技术领域Technical Field
本公开的实施例涉及一种指纹识别结构、指纹识别结构的驱动方法、和显示装置。Embodiments of the present disclosure relate to a fingerprint recognition structure, a driving method of the fingerprint recognition structure, and a display device.
背景技术Background technique
指纹识别技术是一种通过比较不同指纹的细节特征点来进行鉴别，从而达到身份识别功能的技术。随着智能手机的不断发展，屏下指纹识别技术已经成为了当前的智能手机市场的研究热点和发展方向之一。目前，屏下指纹识别技术可分为屏下电容式指纹识别技术、屏下超声波式指纹识别技术和屏下光学式指纹识别技术。而屏下超声波指纹识别技术因其穿透性强、辨识度高、抗污能力强等优点成为当前最理想的解决方案。Fingerprint recognition technology is a technology that compares the detailed feature points of different fingerprints to achieve the function of identity recognition. With the continuous development of smartphones, under-screen fingerprint recognition technology has become one of the research hotspots and development directions in the current smartphone market. At present, under-screen fingerprint recognition technology can be divided into under-screen capacitive fingerprint recognition technology, under-screen ultrasonic fingerprint recognition technology and under-screen optical fingerprint recognition technology. Under-screen ultrasonic fingerprint recognition technology has become the most ideal solution at present due to its advantages such as strong penetration, high recognition and strong anti-fouling ability.
屏下超声波指纹识别技术通过超声波指纹识别结构来实现指纹识别。通常，超声波指纹识别结构为三叠层结构，包括驱动电极、接收电极以及位于两者之间的压电层。当对驱动电极和接收电极加载驱动电压时，压电层受到电压激发产生逆压电效应，向外发射第一超声波。该第一超声波接触手指后，被手指反射回第二超声波。由于指纹包括谷和脊，所以被指纹反射回到压电层的第二超声波震动强度有差异，此时，对驱动电极加载固定电压，则压电层可将第二超声波转换成电压信号，该电压信号通过接收电极传输给指纹识别模块，根据该电压信号判断指纹中谷和脊的位置。The under-screen ultrasonic fingerprint recognition technology realizes fingerprint recognition through an ultrasonic fingerprint recognition structure. Generally, the ultrasonic fingerprint recognition structure is a three-layer structure, including a driving electrode, a receiving electrode, and a piezoelectric layer located between the two. When a driving voltage is applied to the driving electrode and the receiving electrode, the piezoelectric layer is excited by the voltage to produce an inverse piezoelectric effect and emit a first ultrasonic wave outward. After the first ultrasonic wave contacts the finger, it is reflected back by the finger as a second ultrasonic wave. Since the fingerprint includes valleys and ridges, the vibration intensity of the second ultrasonic wave reflected back to the piezoelectric layer by the fingerprint is different. At this time, a fixed voltage is applied to the driving electrode, and the piezoelectric layer can convert the second ultrasonic wave into a voltage signal, which is transmitted to the fingerprint recognition module through the receiving electrode, and the position of the valley and ridge in the fingerprint is determined according to the voltage signal.
发明内容Summary of the invention
本公开实施例提供一种指纹识别结构、指纹识别结构的驱动方法、和显示装置。该指纹识别结构包括第一电极层、压电材料层和第二电极层；第一电极层包括间隔设置的多个条状接收电极；压电材料层设置在第一电极层的一侧；第二电极层设置在压电材料层远离第一电极层的一侧且包括沿间隔设置多个条状驱动电极，各条状驱动电极沿第一方向延伸，各条状接收电极沿第二方向延伸，第一方向和第二方向相交，多个条状驱动电极和多个条状接收电极相互交叉以形成多个交叉区域，压电材料层至少与多个交叉区域交叠，一个所述条状接收电极与所述多个条状驱动电极形成多个所述交叉区域。由此，该指纹识别结构可减少该指纹识别结构中膜层的数量以提高光透过率，从而使得该指纹识别结构可设置在显示面板的发光侧，进而可降低功耗。The disclosed embodiments provide a fingerprint recognition structure, a driving method of the fingerprint recognition structure, and a display device. The fingerprint recognition structure includes a first electrode layer, a piezoelectric material layer, and a second electrode layer; the first electrode layer includes a plurality of strip-shaped receiving electrodes arranged at intervals; the piezoelectric material layer is arranged on one side of the first electrode layer; the second electrode layer is arranged on the side of the piezoelectric material layer away from the first electrode layer and includes a plurality of strip-shaped driving electrodes arranged at intervals, each strip-shaped driving electrode extends along a first direction, each strip-shaped receiving electrode extends along a second direction, the first direction and the second direction intersect, a plurality of strip-shaped driving electrodes and a plurality of strip-shaped receiving electrodes intersect with each other to form a plurality of intersection regions, the piezoelectric material layer at least overlaps with a plurality of intersection regions, and one of the strip-shaped receiving electrodes and the plurality of strip-shaped driving electrodes form a plurality of the intersection regions. Thus, the fingerprint recognition structure can reduce the number of film layers in the fingerprint recognition structure to improve light transmittance, so that the fingerprint recognition structure can be arranged on the light-emitting side of the display panel, thereby reducing power consumption.
本公开至少一个实施例提供一种指纹识别结构，包括：第一电极层，包括间隔设置的多个条状接收电极；压电材料层，设置在所述第一电极层的一侧；以及第二电极层，设置在所述压电材料层远离所述第一电极层的一侧且包括沿间隔设置多个条状驱动电极，各所述条状驱动电极沿第一方向延伸，各所述条状接收电极沿第二方向延伸，所述第一方向和所述第二方向相交，所述多个条状驱动电极和所述多个条状接收电极相互交叉以形成多个交叉区域，所述压电材料层至少与所述多个交叉区域交叠，一个所述条状接收电极与所述多个条状驱动电极形成多个所述交叉区域。At least one embodiment of the present disclosure provides a fingerprint recognition structure, comprising: a first electrode layer, comprising a plurality of strip-shaped receiving electrodes arranged at intervals; a piezoelectric material layer, arranged on one side of the first electrode layer; and a second electrode layer, arranged on a side of the piezoelectric material layer away from the first electrode layer and comprising a plurality of strip-shaped driving electrodes arranged at intervals, each of the strip-shaped driving electrodes extending along a first direction, each of the strip-shaped receiving electrodes extending along a second direction, the first direction and the second direction intersecting, the plurality of strip-shaped driving electrodes and the plurality of strip-shaped receiving electrodes intersecting with each other to form a plurality of intersection regions, the piezoelectric material layer at least overlapping with the plurality of intersection regions, and one strip-shaped receiving electrode and the plurality of strip-shaped driving electrodes forming a plurality of the intersection regions.
例如，在本公开一实施例提供的指纹识别结构中，所述压电材料层包括间隔设置的子压电材料层，各所述子压电材料层沿所述第一方向或所述第二方向延伸。For example, in a fingerprint recognition structure provided in an embodiment of the present disclosure, the piezoelectric material layer includes spaced-apart sub-piezoelectric material layers, and each of the sub-piezoelectric material layers extends along the first direction or the second direction.
例如，在本公开一实施例提供的指纹识别结构中，所述压电材料层包括多个子压电材料块，所述多个子压电材料块与所述多个交叉区域一一对应设置。For example, in the fingerprint recognition structure provided in an embodiment of the present disclosure, the piezoelectric material layer includes a plurality of sub-piezoelectric material blocks, and the plurality of sub-piezoelectric material blocks are arranged in a one-to-one correspondence with the plurality of intersection areas.
例如，在本公开一实施例提供的指纹识别结构中，所述第二电极层还包括：挡墙，位于相邻的两个所述条状驱动电极之间。For example, in the fingerprint recognition structure provided in an embodiment of the present disclosure, the second electrode layer further includes: a barrier wall located between two adjacent strip-shaped driving electrodes.
例如，在本公开一实施例提供的指纹识别结构中，所述挡墙在垂直于所述压电材料层的方向上的尺寸范围为1-20微米，所述第二电极层在垂直于所述压电材料层的方向上的尺寸范围为1-20微米。For example, in a fingerprint recognition structure provided in an embodiment of the present disclosure, the size of the retaining wall in a direction perpendicular to the piezoelectric material layer ranges from 1 to 20 microns, and the size of the second electrode layer in a direction perpendicular to the piezoelectric material layer ranges from 1 to 20 microns.
例如，在本公开一实施例提供的指纹识别结构中，所述第二电极层的材料包括铜、银和铝中的一种或多种。For example, in the fingerprint recognition structure provided in an embodiment of the present disclosure, the material of the second electrode layer includes one or more of copper, silver and aluminum.
例如，本公开一实施例提供的指纹识别结构还包括：多个接收电路，所述多个接收电路分别与所述多个条状接收电极电性相连，所述指纹识别结构包括有效识别区和位于所述有效识别区周边的边缘区，所述多个交叉区域位于所述有效识别区，所述多个接收电路位于所述边缘区。For example, the fingerprint recognition structure provided by an embodiment of the present disclosure also includes: multiple receiving circuits, the multiple receiving circuits are electrically connected to the multiple strip-shaped receiving electrodes respectively, the fingerprint recognition structure includes an effective recognition area and an edge area located around the effective recognition area, the multiple intersection areas are located in the effective recognition area, and the multiple receiving circuits are located in the edge area.
例如，在本公开一实施例提供的指纹识别结构中，各所述接收电路包括：存储电容，包括第一极和第二极；第一薄膜晶体管，包括第一栅极、第一源极和第一漏极；以及信号读取单元，所述条状接收电极、所述第一源极和所述第一极连接到存储节点，所述信号读取单元被配置读取所述存储电容中存储的电信号，所述第一薄膜晶体管为氧化物薄膜晶体管。For example, in the fingerprint recognition structure provided in an embodiment of the present disclosure, each of the receiving circuits includes: a storage capacitor, including a first electrode and a second electrode; a first thin film transistor, including a first gate, a first source and a first drain; and a signal reading unit, the strip-shaped receiving electrode, the first source and the first electrode are connected to a storage node, the signal reading unit is configured to read the electrical signal stored in the storage capacitor, and the first thin film transistor is an oxide thin film transistor.
例如，在本公开一实施例提供的指纹识别结构中，所述信号读取单元包括：第二薄膜晶体管，包括第二栅极、第二源极和第二漏极；以及第三薄膜晶体管，包括第三栅极、第三源极和第三漏极，所述第二栅极连接至所述存储节点，所述第二漏极连接至所述第三源极，所述第二源极被配置为施加固定电压，所述第三栅极被配置为施加读出指令信号，所述第三漏极被配置为输出信号。For example, in the fingerprint recognition structure provided in an embodiment of the present disclosure, the signal reading unit includes: a second thin film transistor, including a second gate, a second source and a second drain; and a third thin film transistor, including a third gate, a third source and a third drain, the second gate is connected to the storage node, the second drain is connected to the third source, the second source is configured to apply a fixed voltage, the third gate is configured to apply a read instruction signal, and the third drain is configured to output a signal.
本公开至少一个实施例还提供一种显示装置，其包括：显示面板；以及根据上述所述的指纹识别结构。At least one embodiment of the present disclosure further provides a display device, which includes: a display panel; and the fingerprint recognition structure described above.
例如，在本公开一实施例提供的显示装置中，所述显示面板包括显示区和位于所述显示区周边的周边区，所述指纹识别结构还包括：多个接收电路，所述多个接收电路分别与所述多个条状接收电极电性相连，其中，各所述接收电路包括：存储电容，包括第一极和第二极；第一薄膜晶体管，包括第一栅极、第一源极和第一漏极；以及信号读取单元，所述条状接收电极、所述第一源极和所述第一极连接到存储节点，所述信号读取单元被配置读取所述存储电容中存储的电信号，所述多个交叉区域位于所述显示区，所述多个接收电路在所述显示面板上的正投影位于所述周边区。For example, in a display device provided in an embodiment of the present disclosure, the display panel includes a display area and a peripheral area located around the display area, and the fingerprint recognition structure also includes: a plurality of receiving circuits, the plurality of receiving circuits are electrically connected to the plurality of strip-shaped receiving electrodes, respectively, wherein each of the receiving circuits includes: a storage capacitor, including a first electrode and a second electrode; a first thin film transistor, including a first gate, a first source and a first drain; and a signal reading unit, the strip-shaped receiving electrode, the first source and the first electrode are connected to a storage node, the signal reading unit is configured to read the electrical signal stored in the storage capacitor, the plurality of intersection areas are located in the display area, and the orthographic projections of the plurality of receiving circuits on the display panel are located in the peripheral area.
