阵高分辨率成像盲元率高的问题，并且利用多元AlGaN探测器，解决了单管高分辨率成像中成像时间长的问题。The imaging device and imaging method based on DMD and AlGaN-based multi-element ultraviolet detectors of the present invention utilize DMD and multi-element AlGaN-based ultraviolet detectors in combination to realize high-resolution ultraviolet imaging, and can realize a wide range of AlGaN-based ultraviolet detectors in ultraviolet detection and imaging. Application, the present invention utilizes the DMD imaging mechanism to solve the problem of high blind element rate in traditional AlGaN surface array high-resolution imaging, and utilizes multiple AlGaN detectors to solve the problem of long imaging time in single-tube high-resolution imaging.
以上所述仅为本发明的较佳实施例而已，并不用以限制本发明，凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等，均应包含在本发明的保护范围之内。The above descriptions are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention shall be included in the protection of the present invention. within the range.
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