CN112635378A - Wafer transmission system - Google Patents
Wafer transmission systemDownload PDFInfo
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- CN112635378A CN112635378ACN202011573358.5ACN202011573358ACN112635378ACN 112635378 ACN112635378 ACN 112635378ACN 202011573358 ACN202011573358 ACN 202011573358ACN 112635378 ACN112635378 ACN 112635378A
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- 235000012431wafersNutrition0.000claimsabstractdescription61
- 230000001360synchronised effectEffects0.000claimsdescription28
- 230000033001locomotionEffects0.000claimsdescription21
- 230000007306turnoverEffects0.000claimsdescription7
- 238000000034methodMethods0.000claimsdescription5
- 230000008569processEffects0.000claimsdescription4
- 238000006243chemical reactionMethods0.000claimsdescription2
- 230000036544postureEffects0.000description5
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- 230000009286beneficial effectEffects0.000description1
- 238000010586diagramMethods0.000description1
- 238000007599dischargingMethods0.000description1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67715—Changing the direction of the conveying path
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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Abstract
Description
Technical Field
The invention relates to the field of wafer transmission, in particular to a wafer transmission system.
Background
With the continuous improvement of the semiconductor process level, the former and latter process equipment factories put higher and more complex requirements on the semiconductor automatic transmission technology.
At present, the wafer transmission motion in the industry mainly has two types: one is to maintain the wafer posture unchanged and to transmit the wafer at different heights in the horizontal plane between different stations. The other is to change the posture of the wafer and transmit the angle change between different stations.
The improvement of the wafer transmission efficiency in the industry is mainly achieved by increasing the number of end effectors of a Robot, for example, a single-arm SCARA (selective Compliance Assembly Robot arm) Robot is often equipped with more than one end effector, and a double-arm SCARA Robot is often equipped with one end effector on a lower arm and one or more end effectors on an upper arm.
In order to solve the problem of the increase of the wafer transmission range, such as the transmission of the wafer inside the EFEM (semiconductor equipment front end module) above the standard 3Port, a commonly adopted scheme of a Track shaft-matched SCARA single-arm or double-arm robot and a horizontal multi-joint robot with each joint capable of moving independently is adopted.
At present, various types of wafer carrying robots sold in the market at home and abroad, such as robots produced by companies like Brooks, Sankyo, JEL, etc., in the U.S., cannot meet the requirements in the occasions of multi-end-effector transmission, end-effector turnover, large transmission range and no walking shaft.
Disclosure of Invention
The invention aims to provide a wafer transmission system which is provided with two end effectors capable of independently moving, wherein the upper end effector can be overturned, different moving postures can be realized through the cooperative work of driving shaft motors, and then the wafers in the wafer transmission system can be switched between a horizontal placement position and a vertical placement position.
In order to achieve the purpose, the invention adopts the following technical scheme: a wafer transmission system comprises a feeding unit, a correction unit and/or a cache unit, a processing unit and a mechanical arm, wherein wafers in the feeding unit, the correction unit and/or the cache unit are horizontally arranged, and wafers in the processing unit are vertically arranged;
the mechanical arm comprises a body, a large arm, a small arm, an upper end effector and a lower end effector, wherein the fixed end of the large arm is rotatably arranged at one end of the body, the fixed end of the small arm is rotatably arranged at the moving end of the large arm, and the fixed ends of the upper end effector and the lower end effector are superposed up and down and are rotatably arranged at the moving end of the small arm; the moving ends of the upper end effector and the lower end effector are rotatably provided with an upper finger and a lower finger;
the upper finger is driven by the upper end effector to realize linear, rotary and turnover motions so as to drive the wafer to realize horizontal and vertical position conversion in the wafer transmission system; the lower finger is driven by the lower end effector to realize linear and rotary motion.