例如，在本公开一实施例提供的显示装置中，所述显示面板包括发光侧，所述指纹识别结构位于所述显示面板的发光侧。For example, in a display device provided in an embodiment of the present disclosure, the display panel includes a light-emitting side, and the fingerprint recognition structure is located on the light-emitting side of the display panel.
例如，在本公开一实施例提供的显示装置中，所述显示面板包括黑矩阵，所述条状驱动电极和所述条状接收电极在所述显示面板上的正投影与所述黑矩阵至少部分交叠。For example, in a display device provided in an embodiment of the present disclosure, the display panel includes a black matrix, and the orthographic projections of the strip-shaped driving electrodes and the strip-shaped receiving electrodes on the display panel at least partially overlap with the black matrix.
本公开至少一个实施例提供一种上述的指纹识别结构的驱动方法，所述多个条状驱动电极分为依次设置的多个条状驱动电极组，各所述条状驱动电极组包括N个条状驱动电极，相邻的两个所述条状驱动电极组共享N-1个所述条状驱动电极，所述驱动方法包括：依次向所述多个条状驱动电极组施加驱动电压以分别驱动所述多个条状驱动电极组对应的压电材料层发出超声波；以及利用所述压电材料层接收被指纹反射的超声波并通过所述多个条状接收电极输出相应的指纹电信号，N为大于等于1的正整数。At least one embodiment of the present disclosure provides a driving method for the above-mentioned fingerprint recognition structure, wherein the multiple strip-shaped driving electrodes are divided into multiple strip-shaped driving electrode groups arranged in sequence, each of the strip-shaped driving electrode groups includes N strip-shaped driving electrodes, and two adjacent strip-shaped driving electrode groups share N-1 strip-shaped driving electrodes, and the driving method includes: applying driving voltages to the multiple strip-shaped driving electrode groups in sequence to respectively drive the piezoelectric material layers corresponding to the multiple strip-shaped driving electrode groups to emit ultrasonic waves; and using the piezoelectric material layer to receive the ultrasonic waves reflected by the fingerprint and outputting corresponding fingerprint electrical signals through the multiple strip-shaped receiving electrodes, where N is a positive integer greater than or equal to 1.
例如，在本公开一实施例提供的指纹识别结构的驱动方法中，N为大于等于2的正整数，各所述条状驱动电极组包括第一条状驱动电极和第二条状驱动电极，向各所述条状驱动电极组施加驱动电压包括：在第一时间点向所述第一条状驱动电极施加驱动电压以驱动所述第一条状驱动电极对应的所述压电材料层发出超声波；以及在第二时间点向所述第二条状驱动电极施加驱动电压以使所述第二条状驱动电极对应的所述压电材料层发出超声波的相位延迟于所述第一条状驱动电极对应的所述压电材料层发出超声波的相位，所述第二时间点延迟于所述第一时间点。For example, in a driving method of a fingerprint recognition structure provided in an embodiment of the present disclosure, N is a positive integer greater than or equal to 2, each of the strip-shaped driving electrode groups includes a first strip-shaped driving electrode and a second strip-shaped driving electrode, and applying a driving voltage to each of the strip-shaped driving electrode groups includes: applying a driving voltage to the first strip-shaped driving electrode at a first time point to drive the piezoelectric material layer corresponding to the first strip-shaped driving electrode to emit an ultrasonic wave; and applying a driving voltage to the second strip-shaped driving electrode at a second time point to delay a phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the second strip-shaped driving electrode than a phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the first strip-shaped driving electrode, and the second time point is delayed from the first time point.
例如，在本公开一实施例提供的指纹识别结构的驱动方法中，N为大于等于3的正整数，各所述条状驱动电极组包括第一条状驱动电极、第二条状驱动电极和第三条状驱动电极，向各所述条状驱动电极组施加驱动电压包括：在第一时间点向所述第一条状驱动电极和所述第三条状驱动电极施加驱动电压以驱动所述第一条状驱动电极和所述第三条状驱动电极对应的所述压电材料层发出超声波；以及在第二时间点向所述第二条状驱动电极施加驱动电压以使所述第二条状驱动电极对应的所述压电材料层发出超声波的相位延迟于所述第一条状驱动电极和所述第三条状驱动电极对应的所述压电材料层发出超声波的相位，所述第二时间点延迟于所述第一时间点。For example, in a driving method of a fingerprint recognition structure provided in an embodiment of the present disclosure, N is a positive integer greater than or equal to 3, each of the strip-shaped driving electrode groups includes a first strip-shaped driving electrode, a second strip-shaped driving electrode and a third strip-shaped driving electrode, and applying a driving voltage to each of the strip-shaped driving electrode groups includes: applying a driving voltage to the first strip-shaped driving electrode and the third strip-shaped driving electrode at a first time point to drive the piezoelectric material layer corresponding to the first strip-shaped driving electrode and the third strip-shaped driving electrode to emit an ultrasonic wave; and applying a driving voltage to the second strip-shaped driving electrode at a second time point so that the phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the second strip-shaped driving electrode is delayed than the phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the first strip-shaped driving electrode and the third strip-shaped driving electrode, and the second time point is delayed than the first time point.
例如，在本公开一实施例提供的指纹识别结构的驱动方法中，所述指纹识别结构还包括：多个接收电路，所述多个接收电路分别与所述多个条状接收电极电性相连，其中，各所述接收电路包括：存储电容，包括第一极和第二极；第一薄膜晶体管，包括第一栅极、第一源极和第一漏极；以及信号读取单元，所述条状接收电极、所述第一源极和所述第一极连接到存储节点，所述信号读取单元被配置读取所述存储电容中存储的电信号，利用所述压电材料层接收被指纹反射的超声波并通过所述条状接收电极输出相应的指纹电信号包括：在向所述条状驱动电极组施加驱动电压以驱动所述条状驱动电极组对应的压电材料层发出超声波时，向所述第一栅极施加开启信号以打开所述第一薄膜晶体管；根据表面回波到达时间，向所述第一漏极施加偏置电压，以对所述条状接收电极上的指纹电信号进行抬升，并将抬升后的所述指纹电信号存储在所述存储电容中；以及使用所述信号读取单元将抬升后的所述指纹电信号读出。For example, in a driving method of a fingerprint recognition structure provided in an embodiment of the present disclosure, the fingerprint recognition structure further includes: a plurality of receiving circuits, the plurality of receiving circuits being electrically connected to the plurality of strip receiving electrodes respectively, wherein each of the receiving circuits includes: a storage capacitor including a first electrode and a second electrode; a first thin film transistor including a first gate electrode, a first source electrode and a first drain electrode; and a signal reading unit, the strip receiving electrode, the first source electrode and the first electrode being connected to a storage node, the signal reading unit being configured to read the electrical signal stored in the storage capacitor, and using the piezoelectric material layer to receive the ultrasonic wave reflected by the fingerprint and outputting the corresponding fingerprint electrical signal through the strip receiving electrode including: when applying a driving voltage to the strip driving electrode group to drive the piezoelectric material layer corresponding to the strip driving electrode group to emit an ultrasonic wave, applying a start signal to the first gate electrode to turn on the first thin film transistor; applying a bias voltage to the first drain electrode according to a surface echo arrival time to lift the fingerprint electrical signal on the strip receiving electrode, and storing the lifted fingerprint electrical signal in the storage capacitor; and reading out the lifted fingerprint electrical signal using the signal reading unit.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
为了更清楚地说明本公开实施例的技术方案，下面将对实施例的附图作简单地介绍，显而易见地，下面描述中的附图仅仅涉及本公开的一些实施例，而非对本公开的限制。In order to more clearly illustrate the technical solutions of the embodiments of the present disclosure, the drawings of the embodiments will be briefly introduced below. Obviously, the drawings in the following description only relate to some embodiments of the present disclosure, rather than limiting the present disclosure.
图1为一种指纹识别结构发射超声波的示意图；FIG1 is a schematic diagram of a fingerprint recognition structure emitting ultrasonic waves;
图2为一种指纹识别结构接收超声波的示意图；FIG2 is a schematic diagram of a fingerprint recognition structure receiving ultrasonic waves;
图3为一种指纹识别结构进行指纹识别的示意图；FIG3 is a schematic diagram of a fingerprint recognition structure performing fingerprint recognition;
图4为一种指纹识别结构的结构示意图；FIG4 is a schematic diagram of a fingerprint recognition structure;
图5为根据本公开一实施例提供的一种指纹识别结构的平面示意图；FIG5 is a schematic plan view of a fingerprint recognition structure provided according to an embodiment of the present disclosure;
图6A为本公开一实施例提供的一种指纹识别结构实现超声波聚焦的示意图；FIG6A is a schematic diagram of a fingerprint recognition structure for realizing ultrasonic focusing according to an embodiment of the present disclosure;
图6B为本公开一实施例提供的另一种指纹识别结构实现超声波聚焦的示意图；FIG6B is a schematic diagram of another fingerprint recognition structure for realizing ultrasonic focusing according to an embodiment of the present disclosure;
图7A为本公开一实施例提供的一种指纹识别结构发出的超声波聚焦到指纹的谷的示意图；FIG7A is a schematic diagram of focusing ultrasonic waves emitted by a fingerprint recognition structure on the valley of a fingerprint provided by an embodiment of the present disclosure;
图7B为本公开一实施例提供的一种指纹识别结构发出的超声波聚焦到指纹的脊的示意图；FIG7B is a schematic diagram of focusing ultrasonic waves emitted by a fingerprint recognition structure on the ridges of a fingerprint provided by an embodiment of the present disclosure;
图8为根据本公开一实施例提供的另一种指纹识别结构的平面示意图；FIG8 is a schematic plan view of another fingerprint recognition structure provided according to an embodiment of the present disclosure;
图9为根据本公开一实施例提供的另一种指纹识别结构的平面示意图；FIG9 is a schematic plan view of another fingerprint recognition structure provided according to an embodiment of the present disclosure;
图10为根据本公开一实施例提供的一种指纹识别结构沿图5中AA方向的截面示意图；FIG10 is a schematic cross-sectional view of a fingerprint recognition structure along the AA direction in FIG5 according to an embodiment of the present disclosure;
图11为根据本公开一实施例提供的另一种指纹识别结构的平面示意图；FIG11 is a schematic plan view of another fingerprint recognition structure provided according to an embodiment of the present disclosure;
图12为根据本公开一实施例提供的一种指纹识别结构中接收电路的示意图；FIG12 is a schematic diagram of a receiving circuit in a fingerprint recognition structure according to an embodiment of the present disclosure;
图13为根据本公开一实施例提供的一种显示装置的结构示意图；FIG13 is a schematic structural diagram of a display device provided according to an embodiment of the present disclosure;
图14为根据本公开一实施例提供的一种显示装置的平面示意图；以及FIG14 is a schematic plan view of a display device according to an embodiment of the present disclosure; and
图15为根据本公开一实施例提供的一种指纹识别结构的驱动方法的流程图。FIG. 15 is a flowchart of a driving method of a fingerprint recognition structure provided according to an embodiment of the present disclosure.
具体实施方式Detailed ways
为使本公开实施例的目的、技术方案和优点更加清楚，下面将结合本公开实施例的附图，对本公开实施例的技术方案进行清楚、完整地描述。显然，所描述的实施例是本公开的一部分实施例，而不是全部的实施例。基于所描述的本公开的实施例，本领域普通技术人员在无需创造性劳动的前提下所获得的所有其他实施例，都属于本公开保护的范围。In order to make the purpose, technical solution and advantages of the embodiments of the present disclosure clearer, the technical solution of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.
除非另外定义，本公开使用的技术术语或者科学术语应当为本公开所属领域内具有一般技能的人士所理解的通常意义。本公开中使用的“第一”、“第二”以及类似的词语并不表示任何顺序、数量或者重要性，而只是用来区分不同的组成部分。“包括”或者“包含”等类似的词语意指出现该词前面的元件或者物件涵盖出现在该词后面列举的元件或者物件及其等同，而不排除其他元件或者物件。“连接”或者“相连”等类似的词语并非限定于物理的或者机械的连接，而是可以包括电性的连接，不管是直接的还是间接的。Unless otherwise defined, the technical terms or scientific terms used in the present disclosure should be understood by people with ordinary skills in the field to which the present disclosure belongs. "First", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect.
