CN112776322A - Vacuum electric scanning supersonic jet deposition electron beam additive manufacturing device - Google Patents

Abstract

Translated fromChinese

本发明公开了一种真空电扫超音速喷射沉积电子束增材制造装置，包括成形工作台以及安装于工作台上方的电子束喷射增材装置，所述电子束喷射增材装置包括冷喷头、高能电子束发射器以及电子束控制装置，冷喷头喷射方向可调以使得喷出的粉末粒子束在工作台上基于零部件形状扫描，所述电子束控制装置安装于高能电子束发射器出射口处用于控电子束的发射方向，以使得电子束与冷喷头喷出的粉末粒子束汇聚于一点并使得基体表面和粉末粒子被加热形成熔融状态。本发明的装置通过定向喷射粉末并实时加热烧结形成零部件，无需逐层铺粉烧结，成形效率大大提高；粉末不会造成浪费，降低成形成本，而且成形质量一致性良好，提高成形质量，简化零部件烧结的工序，提高烧结效率。

The invention discloses a vacuum electric sweep supersonic spray deposition electron beam additive manufacturing device, comprising a forming workbench and an electron beam spray additive device installed above the workbench. A high-energy electron beam emitter and an electron beam control device, the spray direction of the cold nozzle can be adjusted so that the sprayed powder particle beam is scanned on the worktable based on the shape of the parts, and the electron beam control device is installed at the exit port of the high-energy electron beam emitter It is used to control the emission direction of the electron beam, so that the electron beam and the powder particle beam ejected from the cold nozzle converge at one point, and the surface of the substrate and the powder particles are heated to form a molten state. The device of the invention forms parts by directional spraying of powder and real-time heating and sintering, without the need for layer-by-layer powder sintering, and the forming efficiency is greatly improved; the powder does not cause waste, reducing the forming cost, and the forming quality is consistent, improving the forming quality and simplifying the process. Parts sintering process, improve sintering efficiency.

Description

Vacuum electric scanning supersonic jet deposition electron beam additive manufacturing device

Technical Field

The invention relates to the technical field of surface spraying, in particular to a vacuum electric scanning supersonic speed spraying deposition electron beam additive manufacturing device.

Background

The vibration material disk device is also called as a 3D printer, before the existing vibration material disk device scans and processes every time, the whole forming workbench is required to be filled with forming powder, then corresponding regions are sintered, parts are formed by spreading powder layer by layer and sintering, the whole forming workbench is required to be spread with the forming powder every time of sintering, the efficiency is extremely low, a large amount of forming powder is wasted, the using amount of the forming powder is large, the using cost of the forming powder is high, in addition, because more uncontrollable factors of the spreading powder exist, the quality consistency of each layer of sintering is poor, typical casting defects easily occur, and the forming effect of parts is influenced.

Therefore, a vacuum electric scanning supersonic jet deposition electron beam additive manufacturing device is needed, powder spreading and sintering are not needed layer by layer, and forming efficiency is greatly improved; the powder can not cause waste, and the manufacturing cost is reduced.

Disclosure of Invention

In view of the above, the invention provides a vacuum electro-swept supersonic jet deposition electron beam additive manufacturing device, which achieves the forming of parts by directionally spraying powder and heating and melting in real time, does not need to spread powder layer by layer for sintering, and greatly improves the forming efficiency; the powder can not cause waste, the forming cost is reduced, the forming quality is good in consistency, and the forming quality is improved.

The invention discloses a vacuum electrically-swept supersonic jet deposition electron beam additive manufacturing device which comprises a forming workbench and an electron beam jet additive manufacturing device arranged above the workbench, wherein the electron beam jet additive manufacturing device comprises a cold spray head, a high-energy electron beam emitter and an electron beam control device, the jet direction of the cold spray head is adjustable so that a jetted powder particle beam can scan on the workbench based on the shape of a part, and the electron beam control device is arranged at the exit of the high-energy electron beam emitter and used for controlling the emitting direction of the electron beam so that the electron beam and the powder particle beam jetted by the cold spray head converge at one point and the powder particles are heated to form a molten state.