Further, the lower end effector is connected with the first small arm large belt wheel, and the first small arm large belt wheel is connected with the first small arm small belt wheel through a synchronous belt; the first small arm belt pulley is fixedly connected with a first large arm belt pulley through a first elbow shaft, the first large arm belt pulley and the first large arm belt pulley form a transmission pair through a synchronous belt, and the first large arm belt pulley is fixedly connected to a first driving shaft; the first small arm large belt wheel is positioned at the fixed end of the large arm, the second large arm large belt wheel is positioned at the movable end of the large arm, and the first driving shaft is positioned in the body;
the first drive shaft drives the lower end effector to rotate.
Furthermore, the gear ratio of the small arm large belt wheel I to the small arm small belt wheel I is 2: 1.
Further, the upper end effector is connected with a second small arm large belt wheel, and the second small arm large belt wheel is connected with a second small arm small belt wheel through a synchronous belt; the small arm small belt pulley II is fixedly connected with a large arm small belt pulley II through a toggle shaft II, the large arm large belt pulley II and the large arm small belt pulley II form a transmission pair through a synchronous belt, and the large arm large belt pulley II is fixedly connected to a second driving shaft; the second large arm belt wheel is positioned at the fixed end of the large arm, and the second driving shaft is positioned in the body;
the second drive shaft drives the upper end effector to rotate.
Furthermore, the gear ratio of the small arm large belt wheel II to the small arm small belt wheel II is 2: 1.
Furthermore, the upper finger is fixedly connected with a second bevel gear, the first bevel gear and the second bevel gear form a gear pair, the first bevel gear is fixed on a third small-arm large belt wheel, and the first bevel gear and the third small-arm large belt wheel are provided with concentric shafts; the small arm large belt wheel tee joint is connected with a small arm small belt wheel III through a synchronous belt; the small arm small belt pulley III is fixedly connected with a large arm small belt pulley III through a toggle shaft III, the large arm large belt pulley III and the large arm small belt pulley III form a transmission pair through a synchronous belt, and the large arm large belt pulley III is fixedly connected to a third driving shaft; the small arm large belt wheel III is positioned at the moving end of the small arm, the small arm small belt wheel III is positioned at the fixed end of the small arm, the large arm small belt wheel III and the elbow shaft III are positioned at the moving end of the large arm, the large arm large belt wheel III is positioned at the fixed end of the large arm, and the third driving shaft is positioned in the body;
the third driving shaft drives the upper finger to do overturning motion.
Furthermore, the gear ratio of the small arm large belt wheel III to the small arm small belt wheel III is 2: 1.
Further, the fixed end of the small arm is mounted on a large arm small belt pulley IV, the large arm small belt pulley IV and the large arm large belt pulley IV form a transmission pair through a synchronous belt, wherein the large arm large belt pulley IV is located at the fixed end of the large arm, the large arm large belt pulley IV is fixedly connected with a fourth driving shaft, and the fourth driving shaft is located inside the body; the stiff end fixed connection of big arm is on the fifth drive shaft, and the fifth drive shaft is located inside the body, the big arm of fifth drive shaft drive rotates.
Further, the large arm and the small arm are equal in length.
Further, the calibration unit comprises an aligner for aligning the wafer; the processing unit is used for transmitting the wafers in the wafer transmission system to a subsequent process.
The invention has the following beneficial effects: the wafer transmission system can realize complete wafer transmission of feeding, calibration, caching and discharging; the mechanical arm is provided with two end effectors which can independently move, wherein the upper end effector can linearly move, rotate and turn; the lower end effector can move linearly and rotate; different movement postures can be realized through the cooperative work of each drive shaft motor, and then ensure that the wafer can be placed the position from the level and switch into vertical placing and accomplish in transmission process, and then make the inside transmission process of transmission system and the outside rear end processing procedure seamless connection of transmission system, improve the treatment effeciency of wafer.