图1为一种指纹识别结构发射超声波的示意图；图2为一种指纹识别结构接收超声波的示意图。如图1所示，该指纹识别结构包括超声波传感器10；超声波传感器10包括上电极11、下电极12和位于上电极11和下电极12之间的压电层13；压电层13采用压电材料制作，可被电压激发产生逆压电效应。如图1所示，当上电极11和下电极12输入交变电压(AC电压)时(例如，上电极11接地，下电极12上施加交流方波)，压电层13因逆压电效应会发生形变或者带动压电层13的上方和下方的膜层一起振动，从而可产生超声波并向外发射。需要说明的是，当上电极11远离压电层13的一侧或者下电极12远离压电层13的一侧设置有空腔(例如空气腔)时，该超声波传感器发出的超声波会得到加强，从而可更好地将超声波发射出去。FIG1 is a schematic diagram of a fingerprint recognition structure emitting ultrasonic waves; FIG2 is a schematic diagram of a fingerprint recognition structure receiving ultrasonic waves. As shown in FIG1 , the fingerprint recognition structure includes an ultrasonic sensor 10; the ultrasonic sensor 10 includes an upper electrode 11, a lower electrode 12, and a piezoelectric layer 13 located between the upper electrode 11 and the lower electrode 12; the piezoelectric layer 13 is made of piezoelectric material and can be excited by voltage to produce an inverse piezoelectric effect. As shown in FIG1 , when an alternating voltage (AC voltage) is input to the upper electrode 11 and the lower electrode 12 (for example, the upper electrode 11 is grounded and an AC square wave is applied to the lower electrode 12), the piezoelectric layer 13 will deform due to the inverse piezoelectric effect or drive the film layers above and below the piezoelectric layer 13 to vibrate together, thereby generating ultrasonic waves and emitting them outward. It should be noted that when a cavity (for example, an air cavity) is provided on the side of the upper electrode 11 away from the piezoelectric layer 13 or the side of the lower electrode 12 away from the piezoelectric layer 13, the ultrasonic waves emitted by the ultrasonic sensor will be strengthened, so that the ultrasonic waves can be better emitted.
如图2所示，超声波传感器10发出的超声波被指纹500反射，反射回来的超声波在压电层会转化为交变电压；此时，将上电极11接地，下电极12则可作为接收电极，接收压电层产生的交变电压。由于指纹500包括谷510和脊520，它们对于超声波的反射能力不同(谷510对超声波的反射能力较强)，导致被谷510和脊520反射回来的超声波的强度不同。因此，可通过接收电极接收到的交变电压判断该超声波是被谷还是脊反射的超声波。As shown in FIG2 , the ultrasonic wave emitted by the ultrasonic sensor 10 is reflected by the fingerprint 500, and the reflected ultrasonic wave is converted into an alternating voltage in the piezoelectric layer; at this time, the upper electrode 11 is grounded, and the lower electrode 12 can be used as a receiving electrode to receive the alternating voltage generated by the piezoelectric layer. Since the fingerprint 500 includes valleys 510 and ridges 520, they have different reflection capabilities for ultrasonic waves (the valley 510 has a stronger reflection capability for ultrasonic waves), resulting in different intensities of ultrasonic waves reflected by the valleys 510 and ridges 520. Therefore, the alternating voltage received by the receiving electrode can be used to determine whether the ultrasonic wave is reflected by the valley or the ridge.
图3为一种指纹识别结构进行指纹识别的示意图。如图3所示，该指纹识别结构包括上电极11、多个下电极12、位于上电极11和多个下电极12之间的压电层13、位于上电极11远离压电层13的一侧的基板80和位于多个下电极12远离压电层13的一侧的保护层90；下电极12、压电层13和多个上电极11组成的超声波传感器10可发射超声波也可接受超声波，也就是说，该超声波传感器10即作为超声波发射传感器又作为超声波接收传感器。当指纹与基板80接触时，超声波传感器10发射的超声波被指纹500反射，反射回来的超声波在压电层会转化为交变电压；此时，将上电极11接地，多个下电极12则可作为接收电极，从而实现在不同的位置接收压电层产生的交变电压。由于指纹500包括谷510和脊520，它们对于超声波的反射能力不同(谷510对超声波的反射能力较强)，导致被谷510和脊520反射回来的超声波的强度不同。因此，可通过多个下电极12接收到的交变电压来得到该指纹500中谷和脊的位置信息，从而可实现指纹识别。FIG3 is a schematic diagram of a fingerprint recognition structure for fingerprint recognition. As shown in FIG3, the fingerprint recognition structure includes an upper electrode 11, a plurality of lower electrodes 12, a piezoelectric layer 13 located between the upper electrode 11 and the plurality of lower electrodes 12, a substrate 80 located on the side of the upper electrode 11 away from the piezoelectric layer 13, and a protective layer 90 located on the side of the plurality of lower electrodes 12 away from the piezoelectric layer 13; the ultrasonic sensor 10 composed of the lower electrode 12, the piezoelectric layer 13 and the plurality of upper electrodes 11 can transmit ultrasonic waves and receive ultrasonic waves, that is, the ultrasonic sensor 10 acts as both an ultrasonic transmitting sensor and an ultrasonic receiving sensor. When the fingerprint contacts the substrate 80, the ultrasonic wave emitted by the ultrasonic sensor 10 is reflected by the fingerprint 500, and the reflected ultrasonic wave is converted into an alternating voltage in the piezoelectric layer; at this time, the upper electrode 11 is grounded, and the plurality of lower electrodes 12 can be used as receiving electrodes, so as to realize receiving the alternating voltage generated by the piezoelectric layer at different positions. Since the fingerprint 500 includes valleys 510 and ridges 520, which have different reflection capabilities for ultrasound (the valleys 510 have stronger reflection capabilities for ultrasound), the intensities of ultrasound reflected by the valleys 510 and ridges 520 are different. Therefore, the position information of the valleys and ridges in the fingerprint 500 can be obtained through the alternating voltages received by the multiple lower electrodes 12, thereby realizing fingerprint recognition.
图4为一种指纹识别结构的结构示意图。如图4所示，上电极11、下电极12和压电层13可均制作在薄膜晶体管基板91的同一侧。该指纹识别结构还包括：偏置电阻60和绑定垫片70；偏置电阻60可用于校准电压，绑定垫片70可用于绑定外接的电路。FIG4 is a schematic diagram of a fingerprint recognition structure. As shown in FIG4, the upper electrode 11, the lower electrode 12 and the piezoelectric layer 13 can be made on the same side of the thin film transistor substrate 91. The fingerprint recognition structure also includes: a bias resistor 60 and a binding pad 70; the bias resistor 60 can be used to calibrate the voltage, and the binding pad 70 can be used to bind an external circuit.
目前，为了能够实现指纹识别，通常的指纹识别结构包括阵列设置的多个块状接收电极(上电极或者下电极)，各块状接收电极需要对应设置接收电路来对各接收电极接收到的电压信号进行接收和处理。而接收电路通常包括薄膜晶体管和电容等多层结构。一方面，该指纹识别结构的膜层较多(至少包括上电极、下电极、压电层、接收电路的多层结构)，导致光透过率较低，因此只能设置在显示面板之下，从而导致功耗较高；另一方面，该指纹识别结构的结构复杂，成本也较高。At present, in order to realize fingerprint recognition, the usual fingerprint recognition structure includes a plurality of block receiving electrodes (upper electrodes or lower electrodes) arranged in an array, and each block receiving electrode needs to be provided with a corresponding receiving circuit to receive and process the voltage signal received by each receiving electrode. The receiving circuit usually includes a multilayer structure such as a thin film transistor and a capacitor. On the one hand, the fingerprint recognition structure has many film layers (at least including a multilayer structure of an upper electrode, a lower electrode, a piezoelectric layer, and a receiving circuit), resulting in a low light transmittance, so it can only be set under the display panel, resulting in high power consumption; on the other hand, the fingerprint recognition structure has a complex structure and a high cost.
本公开实施例提供一种指纹识别结构、指纹识别结构的驱动方法、和显示装置。该指纹识别结构包括第一电极层、压电材料层和第二电极层；第一电极层包括间隔设置的多个条状接收电极；压电材料层设置在第一电极层的一侧；第二电极层设置在压电材料层远离第一电极层的一侧且包括沿间隔设置多个条状驱动电极，各条状驱动电极沿第一方向延伸，各条状接收电极沿第二方向延伸，第一方向和第二方向相交，多个条状驱动电极和多个条状接收电极相互交叉以形成多个交叉区域，压电材料层至少与多个交叉区域交叠。在各交叉区域中，条状驱动电极、条状接收电极和压电材料层形成超声波传感器。由此，该指纹识别结构可利用多个条状驱动电极、多个条状接收电极和压电材料层通过扫描驱动方式来分别实现超声波的发射和接收，并且不需要在每个交叉区域设置接收电路，因此可减少该指纹识别结构中膜层的数量以提高该指纹识别结构的光透过率，从而使得该指纹识别结构可设置在显示面板上，进而可降低该指纹识别结构的功耗。另外，该指纹识别结构的结构简单，成本较低。另一方面，该指纹识别结构还可通过分别驱动上述的多个条状驱动电极来实现超声波的聚焦(相增干涉)，从而既可提高发出的超声波在特定区域的强度或能量，从而提高该指纹识别性能，还可使得发出的超声波具有较好的方向性，从而可降低指纹的谷和脊之间的串扰，进而可提高指纹识别性能。The disclosed embodiments provide a fingerprint recognition structure, a driving method of the fingerprint recognition structure, and a display device. The fingerprint recognition structure includes a first electrode layer, a piezoelectric material layer, and a second electrode layer; the first electrode layer includes a plurality of strip receiving electrodes arranged at intervals; the piezoelectric material layer is arranged on one side of the first electrode layer; the second electrode layer is arranged on the side of the piezoelectric material layer away from the first electrode layer and includes a plurality of strip driving electrodes arranged at intervals, each strip driving electrode extends along a first direction, each strip receiving electrode extends along a second direction, the first direction and the second direction intersect, a plurality of strip driving electrodes and a plurality of strip receiving electrodes intersect each other to form a plurality of intersection regions, and the piezoelectric material layer at least overlaps with the plurality of intersection regions. In each intersection region, the strip driving electrode, the strip receiving electrode, and the piezoelectric material layer form an ultrasonic sensor. Thus, the fingerprint recognition structure can use a plurality of strip driving electrodes, a plurality of strip receiving electrodes, and a piezoelectric material layer to respectively realize the transmission and reception of ultrasonic waves through a scanning driving method, and there is no need to set a receiving circuit in each intersection region, so the number of film layers in the fingerprint recognition structure can be reduced to improve the light transmittance of the fingerprint recognition structure, so that the fingerprint recognition structure can be set on the display panel, thereby reducing the power consumption of the fingerprint recognition structure. In addition, the fingerprint recognition structure has a simple structure and low cost. On the other hand, the fingerprint recognition structure can also realize the focusing of ultrasound (phase-increment interference) by driving the above-mentioned multiple strip-shaped driving electrodes respectively, thereby increasing the intensity or energy of the emitted ultrasound in a specific area, thereby improving the fingerprint recognition performance, and making the emitted ultrasound have better directionality, thereby reducing the crosstalk between the valleys and ridges of the fingerprint, thereby improving the fingerprint recognition performance.
下面，结合附图对本公开实施例提供的指纹识别结构、指纹识别结构的驱动方法、和显示装置进行详细的说明。Hereinafter, the fingerprint recognition structure, the driving method of the fingerprint recognition structure, and the display device provided by the embodiments of the present disclosure will be described in detail with reference to the accompanying drawings.