Further, the cold spray head comprises a powder feeding device, an electrostatic generating device, a laval nozzle, a nozzle and a deflection coil I which are sequentially arranged, the electrostatic generating device is used for enabling powder particles sent out from the powder feeding device to be charged, high-pressure gas is introduced into the laval nozzle and used for enabling the charged powder particles to be accelerated and enabling the accelerated particles to be sprayed out towards the workbench through the nozzle, and the deflection coil is arranged at the outlet end of the nozzle and used for controlling the spraying direction of charged powder particle beams.

Furthermore, the electron beam control device is a deflection coil II which is arranged at the exit of the high-energy electron beam emitter, and the deflection coil II is used for controlling the electron beam so that the electron beam is converged at one point with the charged particle beam sprayed by the nozzle in real time.

Further, the cold spray head also comprises a heating device which is arranged on the outlet side of the powder feeding device and used for heating the particles.

Further, the cold spray head further comprises an accelerating device, the accelerating device is arranged on the outlet side of the Laval nozzle, and the accelerating device is provided with an accelerating electric field and used for accelerating the charged powder particles and enabling the accelerated particles to be sprayed out towards the workbench through the nozzle.

Furthermore, a first-order magnetic lens used for focusing the charged powder particle beams is arranged at the outlet end of the Laval nozzle, and the accelerating device is arranged at the outlet end side of the first-order magnetic lens.

Furthermore, the nozzle is externally connected with a secondary magnetic lens for focusing the powder particle beams, and the deflection coil I is arranged at the outlet end of the secondary magnetic lens.

Further, the cold spray head further comprises a shell, the powder feeding device is connected to the top of the shell and used for feeding powder into the shell, the nozzle is arranged at the bottom of the shell and is vertically opposite to the outlet end of the powder feeding device, and an air inlet used for introducing high-pressure gas into the Laval nozzle is formed in the shell.

Furthermore, the shell is also provided with an air pumping hole for pumping air so as to form a near vacuum environment in the shell.

Further, the casing inner chamber is separated for last cavity, middle part cavity and lower cavity through the insulation board, the laval spray tube sets up in the middle part cavity and makes and go up cavity and lower cavity intercommunication, it has the powder delivery pipe that is used for guiding the particle flow to send powder device bottom, send the powder pipe to extend to laval spray tube entrance point downwards through last cavity, heating device sets up in last cavity, accelerating device sets up and is used for making laval spray tube spun powder particle beam with higher speed in lower cavity, the nozzle sets up and makes the powder particle beam after accelerating spout through the nozzle in lower cavity bottom, the air inlet communicates in middle part cavity or lower part cavity.

The invention has the beneficial effects that:

the powder particle beam is heated and sintered into a whole after being sprayed by cold, parts are formed by spraying and scanning layer by layer of a cold spray head, solid powder particles can be heated into a molten state at or close to the surface of a base body in the spraying process, the direction of the whole spraying medium is controlled by a magnetic lens and a deflecting magnetic field, the splashing and dispersion phenomena caused by the direct spraying of the liquid medium are prevented, the powder and the base material can be simultaneously heated in work, in the additive manufacturing process, the base material temperature is preferably higher than the powder temperature, the base material is soft and hard, the base material is embedded in the powder bombardment, the base material is tamped and strengthened, in the powder bombardment process, the powder is deeply and densely combined under the action of kinetic energy, and a newly deposited material is fused with the base material under the condition that the total energy is higher than the tissue transformation condition, and the additive manufacturing method has a small heat-affected zone, The structure compactness is good, the reinforcing effect is achieved, and the casting-like defect of melting additive manufacturing is avoided; in addition, the structure is also beneficial to directional scanning, sintering and molding of powder particles, the device forms parts through directional powder spraying and real-time heating and sintering, powder spreading and sintering layer by layer are not needed, and the molding efficiency is greatly improved; the powder cannot be wasted, the forming cost is reduced, each sintering layer has good consistency, the forming quality is improved, the sintering process of parts is simplified, and the sintering efficiency is improved; the high-speed powder bombards the surface of the high-temperature matrix to form tamping and strengthening effects, so that the forming quality and performance are improved;

