CN112251732A - Material carrying device of coating machine - Google Patents

Abstract

The invention relates to the technical field of coating equipment, in particular to a material loading device of a coating machine, which comprises a vacuum cover, a liquid cooling platform deck assembly, an elastic sealing element and a vacuum cover base cold plate, wherein the vacuum cover base cold plate is hermetically arranged on the bottom wall of the vacuum cover, the liquid cooling platform deck assembly is slidably arranged on the bottom wall of the vacuum cover, the liquid cooling platform deck assembly and the vacuum cover base cold plate are both of a hollow structure, cooling liquid is introduced into the liquid cooling platform deck assembly and the vacuum cover base cold plate to realize cooling, one end of the elastic sealing element is hermetically arranged with the liquid cooling platform deck assembly, and the other end of the elastic sealing element is hermetically arranged with the vacuum cover base cold plate. The invention can effectively and quickly cool the liquid cooling platform deck and the bottom wall of the vacuum cover, so that the liquid cooling platform deck can work in a high-temperature environment for a long time, the burning loss of the liquid cooling platform deck is avoided, the installation tightness of the liquid cooling platform deck assembly and the vacuum cover can be enhanced, and the film deposition effect on the surface of the cutter is good.

Description

Material carrying device of coating machine

Technical Field

The invention relates to the technical field of coating equipment, in particular to a material loading device of a coating machine.

Background

The Hot wire CVD (HFCVD) method has the advantages of low cost, simple equipment, stable process and suitability for complex shape and large-area deposition, and is a method most suitable for the industrial production of diamond film coated cutters, and HFCVD diamond film coated drill bits and milling cutters with complex shapes are currently in the industrial process at home and abroad; when the diamond film deposition is carried out on the blade part of a drill bit or a milling cutter by using the HFCVD method, the surface temperature value, the temperature field and the distribution uniformity of the reactive group density field of the deposition region (blade region, substrate) have great influence on the film quality and uniformity. Suitable substrate temperatures for deposition of HFCVD diamond films are in the range of about 500-1000 deg.C, with an optimum range of about 700-900 deg.C.

The feeding device of the traditional coating equipment is usually in a vacuum high-temperature state, and is usually cooled by water in order to prevent the feeding device from being burnt, but the cooling structure of the feeding device of the coating equipment in the prior art is unreasonable in design, and at least the following problems exist:

1. generally, the bottom wall of the vacuum cover and the feeding device are closer to a heating source, so that the working temperatures of the feeding device and the bottom wall of the vacuum cover are too high, the feeding device and the bottom wall of the vacuum cover are easily burnt by high temperature, the service life is short, the production cost is high, and the production standard cannot be met;

2. the vacuum cover is assembled with the feeding device, the sealing performance is not enough, the condition of air leakage can appear on the vacuum cover when the feeding device acts, the film deposition effect on the surface of the cutter is influenced, and the yield is low.

Disclosure of Invention

The technical problem to be solved by the invention is to provide the material carrying device of the coating machine, which can effectively and quickly cool the liquid cooling platform deck and the bottom wall of the vacuum cover, so that the liquid cooling platform deck can work in a high-temperature environment for a long time, the burning loss of the liquid cooling platform deck is avoided, the sealing performance of the installation of the liquid cooling platform deck assembly and the vacuum cover can be enhanced, and the film deposition effect on the surface of a cutter is good.

In order to solve the technical problems, the invention adopts the following technical scheme:

the utility model provides a material loading device of coating machine, it includes the vacuum cover, liquid cooling microscope carrier subassembly, elastic sealing element and the cold dish of vacuum cover base, the cold dish seal installation of vacuum cover base is in the diapire of vacuum cover, the cold dish of vacuum cover base is used for cooling down the vacuum cover, liquid cooling microscope carrier subassembly slides and sets up in the vacuum cover diapire, liquid cooling microscope carrier subassembly is used for bearing the weight of the cutter and adjusts the position height of cutter, liquid cooling microscope carrier subassembly and the cold dish of vacuum cover base are hollow structure, the leading-in liquid cooling microscope carrier subassembly of coolant liquid and the inside cooling that is in order to realize the cooling of vacuum cover base cold dish, liquid cooling microscope carrier subassembly is located to elastic sealing element cover, elastic sealing element's one end and liquid cooling microscope carrier subassembly seal installation, elastic sealing element.