Drawings
FIG. 1 is a schematic view of the present invention with the upper and lower fingers separated and the upper finger flipped;
FIG. 2 is a schematic view of the present invention with the upper and lower fingers separated and the upper finger not turned over;
FIG. 3 is a schematic view of the overlapping of the upper and lower fingers of the present invention;
FIG. 4 is a schematic structural diagram of a robot arm according to the present invention;
FIG. 5 is a schematic view of the robot arm of the present invention in an initial state;
FIG. 6 is a schematic view of the internal connection of the robot arm of the present invention;
FIG. 7 is an enlarged view of portion I of FIG. 6;
FIG. 8 is an enlarged view of section II of FIG. 6;
in the figure: 1 an upper end effector; 2 lower end effector; 3, a big arm; 4, a small arm; 5, a body; 6, a small arm and a large belt wheel I; 7, a small arm and a small belt wheel I; 8 small arm big belt wheel II; 9, a small arm and a small belt wheel II; 10 small arm big belt wheel III; 11, a small arm and a small belt wheel III; 12, a first bevel gear; 13, a second bevel gear; 14, a first elbow shaft; 15 an elbow shaft II; 16, an elbow shaft III; 17 a large arm small belt pulley I; 18 large arm and large belt wheel I; 19 large arm small belt pulley II; 20 big arm big belt wheel II; 21 large arm small belt pulley III; 22 big arm big belt wheel III; 23, a large arm and a small belt pulley IV; a 24 big arm big belt wheel IV; 25 driving the first shaft; 26 driving a second shaft; 27 driving a shaft III; 28 driving a shaft IV; driving axis five, 30 upper fingers, 31lower fingers 29; 32 a feeding unit, 33 a correcting unit, 34 a buffer unit, 35 a processing unit and 36 a mechanical arm.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention are described in detail below with reference to the accompanying drawings.
Referring to fig. 1-3, a wafer transfer system according to the present invention includes aloading unit 32, acalibration unit 33 and/or abuffer unit 34, aprocessing unit 35, and arobot 36. The number of the feeding units, the number of the correcting units, the number of the buffer units and the number of the processing units can be multiple, and the feeding units, the correcting units, the buffer units and the processing units are specifically arranged according to specific requirements of a transmission system. The correction unit and the buffer unit can exist at the same time or only one of the correction unit and the buffer unit, and are specifically set according to the specific requirements of the transmission system.
Wherein the loading unit can be considered as a LOADPORT meeting SEMI standards, the calibration unit can be considered as an Aligner (Aligner) for centering or notching (Notch) or flatting (Flat) the wafer, the buffer unit can be considered as a temporary wafer placing station to be cooled, and the processing unit can be considered as a LOADLOCK station for connecting the wafer transmission system and the backend machine station, which requires vertical transfer of the wafer; thus, wafers in the processing units in the transport system need to be placed vertically, and wafers in the remaining units need to be placed horizontally, so that a robot arm is required to turn the wafers from a horizontal position to a vertical position when the wafers are transported in the wafer transport line system. The mechanical arm is provided with two end effectors, wherein the upper end effector has a turning function, the mechanical arm is provided with two single-arm SCARA robots which are equal in arm length and can independently move in joints, and wafers can be taken, placed and conveyed in different angle postures among a plurality of feeding ports and a conveying station through the cooperative work of all joint driving motors.
Referring to fig. 4-8, the robot arm of the present invention includes abody 5, alarge arm 3, asmall arm 4, an upper end effector 1 and alower end effector 2, wherein the fixed end of thelarge arm 3 is rotatably mounted at one end of thebody 5, the fixed end of thesmall arm 4 is rotatably mounted at the moving end of thelarge arm 3, and the fixed ends of the upper end effector 1 and thelower end effector 2 are stacked up and down and rotatably mounted at the moving end of thesmall arm 4; the moving ends of the upper end effector 1 and thelower end effector 2 are rotatably provided with anupper finger 30 and alower finger 31; wherein, the length of the big arm is equal to that of the small arm; the upper finger can realize linear, rotary and turnover motions; the lower finger can realize linear and rotary motion.