according to the invention, the sprayed powder is converted into a charged powder particle beam and accelerated by an accelerating electric field, the whole device can accelerate the particles to a preset speed through a small space, the size of the spray gun is reduced, the structural compactness of the spray gun is improved, higher spraying speed and energy can be obtained under the condition of lower spraying air pressure, and the focusing and accurate control of the sprayed powder are realized, so that the spraying operation environment is improved, the spraying sintering efficiency is improved, the accelerating process of the powder particle beam is more constant, the final speed of the powder particle beam is constant, the consistency of layer-by-layer scanning of a sintering layer is better, and the sintering quality is improved; in addition, as the powder particle beams are charged, the adhesion performance of the particles is improved by applying opposite charges to the surface of the workbench, and the movement direction of the powder particle beams is changed by applying acting force to the powder particle beams through an electric field or a magnetic field, so that the spraying direction of the charged powder particle beams is convenient to control;

according to the invention, the critical speed required by particle deposition is reduced by heating the particles, and when the temperature of the powder particles is increased, the critical speed of deposition is reduced, the deposition efficiency is improved, the bonding strength is also increased, and a compact sintered layer is favorably formed; and the direction of the charged powder particle beam can be accurately controlled by matching with the deflection coil so as to control the spraying direction, the structure is simple, and the control on the powder particle beam is simple and accurate.

Drawings

The invention is further described below with reference to the figures and examples.

Fig. 1 is a schematic perspective view of an additive manufacturing apparatus 1;

fig. 2 is a schematic perspective view of an additive manufacturing apparatus 2;

fig. 3 is a schematic perspective view of an electron beam injection additive manufacturing apparatus;

FIG. 4 is a schematic cross-sectional structural view of an electron beam injection additive manufacturing apparatus;

FIG. 5 is a schematic view of a deflection yoke structure (horizontal deflection yoke);

FIG. 6 is a schematic structural diagram of a second embodiment of an electron beam injection additive manufacturing apparatus;

Detailed Description

As shown in the drawings, the vacuum electro-scanning ultrasonic spray deposition electron beam additive manufacturing apparatus in this embodiment includes a forming table 94 and an electron beam spray additive manufacturing apparatus installed above the forming table, the electron beam spray additive manufacturing apparatus includes a cold spray head, a high-energyelectron beam emitter 91, and an electron beam control apparatus, the spray direction of the cold spray head is adjustable so that the sprayed powder particle beam scans on the forming table based on the shape of the component, the electron beam control apparatus is installed at an exit of the high-energy electron beam emitter for controlling the emission direction of the electron beam, so that the electron beam and the powder particle beam sprayed by the cold spray head converge at one point and the powder particles are heated to form a molten state.

As shown in fig. 1 and fig. 2, the worktable and the electron beam injection additive device are both installed in a forminghood 95, wherein the electron beam injection additive device is installed on top of the forming hood, the forming hood is of a closed structure, a near vacuum environment can be set in the forming hood to avoid external interference, one electron beam injection additive device can be set in the forming hood, or as shown in fig. 2, a plurality of electron beam injection additive devices can be set in the forming hood to work simultaneously to further improve the forming efficiency; the worktable 94 may be a lifting type, the powder particle beam sprayed by the cold nozzle scans horizontally layer by layer based on the shape of the part, and the worktable descends by a corresponding height after each layer of scanning, or the worktable may be a fixed type, and the scanning layer by layer from top to bottom is realized by adjusting the spraying directions of the cold nozzle and the high-energy electron beam emitter, and the corresponding worktable form may be selected based on the size of the formed part, which is not specifically described again; the powder particle beams sprayed by the cold spray head are preferably scanned horizontally layer by layer based on the shape of the part, and as shown in fig. 1 to 4, the cold spray head is used for realizing cold spraying, so that the powder can impact the substrate in a completely solid state after being accelerated, and can be subjected to large plastic deformation to deposit on the surface of the substrate to form a bonding layer; the high-energy electron beam emitter is the existing equipment which can be used for emitting high-energy electron beams, wherein the high-energy electron beams are formed by collecting electrons, have high energy density, are accelerated to a high speed under the action of a high-voltage accelerating electric field between a cathode and an anode in an electron gun, and form dense high-speed electron flow after the convergence of the lenses; the electron beam control device is used for controlling the emission direction of the high-energy electron beam, so that the electron beam and the powder beam sprayed by the cold spray head are always converged at a certain point, the structure can heat the powder particles in the powder beam, the powder particles can be heated to form a molten state after being heated, namely the powder particle beam is heated and sintered to form a heat connection state after being sprayed by the cold spray head, parts are formed by layer-by-layer spraying and scanning of the cold spray head, the solid powder particles can be heated to be in the molten state at the surface of a base body or close to the surface of the base body in the spraying process, the direction of the whole spraying medium is favorably controlled, the splashing and divergence phenomena caused by direct spraying of the liquid medium are prevented, the powder and the base material can be simultaneously heated in work, the base material temperature is preferably higher than the powder temperature in the material increase manufacturing process, the base material, the base material is tamped and strengthened, so that the depth and the mass density are combined under the action of kinetic energy in the process of bombarding the base material by powder, and a newly deposited material and the base material form tissue fusion under the condition that the total energy is higher than the tissue transformation condition; in addition, the structure is also beneficial to directional scanning, sintering and molding of powder particles, the device forms parts through directional powder spraying and real-time heating and sintering, powder spreading and sintering layer by layer are not needed, and the molding efficiency is greatly improved; the powder can not cause waste, the forming cost is reduced, the forming quality is good in consistency, the forming quality is improved, the part sintering process is simplified, and the sintering efficiency is improved.