本公开一实施例提供一种指纹识别结构。图5为根据本公开一实施例提供的一种指纹识别结构的平面示意图。如图5所示，该指纹识别结构100包括第一电极层110、压电材料层130和第二电极层120；第一电极层110包括间隔设置的多个条状接收电极112，例如，多个条状接收电极112可相互平行；压电材料层130设置在第一电极层110的一侧；第二电极层120设置在压电材料层130远离第一电极层110的一侧，也就是说，压电材料层130位于第一电极层110和第二电极层120之间；第二电极层120包括沿间隔设置多个条状驱动电极122，例如，多个条状驱动电极122可相互平行；各条状驱动电极122沿第一方向延伸，各条状接收电极112沿第二方向延伸，第一方向和第二方向相交，例如，第一方向和第二方向可相互垂直，多个条状驱动电极122和多个条状接收电极112相互交叉以形成多个交叉区域140，压电材料层130至少与多个交叉区域140交叠。需要说明的是，一个条状接收电极112与多个条状驱动电极122形成多个交叉区域140；另外，上述的“压电材料层至少与多个交叉区域交叠”是指压电材料层落入上述的多个交叉区域；也就是说，压电材料层包括位于多个交叉区域的部分，也可包括位于多个交叉区域之外的部分。An embodiment of the present disclosure provides a fingerprint recognition structure. FIG5 is a schematic plan view of a fingerprint recognition structure provided according to an embodiment of the present disclosure. As shown in FIG5, the fingerprint recognition structure 100 includes a first electrode layer 110, a piezoelectric material layer 130, and a second electrode layer 120; the first electrode layer 110 includes a plurality of strip-shaped receiving electrodes 112 arranged at intervals, for example, the plurality of strip-shaped receiving electrodes 112 may be parallel to each other; the piezoelectric material layer 130 is arranged on one side of the first electrode layer 110; the second electrode layer 120 is arranged on a side of the piezoelectric material layer 130 away from the first electrode layer 110, that is, the piezoelectric material layer 130 is located between the first electrode layer 110 and the second electrode layer 120. 0; the second electrode layer 120 includes a plurality of strip-shaped driving electrodes 122 arranged along the intervals, for example, the plurality of strip-shaped driving electrodes 122 may be parallel to each other; each strip-shaped driving electrode 122 extends along the first direction, each strip-shaped receiving electrode 112 extends along the second direction, the first direction and the second direction intersect, for example, the first direction and the second direction may be perpendicular to each other, the plurality of strip-shaped driving electrodes 122 and the plurality of strip-shaped receiving electrodes 112 intersect each other to form a plurality of intersection regions 140, and the piezoelectric material layer 130 at least overlaps with the plurality of intersection regions 140. It should be noted that one strip-shaped receiving electrode 112 forms a plurality of intersection regions 140 with a plurality of strip-shaped driving electrodes 122; in addition, the above-mentioned “the piezoelectric material layer at least overlaps with a plurality of intersection regions” means that the piezoelectric material layer falls into the above-mentioned plurality of intersection regions; that is, the piezoelectric material layer includes portions located in the plurality of intersection regions, and may also include portions located outside the plurality of intersection regions.
在本实施例提供的指纹识别结构中，在各交叉区域140，条状驱动电极122、条状接收电极112和压电材料层130形成超声波传感器。当该指纹识别结构进行指纹识别时，可将条状接收电极112接地，然后向多个条状驱动电极122中的一个施加交变电压，与该条状驱动电极122对应的压电材料层130因逆压电效应会发生形变或者带动压电材料层130的上方和下方的膜层一起振动，从而可产生超声波并向外发射；当发出的超声波被指纹反射回该指纹识别结构时，多个条状接收电极112与该条状驱动电极122对应的多个交叉区域140可接收反射回来的超声波，并可将与该条状驱动电极122对应的多个交叉区域140接收的超声波信号转化为电信号，并分别通过多个条状接收电极112输出，此时多个条状接收电极112输出的电信号为该条状驱动电极122对应的反射回波信息；当分别向多个条状驱动电极122施加交流方波以进行超声波发射和接收之后，可以获得整个指纹识别结构所对应的反射回波信息，从而可实现指纹识别。由此，该指纹识别结构可利用多个条状驱动电极、多个条状接收电极和压电材料层通过扫描驱动方式来分别实现超声波的发射和接收。因此，该指纹识别结构不需要在每个交叉区域设置接收电路，因此可减少该指纹识别结构中膜层的数量以提高该指纹识别结构的光透过率，从而使得该指纹识别结构可设置在显示面板上，进而可降低该指纹识别结构的功耗。另外，该指纹识别结构的结构简单，成本较低。In the fingerprint recognition structure provided in this embodiment, in each intersection area 140 , the strip-shaped driving electrodes 122 , the strip-shaped receiving electrodes 112 and the piezoelectric material layer 130 form an ultrasonic sensor. When the fingerprint recognition structure performs fingerprint recognition, the strip receiving electrode 112 can be grounded, and then an alternating voltage is applied to one of the multiple strip driving electrodes 122. The piezoelectric material layer 130 corresponding to the strip driving electrode 122 will be deformed due to the inverse piezoelectric effect or drive the film layers above and below the piezoelectric material layer 130 to vibrate together, thereby generating ultrasonic waves and emitting them outward; when the emitted ultrasonic waves are reflected back to the fingerprint recognition structure by the fingerprint, the multiple strip receiving electrodes 112 and the multiple cross regions 140 corresponding to the strip driving electrode 122 can receive the reflected ultrasonic waves, and can convert the ultrasonic signals received by the multiple cross regions 140 corresponding to the strip driving electrode 122 into electrical signals, and output them respectively through the multiple strip receiving electrodes 112. At this time, the electrical signals output by the multiple strip receiving electrodes 112 are the reflected echo information corresponding to the strip driving electrode 122; after applying alternating square waves to the multiple strip driving electrodes 122 for ultrasonic emission and reception, the reflected echo information corresponding to the entire fingerprint recognition structure can be obtained, thereby realizing fingerprint recognition. Thus, the fingerprint recognition structure can use multiple strip-shaped driving electrodes, multiple strip-shaped receiving electrodes and piezoelectric material layers to respectively realize the transmission and reception of ultrasonic waves through a scanning driving method. Therefore, the fingerprint recognition structure does not need to set a receiving circuit in each intersection area, so the number of film layers in the fingerprint recognition structure can be reduced to improve the light transmittance of the fingerprint recognition structure, so that the fingerprint recognition structure can be set on the display panel, thereby reducing the power consumption of the fingerprint recognition structure. In addition, the fingerprint recognition structure has a simple structure and low cost.
另一方面，该指纹识别结构还可通过分别驱动上述的多个条状驱动电极来实现超声波的聚焦(相增干涉)，从而既可提高发出的超声波在特定区域的强度或能量，从而提高该指纹识别性能，还可使得发出的超声波具有较好的方向性，从而可降低指纹的谷和脊之间的串扰，进而可提高指纹识别性能。当该指纹识别结构通过实现超声波的聚焦(相增干涉)来提高发出的超声波在特定区域或特定方向的强度或能量时，该指纹识别结构不仅可实现指纹识别，还可穿透手指，分辨该指纹是否为真的皮肤。On the other hand, the fingerprint recognition structure can also realize the focusing of ultrasonic waves (additive interference) by driving the above-mentioned multiple strip-shaped driving electrodes respectively, thereby increasing the intensity or energy of the emitted ultrasonic waves in a specific area, thereby improving the fingerprint recognition performance, and making the emitted ultrasonic waves have better directionality, thereby reducing the crosstalk between the valleys and ridges of the fingerprint, thereby improving the fingerprint recognition performance. When the fingerprint recognition structure realizes the focusing of ultrasonic waves (additive interference) to increase the intensity or energy of the emitted ultrasonic waves in a specific area or a specific direction, the fingerprint recognition structure can not only realize fingerprint recognition, but also penetrate the finger to distinguish whether the fingerprint is real skin.
例如，条状驱动电极的宽度范围可在50-70微米，条状接收电极的宽度范围可在50-70微米。两个相邻的条状驱动电极之间的间隔的宽度范围也在50-70微米，两个相邻的条状接收电极之间的间隔的宽度范围也在50-70微米。For example, the width of the strip driving electrode may be in the range of 50-70 microns, the width of the strip receiving electrode may be in the range of 50-70 microns, the width of the interval between two adjacent strip driving electrodes may also be in the range of 50-70 microns, and the width of the interval between two adjacent strip receiving electrodes may also be in the range of 50-70 microns.
图6A为本公开一实施例提供的一种指纹识别结构实现超声波聚焦的示意图。图6A示出了该指纹识别结构实现超声波聚焦的一个示例。如图6A所示，多个条状驱动电极122包括第一条状驱动电极1221和第二条状驱动电极1222。此时，在第一时间点向第一条状驱动电极1221施加驱动电压(例如交变电压)以驱动第一条状驱动电极1221对应的压电材料层发出超声波，然后在第二时间点向第二条状驱动电极1222施加驱动电压以使第二条状驱动电极1222对应的压电材料层发出超声波的相位延迟于第一条状驱动电极1221对应的压电材料层发出超声波的相位，从而可在第二条状驱动电极1222的正上方(或者位于第二条状驱动电极1222远离第一条状驱动电极1221的其他方位)实现超声波的聚焦(相增干涉)，即增强第二条状驱动电极1222正上方的超声波的强度或能量，从而使得该指纹识别结构不仅可实现指纹识别，还可穿透手指，分辨该指纹是否为真的皮肤。需要说明的是，上述的第二时间点延迟于第一时间点。需要说明的是，上述第二条状驱动电极对应的压电材料层发出超声波的相位与第一条状驱动电极对应的压电材料层发出超声波的相位的延迟量可根据实际情况进行测试得到。FIG6A is a schematic diagram of a fingerprint recognition structure for realizing ultrasonic focusing according to an embodiment of the present disclosure. FIG6A shows an example of the fingerprint recognition structure for realizing ultrasonic focusing. As shown in FIG6A , the plurality of strip-shaped driving electrodes 122 include a first strip-shaped driving electrode 1221 and a second strip-shaped driving electrode 1222 . At this time, a driving voltage (e.g., an alternating voltage) is applied to the first strip-shaped driving electrode 1221 at a first time point to drive the piezoelectric material layer corresponding to the first strip-shaped driving electrode 1221 to emit an ultrasonic wave, and then a driving voltage is applied to the second strip-shaped driving electrode 1222 at a second time point to delay the phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the second strip-shaped driving electrode 1222 after the phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the first strip-shaped driving electrode 1221, so that the ultrasonic wave can be focused (phase-increment interference) directly above the second strip-shaped driving electrode 1222 (or at other positions of the second strip-shaped driving electrode 1222 away from the first strip-shaped driving electrode 1221), that is, the intensity or energy of the ultrasonic wave directly above the second strip-shaped driving electrode 1222 is enhanced, so that the fingerprint recognition structure can not only realize fingerprint recognition, but also penetrate the finger to distinguish whether the fingerprint is real skin. It should be noted that the above-mentioned second time point is delayed from the first time point. It should be noted that the delay between the phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the second strip-shaped driving electrodes and the phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the first strip-shaped driving electrodes can be obtained through testing according to actual conditions.
图6B为本公开一实施例提供的另一种指纹识别结构实现超声波聚焦的示意图。图6B示出了该指纹识别结构实现超声波聚焦的另一个示例。如图6B所示，多个条状驱动电极122包括第一条状驱动电极1221、第二条状驱动电极1222和第三条状驱动电极1223。此时，在第一时间点向第一条状驱动电极1221和第三条状驱动电极1223施加驱动电压以驱动第一条状驱动电极1221和第三条状驱动电极1223对应的压电材料层发出超声波；以及在第二时间点向第二条状驱动电极1222施加驱动电压以使第二条状驱动电极1222对应的压电材料层发出超声波的相位延迟于第一条状驱动电极1221和第三条状驱动电极1223对应的压电材料层发出超声波的相位，从而可在第二条状驱动电极1222的正上方实现超声波的聚焦(相增干涉)，即增强第二条状驱动电极1222正上方的超声波的强度或能量，从而使得该指纹识别结构不仅可实现指纹识别，还可穿透手指，分辨该指纹是否为真的皮肤。FIG6B is a schematic diagram of another fingerprint recognition structure provided by an embodiment of the present disclosure to realize ultrasonic focusing. FIG6B shows another example of the fingerprint recognition structure realizing ultrasonic focusing. As shown in FIG6B , the plurality of strip-shaped driving electrodes 122 include a first strip-shaped driving electrode 1221 , a second strip-shaped driving electrode 1222 , and a third strip-shaped driving electrode 1223 . At this time, at a first time point, a driving voltage is applied to the first strip driving electrode 1221 and the third strip driving electrode 1223 to drive the piezoelectric material layer corresponding to the first strip driving electrode 1221 and the third strip driving electrode 1223 to emit ultrasonic waves; and at a second time point, a driving voltage is applied to the second strip driving electrode 1222 to delay the phase of the ultrasonic waves emitted by the piezoelectric material layer corresponding to the second strip driving electrode 1222 than the phase of the ultrasonic waves emitted by the piezoelectric material layer corresponding to the first strip driving electrode 1221 and the third strip driving electrode 1223, so that the focusing (phase enhancement interference) of the ultrasonic waves can be achieved directly above the second strip driving electrode 1222, that is, the intensity or energy of the ultrasonic waves directly above the second strip driving electrode 1222 is enhanced, so that the fingerprint recognition structure can not only realize fingerprint recognition, but also penetrate the finger and distinguish whether the fingerprint is real skin.