Further, the liquid cooling platform assembly comprises a rack, a liquid cooling platform, a liquid outlet hollow supporting pipe, a lifting driving structure and a rotary driving piece, wherein the rack is fixedly installed at the bottom of the vacuum cover, the lifting driving structure is installed on the rack and is in driving connection with the liquid outlet hollow supporting pipe, the upper end of the liquid outlet hollow supporting pipe extends into the vacuum cover and is fixedly connected with the liquid cooling platform, the lower end of the liquid outlet hollow supporting pipe is fixedly connected with the rotary driving piece, the liquid outlet hollow supporting pipe is arranged on a cold plate of a base of the vacuum cover in a sliding mode, a liquid cooling cavity is arranged inside the liquid cooling platform, the liquid outlet hollow supporting pipe is communicated with the liquid cooling cavity, a rotary liquid guiding plate is installed in the liquid cooling cavity in a rotating mode, the output end of the rotary driving piece is connected with the rotary.

Furthermore, the elastic sealing element is an elastic annular body, the elastic sealing element is sleeved outside the liquid outlet hollow supporting tube, one end of the elastic sealing element is in sealing connection with the bottom wall of the vacuum cover, and the other end of the elastic sealing element is in sealing connection with the rotary driving element; when the liquid cooling stage moves upwards, the elastic sealing element is in a compressed state; when the liquid cooling carrying platform moves downwards, the elastic sealing element is in an expansion state.

Further, rotatory drain dish is including leading the liquid dull and stereotyped and set up in a plurality of leaves of leading the liquid dull and stereotyped, and a plurality of leaves are the annular array along the dull and stereotyped central axis of leading the liquid, and the dull and stereotyped rotation of leading the liquid is installed in the liquid cooling cavity, and a plurality of leaves are used for stirring the inside coolant liquid of liquid cooling cavity, and the dull and stereotyped liquid that leads is equipped with drain centre bore and assembly bulge loop body, and assembly bulge loop body sets up with drain centre bore is coaxial.

Further, liquid cooling microscope carrier subassembly still includes the feed liquor hollow tube, and the feed liquor hollow tube sets up in going out liquid hollow stay tube insidely, and the lower extreme and the output of rotary driving piece of feed liquor hollow tube are connected, and the upper end of feed liquor hollow tube stretches to in the liquid cooling cavity and with the joint of assembly bulge loop body, feed liquor hollow tube and drain centre bore intercommunication, and rotary driving piece is used for ordering about feed liquor hollow tube and rotatory drain dish and rotates.

Furthermore, the rotary driving piece is provided with a liquid inlet cavity and a liquid outlet cavity, the liquid inlet cavity is communicated with the liquid inlet hollow tube, the liquid outlet cavity is communicated with the liquid outlet hollow supporting tube, and cooling liquid sequentially flows through the liquid inlet cavity, the liquid inlet hollow tube, the liquid guide central hole, the liquid cooling cavity, the liquid outlet hollow supporting tube and the liquid outlet cavity.

Further, the lifting driving structure comprises a lifting driving body fixedly mounted on the frame and a bearing frame in driving connection with the lifting driving body, one end of the bearing frame is arranged in the frame in a sliding mode, the other end of the bearing frame is fixedly mounted with the rotary driving piece, the lifting driving body drives the rotary driving piece, the liquid outlet hollow supporting tube and the liquid cooling carrying platform to ascend and descend through the bearing frame, a plurality of first guide rods which are arranged in parallel are mounted on the frame, the first guide rods respectively penetrate through the bearing frame, and the bearing frame moves along the first guide rods.

Further, the liquid cooling stage comprises a liquid cooling stage body and a bearing upper cover arranged on the liquid cooling stage body, a sealing ring is arranged between the bearing upper cover and the liquid cooling stage body, and the cutter is borne on the bearing upper cover.

Further, the cold dish of vacuum cup base includes seal installation in the cold dish body of vacuum cup bottom and sets up in the inside cold dish cavity of cold dish body, and the leading-in mobile coolant liquid of cold dish cavity is used for cooling cold dish body, and liquid cooling microscope carrier subassembly passes cold dish body and slides and set up in cold dish body.

Further, a plurality of second guide rods which are arranged in parallel are fixedly installed on the cold plate body, and the second guide rods are respectively connected with the liquid cooling stage assembly in a sliding mode.