In this embodiment, the cold spray head includes apowder feeding device 10, anelectrostatic generating device 20, alaval nozzle 81, anozzle 40, and a deflection coil i 60, which are sequentially disposed, the electrostatic generating device is configured to charge powder particles sent out from the powder feeding device, a high-pressure gas is introduced into the laval nozzle to accelerate the charged powder particles and eject the accelerated particles toward the workbench through the nozzle, and the deflection coil is disposed at an outlet end of the nozzle to control an ejection direction of a charged particle beam. As shown in fig. 4, the powder feeding device has a cylindrical housing, a powder feeding port is formed in the top of the housing, a powder outlet is formed in the bottom of the housing opposite to the powder feeding port, the electrostatic generating device is installed in an inner cavity of the powder feeding device, the electrostatic generating device mainly generates static electricity, outputs a single polarity, such as positive or negative polarity, and can adjust output voltage, in this embodiment, the electrostatic generating device includes a high-voltage discharge electrode arranged in the inner cavity of the powder feeding device and an insulator arranged below the electrode, a plurality of vertical holes are arranged on the insulator in an array manner, and the electrostatic generating device has an existing structure, which is not specifically described again; the Laval nozzle is matched with high-pressure airflow for use, wherein the high-pressure airflow can be synchronously sent into the nozzle through the powder sending device or can be independently fed into the nozzle, the Laval nozzle is made of an insulating material, the front half part of the Laval nozzle is contracted to a narrow throat from big to small in the middle, the narrow throat is outwards expanded from small to big, and the gas in the nozzle flows into the front half part of the nozzle under high pressure and escapes from the rear half part after passing through the narrow throat. The structure can change the speed of the gas flow due to the change of the spray cross section area, so that the powder particle beam is accelerated to reach sonic speed or supersonic speed; referring to fig. 4 and 5, the deflection yoke is composed of a pair of horizontal coils and a pair of vertical coils, each pair of coils is composed of two windings connected in series or in parallel with each other with the same number of turns and the same shape. When certain currents are respectively supplied to the horizontal coil and the vertical coil, the two pairs of coils respectively generate certain magnetic fields. The horizontal coil generates a pincushion field, the vertical coil generates a barrel-shaped field, and the spraying direction of the charged powder particle beam is controlled by matching the horizontal coil with the barrel-shaped field, so that the powder particle beam realizes horizontal scanning and vertical scanning on the surface of the matrix, and the direction of the charged powder particle beam is accurately controlled to realize controllable scanning and spraying; powder particles are fed in through a powder feeding device, the powder particles form charged powder particles after passing through an electrostatic generating device, the charged powder particles are accelerated through a Laval nozzle to enable the speed of powder particle beams to quickly reach the critical speed of the particles, particularly the speed of sound or supersonic speed, the powder particle beams with the speed of sound or supersonic speed are sprayed out through a nozzle and are melted to form a sintering layer on a workbench, large plastic deformation is facilitated to occur, the sintering layer is deposited on the surface of a base body to form a new sintering layer, the structure converts sprayed powder into charged powder particle beams, acting force is applied to the powder particle beams through a deflection coil to change the moving direction of the powder particle beams, the accurate control of the spraying direction is achieved, and the distribution controllability of the sintering layer is improved; the control structure is simple, the control on the powder particle beams is simple and accurate, the control precision is high, and the scanning speed is high; in addition, since the particle beam is charged, the adhesion property of the particles can be improved by applying an opposite charge to the surface of the stage.