In the invention, alower end effector 2 is connected with a small arm large belt wheel I6, a small arm large belt wheel I10 is connected with a small arm small belt wheel I7 through a synchronous belt, and the gear ratio of the small arm large belt wheel I to the small arm small belt wheel I is 2: 1; the small arm small belt wheel I7 is fixedly connected with a large arm small belt wheel I17 through an elbow shaft I14, a large arm large belt wheel I18 and the large arm small belt wheel I17 form a transmission pair through a synchronous belt, and the large arm large belt wheel I18 is fixedly connected to afirst driving shaft 25; the first small armlarge belt wheel 6 is positioned at the moving end of the small arm, the first small armsmall belt wheel 7 is positioned at the fixed end of the small arm, the first large arm small belt wheel 17 and the first elbow shaft are positioned at the moving end of the large arm, the first large arm belt wheel 18 is positioned at the fixed end of the large arm, and thefirst driving shaft 25 is positioned in the body; the first driving shaft drives the lower end effector to rotate through the large arm large belt wheel I, the large arm small belt wheel I, the small arm small belt wheel I and the small arm large belt wheel I, the lower end effector drives the lower finger to rotate, and the rotating motion refers to that the lower end effector fixed at the small arm moving end rotates relative to the small arm moving end.
In the invention, an upper end executor is connected with a small arm large belt wheel II 8, the small arm large belt wheel II 8 is connected with a small arm small belt wheel II 9 through a synchronous belt, and the gear ratio of the small arm large belt wheel II to the small arm small belt wheel II is 2: 1; the small arm small belt pulley II 9 is fixedly connected with a large arm small belt pulley II 19 through a toggle shaft II 15, a large arm large belt pulley II 20 and the large arm small belt pulley II 19 form a transmission pair through a synchronous belt, and the large arm large belt pulley II 20 is fixedly connected to a second driving shaft 26; the second small armlarge belt wheel 8 is positioned at the moving end of the small arm, the second small arm small belt wheel 9 is positioned at the fixed end of the small arm, the second large arm small belt wheel 19 and the second elbow shaft 15 are positioned at the moving end of the large arm, the second large arm belt wheel 19 is positioned at the fixed end of the large arm, and the second driving shaft 26 is positioned in the body; the second driving shaft drives the upper end effector to rotate through the large arm large belt pulley II, the large arm small belt pulley II, the small arm small belt pulley II and the small arm large belt pulley II, the upper end effector drives the upper finger to rotate, and the rotation refers to that the upper end effector fixed at the small arm moving end rotates relative to the small arm moving end.
In the invention, an upper finger is fixedly connected with asecond bevel gear 13, afirst bevel gear 12 and thesecond bevel gear 13 form a gear pair, thefirst bevel gear 12 is fixed on a third small-armlarge belt pulley 10, and thefirst bevel gear 12 and a third small-armlarge belt pulley 22 have concentric shafts; the small arm large belt wheel III 22 is connected with the small arm small belt wheel III 21 through a synchronous belt, and the gear ratio of the small arm large belt wheel III to the small arm small belt wheel III is 2: 1; the small arm small belt wheel III 21 is fixedly connected with the large arm small belt wheel III 21 through an elbow shaft III 16, the large arm large belt wheel III 22 and the large arm small belt wheel III 21 form a transmission pair through a synchronous belt, and the large arm large belt wheel III 22 is fixedly connected to athird driving shaft 27; the small arm large belt wheel III is positioned at the moving end of the small arm, the small arm small belt wheel III is positioned at the fixed end of the small arm, the large arm small belt wheel III and the elbow shaft III are positioned at the moving end of the large arm, the large arm large belt wheel III is positioned at the fixed end of the large arm, and the third driving shaft is positioned in the body; the third driving shaft drives the upper end effector to turn over through a large arm large belt wheel III, a large arm small belt wheel III, a small arm large belt wheel III, a bevel gear I and a bevel gear II. It is worth mentioning that the upper end effector cannot be overturned, and the upper end effector can rotate under the driving of the second driving shaft, but the overturning is directed at an upper finger, and the upper finger is overturned through the first bevel gear and the second bevel gear. Specifically, the axis of the second bevel gear can be fixedly connected with the upper finger, the third driving shaft drives the first bevel gear to rotate through the third large-arm large belt wheel, the third large-arm small belt wheel, the third small-arm small belt wheel and the third small-arm large belt wheel, the bevel gear drives the second bevel gear to rotate, the upper finger is fixed on the axis of the second bevel gear, the second bevel gear rotates to drive the upper finger to turn, and the specific turning angle can be determined according to the driving force of the third driving shaft.