The invention has the beneficial effects that:

1. the liquid cooling stage assembly and the vacuum cover base cold plate can be cooled effectively and quickly, so that the liquid cooling stage assembly and the vacuum cover can work in a high-temperature environment for a long time, the service lives of the liquid cooling stage assembly and the vacuum cover are prolonged, and the production cost is reduced;

2. the inside vacuum environment that also bleeds of elastic sealing element, elastic sealing element's one end is fixed and sealed and sets up in liquid cooling microscope carrier subassembly, do not need the action for liquid cooling microscope carrier subassembly elastic sealing element, elastic sealing element's the other end is fixed and sealed and set up in the cold dish of vacuum hood base, also do not need the action for the cold dish elastic sealing element of vacuum hood base, elastic sealing element is through the up-and-down motion of self elasticity in order to adapt to liquid cooling microscope carrier subassembly, consequently, can strengthen the leakproofness of liquid cooling microscope carrier subassembly and vacuum hood installation greatly, effectively avoid the air leakage of vacuum hood, the film deposition on cutter surface is effectual.

Drawings

Fig. 1 is a schematic perspective view of the present invention.

Fig. 2 is a schematic cross-sectional structure of the present invention.

FIG. 3 is a schematic structural diagram of a spin-on fluid-conducting disk according to the present invention.

Detailed Description

In order to facilitate understanding of those skilled in the art, the present invention will be further described with reference to the following examples and drawings, which are not intended to limit the present invention.

As shown in fig. 1 to fig. 3, the loading device of a coating machine provided by the invention comprises avacuum cover 21 and a liquidcooling stage assembly 65,elastic sealing member 66 and thecold dish 67 of vacuum cover base, thecold dish 67 of vacuum cover base is seal installation in the diapire ofvacuum cover 21, thecold dish 67 of vacuum cover base is used for cooling down the cooling ofvacuum cover 21, liquid cooling microscope stage subassembly 65 slides and sets up in the diapire ofvacuum cover 21, liquid coolingmicroscope stage subassembly 65 is used for bearing the weight of the cutter and adjusts the position height of cutter, liquid coolingmicroscope stage subassembly 65 and thecold dish 67 of vacuum cover base are hollow structure, the cooling liquid is introduced into inside liquid coolingmicroscope stage subassembly 65 and thecold dish 67 of vacuum cover base in order to realize the cooling,elastic sealing member 66 overlaps and locates liquid coolingmicroscope stage subassembly 65, the one end and the liquid coolingmicroscope stage subassembly 65 seal installation ofelastic sealing member 66, the other end and thecold dish 67 seal installation of vacuum cover base of. Theelastomeric seal 66 is made of an elastomeric material.

In practical application, the cutter is placed on the liquidcooling stage assembly 65, thevacuum cover 21 is internally vacuumized and heated, the surface of the cutter is at the optimal deposition temperature, the liquidcooling stage assembly 65 and the vacuum cover basecold plate 67 are both of a hollow structure, flowing cooling liquid is introduced into the liquidcooling stage assembly 65 and the vacuum cover basecold plate 67, the liquidcooling stage assembly 65 and the vacuum cover basecold plate 67 can be effectively and quickly cooled, the liquidcooling stage assembly 65 and thevacuum cover 21 can work in a high-temperature environment for a long time, the service lives of the liquidcooling stage assembly 65 and thevacuum cover 21 are prolonged, and the production cost is reduced. The liquidcooling stage assembly 65 is arranged on the vacuum cover basecold plate 67 in a sliding mode, the vacuum cover basecold plate 67 is installed on the bottom wall of thevacuum cover 21 in a sealing mode, an installation hole is reserved at the connection position of the liquidcooling stage assembly 65 and the vacuum cover basecold plate 67, air leakage occurs when the liquidcooling stage assembly 65 moves up and down in the action process of the installation hole, because the interior of theelastic sealing element 66 is also exhausted to form a vacuum environment, one end of theelastic sealing element 66 is fixedly and hermetically arranged on the liquidcooling stage assembly 65, theelastic sealing element 66 does not need to move relative to the liquidcooling stage assembly 65, the other end of theelastic sealing element 66 is fixedly and hermetically arranged on the vacuum cover basecold plate 67, theelastic sealing element 66 does not need to move relative to the vacuum cover basecold plate 67, theelastic sealing element 66 adapts to the up and down movement of the liquidcooling stage assembly 65 through elasticity of the elastic sealing element, and therefore the sealing performance, effectively avoiding the air leakage of the vacuum cover and having good film deposition effect on the surface of the cutter.