In this embodiment, the electron beam control device is a deflection coil ii 92 installed at the exit of the high-energy electron beam emitter, and the deflection coil ii is used for controlling the electron beam so that the electron beam converges with the charged particle beam ejected from the nozzle at one point in real time. Referring to fig. 4, the deflection yoke i is similar to the deflection yoke i, the deflection yoke i is used for controlling the powder particle scanning, and the deflection yoke ii controls the electron beam to follow the powder particle dynamic scanning, so that the powder particle beam and the electron beam are always converged at one point, preferably at the surface of the worktable or the existing sintering layer.

In this embodiment, the cold spray head further includes aheating device 50 disposed at an outlet side of the powder feeding device for heating the particles. Heating device can set up in powder feeding device department, static electricity generating device or nozzle department, heating device's specific position of setting can be according to actual structure adjustment, heating device can be electric heating device or laser heating device, the preferred electric heating device in this embodiment, electric heating device installs in the position of powder feeding device powder outlet, be used for the heating of particle, reduce the critical speed that particle deposit needs through the heating to the particle, when powder particle temperature risees, realize sedimentary critical speed and reduce, deposition efficiency improves thereupon, bonding strength also increases, do benefit to and form and send the sintering layer.

In this embodiment, the outlet end of the laval nozzle is provided with a primarymagnetic lens 82 for focusing the charged particle beam, and the accelerating device is provided on the outlet end side of the primary magnetic lens. The outlet end of the first-level magnetic lens is connected with the nozzle, the magnetic lens is provided with an axisymmetric magnetic field which can be generated by a solenoid, an electromagnet or a permanent magnet, the magnetic lens can converge the uniform-speed charged powder particle beam, the charged powder particle beam sprayed out of the Laval nozzle is converged by the first-level magnetic lens and enters an accelerating electric field, the precise centralized control of the jet direction of the charged powder particle beam is facilitated, and the improvement of the spray accuracy of the spray gun is facilitated.

In this embodiment, the powder feeding device has apowder feeding pipe 11 at the bottom for guiding the flow of particles, and the heating device is disposed around the powder feeding pipe. Referring to fig. 4, the heating device is a spiral heating resistance wire, and two groups of spiral resistance wires with different diameters are arranged around the inner side and the outer side of the powder feeding pipe, so that the air temperature at the periphery of the powder feeding pipe can be uniformly heated, the temperature of particles can be uniformly increased, and the critical speed required by particle deposition can be reduced.

In this embodiment, the inner cavity at the bottom of thepowder feeding pipe 11 is gradually reduced downwards to form a conical outlet. This configuration facilitates the aggregation of the powder and allows the powder fed into the laval nozzle to form a powder bundle.

In this embodiment, the cold spray head further includes ahousing 70, the powder feeding device is connected to the top of the housing and used for feeding powder into the housing, the nozzle is arranged at the bottom of the housing and vertically faces to the outlet end of the powder feeding device, and the housing is provided with anair inlet 83 for introducing high-pressure gas into the laval nozzle. The air inlet can also be arranged on the powder feeding device, and a powder feeding port on the powder feeding device is also used as the air inlet, wherein the shell is made of insulating materials, the whole shell is of a cylindrical structure, and gas introduced into the air inlet enters the shell and then passes through the Laval nozzle to be used for accelerating the powder particle beams; the shell is divided into an upper cavity and a lower cavity, the heating device is arranged in the upper cavity, the Laval nozzle is arranged in the lower cavity, and thepowder feeding pipe 11 extends to the air inlet end of the Laval nozzle through the upper cavity;

referring to fig. 6, fig. 6 shows another embodiment of the cold spray head, the cold spray head in fig. 6 is different from that in fig. 4 in that an accelerating device and a secondary magnetic lens and an air suction port are additionally provided in fig. 6, and in addition, the housing of the cold spray head in fig. 6 is different from that in fig. 4;