例如，在图6A和图6B所示的将两个以上的条状驱动电极进行分别驱动，以发射超声波，并使超声波聚焦在延迟驱动的条状驱动电极的正上方。多个条状接收电极构成的超声波接收元件可接收反射回波，此时多个条状接收电极输出的电信号为延迟驱动的条状驱动电极对应的反射回波信息。For example, as shown in FIG6A and FIG6B, two or more strip-shaped driving electrodes are driven separately to emit ultrasonic waves, and the ultrasonic waves are focused directly above the delayed-driven strip-shaped driving electrodes. The ultrasonic receiving element composed of multiple strip-shaped receiving electrodes can receive reflected echoes, and the electrical signals output by the multiple strip-shaped receiving electrodes are the reflected echo information corresponding to the delayed-driven strip-shaped driving electrodes.
需要说明的是，当采用如图6A或图6B所示的方法驱动多个条状驱动电极时，可以2个或2个以上的条状驱动电极作为一组条状驱动电极组，各条状驱动电极组内可按照图6A或图6B所示的方法进行延迟驱动，但是不同的条状驱动电极组进行分别驱动，例如扫描驱动。It should be noted that when a plurality of strip driving electrodes are driven by the method shown in FIG6A or FIG6B , two or more strip driving electrodes can be used as a group of strip driving electrode groups, and each strip driving electrode group can be delayed driven according to the method shown in FIG6A or FIG6B , but different strip driving electrode groups are driven separately, such as scanning drive.
图7A为本公开一实施例提供的一种指纹识别结构发出的超声波聚焦到指纹的谷的示意图；图7B为本公开一实施例提供的一种指纹识别结构发出的超声波聚焦到指纹的脊的示意图。FIG7A is a schematic diagram of an ultrasonic wave emitted by a fingerprint recognition structure provided by an embodiment of the present disclosure focusing on the valley of a fingerprint; FIG7B is a schematic diagram of an ultrasonic wave emitted by a fingerprint recognition structure provided by an embodiment of the present disclosure focusing on the ridge of a fingerprint.
如图7A所示，当采用上述的指纹识别结构发出的超声聚焦到指纹500的谷510时，谷510反射的超声波的能量或强度更大；如图7B所示，当采用上述的指纹识别结构发出的超声聚焦到指纹500的脊520时，脊520反射的超声波的能量或强度更小。因此，指纹500的谷510和脊520反射的超声波的强度和能量的差值也更大，从而有利于提高指纹识别性能。另一方面，如图7A和7B所示，该指纹识别结构发出的超声波具有较好的方向性，从而可降低指纹的谷和脊之间的串扰，进而可提高指纹识别性能。As shown in FIG7A , when the ultrasound emitted by the above-mentioned fingerprint recognition structure is focused on the valley 510 of the fingerprint 500, the energy or intensity of the ultrasound reflected by the valley 510 is greater; as shown in FIG7B , when the ultrasound emitted by the above-mentioned fingerprint recognition structure is focused on the ridge 520 of the fingerprint 500, the energy or intensity of the ultrasound reflected by the ridge 520 is smaller. Therefore, the difference in the intensity and energy of the ultrasound reflected by the valley 510 and the ridge 520 of the fingerprint 500 is also greater, which is conducive to improving the fingerprint recognition performance. On the other hand, as shown in FIGS. 7A and 7B , the ultrasound emitted by the fingerprint recognition structure has good directivity, thereby reducing the crosstalk between the valley and the ridge of the fingerprint, thereby improving the fingerprint recognition performance.
例如，在一些示例中，压电材料层130并非整层结构，而是包括间隔设置的子压电材料层132，各子压电材料层132沿第一方向或第二方向延伸，从而可降低不同的交叉区域对应的超声波传感器之间的相互串扰。图8为根据本公开一实施例提供的另一种指纹识别结构的平面示意图。如图8所示，压电材料层130包括间隔设置的子压电材料层132，各子压电材料层132沿第二方向延伸。也就是说，多个子压电材料层132与多个条状接收电极112一一对应设置。当然，多个子压电材料层也可沿第一方向延伸并且与多个条状驱动电极一一对应设置。For example, in some examples, the piezoelectric material layer 130 is not a whole layer structure, but includes spaced-apart sub-piezoelectric material layers 132, each of which extends along the first direction or the second direction, thereby reducing the mutual crosstalk between ultrasonic sensors corresponding to different intersection areas. FIG8 is a plan schematic diagram of another fingerprint recognition structure provided according to an embodiment of the present disclosure. As shown in FIG8, the piezoelectric material layer 130 includes spaced-apart sub-piezoelectric material layers 132, each of which extends along the second direction. In other words, a plurality of sub-piezoelectric material layers 132 are arranged in a one-to-one correspondence with a plurality of strip-shaped receiving electrodes 112. Of course, a plurality of sub-piezoelectric material layers may also extend along the first direction and be arranged in a one-to-one correspondence with a plurality of strip-shaped driving electrodes.
图9为根据本公开一实施例提供的另一种指纹识别结构的平面示意图。如图9所示，压电材料层130包括多个子压电材料块134，多个子压电材料块134与多个交叉区域140一一对应设置，从而可进一步降低不同的交叉区域对应的超声波传感器之间的相互串扰。Fig. 9 is a schematic plan view of another fingerprint recognition structure provided according to an embodiment of the present disclosure. As shown in Fig. 9, the piezoelectric material layer 130 includes a plurality of piezoelectric material sub-blocks 134, and the plurality of piezoelectric material sub-blocks 134 are arranged in a one-to-one correspondence with the plurality of cross regions 140, thereby further reducing the mutual crosstalk between the ultrasonic sensors corresponding to different cross regions.
需要说明的是，当压电材料层采用如图8或9所示的结构时，不同子压电材料层之间的间隔或者不同子压电材料块之间的间隔可用绝缘材料，例如树脂填充。例如，不同子压电材料层之间的间隔或者不同子压电材料块之间的间隔还可用弹性绝缘材料填充，从而有利于交叉区域对应的压电材料层振动。It should be noted that when the piezoelectric material layer adopts the structure shown in Figure 8 or 9, the intervals between different sub-piezoelectric material layers or the intervals between different sub-piezoelectric material blocks can be filled with insulating materials, such as resin. For example, the intervals between different sub-piezoelectric material layers or the intervals between different sub-piezoelectric material blocks can also be filled with elastic insulating materials, thereby facilitating the vibration of the piezoelectric material layer corresponding to the cross region.
图10为根据本公开一实施例提供一种指纹识别结构沿图5中AA方向的截面示意图。如图10所示，第二电极层120还包括挡墙124，位于相邻的两个条状驱动电极122之间。为了使得该指纹识别结构100对超声波具有较高的接收灵敏度，压电材料层130通常采用PVDF(聚偏氟乙烯)等压电电压常数较高的压电材料制作；而PVDF(聚偏氟乙烯)等压电电压常数较高的压电材料需要较高的驱动电压，以产生具有较高强度的超声波。因此第二电极层120需要制作得较厚，例如，大于10微米，从而适于加载较高的电压。通过上述的挡墙124，可先在压电材料层130远离第一电极层110的一侧形成图案化的金属层，该金属层无需制作得较厚；然后利用挡墙124和电镀工艺在该图案化的金属层上电镀金属层，从而得到厚度较厚的第二电极层。需要说明的是，在电镀工艺中，在电场的作用下，只有图案化的金属层上才能继续生长金属层，挡墙可以起到分隔作用，防止电镀的金属层互相连接。FIG10 is a schematic cross-sectional view of a fingerprint recognition structure along the AA direction in FIG5 according to an embodiment of the present disclosure. As shown in FIG10 , the second electrode layer 120 further includes a retaining wall 124, which is located between two adjacent strip-shaped driving electrodes 122. In order to make the fingerprint recognition structure 100 have a higher receiving sensitivity to ultrasonic waves, the piezoelectric material layer 130 is usually made of a piezoelectric material with a higher piezoelectric voltage constant such as PVDF (polyvinylidene fluoride); and a piezoelectric material with a higher piezoelectric voltage constant such as PVDF (polyvinylidene fluoride) requires a higher driving voltage to generate ultrasonic waves with a higher intensity. Therefore, the second electrode layer 120 needs to be made thicker, for example, greater than 10 microns, so as to be suitable for loading a higher voltage. Through the above-mentioned retaining wall 124, a patterned metal layer can be first formed on the side of the piezoelectric material layer 130 away from the first electrode layer 110, and the metal layer does not need to be made thicker; then the retaining wall 124 and the electroplating process are used to electroplate the metal layer on the patterned metal layer, thereby obtaining a thicker second electrode layer. It should be noted that in the electroplating process, under the action of the electric field, the metal layer can continue to grow only on the patterned metal layer, and the retaining wall can play a separating role to prevent the electroplated metal layers from connecting to each other.
例如，在一些示例中，压电材料层130还可为ALN(氮化铝)、PZT(锆钛酸铅压电陶瓷)等压电材料制作。例如，压电材料层可通过溶胶凝胶法制作。For example, in some examples, the piezoelectric material layer 130 may also be made of piezoelectric materials such as ALN (aluminum nitride), PZT (lead zirconate titanate piezoelectric ceramics), etc. For example, the piezoelectric material layer may be made by a sol-gel method.
例如，在一些示例中，如图10所示，各条状驱动电极122可包括层叠设置的第一子驱动电极1291和第二子驱动电极1292，各第一子驱动电极1291和第二子驱动电极1292同样为沿第一方向延伸的条状子电极。第一子驱动电极1291可为采用图案化工艺形成的金属层，第二子驱动电极1292可为采用电镀工艺形成的金属层。For example, in some examples, as shown in FIG10 , each strip-shaped driving electrode 122 may include a first sub-driving electrode 1291 and a second sub-driving electrode 1292 that are stacked, and each of the first sub-driving electrode 1291 and the second sub-driving electrode 1292 is also a strip-shaped sub-electrode extending along the first direction. The first sub-driving electrode 1291 may be a metal layer formed by a patterning process, and the second sub-driving electrode 1292 may be a metal layer formed by an electroplating process.
例如，在一些示例中，挡墙124在垂直于压电材料层130的方向上的尺寸范围为1-20微米，第二电极层120在垂直于压电材料层130的方向上的尺寸范围为1-20微米。由于第二电极层120的厚度较厚，因此第二电极层120的电阻较小，且表面的均一性较好，从而即可实现较好的电学性能(例如，加载较高的驱动电压)，还可实现超声波的均匀反射，有利于指纹的谷和脊的识别。For example, in some examples, the size of the retaining wall 124 in the direction perpendicular to the piezoelectric material layer 130 ranges from 1 to 20 microns, and the size of the second electrode layer 120 in the direction perpendicular to the piezoelectric material layer 130 ranges from 1 to 20 microns. Since the second electrode layer 120 is thicker, the resistance of the second electrode layer 120 is smaller, and the surface uniformity is better, so that better electrical performance (for example, a higher driving voltage can be loaded) can be achieved, and uniform reflection of ultrasonic waves can be achieved, which is beneficial to the recognition of valleys and ridges of fingerprints.
例如，在一些示例中，条状驱动电极的材料包括铜、银和铝中的一种或多种。条状接收电极的材料也可包括铜、银和铝中的一种或多种。For example, in some examples, the material of the strip-shaped driving electrodes includes one or more of copper, silver, and aluminum. The material of the strip-shaped receiving electrodes may also include one or more of copper, silver, and aluminum.
例如，挡墙124可采用树脂材料制作，从而可具有较低的成本和较低的制作难度。For example, the retaining wall 124 may be made of resin material, which may have lower cost and lower manufacturing difficulty.
例如，在一些示例中，如图10所示，该指纹识别结构100还包括：基板180，位于第一电极层110远离压电材料层130的一侧，且包括被配置为与指纹接触的接触面181。当指纹与接触面181接触时，该指纹识别结构100可通过向指纹发射超声波，并接收被指纹500反射回来的超声波(回波)来实现对指纹的识别。当然，本公开实施例包括但不限于此，当该指纹识别结构100用于显示装置时，基板180可为显示装置的盖板。For example, in some examples, as shown in FIG10 , the fingerprint recognition structure 100 further includes: a substrate 180, which is located on a side of the first electrode layer 110 away from the piezoelectric material layer 130 and includes a contact surface 181 configured to contact the fingerprint. When the fingerprint contacts the contact surface 181, the fingerprint recognition structure 100 can recognize the fingerprint by emitting ultrasonic waves to the fingerprint and receiving ultrasonic waves (echoes) reflected back by the fingerprint 500. Of course, the embodiments of the present disclosure include but are not limited to this. When the fingerprint recognition structure 100 is used for a display device, the substrate 180 can be a cover plate of the display device.