In this embodiment, the liquid-cooledstage assembly 65 includes aframe 68 and a liquid-cooledstage 50, the liquid cooling device comprises a liquid outlet hollow supportingpipe 58, alifting driving structure 69 and arotary driving part 59, wherein arack 68 is fixedly arranged at the bottom of thevacuum cover 21, thelifting driving structure 69 is arranged on therack 68 and is in driving connection with the liquid outlet hollow supportingpipe 58, the upper end of the liquid outlet hollow supportingpipe 58 protrudes into thevacuum cover 21 and is fixedly connected with theliquid cooling platform 50, the lower end of the liquid outlet hollow supportingpipe 58 is fixedly connected with therotary driving part 59, the liquid outlet hollow supportingpipe 58 is arranged on a vacuum coverbase cooling disc 67 in a sliding mode, aliquid cooling cavity 52 is arranged inside theliquid cooling platform 50, the liquid outlet hollow supportingpipe 58 is communicated with theliquid cooling cavity 52, a rotary liquid guidingdisc 51 is rotatably arranged in theliquid cooling cavity 52, the output end of the rotary drivingpart 59 is connected with the rotary liquid guidingdisc 51, cooling liquid is.

In practical application, the cutter is placed on the liquidcooling microscope stage 50, the inside evacuation and the heating ofvacuum cover 21,lift drive structure 69 is used for accurately drive control liquidcooling microscope stage 50 along the displacement of vertical direction, the distance of strict control cutter and the source that generates heat, make the cutter surface be in the best deposition temperature,liquid cooling cavity 52 leading-in flowing coolant liquid,rotatory drain pan 51 lasts the rotation, stir the inside coolant liquid ofliquid cooling cavity 52 uniformly,rotatory drain pan 51's design can be effectively, realize the cooling to liquidcooling microscope stage 50 fast, make liquidcooling microscope stage 50 can work under the high temperature environment for a long time, avoid the liquid cooling microscope stage to burn and lose, service life is prolonged, and production cost is reduced.

In this embodiment, theelastic sealing element 66 is an elastic ring body, theelastic sealing element 66 is sleeved outside the hollow liquidoutlet supporting tube 58, one end of theelastic sealing element 66 is connected with the bottom wall of thevacuum cover 21 in a sealing manner, and the other end of theelastic sealing element 66 is connected with therotary driving element 59 in a sealing manner; when the liquid-cooledstage 50 moves upward, theelastic sealing member 66 is in a compressed state; when the liquid-cooledstage 50 moves downward, theelastomeric seal 66 is in an expanded state.

In practical application, the liquid-discharginghollow support tube 58 is slidably arranged on the bottom wall of thevacuum cover 21, a mounting hole is reserved at the joint of the liquid-discharginghollow support tube 58 and the vacuum cover basecold plate 67, and air leakage occurs during the up-and-down movement of the mounting hole of the liquid-discharginghollow support tube 58, because the interior of theelastic sealing member 66 is also evacuated to form a vacuum environment, one end of theelastic sealing member 66 is fixedly and hermetically arranged on the vacuum cover basecold plate 67, theelastic sealing member 66 does not need to move relative to the vacuum cover basecold plate 67, the other end of theelastic sealing member 66 is fixedly and hermetically arranged on therotary driving member 59, theelastic sealing member 66 does not need to move relative to therotary driving member 59, and theelastic sealing member 66 adapts to the up-and-down movement of the liquid-discharginghollow support tube 58 through the elasticity of theelastic sealing member 66, so that, the film deposition effect on the surface of the cutter is good.

In this embodiment, the rotary liquid guidingdisc 51 includes a liquid guidingflat plate 53 and a plurality ofblades 54 disposed on the liquid guidingflat plate 53, the plurality ofblades 54 are in an annular array along a central axis of the liquid guidingflat plate 53, the liquid guidingflat plate 53 is rotatably mounted in theliquid cooling cavity 52, the plurality ofblades 54 are used for stirring the cooling liquid in theliquid cooling cavity 52, the liquid guidingflat plate 53 is provided with a liquid guidingcentral hole 55 and an assemblingconvex ring body 56, and the assemblingconvex ring body 56 and the liquid guidingcentral hole 55 are coaxially disposed.