referring to fig. 6, in the present embodiment, the cold spray head further includes an acceleratingdevice 30 disposed at an outlet side of the laval nozzle, and the accelerating device has an accelerating electric field for accelerating the charged powder particles and ejecting the accelerated particles toward the work table through the nozzle. The accelerating electric field is a uniform electric field which increases the speed of the charged powder particles after being injected, the direction of the electric field is the same as the direction of the speed of the positively charged particles and is opposite to the direction of the speed of the negatively charged particles, and the accelerating device can be provided with a one-stage accelerating electric field or a multi-stage accelerating electric field, which is not described in detail; in the embodiment, the positive electrode and the negative electrode of the accelerating electric field are vertically opposite, through holes for powder particle beams to pass through are formed in the positive electrode and the negative electrode, the through holes are positioned right below the powder outlet of the powder feeding device, and the corresponding nozzles are opposite to the through holes in the positive electrode and the negative electrode; the initial speed of a powder particle beam entering an accelerating device is improved through the arrangement of a Laval nozzle, the charged powder particle beam is accelerated through the accelerating device to enable the speed of the powder particle beam to quickly reach the critical speed of the particle, particularly to supersonic speed or hypersonic speed, the supersonic powder particle beam is sprayed out through a nozzle to impact the surface of a base body, large plastic deformation is generated to deposit on the surface of the base body to form a compact sintering layer, the structure converts sprayed powder into the charged powder particle beam and accelerates the charged powder particle beam through an accelerating electric field, the whole device can accelerate the particle to a preset speed through a small space, the size of a spray gun is favorably reduced, the structural compactness of the spray gun is improved, the accelerating process of the powder particle beam is constant, the final speed of the powder particle beam is constant, the consistency of the sintering layer sprayed on the surface of the base; the final speed of the powder particle beams is improved through the multistage acceleration of the Laval nozzle and the accelerating device, and higher spraying speed and energy can be obtained under the condition of lower spraying air pressure, so that the particle deposition efficiency and the bonding strength are improved.

In this embodiment, the nozzle is externally connected with a secondarymagnetic lens 85 for focusing the powder particle beam, and the deflection coil i is mounted at an outlet end of the secondary magnetic lens. Referring to fig. 6, the nozzle is an opening formed at the bottom of thehousing 70, and the outlet end of the nozzle is connected to a secondarymagnetic lens 85, so that the powder particle beam accelerated by the electric field is converged again, and the powder particle beam is converged at one point precisely, thereby facilitating the control of the direction of the deflection coil.

In this embodiment, the housing further has apumping hole 84 for pumping out gas to form a near vacuum environment inside the housing. The near vacuum environment is an approximately vacuum environment with a certain vacuum degree, gas introduced from the gas inlet of the near vacuum environment is accelerated by the aid of the Laval nozzle to assist the powder particle beams, wherein the air exhaust flow of the air exhaust opening is larger than the air intake flow of the gas inlet, the air exhaust opening can be arranged on the outlet side of the Laval nozzle and used for exhausting air flow sprayed out from the Laval nozzle, and the arrangement of the air exhaust opening can also provide the near vacuum environment for the accelerating device, so that the interference of the outside on the powder particle beams is reduced in the electric field accelerating process.

In this embodiment, the casing inner chamber is separated forupper chamber 71,middle part cavity 72 andlower cavity 73 through the insulation board, the laval nozzle sets up in the middle part cavity and makes upper chamber and lower cavity intercommunication, send the powder pipe to extend to laval nozzle entrance point downwards through the upper chamber, heating device sets up in the upper chamber, accelerating device sets up and is used for making laval nozzle spun powder particle beam with higher speed in the lower cavity, the nozzle sets up and makes the powder particle beam after accelerating spout through the nozzle blowout in the lower cavity bottom,air inlet 83 communicates in middle part cavity or lower cavity. The shell can be an integrated cylindrical shell, an insulating plate is arranged in the shell to divide the internal space into a plurality of spaces, the shell in the embodiment is formed by axially splicing two split cylindrical shells, wherein the shell positioned below is divided into a middle cavity and a lower cavity through the insulating plate, the inner cavity of the shell positioned above is an upper cavity, the structure divides the interior of the shell into a plurality of functional areas through a plurality of cavities, each functional area is beneficial to independent installation of corresponding parts, functions of each area do not interfere with each other, and the stability and reliability of the spray gun are improved; the structure can heat the high-pressure gas introduced into the upper chamber through the heating device, improve the kinetic energy of the gas flow, and heat the powder particles by means of the gas, so that the effective heating of the powder particles is ensured and the overheating of the powder particles is also prevented; as shown in fig. 6, the gas introduced into the air inlet directly flows out through the laval nozzle and flows out through the air exhaust port, wherein the air exhaust flow of the air exhaust port should be greater than the air intake flow of the air inlet, wherein the air exhaust port is externally connected with a water ring vacuum pump, and the air inlet is externally connected with a compressor, so that a vacuum environment is formed in the casing.