In addition, the fixed end of the small arm is arranged on the large arm small belt pulley four 23, the large arm small belt pulley four 23 and the large arm large belt pulley four 24 form a transmission pair through a synchronous belt, wherein the large arm large belt pulley four 24 is positioned at the fixed end of the large arm, the large arm large belt pulley four 24 is fixedly connected with afourth driving shaft 28, thefourth driving shaft 28 is positioned in the body, and thefourth driving shaft 28 drives the small arm to rotate. The fixed end of the large arm is fixedly connected to afifth driving shaft 29, thefifth driving shaft 28 is positioned in the body, and thefifth driving shaft 29 drives the large arm to rotate.
In the invention, the linear motion of the upper end effector and the lower end effector means that when the fourth driving shaft and the fifth driving shaft are cooperatively driven and other driving shafts are not moved, the upper end effector and the lower end effector are driven to move radially with respect to the rotation axis of the fixed end of the large arm as a center when the large arm and the small arm are cooperatively moved, namely, the linear motion is adopted.
In summary, the moving end of the small arm in the invention comprises a first small armlarge belt wheel 6, a second small armlarge belt wheel 8 and a third small arm large belt wheel 41, wherein the first small armlarge belt wheel 6 is connected with thelower end effector 2, the second small armlarge belt wheel 8 is connected with the upper end effector 1, and the third small armlarge belt wheel 10 is connected with the upper end effector 1;
the fixed end of thesmall arm 4 comprises a small arm small belt wheel I7, a small arm small belt wheel II 9 and a small arm small belt wheel III 11, wherein the small arm small belt wheel I7 is in transmission with the small arm large belt wheel I6 through a synchronous belt; the small arm small belt wheel II 9 is in transmission with the small arm large belt wheel II 8 through a synchronous belt; the small arm small belt wheel III 11 is in transmission with the small arm large belt wheel III 10 through a synchronous belt;
the moving end of the large arm comprises a first large arm small belt wheel 17, a second large arm small belt wheel 19, a third large armsmall belt wheel 21 and a fourth large armsmall belt wheel 23; afirst elbow shaft 14, a second elbow shaft 15 and a third elbow shaft 16; the small arm and small belt wheel I7 is fixedly connected with a large arm and small belt wheel I17 through an elbow shaft I14; the small arm small belt wheel II 9 is fixedly connected with a large arm small belt wheel II 19 through an elbow shaft II 15; the small arm small belt wheel III 11 is fixedly connected with a large arm small belt wheel III 21 through an elbow shaft III 16; the fixed end of the small arm is rotatably arranged on the large arm small belt pulley four 23;
the fixed end of the large arm comprises a large arm large belt wheel I18, a large arm large belt wheel II 20, a large arm large belt wheel III 22 and a large arm large belt wheel IV 24, wherein the large arm large belt wheel I18 and the large arm small belt wheel I17 form a transmission pair through a synchronous belt, the large arm large belt wheel II 20 and the large arm small belt wheel II 19 form a transmission pair through the synchronous belt, the large arm large belt wheel III 22 and the large arm small belt wheel III 21 form the transmission pair through the synchronous belt, and the large arm large belt wheel IV 24 and the large arm small belt wheel IV 23 form the transmission pair through the synchronous belt;
the inside of the main body comprises afirst driving shaft 25, a second driving shaft 26, athird driving shaft 27, afourth driving shaft 28 and afifth driving shaft 29; the first large arm belt pulley 18 is fixedly connected to afirst driving shaft 25, the second largearm belt pulley 20 is fixedly connected to a second driving shaft 26, the third largearm belt pulley 22 is fixedly connected to athird driving shaft 27, the fourth largearm belt pulley 24 is fixedly connected to afourth driving shaft 28, and the fixed end of thelarge arm 4 is fixedly connected to afifth driving shaft 29;
with continued reference to fig. 1-8, the robot arm of the present invention performs the following movements:
when the mechanical arm is in an initial state, the five driving shafts rotate at the same speed and in the same direction, so that the rotation motion of the mechanical arm can be realized; at this time, as shown in fig. 5, theupper finger 30 and thelower finger 31 are overlapped, thelarge arm 3, thesmall arm 4, and theupper finger 30 form a triangle-like shape, and the upper finger and the lower finger are located approximately above the body.