例如，在一些示例中，基板180包括玻璃基板。For example, in some examples, substrate 180 includes a glass substrate.
例如，在一些示例中，基板180包括聚酰亚胺基板。由此，基板180可制作得较薄，基板180的厚度范围为5-20微米。需要说明的是，当基板180为聚酰亚胺基板时，可先在玻璃基板上形成聚酰亚胺层，然后在聚酰亚胺层形成第一电极层、压电材料层、第二电极层等层结构，最后再将玻璃基板去除，从而得到该示例所描述的指纹识别结构。For example, in some examples, the substrate 180 includes a polyimide substrate. Thus, the substrate 180 can be made thinner, and the thickness of the substrate 180 ranges from 5 to 20 microns. It should be noted that when the substrate 180 is a polyimide substrate, a polyimide layer can be first formed on a glass substrate, and then a first electrode layer, a piezoelectric material layer, a second electrode layer and other layer structures can be formed on the polyimide layer, and finally the glass substrate can be removed to obtain the fingerprint recognition structure described in this example.
例如，在一些示例中，如图10所示，该指纹识别结构100还包括：保护层190，位于第二电极层120远离压电材料层130的一侧。保护层190可对第二电极层120中的条状驱动电极122进行保护。例如，保护层190的材料可为环氧树脂。For example, in some examples, as shown in FIG10 , the fingerprint recognition structure 100 further includes: a protective layer 190, which is located on a side of the second electrode layer 120 away from the piezoelectric material layer 130. The protective layer 190 can protect the strip-shaped driving electrodes 122 in the second electrode layer 120. For example, the material of the protective layer 190 can be epoxy resin.
图11为根据本公开一实施例提供的一种指纹识别结构的平面示意图。如图11所示，该指纹识别结构100还包括多个接收电路150，多个接收电路150分别与多个条状接收电极112电性相连，指纹识别结构100包括有效识别区101和位于有效识别区101周边的边缘区102，多个交叉区域130位于有效识别区101，多个接收电路150位于边缘区102。此时，对应多个交叉区域130的一个条状接收电极112只与一个接收电路150相连，而无需在每个交叉区域130设置一个接收电路150，从而可大大减少该指纹识别结构的膜层的数量，并简化该指纹识别结构的结构。需要说明的是，上述的有效识别区是该指纹识别结构可以进行指纹识别的区域；当指纹位于该有效识别区时，该指纹识别结构可对该指纹进行识别；而边缘区不能进行指纹识别。FIG11 is a schematic plan view of a fingerprint recognition structure provided according to an embodiment of the present disclosure. As shown in FIG11 , the fingerprint recognition structure 100 further includes a plurality of receiving circuits 150, and the plurality of receiving circuits 150 are electrically connected to a plurality of strip-shaped receiving electrodes 112, respectively. The fingerprint recognition structure 100 includes an effective recognition area 101 and an edge area 102 located around the effective recognition area 101, and a plurality of intersection areas 130 are located in the effective recognition area 101, and a plurality of receiving circuits 150 are located in the edge area 102. At this time, a strip-shaped receiving electrode 112 corresponding to a plurality of intersection areas 130 is only connected to a receiving circuit 150, and there is no need to set a receiving circuit 150 in each intersection area 130, thereby greatly reducing the number of film layers of the fingerprint recognition structure and simplifying the structure of the fingerprint recognition structure. It should be noted that the above-mentioned effective recognition area is an area where the fingerprint recognition structure can perform fingerprint recognition; when the fingerprint is located in the effective recognition area, the fingerprint recognition structure can recognize the fingerprint; and the edge area cannot perform fingerprint recognition.
图12为根据本公开一实施例提供一种接收电路的示意图。如图12所示，该接收电路150包括存储电容151、第一薄膜晶体管152和信号读取单元153。存储电容151包括第一极1511和第二极1512；第一薄膜晶体管152包括第一栅极1521、第一源极1522和第一漏极1523；条状接收电极112、第一源极1522和第一极1511连接到存储节点154，从而可将条状接收电极112接收到的指纹电信号存储在存储电容151中，信号读取单元153被配置读取存储电容151中存储的指纹电信号(电信号)，即条状接收电极112接收到的电压信号。另外，在将条状接收电极112接收到的指纹电信号存储在存储电容151的过程中，可通过向第一漏极1523施加偏置电压，从而使得接收电极112接收到的交变电压进行抬升，得到对比度较大的检测信号。FIG12 is a schematic diagram of a receiving circuit provided according to an embodiment of the present disclosure. As shown in FIG12, the receiving circuit 150 includes a storage capacitor 151, a first thin film transistor 152 and a signal reading unit 153. The storage capacitor 151 includes a first electrode 1511 and a second electrode 1512; the first thin film transistor 152 includes a first gate 1521, a first source 1522 and a first drain 1523; the strip receiving electrode 112, the first source 1522 and the first electrode 1511 are connected to the storage node 154, so that the fingerprint electrical signal received by the strip receiving electrode 112 can be stored in the storage capacitor 151, and the signal reading unit 153 is configured to read the fingerprint electrical signal (electrical signal) stored in the storage capacitor 151, that is, the voltage signal received by the strip receiving electrode 112. In addition, in the process of storing the fingerprint electrical signal received by the strip receiving electrode 112 in the storage capacitor 151, a bias voltage can be applied to the first drain 1523, so that the alternating voltage received by the receiving electrode 112 is raised, and a detection signal with a large contrast is obtained.
例如，在一些示例中，第一薄膜晶体管152为氧化物薄膜晶体管，例如铟镓锌氧化物(IGZO)薄膜晶体管。当将条状接收电极112接收到的指纹电信号存储在存储电容151之后，存储节点154的电压会从条状接收电极112所对应的压电结构和第一薄膜晶体管进行漏电，由于该压电结构的漏电流量级为10-15A，低温多晶硅薄膜晶体管的漏电流量级为10-12A，氧化物薄膜晶体管，例如IGZO薄膜晶体管的漏电流量级为10-15A，当第一薄膜晶体管152为氧化物薄膜晶体管，可降低该驱动电路的整体漏电流，从而保证了存储节点154上的指纹电信号的稳定性，从而可提高该指纹识别结构的指纹识别性能。For example, in some examples, the first thin film transistor 152 is an oxide thin film transistor, such as an indium gallium zinc oxide (IGZO) thin film transistor. After the fingerprint electrical signal received by the strip receiving electrode 112 is stored in the storage capacitor 151, the voltage of the storage node 154 will leak from the piezoelectric structure corresponding to the strip receiving electrode 112 and the first thin film transistor. Since the leakage current of the piezoelectric structure is10-15A , the leakage current of the low temperature polysilicon thin film transistor is10-12A , and the leakage current of the oxide thin film transistor, such as the IGZO thin film transistor, is10-15A , when the first thin film transistor 152 is an oxide thin film transistor, the overall leakage current of the driving circuit can be reduced, thereby ensuring the stability of the fingerprint electrical signal on the storage node 154, thereby improving the fingerprint recognition performance of the fingerprint recognition structure.
例如，在一些示例中，信号读取单元153包括：第二薄膜晶体管155和第三薄膜晶体管156；第二薄膜晶体管155包括第二栅极1551、第二源极1552和第二漏极1553；第三薄膜晶体管156包括第三栅极1561、第三源极1562和第三漏极1563。第二栅极1551连接至存储节点154，第二漏极1553连接至第三源极1562，第二源极1552被配置为施加固定电压，第三栅极1561被配置为施加读出指令信号，第三漏极1563被配置为输出信号，从而可读取存储电容151中存储的检测信号(电信号)。For example, in some examples, the signal reading unit 153 includes: a second thin film transistor 155 and a third thin film transistor 156; the second thin film transistor 155 includes a second gate 1551, a second source 1552, and a second drain 1553; the third thin film transistor 156 includes a third gate 1561, a third source 1562, and a third drain 1563. The second gate 1551 is connected to the storage node 154, the second drain 1553 is connected to the third source 1562, the second source 1552 is configured to apply a fixed voltage, the third gate 1561 is configured to apply a readout instruction signal, and the third drain 1563 is configured to output a signal, so that the detection signal (electrical signal) stored in the storage capacitor 151 can be read.
本公开一实施例还提供一种显示装置。图13为根据本公开一实施例提供的显示装置的结构示意图。该显示装置包括显示模组200和上述实施例提供的指纹识别结构100。由于该指纹识别结构可利用多个条状驱动电极、多个条状接收电极和压电材料层通过扫描驱动方式来分别实现超声波的发射和接收，不需要在每个交叉区域设置接收电路，因此可减少该指纹识别结构中膜层的数量以提高该指纹识别结构的光透过率，因此该显示装置可将该指纹识别结构设置在显示面板的发光侧，进而可降低该指纹识别结构的功耗，进而降低整个显示装置的功耗，并延长续航时间。另外，该指纹识别结构的结构简单，因此该显示装置的成本较低。另一方面，该显示装置还可通过分别驱动上述的多个条状驱动电极来实现超声波的聚焦(相增干涉)，从而既可提高发出的超声波在特定区域的强度或能量，从而提高该指纹识别性能，还可使得发出的超声波具有较好的方向性，从而可降低指纹的谷和脊之间的串扰，进而可提高指纹识别性能。当该指纹识别结构通过实现超声波的聚焦(相增干涉)来提高发出的超声波在特定区域或特定方向的强度或能量时，该指纹识别结构不仅可实现指纹识别，还可穿透手指，分辨该指纹是否为真的皮肤。具体可参见上述实施例的相关描述，在此不在赘述。An embodiment of the present disclosure also provides a display device. FIG. 13 is a schematic diagram of the structure of a display device provided according to an embodiment of the present disclosure. The display device includes a display module 200 and a fingerprint recognition structure 100 provided in the above embodiment. Since the fingerprint recognition structure can use a plurality of strip-shaped driving electrodes, a plurality of strip-shaped receiving electrodes and a piezoelectric material layer to respectively realize the emission and reception of ultrasonic waves through a scanning drive mode, it is not necessary to set a receiving circuit in each intersection area, so the number of film layers in the fingerprint recognition structure can be reduced to improve the light transmittance of the fingerprint recognition structure. Therefore, the display device can set the fingerprint recognition structure on the light-emitting side of the display panel, thereby reducing the power consumption of the fingerprint recognition structure, thereby reducing the power consumption of the entire display device, and extending the battery life. In addition, the structure of the fingerprint recognition structure is simple, so the cost of the display device is low. On the other hand, the display device can also realize the focusing of ultrasonic waves (phase-increment interference) by driving the above-mentioned plurality of strip-shaped driving electrodes respectively, thereby increasing the intensity or energy of the emitted ultrasonic waves in a specific area, thereby improving the fingerprint recognition performance, and also making the emitted ultrasonic waves have better directionality, thereby reducing the crosstalk between the valleys and ridges of the fingerprint, thereby improving the fingerprint recognition performance. When the fingerprint recognition structure increases the intensity or energy of the emitted ultrasonic wave in a specific area or specific direction by focusing the ultrasonic wave (additive interference), the fingerprint recognition structure can not only realize fingerprint recognition, but also penetrate the finger to distinguish whether the fingerprint is real skin. For details, please refer to the relevant description of the above embodiment, which will not be repeated here.
例如，在一些示例中，显示模组200包括发光侧220，指纹识别结构100位于显示模组200的发光侧220。For example, in some examples, the display module 200 includes a light emitting side 220 , and the fingerprint recognition structure 100 is located on the light emitting side 220 of the display module 200 .
例如，在一些示例中，显示模组200为有机发光二极管(OLED)显示模组。如图13所示，显示模组200包括薄膜晶体管250、阳极260、发光层270和阴极280。薄膜晶体管250包括漏极253，阳极260与漏极253电性相连，发光层270设置在阳极260和阴极280之间。For example, in some examples, the display module 200 is an organic light emitting diode (OLED) display module. As shown in FIG13 , the display module 200 includes a thin film transistor 250, an anode 260, a light emitting layer 270, and a cathode 280. The thin film transistor 250 includes a drain electrode 253, the anode 260 is electrically connected to the drain electrode 253, and the light emitting layer 270 is disposed between the anode 260 and the cathode 280.
例如，该薄膜晶体管250还包括栅极251、源极252和有源层254等层结构。For example, the thin film transistor 250 further includes a gate electrode 251 , a source electrode 252 , an active layer 254 and other layer structures.