Finally, the above embodiments are only for illustrating the technical solutions of the present invention and not for limiting, although the present invention has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications or equivalent substitutions may be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and all of them should be covered in the claims of the present invention.

Claims (10)

Translated fromChinese

1.一种真空电扫超音速喷射沉积电子束增材制造装置，其特征在于：包括成形工作台以及安装于工作台上方的电子束喷射增材装置，所述电子束喷射增材装置包括冷喷头、高能电子束发射器以及电子束控制装置，冷喷头喷射方向可调以使得喷出的粉末粒子束在工作台上基于零部件形状扫描，所述电子束控制装置安装于高能电子束发射器出射口处用于控电子束的发射方向，以使得电子束与冷喷头喷出的粉末粒子束汇聚于一点并使得粉末粒子被加热形成熔融状态。1. A vacuum electric sweep supersonic jet deposition electron beam additive manufacturing device is characterized in that: comprising a forming table and an electron beam spray additive device installed above the table, and the electron beam spray additive device includes a cooling device. A spray head, a high-energy electron beam emitter and an electron beam control device, the spray direction of the cold spray head can be adjusted so that the sprayed powder particle beam is scanned on the worktable based on the shape of the part, and the electron beam control device is installed on the high-energy electron beam emitter The exit port is used to control the emission direction of the electron beam, so that the electron beam and the powder particle beam ejected from the cold nozzle converge at one point and the powder particles are heated to form a molten state.2.根据权利要求1所述的真空电扫超音速喷射沉积电子束增材制造装置，其特征在于：所述冷喷头包括顺序设置的送粉装置、静电发生装置、拉瓦尔喷管、喷嘴以及偏转线圈Ⅰ，所述静电发生装置用于使送粉装置中送出的粉末粒子带电，所述拉瓦尔喷管中通入高压气体用于使带电粉末粒子加速并使得加速后的粒子通过喷嘴朝向工作台喷出，所述偏转线圈设置于喷嘴出口端用于控制带电粉末粒子束的喷射方向。2 . The electron beam additive manufacturing device for vacuum electric sweep supersonic jet deposition according to claim 1 , wherein the cold spray head comprises a powder feeding device, a static electricity generating device, a Laval nozzle, a nozzle and a powder feeding device arranged in sequence. Deflection coil I, the electrostatic generating device is used to electrify the powder particles sent from the powder feeding device, and high-pressure gas is introduced into the Laval nozzle to accelerate the charged powder particles and make the accelerated particles pass through the nozzle toward work The deflection coil is arranged at the outlet end of the nozzle to control the spraying direction of the charged powder particle beam.3.根据权利要求2所述的真空电扫超音速喷射沉积电子束增材制造装置，其特征在于：所述电子束控制装置为安装于高能电子束发射器出射口处的偏转线圈Ⅱ，所述偏转线圈Ⅱ用于控制电子束以使得电子束实时与喷嘴喷出的带电粒子束汇聚于一点。3. The electron beam additive manufacturing device for vacuum electric sweep supersonic jet deposition according to claim 2, wherein the electron beam control device is a deflection coil II installed at the exit of the high-energy electron beam emitter, so The deflection yoke II is used to control the electron beam so that the electron beam converges with the charged particle beam ejected from the nozzle in real time.4.根据权利要求2所述的真空电扫超音速喷射沉积电子束增材制造装置，其特征在于：所述冷喷头还包括设置于送粉装置出口侧用于对粒子进行加热的加热装置。4 . The electron beam additive manufacturing device for vacuum electric sweep supersonic jet deposition according to claim 2 , wherein the cold nozzle further comprises a heating device arranged on the outlet side of the powder feeding device for heating the particles. 5 .5.根据权利要求4所述的真空电扫超音速喷射沉积电子束增材制造装置，其特征在于：所述冷喷头还包括加速装置，所述加速装置设置于拉瓦尔喷管出口侧，所述加速装置具有加速电场用于使带电粉末粒子加速并使得加速后的粒子通过喷嘴朝向工作台喷出。