As shown in fig. 6, when the end effector performs the linear telescopic motion, thefirst driving shaft 25, the second driving shaft 26 and thethird driving shaft 27 are not operated, and thefourth driving shaft 28 and thefifth driving shaft 29 are reversely rotated while ensuring that the rotation speed of the small arm is twice as high as that of the large arm; at the moment, the upper end effector and the lower end effector are still in an overlapped state, the large arm and the small arm drive the two end effectors to move, and the moving track takes the rotation axis of the fixed end of the large arm as the center and is in a straight line in the radial direction.
As shown in fig. 3, when the manipulator performs linear telescopic motion, the two fingers rotate reversely and are separated, and the upper fingers do not turn over, the fourth driving shaft and the fifth driving shaft rotate reversely, and the rotation speed of the small arm is guaranteed to be twice of that of the large arm, so that the manipulator performs linear telescopic motion; the first driving shaft and the second driving shaft are opposite in rotating direction, and meanwhile, the third driving shaft and the second driving shaft are kept rotating at the same speed and in the same direction, so that the two end effectors can drive the upper fingers and the lower fingers to rotate reversely and separately move, and the upper fingers are kept not to turn over.
As shown in fig. 1, when the end effector of the mechanical arm performs linear telescopic motion, the lower finger is avoided, and the upper finger performs overturning motion, the fourth driving shaft and the fifth driving shaft rotate in opposite directions, and the rotation speed of the small arm is guaranteed to be twice that of the large arm, so that the mechanical arm performs linear telescopic motion; the first drive shaft is rotatory to drive end effector rotation down and makes the finger rotation dodge down, and the second drive shaft irrotational, go up end effector irrotational promptly and go up the finger irrotational, the third drive shaft is rotatory to be made and is gone up the finger upset.
The mechanical arm is not limited to an atmospheric robot and a vacuum robot, the end effector is not limited to vacuum adsorption and clamping, the driving mode of each shaft in the arm part is not limited to the coaxial mode of a body motor, and the mounting mode of the body of the robot is not limited to a base mounting mode and an upper flange mounting mode.
The wafer transmission system of the invention is not only suitable for transmitting semiconductor wafers, but also suitable for transmitting other objects to be transmitted, such as solar substrates, glass panels and the like, and any similar transmission system is protected.
The above description is only a preferred embodiment of the present invention, and the embodiment is not intended to limit the scope of the present invention, so that all equivalent structural changes made by using the contents of the specification and the drawings of the present invention should be included in the scope of the appended claims.
Claims (10)
1. A wafer transmission system is characterized by comprising a feeding unit, a correction unit and/or a cache unit, a processing unit and a mechanical arm, wherein wafers in the feeding unit, the correction unit and/or the cache unit are horizontally arranged, and wafers in the processing unit are vertically arranged;
the mechanical arm comprises a body, a large arm, a small arm, an upper end effector and a lower end effector, wherein the fixed end of the large arm is rotatably arranged at one end of the body, the fixed end of the small arm is rotatably arranged at the moving end of the large arm, and the fixed ends of the upper end effector and the lower end effector are superposed up and down and are rotatably arranged at the moving end of the small arm; the moving ends of the upper end effector and the lower end effector are rotatably provided with an upper finger and a lower finger;
the upper finger is driven by the upper end effector to realize linear, rotary and turnover motions so as to drive the wafer to realize horizontal and vertical position conversion in the wafer transmission system; the lower finger is driven by the lower end effector to realize linear and rotary motion.