In practical application, during cutter deposition heating, the cutter is placed on theliquid cooling platform 50, flowing cooling liquid is introduced into theliquid cooling cavity 52, the rotaryliquid guiding plate 51 continuously rotates, the cooling liquid inside theliquid cooling cavity 52 is uniformly stirred, thesheet 54 is of a sheet structure, the panel height of thesheet 54 is matched with the height of theliquid cooling cavity 52, thesheet 54 can fully drive the cooling liquid to flow, theliquid cooling platform 50 is uniform and can be cooled quickly, the rotaryliquid guiding plate 51 can be effectively and quickly designed to cool theliquid cooling platform 50, theliquid cooling platform 50 can work in a high-temperature environment for a long time, the burning loss of the liquid cooling platform is avoided, the service life is prolonged, and the production cost is reduced. The rotary fluid conductingdisc 51 may be an integrally formed structure, and the fluid conductingcentral hole 55 is used for introducing the flowing cooling fluid.

In this embodiment, the liquidcooling stage assembly 65 further includes a liquid inlethollow tube 57, the liquid inlethollow tube 57 is disposed inside the liquid outlethollow support tube 58, the lower end of the liquid inlethollow tube 57 is connected to the output end of therotary driving member 59, the upper end of the liquid inlethollow tube 57 protrudes into theliquid cooling cavity 52 and is clamped to the assemblingconvex ring body 56, the liquid inlethollow tube 57 is communicated with the liquid guidingcentral hole 55, and therotary driving member 59 is used for driving the liquid inlethollow tube 57 and the rotary liquid guidingdisc 51 to rotate. Specifically, when feed liquorhollow tube 57 is used for leading-in coolant liquid, still be used for driving about rotatoryliquid guide plate 51 and continuously rotate, feed liquorhollow tube 57 is connected with the drive ofliquid guide plate 53 via assemblybulge loop body 56, and structural design is reasonable, and rotatoryliquid guide plate 51 can be effectively, evenly, realize the cooling to liquidcooling microscope carrier 50 fast for liquidcooling microscope carrier 50 can be in work under the high temperature environment for a long time, avoids liquidcooling microscope carrier 50 to burn out, increase of service life, reduction in production cost.

In this embodiment, therotary driving member 59 is provided with aliquid inlet cavity 60 and aliquid outlet cavity 61, theliquid inlet cavity 60 is communicated with the liquid inlethollow tube 57, theliquid outlet cavity 61 is communicated with the liquid outlethollow support tube 58, and the cooling liquid sequentially flows through theliquid inlet cavity 60, the liquid inlethollow tube 57, the liquid guidingcentral hole 55, theliquid cooling cavity 52, the liquid outlethollow support tube 58 and theliquid outlet cavity 61. Specifically, because the coolant throughliquid cooling cavity 52 has absorbed the heat, consequently the coolant temperature of going outliquid chamber 61 is higher than the coolant temperature of going intoliquid chamber 60, goes intoliquid chamber 60 and goes out the hot interval setting ofliquid chamber 61, guarantees the cooling effect of the coolant of going intoliquid chamber 60, can effectively, evenly, realize the cooling to the liquid cooling microscope carrier fast.

In this embodiment, thelifting driving structure 69 includes a liftingdriving body 70 fixedly mounted on theframe 68 and a supportingframe 71 drivingly connected to the liftingdriving body 70, one end of the supportingframe 71 is slidably disposed on theframe 68, the other end of the supportingframe 71 is fixedly mounted on the rotatingdriving member 59, the liftingdriving body 70 drives therotating driving member 59, the liquid outlet hollow supportingtube 58 and theliquid cooling stage 50 to move up and down through the supportingframe 71, a plurality of first guidingrods 72 are mounted on theframe 68, the plurality of first guidingrods 72 respectively penetrate through the supportingframe 71, and the supportingframe 71 moves along the first guidingrods 72. Specifically, the liftingdriving body 70 can be driven by a screw rod, the screw rod driving has the characteristic of high precision, the up-and-down movement distance of theliquid cooling carrier 50 can be accurately controlled, the stroke of the cutter can be controlled, the distance between the cutter and a heating source is strictly controlled, the surface of the cutter is at the optimal deposition temperature, and the film deposition effect on the surface of the cutter is good;first guide bar 72 bears a weight of 71 and has the guide effect for bear a weight of 71 and accurately follow the route removal of predetermineeing, further make the displacement of liquidcooling microscope carrier 50 accurate, a plurality of cutter surfaces can thermally equivalent, and the coating is effectual, and the yields is high.