例如，在一些示例中，显示模组200包括黑矩阵或像素限定层230，条状驱动电极122和条状接收电极112在显示模组200上的正投影与黑矩阵或像素限定层230至少部分交叠。For example, in some examples, the display module 200 includes a black matrix or a pixel defining layer 230 , and the orthographic projections of the strip-shaped driving electrodes 122 and the strip-shaped receiving electrodes 112 on the display module 200 at least partially overlap with the black matrix or the pixel defining layer 230 .
图14为根据本公开一实施例提供的一种显示装置的平面示意图。如图14所示，显示模组200包括显示区201和位于显示区201的周边区202，指纹识别结构100还包括：多个接收电路，多个接收电路分别与多个条状接收电极电性相连，各接收电路包括：存储电容，包括第一极和第二极；第一薄膜晶体管，包括第一栅极、第一源极和第一漏极；以及信号读取单元，条状接收电极、第一源极和第一极连接到存储节点，信号读取单元被配置读取存储电容中存储的电信号。如图14所示，多个交叉区域130位于显示区201，多个接收电路150在显示模组200上的正投影位于周边区202。显示区201用于显示画面，而周边区202不进行显示。由此，交叉区域130仅仅只有三个膜层(条状驱动电极、压电材料层和条状接收电极)，具有较高的光透过率，因此交叉区域130设置在显示区201对显示的影响较小，并且还可降低该指纹识别结构的功率，从而降低该指纹识别结构的功耗。而接收电路的膜层较多，透过率较小，将接收电路设置在周边区不会影响显示。因此，该示例提供的显示装置可兼顾较好的光透过率和较好的电信号质量。当然，本公开包括但不限于此，指纹识别结构也可完全设置在显示面板的周边区。需要说明的是，接收电路的结构和位置可参见图11和图12的相关描述。FIG14 is a schematic plan view of a display device provided according to an embodiment of the present disclosure. As shown in FIG14 , the display module 200 includes a display area 201 and a peripheral area 202 located in the display area 201, and the fingerprint recognition structure 100 also includes: a plurality of receiving circuits, the plurality of receiving circuits are electrically connected to a plurality of strip receiving electrodes, each receiving circuit includes: a storage capacitor including a first electrode and a second electrode; a first thin film transistor including a first gate electrode, a first source electrode and a first drain electrode; and a signal reading unit, the strip receiving electrode, the first source electrode and the first electrode are connected to the storage node, and the signal reading unit is configured to read the electrical signal stored in the storage capacitor. As shown in FIG14 , a plurality of intersection areas 130 are located in the display area 201, and the orthographic projections of the plurality of receiving circuits 150 on the display module 200 are located in the peripheral area 202. The display area 201 is used to display images, while the peripheral area 202 is not used for display. Therefore, the intersection area 130 has only three film layers (strip drive electrodes, piezoelectric material layers, and strip receiving electrodes) and has a high light transmittance. Therefore, the intersection area 130 is set in the display area 201, which has little effect on the display, and can also reduce the power of the fingerprint recognition structure, thereby reducing the power consumption of the fingerprint recognition structure. The receiving circuit has more film layers and a lower transmittance, and setting the receiving circuit in the peripheral area will not affect the display. Therefore, the display device provided by this example can take into account both good light transmittance and good electrical signal quality. Of course, the present disclosure includes but is not limited to this, and the fingerprint recognition structure can also be completely set in the peripheral area of the display panel. It should be noted that the structure and position of the receiving circuit can be seen in the relevant description of Figures 11 and 12.
例如，该显示装置可为电视机、手机、电脑、笔记本电脑、电子相册、导航仪等具有显示功能的电子设备。For example, the display device may be an electronic device with a display function, such as a television, a mobile phone, a computer, a laptop computer, an electronic photo album, a navigator, etc.
本公开一实施例还提供一种指纹识别结构的驱动方法。图15为根据本公开一实施例提供的一种指纹识别结构的驱动方法。在该指纹识别结构中，多个条状驱动电极分为依次设置的多个条状驱动电极组，各条状驱动电极组包括N个条状驱动电极，相邻的两个条状驱动电极组共享N-1个条状驱动电极，N为大于等于1的正整数。如图15所示，该指纹识别的驱动方法包括以下步骤S301-S302。An embodiment of the present disclosure also provides a driving method for a fingerprint recognition structure. FIG15 is a driving method for a fingerprint recognition structure provided according to an embodiment of the present disclosure. In the fingerprint recognition structure, a plurality of strip-shaped driving electrodes are divided into a plurality of strip-shaped driving electrode groups arranged in sequence, each strip-shaped driving electrode group includes N strip-shaped driving electrodes, and two adjacent strip-shaped driving electrode groups share N-1 strip-shaped driving electrodes, where N is a positive integer greater than or equal to 1. As shown in FIG15 , the driving method for fingerprint recognition includes the following steps S301-S302.
步骤S301：依次向多个条状驱动电极组施加驱动电压以分别驱动多个条状驱动电极组对应的压电材料层发出超声波。Step S301: applying driving voltages to a plurality of strip-shaped driving electrode groups in sequence to respectively drive the piezoelectric material layers corresponding to the plurality of strip-shaped driving electrode groups to emit ultrasonic waves.
例如，可依次向多个条状驱动电极组施加交变电压。For example, an alternating voltage may be applied to a plurality of strip-shaped driving electrode groups in sequence.
步骤S302：利用所述压电材料层接收被指纹反射的超声波并通过所述多个条状接收电极输出相应的指纹电信号。Step S302: using the piezoelectric material layer to receive the ultrasonic wave reflected by the fingerprint and outputting the corresponding fingerprint electrical signal through the plurality of strip-shaped receiving electrodes.
在本实施例提供的指纹识别结构的驱动方法中，多个条状驱动电极分为依次设置的多个条状驱动电极组，各条状驱动电极组包括N个条状驱动电极，相邻的两个条状驱动电极组共享N-1个条状驱动电极，N为大于等于1的正整数。当N＝1时，每个条状驱动电极组包括一个条状驱动电极；当N≥2时，每个条状驱动电极组包括至少两个条状驱动电极。在该驱动方法中，通过依次向多个条状驱动电极组施加驱动电压以分别驱动多个条状驱动电极组对应的压电材料层发出超声波，可避免多个条状驱动电极组同时驱动压电材料层发出超声波，从而可通过多个条状接收电极分别接收与多个条状驱动电极组对应的反射回波。由此，该指纹识别结构的驱动方法可利用多个条状驱动电极、多个条状接收电极和压电材料层通过扫描驱动方式来分别实现超声波的发射和接收。因此，该指纹识别结构的驱动方法不需要在每个交叉区域进行反射回波的接收，因此可减少该指纹识别结构中膜层的数量以提高该指纹识别结构的光透过率，从而使得该指纹识别结构可设置在显示面板上，进而可降低该指纹识别结构的功耗。In the driving method of the fingerprint recognition structure provided in this embodiment, the plurality of strip-shaped driving electrodes are divided into a plurality of strip-shaped driving electrode groups arranged in sequence, each strip-shaped driving electrode group includes N strip-shaped driving electrodes, and two adjacent strip-shaped driving electrode groups share N-1 strip-shaped driving electrodes, where N is a positive integer greater than or equal to 1. When N=1, each strip-shaped driving electrode group includes one strip-shaped driving electrode; when N≥2, each strip-shaped driving electrode group includes at least two strip-shaped driving electrodes. In the driving method, by sequentially applying driving voltages to the plurality of strip-shaped driving electrode groups to respectively drive the piezoelectric material layers corresponding to the plurality of strip-shaped driving electrode groups to emit ultrasonic waves, it is possible to avoid the plurality of strip-shaped driving electrode groups simultaneously driving the piezoelectric material layers to emit ultrasonic waves, so that the reflected echoes corresponding to the plurality of strip-shaped driving electrode groups can be respectively received by the plurality of strip-shaped receiving electrodes. Thus, the driving method of the fingerprint recognition structure can utilize the plurality of strip-shaped driving electrodes, the plurality of strip-shaped receiving electrodes and the piezoelectric material layer to respectively realize the emission and reception of ultrasonic waves by scanning driving. Therefore, the driving method of the fingerprint recognition structure does not need to receive the reflected echo in each intersection area, so the number of film layers in the fingerprint recognition structure can be reduced to improve the light transmittance of the fingerprint recognition structure, so that the fingerprint recognition structure can be set on the display panel, thereby reducing the power consumption of the fingerprint recognition structure.
例如，在一些示例中，N为大于等于2的正整数，各条状驱动电极组包括第一条状驱动电极和第二条状驱动电极，向各条状驱动电极组施加驱动电压包括：在第一时间点向第一条状驱动电极施加驱动电压以驱动第一条状驱动电极对应的压电材料层发出超声波；以及在第二时间点向第二条状驱动电极施加驱动电压以使第二条状驱动电极对应的压电材料层发出超声波的相位延迟于第一条状驱动电极对应的压电材料层发出超声波的相位，第二时间点延迟于第一时间点。For example, in some examples, N is a positive integer greater than or equal to 2, each strip driving electrode group includes a first strip driving electrode and a second strip driving electrode, and applying a driving voltage to each strip driving electrode group includes: applying a driving voltage to the first strip driving electrode at a first time point to drive the piezoelectric material layer corresponding to the first strip driving electrode to emit an ultrasonic wave; and applying a driving voltage to the second strip driving electrode at a second time point so that the phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the second strip driving electrode is delayed than the phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the first strip driving electrode, and the second time point is delayed than the first time point.
由此，该指纹识别结构的驱动方法在向各条状驱动电极组施加驱动电压以分别驱动该条状驱动电极组对应的压电材料层发出超声波时，可通过延迟驱动该条状驱动电极组中的第二条状驱动电极来实现超声波的聚焦(相增干涉)，从而既可提高发出的超声波在特定区域的强度或能量，从而提高该指纹识别性能，还可使得发出的超声波具有较好的方向性，从而可降低指纹的谷和脊之间的串扰，进而可提高指纹识别性能。当该指纹识别结构通过实现超声波的聚焦(相增干涉)来提高发出的超声波在特定区域或特定方向的强度或能量时，该指纹识别结构不仅可实现指纹识别，还可穿透手指，分辨该指纹是否为真的皮肤。需要说明的是，上述第二条状驱动电极对应的压电材料层发出超声波的相位与第一条状驱动电极对应的压电材料层发出超声波的相位的延迟量可根据实际情况进行测试得到。具体的超声波聚焦过程可参见图6A的相关描述。Thus, when the driving method of the fingerprint recognition structure applies a driving voltage to each strip driving electrode group to drive the piezoelectric material layer corresponding to the strip driving electrode group to emit an ultrasonic wave, the second strip driving electrode in the strip driving electrode group can be delayed to drive to achieve ultrasonic focusing (phase-increment interference), thereby increasing the intensity or energy of the emitted ultrasonic wave in a specific area, thereby improving the fingerprint recognition performance, and making the emitted ultrasonic wave have better directionality, thereby reducing the crosstalk between the valley and the ridge of the fingerprint, thereby improving the fingerprint recognition performance. When the fingerprint recognition structure increases the intensity or energy of the emitted ultrasonic wave in a specific area or a specific direction by achieving ultrasonic focusing (phase-increment interference), the fingerprint recognition structure can not only realize fingerprint recognition, but also penetrate the finger to distinguish whether the fingerprint is real skin. It should be noted that the delay amount of the phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the second strip driving electrode and the phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the first strip driving electrode can be tested according to actual conditions. The specific ultrasonic focusing process can be seen in the relevant description of Figure 6A.
例如，在一些示例中，在驱动每个条状驱动电极组对应的压电材料层发出超声波之后，利用压电材料层接收反射回波，然后通过多个条状接收电极输出电信号。For example, in some examples, after the piezoelectric material layer corresponding to each strip-shaped driving electrode group is driven to emit ultrasonic waves, the piezoelectric material layer is used to receive reflected echoes, and then electrical signals are output through a plurality of strip-shaped receiving electrodes.
例如，在一些示例中，N为大于等于3的正整数，各条状驱动电极组包括第一条状驱动电极、第二条状驱动电极和第三条状驱动电极，向各条状驱动电极组施加驱动电压包括：在第一时间点向第一条状驱动电极和第三条状驱动电极施加驱动电压以驱动第一条状驱动电极和第三条状驱动电极对应的压电材料层发出超声波；以及在第二时间点向第二条状驱动电极施加驱动电压以使第二条状驱动电极对应的压电材料层发出超声波的相位延迟于第一条状驱动电极和第三条状驱动电极对应的压电材料层发出超声波的相位，第二时间点延迟于第一时间点。For example, in some examples, N is a positive integer greater than or equal to 3, each strip driving electrode group includes a first strip driving electrode, a second strip driving electrode and a third strip driving electrode, and applying a driving voltage to each strip driving electrode group includes: applying a driving voltage to the first strip driving electrode and the third strip driving electrode at a first time point to drive the piezoelectric material layers corresponding to the first strip driving electrodes and the third strip driving electrodes to emit ultrasonic waves; and applying a driving voltage to the second strip driving electrode at a second time point so that the phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the second strip driving electrode is delayed than the phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the first strip driving electrodes and the third strip driving electrodes, and the second time point is delayed than the first time point.