2. The wafer conveying system of claim 1, wherein the lower end effector is connected to the first small arm large pulley, and the first small arm large pulley is connected to the first small arm small pulley through a synchronous belt; the first small arm belt pulley is fixedly connected with a first large arm belt pulley through a first elbow shaft, the first large arm belt pulley and the first large arm belt pulley form a transmission pair through a synchronous belt, and the first large arm belt pulley is fixedly connected to a first driving shaft; the first small arm large belt wheel is positioned at the fixed end of the large arm, the second large arm large belt wheel is positioned at the movable end of the large arm, and the first driving shaft is positioned in the body;
the first drive shaft drives the lower end effector to rotate.
3. The wafer transfer system of claim 2, wherein the ratio of the first small arm large pulley to the first small arm small pulley is 2: 1.
4. The wafer conveying system according to claim 1, wherein the upper end effector is connected to the second small arm large pulley, and the second small arm large pulley is connected to the second small arm small pulley through a synchronous belt; the small arm small belt pulley II is fixedly connected with a large arm small belt pulley II through a toggle shaft II, the large arm large belt pulley II and the large arm small belt pulley II form a transmission pair through a synchronous belt, and the large arm large belt pulley II is fixedly connected to a second driving shaft; the second large arm belt wheel is positioned at the fixed end of the large arm, and the second driving shaft is positioned in the body;
the second drive shaft drives the upper end effector to rotate.
5. The wafer transfer system of claim 4, wherein the ratio of the number of teeth of the second small arm large pulley to the number of teeth of the second small arm small pulley is 2: 1.
6. The wafer conveying system according to claim 1, wherein the upper finger is fixedly connected with a second bevel gear, the first bevel gear and the second bevel gear form a gear pair, the first bevel gear is fixed on a third small-arm large belt pulley, and the first bevel gear and the third small-arm large belt pulley have concentric shafts; the small arm large belt wheel tee joint is connected with a small arm small belt wheel III through a synchronous belt; the small arm small belt pulley III is fixedly connected with a large arm small belt pulley III through a toggle shaft III, the large arm large belt pulley III and the large arm small belt pulley III form a transmission pair through a synchronous belt, and the large arm large belt pulley III is fixedly connected to a third driving shaft; the small arm large belt wheel III is positioned at the moving end of the small arm, the small arm small belt wheel III is positioned at the fixed end of the small arm, the large arm small belt wheel III and the elbow shaft III are positioned at the moving end of the large arm, the large arm large belt wheel III is positioned at the fixed end of the large arm, and the third driving shaft is positioned in the body;
the third driving shaft drives the upper finger to do overturning motion.
7. The wafer transfer system of claim 6, wherein the ratio of the number of teeth of the third small arm large pulley to the number of teeth of the third small arm small pulley is 2: 1.
8. The wafer conveying system according to claim 1, wherein the fixed end of the small arm is mounted on a large arm small pulley four, the large arm small pulley four and the large arm large pulley four form a transmission pair through a synchronous belt, wherein the large arm large pulley four is located at the fixed end of the large arm, the large arm large pulley four is fixedly connected with a fourth driving shaft, and the fourth driving shaft is located inside the body; the stiff end fixed connection of big arm is on the fifth drive shaft, and the fifth drive shaft is located inside the body, the big arm of fifth drive shaft drive rotates.
9. The wafer transfer system of claim 1, wherein the large and small arms are equal in length.
10. The wafer transfer system of claim 1, wherein the alignment unit comprises an aligner for aligning the wafer; the processing unit is used for transmitting the wafers in the wafer transmission system to a subsequent process.
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| CN202011573358.5ACN112635378B (en) | 2020-12-25 | 2020-12-25 | Wafer transmission system |
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| CN202011573358.5ACN112635378B (en) | 2020-12-25 | 2020-12-25 | Wafer transmission system |
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| CN112635378B CN112635378B (en) | 2023-05-16 |
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| CN112635378B (en) | 2023-05-16 |
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