In this embodiment, theliquid cooling stage 50 includes a liquidcooling stage body 63 and a bearingupper cover 64 installed on the liquidcooling stage body 63, aseal ring 25 is provided between the bearingupper cover 64 and the liquidcooling stage body 63, and the tool is borne on the bearingupper cover 64. Specifically, theseal ring 25 can prevent the coolant in theliquid cooling cavity 52 from overflowing, enhance the sealing performance of theliquid cooling stage 50, and prevent the coolant from being wasted.

In this embodiment, the vacuum cover basecold plate 67 includes acold plate body 73 hermetically mounted at the bottom of thevacuum cover 21 and acold plate cavity 74 disposed inside thecold plate body 73, thecold plate cavity 74 introduces flowing cooling liquid for cooling thecold plate body 73, and the liquidcooling stage assembly 65 passes through thecold plate body 73 and is slidably disposed on thecold plate body 73. Specifically, thecold plate body 73 is arranged at the bottom of thevacuum cover 21, and the flowing cooling liquid is introduced into thecold plate cavity 74, so that thevacuum cover 21 can be effectively protected, when thecold plate 67 on the base of the vacuum cover is used up, a newcold plate 67 on the base of the vacuum cover can be replaced, and the maintenance cost can be saved; thecold plate cavity 74 is flat, so that the cooling area can be enlarged, quick cooling is realized, and the cooling effect is good.

In this embodiment, the plurality ofsecond guide rods 75 arranged in parallel to each other are fixedly mounted on thecold plate body 73, and the plurality ofsecond guide rods 75 are slidably connected to thecarrier 71 of the liquidcooling stage assembly 65, respectively. Specifically, thesecond guide rod 75 and thefirst guide rod 72 all have a guiding effect on the bearingframe 71, so that the central axes of thecold plate body 73, the bearingframe 71, the liquid outlethollow support tube 58 and the liquidcooling carrying platform 50 are arranged in parallel, the bearingframe 71 horizontally and accurately moves along a preset path, the displacement of the liquidcooling carrying platform 50 is further accurate, the surfaces of a plurality of cutters can be uniformly heated, the coating effect is good, and the yield is high.

All the technical features in the embodiment can be freely combined according to actual needs.

The above embodiments are preferred implementations of the present invention, and the present invention can be implemented in other ways without departing from the spirit of the present invention.

Claims (10)

1. The utility model provides a material loading device of coating machine, includes the vacuum hood, its characterized in that: the vacuum cover base cold plate is hermetically mounted on the bottom wall of the vacuum cover, the vacuum cover base cold plate is used for cooling the vacuum cover, the liquid cooling platform assembly is slidably arranged on the bottom wall of the vacuum cover, the liquid cooling platform assembly is used for bearing a cutter and adjusting the position height of the cutter, the liquid cooling platform assembly and the vacuum cover base cold plate are both of a hollow structure, cooling liquid is introduced into the liquid cooling platform assembly and the inside of the vacuum cover base cold plate to realize cooling, the liquid cooling platform assembly is sleeved with the elastic sealing member, one end of the elastic sealing member is hermetically mounted with the liquid cooling platform assembly, and the other end of the elastic sealing member is hermetically mounted with the vacuum cover base cold plate.

2. The loading device of a coating machine according to claim 1, characterized in that: the liquid cooling platform assembly comprises a rack, a liquid cooling platform, a liquid outlet hollow supporting tube, a lifting driving structure and a rotary driving piece, wherein the rack is fixedly installed at the bottom of the vacuum cover, the lifting driving structure is installed on the rack and is in driving connection with the liquid outlet hollow supporting tube, the upper end of the liquid outlet hollow supporting tube extends into the vacuum cover and is fixedly connected with the liquid cooling platform, the lower end of the liquid outlet hollow supporting tube is fixedly connected with the rotary driving piece, the liquid outlet hollow supporting tube is arranged on a cold plate of a base of the vacuum cover in a sliding mode, a liquid cooling cavity is arranged inside the liquid cooling platform, the liquid outlet hollow supporting tube is communicated with the liquid cooling cavity, a rotary liquid guide plate is installed in the liquid cooling cavity in a rotating mode, the output end of the rotary driving piece is connected with.