由此，该指纹识别结构的驱动方法在向各条状驱动电极组施加驱动电压以分别驱动该条状驱动电极组对应的压电材料层发出超声波时，可通过先驱动该条状驱动电极组中的第一条状驱动电极和第三条状驱动电极，并延迟驱动该条状驱动电极组中的第二条状驱动电极来实现超声波的聚焦(相增干涉)，从而既可提高发出的超声波在特定区域的强度或能量，从而提高该指纹识别性能，还可使得发出的超声波具有较好的方向性，从而可降低指纹的谷和脊之间的串扰，进而可提高指纹识别性能。当该指纹识别结构通过实现超声波的聚焦(相增干涉)来提高发出的超声波在特定区域或特定方向的强度或能量时，该指纹识别结构不仅可实现指纹识别，还可穿透手指，分辨该指纹是否为真的皮肤。需要说明的是，上述第二条状驱动电极对应的压电材料层发出超声波的相位与第一条状驱动电极和第三条状驱动电极对应的压电材料层发出超声波的相位的延迟量可根据实际情况进行测试得到。具体的超声波聚焦过程可参见图6B的相关描述。Thus, when the driving method of the fingerprint recognition structure applies a driving voltage to each strip driving electrode group to drive the piezoelectric material layer corresponding to the strip driving electrode group to emit ultrasonic waves, the first strip driving electrode and the third strip driving electrode in the strip driving electrode group are driven first, and the second strip driving electrode in the strip driving electrode group is driven later to realize focusing of ultrasonic waves (phase-increment interference), thereby improving the intensity or energy of the emitted ultrasonic waves in a specific area, thereby improving the fingerprint recognition performance, and making the emitted ultrasonic waves have better directivity, thereby reducing the crosstalk between the valley and the ridge of the fingerprint, thereby improving the fingerprint recognition performance. When the fingerprint recognition structure increases the intensity or energy of the emitted ultrasonic waves in a specific area or a specific direction by realizing focusing of ultrasonic waves (phase-increment interference), the fingerprint recognition structure can not only realize fingerprint recognition, but also penetrate the finger to distinguish whether the fingerprint is real skin. It should be noted that the delay amount of the phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the second strip driving electrode and the phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the first strip driving electrode and the third strip driving electrode can be tested according to actual conditions. For the specific ultrasonic focusing process, please refer to the relevant description of FIG. 6B .
例如，在一些示例中，指纹识别结构还包括：多个接收电路，多个接收电路分别与多个条状接收电极电性相连，其中，各接收电路包括：存储电容，包括第一极和第二极；第一薄膜晶体管，包括第一栅极、第一源极和第一漏极；以及信号读取单元，条状接收电极、第一源极和第一极连接到存储节点，信号读取单元被配置读取存储电容中存储的电信号，利用压电材料层接收被指纹反射的超声波并通过条状接收电极输出相应的指纹电信号包括：在向条状驱动电极组施加驱动电压以驱动条状驱动电极组对应的压电材料层发出超声波时，向第一栅极施加开启信号以打开第一薄膜晶体管，以消除余震；根据表面回波到达时间，向第一漏极施加偏置电压，以对条状接收电极上的指纹电信号进行抬升，并将抬升后的指纹电信号存储在存储电容中；以及使用信号读取单元将抬升后的指纹电信号读出。For example, in some examples, the fingerprint recognition structure also includes: multiple receiving circuits, the multiple receiving circuits are electrically connected to multiple strip receiving electrodes respectively, wherein each receiving circuit includes: a storage capacitor, including a first electrode and a second electrode; a first thin film transistor, including a first gate, a first source and a first drain; and a signal reading unit, the strip receiving electrode, the first source and the first electrode are connected to the storage node, the signal reading unit is configured to read the electrical signal stored in the storage capacitor, and use the piezoelectric material layer to receive the ultrasonic wave reflected by the fingerprint and output the corresponding fingerprint electrical signal through the strip receiving electrode. The signal includes: when applying a driving voltage to the strip driving electrode group to drive the piezoelectric material layer corresponding to the strip driving electrode group to emit an ultrasonic wave, applying a start signal to the first gate to turn on the first thin film transistor to eliminate aftershocks; applying a bias voltage to the first drain according to the surface echo arrival time to lift the fingerprint electrical signal on the strip receiving electrode, and storing the lifted fingerprint electrical signal in the storage capacitor; and using the signal reading unit to read the lifted fingerprint electrical signal.
例如，在一些示例中，为了减少噪声信号，在指纹没有触摸该指纹识别结构时，可先发射超声波并接收反射回波以获得一个基准值(base value)；然后在指纹触摸到该指纹识别结构时，发射超声波并接收反射回波以获得一个指纹电信号；将指纹电信号与基准值相减，从而去掉噪声影响。For example, in some examples, in order to reduce noise signals, when the fingerprint does not touch the fingerprint recognition structure, ultrasonic waves may be emitted and reflected echoes may be received to obtain a base value; then, when the fingerprint touches the fingerprint recognition structure, ultrasonic waves may be emitted and reflected echoes may be received to obtain a fingerprint electrical signal; the fingerprint electrical signal may be subtracted from the base value to eliminate the influence of noise.
本公开一实施例还提供一种指纹识别结构的制作方法。该制作方法包括：提供衬底基板；在衬底基板的一侧形成第一电极层，第一电极层包括间隔设置的多个接收驱动电极；在第一电极层远离衬底基板的一侧形成压电材料层；以及在压电材料层远离第一电极层的一侧形成第二电极层，第二电极层包括沿间隔设置多个条状驱动电极，各条状驱动电极沿第一方向延伸，各条状接收电极沿第二方向延伸，第一方向和第二方向相交，多个条状驱动电极和多个条状接收电极相互交叉以形成多个交叉区域，压电材料层至少与多个交叉区域交叠。An embodiment of the present disclosure also provides a method for manufacturing a fingerprint recognition structure. The manufacturing method includes: providing a base substrate; forming a first electrode layer on one side of the base substrate, the first electrode layer including a plurality of receiving drive electrodes arranged at intervals; forming a piezoelectric material layer on a side of the first electrode layer away from the base substrate; and forming a second electrode layer on a side of the piezoelectric material layer away from the first electrode layer, the second electrode layer including a plurality of strip-shaped drive electrodes arranged at intervals, each strip-shaped drive electrode extending along a first direction, each strip-shaped receiving electrode extending along a second direction, the first direction and the second direction intersecting, the plurality of strip-shaped drive electrodes and the plurality of strip-shaped receiving electrodes intersecting each other to form a plurality of intersecting regions, and the piezoelectric material layer at least overlaps with the plurality of intersecting regions.
例如，在衬底基板的一侧形成第一电极层可通过图案化工艺直接在衬底基板的一侧形成包括多个条状接收电极的第一电极层。第一电极层的材料可采用金属材料。For example, the first electrode layer may be formed on one side of the base substrate by directly forming the first electrode layer including a plurality of strip-shaped receiving electrodes on one side of the base substrate through a patterning process. The material of the first electrode layer may be a metal material.
例如，在压电材料层远离第一电极层的一侧形成第二电极层包括：通过图案化工艺形成多个第一子驱动电极，各第一子驱动电极为沿第一方向延伸的条状子电极；在相邻的第一子驱动电极之间形成挡墙；以及通过电镀工艺在多个第一子驱动电极远离基板的一侧形成与多个第一条状驱动电极一一对应设置的多个第二子驱动电极，挡墙在垂直于第二电极层的方向上的高度大于第一子驱动电极在垂直于第二电极层的方向上的高度，多个第一子驱动电极和多个第二子驱动电极构成多个驱动电极，从而可形成厚度较大的第二电极层，进而产生具有较高强度的超声波。For example, forming a second electrode layer on a side of the piezoelectric material layer away from the first electrode layer includes: forming a plurality of first sub-driving electrodes through a patterning process, each first sub-driving electrode being a strip-shaped sub-electrode extending along a first direction; forming a retaining wall between adjacent first sub-driving electrodes; and forming a plurality of second sub-driving electrodes corresponding to the plurality of first strip-shaped driving electrodes on a side of the plurality of first sub-driving electrodes away from the substrate through an electroplating process, wherein a height of the retaining wall in a direction perpendicular to the second electrode layer is greater than a height of the first sub-driving electrode in a direction perpendicular to the second electrode layer, and the plurality of first sub-driving electrodes and the plurality of second sub-driving electrodes constitute a plurality of driving electrodes, thereby forming a second electrode layer with a larger thickness, thereby generating ultrasonic waves with a higher intensity.
例如，第二电极层的厚度大于10微米，从而适于加载较高的电压。通过上述的制作方法，可先在压电材料层远离第一电极层的一侧形成多个第一子驱动电极，第一子驱动电极无需制作得较厚，例如，第一子驱动电极的厚度范围为0.4-1微米；然后利用挡墙和电镀工艺在多个第一子驱动电极上电镀形成多个第二子驱动电极，从而得到厚度较厚的驱动电极。需要说明的是，在电镀工艺中，在电场的作用下，只有图案化的金属层上才能继续生长金属层，挡墙可以起到分隔作用，防止电镀的金属层互相连接。For example, the thickness of the second electrode layer is greater than 10 microns, so it is suitable for loading a higher voltage. Through the above-mentioned manufacturing method, a plurality of first sub-driving electrodes can be first formed on the side of the piezoelectric material layer away from the first electrode layer. The first sub-driving electrodes do not need to be made thicker. For example, the thickness of the first sub-driving electrodes ranges from 0.4 to 1 micron; then, a plurality of second sub-driving electrodes are electroplated on the plurality of first sub-driving electrodes using a retaining wall and an electroplating process, thereby obtaining a thicker driving electrode. It should be noted that in the electroplating process, under the action of the electric field, the metal layer can only continue to grow on the patterned metal layer, and the retaining wall can play a separating role to prevent the electroplated metal layers from connecting to each other.
例如，在一些示例中，第二电极的材料包括铜、银和铝中的一种或多种。For example, in some examples, the material of the second electrode includes one or more of copper, silver, and aluminum.
例如，挡墙可采用树脂材料制作，从而可具有较低的成本和较低的制作难度。For example, the retaining wall can be made of resin material, so that it can have lower cost and lower manufacturing difficulty.
(1)本公开实施例附图中，只涉及到与本公开实施例涉及到的结构，其他结构可参考通常设计。(1) In the drawings of the embodiments of the present disclosure, only the structures related to the embodiments of the present disclosure are involved, and other structures can refer to the general design.
(2)在不冲突的情况下，本公开同一实施例及不同实施例中的特征可以相互组合。(2) In the absence of conflict, the features of the same embodiment and different embodiments of the present disclosure may be combined with each other.
以上，仅为本公开的具体实施方式，但本公开的保护范围并不局限于此，任何熟悉本技术领域的技术人员在本公开揭露的技术范围内，可轻易想到变化或替换，都应涵盖在本公开的保护范围之内。因此，本公开的保护范围应以权利要求的保护范围为准。The above are only specific embodiments of the present disclosure, but the protection scope of the present disclosure is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present disclosure, which should be included in the protection scope of the present disclosure. Therefore, the protection scope of the present disclosure should be based on the protection scope of the claims.
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| CN201910199587.6ACN111695388B (en) | 2019-03-15 | 2019-03-15 | Fingerprint recognition structure and driving method thereof, and display device |
| PCT/CN2020/076766WO2020186983A1 (en) | 2019-03-15 | 2020-02-26 | Fingerprint recognition structure and driving method therefor, and display device |
| Application Number | Priority Date | Filing Date | Title |
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| CN201910199587.6ACN111695388B (en) | 2019-03-15 | 2019-03-15 | Fingerprint recognition structure and driving method thereof, and display device |
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| CN111695388A CN111695388A (en) | 2020-09-22 |
| CN111695388Btrue CN111695388B (en) | 2024-05-17 |
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| CN201910199587.6AActiveCN111695388B (en) | 2019-03-15 | 2019-03-15 | Fingerprint recognition structure and driving method thereof, and display device |
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