5 . The electron beam additive manufacturing device for vacuum electric sweep supersonic jet deposition according to claim 4 , wherein the cold spray head further comprises an acceleration device, and the acceleration device is arranged on the outlet side of the Laval nozzle, so that the The accelerating device has an accelerating electric field for accelerating the charged powder particles and ejecting the accelerated particles toward the worktable through the nozzle.6.根据权利要求5所述的真空电扫超音速喷射沉积电子束增材制造装置，其特征在于：所述拉瓦尔喷管出口端设置有用于使带电粉末粒子束聚焦的一级磁透镜，所述加速装置设置于一级磁透镜出口端侧。6 . The electron beam additive manufacturing device for vacuum electric sweep supersonic jet deposition according to claim 5 , wherein the outlet end of the Laval nozzle is provided with a first-order magnetic lens for focusing the charged powder particle beam, 7 . The acceleration device is arranged on the exit end side of the primary magnetic lens.7.根据权利要求2所述的真空电扫超音速喷射沉积电子束增材制造装置，其特征在于：所述喷嘴外接有使粉末粒子束聚焦的二级磁透镜，所述偏转线圈Ⅰ安装于二级磁透镜出口端。7. The vacuum electric sweep supersonic jet deposition electron beam additive manufacturing device according to claim 2, characterized in that: the nozzle is externally provided with a secondary magnetic lens for focusing the powder particle beam, and the deflection coil I is installed on the The exit end of the secondary magnetic lens.8.根据权利要求6所述的真空电扫超音速喷射沉积电子束增材制造装置，其特征在于：所述冷喷头还包括壳体，所述送粉装置连接于壳体顶部用于将粉末送至壳体内部，所述喷嘴设置于壳体底部并竖向正对送粉装置出口端，所述壳体上设置有用于为拉瓦尔喷管通入高压气体的进气口。8 . The electron beam additive manufacturing device for vacuum electric sweep supersonic jet deposition according to claim 6 , wherein the cold spray head further comprises a shell, and the powder feeding device is connected to the top of the shell for powder When sent to the inside of the casing, the nozzle is arranged at the bottom of the casing and faces the outlet end of the powder feeding device vertically. The casing is provided with an air inlet for introducing high-pressure gas into the Laval nozzle.9.根据权利要求8所述的真空电扫超音速喷射沉积电子束增材制造装置，其特征在于：所述壳体上还开设有用于抽出气体以使壳体内形成近真空环境的抽气口。9 . The electron beam additive manufacturing device for vacuum electric sweep supersonic jet deposition according to claim 8 , wherein the housing is further provided with an air extraction port for extracting gas to form a near-vacuum environment in the housing. 10 .10.根据权利要求8所述的真空电扫超音速喷射沉积电子束增材制造装置，其特征在于：所述壳体内腔通过绝缘板分隔为上腔室、中部腔室和下腔室，所述拉瓦尔喷管设置于中部腔室内并使得上腔室和下腔室连通，所述送粉装置底部具有用于引导粒子流动的送粉管，所述送粉管经上腔室向下延伸至拉瓦尔喷管进口端，所述加热装置设置于上腔室内，所述加速装置设置于下腔室内用于使得拉瓦尔喷管喷出的粉末粒子束加速，所述喷嘴设置于下腔室底部使得加速后的粉末粒子束经过喷嘴喷出，所述进气口连通于中部腔室或下部腔室。10 . The electron beam additive manufacturing device for vacuum electric sweep supersonic jet deposition according to claim 8 , wherein the inner cavity of the casing is divided into an upper chamber, a middle chamber and a lower chamber by an insulating plate, and the The Laval nozzle is arranged in the middle chamber and makes the upper chamber and the lower chamber communicate with each other. The bottom of the powder feeding device has a powder feeding pipe for guiding the flow of particles, and the powder feeding pipe extends downward through the upper chamber. To the inlet end of the Laval nozzle, the heating device is arranged in the upper chamber, the acceleration device is arranged in the lower chamber to accelerate the powder particle beam ejected by the Laval nozzle, and the nozzle is arranged in the lower chamber The bottom allows the accelerated powder particle beam to be ejected through the nozzle, and the air inlet communicates with the middle chamber or the lower chamber.

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