3. The loading device of a coating machine according to claim 2, characterized in that: the elastic sealing element is an elastic annular body and is sleeved outside the liquid outlet hollow supporting tube, one end of the elastic sealing element is in sealing connection with the bottom wall of the vacuum cover, and the other end of the elastic sealing element is in sealing connection with the rotary driving element; when the liquid cooling stage moves upwards, the elastic sealing element is in a compressed state; when the liquid cooling carrying platform moves downwards, the elastic sealing element is in an expansion state.

4. The loading device of a coating machine according to claim 3, characterized in that: rotatory drain dish is including leading the liquid flat board and set up in a plurality of leaves of leading the liquid flat board, and a plurality of leaves are annular array along the dull and stereotyped the central axis of leading the liquid, and the dull and stereotyped rotation of leading the liquid is installed in the liquid cooling cavity, and a plurality of leaves are used for stirring the inside coolant liquid of liquid cooling cavity, and the liquid flat board of leading is equipped with the drain centre bore and assembles the bulge loop body, assembles the bulge loop body and leads the coaxial setting of liquid centre bore.

5. The loading device of the coating machine according to claim 4, characterized in that: the liquid cooling stage assembly further comprises a liquid inlet hollow pipe, the liquid inlet hollow pipe is arranged inside the liquid outlet hollow supporting pipe, the lower end of the liquid inlet hollow pipe is connected with the output end of the rotary driving piece, the upper end of the liquid inlet hollow pipe extends into the liquid cooling cavity and is clamped with the assembling convex ring body, the liquid inlet hollow pipe is communicated with the liquid guiding central hole, and the rotary driving piece is used for driving the liquid inlet hollow pipe and the rotary liquid guiding disc to rotate.

6. The loading device of the coating machine according to claim 5, characterized in that: the rotary driving piece is provided with a liquid inlet cavity and a liquid outlet cavity, the liquid inlet cavity is communicated with the liquid inlet hollow tube, the liquid outlet cavity is communicated with the liquid outlet hollow supporting tube, and cooling liquid sequentially flows through the liquid inlet cavity, the liquid inlet hollow tube, the liquid guide central hole, the liquid cooling cavity, the liquid outlet hollow supporting tube and the liquid outlet cavity.

7. The loading device of a coating machine according to claim 2, characterized in that: the lifting driving structure comprises a lifting driving body fixedly mounted on the frame and a bearing frame in driving connection with the lifting driving body, one end of the bearing frame is arranged in the frame in a sliding mode, the other end of the bearing frame is fixedly mounted with the rotary driving piece, the lifting driving body drives the rotary driving piece, the liquid outlet hollow supporting tube and the liquid cooling carrying platform to lift through the bearing frame, a plurality of first guide rods which are arranged in parallel are mounted on the frame, the first guide rods respectively penetrate through the bearing frame, and the bearing frame moves along the first guide rods.

8. The loading device of a coating machine according to claim 2, characterized in that: the liquid cooling microscope carrier comprises a liquid cooling microscope carrier body and a bearing upper cover arranged on the liquid cooling microscope carrier body, a sealing ring is arranged between the bearing upper cover and the liquid cooling microscope carrier body, and the cutter is borne on the bearing upper cover.

9. The loading device of a coating machine according to claim 1, characterized in that: the vacuum cover base cold plate comprises a cold plate body and a cold plate cavity, wherein the cold plate body is hermetically arranged at the bottom of the vacuum cover, the cold plate cavity is arranged inside the cold plate body, flowing cooling liquid is introduced into the cold plate cavity to be used for cooling the cold plate body, and the liquid cooling platform deck assembly penetrates through the cold plate body and is arranged on the cold plate body in a sliding mode.

10. The loading device of a coating machine according to claim 9, characterized in that: the cold plate body is fixedly provided with a plurality of second guide rods which are arranged in parallel, and the second guide rods are respectively connected with the liquid cooling carrier assembly in a sliding manner.

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